Thermal shield positioning jig, thermal shield positioning method, and method for manufacturing silicon single crystal
Patent Information
- Authority / Receiving Office
- JP · JP
- Patent Type
- Patents
- Current Assignee / Owner
- SUMCO CORP
- Filing Date
- 2022-10-27
- Publication Date
- 2026-08-04
Smart Images
Figure 0007899684000001 
Figure 0007899684000002 
Figure 0007899684000003
Abstract
Description
Technical Field
[0001] The present invention relates to a heat shield positioning jig, a heat shield positioning method, and a method for manufacturing a silicon single crystal.
Background Art
[0002] Conventionally, a silicon single crystal manufacturing apparatus for manufacturing a silicon single crystal has been known (see, for example, Patent Document 1). In such a silicon single crystal manufacturing apparatus, a heat shield that surrounds the silicon single crystal being pulled up from the silicon melt in the crucible is disposed. The heat shield is supported, for example, at its upper end by a heat insulating cylinder that surrounds the crucible and the heat shield.
Prior Art Documents
Patent Documents
[0003]
Patent Document 1
Summary of the Invention
Problems to be Solved by the Invention
[0004] A silicon single crystal manufacturing apparatus is configured such that the central axis of the silicon single crystal pulled up by a wire or a shaft coincides with the central axis of the chamber. And it is preferable that the heat shield is arranged so that its central axis coincides with the central axis of the silicon single crystal. If the central axis of the heat shield does not coincide with the central axis of the silicon single crystal, there is a risk that the silicon single crystal may sway due to the deviation of the flow rate of the inert gas flowing between the silicon single crystal and the heat shield, or that the thermal environment around the silicon single crystal may deviate.
[0005] Conventionally, the operator has determined the arrangement position of the heat shield visually or using a measuring instrument, but with these methods, it is not possible to easily position the heat shield, and there is a risk of variation in the arrangement position by the operator.
[0006] The present invention aims to provide a heat shield positioning jig, a heat shield positioning method, and a silicon single crystal manufacturing method that enable easy and appropriate horizontal positioning of the heat shield. [Means for solving the problem]
[0007] The heat shield positioning jig of the present invention is a heat shield positioning jig for positioning a heat shield surrounding a silicon single crystal being pulled up in a chamber, and comprises a jig body configured to be detachably attached to the chamber, the jig body being provided with a jig positioning section for horizontal positioning of the jig body with respect to the chamber, and a heat shield positioning section for horizontal positioning of the heat shield with respect to the jig body.
[0008] In the heat shield positioning jig of the present invention, the vertical side portion of the jig body is provided with a plurality of heat shield positioning sections for horizontally positioning a plurality of heat shields of different horizontal sizes, and it is preferable that the jig body is mounted in the chamber in a position where the heat shield positioning section corresponding to the heat shield to be positioned faces the upper side of the heat shield.
[0009] In the heat shield positioning jig of the present invention, it is preferable that at least one heat shield positioning portion is provided on one vertical side of the jig body, and the remaining heat shield positioning portions are provided on the other vertical side of the jig body.
[0010] In the heat shield positioning jig of the present invention, it is preferable that the jig body comprises a base and a plurality of arms extending horizontally from the base in different directions, and that the plurality of arms are provided with a positioning part for the jig and a positioning part for the heat shield.
[0011] In the heat shield positioning jig of the present invention, it is preferable that at least one of the base and the plurality of arms is provided with a gripping portion for gripping the jig body.
[0012] In the heat shield positioning jig of the present invention, it is preferable that the gripping portion is composed of a through hole that penetrates the portion on which the gripping portion is provided.
[0013] The present invention provides a method for positioning a heat shield that surrounds a silicon single crystal being pulled up in a chamber, using the heat shield positioning jig described above, wherein the heat shield is temporarily placed in the chamber, and the horizontal positioning of the jig body relative to the chamber by the jig positioning unit and the horizontal positioning of the heat shield relative to the jig body by the heat shield positioning unit are performed simultaneously, or one of the positions is performed first and then the other, thereby separating the heat shield positioning jig from the chamber and the heat shield.
[0014] The present invention provides a method for manufacturing a silicon single crystal, in which a heat shield surrounding a silicon single crystal being pulled up in a chamber is positioned using the heat shield positioning method described above, and the silicon single crystal is pulled up in the chamber. [Brief explanation of the drawing]
[0015] [Figure 1] This is a schematic diagram showing the configuration of a silicon single crystal manufacturing apparatus in one embodiment of the present invention. [Figure 2] This is a plan view showing a heat shield positioning jig, where (A) shows the heat shield positioning jig of one embodiment, and (B) shows a modified heat shield positioning jig. [Figure 3] This is a side view showing the heat shield positioning jig of the above embodiment, where (A) shows the entire heat shield positioning jig and (B) shows a part of the heat shield positioning jig. [Figure 4] This is a schematic diagram showing the horizontal positioning of the heat shield with respect to the chamber in the above embodiment.
Mode for Carrying Out the Invention
[0016] [Embodiment] Hereinafter, an embodiment of the present invention will be described.
[0017] <Configuration of Silicon Single Crystal Manufacturing Apparatus> First, the configuration of the silicon single crystal manufacturing apparatus will be described. FIG. 1 is a schematic diagram showing the configuration of the silicon single crystal manufacturing apparatus.
[0018] The silicon single crystal manufacturing apparatus 1 shown in FIG. 1 manufactures a silicon single crystal SM using the Czochralski method. The silicon single crystal manufacturing apparatus 1 manufactures a silicon single crystal SM having a diameter of the straight body portion of, for example, 200 mm or more and 450 mm or less. The silicon single crystal manufacturing apparatus 1 includes a chamber 11, a crucible 12, a heater 13, a heat insulating cylinder 14, a heat shield 15, a pulling unit 16, and a crucible driving unit 17.
[0019] The chamber 11 includes a main chamber 111, a top chamber 112, and a pull chamber 113.
[0020] The main chamber 111 is formed in a bottomed cylindrical shape. The main chamber 111 houses the crucible 12, the heater 13, the heat insulating cylinder 14, and the heat shield 15.
[0021] The top chamber 112 is formed in a substantially frustum-shaped cylindrical shape with the diameter of the upper end smaller than that of the lower end. The lower end of the top chamber 112 is airtightly connected to the upper end of the main chamber 111 and covers the upper part of the main chamber 111.
[0022] The pull chamber 113 is formed in a cylindrical shape. The lower end of the pull chamber 113 is airtightly connected to the upper end of the top chamber 112. The pull chamber 113 temporarily houses the pulled silicon single crystal SM.
[0023] In this way, the main chamber 111, the top chamber 112, and the pull chamber 113 are each airtightly connected, thereby forming a sealed space within the chamber 11.
[0024] The upper part of the pull chamber 113 is provided with a gas inlet 113A for introducing an inert gas such as argon (Ar) gas into the chamber 11. The lower part of the main chamber 111 is provided with a gas outlet 111A for discharging the gas from the chamber 11 by driving a vacuum pump (not shown).
[0025] Crucible 12 is located inside the main chamber 111 and stores dopant-added melt MD, which is silicon melt to which a dopant has been added. Depending on the resistivity of the silicon single crystal SM, it may not be necessary to add a dopant to the silicon melt.
[0026] The heater 13 is formed in a cylindrical shape. The heater 13 is positioned outside the crucible 12 at predetermined intervals and melts the silicon raw material inside the crucible 12.
[0027] The heat-insulating tube 14 is formed in a cylindrical shape. The heat-insulating tube 14 is arranged on the outside of the heater 13 at predetermined intervals.
[0028] The heat shield 15 comprises a frustoconical heat shield body 151 whose upper diameter is larger than its lower diameter, and a supported portion 152 that projects outward in a flange-like manner from the entire circumference of the upper end of the heat shield body 151. The heat shield 15 is supported with the supported portion 152 resting on the upper end of the heat-insulating cylinder 14 so as to surround the silicon single crystal SM being pulled up from the dopant-added molten metal MD. The heat shield 15 blocks radiant heat from the heater 13 to the silicon single crystal SM.
[0029] The lifting unit 16 comprises a cable 161 to which a seed crystal SC is attached at one end, and a lifting drive unit 162 that raises, lowers, and rotates the cable 161.
[0030] The crucible drive unit 17 includes a support shaft 171 that supports the crucible 12 from below, and rotates and raises the crucible 12 at a predetermined speed.
[0031] The silicon single crystal manufacturing apparatus 1 having the above configuration is configured such that the cable 161, the central axis of the silicon single crystal SM pulled up by the cable 161, and the central axis of the chamber 11 coincide.
[0032] <Configuration of the heat shield positioning jig> Next, a heat shield positioning jig for horizontally positioning the heat shield 15 relative to the chamber 11 will be described. Figure 2 is a plan view showing the heat shield positioning jig, where (A) shows the heat shield positioning jig of this embodiment and (B) shows a modified heat shield positioning jig. Figure 3 is a side view showing the heat shield positioning jig of this embodiment, where (A) shows the entire heat shield positioning jig and (B) shows a part of the heat shield positioning jig.
[0033] The thermal shield positioning jig 2 shown in Figure 2(A) is used to position the thermal shield 15 horizontally relative to the main chamber 111 (chamber 11). The thermal shield positioning jig 2 comprises a jig body 21.
[0034] The jig body 21 is configured to be detachably attached to the main chamber 111. The jig body 21 is preferably made of a material that ensures rigidity and prevents metal contamination in the main chamber 111. Furthermore, although heat resistance is not required for the jig body 21 as it is used in a room temperature environment, it is preferable that it be lightweight as it is transported by the operator. Examples of materials with these functions include Teflon® or graphite. Furthermore, to avoid metal contamination in the main chamber 111, it is sufficient to avoid using metal in the parts of the jig body 21 that come into contact with the heat shield 15. For this reason, parts of the jig body 21 that do not come into contact with the heat shield 15 may be made of metal.
[0035] The jig body 21 comprises a base 211 and four arms 212. In a plan view, the four arms 212 are arranged to extend radially from the base 211 by the same length. In other words, in a plan view, the four arms 212 are arranged to extend from the base 211 by the same length in different horizontal directions, and the angles between adjacent arms 212 are equal (90°). Furthermore, as shown in Figure 2(B), the jig body 21 may be configured to have three arms 212. In this case, it is preferable that the three arms 212 are arranged so that, in a plan view, they extend from the base 211 by the same length in different horizontal directions, and the angles between adjacent arms 212 are equal (120°). The jig body 21 may also be configured to have two or five or more arms 212. In addition, the angles between adjacent arms 212 do not have to be equal, but from the viewpoint of improving weight balance, it is preferable to make the angles between adjacent arms 212 equal.
[0036] As shown in Figure 3(A), the base portion 211 is formed, for example, in the shape of a disc, and four arm portions 212 are fixed to the outer circumferential surface of the base portion 211.
[0037] The jig body 21 is provided with a jig positioning section 22. The jig positioning section 22 has the function of positioning the jig body 21 horizontally relative to the main chamber 111. The jig positioning section 22 is composed of the tips of each arm 212 in the extending direction. In other words, the jig body 21 is provided with four jig positioning sections 22. The tip of each arm 212 constituting the jig positioning section 22, in the direction of extension, is formed in a substantially arc shape when viewed from the side. The jig positioning section 22 may be formed in a straight or uneven shape when viewed from the side. As shown in Figure 2(A), the four arms 212 are formed such that the diameter R of the virtual circumscribed circle P that circumscribes the four jig positioning sections 22 is less than or equal to the inner diameter of the main chamber 111. For example, the four arms 212 are formed such that the difference between the diameter R of the virtual circumscribed circle P and the inner diameter of the main chamber 111 is between 0 mm and 1 mm. The outer diameter of the heat shield positioning jig 2 (the diameter R of the virtual circumscribed circle P shown in Figure 2(A)) can be, for example, in the range of 1 m to 2.5 m.
[0038] As will be described in more detail later, the horizontal positioning of the jig body 21 relative to the main chamber 111 is achieved when the jig body 21 is inserted into the main chamber 111 with the extension directions of the four arm portions 212 parallel to the horizontal direction and with each jig positioning portion 22 in contact with or facing the inner circumferential surface of the main chamber 111.
[0039] As shown in Figures 3(A) and 3(B), the vertical side of the jig body 21 is provided with a positioning section 23 for the first heat shield, a positioning section 24 for the second heat shield, and a positioning section 25 for the third heat shield.
[0040] The positioning sections 23, 24, and 25 for the first, second, and third heat shields have the function of positioning the heat shield 15 horizontally relative to the jig body 21. The positioning unit 23 for the first heat shield positions the heat shield 15 (hereinafter sometimes referred to as "first heat shield 15") whose outer diameter of the supported portion 152 is of a first length. The positioning unit 24 for the second heat shield positions the heat shield 15 (hereinafter sometimes referred to as "second heat shield 15") which has a second length, the outer diameter of the supported portion 152 being shorter than the first length. The third heat shield positioning section 25 positions a heat shield 15 (hereinafter sometimes referred to as "third heat shield 15") having a third length in which the outer diameter of the supported portion 152 is shorter than the first and second lengths. In other words, the jig body 21 is provided with multiple heat shield positioning sections (first, second, and third heat shield positioning sections 23, 24, and 25) for horizontally positioning multiple types of heat shields 15 that have different horizontal dimensions from each other. In the following, the supported portion 152 of the first heat shield 15 may be referred to as the first supported portion 152, the supported portion 152 of the second heat shield 15 as the second supported portion 152, and the supported portion 152 of the third heat shield 15 as the third supported portion 152.
[0041] The first heat shield positioning section 23 is provided at one vertical side of each arm 212 (the upper end in Figures 3(A) and (B)). The second heat shield positioning section 24 and the third heat shield positioning section 25 are provided at the other vertical side of each arm 212 (the lower end in Figures 3(A) and (B)). The positioning parts 23, 24, and 25 for the first, second, and third heat shields respectively abut against the upper edges of the first, second, and third supported parts 152, 152, and 152, thereby positioning the first, second, and third heat shields 15, 15, and 15 in the horizontal direction.
[0042] Each positioning section 23 for the first heat shield comprises a first horizontal surface 231 and a first vertical surface 232. Preferably, each positioning section 23 for the first heat shield further comprises a first inclined surface 233. The first horizontal surface 231 is formed so that its surface direction is parallel to the horizontal direction and is configured to be in contact with the upper surface of the first supported portion 152. The first vertical plane 232 is formed to extend vertically from the tip end of the arm portion 212 in the first horizontal plane 231 and is configured to be able to abut against or face the side surface of the first supported portion 152. The first vertical plane 232 may be formed in the shape of an arcuate surface corresponding to the side surface of the first supported portion 152, or it may be formed in the shape of a plane. Each first vertical plane 232 is formed such that the diameter R1 of the first virtual inscribed circle in each first vertical plane 232 is greater than or equal to the outer diameter of the first supported portion 152. For example, each first vertical plane 232 is formed such that the difference between the diameter R1 of the first virtual inscribed circle and the outer diameter of the first supported portion 152 is 0 mm or more and 1 mm or less. The first inclined surface 233 is formed to be inclined vertically from the end of the first vertical plane 232 opposite to the first horizontal plane 231. The first inclined surface 233 is inclined away from the base 211 as it moves away from the first vertical plane 232.
[0043] Each second heat shield positioning section 24 includes a second horizontal surface 241 and a second vertical surface 242. Each third heat shield positioning section 25 includes a third horizontal surface 251 and a third vertical surface 252. Preferably, each second heat shield positioning section 24 further includes a second inclined surface 243. Preferably, each third heat shield positioning section 25 further includes a third inclined surface 253. The second and third horizontal surfaces 241 and 251 are formed so that their surface direction is parallel to the horizontal direction and are configured to be in contact with the upper surfaces of the second and third supported portions 152 and 152. The second and third vertical surfaces 242 and 252 are formed to extend vertically from the tip ends of the arm portions 212 in the second and third horizontal surfaces 241 and 251, and are configured to be able to abut against or face the sides of the second and third supported portions 152 and 152. The second and third vertical surfaces 242 and 252 may be formed in the shape of an arcuate surface corresponding to the sides of the second and third supported portions 152 and 152, or they may be formed in a planar shape. Each of the second and third vertical surfaces 242 and 252 is formed such that the diameters R2 and R3 of the second and third virtual inscribed circles inscribed in each of the second and third vertical surfaces 242 and 252 are greater than or equal to the outer diameter of the second and third supported portions 152 and 152. For example, each of the second and third vertical surfaces 242 and 252 is formed such that the difference between the diameters R2 and R3 of the second and third virtual inscribed circles and the outer diameters of the second and third supported parts 152 and 152 is between 0 mm and 1 mm. The second and third inclined surfaces 243 and 253 are formed to be inclined with respect to the vertical from the ends in the extension direction opposite to the second and third horizontal planes 241 and 251 in the second and third vertical planes 242 and 252. The second and third inclined surfaces 243 and 253 are inclined to be further away from the base 211 as they move away from the second and third vertical planes 242 and 252.
[0044] The positioning sections 23, 24, and 25 for the first, second, and third heat shields may be provided at equidistant distances (concentric with the virtual circumscribed circle P) from the center of the heat shield positioning jig 2. With this configuration, the heat shield 15 can be installed with its central axis aligned with the central axis of the chamber 11.
[0045] As will be explained in more detail later, for example, the jig body 21 is inserted into the main chamber 111 with the positioning section 23 for the first heat shield positioned downwards, the first horizontal surface 231 contacts the upper surface of the first supported portion 152 placed on the heat-insulating cylinder 14, and the first vertical surface 232 contacts or faces the side surface of the first supported portion 152, thereby positioning the first heat shield 15 horizontally with respect to the main chamber 111.
[0046] Furthermore, handles 213 are fixed to the upper and lower surfaces of the base 211, respectively. The handles 213 are used when an operator grips and transports the jig body 21. In other words, the handles 213 function as gripping parts of the present invention.
[0047] Furthermore, a through-hole 212A is formed at the tip end of each arm 212 in the extending direction, passing horizontally through each arm 212. The through-hole 212A is sized to allow a worker to insert their hand and is used when the worker grips and transports the jig body 21. The through-hole 212A functions as a gripping part of the present invention. In addition, the through-hole 212A contributes to reducing the weight of the jig body 21.
[0048] <Method for positioning the heat shield> Next, a method for positioning the heat shield, which involves horizontally positioning the heat shield 15 relative to the chamber 11 using the heat shield positioning jig 2, will be described. The following description will explain how to position the first heat shield 15 using the first heat shield positioning section 23 of the heat shield positioning jig 2. However, the method for positioning the second heat shield 15 using the second heat shield positioning section 24, or the method for positioning the third heat shield 15 using the third heat shield positioning section 25, will be carried out in the same manner as described below. Furthermore, the tasks performed by the worker in the following description may be performed by at least one worker or by the device. Figure 4 is a schematic diagram showing the horizontal positioning of the heat shield relative to the chamber.
[0049] First, as shown in Figure 4, the worker temporarily places the first supported portion 152 of the first heat shield 15 on the upper end of the heat insulation cylinder 14. Next, the worker grasps the handle 213 located on the side opposite to the side where the first heat shield positioning section 23 is provided, or puts their hand into the through hole 212A, and inserts the heat shield positioning jig 2 into the main chamber 111 in a position where the first heat shield positioning section 23 is on the lower side, that is, in a position where the first heat shield positioning section 23 is facing the upper side of the first heat shield 15 to be positioned.
[0050] When the heat shield positioning jig 2 is inserted into the main chamber 111, the jig positioning portion 22 located at the tip of the arm portion 212 comes into contact with the inner circumferential surface of the main chamber 111, thereby horizontally positioning the heat shield positioning jig 2 relative to the main chamber 111 by the jig positioning portion 22.
[0051] Furthermore, when the heat shield positioning jig 2 is inserted into the main chamber 111, the first inclined surface 233 of at least one of the first heat shield positioning parts 23 comes into contact with the upper corner of the first supported part 152. Subsequently, as the heat shield positioning jig 2 is inserted, the contact position between the first inclined surface 233 and the upper corner of the first supported part 152 gradually moves toward the first vertical plane 232, causing the first heat shield 15 to move horizontally. The heat shield positioning jig 2 is then inserted until the first vertical plane 232 comes into contact with the side surface of the first supported part 152, thereby performing the horizontal positioning of the first heat shield 15 relative to the main chamber 111 by the first heat shield positioning part 23. Subsequently, the heat shield positioning jig 2 is inserted until the first horizontal surface 231 comes into contact with the upper surface of the first supported part 152.
[0052] Next, the worker grasps the handle 213 located on the upper side, or reaches into the through-hole 212A, and removes the heat shield positioning jig 2 from inside the main chamber 111, taking care not to shift the first heat shield 15. In other words, the worker separates the heat shield positioning jig 2 from the main chamber 111 and the first heat shield 15. Through the above process, the horizontal position of the first heat shield 15 is adjusted so that its central axis coincides with the central axis of the main chamber 111, that is, so that its central axis coincides with the central axis of the silicon single crystal SM.
[0053] Furthermore, if the central axis of the temporarily placed first heat shield 15 is located on the central axis of the main chamber 111, the first inclined surface 233 and the upper end corner of the first supported portion 152 will not come into contact, and the first heat shield 15 will not move horizontally when the heat shield positioning jig 2 is inserted.
[0054] Furthermore, if the difference between the diameter R of the virtual circumscribed circle P that circumscribes the four jig positioning parts 22 and the inner diameter of the main chamber 111 is not 0 mm, the heat shield positioning jig 2 is inserted into the main chamber 111 with at least one jig positioning part 22 not in contact with the main chamber 111. Also, if the difference between the diameter R1 of the first virtual inscribed circle that circumscribes the four first vertical planes 232 and the outer diameter of the first supported part 152 is not 0 mm, the heat shield positioning jig 2 is inserted into the main chamber 111 with at least one first vertical plane 232 not in contact with the first supported part 152.
[0055] When the first heat shield 15 is positioned in at least one of the following states: at least one jig positioning part 22 does not contact the main chamber 111, and at least one first vertical surface 232 does not contact the first supported part 152, the difference between the diameter R of the virtual circumscribed circle P and the inner diameter of the main chamber 111, and the difference between the diameter R1 of the first virtual inscribed circle and the outer diameter of the first supported part 152 are both 1 mm or less. Therefore, the maximum deviation of the central axis of the first heat shield 15 from the central axis of the main chamber 111 is 2 mm.
[0056] If the deviation of the central axis of the first heat shield 15 from the central axis of the main chamber 111 is 2 mm or less, it is possible to suppress the shaking of the silicon single crystal SM and the unevenness of the thermal environment around the silicon single crystal SM due to uneven flow rate of the inert gas flowing between the silicon single crystal SM and the first heat shield 15. Therefore, the heat shield positioning jig 2 can appropriately position the first heat shield 15 horizontally even if at least one of the differences between the diameter R of the virtual circumscribed circle P and the inner diameter of the main chamber 111, and the difference between the diameter R1 of the first virtual inscribed circle and the outer diameter of the first supported portion 152 is not 0 mm, as long as the difference between at least one of these is less than or equal to a predetermined value (1 mm in this embodiment).
[0057] <Method for manufacturing silicon single crystals> Next, a method for manufacturing a silicon single crystal, including the heat shield positioning method described above, will be explained. First, the worker positions the first heat shield 15, which is temporarily placed in the main chamber 111, in the horizontal direction using the heat shield positioning method described above. After the operator removes the heat shield positioning jig 2 from the main chamber 111, the silicon single crystal manufacturing apparatus 1 pulls up the silicon single crystal SM in the chamber 11 using a well-known method. During this pulling up process, the central axis of the first heat shield 15 coincides with the central axis of the silicon single crystal SM, so that the silicon single crystal SM can be pulled up while suppressing shaking of the silicon single crystal SM and unevenness of the thermal environment around the silicon single crystal SM.
[0058] [Effects of the Embodiment] The heat shield positioning jig 2 includes a jig body 21 that is detachably configured to be attached to the main chamber 111. The jig body 21 is provided with a jig positioning section 22 for horizontal positioning of the jig body 21 relative to the main chamber 111, and a first heat shield positioning section 23 for horizontal positioning of the first heat shield 15 relative to the jig body 21. Therefore, by temporarily placing the first heat shield 15 inside the main chamber 111, performing the horizontal positioning of the jig body 21 relative to the main chamber 111 by the jig positioning unit 22, and the horizontal positioning of the first heat shield 15 relative to the jig body 21 by the first heat shield positioning unit 23, the horizontal positioning of the first heat shield 15 relative to the main chamber 111 can be performed with good reproducibility simply by moving the heat shield positioning jig 2 away from the main chamber 111 and the first heat shield 15. Therefore, a heat shield positioning jig 2 can be provided that allows for easy and appropriate horizontal positioning of the first heat shield 15. Furthermore, if the main chamber 111 is small, an operator can visually determine the appropriate position of the first heat shield 15. However, in a silicon single crystal manufacturing apparatus 1 for producing silicon single crystal SM with a diameter of 300 mm or more, the main chamber 111 is large, making it difficult for an operator to visually determine the appropriate position of the first heat shield 15. The heat shield positioning jig 2 is useful when positioning the first heat shield 15 in relation to such a large main chamber 111.
[0059] The vertical side of the jig body 21 is provided with positioning sections 23, 24, and 25 for the first, second, and third heat shields 15, 15, 15, respectively, which have different horizontal dimensions. The jig body 21 is mounted in the main chamber 111 in a position where, for example, the positioning section 23 for the first heat shield, which corresponds to the first heat shield 15 to be positioned, faces the upper side of the first heat shield 15. Therefore, by preparing only one heat shield positioning jig 2, the first, second, and third heat shields 15, 15, 15, which have different horizontal dimensions from each other, can be positioned.
[0060] A positioning section 23 for the first heat shield is provided on one vertical side of the jig body 21, and positioning sections 24 and 25 for the second and third heat shields are provided on the other side. Therefore, when positioning the first heat shield 15, the heat shield positioning jig 2 is mounted in the main chamber 111 in a position where the positioning unit 23 for the first heat shield faces the upper side of the first heat shield 15, and when positioning the second and third heat shields 15, the heat shield positioning jig 2 is mounted in the main chamber 111 in a position where the positioning units 24 and 25 for the second and third heat shields face the upper side of the second and third heat shields 15, 15, thereby enabling horizontal positioning of the first, second and third heat shields 15, 15, 15.
[0061] The jig body 21 comprises a base 211 and a plurality of arms 212 extending horizontally from the base 211 in different directions. Each arm 212 is provided with a jig positioning section 22 and positioning sections 23, 24, and 25 for the first, second, and third heat shields, respectively. In this way, by constructing the jig body 21 with a base portion 211 and an arm portion 212, the weight of the heat shield positioning jig 2 can be reduced.
[0062] The base portion 211 is provided with a handle 213 that functions as a gripping portion. The arm portion 212 is also provided with a through hole 212A that functions as a gripping portion. Therefore, the worker can easily move the heat shield positioning jig 2 using the handle 213 or the through hole 212A.
[0063] [Differentiation] Although embodiments of the present invention have been described in detail above with reference to the drawings, the specific configuration is not limited to these embodiments, and various improvements and design changes, etc., that do not depart from the spirit of the present invention are also included.
[0064] For example, the heat shield positioning jig 2 does not need to be provided with one or two of the positioning sections 23, 24, and 25 for the first, second, and third heat shields. Alternatively, the heat shield positioning jig 2 may be provided with four or more heat shield positioning sections for horizontal positioning four or more types of heat shields 15 that have different horizontal sizes. In this case, it is preferable that the four or more heat shield positioning sections be provided at positions equidistant from the center of the heat shield positioning jig 2 in each arm section 212 (on a concentric circle with the virtual circumscribed circle P).
[0065] Positioning sections 23, 24, and 25 for the first, second, and third heat shields may be provided on one side of the jig body 21 in the vertical direction (the upper end in Figures 3(A) and (B)).
[0066] The jig body 21 may be made of a disc-shaped member whose outer diameter is less than or equal to the inner diameter of the main chamber 111, or it may be made of a polygonal plate-shaped member whose circumscribed circle diameter is less than or equal to the inner diameter of the main chamber 111. In this case, the side surface of the disc-shaped member, or the corner in the plan view of the polygonal plate-shaped member, may function as a positioning part for the jig, and a positioning part for the heat shield may be provided on the main surface of the disc-shaped member or the polygonal plate-shaped member.
[0067] The jig body 21 does not necessarily have to be provided with at least one of the handle 213 that functions as a gripping part and the through hole 212A. Alternatively, the base 211 may be provided with a through hole that functions as a gripping part, or the arm 212 may be provided with a handle 213.
[0068] A spirit level may be placed on at least one of the base 211 and the four arms 212. With this configuration, it is possible to determine whether or not the heat shield 15 is positioned horizontally.
[0069] As an example of a jig positioning part 22, a configuration in which it abuts the inner circumferential surface of the main chamber 111 has been shown, but a configuration in which it abuts at least the outer circumferential surface of the main chamber 111, rather than the inner circumferential surface and the outer circumferential surface, is also acceptable.
[0070] For example, as the positioning section 23 for the first heat shield, a configuration may be applied in which the horizontal positioning of the first heat shield 15 with respect to the main chamber 111 is performed by contact with the upper or lower opening edge of the heat shield body 151 that constitutes the first heat shield 15, or with the inner circumferential surface of the heat shield body 151.
[0071] The horizontal length of the arm portion 212 can be changed so that the horizontal positioning of the heat shield 15 relative to the main chambers 111, which have different inner diameters, can be performed using a single heat shield positioning jig 2. For example, a single arm portion 212 may be formed by connecting two segmented arm portions via a pivot axis, and the length of the arm portion 212 may be changed by rotating the segmented arm portion located on the outside. Alternatively, instead of a pivot axis, the two segmented arm portions may be connected via, for example, a rack and pinion mechanism, and the length of the arm portion 212 may be changed by sliding the segmented arm portion located on the outside.
[0072] For example, the heat shield positioning jig 2 may be configured to simultaneously perform the horizontal positioning of the jig body 21 relative to the main chamber 111 by the jig positioning unit 22 and the horizontal positioning of the first heat shield 15 relative to the jig body 21 by the first heat shield positioning unit 23. Alternatively, the heat shield positioning jig 2 may be configured to perform the horizontal positioning of the first heat shield 15 relative to the jig body 21 by the first heat shield positioning unit 23, and then the horizontal positioning of the jig body 21 relative to the main chamber 111 by the jig positioning unit 22. [Explanation of symbols]
[0073] 11...Chamber, 15...Heat shield, 2...Heat shield positioning jig, 21...Jig body, 211...Base, 212...Arm, 212A...Through hole (gripping part), 213...Handle (gripping part), 22...Jig positioning part, 23...Positioning part for first heat shield, 24...Positioning part for second heat shield, 25...Positioning part for third heat shield, SM...Silicon single crystal.
Claims
1. A heat shield positioning jig formed in a shape that can be inserted into a chamber, for positioning a heat shield surrounding a silicon single crystal being pulled up in the chamber, The heat shield comprises a cylindrical heat shield body surrounding the silicon single crystal, and a supported portion that protrudes in a flange-like manner from the entire upper circumference of the heat shield body. The heat shield positioning jig comprises a jig body that is attached to the chamber when positioning the heat shield and separated from the chamber and the heat shield after the heat shield has been positioned. The jig body includes: A positioning unit for a jig that contacts the inner circumferential surface of the chamber to position the jig body horizontally relative to the chamber, A heat shield positioning jig is provided with a heat shield positioning unit that, by contacting the side surface of the supported portion, performs horizontal positioning of the heat shield relative to the jig body.
2. In the heat shield positioning jig according to claim 1, The vertical side of the jig body is provided with multiple positioning sections for heat shields, each for positioning multiple types of heat shields with different horizontal dimensions in the horizontal direction. The jig body is a heat shield positioning jig, which is mounted in the chamber in a position where the heat shield positioning portion corresponding to the heat shield to be positioned faces the upper side of the heat shield.
3. In the heat shield positioning jig according to claim 2, At least one positioning portion for the heat shield is provided on one vertical side of the jig body. A heat shield positioning jig, wherein the remaining positioning portion for the heat shield is provided on the other vertical side of the jig body.
4. In the heat shield positioning jig according to any one of claims 1 to 3, The jig body comprises a base and a plurality of arms extending horizontally from the base in different directions. A heat shield positioning jig, wherein each of the plurality of arms is provided with a positioning section for the jig and a positioning section for the heat shield.
5. In the heat shield positioning jig according to claim 4, A heat shield positioning jig, wherein at least one of the base and the plurality of arms is provided with a gripping portion for gripping the jig body.
6. In the heat shield positioning jig according to claim 5, The gripping portion is composed of a through hole that penetrates the portion on which the gripping portion is provided, in a heat shield positioning jig.
7. A method for positioning a heat shield surrounding a silicon single crystal being pulled up in a chamber, using the heat shield positioning jig described in claim 1, The heat shield is temporarily placed inside the chamber, The horizontal positioning of the jig body relative to the chamber by the jig positioning unit and the horizontal positioning of the heat shield relative to the jig body by the heat shield positioning unit are performed simultaneously, or the other positioning is performed after one of them has been performed. A method for positioning a heat shield, comprising separating the heat shield positioning jig from the chamber and the heat shield.
8. Using the heat shield positioning method described in claim 7, the heat shield surrounding the silicon single crystal being pulled up in the chamber is positioned, A method for manufacturing a silicon single crystal, comprising pulling up a silicon single crystal in the aforementioned chamber.