Tape application device

Abstract

To provide a tape application device that can apply a tape to a workpiece while applying the same tension to the tape every time.SOLUTION: A tape application device 2 includes a holding table 4 that holds a workpiece, a tape feed shaft 6 that rotates and supports an axis center of a rolled tape Tr with release paper P, a tape application roller 8 that presses the tape T against the workpiece held on the holding table 4 to apply the tape, a take-up roller 10 that winds up the release paper P, a guide roller 12 that guides the release paper P to the take-up roller 10, and control means 14. The control means 14 measures a rotation angle of the tape feed shaft 6 relative to an amount of the rolled tape Tr fed out such that the tape feed shaft 6 maintains predetermined tension, determines a radius of the rolled tape Tr, and controls "radius×tension=torque of the tape feed shaft."SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a tape sticking device for sticking a tape to a workpiece.

Background Art

[0002] A wafer having a device region partitioned by a dividing line and an outer peripheral surplus region surrounding the device region for a plurality of devices such as ICs and LSIs formed on the surface is ground on the back surface to form a desired thickness, and then divided into individual device chips by a dicing device or a laser processing device. Each of the divided device chips is used in an electric device such as a mobile phone or a personal computer.

[0003] In addition, in order to facilitate the conveyance of the ground wafer, a ring-shaped reinforcing portion is left on the back surface corresponding to the outer peripheral surplus region and subjected to predetermined processing, and then a dicing tape is stuck to the back surface of the wafer and supported by a frame. Then, the applicant has proposed a technique for removing the ring-shaped reinforcing portion from the wafer (see Patent Document 1).

[0004] Furthermore, since it is difficult to stick a dicing tape to the back surface of a wafer having a ring-shaped reinforcing portion formed on the outer periphery and integrate it with a frame, and it is difficult to cut the ring-shaped reinforcing portion and remove it from the device region, resulting in poor productivity, the applicant has developed a processing device for removing the reinforcing portion from a wafer in which a ring-shaped reinforcing portion is convexly formed on the back surface side of the outer peripheral surplus region (see Patent Document 2).

Prior Art Documents

Patent Documents

[0005]

Patent Document 1

Patent Document 2

Summary of the Invention

Problems to be Solved by the Invention

[0006] However, in the tape application means, which is located on top of the frame table that constitutes the processing apparatus and is used to attach tape to the frame, there is a problem in that it is difficult to apply the same tension to the tape each time. If the tension of the tape differs from frame to frame, when the wafer housed in the frame opening via the tape is divided into individual devices, there is a risk that chipping will occur in the devices, degrading the quality of the device chips.

[0007] The object of the present invention is to provide a tape application device that can apply the tape to a workpiece while maintaining the same tension on the tape each time. [Means for solving the problem]

[0008] According to the present invention, the following tape application device is provided that solves the above problems. That is, "A tape application device for attaching tape to a workpiece, A holding table for holding the workpiece, Multiple tapes corresponding to the workpiece are attached to one side along the longitudinal direction. A tape feed shaft that supports and rotates the axis of a roll of tape equipped with release paper, A tape application roller that presses and adheres tape to a workpiece held on the holding table, A winding roller that winds up the release paper, A guide roller for guiding the release paper to the winding roller, Includes control means, The control means controls the roll of tape so that the tape feed axis maintains a predetermined tension. In this case, the distance between the centers of two adjacent tapes corresponds to The rotation angle of the tape feed shaft relative to the amount of tape being fed is measured. By doing A tape application device is provided that determines the radius of the rolled tape and controls the torque of the tape feed axis, where "radius × tension = torque of the tape feed axis". [Effects of the Invention]

[0009] The tape application device of the present invention is A holding table for holding the workpiece, Multiple tapes corresponding to the workpiece are attached to one side along the longitudinal direction. A tape feed shaft that supports and rotates the axis of a roll-shaped tape provided with release paper, A tape sticking roller that presses and sticks the tape to the workpiece held on the holding table, A take-up roller for taking up the release paper, A guide roller for guiding the release paper to the take-up roller, And control means, The control means measures the rotation angle of the tape feed shaft with respect to the tape feed amount of the roll-shaped tape in order for the tape feed shaft to maintain a predetermined tension, In this case, the distance between the centers of two adjacent tapes corresponds to obtains the radius of the roll-shaped tape, and controls "radius × tension = torque of the tape feed shaft", so that even if the radius of the roll-shaped tape becomes small, the tape can be stuck to the workpiece with the same tension applied to the tape each time. By doing

Brief Description of the Drawings

Brief Description of the Drawings

[0010] [Figure 1] Perspective view of a tape sticking device configured according to the present invention. [Figure 2] Development view of the roll-shaped tape shown in FIG. 1. [Figure 3] Schematic diagram showing a state in which a frame is held on the holding table shown in FIG. 1. [Figure 4] Schematic diagram showing a state in which the tape and the release paper are fed out from the roll-shaped tape shown in FIG. 3. [Figure 5] Schematic diagram showing a state in which tension is applied to the tape and the release paper from the tape feed shaft. [Figure 6] Schematic diagram showing a state in which the peeling of the tape from the release paper is started. [Figure 7] Schematic diagram showing a state in which the tape is being stuck to the frame. [Figure 8] Schematic diagram showing a state in which the sticking of the tape to the frame is completed.

Embodiments for Carrying Out the Invention

[0011] Hereinafter, a preferred embodiment of the tape sticking device according to the present invention will be described with reference to the drawings.

[0012] (Tape sticking device 2) Referring to FIG. 1, the tape sticking device, indicated by reference numeral 2 as a whole, includes a holding table 4 for holding a workpiece, a tape feed shaft 6 that supports and rotates the axis of a roll-shaped tape Tr provided with a release paper P, a tape sticking roller 8 that presses and sticks the tape T onto the workpiece held by the holding table 4, a take-up roller that takes up the release paper P, a guide roller 12 that guides the release paper P to the take-up roller 10, and a control means 14 that controls the operation of the tape sticking device 2.

[0013] (Holding table 4) On the upper surface of the holding table 4, a plurality of suction holes 4a for sucking and holding the workpiece are provided, and the suction holes 4a are connected to a suction means (not shown). The plurality of suction holes 4a are arranged in an annular shape at intervals in the circumferential direction. In the holding table 4, a suction force is generated in the suction holes 4a by the suction means, and the workpiece placed on the upper surface of the holding table 4 is sucked and held.

[0014] In FIG. 1, as an example of the workpiece sucked and held by the holding table 4, an annular frame F is shown. The frame F has a circular opening Fa at the center for accommodating a disk-shaped wafer (not shown). Note that the workpiece to which the tape T is to be stuck may be a wafer.

[0015] (Tape feed shaft 6) As shown in FIG. 1, the tape feed shaft 6 supports the axis of a roll-shaped tape Tr provided with a release paper P. A torque applying means 16 for applying torque to the roll-shaped tape Tr is mounted on the tape feed shaft 6. The torque applying means 16 includes a torque applying motor 16a connected to the tape feed shaft 6 and an encoder (not shown) for detecting the rotation angle of the tape feed shaft 6.

[0016] (Roll-shaped tape Tr) Figure 2 shows an unfolded view of a roll-shaped tape Tr supported by a tape feed shaft 6. The roll-shaped tape Tr has a strip-shaped release paper P and multiple circular tapes T attached to one side of the release paper P at intervals L in the longitudinal direction of the release paper P. The interval L is the distance between the centers of two adjacent tapes T.

[0017] The tape T may be an adhesive tape with an adhesive layer on one side, or it may be a heat-sealable sheet without an adhesive layer. The heat-sealable sheet is a sheet of thermoplastic synthetic resin (for example, polyolefin resin) that softens or melts and exhibits adhesive properties when heated to a temperature near its melting point. If the tape T is a heat-sealable sheet, a heating means is provided on at least one of the holding table 4 or the tape application roller 8 to heat the tape T to a temperature at which it softens or melts.

[0018] (Tape application roller 8) As shown in Figure 1, the tape application roller 8 is rotatably supported by a bracket 18. The bracket 18 also rotatably supports a feed roller 20 that feeds the tape T together with the release paper P from the roll-shaped tape Tr supported by the tape feed shaft 6. The tape application roller 8 and the feed roller 20 are spaced apart from each other in the Y-axis direction.

[0019] Although not shown in the diagram, the bracket 18 is fitted with a bracket moving mechanism that moves the bracket 18 in the Y-axis direction. The moving mechanism may consist of, for example, a ball screw connected to the bracket 18 and extending in the Y-axis direction, and a motor that rotates the ball screw. When the bracket 18 is moved by the bracket moving mechanism, the tape application roller 8 and the feed roller 20 move (roll) in the Y-axis direction while rotating on their own.

[0020] The Y-axis direction is indicated by the arrow Y in Figure 1. The X-axis direction, indicated by the arrow X in Figure 1, is perpendicular to the Y-axis direction, and the Z-axis direction, indicated by the arrow Z in Figure 1, is the vertical direction perpendicular to both the X-axis and Y-axis directions. The XY plane defined by the X-axis and Y-axis directions is essentially horizontal.

[0021] (Winding roller 10) The winding roller 10 is designed to wind up the release paper P from which the tape T has been peeled off after the tape T has been attached to the workpiece. A winding motor 22 is attached to the winding roller 10 to rotate it.

[0022] (Guide roller 12) The guide rollers 12 are positioned between the tape application roller 8 and the take-up roller 10. In the illustrated embodiment, a pair of guide rollers 12 are provided, and a guide motor 24 is connected to one of the guide rollers 12 to rotate it. When one guide roller 12 rotates due to the guide motor 24, the other guide roller 12 also rotates in conjunction. As a result, the release paper P, which is sandwiched between the pair of guide rollers 12, is guided to the take-up roller 10.

[0023] (Control means 14) The control means 14 consists of a computer with a processor and memory, and controls the operation of the torque application means 16, the winding motor 22, the guide motor 24, and the bracket moving means. The control means 14 also receives the detection result of the encoder of the torque application means 16 (the rotation angle of the tape feed axis 6).

[0024] Furthermore, in the control means 14, in order to maintain a constant tension H of the tape feed axis 6, the radius R of the rolled tape Tr is determined based on the encoder detection result (rotation angle of the tape feed axis 6), "Radius R × Tension H = Torque Trq of tape feed axis 6" It is designed to control this.

[0025] (Tape application method) Next, we will describe a method for attaching tape T to a frame F, which is a workpiece, using the tape attachment device 2 described above.

[0026] (holding process) First, a holding process is performed in which the frame F is held on the upper surface of the holding table 4. In the holding process, after placing the frame F on the upper surface of the holding table 4, a suction force is generated in the suction hole 4a of the holding table 4, and the frame F is held in place by suction on the upper surface of the holding table 4. When placing the frame F on the holding table 4, the tape application roller 8 and the feed roller 20 are positioned at their initial positions on the tape feed shaft 6 side (positions shown in Figure 3).

[0027] (Feed-out process) After the holding process is performed, a feeding process is carried out in which the tape T and release paper P are fed out from the roll-shaped tape Tr.

[0028] In the feeding process, the control means 14 operates the bracket moving means to move the feeding roller 20 in the Y-axis direction to a feeding position (the position shown in Figure 4) that is a predetermined distance away from the initial position. As a result, the release paper P is fed out from the roll-shaped tape Tr by a predetermined feeding amount L corresponding to the distance L between the centers of the tape T.

[0029] During the feeding process, the torque-applying motor 16a is controlled by the control means 14 to allow the rotation of the tape feed shaft 6, while the take-up motor 22 is controlled to prevent the rotation of the take-up roller 10. As a result, the tape T and release paper P are fed out from the roll-shaped tape Tr supported by the tape feed shaft 6, while the release paper P wound onto the take-up roller 10 is not pulled back towards the holding table 4.

[0030] (Radius calculation process) During the feeding process, a radius calculation process is also performed to determine the radius R of the roll of tape Tr by measuring the rotation angle θ of the tape feed axis 6 with respect to the amount of tape Tr fed out L.

[0031] As described above, the control means 14 receives the rotation angle θ of the tape feed shaft 6 from the encoder of the torque application means 16. Therefore, the control means 14 uses the amount L (a constant value) of the roll of tape Tr that is fed out when the feed roller 20 is moved from the initial position to the feed position, and the rotation angle θ of the tape feed shaft 6, to determine the radius R of the roll of tape Tr supported by the tape feed shaft 6 from the following equation 1. R·θ=L R=L / θ (Formula 1)

[0032] Since the feed amount L is set to a constant value, the radius R of the rolled tape Tr at the time the rotation angle θ of the tape feed axis 6 is detected can be calculated.

[0033] (Torque calculation process) After performing the radius calculation process, a torque calculation process is performed to calculate the torque Trq to be applied from the torque-applying motor 16a to the tape feed shaft 6 when attaching the tape T to the frame F, using the following formula 2. Trq=R·H Trq = (L / θ)·H (Equation 2)

[0034] In Equation 2, H is the tension that the tape feed shaft 6 applies to the released release paper P and tape T (see Figure 5).

[0035] (Application process) After the torque calculation process is completed, the tape T, which has been fed out from the roll-shaped tape Tr, is attached to the frame F in an attachment process.

[0036] During the adhesion process, the control means 14 outputs signals to the winding motor 22, the guide motor 24, the bracket moving means, and the torque applying motor 16a. As a result, as shown in Figures 5 and 6, the release paper P fed from the roll-shaped tape Tr is guided by the pair of guide rollers 12 and wound up by the winding roller 10.

[0037] Furthermore, a signal output from the control means 14 to the bracket moving means activates the bracket moving means, causing the tape application roller 8 and the feed roller 20 to move from the feed position toward the initial position. As a result, as shown in Figure 6, the tape T gradually peels off from the release paper P fed from the roll-shaped tape Tr, and as shown in Figure 7, the peeled tape T is pressed and applied to the frame F on the holding table 4 by the tape application roller 8.

[0038] Furthermore, during the adhesion process, the torque Trq calculated in the torque calculation process is applied from the torque application motor 16a to the tape feed shaft 6 by a signal output from the control means 14 to the torque application motor 16a. Specifically, the controlled torque Trq is applied to the tape feed shaft 6 so that the tape feed shaft 6 maintains a predetermined tension H, that is, so that the same tension H is applied to the tape T each time.

[0039] As described above, since the feed amount L is constant, the torque Trq applied to the tape feed shaft 6 is controlled so that the same tension H is applied to the tape T each time, according to the rotation angle θ of the tape T (i.e., the radius R of the rolled tape Tr) (see Equation 2).

[0040] In this way, the tape application roller 8 is rolled toward the initial position while applying a predetermined tension H to the release paper P and tape T that have been fed out, in the direction indicated by arrow H in Figures 5 to 7. As a result, as shown in Figure 8, when the tape application roller 8 is in the initial position, the tape T that has been peeled off the release paper P can be applied to the frame F with the predetermined tension H.

[0041] Unlike the embodiment described above, if a constant torque is applied to the tape feed shaft 6 each time, as is clear from equation 2 above, the tension H applied to the tape T increases as the radius R of the rolled tape Tr decreases.

[0042] However, in the illustrated embodiment of the tape application device 2, the radius R of the roll-shaped tape Tr is determined from the rotation angle θ of the roll-shaped tape Tr when a predetermined amount L of tape T is fed from the tape feed shaft 6, and a torque Trq (torque corresponding to the radius R of the roll-shaped tape Tr) calculated from the above formula 2 is applied to the tape feed shaft 6. Therefore, even if the radius R of the roll-shaped tape Tr becomes smaller, the tape T can be applied to the frame F (workpiece) while maintaining the same tension H each time the tape T is fed.

[0043] Furthermore, if the tape T is a heat-sealable sheet, the temperature of the upper surface of the holding table 4 or the outer surface of the tape application roller 8 is adjusted to a temperature at which the tape T softens or melts. Then, while applying a predetermined tension H to the fed-out release paper P and tape T, the tape application roller 8 is rolled toward its initial position, thereby allowing the tape T, peeled from the release paper P, to be heat-sealed to the frame F with the predetermined tension H.

[0044] Once the adhesion process is complete, the suction force of the holding table 4 is released, and the frame F with the tape T attached is transported from the holding table 4. Subsequently, the holding process, feeding process, radius calculation process, torque calculation process, and adhesion process are repeated to sequentially attach the tape T to multiple frames F.

[0045] As described above, according to the illustrated embodiment of the tape application device 2, even if the radius R of the roll-shaped tape Tr becomes smaller, the tape T can be applied to the frame F (workpiece) while maintaining the same tension H each time the tape T is fed out. [Explanation of symbols]

[0046] 2: Tape application device 4: Holding Table 6: Tape feed axis 8: Tape application roller 10: Winding roller 12: Guide roller 14: Control means P: Release paper T: Tape Tr: Roll-shaped tape Trq: Torque

Claims

[Claim 1] A tape application device for applying tape to a workpiece, A holding table for holding the workpiece, A tape feed shaft that supports and rotates the axis of a roll-shaped tape, each tape having release paper attached to one side along its longitudinal direction, corresponding to the workpiece, A tape application roller that presses and adheres tape to a workpiece held on the holding table, A winding roller that winds up the release paper, A guide roller for guiding the release paper to the winding roller, Includes control means, The control means is a tape application device that, in order to maintain a predetermined tension in the tape feed shaft, determines the radius of the roll of tape by measuring the rotation angle of the tape feed shaft with respect to the feed amount corresponding to the distance between the centers of two adjacent pieces of tape in the roll of tape, and controls "radius × tension = torque of the tape feed shaft".

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