Lid component, package, and glass substrate

Abstract

To achieve high extraction efficiency in a lid member used for a package including a light-emitting element.SOLUTION: A glass lid member 4 includes: a plate-like frame part 7; and a dorm-like projection part 8 projecting from a frame part 7. The projection part 8 has an inner surface 8a and an outer surface 8b. The inner surface 8a of the protrusion part 8 is formed with an anti-reflection coating 10a.SELECTED DRAWING: Figure 2

Description

Technical Field

[0001] The present invention relates to a lid member for a package, a package having the lid member, and a glass substrate for forming the lid member.

Background Art

[0002] For example, Patent Document 1 discloses a package including a substrate (substrate) on which a light-emitting element (LED element) is mounted, a dome-shaped lid member (light-transmissive cover) fixed to the substrate so as to cover the light-emitting element, and an adhesive for joining the substrate and the lid member. In this package, by configuring the lid member in a dome shape, a space for accommodating the light-emitting element is secured between the lid member and the substrate.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] Regarding packages using a dome-shaped lid member as described above, research and development for further performance improvement are being promoted.

[0005] An object of the present invention is to improve the light extraction efficiency of a lid member used in a package including a light-emitting element.

Means for Solving the Problems

[0006] The present invention is for solving the above problems, and is a glass lid member used in a package including a light-emitting element, comprising a plate-shaped frame portion and a dome-shaped protruding portion protruding from the frame portion, the protruding portion having an inner surface and an outer surface, and an antireflection film being formed on at least one of the inner surface and the outer surface of the protruding portion.

[0007] With this configuration, by forming an anti-reflective film on the inner surface of the protrusions in the lid member, light emitted from the light-emitting element can be efficiently transmitted through the protrusions. This makes it possible to maximize the light extraction efficiency of the lid member used in packaging.

[0008] In the lid member according to the present invention, the frame portion has a first main surface connected to the inner surface of the protruding portion and a second main surface connected to the outer surface of the protruding portion, and the anti-reflective film may be formed on the first main surface of the frame portion.

[0009] The anti-reflective coating formed on the first main surface of the frame has the function of relieving the stress acting on the joint when the frame is joined to the base. This allows the lid member to be joined to the base without being damaged.

[0010] In the lid member according to the present invention, a metal layer may be formed on the side of the anti-reflective film formed on the first main surface of the frame portion that is opposite to the first main surface.

[0011] With this configuration, when forming the bonding material on the lid member, using this metal layer allows the bonding material to adhere well to the metal layer, and as a result, the lid member and the base body can be suitably joined.

[0012] In the lid member according to the present invention, the anti-reflective film is formed on the inner surface of the protruding portion, and the protruding portion comprises a top portion and a base portion integrally formed with the frame portion, and the thickness of the anti-reflective film formed on the top portion may be thicker than the thickness of the anti-reflective film formed on the base portion.

[0013] In the lid member according to the present invention, the anti-reflective coating may include a hafnium oxide film.

[0014] In the lid member according to the present invention, the thickness of the top portion of the protrusion may be thinner than the thickness of the base portion of the protrusion.

[0015] With this configuration, by making the thickness of the top of the protrusion of the lid member thinner than the thickness of the base, it is possible to increase the transmittance of the protrusion. In addition, since the thickness of the base of the protrusion is thicker than the thickness of the top, the strength of the base can be increased compared to the top. Therefore, it is possible to achieve both improved light extraction efficiency and strength of the lid member.

[0016] In the lid member according to the present invention, a second anti-reflective coating may be formed on the outer surface of the protruding portion. This further enhances the light extraction efficiency of the lid member.

[0017] The thickness of the second anti-reflective coating formed on the top portion may be greater than the thickness of the second anti-reflective coating formed on the base portion.

[0018] The protruding portion extends from the frame portion at a predetermined protrusion angle, and the protrusion angle of the protruding portion may be 40° or more and 90° or less. This makes it possible to improve the light extraction efficiency at the protruding portion.

[0019] The protruding portion comprises a top portion and a base portion integrally formed with the frame portion, and the protruding portion has an opening formed on the inner surface side, and the ratio L / H of the opening length L of the opening to the protruding height H of the protruding portion may be 1.6 or more and 5.0 or less. This makes it possible to increase the light extraction efficiency at the protruding portion.

[0020] In the lid member according to the present invention, the opening may be configured in a rectangular shape.

[0021] In the lid member according to the present invention, the inner surface may have a first curved surface, a second curved surface, and an inflection point located between the first curved surface and the second curved surface. Thereby, the shape of the lid member becomes smooth, and it is possible to provide resistance to external impacts. In the case of the lid member having this inflection point, since there is a possibility that the light extraction efficiency in the protruding portion may decrease, by defining the above-described protruding angle and the ratio L / H of the opening length L of the opening portion to the protruding height H of the protruding portion, it is possible to increase the light extraction efficiency in the protruding portion.

[0022] The present invention is for solving the above problems, and is a glass lid member used for a package including a light-emitting element, comprising a plate-shaped frame portion and a dome-shaped protruding portion protruding from the frame portion, the protruding portion having an inner surface and an outer surface, the frame portion having a first main surface connected to the inner surface of the protruding portion and a second main surface connected to the outer surface of the protruding portion, the inner surface having a first curved surface connected to the first main surface of the frame portion and convex toward the inside of the protruding portion, a second curved surface convex toward the outside of the protruding portion, and an inflection point located between the first curved surface and the second curved surface, the protruding portion protruding from the frame portion at a protruding angle formed by a tangent line at the inflection point and the first main surface of the frame portion, and the protruding angle of the protruding portion being 40° or more and 90° or less. 。

[0023] According to such a configuration, in the case of the shape of the protruding portion of the lid member having the first curved surface and the second curved surface, since the protruding angle tends to be low, light emitted from the light-emitting element is likely to scatter inside the protruding portion and the light extraction efficiency tends to decrease. However, by increasing the protruding angle, scattering of light inside the protruding portion can be prevented, and the light extraction efficiency in the lid member can be increased.

[0024] The present invention is for solving the above problems, and is characterized by being a package including a light-emitting element, a substrate that supports the light-emitting element, and the above-described lid member.

[0025] According to such a configuration, by forming an antireflection film on the inner surface of the protruding portion of the lid member, the light emitted from the light-emitting element can be efficiently transmitted through the protruding portion. As a result, it is possible to improve the light extraction efficiency of the package as much as possible.

[0026] The present invention is for solving the above problems, and is a glass substrate for manufacturing a lid member used in a package including a light-emitting element, comprising a plate-shaped frame portion and a plurality of dome-shaped protruding portions protruding from the frame portion, the protruding portions having an inner surface and an outer surface, and an antireflection film being formed on the inner surface of the protruding portions.

[0027] According to such a configuration, by forming an antireflection film on the inner surface of the protruding portion of the glass substrate, the light emitted from the light-emitting element can be efficiently transmitted through the protruding portion. As a result, it is possible to improve the light extraction efficiency of the lid member manufactured from the glass substrate as much as possible.

[0028] The present invention is for solving the above problems, and is a glass substrate for manufacturing a lid member used in a package including a light-emitting element, comprising a plate-shaped frame portion and a plurality of dome-shaped protruding portions protruding from the frame portion, the protruding portions having an inner surface and an outer surface, the frame portion having a first main surface connected to the inner surface of the protruding portion and a second main surface connected to the outer surface of the protruding portion, the inner surface having a first curved surface connected to the first main surface of the frame portion and convex toward the inside of the protruding portion, a second curved surface convex toward the outside of the protruding portion, and an inflection point located between the first curved surface and the second curved surface, the protruding portion protruding from the frame portion at a protruding angle formed by a tangent line at the inflection point and the first main surface of the frame portion, and the protruding angle of the protruding portion being 40° or more and 90° or less.

[0029] With this configuration, in the case of a lid member having a first curved surface and a second curved surface, the protrusion angle tends to be low, so the light emitted from the light-emitting element tends to scatter inside the protrusion, reducing the light extraction efficiency. However, by increasing the protrusion angle, it is possible to prevent light scattering inside the protrusion and maximize the light extraction efficiency of the lid member manufactured from a glass substrate. [Effects of the Invention]

[0030] According to the present invention, the light extraction efficiency of a lid member used in a package containing a light-emitting element can be improved. [Brief explanation of the drawing]

[0031] [Figure 1] This is a perspective view of the package. [Figure 2] This is a cross-sectional view of the package. [Figure 3] This is a cross-sectional view of the substrate. [Figure 4] This is a plan view of the substrate. [Figure 5] Cross-sectional view of the lid member [Figure 6] This is a bottom view of the lid component. [Figure 7] This is a cross-sectional view showing the preparation steps for the packaging manufacturing method. [Figure 8] This is a cross-sectional view showing the preparation steps for the packaging manufacturing method. [Figure 9] This is a cross-sectional view showing the film formation process of the packaging manufacturing method. [Figure 10] This is a cross-sectional view showing the joining process of the package manufacturing method. [Figure 11] This is a cross-sectional view showing the joining process of the package manufacturing method. [Figure 12] This is a cross-sectional view showing a glass substrate for manufacturing a lid component for a package. [Figure 13] This is a cross-sectional view showing another example of a lid member. [Figure 14] This is a cross-sectional view showing another example of a lid member. [Figure 15]This is a plan view showing another example of a lid member. [Figure 16] This is a plan view showing another example of a lid member. [Figure 17] This is a bottom view showing another example of a lid component. [Figure 18] A cross-sectional view showing another example of the preparation process in the manufacturing method of a package. [Figure 19] This is a cross-sectional view showing another example of the package. [Figure 20] This is a cross-sectional view showing another example of a lid member. [Figure 21] This is a cross-sectional view showing another example of the package. [Figure 22] This is a cross-sectional view of the lid component. [Figure 23] This is a cross-sectional view of the lid component. [Figure 24] This is a cross-sectional view showing the preparation steps for the packaging manufacturing method. [Figure 25] This is a cross-sectional view showing the preparation steps for the packaging manufacturing method. [Modes for carrying out the invention]

[0032] Hereinafter, embodiments for carrying out the present invention will be described with reference to the drawings. Figures 1 to 19 show one embodiment of the lid member, package, and glass substrate according to the present invention.

[0033] As shown in Figures 1 and 2, the package 1 comprises a base body 2, a light-emitting element 3 supported by the base body 2, a lid member 4 covering the base body 2 and the light-emitting element 3, and a sealing part 5 that hermetically joins the base body 2 and the lid member 4.

[0034] Figures 3 and 4 show the base body 2 before the lid member 4 is joined. The base body 2 has a first main surface 2a that supports the light-emitting element 3, a second main surface 2b located on the opposite side of the first main surface 2a, and a metal layer 6 formed on the first main surface 2a.

[0035] Examples of materials for the substrate 2 include ceramics such as aluminum nitride, aluminum oxide, silicon carbide, and silicon nitride; glass ceramics formed by mixing and sintering these ceramics with glass powder; and alloys such as Fe-Ni-Co alloy, Cu-W alloy, and Kovar (registered trademark).

[0036] As shown in Figure 4, the metal layer 6 has a frame shape that surrounds the light-emitting element 3. The metal layer 6 is shown as having a rectangular shape, but is not limited to this shape. The metal layer 6 may be configured in a circular shape, for example, to surround the light-emitting element 3.

[0037] The metal layer 6 comprises three layers in order from the first main surface 2a side: a base layer, an intermediate layer, and a surface layer. Examples of metals used for the base layer include Cr, Ta, W, Ti, Mo, Ni, and Pt. Examples of metals used for the intermediate layer include Ni, Pt, and Pd. Examples of metals used for the surface layer include Au, Sn, Ag, Ni, and Pt. The metal used in the metal layer 6 may be a single element or an alloy.

[0038] Methods for forming the metal layer 6 on the first main surface 2a of the substrate 2 include, for example, sputtering, vacuum deposition, vacuum deposition using ion assistance or ion plating, and CVD.

[0039] The light-emitting element 3 is fixed to the first main surface 2a of the substrate 2. In this embodiment, a package 1 using an ultraviolet irradiation LED as the light-emitting element 3 is exemplified, but the light-emitting element 3 according to the present invention is not limited to this embodiment, and an infrared LED or a visible light LED can be used.

[0040] Figures 5 and 6 show the lid member 4 before it is joined to the base body 2. The lid member 4 is manufactured by shaping a portion of a glass plate. The glass used for the lid member 4 is preferably alkali-free glass, borosilicate glass, aluminosilicate glass, quartz glass, or crystallized glass. Alkali-free glass, borosilicate glass, and aluminosilicate glass allow for both high transmittance and high workability during shaping. Quartz glass allows for significantly high transmittance in the ultraviolet region while maintaining workability during shaping. Crystallized glass allows for both high transmittance and high fracture strength.

[0041] When the glass is borosilicate glass, aluminosilicate glass, or alkali-free glass, it is preferable that the glass composition contains, by mass%, SiO2: 50-75%, Al2O3: 1-25%, B2O3: 1-30%, Li2O+Na2O+K2O: 0-20%, and MgO+CaO+SrO+BaO: 0-20%. If the composition of the glass falls within the above compositional range, it falls under these glass systems.

[0042] In the case of crystallized glass, it is preferable that the glass composition contains, by mass%, SiO2: 60-80%, Al2O3: 3-30%, Li2O+Na2O+K2O: 1-20%, and MgO+CaO+SrO+BaO: 5-20%, and that it is a low thermal expansion crystallized glass in which a β-quartz solid solution or β-spodumene precipitates as crystals from within the glass. Here, low thermal expansion means that in a temperature range of 30-300°C, the value of the coefficient of thermal expansion is -10 × 10⁻⁶. -7 ~20×10 -7 This refers to a temperature of / ℃.

[0043] As shown in Figures 2 and 5, the lid member 4 comprises a plate-shaped frame portion 7, a dome-shaped projection portion 8 protruding from the frame portion 7, a connecting portion 9 connecting the frame portion 7 and the projection portion 8, and a first anti-reflective coating 10a and a second anti-reflective coating 10b.

[0044] The frame portion 7 has, for example, a certain thickness, but is not limited to this embodiment. The thickness of the frame portion 7 is, for example, 0.2 mm or more and 2 mm or less. The frame portion 7 has a first main surface 7a and a second main surface 7b located on the opposite side of the first main surface 7a. The surface roughness (arithmetic mean roughness) Ra of the first main surface 7a is preferably 1 nm or less, more preferably 0.5 nm or less, and even more preferably 0.3 nm or less. The surface roughness Ra of the second main surface 7b is preferably 1 nm or less, more preferably 0.5 nm or less, and even more preferably 0.3 nm or less.

[0045] The protruding portion 8, together with the first main surface 2a of the base body 2, is for forming a housing space for the light-emitting element 3. The protruding portion 8 is formed at the central position of the frame portion 7, but is not limited to this configuration. The protruding portion 8 has an inner surface 8a configured as a concave curved surface, an outer surface 8b configured as a convex curved surface, and an opening 8c formed on the inner surface 8a side. The protruding portion 8 also comprises a base portion 11, an intermediate portion 12, and a top portion 13. The base portion 11 is formed integrally with the connecting portion 9. The intermediate portion 12 is located between the base portion 11 and the top portion 13.

[0046] The base portion 11 is defined as the portion where, when a normal line (hereinafter referred to as the "first line") L1 is drawn to the top portion 13, and a straight line (hereinafter referred to as the "third line") L3 is drawn at a 5° angle with respect to the second line L2 (hereinafter referred to as the "third line") from the intersection point P1 of this first line L1 and a straight line (hereinafter referred to as the "second line") L2 drawn along the second main surface 7b of the frame portion 7, this third line L3 intersects with the protruding portion 8. The portion where the third line L3 intersects with the inner surface 8a of the protruding portion 8 is defined as the first base portion 11a, and the outer surface 8b of the protruding portion 8 is defined as the first base portion 11a. The part that intersects with it is designated as the second base 11b.

[0047] Furthermore, the intermediate section 12 is the part where, when a straight line (hereinafter referred to as the "seventh line") L7 is drawn from the intersection point P1 of the first line L1 and the second line L2 at an angle of 60° to the second line L2, this seventh line L7 intersects with the protruding section 8.

[0048] Hereinafter, the distance from the intersection point P2 between the first line L1 and the inner surface 8a of the projection 8 to the above intersection point P1 will be referred to as the projection height of the projection 8 and will be denoted by the symbol H. The projection height H of the projection 8 is, for example, 0.5 mm or more and 80 mm or less.

[0049] The outer diameter D of the projection 8 is the diameter of the circle of points located at the position of the second base 11b, and is, for example, between 2 mm and 150 mm. As shown in Figure 5, the thickness of the projection 8 gradually decreases from the base 11 to the top 13. Therefore, the thickness Tmin of the top 13 is thinner than the thickness Tmax of the base 11.

[0050] The thickness Tmax of the base 11 is, for example, 0.19 mm or more and 1.9 mm or less. The thickness Tmin of the top 13 is, for example, 0.15 mm or more and 1.0 mm or less. The ratio Tmin / Tmax of the thickness Tmax of the base 11 to the thickness Tmin of the top 13 is preferably 0.08 or more and 0.9 or less, more preferably 0.1 or more and 0.8 or less, and even more preferably 0.2 or more and 0.5 or less.

[0051] As shown in Figure 5, the protruding portion 8 protrudes from the frame portion 7 at a predetermined protrusion angle θ. The protrusion angle θ is defined as follows.

[0052] The intersection of the second line L2 and the inner surface 8a of the protrusion 8 is defined as the first reference point RP1. From point P3, which is at a height of half the protrusion height H (H / 2) on the first line L1, draw a straight line (hereinafter referred to as the "fourth line") L4 parallel to the second line L2, and the intersection of this fourth line L4 and the inner surface 8a of the protrusion 8 is defined as the second reference point RP2. Draw a straight line (hereinafter referred to as the "fifth line") L5 passing through the first reference point RP1 and the second reference point RP2, and define the angle (acute angle) between this fifth line L5 and the sixth line L6 drawn along the first main surface 7a of the frame 7 as the protrusion angle θ.

[0053] In this embodiment, the projection angle θ is preferably 40° or more, 45° or more, 50° or more, 60° or more, preferably 90° or less, 85° or less, or 80° or less.

[0054] The inner surface 8a and outer surface 8b of the protruding portion 8 are configured as a continuous curved surface extending from the base 11 to the top 13. The surface roughness Ra of the inner surface 8a is preferably 1 nm or less, more preferably 0.5 nm or less, and even more preferably 0.3 nm or less. The surface roughness Ra of the outer surface 8b is preferably 1 nm or less, more preferably 0.5 nm or less, and even more preferably 0.3 nm or less.

[0055] The opening 8c of the protruding portion 8 is for inserting the light-emitting element 3, which is provided on the base 2, into the inside of the protruding portion 8 when fixing the lid member 4 to the base 2. As shown in Figure 6, the opening 8c of the protruding portion 8 is configured in a circular shape, but is not limited to this shape.

[0056] The opening length L of the opening 8c (the diameter of the opening 8c in this embodiment) is, for example, 1.5 mm or more and 80 mm or less. The ratio L / H of the opening length L of the opening 8c to the protruding height H of the protruding portion 8 is preferably 1.6 or more and 2.1 or more, and preferably 5.0 or less and 3.0 or less.

[0057] As shown in Figures 2 and 5, the connecting portion 9 has a curved shape in order to connect the base portion 11 and the frame portion 7. The connecting portion 9 has a first curved surface 9a that connects the first main surface 7a of the frame portion 7 and the inner surface 8a of the protruding portion 8, and a second curved surface 9b that connects the outer surface 8b of the protruding portion 8 and the second main surface 7b of the frame portion 7.

[0058] The radius of curvature of the first curved surface 9a is greater than the radius of curvature of the second curved surface 9b. The radius of curvature of the first curved surface 9a is preferably 0.5 mm or more, 1.0 mm or more, and preferably 5.0 mm or less, and preferably 4.0 mm or less. The radius of curvature of the second curved surface 9b is preferably 0.5 mm or more, 1.0 mm or more, and preferably 5.0 mm or less, and preferably 4.0 mm or less. The surface roughness Ra of the first curved surface 9a is preferably 1.0 nm or less, more preferably 0.5 nm or less, and even more preferably 0.3 nm or less. The surface roughness Ra of the second curved surface 9b is preferably 1.0 nm or less, more preferably 0.5 nm or less, and even more preferably 0.3 nm or less.

[0059] The first anti-reflective coating 10a is formed on the inner surface 8a of the protruding portion 8 and the first main surface 7a of the frame portion 7. The first anti-reflective coating 10a has a multilayer structure that alternately includes, for example, a silicon oxide film (SiO2) as the first film and a hafnium oxide film (HfO2) as the second film.

[0060] In the first anti-reflective coating 10a, the portion 10a1 formed on the inner surface 8a of the protrusion 8 (hereinafter referred to as the "anti-reflective portion") is configured such that the film thickness gradually decreases from the top 13 of the protrusion 8 towards the base 11. That is, the anti-reflective portion 10a1 is thickest at the top 13 and thinnest at the base 11.

[0061] The thickness of the first anti-reflective film 10a at the base 11 of the protrusion 8 is preferably 0.12 μm or more and 0.64 μm or less. The thickness of the first anti-reflective film 10a at the middle 12 of the protrusion 8 is preferably 0.14 μm or more and 0.72 μm or less. The thickness of the first anti-reflective film 10a at the top 13 of the protrusion 8 is preferably 0.15 μm or more and 0.8 μm or less.

[0062] In the first anti-reflective coating 10a, the portion 10a2 formed on the first main surface 7a of the frame portion 7 (hereinafter referred to as the "buffer portion") has a certain film thickness. In addition to the function of preventing the reflection of ultraviolet rays, the buffer portion 10a2 also has the function of relieving the stress acting on the frame portion 7 when the lid member 4 is joined to the base 2.

[0063] The second anti-reflective coating 10b is formed on the outer surface 8b of the protruding portion 8 and the second main surface 7b of the frame portion 7. The second anti-reflective coating 10b has a multilayer structure that alternately includes, for example, a silicon oxide film (SiO2) as the first film and a hafnium oxide film (HfO2) as the second film.

[0064] In the second anti-reflective coating 10b, the portion 10b1 formed on the outer surface 8b of the protruding portion 8 (hereinafter referred to as the "anti-reflective portion") is configured such that the film thickness gradually decreases from the top portion 13 towards the base portion 11. That is, the anti-reflective portion 10b1 is thickest at the top portion 13 and thinnest at the base portion 11.

[0065] The thickness of the second anti-reflective film 10b at the base 11 of the protrusion 8 is preferably 0.12 μm or more and 0.64 μm or less. The thickness of the second anti-reflective film 10b at the middle 12 of the protrusion 8 is preferably 0.14 μm or more and 0.72 μm or less. The thickness of the second anti-reflective film 10b at the top 13 of the protrusion 8 is preferably 0.15 μm or more and 0.8 μm or less.

[0066] Furthermore, if the light extraction efficiency is sufficient, it is not necessary to form the second anti-reflective coating 10b. However, if glass with poor weather resistance, such as borosilicate glass, is used for the lid member, the lid member 4 may deteriorate due to the external environment, resulting in a decrease in light extraction efficiency. In this case, instead of forming the second anti-reflective coating 10b on the lid member 4, it is possible to form a weather-resistant film such as an SiO2 film or an Al2O3 film. It is also possible to form a weather-resistant film such as an SiO2 film or an Al2O3 film by laminating it on the second anti-reflective coating 10b.

[0067] As shown in Figures 2, 5, and 6, the buffer portion 10a2 of the first anti-reflective coating 10a has a metal layer 14 and a joint portion 15 formed therein. The Young's modulus of the buffer portion 10a2 is preferably 250 GPa or less, more preferably 200 GPa or less, even more preferably 150 GPa or less, and particularly preferably 100 GPa or less. By defining the upper limit in this way, the buffering performance of the buffer portion 10a2 can be increased, and the effect of mitigating stress caused by the difference in thermal expansion coefficients between the joint portion 15 and the lid member 4 (frame portion 7) can be obtained. Note that the thermal expansion coefficient of the frame portion 7 is smaller than that of the joint portion 15. Also, the thermal expansion coefficient of the frame portion 7 is smaller than that of the substrate 2.

[0068] The thickness of the buffer portion 10a2 is preferably 0.1 μm or more, 0.2 μm or more, and preferably 1.0 μm or less, 0.8 μm or less. By defining the lower limit in this way, the buffering performance of the buffer portion 10a2 can be further enhanced, and the effect of mitigating stress caused by the difference in thermal expansion coefficients between the joint portion 15 and the lid member 4 (frame portion 7) can be obtained. Furthermore, by defining the upper limit in this way, the manufacturing cost of the buffer portion 10a2 can be reduced.

[0069] As shown in Figures 5 and 6, the metal layer 14 is formed to overlap the buffer portion 10a2. The metal layer 14 is formed on the surface of the buffer portion 10a2 opposite to the surface of the buffer portion 10a2 that contacts the first main surface 7a of the frame portion 7. As shown in Figure 6, the metal layer 14 has a rectangular frame shape corresponding to the shape of the metal layer 6 of the base body 2. The shape of the metal layer 14 is not limited to this embodiment. The metal layer 14 may have a circular shape or other various frame shapes. The metal layer 14 includes three layers in order from the buffer portion 10a2 side: a base layer, an intermediate layer, and a surface layer.

[0070] Examples of metals that can be used for the base layer include Cr, Ta, W, Ti, Mo, Ni, and Pt. When Cr is used for the base layer, the Young's modulus of the base layer is preferably 279 GPa or less. Examples of metals that can be used for the intermediate layer include Ni, Pt, and Pd. Examples of metals that can be used for the surface layer include Au, Sn, Ag, Ni, and Pt. The metal used in the metal layer 14 may be an elemental metal or an alloy.

[0071] As shown in Figures 5 and 6, the joint portion 15 is constructed in layers so as to overlap the metal layer 14. As shown in Figure 5, the joint portion 15 is in contact with the portion of the metal layer 14 opposite to the portion in contact with the buffer portion 10a2. As shown in Figure 6, the joint portion 15 has a rectangular frame shape corresponding to the shapes of the buffer portion 10a2 and the metal layer 14. The shape of the joint portion 15 is not limited to this embodiment and may be circular or any other frame shape.

[0072] The joint 15 is constructed of a metallic bonding material. Commercially available materials such as solder or brazing materials can be used as the metallic bonding material. Examples of metallic bonding materials include Au-Sn alloy, Pb-Sn alloy, Au-Ge alloy, and Sn-Ni alloy. By making the width of the joint 15 narrower than the width of the buffer portion 10a2, the stress effect due to the difference in thermal expansion coefficients between the joint 15 and the lid member 4 can be reduced. In this embodiment, the case where an Au-Sn alloy is used as the metallic bonding material will be described.

[0073] The sealing portion 5 is formed by integrally joining the metal layer 6 of the base body 2 and the metal layer 14 of the lid member 4 at the joint portion 15.

[0074] Next, the manufacturing method for package 1 will be described. This method comprises a preparation step of preparing the base body 2 and the lid member 4, and a joining step of joining the base body 2 and the lid member 4.

[0075] In the preparation step, a metal layer 6 is formed on the first main surface 2a of the substrate 2, and then the light-emitting element 3 is mounted on this first main surface 2a.

[0076] Furthermore, in the preparation process, a lid member 4 is formed by molding a protrusion 8 onto a glass plate, and then a first anti-reflective coating 10a is formed on the lid member 4. Subsequently, a metal layer 14 and a joint 15 are formed on the buffer portion 10a2 of the first anti-reflective coating 10a. It is also possible to further improve the light extraction efficiency by forming a second anti-reflective coating 10b on the lid member 4.

[0077] The process for manufacturing the lid member 4 will be described below with reference to Figures 7 to 9. This process comprises a molding step and a film formation step.

[0078] Figure 7 shows a molding apparatus used in the molding process. The molding apparatus 16 comprises a support base 17 for supporting the glass plate GS, a mask member 18 placed on top of the glass plate GS supported by the support base 17, and a heating source 19 for thermally deforming a part of the glass plate GS in order to form the protruding portion 8 of the lid member 4. Furthermore, the molding apparatus 16 comprises a pressing member 20 for pressing the support base 17 and the mask member 18 toward each other, and an external force generating device 21 for applying an external force to a part of the glass plate GS.

[0079] The support base 17 has a support portion 17a that supports the plate glass GS, and a space portion 17b that has an opening surrounded by the support portion 17a and allows for thermal deformation of a part of the plate glass GS. The support portion 17a of the support base 17 has a support surface that supports the main surface of the plate glass GS. In this embodiment, the opening of the support base 17 has a circular opening edge E1, but it may also have an opening edge of a polygonal shape such as a triangle or square, or an elliptical shape.

[0080] The space 17b of the support base 17 may be formed by a through hole or by a recess having an inner bottom. The space 17b of the support base 17 is configured to form the entire protruding portion 8 of the lid member 4 in a non-contact state. Examples of materials that make up the support base 17 include metal and ceramics.

[0081] The configuration is not limited to the above, but in order to accurately form the shape of the lid member 4, a lower support jig for receiving the glass plate GS may be provided in the space 17b. The lower support jig is made of metal or ceramics. As mentioned above, it is preferable to form the entire protruding portion 8 of the lid member 4 in a non-contact state, but by improving the quality of the surface of the lower support jig that comes into contact with the glass plate GS (reducing surface roughness and surface waviness), the lid member 4 can be formed accurately even when a lower support jig is used.

[0082] As shown in Figure 7, the mask member 18 has a through hole 18a. In this embodiment, the through hole 18a of the mask member 18 has a circular inner periphery E2, but it may also have an inner periphery of a polygonal shape such as a triangle or square, or an ellipse.

[0083] The support base 17 and the mask member 18 are configured such that at least a portion of the inner peripheral edge E2 of the through hole 18a in the mask member 18 is positioned inside the opening edge E1 of the support base 17. Specifically, the support base 17 and the mask member 18 are configured such that the entire inner peripheral edge E2 of the through hole 18a in the mask member 18 is positioned inside the opening edge E1 of the support base 17.

[0084] When the opening area of ​​the support base 17 is taken as 100%, the cross-sectional area of ​​the through hole 18a of the mask member 18 is preferably 95% or less, and more preferably 80% or less. At least a portion of the inner peripheral edge E2 of the through hole 18a in the mask member 18 is preferably positioned 1 mm or more inward from the opening edge E1 of the support base 17, and more preferably 3 mm or more inward.

[0085] The mask member 18 is preferably made of a material having a thermal conductivity of 1 [W / (m·K)] or less at 600°C. For example, ceramics are suitable as the material constituting the mask member 18. The thickness of the mask member 18 is preferably 1 mm or more. The mask member 18 of this embodiment has an outer shape that covers the entire outer edge of the plate glass GS.

[0086] The heating source 19 is positioned to heat the glass plate GS from the mask member 18 side. In this embodiment, the heating source 19 is a burner that sprays a flame FL toward the glass plate GS. By using a burner, the glass plate GS can be softened relatively quickly. The heating method of the heating source 19 may be, for example, resistance heating or laser heating. Furthermore, the heating source 19 may be configured by combining heating sources with different heating methods.

[0087] The pressing member 20 presses the mask member 18 toward the support base 17, for example. Examples of pressing mechanisms for the pressing member 20 include a fluid cylinder and a linear actuator. The pressing member 20 can also be configured to press the support base 17 against a fixed mask member 18.

[0088] As the external force generating device 21, for example, an exhaust device can be used. The exhaust device discharges the gas present in the space 17b of the support base 17, thereby creating negative pressure in the space 17b of the support base 17. This causes a portion of the plate glass GS to be drawn into the space 17b of the support base 17, thereby promoting the thermal deformation of a portion of the plate glass GS. As the exhaust device, for example, a pump using a Venturi mechanism is preferred.

[0089] Furthermore, the external force generating device 21 is not limited to an exhaust device; it may also be a high-pressure gas generating device that injects high-pressure gas from the mask member 18 side toward a portion of the glass plate GS. This pressurizes a portion of the glass plate GS toward the space 17b of the support base 17, thereby promoting the thermal deformation of that portion of the glass plate GS. Alternatively, the pump and the high-pressure gas generating device may be used in combination to promote the thermal deformation of a portion of the glass plate GS.

[0090] As shown in Figures 7 and 8, in the molding process, first, the mask member 18 is placed on top of the glass plate GS supported on the support base 17. In this case, at least a portion of the inner peripheral edge E2 of the through hole 18a of the mask member 18 is positioned inside the opening edge E1 of the support base 17. Then, the pressing member 20 presses the support base 17 and the mask member 18 in a direction that brings them closer together. This suppresses misalignment of the glass plate GS sandwiched between the support base 17 and the mask member 18.

[0091] Next, in the molding process, the glass plate GS is heated from the mask member 18 side by the heat source 19. As a result, a portion of the glass plate GS is thermally deformed, and the protruding portion 8 is formed.

[0092] In the molding process described above, the opening edge E1 of the support base 17 can be covered with the mask member 18. This allows the connecting portion 9 of the lid member 4 to be formed by the thermal deformation of the glass plate GS along the inner peripheral edge E2 of the through hole 18a of the mask member 18. In other words, the connecting portion 9 of the lid member 4 is formed without contact with the support base 17. This molding process forms the lid member 4 having the frame portion 7, the protruding portion 8, and the connecting portion 9.

[0093] In addition to the above, a method for forming the protrusion 8 on the lid member 4 (manufacturing method for the lid member 4) can also be employed in which a plate glass GS is placed on a metal or ceramic mold having a recess, and the plate glass GS is heated and pressed using a metal or ceramic mold having a protrusion that fits into the recess. The heating temperature in this heating press is preferably above the bending point of the plate glass GS, and more preferably above the softening point of the plate glass GS.

[0094] Once the molding process is complete, the film deposition process is performed. Figure 9 shows the film deposition apparatus used in the film deposition process. In this embodiment, a sputtering apparatus such as a magnetron sputtering apparatus is exemplified as the film deposition apparatus, but the present invention is not limited to this configuration, and a film deposition apparatus that performs other physical deposition methods such as vacuum deposition may be used.

[0095] The film deposition apparatus 22 includes a vacuum chamber 23 and targets 24a and 24b for scattering particles that will be used as the film deposition material for the anti-reflective films 10a and 10b.

[0096] The vacuum chamber 23 houses the targets 24a and 24b inside. The internal space of the vacuum chamber 23 is set to a predetermined vacuum level by a vacuum pump. An inert gas such as argon gas may be supplied into the vacuum chamber 23.

[0097] The targets 24a and 24b include a first target 24a for forming a first anti-reflective film 10a on the lid member 4, and a second target 24b for forming a second anti-reflective film 10b on the lid member 4. In addition to these targets 24a and 24b, a target (not shown) for forming a metal layer 14 is placed in the vacuum chamber 23.

[0098] The first target 24a and the second target 24b include multiple targets for forming the first film (SiO2) and the second film (HfO2) in the first anti-reflective film 10a and the second anti-reflective film 10b.

[0099] As shown in Figure 9, in the film formation process, the lid member 4 is placed in the vacuum chamber 23. Then, the particles scattered from the first target 24a are deposited onto the inner surface 8a of the protruding portion 8 of the lid member 4 and the first main surface 7a of the frame portion 7 to form the first anti-reflective film 10a. Similarly, the particles scattered from the second target 24b are deposited onto the outer surface 8b of the protruding portion 8 of the lid member 4 and the second main surface 7b of the frame portion 7 to form the second anti-reflective film 10b.

[0100] The amount of particles adhering to the protruding portion 8 of the lid member 4 is greatest at the top 13 and least at the base 11. This difference in the amount of particles adhering to the protruding portion 8 is due to the effect of the protrusion angle θ of the protruding portion 8.

[0101] After forming anti-reflective films 10a and 10b on the lid member 4, a metal layer 14 is formed so as to overlap the buffer portion 10a2 of the first anti-reflective film 10a. The metal layer 14 is formed by the above-mentioned film deposition apparatus 22, which causes particles scattered from a target (not shown) for forming the metal layer 14 to adhere to the buffer portion 10a2. The metal layer 14 is formed into a frame shape by causing particles to adhere to the buffer portion 10a2 through a mask member.

[0102] Subsequently, a joint portion 15 is formed so as to overlap the metal layer 14. The joint portion 15 is formed, for example, by a process (coating process) in which a paste-like metal-based bonding material is applied to overlap the metal layer 14. Specific examples of the coating process include a printing method using a mask (screen printing method) and a coating method using a dispenser.

[0103] The joint portion 15 is not limited to the method described above. For example, it may be formed by arranging a molded body of a metal-based joining material, which has been pre-formed into a predetermined frame shape, so as to overlap the metal layer 14 of the first main surface 7a of the frame portion 7.

[0104] When the metal-based bonding material for the joint 15 is applied to the first main surface 7a of the frame 7, a heat treatment process is performed to fix the metal-based bonding material to the metal layer 14 of the first main surface 7a. The heat treatment process comprises a heating step and a cooling step.

[0105] In the heating process, the lid member 4 can be heated using a heating device such as a reflow oven to melt the metal bonding material. The heating process may be carried out, for example, with nitrogen filled inside the oven. In the heating process, the lid member 4 is heated to a temperature of 300°C or higher.

[0106] During the cooling process, the molten metal-based bonding material on the first main surface 7a of the frame portion 7 solidifies as it cools. The cooling process is preferably carried out slowly at a cooling rate of 50°C / min. During the cooling process, stress is generated in the lid member 4 due to the difference in thermal expansion coefficients between the frame portion 7 and the joint portion 15, but the buffer portion 10a2 of the first anti-reflective film 10a can alleviate this stress.

[0107] As shown in Figure 10, in the joining process, the lid member 4 manufactured through the preparation process is placed on top of the base body 2. Specifically, the first main surface 7a of the frame portion 7 of the lid member 4 is placed facing the base body 2, and the joining portion 15 is brought into contact with the metal layer 6 formed on the first main surface 2a of the base body 2.

[0108] Next, as shown in Figure 11, the pressing member 25 is placed on the frame portion 7 of the lid member 4. The pressing member 25 has a weight 25a and a support member 25b that supports the weight 25a. For example, the weight 25a and the support member 25b can be made of metal or ceramic.

[0109] The support member 25b has a first support portion 25b1 that supports the weight 25a and a second support portion 25b2 that supports the first support portion 25b1.

[0110] The first support portion 25b1 has a support surface (upper surface) on which the weight 25a is placed. The second support portion 25b2 includes a plurality of rod-shaped members. The second support portion 25b2 protrudes downward from the lower surface of the first support portion 25b1.

[0111] The second support portion 25b2 has a contact portion 25b3 that contacts the frame portion 7 of the lid member 4. The contact portion 25b3 is configured to be pointed. The contact portion 25b3 contacts the second main surface 7b of the frame portion 7 via the second anti-reflective film 10b.

[0112] The pressing member 25 presses the lid member 4 in an upright position on the lid member 4 by having each contact portion 25b3 of the multiple second support portions 25b2 contact the frame portion 7. By pressing the lid member 4 with the pressing member 25, the joint portion 15 formed on the frame portion 7 of the lid member 4 and the metal layer 6 formed on the first main surface 2a of the base body 2 can be brought into close contact.

[0113] Subsequently, the metal layer 6 and the joint 15 are heated while in pressure contact (heating step). This causes the metal-based bonding material of the joint 15 to melt. During this heating step, the pointed contact portion 25b3 of the second support portion 25b2 comes into contact with the frame portion 7 of the lid member 4, thus minimizing the contact area between the contact portion 25b3 and the frame portion 7. This minimizes heat transfer from the frame portion 7 to the second support portion 25b2 of the pressing member 25.

[0114] Subsequently, the molten metal-based bonding material is solidified by cooling (cooling process). During the cooling process, stress is generated in the frame portion 7 due to the difference in thermal expansion coefficients between the base body 2 and the frame portion 7 of the lid member 4. In this case, the buffer portion 10a2 of the first anti-reflective coating 10a deforms to relieve this stress. This reduces damage to the frame portion 7.

[0115] Once the cooling process is complete, the joint 15 forms a sealing portion 5 by integrally joining the metal layer 6 of the base 2 and the metal layer 14 of the lid member 4. Thus, a package 1 with airtightness is completed.

[0116] Figure 12 shows an example of a glass substrate for manufacturing a lid member 4. The glass substrate G comprises a frame portion 7, a plurality of protrusions 8 projecting from the frame portion 7, and anti-reflective coatings 10a and 10b. Each protrusion 8 has the same configuration as the protrusions 8 of the lid member 4 described above. Each protrusion 8 is formed by thermally deforming multiple locations on a large plate glass GS using the molding apparatus 16 described above. By cutting this glass substrate G along the cutting line CL, multiple lid members having protrusions 8, a frame portion 7, and anti-reflective coatings 10a and 10b can be efficiently manufactured. A metal layer 14 and a joint portion 15 may be formed on the first anti-reflective coating 10a.

[0117] Figure 13 shows another example of a lid member. In this example, the lid member 4 comprises a frame portion 7, a plurality of protrusions 8 projecting from the frame portion 7, anti-reflective films 10a, 10b, a metal layer 14, and a joint portion 15. Each component of this lid member 4 has the same configuration as the lid member 4 in Figure 5 above. When a plurality of light-emitting elements 3 are mounted on the base body 2, this lid member 4 can individually seal each light-emitting element 3 by the plurality of protrusions 8.

[0118] Figure 14 shows another example of the lid member. In this example, the inner surface 8a of the lid member 4 has a first curved surface 8a1 and a second curved surface 8a2 with different radii of curvature, and a boundary portion 8a3 located between the first curved surface 8a1 and the second curved surface 8a2. The radius of curvature of the first curved surface 8a1 formed on the base 11 side of the protrusion 8 is smaller than the radius of curvature of the second curved surface 8a2 formed on the top 13 side of the protrusion 8.

[0119] The outer surface 8b of the lid member 4 has a first curved surface 8b1 and a second curved surface 8b2 with different radii of curvature, and a boundary portion 8b3 located between the first curved surface 8b1 and the second curved surface 8b2. The radius of curvature of the first curved surface 8b1 formed on the base 11 side of the protrusion 8 is smaller than the radius of curvature of the second curved surface 8b2 formed on the top 13 side of the protrusion 8.

[0120] Figures 15 and 16 are plan views showing other examples of lid members. In this example, the lid member 4 has a plurality of protrusions 8 arranged in a double row and double column, anti-reflective coatings 10a and 10b (the first anti-reflective coating 10a is not shown), a metal layer 14 (not shown), and a joint 15 (not shown). The lid member 4 shown in Figure 15 has a plurality of protrusions 8 that are configured in a circular shape in plan view. On the other hand, the lid member 4 shown in Figure 16 has a plurality of protrusions 8 that are configured in a rectangular shape in plan view. In the case of a lid member 4 having a plurality of protrusions 8 arranged in a double row and double column, multiple lid members can be obtained by drawing scribe lines on the smooth surface between adjacent protrusions 8 and cutting the lid member 4 along these scribe lines, or by dicing using a blade dicing method or a laser ablation method, and lid members of any shape can be obtained.

[0121] Figure 17 is a bottom view showing another example of the lid member. In this example, the lid member 4 has a projection 8 that is configured as a rectangle in plan view, similar to the example shown in Figure 16. With this configuration, the opening 8c of the projection 8 is configured as a rectangle (for example, a square). When the opening 8c is configured as a square, its opening length L corresponds to the length of one side of the square. When the opening 8c is configured as a rectangle, its opening length L corresponds to the length of the longer side of the rectangle.

[0122] Figure 18 shows another example of a method for manufacturing a lid component (a preparation step in the packaging manufacturing method). This example shows the process of forming a joint 15 on a glass substrate G on which anti-reflective films 10a, 10b and a metal layer 14 are formed. Specifically, the case in which the glass substrate G is fixed to a support device 26 when forming the joint 15 by screen printing will be described.

[0123] The support device 26 includes a support plate 27 that supports the glass substrate G and a suction platform 29 that supports the support plate 27.

[0124] The support plate 27 is configured to be detachably attached to the suction platform 29. The support plate 27 has an opening 28 into which the protruding portion 8 and connecting portion 9 of the glass substrate G can be inserted. By inserting the protruding portion 8 and connecting portion 9 into the opening 28 with the protruding portion 8 of the glass substrate G facing downwards, the support plate 27 can support only the frame portion 7 of the glass substrate G without contacting the protruding portion 8 and connecting portion 9.

[0125] The suction platform 29 includes a support portion 30 for supporting the support plate 27 and a suction port 31 for fixing the glass substrate G to the support plate 27. The support portion 30 has a support surface 30a for supporting the peripheral edge of the support plate 27.

[0126] The suction platform 29 has a space 29a between the support plate 27, which is supported by the support portion 30, and the suction port 31. The suction port 31 is connected to a suction device (exhaust device) such as a pump (not shown).

[0127] The suction platform 29 supports the support plate 27 on which the glass substrate G is placed by the support portion 30, and creates negative pressure in the space 29a by discharging the gas present in the space 29a from the suction port 31. As a result, the glass substrate G is sucked into the space 29a through the opening 28 of the support plate 27 and fixed to the support plate 27. Subsequently, a paste-like metal-based bonding material for the joint portion 15 is applied by screen printing so as to overlap the metal layer 14 of the glass substrate G.

[0128] As described above, by supporting the glass substrate G with the support device 26, it becomes possible to form the joint portion 15 with high precision.

[0129] Figure 19 shows another example of the package. In this example, the package 1 comprises a base 2 on which multiple light-emitting elements 3 are mounted, and a lid member 4 as illustrated in Figure 13. The lid member 4 individually seals each light-emitting element 3 mounted on the base 2 with multiple protrusions 8 and sealing parts 5.

[0130] As described above, with the package 1 (lid member 4) and glass substrate G according to this embodiment, anti-reflective films 10a and 10b are formed on the inner surface 8a and outer surface 8b of the protrusion 8 of the lid member 4, allowing light emitted from the light-emitting element 3 to be efficiently transmitted through the protrusion 8. This makes it possible to maximize the light extraction efficiency in the package 1 using the lid member 4.

[0131] In the above embodiment, the thickness of the top portion 13 of the protruding portion 8 of the lid member 4 is thinner than the thickness of the base portion 11, while the thickness of the anti-reflective films 10a and 10b is thicker at the top portion 13 and thinner at the base portion 11. Due to the above configuration of the protruding portion 8, light emitted from the light-emitting element 3 is relatively easily transmitted at the top portion 13 of the protruding portion 8 and relatively difficult to transmit at the base portion 11. In other words, in this embodiment, the thickness of the anti-reflective films 10a and 10b is increased in the area where light is relatively easily transmitted, and the thickness of the anti-reflective films 10a and 10b is decreased in the area where light is relatively difficult to transmit.

[0132] The anti-reflective coatings 10a and 10b absorb a small amount of transmitted light. As the thickness of the anti-reflective coatings 10a and 10b increases, the amount of light absorbed increases. Therefore, as described above, by reducing the thickness of the anti-reflective coatings 10a and 10b at the base 11 of the protruding portion 8 where light is difficult to transmit, it becomes possible to transmit light relatively evenly between the base 11 and the top 13.

[0133] Furthermore, the present invention is not limited to the configuration of the above embodiments, nor is it limited to the effects described above. The present invention can be modified in various ways without departing from the spirit of the invention.

[0134] In the above embodiment, a lid member 4 and a glass substrate G having a first anti-reflective coating 10a and a second anti-reflective coating 10b formed thereon are shown, but the present invention is not limited to this configuration. The lid member 4 and glass substrate G according to the present invention may have only the first anti-reflective coating 10a or only the second anti-reflective coating 10b.

[0135] In the above embodiment, a lid member 4 having a protruding portion 8 configured such that the thickness of the top portion 13 is thinner than the thickness of the base portion 11 was illustrated, but the present invention is not limited to this configuration. The present invention is also applicable to a lid member 4 having a protruding portion 8 whose thickness is constant from the base portion 11 to the top portion 13.

[0136] Figure 20 shows another example of the lid member. In this example, the inner surface 8a of the lid member 4 has a first curved surface 8a1 that is convex toward the inside of the protrusion 8, a second curved surface 8a2 that is convex toward the outside of the protrusion 8, and an inflection point 8a3 located between the first curved surface 8a1 and the second curved surface 8a2. The first curved surface 8a1 is formed closer to the base 11 of the protrusion 8 than the second curved surface 8a2. The center of curvature of the first curved surface 8a1 is located on the outside of the protrusion 8. The second curved surface 8a2 is formed closer to the apex 13 than the first curved surface 8a1. The center of curvature of the second curved surface 8a2 is located on the inside of the protrusion 8.

[0137] The outer surface 8b of the lid member 4 has a first curved surface 8b1 that is convex toward the inside of the protrusion 8, a second curved surface 8b2 that is convex toward the outside of the protrusion 8, and an inflection point 8b3 located between the first curved surface 8b1 and the second curved surface 8b2. The first curved surface 8b1 is formed closer to the base 11 of the protrusion 8 than the second curved surface 8b2. The center of curvature of the first curved surface 8b1 is located on the outside of the protrusion 8. The second curved surface 8b2 is formed closer to the top 13 of the protrusion 8 than the first curved surface 8b1. The center of curvature of the second curved surface 8b2 is located on the inside of the protrusion 8. The inflection points 8a3 and 8b3 are located above (towards the top 13) the second main surface 7b of the frame portion 7.

[0138] The inflection points 8a3 and 8b3 on the inner surface 8a and outer surface 8b can be formed on the lid member 4 by the molding apparatus and molding method shown in Figures 7 to 9. When inflection points 8a3 and 8b3 are formed on the protrusion 8, the protrusion angle θ of the protrusion 8 becomes smaller during the molding process, which may reduce the light extraction efficiency. In the present invention, it is desirable to sufficiently heat the glass plate GS with the heating source 19 of the molding apparatus 16 (see Figure 7) so that the protrusion angle θ of the protrusion 8 can be made larger. When the lid member 4 has a protrusion 8 on which inflection points 8a3 and 8b3 are formed, as in this example, the light extraction efficiency in the lid member 4 can be increased by setting the protrusion angle θ to 40° or more and 90° or less. The protrusion angle θ is preferably 45° or more, 50° or more, 55° or more, 60° or more, 65° or more, and 70° or more, in that order. On the other hand, the protrusion angle θ is preferably less than 90°, and more preferably 85° or less. In this example, the definition of the projection angle θ differs from that of the embodiment shown in Figure 5. In this example, the projection angle θ is the angle (acute angle) formed between the tangent line L8 at the inflection point 8a3 and the first main surface 7a of the frame portion 7. Specifically, the projection angle θ is the angle (acute angle) formed between the tangent line L8 at the inflection point 8a3 and the sixth line L6 drawn along the first main surface 7a of the frame portion 7. In this example, the opening length L and projection height H of the opening 8c are the same as those of the embodiment shown in Figure 5. In this example, the anti-reflective coating (10a, 10b) is not necessarily an essential component, but it is preferable to provide it, and the preferred form of the material and thickness of the anti-reflective coating (10a, 10b) is the same as that of the embodiment shown in Figure 5. In this example, the preferred form of the thickness (thickness of the base portion 11, thickness of the top portion 13) and outer diameter of the projection portion 8 is the same as that of the embodiment shown in Figure 5.

[0139] Figures 21 to 25 show other examples of the package and lid member. In this example, the shape of the lid member differs from that of the above embodiment. As shown in Figures 21 to 23, the top portion 13 of the lid member 4 in this example is configured in a flat shape. By forming a flat top portion 13 on the lid member 4 in this way, an anti-reflective film 10a, 10b of uniform thickness can be formed on the inner surface 8a and outer surface 8b of the lid member 4 related to the top portion 13. Furthermore, by forming a flat top portion 13 on the lid member 4, the distance D1 between the top portion 13 and the light-emitting element 3 can be made as small as possible. In addition, light emitted from the light-emitting element 3 is more easily incident perpendicularly to the flat top portion 13. Therefore, the light extraction efficiency of the lid member 4 can be greatly improved.

[0140] Next, the manufacturing method of package 1 (manufacturing method of lid member 4) in this example will be described. In this method, the preparation steps in the manufacturing method of package 1 differ from the examples shown in Figures 7 and 8. As shown in Figure 24, the molding apparatus 16 comprises a support base 17, a mask member 18, a heating source 19, a pressing member 20, an external force generating device 21, and a molding die (lower support jig) 32. The configurations of the support base 17, mask member 18, heating source 19, pressing member 20, and external force generating device 21 are the same as those illustrated in Figure 7.

[0141] The mold 32 is positioned within the space 17b of the support base 17. The mold 32 has a molding surface 32a for shaping a portion of the plate glass GS that softens upon heating. The molding surface 32a is configured as a flat surface. The surface roughness (arithmetic mean roughness) Ra of the molding surface 32 is, for example, 0.1 nm or more and 10 nm or less.

[0142] As shown in Figure 25, in the molding process, the mask member 18 is placed on top of the glass plate GS supported on the support base 17. In this case, at least a portion of the inner peripheral edge E2 of the through hole 18a of the mask member 18 is positioned inside the opening edge E1 of the support base 17. Subsequently, the pressing member 20 presses the support base 17 and the mask member 18 in a direction that brings them closer together.

[0143] Next, the glass plate GS is heated from the mask member 18 side by the heating source 19. This causes a portion of the glass plate GS to deform due to heat. At this time, a portion of the deformed glass plate G comes into contact with the molding surface 32a of the mold 32. As a result, a portion of the glass plate G is formed into a flat plate shape. This molding process forms a lid member 4 having a frame portion 7, a protruding portion 8 including a flat plate-shaped top portion 13, and a connecting portion 9.

[0144] The package 1 can be manufactured by performing the film formation process and bonding process illustrated in Figures 9 to 11 on this lid member 4. [Examples]

[0145] The following describes examples of the present invention, but the present invention is not limited to these examples.

[0146] To confirm the effectiveness of the present invention, the inventors conducted tests to measure the light extraction efficiency of the lid members. In these tests, lid members equipped with an anti-reflective coating (samples 1, 3, 5, 7, and 9) and lid members without an anti-reflective coating (samples 2, 4, 6, 8, and 10) were prepared, and the light extraction efficiency was measured for each example. Each sample was a lid member exhibiting the shape shown in Figure 20.

[0147] The light extraction efficiency was calculated by measuring the energy EN1 of the light emitted from the light-emitting element (wavelengths 265nm and 280nm) without passing through the lid member, and measuring the energy EN2 when the light emitted from the light-emitting element (wavelengths 265nm and 280nm) is transmitted through the lid member, and then calculating the ratio of these energies (EN2 / EN1).

[0148] The test results are shown in Table 1. In Table 1, Sample 1 and Sample 2 were subjected to the same conditions for the protrusion angle θ of the lid member, the protrusion height H of the protrusion, and the opening length L of the opening in the protrusion. Similarly, the conditions for the protrusion and opening were the same for Sample 3 and Sample 4, Sample 5 and Sample 6, Sample 7 and Sample 8, and Sample 9 and Sample 10. [Table 1]

[0149] As shown in Table 1, when the protrusion angle θ, the protrusion height H, and the opening length L of the opening in the protrusion are the same, it was found that the lid member with the anti-reflective coating formed on it has a higher light extraction efficiency compared to the lid member without the anti-reflective coating. Furthermore, when the conditions for the presence or absence of the anti-reflective coating are the same, the light extraction efficiency increased as the protrusion angle θ increased, and the light extraction efficiency also increased as the ratio L / H of the opening length L to the protrusion height H decreased. In other words, even when the anti-reflective coating was not formed, the light extraction efficiency could be increased by increasing the protrusion angle θ. [Explanation of Symbols]

[0150] 1 package 2 Base 3 Light-emitting elements 4. Lid member 7 Frame section 7a First main surface of the frame 7b Second main surface of the frame 8 Protrusion 8a Inner surface of the protruding part 8a1 First curved surface on the inner surface of the protruding portion 8a2 Second curved surface on the inner surface of the protruding portion 8a3 Inflection point on the inner surface of the protruding portion 8b Outer surface of the protruding part 8c Opening of the protruding part 10a First anti-reflection coating 10b Second anti-reflection coating 11 Base 13 Top 14 Metal layer G Glass Substrate L8 Tangent line at the inflection point Tmin Thickness of the top of the protrusion Tmax: Thickness of the base of the protruding part θ Protrusion angle

Claims

1. A glass lid member used in a package containing a light-emitting element, It comprises a plate-shaped frame and a dome-shaped projection that protrudes from the frame, The aforementioned protrusion has an inner surface and an outer surface, An anti-reflective coating is formed on the inner surface of the protruding portion. The aforementioned protruding portion comprises a top portion and a base portion which is integrally formed with the frame portion. The thickness of the anti-reflective coating formed on the top portion is greater than the thickness of the anti-reflective coating formed on the base portion. A lid member characterized by the following features.

2. The frame portion has a first main surface connected to the inner surface of the protruding portion and a second main surface connected to the outer surface of the protruding portion. The anti-reflective coating is formed on the first main surface of the frame portion. The lid member according to feature 1.

3. A metal layer is formed on the side of the anti-reflective film formed on the first main surface of the frame portion that is opposite to the first main surface side. The lid member according to feature 2.

4. The anti-reflective coating includes a hafnium oxide film. The lid member according to any one of claims 1 to 3.

5. The thickness of the top of the protrusion is thinner than the thickness of the base of the protrusion. The lid member according to any one of claims 1 to 3.

6. A second anti-reflective coating is formed on the outer surface of the protruding portion. The lid member according to any one of claims 1 to 3.

7. The thickness of the second anti-reflective coating formed on the top portion is greater than the thickness of the second anti-reflective coating formed on the base portion. The lid member according to feature 6.

8. The protruding portion has an opening formed on the inner surface side, The ratio L / H of the opening length L of the opening to the protruding height H of the protruding part is 1.6 or more and 5.0 or less. The lid member according to any one of claims 1 to 3.

9. The aforementioned opening is configured in a square shape. The lid member according to feature 8.

10. The frame portion has a first main surface connected to the inner surface of the protruding portion and a second main surface connected to the outer surface of the protruding portion. The inner surface has a first curved surface that connects to the first main surface of the frame and is convex toward the inside of the protrusion, a second curved surface that is convex toward the outside of the protrusion, and an inflection point located between the first curved surface and the second curved surface. The aforementioned protruding portion protrudes from the frame portion at a protrusion angle formed by the tangent line at the inflection point and the first main surface of the frame portion. The projection angle of the aforementioned projection is 40° or more and 90° or less. The lid member according to any one of claims 1 to 3.

11. A light-emitting element, a substrate supporting the light-emitting element, and a lid member according to any one of claims 1 to 3, A package characterized by the following features.

12. A glass substrate for manufacturing a lid member used in a package containing a light-emitting element, It comprises a plate-shaped frame and a plurality of dome-shaped protrusions extending from the frame, The aforementioned protrusion has an inner surface and an outer surface, An anti-reflective coating is formed on the inner surface of the protruding portion. The aforementioned protruding portion comprises a top portion and a base portion which is integrally formed with the frame portion. The thickness of the anti-reflective coating formed on the top portion is greater than the thickness of the anti-reflective coating formed on the base portion. A glass substrate characterized by the following features.

13. The frame portion has a first main surface connected to the inner surface of the protruding portion and a second main surface connected to the outer surface of the protruding portion. The inner surface has a first curved surface that connects to the first main surface of the frame and is convex toward the inside of the protrusion, a second curved surface that is convex toward the outside of the protrusion, and an inflection point located between the first curved surface and the second curved surface. The aforementioned protruding portion protrudes from the frame portion at a protrusion angle formed by the tangent line at the inflection point and the first main surface of the frame portion. The projection angle of the aforementioned projection is 40° or more and 90° or less. The glass substrate according to feature 12.

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