Packaging containers and packaging methods

Abstract

To provide a packing container and a packing method that reduce vibration and shock to a device to be transported and reduce deterioration of a vacuum level in a vacuum chamber.SOLUTION: A packing container 1 comprises a first container 2 that can maintain an internal pressure below atmospheric pressure and can house a device 3 having a vacuum chamber 31 and a fixing structure 4 that fixes the device inside the first container and away from an inner wall. In the packing container, the first container can maintain an internal pressure at 100 Pa or less. In the packing container, the fixing structure comprises a first fixing member 41 supporting the device and a second fixing member 42 provided between the first fixing member and the first container.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a packaging container and a packaging method, and particularly to a packaging container and a packaging method for an apparatus having a vacuum chamber.

Background Art

[0002] When transporting an apparatus including a vacuum chamber that is maintained with a vacuum inside, such as an electron beam irradiation apparatus, as a component of the apparatus, it may be necessary to transport the apparatus.

[0003] Conventionally, even for an apparatus including a vacuum chamber, transportation has been carried out using a packaging container filled with a cushioning material or a vibration-proof material. Further, Patent Document 1 discloses a packaging structure for a metal tube. The packaging structure of the metal tube in Patent Document 1 bundles and seals a plurality of rod-shaped metal tubes in order to prevent discoloration of the surface of the metal tube or adhesion of dust to the surface, and includes a sealed bag whose interior is depressurized or evacuated. The sealed bag is interposed with a cushioning material and housed in a wooden box.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] However, since the interior of the conventionally used packaging container is in an atmospheric pressure state, the degree of vacuum in the vacuum chamber deteriorates during transportation. Also in Patent Document 1, since the wooden box housing the sealed bag is in an atmospheric pressure state, the degree of vacuum in the sealed bag deteriorates during transportation.

[0006] One aspect of this disclosure has been made in view of the above-mentioned problems and aims to provide a packaging container and a packaging method that can reduce vibration and shock to the equipment to be transported during transport, while also reducing deterioration of the vacuum level of the vacuum chamber during transport. [Means for solving the problem]

[0007] To solve the aforementioned problems, a packaging container according to one aspect of the present invention comprises a first container capable of maintaining an internal pressure below atmospheric pressure and accommodating a device equipped with a vacuum chamber, and a fixing structure for fixing the device inside the first container and away from the inner wall.

[0008] Furthermore, in order to solve the above-mentioned problems, a packaging method according to one aspect of the present invention is a packaging method for a device equipped with a vacuum chamber, comprising the steps of: housing the device in a first container; fixing the device inside the first container away from the inner wall of the first container; and reducing the pressure inside the first container to below atmospheric pressure. [Effects of the Invention]

[0009] According to one aspect of the present invention, it is possible to reduce vibration and shock to the transported equipment during transport, while also reducing the deterioration of the vacuum level of the vacuum chamber during transport. [Brief explanation of the drawing]

[0010] [Figure 1] This is a cross-sectional view of a packaging container according to Embodiment 1 of the present invention, when cut by a plane parallel to the XZ plane. [Figure 2] This is a cross-sectional view of a packaging container according to Embodiment 1 of the present invention, when cut by a plane parallel to the YZ plane. [Figure 3] This is a cross-sectional view of a packaging container according to Embodiment 2 of the present invention, when cut by a plane parallel to the XZ plane. [Figure 4] This is a cross-sectional view of a packaging container according to Embodiment 2 of the present invention, when cut by a plane parallel to the YZ plane. [Figure 5]This is a cross-sectional view of a modified example of the packaging container according to Embodiment 2, when cut by a plane parallel to the XZ plane. [Figure 6] This is a cross-sectional view of a modified example of the packaging container according to Embodiment 2, taken by cutting it with a plane parallel to the YZ plane. [Figure 7] This flowchart shows a general overview of an exemplary packaging method according to the present invention. [Modes for carrying out the invention]

[0011] First, before describing the packaging container of this application, we will describe the device to be packaged in the packaging container of this application. The device to be packaged in the packaging container is a device that includes a vacuum chamber as part of the device. In this embodiment, we will describe an example in which the device is a main component of an electron beam irradiation apparatus. Hereinafter, for simplicity, the main component of the electron beam irradiation apparatus packaged in packaging container 1 will be referred to as the apparatus. That is, the apparatus of this application may be at least a part of an electron beam irradiation apparatus.

[0012] An electron beam irradiation device is a device used to irradiate an object with an electron beam. Electron beam irradiation devices are suitably used, for example, in the production of sheet materials by crosslinking or polymerization of components in a coating film on a substrate, or in the sterilization or disinfection of articles.

[0013] The electron beam irradiation apparatus includes, for example, an electrode section for generating an electron beam, an insulator for supporting the electrode section, and a vacuum chamber for housing the electrode section supported by the insulator. The electron beam irradiation apparatus may further include a vacuum pump for reducing the pressure inside the vacuum chamber, a shield for housing the vacuum chamber and the object to be irradiated, and a DC power supply.

[0014] In this embodiment, the vacuum chamber 31 containing the electrode section is the device 3, which is packaged in the packaging container 1. The device 3 may also include other components of the electron beam irradiation device.

[0015] As shown in FIGS. 1 and 2, the apparatus 3 in the following exemplary embodiments includes a vacuum chamber 31. The vacuum chamber 31 has an extraction port 32 for extracting an electron beam to the outside.

[0016] The vacuum chamber 31 may be a substantially cylindrical hollow container whose peripheral wall is formed of a conductor. Examples of the conductor include stainless steel. The vacuum chamber 31 may have an exhaust port for decompression (not shown). By connecting the exhaust port to a vacuum pump such as a turbo molecular pump and operating the vacuum pump, it is possible to decompress the inside of the vacuum chamber 31. During the operation of the electron beam irradiation apparatus, the inside of the vacuum chamber 31 is maintained at a predetermined degree of vacuum (for example, 1×10 -6 Pa to 1×10 -5 Pa).

[0017] The apparatus 3 can also be transported with the inside of the vacuum chamber 31 at atmospheric pressure during transportation. However, due to the characteristics of the apparatus, it is preferable to transport it while maintaining the vacuum (decompression) state. Also, when transporting with the inside at atmospheric pressure, since it is necessary to decompress again with a vacuum pump after transportation, it is also preferable to transport with the inside in a vacuum from the viewpoint of work efficiency. However, when transporting with the inside in a vacuum, usually, the vacuum pump is removed and transported in a vacuum-sealed state. Therefore, the degree of vacuum gradually deteriorates during transportation.

[0018] Also, the extraction port 32 provided in a part of the peripheral wall of the vacuum chamber 31 is formed of a metal foil of about 1 mm or less. Examples of the metal foil include titanium or aluminum foil. Since the metal foil is very thin, it is easily damaged.

[0019] The present invention provides a packaging container and a packaging method that can reduce the possibility of deterioration of the degree of vacuum in the vacuum chamber 31 of the apparatus 3. Further, the present invention provides a packaging container and a packaging method that can reduce the possibility that a part of the apparatus 3 that is easily damaged is damaged during transportation.

[0020] Hereinafter, a packaging container and packaging method according to one embodiment of the present invention will be described with reference to the drawings. However, for the sake of convenience of explanation, the drawings below show only the components necessary for describing the embodiment in a simplified manner. Therefore, the packaging container and the device housed in the packaging container according to the embodiment may include any components not shown in the drawings. Also, the dimensions of the components in each drawing may differ from the dimensions of the actual components and the dimensional ratios of each component. The following description is an example of a packaging container according to the present invention, and the technical scope of the present invention is not limited to the illustrated example.

[0021] In this specification, the positive Z-axis direction as shown in the drawings is defined as the upward direction. The negative Z-axis direction is the downward direction, or in other words, the direction of gravity. The Y-direction is the longitudinal direction of the device 3, and the X-axis is the axis perpendicular to the Y-axis and Z-axis.

[0022] [Embodiment 1] <Composition of Packaging Container 1> The general configuration of the packaging container 1 according to Embodiment 1 will be explained using Figures 1 and 2. Figure 1 is a cross-sectional view of the packaging container 1 according to Embodiment 1 when cut by a plane parallel to the XZ plane. Specifically, it is a cross-sectional view taken along the arrow when the packaging container 1 is cut at the position of line II shown in Figure 2. Figure 2 is a cross-sectional view of the packaging container 1 according to Embodiment 1 when cut by a plane parallel to the YZ plane. Specifically, it is a cross-sectional view taken along the arrow taken along the position of line II-II shown in Figure 1.

[0023] As shown in Figures 1 and 2, the packaging container 1 comprises a first container 2 for housing the device 3, and a fixing structure 4 for fixing the device 3 inside the first container 2 but away from the inner wall. The packaging container 1 further comprises a depressurizing pump 5 for maintaining the pressure inside the first container 2 below atmospheric pressure after packaging is complete, and a second container 6 for housing the first container 2 and the depressurizing pump 5. The packaging container 1 also has a vibration-damping material 7 between the first container 2 and the second container 6.

[0024] (1st container 2) The first container 2 is a container capable of maintaining an internal pressure below atmospheric pressure and accommodating the device 3. After accommodating the device 3, the first container 2 is sealed. Subsequently, the internal pressure of the first container 2 is reduced to below atmospheric pressure by the depressurizing pump 5. In other words, the pressure inside the first container after packing is below atmospheric pressure. Packing completion specifically means that the first container 2 is closed, the internal pressure is reduced by the depressurizing pump 5, and the packing container 1 is ready for transport. Alternatively, packing completion means that the first container 2 and the depressurizing pump 5 are placed inside the second container 6, the second container 6 is closed, and the packing container 1 is ready for transport. Furthermore, during transport of the packing container 1, the reduced pressure inside the first container 2 can be maintained by the depressurizing pump 5.

[0025] The first container 2 is not particularly limited as long as it can accommodate the device 3 and withstand reduced pressure after sealing. As shown in Figures 1 and 2, the shape of the first container 2 may be a cube or a rectangular parallelepiped. A cube or rectangular parallelepiped container is easy to manufacture, thus reducing the manufacturing cost of the packaging container. Also, the cube or rectangular parallelepiped shape of the first container 2 makes it easier to pack and unpack the device 3. This improves work efficiency. Furthermore, a cube or rectangular parallelepiped container has excellent stability, so the containers themselves can be stacked for storage, achieving high storage capacity. The material of the first container 2 may be, for example, stainless steel or duralumin. If the material of the first container 2 is duralumin, it can be made lighter. The thickness of each wall constituting the first container 2 may be, for example, 3 mm to 10 mm. By making each wall 6 mm or thicker, it can withstand reduced pressure conditions where the internal pressure is, for example, 100 Pa or less. The first container 2 may have a reinforcing structure to reinforce its strength against reduced pressure.

[0026] (Fixed structure 4: Same as above) The fixing structure 4 is a structure for fixing the device 3 inside the first container 2, away from the inner wall. The fixing structure 4 can be used under reduced pressure or in a vacuum, and is not particularly limited as long as it can fix the device 3 away from the inner wall of the first container 2. For example, it may be a metal spring or conventional packaging material such as urethane. The packaging material is preferably a metal or inorganic material in order to suppress outgassing. Alternatively, the fixing structure 4 may include a first fixing member 41 that supports the device 3, and a second fixing member 42 provided between the first fixing member 41 and the first container 2, as shown in Figures 1 and 2. The second fixing member 42 may be fixed to the first fixing member 41 and the inner wall of the first container 2. By using the fixing structure 4, it is possible to fix the device 3 at a position away from the wall surface inside the first container 2, thereby mitigating vibrations and shocks to the device 3 during transport and reducing the possibility of damage to the device 3.

[0027] The first fixing member 41 is formed to match the shape of the device 3 and is a member that directly supports the device 3 by contacting it. For example, the first fixing member 41 may be provided along the side surface of the vacuum chamber 31, as shown in Figures 1 and 2.

[0028] The second fixing member 42 is provided between the first fixing member 41 and the inner wall of the first container 2. In the packaging container 1, the second fixing member 42 is a fixing member that includes an elastic metal spring, as shown in the examples in Figures 1 and 2. The second fixing member 42 may also be provided between the first fixing member 41 and the bottom surface of the first container 2, and between the first fixing member 41 and the four sides of the first container 2. At least a portion of the second fixing member 42 may be provided between the device 3 and the first container 2, as shown by the second fixing member 42A in Figure 2.

[0029] The number and placement of the second fixing members 42 are not limited to the example shown in the drawing, and can be appropriately selected depending on the size of the device 3 and the first container 2, the load capacity of the second fixing members 42, etc. Since the second fixing members 42 are elastic members, vibrations and shocks to the device 3, which is the object to be transported, can be further reduced during transport.

[0030] The second fixing member 42 is not particularly limited as long as it is an elastic material, and may include an elastic body such as a metal spring, rubber, or gel. Since the inside of the first container 2 is kept under reduced pressure, it is more preferable that the second fixing member 42 is made of a material that produces little outgassing. Examples of objects that are elastic and produce little outgassing include fixing members that include a metal spring. The second fixing member 42 may be a combination of fixing members containing different elastic bodies. However, when using a combination, it is preferable that the fixing members facing each other, such as front and back, left and right, and up and down, use elastic bodies made of the same material.

[0031] (Reducing pressure pump 5: Same as above) The depressurizing pump 5 is a pump for reducing the pressure inside the first container 2. In the packaging container of this application, the pressure inside the first container 2 is reduced to below atmospheric pressure by the depressurizing pump 5. In the packaging container of this application, after reducing the pressure inside the first container 2, the depressurizing pump 5 may be removed, and the first container 2 may be left in a vacuum-sealed state. By reducing the pressure inside the first container 2 to below atmospheric pressure after packaging is complete or during transport, the rate of leakage from the vacuum chamber 31 of the device 3, that is, the rate of vacuum deterioration in the vacuum chamber 31, can be reduced.

[0032] Alternatively, as in the packaging container 1 according to Embodiment 1, the depressurizing pump 5 may be fixed to the top surface of the first container 2, and the pressure inside the first container 2 may be maintained below atmospheric pressure while operating the depressurizing pump 5 during transport. In other words, the packaging container 1 may further include a depressurizing pump 5 for maintaining the pressure inside the first container 2 below atmospheric pressure after packaging is complete. The depressurizing pump 5 includes a pump body 51, a battery 52 for supplying power to the pump body 51, and a pipe 53 connecting the pump body 51 to the inside of the first container 2, as shown in Figure 2. The depressurizing pump 5 may also be a vacuum pump. By including a depressurizing pump in the packaging container 1, the rate of vacuum deterioration in the vacuum chamber 31 of the device 3 can be further reduced. The higher the vacuum level inside the first container 2 after packaging is complete or during transport, the lower the rate of vacuum deterioration in the vacuum chamber 31 can be. Therefore, the pressure inside the first container 2 after packaging is complete or during transport may be, for example, 100 Pa or less. By keeping the pressure inside the first container 2 below 100 Pa, the rate of vacuum deterioration in the vacuum chamber 31 can be reduced to less than 1 / 1000th of the rate when the surrounding environment of the vacuum chamber 31 is at atmospheric pressure.

[0033] The location where the depressurizing pump 5 is installed is not limited to the top surface of the first container 2, but can be anywhere outside the first container 2. For example, the depressurizing pump 5 may be attached to the inner surface (e.g., the bottom surface or inner side surface) of the second container 6. When the depressurizing pump 5 is fixed to the outer surface of the first container 2, vibration-damping material such as a rubber sheet may be provided between the depressurizing pump 5 and the first container 2. When the depressurizing pump 5 is fixed to the inner surface of the second container 6, vibration-damping material such as a rubber sheet may be provided between the depressurizing pump 5 and the second container 6. By providing such vibration-damping material, vibrations of the operating pump are suppressed, reducing the possibility of pump failure. In addition, the degree to which pump vibrations are transmitted to the first container 2 is reduced, further reducing the possibility of damage to the device 3 inside the first container 2.

[0034] (2nd container 6) The second container 6 is a container that houses the first container 2 and the vacuum pump 5.

[0035] The second container 6 may be, for example, a rectangular parallelepiped container as shown in Figures 1 and 2. The second container 6 should be large enough to accommodate the first container 2 and the vacuum pump 5 installed outside the first container 2.

[0036] By providing the second container 6, the operating noise of the decompression pump 5 can be suppressed from leaking to the outside. In addition, since the second container 6 can protect the first container 2, the possibility of the first container 2 being damaged and the decompression condition inside the first container 2 deteriorating can be reduced.

[0037] (Vibration isolation material 7) The packaging container 1 is equipped with a vibration-damping material 7 between the second container 6 and the first container 2. Even if the second container 6 is subjected to an impact, the cushioning effect of the vibration-damping material 7 reduces the degree to which the impact is transmitted to the operating depressurizing pump 5 installed on the outside of the first container, thereby reducing the possibility of failure of the depressurizing pump 5. In addition, vibrations and impacts to the first container 2 and the device 3 can be mitigated, thereby reducing the possibility of damage to the device 3. Furthermore, since the second container 6 and the vibration-damping material 7 protect the first container 2 from vibrations and impacts, the required strength of the first container 2 can be reduced, and the first container 2 can be simplified.

[0038] In the examples shown in Figures 1 and 2, the vibration-damping material 7 is provided between the bottom surface of the first container 2 and the bottom surface of the second container, and between the outer surface of the first container 2 and the inner surface of the second container 6. The number and placement of the vibration-damping material 7 are not limited to the examples shown in the drawings and can be appropriately selected depending on the size of the first container 2 and the second container 6, the size and load capacity of the vibration-damping material 7, etc.

[0039] The vibration-damping material 7 may be, for example, a metal spring, rubber and / or gel, or a mixture thereof. However, even when used in a mixed manner, it is preferable that opposing members, such as those in the front / back, left / right, and up / down directions, are made of the same material.

[0040] [Embodiment 2] Other embodiments of the present invention will be described below. For the sake of clarity, components having the same function as those described in the above embodiments will be denoted by the same reference numerals, and their descriptions will not be repeated. In Embodiment 2, the packaging container 1A will be described using Figures 3 and 4.

[0041] Figure 3 is a cross-sectional view of the packaging container 1A when cut by a plane parallel to the XZ plane. Specifically, Figure 3 is a cross-sectional view taken along the line III-III shown in Figure 4. Figure 4 is a cross-sectional view of the packaging container 1A when cut by a plane parallel to the YZ plane. Specifically, Figure 4 is a cross-sectional view taken along the line IV-IV shown in Figure 3.

[0042] Packaging container 1A differs from Embodiment 1 in that it has a cylindrical first container 2A. Also, because the first container 2A is cylindrical, the pressure reducing pump 5 is installed on a base 54. In all other respects, it is the same as Embodiment 1.

[0043] Since the base 54 has a shape that conforms to the curved surface of the first container 2 at its lower end and a flat upper end, the pressure reducing pump 5 can be installed on the curved surface of the cylindrical first container 2A.

[0044] Since the first container 2A has a cylindrical shape that is highly resistant to reduced pressure, the possibility of the first container 2 deforming due to reduced pressure can be reduced. Furthermore, compared to the first container 2 according to Embodiment 1, the wall thickness of the first container 2A can be reduced, thus making the packaging container lighter.

[0045] <Variation> In the following section, a modified example of Embodiment 2, packaging container 1B, will be described using Figures 5 and 6.

[0046] Figure 5 is a cross-sectional view of the packaging container 1B when it is cut by a plane parallel to the XZ plane. Specifically, Figure 5 is a cross-sectional view taken along the arrow when the packaging container 1B is cut at the position of line VV shown in Figure 6. Figure 6 is a cross-sectional view of the packaging container 1B when it is cut by a plane parallel to the YZ plane. Specifically, Figure 6 is a cross-sectional view taken along the arrow when the packaging container 1B is cut at the position of line VI-VI shown in Figure 5.

[0047] Packaging container 1B differs from packaging container 1A of Embodiment 2 in that the vacuum pump 5 is positioned on the flat surface of the first container 2A, in other words, on the end face of the first container 2A. When the first container 2A is cylindrical, as in packaging container 1B, the vacuum pump 5 can be easily fixed to the first container 2A by fixing the vacuum pump 5 to the flat surface of the first container 2A.

[0048] <Packaging Method> In the following section, as an example of a packaging method using the packaging container of the present application, a packaging method for packaging the device 3 using the packaging container 1 according to Embodiment 1 will be described with reference to Figure 7. Figure 7 is a flowchart showing the general flow of an exemplary packaging method.

[0049] The packaging method using the packaging container 1 according to Embodiment 1 is carried out, for example, according to the flowchart shown in Figure 7. Note that the flowchart shown in Figure 7 is just one example and is not limited thereto.

[0050] As shown in Figure 7, an exemplary packaging method of the present invention includes an apparatus containment step S1, a fixing step S2, a depressurization step S3, a vibration damping material installation step S4, and a first container containment step S5. Each step in this packaging method will be described in detail below.

[0051] (Device housing step S1) The device housing step S1 is the step of housing the device 3 inside the first container 2.

[0052] (Fixed step S2) The fixing step S2 is the step of fixing the device 3, which was housed in the device housing step S1, inside the first container 2 using the fixing structure 4, so that it is separated from the inner wall of the first container 2. The fixing structure 4 that supports and fixes the device 3 inside the first container 2 may be installed and fixed to the first container 2 in advance before the device 3 is housed. In this case, by fixing the device 3 to the fixing structure 4 in the fixing step S2, the device 3 is fixed inside the first container 2 so that it is separated from the inner wall of the first container 2.

[0053] Alternatively, the fixing structure 4 may be pre-fixed to the device 3 outside the first container 2, and then the device 3 and fixing structure 4 may be placed inside the first container 2, and the fixing structure 4 may be fixed to the first container 2. By fixing the device 3 inside the first container 2 as described above in fixing step S2, vibration and shock to the device 3 during transportation can be reduced.

[0054] (Decompression step S3) The depressurization step S3 is a step in which the pressure inside the first container 2 is reduced to below atmospheric pressure. After fixing the device 3 inside the first container 2 and sealing the first container 2, the depressurization pump 5 is activated to reduce the pressure inside the first container 2.

[0055] When the vacuum pump 5 is removed during transport, the pressure inside the first container 2 is reduced to below atmospheric pressure, preferably 100 Pa or less, before the vacuum pump 5 is removed and the first container 2 is sealed. Reducing the pressure inside the first container 2 reduces the deterioration of the vacuum level in the vacuum chamber during transport.

[0056] In the case of a packaging container equipped with a depressurization pump 5 even during transport, such as the packaging container 1 of Embodiment 1, the depressurization pump 5 may continue to operate until the transport of the device 3 using the packaging container 1 is completed. This further reduces the deterioration of the depressurization state inside the first container 2.

[0057] (Vibration isolation material installation step S4) The vibration isolation material installation step S4 is the step of installing the vibration isolation material 7 inside the second container 6, which is a container that further houses the first container 2. The vibration isolation material installation step S4 may be performed simultaneously with the following first container housing step S5.

[0058] (First container placement step S5) The first container placement step S5 is the step of placing the first container 2 inside the second container 6. In the vibration isolation material installation step S4 described above, the first container 2 is placed inside the second container 6, which has vibration isolation material 7 installed inside. At least a portion of the vibration isolation material 7 may be placed between the first container 2 and the second container 6 after the first container 2 has been placed inside the second container 6. After placing the first container 2 inside the second container 6, the second container 6 is closed.

[0059] The above-described packaging method provides a packaging method that can prevent leakage from the vacuum chamber 31 of the device 3 to be transported, while protecting the device 3 from vibration and shock during transport.

[0060] The present invention is not limited to the embodiments described above, and various modifications are possible within the scope of the claims. Embodiments obtained by appropriately combining the technical means disclosed in different embodiments are also included in the technical scope of the present invention. [Explanation of symbols]

[0061] 1, 1A, 1B: Packing container 2: 1st container 3: Equipment 4: Fixed structure 5: Pressure reducing pump 6:Second container 7: Vibration isolating material 31: Vacuum Chamber 32: Dispensing opening 41: First fixing member 42: Second fixing member 51: Pump body 52: Battery 53: Pipe 54: Pedestal

Claims

1. A first vessel capable of maintaining an internal pressure below atmospheric pressure and housing a device equipped with a vacuum chamber, A packaging container comprising a fixing structure for fixing the device inside the first container and away from the inner wall.

2. The packaging container according to claim 1, wherein the first container can maintain an internal pressure of 100 Pa or less.

3. The aforementioned fixed structure is A first fixing member that supports the device, A packaging container according to claim 1 or 2, comprising a second fixing member provided between the first fixing member and the first container.

4. The packaging container according to claim 3, wherein the second fixing member is elastic.

5. The packaging container according to claim 1 or 2, further comprising a depressurizing pump for maintaining the pressure inside the first container below atmospheric pressure.

6. The pressure reducing pump is located outside the first container, The packaging container according to claim 5, wherein a vibration-damping material is provided between the pressure reducing pump and the first container.

7. The packaging container according to claim 5, further comprising the first container and a second container for housing the vacuum pump.

8. The packaging container according to claim 7, wherein the second container is provided with a vibration-damping material between it and the first container.

9. The packaging container according to claim 1, wherein the device is at least a part of an electron beam irradiation device.

10. A method for packaging a device equipped with a vacuum chamber, The steps include: placing the device in the first container, The steps include fixing the device inside the first container, away from the inner wall of the first container, A packaging method comprising the step of reducing the pressure inside the first container to below atmospheric pressure.

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