Liquid dispensing head and liquid dispensing device

Abstract

To provide a technique capable of improving vibration absorption characteristics while suppressing increase in a size, in a liquid discharge head.SOLUTION: A liquid discharge head includes: a plurality of individual flow channels that each have nozzles and pressure chambers to which a pressure for discharging a liquid from the nozzles is applied and are arranged in a first direction; a common flow channel communicating with the plurality of individual flow channels in common; and a piezoelectric element which is provided on a first side that is one side in a second direction crossing the first direction of the pressure chambers, and applies the pressure to the liquid in the pressure chambers and allows the nozzles to discharge the liquid, wherein at a position facing the first side of a connection region connected to the plurality of individual flow channels out of the common flow channel, a first compliance is provided, at a position facing a second side that is the other side in a second direction in the connection region out of the common flow channel and is opposite to the first side, a second compliance different from the first compliance is provided, when being viewed from the second direction, the first compliance and the second compliance have a partially overlapped overlapping part.SELECTED DRAWING: Figure 3

Description

Technical Field

[0001] The present disclosure relates to a liquid ejection head and a liquid ejection device.

Background Art

[0002] Regarding a liquid ejection head provided in a liquid ejection device such as a printer, Patent Document 1 discloses a liquid ejection head having a compliance substrate. In this liquid ejection head, the compliance substrate absorbs pressure fluctuations caused by the liquid, enhancing the stability of liquid ejection from the liquid ejection head. In the liquid ejection head described in Patent Document 1, a compliance substrate is provided below a common flow path leading to a pressure chamber.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] However, in the liquid ejection head described in Patent Document 1, since the compliance substrate is separated from the pressure chamber, there is a possibility that sufficient vibration absorption characteristics cannot be obtained. Therefore, for example, when improving the vibration absorption characteristics by increasing the lateral dimensions of the common flow path and the compliance substrate, there is a problem that even if the vibration absorption characteristics are improved, the size of the liquid ejection head increases. For this reason, in a liquid ejection head, a technique capable of improving vibration absorption characteristics while suppressing size increase is desired.

Means for Solving the Problems

[0005] The present disclosure can be realized in the following forms.

[0006] A liquid dispensing head is provided according to a first embodiment of the present disclosure. The liquid dispensing head comprises a nozzle and a pressure chamber to which pressure is applied for dispensing liquid from the nozzle, and further comprises a plurality of individual channels arranged in a first direction, a common channel communicating in common with the plurality of individual channels, and a piezoelectric element provided on the first side of the pressure chamber, which is one side in a second direction intersecting the first direction, for applying pressure to the liquid in the pressure chamber to dispensing the liquid from the nozzle, wherein a first compliance is provided at least in the connection region of the common channel that connects to the plurality of individual channels, facing the first side, and a second compliance different from the first compliance is provided at least in the connection region of the common channel that is facing the second side, which is the other side in the second direction, opposite to the first side, and when viewed from the second direction, the first compliance and the second compliance have an overlapping portion that partially overlaps.

[0007] A second embodiment of this disclosure provides a liquid dispensing device, which comprises a liquid dispensing head as in the first embodiment and a control unit that controls the dispensing operation to dispense liquid from the liquid dispensing head. [Brief explanation of the drawing]

[0008] [Figure 1] This is an explanatory diagram showing the schematic configuration of a liquid dispensing device in the first embodiment of this disclosure. [Figure 2] This is a block diagram of a liquid dispensing device. [Figure 3] This is a partial cross-sectional view of the liquid dispensing head. [Figure 4] This is a cross-sectional view of the liquid discharge head, specifically a cross-sectional view taken along line IV-IV in Figure 3. [Figure 5] This is a cross-sectional view of the liquid discharge head, specifically a cross-sectional view taken along the VV line in Figure 3. [Figure 6] This is a cross-sectional view of the liquid discharge head, specifically a cross-sectional view taken along the line VI-VI in Figure 3. [Figure 7]This diagram illustrates the effect of pressure absorption in the liquid discharge head of the first embodiment. [Figure 8] This is a cross-sectional view of a liquid dispensing head in a second embodiment of the present disclosure. [Modes for carrying out the invention]

[0009] A. First Embodiment: A1. Configuration of liquid dispensing device 1: Figure 1 is an explanatory diagram showing the schematic configuration of a liquid ejection device 1 as a first embodiment of the present disclosure. In this embodiment, the liquid ejection device 1 is an inkjet printer that ejects ink, as an example of a liquid, onto a printing medium, which is printing paper PA (hereinafter simply referred to as "paper PA"), to form an image. The liquid ejection device 1 may use any type of medium, such as a resin film or fabric, as the target for ink ejection instead of paper PA.

[0010] The liquid dispensing device 1 comprises a liquid dispensing head 10 for dispensing ink, a liquid container 2 for storing ink, a carriage 3 on which the liquid dispensing head 10 is mounted, a carriage transport mechanism 4 for transporting the carriage 3, a media transport mechanism 5 for transporting paper PA, and a control unit 30. The control unit 30 is a control unit that controls the dispensing of liquid.

[0011] Specific embodiments of the liquid container 2 include, for example, a cartridge detachable from the liquid dispensing device 1, a bag-shaped ink pack made of a flexible film, and an ink tank that can be refilled with ink. The type of ink stored in the liquid container 2 is arbitrary. The liquid dispensing device 1 may be equipped with multiple liquid containers 2 corresponding to, for example, four colors of ink. The four colors of ink may be, for example, cyan, magenta, yellow, and black. The liquid containers 2 may also be mounted on the carriage 3.

[0012] The liquid ejection device 1 includes a circulation mechanism 8 for circulating ink. The circulation mechanism 8 includes a supply channel 81 for supplying ink to the liquid ejection head 10, a recovery channel 82 for recovering the ink discharged from the liquid ejection head 10, and a pump 83 for transferring the ink.

[0013] The carriage transport mechanism 4 has a transport belt 4a and a motor for transporting the carriage 3. The media transport mechanism 5 has transport rollers 5a and a motor for transporting the paper PA. The carriage transport mechanism 4 and the media transport mechanism 5 are controlled by the control unit 30. The liquid ejection device 1 transports the carriage 3 by the carriage transport mechanism 4 while the media transport mechanism 5 transports the paper PA, and ejects ink droplets onto the paper PA to print.

[0014] Figure 2 is a block diagram of the liquid dispensing device 1. As shown in Figure 2, the liquid dispensing device 1 includes a linear encoder 6. It is positioned to detect the position of the carriage 3. The linear encoder 6 acquires information regarding the position of the carriage 3. As the carriage 3 moves, the linear encoder 6 outputs an encoder signal to the control unit 30.

[0015] The control unit 30 includes one or more CPUs 31. The control unit 30 may also include an FPGA instead of, or in addition to, the CPUs 31. The control unit 30 includes a storage unit 35. The storage unit 35 includes, for example, a ROM 36 and a RAM 37. The storage unit 35 may also include an EEPROM or a PROM. The storage unit 35 can store print data Img supplied from the host computer. The storage unit 35 stores the control program for the liquid dispensing device 1.

[0016] CPU is an abbreviation for Central Processing Unit. FPGA is an abbreviation for field-programmable gate array. RAM is an abbreviation for Random Access Memory. ROM is an abbreviation for Read Only Memory. EEPROM is an abbreviation for Electrically Erasable Programmable Read-Only Memory. PROM is an abbreviation for Programmable ROM.

[0017] The control unit 30 generates signals for controlling the operations of each part of the liquid ejection device 1. The control unit 30 can generate a print signal SI and a waveform specification signal dCom. The print signal SI is a digital signal for specifying the type of operation of the liquid ejection head 10. The print signal SI can specify whether to supply a drive signal Com to the piezoelectric element 20. The waveform specification signal dCom is a digital signal that defines the waveform of the drive signal Com. The drive signal Com is an analog signal for driving the piezoelectric element 20.

[0018] The liquid ejection device 1 includes a drive signal generation circuit 32. The drive signal generation circuit 32 is electrically connected to the control unit 30. The drive signal generation circuit 32 includes a DA conversion circuit. The drive signal generation circuit 32 generates a drive signal Com having a waveform defined by the waveform specification signal dCom. When the control unit 30 receives an encoder signal from the linear encoder 6, it outputs a timing signal PTS to the drive signal generation circuit 32. The timing signal PTS defines the generation timing of the drive signal Com. Each time the drive signal generation circuit 32 receives the timing signal PTS, it outputs the drive signal Com.

[0019] The drive circuit 7 is electrically connected to the control unit 30 and the drive signal generation circuit 32. The drive circuit 7 switches whether to supply the drive signal Com to the piezoelectric element 20 based on the print signal SI. The drive circuit 7 can select the piezoelectric element 20 to which the drive signal Com is supplied based on the print signal SI, the latch signal LAT, and the change signal CH supplied from the control unit 30. The latch signal LAT defines the latch timing of the print data Img. The change signal CH defines the selection timing of the drive pulses included in the drive signal Com.

[0020] The control unit 30 controls the ink ejection operation by the liquid ejection head 10. The control unit 30 drives the piezoelectric element 20 to vary the pressure of the ink in the pressure chamber C and eject the ink from the nozzle N. Details of the configurations of the piezoelectric element 20, the pressure chamber C, the nozzle N, etc. will be described later. The control unit 30 controls the ejection operation when performing the printing operation.

[0021] A2. Configuration of the liquid ejection head 10: Next, the configuration of the liquid ejection head 10 will be described. The liquid ejection head 10 employs a circulation method that circulates the liquid to the supply-side common flow path 41, the individual flow paths 42, and the discharge-side common flow path 43, which will be described later. FIG. 3 is a partial cross-sectional view of the liquid ejection head 10. In the following description, three mutually intersecting directions will be described as the X-axis direction, the Y-axis direction, and the Z-axis direction.

[0022] The X-axis direction is the left-right direction in FIG. 3 and includes the X1 direction (the right direction in FIG. 3) and the X2 direction (the left direction in FIG. 3), which are opposite directions. The X-axis direction is an example of the third direction. The Y-axis direction includes the Y1 direction and the Y2 direction, which are opposite directions. The Y1 direction is the depth direction of the paper surface in FIG. 3. The Y2 direction is the front direction of the paper surface in FIG. 3. The Y-axis direction is an example of the first direction. The Z-axis direction is the up-down direction in FIG. 3 and includes the Z1 direction (the downward direction in FIG. 3) and the Z2 direction (the upward direction in FIG. 3), which are opposite directions. The Z-axis direction is an example of the second direction.

[0023] Furthermore, the "Z2 side" is an example of the "first side," and the "Z1 side" is an example of the "second side." The X, Y, and Z axes are orthogonal. The Z axis is usually aligned with the vertical direction, but it does not have to be aligned with the vertical direction. In the following explanation, the Z1 direction may be described as "up" and the Z2 direction as "down."

[0024] In this specification, the terms "supply side" and "discharge side" may be used. The "supply side" refers to the area upstream of nozzle N with respect to the liquid flow path. The term "supply side" may also refer to anything related to the area upstream of nozzle N. The term "discharge side" may also refer to anything related to the area downstream of nozzle N.

[0025] The liquid discharge head 10 comprises a nozzle substrate 21, a communication plate 22, a pressure chamber substrate 23, a diaphragm 24, a sealing plate 25, and a piezoelectric element 20. The liquid discharge head 10 also comprises a case 26 and a COF 60. COF is an abbreviation for Chip on Film. Furthermore, the liquid discharge head 10 has a supply-side common flow path 41, a plurality of individual flow paths 42, a discharge-side common flow path 43, a plurality of pressure chambers C, a supply-side absorption chamber 44, a discharge-side absorption chamber 45, a first compliance 51, a second compliance 52, a third compliance 53, and a fourth compliance 54. Note that the plurality of individual flow paths 42 and the plurality of pressure chambers C are arranged along the Y-axis, so only one of each is shown in Figure 3. In this embodiment, a liquid discharge head 10 that discharges ink, which is an example of a liquid, will be described. The liquid is not limited to ink, and the liquid discharge head 10 can discharge other liquids.

[0026] The thickness direction of the nozzle substrate 21, communication plate 22, pressure chamber substrate 23, diaphragm 24, sealing plate 25, and case 26 is aligned with the Z-axis direction. The nozzle substrate 21 is located at the bottom of the liquid discharge head 10. The communication plate 22 is located in the Z2 direction of the nozzle substrate 21. The pressure chamber substrate 23 is located in the Z2 direction of the communication plate 22. In other words, the communication plate 22 is provided between the pressure chamber substrate 23 and the nozzle substrate 21. The diaphragm 24 is located in the Z2 direction of the pressure chamber substrate 23. The diaphragm 24 is formed of, for example, SiO2. The diaphragm 24 is a separate component from the pressure chamber substrate 23 and may be provided by bonding it to the pressure chamber substrate 23, or it may be formed by performing a treatment such as thermal oxidation on the surface of the pressure chamber substrate 23 in the Z2 direction.

[0027] A sealing plate 25 is positioned in the Z2 direction of the diaphragm 24. The sealing plate 25 covers the diaphragm 24, the first compliance 51 and the third compliance 53, the piezoelectric elements 15, 16, and 20, and the pressure chamber substrate 23. The case 26 is positioned on the sealing plate 25. The piezoelectric element 20 is provided corresponding to the pressure chamber C.

[0028] [Explanation of the flow path] First, the liquid flow path formed within the liquid discharge head 10 will be described. The liquid flow path includes a supply port and an outlet (not shown), a common supply-side flow path 41, a plurality of individual flow paths 42, and a common discharge-side flow path 43. The boundary La between the common supply-side flow path 41 and each individual flow path 42 is shown by a dashed line in Figure 3. A well-known flow path throttling (not shown) is provided at the boundary between the common supply-side flow path 41 and each individual flow path 42.

[0029] The supply-side common flow path 41 is provided in common to multiple pressure chambers C. The supply-side common flow path 41 is continuous in the Y-axis direction across the multiple pressure chambers C. The supply-side common flow path 41 includes a liquid chamber 61 provided in the case 26, a liquid chamber 62 provided in the pressure chamber substrate 23, and a liquid chamber 63 provided in the communication plate 22. These liquid chambers 61, 62, and 63 are continuous in the Z-axis direction.

[0030] The supply-side absorption chamber 44 is located in the X1 direction of the pressure chamber C. The supply-side absorption chamber 44 communicates with the upstream side of the pressure chamber C. The supply-side absorption chamber 44 constitutes part of the supply-side common flow path 41.

[0031] Multiple individual flow paths 42 are provided for each of the multiple pressure chambers C and are arranged in the Y-axis direction. The individual flow paths 42 are located downstream of the supply-side common flow path 41. The individual flow paths 42 communicate downstream of the liquid chamber section 62 provided in the pressure chamber substrate 23. The individual flow paths 42 have, in order from upstream, the pressure chamber C, the first communicating flow path 65, the second communicating flow path 66, and the third communicating flow path 67.

[0032] Multiple nozzles N are connected to each of the multiple pressure chambers C via first communication channels 65 and second communication channels 66. Each nozzle N is located in the Z1 direction with respect to each pressure chamber C. The multiple first communication channels 65 extend in the Z-axis direction. The multiple second communication channels 66 connect to the Z1 end of the first communication channels 65 and extend in the X2 direction. The nozzles N are located approximately in the center in the X-axis direction of the second communication channels 66. The multiple third communication channels 67 connect to the X2 end of the second communication channels 66 and extend in the Z2 direction.

[0033] The common discharge channel 43 is provided in common for multiple pressure chambers C. The common discharge channel 43 communicates in common with multiple individual channels 42. The common discharge channel 43 communicates with each pressure chamber C via the individual channels 42. The common discharge channel 43 is located downstream of each individual channel 42.

[0034] The discharge-side common flow path 43 is continuous in the Y-axis direction. The discharge-side common flow path 43 includes a liquid chamber 71 provided in the case 26, a liquid chamber 72 provided in the pressure chamber substrate 23, and a liquid chamber 73 provided in the communication plate 22. These liquid chambers 71, 72, and 73 are continuous in the Z-axis direction. The liquid chambers 61 and 71 are formed by through holes provided in the case 26.

[0035] [Description of each circuit board] Figures 4 to 6 are cross-sectional views of the liquid discharge head, where Figure 4 is a cross-sectional view taken along line IV-IV in Figure 3, Figure 5 is a cross-sectional view taken along line VV in Figure 3, and Figure 6 is a cross-sectional view taken along line VI-VI in Figure 3. The structure of each substrate constituting the liquid discharge head 10 will be described below with reference to Figures 3 to 6 as appropriate. As shown in Figure 3, nozzles N are formed on the nozzle substrate 21, penetrating the nozzle substrate 21 in the Z direction. As described above, the liquid discharge head 10 discharges liquid through these nozzles N. Multiple nozzles N are arranged along the Y axis on the nozzle substrate 21 to form a nozzle row. The nozzle substrate 21 is formed from, for example, a metal such as stainless steel, an organic material such as polyimide resin, or a silicon single crystal substrate.

[0036] As shown in Figures 3 and 5, the pressure chamber substrate 23 has a supply side liquid chamber 62, a supply side absorption chamber 44, a pressure chamber C, a discharge side absorption chamber 45, and a discharge side liquid chamber 72. The pressure chamber C, each absorption chamber 44, 45, and each liquid chamber 62, 72 all constitute part of the liquid flow path. The pressure chamber C, each absorption chamber 44, 45, and each liquid chamber 62, 72 extend in the X-axis direction. The pressure chamber C, each absorption chamber 44, 45, and each liquid chamber 62, 72 penetrate the pressure chamber substrate 23 in the Z-axis direction. The pressure chamber C, each absorption chamber 44, 45, and each liquid chamber 62, 72 have a predetermined volume.

[0037] Multiple pressure chambers C are arranged at predetermined intervals in the Y-axis direction. Multiple pressure chambers C are located in the same positions in the Y-axis direction as the supply-side absorption chamber 44 and the discharge-side absorption chamber 45. Corresponding pressure chambers C and supply-side absorption chambers 44 are adjacent in the Y-axis direction and communicate in the X-axis direction. The supply-side liquid chamber section 62, together with the liquid chamber section 61 provided in the case 26 and the liquid chamber section 63 provided in the communication plate 22, forms a common supply-side flow path 41.

[0038] In this embodiment, the pressure chamber substrate 23 is formed from a silicon single crystal substrate. In other embodiments, the pressure chamber substrate 23 may be formed from, for example, metals such as stainless steel (SUS) or nickel (Ni), ceramic materials such as zirconia (ZrO2) or alumina (Al2O3), glass ceramic materials, oxides such as magnesium oxide (MgO) or alumina lanthanum (LaAlO3), etc. In this embodiment, the pressure chamber C and absorption chambers 44, 45 are formed, for example, by processing the pressure chamber substrate 23 by anisotropic etching. Details of the functions of the pressure chamber C and absorption chambers 44, 45 will be described later.

[0039] The communication plate 22 is positioned between the nozzle substrate 21 and the pressure chamber substrate 23 and is fixed onto the nozzle substrate 21 by adhesive or the like. The communication plate 22 is formed from, for example, a silicon single crystal substrate. As shown in Figures 3 and 6, the communication plate 22 has a supply side liquid chamber 63, a discharge side liquid chamber 73, a first communication channel 65, a second communication channel 66, and a third communication channel 67. Each liquid chamber 63, 73, the first communication channel 65, and the third communication channel 67 are formed to penetrate the communication plate 22 in the Z direction. The second communication channel 66 is formed as a recessed portion on the lower surface of the communication plate 22, without penetrating the communication plate 22 in the Z direction. The liquid chamber 73, together with the liquid chamber 71 formed in the case 26 and the liquid chamber 72 formed in the pressure chamber substrate 23, forms the discharge side common channel 43.

[0040] As shown in Figure 3, the sealing plate 25 is a member having a recess on its lower surface in the Z1 direction. The recess opens on the Z2 side of the pressure chamber C and each absorption chamber 44, 45, at a position facing the pressure chamber C and each absorption chamber 44, 45. Specifically, the sealing plate 25 of this embodiment is provided with a first recess 75, a second recess 76, and a third recess 77.

[0041] The first recess 75 opens in a position opposite the pressure chamber C. The second recess 76 opens in a position opposite the supply-side absorption chamber 44. The third recess 77 opens in a position opposite the discharge-side absorption chamber 45. Each of the recesses 75, 76, and 77 is separated by a wall formed as part of the sealing plate 25. In this embodiment, the depth of the openings of each of the recesses 75, 76, and 77 is equal. That is, the dimensions of each of the recesses 75, 76, and 77 in the Z direction are equal.

[0042] Furthermore, each of the recesses 75, 76, and 77 is not in communication with the liquid flow path, and no liquid flows through the recesses 75, 76, and 77. The widths of the recesses 75, 76, and 77 in the X-axis direction are, in descending order, the first recess 75, the second recess 76, and the third recess 77. As shown in Figures 3 and 4, the first recess 75, the second recess 76, and the third recess 77 extend across the width of the liquid discharge head 10 in the Y-axis direction. The widths of the second recess 76 and the third recess 77 in the Y-axis direction are the same. A through hole 78 is provided in the sealing plate 25, extending through the sealing plate 25 in the Z-axis direction, at a position closer to the X2 direction than the center of the sealing plate 25 in the X-axis direction. The COF 60 is inserted into the through hole 78.

[0043] The diaphragm 24 is laminated on the pressure chamber substrate 23. The piezoelectric elements 15, 16, and 20 are laminated on the diaphragm 24. Multiple piezoelectric elements 20 are located within the first recess 75. Piezoelectric element 15 is located within the second recess 76. Piezoelectric element 16 is located within the third recess 77. The piezoelectric element 20 corresponding to the pressure chamber C located in the first recess 75 is an actuator configured by laminating, for example, a first electrode (not shown), a piezoelectric body, and a second electrode in the Z1 direction. Note that in Figure 3, the wiring section electrically connecting the first electrode or the second electrode to the COF 60 is omitted from the illustration. In this embodiment, the piezoelectric elements 15 and 16 located within the second recess 76 and the third recess 77 have the same configuration as the actuator located within the first recess 75.

[0044] [Explanation of Compliance] Next, the configurations of the first compliance 51 to the fourth compliance 54 will be described. The first compliance 51 is an absorber for absorbing vibrations of the liquid on the supply side. The first compliance 51 is positioned on the Z2 side of the connection region A1, which is connected to at least several individual flow paths 42 of the common flow path 41 on the supply side.

[0045] Here, "connection region A1" refers to the area within the supply-side common channel 41, specifically the region surrounding the point where the supply-side common channel 41 connects to each individual channel 42. "Connection region A1" is, for example, the portion upstream of the boundary La between the supply-side common channel 41 and the individual channels 42, downstream of the liquid chamber 61 formed in the case 26, and on the Z1 and X2 sides relative to the liquid chamber 61, as shown by the dashed line in Figure 3. In Figure 3, the X1-side end of connection region A1 is set near the center of the first compliance 51, but it may be set further to the X1 side or further to the X2 side as long as the above conditions are met. The same applies to connection region A2, which will be described later.

[0046] The first compliance 51 comprises a diaphragm 24 and a piezoelectric element 15. As shown in Figure 4, the first compliance 51 is continuous in the Y-axis direction over the width of the discharge-side common flow path 43 in the Y-axis direction. A piezoelectric element 15 is formed on the diaphragm 24, continuous in the Y-axis direction over the width of the Y-axis direction. The width W1 in the X-axis direction of the first compliance 51 corresponds to the width of the piezoelectric element 15 in the X-axis direction. The diaphragm 24 is deformable under the pressure of the liquid. The diaphragm 24 deforms under the pressure of the liquid and can absorb pressure fluctuations of the liquid in the supply-side absorption chamber 44. The piezoelectric element 15 is positioned to overlap the supply-side absorption chamber 44 when viewed in the Z-axis direction.

[0047] The second compliance 52 is an absorber for absorbing vibrations of the liquid on the supply side. The second compliance 52 is provided in the Z1 direction of the communication plate 22. That is, the second compliance 52 is positioned at least on the Z1 side of the connection region A1 of the supply-side common flow path 41. The second compliance 52 is a flexible film that absorbs pressure fluctuations of the liquid in the supply-side common flow path 41. As shown in Figure 3, the second compliance 52 is installed on the lower surface of the communication plate 22 so as to close the opening on the Z1 direction side of the liquid chamber portion 63 of the communication plate 22, and constitutes the wall surface (specifically the bottom surface) of the supply-side common flow path 41.

[0048] Here, the reference position of pressure chamber C is defined as line L1, which passes through the center of pressure chamber C in the Z direction and lies on the XY plane containing the X and Y axes. The distance D1 in the Z-axis direction between pressure chamber C and the first compliance 51 is shorter than the distance D2 in the Z-axis direction between pressure chamber C and the second compliance 52. Distance D1 is the distance from the reference position of pressure chamber C to the bottom surface of the diaphragm 24 and corresponds to an example of "the distance along the second direction between pressure chamber C and the first compliance 51". Distance D2 is the distance from the reference position of pressure chamber C to the top surface of the second compliance 52 and corresponds to an example of "the distance along the second direction between pressure chamber C and the second compliance 52". Note that the flow path length from pressure chamber C to the first compliance 51 is shorter than the flow path length from pressure chamber C to the second compliance 52.

[0049] The thickness of the second compliance 52 in the Z-axis direction is thinner than the thickness of the first compliance 51 in the Z-axis direction. The width W2 of the second compliance 52 in the X-axis direction (see Figure 6) is greater than the width W1 of the first compliance 51 in the X-axis direction (see Figure 4). The width of the first compliance 51 in the Y-axis direction and the width of the second compliance 52 in the Y-axis direction are approximately the same.

[0050] Furthermore, the Young's modulus of the second compliance 52 is smaller than that of the first compliance 51. Here, the Young's modulus of the first compliance 51 can be calculated by treating the first compliance 51 as a single laminated film. Specifically, it can be calculated by weighting the Young's modulus of the laminated film by multiplying it by a weighting coefficient and then taking the average value of each weighted laminated film. The weighting coefficient is a constant that corresponds, for example, to the thickness of the film.

[0051] When viewed from the Z-axis direction, the first compliance 51 and the second compliance 52 have an overlapping portion 11 where they partially overlap. When viewed from the Z-axis direction, the first compliance 51 has a first non-overlapping portion 12 that does not overlap with the second compliance 52. When viewed from the Z-axis direction, the second compliance 52 has a second non-overlapping portion 13 that does not overlap with the first compliance 51. The area of ​​the first non-overlapping portion 12 when viewed from the Z-axis direction is smaller than the area of ​​the second non-overlapping portion 13 when viewed from the Z-axis direction.

[0052] As described above, due to the physical properties and dimensions of the first compliance 51 and the second compliance 52, the compliance capability of the second compliance 52 is greater than that of the first compliance 51. Compliance capability is synonymous with compliance quantity and can be expressed using the following equation (1).

number

[0053] In equation (1), "ν" is the Poisson's ratio of the diaphragm 24. "ν" is a physical property of the material constituting compliance. "E" is Young's modulus. "E" is a physical property of the material constituting compliance.

[0054] "w" is the length of the opening along the X-axis covered by the compliance. "l" is the length of the opening along the Y-axis covered by the compliance. "t" is the thickness of the compliance. Here, since w < l, the above conditions are met. However, if w > l, then "w" is the length along the Y-axis and "l" is the length along the X-axis.

[0055] The third compliance 53 is an absorption part for absorbing the vibration of the liquid on the discharge side. The third compliance 53 is arranged at a position facing the Z2 side of the second connection region A2 that connects to a plurality of individual channels 42 among at least the discharge-side common channel 43. Here, the "second connection region A2" refers to the periphery of the part connecting the discharge-side common channel 43 and the individual channels 42 and refers to the region within the discharge-side common channel 43. The "second connection region A2" is, for example, as shown by being surrounded by a two-dot chain line in FIG. 3, downstream of the boundary line Lb between the discharge-side common channel 43 and the individual channels 42 and upstream of the liquid chamber part 71 formed in the case 26, and is the part on the X1 direction side and the Z1 direction side of the liquid chamber part 71.

[0056] The configuration of the third compliance 53 is substantially the same as that of the first compliance 51 and includes a diaphragm 24 and a piezoelectric element 16. The diaphragm 24 constituting the third compliance 53 is continuous in the Y-axis direction. The width of the third compliance 53 in the X-axis direction corresponds to the width of the plurality of piezoelectric elements 16 in the X-axis direction. The diaphragm 24 is deformable by receiving the pressure of the liquid. The diaphragm 24 is deformed by the pressure of the liquid and can absorb the pressure fluctuation of the liquid in the discharge-side absorption chamber 45.

[0057] On the diaphragm 24, piezoelectric elements 16 that are continuous in the Y-axis direction over the width in the Y-axis direction are formed. The piezoelectric elements 16 are arranged corresponding to positions overlapping a plurality of discharge-side absorption chambers 45 when viewed in the Z-axis direction.

[0058] The fourth compliance 54 is an absorbent section for absorbing vibrations of the liquid on the discharge side. The fourth compliance 54 is provided in the Z1 direction of the communication plate 22. That is, the fourth compliance 54 is positioned at least on the Z1 side of the second connection region A2 of the discharge-side common flow path 43. The fourth compliance 54 is a flexible film that absorbs pressure fluctuations of the liquid in the discharge-side common flow path 43. The fourth compliance 54 is installed on the lower surface of the communication plate 22 so as to close the opening on the Z1 direction side of the liquid chamber portion 73 of the communication plate 22, and constitutes the wall surface (specifically the bottom surface) of the discharge-side common flow path 43.

[0059] Here, the distance in the Z-axis direction between pressure chamber C and the third compliance 53 is the same as the distance D1 in the Z-axis direction between pressure chamber C and the first compliance 51. Also, the distance in the Z-axis direction between pressure chamber C and the fourth compliance 54 is the same as the distance D2 in the Z-axis direction between pressure chamber C and the second compliance 52. In other words, the distance D1 in the Z-axis direction between pressure chamber C and the third compliance 53 is shorter than the distance D2 in the Z-axis direction between pressure chamber C and the fourth compliance 54.

[0060] The thickness of the fourth compliance 54 in the Z-axis direction is thinner than the thickness of the third compliance 53 in the Z-axis direction. The width of the fourth compliance 54 in the X-axis direction is greater than the width of the third compliance 53 in the X-axis direction. The width of the third compliance 53 in the Y-axis direction and the width of the fourth compliance 54 in the Y-axis direction are approximately the same.

[0061] Furthermore, the Young's modulus of the fourth compliance 54 is smaller than that of the third compliance 53. Here, the Young's modulus of the third compliance 53 can be calculated by treating the third compliance 53 as a single laminated film, similar to the first compliance 51.

[0062] When viewed from the Z-axis direction, the third compliance 53 and the fourth compliance 54 have a second overlapping portion 14 in which they partially overlap. The width W4 of the second overlapping portion 14 in the X-axis direction is smaller than the width W3 of the overlapping portion 11 in the X-axis direction. The area of ​​the second overlapping portion 14 is smaller than the area of ​​the overlapping portion 11.

[0063] When viewed from the Z-axis direction, the fourth compliance 54 has a non-overlapping portion on the X2 direction side of the discharge-side common flow path 43 that does not overlap with the third compliance 53. Furthermore, the compliance capacity of the fourth compliance 54 is greater than that of the third compliance 53. The compliance capacity of the third compliance 53 is less than that of the first compliance 51. Moreover, the compliance capacity of the second compliance 52 is greater than that of the fourth compliance 54.

[0064] Furthermore, it is preferable to form the compliances 51 to 54 in such a way that they have flexibility suitable for absorbing vibrations of the liquid propagated from the pressure chamber C, by adjusting the material used to form each of the compliances 51 to 54 and the thickness of the compliances 51 to 54. In addition, in order to effectively absorb vibrations of the liquid, if the compliance includes members constituting the piezoelectric elements 15 and 16, as in the first and third compliances 53 of this embodiment, it is preferable that the compliance is configured so as not to cause piezoelectric strain when a voltage is applied to the piezoelectric body. That is, unlike the piezoelectric element 20 in the first recess 75, the piezoelectric elements 15 and 16 located in the second recess 76 and the third recess 77 do not apply pressure to the liquid in the pressure chamber, and therefore it is preferable that they are not electrically connected to the control unit 30.

[0065] [Operation Description / Liquid Flow] The liquid in the liquid container 2 is transferred by the pump 83, flows through the supply channel 81, passes through a supply port (not shown), and flows into the supply-side common channel 41. The liquid in the supply-side common channel 41 passes through the supply-side absorption chamber 44 and is supplied to the pressure chamber C, which constitutes part of the individual channel 42. A portion of the liquid in the pressure chamber C is discharged from the nozzle N.

[0066] Liquid that is not discharged from nozzle N flows through the second communication channel 66, the third communication channel 67, and the discharge-side absorption chamber 45 which is part of the individual channel 42, and into the discharge-side common channel 43. The liquid in the discharge-side common channel 43 flows into the recovery channel 82 through an outlet (not shown) and is collected in the liquid container 2. In this way, the liquid is circulated in the liquid discharge head 10.

[0067] The pressure chamber C described above applies pressure to the liquid inside the pressure chamber C by the vibration of the diaphragm 24. The diaphragm 24 vibrates by the drive of the piezoelectric element 20. Specifically, when a voltage is applied to the piezoelectric body, piezoelectric strain is generated in the active portion of the piezoelectric body, which is the part sandwiched in the Z direction by the first electrode and the second electrode. The piezoelectric element 20 uses this piezoelectric strain to vibrate the diaphragm 24 so that it bends, thereby changing the volume of the pressure chamber and applying pressure to the liquid inside the pressure chamber C. Note that in the non-active portion of the piezoelectric body, which is the part not sandwiched in the Z direction by the first electrode and the second electrode, the above-mentioned piezoelectric strain does not occur even when a voltage is applied to the piezoelectric body.

[0068] As described above, the liquid discharge head 10 discharges liquid from the nozzle N by applying pressure to the liquid in the pressure chamber C. When pressure is applied to the liquid in the pressure chamber C, a portion of the liquid in the pressure chamber C flows into a liquid chamber or the like that is located upstream of the pressure chamber C and is common to multiple pressure chambers C, and vibrations of the liquid propagate from the pressure chamber C to the liquid chamber or the like. When pressure is applied to the liquid in multiple pressure chambers C, the liquid flowing from one pressure chamber C to the liquid chamber or the like is affected, for example, by the liquid flowing from another pressure chamber C to the liquid chamber or the like. Therefore, the manner in which vibrations of the liquid propagate from one pressure chamber C changes due to the influence of vibrations propagating from other pressure chambers C, and the stability of the quality of the liquid discharged from the nozzle N through one pressure chamber C may decrease.

[0069] The liquid dispensing head 10 and liquid dispensing device 1 of the first embodiment described above can achieve the following effects.

[0070] The supply-side absorption chamber 44 described above absorbs vibrations of the liquid propagated from the pressure chamber C. Specifically, the first compliance 51 provided on the Z2 side of the supply-side absorption chamber 44 and the second compliance 52 provided on the Z1 side of the supply-side absorption chamber 44 absorb the liquid vibrations by bending in response to the vibrations of the liquid propagated from the pressure chamber C to the absorption chamber 44. As shown in Figure 3, the pressure chamber C and the supply-side absorption chamber 44 are located at the same position in the Z-axis direction and adjacent to each other in the X-axis direction. The first compliance 51, located at this adjacent position, i.e., closer position, can effectively absorb the vibrations of the liquid propagated from the pressure chamber C.

[0071] Furthermore, the compliance capability of the second compliance 52 is higher than that of the first compliance 51. Therefore, even though the second compliance 52 is located further from the pressure chamber C than the first compliance 51, it can effectively absorb fluid vibrations.

[0072] Furthermore, since vibrations are more easily transmitted closer to the piezoelectric element 20 in the pressure chamber C, which is located in a position where vibrations are easily transmitted, it is preferable to increase the compliance capacity of the first compliance 51 if only vibration absorption of the discharge is considered. However, a high compliance capacity means that the compliance itself vibrates frequently in order to absorb vibrations (this vibration is called "following vibration").

[0073] Therefore, while the first compliance 51 is vibrating to absorb vibrations originating from discharge at a certain timing, discharge may occur at the next timing, and the following vibration may affect that discharge, potentially having an undesirable impact on the discharge characteristics. For this reason, in the first embodiment described above, the compliance capability of the first compliance 51 is deliberately reduced compared to the second compliance 52, and the second compliance 52, which is relatively farther away from the piezoelectric element 20 and less prone to following vibrations, is added, thereby achieving both vibration absorption during discharge and suppression of performance degradation during continuous discharge.

[0074] Figure 7 illustrates the effect of pressure absorption in the liquid discharge head 10 of the first embodiment described above. In Figure 7, the first embodiment is shown with a solid line, and the comparative configuration is shown with a dashed line. Figure 7 considers pressure absorption as an equivalent circuit model and calculates the pressure immediately after the flow path throttling provided at the boundary between the supply-side common flow path 41 and the individual flow paths 42. The comparative configuration is one in which compliance is provided only on the bottom surface of the supply-side common flow path 41. As shown in Figure 5, in the liquid discharge head 10 of the first embodiment described above, the overall pressure values ​​are smaller compared to the comparative configuration, and it can be confirmed that the effect of pressure absorption is further improved.

[0075] Furthermore, in the first embodiment described above, an overlapping portion 11 and a second overlapping portion 14 are provided. For example, if the overlapping portion 11 and the second overlapping portion 14 are not provided, and the upper and lower compliances are positioned so as not to overlap when viewed from the Z-axis direction, the size in the X-axis direction (lateral direction) will increase. In this respect, in the first embodiment described above, since at least a portion of the upper and lower compliances are positioned so as to overlap when viewed from the Z-axis direction, it is possible to suppress an increase in the size in the X-axis direction (lateral direction). In other words, in the first embodiment described above, a liquid discharge head 10 can be made that is superior in terms of both suppressing size increase and vibration absorption.

[0076] Furthermore, the provision of overlapping sections 11 and 14 allows for effective suppression of vibration absorption. For example, if a first compliance 51 is provided in the connection region A1 but a second compliance 52 is not, no deflection occurs on the Z1 side facing the first compliance 51. Therefore, even if the first compliance 51 deflects on the Z2 side and absorbs some pressure, this effect is not obtained on the Z1 side, and there is a risk that vibrations cannot be sufficiently absorbed across the entire connection region A1. As in the first embodiment, by providing compliances on both the Z1 and Z2 sides of the connection region A1, it becomes possible to effectively absorb vibrations.

[0077] In other words, in the first embodiment described above, a liquid discharge head 10 can be made that is excellent in terms of both suppressing size increase and absorbing vibration.

[0078] In the first embodiment described above, the width W4 of the second overlapping portion 14 in the X-axis direction is smaller than the width W3 of the overlapping portion 11 in the X-axis direction. In the overlapping portion 11, the damping effect is stronger than when compliance is only present on one side of the overlapping portion. For this reason, on the supply side, the damping effect can be further enhanced by making the overlapping portion 11 larger than that on the discharge side.

[0079] On the discharge side, where relatively low-pressure liquid flows after being discharged from nozzle N, there is no need to require the same damping effect as on the supply side. Rather, unnecessarily increasing compliance leads to unnecessary vibration of the flow path wall, which unnecessarily obstructs the flow of liquid within the flow path and is undesirable. By making the width W4 in the X-axis direction of the second overlapping section 14 smaller than the width W3 in the X-axis direction of the overlapping section 11, the above problem can be resolved and a suitable configuration can be achieved. Similarly, by making the compliance capacity of the third compliance 53 smaller than the compliance capacity of the first compliance 51, it is possible to suppress an unnecessary increase in size.

[0080] In the first embodiment described above, the first compliance 51 and the third compliance 53 can be created using known methods, such as etching with masking using a photoresist. For example, when forming each component that constitutes the actuator, including the piezoelectric element 20 in the first recess 75, the components that constitute the first compliance 51 and the third compliance 53 can be formed using the same method as that used to form each component that constitutes the actuator. The first compliance 51 and the third compliance 53 can be easily manufactured using the components that constitute the actuator. Furthermore, by manufacturing the components that constitute the first compliance 51 and the third compliance 53 and the components that constitute the actuator using the same manufacturing method, the manufacturing process of the liquid discharge head 10 can be further simplified.

[0081] B. Second Embodiment: Next, a second embodiment of the present disclosure will be described with reference to Figure 8. Components substantially the same as those in the first embodiment are denoted by the same reference numerals, and their descriptions are omitted. The liquid discharge head 10 of the second embodiment differs from the liquid discharge head 10 of the first embodiment in that the first compliance 51 is divided into multiple (two in this embodiment) parts in the Y-axis direction.

[0082] Figure 8 is a schematic plan view showing the pressure chamber C and supply side portion of the liquid discharge head 10 in the second embodiment. As shown in Figure 8, the first compliance 51 is not composed of a single diaphragm 24 that covers the entire surface over the width in the Y-axis direction of the supply side common flow path 41, as in the first embodiment, but is composed of two divided compliances 55 and 56, formed by a diaphragm that is divided into two in the Y-axis direction.

[0083] This configuration provides the same effects as the first embodiment described above. Furthermore, compared to the case where the diaphragm 24 is configured as a single continuous member, it is easier to adhere the diaphragm 24 to the pressure chamber substrate 23, thereby improving adhesion and holding power in this area. Additionally, by reducing the size, the deflection of the diaphragm 24 is reduced, making it less susceptible to damage.

[0084] Furthermore, since the second compliance 52 and the fourth compliance 54 are far from the piezoelectric element 20, they are less susceptible to vibration, and therefore do not require much adhesion or holding force. Rather, as mentioned above, it is preferable for the second compliance 52 and the fourth compliance 54 to be arranged in an undivided state in order to maximize their compliance capacity. In addition, since the second compliance 52 and the fourth compliance 54 are formed from a material that is resistant to breakage, there is not much need to divide them to make them resistant to breakage, and it is preferable to maximize their compliance capacity without dividing them.

[0085] C. Other forms: (C1) In the liquid discharge device 1 of each of the above embodiments, a circulating head is used in which the liquid flowing into the liquid discharge head 10 is circulated, but a non-circulating head in which the liquid is not circulated may also be used. In the case of a non-circulating head, since there is no discharge-side common flow path 43, the third compliance 53 and the fourth compliance 54 are not provided, and the configuration can be implemented with the first compliance 51 and the second compliance 52 provided in the supply-side common flow path 41.

[0086] (C2) In the liquid dispensing device 1 of each of the above embodiments, compliances 51 to 54 are provided on the supply side and the discharge side. However, compliances facing in the Z direction may be provided on only one of the supply side or the discharge side.

[0087] (C3) In the liquid dispensing device 1 of each embodiment described above, the compliance capacity of the fourth compliance 54 is assumed to be greater than the compliance capacity of the third compliance 53, but this relationship is not necessarily required. Also, the compliance capacity of the second compliance 52 may be less than the compliance capacity of the fourth compliance 54. Also, the compliance capacity of the first compliance 51 may be greater than the compliance capacity of the second compliance 52.

[0088] (C4) In the liquid dispensing device 1 of each of the above embodiments, the first compliance 51 and the third compliance 53 are said to have a diaphragm 24, a first electrode, a piezoelectric element, and a second electrode, but they may be composed of only the diaphragm 24, or one of the first and second electrodes may be omitted. Also, they may be composed of a resin film, similar to the second compliance 52 and the fourth compliance 54.

[0089] (C5) In the liquid dispensing device 1 of the first embodiment described above, the width in the Y-axis direction of the first compliance 51 and the width in the Y-axis direction of the second compliance 52 are assumed to be approximately the same. However, the width in the Y-axis direction of the second compliance 52 may be longer than the width in the Y-axis direction of the first compliance 51.

[0090] (C6) In the liquid dispensing device 1 of each of the above embodiments, the first non-overlapping portion 12 and the second non-overlapping portion 13 may be omitted. That is, when viewed in the Z-axis direction, the first compliance 51 and the second compliance 52 may completely overlap. Similarly, when viewed in the Z-axis direction, the second compliance 52 and the fourth compliance 54 may completely overlap.

[0091] (C7) In the liquid dispensing device 1 of each of the above embodiments, the width W2 in the X-axis direction of the second overlapping portion 14 is smaller than the width W1 in the X-axis direction of the overlapping portion 11. However, the width W2 in the X-axis direction of the second overlapping portion 14 may be greater than or equal to the width W1 in the X-axis direction of the overlapping portion 11.

[0092] This disclosure is not limited to the embodiments described above, and can be implemented in various configurations without departing from its spirit. For example, the technical features in the embodiments corresponding to the technical features in each form described in the summary of the invention can be replaced or combined as appropriate in order to solve some or all of the above-described problems, or to achieve some or all of the above-described effects. Furthermore, if a technical feature is not described as essential in this specification, it can be deleted as appropriate.

[0093] (1) According to one embodiment of the present disclosure, a liquid discharge head is provided. The liquid discharge head has a nozzle and a pressure chamber to which pressure is applied for discharging liquid from the nozzle, and comprises a plurality of individual channels arranged in a first direction, a common channel that communicates in common with the plurality of individual channels, and a piezoelectric element provided on the first side which is one side of the pressure chamber in a second direction intersecting the first direction, which applies pressure to the liquid in the pressure chamber to discharge the liquid from the nozzle, wherein a first compliance is provided at least in the connection region of the common channel that connects to the plurality of individual channels and faces the first side, and a second compliance different from the first compliance is provided at least in the connection region of the common channel that faces the second side which is the other side in the second direction and opposite to the first side, and when viewed from the second direction, the first compliance and the second compliance have an overlapping portion which partially overlaps. In this configuration, in the connection region connecting to multiple individual channels within the common channel, the first compliance and the second compliance are arranged such that a portion of them overlaps when viewed from a second direction. This allows for sufficient vibration absorption and suppresses the need to increase the size of the liquid discharge head.

[0094] (2) In the liquid discharge head of the above embodiment, the compliance capacity of the second compliance may be greater than the compliance capacity of the first compliance. In this embodiment, since the compliance capacity of the second compliance is greater than the compliance capacity of the first compliance, the vibration of the liquid can be effectively absorbed in the second compliance.

[0095] (3) In the liquid discharge head of the above configuration, the Young's modulus of the second compliance may be smaller than the Young's modulus of the first compliance. According to this configuration, the compliance capacity of the second compliance can be made greater than the compliance capacity of the first compliance.

[0096] (4) In the liquid discharge head of the above embodiment, the thickness of the second compliance in the second direction may be thinner than the thickness of the first compliance in the second direction. According to this embodiment, the compliance capacity of the second compliance can be made greater than the compliance capacity of the first compliance.

[0097] (5) In the liquid discharge head of the above embodiment, the width of the second compliance in the third direction intersecting the first and second directions may be greater than the width of the first compliance in the third direction. According to this embodiment, the compliance capacity of the second compliance can be made greater than the compliance capacity of the first compliance.

[0098] (6) In the liquid discharge head of the above embodiment, the width of the second compliance in the first direction may be greater than the width of the first compliance in the first direction. According to this embodiment, the compliance capacity of the second compliance can be greater than the compliance capacity of the first compliance.

[0099] (7) In the liquid dispensing head of the above embodiment, the first compliance may be divided into a plurality of parts in the first direction. This embodiment makes it possible to improve the adhesion of the first compliance and the holding force in the liquid dispensing head.

[0100] (8) In the liquid discharge head of the above configuration, the second compliance does not have to be divided into multiple parts in the first direction. This configuration makes it easy to construct the components of the second compliance and increases the compliance capacity.

[0101] (9) In the liquid discharge head of the above configuration, the distance between the pressure chamber and the first compliance along the second direction may be smaller than the distance between the pressure chamber and the second compliance along the second direction. According to this configuration, the first compliance can be configured to be at a shorter distance from the pressure chamber than the second compliance.

[0102] (10) In the liquid discharge head of the above configuration, when viewed from the second direction, the first compliance further has a first non-overlapping portion that does not overlap with the second compliance, and when viewed from the second direction, the second compliance further has a second non-overlapping portion that does not overlap with the first compliance.

[0103] (11) In the liquid discharge head of the above configuration, the area of ​​the first non-overlapping portion when viewed from the second direction may be smaller than the area of ​​the second non-overlapping portion when viewed from the second direction.

[0104] (12) In the liquid discharge head of the above configuration, the common flow path includes a supply-side common flow path that supplies liquid to the plurality of individual flow paths, and a discharge-side common flow path that discharges liquid from the plurality of individual flow paths, wherein the first compliance and the second compliance are provided in the supply-side common flow path, and a third compliance is provided at least at a position facing the first side of a second connection region of the discharge-side common flow path that connects to the plurality of individual flow paths, and a fourth compliance different from the third compliance is provided at least at a position facing the second side of the second connection region of the discharge-side common flow path, and when viewed from the second direction, the third compliance and the fourth compliance may have a second overlapping portion in which they partially overlap.

[0105] (13) In the liquid discharge head of the above configuration, the compliance capacity of the third compliance may be smaller than the compliance capacity of the first compliance. In this configuration, the compliance capacity of the third compliance on the discharge side, which is farther from the pressure chamber and requires less compliance capacity than the supply side, is smaller than the compliance capacity of the first compliance on the supply side, thus suppressing the size increase associated with the installation of compliance on the discharge side.

[0106] (14) In the liquid discharge head of the above configuration, the compliance capacity of the fourth compliance may be smaller than the compliance capacity of the second compliance. In this configuration, the compliance capacity of the fourth compliance on the discharge side, which is farther from the pressure chamber and requires less compliance capacity than the supply side, is smaller than the compliance capacity of the second compliance on the supply side, thus suppressing the size increase associated with the installation of compliance on the discharge side.

[0107] (15) In the liquid discharge head of the above configuration, the width of the second overlapping portion in the third direction intersecting the first and second directions may be smaller than the width of the overlapping portion in the third direction. In this configuration, since the width of the second overlapping portion on the discharge side in the third direction is smaller than the width of the overlapping portion on the supply side in the third direction, the size increase associated with the installation of compliance on the discharge side can be suppressed.

[0108] (16) According to another embodiment of the present disclosure, a liquid dispensing device is provided. This liquid dispensing device comprises the first liquid dispensing head and a control unit that controls the dispensing operation for dispensing liquid from the liquid dispensing head. According to this embodiment, sufficient vibration absorption is possible and an increase in the size of the liquid dispensing head can be suppressed.

[0109] Furthermore, this disclosure is not limited to inkjet systems, but can also be applied to any liquid ejection device that ejects liquids other than ink. For example, it can be applied to various liquid ejection devices such as the following: (1) Image recording devices such as facsimile machines. (2) A colorant dispensing device used in the manufacture of color filters for image display devices such as liquid crystal displays. (3) An electrode material dispensing device used for forming electrodes in organic EL (Electro Luminescence) displays and field emission displays (FEDs), etc. (4) A liquid dispensing device that dispenses liquid containing bioorganic material used in the manufacture of biochips. (5) Sample dispensing device as a precision pipette. (6) Lubricating oil discharge device. (7) Resin liquid dispensing device. (8) A liquid dispensing device that dispenses lubricating oil precisely onto precision machinery such as watches and cameras. (9) A liquid dispensing device for dispensing a transparent resin liquid, such as an ultraviolet curing resin liquid, onto a substrate in order to form a minute hemispherical lens (optical lens) used in optical communication elements, etc. (10) A liquid dispensing device that dispenses an acidic or alkaline etching solution for etching substrates or the like. (11) A liquid dispensing device comprising a liquid consumption head for dispensing any other minute amount of liquid droplets.

[0110] "Droplets" refer to the state of liquid discharged from a liquid dispensing device, and include granular, teardrop-shaped, and thread-like droplets. Furthermore, "liquid" here refers to any material that can be consumed by a liquid dispensing device. For example, "liquid" can be any material in its liquid phase, including highly viscous or low viscous liquid materials, as well as sols, gel water, other inorganic solvents, organic solvents, solutions, liquid resins, and liquid metals (metal melts). In addition to liquids as a state of matter, "liquid" also includes functional material particles, such as pigments and metal particles, dissolved, dispersed, or mixed in a solvent. Typical examples of combinations of the first and second liquids include the combination of ink and reaction solution described in the above embodiment, as well as the following. (1) Main component and hardener of the adhesive (2) Base coats and diluents for paints, and clear coats and diluents (3) Main solvent and diluent solvent containing cells for cell ink (4) Metallic leaf pigment dispersion and diluent for metallic inks that exhibit a metallic luster. (5) Gasoline, diesel fuel and biofuels for vehicles (6) Main active ingredients and protective components of drugs (7) Phosphors and encapsulants for light-emitting diodes (LEDs)

[0111] Furthermore, this disclosure is not limited to the form of a liquid dispensing head or liquid dispensing device as described above, but can be implemented in various forms such as a liquid dispensing system or a combined machine equipped with a liquid dispensing device. [Explanation of symbols]

[0112] 1...Liquid dispensing device, 2...Liquid container, 3...Carriage, 4...Carriage transport mechanism, 4a...Transport belt, 5...Media transport mechanism, 5a...Transport roller, 6...Linear encoder, 7...Drive circuit, 8...Circulation mechanism, 10...Liquid dispensing head, 11...Overlapped section, 12...First non-overlapped section, 13...Second non-overlapped section, 14...Second overlapped section, 15,16,20...Piezoelectric element, 21...Nozzle substrate, 22...Communicating plate, 23...Pressure chamber substrate, 24...Vibrating plate, 25...Sealing plate, 26...Case, 30...Control unit, 31...CPU, 32...Drive signal generation circuit, 35...Storage unit, 36...ROM, 37...RAM, 41...Common flow path on the supply side, 42...Individual flow paths 43...Common discharge channel, 44...Supply side absorption chamber, 45...Discharge side absorption chamber, 51...First compliance, 52...Second compliance, 53...Third compliance, 54...Fourth compliance, 55,56...Divided compliance, 61,62,63...Supply side liquid chamber section, 65...First connecting channel, 66...Second connecting channel, 67...Third connecting channel, 71,72,73...Discharge side liquid chamber section, 75...First recess, 76...Second recess, 77...Third recess, 78...Through hole, 82...Recovery channel, 83...Pump, A1...Connection area, A2...Second connection area, C...Pressure chamber, D1...Distance, D2...Distance, N...Nozzle, PA...Printing paper

Claims

1. It has a nozzle and a pressure chamber into which pressure is applied for discharging liquid from the nozzle, and a plurality of individual flow paths arranged in a first direction, A common channel that communicates with the aforementioned multiple individual channels, A piezoelectric element is provided on the first side, which is one side of the second direction intersecting the first direction of the pressure chamber, and applies pressure to the liquid in the pressure chamber to discharge the liquid from the nozzle, A liquid dispensing head having, At least at the connection area of ​​the common flow path that connects to the plurality of individual flow paths, a first compliance is provided at the position facing the first side. At least in the connection region of the common flow path, a second compliance different from the first compliance is provided at a position on the other side of the second direction and facing the second side opposite to the first side. When viewed from the second direction, the first compliance and the second compliance have an overlapping portion where they partially overlap. A liquid dispensing head characterized in that the compliance capability of the second compliance is greater than the compliance capability of the first compliance.

2. The liquid dispensing head according to claim 1, characterized in that the Young's modulus of the second compliance is smaller than the Young's modulus of the first compliance.

3. The liquid dispensing head according to claim 1, characterized in that the thickness of the second compliance in the second direction is thinner than the thickness of the first compliance in the second direction.

4. The liquid dispensing head according to claim 1, characterized in that the width of the second compliance in the third direction intersecting the first and second directions is greater than the width of the first compliance in the third direction.

5. The liquid dispensing head according to claim 1, characterized in that the width of the second compliance in the first direction is greater than the width of the first compliance in the first direction.

6. A plurality of individual flow paths arranged in a first direction, each having a nozzle and a pressure chamber to which pressure is applied for discharging liquid from the nozzle, A common supply channel that communicates with the plurality of individual channels and supplies liquid to the plurality of individual channels, A piezoelectric element is provided on the first side, which is one side of the second direction intersecting the first direction of the pressure chamber, and applies pressure to the liquid in the pressure chamber to discharge the liquid from the nozzle, A liquid dispensing head having, At least at the position facing the first side of the connection region of the supply-side common flow path that connects to the plurality of individual flow paths, a first compliance is provided. At least in the connection region of the supply-side common flow path, a second compliance different from the first compliance is provided at a position on the other side of the second direction and facing the second side opposite to the first side. When viewed from the second direction, the first compliance and the second compliance have an overlapping portion where they partially overlap. A liquid discharge head characterized in that the first compliance and the second compliance are opposite each other via the connection region of the supply-side common flow path.

7. A plurality of individual flow paths arranged in a first direction, each having a nozzle and a pressure chamber to which pressure is applied for discharging liquid from the nozzle, A common discharge channel that communicates with the aforementioned multiple individual channels and discharges liquid from the aforementioned multiple individual channels, A piezoelectric element is provided on the first side, which is one side of the second direction intersecting the first direction of the pressure chamber, and applies pressure to the liquid in the pressure chamber to discharge the liquid from the nozzle, A liquid dispensing head having, At least at the connection area of ​​the discharge-side common flow path that connects to the plurality of individual flow paths, a first compliance is provided at a position facing the first side. At least in the connection region of the common discharge flow path, a second compliance different from the first compliance is provided at a position on the other side of the second direction and facing the second side opposite to the first side. When viewed from the second direction, the first compliance and the second compliance have an overlapping portion where they partially overlap. A liquid discharge head characterized in that the first compliance and the second compliance are opposite each other via the connection region of the common discharge channel.

8. The liquid dispensing head according to claim 6, characterized in that the first compliance is divided into a plurality of parts in the first direction.

9. A plurality of individual flow paths arranged in a first direction, each having a nozzle and a pressure chamber to which pressure is applied for discharging liquid from the nozzle, A common channel that communicates with the aforementioned multiple individual channels, A piezoelectric element is provided on the first side, which is one side of the second direction intersecting the first direction of the pressure chamber, and applies pressure to the liquid in the pressure chamber to discharge the liquid from the nozzle, A liquid dispensing head having, At least at the connection area of ​​the common flow path that connects to the plurality of individual flow paths, a first compliance is provided at the position facing the first side. At least in the connection region of the common flow path, a second compliance different from the first compliance is provided at a position on the other side of the second direction and facing the second side opposite to the first side. When viewed from the second direction, the first compliance and the second compliance have an overlapping portion where they partially overlap. The liquid dispensing head is characterized in that the first compliance is divided into a plurality of parts in the first direction.

10. The liquid dispensing head according to claim 9, characterized in that the second compliance is not divided into multiple parts in the first direction.

11. The liquid discharge head according to claim 6, characterized in that the distance between the pressure chamber and the first compliance along the second direction is shorter than the distance between the pressure chamber and the second compliance along the second direction.

12. A plurality of individual flow paths arranged in a first direction, each having a nozzle and a pressure chamber to which pressure is applied for discharging liquid from the nozzle, A common channel that communicates with the aforementioned multiple individual channels, A piezoelectric element is provided on the first side, which is one side of the second direction intersecting the first direction of the pressure chamber, and applies pressure to the liquid in the pressure chamber to discharge the liquid from the nozzle, A liquid dispensing head having, At least at the connection area of ​​the common flow path that connects to the plurality of individual flow paths, a first compliance is provided at the position facing the first side. At least in the connection region of the common flow path, a second compliance different from the first compliance is provided at a position on the other side of the second direction and facing the second side opposite to the first side. When viewed from the second direction, the first compliance and the second compliance have an overlapping portion where they partially overlap. A liquid discharge head characterized in that the distance between the pressure chamber and the first compliance along the second direction is shorter than the distance between the pressure chamber and the second compliance along the second direction.

13. When viewed from the second direction, the first compliance further has a first non-overlapping portion that does not overlap with the second compliance. The liquid dispensing head according to claim 6, characterized in that, when viewed from the second direction, the second compliance further has a second non-overlapping portion that does not overlap with the first compliance.

14. The liquid discharge head according to claim 13, characterized in that the area of ​​the first non-overlapping portion when viewed from the second direction is smaller than the area of ​​the second non-overlapping portion when viewed from the second direction.

15. A plurality of individual flow paths arranged in a first direction, each having a nozzle and a pressure chamber to which pressure is applied for discharging liquid from the nozzle, A common channel that communicates with the aforementioned multiple individual channels, A piezoelectric element is provided on the first side, which is one side of the second direction intersecting the first direction of the pressure chamber, and applies pressure to the liquid in the pressure chamber to discharge the liquid from the nozzle, A liquid dispensing head having, At least at the connection area of ​​the common flow path that connects to the plurality of individual flow paths, a first compliance is provided at the position facing the first side. At least in the connection region of the common flow path, a second compliance different from the first compliance is provided at a position on the other side of the second direction and facing the second side opposite to the first side. When viewed from the second direction, the first compliance and the second compliance have an overlapping portion where they partially overlap. The aforementioned common channel is A common supply channel that supplies liquid to the aforementioned multiple individual channels, Includes a common discharge channel for discharging liquid from the plurality of individual channels, The first compliance and the second compliance are provided in the supply-side common flow path, A third compliance is provided at least at a position facing the first side of the second connection region that connects to the plurality of individual flow paths of the discharge side common flow path, At least at the position facing the second side of the second connection region of the discharge-side common flow path, a fourth compliance different from the third compliance is provided, A liquid dispensing head characterized in that, when viewed from the second direction, the third compliance and the fourth compliance have a second overlapping portion where they partially overlap.

16. The liquid dispensing head according to claim 15, characterized in that the compliance capability of the third compliance is smaller than the compliance capability of the first compliance.

17. The liquid dispensing head according to claim 15, characterized in that the compliance capacity of the fourth compliance is smaller than the compliance capacity of the second compliance.

18. The liquid dispensing head according to claim 15, characterized in that the width of the second overlapping portion in the third direction intersecting the first and second directions is smaller than the width of the overlapping portion in the third direction.

19. A liquid dispensing head according to any one of claims 1 to 18, A control unit that controls the dispensing operation for dispensing liquid from the liquid dispensing head, A liquid dispensing device characterized by having the following features.

Images