Thermoelectric conversion module and method for manufacturing a thermoelectric conversion module

Abstract

This thermoelectric conversion module comprises an insulating sheet substrate having a front side and a back side, a plurality of thermoelectric transducers, and a wiring layer. The thermoelectric transducers are long extending in a first direction on the front side of the sheet substrate and are arranged along a second direction crossing the first direction. The wiring layer includes a plurality of wires that electrically connect the adjacent thermoelectric transducers in series on both long ends thereof. The plurality of thermoelectric transducers are all p-type thermoelectric transducers or n-type thermoelectric transducers. The thermal resistance of the wire is equal to or higher than that of the thermal transducers.

Description

[Technical Field]

[0001] The present invention relates to a thermoelectric conversion module and a method for manufacturing a thermoelectric conversion module. [Background technology]

[0002] Thermoelectric conversion modules equipped with multiple thermoelectric conversion elements are known (for example, Patent Document 1, Patent Document 2, and Non-Patent Document 1). A thermoelectric conversion element is an element that converts heat into electricity by utilizing the temperature difference between its two ends. [Prior art documents] [Patent Documents]

[0003] [Patent Document 1] International Publication No. 2012 / 121133 [Patent Document 2] Japanese Patent Publication No. 2015-144212 [Non-patent literature]

[0004] [Non-Patent Document 1] National Institute of Advanced Industrial Science and Technology (AIST), “Development of Conductive Polymer Thin Films with High Thermoelectric Conversion Performance,” AIST Press Release, [online], August 31, 2012, [Retrieved August 17, 2020], Internet<https: / / www.aist.go.jp / aist_j / press_release / pr2012 / pr20120831 / pr20120831.html> [Overview of the Initiative] [Problems that the invention aims to solve]

[0005] In thermoelectric conversion modules equipped with multiple thermoelectric elements, it is necessary to electrically connect the multiple thermoelectric elements by wiring. When multiple thermoelectric elements are connected by wiring, heat from the high-temperature end of a thermoelectric element may be transferred to the low-temperature end of the thermoelectric element through the wiring. When heat from the high-temperature end of a thermoelectric element is transferred to the low-temperature end of a thermoelectric element, the temperature difference between the two ends of the thermoelectric element decreases, which may reduce the power generated by the thermoelectric element.

[0006] Therefore, the object of the present invention is to solve the above-mentioned problems and provide a thermoelectric conversion module and a method for manufacturing a thermoelectric conversion module in which the reduction in power generation is suppressed. [Means for solving the problem]

[0007] The present invention aims to advantageously solve the above problems, and the thermoelectric conversion device of the present invention is a thermoelectric conversion module comprising: an insulating sheet substrate having a front surface and a back surface; a plurality of thermoelectric conversion elements arranged on the front surface of the sheet substrate, which are elongated in shape extending in a first direction and aligned along a second direction intersecting the first direction; and a wiring layer having a plurality of wires that electrically connect adjacent thermoelectric conversion elements in series at both ends of the elongated shape, wherein all of the plurality of thermoelectric conversion elements are either p-type thermoelectric conversion elements or n-type thermoelectric conversion elements, and the thermal resistance value of the wiring is greater than or equal to the thermal resistance value of the thermoelectric conversion elements. With this configuration, it is possible to suppress the reduction of the temperature difference between both ends of the thermoelectric conversion elements. By suppressing the reduction of the temperature difference between both ends of the thermoelectric conversion elements, it is possible to suppress the decrease in the power generated by the thermoelectric conversion elements. Therefore, a thermoelectric conversion module in which the decrease in power generated is suppressed can be provided.

[0008] In the thermoelectric conversion device of the present invention, it is preferable that all of the plurality of thermoelectric conversion elements are p-type thermoelectric conversion elements. Depending on the thermoelectric conversion material forming the thermoelectric conversion elements, durability may also be improved if one of the p-type thermoelectric conversion elements is an n-type thermoelectric conversion element. By having all of the plurality of thermoelectric conversion elements be p-type thermoelectric conversion elements, the thermoelectric conversion module can be made to have excellent durability.

[0009] Furthermore, in the thermoelectric conversion device of the present invention, it is preferable that the electrical resistance value of the wiring is less than or equal to the electrical resistance value of the thermoelectric conversion element. With such a configuration, it is possible to suppress the current flowing through the thermoelectric conversion module from being limited by the electrical resistance value of the wiring.

[0010] Furthermore, in the thermoelectric conversion device of the present invention, it is preferable that all of the plurality of thermoelectric conversion elements are formed by including carbon nanotubes. This configuration further improves the mechanical strength of the thermoelectric conversion module and makes the thermoelectric conversion module lighter.

[0011] Furthermore, in the thermoelectric conversion device of the present invention, it is preferable that the plurality of thermoelectric conversion elements are formed not only on the front surface of the sheet substrate but also on the back surface. By forming thermoelectric conversion elements on both the front and back surfaces of the sheet substrate in this way, the density of thermoelectric conversion elements in the thermoelectric conversion module can be increased. By increasing the density of thermoelectric conversion elements in the thermoelectric conversion module, the thermoelectric conversion module can be made smaller.

[0012] Furthermore, in the thermoelectric conversion device of the present invention, when the sheet substrate is viewed in plan view, it is preferable that a portion of each thermoelectric conversion element formed on the surface overlaps with a portion of each thermoelectric conversion element formed on the back surface. With such a configuration, the thermoelectric conversion module can be miniaturized.

[0013] Furthermore, in the thermoelectric conversion device of the present invention, it is preferable that each of the plurality of thermoelectric conversion elements has a rectangular shape of substantially the same dimensions. With such a configuration, the thermoelectric conversion module can be miniaturized.

[0014] Furthermore, in the thermoelectric conversion device of the present invention, it is preferable that the plurality of thermoelectric conversion elements are configured such that the electrical resistance values ​​of each of the plurality of thermoelectric conversion elements are substantially the same, by adjusting the length of each of the plurality of thermoelectric conversion elements along the first direction, the width of each of the plurality of thermoelectric conversion elements along the second direction, and the thickness of each of the plurality of thermoelectric conversion elements. By making the electrical resistance values ​​of each of the plurality of thermoelectric conversion elements the same, power loss in the thermoelectric conversion module can be reduced.

[0015] Furthermore, in the thermoelectric conversion device of the present invention, it is preferable that the thickness of each of the plurality of thermoelectric conversion elements is substantially the same, the length of each of the plurality of thermoelectric conversion elements is different, and the width of each of the plurality of thermoelectric conversion elements is different.

[0016] Furthermore, in the thermoelectric conversion device of the present invention, it is preferable that the shape of the sheet substrate is trapezoidal, and that the sheet substrate includes a first edge corresponding to one of the two legs of the trapezoid and a second edge corresponding to the other of the two legs, the distance between the first edge and the second edge in the first direction widens along the second direction, and the plurality of thermoelectric conversion elements extend from the first edge to the second edge along the first direction. The trapezoidal shape of the sheet substrate can increase the degree of freedom in the location where the thermoelectric conversion module is placed.

[0017] The present invention aims to advantageously solve the above problems, and the method for manufacturing a thermoelectric conversion module of the present invention comprises: an insulating sheet substrate having a substrate including a front and a back surface and an insulating layer formed on the surface of the substrate; a plurality of thermoelectric conversion elements arranged on the surface side of the insulating layer, which are elongated in shape extending in a first direction and arranged along a second direction intersecting the first direction; and a wiring layer on the back side of the insulating layer, which has a plurality of wires that electrically connect adjacent thermoelectric conversion elements in series at both ends of the elongated shape. The manufacturing method includes: a wiring layer formation step of forming the wiring layer on the surface of the substrate; an insulating layer formation step of forming an insulating layer on the substrate and the wiring layer such that only both ends of each wiring constituting the wiring layer are exposed; an element formation step of forming a thermoelectric element layer on the insulating layer; a thermoelectric element formation step of cutting the thermoelectric element layer along a first direction to form a plurality of thermoelectric elements arranged along the first direction; and a connection step of connecting both ends of the exposed wiring to both ends of the plurality of thermoelectric elements so that all of the plurality of thermoelectric elements are electrically connected in series. By such a manufacturing method, a thermoelectric conversion module in which the reduction in power generation is suppressed can be provided.

[0018] Furthermore, in the method for manufacturing the thermoelectric conversion module of the present invention, it is preferable that the thermoelectric conversion element layer is a layer formed containing carbon nanotubes. With such a configuration, a thermoelectric conversion module can be manufactured that has further improved mechanical strength and is also lighter.

[0019] Furthermore, in the method for manufacturing the thermoelectric conversion module of the present invention, it is preferable that the thermoelectric conversion element formation step is carried out using a UV laser, a nanosecond laser, or a femtosecond laser. By using a UV laser, a nanosecond laser, or a femtosecond laser, the generation of heat due to the laser can be reduced. By reducing the generation of heat due to the laser, the widening of the gaps between thermoelectric conversion elements in the second direction is suppressed, and the density of thermoelectric conversion elements in the thermoelectric conversion module can be increased. [Effects of the Invention]

[0020] According to the present invention, a thermoelectric conversion module in which the reduction in power generation is suppressed and a method for manufacturing the thermoelectric conversion module can be provided. [Brief explanation of the drawing]

[0021] [Figure 1] This is an external view of a thermoelectric conversion module according to the first embodiment of the present invention. [Figure 2] Figure 1 is a cross-sectional view of a thermoelectric conversion module along the L1-L1 line. [Figure 3] This diagram shows the wiring layers shown in Figure 1. [Figure 4] This figure shows the current path in the thermoelectric conversion module shown in Figure 1. [Figure 5] This diagram illustrates the setting of thermal resistance values ​​for thermoelectric conversion elements and wiring. [Figure 6] Figure 1 is a flowchart showing the manufacturing process of the thermoelectric conversion module. [Figure 7] This diagram shows the configuration after the metal foil placement process has been carried out. [Figure 8] This figure shows the configuration after the insulating layer formation process has been carried out. [Figure 9] This diagram shows the configuration after the carbon nanotube sheets have been arranged. [Figure 10] This diagram shows the structure after cutting a carbon nanotube sheet. [Figure 11] This figure shows a first modified example of the wiring shown in Figure 3. [Figure 12] This figure shows a second modified example of the wiring shown in Figure 3. [Figure 13] This is an external view of a thermoelectric conversion module according to a second embodiment of the present invention. [Figure 14] Figure 13 is a cross-sectional view of the thermoelectric conversion module along the L2-L2 line. [Figure 15] Figure 13 is a cross-sectional view of a thermoelectric conversion module along the L3-L3 line. [Figure 16]This diagram shows the wiring layers shown in Figure 14. [Figure 17] This figure shows the current path in the thermoelectric conversion module shown in Figure 13. [Figure 18] Figure 13 is a flowchart showing the manufacturing process of the thermoelectric conversion module. [Figure 19] This diagram shows the configuration after the metal foil placement process has been carried out. [Figure 20] This figure shows the configuration after the process of forming an opening in the substrate has been carried out. [Figure 21] This figure shows the configuration after the insulating layer formation process has been carried out. [Figure 22] This figure shows the configuration after the process of forming openings in the insulating layer has been carried out. [Figure 23] This diagram shows the configuration after the carbon nanotube sheets have been arranged. [Figure 24] This is an external view of a thermoelectric conversion module according to a third embodiment of the present invention. [Modes for carrying out the invention]

[0022] Embodiments of the present invention will be described below with reference to the drawings. Common components in each figure are denoted by the same reference numerals.

[0023] (First Embodiment) Figure 1 is an external view of a thermoelectric conversion module 1 according to the first embodiment of the present invention. Figure 2 is a cross-sectional view of the thermoelectric conversion module 1 along the line L1-L1 shown in Figure 1. Figure 3 is a diagram showing the wiring layer 30 shown in Figure 1. The configuration shown in Figure 3 corresponds to the configuration after carrying out the wiring layer 30 formation process S11 as shown in Figure 6, which will be described later. Figure 4 is a diagram showing the current path in the thermoelectric conversion module shown in Figure 1.

[0024] As shown in Figure 1, the thermoelectric conversion module 1 can be placed on the heat source 2. The thermoelectric conversion module 1 includes a first edge portion 1H and a second edge portion 1L on a sheet substrate 10, which will be described later. The first edge portion 1H and the second edge portion 1L are opposite each other. The first edge portion 1H may be located near the heat source 2 when the thermoelectric conversion module 1 is placed on the heat source 2. The second edge portion 1L may be located away from the heat source 2 when the thermoelectric conversion module 1 is placed on the heat source 2.

[0025] The temperature near the first edge 1H can be higher than the temperature near the second edge 1L because the first edge 1H is located closer to the heat source 2 than the second edge 1L. In other words, the temperature near the second edge 1L can be lower than the temperature near the first edge 1H.

[0026] In Figure 1, the first direction A1 is the direction in which the first edge 1H and the second edge 1L face each other. In this embodiment, the first direction A1 is the direction from the second edge 1L to the first edge 1H of the thermoelectric conversion module 1.

[0027] In Figure 1, the second direction A2 is perpendicular to the first direction A1. However, the second direction A2 does not have to be perpendicular to the first direction A1 as long as it intersects with the first direction A1. In this embodiment, the second direction A2 is assumed to be the direction from the left side of the page to the right side of the page in Figure 1.

[0028] In Figure 1, the third direction A3 is perpendicular to the plane containing the first direction A1 and the second direction A2. In this embodiment, the third direction A3 is assumed to be the direction from the back of the page to the front of the page in Figure 1.

[0029] Hereafter, unless otherwise specified, "up" refers to the third direction A3. Similarly, unless otherwise specified, "down" refers to the opposite direction from the third direction A3.

[0030] As shown in Figure 1, the shape of the thermoelectric conversion module 1 as viewed from the third direction A3 is a rectangular or other quadrilateral shape. As shown in Figure 1, the thermoelectric conversion module 1 comprises a sheet substrate 10, thermoelectric conversion elements 21, 22, 23, 24, first joining members 71, 72, 73, 74, and second joining members 81, 82, 83, 84. As shown in Figure 3, the thermoelectric conversion module 1 comprises a wiring layer 30. The wiring layer 30 is located inside the sheet substrate 10. The wiring layer 30 may be located on the back surface 12B side of the insulating layer 12, which will be described later. The wiring layer 30 has first electrodes 41, 42, 43, 44, second electrodes 51, 52, 53, 54, and wiring 61, 62, 63.

[0031] Hereafter, unless otherwise specified, thermoelectric elements 21 to 24 will be collectively referred to as "thermoelectric elements 20". Figure 1 shows a thermoelectric module 1 equipped with four thermoelectric elements 20. However, the number of thermoelectric elements 20 equipped in the thermoelectric module 1 may be any number.

[0032] Hereafter, when the first electrodes 41 to 44 are not specifically distinguished, they will be collectively referred to as "first electrode 40". Similarly, when the second electrodes 51 to 54 are not specifically distinguished, they will be collectively referred to as "second electrode 50". Furthermore, when the wirings 61 to 63 are not specifically distinguished, they will be collectively referred to as "wiring 60". Figure 3 shows a wiring layer 30 having four first electrodes 40, four second electrodes 50, and three wirings 60. However, the number of first electrodes 40, the number of second electrodes 50, and the number of wirings 60 in the wiring layer 30 may correspond to the number of thermoelectric elements 20 provided in the thermoelectric conversion module 1.

[0033] Hereinafter, when not particularly distinguishing each of the first joining members 71 to 74, they may also be collectively referred to as the "first joining member 70". Further, when not particularly distinguishing each of the second joining members 81 to 84, they may also be collectively referred to as the "second joining member 80". FIG. 1 shows a thermoelectric conversion module 1 including four first joining members 70 and four second joining members 80. However, the number of the first joining members 70 and the number of the second joining members 80 included in the thermoelectric conversion module 1 may correspond to the number of thermoelectric conversion elements 20 included in the thermoelectric conversion module 1.

[0034] Hereinafter, the numbers assigned to the plurality of thermoelectric conversion elements 20 included in the thermoelectric conversion module 1 along the second direction A2 are also described as "number A n "(n is an integer). The minimum value of number A n (n = 1) is assumed to be 1. Number A n is assumed to increase one by one along the second direction A2. The numbers A n of the thermoelectric conversion elements 21, 22, 23, and 24 are 1st, 2nd, 3rd, and 4th, respectively.

[0035] Hereinafter, the numbers assigned to the plurality of first electrodes 40 included in the wiring layer 30 along the second direction A2 are also described as "number B n "(n is an integer). The minimum value of number B n (n = 1) is assumed to be 1. Number B n is assumed to increase one by one along the second direction A2. The numbers B n assigned to the first electrodes 41, 42, 43, and 44 along the second direction A2 are 1st, 2nd, 3rd, and 4th, respectively.

[0036] Hereinafter, the numbers assigned to the plurality of second electrodes 50 included in the wiring layer 30 along the second direction A2 are also described as "number C n "(n is an integer). The minimum value of number C n (n = 1) is assumed to be 1. Number C n is assumed to increase one by one along the second direction A2. The numbers C nThese are numbers 1, 2, 3, and 4.

[0037] The following numbers assigned to the multiple wires 60 in the wiring layer 30 along the second direction A2 are "Number D n It is also written as (where n is an integer). Number D n The minimum value (n=1) is assumed to be 1. Number D n The numbers will be incremented one by one along the second direction A2. Numbers D are assigned to wiring 61, 62, and 63 along the second direction A2. n These are numbers 1, 2, and 3.

[0038] The following numbers assigned to the multiple first joining members 70 of the thermoelectric conversion module 1 along the second direction A2 are "Number E n It is also written as (where n is an integer). Number E n The minimum value (n=1) is assumed to be 1. Number E n The numbers E will be incremented one by one along the second direction A2. n These are numbers 1, 2, 3, and 4.

[0039] The following numbers assigned to the multiple second joining members 80 of the thermoelectric conversion module 1 along the second direction A2 are "Number F n It is also written as (where n is an integer). Number F n The minimum value (n=1) is assumed to be 1. Number F n The numbers F of the second joining members 81, 82, 83, and 84 are assumed to increase by one each along the second direction A2. n These are numbers 1, 2, 3, and 4.

[0040] The sheet substrate 10 shown in Figure 1 has insulating properties. The sheet substrate 10 may be flexible. Any insulating material can be used as the material for forming the sheet substrate 10, without any particular limitations. The shape of the sheet substrate 10 as viewed from the third direction A3 is a rectangle or other quadrilateral. The sheet substrate 10 may be parallel to the plane including the first direction A1 and the second direction A2.

[0041] The sheet substrate 10 includes the first edge portion 1H and the second edge portion 1L described above. As shown in Figure 2, the sheet substrate 10 includes a front surface 10A and a back surface 10B. The front surface 10A and the back surface 10B are opposite to each other. The front surface 10A is the surface of the sheet substrate 10 facing the third direction A3. The back surface 10B is the surface of the sheet substrate 10 facing the opposite direction from the third direction A3.

[0042] As shown in Figure 2, the sheet substrate 10 has a substrate 11 and an insulating layer 12.

[0043] The substrate 11 is insulating. The substrate 11 may be flexible. The material used to form the substrate 11 is not particularly limited, and any material such as polyimide or epoxy glass can be used. As shown in Figure 1, the shape of the substrate 11 as viewed from the third direction A3 is a quadrilateral shape, such as a rectangle. The substrate 11 may be parallel to the plane including the first direction A1 and the second direction A2.

[0044] As shown in Figure 2, the substrate 11 includes a front surface 11A and a back surface 11B. The front surface 11A and the back surface 11B are opposite each other. The front surface 11A is the surface of the substrate 11 facing the third direction A3. The back surface 11B is the surface of the substrate 11 facing the opposite direction of the third direction A3. The back surface 11B may correspond to the back surface 10B of the sheet substrate 10.

[0045] The insulating layer 12 has insulating properties. The insulating layer 12 may be flexible. The material used to form the insulating layer 12 is not particularly limited, and any insulating material can be used. The insulating layer 12 may be located on the surface 11A of the substrate 11. As shown in Figure 1, the shape of the insulating layer 12 as viewed from the third direction A3 is a quadrilateral shape, such as a rectangle. The insulating layer 12 may be parallel to the plane including the first direction A1 and the second direction A2.

[0046] As shown in Figure 2, the insulating layer 12 includes a front surface 12A and a back surface 12B. The front surface 12A and the back surface 12B are opposite each other. The front surface 12A is the surface of the insulating layer 12 facing the third direction A3. The front surface 12A may correspond to the front surface 10A of the sheet substrate 10. The back surface 12B is the surface of the insulating layer 12 facing the direction opposite to the third direction A3.

[0047] All of the thermoelectric elements 21-24 are either p-type or n-type thermoelectric elements. Depending on the thermoelectric material forming the thermoelectric elements 20, one of the p-type or n-type thermoelectric elements may have higher durability than the other. Because all of the multiple thermoelectric elements 20 in the thermoelectric module 1 are either p-type or n-type thermoelectric elements, the thermoelectric module 1 can be made highly durable.

[0048] The thermoelectric conversion material for forming the thermoelectric conversion element 20 is not particularly limited and can be bismuth telluride compounds, antimony compounds, silicon compounds, metal oxide compounds, Heusler alloy compounds, conductive polymer compounds, conductive fibers, and composite materials thereof. Among these, conductive fibers are preferred, and fibrous carbon nanostructures such as carbon nanotubes (hereinafter also referred to as "CNTs") are more preferred. This is because using CNTs further improves the mechanical strength of the thermoelectric conversion module 1 of the present invention and reduces its weight. Furthermore, while single-walled carbon nanotubes and / or multi-walled carbon nanotubes are not particularly limited and can be used, single-walled carbon nanotubes are preferred. This is because single-walled carbon nanotubes tend to have superior thermoelectric properties (Seebeck coefficient). Furthermore, as single-walled carbon nanotubes, CNTs can be produced according to a method (super-growth method; see International Publication No. 2006 / 011655) in which raw material compounds and carrier gases are supplied to a substrate having a catalyst layer for CNT production on its surface, and when CNTs are synthesized by chemical vapor deposition (CVD), a small amount of oxidizing agent (catalyst activator) is present in the system to dramatically improve the catalytic activity of the catalyst layer (hereinafter, CNTs produced according to this method may be referred to as "SGCNTs"). In addition, SGCNTs have the characteristic of being highly bent. Here, CNTs are thought to have high thermal conductivity due to electron transfer, but also a high effect of reducing thermal conductivity due to phonon vibration. However, because SGCNTs are more bent than CNTs produced according to other general methods, they have a structure in which phonon vibrations are less likely to be amplified, and the reduction in thermal conductivity caused by phonon vibrations can be suppressed. Therefore, SGCNTs may be a more advantageous material as a thermoelectric conversion material compared to other general CNTs.

[0049] All of the thermoelectric elements 21 to 24 may be formed by including carbon nanotubes (CNTs). This configuration further improves the mechanical strength of the thermoelectric module 1 and also reduces its weight.

[0050] All of the thermoelectric elements 21-24 may be p-type thermoelectric elements, for example, if the thermoelectric material used to form the thermoelectric element 20 is an organic material such as a carbon nanotube (CNT). When the thermoelectric material is an organic material, oxidation of the thermoelectric element 20 by oxygen and moisture in the atmosphere may be the main cause of deterioration of the characteristics of the thermoelectric element 20. In this case, since n-type thermoelectric elements are more susceptible to oxidation by oxygen and moisture in the atmosphere than p-type thermoelectric elements, p-type thermoelectric elements may have higher durability than n-type thermoelectric elements. For example, when the thermoelectric material is an organic material, if all of the multiple thermoelectric elements 20 in the thermoelectric module 1 are p-type thermoelectric elements, the thermoelectric module 1 may have superior durability.

[0051] As shown in Figure 1, the thermoelectric element 20 extends along the first direction A1. The shape of the thermoelectric element 20 as viewed from the third direction A3 is elongated, such as a rectangle. The longitudinal direction of the thermoelectric element 20 is along the first direction A1. The longitudinal direction of the thermoelectric element 20 may be parallel to the first direction A1. The shapes of the thermoelectric elements 21 to 24 may be the same. As shown in Figure 2, the cross-sectional shape of the thermoelectric element 20 may be thin film.

[0052] As shown in Figure 1, the thermoelectric elements 21 to 24 are arranged along the second direction A2 on the surface 10A of the sheet substrate 10, for example, on the surface 12A of the insulating layer 12. For example, the thermoelectric elements 21 to 24 are arranged along the second direction A2 on the surface 12A side of the insulating layer 12. The thermoelectric elements 21 to 24 may be arranged along the second direction A2 with gaps between them. The width of the gap can be arbitrary as long as insulation is ensured between two adjacent thermoelectric elements 20 in the second direction A2.

[0053] Each of the thermoelectric elements 21-24 may be a rectangle of approximately the same dimensions. Having each of the thermoelectric elements 21-24 be a rectangle of approximately the same dimensions allows for efficient arrangement of the thermoelectric elements 21-24 on the surface 10A of the sheet substrate 10. This configuration allows for miniaturization of the thermoelectric module.

[0054] The thermoelectric element 20 includes a first end 20H and a second end 20L in the first direction A1. The first end 20H is located toward the first edge 1H of the thermoelectric module 1. The second end 20L is located toward the second edge 1L of the thermoelectric module 1. The first ends 20H of the thermoelectric elements 21, 22, 23, and 24 are also referred to as "first end 21H," "first end 22H," "first end 23H," and "first end 24H," respectively. The second ends 20L of the thermoelectric elements 21, 22, 23, and 24 are also referred to as "second end 21L," "second end 22L," "second end 23L," and "second end 24L," respectively. Note that in the configuration shown in Figure 1, the positions of the first ends 21H to 24H in the first direction A1 are different. However, the positions of the first ends 21H to 24H in the first direction A1 may be the same. Also, in the configuration shown in Figure 1, the positions of the second ends 21L to 24L in the first direction A1 are different. However, the positions of the second ends 21L to 24L in the first direction A1 may be the same.

[0055] The thermoelectric element 20 can generate electricity by utilizing the temperature difference between its first end 20H and its second end 20L. Specifically, the temperature of the first end 20H of the thermoelectric element 20 can be higher than the temperature of the second end 20L because the first end 20H is located closer to the first edge 1H than the second end 20L. This higher temperature of the first end 20H compared to the second end 20L can create a temperature difference between the first end 20H and the second end 20L. This temperature difference can create a temperature gradient in the thermoelectric element 20. The Seebeck effect resulting from this temperature gradient generates an electromotive force, allowing the thermoelectric element 20 to generate electricity.

[0056] When the thermoelectric element 20 generates electricity, a current may flow through the thermoelectric element 20. For example, as shown in Figure 4, currents I21, I22, I23, and I24 may flow through each of the thermoelectric elements 21, 22, 23, and 24 in the first direction A1.

[0057] The thermoelectric elements 21-24 may be configured such that their respective electrical resistance values ​​are approximately the same by adjusting the length along the first direction A1, the width along the second direction A2, and the thickness in the third direction A3 of each thermoelectric element 21-24. If the electrical resistance values ​​of the thermoelectric elements 21-24 are different, when the thermoelectric elements 21-24 are electrically connected in series, the current that can be generated in the thermoelectric module 1 will be determined by the thermoelectric element 20 with the smaller electrical resistance value. By making the electrical resistance values ​​of the thermoelectric elements 21-24 approximately the same, it is possible to suppress the current that can be generated in the thermoelectric module 1 being determined by the thermoelectric element 20 with the smaller electrical resistance value. With such a configuration, power loss in the thermoelectric module 1 can be reduced.

[0058] The first electrode 40, the second electrode 50, and the wiring 60 may be formed from the same conductive material or from different conductive materials. The conductive material used to form the first electrode 40, the second electrode 50, and the wiring 60 is not particularly limited, and any metal such as copper or aluminum can be used. Hereinafter, the first electrode 40, the second electrode 50, and the wiring 60 will be assumed to be formed from the same conductive material.

[0059] The first electrode 40 may be located on the surface 11A of the substrate 11. The first electrodes 41 to 44 may be arranged along the second direction A2 with gaps between them. The width of the gap may be arbitrary, as long as insulation can be ensured between two adjacent first electrodes 40 in the second direction A2.

[0060] As shown in Figure 1, at least a portion of the first electrode 40 may be exposed from the sheet substrate 10, for example, the insulating layer 12. At least a portion of the first electrode 40 exposed from the sheet substrate 10, for example, the insulating layer 12, may be electrically connected to the first end 20H of the thermoelectric conversion element 20 by the first bonding member 70.

[0061] In this embodiment, number B exposed from the insulating layer 12 n At least a portion of the first electrode 40 is number B n Same number E n The first joining member 70 of number B n Same number A n The first end 20H of the thermoelectric element 20 may be electrically connected. For example, at least a portion of the first electrode 41 exposed from the insulating layer 12 is electrically connected to the first end 21H of the thermoelectric element 21 by the first bonding member 71. Also, at least a portion of the second first electrode 42 exposed from the insulating layer 12 is electrically connected to the first end 22H of the second thermoelectric element 22 by the first bonding member 72. Also, at least a portion of the third first electrode 43 exposed from the insulating layer 12 is electrically connected to the first end 23H of the third thermoelectric element 23 by the first bonding member 73. Also, at least a portion of the fourth first electrode 44 exposed from the insulating layer 12 is electrically connected to the first end 24H of the fourth thermoelectric element 24 by the first bonding member 74.

[0062] Number B n The position of the first electrode 40 in the second direction A2 is number B n Same number A n The position of the thermoelectric conversion element 20 in the second direction A2 may be the same as that of the thermoelectric conversion element 20. Number B n The first electrode 40 is number B n Same number A n The first edge portion 1H of the thermoelectric conversion module 1 may be located closer to the first end portion 20H of the thermoelectric conversion element 20 than to the first end portion 20H of the thermoelectric conversion element 20. Number B n The first electrode 40 is number B n Same number A nThe first electrode 41 may be located between the first end 20H of the thermoelectric conversion element 20 and the first edge 1H of the thermoelectric conversion module 1. For example, the first electrode 41 of the first thermoelectric conversion element 21 is located between the first end 21H and the first edge 1H of the first thermoelectric conversion element 21. The second first electrode 42 is located between the first end 22H and the first edge 1H of the second thermoelectric conversion element 22. The third first electrode 43 is located between the first end 23H and the first edge 1H of the third thermoelectric conversion element 23. The fourth first electrode 44 is located between the first end 24H and the first edge 1H of the fourth thermoelectric conversion element 24.

[0063] The electrical resistance of the first electrode 40 may be greater than or equal to the electrical resistance of the wiring 60. The first electrode 40 may be configured such that its electrical resistance is greater than or equal to the electrical resistance of the wiring 60. For example, if the thickness of the first electrode 40 in the third direction A3 is the same as the thickness of the wiring 60 in the third direction A3, the width of the first electrode 40 along the second direction A2 is the width W of the wiring 60 as shown in Figure 5 below. 60 It can be wider than that. With this configuration, the electrical resistance of the first electrode 40 can be greater than or equal to the electrical resistance of the wiring 60.

[0064] An extraction wiring for extracting power generated by the thermoelectric conversion module 1 may be electrically connected to any of the multiple first electrodes 40. For example, the extraction wiring may be electrically connected to the first electrode 44.

[0065] As shown in Figure 3, the second electrode 50 may be located on the surface 11A of the substrate 11. The second electrodes 51 to 54 may be arranged along the second direction A2 with gaps between them. The width of the gaps may be arbitrary, as long as insulation can be ensured between two adjacent second electrodes 50 in the second direction A2.

[0066] As shown in Figure 1, at least a portion of the second electrode 50 may be exposed from the sheet substrate 10, for example, from the insulating layer 12. At least a portion of the second electrode 50 exposed from the sheet substrate 10, for example from the insulating layer 12, may be electrically connected to the second end 20L of the thermoelectric conversion element 20 by the first bonding member 70.

[0067] In this embodiment, the number C exposed from the insulating layer 12 n At least a portion of the second electrode 50 is number C n Same number F n The second joining member 80 of number C n Same number A n The second end 20L of the thermoelectric element 20 may be electrically connected. For example, at least a portion of the first second electrode 51 exposed from the insulating layer 12 is electrically connected to the second end 21L of the first thermoelectric element 21 by the first second joining member 81. Also, at least a portion of the second second electrode 52 exposed from the insulating layer 12 is electrically connected to the second end 22L of the second thermoelectric element 22 by the second second joining member 82. Also, at least a portion of the third second electrode 53 exposed from the insulating layer 12 is electrically connected to the second end 23L of the third thermoelectric element 23 by the third second joining member 83. Also, at least a portion of the fourth second electrode 54 exposed from the insulating layer 12 is electrically connected to the second end 24L of the fourth thermoelectric element 24 by the fourth second joining member 84.

[0068] Number C n The position of the second electrode 50 in the second direction A2 is number C n Same number A n The position of the thermoelectric conversion element 20 in the second direction A2 may be the same as that of the thermoelectric conversion element 20. Number C n The second electrode 50 is number C n Same number A n The second edge portion 1L of the thermoelectric conversion module 1 may be located closer to the second end portion 20L of the thermoelectric conversion element 20 than to the second end portion 20L of the thermoelectric conversion element 20. Number C n The second electrode 50 is number C n Same number A nThe second electrode 51 may be located between the second end 20L of the thermoelectric conversion element 20 and the second edge 1L of the thermoelectric conversion module 1. For example, the first second electrode 51 is located between the second end 21L of the first thermoelectric conversion element 21 and the second edge 1L. The second second electrode 52 is located between the second end 22L of the second thermoelectric conversion element 22 and the second edge 1L. The third second electrode 53 is located between the second end 23L of the third thermoelectric conversion element 23 and the second edge 1L. The fourth second electrode 54 is located between the second end 24L of the fourth thermoelectric conversion element 24 and the second edge 1L.

[0069] The electrical resistance of the second electrode 50 may be greater than or equal to the electrical resistance of the wiring 60. The second electrode 50 may be configured such that its electrical resistance is greater than or equal to the electrical resistance of the wiring 60. For example, if the thickness of the second electrode 50 in the third direction A3 is the same as the thickness of the wiring 60 in the third direction A3, the width of the second electrode 50 along the second direction A2 is the width W shown in Figure 5 below. 60 It can be wider than that. With this configuration, the electrical resistance of the second electrode 50 can be greater than or equal to the electrical resistance of the wiring 60.

[0070] An extraction wiring for extracting power generated by the thermoelectric conversion module 1 may be electrically connected to any of the multiple second electrodes 50. For example, the extraction wiring may be electrically connected to the second electrode 51.

[0071] As shown in Figure 2, the wiring 60 may be located within the sheet substrate 10. As shown in Figure 3, the wiring 60 may be located on the surface 11A of the substrate 11 together with the first electrode 40 and the second electrode 50. The wiring 60 may be located on the back surface 12B of the insulating layer 12. The wiring 60 may be located on the back surface 12B of the insulating layer 12 together with the first electrode 40 and the second electrode 50.

[0072] The wiring 60 electrically connects adjacent thermoelectric elements 20 in the second direction A2 in series at both ends of the thermoelectric elements 20, i.e., the first end 20H and the second end 20L. In this embodiment, the wiring 60 electrically connects the first electrode 40, which is electrically connected to the first end 20H of one thermoelectric element 20, and the second electrode 50, which is electrically connected to the second end 20L of the other thermoelectric element 20, in two adjacent thermoelectric elements 20 in the second direction A2.

[0073] As shown in Figure 3, the multiple wires 60 electrically connect the multiple first electrodes 40 and the multiple second electrodes 50, thereby assigning the number A to the thermoelectric conversion element 20. n Multiple thermoelectric conversion elements 20 may be electrically connected in series in the order shown above. For example, number D n Wiring 60 is number D n Same number E n The first electrode 40 and number D n F is one number larger than F n+1 The second electrode 50 may be electrically connected. Number D n One end of the wiring 60 is number D n Same number E n It may be connected to the first electrode 40. Number D n The other end of wiring 60 is number D n F is one number larger than F n+1 It may be electrically connected to the second electrode 50. Number D n Wiring 60 is number D n Same number E n From the first electrode 40, number D n F is one number larger than F n+1 It may extend linearly to the second electrode 50.

[0074] For example, one end of wire 1 61 is electrically connected to the first electrode 41 of wire 1. The other end of wire 1 61 is electrically connected to the second electrode 52 of wire 2, which is one number higher than wire 1. One end of wire 2 62 is electrically connected to the first electrode 42 of wire 2. The other end of wire 2 62 is electrically connected to the second electrode 53 of wire 3, which is one number higher than wire 2. One end of wire 3 63 is electrically connected to the first electrode 43 of wire 3. The other end of wire 3 63 is electrically connected to the second electrode 54 of wire 4, which is one number higher than wire 3.

[0075] With this configuration, the thermoelectric conversion element 20 is assigned the number A n Multiple thermoelectric elements 20 are electrically connected in series in the order shown above. When multiple thermoelectric elements 220 are electrically connected in series, a single current path may be created in the thermoelectric module 1 when the multiple thermoelectric elements 20 generate electricity, as shown in Figure 4. In Figure 4, currents I61, I62, I63, and I64 are the currents flowing through wiring 61, 62, 63, and 64.

[0076] The first joining member 70 is conductive. The first joining member 70 may be formed of any material such as silver paste or solder. Number E n The first joining member 70 is number E n Same number A n The first end 20H of the thermoelectric conversion element 20, and number E n Same number A n The first electrode 40 may be electrically connected to the first electrode 40. Number E n The first joining member 70 is number E n Same number A n The first end 20H of the thermoelectric conversion element 20 is numbered E n Same number A n It may extend along the first direction A1 to the first electrode 40.

[0077] For example, the first joining member 71 of No. 1 electrically connects the first end 21H of the first thermoelectric conversion element 21 and the first electrode 41 of No. 1. The first joining member 71 of No. 1 extends along the first direction A1 from the first end 21H of the first thermoelectric conversion element 21 to the first electrode 41 of No. 1. Also, the first joining member 72 of No. 2 electrically connects the first end 22H of the second thermoelectric conversion element 22 and the first electrode 42 of No. 2. The first joining member 72 of No. 2 extends along the first direction A1 from the first end 22H of the second thermoelectric conversion element 22 to the first electrode 42 of No. 2. Also, the first joining member 73 of No. 3 electrically connects the first end 23H of the third thermoelectric conversion element 23 and the first electrode 43 of No. 3. The first joining member 73 of No. 3 extends along the first direction A1 from the first end 23H of the third thermoelectric conversion element 23 to the first electrode 43 of No. 3. Also, the first joining member 74 of No. 4 electrically connects the first end 24H of the fourth thermoelectric conversion element 24 and the first electrode 44 of No. 4. The first joining member 74 of No. 4 extends along the first direction A1 from the first end 24H of the fourth thermoelectric conversion element 24 to the first electrode 44 of No. 4.

[0078] The electrical resistance value of the first joining member 70 may be greater than or equal to the electrical resistance value of the wiring 60. The first joining member 70 may be configured such that the electrical resistance value of the first joining member 70 is greater than or equal to the electrical resistance value of the wiring 60. By appropriately selecting the material of the first joining member 70, the electrical resistance value of the first joining member 70 may be made greater than or equal to the electrical resistance value of the wiring 60. As an example, when the material of the wiring 60 is copper, the material of the first joining member 70 may be silver paste.

[0079] The second joining member 80 has conductivity. The second joining member 80 may be formed of any member such as silver paste or solder. The second joining member 80 of number F n may electrically connect the second end 20L of the thermoelectric conversion element 20 of the same number A as number F n and the second electrode 50 of the same number C as number F n . The second joining member 80 of number F n may electrically connect the second end 20L of the thermoelectric conversion element 20 of the same number A as number F n and the second electrode 50 of the same number C as number F n . The second joining member 80 of number F n may electrically connect the second end 20L of the thermoelectric conversion element 20 of the same number A as number F nThe second end 20L of the thermoelectric conversion element 20 is numbered F n Same number C n It may extend along the first direction A1 to the second electrode 50.

[0080] For example, the first second connecting member 81 electrically connects the second end 21L of the first thermoelectric conversion element 21 to the first second electrode 51. The first second connecting member 81 extends along the first direction A1 from the second end 21L of the first thermoelectric conversion element 21 to the first second electrode 51. The second second connecting member 82 electrically connects the second end 22L of the second thermoelectric conversion element 22 to the second second electrode 52. The second second connecting member 82 extends along the first direction A1 from the second end 22L of the second thermoelectric conversion element 22 to the second second electrode 52. The third second connecting member 83 electrically connects the second end 23L of the third thermoelectric conversion element 23 to the third second electrode 53. The third second connecting member 83 extends along the first direction A1 from the second end 23L of the third thermoelectric conversion element 23 to the third second electrode 53. The fourth second connecting member 84 electrically connects the second end 24L of the fourth thermoelectric conversion element 24 to the fourth second electrode 54. The fourth second connecting member 84 extends along the first direction A1 from the second end 24L of the fourth thermoelectric conversion element 24 to the fourth second electrode 54.

[0081] The electrical resistance of the second joining member 80 may be greater than or equal to the electrical resistance of the wiring 60. The second joining member 80 may be configured such that its electrical resistance is greater than or equal to the electrical resistance of the wiring 60. By appropriately selecting the material of the second joining member 80, the electrical resistance of the second joining member 80 may be greater than or equal to the electrical resistance of the wiring 60. For example, if the material of the wiring 60 is copper, the material of the second joining member 80 may be silver paste.

[0082] Here, in the present embodiment, the thermal resistance value of the wiring 60 is equal to or greater than the thermal resistance value of the thermoelectric conversion element 20. As will be described below with reference to FIG. 5, the wiring 60 may be configured such that the thermal resistance value of the wiring 60 is equal to or greater than the thermal resistance value of the thermoelectric conversion element 20. By making the thermal resistance value of the wiring 60 equal to or greater than the thermal resistance value of the thermoelectric conversion element 20, the heat of the first end portion 20H of the thermoelectric conversion element 20 can be suppressed from being transmitted to the second end portion 20L of another thermoelectric conversion element 20 via the wiring 60. For example, the heat of the first end portion 21H of the thermoelectric conversion element 21 can be suppressed from being transmitted to the second end portion 22L of the thermoelectric conversion element 22 via the wiring 61. By suppressing the heat of the first end portion 20H of the thermoelectric conversion element 20 from being transmitted to the second end portion 20L of another thermoelectric conversion element 20, an increase in the temperature difference between the first end portion 20H and the second end portion 20L in the thermoelectric conversion element 20 can be suppressed. By suppressing an increase in the temperature difference between the first end portion 20H and the second end portion 20L, a decrease in the power generation of the thermoelectric conversion element 20 can be suppressed.

[0083] FIG. 5 is a diagram for explaining the setting of the thermal resistance values of the thermoelectric conversion element 2 and the wiring 60. Hereinafter, the length, width, and thickness of the thermoelectric conversion element 20 are each also described as "length L 20 ", "width W 20 ", and "thickness T 20 ". The length L 20 is the length of the thermoelectric conversion element 20 along the first direction A1 as shown in FIG. 1. The width W 20 is the width of the thermoelectric conversion element 20 along the second direction A2 as shown in FIG. 1. The thickness T 20 is the thickness of the thermoelectric conversion element 20 in the third direction A3 as shown in FIG. 2. Also, the length, width, and thickness of the wiring 60 are each also described as "length L 60 ", "width W 60 ", and "thickness T 60 ". The length L 60 is the length of the wiring 60 with the number D n as shown in FIG. 3 extending from the first electrode 40 with the number B n to the second electrode 50 with the number C n one larger than the number D n . The thickness T n+1 is as shown in FIG. 3. 60This is the thickness of the wiring 60 in the third direction A3 as shown in Figure 2. Width W 60 This is number D as shown in Figure 3. n Wiring 60 is number D n Same number B n First electrode 40 to number D n C is one number larger than C n+1 This is the width of the wiring 60 in the direction perpendicular to the direction extending to the second electrode 50 and the third direction A3.

[0084] The length L of the wiring 60 is set such that the thermal resistance of the wiring 60 is greater than or equal to the thermal resistance of the thermoelectric conversion element 20. 60 , width W 60 and thickness T 60 The length L of the wiring 60 may be set to satisfy the following equation (1). 60 , width W 60 and thickness T 60 It is acceptable to set this. (1 / κ 20 ) × {L 20 / (T 20 ×W 20 )}≦(1 / κ 60 ) × {L 60 / (T 60 ×W 60 )} Formula (1) In equation (1), the thermal conductivity κ 20 This is the thermal conductivity of the thermoelectric conversion element 20. Thermal conductivity κ 60 teeth, Wiring 60 This is the thermal conductivity.

[0085] Furthermore, the thermal resistance of the wiring 60 may be greater than or equal to the thermal resistance of the thermoelectric conversion element 20, and the electrical resistance of the wiring 60 may be less than or equal to the electrical resistance of the thermoelectric conversion element 20. In other words, the wiring 60 may be configured such that the thermal resistance of the wiring 60 is greater than or equal to the thermal resistance of the thermoelectric conversion element 20, and the electrical resistance of the wiring 60 is less than or equal to the electrical resistance of the thermoelectric conversion element 20. In this case, the length L of the wiring 60 may be such that equation (1) is satisfied while also satisfying equation (2) below. 60 , width W 60 and thickness T 60This setting may be configured such that the electrical resistance of the wiring 60 is less than or equal to the electrical resistance of the thermoelectric conversion element 20, thereby preventing the current flowing through the thermoelectric conversion module 1, as shown in Figure 4, from being limited by the electrical resistance of the wiring 60.

[0086] (1 / δ 20 ) × {L 20 / (T 20 ×W 20 )} ≧ (1 / δ 60 ) × {L 60 / (T 60 ×W 60 )} Formula (2) In equation (2), the electrical conductivity δ 20 This is the electrical conductivity of the thermoelectric conversion element 20. Electrical conductivity δ 60 teeth, Wiring 60 This is the electrical conductivity.

[0087] As can be seen from equations (1) and (2) above, the higher the thermal resistance of wiring 60, the higher the electrical resistance of wiring 60 may become. In other words, the higher the thermal resistance of wirings 61 to 63, the higher the electrical resistance of wirings 61 to 63, which may increase the overall electrical resistance of the thermoelectric conversion module 1. The sum of the electrical resistances of wirings 61 to 63 may be set to be about 10% of the overall electrical resistance of the thermoelectric conversion module 1. With this configuration, even if the electrical resistance of wirings 61 to 63 increases due to an increase in the thermal resistance of wirings 61 to 63, the sum of the electrical resistances of wirings 61 to 63 may be within the design error of the overall electrical resistance of the thermoelectric conversion module 1.

[0088] Examples of settings that satisfy the above equations (1) and (2) can be summarized in the table shown in Figure 5. In the table shown in Figure 5, the thermal conductivity κ of the thermoelectric conversion element 20 20 The value is 15 [W / mK], and the electrical conductivity δ of the thermoelectric conversion element 20 is 15 [W / mK]. 20 The voltage is 900 [S / cm]. Also, the length L of the thermoelectric conversion element 20. 20 , width W 20 and height H 20These dimensions are 15 [mm], 1.5 [mm], and 50 [μm], respectively. The thermal resistance of the thermoelectric conversion element 20 with this configuration is 13.3 [K / W]. The electrical resistance of the thermoelectric conversion element 20 is 2.222 [Ω].

[0089] In Example 1, the material of the wiring 60 is copper. When the material of the wiring 60 is copper, the thermal conductivity of the wiring 60 is κ. 60 The electrical conductivity of wiring 60 is 400 [W / mK], and the electrical conductivity δ 60 is 6 x 10 7 The value is [S / cm]. In Example 1, the length L of the wiring 60 is used. 60 , width W 60 and thickness T 60 These dimensions are set to 16 [mm], 0.15 [mm], and 15 [μm], respectively. The thermal resistance of the wiring 60 with this configuration is 17.8 [K / W]. The thermal resistance of the wiring 60, 17.8 [K / W], is greater than the thermal resistance of the thermoelectric conversion element 20, 13.3 [K / W]. In addition, the electrical resistance of the wiring 60 is 0.001 [Ω]. The electrical resistance of the wiring 60, 0.001 [Ω], is greater than the electrical resistance of the thermoelectric conversion element 20, 2.222 [Ω].

[0090] In Example 2, as in Example 1, the material of the wiring 60 is copper. In Example 2, the length L of the wiring 60 is 60 , width W 60 and thickness T 60 These dimensions are set to 16 [mm], 0.15 [mm], and 20 [μm], respectively. The thermal resistance of the wiring 60 with this configuration is 20 [K / W]. The thermal resistance of the wiring 60, 20 [K / W], is greater than the thermal resistance of the thermoelectric conversion element 20, 13.3 [K / W]. In addition, the electrical resistance of the wiring 60 is 0.001 [Ω]. The electrical resistance of the wiring 60, 0.001 [Ω], is greater than the electrical resistance of the thermoelectric conversion element 20, 2.222 [Ω].

[0091] Thus, in the thermoelectric conversion module 1, the thermal resistance of the wiring 60 is greater than or equal to the thermal resistance of the thermoelectric conversion element 20. With this configuration, as described above, it is possible to suppress the decrease in the temperature difference between the first end 20H and the second end 20L of the thermoelectric conversion element 20. By suppressing the decrease in the temperature difference between the first end 20H and the second end 20L, the decrease in the power generated by the thermoelectric conversion element 20 can be suppressed. Therefore, according to this embodiment, a thermoelectric conversion module 1 in which the decrease in power generated is suppressed can be provided.

[0092] (Manufacturing method for thermoelectric conversion modules) Figure 6 is a flowchart showing the manufacturing process of the thermoelectric conversion module 1 shown in Figure 1. As shown in Figure 6, the manufacturing process of the thermoelectric conversion module 1 according to this embodiment includes the arrangement step S10, the formation steps S11, S12, S13, S14, and the connection step S15, which will be described later. However, the manufacturing process of the thermoelectric conversion module 1 according to this embodiment is not limited to the manufacturing method described below.

[0093] <Placement process S10> The placement step S10 is a step of placing the metal foil 130 on the substrate 11, as shown in Figure 7. The metal foil 130 may be placed on the surface 11A of the substrate 11. The metal foil 130 may be bonded to the surface 11A of the substrate 11 with any adhesive having thermal conductivity. The metal foil 130 can become a wiring layer 30 after going through the formation step S11 and so on, which will be described later. The metal foil 130 may be any metal foil such as copper or aluminum.

[0094] <Formation step S11> Formation step S11 (wiring layer formation step) is a step in which a wiring layer 30 is formed on the surface 11A of the substrate 11 as shown in Figure 3 by patterning the metal foil 130. Known methods such as photolithography may be used for patterning the metal foil 130.

[0095] <Formation step S12> Forming step S12 (insulating layer formation step) is a step of forming an insulating layer 12 on the substrate 11 and the wiring layer 30, as shown in Figure 8. In forming step S12, the insulating layer 12 may be formed by applying an insulating material to the substrate 11 and the wiring layer 30 as shown in Figure 3. As shown in Figure 8, in forming step S12, the insulating layer 12 is formed on the substrate 11 and the wiring layer 30 such that the first electrode 40 and the second electrode 50 are exposed. The first electrode 40 and the second electrode 50 can also be said to be the ends of the wiring 60. In other words, forming step S12 can also be said to be a step of forming the insulating layer 12 on the substrate 11 and the wiring layer 30 such that only the ends of the wiring 60 are exposed from the insulating layer 12. The sheet substrate 10 is formed by forming the insulating layer 12 on the surface 11A of the substrate 11. In other words, the sheet substrate 10 has the substrate 11 and the insulating layer 12 formed on the surface 11A of the substrate 11.

[0096] <Formation step S13> Forming step S13 (element formation step) is a step of forming a thermoelectric conversion element layer on the insulating layer 12. The thermoelectric conversion element layer is a layer formed containing CNTs. The thermoelectric conversion element layer can become a thermoelectric conversion element 20 after going through the formation step S16 and the like, which will be described later. As described above, by using CNTs as the thermoelectric conversion material for forming the thermoelectric conversion element 20, the mechanical strength of the thermoelectric conversion module 1 can be further improved and the weight can be reduced. Because the thermoelectric conversion element layer is formed containing CNTs, a thermoelectric conversion module 1 can be manufactured that is both mechanically strong and lightweight.

[0097] In this embodiment, the thermoelectric conversion element layer is a CNT sheet 120 (carbon nanotube sheet) as shown in Figure 9. The CNT sheet 120 is formed containing CNTs. In this embodiment, the forming step S13 is the step of placing the CNT sheet 120 on the insulating layer 12. The CNT sheet 120 may be placed, for example, on the surface 12A of the insulating layer 12, i.e., on the surface 10A of the sheet substrate 10. The CNT sheet 120 may be bonded to the surface 12A of the insulating layer 12 by any adhesive sheet such as epoxy resin.

[0098] The CNT sheet 120 can become a thermoelectric element 20 after undergoing the formation process S14 described later. When forming the thermoelectric element 20 as a p-type thermoelectric element, a p-type CNT sheet 120 may be used. When forming the thermoelectric element 20 as an n-type thermoelectric element, an n-type CNT sheet 120 may be used. The thickness of the CNT sheet 120 in the third direction A3 may be about 50 [μm]. By making the thickness of the CNT sheet 120 about 50 [μm], the electrical characteristics of the thermoelectric element 20 can be realized. For example, the amount of power generated by the thermoelectric element 20 can be ensured to a certain extent as an electrical characteristic of the thermoelectric element 20.

[0099] In addition, in the formation step S13, instead of the CNT sheet 120, a CNT coating film formed by a coating method using a CNT dispersion may be placed on the insulating layer 12. However, with a CNT coating film, problems may arise such as a decrease in the conductivity of the CNT coating film or a decrease in the self-supporting ability of the CNT coating film due to the aggregation of CNTs during the drying process of the CNT dispersion. Furthermore, in order to produce a CNT coating film with a thickness of 50 [μm] by the coating method, it is necessary to add a binder to the CNT dispersion. However, adding a binder to the CNT dispersion may result in a decrease in the conductivity of the CNT coating film. These problems can be solved by using the CNT sheet 120 in the formation step S13.

[0100] The CNT sheet 120 is not particularly limited, and the one described in Japanese Patent Application No. 2018-065290 can be used. The CNT sheet 120 may include bundles formed by the entanglement of multiple single-walled carbon nanotubes. The thickness of the bundle may be 1 [μm] or less. By making the thickness of the bundle 1 [μm] or less, the fuzzing of the cut surface of the thermoelectric conversion element 20 by the laser in the formation process S14 described later can be reduced. By reducing the fuzzing of the thermoelectric conversion element 20, the occurrence of short circuits caused by the fuzzing of the thermoelectric conversion element 20 can be suppressed.

[0101] In the forming step S13, depending on the state of the CNT sheet 120, a cover sheet may be placed on the CNT sheet 120, or a resin material may be applied to the CNT sheet 120, in order to reduce laser damage in the forming step S14 described later.

[0102] <Formation step S14> Forming step S14 (thermoelectric element formation step) is a step in which the thermoelectric element layer, i.e., the CNT sheet 120, is cut along the first direction A1 to form a plurality of thermoelectric elements 20 arranged in the first direction A1. By cutting the CNT sheet 120 along the first direction A1, a gap s1 is formed as shown in Figure 10. The gap s1 can separate two adjacent thermoelectric elements 20 in the second direction A2.

[0103] The formation step S14 may be carried out using a laser. In the formation step S14, the CNT sheet 120 may be cut along the first direction A1 by the laser. The laser may be irradiated toward the CNT sheet 120 from the third direction A3 side. By cutting the CNT sheet 120 along the first direction A1 by the laser, a gap s1 as shown in Figure 10 may be formed.

[0104] In the formation step S14, the CNT sheet 120 may be cut along the first direction A1 using a UV (Ultra Violet) laser, a nanosecond laser, or a femtosecond laser. However, the laser used in the formation step S14 is not limited to these lasers. Any laser capable of cutting only the CNT sheet 120 may be used in the formation step S14. For example, if a UV laser with an output of 5 [W] is used, the UV laser may scan the area corresponding to the gap s1 in the CNT sheet 120 along the first direction A1 about ten to several tens of times.

[0105] Here, the thermal conductivity of the CNT sheet 120 in the in-plane direction can be about 100 times that of the CNT sheet 120 in the thickness direction. For example, the thermal conductivity of the CNT sheet 120 in the second direction A2 can be about 100 times that of the CNT sheet 120 in the third direction A3. Therefore, if a heating laser such as a YAG (Yttrium Aluminum Garnet) laser is used in the formation process S14, the gap s1 may widen in the second direction A2 when the CNT sheet 120 is cut along the first direction A1 by the heating laser. If the thickness of the CNT sheet 120 in the third direction A3 is about 50 [μm] and a heating laser is used in the formation process S14, the gap s1 may widen by about 5 mm in the second direction A2.

[0106] In contrast, if a laser such as a UV laser, nanosecond laser, or femtosecond laser is used in the formation process S14, the heat generated by the laser can be reduced. By reducing the heat generated by the laser in the formation process S14, the widening of the gap s1 in the second direction A2 can be suppressed. By suppressing the widening of the gap s1 in the second direction A2, the density of thermoelectric elements 20 in the thermoelectric conversion module 1 can be increased. By increasing the density of thermoelectric elements 20 in the thermoelectric conversion module 1, the thermoelectric conversion module 1 can be miniaturized.

[0107] Furthermore, the spot diameter of the UV laser can be smaller than that of other lasers. For example, the spot diameter of the UV laser can be as small as 8 μm. The small spot diameter of the UV laser allows for a more focused beam of light onto the CNT sheet 120. When a UV laser is used in the formation process S14, the focus of the UV laser onto the CNT sheet 120 is reduced, and the heat generated by the UV laser is also reduced, which can improve the processing accuracy of the patterning of the CNT sheet 120. For example, the width of the gap s1 along the second direction A2 can be reduced from 0.05 mm to 0.1 mm. The improved processing accuracy of the patterning of the CNT sheet 120 allows for a higher density of thermoelectric elements 20 in the thermoelectric conversion module 1, and thus the thermoelectric conversion module 1 can be made smaller.

[0108] By using a laser in the formation process S14, the patterning of the CNT sheet 120 using the laser can be performed under computer control. This configuration can simplify the formation process S14.

[0109] <Connection process S15> The connection step S15 is a process of electrically connecting the first electrode 40 and the second electrode 50 exposed from the insulating layer 12 to both ends of the multiple thermoelectric conversion elements 20, i.e., the first end 20H and the second end 20L, so that all of the multiple thermoelectric conversion elements 20 are electrically connected in series. Here, the first electrode 40 and the second electrode 50 can also be said to be both ends of the wiring 60. In other words, the connection step S15 can also be said to be a process of electrically connecting both ends of the wiring 60 exposed from the insulating layer 12 to both ends of the multiple thermoelectric conversion elements 20 so that all of the multiple thermoelectric conversion elements 20 are electrically connected in series.

[0110] In this embodiment, connection step S15 is a step of applying silver paste from the first end 20H of the thermoelectric conversion element 20 to the first electrode 40, as shown in Figure 1, and also applying silver paste from the second end 20L of the thermoelectric conversion element 20 to the second electrode 50.

[0111] In connection step S15, silver paste is applied from the first end 20H to the first electrode 40, thereby electrically connecting the first end 20H of the thermoelectric conversion element 20 and the first electrode 40. After drying, this silver paste can become the first joining member 70.

[0112] In connection step S15, silver paste is applied from the second end 20L to the second electrode 50, thereby electrically connecting the second end 20L of the thermoelectric conversion element 20 to the second electrode 50. After drying, this silver paste can become the second joining member 80.

[0113] As described above, in the manufacturing method of the thermoelectric conversion module 1 according to this embodiment, in the forming step S14, the CNT sheet 120 can be cut along the first direction A1 by a UV laser, nanosecond laser, or femtosecond laser. With this configuration, as described above, the widening of the gap s1 shown in Figure 10 in the second direction A2 can be suppressed. By suppressing the widening of the gap s1 in the second direction A2, the density of the thermoelectric conversion elements 20 in the thermoelectric conversion module 1 can be increased, and the thermoelectric conversion module 1 can be miniaturized.

[0114] (Variations in wiring) The configuration in which the thermal resistance value of the wiring 60 is equal to or greater than the thermal resistance value of the thermoelectric conversion element 20 is not limited to the configuration described above, as shown in Figure 5.

[0115] For example, by adopting wiring 160A as shown in Figure 11, the thermal resistance value of wiring 160A may be set to be greater than or equal to the thermal resistance value of the thermoelectric conversion element 20. Wiring 160A includes a plurality of holes 160a. The thermal resistance value of wiring 160A may be higher than when wiring 160A does not include holes 160a due to the inclusion of holes 160a. The number of holes 160a included in wiring 160A may be set appropriately so that the thermal resistance value of wiring 160A is greater than or equal to the thermal resistance value of the thermoelectric conversion element 20. Furthermore, the number of holes 160a included in wiring 160A may be set appropriately so that the thermal resistance value of wiring 160A is greater than or equal to the thermal resistance value of the thermoelectric conversion element 20, and the electrical resistance value of wiring 160A is less than or equal to the electrical resistance value of the thermoelectric conversion element 20.

[0116] For example, by adopting wiring 160B as shown in Figure 12, the thermal resistance value of wiring 160B may be set to be less than or equal to the thermal resistance value of the thermoelectric conversion element 20. Wiring 160B extends in a zigzag pattern. Due to the zigzag pattern of wiring 160B, the length of wiring 160B may be longer than if it were not zigzag. Therefore, the thermal resistance value of wiring 160B may be higher than if it were not zigzag. The length of the zigzag extension of wiring 160B may be set appropriately so that the thermal resistance value of wiring 160B is greater than or equal to the thermal resistance value of the thermoelectric conversion element 20. The length of the zigzag extension of the wiring 160B may be set appropriately such that the thermal resistance of the wiring 160B is greater than or equal to the thermal resistance of the thermoelectric conversion element 20, and the electrical resistance of the wiring 160B is less than or equal to the electrical resistance of the thermoelectric conversion element 20.

[0117] (Second Embodiment) Figure 13 is an external view of a thermoelectric conversion module 201 according to a second embodiment of the present invention. Figure 14 is a cross-sectional view of the thermoelectric conversion module 201 along the L2-L2 line shown in Figure 13. Figure 15 is a cross-sectional view of the thermoelectric conversion module 201 along the L3-L3 line shown in Figure 13. Figure 16 is a diagram showing the wiring layer 230 shown in Figure 14. The configuration shown in Figure 16 corresponds to the configuration after the wiring layer 230 formation process shown in Figure 18, which will be described later. Figure 17 is a diagram showing the current path in the thermoelectric conversion module shown in Figure 13.

[0118] The thermoelectric conversion module 201 can be placed on the heat source 2, similar to the first embodiment. The thermoelectric conversion module 201 includes a first edge portion 201H and a second edge portion 201L on the sheet substrate 210 described later. The first edge portion 201H and the second edge portion 201L face each other. The first edge portion 201H may be located near the heat source 2 when the thermoelectric conversion module 201 is placed on the heat source 2, similar to the first edge portion 1H shown in Figure 1. The second edge portion 201L may be located away from the heat source 2 when the thermoelectric conversion module 201 is placed on the heat source 2, similar to the second edge portion 1L shown in Figure 1.

[0119] The temperature near the first edge 201H can be higher than the temperature near the second edge 201L, similar to the temperature near the first edge 1H as shown in Figure 1. In other words, the temperature near the second edge 201L can be lower than the temperature near the first edge 201H.

[0120] In the second embodiment, as in the first embodiment, the first direction A1, the second direction A2, and the third direction A3 may be adopted. In the second embodiment, the first direction A1 is the direction in which the first edge 201H and the second edge 201L face each other. The first direction A1 is the direction from the second edge 201L toward the first edge 201H. In this embodiment, the third direction A3 is the direction from the back of the page in Figure 13 toward the front of the page.

[0121] As shown in Figure 13, the shape of the thermoelectric conversion module 201 as viewed from the third direction A3 is a rectangular or other quadrilateral shape. As shown in Figures 13 and 14, the thermoelectric conversion module 201 comprises a sheet substrate 210, thermoelectric conversion elements 221, 222, 223, 224, 225, 226, 227, 228, a wiring layer 230, first joining members 271, 272, 273, 274, 275, 276, 277, 278, and second joining members 281, 282, 283, 284, 285, 286, 287, 288. As shown in Figure 14, the wiring layer 230 is located inside the sheet substrate 210. The wiring layer 230 may be located on the back surface 212B side of the insulating layer 212, which will be described later. As shown in Figure 16, the wiring layer 230 has first electrodes 241, 242, 243, 244, 245, 246, 247, 248, second electrodes 251, 252, 253, 254, 255, 256, 257, 258, and wiring 261, 262, 263, 264, 265, 266, 267.

[0122] Hereafter, unless otherwise specified, thermoelectric elements 221 to 228 will be collectively referred to as "thermoelectric elements 220". Figure 13 shows a thermoelectric module 201 equipped with eight thermoelectric elements 220. However, the number of thermoelectric elements 220 in the thermoelectric module 201 may be any number.

[0123] Hereafter, when the first electrodes 241 to 248 are not specifically distinguished, they will be collectively referred to as "first electrode 240". Similarly, when the second electrodes 251 to 258 are not specifically distinguished, they will be collectively referred to as "second electrode 250". Furthermore, when the wirings 261 to 267 are not specifically distinguished, they will be collectively referred to as "wiring 260". Figure 16 shows a wiring layer 230 having eight first electrodes 240, eight second electrodes 250, and seven wirings 260. However, the number of first electrodes 240, the number of second electrodes 250, and the number of wirings 260 in the wiring layer 230 may correspond to the number of thermoelectric elements 220 provided in the thermoelectric conversion module 201.

[0124] Hereafter, unless otherwise specified, the first joining members 271 to 278 will be collectively referred to as "first joining member 270." Similarly, unless otherwise specified, the second joining members 281 to 288 will be collectively referred to as "second joining member 280." Figure 13 shows a thermoelectric conversion module 201 comprising eight first joining members 270 and eight second joining members 280. However, the number of first joining members 270 and the number of second joining members 280 in the thermoelectric conversion module 201 may correspond to the number of thermoelectric conversion elements 220 in the thermoelectric conversion module 201.

[0125] Hereinafter, as in the first embodiment, the numbers assigned to the multiple thermoelectric conversion elements 20 of the thermoelectric conversion module 201 along the second direction A2 are "Number A n It is also written as (n is an integer). Number A n The minimum value (n=1) is assumed to be 1. Number A n The numbers A will be incremented one by one along the second direction A2. n These are numbers 1, 2, 3, 4, 5, 6, 7, and 8.

[0126] Hereinafter, as in the first embodiment, the numbers assigned to the multiple first electrodes 240 of the wiring layer 230 along the second direction A2 are "Number B n It is also written as (where n is an integer). Number B n The minimum value (n=1) is assumed to be 1. Number B n The numbers B are assumed to increase one by one along the second direction A2. The numbers B assigned to the first electrodes 241, 242, 243, 244, 245, 246, 247, 248 along the second direction A2. n These are numbers 1, 2, 3, 4, 5, 6, 7, and 8.

[0127] Hereinafter, as in the first embodiment, the numbers assigned to the multiple second electrodes 250 of the wiring layer 230 along the second direction A2 are "Number C n It is also written as (where n is an integer). Number C n The minimum value (n=1) is assumed to be 1. Number C n The numbers C are assigned to the second electrodes 251, 252, 253, 254, 255, 256, 257, and 258 along the second direction A2. n These are numbers 1, 2, 3, 4, 5, 6, 7, and 8.

[0128] Hereinafter, as in the first embodiment, the numbers assigned to the multiple wires 260 of the wiring layer 230 along the second direction A2 are "Number D n It is also written as (where n is an integer). Number D n The minimum value (n=1) is assumed to be 1. Number D n The numbers will be incremented one by one along the second direction A2. Numbers D are assigned to wiring 261, 262, 263, 264, 265, 266, 267 along the second direction A2. n These are numbers 1, 2, 3, 4, 5, 6, and 7.

[0129] Hereinafter, as in the first embodiment, the numbers assigned to the multiple first joining members 270 of the thermoelectric conversion module 201 along the second direction A2 are "Number E n It is also written as (where n is an integer). Number E nThe minimum value (n=1) is assumed to be 1. Number E n The numbers E will be incremented one by one along the second direction A2. n These are numbers 1, 2, 3, 4, 5, 6, and 7.

[0130] Hereinafter, as in the first embodiment, the numbers assigned to the multiple second joining members 280 of the thermoelectric conversion module 201 along the second direction A2 are "Number F n It is also written as (where n is an integer). Number F n The minimum value (n=1) is assumed to be 1. Number F n The numbers F will be incremented one by one along the second direction A2. n These are numbers 1, 2, 3, 4, 5, 6, and 7.

[0131] The sheet substrate 210 is insulating. The sheet substrate 210 may be flexible. Any insulating material can be used to form the sheet substrate 210, without any particular limitations. The shape of the sheet substrate 210 as viewed from the third direction A3 is a rectangle or other quadrilateral. The sheet substrate 210 includes a first edge portion 201H and a second edge portion 201L. The sheet substrate 210 may be parallel to the plane including the first direction A1 and the second direction A2.

[0132] As shown in Figure 14, the sheet substrate 210 includes a front surface 210A and a back surface 210B. The front surface 210A and the back surface 210B are opposite each other. The front surface 210A is the surface of the sheet substrate 210 facing the third direction A3. The back surface 210B is the surface of the sheet substrate 210 facing the opposite direction from the third direction A3.

[0133] As shown in Figure 14, the sheet substrate 210 has a substrate 211 and an insulating layer 212.

[0134] The substrate 211 is insulating. The substrate 211 may be flexible. The material of the substrate 211 may be the same as the material of the substrate 11 as shown in Figure 2. The shape of the substrate 11 as viewed from the third direction A3 is a rectangle or other quadrilateral. The substrate 211 may be parallel to the first direction A1 and the second direction A2.

[0135] The substrate 211 includes a front surface 211A and a back surface 211B. The front surface 211A and the back surface 211B are opposite each other. The front surface 211A is the surface of the substrate 211 facing the third direction A3. The back surface 211B is the surface of the substrate 211 facing the opposite direction of the third direction A3. The back surface 211B may correspond to the back surface 210B of the sheet substrate 210.

[0136] As shown in Figure 14, the substrate 211 includes openings 211a, 211b, 211c, and 211d. As shown in Figure 13, the positions of each of the openings 211a to 211d as viewed from the third direction A3 may correspond to the positions of the first electrodes 242, 244, 246, and 248. As shown in Figure 15, the substrate 211 includes openings 211e, 211f, 211g, and 211h. As shown in Figure 13, the positions of each of the openings 211e to 211h as viewed from the third direction A3 may correspond to the positions of the second electrodes 252, 254, 256, and 258. The shape of the openings 211a to 211h as viewed from the third direction A3 is circular. However, the shape of the openings 211a to 211h may be any shape.

[0137] The insulating layer 212 has insulating properties. The insulating layer 212 may be flexible. The material of the insulating layer 212 may be the same as the material of the insulating layer 12 as shown in Figure 2. The shape of the insulating layer 12 as viewed from the third direction A3 is a rectangle or other quadrilateral. The insulating layer 212 may be parallel to the plane including the first direction A1 and the second direction A2.

[0138] The insulating layer 212 includes a front surface 212A and a back surface 212B. The front surface 212A and the back surface 212B are opposite each other. The front surface 212A is the surface of the insulating layer 212 that faces the third direction A3. The front surface 212A may correspond to the front surface 210A of the sheet substrate 210. The back surface 212B is the surface of the insulating layer 212 that faces the direction opposite to the third direction A3.

[0139] As shown in Figure 14, the insulating layer 212 includes openings 212a, 212b, 212c, and 212d. As shown in Figure 13, the positions of each of the openings 212a to 212d as viewed from the third direction A3 may correspond to the positions of the first electrodes 241, 243, 245, and 247. As shown in Figure 15, the insulating layer 212 includes openings 212e, 212f, 212g, and 212h. As shown in Figure 13, the positions of each of the openings 212e to 212h as viewed from the third direction A3 may correspond to the positions of the second electrodes 251, 253, 255, and 257. The shape of the openings 212a to 212h as viewed from the third direction A3 is circular. However, the shape of the openings 212a to 212h may be any shape.

[0140] All of the thermoelectric elements 221 to 228 are either p-type thermoelectric elements or n-type thermoelectric elements. The thermoelectric material for forming the thermoelectric element 220 is not particularly limited, and the thermoelectric material described above in the first embodiment can be used. As described above in the first embodiment, all of the thermoelectric elements 221 to 228 may be p-type thermoelectric elements, for example, if the thermoelectric material for forming the thermoelectric element 220 is an organic material such as CNT. As described above in the first embodiment, all of the thermoelectric elements 221 to 228 may be formed including CNT.

[0141] As shown in Figure 13, the thermoelectric element 220 extends along the first direction A1. The shape of the thermoelectric element 220 as viewed from the third direction A3 is elongated, such as a rectangle. The longitudinal direction of the thermoelectric element 220 is along the first direction A1. The longitudinal direction of the thermoelectric element 220 may be parallel to the first direction A1. The shapes of the thermoelectric elements 221 to 228 may be the same. As shown in Figures 14 and 15, the cross-sectional shape of the thermoelectric element 220 may be thin film.

[0142] Multiple thermoelectric conversion elements 220 are formed not only on the surface 210A of the sheet substrate 210, but also on the back surface 210B of the sheet substrate 210. In this embodiment, number A n Thermoelectric conversion elements 220 with an odd number of A are formed on the surface 210A. For example, thermoelectric conversion elements 221, 223, 225, and 227 are formed on the surface 210A. In this embodiment, number A n Thermoelectric conversion elements 220, which are numbered as corners, are formed on the back surface 210B. For example, thermoelectric conversion elements 222, 224, 226, and 228 are formed on the back surface 210B. Number A n Thermoelectric conversion elements 220 with odd numbers are arranged on the surface 212A side of the insulating layer 212, number A n The thermoelectric conversion elements 220, which are the corner elements, may be located on the back side 211B of the substrate 211.

[0143] By forming thermoelectric elements 20 on both the front surface 210A and the back surface 210B of the sheet substrate 210 in this way, the density of thermoelectric elements 220 in the thermoelectric module 201 can be increased. By increasing the density of thermoelectric elements 220 in the thermoelectric module 201, the thermoelectric module 201 can be miniaturized.

[0144] Thermoelectric elements 221 to 228 are arranged so as to be aligned along the second direction A2. In this embodiment, thermoelectric elements 221, 223, 225, and 227 may be arranged on the surface 210A of the sheet substrate 210 with gaps between them along the second direction A2. The width of these gaps may be arbitrary as long as insulation is ensured between two adjacent thermoelectric elements 220 in the second direction A2. Furthermore, thermoelectric elements 222, 224, 226, and 228 may be arranged on the back surface 210B of the sheet substrate 210 with gaps between them along the second direction A2. The width of these gaps may be arbitrary as long as insulation is ensured between two adjacent thermoelectric elements 220 in the second direction A2.

[0145] As shown in Figure 13, when the sheet substrate 210 is viewed from above, that is, from the third direction A3, at least a portion of each thermoelectric conversion element 220 formed on the surface 210A overlaps with at least a portion of each thermoelectric conversion element 220 formed on the back surface 210B. By having at least a portion of each thermoelectric conversion element 220 located on the surface 210A as viewed from the third direction A3 overlap with at least a portion of each thermoelectric conversion element 220 located on the back surface 210B, the thermoelectric conversion module 201 can be miniaturized. However, when viewed from the third direction A3, at least a portion of each thermoelectric conversion element 220 formed on the surface 210A does not necessarily have to overlap with at least a portion of each thermoelectric conversion element 220 formed on the back surface 210B.

[0146] The thermoelectric element 220, like the thermoelectric element 20 shown in Figure 1, includes a first end 220H and a second end 220L in the first direction A1. The first end 220H is located toward the first edge 201H of the thermoelectric module 201. The second end 220L is located toward the second edge 201L of the thermoelectric module 201. The first ends 220H of thermoelectric elements 221 to 228 are also referred to as "first end 221H", "first end 222H", "first end 223H", "first end 224H", "first end 225H", "first end 226H", "first end 227H", and "first end 228H", respectively. Furthermore, the second ends 220L of the thermoelectric conversion elements 221 to 228 are also referred to as "second end 221L", "second end 222L", "second end 223L", "second end 224L", "second end 225L", "second end 226L", "second end 227L", and "second end 228L", respectively. Note that in the configuration shown in Figure 13, the positions of the first ends 221H to 228H in the first direction A1 are different. However, the positions of the first ends 221H to 228H in the first direction A1 may be the same. Also, in the configuration shown in Figure 1, the positions of the second ends 221L to 228L in the first direction A1 are different. However, the positions of the second ends 221L to 228L in the first direction A1 may be the same.

[0147] Viewed from the third direction A3, the positions of the first ends 222H, 224H, 226H, and 228H in the first direction A1 may be different from or the same as the positions of the first ends 221H, 223H, 225H, and 227H in the first direction A1, depending on the configuration of the wiring layer 230.

[0148] The thermoelectric element 220, like the thermoelectric element 20 shown in Figure 1, can generate electricity when a temperature difference is generated between its first end 220H and its second end 220L. When the thermoelectric element 220 generates electricity, a current can flow through it. For example, as shown in Figure 17, currents I221, I222, I223, I224, I225, I226, I227, and I228 can flow through each of the thermoelectric elements 221, 222, 223, 224, 225, 226, 227, and 228 in the first direction A1.

[0149] The shape of each of the thermoelectric elements 221 to 228 may be a rectangle of approximately the same dimensions, as described above in the first embodiment. As described above in the first embodiment, the thermoelectric elements 221 to 228 may be configured by adjusting the length along the first direction A1, the width along the second direction A2, and the thickness in the third direction A3 of each thermoelectric element 221 to 228 so that the electrical resistance values ​​of each of the thermoelectric elements 221 to 228 are approximately the same.

[0150] The first electrode 240, the second electrode 250, and the wiring 260 may be formed from the same conductive material or from different conductive materials. The conductive material used to form each of the first electrode 240, the second electrode 250, and the wiring 260 is not particularly limited, and any metal such as copper or aluminum can be used. Hereinafter, the first electrode 240, the second electrode 250, and the wiring 260 will be assumed to be formed from the same conductive material.

[0151] The first electrode 240 may be located on the surface 211A of the substrate 211. As shown in Figure 13, the first electrodes 241 to 248 may be arranged along the second direction A2 with gaps between them. The width of these gaps may be arbitrary, as long as insulation can be ensured between two adjacent first electrodes 40 in the second direction A2.

[0152] At least a portion of the first electrode 240 may be exposed from the sheet substrate 210, i.e., the substrate 211 or the insulating layer 212. At least a portion of the first electrode 240 exposed from the substrate 211 or the insulating layer 212 may be electrically connected to the first end 220H of the thermoelectric conversion element 220 by the first bonding member 270.

[0153] In this embodiment, as shown in Figure 14, number B n At least a portion of the first electrode 240 where the number is odd may be exposed through the opening in the insulating layer 212. For example, number B n At least a portion of the first electrode 241 where the number is odd is exposed through the opening 212a of the insulating layer 212. Also, number Bn At least a portion of the first electrode 243, where the number is odd, is exposed through the opening 212b of the insulating layer 212. Number B n At least a portion of the first electrode 245, where the number is odd, is exposed through the opening 212c of the insulating layer 212. Number B n At least a portion of the first electrode 247 where the number is odd is exposed through the opening 212d of the insulating layer 212.

[0154] As shown in Figure 14, number B is exposed from the opening in the insulating layer 212. n At least a portion of the first electrode 240 where the number is odd is number B n Same number A n At the first end 220H of the thermoelectric conversion element 220, number B n Same number E n The first connecting member 270 may be electrically connected. For example, number B n At least a portion of each of the first electrodes 241, 243, 245, and 247 whose numbers are odd is exposed through each of the openings 212a to 212d of the insulating layer 212. At least a portion of the first electrode 241 exposed through opening 212a is electrically connected to the first end 221H of the thermoelectric element 221 by the first bonding member 271. At least a portion of the third first electrode 243 exposed through opening 212b is electrically connected to the first end 223H of the thermoelectric element 223 by the first bonding member 273. At least a portion of the fifth first electrode 245 exposed through opening 212c is electrically connected to the first end 225H of the thermoelectric element 225 by the first bonding member 275. At least a portion of the first electrode 247 of the seventh electrode, exposed through the opening 212d, is electrically connected to the first end 227H of the thermoelectric conversion element 227 of the seventh electrode, by the first bonding member 277 of the seventh electrode.

[0155] In this embodiment, as shown in Figure 14, number B n At least a portion of the first electrode 240, where the number is even, may be exposed from the opening in the substrate 211. For example, number B n At least a portion of the first electrode 242, where the number is even, is exposed through the opening 211a of the substrate 211. Also, number Bn At least a portion of the first electrode 244, where the number is even, is exposed through the opening 211b of the substrate 211. n At least a portion of the first electrode 246, where the number is even, is exposed through the opening 211c of the substrate 211. Also, number B n At least a portion of the first electrode 248, where the number is even, is exposed through the opening 211d of the substrate 211.

[0156] As shown in Figure 14, number B is exposed from the opening of the substrate 211. n At least a portion of the first electrode 240 where the number is even is number B n Same number A n At the first end 220H of the thermoelectric conversion element 220, number B n Same number E n The first connecting member 270 may be electrically connected. For example, number B n At least a portion of each of the first electrodes 242, 244, 246, and 248 whose number is even is exposed through each of the openings 211a to 211d of the substrate 211. At least a portion of the second first electrode 242 exposed through opening 211a is electrically connected to the first end 222H of the second thermoelectric element 222 by the second first bonding member 272. At least a portion of the fourth first electrode 244 exposed through opening 211b is electrically connected to the first end 224H of the fourth thermoelectric element 224 by the fourth first bonding member 274. At least a portion of the sixth first electrode 246 exposed through opening 211c is electrically connected to the first end 226H of the sixth thermoelectric element 226 by the sixth first bonding member 276. At least a portion of the first electrode 248 no. 8, exposed through the opening 211d, is electrically connected to the first end 222H of the thermoelectric conversion element 228 no. 8 by the first bonding member 278 no. 8.

[0157] As shown in Figure 13, number B n The position of the first electrode 240 in the second direction A2 is number B n Same number A n The position of the thermoelectric conversion element 220 in the second direction A2 may be the same as that of the thermoelectric conversion element 220. Number B n The first electrode 240 is number Bn Same number A n The first edge portion 201H of the thermoelectric conversion module 1 may be located closer to the first end portion 220H of the thermoelectric conversion element 220 than the first end portion 220H of the thermoelectric conversion element 220. Number B n The first electrode 240 is number B n Same number A n The thermoelectric conversion element 220 may be located between the first end 220H and the first edge 201H. For example, each of the first electrodes 241, 243, 245, and 247 is located between each of the first ends 221H, 223H, 225H, and 227H and the first edge 201H. Also, each of the first electrodes 242, 244, 246, and 248 is located between each of the first ends 222H, 224H, 226H, and 228H and the first edge 201H.

[0158] The electrical resistance of the first electrode 240 may be greater than or equal to the electrical resistance of the wiring 260. As described above in the first embodiment, the first electrode 240 may be configured such that its electrical resistance is greater than or equal to the electrical resistance of the wiring 260.

[0159] As described above in the first embodiment, an extraction wiring for extracting power generated by the thermoelectric conversion module 201 may be electrically connected to any of the multiple first electrodes 240. In this embodiment, the extraction wiring may be electrically connected to the first electrode 248.

[0160] The second electrode 250 may be located on the surface 211A of the substrate 211. As shown in Figure 13, the second electrodes 251 to 258 may be arranged along the second direction A2 with gaps between them. The width of these gaps may be arbitrary, as long as insulation can be ensured between two adjacent second electrodes 50 in the second direction A2.

[0161] At least a portion of the second electrode 250 may be exposed from the sheet substrate 210, i.e., the substrate 211 or the insulating layer 12. At least a portion of the second electrode 250 exposed from the substrate 211 or the insulating layer 12 may be electrically connected to the second end 220L of the thermoelectric conversion element 220 by the second bonding member 280.

[0162] In this embodiment, as shown in FIG. 15, at least a part of the second electrode 250 with the number C n being odd may be exposed from the opening of the insulating layer 212. For example, at least a part of the second electrode 251 with the number C n being odd is exposed from the opening 212e of the insulating layer 212. Also, at least a part of the second electrode 253 with the number C n being odd is exposed from the opening 212f of the insulating layer 212. Also, at least a part of the second electrode 255 with the number C n being odd is exposed from the opening 212g of the insulating layer 212. Also, at least a part of the second electrode 257 with the number C n being odd is exposed from the opening 212h of the insulating layer 212.

[0163] As shown in FIG. 15, at least a part of the second electrode 250 with the number C n being odd exposed from the opening of the insulating layer 212 is electrically connected to the second end 220L of the thermoelectric conversion element 220 with the same number A n by the second joining member 280 with the same number B n and the same number F n . For example, at least a part of each of the second electrodes 251, 253, 255, and 257 with the number C n being odd is exposed from each of the openings 212e to 212h of the insulating layer 212. At least a part of the first second electrode 251 exposed from the opening 212e is electrically connected to the second end 221L of the first thermoelectric conversion element 221 by the first second joining member 281. At least a part of the third second electrode 253 exposed from the opening 212f is electrically connected to the second end 223L of the third thermoelectric conversion element 223 by the third second joining member 283. At least a part of the fifth second electrode 255 exposed from the opening 212g is electrically connected to the second end 225L of the fifth thermoelectric conversion element 225 by the fifth second joining member 285. At least a part of the seventh second electrode 257 exposed from the opening 212h is electrically connected to the second end 227L of the seventh thermoelectric conversion element 227 by the seventh second joining member 287.

[0164] ​​ In this embodiment, as shown in FIG. 15, at least a part of the second electrode 250 where the number C n is an even number may be exposed from the substrate 211. For example, at least a part of the second electrode 252 where the number C n is an even number is exposed from the opening 211e of the substrate 211. At least a part of the second electrode 254 where the number C n is an even number is exposed from the opening 211f of the substrate 211. At least a part of the second electrode 256 where the number C n is an even number is exposed from the opening 211g of the substrate 211. At least a part of the second electrode 258 where the number C n is an even number is exposed from the opening 211h of the substrate 211.

[0165] As shown in FIG. 15, at least a part of the second electrode 250 where the number C exposed from the opening of the substrate 211 n ​​​​​​​​​​​​​​As shown in Figure 13, number C n The position of the second electrode 250 in the second direction A2 is number C n Same number A n The position of the thermoelectric conversion element 220 in the second direction A2 may be the same as that of the thermoelectric conversion element C. n The second electrode 250 is number C n Same number A n The second edge portion 201L of the thermoelectric conversion module 1 may be located closer to the second end portion 220L of the thermoelectric conversion element 220 than the second end portion 220L of the thermoelectric conversion element 220. Number C n The second electrode 250 is number C n Same number A n The second electrode may be located between the second end 220L and the second edge 201L of the thermoelectric conversion element 220. For example, each of the second electrodes 251, 253, 255, and 257 is located between each of the second ends 221L, 223L, 225L, and 227L and the second edge 201L. Also, each of the second electrodes 252, 254, 256, and 258 is located between each of the second ends 222L, 224L, 226L, and 228L and the second edge 201L.

[0167] The electrical resistance of the second electrode 250 may be greater than or equal to the electrical resistance of the wiring 260. As described above in the first embodiment, the second electrode 250 may be configured such that its electrical resistance is greater than or equal to the electrical resistance of the wiring 260.

[0168] As described above in the first embodiment, an extraction wiring for extracting power generated by the thermoelectric conversion module 201 may be electrically connected to any of the multiple second electrodes 250. In this embodiment, the extraction wiring may be electrically connected to the second electrode 251.

[0169] As shown in Figure 16, the wiring 260 may be located within the sheet substrate 210. As shown in Figure 16, the wiring 260 may be located on the surface 211A of the substrate 211 together with the first electrode 240 and the second electrode 250. The wiring 260 may be located on the back surface 212B side of the insulating layer 212. The wiring 260 may be located on the back surface 212B side of the insulating layer 212 together with the first electrode 240 and the second electrode 250.

[0170] The wiring 260 electrically connects adjacent thermoelectric elements 220 in the second direction A2 in series at both ends of the thermoelectric elements 220, i.e., the first end 220H and the second end 220L. In this embodiment, the wiring 260 electrically connects a first electrode 240 electrically connected to the first end 220H of one thermoelectric element 220 and a second electrode 250 electrically connected to the second end 220L of the other thermoelectric element 220.

[0171] As shown in Figure 16, the multiple wires 260 electrically connect the multiple first electrodes 240 and the multiple second electrodes 250, thereby assigning the number A to the thermoelectric conversion element 220. n Multiple thermoelectric conversion elements 220 may be electrically connected in series in the order shown. For example, number D n Wiring 260 is number D n Same number E n The first electrode 240 and number D n F is one number larger than F n+1 The second electrode 250 may be electrically connected. Number D n One end of the wiring 260 is number D n Same number E n It may be connected to the first electrode 240. Number D n The other end of wiring 260 is number D n F is one number larger than F n+1 It may be electrically connected to the second electrode 250. Number D n Wiring 260 is number D n Same number E n From the first electrode 240, number D n F is one number larger than F n+1 It may extend linearly to the second electrode 250.

[0172] For example, one end of wire 1 261 is electrically connected to the first electrode 241 of wire 1. The other end of wire 1 261 is electrically connected to the second electrode 252 of wire 2, which is numbered one higher than wire 1. One end of wire 2 262 is electrically connected to the first electrode 242 of wire 2. The other end of wire 2 262 is electrically connected to the second electrode 253 of wire 3, which is numbered one higher than wire 2. One end of wire 3 263 is electrically connected to the first electrode 243 of wire 3. The other end of wire 3 263 is electrically connected to the second electrode 254 of wire 4, which is numbered one higher than wire 3. One end of wire 4 264 is electrically connected to the first electrode 244 of wire 4. The other end of wire 4 264 is electrically connected to the second electrode 255 of wire 5, which is numbered one higher than wire 4. One end of wire 265 number 5 is electrically connected to the first electrode 245 number 5. The other end of wire 265 number 5 is electrically connected to the second electrode 256 number 6, which is one number higher than number 5. One end of wire 266 number 6 is electrically connected to the first electrode 246 number 6. The other end of wire 266 number 6 is electrically connected to the second electrode 257 number 7, which is one number higher than number 6. One end of wire 267 number 7 is electrically connected to the first electrode 247 number 7. The other end of wire 267 number 7 is electrically connected to the second electrode 258 number 8, which is one number higher than number 7.

[0173] With this configuration, the thermoelectric conversion element 20 is assigned the number A n Multiple thermoelectric elements 220 can be connected in series in the order shown above. When multiple thermoelectric elements 220 are electrically connected in series, a single current path can be created in the thermoelectric module 1 when the multiple thermoelectric elements 220 generate electricity, as shown in Figure 17. In Figure 17, currents I261, I262, I263, I264, I265, I266, and I267 are currents flowing through wiring 261, 262, 263, 264, 265, 266, and 267, respectively.

[0174] The thermal resistance of the wiring 260 may be greater than or equal to the thermal resistance of the thermoelectric conversion element 220. As described above in the first embodiment, the wiring 260 may be configured such that the thermal resistance of the wiring 60 is greater than or equal to the thermal resistance of the thermoelectric conversion element 20. Alternatively, the thermal resistance of the wiring 260 may be greater than or equal to the thermal resistance of the thermoelectric conversion element 220, and the electrical resistance of the wiring 260 may be less than or equal to the electrical resistance of the thermoelectric conversion element 20. As described above in the first embodiment, the wiring 260 may be configured such that the thermal resistance of the wiring 260 is greater than or equal to the thermal resistance of the thermoelectric conversion element 220, and the electrical resistance of the wiring 260 is less than or equal to the electrical resistance of the thermoelectric conversion element 20. Note that instead of wiring 260, wiring 160A as shown in Figure 11 or wiring 160B as shown in Figure 12 may be used.

[0175] The first joining member 270 is conductive. The first joining member 270 may be formed from any material such as silver paste or solder.

[0176] Similar to the first embodiment, number E n The first joining member 270 is number E n Same number A n The first end 220H of the thermoelectric conversion element 220, and number E n Same number B n The first electrode 240 may be electrically connected to it.

[0177] In the second embodiment, as shown in Figure 14, number E n At least a portion of the first joint member 270 where the number is odd may be located within the opening of the insulating layer 212. Number E n The first joining member 270, whose number is odd, has an opening in the insulating layer 212, number E n Same number A n The first end 220H of the thermoelectric conversion element 220, and number E n Same number B n The first electrode 240 may be electrically connected to it.

[0178] For example, at least a portion of the first joining member 271 (number 1) is located within the opening 212a of the insulating layer 212. The first joining member 271 (number 1) electrically connects the first end 221H of the thermoelectric conversion element 221 (number 1) to the first electrode 241 of the thermoelectric conversion element 221 (number 1) via the opening 212a of the insulating layer 212. Also, at least a portion of the third first joining member 273 (number 3) is located within the opening 212b of the insulating layer 212. The third first joining member 273 (number 3) electrically connects the first end 223H of the thermoelectric conversion element 223 (number 3) to the first electrode 243 of the thermoelectric conversion element 223 (number 3) via the opening 212b of the insulating layer 212. Furthermore, at least a portion of the fifth first joining member 275 (number 5) is located within the opening 212c of the insulating layer 212. The fifth first joining member 275 electrically connects the first end 225H of the fifth thermoelectric conversion element 225 to the fifth first electrode 245 via the opening 212c of the insulating layer 212. At least a portion of the seventh first joining member 277 is located within the opening 212d of the insulating layer 212. The seventh first joining member 277 electrically connects the first end 227H of the seventh thermoelectric conversion element 227 to the seventh first electrode 247 via the opening 212d of the insulating layer 212.

[0179] As shown in Figure 14, number E n At least a portion of the first bonding member 270 where the number is even may be located within the opening of the substrate 211. Number E n The first joining member 270, whose number is even, is connected to the substrate 211 through the opening of the substrate E n Same number A n The first end 220H of the thermoelectric conversion element 220, and number E n Same number B n The first electrode 240 may be electrically connected to it.

[0180] For example, at least a portion of the second first bonding member 272 is located within the opening 211a of the substrate 211. The second first bonding member 272 electrically connects the first end 222H of the second thermoelectric conversion element 222 to the second first electrode 242 via the opening 211a of the substrate 211. Also, at least a portion of the fourth first bonding member 274 is located within the opening 211b of the substrate 211. The fourth first bonding member 274 electrically connects the first end 224H of the fourth thermoelectric conversion element 224 to the fourth first electrode 244 via the opening 211b of the substrate 211. Also, at least a portion of the sixth first bonding member 276 is located within the opening 211c of the substrate 211. The sixth first bonding member 276 electrically connects the first end 226H of the sixth thermoelectric conversion element 226 to the sixth first electrode 246 through the opening 211c of the substrate 211. At least a portion of the eighth first bonding member 278 is located within the opening 211d of the substrate 211. The eighth first bonding member 278 electrically connects the first end 228H of the eighth thermoelectric conversion element 228 to the eighth first electrode 248 through the opening 211d of the substrate 211.

[0181] As described above in the first embodiment, the first joining member 270 may be configured such that the electrical resistance value of the first joining member 270 is equal to or greater than the electrical resistance value of the wiring 260.

[0182] The second joining member 280 is conductive. The second joining member 280 may be formed from any material such as silver paste or solder.

[0183] Similar to the first embodiment, number F n The second joining member 280 is number F n Same number A n The second end 220L of the thermoelectric conversion element 220, and number F n Same number B n The second electrode 250 is electrically connected to it.

[0184] In the second embodiment, as shown in Figure 15, number F nAt least a portion of the second joining member 280 where the number is odd may be located within the opening of the insulating layer 212. Number F n The second joining member 280, whose number is odd, has an opening in the insulating layer 212, number F n Same number A n The second end 220L of the thermoelectric conversion element 220, and number F n Same number B n The second electrode 250 may be electrically connected to it.

[0185] For example, at least a portion of the first second joining member 281 is located within the opening 212e of the insulating layer 212. The first second joining member 281 electrically connects the second end 221L of the first thermoelectric conversion element 221 to the first second electrode 251 via the opening 212e of the insulating layer 212. Also, at least a portion of the third second joining member 283 is located within the opening 212f of the insulating layer 212. The third second joining member 283 electrically connects the second end 223L of the third thermoelectric conversion element 223 to the third second electrode 253 via the opening 212f of the insulating layer 212. Also, at least a portion of the fifth second joining member 285 is located within the opening 212g of the insulating layer 212. The second connecting member 285 of the fifth thermoelectric element 225 electrically connects the second end 225L of the fifth thermoelectric element 225 to the second electrode 255 of the fifth thermoelectric element 225 via the opening 212g of the insulating layer 212. At least a portion of the second connecting member 287 of the seventh thermoelectric element 227 is located within the opening 212h of the insulating layer 212. The second connecting member 287 of the seventh thermoelectric element 227 electrically connects the second end 227L of the seventh thermoelectric element 227 to the second electrode 257 of the seventh thermoelectric element 227 via the opening 212h of the insulating layer 212.

[0186] In the second embodiment, as shown in Figure 15, number F n At least a portion of the second joining member 280, where the number is even, may be located within the opening of the substrate 211. Number F n The second joining member 280, whose number is even, is connected to the substrate 211 through the opening, number F n Same number A n The second end 220L of the thermoelectric conversion element 220, and number F n Same number B nIt may be electrically connected to the second electrode 250.

[0187] For example, at least a part of the second joining member 282 of the second one is located in the opening 211e of the substrate 211. The second joining member 282 of the second one electrically connects the second end 222L of the second thermoelectric conversion element 222 and the second electrode 252 of the second one through the opening 211e of the substrate 211. Also, at least a part of the second joining member 284 of the fourth one is located in the opening 211f of the substrate 211. The second joining member 284 of the fourth one electrically connects the second end 224L of the fourth thermoelectric conversion element 224 and the fourth electrode 254 of the fourth one through the opening 211f of the substrate 211. Also, at least a part of the second joining member 286 of the sixth one is located in the opening 211g of the substrate 211. The second joining member 286 of the sixth one electrically connects the second end 226L of the sixth thermoelectric conversion element 226 and the sixth electrode 256 of the sixth one through the opening 211g of the substrate 211. Also, at least a part of the second joining member 288 of the eighth one is located in the opening 211h of the substrate 211. The second joining member 288 of the eighth one electrically connects the second end 228L of the eighth thermoelectric conversion element 228 and the eighth electrode 258 of the eighth one through the opening 211h of the substrate 211.

[0188] As described above in the first embodiment, the second joining member 280 may be configured such that the electrical resistance value of the second joining member 280 is equal to or greater than the electrical resistance value of the wiring 260.

[0189] Other configurations and effects of the thermoelectric conversion module 201 according to the second embodiment are the same as those of the thermoelectric conversion module 1 according to the first embodiment.

[0190] (Method for manufacturing a thermoelectric conversion module) Figure 18 is a flowchart showing the manufacturing process of the thermoelectric conversion module 201 shown in Figure 13. As shown in Figure 13, the manufacturing process of the thermoelectric conversion module 201 according to this embodiment includes the arrangement step S20, the formation steps S21, S22, S23, S24, S25, S26, and the connection step S27, which will be described later. However, the manufacturing process of the thermoelectric conversion module 201 according to this embodiment is not limited to the manufacturing method described below. Figures 19 to 23 correspond to the cross-sectional views shown in Figure 14.

[0191] <Placement process S20> The placement step S20 is a step of placing the metal foil 330 on the substrate 211, as shown in Figure 19. The metal foil 330 may be placed on the surface 211A of the substrate 211. Similar to the placement step S10 described in the first embodiment, the metal foil 330 may be bonded to the surface 211A of the substrate 211 with any thermally conductive adhesive. The metal foil 330 may be the same as the metal foil 130 shown in Figure 7. The metal foil 330 can become a wiring layer 230 after going through the formation step S21 and the like, which will be described later.

[0192] <Formation process S21> Formation step S21 (wiring layer formation step) is a step in which a wiring layer 230 is formed on the surface 211A of the substrate 211 as shown in Figure 16 by patterning the metal foil 330. Known methods such as photolithography may be used for patterning the metal foil 330.

[0193] <Formation process S22> Formation step S22 is a step in which openings 211a, 211b, 211c, and 211d of the substrate 211 are formed as shown in Figure 20, and openings 211e, 211f, 211g, and 211h of the substrate 211 are formed as shown in Figure 15. Openings 211a to 211h may be formed by any laser.

[0194] <Formation process S23> Forming step S23 (insulating layer formation step) is a step of forming an insulating layer 212 on the substrate 211 and the wiring layer 230, as shown in Figure 21. In forming step S23, the insulating layer 212 may be formed by applying an insulating material to the substrate 211 and the wiring layer 230. The sheet substrate 210 is formed by forming an insulating layer 212 on the surface 211A of the substrate 211. In other words, the sheet substrate 210 has a substrate 211 and an insulating layer 212 formed on the surface 211A of the substrate 211.

[0195] <Formation process S24> In the formation step S24, openings 212a, 212b, 212c, and 212d of the insulating layer 212 are formed as shown in Figure 22, and openings 212e, 212f, 212g, and 212h of the insulating layer 212 are formed as shown in Figure 15. Openings 212a to 212h may be formed by any laser.

[0196] <Formation process S25> Forming step S25 (element formation step) is a step of forming a thermoelectric conversion element layer on the insulating layer 212 and forming a thermoelectric conversion element layer under the substrate 211. As described above, the thermoelectric conversion element layer is a layer formed including CNTs. In this embodiment, the thermoelectric conversion element layer is assumed to be a CNT sheet 320 and a CNT sheet 321 as shown in Figure 23. The CNT sheets 320 and 321 are formed including CNTs. In this embodiment, forming step S25 is a step of placing the CNT sheet 320 on the insulating layer 212 and placing the CNT sheet 321 on the substrate 211. The CNT sheet 320 is placed, for example, on the surface 212A of the insulating layer 212, i.e., the surface 210A of the sheet substrate 210. The CNT sheet 321 is placed, for example, on the back surface 211B of the substrate 211, i.e., the back surface 210B of the sheet substrate 210.

[0197] The CNT sheet 320 can become thermoelectric elements 221, 223, 225, and 227 after undergoing the formation process S26 described later. Furthermore, the CNT sheet 321 can become thermoelectric elements 222, 224, 226, and 228 after undergoing the formation process S26 described later. When forming the thermoelectric element 220 as a p-type thermoelectric element, p-type CNT sheets 320 and 321 may be used. When forming the thermoelectric element 220 as an n-type thermoelectric element, n-type CNT sheets 320 and 321 may be used.

[0198] In forming step S25, each of the CNT sheets 320 and 321 may be bonded to the front surface 210A and back surface 210B of the sheet substrate 210 by an adhesive sheet such as epoxy resin.

[0199] The CNT sheets 320 and 322 may be the same as the CNT sheet 120 described above in the first embodiment.

[0200] The other components of forming step S25 are the same as those of forming step S13 described in the first embodiment.

[0201] <Formation process S26> Formation step S26 (thermoelectric conversion element formation step) is a step in which the thermoelectric conversion element layer, i.e., the CNT sheets 320 and 321, are cut in the first direction A1 to form a plurality of thermoelectric conversion elements 20 arranged in the first direction A1. Formation step S26 may be carried out using a laser. In formation step S26, similar to formation step S14 described in the first embodiment, each of the CNT sheets 320 and 321 may be cut along the first direction A1 by a laser. In formation step S26, similar to formation step S14 described in the first embodiment, each of the CNT sheets 320 and 321 may be cut along the first direction A1 by a UV laser, nanosecond laser, or femtosecond laser.

[0202] The other components of forming step S26 are the same as those of forming step S14 described in the first embodiment.

[0203] <Connection process S27> The connection step S27 is a step in which the first electrode 240 and the second electrode 250 exposed from the substrate 211 or insulating layer 212 are electrically connected in series with the ends of the multiple thermoelectric conversion elements 220, i.e., the first end 20H and the second end 20L. Here, the first electrode 240 and the second electrode 250 can also be said to be the ends of the wiring 260. In other words, the connection step S27 can also be said to be a step in which the ends of the wiring 260 exposed from the substrate 211 or insulating layer 212 are electrically connected in series with the first end 20H and the second end 20L of the multiple thermoelectric conversion elements 220.

[0204] The connection step S27 according to this embodiment is a step of applying silver paste from the first end 220H of the thermoelectric conversion element 220 as shown in Figure 13 to the first electrode 240 exposed from the substrate 211 or insulating layer 212, and applying silver paste from the second end 220L of the thermoelectric conversion element 220 as shown in Figure 13 to the second electrode 250 exposed from the substrate 211 or insulating layer 212.

[0205] In connection step S27, number A is drawn from each of the openings 212a to 212d of the insulating layer 212 as shown in Figure 14. n Silver paste is applied along the first direction A1 to the first end 220H of the thermoelectric conversion element 220 where the number is odd. A portion of this silver paste fills each of the openings 212a to 212d with number B. n Each of the first electrodes 40, which has an odd number, is electrically connected. These silver pastes, after drying, are numbered E n The first joining member 270 may have an odd number of elements.

[0206] In connection step S27, number A is connected from each of the openings 211a to 211d of the substrate 211 as shown in Figure 14. n Silver paste is applied along the first direction A1 to the first end 220H of the thermoelectric conversion element 220 where the number is even. Some of this silver paste fills the openings 211a to 211d and is numbered B nEach of the first electrodes 40, where the number is even, is electrically connected. These silver pastes, after drying, are numbered E n This can result in a first joining member 270 with an even number.

[0207] In connection step S27, number A is drawn from each of the openings 212e to 212h of the insulating layer 212 as shown in Figure 15. n Silver paste is applied along the first direction A1 up to the second end 220L of the thermoelectric conversion element 220 where the number is odd. A portion of this silver paste fills each of the openings 212e to 212h with number C. n Each of the second electrodes 50, which has an odd number, is electrically connected. These silver pastes, after drying, are numbered F n This can result in a second joining member 280 with an odd number of elements.

[0208] In connection step S27, number A is connected from each of the openings 211e to 211h of the substrate 211 as shown in Figure 15. n Silver paste is applied along the first direction A1 to the second end 220L of the thermoelectric conversion element 220 where the number is even. A portion of this silver paste fills each of the openings 211e to 211h with number C. n Each of the second electrodes 50, where the number is even, is electrically connected. These silver pastes, after drying, are numbered F n This can result in a second joining member 280 with an even number.

[0209] Other configurations and effects of the method for manufacturing the thermoelectric conversion module 201 according to the second embodiment are the same as those of the method for manufacturing the thermoelectric conversion module 1 according to the first embodiment.

[0210] (Third embodiment) Figure 24 is an external view of a thermoelectric conversion module 401 according to a third embodiment of the present invention. The thermoelectric conversion module 401 can be placed on a heat source 2, similar to the first embodiment. The thermoelectric conversion module 401 includes a first edge portion 401H and a second edge portion 401L on a sheet substrate 410, which will be described later. The first edge portion 401H and the second edge portion 401L are opposite to each other. The first edge portion 401H may be located near the heat source 2 when the thermoelectric conversion module 401 is placed on the heat source 2. The second edge portion 401L may be located away from the heat source 2 when the thermoelectric conversion module 401 is placed on the heat source 2.

[0211] The temperature near the first edge 401H can be higher than the temperature near the second edge 401L, similar to the temperature near the first edge 1H as shown in Figure 1. In other words, the temperature near the second edge 401L can be lower than the temperature near the first edge 401H.

[0212] In the third embodiment, as in the first embodiment, the first direction A1, the second direction A2, and the third direction A3 can be adopted. In the third embodiment, the first direction A1 is the direction in which the first edge 401H and the second edge 401L face each other. In this embodiment, the first direction A1 is the direction from the second edge 401L toward the first edge 401H, and is perpendicular to the second edge 401L. In this embodiment, the second direction A2 is the direction from the left side of Figure 24 toward the right side of the page. In this embodiment, the third direction A3 is the direction from the back side of Figure 24 toward the front side of the page.

[0213] The shape of the thermoelectric conversion module 401 as viewed from the third direction A3 is trapezoidal. The thermoelectric conversion module 401 includes sides 401A and 401B on the sheet substrate 410 described later. Sides 401A and 401B are parallel. Sides 401A and 401B correspond to the two bases of the trapezoid. The first edge 401H corresponds to one of the two legs of the trapezoid. The second edge 401L corresponds to the other of the two legs of the trapezoid. The distance between the first edge 401H and the second edge 401L in the first direction A1 widens along the second direction A2.

[0214] The thermoelectric conversion module 401 comprises a sheet substrate 410, thermoelectric conversion elements 421, 422, 423, 424, 425, 426, and a wiring layer 430. The wiring layer 430 is located within the sheet substrate 410. The wiring layer 430 may be located on the back side of an insulating layer similar to the insulating layer 12 shown in Figure 2 of the sheet substrate 410. The wiring layer 430 has wirings 461, 462, 463, 464, and 465. The wiring layer 430 may further have a first electrode similar to the first electrode 40 shown in Figure 1, and a first electrode similar to the second electrode 50 shown in Figure 1. The thermoelectric conversion module 401 may also comprise a joining member similar to the first joining member 70 shown in Figure 1, and a joining member similar to the second joining member 80 shown in Figure 1.

[0215] Hereafter, unless otherwise specified, thermoelectric elements 421 to 426 will be collectively referred to as "thermoelectric elements 420". Figure 24 shows a thermoelectric module 401 equipped with six thermoelectric elements 420. However, the number of thermoelectric elements 420 in the thermoelectric module 401 may be any number.

[0216] Hereafter, unless otherwise specified, wirings 461 to 465 will be collectively referred to as "wiring 460". Figure 24 shows a wiring layer 430 having five wirings 460. However, the number of wirings 460 in the wiring layer 430 may correspond to the number of thermoelectric elements 420 provided in the thermoelectric conversion module 401.

[0217] Hereinafter, as in the first embodiment, the numbers assigned to the multiple thermoelectric elements 420 of the thermoelectric conversion module 401 along the second direction A2 are "Number A n It is also written as (n is an integer). The thermoelectric conversion elements 421, 422, 423, 424, 425, and 426 are numbered 1, 2, 3, 4, 5, and 6, respectively.

[0218] Hereinafter, as in the first embodiment, the numbers assigned to the multiple wires 460 of the wiring layer 430 along the second direction A2 are "Number D nIt is also written as (n is an integer). Numbers D are assigned to wiring 461, 462, 463, 464, 465 along the second direction A2. n These are numbers 1, 2, 3, 4, and 5.

[0219] The sheet substrate 410 is insulating. The sheet substrate 410 may be flexible. The shape of the sheet substrate 410 as viewed from the third direction A3 is trapezoidal. The sheet substrate 410 includes the first edge portion 401H, the second edge portion 401L, the side 401A, and the side 401B described above.

[0220] The sheet substrate 410 includes a front surface 410A and a back surface 410B. The front surface 410A and the back surface 410B are opposite each other. The front surface 410A is the surface of the sheet substrate 410 facing the third direction A3. The back surface 410B is the surface of the sheet substrate 410 facing the opposite direction from the third direction A3.

[0221] The sheet substrate 410 may have a substrate similar to the substrate 11 and an insulating layer similar to the insulating layer 12, similar to the sheet substrate 10 shown in Figure 2.

[0222] All of the thermoelectric elements 421 to 426 are either p-type thermoelectric elements or n-type thermoelectric elements. The thermoelectric material for forming the thermoelectric element 420 is not particularly limited, and the thermoelectric material described above in the first embodiment can be used. As described above in the first embodiment, all of the thermoelectric elements 421 to 426 may be p-type thermoelectric elements, for example, if the thermoelectric material for forming the thermoelectric element 420 is an organic material such as CNT. As described above in the first embodiment, all of the thermoelectric elements 421 to 426 may be formed including CNT.

[0223] The thermoelectric element 420 extends along the first direction A1. The shape of the thermoelectric element 420 as viewed from the third direction A3 is elongated, such as a rectangle. The longitudinal direction of the thermoelectric element 420 is along the first direction A1. The longitudinal direction of the thermoelectric element 420 may be parallel to the first direction A1. The cross-sectional shape of the thermoelectric element 420 may be thin film. The thickness of the thermoelectric elements 421 to 426 in the third direction A3 may be approximately the same or different. Hereafter, the thickness of the thermoelectric elements 421 to 426 in the third direction A3 will be assumed to be approximately the same.

[0224] The thermoelectric element 420 includes a first end 420H and a second end 420L in the first direction A1. The first end 420H is located toward the first edge 401H of the thermoelectric module 401. The second end 420L is located toward the second edge 401L of the thermoelectric module 401. The first end 420H of thermoelectric elements 421, 422, 423, 424, 425, and 426 are also referred to as "first end 421H", "first end 422H", "first end 423H", "first end 424H", "first end 425H", and "first end 426H", respectively. Furthermore, the second ends 420L of thermoelectric conversion elements 421, 422, 423, 424, 425, and 426 are also referred to as "second end 421L", "second end 422L", "second end 423L", "second end 424L", "second end 425L", and "second end 426L", respectively.

[0225] The thermoelectric elements 421 to 426 are arranged on the surface 410A of the sheet substrate 410 so as to be aligned along the second direction A2, similar to the first embodiment. Similar to the first embodiment, the thermoelectric elements 421 to 426 may be arranged on the surface side of the insulating layer of the sheet substrate 410 so as to be aligned along the second direction A2. The thermoelectric elements 421 to 426 are arranged along the second direction A2 with a gap between them. The width of the gap may be arbitrary as long as insulation is ensured between two adjacent thermoelectric elements 420 in the second direction A2. Similar to the first embodiment, the thermoelectric elements 421 to 426 are numbered A n They are electrically connected in series by wiring 461-465 in that order.

[0226] Thermoelectric elements 421 to 426 have different lengths along the first direction A1. For example, each of the thermoelectric elements 421 to 426 extends from the first edge 401H to the second edge 401L along the first direction A1. Because each of the thermoelectric elements 421 to 426 extends from the first edge 401H to the second edge 401L, number A n In this order, that is, in the order of thermoelectric conversion elements 421 to 426, the length of the thermoelectric conversion elements 421 to 426 in the first direction A1 increases. In this way, each of the thermoelectric conversion elements 421 to 426 extends from the first edge 401H to the second edge 401L, resulting in different lengths of each of the thermoelectric conversion elements 421 to 426 along the first direction A1.

[0227] Each of the thermoelectric elements 421 to 426 extends along the first direction A1 from the first edge 401H to the second edge 401L, which can increase the temperature difference between the ends of each of the thermoelectric elements 421 to 426. By increasing the temperature difference between the ends of each of the thermoelectric elements 421 to 426, the power generated by each of the thermoelectric elements 421 to 426 can be increased. The width between each of the first ends 421H to 426H and the first edge 401H may be the same. Similarly, the width between each of the second ends 421L to 426L and the second edge 401L may be the same. The width between each of the first ends 421H to 426H and the first edge 401H, and the width between each of the second ends 421L to 426L and the second edge 401L may be set appropriately according to the manufacturing process, etc.

[0228] Here, if the lengths of the thermoelectric elements 421 to 426 along the first direction A1 are different, and the widths of the thermoelectric elements 421 to 426 along the second direction A2 are approximately the same, then the electrical resistance values ​​of the thermoelectric elements 421 to 426 will be different. If the electrical resistance values ​​of the thermoelectric elements 421 to 426 are different, then when the thermoelectric elements 421 to 426 are electrically connected in series, the current that can be generated in the thermoelectric module 401 will be determined by the thermoelectric element 420 with the smaller electrical resistance value.

[0229] Therefore, in the thermoelectric conversion elements 421 to 426, the widths of each thermoelectric conversion element 421 to 426 along the second direction A2 are different so that the electrical resistance values ​​of each thermoelectric conversion element 421 to 426 are approximately the same. As an example, in this embodiment, number A n The length of thermoelectric elements 421 to 426 along the first direction A1 increases in the order of 421 to 426. In this case, each of the thermoelectric elements 421 to 426 may be configured such that the width of each of the thermoelectric elements 421 to 426 along the second direction A2 increases in the order of 421 to 426. The width of each of the thermoelectric elements 421 to 426 along the second direction A2 may increase in proportion to the length of each of the thermoelectric elements 421 to 426 along the first direction A1. For example, if the length of thermoelectric element 426 along the first direction A1 is 1.5 times the length of thermoelectric element 421 along the first direction A1, then the width of thermoelectric element 426 along the second direction A2 will be 1.5 times the width of thermoelectric element 421 along the second direction A2. With this configuration, the electrical resistance values ​​of each of the thermoelectric conversion elements 421 to 426 can be made approximately the same.

[0230] Furthermore, if the thickness of each of the thermoelectric elements 421 to 426 in the third direction A3 is different, each of the thermoelectric elements 421 to 426 may be configured such that the cross-sectional area perpendicular to the first direction A1 of each of the thermoelectric elements 421 to 426 is different, so that the electrical resistance values ​​of each of the thermoelectric elements 421 to 426 are approximately the same.

[0231] The wiring 460 may be located within the sheet substrate 410, similar to the wiring 60 shown in Figure 1. The wiring 460 may be located on the back side of the insulating layer of the sheet substrate 410, similar to the wiring 60 shown in Figure 1. The wiring 460 may be located on the back side of the insulating layer of the sheet substrate 410, together with the first and second electrodes of the wiring layer 430. The wiring 460 electrically connects adjacent thermoelectric conversion elements 426 in the second direction A2 at both ends of the thermoelectric conversion element 420, i.e., the first end 420H and the second end 420L, similar to the wiring 60 shown in Figure 1. The wiring 460 may, similar to the wiring 60 shown in Figure 1, electrically connect a first electrode electrically connected to the first end 420H of one thermoelectric element 420 to a second electrode electrically connected to the second end 420L of the other thermoelectric element 420 in two adjacent thermoelectric elements 420 in the second direction A2.

[0232] The thermal resistance of the wiring 460 is greater than or equal to the thermal resistance of the thermoelectric conversion element 420. As described above in the first embodiment, the wiring 460 may be configured such that its thermal resistance is greater than or equal to the thermal resistance of the thermoelectric conversion element 420. Alternatively, the thermal resistance of the wiring 460 may be greater than or equal to the thermal resistance of the thermoelectric conversion element 420, and the electrical resistance of the wiring 460 may be less than or equal to the electrical resistance of the thermoelectric conversion element 420. As described above in the first embodiment, the wiring 460 may be configured such that its thermal resistance is greater than or equal to the thermal resistance of the thermoelectric conversion element 420, and the electrical resistance of the wiring 460 is less than or equal to the electrical resistance of the thermoelectric conversion element 420.

[0233] Alternatively, instead of wiring 460, wiring 160A as shown in Figure 11 or wiring 160B as shown in Figure 12 may be used.

[0234] In the thermoelectric conversion module 401 according to the third embodiment, a plurality of thermoelectric conversion elements may be formed on the back surface 410B of the sheet substrate 410, similar to the second embodiment. The plurality of thermoelectric conversion elements formed on the back surface 410B may be configured in the same way as the plurality of thermoelectric conversion elements 420. For example, similar to the thermoelectric conversion element 420, each of the plurality of thermoelectric conversion elements formed on the back surface 410B may extend from the first edge 401H to the second edge 401L. In this case, similar to the thermoelectric conversion element 420, the plurality of thermoelectric conversion elements on the back surface 410B may be configured such that the width of each of the plurality of thermoelectric conversion elements along the second direction A2 is different, so that the electrical resistance values ​​of the plurality of thermoelectric conversion elements are substantially the same. Furthermore, if the thickness of each of the multiple thermoelectric elements formed on the back surface 410B differs in the third direction A3, each of the multiple thermoelectric elements may be configured such that the cross-sectional area perpendicular to the first direction A1 differs for each of the multiple thermoelectric elements, so that the electrical resistance values ​​of each of the multiple thermoelectric elements are approximately the same.

[0235] Thus, in the thermoelectric conversion module 401 according to the third embodiment, the shape of the sheet substrate 410 is trapezoidal. The trapezoidal shape of the sheet substrate 410 can increase the degree of freedom in where the thermoelectric conversion module 401 is placed.

[0236] The other configurations and effects of the thermoelectric conversion module 401 according to the third embodiment are the same as those of the thermoelectric conversion module 1 according to the first embodiment. The thermoelectric conversion module 401 can also be manufactured by the manufacturing method described above in the first embodiment.

[0237] The foregoing merely illustrates one embodiment of the present invention, and it goes without saying that various modifications may be made to the claims. [Industrial applicability]

[0238] According to the present invention, a thermoelectric conversion module in which the reduction in generated power is suppressed can be provided. [Explanation of symbols]

[0239] 1,201,401 Thermoelectric Conversion Modules 1H,201H,401H 1st edge 1L, 201L, 401L Second edge 2 Heat source 10,210,410 Sheet substrate 10A,210A,410A surface 10B,210B,410B Back side 11,211 circuit boards 11A,211A surface 11B,211B back side 12,212 insulating layer 12A,212A surface 12B,212B back side Wiring for 60-63, 160A, 160B, 260-267, 460-465 20-24, 220-228, 420-426 Thermoelectric conversion elements 20H~24H, 220H~228H, 420H~426H 1st end 20L~24L, 220L~228L, 420L~426L 2nd end 30,230,430 wiring layer 40~44,240~248 1st electrode 50~54,250~258 2nd electrode 70-74, 270-278 First Joining Member 80~84, 280~288 Second Joining Member 120,320,321 CNT sheets (carbon nanotube sheets) 130,330 metal foil 160a hole 211a~211h opening 212a~212h opening 401A side 401B edge

Claims

1. An insulating sheet substrate having a front surface and a back surface, On the surface of the sheet substrate, a plurality of thermoelectric conversion elements are arranged so as to be elongated in a first direction and aligned along a second direction intersecting the first direction, A wiring layer comprising multiple wires that electrically connect adjacent thermoelectric conversion elements in series at both ends of a long length, A thermoelectric conversion module equipped with, All of the aforementioned thermoelectric elements are either p-type thermoelectric elements or n-type thermoelectric elements. The thermal resistance value of the wiring is greater than or equal to the thermal resistance value of the thermoelectric conversion element. The electrical resistance of the wiring is less than or equal to the electrical resistance of the thermoelectric conversion element. The length L 60, width W 60, and thickness T 60 of the aforementioned wiring satisfy equation (1) and equation (2) in a thermoelectric conversion module. (1 / κ 20 )×{L 20 / (T 20 ×W 20 )}≦(1 / κ 60 )×{L 60 / (T 60 ×W 60 )} Formula (1) (1 / δ 20 )×{L 20 / (T 20 ×W 20 )}≧(1 / δ 60 )×{L 60 / (T 60 ×W 60 )} Formula (2) Here, In equation (1), the thermal conductivity κ 20 is the thermal conductivity of the thermoelectric conversion element, and the thermal conductivity κ 60 is the thermal conductivity of the wiring. In equation (2), the electrical conductivity δ 20 is the electrical conductivity of the thermoelectric conversion element, and the electrical conductivity δ 60 is the electrical conductivity of the wiring.

2. In the thermoelectric conversion module described in claim 1, A thermoelectric conversion module in which all of the aforementioned multiple thermoelectric conversion elements are p-type thermoelectric conversion elements.

3. In the thermoelectric conversion module according to claim 1 or 2, A thermoelectric conversion module in which all of the aforementioned multiple thermoelectric conversion elements are formed by including carbon nanotubes.

4. In the thermoelectric conversion module according to any one of claims 1 to 3, A thermoelectric conversion module in which the plurality of thermoelectric conversion elements are formed not only on the surface of the sheet substrate but also on the back surface.

5. In the thermoelectric conversion module described in claim 4, A thermoelectric conversion module in which, when the sheet substrate is viewed in plan view, a portion of each thermoelectric conversion element formed on the surface overlaps with a portion of each thermoelectric conversion element formed on the back surface.

6. In the thermoelectric conversion module according to any one of claims 1 to 5, A thermoelectric conversion module in which each of the multiple thermoelectric conversion elements is rectangular in shape and of approximately the same dimensions.

7. In the thermoelectric conversion module according to any one of claims 1 to 6, A thermoelectric conversion module is configured such that the electrical resistance values ​​of each of the multiple thermoelectric conversion elements are substantially the same, by adjusting the length of each of the multiple thermoelectric conversion elements along the first direction, the width of each of the multiple thermoelectric conversion elements along the second direction, and the thickness of each of the multiple thermoelectric conversion elements.

8. In the thermoelectric conversion module according to claim 7, A thermoelectric conversion module in which each of the plurality of thermoelectric conversion elements has substantially the same thickness, each of the plurality of thermoelectric conversion elements has a different length, and each of the plurality of thermoelectric conversion elements has a different width.

9. An insulating sheet substrate having a front surface and a back surface, On the surface of the sheet substrate, a plurality of thermoelectric conversion elements are arranged so as to be elongated in a first direction and aligned along a second direction intersecting the first direction, A wiring layer comprising multiple wires that electrically connect adjacent thermoelectric conversion elements in series at both ends of a long length, A thermoelectric conversion module equipped with, All of the aforementioned thermoelectric elements are either p-type thermoelectric elements or n-type thermoelectric elements. The thermal resistance value of the wiring is greater than or equal to the thermal resistance value of the thermoelectric conversion element. The plurality of thermoelectric elements are configured such that the electrical resistance values ​​of each of the plurality of thermoelectric elements are substantially the same, by adjusting the length of each of the plurality of thermoelectric elements along the first direction, the width of each of the plurality of thermoelectric elements along the second direction, and the thickness of each of the plurality of thermoelectric elements. A thermoelectric conversion module in which each of the plurality of thermoelectric conversion elements has substantially the same thickness, each of the plurality of thermoelectric conversion elements has a different length, and each of the plurality of thermoelectric conversion elements has a different width.

10. In the thermoelectric conversion module according to claim 8 or 9, The shape of the aforementioned sheet substrate is trapezoidal. The sheet substrate includes a first edge corresponding to one of the two legs of the trapezoid, and a second edge corresponding to the other leg of the two legs. The distance between the first edge and the second edge in the first direction widens along the second direction. The plurality of thermoelectric conversion elements are a thermoelectric conversion module that extends from the first edge to the second edge along the first direction.

11. An insulating sheet substrate having a substrate including a front and a back surface, and an insulating layer formed on the surface of the substrate, On the surface side of the insulating layer, a plurality of thermoelectric conversion elements are arranged so as to be elongated in a first direction and aligned along a second direction intersecting the first direction, A method for manufacturing a thermoelectric conversion module, comprising: a wiring layer on the back side of the insulating layer having a plurality of wires that electrically connect adjacent thermoelectric conversion elements in series at both ends of a long length; A wiring layer formation step of forming the wiring layer on the surface of the substrate, An insulating layer forming step in which an insulating layer is formed on the substrate and the wiring layer such that only both ends of each wire constituting the wiring layer are exposed, A device formation step of forming a thermoelectric conversion element layer on the insulating layer, A thermoelectric element forming step involves cutting the thermoelectric element layer along a first direction to form a plurality of thermoelectric elements arranged along the first direction, A connection step of connecting both ends of the exposed wiring to both ends of the multiple thermoelectric elements so that all of the multiple thermoelectric elements are electrically connected in series, A method for manufacturing a thermoelectric conversion module, including the method described above.

12. In the method for manufacturing a thermoelectric conversion module according to claim 11, A method for manufacturing a thermoelectric conversion module, wherein the thermoelectric conversion element layer is a layer formed containing carbon nanotubes.

13. In the method for manufacturing a thermoelectric conversion module according to claim 11 or 12, The method for manufacturing a thermoelectric conversion module is characterized in that the thermoelectric conversion element formation step is carried out using a UV laser, a nanosecond laser, or a femtosecond laser.

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