Cleanroom system
Patent Information
- Authority / Receiving Office
- JP · JP
- Patent Type
- Patents
- Current Assignee / Owner
- TAKENAKA CORP
- Filing Date
- 2022-07-28
- Publication Date
- 2026-07-31
AI Technical Summary
【0015】 本開示によれば、ハザード物質等の封じ込め対象物質を処理室に封じ込めた上で、扉を開閉することなく、一の処理室から他の処理室へ移動することができる。
Smart Images
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Abstract
Description
Technical Field
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[0001] The present disclosure relates to a clean room system.
Background Art
[0002] In the clean booth described in Patent Document 1, the air supply volume of the fan filter unit is adjusted so that an air flow flowing in the front-rear direction (one direction) from the external air supply port toward the first entrance is generated inside the work booth by the clean air (external air) supplied from the external air supply port to the work booth. The air flowing through the buffer space from the first entrance toward the second entrance does not flow backward into the work booth from the first entrance, and the air inside the work booth flows out from the first entrance to the buffer space.
Prior Art Documents
Patent Documents
[0003]
Patent Document 1
Summary of the Invention
Problems to be Solved by the Invention
[0004] Conventionally, when a plurality of processing rooms, which are clean rooms for handling substances to be contained such as hazardous substances, are provided, dressing rooms are provided in each processing room. Here, since it is necessary to contain substances to be contained such as hazardous substances in the processing room, the processing room and the dressing room are partitioned by an opening / closing door. As a result, to move from one processing room to another, one had to open and close the door of one processing room, leave the one processing room, enter another dressing room, and then open and close the door of the other dressing room to move to the other processing room. For this reason, it took time to move from one processing room to another.
[0005] An object of the present application is to move from one processing room to another without opening and closing a door after containing substances to be contained such as hazardous substances in the processing room. [Means for solving the problem]
[0006] A cleanroom system according to the first embodiment is characterized by comprising: a plurality of processing chambers for handling a substance to be contained; a passage section connected to the plurality of processing chambers via openings that allow entry and exit; a supply section for supplying clean air to the passage section; an exhaust section provided in each of the plurality of processing chambers for exhausting clean air supplied from the supply section and passing through the openings to the outside; an air barrier section provided in each of the openings for forming an air curtain separating the processing chamber and the passage section; a detection section for detecting objects passing through the openings; a control section that, when the detection section detects an object passing through the opening, activates the air barrier section to form an air curtain over the opening through which the object passes; and when the detection section detects that an object has passed through the opening, deactivates the air barrier section.
[0007] According to the configuration of the first embodiment, the clean air supplied from the supply unit flows into the processing chamber through the opening and is exhausted from the exhaust unit. As a result, a unidirectional airflow is formed from the passage to the processing chamber, so that hazardous substances and other substances to be contained are contained within the processing chamber.
[0008] Furthermore, when the detection unit detects an object passing through the opening, the air barrier unit activates, forming an air curtain at the opening that separates the processing chamber from the passageway. As a result, the leakage of hazardous substances and other containment targets from the processing chamber to the passageway is suppressed as the object passes through the opening.
[0009] Here, there are no doors at the openings that allow entry and exit to each processing room from the passageway. In other words, after containing hazardous substances and other substances to be contained in a processing room, it is possible to move from one processing room to another without opening or closing doors.
[0010] The cleanroom system according to the second embodiment is characterized in that, in the cleanroom system according to the first embodiment, the supply units are provided in multiple quantities corresponding to each of the openings.
[0011] According to the configuration of the second embodiment, multiple supply units are provided corresponding to each opening. Therefore, compared to the case where there is only one supply unit, a unidirectional airflow from the passage to the processing chamber can be effectively formed.
[0012] A cleanroom system according to a third embodiment is characterized in that, in the cleanroom system according to the first embodiment, a pair of guide sections are provided in the passage section so as to face each other in the horizontal direction, and a guide section is provided in the passage section to guide the air supplied from the supply section to the opening, and the air barrier section comprises an extrusion section for pushing out clean air and a retraction section for drawing in the clean air pushed out by the extrusion section, the extrusion section is provided in one of the guide sections, and the retraction section is provided in the other guide section.
[0013] According to the configuration of the third embodiment, the clean air supplied to the passage by the supply unit is guided by the guide unit and flows into the processing chamber. This regulates and speeds up the flow of clean air toward the opening, thereby suppressing the leakage of hazardous substances and other containment targets from the processing chamber into the passage.
[0014] Furthermore, the extrusion section constituting the air barrier is provided in one guide section, and the retraction section constituting the air barrier is provided in the other guide section. As a result, space is saved compared to the case where the air barrier and guide sections are provided separately. [Effects of the Invention]
[0015] According to this disclosure, hazardous substances and other substances to be contained can be sealed in a processing chamber and then moved from one processing chamber to another without opening or closing doors. [Brief explanation of the drawing]
[0016] [Figure 1] (A)(B) Schematic configuration diagrams showing a cleanroom system according to an embodiment of the present disclosure. [Figure 2] In the cleanroom system according to an embodiment of the present disclosure, it is a cross-sectional view showing a state where no worker or the like is passing through the opening. [Figure 3] In the cleanroom system according to an embodiment of the present disclosure, it is a side cross-sectional view showing a state where a worker or the like is passing through the opening. [Figure 4] In the cleanroom system according to an embodiment of the present disclosure, it is a side cross-sectional view showing a state where a worker or the like is passing through the opening. [Figure 5] In the cleanroom system according to an embodiment of the present disclosure, it is a plan cross-sectional view showing a state where no worker or the like is passing through the opening. [Figure 6] In the cleanroom system according to an embodiment of the present disclosure, it is a plan cross-sectional view showing a state where a worker or the like is passing through the opening. [Figure 7] It is a block diagram showing a control system of a control unit provided in the cleanroom system according to an embodiment of the present disclosure. [Figure 8] (A)(B) Schematic configuration diagrams showing a cleanroom system according to a comparative form with respect to an embodiment of the present disclosure.
Embodiments for Carrying Out the Invention
[0017] An example of the cleanroom system according to an embodiment of the present disclosure will be described using FIGS. 1 to 8.
[0018] The arrow H shown in each figure is the vertical direction of the structure in which the cleanroom system is provided, the arrow D is the depth direction of the structure, and the arrow W is the width direction of the structure. Note that the vertical direction is the vertical direction, and the depth direction and the width direction are the horizontal directions.
[0019] In the structure 10 equipped with the clean room system 100, as shown in FIGS. 1(A) and 1(B), a plurality of processing chambers 12 that constitute the clean room system 100 and are arranged side by side in the width direction are provided. Further, the structure 10 is provided with a passage portion 14 that constitutes the clean room system 100 and extends in the width direction, a dressing room 16 where workers change clothes, and a preparation room 18 through which equipment passes.
[0020] (Dressing room 16, Preparation room 18) As shown in FIGS. 1(A) and 1(B), the dressing room 16 and the preparation room 18 are arranged side by side in the width direction, and one room is provided for each. That is, one room is provided for each of the dressing room 16 and the preparation room 18 with respect to the plurality of processing chambers 12. <As shown in Figures 1(A) and 1(B), the passageway 14 extends in the width direction, and the multiple processing rooms 12, which are arranged in the width direction, are located on the opposite side of the passageway 14 from the changing rooms 16 and the preparation room 18.
[0026] In this embodiment, the processing chamber 12 is provided with three chambers. For convenience of explanation below, the processing chambers 12 may be referred to as processing chamber 12a, processing chamber 12b, and processing chamber 12c, starting from one side in the width direction (left side in the figure) and ending on the other side (right side in the figure). If the processing chambers 12 are not to be distinguished, the letters at the end will be omitted.
[0027] Furthermore, in the following explanation, a component whose reference numeral ends with 'a' corresponds to the component corresponding to processing chamber 12a, a component whose reference numeral ends with 'b' corresponds to the component corresponding to processing chamber 12b, and a component whose reference numeral ends with 'c' corresponds to the component corresponding to processing chamber 12c.
[0028] The side wall of the processing room 12 is provided with an opening 22 that allows entry and exit from the passageway 14. In other words, the passageway 14 is connected to multiple processing rooms 12 via openings 22 that allow entry and exit. The openings 22 do not have doors, and are rectangular in shape, extending vertically, allowing workers and equipment to pass through.
[0029] Furthermore, in the processing room 12, a pair of doors 26 are provided on the side wall opposite the opening 22 in the depth direction for exiting the processing room 12. One door 26 is used for workers to exit, and the other door 26 is used for equipment to exit. This processing room 12 is a room in which hazardous substances and other containment target substances (hereinafter sometimes simply referred to as "target substances") are generated, or a room in which target substances are handled.
[0030] [Supply unit 24, guide unit 28, exhaust unit 36] As shown in Figures 1(A) and 2, multiple supply units 24 are provided on the ceiling of the passageway 14 to supply clean air to the passageway 14. Specifically, each supply unit 24 is positioned so as to be aligned with the respective openings 22 in the depth direction when viewed from above. In addition, a pair of guide units 28 that guide the air supplied from the supply units 24 to the openings 22 are positioned opposite each other in the width direction, as shown in Figure 5. Specifically, the pair of guide units 28 are located in the passageway 14, and each of the pair of guide units 28 has a guide surface 30 formed thereon that guides the clean air supplied from the supply units 24 to the openings 22. When viewed from the width direction, the guide surface 30 is rectangular in shape and extends vertically, and the edge of the guide surface 30 is in contact with the edge of the opening 22.
[0031] Furthermore, as shown in Figures 1(A)(B) and 2, the side wall of the processing chamber 12 is provided with an exhaust section 36 that exhausts the clean air supplied to the passage section 14 by the supply section 24 and guided by the guide section 28 into the processing chamber 12 to the outside. Specifically, the exhaust section 36 is located in the lower part of the side wall of the processing chamber 12 that faces the opening 22 in the depth direction.
[0032] In this configuration, as shown in Figures 2 and 5, the clean air supplied to the passage section 14 by the supply section 24 is guided by the guide section 28 and flows into the processing chamber 12. Furthermore, the clean air that flows into the processing chamber 12 is exhausted from the exhaust section 36. In this way, a unidirectional airflow is formed from the passage section 14 to the processing chamber 12.
[0033] As a result, the cleanliness of the passageway 14 and the processing chamber 12 are, for example, grade B. In other words, the passageway 14 and the processing chamber 12 are considered cleanrooms.
[0034] [Air barrier section 40] As shown in Figure 6, each opening 22 is provided with an air barrier section 40 that forms an air curtain separating the processing chamber 12 from the passage section 14. This air barrier section 40 includes an extrusion section 42 that pushes out clean air and an intake section 44 that draws in the air pushed out by the extrusion section 42. In this embodiment, a so-called push-pull device is used for the air barrier section 40.
[0035] The extrusion section 42 is provided on one guide section 28, and the retraction section 44 is provided on the other guide section 28.
[0036] In this configuration, by operating the air barrier section 40, as shown in Figure 6, the extrusion section 42 pushes clean air toward the retraction section 44, and the retraction section 44 retracts the clean air pushed out by the extrusion section 42. As a result, an air curtain separating the processing chamber 12 and the passage section 14 is formed across the vertical direction of the opening 22.
[0037] In this embodiment, the airflow generated by each part is determined so that the air curtain airflow formed at the opening 22 is not obstructed by the unidirectional airflow from the passage 14 to the processing chamber 12.
[0038] [Detection units 50, 52] Furthermore, as shown in Figures 3 and 4, a pair of detection units 50 and 52 are provided on the ceiling of the processing room 12 and the ceiling of the passageway 14 to detect workers or equipment (hereinafter referred to as "workers, etc.") passing through the opening 22 without contact. Specifically, a detection unit 50 is provided on the ceiling of the processing room 12, and a detection unit 52 is provided on the ceiling of the passageway 14. Note that "workers, etc." is just one example of an object passing through.
[0039] In this configuration, the detection unit 52 detects a worker or the like attempting to pass through the opening 22, and the detection unit 50 detects the worker or the like after they have passed through the opening 22 (see Figure 3). Alternatively, the detection unit 50 detects a worker or the like attempting to pass through the opening 22, and the detection unit 52 detects the worker or the like after they have passed through the opening 22 (see Figure 4).
[0040] [Control Unit 60] As shown in Figure 7, the control unit 60 acquires detection information from the detection units 50 and 52. The control unit 60 also controls the supply unit 24, the exhaust unit 36, and the air barrier unit 40. The control of each unit by the control unit 60 will be explained later along with its operation.
[0041] (action) Next, the operation of the cleanroom system 100 according to this embodiment will be explained in comparison with the cleanroom system 300 according to a comparative embodiment. First, the differences in the configuration of the cleanroom system 300 according to the comparative embodiment will be mainly explained.
[0042] [Configuration of Cleanroom System 300 in a Comparative Example] The structure 310 equipped with the cleanroom system 300 in the comparative configuration is provided with multiple processing chambers 312 arranged in the width direction, which constitute the cleanroom system 300, as shown in Figures 8(A) and 8(B). There are three processing chambers 312. For the sake of convenience in the following explanation, the processing chambers 312 may be referred to as processing chamber 312a, processing chamber 312b, and processing chamber 312c, from one side in the width direction (left side in the figure) to the other side (right side in the figure). If the processing chambers 312 are not distinguished, the final letter will be omitted.
[0043] Furthermore, the structure 310 is provided with a changing room 316 and a preparation room 318 for each processing room 312.
[0044] Furthermore, the changing room 316 is equipped with a door 314 for entering the changing room 316 and a door 315 for moving from the changing room 316 to the processing room 312. Additionally, the preparation room 318 is equipped with a door 317 for entering the preparation room 318 and a door 319 for moving from the preparation room 318 to the processing room 312.
[0045] Furthermore, the processing room 312 is equipped with a pair of doors 326 for exiting the processing room 312. One door 326 is used for workers to exit, and the other door 326 is used for equipment to exit.
[0046] Furthermore, a supply unit 330 for supplying clean air to the changing room 316 is provided on the ceiling of the changing room 316, and an exhaust unit 332 for exhausting the clean air supplied to the changing room 316 by the supply unit 330 to the outside is provided on the side wall of the changing room 316. Similarly, the preparation room 318 is provided with a supply unit 336 for supplying clean air to the preparation room 318, and an exhaust unit 338 for exhausting the clean air supplied to the preparation room 318 by the supply unit 336 to the outside.
[0047] In this configuration, the cleanliness of the changing room 316 and the preparation room 318 are, for example, grade C.
[0048] Furthermore, a pair of supply units 340 for supplying clean air to each processing chamber 312 are provided on the ceiling of each processing chamber 312, and an exhaust unit 342 for exhausting the clean air supplied to the processing chamber 312 by the supply units 340 to the outside is provided on the side wall of the processing chamber 312.
[0049] In this configuration, the cleanliness of the processing chamber 312 is, for example, designated as Grade B.
[0050] [Effects of Cleanroom System 300 in Comparison Forms] In the comparative cleanroom system 300, a worker entering the processing room 312a enters the changing room 316a by opening and closing door 314a, as shown by the solid arrow in Figure 8(B). Furthermore, the worker enters the processing room 312a by opening and closing door 315a.
[0051] When a worker who has entered processing room 312a moves to processing room 312b, the worker in processing room 312a opens and closes door 326a to move outside processing room 312. The worker then opens and closes door 314b to enter changing room 316b. Furthermore, the worker opens and closes door 315b to enter processing room 312b.
[0052] Thus, in the cleanroom system 300, in order to move from processing room 312a to processing room 312b, the worker opens and closes door 326a, door 314b, and door 315b. In other words, the worker opens and closes the doors three times.
[0053] [Function of Cleanroom System 100]
[0054] In contrast, in the cleanroom system 100 according to this embodiment, as shown in Figures 2 and 5, the respective supply unit 24 and exhaust unit 36 are operated by the control unit 60 (see Figure 7), creating a unidirectional airflow from the passage 14 to the processing chamber 12. Specifically, when there is no entry or exit of workers, etc., between the passage 14 and the processing chamber 12 via the opening 22, the clean air supplied to the passage 14 by the supply unit 24 is guided by the guide unit 28 and flows into the processing chamber 12. Furthermore, the clean air that has flowed into the processing chamber 12 is exhausted from the exhaust unit 36. In this way, a unidirectional airflow from the passage 14 to the processing chamber 12 is created.
[0055] Here, a worker who wishes to enter the processing room 12a opens and closes door 16a, as shown by the solid arrow in Figure 1(B), to enter the changing room 16. Furthermore, the worker opens and closes door 16b to move to the passageway 14. When the worker who has moved to the passageway 14 attempts to enter the processing room 12a, the detection unit 52a shown in Figure 3 detects the worker or other person attempting to pass through the opening 22a.
[0056] When the detection unit 52a detects a worker or the like, the control unit 60 activates the air barrier unit 40a. As shown in Figure 6, the extrusion unit 42a pushes clean air towards the retraction unit 44a, and the retraction unit 44a retracts the clean air pushed out by the extrusion unit 42a. This creates an air curtain that separates the processing chamber 12a from the passage 14, extending vertically across the opening 22a.
[0057] Then, when workers pass through the air curtain and enter the processing chamber 12a, the detection unit 50a shown in Figure 3 detects the workers who have passed through the opening 22a. When the detection unit 50a detects workers, the control unit 60 deactivates the air barrier unit 40a. By deactivating the air barrier unit 40a, a unidirectional airflow is formed from the passage 14 to the processing chamber 12a.
[0058] Furthermore, when a worker who has entered processing room 12a moves to processing room 12b, the detection unit 50a shown in Figure 4 detects the worker or other person attempting to pass through the opening 22a.
[0059] When the detection unit 50a detects a worker or the like, the control unit 60 activates the air barrier unit 40a. As shown in Figure 6, the extrusion unit 42a pushes air toward the retraction unit 44b, and the retraction unit 44a draws in the clean air pushed out by the extrusion unit 42a. This creates an air curtain separating the processing chamber 12a from the passage 14, extending vertically across the opening 22a.
[0060] The workers then move through the air curtain to the passageway 14. Furthermore, the detection unit 52a shown in Figure 4 detects the workers who have passed through the opening 22a. When the detection unit 52a detects the workers, the control unit 60 deactivates the air barrier unit 40a. By deactivating the air barrier unit 40a, a unidirectional airflow is formed from the passageway 14 to the processing chamber 12a.
[0061] When a worker who has moved to the passageway 14 attempts to enter the processing room 12b, the detection unit 52b shown in Figure 3 detects the worker or other person attempting to pass through the opening 22b.
[0062] When the detection unit 52b detects a worker or the like, the control unit 60 activates the air barrier unit 40b. As shown in Figure 6, the extrusion unit 42b pushes clean air toward the retraction unit 44b, and the retraction unit 44b retracts the air pushed out by the extrusion unit 42b. This creates an air curtain that separates the processing chamber 12b from the passage 14, extending vertically across the opening 22b.
[0063] The workers then pass through the air curtain and enter the processing chamber 12b. Furthermore, the detection unit 50b shown in Figure 3 detects the workers who have passed through the opening 22b. When the detection unit 50b detects the workers, the control unit 60 deactivates the air barrier unit 40b. By deactivating the air barrier unit 40b, a unidirectional airflow is formed from the passage 14 to the processing chamber 12b.
[0064] Thus, in the cleanroom system 100, workers do not need to open or close doors to move from processing room 12a to processing room 12b.
[0065] (summary) As explained above, in the cleanroom system 100, the air barrier section 40a is deactivated when workers or others do not pass through the opening 22, and a unidirectional airflow is formed from the passage section 14 toward the processing chamber 12. Therefore, it is possible to suppress the leakage of the target substance being handled in the processing chamber 12 from the processing chamber 12 toward the passage section 14. In other words, the target substance can be contained within the processing chamber 12.
[0066] Furthermore, in the cleanroom system 100, when workers or other personnel pass through the opening 22, the air barrier unit 40 is activated, and an air curtain is formed across the vertical direction of the opening 22, separating the processing chamber 12 from the passageway 14. This prevents the target substance from leaking from the processing chamber 12 to the passageway 14 due to disturbances caused by workers or other personnel passing through the opening 22.
[0067] Furthermore, limiting the formation of the air curtain to when workers pass through the opening 22 is necessary because the air curtain draws in surrounding air, disrupting the airflow in the processing chamber 12. Additionally, it is necessary to prevent the air curtain from reducing the ventilation efficiency of the processing chamber 12.
[0068] Thus, in the cleanroom system 100, under normal circumstances when workers or other personnel do not pass through the opening 22, a unidirectional airflow is formed from the passageway 14 towards the processing chamber 12. Furthermore, when workers or other personnel pass through the opening 22, the air barrier 40 is activated, and an air curtain separating the processing chamber 12 from the passageway 14 is formed across the vertical direction of the opening 22.
[0069] As described above, in the cleanroom system 100, workers do not need to open or close doors to move from processing room 12a to processing room 12b. In other words, in the cleanroom system 100, the target substance can be contained in processing room 12 and then moved from one processing room 12 to another without opening or closing doors.
[0070] Furthermore, in the cleanroom system 100, multiple supply units 24 are provided to correspond to each of the openings 22. Therefore, compared to the case where there is only one supply unit, a unidirectional airflow from the passage 14 to the processing chamber 12 can be effectively formed.
[0071] Furthermore, in the cleanroom system 100, a guide unit 28 is located in the passage unit 14 to guide the air (clean air) supplied from the supply unit 24 to the opening 22. The clean air supplied to the passage unit 14 by the supply unit 24 is then guided by the guide unit 28 and flows into the processing chamber 12. As a result, the flow of clean air toward the opening 22 is regulated and accelerated, thereby suppressing the leakage of target substances from the processing chamber 12 into the passage unit 14.
[0072] Although this disclosure has described in detail a particular embodiment, it will be apparent to those skilled in the art that this disclosure is not limited to such embodiments, and that various other embodiments are possible within the scope of this disclosure. In the above embodiment, the detection units 50 and 52 detected workers, etc., without contact. However, for example, a worker attempting to pass through the opening 22 may operate the detection unit, and the detection unit may then detect the worker, etc. In other words, a worker attempting to pass through the opening 22 may be detected by operating the detection switch, which is a detection unit.
[0073] Furthermore, although not specifically explained in the above embodiments, the solid arrows shown in Figures 1(B) and 5(B) indicate the movement of workers, and the dashed-dot arrows indicate the movement of equipment. [Explanation of Symbols]
[0074] 12 Processing Rooms 14 Passage section 22 Opening 24 Supply section 28 Information Department 36 Exhaust section 40 Air barrier section 42 Extrusion section 44. Entrance 50 Detection unit 52 Detection unit 60 Control Unit 100 Cleanroom Systems
Claims
1. Multiple processing rooms for handling containment target materials, A passageway connected to multiple processing chambers via openings that allow entry and exit, A supply unit that supplies clean air to the aforementioned passage section, Each of the processing chambers is provided with an exhaust unit, which is positioned on the side wall of the processing chamber that is horizontally opposite to the opening, and exhausts the clean air supplied from the supply unit and that has passed through the opening to the outside. An air barrier section is provided in each of the aforementioned openings, forming an air curtain that separates the processing chamber and the passage section. A detection unit for detecting objects passing through the opening, When the detection unit detects an object passing through the opening, it activates the air barrier unit to form an air curtain over the opening through which the object passes, and when the detection unit detects that the object has passed through the opening, it deactivates the air barrier unit. A cleanroom system equipped with the following features.
2. Multiple supply units are provided to correspond to each of the aforementioned openings. The cleanroom system according to claim 1.
3. A pair of guide units are provided so as to face each other in the horizontal direction, and a guide unit is arranged in the passage to guide the air supplied from the supply unit to the opening. The air barrier section comprises an extrusion section that pushes out clean air and an intake section that draws in the clean air pushed out by the extrusion section. The extrusion portion is provided on one of the guide portions, and the retraction portion is provided on the other guide portion. The cleanroom system according to claim 1.