Ozone generator

Abstract

The present invention comprises: a plurality of discharge tubes, each provided with a tubular first electrode that extends along a first axis, a second electrode that extends along the first axis, and a dielectric that extends along the first axis direction and is interposed between the first electrode and the second electrode; and a connection member that electrically connects the second electrode of a first discharge tube and the second electrode of a second discharge tube next to the first discharge tube. The connection member faces an end of the dielectric of the first discharge tube and an end of the dielectric of the second discharge tube.

Description

Technical Field

[0001] The present disclosure relates to an ozone generator.

Background Art

[0002] In some cases, water treatment such as decolorization, deodorization, and sterilization of sewage and the like is performed using ozone. An ozone generator is disclosed in, for example, Patent Document 1.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] In the ozone generator as described above, a structure for applying a voltage to a plurality of electrodes is proposed.

Means for Solving the Problems

[0005] The ozone generator according to one aspect of the present disclosure includes a plurality of discharge tubes including a tubular first electrode extending along a first axis, a second electrode extending along the first axis, and a dielectric extending along the first axial direction and disposed between the first electrode and the second electrode, and a connection member that electrically connects the second electrode of the first discharge tube and the second electrode of the second discharge tube adjacent to the first discharge tube, wherein the connection member faces the end of the dielectric of the first discharge tube and the end of the dielectric of the second discharge tube.

Effects of the Invention

[0006] According to the ozone generator according to one aspect of the present disclosure, it becomes possible to apply a voltage to a plurality of electrodes.

Brief Description of the Drawings

[0007] [Figure 1] Figure 1 is a side cross-sectional view of the ozone generator 100 in the first embodiment. [Figure 2] Figure 2 is a diagram illustrating an example of the configuration of the discharge tube 10 in the first embodiment. [Figure 3] Figure 3 illustrates an example of the configuration of the pin member 5, insulating member 6, and power supply ribbon 7 in the first embodiment. [Figure 4] Figure 4 is a diagram illustrating an example of the configuration of the power supply ribbon 7 in the first embodiment. [Figure 5] Figure 5 is a diagram illustrating an example of the configuration of the power supply ribbon 7 in the first embodiment. [Figure 6] Figure 6 is a diagram illustrating an example of the configuration of the chain member 70 in the first embodiment. [Figure 7] Figure 7 illustrates an example of the configuration of the chain member 70 in the first embodiment. [Figure 8] Figure 8 is a diagram illustrating an example of the configuration of the chain member 70 in the first embodiment. [Figure 9] Figure 9 is a diagram illustrating an example of the configuration of the chain member 70 in the first embodiment. [Figure 10] Figure 10 is a side cross-sectional view of a first modified example of the ozone generator 100 in the first embodiment. [Figure 11] Figure 11 is a side cross-sectional view of a second modified example of the ozone generator 100 in the first embodiment. [Figure 12] Figure 12 is a side cross-sectional view of a third modified example of the ozone generator 100 in the first embodiment. [Figure 13] Figure 13 is a side cross-sectional view of a third modified example of the ozone generator 100 in the first embodiment. [Figure 14] Figure 14 is a diagram illustrating an example of the configuration of the chain member 70 in the first embodiment. [Figure 15]Figure 15 is a diagram illustrating an example of the configuration of the discharge tube 20 in the second embodiment. [Figure 16] Figure 16 is a diagram illustrating a configuration example of a first modified example of the discharge tube 20 in the second embodiment. [Figure 17] Figure 17 illustrates an example of the configuration of the discharge tube 30 in the third embodiment. [Modes for carrying out the invention]

[0008] Embodiments of this disclosure will be described below with reference to the drawings. However, this description should not be interpreted as limiting, and will not limit the subject matter described in the claims. Furthermore, various changes, substitutions, and modifications can be made without departing from the spirit and scope of this disclosure. Different embodiments can also be combined as appropriate.

[0009] [Ozone generator 100 in the first embodiment] First, the ozone generator 100 in the first embodiment will be described. Figure 1 is a side cross-sectional view of the ozone generator 100 in the first embodiment. Figure 2 is a diagram illustrating an example of the configuration of the discharge tube 10 in the first embodiment. Specifically, Figure 2A is a side cross-sectional view of the discharge tube 10, and Figure 2B is a 2B-2B cross-sectional view of the discharge tube 10. Figure 3 is a diagram illustrating an example of the configuration of the member 5 (hereinafter also called the pin member 5), the insulating member 6, and the power supply ribbon 7 (hereinafter also called the connecting member 7) in the first embodiment. Specifically, Figure 3A is a front view of the two discharge tubes 10 arranged in the Y-axis direction (viewed from the X1 direction in the example of Figure 1), and Figure 3B is a rear view of the two discharge tubes 10 arranged in the Y-axis direction (viewed from the X2 direction in the example of Figure 1). Furthermore, Figures 4 and 5 are diagrams illustrating an example of the configuration of the power supply ribbon 7 in the first embodiment. Specifically, Figures 4A and 5 are front views of six discharge tubes 10 arranged in the Y-axis direction, and Figure 4B is a 4B-4B cross-sectional view of the six discharge tubes 10 arranged in the Y-axis direction. Note that in the example shown in Figure 4, only the inner electrode 2, power supply member 4, and power supply ribbon 7 are shown.

[0010] As shown in FIG. 1, the ozone generator 100 has, for example, a plurality of discharge tubes 10, a housing 40, a cooling unit 50, and an AC power supply 60 (hereinafter also simply referred to as the power supply 60).

[0011] The housing 40 is, for example, a housing that houses one or more discharge tubes 10. The housing 40 has, for example, an inlet (not shown) for a raw material gas A containing at least oxygen and an outlet (not shown) for ozone gas B. Further, the housing 40 has, for example, a through hole (not shown) through which a power supply line 61 that connects the AC power supply 60 disposed outside the housing 40 and each of the plurality of discharge tubes 10 passes. Note that the housing 40 may be grounded as shown in FIG. 1.

[0012] As shown by the solid arrows in FIG. 1, each of the plurality of discharge tubes 10 generates ozone gas B by silent discharge as the raw material gas A flows in from the X2 direction side, and further discharges the generated ozone gas B from the X1 direction side. That is, the raw material gas A flows in from the left side of the X axis, and the ozone gas B is discharged from the right side of the X axis. The ozone gas B is used, for example, for water treatment such as decolorization, deodorization, and sterilization of tap water and the like.

[0013] As shown in FIGS. 2A and 2B, each of the plurality of discharge tubes 10 has, for example, an outer electrode 1, an inner electrode 2, a dielectric 3, a power supply member 4, a pin member 5, an insulating member 6, and a power supply ribbon 7. Hereinafter, the pin member 5, the insulating member 6, and the power supply ribbon 7 are collectively referred to as a restraining member 90.

[0014] The outer electrode 1 (hereinafter also referred to as the first electrode 1) is an electrode located on the outside of the dielectric 3, and is, for example, a conductive tube (for example, a metal tube made of stainless steel, etc.) whose ends in the X-axis direction are supported by tube sheets 51 and 52. The outer electrode 1 also has a cylindrical shape that extends from the X2 direction to the X1 direction (in other words, the axial direction of the outer electrode 1 is along the X-axis) and has open ends. Furthermore, the outer electrode 1 functions as a ground electrode by being grounded by, for example, a ground line (not shown). Hereinafter, the axis of the outer electrode 1 will also be referred to as the first axis, and the axial direction of the outer electrode 1 will also be referred to as the first axial direction. Also, hereafter, the end of the outer electrode 1 on the X1 direction side will also be referred to as end 1a.

[0015] Furthermore, the region surrounded by the outer surface of the outer electrode 1, the tube sheet 51, and the tube sheet 52 constitutes a cooling section 50 through which a refrigerant such as cooling water is circulated.

[0016] The inner electrode 2 (hereinafter also referred to as the second electrode 2) is an electrode located inside the dielectric 3, and is, for example, a conductive tube (for example, a metal tube made of stainless steel, etc.) arranged on the inner circumference side of the outer electrode 1. Furthermore, the inner electrode 2 extends, for example, from the X2 direction side to the X1 direction side (in other words, the axial direction of the inner electrode 2 is along the X axis) and has a cylindrical shape coaxial with the outer electrode 1. In addition, the inner electrode 2 functions as a high-voltage electrode by being connected, for example, to an AC power supply 60. Hereinafter, the end of the inner electrode 2 on the X2 direction side will be referred to as end 2a or the first end 2a, and the end of the inner electrode 2 on the X1 direction side will be referred to as end 2b or the second end 2b.

[0017] The dielectric 3 is, for example, a cylindrical glass tube coaxial with the outer electrode 1. Furthermore, the dielectric 3 extends, for example, from the X2 direction to the X1 direction (in other words, the axial direction of the dielectric 3 is along the X axis), and both ends are open. In addition, the dielectric 3 is positioned, for example, with a gap between it and the inner circumferential surface of the outer electrode 1 and the outer circumferential surface of the inner electrode 2. Hereinafter, the end of the dielectric 3 on the X2 direction side will also be referred to as end 3a or first end 3a, and the end of the dielectric 3 on the X1 direction side will also be referred to as end 3b or second end 3b.

[0018] Specifically, the dielectric 3 is positioned such that, for example, a gap is formed between it and the inner circumferential surface of the outer electrode 1, which functions as a discharge space 8. Furthermore, the dielectric 3 is positioned such that, for example, a gap is formed between it and the outer circumferential surface of the inner electrode 2, which functions as a discharge space 9.

[0019] The power supply member 4 is, for example, a rod-shaped power supply rod that extends along the X-axis from the X2 direction side (power supply line 61 in Figure 1) to the X2 direction end 2a of the inner electrode 2. The power supply member 4 then applies a voltage (AC voltage) from the AC power supply 60 to the inner electrode 2 by, for example, electrically connecting with the inner electrode 2.

[0020] In other words, the ozone generator 100 in this embodiment includes, for example, one or more discharge tubes 10, each comprising a tubular outer electrode 1 extending along a first axis (the X-axis in Figure 1), an inner electrode 2 extending along the first axis, and a dielectric 3 extending along the first axial direction and positioned between the outer electrode 1 and the inner electrode 2. In this embodiment, the discharge tube 10 is configured such that, for example, the outside of the dielectric 3 and the inside of the outer electrode 1 face each other with a first distance between them, and the inside of the dielectric 3 and the outside of the inner electrode 2 face each other with a second distance between them.

[0021] Next, the pin member 5 will be described. The pin member 5 is made of metal such as stainless steel, and as shown in Figures 2A and 3B, for example, at the end 1a (opening 1b) on the X1 direction side of the outer electrode 1, it extends radially (hereinafter also simply referred to as radially) to contact the outer electrode 1 and suppresses the movement of the dielectric 3 in the X1 direction. In other words, the pin member 5 suppresses the movement of the dielectric 3 in the X1 direction more than the pin member 5. Note that the pin member 5 may be made of a nonmetal, for example, a material that has a certain strength and ozone resistance.

[0022] Specifically, the outer electrode 1 has, for example, two holes 1c along the radial direction at its end 1a (the wall constituting the end 1a). The pin member 5 is, for example, inserted into each of the two holes 1c at both ends. Furthermore, both ends of the pin member 5 are, for example, located on the outer circumference of the outer electrode 1 and are bent in a direction different from the extension direction (radial direction) of the pin member 5 (for example, the X1 direction). In this way, the pin member 5 is fixed to the outer electrode 1, for example.

[0023] In other words, for example, during the operation of the ozone generator 100 (while ozone is being generated), raw material gas A flows into the discharge space 8 and discharge space 9 from the X2 direction to the X1 direction. Therefore, for example, as shown in Figure 1, if the dielectric 3 is not fixed to the outer electrode 1 etc. in the X axis (in other words, if the dielectric 3 is not fixed in the horizontal direction of the paper in Figure 1), the dielectric 3 may move in the X1 direction in the discharge tube 10 as raw material gas A flows in. Also, for example, when the ozone generator 100 is transported by vehicle etc., the dielectric 3 may move in the X1 direction as the vehicle etc. starts and stops. It may also move in the X2 direction, but this case will be described later.

[0024] Therefore, the discharge tube 10 in this embodiment includes, for example, a restraining member 90 positioned at the end of the outer electrode 1 (for example, the X1 direction side) to prevent movement toward at least one end of the inner electrode 2 and the dielectric 3 (for example, the X1 direction side). The restraining member 90 faces, for example, the end of the inner electrode 2 (for example, end 2b) and the end of the dielectric 3 (for example, end 3b). The restraining member 90 may also be in contact with at least one end of the inner electrode 2 and the dielectric 3 (for example, end 2b or end 3b).

[0025] Specifically, in this embodiment, the outer electrode 1 is, for example, an electrode tube with both ends open, the inner electrode 2 has ends 2a and 2b, the dielectric 3 is tubular with ends 3a and 3b, and the restraining member 90 has a pin member 5 that extends radially from the outer electrode 1, the pin member 5 is in contact with the outer electrode 1, and the pin member 5 and the end 3b of the dielectric 3 face each other.

[0026] More specifically, in this embodiment, the outer electrode 1 has, for example, two holes 1c along the radial direction in the wall of the outer electrode 1, and the pin member 5 has both ends inserted into the two holes 1c, and the pin member 5 on the outside of the outer electrode 1 is bent in a direction different from the radial direction. Also, the pin member 5 faces, for example, the end 2b of the inner electrode 2. Furthermore, the pin member 5 may be in contact with, for example, the end 3b of the dielectric 3.

[0027] This pin member 5 makes it possible for the ozone generator 100 in this embodiment to suppress the movement of the dielectric 3 (movement in the X1 direction) during operation or transport of the ozone generator 100.

[0028] Specifically, the dielectric 3 shown in Figure 1, etc., has, for example, a cylindrical shape. Therefore, in the ozone generator 100 in this embodiment, by installing the pin member 5 so as to cross the opening 1b, for example, it becomes possible to position the pin member 5 on the X1 side of the dielectric 3. Therefore, even without the insulating member 6 described later, it becomes possible to bring at least a part of the X1 side end 3b of the dielectric 3 into contact with the pin member 5 when the dielectric 3 moves in the X1 direction. Thus, the pin member 5 in this embodiment can, for example, prevent the dielectric 3 from moving further than the pin member 5 in the X1 direction.

[0029] In the example shown in Figure 2, etc., the discharge tube 10 has been described in which it has a linear pin member 5. However, the discharge tube 10 may also have a member 5 that, for example, has a circular, elliptical, polygonal, or plate-like shape when viewed from at least one of the X-axis, Y-axis, and Z-axis directions, instead of the pin member 5.

[0030] Next, the insulating member 6 will be described. The insulating member 6 is an insulator such as glass or ceramic, and as shown in Figures 2A and 3B, it is positioned at the X1 direction end 1a of the outer electrode 1, in contact with the pin member 5 and facing the end 2b of the inner electrode 2, thereby suppressing the movement of the inner electrode 2 in the X1 direction. In other words, the insulating member 6 suppresses the movement of the inner electrode 2 in the X1 direction more than the insulating member 6 itself.

[0031] Specifically, the insulating member 6 is positioned, for example, on the X2 side of the pin member 5 and in contact with the pin member 5. Furthermore, the insulating member 6 has a shape that, for example, contacts at least a portion of the end portion 2b when the inner electrode 2 moves in the X2 direction.

[0032] In other words, for example, during the operation of the ozone generator 100 (while ozone is being generated), raw material gas A flows into the discharge space 9 from the X2 direction to the X1 direction. Therefore, for example, as shown in Figure 1, if the inner electrode 2 is not fixed to the dielectric 3 or the like in the X axis, the inner electrode 2 may move in the X1 direction in the discharge tube 10 as raw material gas A flows in. Also, for example, when the ozone generator 100 is transported by vehicle, the inner electrode 2 may move in the X1 direction as the vehicle starts and stops. Furthermore, as mentioned above, if the dielectric 3 is not fixed to the outer electrode 1 or the like in the X axis, the dielectric 3 may move in the X1 direction.

[0033] Therefore, the restraining member 90 in this embodiment further includes, for example, an insulating member 6 that is in contact with the pin member 5 and faces the end portion 2b of the inner electrode 2.

[0034] This insulating member 6 makes it possible to prevent the movement of the inner electrode 2 (movement in the X1 direction) of the ozone generator 100 in this embodiment, for example, during operation or transport of the ozone generator 100.

[0035] Specifically, the inner electrode 2 shown in Figure 1 is positioned, for example, on the inner circumference side of the dielectric 3. Therefore, in the ozone generator 100 in this embodiment, by positioning the insulating member 6 on the inner circumference side of the dielectric 3 (i.e., a position not sandwiched between the end 3b of the dielectric 3 and the pin member 5), it becomes possible to position the insulating member 6 on the X1 direction side of the inner electrode 2, and when the inner electrode 2 moves in the X2 direction, it becomes possible to bring at least a part of the X1 direction end 2a of the inner electrode 2 into contact with the insulating member 6. Thus, the insulating member 6 in this embodiment can, for example, prevent the inner electrode 2 from moving beyond the insulating member 6 in the X1 direction.

[0036] Furthermore, in this embodiment, the ozone generator 100 can prevent the inner electrode 2 and the pin member 5 from being electrically connected by arranging the insulating member 6 at a position between the inner electrode 2 and the pin member 5, and furthermore, it can prevent the inner electrode 2 and the outer electrode 1 from being electrically connected.

[0037] The insulating member 6 may also be in a shape other than a cylindrical shape, such as a rectangular parallelepiped (i.e., a shape other than the cylindrical shape shown in Figure 3(B)).

[0038] Next, the power supply ribbon 7 will be described. As shown in Figures 2A and 3A, the power supply ribbon 7 is positioned, for example, opposite the end 3a of the dielectric 3, and suppresses the movement of the dielectric 3 in the X2 direction. In other words, the power supply ribbon 7 suppresses the movement of the dielectric 3 in the X2 direction more than the power supply ribbon 7 itself.

[0039] Specifically, the power supply ribbon 7 is, for example, a conductive plate-shaped member, and has a shape that contacts at least a portion of the end portion 3a when the dielectric 3 moves in the X2 direction.

[0040] Furthermore, the power supply ribbon 7 has a function as a restraining member that, for example, prevents the movement of the dielectric 3 in the X2 direction, as well as a connecting member that electrically connects multiple power supply members 4.

[0041] Specifically, as shown in Figure 3A, the power supply ribbon 7 is installed so as to straddle the adjacent discharge tubes 10 in each of the power supply members 4 of the adjacent discharge tubes 10 (two discharge tubes 10 in the example shown in Figure 3A). In other words, the power supply ribbon 7 simultaneously suppresses the movement of the dielectric 3 of each of the discharge tubes 10 in the X2 direction.

[0042] Furthermore, as shown in Figures 4A and 4B, multiple power supply ribbons 7 can be connected to each other, for example, adjacent power supply ribbons 7, to form a chain-shaped power supply member 70 (hereinafter also referred to as the chain member 70). That is, the chain member 70 comprises two or more power supply ribbons 7 that are connected to each other.

[0043] The chain member 70 is connected to the AC power supply 60 at, for example, at least one of the power supply ribbons 7 that make up the chain member 70, thereby electrically connecting each inner electrode 2 connected to the chain member 70 to the AC power supply 60.

[0044] In other words, the chain member 70 connects to, for example, a plurality of power supply members 4 housed in the housing 40, thereby enabling the voltage from the AC power supply 60 to be applied to the inner electrodes 2 housed in the housing 40. In other words, in this case, the voltage from the AC power supply 60 is applied to each inner electrode 2 via the chain member 70 and the power supply members 4.

[0045] Specifically, the chain member 70 shown in Figures 4A and 4B is formed by connecting, for example, power supply ribbons 7a, 7b, 7c, 7d, and 7e to each other. More specifically, the power supply ribbon 7a connects power supply members 4a and 4b by inserting them into holes 7a1 and 7a2, respectively. The power supply ribbon 7b connects power supply members 4b and 4c by inserting them into holes 7b1 and 7b2, respectively. The power supply ribbon 7c connects power supply members 4c and 4d by inserting them into holes 7c1 and 7c2, respectively. Furthermore, the power supply ribbon 7d connects power supply member 4d and power supply member 4e by, for example, inserting power supply member 4d and power supply member 4e into holes 7d1 and 7d2, respectively. Also, the power supply ribbon 7e connects power supply member 4e and power supply member 4f by, for example, inserting power supply member 4e and power supply member 4f into holes 7e1 and 7e2, respectively.

[0046] Furthermore, in the chain member 70 shown in Figures 4A and 4B, for example, the side of the power supply ribbon 7a on the X1 direction side and the side of the power supply ribbon 7b on the X2 direction side are fixed by fixing members (not shown) such as nuts and bolts, the side of the power supply ribbon 7b on the X2 direction side and the side of the power supply ribbon 7c on the X1 direction side are fixed by fixing members, the side of the power supply ribbon 7c on the X1 direction side and the side of the power supply ribbon 7d on the X2 direction side are fixed by fixing members, and the side of the power supply ribbon 7d on the X2 direction side and the side of the power supply ribbon 7e on the X1 direction side are fixed by fixing members.

[0047] In other words, for example, during the transport of the ozone generator 100, the inner electrode 2 and dielectric 3 may move in the X2 direction due to the starting and stopping of the vehicle, etc. Also, for example, during the operation of the ozone generator 100 (while ozone is being generated), the inner electrode 2 and dielectric 3 may move in the X2 direction.

[0048] Therefore, the ozone generator 100 in this embodiment includes, for example, a plurality of discharge tubes 10, each having a tubular outer electrode 1 extending along a first axis, an inner electrode 2 extending along the first axis, and a dielectric 3 extending along the first axial direction and positioned between the outer electrode 1 and the inner electrode 2. The ozone generator 100 in this embodiment also includes, for example, a power supply ribbon 7 that electrically connects the inner electrode 2 of a discharge tube 10 (hereinafter also referred to as the first discharge tube 10) to the inner electrode 2 of a discharge tube 10 adjacent to the first discharge tube 10 (hereinafter also referred to as the second discharge tube 10), and the power supply ribbon 7 faces, for example, the end of the dielectric 3 of the first discharge tube 10 (for example, the end 3a of the dielectric 3 of the first discharge tube 10) and the end of the dielectric 3 of the second discharge tube 10 (for example, the end 3a of the dielectric 3 of the second discharge tube 10) (see Figures 3 and 4).

[0049] Furthermore, the ozone generator 100 in this embodiment further includes, for example, a plurality of power supply ribbons 7, where one power supply ribbon 7 (hereinafter also referred to as the first power supply ribbon 7) electrically connects, for example, the inner electrode 2 of the first discharge tube 10 to the inner electrode 2 of the second discharge tube 10, and another power supply ribbon 7 (hereinafter also referred to as the second power supply ribbon 7) electrically connects the inner electrode 2 of the first discharge tube 10 to the inner electrode 2 of the discharge tube 10 adjacent to the first discharge tube 10 (hereinafter also referred to as the third discharge tube 10).

[0050] Furthermore, the ozone generator 100 in this embodiment further includes a power supply member 4 that extends along the first axis and is electrically connected to the inner electrode 2. The power supply ribbon 7 is, for example, a conductive plate-shaped member having two holes (hereinafter also referred to as the first hole and the second hole). The power supply member 4 of the first discharge tube 10 (for example, the power supply member 4b shown in Figure 4B) is inserted into the first hole (for example, the hole 7a2 shown in Figure 4B) of the power supply ribbon 7 (for example, the power supply ribbon 7a shown in Figure 4B) and contacts the power supply ribbon 7. The power supply member 4 of the second discharge tube 10 (for example, the power supply member 4a shown in Figure 4B) is inserted into the second hole (for example, the hole 7a1 shown in Figure 4B) of the power supply ribbon 7 and contacts the power supply ribbon 7.

[0051] Furthermore, the ozone generator 100 in this embodiment includes, for example, a power supply member 4 that extends along the first axis and is electrically connected to the inner electrode 2, and the power supply ribbon 7 is, for example, a conductive plate-shaped member having a first hole and a second hole, and the power supply member 4 of the first discharge tube 10 (for example, the power supply member 4b shown in Figure 4B) is inserted into the first hole (for example, the hole 7a2 shown in Figure 4B) of the first power supply ribbon 7 (for example, the power supply ribbon 7a shown in Figure 4B) and is in contact with the first power supply ribbon 7, and the power supply member 4 of the first discharge tube 10 is connected to the second power supply The first power supply ribbon 7 (for example, the power supply ribbon 7b shown in Figure 4B) is inserted into the first hole (for example, the hole 7b1 shown in Figure 4B) of the power supply ribbon 7 and makes contact with the second power supply ribbon 7. The power supply member 4 of the second discharge tube 10 (for example, the power supply member 4a shown in Figure 4B) is inserted into the second hole (for example, the hole 7a1 shown in Figure 4B) of the first power supply ribbon 7 and makes contact with the first power supply ribbon 7. The power supply member 4 of the third discharge tube 10 (for example, the power supply member 4c shown in Figure 4B) is inserted into the second hole (for example, the hole 7b2 shown in Figure 4B) of the second power supply ribbon 7 and makes contact with the second power supply ribbon 7.

[0052] Furthermore, the ozone generator 100 in this embodiment includes, for example, a fixing member (not shown) that fixes the power supply member 4 inserted into the hole of the power supply ribbon 7 to the power supply ribbon 7.

[0053] Furthermore, in this embodiment, the ozone generator 100, for example, applies a voltage to the power supply ribbon 7, and the applied voltage is then applied to the inner electrode 2, which is electrically connected to the power supply member 4, via the power supply member 4, which is electrically connected to the power supply member 4.

[0054] Furthermore, in this embodiment, the ozone generator 100 has a first power supply ribbon 7 and a second power supply ribbon 7 that are electrically connected, and when a voltage is applied to the first power supply ribbon 7, the applied voltage is applied to the second power supply ribbon 7 which is electrically connected to the first power supply ribbon 7.

[0055] This power supply ribbon 7 makes it possible for the ozone generator 100 in this embodiment to suppress the movement (movement in the X2 direction) of the inner electrode 2 and dielectric 3 during transport of the ozone generator 100.

[0056] Specifically, the power supply ribbon 7 shown in Figure 3A, etc., has a shape that connects two adjacent power supply members 4. Therefore, in the ozone generator 100 in this embodiment, for example, by arranging the power supply ribbon 7 on the X2 side of the dielectric 3, it becomes possible to bring at least a portion of the X2 side end 3a of the dielectric 3 into contact with the power supply ribbon 7 when the dielectric 3 moves in the X2 direction. Thus, the power supply ribbon 7 can, for example, prevent the dielectric 3 from moving further than the power supply ribbon 7 in the X2 direction.

[0057] Furthermore, the chain member 70 shown in Figure 4A, etc., connects, for example, the power supply members 4 that are to be powered and housed in the housing 40. Therefore, in the ozone generator 100 in this embodiment, the chain member 70 can be fixed to the housing 40 by fixing, for example, a part of the power supply ribbon 7 that constitutes the chain member 70 to the housing 40. This fixing makes it possible to suppress the movement of each power supply member 4 in the X2 direction, and furthermore, it makes it possible to suppress the movement of the inner electrodes 2 connected to each power supply member 4 in the X2 direction.

[0058] Furthermore, in this embodiment, the ozone generator 100 can electrically connect the AC power supply 60 to each inner electrode 2 by, for example, connecting multiple power supply ribbons 7 to form a chain member 70.

[0059] Furthermore, in this embodiment, the ozone generator 100 can electrically connect the AC power supply 60 to the desired inner electrode 2, even in the first and second cases described below, by, for example, connecting multiple power supply ribbons 7 to form a chain member 70.

[0060] The first and second cases will be explained with reference to Figure 5. The first case is, for example, when the extension direction of the power supply members 4a, 4b, 4c, 4d, 4e, and 4f is not constant (linear) but fluctuates up, down, left, and right, as shown in Figure 5. The second case is when, even if the extension direction of the power supply members 4a, 4b, 4c, 4d, 4e, and 4f is constant, the positions of these power supply members are not aligned to the desired positions, in other words, there is variation in the placement of the power supply members in each discharge tube 10 (or each inner electrode 2).

[0061] With the chain member 70 formed by connecting multiple power supply ribbons 7, even in the first case, it becomes possible to connect each power supply member 4 while maintaining the extension direction of each power supply member 4 (in other words, without adjusting the extension direction of each power supply member 4), by absorbing the deviation in the extension direction of each power supply member 4. Furthermore, with the chain member 70, even in the second case, it becomes possible to connect each power supply member 4 while maintaining the position of each power supply member 4 (in other words, without adjusting the position of each power supply member 4), by absorbing the variation in the position of each power supply member 4.

[0062] Thus, in both the first and second cases, by using the chain member 70, it becomes possible to change the connection angle (linking angle) of adjacent power supply ribbons 7 to match the extension direction of each power supply member 4, or to change it to match the placement position of each power supply member 4, and to connect each power supply member 4 while maintaining the extension direction and placement position of each power supply member 4.

[0063] In other words, in the ozone generator 100 of this embodiment, each of the first discharge tube 10, the second discharge tube 10, and the third discharge tube 10 has a power supply member 4 that electrically connects, for example, the inner electrode 2 and the power supply ribbon 7. Furthermore, in the ozone generator 100 of this embodiment, for example, in a cross-sectional plane (YZ plane) perpendicular to the first axis (X axis), the first discharge tube 10, the second discharge tube 10, and the third discharge tube 10 are arranged in a predetermined linear direction (linear direction D in the example shown in Figure 5), and the contact point (contact point P1 in the example shown in Figure 5) between the power supply member 4 of the first discharge tube 10 (power supply member 4a in the example shown in Figure 5) and the first power supply ribbon 7 (power supply ribbon 7a in the example shown in Figure 5) and the power supply member 4 of the second discharge tube 10 (power supply member 4b in the example shown in Figure 5) and the first power supply ribbon 7 (power supply ribbon 7a in the example shown in Figure 5) The first linear direction (linear direction D1 in the example shown in Figure 5) connecting the contact point with a) (contact point P2 in the example shown in Figure 5), the second linear direction (linear direction D2 in the example shown in Figure 5) connecting the contact point between the power supply member 4 of the first discharge tube 10 (power supply member 4b in the example shown in Figure 5) and the second power supply ribbon 7 (power supply ribbon 7b in the example shown in Figure 5) (contact point P2 in the example shown in Figure 5), and the contact point between the power supply member 4 of the third discharge tube 10 (power supply member 4c in the example shown in Figure 5) and the second power supply ribbon 7 (power supply ribbon 7b in the example shown in Figure 5) are different from the predetermined linear direction (linear direction D in the example shown in Figure 5). In other words, as shown in Figure 5, the predetermined linear direction D, the first linear direction D1, and the second linear direction D2 are not parallel to each other. Note that the power supply ribbon, power supply member, and contact point shown in Figure 5 are just examples, and other power supply ribbons, other power supply members, and other contact points may be used.

[0064] Furthermore, it is preferable that the power supply ribbon 7 is attached to the power supply member 4 such that, for example, there are no gaps between the end 3a of the dielectric 3 and the power supply ribbon 7, and between the end 3b of the dielectric 3 and the pin member 5. Also, it is preferable that the power supply ribbon 7 is installed on the power supply member 4 such that, for example, there are no gaps between the end 2b of the inner electrode 2 and the insulating member 6.

[0065] As a result, the ozone generator 100 in this embodiment can further suppress the movement of the inner electrode 2 and dielectric 3 during operation or transportation of the ozone generator 100, and can prevent damage to the inner electrode 2 and dielectric 3 caused by movement in the X-axis direction.

[0066] [Specific example of chain member 70] Next, specific examples of the chain member 70 will be described. Figures 6 to 9 illustrate examples of the configuration of the chain member 70 in the first embodiment. In the examples shown in Figures 6 to 9, only the inner electrodes 2, the power supply member 4, and the power supply ribbon 7 are shown. In addition, the examples shown in Figures 6 to 9 describe the case where three adjacent inner electrodes 2 are arranged to form an equilateral triangle, but each inner electrode 2 may be arranged in a different way.

[0067] The chain member 70 shown in Figure 6 has, for example, linear chain members 71a, 71b, 71c, 71d, 71e, 71f, and 71g that connect a plurality of power supply members 4 arranged along an oblique direction between the Y1 direction and the Z1 direction. The chain member 70 shown in Figure 6 also has, for example, a linear chain member 71h that connects a plurality of power supply members 4 arranged along the Y-axis direction, and also connects chain members 71a, 71b, 71c, 71d, 71e, 71f, and 71g.

[0068] Furthermore, the chain member 70 shown in Figure 7 includes, for example, chain members 72a and 72b that connect a plurality of power supply members 4 arranged in a zigzag pattern along the Y-axis. Additionally, the chain member 70 shown in Figure 7 includes, for example, a power supply ribbon 7f that connects two power supply members 4 arranged along an oblique direction between the Y2 direction and the Z1 direction, and connects chain members 72a and 72b.

[0069] Furthermore, the chain member 70 shown in Figure 8 includes, for example, chain members 73a, 73b, 73c, 73d, 73e, and 73f that connect a plurality of power supply members 4 arranged along the Z-axis in a zigzag pattern. Additionally, the chain member 70 shown in Figure 8 includes, for example, a linear chain member 73g that connects a plurality of power supply members 4 arranged along the Y-axis and also connects chain members 73a, 73b, 73c, 73d, 73e, and 73f.

[0070] Furthermore, the chain member 70 shown in Figure 9 has, for example, linear chain members 74a, 74b, and 74c that connect a plurality of power supply members 4 arranged along the Y-axis. Also, the chain member 70 shown in Figure 9 has, for example, a power supply ribbon 7g that connects two power supply members 4 arranged along an oblique direction between the Y2 direction and the Z1 direction, and connects chain members 74a and 74b. Also, the chain member 70 shown in Figure 9 has, for example, a power supply ribbon 7h that connects two power supply members 4 arranged along an oblique direction between the Y2 direction and the Z1 direction, and connects chain members 74b and 74c.

[0071] That is, as shown in Figures 6 to 9, the chain member 70 may, for example, have one or more power supply ribbons 7 arranged along a first direction, and one or more power supply ribbons 7 arranged along a second direction different from the first direction, connected to any one of the one or more power supply ribbons 7 arranged along the first direction.

[0072] [First modified example of ozone generator 100] Next, a first modified example of the ozone generator 100 will be described. Figure 10 is a side cross-sectional view of the first modified example of the ozone generator 100 in the first embodiment. Note that in the example shown in Figure 10, the AC power supply 60 and the power supply line 61 are omitted from the notation.

[0073] The ozone generator 100 may be positioned at an angle from the X-axis direction (horizontal direction) during operation or transport.

[0074] Specifically, the ozone generator 100 in this modified example may include, for example, an installation member 41 on the outside of the ozone generator 100, such that the height of the end 3b of the dielectric 3 in the Z-axis direction (vertical direction) is lower than the height of the end 3a of the dielectric 3 in the Z-axis direction.

[0075] In other words, the ozone generator 100 in this modified example may be positioned at an angle, for example, by using the installation member 41, such that the height of the discharge tube 10 in the Z-axis direction on the X1 direction side is lower than the height of the discharge tube 10 in the Z-axis direction on the X2 direction side.

[0076] More specifically, the mounting member 41 may be, for example, a metal member and may be attached to the outer wall 40a of the housing 40 on the X2 direction side. Furthermore, the ozone generator 100 may be positioned such that, for example, during operation or transport of the ozone generator 100, the mounting member 41 is located in the Z2 direction (vertically downward) of the ozone generator 100.

[0077] As a result, the ozone generator 100 in this modified example can further suppress the movement (movement in the X2 direction) of the inner electrode 2 and dielectric 3 during operation or transport of the ozone generator 100.

[0078] Furthermore, the ozone generator 100 may be installed such that, for example, the extension direction of the discharge tube 10 is along the Z axis. That is, the ozone generator 100 may be installed such that, for example, the inlet side of the discharge tube 10 for the raw material gas A is located in the Z1 direction, and the outlet side of the discharge tube 10 for the ozone gas B is located in the Z2 direction.

[0079] [Second variation of ozone generator 100] Next, a second modified example of the ozone generator 100 will be described. Figure 11 is a side cross-sectional view of the second modified example of the ozone generator 100 in the first embodiment. Note that in the example shown in Figure 11, the AC power supply 60 and the power supply line 61 are omitted from the notation.

[0080] As shown in Figure 11, the ozone generator 100 may, for example, have a fixing member 80 placed between the inner wall 40b on the X2 direction side of the housing 40 and the power supply member 4 of each discharge tube 10 during transport of the ozone generator 100. The fixing member 80 is, for example, a cushioning material such as paper or resin.

[0081] Specifically, the discharge tube 10 in this modified example includes, for example, a power supply member 4 that extends along a first axis and is electrically connected to the inner electrode 2, the end of the power supply member 4 (for example, the end on the X2 direction side) is on the outside of the discharge tube 10, and the restraining member 90 may further include a fixing member 80 that contacts the end of the power supply member 4 on the outside of the discharge tube 10 and restrains the movement of the inner electrode 2 toward the end of the power supply member 4.

[0082] As a result, in this modified example, the ozone generator 100 can further suppress the movement (movement in the X2 direction) of the inner electrode 2 and dielectric 3 during transport of the ozone generator 100.

[0083] [Third variation of ozone generator 100] Next, a third modified example of the ozone generator 100 will be described. Figures 12 and 13 are side cross-sectional views of the third modified example of the discharge tube 10 in the first embodiment.

[0084] As shown in Figure 12, the discharge tube 10 may have, for example, a clip-shaped member 5 (hereinafter also referred to as clip member 5a) instead of the pin member 5 described in Figure 2, etc.

[0085] The clip member 5a is made of a metal such as stainless steel, and as shown in Figure 12, for example, at the end 1a (opening 1b) on the X1 direction side of the outer electrode 1, it has a portion that extends radially toward the outer electrode 1 and contacts the outer electrode 1, thereby suppressing the movement of the dielectric 3 in the X1 direction. In other words, the clip member 5a suppresses the movement of the dielectric 3 in the X1 direction more effectively than the clip member 5a, similar to the pin member 5 described in Figure 2, etc. Furthermore, the clip member 5a is formed into a substantially rectangular shape by bending a portion of the X1 direction side multiple times in the direction of the X axis and the Z axis.

[0086] In other words, in this modified example, the outer electrode 1 is, for example, an electrode tube with both ends open, the inner electrode 2 has ends 2a and 2b, the dielectric 3 is tubular with ends 3a and 3b, and the restraining member 90 has a clip member 5a that extends radially from the outer electrode 1, the clip member 5a is in contact with the outer electrode 1, and the clip member 5a and the end 3b of the dielectric 3 face each other.

[0087] Note that the clip member 5a shown in Figure 12 has a substantially rectangular shape on a portion of the X1 direction side, but is not limited to this. Specifically, as shown in Figure 13, the discharge tube 10 may have, for example, a clip-shaped member 5 (hereinafter also referred to as clip member 5b) on a portion of the X1 direction side that forms a substantially circular shape, instead of the pin member 5 described in Figure 2, etc. Furthermore, the discharge tube 10 may have a member 5 on a portion of the X1 direction side that forms a shape other than a substantially rectangular or substantially circular shape (for example, a substantially elliptical or substantially polygonal shape).

[0088] Furthermore, as explained in Figures 2, 11, and 12, the member 5, which includes the pin member 5, clip member 5a, and clip member 5b, has, for example, a first portion that faces the end 2b of the dielectric 3 and extends radially in the direction of the outer electrode 1, and a second portion that extends on the outside of the outer electrode 1 in a direction different from the radial direction of the outer electrode 1, with a part of the first portion being inserted into the two holes 1c of the outer electrode 1.

[0089] [Fourth variation of ozone generator 100] Next, a fourth modified example of the ozone generator 100 will be described. Figure 14 is a diagram illustrating an example of the configuration of the chain member 70 in the first embodiment. Specifically, Figure 14A is a front view of four discharge tubes 10 arranged in the Y-axis direction, and Figure 14B is a 14B-14B cross-sectional view of the four discharge tubes 10 arranged in the Y-axis direction. In the example shown in Figure 14, only the inner electrodes 2, the power supply member 4, and the power supply ribbon 7 are shown. Furthermore, the chain member 70 will be described as being connected to the AC power supply 60 at the power supply ribbon 7 located on the Y2 direction side, and electrically connecting each inner electrode 2 connected to the chain member 70 to the AC power supply 60.

[0090] In the example described in Figure 4, etc., a single power supply ribbon 7 is provided so as to span across the two power supply members 4 of each of two adjacent discharge tubes 10, but the explanation is not limited to this. Each of the two adjacent discharge tubes 10 may, for example, be provided with multiple power supply ribbons 7.

[0091] Furthermore, the number of power supply ribbons 7 (hereinafter also referred to as the first power supply ribbon 7 or first connecting member 7) that are provided to span two power supply members 4 located close to the AC power source 60 may be greater than the number of power supply ribbons 7 (hereinafter also referred to as the second power supply ribbon 7 or second connecting member 7) that are provided to span two power supply members 4 located far from the AC power source 60. In other words, the number of first power supply ribbons 7 may be greater than, for example, the number of second power supply ribbons 7 that connect to the AC power source 60 via each of the first power supply ribbons 7. To put it another way, the ozone generator 100 may have, for example, N (where N is an integer of 1 or more) second power supply ribbons 7 and (N+1) or more first power supply ribbons 7.

[0092] Specifically, the chain member 70 shown in Figures 14A and 14B is formed by connecting, for example, power supply ribbons 7i, 7j, 7k, 7l, 7m, and 7n to each other. More specifically, in the example shown in Figures 14A and 14B, each of the power supply ribbons 7i, 7l, and 7n connects power supply member 4g and power supply member 4h. Also, each of the power supply ribbons 7j and 7m connects power supply member 4h and power supply member 4i. Furthermore, the power supply ribbon 7k connects power supply member 4i and power supply member 4j.

[0093] In other words, in the chain member 70 in the example shown in Figure 14B, for example, the number of power supply ribbons 7 that span across power supply member 4g and power supply member 4h (3) is greater than the number of power supply ribbons 7 that span across power supply member 4h and power supply member 4i (2). Also, in the chain member 70 in the example shown in Figure 14B, for example, the number of power supply ribbons 7 that span across power supply member 4h and power supply member 4i (2) is greater than the number of power supply ribbons 7 that span across power supply member 4i and power supply member 4j (1).

[0094] As explained above, the power supply ribbons 7 are arranged such that the surface area of ​​the chain members 70 decreases as they move away from the AC power source 60, or in other words, the surface area of ​​the chain members 70 increases as they move closer to the AC power source 60. For example, a third power supply ribbon 7j is provided between the first power supply ribbon 7i and the second power supply ribbon 7l, which straddle adjacent first power supply members 4g and second power supply members 4h, and straddles adjacent second power supply members 4h and third power supply members 4i. That is, the end of the third power supply ribbon 7j (the end on the Y2 direction side) is sandwiched between the end of the first power supply ribbon 7i (the end on the Y1 direction side) and the end of the second power supply ribbon 7l (the end on the Y1 direction side).

[0095] As a result, in this modified example, the chain member 70 makes it possible to make the surface area of ​​the power supply ribbon 7 located closer to the AC power source 60 (i.e., a location with a high current density) larger than the surface area of ​​the power supply ribbon 7 located further away from the AC power source 60 (i.e., a location with a low current density). Therefore, the chain member 70 makes it possible to suppress the increase in resistance near the surface due to the so-called skin effect, even in the power supply ribbon 7 located closer to the AC power source 60. Consequently, the chain member 70 makes it possible to suppress the magnitude of the current flowing through the power supply ribbon 7 located closer to the AC power source 60, and thus suppress heat generation in the power supply ribbon 7 located closer to the AC power source 60.

[0096] In this modified example, the chain member 70 may be connected to, for example, the chain member 70 in the first embodiment (the chain member 70 described in Figure 4, etc.) to form a single chain member 70 (hereinafter also referred to as a connecting chain member 70). Specifically, the connecting chain member 70 may be such that, for example, the portion corresponding to the chain member 70 in this modified example is used in a plurality of discharge tubes 10 located close to the AC power source 60, and the portion corresponding to the chain member 70 in the first embodiment is used in a plurality of discharge tubes 10 located far from the AC power source 60.

[0097] Furthermore, the above example described a case where the surface area of ​​the power supply ribbons 7 between two adjacent discharge tubes 10 is increased by increasing the number of power supply ribbons 7 that span across the two power supply members 4 of each of the two adjacent discharge tubes 10, but the invention is not limited to this. Specifically, the chain member 70 in this modified example may increase the surface area of ​​the power supply ribbons 7 between two adjacent discharge tubes 10 by, for example, increasing the width (length in the Z-axis direction) of the power supply ribbons 7 that span across the two power supply members 4 of each of the two adjacent discharge tubes 10.

[0098] [Ozone generator 200 in the second embodiment] Next, the ozone generator 200 in the second embodiment will be described. Figure 15 is a diagram illustrating an example of the configuration of the discharge tube 20 in the second embodiment. Specifically, Figure 15A is a side cross-sectional view of the discharge tube 20, and Figure 15B is a 15B-15B cross-sectional view of the discharge tube 20.

[0099] As shown in Figure 15, the ozone generator 200 differs from the ozone generator 100 in the first embodiment in that it has multiple discharge tubes 20 instead of multiple discharge tubes 10. The ozone generator 200 may, like the ozone generator 100 in the first embodiment, have, for example, a housing 40, a cooling unit 50, and an AC power supply 60.

[0100] Each of the multiple discharge tubes 20 generates ozone gas B by silent discharge in response to the inflow of raw material gas A from the X2 direction, as explained in Figure 1, and further releases the generated ozone gas B from the X1 direction.

[0101] Specifically, each of the multiple discharge tubes 20, as shown in Figures 15A and 15B, includes, for example, an outer electrode 11, an inner electrode 12, a dielectric 13, a power supply member 14, a pin member 15 (hereinafter also referred to as member 15), and a power supply ribbon 17 (hereinafter also referred to as connecting member 17).

[0102] The outer electrode 11 has a cylindrical shape that extends from the X2 direction to the X1 direction, as described in Figure 2, for example, and has open ends. Hereinafter, the end of the outer electrode 11 on the X1 direction side will also be referred to as end 11a.

[0103] The dielectric 13 is, for example, a cylindrical glass tube coaxial with the outer electrode 11. The dielectric 13 extends, for example, from the X2 direction to the X1 direction, with the end 13a on the X2 direction side being open and the end 13c on the X1 direction side being closed in a hemispherical shape. The dielectric 13 is also positioned, for example, at a gap from the inner circumferential surface of the outer electrode 11. Hereinafter, the end of the dielectric 13 on the X2 direction side will be referred to as end 13a or first end 13a, and the end of the dielectric 13 on the X1 direction side will be referred to as end 13c or second end 13c.

[0104] Specifically, the dielectric 13 is arranged such that, for example, a gap is formed between it and the inner circumferential surface of the outer electrode 11, which functions as a discharge space 18.

[0105] The inner electrode 12 is arranged, for example, so as to be bonded to the inner circumferential surface of the dielectric 13. The inner electrode 12 extends, for example, from the X2 direction to the X1 direction, has a cylindrical shape coaxial with the outer electrode 11, and has open ends. In other words, the inner electrode 12 in this embodiment is integrated with the dielectric 13, for example. Hereinafter, the end of the inner electrode 12 on the X2 direction side will also be referred to as end 12a or first end 12a, and the end of the inner electrode 12 on the X1 direction side will also be referred to as end 12b or second end 12b.

[0106] The power supply member 14 is, for example, a rod-shaped power supply rod that extends from the X2 direction side (power supply line 61) to the space between the end 12a and end 12b of the inner electrode 12 in the X-axis direction (for example, near the center of the inner electrode 12 in the X-axis direction), and applies the voltage from the AC power supply 60 to the inner electrode 12. Specifically, the power supply member 14 applies the voltage from the AC power supply 60 to the inner electrode 12 via, for example, a brush member 14a.

[0107] In other words, in the discharge tube 20 of this embodiment, for example, the inside of the dielectric 13 and the outside of the inner electrode 12 are in contact, and the outside of the dielectric 13 and the inside of the outer electrode 11 face each other at a predetermined distance.

[0108] The pin member 15 is made of a metal such as stainless steel, and for example, at the end 11a (opening 11b) on the X1 direction side of the outer electrode 11, it extends radially toward the outer electrode 11, making contact with the outer electrode 11 and suppressing the movement of the dielectric 13 in the X1 direction. In other words, the pin member 15 suppresses the movement of the inner electrode 12 and the dielectric 13 in the X1 direction more than the pin member 15, as explained in Figure 2, for example.

[0109] Specifically, the outer electrode 11 has, for example, two holes 11c along the radial direction at its end 11a (the wall constituting the end 11a). The pin member 15 is, for example, inserted into the two holes 11c at both ends. Furthermore, both ends of the pin member 15 are, for example, located outside the outer electrode 11 and are bent in a direction different from the extending direction (radial direction) of the pin member 15 (for example, the X1 direction).

[0110] The power supply ribbon 17 is positioned, for example, opposite the end 13a of the dielectric 13, thereby suppressing the movement of the dielectric 13 in the X2 direction. That is, the power supply ribbon 17 suppresses the movement of the inner electrode 12 and the dielectric 13 in the X2 direction relative to the power supply ribbon 17, as described in Figure 4, for example.

[0111] Specifically, the power supply ribbon 17 is, for example, a conductive plate-shaped member, and has a shape that contacts at least a portion of the end portion 13a when the dielectric 13 moves in the X2 direction.

[0112] In other words, in the discharge tube 20 of this embodiment, the inner electrode 12 and the dielectric 13 are integrated. Therefore, in the discharge tube 20, the pin member 15 can prevent movement of both the inner electrode 12 and the dielectric 13 in the X1 direction. Furthermore, in the discharge tube 20, the power supply ribbon 17 can prevent movement of both the inner electrode 12 and the dielectric 13 in the X2 direction.

[0113] As a result, the ozone generator 200 in this embodiment, like the ozone generator 100, can suppress the movement of the inner electrode 12 and dielectric 13 (movement in the X1 direction or X2 direction) during operation or transport of the ozone generator 200.

[0114] Furthermore, in this embodiment, the ozone generator 200 can be electrically connected to the AC power supply 60 and the inner electrodes 12 by, for example, connecting multiple power supply ribbons 17 to form a chain member 70.

[0115] Furthermore, in this embodiment, the ozone generator 200, for example, can connect multiple power supply ribbons 17 to form a chain member 70, similar to the case described in Figure 5. This makes it possible to connect each power supply member 14 while maintaining the extension direction of each power supply member 14, even in the first and second cases described in Figure 5. As a result, the ozone generator 200 can electrically connect the AC power supply 60 and the inner electrode 12.

[0116] In this embodiment, the ozone generator 200 may be provided with an installation member 41, for example, as described in Figure 10. Also, in this embodiment, the ozone generator 200 may be provided with a fixing member 80, for example, as described in Figure 11. Furthermore, in this embodiment, the ozone generator 200 may have a clip member 5a or a clip member 5b instead of a pin member 15, for example, as described in Figures 12 and 13. Also, in this embodiment, the ozone generator 200 may have a chain member 70, for example, as described in Figure 14.

[0117] [First modified example of ozone generator 200] Next, a first modified example of the ozone generator 200 will be described. Figure 16 is a diagram illustrating an example of the configuration in the first modified example of the discharge tube 20 in the second embodiment. Specifically, Figure 16A is a side cross-sectional view of the discharge tube 20, and Figure 16B is a 16B-16B cross-sectional view of the discharge tube 20.

[0118] As shown in Figure 16A, the inner electrode 12 may, for example, extend from the X2 direction to the X1 direction, with the end 12a on the X2 direction side being open and the end 12c on the X1 direction side forming a hemispherical shape and being closed. The inner electrode 12 may also be arranged so as to be bonded to the inner circumferential surface of the dielectric 13, including the end 12c.

[0119] In this case, the discharge tube 20 may also have an insulating member 16 at the X1-direction end 11a of the outer electrode 11.

[0120] The insulating member 16 is, for example, an insulator made of glass or ceramics, and as shown in Figure 16, it is positioned at the X1 direction end 11a of the outer electrode 11 in contact with the pin member 15, thereby suppressing the movement of the inner electrode 12 and dielectric 13 in the X1 direction. In other words, the insulating member 16 suppresses the movement of the inner electrode 12 and dielectric 13 in the X1 direction more than the insulating member 16.

[0121] Specifically, the insulating member 16 is positioned, for example, on the X2 side of the pin member 15 and in contact with the pin member 15. Furthermore, the insulating member 16 has a shape that, for example, contacts at least a portion of the end portion 12c when the inner electrode 12 and dielectric 13 move in the X2 direction.

[0122] As a result, in this modified example, the ozone generator 200 can prevent the inner electrode 12 (end portion 12c) from being electrically connected to the pin member 15, even when the inner electrode 12 is positioned close to the pin member 15.

[0123] [Ozone generator 300 in the third embodiment] Next, the ozone generator 300 in the third embodiment will be described. Figure 17 is a diagram illustrating an example of the configuration of the discharge tube 30 in the third embodiment. Specifically, Figure 17A is a side cross-sectional view of the discharge tube 30, and Figure 17B is a cross-sectional view of the discharge tube 30 taken along the line 17B-17B.

[0124] As shown in Figure 17, the ozone generator 300 differs from the ozone generator 100 in the first embodiment in that it has multiple discharge tubes 30 instead of multiple discharge tubes 10. The ozone generator 300 may, like the ozone generator 100 in the first embodiment, have, for example, a housing 40, a cooling unit 50, and an AC power supply 60.

[0125] Each of the multiple discharge tubes 30 generates ozone gas B by silent discharge in response to the inflow of raw material gas A from the X2 direction, as explained in Figure 1, and further releases the generated ozone gas B from the X1 direction.

[0126] Specifically, each of the multiple discharge tubes 30, as shown in Figures 17A and 17B, includes, for example, an outer electrode 21, an inner electrode 22, a dielectric 23, a power supply member 24, a pin member 25 (hereinafter also referred to as member 25), an insulating member 26, and a power supply ribbon 27 (hereinafter also referred to as connecting member 27).

[0127] The outer electrode 21 has a cylindrical shape that extends from the X2 direction to the X1 direction, with both ends open, as described in Figure 2, for example. Hereinafter, the end of the outer electrode 21 on the X1 direction side will also be referred to as end 21a.

[0128] The inner electrode 22 extends from the X2 direction to the X1 direction, as explained in Figure 2, for example, and has a cylindrical shape coaxial with the outer electrode 21. Hereinafter, the end of the inner electrode 22 on the X2 direction side will be referred to as end 22a or first end 22a, and the end of the inner electrode 22 on the X1 direction side will be referred to as end 22b or second end 22b.

[0129] The dielectric 23 is, for example, a cylindrical glass tube coaxial with the outer electrode 21, extending from the X2 direction to the X1 direction, with both ends open. The dielectric 23 is also positioned, for example, to adhere to the inner circumferential surface of the outer electrode 21. Hereinafter, the end of the dielectric 23 on the X2 direction side will be referred to as end 23a or first end 23a, and the end of the dielectric 23 on the X1 direction side will be referred to as end 23b or second end 23b.

[0130] Specifically, the dielectric 23 is arranged such that, for example, a gap is formed between it and the outer surface of the inner electrode 22 that functions as a discharge space 28.

[0131] The power supply member 24 is, for example, a rod-shaped power supply rod that extends along the X-axis from the X2 direction side (power supply line 61) to the X2 direction end 22a of the inner electrode 22, and applies a voltage (AC voltage) from the AC power supply 60 to the inner electrode 22 by electrically connecting with the inner electrode 22.

[0132] In other words, in this embodiment, the dielectric 23 is open at both ends, and in the discharge tube 30, the outside of the dielectric 23 is in contact with the inside of the outer electrode 21, and the inside of the dielectric 23 and the outside of the inner electrode 22 are facing each other at a predetermined distance.

[0133] The pin member 25, for example, extends radially to the outer electrode 21 at the X1-direction end 21a (opening 21b) of the outer electrode 21, thereby contacting the outer electrode 21 and preventing the movement of the inner electrode 22 in the X1 direction. In other words, the pin member 25 prevents the movement of the inner electrode 22 in the X1 direction more effectively than the pin member 25, as explained in Figure 2, for example.

[0134] Specifically, the outer electrode 21 has, for example, two holes 21c along the radial direction at its end 21a (the wall constituting the end 21a). The pin member 25 is, for example, inserted into the two holes 21c at both ends. Furthermore, both ends of the pin member 25 are, for example, located outside the outer electrode 21 and are bent in a direction different from the extending direction (radial direction) of the pin member 25 (for example, the X1 direction).

[0135] The insulating member 26 is, for example, an insulator made of glass or ceramics, and is positioned, for example, at the X1 direction end 21a of the outer electrode 21, in contact with the pin member 25 and facing the end 22b of the inner electrode 22, thereby suppressing the movement of the inner electrode 22 in the X1 direction. In other words, the insulating member 26 suppresses the movement of the inner electrode 22 in the X1 direction more than the insulating member 26, as explained, for example, in Figure 2.

[0136] The power supply ribbon 27 is positioned, for example, opposite the end 23a of the dielectric 23, and suppresses the movement of the inner electrode 22 in the X2 direction. That is, the power supply ribbon 27 suppresses the movement of the inner electrode 22 in the X2 direction more than the power supply ribbon 27, as explained, for example, in Figure 4. Specifically, the power supply ribbon 27 is, for example, a conductive plate-shaped member.

[0137] In other words, in this embodiment, the discharge tube 30 can prevent the movement of the inner electrode 22 in the X1 direction by the pin member 25 and the insulating member 26. Furthermore, in the discharge tube 30, the movement of the inner electrode 22 in the X2 direction can be prevented by the power supply ribbon 27.

[0138] As a result, the ozone generator 300 in this embodiment, like the ozone generator 100, can suppress the movement of the inner electrode 22 (movement in the X1 direction or X2 direction) during operation or transport of the ozone generator 300.

[0139] Furthermore, in this embodiment, the ozone generator 300 can be electrically connected to the AC power supply 60 and the inner electrodes 22 by, for example, connecting multiple power supply ribbons 27 to form a chain member 70.

[0140] Furthermore, in this embodiment, the ozone generator 300 can connect multiple power supply ribbons 27 to form a chain member 70, for example, as described in Figure 5. This makes it possible to connect each power supply member 24 while maintaining the extension direction of each power supply member 24, even in the first or second case described in Figure 5. Therefore, the ozone generator 300 can electrically connect the AC power supply 60 and the inner electrode 22, for example, even if the extension direction of each power supply member 24 is not constant.

[0141] In this embodiment, the ozone generator 300 may be provided with an installation member 41, for example, as described in Figure 10. Furthermore, the ozone generator 300 in this embodiment may be provided with a fixing member 80, for example, as described in Figure 11. Also, the ozone generator 300 in this embodiment may have a clip member 5a or clip member 5b instead of a pin member 25, for example, as described in Figures 12 and 13. Furthermore, the ozone generator 300 in this embodiment may have a chain member 70, for example, as described in Figure 14. [Explanation of Symbols]

[0142] 1: Outer electrode 1a: End 1b: Opening 1c: Hole 2: Inner electrode 2a: End 2b: End portion 3: Dielectric 3a: End 3b: End 4: Power supply component 5: Pin component 5a: Clip member 5b: Clip member 6: Insulating material 7: Power supply ribbon 8:Discharge space 9:Discharge space 10:Discharge tube 11:Outer electrode 11a: End 11b: Opening 11c: Hole 12: Inner electrode 12a: End 12b: End 12c: End portion 13: Dielectric 13a: End 13c: End 14: Power supply component 15: Pin component 16: Insulating material 17: Power supply ribbon 18:Discharge space 20:Discharge tube 21: Outer electrode 21a: End 21b: Opening 21c: Hole 22: Inner electrode 22a: End 22b: End portion 23: Dielectric 23a: End 23b: End 24: Power supply component 25: Pin component 26: Insulating material 27: Power supply ribbon 28:Discharge space 30:Discharge tube 40: Enclosure 40a: Exterior wall 40b: Interior wall 41: Installation member 50: Cooling section 51: End plate 52: End plate 60: AC power supply 61: Power supply line 70: Chain component 80: Fixing member 90: Restraining member

Claims

1. A plurality of discharge tubes, each comprising a tubular first electrode extending along a first axis, a second electrode extending along the first axis, and a dielectric extending along the first axial direction and positioned between the first electrode and the second electrode, The device includes a connecting member that electrically connects the second electrode of the first discharge tube and the second electrode of the second discharge tube adjacent to the first discharge tube. The connecting member faces the end of the dielectric of the first discharge tube and the end of the dielectric of the second discharge tube. The dielectric is tubular and arranged such that a gap is formed between it and the inner surface of the first electrode and the outer surface of the second electrode, respectively, in the ozone generator.

2. Furthermore, comprising a plurality of the aforementioned connecting members, The first connecting member electrically connects the second electrode of the first discharge tube and the second electrode of the second discharge tube. The ozone generator according to claim 1, wherein the second connecting member electrically connects the second electrode of the first discharge tube to the second electrode of the third discharge tube adjacent to the first discharge tube.

3. The ozone generator according to claim 2, comprising N (where N is an integer of 1 or more) of the second connecting members and (N+1) or more of the first connecting members.

4. Each of the first discharge tube, the second discharge tube, and the third discharge tube has a power supply member that electrically connects the second electrode and the connecting member. The ozone generator according to claim 2, wherein in a cross-sectional plane perpendicular to the first axis, the first discharge tube, the second discharge tube, and the third discharge tube are arranged in a predetermined linear direction, and the first linear direction connecting the contact point between the power supply member and the first connecting member of the first discharge tube and the contact point between the power supply member and the first connecting member of the second discharge tube, the second linear direction connecting the contact point between the power supply member and the second connecting member of the first discharge tube and the contact point between the power supply member and the second connecting member of the third discharge tube, and the predetermined linear direction are different.

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