Integrated light source module

Abstract

To provide an integrated light source module allowing high integration by combining an optical semiconductor element and a plane optical waveguide.SOLUTION: An integrated light source module 100 comprises: a plane optical waveguide 50 including N incident ports 61 arrayed in alignment, M emission ports arrayed in alignment, and an optical waveguide connecting to the N incident ports 61 and the M emission ports; and N optical semiconductor elements 30 facing the N respective incident ports 61 and disposed so that light can enter the N incident ports 61. The integrated light source module 100 can irradiate an irradiated object with light emitted from the M emission ports.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] This invention relates to an integrated light source module. [Background technology]

[0002] LED print heads, which consist of an array of LEDs (light-emitting diodes), are known as optical heads used in image forming devices such as printers, copiers, and facsimile machines that employ the electrophotographic method (for example, Patent Document 1). In electrophotographic image forming devices, a light beam is irradiated onto a uniformly charged photoreceptor by the print head to form an electrostatic latent image on the photoreceptor. Toner is then supplied to the formed electrostatic latent image to form a toner image on the photoreceptor, and printing is performed by transferring and fixing the toner onto the paper.

[0003] Furthermore, printheads in which LEDs are replaced with semiconductor lasers are also known (for example, Patent Document 2). [Prior art documents] [Non-patent literature]

[0004] [Patent Document 1] Patent No. 5585292 [Patent Document 2] Japanese Patent Publication No. 2009-286048 [Overview of the project] [Problems that the invention aims to solve]

[0005] Because LEDs emit light in a Lambertsian distribution, their light extraction efficiency is low. In LED print heads, the basic configuration includes a focusing lens directly above the LED to improve light extraction efficiency (see Patent Document 1). Due to this configuration, it has been difficult to achieve high integration in LED print heads due to issues with optical characteristics. Furthermore, in printheads where the LEDs in an LED printhead are replaced with semiconductor lasers, lenses are used to increase the peak output of the semiconductor laser (see Patent Document 2). The requirement for lenses is the same as in LED printheads, and high integration was difficult.

[0006] This invention has been made in view of the above problems, and aims to provide an integrated light source module that enables high integration by combining an optical semiconductor element and a planar optical waveguide. [Means for solving the problem]

[0007] To solve the above problems, the present invention provides the following means.

[0008] An integrated light source module according to one aspect of the present invention comprises a planar optical waveguide having N inlet ports arranged in a line, M outlet ports arranged in a line, and optical waveguides connecting the N inlet ports and the M outlet ports, and N optical semiconductor elements facing each of the N inlet ports and arranged to allow light to be incident on the inlet ports, and capable of irradiating an object to be irradiated with light emitted from the M outlet ports.

[0009] In the above embodiment, the number of inlet ports (N) and the number of outlet ports (M) of the integrated light source module may be different.

[0010] In the above embodiment of the integrated light source module, the number of output ports (M) may be less than the number of input ports (N).

[0011] In the above embodiment of the integrated light source module, the number of output ports (M) may be greater than the number of input ports (N).

[0012] The integrated light source module according to the above embodiment is the integrated light source module according to any one of claims 1 to 4, wherein at least some of the spacings between adjacent N entrance ports are different.

[0013] In the integrated light source module according to the above aspect, the optical semiconductor element is a semiconductor laser element, and at least some of the N semiconductor laser elements may output laser light of different frequencies.

[0014] In the integrated light source module according to the above aspect, the optical semiconductor element is a semiconductor laser element, all of the N semiconductor laser elements output laser light of the same frequency, and at least some of the M output ports of the planar optical waveguide may output laser light of different frequencies.

[0015] The integrated light source module according to the above aspect may be a print head.

[0016] In the integrated light source module according to the above aspect, a plurality of the planar optical waveguides may be stacked, and a plurality of layers of the N optical semiconductor elements corresponding to the plurality of planar optical waveguides may be stacked.

[0017] The integrated light source module according to the above aspect may include a reflective film between the planar optical waveguides of the adjacent integrated light source modules arranged adjacent to each other.

Advantages of the Invention

[0018] According to the present invention, it is possible to provide an integrated light source module in which an optical semiconductor element and a planar optical waveguide are combined to enable high integration.

Brief Description of the Drawings

[0019] [Figure 1] It is a perspective schematic view of an integrated light source module of an embodiment. [Figure 2] It is a front schematic view of a part of an incident surface where an incident port of a PLC of the integrated light source module shown in FIG. 1 is arranged, as viewed from the front. [Figure 3] It is a cross-sectional schematic view of the integrated light source module shown in FIG. 1 cut along line A-A'. [Figure 4]This is a schematic perspective view showing the vicinity of the ejection surface in a PLC with a high-density ejection port configuration. [Figure 5] (a) is a conceptual plan view of an integrated light source module equipped with a planar optical waveguide having the same number of inlet and outlet ports. (b) is a front view of the planar optical waveguide of the integrated light source module shown in (a), viewed from the side with the inlet ports. (c) is a front view of the planar optical waveguide of the integrated light source module shown in (a), viewed from the side with the outlet ports. [Figure 6] (a) is a conceptual plan view of an integrated light source module equipped with a planar optical waveguide in which the number of output ports is less than the number of input ports. (b) is a front view of the planar optical waveguide of the integrated light source module shown in (a), as seen from the side with the input ports. (c) is a front view of the planar optical waveguide of the integrated light source module shown in (a), as seen from the side with the output ports. [Figure 7] (a) is a conceptual plan view of an integrated light source module equipped with a planar optical waveguide in which the number of inlet ports is less than the number of outlet ports. (b) is a front view of the planar optical waveguide of the integrated light source module shown in (a), as seen from the side with the inlet ports. (c) is a front view of the planar optical waveguide of the integrated light source module shown in (a), as seen from the side with the outlet ports. [Figure 8] (a) is a conceptual plan view of an integrated light source module equipped with a planar optical waveguide that combines the configuration features of the planar optical waveguides shown in Figures 5 to 7. (b) is a front view of the planar optical waveguide of the integrated light source module shown in (a), viewed from the side with the entrance port. (c) is a front view of the planar optical waveguide of the integrated light source module shown in (a), viewed from the side with the exit port. [Figure 9] This is a schematic perspective view of an integrated light source module of another embodiment. [Figure 10] Figure 9 is a schematic front view of the integrated light source module shown, as seen from the side with the exit port of the planar optical waveguide. [Figure 11]This is a schematic cross-sectional diagram showing each step of a method for stacking multiple planar optical waveguide layers, where (a) is the first step for fabricating the first planar optical waveguide layer, (b) is the second step, (c) is the third step, (d) is the fourth step, (e) is the first step for fabricating the second planar optical waveguide layer, (f) is the second step, (g) is the third step, and (h) is the fourth step. [Figure 12] These are schematic cross-sectional diagrams showing each step in a method for stacking multiple LD layers, with (a) being the first step, (b) the second step, (c) the third step, (d) a perspective view after the third step, (e) the fourth step, (f) the fifth step, and (g) a diagram showing the LD section and the PLC section joined together. [Figure 13] This is a schematic diagram of a typical image forming apparatus viewed from the axis of rotation of the photoreceptor drum. [Figure 14] This is a schematic diagram showing the photoconductor drum and print head viewed from approximately the side. [Modes for carrying out the invention]

[0020] The present invention will be described in detail below, with reference to the drawings as appropriate. The drawings used in the following description may show enlarged versions of key features for convenience in order to clearly illustrate the features of the present invention, and the dimensional ratios of each component may differ from those in reality. The materials, dimensions, etc., exemplified in the following description are examples only, and the present invention is not limited to them. It is possible to modify and implement the invention as appropriate within the scope of achieving its effects.

[0021] Figure 1 is a schematic perspective view of an integrated light source module according to one embodiment. Figure 2 is a schematic front view of a portion of the incident surface where the inlet of the planar optical waveguide of the integrated light source module shown in Figure 1 is located. Figure 3 is a schematic cross-sectional view of the integrated light source module 100 shown in Figure 1, cut along line AA'. Figure 4 is a conceptual perspective view showing the vicinity of the output surface of a PLC with a high-density output configuration. In Figure 4, only the core 51 and a portion of the cladding 52 below the core are depicted. This integrated light source module may use a light source that generates a specific frequency, or it may use a light source other than visible light.

[0022] The integrated light source module 100 shown in Figure 1 comprises a planar optical waveguide 50 having N aligned inlet ports (inlet ends) 61, M aligned outlet ports (outlet ends) 64 (see Figure 3), optical waveguides connecting the N inlet ports 61 and the M outlet ports 64, and N optical semiconductor elements 30 arranged opposite each of the N inlet ports 61 so that light can be incident on the N inlet ports 61, and the light emitted from the M outlet ports 64 can be irradiated onto the object to be irradiated. Here, "planar optical waveguide" is a component equivalent to a planar lightwave circuit (PLC), but in this specification, it will be referred to as "planar optical waveguide." Furthermore, a "planar optical waveguide" consists of a cladding and a core, and since it is usually a thin layer, it is sometimes referred to as a "planar optical waveguide layer." As for "optical semiconductor devices," examples include laser diodes (LDs) and light-emitting diodes (LEDs), but in the following explanation, we will use LDs as an example.

[0023] The integrated light source module 100 shown in Figure 1 further comprises a subcarrier (base) 20 on which an LD30 is provided on its upper surface 21 (see Figure 3), and a substrate 40 on which a PLC50 is provided on its upper surface 41 (see Figure 3). Note that some components shown in Figures 2 and 3 are omitted in Figure 1.

[0024] The integrated light source module according to this embodiment uses a planar optical waveguide (PLC) to deliver the output of each semiconductor laser chip to the PLC's output port (output end). By designing the PLC, such as by making the optical waveguide a curved path, the optical beams can be arranged at a high density at the output port (output end), thereby increasing the density of the optical output (see Figure 4). Furthermore, the integrated light source module according to the present invention can achieve a similar effect to light focusing by combining the optical semiconductor element with a PLC and narrowing the output port (output end) of the PLC, thereby eliminating the need for a lens. The absence of a lens allows for flexible arrangement of the output port configuration of the PLC. However, if it is desired to further focus the light from the output port of the PLC, a configuration with a lens in front of the output port may be used. Furthermore, in the integrated light source module according to this embodiment, the number of input ports (N) and output ports (M) of the PLC can be designed by merging and / or branching the optical waveguides through the design of the PLC. Furthermore, the integrated light source module according to this embodiment has a configuration in which multiple PLCs are stacked, and even with the same optical semiconductor element, the position of the output ports of the PLCs in different stages can be shifted to create a configuration that further increases the density of the optical output. Furthermore, the integrated light source module according to this embodiment can be used as a print head by arranging the PLC's output ports in a one-dimensional array. It can also be used as a light source for a display by arranging the PLC's output ports in a two-dimensional matrix. Furthermore, the integrated light source module according to this embodiment can emit light in a direction different from the optical axis of the optical semiconductor element, depending on the design of the PLC. This increases the degree of freedom in the arrangement of the integrated light source module and the object to be irradiated (for example, the photoreceptor drum).

[0025] The integrated light source module 100 includes N LDs 30 provided on the upper surface (front surface) 21 of the subcarrier 20. This integrated light source module 100 comprises N LD30s, for example, LD30-r1 emitting red light, LD30-g1 emitting green light, LD30-b1 emitting blue light, and so on, repeating in that order, resulting in rn LDs emitting red light, gn LDs emitting green light, and bn LDs emitting blue light (rn + gn + bn = N). Each LD is spaced apart from the others in the x-direction. In the integrated light source module 100, the N LD30s are arranged in a one-dimensional array, with LDs emitting red light, LDs emitting green light, and LDs emitting blue light repeating in that order, but the arrangement of the LDs is not limited to this. Here, the y-direction is the direction of light emission from LD30, i.e., the direction along the optical axis. The x-direction is approximately perpendicular to the y-direction. The z-direction is perpendicular to both the x-direction and the y-direction, and is the direction from subcarrier 20 towards LD30.

[0026] In this embodiment, among the three primary colors of light shown as examples, red light can be light with a peak wavelength of, for example, 610 nm to 750 nm, green light can be light with a peak wavelength of, for example, 500 nm to 560 nm, and blue light can be light with a peak wavelength of, for example, 435 nm to 480 nm. In addition to the red (R), green (G), and blue (B) light shown in this embodiment, other types of light can also be used, such as near-infrared light with wavelengths of 780 nm to 2.0 μm, mid-infrared light with wavelengths of 2.0 μm to 4.0 μm, far-infrared light with wavelengths of 4.0 μm to 1.0 mm, near-ultraviolet light with wavelengths of 200 nm to 380 nm, and far-ultraviolet light with wavelengths of 10 nm to 200 nm. The mounting order of red (R), green (G), and blue (B) as described using the drawings does not need to be in this order and can be changed as appropriate.

[0027] The integrated light source module 100 is configured to have all N LD30s on a single subcarrier 20. In this configuration, by setting the spacing between each LD30 to, for example, about 10 to 1000 μm, the N LD30s can be arranged at high density. This high-density arrangement of LD30s allows for a high-density arrangement of the N entrance ports in the PLC 50. This configuration is not limited to this one; for example, it could be a configuration in which each of the three primary color LDs (Red (R), Green (G), and Blue (B)) is provided on a separate subcarrier, or a configuration with the same number of subcarriers as the N LDs.

[0028] The LD30 is mounted on the subcarrier 20 as a bare chip (an unpackaged chip). The subcarrier 20 is composed of, for example, aluminum nitride (AlN), aluminum oxide (Al2O3), silicon (Si), etc. As shown in Figure 3, a first metal layer 75 (metal layer) and a second metal layer 76 are provided between the subcarrier 20 and the LD30. The LD30 is connected to the subcarrier 20 via the first metal layer 75, which is in contact with the subcarrier 20, and the second metal layer 76, which is in contact with the LD30. In this embodiment, for example, in the z direction, the subcarrier 20 and the LD30-r1 are connected via the first metal layer 75-r1 and the second metal layer 76-r1. As for the method of forming the first metal layer 75 and the second metal layer 76, known methods are available and are not particularly limited, but known techniques such as sputtering, vapor deposition, and coating of paste-formed metal can be used. The first metal layer 75 is composed of any alloy selected from the group consisting of, for example, an alloy of gold (Au) and tin (Sn), an alloy of tin (Sn) and copper (Cu), an alloy of indium (In) and bismuth (Bi), and a tin (Sn)-silver (Ag)-copper (Cu) solder alloy (SAC). The second metal layer 76 is composed of one or more metals selected from the group consisting of, for example, gold (Au), platinum (Pt), silver (Ag), lead (Pb), indium (In), and nickel (Ni). Thus, the first metal layer 75 can be composed of an alloy, and the second metal layer 76 can be composed of a single metal.

[0029] The substrate 40 is made of silicon (Si). The PLC 50 is fabricated on the upper surface 41 of the substrate 40, integrally with the substrate 40, by semiconductor processes including known photolithography and dry etching used when forming fine structures such as integrated circuits. As shown in Figures 1 and 2, the PLC 50 has N LD30 (30-r1, 30-g1, 30-b1, ...) and the same number of cores 51 (51-r1, 51-g1, 51-b1, ...) and a cladding 52 surrounding the cores. There are no particular restrictions on the thickness of the cladding 52 and the width dimension of each core, but for example, cores 51 with a width dimension of several microns are arranged in a cladding 52 with a thickness of about 50 μm.

[0030] The core 51 and cladding 52 are made of, for example, quartz. The refractive index of the core 51 is higher than that of the cladding 52 by a predetermined value. As a result, light reaching each core 51 propagates through each core while undergoing total internal reflection at the interface between each core and the cladding 52. The core 51 is doped with impurities such as germanium (Ge) in an amount corresponding to the aforementioned predetermined value.

[0031] As shown in Figures 1 and 3, the N entrance ports 61 (61-r1, 61-g1, 61-b1, ...61-rn, 61-gn, 61-bn) in the PLC50 are each positioned opposite to the optical axis of the light emitted from the exit ports 31 of the N LD30. In this specification, the term "inlet" in the PLC50 refers to the end face (exposed surface) where each core 51 is exposed to the inlet surface 62, as shown in Figure 2. In the PLC50, N inlet 61s (61-r1, 61-g1, 61-b1, ... 61-rn, 61-gn, 61-bn) are arranged on the inlet surface 62, corresponding to N LD30s (30-r1, 30-g1, 30-b1, ... 30-rn, 30-gn, 30-bn). In the integrated light source module 100, the optical axis of the red light emitted from the output port 31-r1 of LD30-r1 approximately coincides with the center of the input port 61-r1. Similarly, the output port of LD30-g1 faces the input port 61-g1 of core 51-g1. In the x and z directions, the optical axis of the green light emitted from LD30-g1 approximately coincides with the center of the input port 61-g1. The output port of LD30-b1 faces the input port 61-b1 of core 51-b1. In the x and z directions, the optical axis of the blue light emitted from LD30-b1 approximately coincides with the center of the input port 61-b1. With this configuration and arrangement, at least a portion of the red, green, and blue light emitted from LD30-r1, 30-g1, and 30-b1 can be incident on cores 51-r1, 51-g1, and 51-b1.

[0032] The red, green, and blue light emitted from the N LD30s enter the inlet ports 61 of the N cores 51, respectively, and then propagate through each core. The N cores 51 merge and / or branch off as they reach the M outlet ports 64 located on the exit surface 65. Herein, in this specification, "injection port" in PLC50 means the end face (exposed surface) of each core 51 that is exposed to the injection surface 65. In PLC50, M injection ports 64 (64-1, 64-2, ... 64-M) are arranged on the injection surface 65 according to the merging and branching of each core 51.

[0033] As shown in Figure 3, the subcarrier 20 is connected to the substrate 40 via the third metal layer 71, the fourth metal layer 72, and the fifth metal layer 73. In this embodiment, the surface 22 of the subcarrier 20 facing the substrate 40 and the surface 42 of the substrate 40 facing the subcarrier 20 are connected via the third metal layer 71, the fourth metal layer 72, the fifth metal layer 73, and the anti-reflective film 81. The melting point of the first metal layer 75 is higher than the melting point of the fifth metal layer 73.

[0034] The third metal layer 71 is provided in contact with the surface 22 by sputtering or vapor deposition, and is composed of one or more metals selected from the group consisting of, for example, gold (Au), platinum (Pt), silver (Ag), lead (Pb), indium (In), nickel (Ni), titanium (Ti), and tantalum (Ta). Preferably, the third metal layer 71 is composed of any metal selected from the group consisting of gold (Au), platinum (Pt), silver (Ag), lead (Pb), indium (In), and nickel (Ni). The fourth metal layer 72 is provided in contact with the surface 42 by sputtering or vapor deposition, and is composed of one or more metals selected from the group consisting of, for example, titanium (Ti), tantalum (Ta), and tungsten (W). Preferably, the fourth metal layer 72 is composed of tantalum (Ta). The fifth metal layer 73 is interposed between the third metal layer 71 and the fourth metal layer 72 and is composed of one or more alloys selected from the group consisting of, for example, AuSn, SnCu, InBi, SnAgCu, SnPdAg, SnBiIn, and PbBiIn. Preferably, the fifth metal layer 73 is composed of any alloy selected from the group consisting of AuSn, SnAgCu, and SnBiIn. As described above, the third metal layer 71 and the fourth metal layer 72 can be composed of a single metal, and the fifth metal layer 73 can be composed of an alloy, and the subcarrier 20 and the substrate 40 can be joined with a single metal and an alloy.

[0035] In this embodiment, an anti-reflective coating 81 is provided between the LD30 and the PLC50. For example, the anti-reflective coating 81 is integrally formed on the side surface 42 of the substrate 40 and the incident surface 62 of the PLC50 which has the entrance opening 61. However, the anti-reflective coating 81 may be formed only on the incident surface 62 of the PLC50 which has the entrance opening 61.

[0036] In addition to the incident surface 62 equipped with the inlet 61, the exit surface 65 equipped with the outlet 64 is also provided with an anti-reflective coating 82. Note that Figure 1 shows a schematic configuration of the integrated light source module 100, and the third metal layer 71, fourth metal layer 72, fifth metal layer 73 and anti-reflective coatings 81 and 82 are omitted.

[0037] The anti-reflective coatings 81 and 82 are films that prevent incident or outgoing light to the PLC 50 from being reflected in the opposite direction to the direction in which it enters each surface from the entrance 61 or exit 64, thereby increasing the transmittance of the incident or outgoing light. The anti-reflective coatings 81 and 82 are multilayer films formed by alternately stacking multiple types of dielectrics with predetermined thicknesses corresponding to the wavelengths of the incident light, which are red, green, and blue light. Examples of the aforementioned dielectrics include titanium oxide (TiO2), silicon oxide (SiO2), and aluminum oxide (Al2O3).

[0038] The outlet port 31 of the LD30 and the inlet port 61 of the PLC50 are positioned at a predetermined distance apart. The inlet port 61 faces the outlet port 31, and there is a gap 70 between the outlet port 31 and the inlet port 61 in the y-direction. Since the integrated light source module 100 is exposed to the air, the gap 70 is filled with air. Considering the amount of light used in the integrated light source module 100, the size of the gap 70 in the y-direction (the size of the gap) is preferably greater than, for example, 0 μm and 5 μm or less.

[0039] <First Embodiment of Planar Optical Waveguide> Figure 5(a) is a conceptual plan view of an integrated light source module 101 equipped with a PLC150 having the same number of inlet ports (N) and outlet ports (M) (N=M). Figure 5(b) is a front view of the PLC150 of the integrated light source module 101 shown in Figure 5(a), viewed from the inlet surface 162 side equipped with the inlet port 161. Figure 5(c) is a front view of the PLC150 of the integrated light source module 101 shown in Figure 5(a), viewed from the outlet surface 165 side equipped with the outlet port 164. In Figure 5, components other than the PLC150 and LD130 are omitted.

[0040] The PLC150 shown in Figure 5 has a configuration in which the input and output terminals of a planar waveguide correspond one-to-one. Because the input and output are determined one-to-one, the shape of the optical waveguide can be simplified, resulting in less loss from input to output.

[0041] The integrated light source module 101 shown in Figure 5 has N inlet ports 161-1, 161-2, 161-3, ... 161-(N-1), 161-N arranged in an array (one-dimensionally), and N outlet ports 164-1, 164-2, 164-3, ... 164-(N-1), 164-N arranged in an array, and is connected to N inlet ports 161 and N outlet ports 164. The PLC150 has optical waveguides 151 (151-1, 151-2, 151-3, ...151-(N-1), 151-N), and N optical semiconductor elements 130 (130-1, 130-2, 130-3, ...130-(N-1), 130-N) arranged in an array facing each of the N entrance ports 161 so that light can be incident on the entrance ports.

[0042] The PLC150 shown in Figure 5 has an N number of inlet ports, and the distance between adjacent inlet ports is d. i1 The configuration is equal, but it may also be a configuration where some intervals are different, or where all intervals are different. i1 There are no particular restrictions, but for example, it can be between 10 μm and 1000 μm. Furthermore, the PLC150 shown in Figure 5 has a configuration in which the spacing (distance) do1 between adjacent outlets of the M outlets is equal, but it may also have a configuration in which some spacings are different, or all spacings are different. There are no particular restrictions on the spacing do1, but for example it can be 10 μm to 1000 μm.

[0043] Furthermore, the PLC150 shown in Figure 5 has a distance d between adjacent inlet ports. i1 The configuration is such that the distance between adjacent outlets do1 is equal, but the distance d i1 The configuration may differ between and interval do1. Furthermore, the configuration may differ in some of the intervals between adjacent inlet ports and / or adjacent outlet ports. Also, the configuration may differ in all of the intervals between adjacent inlet ports and / or adjacent outlet ports.

[0044] Furthermore, while the PLC150 shown in Figure 5 has a configuration in which N inlet ports are arranged in an array (one-dimensionally) corresponding to the arrangement of N LD130s, a two-dimensional arrangement such as a matrix is ​​also acceptable. Furthermore, although the PLC150 shown in Figure 5 has a configuration in which M nozzles are arranged in an array (one-dimensional) pattern, it may also be configured in a two-dimensional pattern such as a matrix. The configuration may consist of N inlet ports arranged in an array (one-dimensional) and M outlet ports arranged in a matrix or other two-dimensional arrangement, or conversely, the configuration may consist of N inlet ports arranged in a matrix or other two-dimensional arrangement and M outlet ports arranged in an array (one-dimensional) arrangement.

[0045] The N LD130s shown in Figure 5 can be configured such that all LDs have the same frequency, some LDs have different frequencies, or all LDs have different frequencies. Furthermore, the N LD130s shown in Figure 5 can be configured such that all LDs have the same output, some LDs have different outputs, or all LDs have different outputs.

[0046] Furthermore, although the N LD130 shown in Figure 5 are configured such that the output ports of all LDs are substantially aligned on the same plane (at the same position in the y-direction), it is also possible for some LDs to have output ports at different positions in the y-direction, or for all LDs to have output ports at different positions in the y-direction.

[0047] Furthermore, although the N LD130s shown in Figure 5 are arranged in an array (one-dimensional) configuration, they may also be arranged in a two-dimensional configuration such as a matrix.

[0048] <Second Embodiment of Planar Optical Waveguide> Figure 6(a) is a conceptual plan view of an integrated light source module 102 equipped with a PLC250 in which the number of inlet ports (N) and the number of outlet ports (M) are different, and the number of outlet ports is less than the number of inlet ports (N>M). Figure 6(b) is a front view of the PLC250 of the integrated light source module 102 shown in Figure 6(a), as seen from the inlet surface 262 side equipped with the inlet port 261. Figure 6(c) is a front view of the PLC250 of the integrated light source module 102 shown in Figure 6(a), as seen from the outlet surface 265 side equipped with the outlet port 264. In Figure 6, components other than the PLC250 and LD230 are omitted.

[0049] The PLC250 shown in Figure 6 has a configuration in which the number of output terminals is less than the number of input terminals of the planar optical waveguide. For example, if the output from one optical semiconductor element is weak, the output can be increased by combining multiple optical waveguides. Furthermore, it is possible to mix light emitted from optical semiconductor elements of the same frequency within the optical waveguide to produce different frequencies, or to mix optical semiconductor elements of different frequencies to obtain an output of a specific frequency.

[0050] The integrated light source module 102 shown in Figure 6 has N entrance ports 261-1, 261-2, 261-3, ... 261-(N-1), 261-N arranged in an array (one-dimensionally), M exit ports 264-1, ... 264-M arranged in an array, and optical waveguides 251 (251-1, 251-2, 221) connecting the N entrance ports 261 and the M exit ports 264. The PLC250 has -3, ...251-(N-1), 251-N) and optical waveguides 252 (252-1, ...252-M), and N optical semiconductor elements 230 (230-1, 230-2, 230-3, ...230-(N-1), 230-N) arranged in an array facing each of the N entrance ports 261 so that light can be incident on the entrance ports. Here, within the PLC250, a portion of the N optical waveguides 251 are combined to form M (N>M) optical waveguides 252.

[0051] In the PLC250 shown in Figure 6, optical waveguides 251-1 and 251-2 merge at a merging point g1 to form optical waveguide 252-1. With this configuration, the laser light emitted from LD230-1, incident at the entrance 261-1 of optical waveguide 251-1, and propagating through optical waveguide 251-1, and the laser light emitted from LD230-2, incident at the entrance 261-2 of optical waveguide 251-2, and propagating through optical waveguide 251-2, merge at a merging point g1, and the merged laser light propagates through optical waveguide 252-1 and is emitted from the exit 264-1. Furthermore, optical waveguides 251-(N-1) and 251-N merge at gM to form optical waveguide 252-M. With this configuration, the laser light emitted from LD230-(N-1), incident at the entrance 261-(N-1) of optical waveguide 251-(N-1), and propagating through optical waveguide 251-(N-1), and the laser light emitted from LD230-N, incident at the entrance 261-N of optical waveguide 251-N, and propagating through optical waveguide 251-N merge at the merge point gM, and the merged laser light propagates through optical waveguide 252-M and is emitted from the exit 264-M.

[0052] The PLC250 shown in Figure 6 is configured such that the optical waveguides that merge at merging position g1, the optical waveguides that merge at a merging position not shown, and the optical waveguides that merge at merging position gM are connected to the output port without further merging. However, the optical waveguides may be configured to merge one or more times at predetermined merging positions located behind these merging positions in the y-direction. Furthermore, the PLC250 shown in Figure 6 may be configured in such a way that all optical waveguides always merge at least once between the input and output surfaces, or it may be configured in such a way that there are optical waveguides that never merge with any other optical waveguides (i.e., a configuration in which merging optical waveguides and non-merging optical waveguides are mixed).

[0053] The PLC250 shown in Figure 6 has N inlet ports, and the distance between adjacent inlet ports is d. i2 Similar to the PLC150 shown in Figure 5, the configuration is the same, but it is also acceptable for some of the spacings to be different, or for all of the spacings to be different. Furthermore, the PLC150 shown in Figure 6 may have a configuration in which the distance (do2) between adjacent M nozzles is equal, or some of the intervals may be different, or all of the intervals may be different, similar to the PLC150 shown in Figure 5.

[0054] Furthermore, while the PLC250 shown in Figure 6 has a configuration in which N inlet ports are arranged in an array (one-dimensionally) corresponding to the arrangement of N LD230s, it is also possible to have a two-dimensional arrangement such as a matrix, as is the case with the PLC150 shown in Figure 5. Furthermore, while the PLC250 shown in Figure 6 has a configuration in which M nozzles are arranged in an array (one-dimensionally), it is also possible to have a two-dimensional arrangement such as a matrix, similar to the PLC150 shown in Figure 5. The configuration may be one in which N inlet ports are arranged in an array (one-dimensional) and M outlet ports are arranged in a matrix or other two-dimensional arrangement, or conversely, one in which N inlet ports are arranged in a matrix or other two-dimensional arrangement and M outlet ports are arranged in an array (one-dimensional) arrangement, as is the case with the PLC150 shown in Figure 5.

[0055] The N LD230s shown in Figure 6 can be configured in a way that all LDs have the same frequency, some LDs have different frequencies, or all LDs have different frequencies, just like the N LD130s shown in Figure 5. Furthermore, the N LD230s shown in Figure 6 can be configured in a way that all LDs have the same output, some LDs have different outputs, or all LDs have different outputs, just like the N LD130s shown in Figure 5.

[0056] The N LD230s shown in Figure 6 are configured such that the output ports of all LDs are substantially aligned on the same plane (at the same position in the y-direction). However, it is also possible for some LDs to have output ports at different positions in the y-direction, or for all LDs to have output ports at different positions in the y-direction, as is the case with the N LD130s shown in Figure 5.

[0057] Furthermore, while the N LD230s shown in Figure 6 are arranged in an array (one-dimensional) configuration, they can also be arranged in a two-dimensional configuration, such as a matrix, similar to the N LD130s shown in Figure 5.

[0058] <Third embodiment of a planar optical waveguide> Figure 7(a) is a conceptual plan view of an integrated light source module 103 equipped with a PLC350 in which the number of inlet ports (N) and the number of outlet ports (M) are different, and the number of inlet ports is less than the number of outlet ports (N>M). Figure 7(b) is a front view of the PLC350 of the integrated light source module 103 shown in Figure 7(a), viewed from the inlet surface 362 side equipped with the inlet port 361. Figure 7(c) is a front view of the PLC350 of the integrated light source module 103 shown in Figure 7(a), viewed from the outlet surface 365 side equipped with the outlet port 364. In Figure 7, components other than the PLC350 and LD330 are omitted.

[0059] The PLC350 shown in Figure 7 has a configuration in which there are more output terminals than input terminals in the planar waveguide. For example, the output of a single optical semiconductor element can be divided by branching the optical waveguide, thereby improving the density of output terminals. Furthermore, by dividing the waveguide within the PLC for optical elements of a certain frequency, it becomes possible to obtain outputs with different characteristics (frequency characteristics) at high density.

[0060] The integrated light source module 103 shown in Figure 7 has N entrance ports 361-1, 361-2, 361-3, ... 361-(N-1), 361-N arranged in an array (one-dimensionally), and M exit ports 364-1, 364-2, 364-3, 364-4, 364-5, 364-6, ... 364-(M-2), 364-(M-1), 364-M arranged in an array, and optical waveguides 351 (351-1, 351-2, 321-) connecting the N entrance ports 361 and the M exit ports 364. The PLC350 has 3, ...351-(N-1), 351-N) and optical waveguides 352 (352-1a, 352-1b, 352-2a, 352-2b, 353-2a, 353-2b, ...352-(N-1)a, 352-(N-1)b), and N optical semiconductor elements 330 (330-1, 330-2, 330-3, ...330-(N-1), 330-N) arranged in an array facing each of the N entrance ports 361 so that light can be incident on the entrance ports.

[0061] In the PLC350 shown in Figure 7, the optical waveguide 351-1 is configured to branch into optical waveguides 352-1a and 352-1b at branching position b1. With this configuration, the laser light emitted from LD330-1, incident on the entrance port 361-1 of optical waveguide 351-1, and propagating through optical waveguide 351-1 is split at branching position b1. One of the split laser beams propagates through optical waveguide 352-1a and is emitted from the exit port 364-1. The other split laser beam propagates through optical waveguide 352-1b and is emitted from the exit port 364-2. Similarly, the optical waveguide 351-2 is configured to branch into optical waveguides 352-2a and 352-2b at branching position b2. With this configuration, the laser light emitted from LD330-2, incident at the entrance port 361-2 of optical waveguide 351-2, and propagating through optical waveguide 351-2 is split at branching position b2. One of the split laser beams propagates through optical waveguide 352-2a and is emitted from the exit port 364-3. The other split laser beam propagates through optical waveguide 352-2b and is emitted from the exit port 364-4. Similarly, optical waveguide 351-3 is configured to branch into optical waveguide 352-3a and optical waveguide 353-2b at branching position b3. With this configuration, the laser light emitted from LD330-3, incident on the entrance port 361-3 of optical waveguide 351-3, and propagating through optical waveguide 351-3 is split at branching position b3. One of the split laser beams propagates through optical waveguide 352-3a and is emitted from the exit port 364-5. The other split laser beam propagates through optical waveguide 352-3b and is emitted from the exit port 364-6. Similarly, optical waveguide 351-(N-1) is configured to branch into optical waveguide 352-(N-1)a and optical waveguide 353-(N-1)b at branching position b(N-1). With this configuration, the laser light emitted from LD330-(N-1), incident on the entrance port 361-(N-1) of optical waveguide 351-(N-1), and propagating through optical waveguide 351-(N-1) is decoupled at branching position b(N-1). One of the decoupled laser beams propagates through optical waveguide 352-(N-1)a and is emitted from the exit port 364-(M-2). The other decoupled laser beam propagates through optical waveguide 352-(N-1)b and is emitted from the exit port 364-(M-1). In the PLC350 shown in Figure 7, the optical waveguide 351-N is connected to the output port 364-M without branching. The PLC350 shown in Figure 7 may be configured such that all optical waveguides branch at least once between the input and output surfaces, or it may be configured such that there are optical waveguides that do not branch at all (i.e., a configuration in which branching and non-branching optical waveguides coexist).

[0062] The PLC350 shown in Figure 7 has a configuration in which the optical waveguides branched at branching position b1, branching position b2, branching position b3, and branching position b(N-1) are connected to the output port without further branching. However, the optical waveguides may be further branched one or more times at predetermined branching positions located behind these branching positions in the y-direction.

[0063] The PLC350 shown in Figure 7 has an N intake port, and the distance between adjacent intake ports is d.i3 Similar to PLC150 shown in Figure 5 and PLC250 shown in Figure 6, the configuration is the same, but it is also possible for some of the spacings to be different, or for all of the spacings to be different. Furthermore, the PLC250 shown in Figure 7 may have a configuration in which the distance (do3) between adjacent M nozzles is equal, or some of the intervals may be different, or all of the intervals may be different, similar to the PLC150 shown in Figure 5 and the PLC250 shown in Figure 6.

[0064] Furthermore, while the PLC350 shown in Figure 7 has a configuration in which N inlet ports are arranged in an array (one-dimensionally) corresponding to the arrangement of N LD330s, it is also possible to have a two-dimensional arrangement such as a matrix, as is the case with the PLC150 shown in Figure 5 and the PLC250 shown in Figure 6. Furthermore, while the PLC350 shown in Figure 7 has a configuration in which M nozzles are arranged in an array (one-dimensionally), it is also possible to have a two-dimensional arrangement such as a matrix, as is the case with the PLC150 shown in Figure 5 and the PLC250 shown in Figure 6. The configuration may be one in which N inlet ports are arranged in an array (one-dimensional) and M outlet ports are arranged in a matrix or other two-dimensional arrangement, or conversely, one in which N inlet ports are arranged in a matrix or other two-dimensional arrangement and M outlet ports are arranged in an array (one-dimensional) arrangement, as is the case with PLC150 shown in Figure 5 and PLC250 shown in Figure 6.

[0065] The N LD330s shown in Figure 7 can be configured in a way that all LDs have the same frequency, some LDs have different frequencies, or all LDs have different frequencies, just like the N LD130s shown in Figure 5 and the N LD230s shown in Figure 6. Furthermore, the N LD330s shown in Figure 7 can be configured in a way that all LDs have the same output, some LDs have different outputs, or all LDs have different outputs, just like the N LD130s shown in Figure 5 and the N LD230s shown in Figure 6.

[0066] The N LD330 shown in Figure 7 are configured such that the output ports of all LDs are substantially aligned on the same plane (at the same position in the y-direction). However, it is also possible for some LDs to have output ports at different positions in the y-direction, or for all LDs to have output ports at different positions in the y-direction, as is the case with the N LD130 shown in Figure 5 and the N LD230 shown in Figure 6.

[0067] Furthermore, while the N LD330s shown in Figure 7 are arranged in an array (one-dimensional) configuration, they can also be arranged in a two-dimensional configuration such as a matrix, similar to the N LD130s shown in Figure 5 and the N LD230s shown in Figure 6.

[0068] <Fourth embodiment of a planar optical waveguide> Figure 8(a) is a conceptual plan view of an integrated light source module 104 equipped with a PLC450 configured by combining the first to third embodiments of a planar optical waveguide. Figure 8(b) is a front view of the PLC450 of the integrated light source module 104 shown in Figure 7(a), viewed from the incident surface 462 side, which is equipped with an inlet 461. Figure 8(c) is a front view of the PLC450 of the integrated light source module 104 shown in Figure 8(a), viewed from the exit surface 465 side, which is equipped with an outlet 464. In Figure 8, components other than the PLC450 and LD430 are omitted.

[0069] The PLC450 shown in Figure 8 allows for the adjustment of multiple optical semiconductor elements to achieve desired output and frequency through the design of a planar waveguide. In this case, different frequencies can be obtained without using optical semiconductor elements of different frequencies, thus improving assembly and production efficiency when constructing light source modules.

[0070] The integrated light source module 104 shown in Figure 8 has N inlet ports 461-1, 461-2, 461-3, ... 461-(N-1), 461-N arranged in an array (one-dimensionally), M outlet ports 464-1, 464-2, 464-3, ... 464-(M-2), 464-(M-1), 464-M arranged in an array, and optical waveguides 451 (451-1, 451-2, 4) connecting the N inlet ports 461 and the M outlet ports 464. The PLC450 has 21-3, ...461-(N-1), 461-N) and optical waveguides 452 (452-1a, 452-1b, 452-2, ...452-(N-1)a, 452-(N-1)b), and N optical semiconductor elements 430 (430-1, 430-2, 430-3, ...430-(N-1), 430-N) arranged in an array facing each of the N inlet ports 461, with light incident on the inlet ports. Here, within the PLC450, a portion of the N optical waveguides 451 are combined and / or separated to become M optical waveguides 452, which reach the M outlet ports.

[0071] In the PLC450 shown in Figure 8, the optical waveguide 451-1 is configured to branch into optical waveguides 452-1a and 452-1b at branching position b1. With this configuration, the laser light emitted from LD430-1, incident at the entrance 461-1 of optical waveguide 451-1, and propagating through optical waveguide 451-1 is split at branching position b1. One of the split laser beams propagates through optical waveguide 452-1a and is emitted from the exit 464-1. The other split laser beam propagates through optical waveguide 452-1b and is emitted from the exit 464-2. Similarly, the optical waveguide 451-(N-1) is configured to branch into optical waveguide 452-(N-1)a and optical waveguide 452-(N-1)b at branching position bx. With this configuration, the laser light emitted from LD430-(N-1), incident on the entrance port 461-(N-1) of optical waveguide 451-(N-1), and propagating through optical waveguide 451-(N-1) is decoupled at branching position bx. One of the decoupled laser beams propagates through optical waveguide 452-(N-1)a and is emitted from the exit port 464-(M-2). The other decoupled laser beam propagates through optical waveguide 352-(N-1)b and is emitted from the exit port 464-(M-1). Furthermore, optical waveguides 451-2 and 451-3 merge at the merging point g1 to form optical waveguide 452-2. With this configuration, the laser light emitted from LD430-2, incident at the entrance 461-2 of optical waveguide 451-2, and propagating through optical waveguide 451-2, and the laser light emitted from LD430-3, incident at the entrance 461-3 of optical waveguide 451-3, and propagating through optical waveguide 451-3, merge at the merging point g1, and the merged laser light propagates through optical waveguide 452-2 and is emitted from the exit 464-3. In the PLC450 shown in Figure 8, the optical waveguide 451-N is connected to the output port 464-M without merging or branching. The PLC450 shown in Figure 8 may be configured such that all optical waveguides either merge or diverge at least once between the input and output surfaces, or it may be configured such that there are optical waveguides that do not merge or diverge at all (i.e., a configuration in which optical waveguides that merge or diverge at least once and optical waveguides that do not merge or diverge at all are mixed).

[0072] In the PLC450 shown in Figure 8, the optical waveguides branched at branching position b1, branched at branching position bx, and merged at merging position g1 are connected to the output port without further branching or merging. However, the optical waveguides may be configured to branch and / or merge one or more times at predetermined branching and merging positions located behind these branching and / or merging positions in the y-direction.

[0073] The PLC450 shown in Figure 8 has a distance d between adjacent entrance ports of N ports. i4 Similar to PLC150 shown in Figure 5, PLC250 shown in Figure 6, and PLC350 shown in Figure 7, the configuration is the same, but it is also possible for some of the spacings to be different, or for all of the spacings to be different.

[0074] Furthermore, while the PLC450 shown in Figure 8 has a configuration in which N inlet ports are arranged in an array (one-dimensionally) corresponding to the arrangement of N LD430s, it is also possible to have a two-dimensional arrangement such as a matrix, as is the case with the PLC150 shown in Figure 5, the PLC250 shown in Figure 6, and the PLC350 shown in Figure 7. Furthermore, while the PLC450 shown in Figure 8 has a configuration in which M nozzles are arranged in an array (one-dimensionally), it is also possible to have a two-dimensional arrangement such as a matrix, as is the case with the PLC150 shown in Figure 5, the PLC250 shown in Figure 6, and the PLC350 shown in Figure 7. The configuration may be one in which N inlet ports are arranged in an array (one-dimensional) and M outlet ports are arranged in a matrix or other two-dimensional arrangement, or conversely, one in which N inlet ports are arranged in a matrix or other two-dimensional arrangement and M outlet ports are arranged in an array (one-dimensional) arrangement, as is the case with PLC150 shown in Figure 5, PLC250 shown in Figure 6, and PLC350 shown in Figure 7.

[0075] The N LD330s shown in Figure 7 can be configured in a way that all LDs have the same frequency, some LDs have different frequencies, or all LDs have different frequencies, just like the N LD130s shown in Figure 5, the N LD230s shown in Figure 6, and the N LD330s shown in Figure 7. Furthermore, the N LD330s shown in Figure 7 can be configured in a way that all LDs have the same output, some LDs have different outputs, or all LDs have different outputs, just like the N LD130s shown in Figure 5, the N LD230s shown in Figure 6, and the N LD330s shown in Figure 7.

[0076] The N LD430 shown in Figure 8 has a configuration in which the output ports of all LDs are substantially aligned on the same plane (at the same position in the y-direction). However, it is also possible for some LDs to have output ports at different positions in the y-direction, or for all LDs to have output ports at different positions in the y-direction, similar to the N LD130 shown in Figure 5, the N LD230 shown in Figure 6, and the N LD330 shown in Figure 7.

[0077] Furthermore, while the N LD430s shown in Figure 8 are arranged in an array (one-dimensional) configuration, they can also be arranged in a two-dimensional configuration such as a matrix, similar to the N LD130s shown in Figure 5, the N LD230s shown in Figure 6, and the N LD330s shown in Figure 7.

[0078] Figure 9 is a schematic perspective view of an integrated light source module 200 according to another embodiment.

[0079] The integrated light source module 200 of this embodiment, shown in Figure 9, comprises three planar optical waveguide layers (PLC) 50A, 50B, and 50C, each having N aligned inlet ports, M aligned outlet ports, and optical waveguides connecting the N inlet ports and M outlet ports, and three layers 30A, 30B, and 30C of N optical semiconductor elements (LDs), each corresponding to one of the three planar optical waveguide layers. The integrated light source module 200 of this embodiment shown in Figure 9 further includes a subcarrier (base) 20 with 30A, 30B, and 30C provided on its upper surface (front), and a substrate 40 with PLC50A, 50B, and 50C provided on its upper surface (front). Other components mentioned above are omitted from the illustration.

[0080] The integrated light source module 200 of this embodiment, shown in Figure 9, has a configuration comprising three planar optical waveguide layers (PLC) and three layers of N optical semiconductor elements (LDs) corresponding to each planar optical waveguide layer. However, it is not limited to three layers; it can have a configuration comprising two or more layers, such as four or more.

[0081] It is preferable to provide reflection films 85A and 85B respectively between the planar optical waveguide layer (PLC) 50A and the planar optical waveguide layer (PLC) 50A, and between the planar optical waveguide layer (PLC) 50B and the planar optical waveguide layer (PLC) 50C (see Fig. 10). This is because light interference between the layers can be suppressed.

[0082] As the reflection films 85A and 85B, a metal film can be used. As the material of the metal film, a metal material with high reflectivity is preferable. For example, Ru, Ta, Ti, W, etc. Also, when a metal film is used as the reflection films 85A and 85B, an effect that it is easy to maintain flatness during the lamination of the planar optical waveguide layer (PLC) can also be obtained.

[0083] Fig. 10 is a front schematic view seen from the surface having the emission ports of the PLCs 50A, 50B, and 50C in the integrated light source module 200 shown in Fig. 9. The intervals d A , d B , d C are all equal (d A = d B = d C = d), but the position of the emission port of the PLC 50B in the x - direction is shifted by 1 / 3 of the interval d with respect to the position of the emission port of the PLC 50A in the x - direction, and the position of the emission port of the PLC 50C in the x - direction is shifted by 1 / 3 of the interval d in the same direction with respect to the position of the emission port of the PLC 50B in the x - direction. With this arrangement configuration, the density of the emission ports in the x - direction of the entire PLC is increased to three times the original density.

[0084] Using Fig. 11, an example of a method for manufacturing a laminate in which a plurality of planar optical waveguide layers (PLCs) included in the integrated light source module as shown in Figs. 9 and 10 are laminated will be described. [[ID=二十九]] (1) Preparation of the substrate As shown in Fig. 11(a), a substrate 40 is prepared. As the substrate 40, for example, a Si substrate can be used. (2) Formation of the first - layer planar optical waveguide layer (PLC layer) Next, as shown in Figures 11(b) to (d), a planar optical waveguide layer (PLC layer) 50A is formed on the substrate 40. First, as shown in Figure 11(b), a cladding layer (undercladding layer) 50AA is formed by flame hydrolysis deposition (FHD) or the like. Next, as shown in Figure 11(c), a core layer 51A is formed by photolithography or reactive ion etching (RIE). Next, as shown in Figure 11(d), a cladding layer (overcladding layer) 50AB is formed to form the first PLC layer 50A. (3) Formation of the second planar optical waveguide layer (PLC layer) Next, as shown in Figures 11(e) to (h), a second PLC layer 50B is formed on the first PLC layer 50A. First, as shown in Figure 11(e), a metal film 85AA is deposited on the surface 50Aa of the first PLC layer 50A by sputtering or the like. For example, a metal film 85AA made of Ti, Ta, W, etc., can be used. The metal film 85AA is formed so as to conform to the irregularities on the surface of the first PLC layer. Surface irregularities occur on the surface of this metal film 85AA due to the irregularities on the surface of the PLC layer and variations in the deposition of the metal film. Next, as shown in Figure 11(f), the surface irregularities are reduced by dry or wet surface planarization methods (e.g., chemical mechanical polishing such as CMP) to form the base layer (consisting of a metal film) 85A of the second PLC layer. Next, as shown in Figures 11(g) and (h), the second PLC layer 50B can be formed by creating a cladding layer (undercladding layer) 50BA on the formed base layer 85A using the same method as shown in (2), creating a core layer 51B, and creating a cladding layer (overcladding layer) 50BB. (4) Formation of the third and subsequent planar optical waveguide layers (PLC layers) Using a similar method, it is possible to stack the third and subsequent planar optical waveguide layers (PLC layers).

[0085] Using Figure 12, an example of a method for fabricating a laminate consisting of multiple LD layers, as found in the integrated light source module shown in Figures 9 and 10, will be explained. The following explanation will use the case with two LD layers as an example. (1) Preparation of subcarriers As shown in Figure 12(a), a subcarrier 20 incorporating LD wiring, CMOS, etc., is prepared. (2) Formation of metal film for LD bonding As shown in Figure 12(b), bonding metal films M for bonding LDs are sequentially deposited on the subcarrier 20. (3) LD implementation As shown in Figure 12(c), the first layer LD30A and the second layer LD30B are mounted on the bonding metal film M and then fixed in place. Figure 12(d) is a perspective view of this state. (4) Filling with insulating material As shown in Figure 12(e), insulating material is filled in to form an insulating material layer NM, preventing the first layer LD30A and the second layer LD30B from collapsing. (5) Polishing of insulating materials As shown in Figure 12(f), the insulating material layer NM is polished down to the light-emitting portion of the LD to create the LD portion. (6) Connection between LD section and PLC section The LD section is rotated 90 degrees and joined to the PLC section to create an integrated light source module.

[0086] <Examples of application> As an example of the application of the integrated light source module according to the present invention, we will describe its use as a print head in an image forming apparatus employing an electrophotographic method. Figure 13 is a schematic diagram of a typical image forming apparatus viewed from the axis of rotation of the photoreceptor drum (the object to be irradiated). Figure 14 is a schematic diagram of the photoreceptor drum and print head viewed from approximately the side.

[0087] The image forming apparatus 10 shown in Figure 13 is a drum-shaped image carrier and comprises a photoreceptor drum 1 that rotates in the direction of the arrow, a charger 2 that charges the surface of the photoreceptor drum 1, a print head 3 which is an exposure means for forming an electrostatic latent image on the photoreceptor drum 1 charged by the charger 2 and applies an integrated light source module according to the present invention, a developer 4 which develops the electrostatic latent image formed on the photoreceptor drum 1 with toner to form a toner image, a transfer roller 5 which transfers the toner image on the photoreceptor drum 1 onto recording paper S, a fuser 6 which fixes the toner image transferred onto the recording paper S, a static eliminator 7 which removes static electricity to remove toner remaining on the photoreceptor drum 1, and a cleaner 8 which mechanically cleans the toner remaining on the photoreceptor drum 1.

[0088] The electrophotographic process in the image forming apparatus 10 shown in Figure 13 will be briefly explained. After the photoreceptor drum 1 is charged by the charger 2 (charging step), a laser beam emitted from the print head 3 is shone onto the photoreceptor drum 1 to form an electrostatic latent image on the photoreceptor drum 1 (exposure step). Next, the developer 4 deposits toner onto the electrostatic latent image on the photoreceptor drum 1 to form a toner image (development step). After this, the transfer unit 24 transfers the toner image formed on the photoreceptor drum 1 to the recording paper S (transfer step), and the fuser 6 applies pressure and heat to the toner image transferred onto the recording paper S to fuse it to the recording paper S and fix the toner in place (fixing step). [Explanation of symbols]

[0089] 3 Printheads 30, 130, 230, 330, 430 Optoelectronic semiconductor devices 50, 50A, 50B, 50C, 150, 250, 350, 450 Planar optical waveguide 61, 161, 261, 361, 461 Inlet 64, 164, 264, 364, 464 ejection ports 100, 101, 102, 103, 104, 200 Integrated Light Source Modules

Claims

1. A planar optical waveguide having N inlet ports arranged in a line, M outlet ports arranged in a line, and optical waveguides connecting the N inlet ports and the M outlet ports, N laser diodes or light-emitting diodes are arranged opposite each of the N entrance ports and capable of directing light into the entrance ports, A substrate on which the planar optical waveguide is provided on the upper surface, A subcarrier on which the laser diode or light-emitting diode is provided on the upper surface, Equipped with, The substrate and the subcarrier are connected via a metal layer. The aforementioned metal layer consists of a three-layer metal structure. The aforementioned emission ports are arranged in an array on the emission surface of the planar optical waveguide. A portion of the optical waveguides merges, and the number of exit ports (M) becomes less than the number of entrance ports (N). An integrated light source module capable of irradiating an object with light emitted from the M output ports.

2. The integrated light source module according to claim 1, wherein at least some of the spacings between adjacent N entrance ports are different.

3. The integrated light source module according to claim 1 or 2, wherein the N laser diodes or light-emitting diodes are laser diodes, and at least some of the N laser diodes output laser light of different frequencies.

4. The integrated light source module according to any one of claims 1 to 3, wherein the N laser diodes or light-emitting diodes are laser diodes, at least some of the N laser diodes are multiple laser diodes of the same frequency, and the laser light emitted from the laser diodes of the same frequency is combined into one and output from one of the M output ports of the planar optical waveguide.

5. The integrated light source module according to any one of claims 1 to 4, wherein the integrated light source module is a print head.

6. An integrated light source module according to any one of claims 1 to 5, wherein a plurality of the planar optical waveguides are stacked, and a plurality of layers of the N optical semiconductor elements corresponding to the plurality of planar optical waveguides are stacked.

7. The integrated light source module according to claim 6, further comprising a reflective film between the planar optical waveguides of adjacent integrated light source modules.

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