Tape roll and tape mounter
Patent Information
- Authority / Receiving Office
- JP · JP
- Patent Type
- Patents
- Current Assignee / Owner
- DISCO CORP
- Filing Date
- 2021-07-12
- Publication Date
- 2026-08-03
Smart Images
Figure 0007898832000001 
Figure 0007898832000002 
Figure 0007898832000003
Abstract
Description
Technical Field
[0001] The present invention relates to a tape roll and a tape mounter.
Background Art
[0002] When grinding and thinning various plate-shaped workpieces such as semiconductor device wafers and resin package substrates, or dividing them individually into device chips, it is common to attach an adhesive tape to protect the wafer and facilitate handling of the individual chips. The adhesive tape is wound around a cylindrical core material and sold, and is set by passing it through an insertion member installed in a tape mounter. The adhesive tape is attached to the workpiece by a tape mounter (see, for example, Patent Document 1).
Prior Art Documents
Patent Documents
[0003]
Patent Document 1
Summary of the Invention
Problems to be Solved by the Invention
[0004] Adhesive tapes are available in a variety of types, such as width, type of base material, and adhesive strength, and the adhesive tape selected according to the workpiece and processing method is set in the tape mounter. However, there is a risk of accidentally setting the wrong type of adhesive tape. Therefore, a function of the tape mounter has also been devised to register the type of adhesive tape described on the wrapping paper of the adhesive tape, etc. and check whether it matches the type of adhesive tape registered in advance.
[0005] However, when an operator inputs information by key operation, there is a risk of inputting incorrect information. If incorrect information is input, there is a risk of attaching the wrong type of adhesive tape to the workpiece.
[0006] This invention has been made in view of the above problems, and its purpose is to provide a tape roll and tape mounter that can prevent the application of the wrong type of tape to a workpiece while suppressing an increase in the operator's workload. [Means for solving the problem]
[0007] To solve the above-mentioned problems and achieve the objective, the tape roll of the present invention comprises a cylindrical winding tube and a strip-shaped tape wound around the winding tube. To protect the workpiece during grinding or splitting, or to facilitate handling after splitting. The invention relates to a tape, wherein a marking portion indicating the type of the strip-shaped tape is formed on the inner circumferential surface of the reel, and the marking portion indicates the type of tape by whether or not a recess is formed in a region of the inner circumferential surface of the reel, at a predetermined distance from one end of the reel, or by whether or not an identification code is formed thereon, and the marking portion further comprises a width indicator portion indicating the width of the tape, a material indicator portion indicating the material of the base layer of the tape, and an expiration date indicator portion indicating the expiration date of the tape. The tape roll of the present invention comprises a cylindrical winding tube and a strip of tape wound around the winding tube. For wafers, resin package substrates, glass substrates, or ceramic substrates The invention relates to a tape, wherein a marking portion indicating the type of the strip-shaped tape is formed on the inner circumferential surface of the reel, and the marking portion indicates the type of tape by whether or not a recess is formed in a region of the inner circumferential surface of the reel, at a predetermined distance from one end of the reel, or by whether or not an identification code is formed thereon, and the marking portion further comprises a width indicator portion indicating the width of the tape, a material indicator portion indicating the material of the base layer of the tape, and an expiration date indicator portion indicating the expiration date of the tape. The tape roll of the present invention comprises a cylindrical winding tube and a strip of tape wound around the winding tube. To protect the workpiece during grinding or splitting, or to facilitate handling after splitting. The device comprises a tape and a winding tube, wherein a marking portion indicating the type of the strip-shaped tape is formed on the inner circumferential surface of the winding tube, and the marking portion indicates the type of tape by whether or not a recessed portion is formed in a region of the inner circumferential surface of the winding tube at a predetermined distance from one end of the winding tube, or by whether or not an identification code is formed thereon, and the recessed portion and the identification code are formed around the entire circumference of the inner circumferential surface of the winding tube. The tape roll of the present invention comprises a cylindrical winding tube and a strip of tape wound around the winding tube. For wafers, resin package substrates, glass substrates, or ceramic substrates The device comprises a tape and a winding tube, wherein a marking portion indicating the type of the strip-shaped tape is formed on the inner circumferential surface of the winding tube, and the marking portion indicates the type of tape by whether or not a recessed portion is formed in a region of the inner circumferential surface of the winding tube at a predetermined distance from one end of the winding tube, or by whether or not an identification code is formed thereon, and the recessed portion and the identification code are formed around the entire circumference of the inner circumferential surface of the winding tube.
[0008] In the tape roll, the marking portion is provided with a recess or an identification code, and the width of the tape , material It may also include information about the expiration date.
[0009] The tape mounter of the present invention is wound on a tape roll To protect the workpiece during grinding or splitting, or to facilitate handling after splitting. A tape mounter for attaching tape to a workpiece, comprising: a table for holding the workpiece; a tape roll support unit inserted into the tape roll's winding tube and supporting the tape roll rotatably; an attachment unit for pulling the tape from the tape roll supported by the tape roll support unit and attaching it to the workpiece supported by the table; a sensor mounted on the tape roll support unit for detecting type information from a mark formed on the inner surface of the tape roll; a registration unit mounted on the tape roll support unit for registering the type information of the tape roll; and a unit for comparing the type information detected by the sensor with the information registered in the registration unit. The device comprises an inspection unit having a matching section, and a notification unit that notifies the inspection results of the inspection unit, wherein the marking section indicates the type information by whether or not a recess is formed in a region of the inner circumferential surface of the roll tube at a predetermined distance from one end of the roll tube, or whether or not an identification code is formed, and the marking section comprises a width display section indicating the width of the tape, a material display section indicating the material of the base layer of the tape, and an expiration date display section indicating the expiration date of the tape, and the sensor is arranged in a support section of the tape roll support section that is inserted into the roll tube, and faces the inner circumference of the roll tube mounted on the tape roll support section. The tape mounter of the present invention is wound on a tape roll For wafers, resin package substrates, glass substrates, or ceramic substrates A tape mounter for attaching tape to a workpiece, comprising: a table for holding the workpiece; a tape roll support unit inserted into the tape roll's winding tube and supporting the tape roll rotatably; an attachment unit for pulling the tape from the tape roll supported by the tape roll support unit and attaching it to the workpiece supported by the table; a sensor mounted on the tape roll support unit for detecting type information from a mark formed on the inner surface of the tape roll; a registration unit mounted on the tape roll support unit for registering the type information of the tape roll; and a unit for comparing the type information detected by the sensor with the information registered in the registration unit. The device comprises an inspection unit having a matching section, and a notification unit that notifies the inspection results of the inspection unit, wherein the marking section indicates the type information by whether or not a recess is formed in a region of the inner circumferential surface of the roll tube at a predetermined distance from one end of the roll tube, or whether or not an identification code is formed, and the marking section comprises a width display section indicating the width of the tape, a material display section indicating the material of the base layer of the tape, and an expiration date display section indicating the expiration date of the tape, and the sensor is arranged in a support section of the tape roll support section that is inserted into the roll tube, and faces the inner circumference of the roll tube mounted on the tape roll support section.
[0010] In the tape mounter, the verification unit may also verify the current time against the expiration date of the tape's type information. [Effects of the Invention]
[0011] This invention has the effect of preventing the application of the wrong type of tape to the workpiece while suppressing an increase in the operator's workload. [Brief explanation of the drawing]
[0012] [Figure 1] Figure 1 is a schematic side view showing the general configuration of a tape mounter according to Embodiment 1. [Figure 2] Figure 2 is a perspective view showing a tape roll according to Embodiment 1. [Figure 3] Figure 3 is a cross-sectional view of the main part of the tape roll shown in Figure 2. [Figure 4] Figure 4 is a cross-sectional view showing a state where the support part of the tape roll support part shown in Figure 2 is inserted into the reel of the tape roll. [Figure 5] Figure 5 is a cross-sectional view showing a state where a tape roll is attached to the tape roll support part shown in Figure 4. [Figure 6] Figure 6 is a cross-sectional view of the main part of the tape roll according to a modification of Embodiment 1. **[Mode for Carrying Out the Invention]**
[0013] The mode (embodiment) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited by the content described in the following embodiments. In addition, the constituent elements described below include those that can be easily assumed by those skilled in the art and substantially the same ones. Furthermore, the configurations described below can be combined as appropriate. Also, various omissions, substitutions, or changes in the configuration can be made without departing from the gist of the present invention.
[0014] **[Embodiment 1]** <000009,0>The tape roll and tape mounter according to Embodiment 1 of the present invention will be described based on the drawings. Figure is a side view schematically showing the schematic configuration of the tape mounter according to Embodiment 1. Figure 2 is a perspective view showing the tape roll according to Embodiment 1. Figure 3 is a cross-sectional view of the main part of the tape roll shown in Figure 2.
[0015] The tape mounter 1 shown in FIG. 1 according to Embodiment 1 is a device that attaches the tape 210 wound around the tape roll 2 to the surface 201 of the workpiece 200. In Embodiment 1, the workpiece 200 to which the tape 210 is attached by the tape mounter 1 is a wafer such as a disk-shaped semiconductor wafer or an optical device wafer having a substrate such as silicon, sapphire, or gallium arsenide. Devices are formed in regions defined by a plurality of division planned lines on the surface 201 of the substrate in the workpiece 200.
[0016] [[ID=…]] The devices are, for example, integrated circuits such as IC (Integrated Circuit) or LSI (Large Scale Integration), image sensors such as CCD (Charge Coupled Device) or CMOS (Complementary Metal Oxide Semiconductor), resin package substrates, glass substrates, and ceramic substrates. Note that in Embodiment 1, the tape mounter 1 attaches the tape 210 to the surface 201 of the workpiece 200. However, in the present invention, the tape 210 may be attached to the back surface 202 on the back side of the surface 201 of the workpiece 200.
[0017] The tape 210 attached to the surface 201 of the workpiece 200 by the tape mounter 1 according to Embodiment 1 has flexibility as a whole and includes a base material layer 211 made of a non-adhesive synthetic resin, and an adhesive layer 212 made of a synthetic resin having adhesiveness for attaching to the surface 201 of the workpiece 200 and laminated on the base material layer 211. Various types of tapes 210 having different widths, lengths, materials of the base material layer 211, and adhesive forces of the adhesive layer 212 are used. Further, an expiration date is determined for each tape 210.
[0018] In Embodiment 1, the tape 210 is formed as a long strip-shaped member and is wound in a roll shape with a release paper 215 (shown in FIG. 1) attached to the adhesive layer 212, constituting the tape roll 2 according to Embodiment 1. As shown in FIGS. 2 and 3, the tape roll 2 has a cylindrical bobbin 3 and the tape 210 wound around the outer peripheral surface of the bobbin 3.
[0019] In Embodiment 1, the tape roll 2 has the tape 210 wound around the outer circumference of the winding cylinder 3 such that the base material layer 211 is located on the inner circumference side. The release paper 215 protects the adhesive layer 212 of the tape 210. In Embodiment 1, the tape 210 is peeled off from the end by the tape mounter 1, the release paper 215 is attached to the surface 201 of the workpiece 200, and the tape 210 is cut along the outer edge of the workpiece 200.
[0020] Furthermore, as shown in Figure 3, the tape roll 2 has a marking portion 5 formed on the inner circumferential surface 4 of the winding cylinder 3 that indicates the type information 220 of the strip-shaped tape 210. The marking portion 5 indicates the type information 220 of the tape 210 wound around the outer circumferential surface of the winding cylinder 3. In Embodiment 1, the type information 220 is information indicating the width, length, material of the base layer 211, adhesive strength of the adhesive layer 212, and expiration date of the tape 210 wound around the outer circumferential surface of the winding cylinder 3.
[0021] In Embodiment 1, the marking section 5, as shown in Figure 3, includes a width display section 6, a length display section 7, a material display section 8, an adhesive strength display section 9, and an expiration date display section 10. The width display section 6 indicates the width of the tape 210 wound around the outer surface of the reel 3, the length display section 7 indicates the length of the tape 210 wound around the outer surface of the reel 3, the material display section 8 indicates the material of the base layer 211 of the tape 210 wound around the outer surface of the reel 3, the adhesive strength display section 9 indicates the adhesive strength of the adhesive layer 212 of the tape 210 wound around the outer surface of the reel 3, and the expiration date display section 10 indicates the expiration date of the tape 210 wound around the outer surface of the reel 3.
[0022] In Embodiment 1, the width display section 6, the length display section 7, the material display section 8, and the adhesive strength display section 9 each include two regions 13 on the inner circumferential surface 4 of the rolled-up roll 3, at predetermined distances from one end 12 (shown in Figure 3) of the rolled-up roll 3. Whether or not a recessed area 14 is formed in each region 13 from the inner circumferential surface 4 indicates the width, length, material of the base layer 211, or adhesive strength of the adhesive layer 212 of the tape 210 wound around the outer circumferential surface of the rolled-up roll 3. The expiration date display section 10 includes multiple regions 15 on the inner circumferential surface 4 of the rolled-up roll 3, at predetermined distances from one end 12 of the rolled-up roll 3. Whether or not a recessed area 16 is formed in each region 15 from the inner circumferential surface 4 indicates the expiration date of the tape 210 wound around the outer circumferential surface of the rolled-up roll 3.
[0023] Figure 3 shows an example in which recesses 14 and 16 are provided in all areas 13 and 15. In Embodiment 1, the recesses 14 and 16 are formed around the entire circumference of the inner circumferential surface 4 of the winding tube 3. Thus, the marking section 5 includes a width display section 6, a length display section 7, a material display section 8, an adhesive strength display section 9, and an expiration date display section 10, and contains information indicating the width, length, material of the base layer 211, adhesive strength of the adhesive layer 212, and expiration date of the tape 210 wound around the outer circumferential surface of the winding tube 3, with the recesses 14 and 16.
[0024] The tape mounter 1 according to Embodiment 1 is a device that attaches tape 210 to the surface 201 of a workpiece 200 and cuts off any tape 210 that extends beyond the outer edge of the workpiece 200, that is, a device that cuts tape 210 along the outer edge of the workpiece 200.
[0025] As shown in Figure 1, the tape mounter 1 comprises a table 20, a tape roll support section 30, a plurality of transport rollers 40, a release roller 50, a release paper winding unit 60, an adhesive roller 71, a tape cutting section 80, a tape winding unit 72, and an inspection unit 90.
[0026] The table 20 holds the workpiece 200. The table 20 is mounted on a device base (not shown) and has a holding surface 21 parallel to the horizontal direction on which the workpiece 200 is placed. The table 20 holds the workpiece 200 placed on the holding surface 21 by suction from a suction source (not shown).
[0027] The tape roll support portion 30 is inserted into the winding tube 3 of the tape roll 2 and supports the tape roll 2 so that it can rotate around its axis. In Embodiment 1, the tape roll support portion 30 is positioned on one end of the table 20. The tape roll support portion 30 is provided to be rotatable around its axis and, as shown in Figure 2, comprises a support portion 31 formed in a cylindrical shape with its axis parallel to the horizontal direction and inserted into the winding tube 3, and a flange portion 32 protruding outward from one end of the support portion 31.
[0028] The tape roll support section 30 is set by inserting the support section 31 into the winding tube 3, and contacting one end 12 of the winding tube 3 and one end 213 (shown in Figure 3) of the tape 210 in the width direction with the flange section 32. The tape roll support section 30 fixes the inner surface 4 of the winding tube 3 of the tape roll 2 to the outer surface of the support section 31, and as the support section 31 and flange section 32 rotate around their axis, the tape 210 is fed onto the holding surface 21 of the table 20 one end at a time.
[0029] In Embodiment 1, two transport rollers 40 are provided, one positioned on one end of the table 20 and between the table 20 and the tape roll support section 30, and the other positioned on the other end of the table 20. These rollers transport the tape 210 from the tape roll support section 30 to the tape winding unit 72 and apply tension to the tape 210 to prevent slack. The transport rollers 40 are formed in a cylindrical shape with their axes parallel to the axes of the tape roll support section 30 and are rotatable around their axes. The transport rollers 40 apply tension to the tape 210 by pressing the base material layer 211 of the tape 210 toward the table 20 with their outer circumferential surfaces.
[0030] The release roller 50 is positioned between the tape roll support section 30 and one of the transport rollers 40, and is used to peel the release paper 215 attached to the adhesive layer 212 of the tape 210 away from the tape 210. The release roller 50 is formed in a cylindrical shape with its axis parallel to the axes of the tape roll support section 30 and the transport roller 40, and is rotatable around its axis. The transport roller 40 presses the release paper 215 attached to the tape 210 fed out from the tape roll support section 30 with its outer circumferential surface, thereby peeling the release paper 215 away from the tape 210.
[0031] The release paper winding unit 60 winds up the release paper 215 that has been peeled off by the release roller 50 from the tape 210 that has been fed out from the tape roll support unit 30. In Embodiment 1, the release paper winding unit 60 is located below the tape roll support unit 30. The release paper winding unit 60 is formed in a cylindrical shape with its axis parallel to the axes of the tape roll support unit 30, the transport roller 40, and the release roller 50, and is rotated around its axis by a drive device such as a motor (not shown), thereby winding up the release paper 215 that has been peeled off from the tape 210 onto its outer surface.
[0032] The adhesive roller 71 presses the tape 210 supplied from the tape roll support section 30 onto the holding surface 21 of the table 20 toward the surface 201 of the workpiece 200 held by suction on the holding surface 21 of the table 20, thereby adhering it to the workpiece. The adhesive roller 71 is positioned above the holding surface 21 of the table 20. The adhesive roller 71 is formed in a cylindrical shape with its axis parallel to the axes of the tape roll support section 30, the transport roller 40, the release roller 50, and the release paper winding unit 60, and is supported so as to be rotatable around its axis. The adhesive roller 71 is provided on the adhesive roller moving mechanism 73 so as to be able to move up and down in a direction perpendicular to the holding surface 21 of the table 20, and is provided so as to be able to move along the holding surface 21 in a direction perpendicular to its axis. The adhesive roller 71 moves along the holding surface 21 while in a lowered state due to the adhesive roller moving mechanism 73, thereby adhering the tape 210 to the surface 201 of the workpiece 200 held on the table 20.
[0033] The tape cutting section 80 cuts off any excess portion of the tape 210 that extends beyond the outer edge of the workpiece 200 after the adhesive roller 71 has adhered the tape 210 to the workpiece 200. In Embodiment 1, the excess portion of the tape 210 is the portion on the outer circumference of the workpiece 200. The tape cutting section 80 is positioned above the holding surface 21 of the table 20.
[0034] In Embodiment 1, the tape cutting unit 80 comprises a cutter blade 81 and a cutter blade moving mechanism 82. The cutter blade 81 has a cutting edge 83 at its lower end that is longer than the thickness of the tape 210 supplied onto the holding surface 21 of the table 20. The cutting edge 83 of the cutter blade 81 faces the outer edge of the tape 210 and the workpiece 200 supplied onto the holding surface 21 of the table 20.
[0035] The cutter blade moving mechanism 82 moves the cutter blade 81 along the outer edge of the workpiece 200. The cutter blade moving mechanism 82 is capable of raising and lowering the cutter blade 81 in a direction perpendicular to the holding surface 21 of the table 20, and is also capable of moving the cutter blade 81 along a circumferential direction centered on an axis parallel to the direction perpendicular to the holding surface 21. The cutter blade moving mechanism 82 includes a rotating shaft 84 positioned on the center of the holding surface 21 of the table 20 and rotated around its axis by a drive device such as a motor (not shown), an arm 85 extending outward from the rotating shaft 84 parallel to the holding surface 21 of the table 20 and supporting the cutter blade 81 at its tip, and an air cylinder (not shown) that raises and lowers the arm 85 together with the rotating shaft 84.
[0036] The tape winding unit 72 winds up the excess portion of the tape 210 after the portion attached to the workpiece 200 has been cut by the tape cutting unit 80. In Embodiment 1, the tape winding unit 72 is positioned on the other end of the table 20 in the X-axis direction and on the other conveyor roller 40. The tape winding unit 72 is formed in a cylindrical shape with its axis parallel to the axes of the tape roll support unit 30, the conveyor roller 40, the release roller 50, the release paper winding unit 60, and the adhesive roller 71. It is rotated around its axis by a drive device such as a motor (not shown), thereby winding the tape 210 onto its outer surface. By winding the tape 210 onto its outer surface, the tape winding unit 72 pulls the tape 210 out from the tape roll 2 supported by the tape roll support unit 30.
[0037] In Embodiment 1, the adhesive roller 71, the adhesive roller moving mechanism 73, and the tape winding unit 72 constitute an adhesive unit 70 that pulls out the tape 210 from the tape roll 2 supported by the tape roll support section 30 and adheres it to the workpiece 200 supported by the table 20.
[0038] The inspection unit 90 includes a sensor 91 as shown in Figure 2, etc., and a control unit 100 as shown in Figure 1. The sensor 91 detects type information 220 from a mark 5 formed on the inner circumferential surface 4 of the winding tube 3 of the tape roll 2 mounted on the tape roll support unit 30. In Embodiment 1, when the tape roll support unit 30 sets the tape roll 2, the sensor 91 is positioned as shown in Figure 4, at a position on the outer circumferential surface of the support unit 31 that faces the mark 5 along the radial direction of the support unit 31 (i.e., at a position facing the inner circumferential surface 4 of the winding tube 3).
[0039] When the support portion 31 of the tape roll support portion 30 is inserted into the winding tube 3 of the tape roll 2, and the flange portion 32 of the sensor 91 comes into contact with one end 12 of the winding tube 3 and one end 213 in the width direction of the tape 210, the marker portion 5 and the support portion 31 face each other along the radial direction. The sensor 91 reads each of the display portions 6, 7, 8, 9, 10 of the marker portion 5 and outputs type information 220 indicating the width, length, material of the base layer 211, adhesive strength of the adhesive layer 212, and expiration date of the tape 210 wound around the outer circumference of the winding tube 3 as indicated by each of the display portions 6, 7, 8, 9, 10 to the control unit 100. In Embodiment 1, the sensor 91 is composed of, for example, a fiber sensor or a photoelectric sensor.
[0040] The control unit 100 controls the aforementioned components of the tape mounter 1 to cause the tape mounter 1 to perform the operation of attaching the tape 210 to the workpiece 200. The control unit 100 is a computer having an arithmetic processing unit with a microprocessor such as a CPU (central processing unit), a storage device with memory such as ROM (read-only memory) or RAM (random access memory), and an input / output interface device. The arithmetic processing unit of the control unit 100 performs arithmetic processing according to a computer program stored in the storage device and outputs control signals for controlling the tape mounter 1 to the aforementioned components of the tape mounter 1 via the input / output interface device.
[0041] Furthermore, the control unit 100 is connected to a display unit 110, which consists of a liquid crystal display device that displays the status of the adhesive operation and images, an input unit 111 used by the operator to register processing conditions, and a notification unit 112 that notifies the operator with sound and light. In other words, the tape mounter 1 comprises a display unit 110, an input unit 111, and a notification unit 112. The input unit 111 consists of at least one of a touch panel provided on the display unit 110 and an external input device such as a keyboard. The notification unit 112 notifies the inspection results of the inspection unit 90.
[0042] The control unit 100 also includes a current time setting unit 101, a registration unit 102, a verification unit 103, and an operation control unit 104. The current time setting unit 101 acquires the current time at predetermined intervals. The registration unit 102 acquires and stores information 220 of the type of tape roll 2 supported by the tape roll support unit 30, which is detected by the sensor 91. In other words, the registration unit 102 registers information 220 of the type of tape roll 2 mounted on the tape roll support unit 30. The registration unit 102 also stores information 221 including the width, length, material of the base layer 211, adhesive strength of the adhesive layer 212, and the current time acquired by the current time setting unit 101, which is input from an operator or the like through the input unit 111 to be attached to the workpiece 200. In other words, the registration unit 102 registers information 221 input from an operator or the like. The current time included in information 221 is rewritten at predetermined intervals.
[0043] The matching unit 103 compares the type information 220 of the tape roll 2 supported by the tape roll support unit 30, which is detected by the sensor 91 and registered in the registration unit 102, with the information 221 input from an operator or the like through the input unit 111. The matching unit 103 determines whether the matching result is favorable for performing the tape 210 attachment operation on the workpiece 200. If the matching unit 103 determines that the matching result is unfavorable for performing the tape 210 attachment operation on the workpiece 200, it activates the notification unit 112 to stop the attachment operation.
[0044] The operation control unit 104 controls each of the above-mentioned components of the tape mounter 1 to cause the tape mounter 1 to perform the adhesion operation.
[0045] The function of the registration unit 102 is realized by the arithmetic processing unit performing calculations according to a computer program stored in the memory device and storing the type information 220 and information 221 in the memory device. In addition, the functions of the current time setting unit 101, the verification unit 103, and the operation control unit 104 are realized by the arithmetic processing unit performing calculations according to a computer program stored in the memory device.
[0046] Next, an example of the tape mounting operation of the tape mounter 1 will be described. Figure 4 is a cross-sectional view showing the state in which the support part of the tape roll support part shown in Figure 2 is inserted into the tape roll winding tube. Figure 5 is a cross-sectional view showing the state in which the tape roll is mounted on the tape roll support part shown in Figure 4.
[0047] First, the operator places the back surface 202 of the workpiece 200 on the holding surface 21 of the table 20, registers the processing conditions in the control unit 100, and registers the aforementioned information 221 in the registration section 102 of the control unit 100. The operator then inserts the support portion 31 of the tape roll support portion 30 into the winding tube 3 of the tape roll 2, as shown in Figure 4. The tape mounter 1 has the flange portion 32 of the tape roll support portion 30 in contact with one end 12 of the winding tube 3 and also in contact with one end 213 in the width direction of the tape 210, so that the tape roll 2 is mounted on the tape roll support portion 30, as shown in Figure 5.
[0048] Then, the sensor 91 faces the mark 5 formed on the inner circumferential surface 4 of the winding tube 3 of the tape roll 2 mounted on the tape roll support section 30 in the radial direction of the support section 31. An operator or the like pulls out the tip of the tape 210 of the tape roll 2, brings the release paper 215 attached to the tape 210 into contact with the outer circumferential surface of the release roller 50, and after the base material layer 211 of the tape 210 comes into contact with the outer circumferential surface of the transport roller 40, it is mounted on the outer circumferential surface of the tape winding unit 72. Alternatively, an operator or the like brings the release paper 215, which has been peeled off the tape 210 by contacting the outer circumferential surface of the release roller 50, and mounts it on the outer circumferential surface of the release paper winding unit 60, and sets the tape roll 2 on the tape mounter 1.
[0049] When the control unit 100 receives an instruction to start the adhesive operation, the tape mounter 1 starts the adhesive operation. During the adhesive operation, the sensor 91 reads each of the display units 6, 7, 8, 9, and 10 of the marking unit 5 and outputs type information 220 indicating the width, length, material of the base layer 211, adhesive strength of the adhesive layer 212, and expiration date of the tape 210 wound around the outer circumference of the winding cylinder 3 as indicated by each of the display units 6, 7, 8, 9, and 10 to the control unit 100.
[0050] During the adhesive application process, the registration unit 102 of the control unit 100 registers type information 220 indicating the width, length, material of the base layer 211, adhesive strength of the adhesive layer 212, and expiration date of the tape 210 wound around the outer circumference of the roll tube 3, as indicated by the display units 6, 7, 8, 9, and 10 of the marker unit 5 detected by the sensor 91. The verification unit 103 of the control unit 100 compares the type information 220 registered in the registration unit 102 with the information 221 to determine whether the verification result is favorable for performing the adhesive application process to attach the tape 210 to the workpiece 200.
[0051] If the verification unit 103 determines that the verification result is unfavorable for performing the tape 210 attachment operation on the workpiece 200, it activates the notification unit 112 to stop the attachment operation. If the verification unit 103 determines that the verification result is favorable for performing the tape 210 attachment operation on the workpiece 200, it continues the attachment operation without activating the notification unit 112.
[0052] In Embodiment 1, the matching unit 103 compares the current time of the information 221 registered in the registration unit 102 with the expiration date of the type information 220 registered in the registration unit 102. If the current time is past the expiration date, or if the difference between the current time and the expiration date is less than or equal to a predetermined time even if the current time is not past the expiration date, the matching unit 103 determines that the matching result is undesirable for performing the adhesive operation of attaching the tape 210 to the workpiece 200. In Embodiment 1, if the current time is not past the expiration date, and the difference between the current time and the expiration date exceeds a predetermined time, the matching unit 103 determines that the matching result is favorable for performing the adhesive operation of attaching the tape 210 to the workpiece 200. The predetermined time is, for example, the time during the adhesive operation when the current time is past the expiration date.
[0053] Furthermore, in the present invention, the matching unit 103 is not limited to matching the current time of the information 221 registered in the registration unit 102 and the expiration date of the type information 220 registered in the registration unit 102. In the present invention, the matching unit 103 may match the width of the tape 210 of the information 221 registered in the registration unit 102 with the width of the tape 210 of the type information 220 registered in the registration unit 102. If they do not match, the matching unit 103 may determine that the matching result is undesirable for performing the attachment operation of attaching the tape 210 to the workpiece 200. If they do match, the matching unit 103 may determine that the matching result is favorable for performing the attachment operation of attaching the tape 210 to the workpiece 200.
[0054] Furthermore, in the present invention, the matching unit 103 may compare the length of the tape 210 of the information 221 registered in the registration unit 102 with the length of the tape 210 of the type information 220 registered in the registration unit 102. If they do not match, the matching unit 103 may determine that the matching result is undesirable for performing the attachment operation of attaching the tape 210 to the workpiece 200. If they do match, the matching unit 103 may determine that the matching result is favorable for performing the attachment operation of attaching the tape 210 to the workpiece 200.
[0055] Furthermore, in the present invention, the matching unit 103 may compare the material of the base layer 211 of the tape 210 in the information 221 registered in the registration unit 102 with the material of the base layer 211 of the tape 210 in the type information 220 registered in the registration unit 102. If they do not match, the matching unit 103 may determine that the matching result is undesirable for performing the attachment operation of attaching the tape 210 to the workpiece 200. If they do match, the matching unit 103 may determine that the matching result is favorable for performing the attachment operation of attaching the tape 210 to the workpiece 200.
[0056] Furthermore, in the present invention, the matching unit 103 may compare the adhesive strength of the adhesive layer 212 of the tape 210 in the information 221 registered in the registration unit 102 with the adhesive strength of the adhesive layer 212 of the tape 210 in the type information 220 registered in the registration unit 102. If these do not match, the matching unit may determine that the matching result is undesirable for performing the attachment operation of attaching the tape 210 to the workpiece 200. If they do match, the matching unit may determine that the matching result is favorable for performing the attachment operation of attaching the tape 210 to the workpiece 200.
[0057] During the adhesion operation, if the verification unit 103 of the control unit 100 determines that the verification result is favorable for performing the adhesion operation to adhere the tape 210 to the workpiece 200, the operation control unit 104 of the tape mounter 1's control unit 100 lowers the adhesion roller 71 and moves it along the holding surface 21 to adhere the tape 210 to the surface 201 of the workpiece 200. The tape mounter 1 raises the adhesion roller 71 and moves the cutter blade 81 in the cutter blade moving mechanism 82 to rotate the cutter blade 81 around the axis of the rotation shaft 84 while lowering the cutter blade 81. The tape mounter 1 cuts the tape 210 by moving the cutting edge 83 of the cutter blade 81 along the outer edge of the workpiece 200 while cutting into the tape 210.
[0058] During the adhesion operation, the tape mounter 1, after the operation control unit 104 of the control unit 100 cuts the tape 210, raises the tape cutting unit 80, releases the suction hold of the holding surface 21 of the table 20, and the tape winding unit 72 winds up the amount of tape 210 to be attached to one workpiece 200. After moving the tape 210 by the length of one workpiece 200, the tape adhesion operation of the tape 210 is completed.
[0059] The tape mounter 1 according to Embodiment 1 described above has a marking portion 5 indicating type information 220 formed on the inner circumferential surface 4 of the winding tube 3 of the tape roll 2, and is equipped with a sensor 91 in which the inspection unit 90 detects the type information 220 from the marking portion 5 formed on the inner circumferential surface 4 of the winding tube 3 of the tape roll 2. For this reason, the tape mounter 1 can register the type information 220 of the tape 210 in the registration unit 102 by mounting the tape roll 2 on the tape roll support unit 30.
[0060] Therefore, the tape mounter 1 can perform a comparison between the type information 220 detected by the sensor 91 and the pre-registered information 221 simply by attaching the tape roll 2 to the tape roll support section 30. As a result, the tape roll 2 and tape mounter 1 have the effect of preventing the wrong type of tape 210 from being attached to the workpiece 200 without increasing the operator's workload, that is, while suppressing an increase in the operator's man-hours.
[0061] [Variation] A modified tape roll according to Embodiment 1 of the present invention will be described with reference to the drawings. Figure 6 is a cross-sectional view of the main part of the modified tape roll according to Embodiment 1. Note that in Figure 6, the same reference numerals are used for the same parts as in Embodiment 1, and their descriptions are omitted.
[0062] In the modified tape roll 2 of Embodiment 1, the width, length, material of the base layer 211, and adhesive strength of the adhesive layer 212 of the tape 210 wound around the outer surface of the reel 3 are indicated by whether or not an identification code 17 is formed by printing on the marking section 5 in each area 13 of the display sections 6, 7, 8, and 9. Furthermore, in the modified tape roll 2 of Embodiment 1, the expiration date of the tape 210 wound around the outer surface of the reel 3 is indicated by whether or not an identification code 18 is formed by printing on the marking section 5 in each area 15 of the expiration date display section 10.
[0063] Figure 6 shows an example in which identification codes 17 and 18 are formed by printing on all areas 13 and 15. In a modified example, the identification codes 17 and 18 are formed around the entire circumference of the inner surface 4 of the roll 3. Thus, the marking section 5 includes a width display section 6, a length display section 7, a material display section 8, an adhesive strength display section 9, and an expiration date display section 10, and contains the identification codes 17 and 18, as well as information indicating the width, length, material of the base layer 211, adhesive strength of the adhesive layer 212, and expiration date of the tape 210 wound around the outer surface of the roll 3.
[0064] In the modified tape roll 2 of Embodiment 1, a marking portion 5 indicating type information 220 is formed on the inner circumferential surface 4 of the winding cylinder 3 of the tape roll 2. Therefore, simply by attaching the tape roll 2 to the tape roll support portion 30, the matching portion 103 can compare the type information 220 detected by the sensor 91 with the pre-registered information 221. As a result, the modified tape roll 2, like Embodiment 1, has the effect of preventing the application of the wrong type of tape 210 to the workpiece 200 without increasing the operator's workload, that is, while suppressing an increase in the operator's man-hours.
[0065] It should be noted that the present invention is not limited to the embodiments described above. That is, it can be implemented with various modifications without departing from the core of the present invention. In Embodiment 1, the type information 220 indicates the width, length, material of the base layer 211, adhesive strength of the adhesive layer 212, and expiration date of the tape 210 wound around the outer surface of the reel 3. However, in the present invention, the type information 220 only needs to indicate at least one of the width, length, material of the base layer 211, adhesive strength of the adhesive layer 212, and expiration date of the tape 210 wound around the outer surface of the reel 3. That is, in the present invention, the marking section 5 only needs to include at least one of the width display section 6, length display section 7, material display section 8, adhesive strength display section 9, and expiration date display section 10, and should include information on the width, length, material of the base layer 211, adhesive strength of the adhesive layer 212, or expiration date of the tape 210. Furthermore, the tape 210 does not necessarily have an adhesive layer 212 laminated on the base layer 211; the base layer 211 may be heated to soften it and then directly pressed and attached to the workpiece 200. [Explanation of Symbols]
[0066] 1 Tape Mounter 2 Tape Rolls 3 tubes 4 Inner surface 5. Marker section 14,16 recess 17,18 Identification Code 20 tables 30 Tape roll support section 70 Adhesive Units 91 Sensors 102 Registration Department 103 Verification Unit 112 Hochi Unit 200 Workpiece 210 Tapes 220 types of information 221 Information
Claims
1. It comprises a cylindrical winding tube and a tape for protecting the workpiece during grinding or splitting of the strip-shaped workpiece wound around the winding tube, or for facilitating handling after splitting. An indicator portion showing the type of the strip-shaped tape is formed on the inner circumferential surface of the roll tube, The marking portion indicates the type information by whether or not a recess is formed in a predetermined area on the inner surface of the rolled-up tube at a distance from one end of the rolled-up tube, or by whether or not an identification code is formed therein. The marking section is a tape roll comprising a width indicator section that shows the width of the tape, a material indicator section that shows the material of the base layer of the tape, and an expiration date indicator section that shows the expiration date of the tape.
2. It comprises a cylindrical winding tube and a strip-shaped tape wound around the winding tube for use with wafers, resin package substrates, glass substrates, or ceramic substrates. An indicator portion showing the type of the strip-shaped tape is formed on the inner circumferential surface of the roll tube, The marking portion indicates the type information by whether or not a recess is formed in a predetermined area on the inner surface of the rolled-up tube at a distance from one end of the rolled-up tube, or by whether or not an identification code is formed therein. The marking section is a tape roll comprising a width indicator section that shows the width of the tape, a material indicator section that shows the material of the base layer of the tape, and an expiration date indicator section that shows the expiration date of the tape.
3. It comprises a cylindrical winding tube and a tape for protecting the workpiece during grinding or splitting of the strip-shaped workpiece wound around the winding tube, or for facilitating handling after splitting. An indicator portion showing the type of the strip-shaped tape is formed on the inner circumferential surface of the roll tube, The marking portion indicates the type information by whether or not a recess is formed in a predetermined area on the inner surface of the rolled-up tube at a distance from one end of the rolled-up tube, or by whether or not an identification code is formed therein. The recess and the identification code are formed around the entire circumference of the inner surface of the tape roll.
4. It comprises a cylindrical winding tube and a strip-shaped tape wound around the winding tube for use with wafers, resin package substrates, glass substrates, or ceramic substrates. An indicator portion showing the type of the strip-shaped tape is formed on the inner circumferential surface of the roll tube, The marking portion indicates the type information by whether or not a recess is formed in a predetermined area on the inner surface of the rolled-up tube at a distance from one end of the rolled-up tube, or by whether or not an identification code is formed therein. The recess and the identification code are formed around the entire circumference of the inner surface of the tape roll.
5. The tape roll according to any one of claims 1 to 4, wherein the marking portion comprises a recess or an identification code and includes information on the width of the tape, the material, or the expiration date.
6. A tape mounter that attaches tape to a workpiece to protect the workpiece or facilitate handling after it has been cut, during grinding or cutting of the workpiece wound on a tape roll, A table for holding the workpiece, A tape roll support section is inserted into the winding tube of the tape roll and rotatably supports the tape roll, An adhesive unit that pulls the tape from the tape roll supported by the tape roll support and adheres it to the workpiece supported by the table, An inspection unit comprising: a sensor that detects type information from a mark formed on the inner circumferential surface of the tape roll mounted on the tape roll support; a registration unit in which the type information of the tape roll mounted on the tape roll support is registered; and a comparison unit that compares the type information detected by the sensor with the information registered in the registration unit; The system comprises a notification unit that notifies the inspection results of the inspection unit, The marking portion indicates the type information by whether or not a recess is formed in a predetermined area on the inner surface of the rolled-up tube at a distance from one end of the rolled-up tube, or by whether or not an identification code is formed therein. The marking section includes a width indicator section that shows the width of the tape, a material indicator section that shows the material of the base layer of the tape, and an expiration date indicator section that shows the expiration date of the tape. The sensor is, A tape mounter characterized by being positioned in a support portion inserted into the tape roll support portion, and facing the inner circumference of the tape roll mounted on the tape roll support portion.
7. A tape mounter for attaching tape for wafers, resin package substrates, glass substrates, or ceramic substrates, which is wound on a tape roll, to a workpiece, A table for holding the workpiece, A tape roll support section is inserted into the winding tube of the tape roll and rotatably supports the tape roll, An adhesive unit that pulls the tape from the tape roll supported by the tape roll support and adheres it to the workpiece supported by the table, An inspection unit comprising: a sensor that detects type information from a mark formed on the inner circumferential surface of the tape roll mounted on the tape roll support; a registration unit in which the type information of the tape roll mounted on the tape roll support is registered; and a comparison unit that compares the type information detected by the sensor with the information registered in the registration unit; The system comprises a notification unit that notifies the inspection results of the inspection unit, The marking portion indicates the type information by whether or not a recess is formed in a predetermined area on the inner surface of the rolled-up tube at a distance from one end of the rolled-up tube, or by whether or not an identification code is formed therein. The marking section includes a width indicator section that shows the width of the tape, a material indicator section that shows the material of the base layer of the tape, and an expiration date indicator section that shows the expiration date of the tape. The sensor is, A tape mounter characterized by being positioned in a support portion inserted into the tape roll support portion, and facing the inner circumference of the tape roll mounted on the tape roll support portion.
8. The tape mounter according to claim 6 or 7, wherein the matching unit matches the current time with the expiration date of the tape containing the type information.