Braking method

Abstract

To provide a braking method capable of suppressing the damage of a workpiece in the case of division.SOLUTION: A braking method is a method for dividing a workpiece in which a division starting point is formed along a predetermined dividing line and includes: a preparation step 1001 of adhering a sheet, which includes no paste layer and of which the adhesion power is presented by heating, to a front face of the workpiece, disposing a lower surface side tape on a rear face of the workpiece and fixing an outer periphery of the lower surface side tape to an annular frame, thereby accommodating the workpiece, in which the sheet is laminated on the front face, in an opening of the annular frame; and a division step 1002 of holding a region, which is adjacent to a predetermined dividing line to be divided, from upper and lower sides of the workpiece between a pair of holding bars, pressing the workpiece in the region adjacent to the predetermined dividing line to be divided with a pressing bar at an opposite side of the pair of holding bars across the predetermined dividing line to be divided, and dividing the workpiece along the predetermined dividing line to be divided.SELECTED DRAWING: Figure 2

Description

Technical Field

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[0001] The present invention relates to a braking method.

Background Art

[0002] Workpieces such as glass, sapphire, and SiC are divided along a set division planned line to form a plurality of chips. When dividing a workpiece, for example, after irradiating a laser beam along the division planned line to form a modified layer inside the workpiece, it has been conventionally divided by various braking devices (see, for example, Patent Document 1).

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] In order to prevent the pressing bar from directly contacting the upper surface of the workpiece and damaging the upper surface of the workpiece, the braking device shown in Patent Document 1 disposed a film on the upper surface of the workpiece and pressed the workpiece with the pressing bar through the film to divide the workpiece. <​​​​​​​​​​​​To solve the above-mentioned problems and achieve the objective, the present invention provides a braking method for dividing a workpiece in which a dividing starting point is formed along a dividing line, comprising: a preparation step of accommodating the workpiece in which the sheet laminated on the upper surface is placed in an opening of the annular frame by adhering a sheet that does not have an adhesive layer and exhibits adhesive strength upon heating to the upper surface of the workpiece and arranging a lower side tape on the lower surface of the workpiece and fixing the outer circumference of the lower side tape to the annular frame; and a dividing step of accommodating the workpiece in the region adjacent to the dividing line to be divided by clamping a pair of clamping bars from above and below the workpiece, and pressing the workpiece in the region adjacent to the dividing line to be divided with a pressing bar on the opposite side of the pair of clamping bars across the dividing line to be divided, thereby dividing the workpiece along the dividing line to be divided. After performing the division step, an expansion step is performed to expand the lower side tape to form a gap between the small pieces formed by the division of the workpiece; after performing the expansion step, a sheet removal step is performed to remove the sheet from the upper surface of the workpiece; and after performing the expansion step, before performing the sheet removal step, a heating step is performed to heat the sheet to allow it to enter the gap. It is characterized by having the following features.

[0008] In the braking method described above, the lower side tape may be a sheet that does not have an adhesive layer and develops adhesive strength upon heating. [Effects of the Invention]

[0011] This invention has the effect of suppressing damage to the workpiece during the splitting process. [Brief explanation of the drawing]

[0012] [Figure 1] Figure 1 is a schematic perspective view showing the workpiece to be divided in the braking method according to Embodiment 1. [Figure 2] Figure 2 is a flowchart showing the flow of the braking method according to Embodiment 1. [Figure 3] Figure 3 is a perspective view showing the state in which the sheet is adhered to the surface of the workpiece during the preparation step of the braking method shown in Figure 2. [Figure 4] Figure 4 is a perspective view showing the preparation step of the braking method shown in Figure 2, with the bottom tape placed on the back surface of the workpiece and the annular frame fixed to the outer circumference of the bottom tape. [Figure 5]Figure 5 is a schematic perspective view showing an example of the configuration of a braking device that implements the divided steps of the braking method according to Embodiment 1. [Figure 6] Figure 6 is a schematic perspective view showing the configuration of the lower clamping unit of the clamping unit of the braking device shown in Figure 5. [Figure 7] Figure 7 is a schematic side view showing a partial cross-section of the configuration of the upper clamping unit of the braking device shown in Figure 5. [Figure 8] Figure 8 is a schematic side view showing a partial cross-section of the pressure bar of the braking device shown in Figure 5. [Figure 9] Figure 9 is a schematic front view showing a partial cross-section of the load measurement section as seen from the direction of arrow IX shown in Figure 8. [Figure 10] Figure 10 is a schematic side view showing a partial cross-section of the state in which the annular frame is fixed to the frame fixing unit during the divided step of the braking method shown in Figure 2. [Figure 11] Figure 11 is a schematic side view showing a partial cross-section of the state in which the detection unit detects the planned division line to be divided during the division step of the braking method shown in Figure 2. [Figure 12] Figure 12 is a schematic side view in partial cross-section showing the state in which a device adjacent to the planned division line to be divided is clamped between the clamping bars during the division step of the braking method shown in Figure 2. [Figure 13] Figure 13 is a schematic side view showing a partial cross-section of the state after the planned division line has been divided in the division step of the braking method shown in Figure 2. [Figure 14] Figure 14 is a schematic cross-sectional side view showing an enlarged portion of section XIV in Figure 13. [Figure 15] Figure 15 is a schematic cross-sectional view showing an enlarged view of section XV in Figure 14. [Figure 16] Figure 16 is a flowchart showing the flow of the braking method according to Embodiment 2. [Figure 17]FIG. 17 is a cross-sectional view schematically showing an extended step of the braking method shown in FIG. 16. [Figure 18] FIG. 18 is a cross-sectional view schematically showing a heating step of the braking method shown in FIG. 16. [Figure 19] FIG. 19 is a cross-sectional view schematically showing a sheet removal step of the braking method shown in FIG. 16.

MODE FOR CARRYING OUT THE INVENTION

[0013] A mode (embodiment) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited by the content described in the following embodiments. Further, the constituent elements described below include those that can be easily assumed by those skilled in the art and those that are substantially the same. Furthermore, the configurations described below can be combined as appropriate. Also, various omissions, substitutions, or changes in the configuration can be made without departing from the gist of the present invention.

[0014] 〔Embodiment 1〕 The braking method according to Embodiment 1 of the present invention will be described based on the drawings. FIG. 1 is a perspective view schematically showing a workpiece to be divided in the braking method according to Embodiment 1. FIG. 2 is a flowchart showing the flow of the braking method according to Embodiment 1. The braking method according to Embodiment 1 is a method of dividing the workpiece 200 shown in FIG. 1 into individual chips 210.

[0015] (Workpiece) The workpiece 200 to be divided in the breaking method according to Embodiment 1 is, for example, a disc-shaped semiconductor wafer or optical device wafer with a substrate 201 made of glass, sapphire, SiC, etc. As shown in Figure 1, the workpiece 200 has a plurality of intersecting division lines 203 set on its upper surface 202, and a device 204 is formed in the region demarcated by the division lines 203. In this invention, the substrate 201 of the workpiece 200 may be made of a material other than glass, sapphire, or SiC, and the device 204 may not be formed on it.

[0016] Device 204 is, for example, an integrated circuit such as an IC (Integrated Circuit) or LSI (Large Scale Integration), an image sensor such as a CCD (Charge Coupled Device) or CMOS (Complementary Metal Oxide Semiconductor), an optical element such as an LED (Light-Emitting Diode), or a memory (semiconductor memory device).

[0017] Furthermore, the workpiece 200 has a division starting point 205 formed along the division line 203. In Embodiment 1, the division starting point 205 is a modified layer formed inside the substrate 201 along the division line 203, but in the present invention, it may be a recessed processed groove from the surface 202 in addition to the modified layer. The modified layer refers to a region in which the density, refractive index, mechanical strength, and other physical properties are different from those of the surrounding area, and examples include a melted region, a cracked region, a dielectric breakdown region, a refractive index change region, and a region in which these regions are mixed. The modified layer has lower mechanical strength than other parts of the substrate 201.

[0018] (Braking method) The breaking method according to Embodiment 1 is a method for dividing a workpiece 200, on which a division starting point 205 is formed along a planned division line 203, into individual chips 210. Each chip 210 comprises a part of a substrate 201 and a device 204 formed on the surface of the substrate 201. As shown in Figure 2, the breaking method comprises a preparation step 1001 and a division step 1002.

[0019] (Preparation Steps) Figure 3 is a perspective view showing the state in which the sheet is adhered to the surface of the workpiece during the preparation step of the braking method shown in Figure 2. Figure 4 is a perspective view showing the state in which the bottom tape is placed on the back surface of the workpiece and the annular frame is fixed to the outer circumference of the bottom tape during the preparation step of the braking method shown in Figure 2.

[0020] Preparation step 1001 involves adhering a sheet 220, which does not have an adhesive layer and develops adhesive strength upon heating, to the surface 202 of the workpiece 200, and placing a bottom side tape 207 on the back surface 206, which is the underside of the workpiece 200, and fixing the outer circumference of the bottom side tape 207 to the annular frame 208, thereby housing the workpiece 200 with the sheet 220 laminated on its surface 202 into the opening 209 of the annular frame 208.

[0021] In Embodiment 1, in preparation step 1001, as shown in Figure 3, the bonding device 80 suction-holds the back surface 206 of the workpiece 200 to the holding surface 82 of the holding table 81, and heats the workpiece 200 with a heating unit disposed within the holding table 81. In Embodiment 1, in preparation step 1001, a disc-shaped sheet 220 having the same diameter as the workpiece 200 is placed on the surface 202 of the workpiece 200 held on the holding table 81, and the sheet 220 is in close contact with the surface 202 of the workpiece 200.

[0022] Sheet 220 is a so-called adhesive-free tape composed solely of a base material made of a non-adhesive thermoplastic resin such as polyolefin or polyethylene. When heated to a temperature exceeding its softening or melting point, Sheet 220 softens or melts and exhibits adhesive properties. Furthermore, Sheet 220 is stretchable at room temperature.

[0023] In Embodiment 1, in preparation step 1001, the bonding device 80 heats the sheet 220 via the workpiece 200 using a heating unit to a temperature above the softening point and below the melting point of the sheet 220. In Embodiment 1, in preparation step 1001, the bonding device 80 softens the sheet 220 and presses the sheet 220 against the workpiece 200 with the roller 83 while rolling the roller 83 on the sheet 220 to bond the sheet 220 to the surface 202 of the workpiece 200.

[0024] In the present invention, in preparation step 1001, after the sheet 220 is brought into close contact with the surface 202 of the workpiece 200, hot air may be sprayed onto the sheet 220 using a heat gun or the like to heat the sheet 220 and bond it, or a heating element may be built into the roller 83, and while the heating element heats the sheet 220, the roller 83 may press the sheet 220 against the surface 202 of the workpiece 200 to bond it. Alternatively, in the present invention, in preparation step 1001, the sheet 220 may be heated to a temperature above its melting point to melt the sheet 220 and bond it to the surface 202 of the workpiece 200.

[0025] In Embodiment 1, in preparation step 1001, the sheet 220 is adhered to the surface 202 of the workpiece 200, and then the workpiece 200 and the sheet 220 are cooled to room temperature. In Embodiment 1, in preparation step 1001, as shown in Figure 4, the central part of a disc-shaped lower side tape 207, which has a larger diameter than the workpiece 200, is attached to the back surface 206 of the workpiece 200, and an annular frame 208, whose inner diameter is larger than the outer diameter of the workpiece 200, is attached to the outer circumference of the lower side tape 207.

[0026] The lower side tape 207 is an adhesive tape comprising a base layer made of a resin having non-adhesive and flexible properties, and an adhesive layer laminated on the base layer and made of a resin having adhesive and flexible properties, with the adhesive layer being attached to the workpiece 200 and the annular frame 208. The lower side tape 207 is also stretchable. Thus, in Embodiment 1, in preparation step 1001, the workpiece 200, with the sheet 220 laminated on its surface 202, is placed in the opening 209 of the annular frame 208.

[0027] (Braking device) Next, the braking device 1 shown in Figure 5, which performs the splitting step, will be described. Figure 5 is a schematic perspective view showing an example of the configuration of a braking device that performs the splitting step of the braking method according to Embodiment 1. Figure 6 is a schematic perspective view showing the configuration of the lower clamping unit of the clamping unit of the braking device shown in Figure 5. Figure 7 is a schematic side view showing a partial cross-section of the configuration of the upper clamping unit of the clamping unit of the braking device shown in Figure 5. Figure 8 is a schematic side view showing a partial cross-section of the pressing bar of the braking device shown in Figure 5. Figure 9 is a schematic front view showing a partial cross-section of the load measuring section as seen from the direction of arrow IX shown in Figure 8.

[0028] The braking device 1 shown in Figure 5 is a device that divides a workpiece 200 into individual chips 210 by dividing it starting from a dividing point 205. As shown in Figure 5, the braking device 1 comprises a frame fixing unit 10, a detection unit 20, a clamping unit 40, a pressing bar 60, a control unit 100 which is a controller, a display unit 110, and an input unit (not shown).

[0029] The frame fixing unit 10 is used to fix the annular frame 208. The frame fixing unit 10 comprises a movable frame 11 that is mounted on the device body 2 so as to be movable in the X-axis direction parallel to the horizontal direction by an X-axis moving unit 30, and a frame fixing member 12 disposed on the movable frame 11.

[0030] The frame fixing member 12 is formed in an annular shape with inner and outer diameters equal to the inner and outer diameters of the annular frame 208, and its upper surface is a holding surface 13 on which the annular frame 208 is placed via the outer circumference of the lower side tape 207. The holding surface 13 is flat along the horizontal direction. In Embodiment 1, the frame fixing member 12 has a suction hole opening in the holding surface 13, which is connected to a suction source (not shown).

[0031] The frame fixing unit 10 fixes the annular frame 208, which is placed on the holding surface 13, to the holding surface 13 by attraction via the lower side tape 207, as the suction hole is attracted by the suction source. In this invention, if the annular frame 208 is made of a magnetic material, the frame fixing unit 10 may have a magnet (permanent magnet or electromagnet) placed inside the frame fixing member 12 and fix the annular frame 208 placed on the holding surface 13 by magnetic attraction. If the annular frame 208 is made of a non-magnetic material, the frame fixing unit 10 may be equipped with a clamping mechanism that holds the annular frame 208 between itself and the holding surface 13 to fix the annular frame 208. Furthermore, the frame fixing unit 10 is rotatable around an axis parallel to the Z-axis direction (also called the vertical direction) by a rotational drive mechanism (not shown).

[0032] The X-axis movement unit 30 is installed on the main body 2 of the device and includes a well-known ball screw that is rotatable around its axis, a well-known motor that moves the movement frame 11 and the frame fixing member 12 in the X-axis direction by rotating the ball screw around its axis, and a well-known guide rail 31 that supports the movement frame 11 so that it can move in the X-axis direction.

[0033] The detection unit 20 detects the planned division lines 203 of the workpiece 200, which has an annular frame 208 fixed by the frame fixing unit 10. The detection unit 20 is installed on a movable table 4 that is moved in the Y-axis direction, parallel to the horizontal direction and perpendicular to the X-axis direction, by a Y-axis moving unit 32 on a gate-shaped gate frame 3 which is erected from the main body of the device 2, straddling the guide rail 31 of the X-axis moving unit 30. By being installed on the movable table 4, the detection unit 20 is positioned to be freely movable in the Y-axis direction by the Y-axis moving unit 32.

[0034] The detection unit 20 includes an imaging camera 21 equipped with an image sensor such as a CCD (Charge Coupled Device) image sensor or a CMOS (Complementary MOS) image sensor, which images objects facing each other in the Z-axis direction parallel to the vertical direction. The detection unit 20 acquires the image captured by the image sensor and outputs the acquired image to the control unit 100. The detection unit 20 also images the workpiece 200 housed in the opening 209 of the annular frame 208 fixed by the frame fixing unit 10, and acquires an image for performing alignment, which involves aligning the planned division lines 203 of the workpiece 200 with the pressing bar 60, etc.

[0035] The gantry frame 3 and the mobile table 4 are flat plates with both surfaces parallel to the vertical and parallel to the Z-axis direction, and are stacked parallel to each other with a gap between them. The Y-axis movement unit 32 is installed on the gantry frame 3 and includes a well-known ball screw that is rotatable around its axis, a well-known motor that moves the mobile table 4 in the Y-axis direction by rotating the ball screw around its axis, and a well-known guide rail 33 that supports the mobile table 4 so that it can move in the Y-axis direction.

[0036] The clamping unit 40 clamps the device 204 of the workpiece 200 in the region adjacent to the division line 203 to be divided, from above and below along the Z-axis direction. As shown in Figure 5, the clamping unit 40 comprises a lower clamping unit 41 and an upper clamping unit 50.

[0037] The lower clamping unit 41 is positioned below the frame fixing unit 10 and presses from below the device 204, which is an area adjacent to the division line 203 of the workpiece 200 housed in the opening 209 of the annular frame 208 fixed to the frame fixing unit 10, to be divided. As shown in Figure 6, the lower clamping unit 41 comprises a bracket 42 that is provided to be able to move up and down in the Z-axis direction by a Z-axis movement unit 34, a rotating body 43 that is rotatably supported by the bracket 42 around its axis, and a plurality of rectangular clamping bars 44 of different lengths that protrude from the outer circumferential surface of the rotating body 43.

[0038] The rotating body 43 has its axis positioned parallel to the Y-axis direction, and both ends are rotatably supported by brackets 42. The rotating body 43 is rotated around its axis by a rotation mechanism (not shown). The multiple rectangular clamping bars 27 are each formed as a straight rectangular plate in the Y-axis direction with a constant thickness, and are formed to have various lengths with different lengths in the Y-axis direction. The length of the longest rectangular clamping bar 44 is equivalent to the length of the longest planned division line 203 of the workpiece 200, and the length of the shortest rectangular clamping bar 44 is equivalent to the length of the shortest planned division line 203 of the workpiece 200.

[0039] The orientation in which the multiple rectangular clamping bars 27 protrude is changed by the rotation of the rotating body 26. Of the multiple rectangular clamping bars 27, the rectangular clamping bar 27 positioned upward along the Z-axis direction from the rotating body 26 is positioned below the lower side tape 207 attached to the workpiece 200 housed in the opening 209 of the annular frame 208 fixed by the frame fixing unit 10 when lowered by the Z-axis moving unit 34, and above the workpiece 200 housed in the opening 209 of the annular frame 208 fixed by the frame fixing unit 10 when raised by the Z-axis moving unit 34. Of the multiple rectangular clamping bars 27, the rectangular clamping bar 27 positioned upward along the Z-axis direction from the rotating body 26 is positioned upward with its upper end to press upward from the back side 206 of the device 204 adjacent to the planned division line 203 of the workpiece 200 to be divided.

[0040] In other words, the lower clamping unit 41 can select the length of the upward-facing rectangular clamping bar 27 by changing the orientation of the rotating body 26 around its axis, and uses the selected rectangular clamping bar 27 to press the device 204 adjacent to the planned division line 203 of the workpiece 200 upward from the back surface 206 side.

[0041] The Z-axis movement unit 34 includes a well-known ball screw rotatably mounted around its axis, a well-known motor that raises and lowers the bracket 42 in the Z-axis direction by rotating the ball screw around its axis, and a well-known guide rail 35 that supports the bracket 42 so that it can be raised and lowered in the Z-axis direction.

[0042] The upper clamping unit 50 is positioned above the frame fixing unit 10 and clamps the device 204, which is located next to the planned division line 203 of the workpiece 200 housed in the opening 209 of the annular frame 208 fixed by the frame fixing unit 10, and is pressed from below by the lower clamping unit 41, between itself and the lower clamping unit 41. The upper clamping unit 50 is mounted on a movable base 5 which is moved in the Z-axis direction by a lifting unit 36 ​​on a movable table 4.

[0043] The movable base 5 is formed as a flat plate with both surfaces parallel to the Z-axis direction and is stacked on the movable table 4 with gaps between them. A horizontal member 6, with both surfaces 202 parallel to the horizontal direction, is fixed to the movable base 5.

[0044] The lifting unit 36 ​​is installed on the movable table 4 and includes a well-known ball screw that is rotatable around its axis, a well-known motor 37 that raises and lowers the movable base 5 in the Z-axis direction by rotating the ball screw around its axis, and a well-known guide rail 38 that supports the movable base 5 so that it can be raised and lowered in the Z-axis direction.

[0045] As shown in Figure 7, the upper clamping unit 50 comprises a cylinder unit 51, an upper clamping bar 52, and a slide unit 53. The cylinder unit 51 comprises a cylinder 54 fixed to the horizontal member 6, and a rod 55 formed in a rod shape parallel to the Z-axis direction, which is extendable and retractable from the cylinder 54, and whose lower end descends when extended from the cylinder 54.

[0046] The upper clamping bar 52 is formed as a rectangular plate with a constant thickness, a straight line in the Y-axis direction, and both surfaces parallel to the Z-axis direction, and its length in the Y-axis direction is equal to the length of the longest planned dividing line 203 of the workpiece 200. The lower end of the rod 55 of the cylinder unit 51 is fixed to the upper end of the upper clamping bar 52, and it is stacked on the movable base 5 with a gap between them. The upper clamping bar 52 faces the upward-facing rectangular clamping bar 27 from the rotating body 43 in the Z-axis direction.

[0047] Furthermore, the slide unit 53 supports the upper clamping bar 52 so that it can slide relative to the movable base 5 in the Z-axis direction. The slide unit 53 includes a linear guide rail 56 fixed to the movable base 5, which is one of the movable base 5 and the upper clamping bar 52, and parallel to the Z-axis direction, and a slider 57 fixed to the upper clamping bar 52, which is the other of the movable base 5 and the upper clamping bar 52, and slidably supported by the guide rail 56 in the longitudinal direction of the guide rail 56, i.e., in the Z-axis direction.

[0048] When the upper clamping bar 52 is raised by the lifting unit 36 ​​with the rod 55 extended, its lower end is positioned above the workpiece 200 housed in the opening 209 of the annular frame 208, which is fixed by the frame fixing unit 10. When it is lowered by the lifting unit 36, its lower end clamps between the rectangular clamping bar 44 and a device 204 adjacent to the planned dividing line 203 of the workpiece 200, which is pressed by the rectangular clamping bar 27 positioned upward along the Z-axis from the rotating body 26.

[0049] The pressing bar 60 presses the device 204 of the workpiece 200 in the area adjacent to the planned division line 203 on the opposite side in the Y-axis direction from the clamping bars 44 and 52 of the clamping unit 40, thereby braking (also called dividing) the workpiece 200 along the planned division line 203. As shown in Figure 7, the pressing bar 60 is mounted on a pressing movement base 62 which is mounted on a horizontal member 6 so as to be movable in the X-axis direction by a second X-axis movement unit 61.

[0050] The pressing and moving base 62 is formed with both surfaces parallel to the Z-axis direction and integrally comprising a thick-walled portion 63 at the upper end and a thin-walled portion 64 at the lower end, and is stacked on the upper clamping bar 52 with a gap between them. In Embodiment 1, the pressing and moving base 62 has surfaces of the thick-walled portion 63 and the thin-walled portion 64 on the side away from the upper clamping bar 52 that are on the same plane, and a step is formed between the thick-walled portion 63 and the thin-walled portion 64 on the upper clamping bar 52 side. In Embodiment 1, the pressing and moving base 62 is provided with a rectangular opening 65 that penetrates the thin-walled portion 64.

[0051] The second X-axis movement unit 61 is installed on the horizontal member 6 and includes a well-known ball screw that is rotatable around its axis, a well-known motor 66 that moves the pressing movement base 62 in the X-axis direction by rotating the ball screw around its axis, and a well-known guide rail 67 that supports the pressing movement base 62 so that it can move in the Z-axis direction.

[0052] The pressing bar 60 is formed in a rectangular plate shape that is linear in the Y-axis direction and has both surfaces parallel to the Z-axis direction, with its length in the Y-axis direction being equal to the length of the longest planned dividing line 203 of the workpiece 200. The pressing bar 60 has a tapered end 68 formed at its lower end, which gradually becomes thinner as it goes downwards. In Embodiment 1, the tapered end 68 has a surface on the upper clamping bar 52 side that is flat along the Z-axis direction, and the surface on the side away from the upper clamping bar 52 is inclined with respect to both the horizontal and Z-axis directions in a direction that gradually approaches the upper clamping bar 52 as it goes downwards.

[0053] Furthermore, the pressing bar 60 is supported by a pair of slide units 69 so as to be slidable in the Z-axis direction on the pressing movement base 62. The pair of slide units 69 are spaced apart in the Y-axis direction. Each slide unit 69 comprises a linear guide rail 691 fixed to the pressing movement base 62, which is one of the pressing movement base 62 and the pressing bar 60, and parallel to the Z-axis direction, and a slider 692 fixed to the pressing bar 60, which is the other of the pressing movement base 62 and the pressing bar 60, and supported by the guide rail 691 so as to be slidable in the longitudinal direction of the guide rail 691, i.e., in the Z-axis direction.

[0054] The pressing bar 60 is raised by the lifting unit 36 ​​so that its lower end is above the workpiece 200 housed in the opening 209 of the annular frame 208, which is fixed by the frame fixing unit 10. When lowered by the lifting unit 36, it presses downward in the Y-axis direction, positioning the device 204 of the workpiece 200 between the clamping bars 44 and 52 and the division line 203 to be divided. In Embodiment 1, the pressing bar 60 presses downward at a position where the distance in the Y-axis direction from the upper clamping bar 52 of the workpiece 200 is approximately 75% to 85% of the width of the tip 210. In the present invention, however, the pressing bar 60 only needs to press downward at a position where the distance in the Y-axis direction from the upper clamping bar 52 of the workpiece 200 is approximately 65% ​​to 95% of the width of the tip 210. Furthermore, if the pressing position of the pressing bar 60 is too close to the upper clamping bar 52 in the Y-axis direction, it is less likely to crack, and if it is too far, the pressing bar 60 will move toward the already cracked dividing line 206 and will not crack. Therefore, it is desirable for the pressing bar 60 to press downwards at a position where the distance in the Y-axis direction from the upper clamping bar 52 of the workpiece 200 is approximately 65% ​​to 95% of the width of the tip 210, preferably approximately 75% to 85% of the width of the tip 210. When the pressing bar 60 is lowered by the lifting unit 36, it presses downwards in the Y-axis direction, positioning the device 204 of the workpiece 200 between the clamping bars 44 and 52 and dividing the dividing line 203 to be divided.

[0055] Furthermore, the pressing bar 60 is fixed to the pressing and moving base 62 by a load measuring unit 70 shown in Figure 8. The load measuring unit 70 is located between a pair of slide units 69. As shown in Figures 8 and 9, the load measuring unit 70 includes a load meter 71 for measuring the value of the load applied by the pressing bar 60 to the workpiece 200 (hereinafter referred to as the load value), a holding member 72, a support member 73, a spring 75, and a support part 74 (shown only in Figure 9).

[0056] The load cell 71 measures the load value applied by the pressing bar 60 in the Z-axis direction to the workpiece 200. In Embodiment 1, it is a well-known load cell, but it is not limited to a load cell. The load cell 71 outputs the measured load value to the control unit 100. The load cell 71 is positioned within the opening 65 of the pressing and moving base 62.

[0057] The holding member 72 has one end fixed to the pressing bar 60, extends from the pressing bar 60 toward the pressing movable base 62, and has its other end positioned within the opening 65 of the pressing movable base 62. The other end of the holding member 72 supports the lower end of the load cell 71.

[0058] The support member 73 is positioned within the opening 65 of the pressing and moving base 62, with its upper end fixed to the upper inner surface of the opening 65 and its lower end supporting the upper end of the load cell 71. The support portion 74 is positioned within the opening 65 of the pressing and moving base 62, with its lower end fixed to the lower inner surface of the opening 65 and its upper end supporting the lower end of the holding member 72.

[0059] The spring 75 is positioned between the lower inner surface of the opening 65 and the other end of the holding member 72, and biases the pressing bar 60 upward relative to the pressing movable base 62 via the other end of the holding member 72. In Embodiment 1, the spring 75 biases the holding member 72 and the pressing bar 60 upward with a force corresponding to the combined mass of the pressing bar 60, the holding member 72 and the load cell 71. By biasing with the aforementioned force, the combined mass of the pressing bar 60, the holding member 72 and the load cell 71 cancels out, and the load cell 71 can measure a load value smaller than the combined mass of the pressing bar 60, the holding member 72 and the load cell 71. Thus, the braking device 1 is equipped with a load cell 71 that measures the load value at which the pressing bar 60 presses the workpiece 200.

[0060] The control unit 100 controls each of the above-described components of the braking device 1 to cause the braking device 1 to perform a splitting operation to split each of the planned splitting lines 203 of the workpiece 200. The control unit 100 is a computer having an arithmetic processing unit with a microprocessor such as a CPU (central processing unit), a storage device with memory such as ROM (read-only memory) or RAM (random access memory), and an input / output interface device. The arithmetic processing unit of the control unit 100 performs arithmetic processing according to a computer program stored in the storage device and outputs control signals for controlling the braking device 1 to each of the above-described units of the braking device 1 via the input / output interface device. The control unit 100 also determines the splitting result of the planned splitting lines 203 based on the load value measured by the load cell 71 and stores the splitting result in a one-to-one correspondence with the planned splitting lines 203.

[0061] The display unit 110 is connected to the control unit 100 and includes a display screen 111 that displays various information. The input unit is used when an operator inputs information to the control unit 100 of the braking device 1. The input unit is connected to the control unit 100 and outputs the input information to the control unit 100. The input unit includes a touch panel superimposed on the display screen 111 of the display unit 110.

[0062] (Division step) Next, the splitting step 1002 will be described. Figure 10 is a schematic side view in partial cross-section showing the state in which the annular frame is fixed to the frame fixing unit in the splitting step of the braking method shown in Figure 2. Figure 11 is a schematic side view in partial cross-section showing the state in which the detection unit detects the splitting line to be split in the splitting step of the braking method shown in Figure 2. Figure 12 is a schematic side view in partial cross-section showing the state in which the device adjacent to the splitting line to be split is clamped between the clamping bars in the splitting step of the braking method shown in Figure 2. Figure 13 is a schematic side view in partial cross-section showing the state in which the splitting line to be split has been split in the splitting step of the braking method shown in Figure 2. Figure 14 is a schematic side view in partial cross-section showing an enlarged portion of part XIV in Figure 13. Figure 15 is a schematic cross-sectional view showing an enlarged portion of part XV in Figure 14.

[0063] The splitting step 1002 involves gripping the device 204 in the region adjacent to the planned splitting line 203 with a pair of clamping bars 44 and 52 from above and below the workpiece 200, and simultaneously pressing the device 204 of the workpiece 200 in the region adjacent to the planned splitting line 203 with a pressing bar 60 on the opposite side of the pair of clamping bars 44 and 52 across the planned splitting line 203, thereby splitting the workpiece 200 along the planned splitting line 203.

[0064] In Embodiment 1, during the splitting step 1002, the braking device 1 first receives input conditions from an operator or the like by operating an input unit, and the control unit 100 receives and registers the splitting requirements. In Embodiment 1, during the splitting step 1002, when the control unit 100 receives an instruction from an operator or the like to start the splitting operation, the braking device 1 starts the splitting operation, which in Embodiment 1 is the splitting step 1002.

[0065] In Embodiment 1, during the splitting step 1002, the braking device 1 controls the Z-axis movement unit 34 via the control unit 100 to lower the lower clamping unit 41, extends the rod 55 via the cylinder unit 51 of the upper clamping unit 50, and raises the upper clamping unit 50 and the pressing bar 60 via the lifting unit 36. Also in Embodiment 1, during the splitting step 1002, the braking device 1 controls the second X-axis movement unit 61 via the control unit 100 to adjust the position of the pressing bar 60 in the X-axis direction so that the distance in the X-axis direction between the lower end of the upper clamping bar 52 and the lower end of the pressing bar 60 is 75% to 85% of the width of the tip 210 included in the splitting conditions. However, in the present invention, it is sufficient to adjust the position of the pressing bar 60 in the X-axis direction so that the distance in the X-axis direction between the lower end of the upper clamping bar 52 and the lower end of the pressing bar 60 is 65% to 95% of the width of the tip 210.

[0066] Furthermore, in Embodiment 1, during the splitting step 1002, the braking device 1 controls the X-axis movement unit 30 via the control unit 100 to retract the frame fixing unit 10 from between the clamping units 41 and 50. In Embodiment 1, during the splitting step 1002, the braking device 1 places the annular frame 208, which houses the workpiece 200 in its opening 209, onto the holding surface 13 of the frame fixing unit 10. In Embodiment 1, during the splitting step 1002, the braking device 1 operates the suction source via the control unit 100 to suction and fix the annular frame 208 to the holding surface 13 of the frame fixing unit 10, as shown in Figure 10.

[0067] In Embodiment 1, during the splitting step 1002, the braking device 1 controls the X-axis movement unit 30 and the Y-axis movement unit 32 via the control unit 100 to position the detection unit 20 above the planned splitting line 203 (hereinafter referred to as reference numeral 203-1) to be split, as shown in Figure 11, based on the splitting order of the splitting conditions. The detection unit 20's imaging camera 21 then captures an image of the planned splitting line 203-1 of the workpiece 200, including the planned splitting line 203-1 itself. In Embodiment 1, during the splitting step 1002, the braking device 1 detects the planned splitting line 203-1 based on the image captured by the detection unit 20's imaging camera 21 via the control unit 100.

[0068] In Embodiment 1, during the splitting step 1002, the braking device 1 controls the rotation mechanism via the control unit 100 to position a rectangular clamping bar 44 of a length corresponding to the planned splitting line 203 upward from the rotating body 43, and controls the rotation drive mechanism to position the planned splitting line 203-1 of the workpiece 200 parallel to the Y-axis direction. In Embodiment 1, during the splitting step 1002, the braking device 1 controls the X-axis movement unit 30 via the control unit 100 to position the lower end of the upper clamping bar 52 above the device 204 (corresponding to an area, hereinafter referred to as reference numeral 204-1 in Figure 12) adjacent to the rear side in the X-axis direction in Figure 1 on the planned splitting line 203-1, position the upper end of the rectangular clamping bar 44 below the device 204-1 on the rear side in the X-axis direction in Figure 1 adjacent to the rear side in the X-axis direction in Figure 1 on the planned splitting line 203-1, and position the lower end of the pressing bar 60 above the device 204 (corresponding to an area, hereinafter referred to as reference numeral 204-2 in Figure 12) adjacent to the front side in the X-axis direction in Figure 1 on the planned splitting line 203-1.

[0069] In Embodiment 1, during the splitting step 1002, the braking device 1, with the control unit 100 controlling the Z-axis movement unit 34, raises the rotating body 43 and the rectangular clamping bar 44, causing the device 204-1 adjacent to the planned splitting line 203-1 of the workpiece 200 to be pressed upward via the lower tape 207. As a result, the workpiece 200 rises, and the device 204-1 comes into contact with the lower end of the upper clamping bar 52 via the sheet 220. Thus, in Embodiment 1, during the splitting step 1002, the braking device 1 clamps the device 204-1 adjacent to the planned splitting line 203-1 of the workpiece 200 between the clamping bars 44 and 52 via the sheet 220 and the lower tape 207, as shown in Figure 12. At this time, in Embodiment 1, the lower end of the pressing bar 60 is located above the surface 202 of the workpiece 200.

[0070] In Embodiment 1, during the splitting step 1002, the braking device 1, based on the splitting conditions, has the control unit 100 control the lifting unit 36 ​​to lower the movable base 5 and the pressing bar 60 of the upper clamping unit 50. As a result, the upper clamping bar 52 clamps the device 204-1 adjacent to the planned splitting line 203-1 of the workpiece 200 between itself and the rectangular clamping bar 44 via the sheet 220 and the lower tape 207. Therefore, the rod 55 of the cylinder unit 51 retracts without the upper clamping bar 52 descending, and the slide unit 53 raises the upper clamping bar 52 relative to the movable base 5.

[0071] Furthermore, as the movable base 5 and the pressing bar 60 of the upper clamping unit 50 descend, the pressing bar 60 descends, and the lower end of the pressing bar 60 comes into contact with the device 204-2 adjacent to the planned division line 203-1 on the opposite side of the clamping units 41 and 50 on the surface 202 of the workpiece 200 via the sheet 220. The pressing bar 60 then descends further, and as shown in Figures 13 and 14, the lower end of the pressing bar 60 is positioned below the lower end of the upper clamping bar 52, dividing the planned division line 203-1 between the clamping bars 44 and 52 and the pressing bar 60.

[0072] Furthermore, when the planned division line 203-1 is divided, as shown in Figure 15, division scraps 211 made of the material constituting the substrate 201 of the workpiece 200 may be generated within the divided planned division line 203-1. In Embodiment 1, in the division step 1002, the braking device 1 controls the lifting unit 36 ​​to raise the movable base 5 and the press bar 60 after the control unit 100 has lowered the movable base 5 and the press bar 60 according to the division conditions, and controls the Z-axis moving unit 34 to lower the rotating body 43 and the rectangular clamping bar 44.

[0073] Furthermore, in Embodiment 1, in the splitting step 1002, the control unit 100 determines the splitting result of the planned splitting line 203-1 to be split based on the load value measured by the load cell 71, and stores the determined splitting result in association with the planned splitting line 203-1. In Embodiment 1, in the splitting step 1002, the braking device 1 splits the planned splitting lines 203 of the workpiece 200 in order from the end planned splitting line 203 based on the splitting conditions. In Embodiment 1, in the splitting step 1002, the braking device 1 ends the splitting operation, i.e., the splitting step 1002, when it has split all the planned splitting lines 203 of the workpiece 200 and divided the workpiece 200 into individual chips 210. After that, the split chips 210 are picked up from the bottom side tape 207.

[0074] The braking method according to Embodiment 1 described above includes a preparation step 1001 in which a sheet 220 that exhibits adhesive strength upon heating is adhered to the surface 202 of the workpiece 200. For this reason, in the splitting step 1002 of the braking method according to Embodiment 1, the workpiece 200 is pressed with the pressing bar 60 through the sheet 220 while the sheet 220 is in close contact with the surface 202 of the workpiece 200, so there is no risk of splitting debris 211 entering between the surface 202 of the workpiece 200 and the sheet 220.

[0075] As a result, the braking method according to Embodiment 1 has the effect of suppressing damage to the workpiece 200 during splitting.

[0076] Furthermore, in the braking method according to Embodiment 1, since the sheet 220 is a so-called adhesive-free tape composed only of a base material made of a non-adhesive thermoplastic resin, no resin constituting the adhesive layer remains on the surface of the device 204 after the sheet 220 is removed.

[0077] [Embodiment 2] The braking method according to Embodiment 2 will now be described based on the drawings. Figure 16 is a flowchart showing the flow of the braking method according to Embodiment 2. Figure 17 is a schematic cross-sectional view showing the extension step of the braking method shown in Figure 16. Figure 18 is a schematic cross-sectional view showing the heating step of the braking method shown in Figure 16. Figure 19 is a schematic cross-sectional view showing the sheet removal step of the braking method shown in Figure 16. Note that Figures 16, 17, 18, and 19 use the same reference numerals as Embodiment 1, and their descriptions are omitted.

[0078] The braking method according to Embodiment 2, as shown in Figure 16, includes a preparation step 1001 and a splitting step 1002, as well as an expansion step 1003, a heating step 1004, and a sheet removal step 1005.

[0079] The expansion step 1003 is a step in which, after performing the division step 1002, the lower side tape 207 is expanded to form gaps 212 between the chips 210, which are small pieces formed when the workpiece 200 is divided. In Embodiment 2, in the expansion step 1003, a well-known expansion device expands the lower side tape 207 radially around its entire circumference to form gaps 212 between the chips 210, as shown in Figure 17.

[0080] The heating step 1004 is a step in which the sheet 220 is heated after the expansion step 1003 and before the sheet removal step 1005 is performed, in order to allow the sheet 220 to enter the gap 212. In Embodiment 2, in the heating step 1004, the heater 90 heats the sheet 220 to a temperature exceeding the melting point of the sheet 220. In Embodiment 2, in the heating step 1004, the heater 90 heats and melts the sheet 220, allowing the sheet 220 to enter the gap 212 between the chips 210, as shown in Figure 18. At this time, the divided debris 211 is embedded in the sheet 220 within the gap 212.

[0081] The sheet removal step 1005 is the step of removing the sheet 220 from the surface of the workpiece 200 after performing the expansion step 1003. In the sheet removal step 1005, each piece of divided chip 211 of the sheet 220 is removed from the surface 202 of the workpiece 200. The divided chips 210 are then picked up from the bottom tape 207.

[0082] The braking method according to Embodiment 2 includes a preparation step 1001 in which a sheet 220 that exhibits adhesive strength upon heating is adhered to the surface 202 of the workpiece 200. Therefore, there is no risk of the dividing debris 211 generated in the dividing step 1002 entering between the surface 202 of the workpiece 200 and the sheet 220, and similar to Embodiment 1, it has the effect of suppressing damage to the workpiece 200 during dividing.

[0083] Furthermore, since the braking method according to Embodiment 2 includes an expansion step 1003, a heating step 1004, and a sheet removal step 1005, the divided debris 211 generated in the dividing step 1002 can be removed from between the divided chips 210.

[0084] It should be noted that the present invention is not limited to the embodiments described above. That is, it can be implemented with various modifications without departing from the core principles of the present invention. For example, in the present invention, the lower side tape 207 may be a sheet that, like the sheet 220, does not have an adhesive layer and is composed only of a base material made of thermoplastic resin, and exhibits adhesive strength upon heating.

[0085] Furthermore, in the present invention, after the splitting step 1002, in the expansion step 1003, the lower tape 207 and sheet 220 are expanded with an expansion device to form a gap 212 between the chips 210, and while maintaining the gap 212, the space between the workpiece 200 and the annular frame 208 of the lower tape 207 is heated and shrunk, or the sheet 220 may be removed after replacing the annular frame 208. [Explanation of Symbols]

[0086] 44 Rectangular clamping bar (clamping bar) 52 Upper clamping bar (clamping bar) 60 Pressure Bars 200 work 202 Surface (Top surface) 203 planned division lines 203-1 Planned division lines to be divided 204 Devices 204-1 Device (area) 204-2 Device (area) 205 Split starting point 206 Back side (bottom side) 207 Bottom side tape 208 Ring Frame 209 Aperture 210 chips (small pieces) 212 Gap 220 seats 1001 Preparation Steps 1002 division steps 1003 Extension Step 1004 Heating step 1005 Sheet removal step

Claims

1. A braking method for dividing a workpiece in which a division starting point has been formed along a planned division line, A preparatory step involves adhering a sheet that does not have an adhesive layer and develops adhesive strength upon heating to the upper surface of a workpiece, and placing a bottom tape on the lower surface of the workpiece, and fixing the outer circumference of the bottom tape to an annular frame, thereby accommodating the workpiece with the sheet laminated on its upper surface into the opening of the annular frame. A splitting step in which a region adjacent to the planned splitting line is gripped from above and below the workpiece with a pair of gripping bars, and the workpiece in the region adjacent to the planned splitting line is pressed with a pressing bar on the opposite side of the pair of gripping bars across the planned splitting line, thereby splitting the workpiece along the planned splitting line, After performing the division step, the expansion step involves expanding the lower side tape to form gaps between the small pieces formed by the division of the workpiece. After performing the expansion step, a sheet removal step is performed to remove the sheet from the upper surface of the workpiece, After performing the expansion step and before performing the sheet removal step, a heating step is performed to heat the sheet and allow it to enter the gap. A braking method equipped with [a specific feature / feature].

2. The braking method according to claim 1, wherein the lower side tape is a sheet that does not have an adhesive layer and exhibits adhesive strength upon heating.

Images