Item transfer device

Abstract

To provide an article transfer device capable of matching a position where a mounting part is vertically raised and lowered with a position of a port and a shelf, even if a work of accurately matching the position where the mounting part moves vertically raised and lowered with the position of the port and the shelf is omitted.SOLUTION: An article transfer device includes a traveling part that travels along a rail part; and a mounting part that has a structure that hangs below the travelling part and mounts an article, the rail part includes: a first straight rail extending along a first direction and arranged side by side by a plurality of first intervals; a second straight rail extending along a second direction perpendicular to the first direction and arranged side by side by a plurality of second intervals; and a connection rail that connects between the first straight rail and the second straight rail that are perpendicularly opposed to each other so that the travelling part travels between the first straight rail and the second straight rail that face each other perpendicularly.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to an article transfer device. More specifically, the present invention relates to an article transfer device applicable to transferring articles in integrated circuit elements such as semiconductor elements and display elements.

Background Art

[0002] In the manufacture of integrated circuit elements such as semiconductor elements and display elements, transfer processes for articles such as a FOUP (Front Opening Unified Pod) that houses a large number of substrates are frequently performed. Recently, article transfer devices such as an OHT (Overhead Hoist Transport) provided on the ceiling side of the integrated circuit element manufacturing line are used.

[0003] An article transfer device such as an OHT includes a rail section composed of a linear rail and a curved rail, a traveling section that travels along the rail section, and a mounting section that has a structure hanging below the traveling section and mounts articles. In particular, the mounting section moves vertically up and down between the ceiling and the floor to transfer the articles.

[0004] In addition, a large number of ports for loading and unloading articles are provided in the manufacturing apparatus of integrated circuit elements, and a large number of shelves for loading and unloading articles are provided in a stocker for storing articles.

[0005] Here, in an article transfer device such as an OHT, the mounting section moves up and down between the ports and the shelves to transfer the articles.

[0006] By the way, if the position where the mounting section moves vertically up and down does not coincide with the positions of the ports and the shelves, the articles cannot be correctly loaded and unloaded onto the ports and the shelves, and as a result, defects due to article transfer occur.

[0007] Therefore, in the initial setup of the integrated circuit element manufacturing line, in addition to correctly aligning the vertically rising and falling position of the mounting unit with the positions of the ports and shelves, the system also continuously checks and adjusts the vertically rising and falling position of the mounting unit with the positions of the ports and shelves to ensure they match.

[0008] However, aligning the vertical movement of the mounting section with the positions of the ports and shelves is a time-consuming process separate from the main manufacturing process, which is a drawback.

[0009] Furthermore, when replacing integrated circuit element manufacturing equipment, stokers, etc., not only are the new equipment and stokers different in size from the existing ones, but the positions of ports, shelves, etc., are also different. In this case, the travel path of the mounting unit may be shifted so as to pass directly below the ports and shelves. This creates a situation where it is necessary to adjust the travel path of the mounting unit so that it is positioned directly below the ports and shelves, or so that the ports and shelves are positioned below the travel path of the mounting unit. [Overview of the project] [Problems that the invention aims to solve]

[0010] The object of the present invention is to provide an article transfer device that can align the vertically rising and falling position of the loading section with the positions of the ports and shelves, even without the need to precisely align the vertically rising and falling position of the loading section with the positions of the ports and shelves. [Means for solving the problem]

[0011] A form of article transfer device for achieving the object of the present invention includes a traveling section that travels along a rail section and a loading section that has a structure hanging below the traveling section and loads articles, wherein the rail section comprises a first straight rail extending in a first direction and arranged in a plurality at first intervals, a second straight rail extending in a second direction perpendicular to the first direction and arranged in a plurality at second intervals, and a connecting rail connecting the first straight rail and the second straight rail which are perpendicular to each other, such that the traveling section travels between the first straight rail and the second straight rail which are perpendicular to each other.

[0012] The connecting rail has a path that passes over the upper parts of the first straight rail and the second straight rail, which are perpendicular to each other, and the running unit comprises running wheels that run along the first straight rail and the second straight rail, and steering wheels that run along the connecting rail, the steering wheels are connected to the connecting rail by rising and run along the connecting rail in a desired direction by moving left and right.

[0013] The connecting rail comprises a branch rail that branches off from the first straight rails which are perpendicular to each other and extends to the second straight rail, or a branch rail that branches off from the second straight rails which are perpendicular to each other and extends to the first straight rail, and a steering rail positioned in a branching region branching off from the first straight rail or a branching region branching off from the second straight rail, such that the running unit enters the branch rail from the first straight rail or enters the branch rail from the second straight rail, and the running unit comprises running wheels that run along the first straight rail, the second straight rail and the branch rail, and steering wheels that run along the steering rail.

[0014] When the steering rail is positioned above the branch rail, the steering wheel is connected to the steering rail by rising and travels along the steering rail in the desired direction by moving from side to side.

[0015] The connecting rail connects the first straight rail and the second straight rail, which are adjacent to each other perpendicularly.

[0016] The connecting rail connects a point that is half the length between the first straight rails which are adjacent to each other perpendicularly, and a point that is half the length between the second straight rails.

[0017] The mounting section has a structure that allows it to be moved by a guide section located below the traveling section.

[0018] The guide portion comprises a guide plate connected to the traveling portion and having a guide groove on the mounting portion side, and a guide rod connected to the mounting portion and moving along the guide groove.

[0019] The guide groove has a structure that extends from the center of the guide plate to both ends of the guide plate, and at least two of the grooves have a structure that extends from the center of the guide plate to both ends of the guide plate.

[0020] The first interval and the second interval are the same distance from each other.

[0021] Furthermore, one form of article transfer device for achieving the object of the present invention includes a traveling section that travels along a rail section, and a loading section that has a structure hanging below the traveling section and loads articles, wherein the rail section comprises a first straight rail extending in a first direction and arranged in a plurality at first intervals, a second straight rail extending in a second direction perpendicular to the first direction and arranged in a plurality at second intervals, and a connecting rail that connects the first straight rail and the second straight rail, which are perpendicular to each other, so as to have a curved path, so that the traveling section travels between the first straight rail and the second straight rail, which are perpendicular to each other.

[0022] The connecting rail is connected to the upper part of the first straight rail, which is perpendicular to each other, and to the upper part of the second straight rail, and has a curved path passing through the upper part of the second straight rail. The running unit comprises running wheels that run along the first straight rail and the second straight rail, and steering wheels that run along the connecting rail. The steering wheels are connected to the connecting rail by rising and run along the connecting rail in a desired direction by moving left and right.

[0023] The connecting rail comprises a branch rail that branches off from the first straight rail which is perpendicular to each other and extends to the second straight rail, or a branch rail that branches off from the second straight rail which is perpendicular to each other and extends to the first straight rail, and a steering rail positioned in a branching region branching off from the first straight rail or a branching region branching off from the second straight rail, such that the running unit enters the branch rail from the first straight rail or enters the branch rail from the second straight rail, and the running unit comprises running wheels that run along the first straight rail, the second straight rail and the branch rail, and steering wheels that run along the steering rail, and when the steering rail is positioned above the branch rail, the steering wheels are connected to the steering rail by rising and run along the steering rail in the desired direction by moving left and right.

[0024] The connecting rail connects the first straight rail and the second straight rail, which are perpendicular to each other, in a curved path, and connects the point that is half the length between the first straight rails, which are perpendicular to each other, and the point that is half the length between the second straight rails, in a curved path.

[0025] The mounting part has a structure that is movably suspended by a guide part disposed below the traveling part. The guide part includes a guide plate that is connected to the traveling part and has a guide groove on the mounting part side, and a guide rod that is connected to the mounting part and moves along the guide groove. The guide groove has a structure that extends from the center of the guide plate to both end sides of the guide plate, and at least two of them extend from the center of the guide plate to both end sides of the guide plate. The article transfer device according to claim 11 is characterized in that

[0026] Furthermore, an article transfer device according to an aspect for achieving the object of the present invention includes a traveling part that travels along a rail part, and a mounting part that has a structure suspended below the traveling part and mounts articles. The rail part includes a first linear rail that extends along a first direction and a plurality of which are arranged side by side at each first interval, a second linear rail that extends along a second direction perpendicular to the first direction and a plurality of which are arranged side by side at each second interval, and a connecting rail that connects between the first linear rail and the second linear rail facing each other perpendicularly so that the traveling part travels between them and has a diagonal path between the first linear rail and the second linear rail facing each other perpendicularly.

[0027] The connecting rail connects so as to have a diagonal path passing through the upper part of the first linear rail facing each other perpendicularly and the upper part of the second linear rail. The traveling part includes traveling wheels that travel along the first linear rail and the second linear rail, and steering wheels that travel along the connecting rail. The steering wheels are connected to the connecting rail through ascending and travel along the connecting rail in a desired direction by moving left and right.

[0028] The connecting rail branches from the first linear rail facing each other perpendicularly and extends to the second linear rail, or branches from the second linear rail facing each other perpendicularly and extends to the first linear rail. The traveling section includes a branch rail, and a steering rail disposed in a branch region branching from the first linear rail or a branch region branching from the second linear rail so that the traveling section enters the branch rail from the first linear rail or from the second linear rail. The traveling section includes traveling wheels that travel along the first linear rail, the second linear rail, and the branch rail, and steering wheels that travel along the steering rail. When the steering rail is disposed above the branch rail, the steering wheels are connected to the steering rail through lifting and travel along the steering rail in a desired direction by lateral movement.

[0029] The connecting rail is connected between the first linear rail and the second linear rail facing each other perpendicularly so as to have a diagonal path, and is connected between a point that is half the length between the first linear rails facing each other perpendicularly and a point that is half the length between the second linear rails facing each other perpendicularly so as to have a diagonal path.

[0030] The mounting section has a structure that is movably suspended by a guide section disposed below the traveling section. The guide section includes a guide plate that is connected to the traveling section and has a guide groove on the mounting section side, and a guide rod that is connected to the mounting section and moves along the guide groove. The guide groove has a structure that extends from the center of the guide plate to both end portions of the guide plate, and at least two extend from the center of the guide plate to both end portions of the guide plate.

Advantages of the Invention

[0031] According to the article transfer device of the present invention, the positions of the mounting section that vertically moves up and down and the positions of the ports and shelves can be easily aligned without separately performing work, so that the process execution time of the entire manufacturing process of the integrated circuit element can be shortened.

[0032] As a result, the article transfer device of the present invention can improve productivity in the manufacturing process of integrated circuit elements.

[0033] In particular, the article transfer device of the present invention ensures a more precise travel path using the rail section, and by making the loading section itself movable, the position where the loading section moves vertically up and down can be easily aligned with the position of the port and shelf.

[0034] However, the effects of the present invention are not limited to those described above, and may be extended in various ways without departing from the spirit and scope of the present invention. [Brief explanation of the drawing]

[0035] [Figure 1] Figure 1 is a schematic diagram illustrating the rail section of an article transfer device according to one embodiment of the present invention. [Figure 2] Figure 2 is a schematic diagram illustrating the rail section of an article transfer device according to one embodiment of the present invention. [Figure 3] Figure 3 is a schematic diagram illustrating the connecting rail in the running section of an article transfer device according to one embodiment of the present invention. [Figure 4] Figure 4 is a schematic diagram illustrating the connecting rail in the running section of an article transfer device according to one embodiment of the present invention. [Figure 5] Figure 5 is a schematic diagram illustrating the traveling section and the loading section of an article transfer device according to one embodiment of the present invention. [Figure 6] Figure 6 is a schematic diagram illustrating the guide section in an article transfer device according to one embodiment of the present invention. [Figure 7] Figure 7 is a schematic diagram illustrating the guide section in an article transfer device according to one embodiment of the present invention. [Figure 8] Figure 8 is a schematic diagram illustrating a loading section that moves by a guide section in an article transfer device according to one embodiment of the present invention. [Figure 9] Figure 9 is a schematic diagram illustrating a loading section that moves by a guide section in an article transfer device according to one embodiment of the present invention. [Modes for carrying out the invention]

[0036] The present invention can be modified in various ways and may take on various forms; examples will be described in detail in the text. However, this should be understood not as an attempt to limit the invention to any particular disclosure, but as including all modifications, equivalents, or substitutes that fall within the spirit and technical scope of the invention. In describing each drawing, similar reference numerals are used for similar components. Terms such as "first," "second," etc., may be used to describe various components, but the components should not be limited by such terms. Such terms are used solely for the purpose of distinguishing one component from others. The terms used in this application are used simply to describe specific embodiments and are not intended to limit the invention. Singular expressions include plural expressions unless they clearly mean different things in context. In this application, terms such as "includes" or "become" should be understood as intending to specify that there is a feature, figure, step, operation, component, part, or combination thereof described in the specification, and not as pre-excluding the existence or possibility of adding one or more other features, figures, steps, operations, components, parts, or combinations thereof.

[0037] Unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as those generally understood by a person of ordinary skill in the art to which this invention pertains. Terms as defined in commonly used dictionaries should be interpreted as having the meaning consistent with their meaning in the context of the relevant art, and not as an ideal or overly formal meaning unless explicitly defined in this application.

[0038] Embodiments of the present invention will be described in more detail with reference to the attached drawings. Identical components in the drawings are denoted by the same reference numerals, and redundant descriptions of the same components are omitted.

[0039] First, the article transfer device according to one embodiment of the present invention is used to perform an article transfer process for articles such as hoops (FOUPs) that house a large number of substrates when carrying out the manufacturing process of integrated circuit elements such as semiconductor elements and display elements, and is mainly an OHT (Overhead Heating Unit) installed on the ceiling side of the integrated circuit element manufacturing line.

[0040] As a result, the article transfer device according to one embodiment of the present invention transfers articles by vertically moving up and down between a number of ports provided in an integrated circuit element manufacturing apparatus and a number of shelves provided in a stoker for storing articles.

[0041] Furthermore, the article transfer device of the present invention includes a traveling section, a rail section, a mounting section, and a guide section.

[0042] The following describes in detail the traveling section, rail section, mounting section, and guide section of the article transfer device according to one embodiment of the present invention.

[0043] Figures 1 and 2 are schematic diagrams illustrating the rail section of an article transfer device according to one embodiment of the present invention.

[0044] As shown in Figures 1 and 2, the rail section 11 in the article transfer device according to one embodiment of the present invention provides a travel path and includes a first straight rail 13, a second straight rail 15, and a connecting rail 17.

[0045] The first straight rail 13 extends along a first direction, and multiple rails are arranged in a line at first intervals, for example, along the horizontal direction of the ceiling surface, with multiple rails arranged in a line at first intervals.

[0046] The second straight rail 15 extends along a second direction perpendicular to the first direction, and multiple rails are arranged in a row at second intervals, for example, along the vertical direction of the ceiling surface, with multiple rails arranged in a row at second intervals.

[0047] The first interval and the second interval are the same as each other.

[0048] As a result, the rail section 11, consisting of the first straight rail 13 and the second straight rail 15, has a grid-like arrangement structure on the ceiling surface with identical vertical and horizontal spacing between them. If the spacing between the first and second rails is made narrower, the rail section 11 will have a finer arrangement structure.

[0049] The connecting rail 17 connects the first straight rail 13 and the second straight rail 15, which are perpendicular to each other.

[0050] In one embodiment of the present invention, the connecting rail 17 connects a first straight rail 13 and a second straight rail 15 that are perpendicularly adjacent to each other, and connects a point that is half the length between the perpendicularly adjacent first straight rails 13 and a point that is half the length between the second straight rails 15.

[0051] In other words, in the present invention, the connecting rail 17 connects the first straight rail 13 and the second straight rail 15 that are opposite each other and are formed when the first straight rail 13 and the second straight rail 15 intersect each other, and connects the points that are half the length of each of the first straight rails 13 that are arranged side by side with the points that are half the length of each of the second straight rails 15 that are arranged side by side.

[0052] However, in the rail section 11 of the article transfer device according to one embodiment of the present invention, the connecting rail 17 can connect the first straight rail 13 and the second straight rail 15 in such a way that it has a curved path or a diagonal path.

[0053] In other words, the connecting rail 17 in the rail section 11 of the article transfer device according to one embodiment of the present invention is formed as a curved rail that connects a first straight rail 13 and a second straight rail 15 that are adjacent to each other perpendicularly, as shown in Figure 1, so as to have a curved path, or as shown in Figure 2, it is formed as a diagonal rail that connects a first straight rail 13 and a second straight rail 15 that are adjacent to each other perpendicularly, so as to have a diagonal path.

[0054] Specifically, as shown in Figure 1, the connecting rail 17 is formed of a circular rail having a circular path with a radius of half the length between the first straight rails 13 or half the length between the second straight rails 15, which are arranged side by side, and with each of the intersections where the first straight rails 13 and the second straight rails 15 intersect each other as its center point. The structure is such that each of the circular rails of the circular path, with each of the intersections where the first straight rails 13 and the second straight rails 15 intersect each as its center point and with a radius of half the length between the first straight rails 13 or half the length between the second straight rails 15, is repeatedly arranged between the first straight rails 13 and the second straight rails 15.

[0055] Furthermore, as shown in Figure 2, the connecting rail 17 is formed of diagonal rails having a rectangular path with each of the intersections where the first straight rail 13 and the second straight rail 15, which are perpendicularly adjacent to each other, intersect, as the center point, and with a side length of half the length between the first straight rails 13 or half the length between the second straight rails 15, which are arranged side by side. Each of the diagonal rails forming a rectangular path like a diamond structure, with each of the intersections where the first straight rail 13 and the second straight rail 15 intersect as the center point, and with a side length of half the length between the first straight rails 13 or half the length between the second straight rails 15, is repeatedly arranged between the first straight rail 13 and the second straight rail 15.

[0056] In contrast to this, although not shown in the diagram, the connecting rail 17 may also have a path between the first straight rail 13 and the second straight rail 15 that mixes a circular rail consisting of a curved path and a diagonal rail consisting of a diagonal path.

[0057] Thus, the article transfer device according to one embodiment of the present invention has a structure in which a connecting rail 17 having a circular path and / or a diagonal path connecting the first straight rail 13 and the second straight rail 15, along with a first straight rail 13 and a second straight rail 15 arranged perpendicular to each other, is repeatedly arranged, so that the travel path by the rail section 11 can be secured more precisely.

[0058] Furthermore, the connecting rail 17 in the article transfer device according to one embodiment of the present invention has a structure that branches off from the first straight rail 13 and the second straight rail 15, respectively.

[0059] Figures 3 and 4 are schematic diagrams illustrating the connecting rails in the running section of an article transfer device according to one embodiment of the present invention.

[0060] First, as shown in Figure 3, the connecting rail 17 in the running section 21 of the article transfer device according to one embodiment of the present invention has a path that passes over the upper parts of the first straight rail 13 and the second straight rail 15, which are perpendicular to each other.

[0061] In other words, the connecting rail 17 in Figure 3 does not directly connect the first straight rail 13 and the second straight rail 15 which are perpendicular to each other, but rather has a structure that passes through the upper part of the first straight rail 13 and the upper part of the second straight rail 15 which are perpendicular to each other.

[0062] However, the article transfer device according to one embodiment of the present invention travels on the first straight rail 13 or the second straight rail 15 by means of the upward movement of the steering wheel 25 in the traveling section 21, which will be described later, and also travels on the connecting rail 17 which passes over the upper part of the first straight rail 13 and the upper part of the second straight rail 15.

[0063] Furthermore, in the present invention, the connecting rail 17 has a structure that passes over the upper parts of the first straight rail 13 and the second straight rail 15, which are perpendicular to each other, along a curved path, or a structure that passes over them along a diagonal path.

[0064] In contrast, as shown in Figure 4, the connecting rail 17 in the running section 21 of the article transfer device according to one embodiment of the present invention comprises a branching rail 17a and a steering rail 17b, the branching rail 17a having a structure that branches off from a first straight rail 13 or a second straight rail 15, and the steering rail 17b having a structure that allows the running section 21 to enter the branching rail 17a from the first straight rail 13 or from the second straight rail 15.

[0065] In this invention, the connecting rail 17 is provided to connect a first straight rail 13 and a second straight rail 15 that are perpendicular to each other. Therefore, in the case of the branching rail 17a, it either branches off from the first straight rail 13 that are perpendicular to each other and extends to the second straight rail 15, or branches off from the second straight rail 15 that are perpendicular to each other and extends to the first straight rail 13.

[0066] In other words, the branch rail 17a in the present invention has an extension structure that branches off from the first straight rail 13 and connects to a second straight rail 15 that is perpendicular to each other, or it has an extension structure that branches off from the second straight rail 15 and connects to the first straight rail 13 that is perpendicular to each other, and therefore has a structure similar to that of the connecting rail 17.

[0067] Furthermore, the steering rail 17b has a running section 21 that runs along the first straight rail 13 or the second straight rail 15, which runs along the branch rail 17a, and extends along the branch rail 17a from the first straight rail 13 to the second straight rail 15, or branches off from the second straight rail 15 and extends to the first straight rail 13.

[0068] In contrast to this, although not shown in the diagram, the steering rail 17b may have a structure in which it is positioned in a branching area branching off from the first straight rail 13, or in a branching area branching off from the second straight rail 15.

[0069] In other words, the steering rail 17b does not have a structure that extends along the branch rail 17a, but is positioned on the entrance side of the branch rail 17a that branches off from the first straight rail 13, which is a branching area that branches off from the first straight rail 13, or on the entrance side of the branch rail 17a that branches off from the second straight rail 15, which is a branching area that branches off from the second straight rail 15.

[0070] Furthermore, as shown in Figure 1, if the connecting rail 17 is a curved rail having a curved path, the branching rail 17a also extends from the first straight rail 13, which are perpendicular to each other, to the second straight rail 15, having a curved path, or from the second straight rail 15, which are perpendicular to each other, to the first straight rail 13, having a curved path. Similarly, the steering rail 17b also has a curved path along the branching rail 17a.

[0071] However, in the case of steering rail 17b, a curved path may be present only in the branching region branching off from the first straight rail 13, or only in the branching region branching off from the second straight rail 15.

[0072] Furthermore, as shown in Figure 2, if the connecting rail 17 is a diagonal rail having a diagonal path, the branching rail 17a also extends from the first straight rail 13, which are perpendicular to each other, to the second straight rail 15, having a diagonal path, or from the second straight rail 15, which are perpendicular to each other, to the first straight rail 13, having a diagonal path. Similarly, the steering rail 17b also has a diagonal path along the branching rail 17a.

[0073] Similarly, in the case of steering rail 17b, a diagonal path may be present only in the branching region branching off from the first straight rail 13, or only in the branching region branching off from the second straight rail 15.

[0074] Thus, in the article transfer device according to one embodiment of the present invention, the traveling section 21 is configured to easily travel along the connecting rail 17 from the first straight rail 13, or along the connecting rail 17 from the second straight rail 15. As a result, the travel path can be secured more precisely, and the rail section 11 allows the traveling section 21 to be positioned at any desired location.

[0075] Figure 5 is a schematic diagram illustrating the traveling section and the loading section of an article transfer device according to one embodiment of the present invention.

[0076] As shown in Figure 5, the traveling section 21 in the article transfer device according to one embodiment of the present invention consists of traveling wheels 23 and steering wheels 25. As shown in Figure 3, when the connecting rail 17 has a path that passes over the top of the first straight rail 13 and the top of the second straight rail 15, the traveling wheels 23 are configured to travel along the first straight rail 13 and the second straight rail 15, and the steering wheels 25 are configured to travel along the connecting rail 17. Also, as shown in Figure 4, when the connecting rail 17 consists of a branching rail 17a and a steering rail 17b, the traveling wheels 23 travel along the first straight rail 13, the second straight rail 15, and the branching rail 17a, while the steering wheels 25 travel along the steering rail 17b.

[0077] Specifically, as shown in Figure 3, if the connecting rail 17 has a path that passes over the top of the first straight rail 13 and the top of the second straight rail 15, the steering wheel 25 connects to the connecting rail 17 by rising and travels along the connecting rail 17 in the desired direction by moving left and right.

[0078] Therefore, using the running wheel 23, the train travels along the second straight rail 15, and when the steering wheel 25 is positioned below the connecting rail 17, the steering wheel 25 is raised to connect to the connecting rail 17. The steering wheel 25 is then moved to the left connecting rail 17 to travel along the left connecting rail 17, or to the right connecting rail 17 to travel along the right connecting rail 17. The train continues to travel along the connecting rail 17 using the steering wheel 25, and when it is positioned above the first straight rail 13 which is perpendicular to the second straight rail 15, the steering wheel 25 is lowered to connect the running wheel 23 to the first straight rail 13, and the train then travels along the first straight rail 13 using the running wheel 23.

[0079] In the case of Figure 4, the steering rail 17b is also positioned on top of the branching rail 17a.

[0080] As a result, the steering wheel 25 can move up and down toward the steering rail 17b when entering and exiting the branching area, and can also move left and right toward the steering rail 17b on the desired steering direction side.

[0081] Therefore, using the running wheel 23, the train travels along the second straight rail 15, and when the steering wheel 25 is positioned below the steering rail 17b, the steering wheel 25 is raised so that it is connected to the steering rail 17b. The steering wheel 25 is then moved to the left steering rail 17b to travel along the left steering rail 17b, or to the right steering rail 17b to travel along the right steering rail 17b. The train continues to travel along the steering rail 17b using the steering wheel 25, and when it is positioned above the first straight rail 13 which is perpendicular to the second straight rail 15, the steering wheel 25 is lowered so that the running wheel 23 is connected to the first straight rail 13, and the train travels along the first straight rail 13 using the running wheel 23.

[0082] However, if the steering rail 17b is positioned on the branching rail 17a and is provided only in the branching area, the steering wheel 25 will only have a steering function by moving left and right, and the running wheel 23 will run along the branching rail 17a. In this case, the steering wheel 25 will have a structure that allows it to move left and right.

[0083] Thus, the article transfer device according to one embodiment of the present invention has a structure that allows the traveling unit 21 to easily travel along the rail section 11, which is secured more finely, so the traveling unit 21 can be positioned at any desired location.

[0084] Furthermore, the mounting section 31 has a structure that hangs below the traveling section 21 and is used to mount items used in the manufacture of integrated circuit elements.

[0085] Examples of articles in this invention include a hoop (FOUP) on which a large number of substrates for manufacturing integrated circuit elements are stacked.

[0086] Furthermore, the mounting section 31 in the present invention transports articles by vertically moving up and down between the numerous ports of the manufacturing equipment and the shelves of the stokers arranged in the integrated circuit manufacturing line. The mounting section 31 is provided with a lifting and lowering member, such as a hoist (not shown), which moves vertically up and down between the numerous ports of the manufacturing equipment and the shelves of the stokers.

[0087] As a result, the article transfer device according to one embodiment of the present invention can achieve the transfer of articles by positioning the travel section 21 vertically above a port and shelf, which are places for loading and unloading articles, and then vertically raising and lowering the loading section 31.

[0088] In particular, the article transfer device according to one embodiment of the present invention has a structure that allows the travel unit 21 to easily travel along the rail section 11, which is secured more precisely, so that the travel unit 21 can be positioned at any desired location, thus making it easier to adjust its position relative to the port, shelf, etc.

[0089] The following will provide a more detailed description of the structure in which the mounting section 31 of the article transfer device according to one embodiment of the present invention is provided so as to be movable while hanging from the traveling section.

[0090] Figures 6 and 7 are schematic diagrams illustrating the guide section in an article transfer device according to one embodiment of the present invention, and Figures 8 and 9 are schematic diagrams illustrating the mounting section that moves with the guide section in an article transfer device according to one embodiment of the present invention.

[0091] First, as shown in Figures 6 and 7, the mounting section 31 in the article transfer device according to one embodiment of the present invention has a structure that hangs from a guide section 41 located below the traveling section 21.

[0092] In particular, the guide section 41 in the article transfer device of the present invention has a structure in which a mounting section 31, which is located below the traveling section 21, is movably suspended.

[0093] The guide section 41 has a structure that allows it to be easily moved even when the mounting section 31 is hanging down, and comprises a guide plate 41a and a guide rod 41c.

[0094] The guide plate 41a is connected to the running section 21 and has a guide groove 41b on the mounting section 31 side, and the guide rod 41c is connected to the mounting section 31 and moves along the guide groove 41b.

[0095] Furthermore, the guide groove 41b has a structure that extends from the center of the guide plate 41a to both ends of the guide plate 41a, and at least two of them have a structure that extends from the center of the guide plate 41a to both ends of the guide plate 41a, but mainly has a structure that extends in all directions.

[0096] Therefore, as the guide rod 41c connected to the mounting section 31 moves along the guide groove 41b, the mounting section 31 can be easily moved even while hanging below the traveling section 21, and as shown in Figures 8 and 9, the mounting section 31 can be easily moved in the desired direction while remaining hanging below the traveling section 21.

[0097] Thus, the article transfer device according to one embodiment of the present invention ensures a more precise travel path using the rail section 11, and by making the mounting section 31 itself movable, the position where the mounting section 31 moves vertically up and down can be easily aligned with the position of the port and shelf.

[0098] In other words, the article transfer device according to one embodiment of the present invention improves the degree of freedom of movement of the traveling section 21 by providing a more finely spaced rail section 11, and also ensures flexibility by adjusting the positions of the loading section 31, the port, and the shelf. Therefore, the position in which the loading section 31 moves vertically up and down can be easily aligned with the positions of the port and the shelf without any additional work. [Industrial applicability]

[0099] The article transfer device according to one embodiment of the present invention can be used in a transfer process for transferring articles such as hoops that house a large number of substrates for manufacturing integrated circuit elements, and is therefore more actively applicable to the manufacturing of integrated circuit elements such as semiconductor elements and display elements.

[0100] While preferred embodiments of the present invention have been described above with reference to those skilled in the art, a person skilled in the art will understand that the present invention can be modified and altered in various ways without departing from the spirit and scope of the invention as set forth in the following claims. [Explanation of symbols]

[0101] 11: Rail section 13: The first straight rail 15: The second straight rail 17: Connecting rails 17a: Branch rail 17b: Steering rail 21: Running section 23: Running wheels 25: Steering Wheel 31: Mounting section 41: Guide Section 41a: Guide plate 41b: Guide groove 41c: Guide rod

Claims

1. A running section that travels along the rail section, It includes a structure that hangs below the aforementioned running section and a mounting section for mounting articles, The rail section comprises a first straight rail extending along a first direction and arranged in a plurality at first intervals, a second straight rail extending along a second direction perpendicular to the first direction and arranged in a plurality at second intervals, and a connecting rail having a path passing over the upper part of the first straight rail and the upper part of the second straight rail, such that the running section travels between the first straight rail and the second straight rail which are perpendicular to each other. The running section comprises running wheels that run along the first straight rail and the second straight rail, and steering wheels that run along the connecting rail. The steering wheel is characterized in that, when the running wheel travels along the first straight rail or the second straight rail and the steering wheel is positioned below the connecting rail, it is connected to the connecting rail by rising and travels along the connecting rail in a desired direction by moving left and right, when the steering wheel is positioned above the second straight rail or the first straight rail, it is separated from the connecting rail by descending, and the running wheel is connected to the second straight rail or the first straight rail and travels along the second straight rail or the first straight rail.

2. The article transfer device according to claim 1, characterized in that the mounting section has a structure that allows it to be movably suspended by a guide section disposed below the traveling section.

3. The article transfer device according to claim 2, characterized in that the guide portion comprises a guide plate connected to the traveling portion and having a guide groove on the mounting portion side, and a guide rod connected to the mounting portion and moving along the guide groove.

4. The article transfer device according to claim 3, characterized in that the guide groove has a structure that extends from the center of the guide plate to both ends of the guide plate, and at least two of the grooves have a structure that extends from the center of the guide plate to both ends of the guide plate.

5. The article transfer device according to claim 1, characterized in that the first interval and the second interval are the same distance from each other.

6. A running section that travels along the rail section, It includes a structure that hangs below the aforementioned running section and a mounting section for mounting articles, The rail section comprises a first straight rail extending along a first direction and arranged in a plurality at first intervals, a second straight rail extending along a second direction perpendicular to the first direction and arranged in a plurality at second intervals, and a connecting rail having a curved path passing over the upper part of the first straight rail and the upper part of the second straight rail, such that the running section travels between the first straight rail and the second straight rail which are perpendicular to each other. The running section comprises running wheels that run along the first straight rail and the second straight rail, and steering wheels that run along the connecting rail. The steering wheel is characterized in that, when the running wheel travels along the first straight rail or the second straight rail and the steering wheel is positioned below the connecting rail, it is connected to the connecting rail by rising and travels along the connecting rail in a desired direction by moving left and right, when the steering wheel is positioned above the second straight rail or the first straight rail, it is separated from the connecting rail by descending, and the running wheel is connected to the second straight rail or the first straight rail and travels along the second straight rail or the first straight rail.

7. The article transfer device according to claim 6, wherein the mounting section has a structure that allows it to be moved by a guide section disposed below the traveling section, and the guide section comprises a guide plate connected to the traveling section and having a guide groove on the mounting section side, and a guide rod connected to the mounting section and moving along the guide groove, and the guide groove has a structure that extends from the center of the guide plate to both ends of the guide plate, and at least two of the grooves extend from the center of the guide plate to both ends of the guide plate.

8. A running section that travels along the rail section, It includes a structure that hangs below the aforementioned running section and a mounting section for mounting articles, The rail section comprises a first straight rail extending along a first direction and arranged in a plurality at first intervals, a second straight rail extending along a second direction perpendicular to the first direction and arranged in a plurality at second intervals, and a connecting rail having a diagonal path passing over the upper part of the first straight rail and the upper part of the second straight rail, such that the running section travels between the first straight rail and the second straight rail which are perpendicular to each other. The running section comprises running wheels that run along the first straight rail and the second straight rail, and steering wheels that run along the connecting rail. The steering wheel is characterized in that, when the running wheel travels along the first straight rail or the second straight rail and the steering wheel is positioned below the connecting rail, it is connected to the connecting rail by rising and travels along the connecting rail in a desired direction by moving left and right, when the steering wheel is positioned above the second straight rail or the first straight rail, it is separated from the connecting rail by descending, and the running wheel is connected to the second straight rail or the first straight rail and travels along the second straight rail or the first straight rail.

9. The article transfer device according to claim 8, wherein the mounting section has a structure that allows it to be moved by a guide section disposed below the traveling section, and the guide section comprises a guide plate connected to the traveling section and having a guide groove on the mounting section side, and a guide rod connected to the mounting section and moving along the guide groove, and the guide groove has a structure that extends from the center of the guide plate to both ends of the guide plate, and at least two of the grooves extend from the center of the guide plate to both ends of the guide plate.

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