Method and apparatus for manufacturing superconducting wires

Abstract

This superconducting wire material manufacturing method comprises: a step for preparing a superconducting wire material for cutting that has a first main surface and a second main surface which is the surface opposite from the first main surface; and a step for conveying the superconducting wire material for cutting, along the length direction of the superconducting wire material for cutting, using a first conveyance mechanism and a second conveyance mechanism that are positioned at a distance from each other. The superconducting wire material for cutting is supported at the first main surface by a pulley that is positioned between the first conveyance mechanism and the second conveyance mechanism. This superconducting wire material manufacturing method further comprises a step for cutting the superconducting wire material for cutting, by using a laser to irradiate the second main surface in a section of the superconducting wire material for cutting, said section being supported by the pulley when the superconducting wire material for cutting is being conveyed.

Description

Technical Field

[0001] The present disclosure relates to a method and an apparatus for manufacturing a superconducting wire. This application claims priority based on Japanese Patent Application No. 2023-130200, filed on August 9, 2023. All the descriptions described in the Japanese patent application are incorporated herein by reference.

Background Art

[0002] For example, Japanese Unexamined Patent Application Publication No. 2013-55061 (Patent Document 1) describes a superconducting wire. The superconducting wire described in Patent Document 1 has an oriented metal substrate, an intermediate layer disposed on the oriented metal substrate, and a superconducting oxide layer disposed on the intermediate layer. The superconducting wire described in Patent Document 1 is wide (for example, has a width of 2 cm or more).

[0003] For example, Japanese Unexamined Patent Application Publication No. 2017-91679 (Patent Document 2) describes a method for cutting a superconducting wire. In the method for cutting a superconducting wire described in Patent Document 2, the superconducting wire is cut by irradiating a laser.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Patent Document 2

Summary of the Invention

[0005] The present disclosure provides a method for manufacturing a superconducting wire, comprising the steps of: preparing a superconducting wire to be cut having a first main surface and a second main surface opposite to the first main surface; and transporting the superconducting wire to be cut along its longitudinal direction using a first transport mechanism and a second transport mechanism, which are spaced apart from each other. The superconducting wire to be cut is supported on its first main surface by a pulley positioned between the first transport mechanism and the second transport mechanism. The method for manufacturing a superconducting wire further comprises the step of cutting the superconducting wire to be cut by irradiating the second main surface, which is located on the portion of the superconducting wire to be cut that is supported by the pulley, with a laser while the superconducting wire to be cut is being transported. [Brief explanation of the drawing]

[0006] [Figure 1] Figure 1 is a plan view of the superconducting wire 10. [Figure 2] Figure 2 is a cross-sectional view taken along line II-II in Figure 1. [Figure 3] Figure 3 is a schematic diagram of the manufacturing apparatus 100. [Figure 4] Figure 4 is a perspective view of pulley 40. [Figure 5] Figure 5 is a front view of the pulley 40. [Figure 6] Figure 6 is a partially enlarged front view of the pulley 40. [Figure 7A] Figure 7A is a schematic diagram showing the first irradiation mode of laser L. [Figure 7B] Figure 7B is a schematic diagram showing the second irradiation mode of laser L. [Figure 8] Figure 8 is a cross-sectional view of the superconducting wire 10 according to Modification 1. [Figure 9] Figure 9 is a schematic cross-sectional view of the pulley 40 according to Modification 3. [Figure 10] Figure 10 is a schematic diagram of the laser light source 50 according to Modification 4. [Figure 11] Figure 11 is a schematic diagram showing the irradiation pattern of laser L when the laser L is split into multiple beams. [Figure 12]Figure 12 is a schematic diagram showing the irradiation mode of the laser L according to Modification 5. [Figure 13] Figure 13 is a plan view of the superconducting wire 10 according to modified example 6 after scribing. [Modes for carrying out the invention]

[0007] [Issues this disclosure aims to address] Wide superconducting wires, such as the one described in Patent Document 1, exhibit warping in the width direction. Therefore, when attempting to cut wide superconducting wires with a laser, as in the cutting method described in Patent Document 2, the laser's focus shifts due to the warping. The greater the shift in focus, the more the laser processing becomes a thermal process rather than an ablation process.

[0008] This disclosure addresses the problems of the prior art described above. More specifically, this disclosure provides a method for manufacturing a superconducting wire that can suppress the shift in the laser focus caused by the warping of the superconducting wire to be cut.

[0009] [Effects of this disclosure] According to the method for manufacturing superconducting wires of this disclosure, it is possible to suppress the shift in the laser focus caused by the warping of the superconducting wire to be cut.

[0010] [Description of Embodiments in this Disclosure] First, embodiments of this disclosure will be listed and described.

[0011] (1) The manufacturing method of the superconducting wire according to the embodiment includes a step of preparing a superconducting wire to be cut having a first main surface and a second main surface opposite to the first main surface, and a step of conveying the superconducting wire to be cut along the longitudinal direction of the superconducting wire to be cut by a first conveying mechanism and a second conveying mechanism arranged separately from each other. The superconducting wire to be cut is supported by a pulley arranged between the first conveying mechanism and the second conveying mechanism on the first main surface. The manufacturing method of the superconducting wire further includes a step of cutting the superconducting wire to be cut by irradiating a laser on the second main surface of the portion of the superconducting wire to be cut supported by the pulley when the superconducting wire to be cut is being conveyed.

[0012] According to the manufacturing method of the superconducting wire in (1) above, it is possible to suppress the deviation of the laser focus caused by the warp of the superconducting wire to be cut.

[0013] (2) In the manufacturing method of the superconducting wire in (1) above, on the second main surface, the irradiation position of the laser may be scanned by a galvanometer scanner.

[0014] According to the manufacturing method of the superconducting wire in (2) above, it is possible to reduce the thermal influence on the superconducting wire due to the irradiation of the laser.

[0015] (3) In the manufacturing method of the superconducting wire in (1) or (2) above, the first conveying mechanism may be upstream in the conveying direction of the superconducting wire to be cut than the second conveying mechanism. The first conveying mechanism may have a plurality of rollers arranged in a staggered pattern.

[0016] According to the manufacturing method of the superconducting wire in (3) above, it is possible to further suppress the deviation of the laser focus caused by the warp of the superconducting wire to be cut.

[0017] (4) In the manufacturing method of the superconducting wire in (1) to (3) above, the pulley may have an outer peripheral surface that contacts the first main surface. Grooves extending along the circumferential direction of the pulley may be formed on the outer peripheral surface.

[0018] According to the superconducting wire manufacturing method described in (4) above, it is possible to suppress the generation of debris in the pulley after the laser penetrates the superconducting wire to be cut.

[0019] (5) In the method for manufacturing superconducting wires described in (4) above, a flow channel may be formed inside the pulley. The flow channel may be open at the bottom surface of the groove. When the superconducting wire to be cut is supported by the pulley, the superconducting wire to be cut may be attracted through the flow channel.

[0020] According to the superconducting wire manufacturing method described in (5) above, it is possible to remove debris generated after the laser penetrates the superconducting wire to be cut from the laser irradiation site.

[0021] (6) In the methods for manufacturing superconducting wires described in (1) to (5) above, the superconducting wire to be cut may further comprise a base material, an intermediate layer disposed on the base material, and a superconducting layer disposed on the intermediate layer. The base material may constitute a second main surface.

[0022] According to the method for manufacturing superconducting wires described in (6) above, it is possible to further suppress the shift in the laser focus caused by the warping of the superconducting wire to be cut.

[0023] (7) In the methods for manufacturing superconducting wires described in (1) to (5) above, the superconducting wire to be cut may further comprise a base material, an intermediate layer disposed on the base material, and a superconducting layer disposed on the intermediate layer. The base material may constitute a first main surface.

[0024] According to the method for manufacturing superconducting wires described in (7) above, it is possible to suppress the deterioration of the performance of the superconducting wires that occurs when they are cut.

[0025] (8) In the method for manufacturing superconducting wires described in (6) or (7) above, the superconducting wire to be cut may further have a protective layer. The protective layer may be placed on the superconducting layer.

[0026] (9) In the method for manufacturing superconducting wires described in (8) above, the superconducting wire to be cut may further have a stabilizing layer. The stabilizing layer may be placed on the protective layer.

[0027] (10) In the methods for manufacturing superconducting wires described in (1) to (9) above, the wavelength of the laser may be in the green band, ultraviolet band, or infrared band.

[0028] According to the method for manufacturing superconducting wires described in (10) above, the thermal effects on the superconducting wires associated with laser irradiation can be reduced.

[0029] (11) In the methods for manufacturing superconducting wires described in (1) to (10) above, an assist gas may be supplied to the laser irradiation site.

[0030] According to the superconducting wire manufacturing method described in (11) above, it is possible to remove debris generated from the superconducting wire to be cut in the vicinity of the position where the laser is irradiated.

[0031] (12) In the method for manufacturing superconducting wires described in (1) above, the laser may be split into multiple beams by a diffractive optical element. The irradiation position of each of the multiple beams may be scanned by a galvanometer scanner.

[0032] According to the method for manufacturing superconducting wires described in (12) above, the processing efficiency for the superconducting wire to be cut is improved.

[0033] (13) In the method for manufacturing superconducting wires described in (1) above, the laser irradiation position on the second main surface may be offset along the longitudinal direction of the superconducting wire to be cut.

[0034] According to the manufacturing method for superconducting wire described in (13) above, the thermal influence on the superconducting layer is reduced, and processing efficiency is improved.

[0035] (14) The manufacturing apparatus according to the embodiment comprises a first transport mechanism and a second transport mechanism, a pulley, and a laser light source. The first transport mechanism and the second transport mechanism are arranged spaced apart from each other and transport the superconducting wire to be cut along the longitudinal direction of the superconducting wire to be cut. The pulley is positioned between the first transport mechanism and the second transport mechanism and supports the first main surface of the superconducting wire to be cut. The laser light source irradiates the second main surface of the superconducting wire to be cut, which is supported by the pulley, with a laser.

[0036] According to the manufacturing apparatus described in (14) above, it is possible to suppress the shift in the laser focus caused by the warping of the superconducting wire to be cut.

[0037] (15) In the manufacturing apparatus described in (14) above, the laser light source may have a galvanometer scanner that scans the laser irradiation position.

[0038] According to the manufacturing apparatus described in (15) above, the thermal effects on the superconducting wire due to laser irradiation can be reduced.

[0039] (16) In the manufacturing apparatus of (14) or (15) above, the laser light source may further include a diffractive optical element that splits the laser into multiple beams. According to the manufacturing apparatus of (16) above, the processing efficiency for the superconducting wire to be cut is improved.

[0040] (17) In the manufacturing apparatus described in (14) to (16) above, the first transport mechanism may be located upstream of the second transport mechanism in the transport direction of the superconducting wire to be cut. The first transport mechanism may have a plurality of rollers arranged in a staggered pattern. According to the manufacturing apparatus described in (17) above, the deviation of the laser focus caused by the warping of the superconducting wire to be cut can be further suppressed.

[0041] (18) In the manufacturing apparatus described in (14) to (17) above, the pulley may have an outer circumferential surface that contacts the first main surface. A groove extending along the circumferential direction of the pulley may be formed on the outer circumferential surface. According to the manufacturing apparatus described in (18) above, it is possible to suppress the generation of debris on the pulley after the laser penetrates the superconducting wire to be cut.

[0042] (19) In the manufacturing apparatus of (18) above, a flow channel may be formed inside the pulley. The flow channel may be open at the bottom surface of the groove. When the superconducting wire to be cut is supported by the pulley, the superconducting wire to be cut may be attracted through the flow channel. According to the manufacturing apparatus of (19) above, it is possible to remove debris generated after the laser penetrates the superconducting wire to be cut from the laser irradiation site.

[0043] [Details of the embodiments of this disclosure] The embodiments of this disclosure will be described in detail with reference to the drawings. In the following drawings, the same or corresponding parts will be denoted by the same reference numerals, and redundant descriptions will not be repeated.

[0044] (Composition of superconducting wire 10) The structure of the superconducting wire 10 is described below. The superconducting wire 10 is the superconducting wire to be cut.

[0045] As shown in Figures 1 and 2, the superconducting wire 10 comprises a base material 11, an intermediate layer 12, a superconducting layer 13, and a protective layer 14. The superconducting wire 10 has a main surface 10a and a main surface 10b. The main surfaces 10a and 10b are end faces in the thickness direction of the superconducting wire 10. The main surface 10b is the opposite surface of the main surface 10a. The main surface 10a is made of the base material 11. The main surface 10b is made of the protective layer 14.

[0046] Let W be the width of the superconducting wire 10. W is the width of the superconducting wire 10 in the width direction. The width direction of the superconducting wire 10 is perpendicular to both the longitudinal direction and the thickness direction of the superconducting wire 10. W is, for example, 10 mm or more. W may be 15 mm or more, 20 mm or more, 30 mm or more, 50 mm or more, or 100 mm or more. W may be 300 mm or less, 250 mm or less, or 200 mm or less.

[0047] The base material 11 has a main surface 11a and a main surface 11b. The main surfaces 11a and 11b are end faces in the thickness direction of the base material 11. The main surface 11a constitutes the main surface 10a. The main surface 11b is the opposite surface to the main surface 11a. The base material 11 is a clad material having, for example, a tape member made of stainless steel as a constituent material, a copper (Cu) layer disposed on the main surface of the tape member, and a nickel (Ni) layer disposed on the copper layer. In the copper layer, the copper crystals are oriented. Because the copper crystals are oriented in the copper layer, the nickel crystals are also oriented in the nickel layer. The tape member and the nickel layer constitute the main surface 11a and the main surface 11b, respectively. The base material 11 may also be a tape member made of a metallic material such as Hastelloy® or stainless steel. In this case, the crystals in the tape member do not need to be oriented. The thickness of the base material 11 is, for example, 130 μm or less. The thickness of the substrate 11 may be 100 μm or less, or 50 μm or less. For example, the thickness of the substrate 11 may be 30 μm or more.

[0048] The intermediate layer 12 is placed on the substrate 11. More specifically, the intermediate layer 12 is placed on the main surface 11b. The intermediate layer 12 is composed of at least one of the following: yttria-stabilized zirconium oxide (YSZ), CeO2 (cerium oxide), magnesium oxide (MgO) aluminum oxide (Al2O3), yttrium oxide (Y2O3), lanthanum manganate (LaMnO3), gadolinium zirconate (Gd2Zr2O7), and strontium titanate (SrTiO3). If the substrate 11 has a tape member made of stainless steel, a copper layer, and a nickel layer, the intermediate layer 12 is composed of, for example, a yttrium oxide layer, a yttria-stabilized zirconium oxide layer, and a cerium oxide layer. Since the crystals of the constituent material are oriented in the nickel layer, the crystals of the constituent material are also oriented in these layers.

[0049] When the base material 11 is a tape material such as Hastelloy, the intermediate layer 12 may consist of a base layer, an IBAD (Ion Beam Assisted Deposition) layer placed on the base layer, and a surface layer placed on the IBAD layer. The base layer is, for example, formed by laminating an aluminum oxide layer and a yttrium oxide layer. The IBAD layer is, for example, a magnesium oxide layer. The IBAD layer is a layer formed by the IBAD method, and the crystals of the constituent materials are oriented in the IBAD layer. The surface layer is, for example, formed by laminating a magnesium oxide layer and a lanthanum manganate layer. Since the crystals of the constituent materials are oriented in the IBAD layer, the crystals of the constituent materials are also oriented in the surface layer. Note that the constituent materials of the intermediate layer 12 are not limited to those described above.

[0050] The superconducting layer 13 is placed on the intermediate layer 12. The constituent material of the superconducting layer 13 is an oxide superconductor. A specific example of an oxide superconductor is REBa2Cu3O xThese are examples. RE stands for rare earth element. Rare earth elements include, for example, gadolinium (Gd), yttrium (Y), europium (Eu), holmium (Ho), ytterbium (Yb), samarium (Sm), dysprosium (Dy), and neodymium (Nd). However, rare earth elements are not limited to these. As described above, the crystals of the constituent material are oriented in the intermediate layer 12, and therefore the crystals of the constituent material are also oriented in the superconducting layer 13. More specifically, in the superconducting layer 13, the c-axis of the crystals of the constituent material is oriented along the direction normal to the main surface 11b.

[0051] The protective layer 14 is placed on the superconducting layer 13. The constituent material of the protective layer 14 is, for example, silver (Ag) or a silver alloy.

[0052] (Method for manufacturing a superconducting wire using superconducting wire 10) The following describes a method for cutting the superconducting wire 10, that is, a method for manufacturing a superconducting wire using the superconducting wire 10.

[0053] As shown in Figure 3, the superconducting wire 10 is cut using a manufacturing apparatus 100. The manufacturing apparatus 100 includes a reel 20, a plurality of reels 21, a transport mechanism 30, a transport mechanism 31, a pulley 40, a laser light source 50, and a gas supply mechanism 60.

[0054] The superconducting wire 10 is wound around the reel 20. Each of the reels 21 is wound with superconducting wire obtained by cutting the superconducting wire 10, that is, superconducting wire with a width smaller than the width W of the superconducting wire 10. The number of reels 21 is equal to, for example, the number of superconducting wires obtained by cutting. Figure 3 shows an example in which each of the reels 21 is arranged so that the rotation axes of each reel 21 are not coaxial but offset, however, each of the reels 21 may be arranged so that the rotation axes are coaxial.

[0055] The conveying mechanisms 30 and 31 are spaced apart from each other. The conveying mechanism 30 mainly has a reel 20 and a drive source such as a motor that rotates the reel 20. The conveying mechanism 31 mainly has a reel 21 and a drive source such as a motor that rotates the reel 21. The conveying mechanism 30 is upstream of the conveying mechanism 31 in the direction of conveying the superconducting wire 10. The radii of the reel 20 and the radii of the reel 21 are greater than or equal to the allowable bending radius of the superconducting wire 10. The conveying mechanism 30 may further have, for example, a plurality of rollers 30a. The plurality of rollers 30a are arranged, for example, in a staggered pattern. That is, the rollers 30a that contact the main surface 10a and the rollers 30a that contact the main surface 10b are arranged adjacent to each other in the longitudinal direction of the superconducting wire 10, and their positions in the direction normal to the main surface 10a are different. The conveying mechanism 31 may further have, for example, a plurality of rollers 31a. Multiple rollers 31a may be arranged, for example, in a staggered pattern. The radii of roller 30a and roller 31a are greater than or equal to the allowable bending radius of the superconducting wire 10. The diameters of roller 30a and roller 31a are smaller than the diameters of reel 20 and reel 21. The diameters of roller 30a and roller 31a may be larger than the diameters of reel 20 and reel 21.

[0056] The conveying mechanisms 30 and 31 convey the superconducting wire 10 along its longitudinal direction by winding the superconducting wire 10, which has been fed out from the reel 20, onto the reel 21 and continuously unwinding it with rollers 30a and 31a. While the superconducting wire 10 is being conveyed, tension is applied to the superconducting wire 10 mainly by the reels 20 and 21. The rollers 30a and 31a are driven rollers that rotate in accordance with friction with the superconducting wire 10, and they feed the superconducting wire 10 from the reel 20 toward the reel 21. At least one of the rollers 30a or at least one of the rollers 31a may be rotated by a drive source such as a motor. This makes it possible to adjust the tension applied to the superconducting wire 10 between the reel 20 and the reel 21.

[0057] In the illustrated example, the number of rollers 30a and rollers 31a is three, but the number of rollers 30a and rollers 31a is not limited to these and can be changed. Also, the conveying mechanism 31 does not necessarily have to have multiple rollers 31a.

[0058] Pulley 40 is positioned between reels 20 and 21, and further between transport mechanisms 30 and 31. The superconducting wire 10 is supported by pulley 40, for example, on its main surface 10b. Pulley 40 rotates while supporting the superconducting wire 10. The superconducting wire 10 may be pushed upward in the direction from the main surface 10b toward the main surface 10a at the point where it is in contact with pulley 40. As shown in Figure 3, for example, by positioning pulley 40 such that the rotation axis of pulley 40 is closer to the laser light source 50 than the plane passing through the rotation axis of reel 20 and the rotation axis of the reel 21 closest to pulley 40, the superconducting wire 10 will be pushed upward. Alternatively, the diameter of the pulley 40 may be made larger than the diameters of the reel 20 and the reel 21 to push up the superconducting wire 10, or a drive mechanism may be attached to the pulley 40 to push up the pulley 40 so that the superconducting wire 10 moves closer to the laser light source 50. In addition, by arranging the pulley 40 so that the superconducting wire 10, which is under tension from the reel 20 and the reel 21, is pushed up in the direction toward the laser light source 50, the curvature of the superconducting wire 10 will be corrected.

[0059] As shown in Figures 4 to 6, the pulley 40 has an outer circumferential surface 41. The outer circumferential surface 41 is in contact with the main surface 10b. Multiple grooves 42 are formed on the outer circumferential surface 41. The spacing between adjacent grooves 42 is set according to the width of the superconducting wire obtained by cutting. The grooves 42 extend along the circumferential direction of the pulley 40. The spacing between adjacent grooves 42 may be smaller than, for example, the width of the superconducting wire obtained from the superconducting wire 10 by cutting.

[0060] The laser light source 50 generates a laser L. The laser L is irradiated onto the main surface 10a of the superconducting wire 10, which is supported by the pulley 40, while the superconducting wire 10 is being transported. The wavelength of the laser L is, for example, in the green band or the ultraviolet band. The green band is the band where the wavelength is between 490 nm and 550 nm. The ultraviolet band is the band where the wavelength is 380 nm or less.

[0061] As shown in Figure 7A, a fixed optical system may be used to fix the irradiation position on the main surface 10a of the laser L. In this case, the cutting of the superconducting wire 10 will progress as the superconducting wire 10 is transported (see the solid arrow in the figure).

[0062] As shown in Figure 7B, a galvanometer scanner may be used to scan the irradiation position on the main surface 10a of the laser L. When a galvanometer scanner is used, scanning of the irradiation position of the laser L is possible both along the longitudinal direction of the superconducting wire 10 and along the width direction of the superconducting wire 10. For example, scanning of the irradiation position of the laser L is performed along the longitudinal direction of the superconducting wire 10 (see the dotted arrow in the figure). In this case, the superconducting wire 10 is not cut in a single scan (i.e., the laser L does not penetrate the superconducting wire 10 in a single scan). From another point of view, the superconducting wire 10 is cut by scanning the laser L multiple times. Scanning of the irradiation position of the laser L along the longitudinal direction of the superconducting wire 10 may be performed after changing the irradiation position of the laser L in the width direction of the superconducting wire 10 after a predetermined number of scans (see the dotted arrow in the figure).

[0063] As shown in Figure 3, when the laser L is irradiating the main surface 10a, an assist gas AG may be supplied from the gas supply mechanism 60 to the vicinity of the irradiation position of the laser L. The assist gas AG is, for example, air. The assist gas AG may also be an inert gas such as nitrogen.

[0064] In the above, an example was described in which there are multiple reels 21, but there may be only one reel 21. When there is only one reel 21, the superconducting wire 10 is wound onto the reel 21 with an uncut portion remaining at the end in the longitudinal direction, and the uncut portion is removed separately. In the example shown in Figure 3, there are two reels 21, but when there are two reels 21, the superconducting wire 10 with a predetermined width obtained by cutting the superconducting wire 10 may be wound onto one reel 21, and the remaining portion of the superconducting wire 10 after removing the superconducting wire obtained by cutting may be wound onto the other reel 21. In the above, an example was shown in which the superconducting wire 10 is supported by the pulley 40 on the main surface 10b, but the superconducting wire 10 may also be supported by the pulley 40 on the main surface 10a. In this case, the superconducting wire 10 is pushed upward in the direction from the main surface 10a to the main surface 10b at the point where it is in contact with the pulley 40, and the laser L is irradiated onto the main surface 10b of the superconducting wire 10 that is supported by the pulley 40.

[0065] (Effects of a manufacturing method for superconducting wires using superconducting wire 10) The following describes the effects of a method for manufacturing superconducting wires using the superconducting wire 10.

[0066] There is a difference between the thermal expansion coefficients of the constituent materials of the base material 11 and the thermal expansion coefficients of the constituent materials of the intermediate layer 12 and the superconducting layer 13. Due to this difference in thermal expansion coefficients, the superconducting wire 10 may warp in the width direction.

[0067] If the superconducting wire 10 warps in the width direction, the position of the laser L shifts in the thickness direction of the superconducting wire 10 compared to the set position set when the superconducting wire 10 is not warped. Due to the shift in the focal position of the laser L, the processing method by the laser L changes from ablation processing to thermal processing, and the thermal effect on the cut area increases.

[0068] However, in the method for manufacturing a superconducting wire using the superconducting wire 10, the superconducting wire 10 is supported by the pulley 40, so the warping described above is corrected by contact with the pulley 40. Therefore, the method for manufacturing a superconducting wire using the superconducting wire 10 makes it possible to suppress the shift in the focus of the laser L caused by the warping of the superconducting wire 10, and consequently, to reduce the thermal effects on the cut portion.

[0069] Furthermore, if the superconducting wire 10 is not supported by the pulley 40, the superconducting wire 10 will vibrate due to the blowing of assist gas AG. This vibration of the superconducting wire 10 also causes a shift in the focal position of the laser L, but the manufacturing method of the superconducting wire using the superconducting wire 10 can suppress this shift in the focal position of the laser L caused by the blowing of assist gas AG. In addition, even if the warping of the superconducting wire 10 is corrected by pressing down on it from above with a jig or the like, debris will accumulate on the jig. In this case, the superconducting wire 10 is covered by the jig or the like, which hinders the supply of assist gas AG to the laser L irradiation point.

[0070] When the irradiation position of laser L is scanned by a galvanometer scanner, the irradiation position of laser L changes before the thermal effects of laser L irradiation become significant, thus further reducing the thermal effects on the cutting area.

[0071] When the transport mechanism 30 has multiple rollers 30a arranged in a staggered pattern, the superconducting wire 10 passes between the multiple rollers 30a during transport, and the warping of the superconducting wire 10 is corrected by the so-called leveling effect. Therefore, in this case, the focal point shift of the laser L caused by the warping of the superconducting wire 10 can be further suppressed.

[0072] In the superconducting wire 10, a warp occurs where the main surface 10a shrinks and the main surface 10b stretches (i.e., a downward convex warp assuming the main surface 10b faces downwards). Therefore, when the superconducting wire 10 is supported by the pulley 40 on the main surface 10b (i.e., on the surface formed by the protective layer 14), the convex surface comes into contact with the outer surface 41, making it easier to correct the warp more effectively. In this case, the cycle time (cutting efficiency) is also improved.

[0073] When the superconducting wire 10 is supported by the pulley 40 on its main surface 10a (i.e., on the surface made up of the base material 11), the cutting caused by the irradiation of the laser L will proceed from the protective layer 14 toward the base material 11. In other words, in this case, the superconducting layer 13 will be cut before the base material 11. As a result, even if the cutting is not complete, the cutting of the superconducting layer 13 will be completed, and the base material 11 will remain uncut. Therefore, even if the superconducting wire 10 is then physically separated, the superconducting layer 13 will not be subjected to much stress. For this reason, when the superconducting wire 10 is supported on its main surface 10a, it is possible to suppress the performance degradation of the superconducting wire 10 due to cutting.

[0074] As the wavelength of laser L decreases, the area ablated by laser L becomes larger than the area thermally processed by laser L. Therefore, when the wavelength of laser L is in the ultraviolet or green band, the superconducting wire 10 is primarily cut by ablation. Furthermore, when the wavelength of laser L is in the green band, the absorption rate for the protective layer 14 is greater than when the wavelength of laser L is in the ultraviolet band.

[0075] If a groove 42 is formed on the outer surface 41, burning between the outer surface 41 and the superconducting wire 10 can be suppressed. In this case, the laser L will not irradiate the pulley 40 until it reaches the bottom of the groove 42 after penetrating the superconducting wire 10. Therefore, the laser L is defocused when it irradiates the pulley 40, making it less likely for debris to be generated from the pulley 40 by the irradiation of the laser L. If an assist gas AG is blown near the irradiation position of the laser L, the assist gas AG makes it easier to remove debris generated from the superconducting wire 10.

[0076] <Example 1> Figure 8 is a cross-sectional view of a superconducting wire 10 according to Modification 1. As shown in Figure 8, the superconducting wire 10 may further have a stabilizing layer 15. The stabilizing layer 15 is disposed on the protective layer 14. The constituent material of the stabilizing layer 15 is, for example, copper or a copper alloy. That is, the stabilizing layer 15 may be formed before the superconducting wire 10 is cut.

[0077] <Modification 2> In the example above, we described the case where the wavelength of laser L is in the green band or the ultraviolet band, but the wavelength of laser L may also be in the infrared band. The infrared band is the band in which the wavelength is 780 nm or greater.

[0078] <Variation 3> Figure 9 is a schematic cross-sectional view of the pulley 40 according to Modification 3. As shown in Figure 9, a flow channel 43 is formed inside the pulley 40. The pulley 40 has a side surface 44, to which a rotary joint 45 is attached. The flow channel 43 opens at the bottom surface of the groove 42 at one end and is connected to the flow channel 45a in the rotary joint 45 at the other end. When the pulley 40 supports the superconducting wire 10, the superconducting wire 10 is attracted through the flow channel 43. When the superconducting wire 10 is cut by the laser L, debris is generated from the superconducting wire 10. This debris is attracted through the opening of the flow channel 43 formed at the bottom surface of the groove 42.

[0079] <Modification 4> Figure 10 is a schematic diagram of a laser light source 50 according to Modification 4. As shown in Figure 10, the laser light source 50 may split a single laser beam L into multiple beams. More specifically, the laser light source 50 may have a diffractive optical element (DOE) 51 and a focusing lens 52. In the example shown in Figure 10, the diffractive optical element 51 is positioned upstream of the focusing lens 52 in the optical path of the laser L, but the focusing lens 52 may be positioned upstream of the diffractive optical element 51 in the optical path of the laser L.

[0080] Figure 11 is a schematic diagram showing the irradiation pattern of laser L when the laser L is split into multiple beams. As shown in Figure 11, the irradiation positions of each of the multiple beams of laser L are spaced apart along the width direction of the superconducting wire 10. In this case, the irradiation positions of each of the multiple beams of laser L are scanned along the longitudinal direction of the superconducting wire 10, for example, by a galvanometer scanner. This makes it possible to cut multiple superconducting wires from the superconducting wire 10 simultaneously, thereby improving processing efficiency. In this case as well, in order to minimize the thermal effect on the superconducting layer 13, the superconducting wire 10 (superconducting layer 13) is not cut in a single scan, for example (it is cut in multiple scans).

[0081] <Modification 5> Figure 12 shows a modified example. 5This is a schematic diagram showing the irradiation mode of the laser L. As shown in Figure 12, the irradiation position of the laser L in the longitudinal direction of the superconducting wire 10 may be offset from the portion of the superconducting wire 10 supported by the pulley 40. When the irradiation position of the laser L in the longitudinal direction of the superconducting wire 10 is offset from the portion of the superconducting wire 10 supported by the pulley 40, the laser L is irradiated onto the superconducting wire 10 in a defocused state. When the laser L is irradiated onto the superconducting wire 10 in a defocused state, the processing mode of the superconducting wire 10 changes from ablation processing to thermal processing, and the processing speed is improved. For example, when processing the superconducting layer 13, the laser L is irradiated without defocusing, while when processing the substrate 11, the laser L is irradiated in a defocused state, thereby achieving both a reduction in the thermal effect on the superconducting layer 13 and an improvement in processing speed. Furthermore, the switching between ablation and thermal processing in the processing of the superconducting wire 10 is not limited to offsetting the irradiation position of the laser L. For example, the processing method can also be switched by changing the pulse width or pulse frequency of the laser L when processing the superconducting layer 13 and when processing the substrate 11.

[0082] <Variation 6> In the above, a process of cutting the superconducting wire 10 to cut out multiple superconducting wires was described, but the processing of the superconducting wire 10 may also be done by scribing. Figure 13 is a plan view of the superconducting wire 10 according to Modification 6 after scribing. As shown in Figure 13, the superconducting layer 13 is cut by irradiation with the laser L, but the base material 11 does not need to be cut. In this case, since the superconducting layer 13 is divided into multiple parts along the width direction of the superconducting wire 10, it is possible to suppress the flow of eddy currents in the superconducting layer 13.

[0083] The embodiments disclosed herein should be considered in all respects to be illustrative and not restrictive. The scope of the present invention is indicated by the claims rather than by the embodiments described above, and all modifications within the meaning and scope of equivalents of the claims are intended to be included. [Explanation of Symbols]

[0084] 10 Superconducting wire, 10a Main surface, 10b Main surface, 11 Substrate, 11a Main surface, 11b Main surface, 12 Intermediate layer, 13 Superconducting layer, 14 Protective layer, 15 Stabilizing layer, 20, 21 Reel, 30 Conveying mechanism, 30a Roller, 31 Conveying mechanism, 31a Roller, 40 Pulley, 41 Outer surface, 42 Groove, 43 Flow channel, 44 Side surface, 45 Rotary joint, 50 Laser light source, 51 Diffractive optical element, 52 Focusing lens, 60 Gas supply mechanism, 100 Manufacturing equipment, L Laser, W Width.

Claims

1. A step of preparing a superconducting wire to be cut, having a first main surface and a second main surface which is the opposite surface of the first main surface, The process includes transporting the superconducting wire to be cut along its longitudinal direction using a first transport mechanism and a second transport mechanism, which are spaced apart from each other. The superconducting wire to be cut is supported on the first main surface by a pulley positioned between the first transport mechanism and the second transport mechanism. A method for manufacturing a superconducting wire, further comprising the step of cutting the superconducting wire to be cut by irradiating a laser onto the second main surface of the superconducting wire to be cut, which is supported by the pulley, while the superconducting wire to be cut is being transported.

2. The method for manufacturing a superconducting wire according to claim 1, wherein the irradiation position of the laser on the second main surface is scanned by a galvanometer scanner.

3. The first transport mechanism is located upstream of the second transport mechanism in the transport direction of the superconducting wire to be cut. The method for manufacturing a superconducting wire according to claim 1, wherein the first conveying mechanism has a plurality of rollers arranged in a staggered pattern.

4. The pulley has an outer circumferential surface that contacts the first main surface, The method for manufacturing a superconducting wire according to claim 1, wherein a groove extending along the circumferential direction of the pulley is formed on the outer surface.

5. A flow path is formed inside the pulley. The flow path is open at the bottom surface of the groove, The method for manufacturing a superconducting wire according to claim 4, wherein, when the superconducting wire to be cut is supported by the pulley, the superconducting wire to be cut is attracted through the flow path.

6. The superconducting wire to be cut further comprises a base material, an intermediate layer disposed on the base material, and a superconducting layer disposed on the intermediate layer. The method for manufacturing a superconducting wire according to claim 1, wherein the substrate constitutes the second main surface.

7. The superconducting wire to be cut further comprises a base material, an intermediate layer disposed on the base material, and a superconducting layer disposed on the intermediate layer. The method for manufacturing a superconducting wire according to claim 1, wherein the substrate constitutes the first main surface.

8. The superconducting wire to be cut further has a protective layer, The method for manufacturing a superconducting wire according to claim 6, wherein the protective layer is disposed on the superconducting layer.

9. The superconducting wire to be cut further has a stabilizing layer, The method for manufacturing a superconducting wire according to claim 8, wherein the stabilizing layer is disposed on the protective layer.

10. The method for manufacturing a superconducting wire according to claim 1, wherein the wavelength of the laser is in the green band, ultraviolet band, or infrared band.

11. A method for manufacturing a superconducting wire according to any one of claims 1 to 10, wherein an assist gas is supplied to the laser irradiation site.

12. The aforementioned laser is split into multiple beams by a diffractive optical element, The method for manufacturing a superconducting wire according to claim 1, wherein the irradiation position of each of the plurality of beams is scanned by a galvanometer scanner.

13. The method for manufacturing a superconducting wire according to claim 1, wherein, on the second main surface, the irradiation position of the laser is offset along the longitudinal direction of the superconducting wire to be cut.

14. A first transport mechanism and a second transport mechanism, Pulley and, Equipped with a laser light source, The first transport mechanism and the second transport mechanism are arranged to be spaced apart from each other and transport the superconducting wire to be cut along the longitudinal direction of the superconducting wire to be cut. The pulley is positioned between the first transport mechanism and the second transport mechanism and supports the first main surface of the superconducting wire to be cut. A manufacturing apparatus in which the laser light source irradiates a second main surface located on the portion of the superconducting wire to be cut, which is supported by the pulley, with a laser.

15. The manufacturing apparatus according to claim 14, wherein the laser light source has a galvanometer scanner that scans the irradiation position of the laser.

16. The manufacturing apparatus according to claim 15, wherein the laser light source further comprises a diffractive optical element that splits the laser into multiple beams.

17. The first transport mechanism is located upstream of the second transport mechanism in the transport direction of the superconducting wire to be cut. The manufacturing apparatus according to claim 14, wherein the first conveying mechanism has a plurality of rollers arranged in a staggered pattern.

18. The pulley has an outer circumferential surface that contacts the first main surface, The manufacturing apparatus according to any one of claims 14 to 17, wherein a groove extending along the circumferential direction of the pulley is formed on the outer circumferential surface.

19. A flow path is formed inside the pulley. The flow path is open at the bottom surface of the groove, The manufacturing apparatus according to claim 18, wherein when the superconducting wire to be cut is supported by the pulley, the superconducting wire to be cut is attracted through the flow path.

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