Braking device and braking method

Abstract

To suppress the number of man-hours relating to confirmation whether or not workpiece has been divided.SOLUTION: A braking device 1 includes: a frame fixing unit for fixing a frame of a workpiece unit composed of workpiece where a division starting point is formed along a division schedule line, a sheet to which the workpiece is stuck and a frame to which the outer periphery of the sheet is stuck; a detection unit for detecting the division schedule line of the workpiece; a sandwiching unit for sandwiching the workpiece in a region adjacent to a division schedule line to be divided from above and blow; a pressing member 60 for pressing the workpiece in the region adjacent to the division schedule line to be divided on a side opposite to the sandwiching unit across the division schedule line to be divided, and braking the workpiece; a load meter 71 for measuring a load applied to the workpiece by the pressing member 60; and a control unit for determining a division result whether or not the division schedule line to be divided has been divided on the basis of the load value measured by the load meter 71.SELECTED DRAWING: Figure 5

Description

Technical Field

[0001] The present invention relates to a braking device and a braking method.

Background Art

[0002] Workpieces such as glass, sapphire, and SiC are divided along a set division planned line to form a plurality of chips. When dividing a workpiece, for example, after irradiating a laser beam along the division planned line to form a modified layer inside the workpiece, it has been conventionally divided by various braking devices (see, for example, Patent Document 1).

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] The braking device shown in Patent Document 1 divides a workpiece with a division starting point formed inside along the division planned line by pressing it with a pressing member. However, an undivided region may be formed inside the workpiece. Conventionally, after pressing all the division planned lines with the pressing member, an operator checks whether the workpiece is divided along all the division planned lines, which takes a lot of man-hours and improvement has been eagerly desired.

[0005] An object of the present invention is to provide a braking device and a braking method capable of suppressing the man-hours related to checking whether a workpiece is divided.

Means for Solving the Problems

[0006] To solve the above-mentioned problems and achieve the objective, the present invention provides a braking device comprising: a frame fixing unit for fixing the frame of a work unit consisting of a workpiece to which a plurality of division lines are set and a division starting point is formed along each division line, a sheet to which the workpiece is attached, and a frame to which the outer circumference of the sheet is attached; a detection unit for detecting the division lines of the work unit whose frame is fixed by the frame fixing unit; a clamping unit for clamping a workpiece in an area adjacent to the division line to be divided from above and below the work unit; and a pressing member for pressing the workpiece in an area adjacent to the division line to be divided on the opposite side of the clamping unit across the division line to be divided, thereby braking the workpiece along the division line to be divided, the braking device further comprising: a load cell for measuring the load applied by the pressing member to the workpiece; and a controller for determining whether or not the workpiece has been divided along the division line to be divided based on the load value measured by the load cell. The controller determines and stores, based on the load values ​​measured by the load cell, that the division result for all planned division lines of the workpiece is either not divided, divided, or possibly not divided in part. It is characterized by the following: The present invention provides a braking device comprising: a frame fixing unit for fixing the frame of a work unit consisting of a workpiece to which a plurality of division lines are set and a division starting point is formed along each division line, a sheet to which the workpiece is attached, and a frame to which the outer circumference of the sheet is attached; a detection unit for detecting the division lines of the work unit whose frame is fixed by the frame fixing unit; a clamping unit for clamping a workpiece in an area adjacent to the division line to be divided from above and below the work unit; and a pressing member for pressing the workpiece in an area adjacent to the division line to be divided on the opposite side of the clamping unit across the division line to be divided, thereby braking the workpiece along the division line to be divided; a load cell for measuring the load applied by the pressing member to the workpiece; a controller for determining whether or not the workpiece has been divided along the division line to be divided based on the load value measured by the load cell; and a display unit, wherein the display unit displays a wafer map including each division line and displays the division result for each division line.

[0007] In the braking device described above, the controller may determine the division result based on the state of the decrease in the load value over a predetermined time period after the load value has risen and then started to decrease.

[0008] In the braking device described above, the controller may determine and store, based on the load values ​​measured by the load cell, that all planned division lines of the workpiece are either not divided, divided, or possibly not divided as a result of the division.

[0009] The braking device may include a display unit that displays a map of the entire wafer including each of the planned division lines, as well as the division results for each of the planned division lines.

[0010] In the braking device, the detection unit includes an imaging camera, and with a whole wafer map of a work unit whose frame is fixed by the frame fixing unit displayed on the display unit, the imaging camera may be positioned at the planned division line of the work unit corresponding to the planned division line specified on the whole wafer map displayed on the display unit, and the planned division line may be imaged.

[0011] The braking method of the present invention comprises: a work unit forming step of forming a work unit consisting of a workpiece to which a division starting point is formed along a planned division line, a sheet to which the workpiece is attached, and a frame to which the outer circumference of the sheet is attached; a frame fixing step of fixing the frame of the work unit with a frame fixing unit; a detection step of detecting a planned division line to be divided from the work unit whose frame is fixed with the frame fixing unit; a clamping step of clamping the work in the region adjacent to the planned division line to be divided with a clamping unit from above and below the work unit after performing the detection step; a dividing step of pressing the work in the region adjacent to the planned division line to be divided with a pressing member on the opposite side of the clamping unit across the planned division line to be divided, thereby braking the work along the planned division line to be divided; a load detection step of detecting the load value applied by the pressing member to the work during the execution of the dividing step; and a determination step of determining whether or not the work has been divided along the planned division line to be divided based on the load value detected in the load detection step. The braking device performs the frame fixing step, the detection step, the clamping step, the splitting step, the load detection step, and the determination step. It is characterized by the following: [Effects of the Invention]

[0012] This invention has the effect of reducing the man-hours required to confirm whether or not a workpiece has been divided. [Brief explanation of the drawing]

[0013] [Figure 1] Figure 1 is a schematic perspective view showing an example of the configuration of a braking device according to Embodiment 1. [Figure 2] Figure 2 is a schematic perspective view of a work unit including a work piece to be divided of the braking device according to Embodiment 1. [Figure 3] Figure 3 is a schematic perspective view schematically showing the configuration of the lower clamping unit of the clamping unit of the braking device shown in FIG. 1. [Figure 4] Figure 4 is a schematic side view schematically showing a partial cross section of the configuration of the upper clamping unit of the clamping unit of the braking device shown in FIG. 1. [Figure 5] Figure 5 is a schematic side view schematically showing a partial cross section of the pressing member of the braking device shown in FIG. 1. [Figure 6] Figure 6 is a schematic front view schematically showing a partial cross section of the load measuring unit as viewed from the direction of arrow VI shown in FIG. 5. [Figure 7] Figure 7 is a diagram showing an example of the measurement result of the load meter of the load measuring unit shown in FIG. 6. [Figure 8] Figure 8 is a diagram showing another example of the measurement result of the load meter of the load measuring unit shown in FIG. 6. [Figure 9] Figure 9 is a diagram showing yet another different example of the measurement result of the load meter of the load measuring unit shown in FIG. 6. [Figure 10] Figure 10 is a flowchart showing the flow of the braking method according to Embodiment 1. [Figure 11] Figure 11 is a schematic side view schematically showing a partial cross section of the main part of the braking device after the frame fixing step of the braking method shown in FIG. 10. [Figure 12] Figure 12 is a schematic side view schematically showing a partial cross section of the detection step of the braking method shown in FIG. 10. [Figure 13] Figure 13 is a schematic side view schematically showing a partial cross section of the clamping step of the braking method shown in FIG. 10. [Figure 14] Figure 14 is a schematic side view schematically showing a partial cross section of the dividing step and the load detection step of the braking method shown in FIG. 10. [Figure 15]FIG. 15 is a diagram schematically showing an example of the divided state display information displayed on the display screen by the display unit of the braking device shown in FIG. 1. [Figure 16] FIG. 16 is a diagram schematically showing a part of the surface of the work imaged by the imaging camera displayed on the display screen by the display unit of the braking device shown in FIG. 1.

Embodiments for Carrying Out the Invention

[0014] The embodiments (embodiments) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited by the content described in the following embodiments. Also, the constituent elements described below include those that can be easily assumed by those skilled in the art and those that are substantially the same. Furthermore, the configurations described below can be combined as appropriate. Also, various omissions, substitutions, or changes in the configuration can be made without departing from the gist of the present invention.

[0015] 〔Embodiment 1〕 The braking device according to Embodiment 1 of the present invention will be described based on the drawings. FIG. 1 is a perspective view schematically showing a configuration example of the braking device according to Embodiment 1. FIG. 2 is a perspective view schematically showing a work unit including a work to be divided by the braking device according to Embodiment 1.

[0016] (Work Unit) The braking device 1 shown in FIG. 1 according to Embodiment 1 is a device that divides the work 20 on the work unit 200 shown in FIG. 2 into individual chips 210. The work unit 200 shown in FIG. 2 includes a work 201, a sheet 202, and a frame 203.

[0017] Workpiece 201 is a wafer such as a disc-shaped semiconductor wafer or optical device wafer, for example, with a substrate 204 made of glass, sapphire, SiC, etc. As shown in Figure 2, workpiece 201 has a plurality of intersecting division lines 206 set on its surface 205, and devices 207 are formed in the regions demarcated by the division lines 206. In this invention, the substrate 204 of workpiece 201 may be made of a material other than glass, sapphire, or SiC, and devices 207 may not be formed on it.

[0018] Device 207 is, for example, an integrated circuit such as an IC (Integrated Circuit) or LSI (Large Scale Integration), an image sensor such as a CCD (Charge Coupled Device) or CMOS (Complementary Metal Oxide Semiconductor), an optical element such as an LED (Light-Emitting Diode), or a memory (semiconductor memory device).

[0019] Furthermore, the workpiece 201 has a division starting point 208 formed along the division line 206. In Embodiment 1, the division starting point 208 is a modified layer formed inside the substrate 204 along the division line 206, but in the present invention, it may be a recessed processed groove from the surface 205 in addition to the modified layer. The modified layer refers to a region in which the density, refractive index, mechanical strength, and other physical properties are different from those of the surrounding area, and examples include a melted region, a cracked region, a dielectric breakdown region, a refractive index change region, and a region in which these regions are mixed. The modified layer has lower mechanical strength than other parts of the substrate 204.

[0020] The sheet 202 is formed in a disc shape with a larger diameter than the workpiece 201, with the frame 203 attached to its outer circumference and the workpiece 201 attached to its center. In Embodiment 1, the sheet 202 is attached to the back surface 209 of the workpiece 201. The sheet 202 is an adhesive tape comprising a base layer made of a resin having non-adhesive and flexible properties, and an adhesive layer laminated on the base layer and made of a resin having adhesive and flexible properties, wherein the adhesive layer is attached to the workpiece 201 and the frame 203, or the sheet is composed only of a base layer made of a thermoplastic resin without an adhesive layer and is heat-pressed to the workpiece 201 and the frame 203.

[0021] The frame 203 is formed in an annular shape with an inner diameter larger than the outer diameter of the workpiece 201, and the outer circumference of the sheet 202 is attached to it. The frame 203 is made of a non-flexible, rigid material, and in Embodiment 1, it is made of a magnetic metal.

[0022] The work unit 200 is constructed by attaching a sheet 202 to the back surface 209 of a workpiece 201, attaching a frame 203 to the outer circumference of the sheet 202, and supporting the workpiece 201 within the opening of the frame 203 by the sheet 202.

[0023] (Braking device) The braking device 1 according to Embodiment 1 is a device that divides a workpiece 201 of a work unit 200 starting from a division starting point 208, thereby dividing the workpiece 201 into individual chips 210. Each chip 210 comprises a part of a substrate 204 and a device 207 formed on the surface of the substrate 204. As shown in Figure 1, the braking device 1 comprises a frame fixing unit 10, a detection unit 20, a clamping unit 40, a pressing member 60, a control unit 100 which is a controller, a display unit 110, and an input unit (not shown).

[0024] The frame fixing unit 10 fixes the frame 203 of the work unit 200. The frame fixing unit 10 comprises a movable frame 11 mounted on the device body 2 by an X-axis movement unit 30 so as to be movable in the X-axis direction parallel to the horizontal direction, and a frame fixing member 12 disposed on the movable frame 11.

[0025] The frame fixing member 12 is formed in an annular shape with inner and outer diameters equal to the inner and outer diameters of the frame 203, and its upper surface is a holding surface 13 on which the frame 203 of the work unit 200 is placed via the outer circumference of the sheet 202. The holding surface 13 is flat along the horizontal direction. In Embodiment 1, the frame fixing member 12 has a suction hole opening in the holding surface 13, which is connected to a suction source (not shown).

[0026] The frame fixing unit 10 fixes the frame 203, which is placed on the holding surface 13, to the holding surface 13 via the sheet 202 by attracting it through the suction hole to the holding surface 13. In this invention, if the frame 203 is made of a magnetic material, the frame fixing unit 10 may have a magnet (permanent magnet or electromagnet) placed inside the frame fixing member 12 and fix the frame 203 placed on the holding surface 13 by magnetic attraction. If the frame 203 is made of a non-magnetic material, the frame fixing unit 10 may be equipped with a clamping mechanism that holds the frame 203 between itself and the holding surface 13 to fix the frame 203. Furthermore, the frame fixing unit 10 is rotatable around an axis parallel to the Z-axis direction (also called the vertical direction) by a rotational drive mechanism (not shown).

[0027] The X-axis movement unit 30 is installed on the main body 2 of the device and includes a well-known ball screw that is rotatable around its axis, a well-known motor that moves the movement frame 11 and the frame fixing member 12 in the X-axis direction by rotating the ball screw around its axis, and a well-known guide rail 31 that supports the movement frame 11 so that it can move in the X-axis direction.

[0028] The detection unit 20 detects the planned division line 206 of the workpiece 201 of the workpiece unit 200, whose frame 203 is fixed by the frame fixing unit 10. The detection unit 20 is installed on a movable table 4 that is moved in the Y-axis direction, parallel to the horizontal direction and perpendicular to the X-axis direction, by a Y-axis moving unit 32 on a gate-shaped frame 3 which is erected from the main body 2 of the device, straddling the guide rail 31 of the X-axis moving unit 30. By being installed on the movable table 4, the detection unit 20 is positioned to be freely movable in the Y-axis direction by the Y-axis moving unit 32.

[0029] The detection unit 20 includes an imaging camera 21 equipped with an image sensor such as a CCD (Charge Coupled Device) image sensor or a CMOS (Complementary MOS) image sensor, which images objects facing each other in the Z-axis direction parallel to the vertical direction. The detection unit 20 acquires the image captured by the image sensor and outputs the acquired image to the control unit 100. The detection unit 20 also images the workpiece 201 of the workpiece unit 200, whose frame 203 is fixed by the frame fixing unit 10, and acquires an image for performing alignment, which involves aligning the planned division line 206 of the workpiece 201 with the pressing member 60, etc.

[0030] The gantry frame 3 and the mobile table 4 are flat plates with both surfaces parallel to the vertical and parallel to the Z-axis direction, and are stacked parallel to each other with a gap between them. The Y-axis movement unit 32 is installed on the gantry frame 3 and includes a well-known ball screw that is rotatable around its axis, a well-known motor that moves the mobile table 4 in the Y-axis direction by rotating the ball screw around its axis, and a well-known guide rail 33 that supports the mobile table 4 so that it can move in the Y-axis direction.

[0031] Next, the clamping unit 40 will be described. Figure 3 is a schematic perspective view showing the configuration of the lower clamping unit of the braking device clamping unit shown in Figure 1. Figure 4 is a schematic side view showing a partial cross-section of the configuration of the upper clamping unit of the braking device clamping unit shown in Figure 1.

[0032] The clamping unit 40 clamps the device 207 of the workpiece 201 in the region adjacent to the division line 206 of the workpiece 201 that is to be divided, from above and below along the Z-axis direction of the workpiece unit 200. As shown in Figure 1, the clamping unit 40 comprises a lower clamping unit 41 and an upper clamping unit 50.

[0033] The lower clamping unit 41 is positioned below the frame fixing unit 10 and presses from below the device 207, which is an area adjacent to the division line 206 of the workpiece 201 of the workpiece unit 200, whose frame 203 is fixed to the frame fixing unit 10. As shown in Figure 3, the lower clamping unit 41 comprises a bracket 42 that is provided to be able to move up and down in the Z-axis direction by a Z-axis moving unit 34, a rotating body 43 that is rotatably supported by the bracket 42 around its axis, and a plurality of rectangular clamping members 44 of different lengths that protrude from the outer circumferential surface of the rotating body 43.

[0034] The rotating body 43 has its axis positioned parallel to the Y-axis direction, and both ends are rotatably supported by brackets 42. The rotating body 43 is rotated around its axis by a rotation mechanism (not shown). The multiple rectangular clamping members 27 are each formed as a straight rectangular plate in the Y-axis direction with a constant thickness, and are formed to have various lengths with different lengths in the Y-axis direction. The length of the longest rectangular clamping member 44 is equivalent to the length of the longest planned division line 206 of the workpiece 201, and the length of the shortest rectangular clamping member 44 is equivalent to the length of the shortest planned division line 206 of the workpiece 201.

[0035] The orientation in which the multiple rectangular clamping members 27 protrude is changed by the rotation of the rotating body 26. Of the multiple rectangular clamping members 27, the rectangular clamping member 27 positioned upward along the Z-axis direction from the rotating body 26 has its upper end below the seat 202 of the work unit 200 to which the frame 203 is fixed by the frame fixing unit 10 when it is lowered by the Z-axis moving unit 34, and its upper end has its upper end above the workpiece 201 of the work unit 200 to which the frame 203 is fixed by the frame fixing unit 10 when it is raised by the Z-axis moving unit 34. Of the multiple rectangular clamping members 27, the rectangular clamping member 27 positioned upward along the Z-axis direction from the rotating body 26 has its upper end press upward from the back surface 209 side against the device 207 adjacent to the planned division line 206 of the workpiece 201 to be divided.

[0036] In other words, the lower clamping unit 41 can select the length of the upward-facing rectangular clamping member 27 by changing the orientation of the rotating body 26 around its axis, and then uses the selected rectangular clamping member 27 to press upward from the back surface 209 side of the device 207 adjacent to the division line 206 of the workpiece 201 that is to be divided.

[0037] The Z-axis movement unit 34 includes a well-known ball screw rotatably mounted around its axis, a well-known motor that raises and lowers the bracket 42 in the Z-axis direction by rotating the ball screw around its axis, and a well-known guide rail 35 that supports the bracket 42 so that it can be raised and lowered in the Z-axis direction.

[0038] The upper clamping unit 50 is positioned above the frame fixing unit 10 and clamps the device 207, which is located next to the planned division line 206 of the workpiece 201 of the workpiece unit 200 whose frame 203 is fixed to the frame fixing unit 10, and which is pressed from below by the lower clamping unit 41, between the upper clamping unit 50 and the lower clamping unit 41. The upper clamping unit 50 is installed on a movable base 5 which is moved in the Z-axis direction by the lifting unit 36 ​​on the movable table 4.

[0039] The movable base 5 is formed as a flat plate with both surfaces parallel to the Z-axis direction and is stacked on the movable table 4 with gaps between them. A horizontal member 6, with both surfaces 205 parallel to the horizontal direction, is fixed to the movable base 5.

[0040] The lifting unit 36 ​​is installed on the movable table 4 and includes a well-known ball screw that is rotatable around its axis, a well-known motor 37 that raises and lowers the movable base 5 in the Z-axis direction by rotating the ball screw around its axis, and a well-known guide rail 38 that supports the movable base 5 so that it can be raised and lowered in the Z-axis direction.

[0041] As shown in Figure 4, the upper clamping unit 50 comprises a cylinder unit 51, an upper clamping member 52, and a slide unit 53. The cylinder unit 51 comprises a cylinder 54 fixed to the horizontal member 6, and a rod 55 formed in a rod shape parallel to the Z-axis direction, which is extendable and retractable from the cylinder 54, and whose lower end descends when extended from the cylinder 54.

[0042] The upper clamping member 52 is formed as a rectangular plate with a constant thickness, a straight line in the Y-axis direction, and both surfaces parallel to the Z-axis direction, and its length in the Y-axis direction is equal to the length of the longest planned dividing line 206 of the workpiece 201. The lower end of the rod 55 of the cylinder unit 51 is fixed to the upper end of the upper clamping member 52, and it is stacked on the movable base 5 with a gap between them. The upper clamping member 52 faces the upward-facing rectangular clamping member 27 from the rotating body 43 in the Z-axis direction.

[0043] Furthermore, the slide unit 53 supports the upper clamping member 52 so that it can slide relative to the movable base 5 in the Z-axis direction. The slide unit 53 includes a linear guide rail 56 fixed to the movable base 5, which is one of the movable base 5 and the upper clamping member 52, and parallel to the Z-axis direction, and a slider 57 fixed to the upper clamping member 52, which is the other of the movable base 5 and the upper clamping member 52, and slidably supported by the guide rail 56 in the longitudinal direction of the guide rail 56, i.e., in the Z-axis direction.

[0044] When the rod 55 is extended, the upper clamping member 52 is raised by the lifting unit 36 ​​so that its lower end is above the workpiece 201 of the work unit 200 to which the frame 203 is fixed by the frame fixing unit 10. When it is lowered by the lifting unit 36, its lower end clamps the device 207 adjacent to the planned division line 206 of the workpiece 201, which is pressed by the rectangular clamping member 27 positioned upward along the Z-axis from the rotating body 26, between itself and the rectangular clamping member 44.

[0045] The pressing member 60 presses the device 207 of the workpiece 201 in the area adjacent to the division line 206 on the opposite side in the Y-axis direction from the clamping members 44 and 52 of the clamping unit 40, straddling the division line 206 to be divided, thereby braking (also called dividing) the workpiece 201 along the division line 206. As shown in Figure 4, the pressing member 60 is mounted on a pressing and moving base 62 which is mounted on the horizontal member 6 so as to be movable in the X-axis direction by a second X-axis moving unit 61.

[0046] The pressing and moving base 62 is formed with both surfaces parallel to the Z-axis direction and integrally comprising a thick-walled portion 63 at the upper end and a thin-walled portion 64 at the lower end, and is stacked on the upper clamping member 52 with a gap between them. In Embodiment 1, the pressing and moving base 62 has surfaces on the side of the thick-walled portion 63 and the thin-walled portion 64 that are away from the upper clamping member 52 that are on the same plane, and a step is formed between the thick-walled portion 63 and the thin-walled portion 64 on the upper clamping member 52 side. In Embodiment 1, the pressing and moving base 62 is provided with a rectangular opening 65 that penetrates the thin-walled portion 64.

[0047] The second X-axis movement unit 61 is installed on the horizontal member 6 and includes a well-known ball screw that is rotatable around its axis, a well-known motor 66 that moves the pressing movement base 62 in the X-axis direction by rotating the ball screw around its axis, and a well-known guide rail 67 that supports the pressing movement base 62 so that it can move in the Z-axis direction.

[0048] Next, the pressing member 60 will be described. Figure 5 is a schematic side view showing a partial cross-section of the pressing member of the braking device shown in Figure 1. Figure 6 is a schematic front view showing a partial cross-section of the load measurement unit as seen from the direction of arrow VI shown in Figure 5. Figure 7 is a diagram showing an example of the measurement results of the load cell of the load measurement unit shown in Figure 6. Figure 8 is a diagram showing another example of the measurement results of the load cell of the load measurement unit shown in Figure 6. Figure 9 is a diagram showing yet another example of the measurement results of the load cell of the load measurement unit shown in Figure 6.

[0049] The pressing member 60 is formed in a rectangular plate shape that is linear in the Y-axis direction and has both surfaces parallel to the Z-axis direction, and its length in the Y-axis direction is equal to the length of the longest planned dividing line 206 of the workpiece 201. The pressing member 60 has a tapered end 68 formed at its lower end, which gradually becomes thinner as it goes downwards. In Embodiment 1, the tapered end 68 has a surface on the upper clamping member 52 side that is formed flat along the Z-axis direction, and the surface on the side away from the upper clamping member 52 is inclined with respect to both the horizontal and Z-axis directions in a direction that gradually approaches the upper clamping member 52 as it goes downwards.

[0050] Furthermore, the pressing member 60 is supported by a pair of slide units 69 so as to be slidable in the Z-axis direction on the pressing movement base 62. The pair of slide units 69 are spaced apart in the Y-axis direction. Each slide unit 69 comprises a linear guide rail 691 fixed to the pressing movement base 62, which is one of the pressing movement base 62 and the pressing member 60, and parallel to the Z-axis direction, and a slider 692 fixed to the pressing member 60, which is the other of the pressing movement base 62 and the pressing member 60, and supported by the guide rail 691 so as to be slidable in the longitudinal direction of the guide rail 691, i.e., in the Z-axis direction.

[0051] When the pressing member 60 is raised by the lifting unit 36, its lower end is positioned above the workpiece 201 of the work unit 200, whose frame 203 is fixed by the frame fixing unit 10. When it is lowered by the lifting unit 36, it presses downward in the Y-axis direction, positioning the device 207 of the workpiece 201 between the clamping members 44 and 52 and the division line 206 to be divided. In Embodiment 1, the pressing member 60 presses downward at a position where the distance in the Y-axis direction from the upper clamping member 52 of the workpiece 201 is approximately 75% to 85% of the width of the tip 210. In the present invention, however, the pressing member 60 only needs to press downward at a position where the distance in the Y-axis direction from the upper clamping member 52 of the workpiece 201 is approximately 65% ​​to 95% of the width of the tip 210. Furthermore, if the pressing position of the pressing member 60 is too close in the Y-axis direction from the upper clamping member 52, it is unlikely to crack, and if it is too far, the pressing member 60 will move toward the already cracked dividing line 206 and will not crack. Therefore, it is desirable for the pressing member 60 to press downwards at a position where the distance in the Y-axis direction from the upper clamping member 52 of the workpiece 201 is approximately 65% ​​to 95% of the width of the tip 210, preferably approximately 75% to 85% of the width of the tip 210. When the pressing member 60 is lowered by the lifting unit 36, it presses downwards in the Y-axis direction, positioning the device 207 of the workpiece 201 between the clamping members 44 and 52 and dividing the dividing line 206 to be divided.

[0052] Furthermore, the pressing member 60 is fixed to the pressing and moving base 62 by a load measuring unit 70 shown in Figure 5. The load measuring unit 70 is located between a pair of slide units 69. As shown in Figures 5 and 6, the load measuring unit 70 includes a load meter 71 for measuring the value of the load applied by the pressing member 60 to the workpiece 201 (hereinafter referred to as the load value), a holding member 72, a support member 73, a spring 75, and a support part 74 (shown only in Figure 6).

[0053] The load cell 71 measures the load value applied by the pressing member 60 in the Z-axis direction to the workpiece 201. In Embodiment 1, it is a well-known load cell, but it is not limited to a load cell. The load cell 71 outputs the measured load value to the control unit 100. The load cell 71 is positioned within the opening 65 of the pressing and moving base 62.

[0054] The holding member 72 has one end fixed to the pressing member 60, extends from the pressing member 60 toward the pressing and moving base 62, and has its other end positioned within the opening 65 of the pressing and moving base 62. The other end of the holding member 72 supports the lower end of the load cell 71.

[0055] The support member 73 is positioned within the opening 65 of the pressing and moving base 62, with its upper end fixed to the upper inner surface of the opening 65 and its lower end supporting the upper end of the load cell 71. The support portion 74 is positioned within the opening 65 of the pressing and moving base 62, with its lower end fixed to the lower inner surface of the opening 65 and its upper end supporting the lower end of the holding member 72.

[0056] The spring 75 is positioned between the lower inner surface of the opening 65 and the other end of the holding member 72, and biases the pressing member 60 upward relative to the pressing and moving base 62 via the other end of the holding member 72. In Embodiment 1, the spring 75 biases the holding member 72 and the pressing member 60 upward with a force corresponding to the combined mass of the pressing member 60, the holding member 72 and the load cell 71. By biasing with the aforementioned force, the combined mass of the pressing member 60, the holding member 72 and the load cell 71 cancels out, and the load cell 71 can measure a load value smaller than the combined mass of the pressing member 60, the holding member 72 and the load cell 71. Thus, the braking device 1 is equipped with a load cell 71 that measures the load value at which the pressing member 60 presses the workpiece 201.

[0057] As shown in Figures 7, 8, and 9, the load value measured by the load cell 71 is zero until the pressing member 60 contacts the workpiece 201 when the upper clamping member 52 and pressing member 60 are lowered by the lifting unit 36, and rises when the pressing member 60 contacts the workpiece 201. The load value measured by the load cell 71 reaches a maximum of 300 when the pressing member 60 divides the division line 206 that it is supposed to divide, and then decreases from the maximum value of 300 thereafter. The load value measured by the load cell 71 becomes zero when the pressing member 60 moves back after a certain period of time has elapsed, as the pressing member 60 moves down at a constant speed and presses against the workpiece 201. In Figures 7, 8, and 9, the horizontal axis shows the elapsed time, and the vertical axis shows the load value measured by the load cell 71.

[0058] Furthermore, when the entire planned division line 206 to be divided is divided (hereinafter referred to as complete division), the load value measured by the load cell 71 will be less than the first predetermined value 301, as shown in Figure 7. In Embodiment 1, the first predetermined value 301 is a first predetermined percentage (for example, 30%) of the maximum value 300, while in the present invention, it may be a first predetermined load value lower than the maximum value 300 (for example, 6N).

[0059] Furthermore, if a portion of the entire planned division line 206 is divided and the remainder remains undivided (hereinafter referred to as incomplete division), the load value measured by the load cell 71 will be greater than or equal to the first predetermined value 301 and less than the second predetermined value 302, as shown in Figure 8. Note that the second predetermined value 302 is a value higher than the first predetermined value 301. In Embodiment 1, it is the second predetermined percentage of the maximum value 300 (for example, 80%), while in the present invention, it may be the second predetermined load value which is lower than the maximum value 300 and higher than the first predetermined load value (for example, 16N).

[0060] Furthermore, the load value measured by the load cell 71, when the entire planned division line 206 to be divided remains undivided (hereinafter referred to as "undivided"), will reach approximately the maximum value of 300 after division, as shown in Figure 9, which is equal to or greater than the second predetermined value of 302.

[0061] The control unit 100 controls each of the above-described components of the braking device 1 to cause the braking device 1 to perform a splitting operation to split each of the planned splitting lines 206 of the workpiece 201. The control unit 100 is a computer having an arithmetic processing unit with a microprocessor such as a CPU (central processing unit), a storage device with memory such as ROM (read-only memory) or RAM (random access memory), and an input / output interface device. The arithmetic processing unit of the control unit 100 performs arithmetic processing according to a computer program stored in the storage device and outputs control signals for controlling the braking device 1 to each of the above-described units of the braking device 1 via the input / output interface device.

[0062] The display unit 110 is connected to the control unit 100 and includes a display screen 111 that displays various information. The input unit is used when an operator inputs information to the control unit 100 of the braking device 1. The input unit is connected to the control unit 100 and outputs the input information to the control unit 100. The input unit includes a touch panel superimposed on the display screen 111 of the display unit 110.

[0063] Furthermore, the control unit 100 includes an operation control unit 101, a determination unit 102, and a storage unit 103. The operation control unit 101 controls each of the above-mentioned components of the braking device 1 to cause the braking device 1 to perform a splitting operation to split each of the planned splitting lines 206 of the workpiece 201.

[0064] The determination unit 102 determines whether the workpiece 201 has been divided along the planned division line 206 based on the load value measured by the load cell 71, and stores the division result in the storage unit 103. Specifically, the determination unit 102 determines the division result of the planned division line 206 based on the load value after a predetermined time of 400 (shown in Figures 7, 8, and 9) has elapsed from the maximum value 300, which is the measurement result of the load cell 71.

[0065] In Embodiment 1, the predetermined time 400 is shorter than the time it takes for the lifting unit 36 ​​to lower the pressing member 60. For example, in Embodiment 1, it is 30% of the time it takes for the lifting unit 36 ​​to lower the upper clamping member 52 and the pressing member 60. Alternatively, in the present invention, the predetermined time 400 may be the same as the time it takes for the lifting unit 36 ​​to lower the pressing member 60.

[0066] In Embodiment 1, the determination unit 102 determines that the planned division line 206 to be divided has been completely divided if, for example, the load value after a predetermined time of 400 elapsed from the maximum value 300 is less than the first predetermined value 301. In Embodiment 1, the determination unit 102 determines that the planned division line 206 to be divided is in an incompletely divided state if, for example, the load value after a predetermined time of 400 elapsed from the maximum value 300 (shown in Figures 7, 8, and 9) is greater than or equal to the first predetermined value 301 and less than the second predetermined value 302. In Embodiment 1, the determination unit 102 determines that the planned division line 206 to be divided is in an incompletely divided state if, for example, the load value after a predetermined time of 400 elapsed from the maximum value 300 (shown in Figures 7, 8, and 9) is greater than or equal to the first predetermined value 301 and less than the second predetermined value 302.

[0067] It is desirable to set the predetermined values ​​301 and 302 appropriately according to the type of sheet 202 and the material of the workpiece 201. In addition, even within the same workpiece 201, the predetermined values ​​301 and 302 may be set according to the position of the planned division line 206 (proportional to the length of the planned division line 206).

[0068] Thus, the determination unit 102 determines the division result of each division line 206 based on the state of the decrease in the load value measured by the load cell 71 after it has risen and then started to fall from its maximum value of 300, and stores the division result of each division line 206 in the storage unit 103, linking them one-to-one. In addition, the determination unit 102 determines the division result for all division lines 206 of the workpiece 201 as either undivided (corresponding to not being divided), fully divided (corresponding to being divided), or incompletely divided (corresponding to the possibility of not being partially divided), based on the load value measured by the load cell 71, and stores it in the storage unit 103, linking it to each division line 206.

[0069] The functions of the memory unit 103 are realized by the memory device described above. The functions of the operation control unit 101 and the determination unit 102 are realized by the aforementioned arithmetic processing unit performing calculations according to the computer program stored in the memory device.

[0070] (Braking method) Next, a braking method according to Embodiment 1 will be described. Figure 10 is a flowchart showing the flow of the braking method according to Embodiment 1. The braking method according to Embodiment 1 includes a splitting operation in which the aforementioned braking device 1 splits each of the planned splitting lines 206 of the workpiece 201. As shown in Figure 10, the braking method according to Embodiment 1 comprises a workpiece unit formation step 1001, a frame fixing step 1002, a detection step 1003, a clamping step 1004, a splitting step 1005, a load detection step 1006, and a determination step 1007.

[0071] (Work unit formation step) The work unit formation step 1001 is a step to form a work unit 200 consisting of a work 201 to which a division starting point 208 is formed along a planned division line 206, a sheet 202 to which the work 201 is attached, and a frame 203 to which the outer periphery of the sheet 202 is attached. In Embodiment 1, in the work unit formation step 1001, the sheet 202 is attached to the back surface 209 of the work 201, and the frame 203 is attached to the outer periphery of the sheet 202 to form the work unit 200 shown in Figure 2.

[0072] (Frame fixing step) Figure 11 is a schematic side view showing a partial cross-section of the main part of the braking device after the frame fixing step of the braking method shown in Figure 10. The frame fixing step 1002 is the step of fixing the frame 203 of the work unit 200 with the frame fixing unit 10.

[0073] In Embodiment 1, during the frame fixing step 1002, the braking device 1 first receives the division conditions by having an operator or the like operate the input unit, and the control unit 100 receives and registers the division conditions. The division conditions include the outer diameter of the workpiece 201 of the work unit 200, the number of division lines 206, the distance between the centers of the division lines 206 in the width direction, the amount and time of descent of the pressing member 60 of the lifting unit 36 ​​during division, the width of the chip 210 after division, and the order in which the division lines 206 are divided.

[0074] In Embodiment 1, in the frame fixing step 1002, when the control unit 100 receives an instruction from an operator or the like to start the splitting operation, the braking device 1 sequentially starts the splitting operation, which in Embodiment 1 is the frame fixing step 1002, the detection step 1003, the clamping step 1004, the splitting step 1005, the load detection step 1006, the determination step 1007, and so on.

[0075] In Embodiment 1, during the frame fixing step 1002, the braking device 1 controls the Z-axis movement unit 34 via the operation control unit 101 of the control unit 100 to lower the lower clamping unit 41, controls the cylinder unit 51 of the upper clamping unit 50 to extend the rod 55, and controls the lifting unit 36 ​​to raise the upper clamping unit 50 and the pressing member 60. Also in Embodiment 1, during the frame fixing step 1002, the braking device 1 controls the second X-axis movement unit 61 via the operation control unit 101 of the control unit 100 to adjust the position of the pressing member 60 in the X-axis direction so that the distance in the X-axis direction between the lower end of the upper clamping member 52 and the lower end of the pressing member 60 is 75% to 85% of the width of the chip 210 included in the division conditions. In this invention, the position of the pressing member 60 in the X-axis direction can be adjusted so that the distance in the X-axis direction between the lower end of the upper clamping member 52 and the lower end of the pressing member 60 is 65% to 95% of the width of the tip 210.

[0076] Furthermore, in Embodiment 1, during the frame fixing step 1002, the braking device 1 controls the X-axis movement unit 30 via the operation control unit 101 of the control unit 100 to retract the frame fixing unit 10 from between the clamping units 41 and 50. In Embodiment 1, during the frame fixing step 1002, the braking device 1 places the frame 203 of the workpiece unit 200, whose surface 205 is covered with a protective material such as a film (not shown), onto the holding surface 13 of the frame fixing unit 10. In Embodiment 1, during the frame fixing step 1002, the braking device 1 operates the suction source via the operation control unit 101 of the control unit 100 to suction and fix the frame 203 to the holding surface 13 of the frame fixing unit 10, as shown in Figure 11.

[0077] (Detection step) Figure 12 is a schematic side view showing a partial cross-section of the detection steps of the braking method shown in Figure 10. Detection step 1003 is a step of detecting the division line 206 to be divided from the work unit 200 to which the frame 203 is fixed by the frame fixing unit 10.

[0078] In Embodiment 1, in detection step 1003, the braking device 1 controls the X-axis movement unit 30 and the Y-axis movement unit 32 via the operation control unit 101 of the control unit 100 to position the detection unit 20 above the planned division line 206 (hereinafter referred to as reference numeral 206-1) to be divided, as shown in Figure 12, based on the division order of the division conditions. The imaging camera 21 of the detection unit 20 then images the area around the planned division line 206-1, including the planned division line 206-1 of the workpiece 201. In Embodiment 1, in detection step 1003, the braking device 1 detects the planned division line 206-1 based on the image obtained by the imaging camera 21 of the detection unit 20 via the operation control unit 101 of the control unit 100.

[0079] (Clamping step) Figure 13 is a schematic side view showing a partial cross-section of the clamping step of the braking method shown in Figure 10. The clamping step 1004 is a step in which, after performing the detection step 1003, the device 207 of the workpiece 201 in the region adjacent to the division line 206-1 to be divided is clamped by the clamping units 41 and 50 from above and below the workpiece unit 200.

[0080] In Embodiment 1, during the clamping step 1004, the braking device 1 controls the rotation mechanism via the operation control unit 101 of the control unit 100 to position a rectangular clamping member 44 with a length corresponding to the planned division line 206 upward from the rotating body 43, and controls the rotation drive mechanism to position the planned division line 206-1 of the workpiece 201 parallel to the Y-axis direction. In Embodiment 1, during the clamping step 1004, the braking device 1 controls the X-axis movement unit 30 via the operation control unit 101 of the control unit 100 to position the lower end of the upper clamping member 52 above the device 207 (corresponding to an area, hereinafter referred to as reference numeral 207-1 in Figure 13) adjacent to the rear side in the X-axis direction in Figure 1 on the planned division line 206-1, position the upper end of the rectangular clamping member 44 below the device 207-1 adjacent to the rear side in the X-axis direction in Figure 1 on the planned division line 206-1, and position the lower end of the pressing member 60 above the device 207 (corresponding to an area, hereinafter referred to as reference numeral 207-2 in Figure 13) adjacent to the front side in the X-axis direction in Figure 1 on the planned division line 206-1.

[0081] In Embodiment 1, during the clamping step 1004, the braking device 1, with the operation control unit 101 of the control unit 100 controlling the Z-axis movement unit 34, raises the rotating body 43 and the rectangular clamping member 44, pressing the device 207-1 adjacent to the planned division line 206-1 of the workpiece 201 upward via the sheet 202, thereby clamping the device 207-1 adjacent to the planned division line 206-1 of the workpiece 201 between the clamping members 44 and 52 via a protective member (not shown), as shown in Figure 13. At this time, in Embodiment 1, the lower end of the pressing member 60 is located above the surface 205 of the workpiece 201. After the clamping step 1004, the process proceeds to the division step 1005 and the load detection step 1006.

[0082] (Dividing step and load detection step) Figure 14 is a schematic side view showing the splitting step and load detection step of the braking method shown in Figure 10 in a partial cross-section. The splitting step 1005 is a step in which, after performing the clamping step 1004, the device 207 of the workpiece 201 in the area adjacent to the planned splitting line 206 to be split is pressed with the pressing member 60 on the opposite side of the clamping units 41 and 50, straddling the planned splitting line 206 to be split, thereby braking the workpiece 201 along the planned splitting line 206 to be split. The load detection step 1006 is a step in which the load value at which the pressing member 60 presses the workpiece 201 during the execution of the splitting step 1005 is detected.

[0083] In Embodiment 1, during the splitting step 1005, the braking device 1 controls the lifting unit 36 ​​based on the splitting conditions, with the operation control unit 101 of the control unit 100 controlling the moving base 5 and pressing member 60 of the upper clamping unit 50. As a result, the upper clamping member 52 clamps the device 207-1 adjacent to the planned splitting line 206-1 of the workpiece 201 between itself and the rectangular clamping member 44 via a protective member (not shown). Therefore, the rod 55 of the cylinder unit 51 retracts without the upper clamping member 52 descending, and the slide unit 53 causes the upper clamping member 52 to rise relative to the moving base 5.

[0084] Furthermore, as the movable base 5 and pressing member 60 of the upper clamping unit 50 descend, the pressing member 60 descends, and its lower end comes into contact with a device 207-2 adjacent to the planned division line 206-1 on the opposite side of the clamping units 41 and 50 on the surface 205 of the workpiece 201 via a protective member (not shown). The pressing member 60 descends further, and as shown in Figure 14, its lower end is positioned below the lower end of the upper clamping member 52, thereby dividing the planned division line 206-1 between the clamping members 44 and 52 and the pressing member 60. In Embodiment 1, during the splitting step 1005, the braking device 1 controls the lifting unit 36 ​​to raise the movable base 5 and the pressing member 60 after the operation control unit 101 of the control unit 100 lowers them according to the splitting conditions, and also controls the Z-axis moving unit 34 to lower the rotating body 43 and the rectangular clamping member 44.

[0085] Furthermore, in Embodiment 1, during the load detection step 1006 while the splitting step 1005 is being performed, when the lower end of the pressing member 60 comes into contact with the device 207-2 adjacent to the planned splitting line 206-1 on the opposite side of the clamping units 41 and 50 on the surface 205 of the workpiece 201 via a protective member, the load value, which is the measurement result of the load cell 71, rises from zero. In Embodiment 1, during the load detection step 1006 while the splitting step 1005 is being performed, when the pressing member 60 splits the planned splitting line, the load value, which is the measurement result of the load cell 71, falls from the maximum value of 300. In Embodiment 1, during the load detection step 1006 while the splitting step 1005 is being performed, the braking device 1 has the operation control unit 101 of the control unit 100 temporarily store the load value, which is the measurement result of the load cell 71, in the storage unit 103, linked to the elapsed time and the planned splitting line 206-1.

[0086] (Judgment step) The determination step 1007 is a step in which the division result is determined, which is whether or not the workpiece 201 has been divided along the planned division line 206-1 that should be divided, based on the load value detected in the load detection step 1006.

[0087] In Embodiment 1, in the determination step 1007, the braking device 1 calculates the maximum value 300 of the load value that changes with elapsed time, which has been temporarily stored in the memory unit 103 by the determination unit 102 of the control unit 100. When calculating the maximum value 300, the determination unit 102 of the control unit 100 differentiates the load value that changes with elapsed time with respect to time, and calculates the value obtained by this differentiation, i.e., the load value at the time when the amount of change in the load value is largest, as the maximum value 300. In addition, in the present invention, the operation control unit 101 of the control unit 100 may also calculate the load value at the time when the load value changes from rising to falling as the maximum value 300.

[0088] In Embodiment 1, in the determination step 1007, the braking device 1 determines whether the determination unit 102 of the control unit 100 determines that the load value after a predetermined time of 400 elapsed from the maximum value 300 is less than the first predetermined value 301, or is greater than or equal to the first predetermined value 301 and less than the second predetermined value 302, or is greater than or equal to the second predetermined value 302. In Embodiment 1, in the determination step 1007, if the determination unit 102 of the control unit 100 determines that the load value after a predetermined time of 400 elapsed from the maximum value 300 is less than the first predetermined value 301, the braking device 1 determines that the division result of the planned division line 206 is a complete division.

[0089] In Embodiment 1, in the determination step 1007, the braking device 1 determines that the division result of the planned division line 206 is incomplete if the determination unit 102 of the control unit 100 determines that the load value after a predetermined time of 400 elapsed from the maximum value 300 is greater than or equal to a first predetermined value 301 and less than a second predetermined value 302. In Embodiment 1, in the determination step 1007, the braking device 1 determines that the division result of the planned division line 206 is not divided if the determination unit 102 of the control unit 100 determines that the load value after a predetermined time of 400 elapsed from the maximum value 300 is greater than or equal to a second predetermined value 302. In Embodiment 1, in the determination step 1007, the braking device 1 associates the division result determined by the determination unit 102 of the control unit 100 with the planned division line 206 and stores it in the storage unit 103.

[0090] Subsequently, the operation control unit 101 of the control unit 100 determines whether the division operation of all division lines 206 has been completed based on the division conditions (step 1008). If the operation control unit 101 of the control unit 100 determines that the division operation of all division lines 206 has not been completed (step 1008: No), it returns to the detection step 1003 and performs the division operation for the next division line 206 to be divided based on the division conditions, i.e., the detection step 1003, the clamping step 1004, the division step 1005, and the load detection step 1006. In Embodiment 1, the braking device 1 performs the division operation sequentially from the end division lines 206 of the workpiece 201. If the operation control unit 101 of the control unit 100 determines that the division operation of all division lines 206 has been completed (step 1008: Yes), the braking device 1 terminates the division operation.

[0091] In Embodiment 1, during the splitting operation, once the splitting operation of all parallel splitting lines 206 on one side of the planned splitting lines 206 is completed, the frame fixing member 12 is rotated 90 degrees around its axis to perform the splitting operation of the other parallel splitting line 206. At this time, when performing the splitting operation on the other planned splitting line 206, since one of the planned splitting lines 206 has already been split, it is likely that some planned splitting lines 206 will be incompletely split. For this reason, in Embodiment 1, it is preferable for the braking device 1 to perform the splitting operation again on the 203 that has been determined to be unsplit or incompletely split.

[0092] Furthermore, in Embodiment 1, during the splitting operation, the display unit 110 of the braking device 1 can display the splitting status display information 500 shown in Figure 15 on the display screen 111. Figure 15 is a schematic diagram showing an example of the splitting status display information displayed on the display screen by the display unit of the braking device shown in Figure 1.

[0093] In Embodiment 1, the division status display information 500 is displayed on the display screen 111 when any one of the operation areas 502 of the menu area 501 set at the bottom of the display screen 111 is pressed. In Embodiment 1, the division status display information 500 is set up to include a wafer whole map display area 510 and a division result display area 520.

[0094] The wafer-wide map display area 510 displays the wafer-wide map 511 generated by the operation control unit 101 of the control unit 100. The wafer-wide map 511 displays the outline of the workpiece 201 generated by the operation control unit 101 of the control unit 100 based on the division conditions, and the division results of each division line 206 at each division line 206 of the workpiece 201. In Figure 15, division lines 206 that have not yet been divided are shown in white, for example, as dashed lines; division lines 206 that are completely divided are shown in blue, for example, as solid lines; division lines 206 that are incompletely divided are shown in yellow, for example, as dashed lines; and division lines 206 that are not divided are shown in red, for example, as dashed lines.

[0095] The division result display area 520 is configured to include a measurement result display area 521 showing the measurement results of the load cell 71, a first maximum value display area 522 showing the maximum values ​​300 of multiple division line 206 that have recently undergone division operations as a bar graph, a load value display area 523 showing the changes in load values ​​of multiple division line 206 that have recently undergone division operations, and a second maximum value display area 524 showing the maximum value 300 of one division line 206 that has recently undergone division operations. In this way, the display unit 110 displays the division status display information 500 to display a wafer map 511 including each division line 206, and also displays the division results for each division line 206.

[0096] Furthermore, in the braking device 1 according to Embodiment 1, when any position on the wafer map 511 of the display unit 110 is pressed while the device is paused or when the splitting operation is not being performed after the splitting operation is completed, the operation control unit 101 of the control unit 100 controls the X-axis movement unit 30 and the Y-axis movement unit 32 to position the detection unit 20 above the pressed position on the workpiece 201. The braking device 1 uses the operation control unit 101 of the control unit 100 to capture an image of the pressed position on the workpiece 201 with the imaging camera 21 of the detection unit 20, and acquires an image 600, as shown in Figure 16 as an example. The braking device 1 according to Embodiment 1 displays the image 600 acquired by capturing the pressed position on the workpiece 201 on the display screen 111 of the display unit 110, for example, when the operation area 502 of the menu area 501 is pressed.

[0097] Figure 16 is a schematic diagram showing a portion of the surface of a workpiece captured by an imaging camera displayed on the display screen of the display unit of the braking device shown in Figure 1. The image 600 shown in Figure 16 includes a groove 211 formed on the division line 206 that divides the workpiece 201. In this way, the braking device 1, with the wafer map 511 of the workpiece unit 200, whose frame 203 is fixed by the frame fixing unit 10, displayed on the display unit 110, positions the imaging camera 21 at the division line 206 of the workpiece unit 200 corresponding to the division line 206 specified on the wafer map 511 displayed on the display unit 110, and captures the division line 206.

[0098] The braking device 1 and braking method according to Embodiment 1 described above include a load cell 71 that measures the load applied by the pressing member 60 to the workpiece 201, and a determination unit 102 that determines whether or not the workpiece 201 has been divided along the planned division line 206-1 based on the load value measured by the load cell 71. Therefore, it has the effect of reducing the amount of work required of the operator to confirm whether or not the workpiece 201 has been divided.

[0099] Furthermore, in the braking device 1 and braking method according to Embodiment 1, the determination unit 102 of the control unit 100 determines the division result based on the state of the decrease in the load value over a predetermined time 400 after the load value, which is the measurement result of the load cell 71, has risen and then started to fall, so that the division result of the workpiece 201 can be accurately determined.

[0100] Furthermore, in the braking device 1 and braking method according to Embodiment 1, the determination unit 102 of the control unit 100 determines and stores, based on the load value measured by the load cell 71, that all planned division lines 206 of the workpiece 201 are either undivided, fully divided, or incompletely divided as the division result, so that the division result of each planned division line 206 can be grasped.

[0101] Furthermore, in the braking device 1 and braking method according to Embodiment 1, the display unit 110 displays a wafer-wide map 511 showing the division results for each division line 206, so that the operator can easily grasp the division results for each division line 206.

[0102] Furthermore, in the braking device 1 and braking method according to Embodiment 1, with the wafer map 511 displayed on the display unit 110, the imaging camera 21 captures the division line 206 specified on the wafer map 511 displayed on the display unit 110, so that the operator can grasp the division result of the division line 206 at any position.

[0103] It should be noted that the present invention is not limited to the embodiments described above. That is, it can be implemented with various modifications without departing from the core principles of the present invention. For example, in the present invention, the surface 205 of the workpiece 201 may be attached to the sheet 202. In this case, it is desirable that the braking device 1 has the detection unit 20 positioned below the workpiece unit 200 to which the frame 203 is fixed by the frame fixing unit 10. [Explanation of Symbols]

[0104] 1. Braking device 10 Frame Fixing Unit 20 detection units 21 Imaging camera 40 clamping units 60 Pressing member 71 Load cell 100 Control Unit (Controller) 102 Judgment section 103 Storage section 110 Display Unit 200 work units 201 Work 202 seats 203 Frame 206 planned division lines 206-1 Planned division lines to be divided 207 devices 207-1 Device (area) 207-2 Device (area) 208 Split starting point 400 Scheduled time 511 Wafer Map 1001 Work Unit Formation Step 1002 Frame fixing step 1003 Detection Step 1004 Clamping step 1005 division steps 1006 Load detection step 1007 Decision Step

Claims

1. A braking device comprising: a frame fixing unit for fixing the frame of a work unit consisting of a workpiece to which multiple division lines are set and a division starting point is formed along each division line, a sheet to which the workpiece is attached, and a frame to which the outer circumference of the sheet is attached; a detection unit for detecting the division lines of the work unit whose frame is fixed by the frame fixing unit; a clamping unit for clamping the workpiece in the region adjacent to the division line to be divided from above and below the work unit; and a pressing member for pressing the workpiece in the region adjacent to the division line to be divided on the opposite side of the clamping unit across the division line to be divided, thereby braking the workpiece along the division line to be divided, A load cell that measures the load applied by the pressing member to the workpiece, A controller that determines whether or not the workpiece was divided along the planned division line based on the load value measured by the load cell, Equipped with, The controller is a braking device that determines and stores, based on the load values ​​measured by the load cell, whether all planned division lines of the workpiece are undivided, divided, or possibly partially undivided as a division result.

2. A braking device comprising: a frame fixing unit for fixing the frame of a work unit consisting of a workpiece to which multiple division lines are set and a division starting point is formed along each division line, a sheet to which the workpiece is attached, and a frame to which the outer circumference of the sheet is attached; a detection unit for detecting the division lines of the work unit whose frame is fixed by the frame fixing unit; a clamping unit for clamping the workpiece in the region adjacent to the division line to be divided from above and below the work unit; and a pressing member for pressing the workpiece in the region adjacent to the division line to be divided on the opposite side of the clamping unit across the division line to be divided, thereby braking the workpiece along the division line to be divided, A load cell that measures the load applied by the pressing member to the workpiece, A controller that determines whether or not the workpiece was divided along the planned division line based on the load value measured by the load cell, A display unit is provided, The display unit is a breaking device that displays a map of the entire wafer including each planned division line and displays the division result for each planned division line.

3. The braking device according to claim 1 or 2, wherein the controller determines the division result based on the state of the decrease in the load value over a predetermined time period after the load value has risen and then started to decrease.

4. Equipped with a display unit, The braking device according to claim 1, wherein the display unit displays a map of the entire wafer including each of the planned division lines and displays the division result for each of the planned division lines.

5. The detection unit includes an imaging camera, The braking device according to claim 4, wherein, with a whole wafer map of a work unit whose frame is fixed by the frame fixing unit displayed on the display unit, the imaging camera is positioned at the division line of the work unit corresponding to the division line specified on the whole wafer map displayed on the display unit, and the division line is imaged.

6. The braking device according to claim 2, wherein the controller determines and stores, based on the load values ​​measured by the load cell, that for all planned division lines of the workpiece, the division result is either not divided, divided, or possibly not divided in part.

7. The detection unit includes an imaging camera, The braking device according to claim 2, wherein, with a whole wafer map of a work unit whose frame is fixed by the frame fixing unit displayed on the display unit, the imaging camera is positioned at the division line of the work unit corresponding to the division line specified on the whole wafer map displayed on the display unit, and the division line is imaged.

8. A work unit formation step involves forming a work unit consisting of a workpiece to which a division starting point is formed along a planned division line, a sheet to which the workpiece is attached, and a frame to which the outer periphery of the sheet is attached. A frame fixing step in which the frame of the work unit is fixed with a frame fixing unit, A detection step of detecting the division line to be divided from the work unit to which the frame is fixed using the frame fixing unit, After performing the detection step, a clamping step is performed in which the workpiece in the area adjacent to the planned division line to be divided is clamped from above and below the workpiece unit by a clamping unit, After performing the clamping step, a splitting step is performed in which a pressing member presses the workpiece in the area adjacent to the planned splitting line with the opposite side of the clamping unit, straddling the planned splitting line, thereby braking the workpiece along the planned splitting line. A load detection step for detecting the load value at which the pressing member presses the workpiece during the execution of the division step, A determination step to determine whether the workpiece was divided along the planned division line based on the load value detected in the load detection step, Equipped with, A braking method in which the braking device according to claim 1 or claim 2 performs the frame fixing step, the detection step, the clamping step, the splitting step, the load detection step, and the determination step.

Images