PCB holding hand and PCB transport robot

Abstract

To provide a substrate-holding hand capable of easily fine-tuning the pitch between blades.SOLUTION: A substrate-holding hand 20 includes: a plurality of second blades 30b that respectively support substrates W and that are stacked as spaced apart from each other; and a link mechanism 40 that supports the plurality of second blades 30b. The plurality of second blades 30b and the link mechanism 40 are connected by an eccentric bolt 50.SELECTED DRAWING: Figure 5

Description

Technical Field

[0001] This disclosure relates to a substrate holding hand and a substrate transfer robot.

Background Art

[0002] Conventionally, a substrate transfer robot including a substrate transfer hand has been known. Patent Document 1 discloses a substrate holding device including a plurality of blades that hold a substrate and a pitch changing mechanism unit that changes the pitch between the blades. In Patent Document 1, the pitch changing mechanism unit includes blade mounting plates respectively attached to the proximal ends of the plurality of blades. The plurality of blade mounting plates are attached to a pitch conversion cylinder. By reciprocating the blade mounting plates with the pitch conversion cylinder, the pitch between the blades is changed.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] In the substrate holding device of Patent Document 1, the pitch of the plurality of blades is changed by reciprocating the blade mounting plates with the pitch conversion cylinder. However, due to an attachment error of the blade mounting plate or the like, the pitch between the blades may not become the desired pitch. In this case, the work of finely adjusting the pitch between the blades that support the substrate is laborious. Therefore, it is desired to easily finely adjust the pitch between the blades that support the substrate.

[0005] This invention has been made to solve the above problems, and an object thereof is to provide a substrate holding hand and a substrate transfer robot capable of easily finely adjusting the pitch between blades. [Means for solving the problem]

[0006] A substrate holding hand according to the first aspect of this disclosure comprises a plurality of blades stacked spaced apart from each other, each supporting a substrate, and a support mechanism that supports the plurality of blades, wherein the plurality of blades and the support mechanism are connected by an eccentric member. The support mechanism includes a link mechanism that changes the pitch between the blades, and the link mechanism has multiple link members, and each of the multiple blades and the multiple link members is connected by an eccentric member whose rotation angle changes independently of each other. .

[0007] As described above, the substrate holding hand according to the first aspect of this disclosure has multiple blades and a support mechanism connected by an eccentric member. By changing the rotation angle of the eccentric member, the height position of the upper end of the eccentric member changes, and therefore the height position of the blades relative to the support mechanism changes accordingly. For this reason, the pitch between the blades can be easily fine-tuned simply by changing the rotation angle of the eccentric member connecting each of the multiple blades to the support mechanism. A substrate holding hand according to a second aspect of this disclosure comprises a plurality of blades stacked spaced apart from each other and each supporting a substrate, and a support mechanism supporting the plurality of blades, wherein the plurality of blades and the support mechanism are connected by eccentric members, the support mechanism includes a link mechanism for changing the pitch between the blades, the link mechanism has a plurality of link members, each of the plurality of blades and each of the plurality of link members is connected by eccentric members, and further comprises a drive unit for driving the link mechanism, the plurality of link members including a first link member connected to the drive unit and a plurality of second link members connected to each of the plurality of blades, each of the plurality of blades and the second link members is connected by eccentric members. A substrate holding hand according to a third aspect of this disclosure comprises a plurality of blades stacked spaced apart from each other and each supporting a substrate, and a support mechanism supporting the plurality of blades, wherein the plurality of blades and the support mechanism are connected by eccentric members, the support mechanism includes a link mechanism for changing the pitch between the blades, the link mechanism has a plurality of link members, and each of the plurality of blades and the plurality of link members is connected by eccentric members, and includes a first substrate holding hand and a second substrate holding hand positioned above the first substrate holding hand and operating independently of the first substrate holding hand, wherein the blades include a first blade positioned on the first substrate holding hand and fixed to the first substrate holding hand, and a plurality of second blades positioned on the second substrate holding hand, the pitch between the blades being changed by the link mechanism.

[0008] This disclosure 4 The substrate transport robot comprises a robot arm and a substrate holding hand positioned at the tip of the robot arm, the substrate holding hand includes a plurality of blades that each support a substrate and are stacked spaced apart from each other, and a support mechanism that supports the plurality of blades, the plurality of blades and the support mechanism being connected by an eccentric member. The support mechanism includes a link mechanism that changes the pitch between the blades, and the link mechanism has multiple link members, and each of the multiple blades and the multiple link members is connected by an eccentric member whose rotation angle changes independently of each other. .

[0009] This disclosure 4 As described above, the substrate transport robot has multiple blades and a support mechanism connected by an eccentric member. By changing the rotation angle of the eccentric member, the height position of the upper end of the eccentric member changes, and therefore the height position of the blades relative to the support mechanism changes accordingly. Thus, by simply changing the rotation angle of the eccentric member connecting each of the multiple blades to the support mechanism, it is possible to provide a substrate transport robot in which the pitch between the blades can be easily fine-tuned.

Advantages of the Invention

[0010] The pitch between the blades can be finely adjusted.

Brief Description of the Drawings

[0011] [Figure 1] It is a diagram showing the configuration of a substrate transfer robot according to the first embodiment. [Figure 2] It is a perspective view showing a link mechanism in a state where the pitch between the blades is large. [Figure 3] It is a view of the link mechanism in a state where the pitch between the blades is large as seen from the Y1 side. [Figure 4] It is a view of the link mechanism in a state where the pitch between the blades is small as seen from the Y1 side. [Figure 5] It is a diagram showing the connection part of the blade. [Figure 6] It is a diagram showing the connection part of the blade and the eccentric member. [Figure 7] It is a diagram showing a state where the height position of the blade is finely adjusted upward. [Figure 8] It is a diagram showing a state where the height position of the blade is finely adjusted downward. [Figure 9] It is a diagram for explaining the connection between the connection part of the blade and the second link member. [Figure 10] It is a diagram showing a biasing member according to the second embodiment. [Figure 11] It is a diagram showing a weight according to the first modification. [Figure 12] It is a diagram showing a weight according to the second modification.

Modes for Carrying Out the Invention

[0012] Hereinafter, embodiments embodying the present disclosure will be described based on the drawings.

[0013] [First Embodiment] (Configuration of Substrate Transfer Robot) Referring to FIGS. 1 to 9, the configuration of the substrate transfer robot 100 according to the first embodiment will be described. As shown in FIG. 1, the substrate transfer robot 100 includes a robot arm 10 and a substrate holding hand 20.

[0014] In the present specification, the vertical direction is defined as the Z direction. The upper side is the Z1 side, and the lower side is the Z2 side. The direction orthogonal to the Z direction is the X direction. One side of the X direction is the X1 side, and the other side is the X2 side. The direction orthogonal to the Z direction and the X direction is the Y direction. One side of the Y direction is the Y1 side, and the other side is the Y2 side.

[0015] The robot arm 10 is a horizontal articulated robot arm. The robot arm 10 includes a first arm 11 and a second arm 12. One end of the first arm 11 is connected to the base 14 via a first joint 13a. One end of the second arm 12 is connected to the other end of the first arm 11 via a second joint 13b. A substrate holding hand 20 is connected to the other end of the second arm 12 via a third joint 13c. Each of the first joint 13a, the second joint 13b, and the third joint 13c is provided with a drive mechanism including a servo motor that is a drive source for rotational drive, a rotational position sensor that detects the rotational position of the output shaft of the servo motor, and a power transmission mechanism that transmits the output of the servo motor to the joint. The first joint 13a, the second joint 13b, and the third joint 13c rotate around a first rotation axis A1, a second rotation axis A2, and a third rotation axis A3 along the vertical direction, respectively.

[0016] (Configuration of the substrate holding hand) As shown in FIG. 2, the substrate holding hand 20 includes a blade 30, a link mechanism 40, an eccentric bolt 50 shown in FIG. 6, a drive unit 60, and a biasing member 70. In FIGS. 2, 3, and 4, the cover portion 20a shown in FIG. 1 that covers the link mechanism 40, the eccentric bolt 50, the drive unit 60, and the biasing member 70 is omitted. The link mechanism 40 is an example of a support mechanism. The eccentric bolt 50 is an example of an eccentric member.

[0017] As shown in Figure 1, the substrate holding hand 20 is positioned at the tip of the robot arm 10. As described above, the substrate holding hand 20 is connected to the other end of the second arm 12.

[0018] As shown in Figure 1, the substrate holding hand 20 includes a first substrate holding hand 21 and a second substrate holding hand 22. The second substrate holding hand 22 is positioned above the first substrate holding hand 21 and operates independently of the first substrate holding hand 21. Specifically, the first substrate holding hand 21 is connected to the other end of the second arm 12. The second substrate holding hand 22 is connected to the first substrate holding hand 21. The second substrate holding hand 22 rotates around a third rotation axis A3.

[0019] In the first embodiment, as shown in Figure 1, a plurality of blades 30 are arranged. The plurality of blades 30 each support a substrate W and are stacked spaced apart from one another. As shown in Figure 2, the blade 30 includes a blade body portion 31, a support portion 32, and a connecting portion 33. The blade body portion 31 supports the substrate W. The blade body portion 31 has a Y-shape with its tip separated into two. The blade body portion 31 has a thin plate shape. The shape of the blade body portion 31 is not limited to a Y-shape or a thin plate shape. The support portion 32 supports the blade body portion 31. The support portion 32 is located on the base end side of the blade body portion 31. The connecting portion 33 connects the support portion 32 to a second link member 42, which will be described later. The connecting portion 33 includes a first connecting portion 33a connected to the second link member 42 and a second connecting portion 33b connecting the first connecting portion 33a to the support portion 32. In other words, the blade body 31, support portion 32, second connecting portion 33b, first connecting portion 33a, and second link member 42 are connected in this order.

[0020] In the first embodiment, as shown in Figure 1, the blade 30 includes a first blade 30a and a second blade 30b. The first blade 30a is positioned on the first substrate holding hand 21. The first blade 30a is fixed to the first substrate holding hand 21. One first blade 30a is positioned. The second blade 30b is positioned on the second substrate holding hand 22. As shown in Figures 3 and 4, the pitch p between the second blades 30b is changed by a link mechanism 40. For example, four second blades 30b are positioned. The configuration of multiple second blades 30b is similar to that of one another. The pitch p between the second blades 30b refers to the distance in the Z direction between adjacent second blades 30b.

[0021] As shown in Figure 3, the first substrate holding hand 21 includes a base portion 21a and a connecting portion 21b. The first blade 30a is attached to the base portion 21a. The connecting portion 21b is connected to the second arm 12.

[0022] As shown in Figure 2, the second substrate holding hand 22 includes a base portion 22a, a guide portion 23, and a link mechanism 40. The base portion 22a is connected to the base portion 21a of the first substrate holding hand 21. The guide portion 23 is attached to the base portion 22a. The guide portion 23 guides the movement of the second blades 30b in the Z direction when the pitch p between the second blades 30b is changed by the link mechanism 40. Specifically, the guide portion 23 includes a support column portion 23a and a guide rail portion 23b. The support column portion 23a has a plate shape arranged along the Z direction. The guide rail portion 23b has a rod shape arranged along the Z direction and is arranged in multiples. Specifically, four guide rail portions 23b are arranged on both the X1 side and the X2 side of the support column portion 23a.

[0023] The second connecting portion 33b of the first second blade 30b from the top is guided by the guide rail portion 23b. Similarly, the second connecting portion 33b of the second second blade 30b from the top is also guided by the guide rail portion 23b. The third second blade 30b from the top has a guided portion 34 attached to it that is guided by the guide rail portion 23b. Similarly, the fourth second blade 30b from the top also has a guided portion 34 attached to it that is guided by the guide rail portion 23b.

[0024] In the first embodiment, the link mechanism 40 supports a plurality of blades 30 and changes the pitch p between the blades 30. Specifically, the link mechanism 40 supports a second blade 30b and changes the pitch p between the second blades 30b. By changing the pitch p between the second blades 30b by the link mechanism 40, the pitch p between the lowest second blade 30b and the first blade 30a is also changed. The link mechanism 40 converts the rotational motion of the drive unit 60 into reciprocating motion to move the blades 30 along the Z direction.

[0025] In the first embodiment, the link mechanism 40 includes a first link member 41, a second link member 42, and a third link member 43. The first link member 41 is connected to the drive unit 60. Each of the multiple second link members 42 is connected to the blade 30, and the third link member 43 connects the multiple second link members 42 to each other. The first link member 41, the second link member 42, and the third link member 43 are each made of metal and have a plate shape. The first link member 41, the second link member 42, and the third link member 43 may be made of a material other than metal and may have a shape other than a plate shape. The first link member 41, the second link member 42, and the third link member 43 are examples of link members.

[0026] Specifically, the first link member 41 includes a first portion 41a and a second portion 41b. One end of the first portion 41a is connected to the drive shaft of the drive unit 60. The first portion 41a is rotated by the driving force of the drive unit 60. One end of the first portion 41a rotates around the B1 axis along the Y direction. The other end of the first portion 41a is connected to one end of the second portion 41b. The other end of the second portion 41b is connected to one end of the third link member 43. The first link member 41 and the drive unit 60 are supported by a support portion 45 connected to the support column portion 23a of the guide portion 23.

[0027] One end of the second link member 42 is connected to the third link member 43. The other end of the second link member 42 is connected to the second blade 30b. There are four second link members 42, corresponding to the four second blades 30b. The second link members 42a and 42c, which are connected to the first and third second blades 30b from the top, respectively, are connected to the Y1 side of the third link member 43. The second link members 42b and 42d, which are connected to the second and fourth second blades 30b from the top, respectively, are connected to the Y2 side of the third link member 43. The longitudinal lengths of the second link members 42a, 42b, 42c, and 42d have the following relationship: length of second link member 42a > length of second link member 42b > length of second link member 42c > length of second link member 42d. The second link members 42a, 42b, 42c, and 42d are examples of link members.

[0028] One end of the third link member 43 is connected to the other end of the second portion 41b of the first link member 41. The other end of the third link member 43 is connected to a support portion 44 located on the base portion 22a. The other end of the third link member 43 rotates around the B2 axis along the Y direction.

[0029] The drive unit 60 drives the link mechanism 40. As described above, the drive unit 60 is connected to the first portion 41a of the first link member 41 and rotates one end of the first portion 41a around the B1 axis. The drive unit 60 is an actuator that rotates the first link member 41. For example, the drive unit 60 is a servo motor.

[0030] (Biasing member) In the first embodiment, the biasing member 70 is arranged separately from the drive unit 60 that drives the link mechanism 40. The biasing member 70 applies force to the link mechanism 40 in a direction that increases the pitch p between the blades 30. The biasing member 70 biases the link mechanism 40 in a direction that increases the pitch p between the blades 30.

[0031] In the first embodiment, the biasing member 70 is connected to the first link member 41 and the third link member 43. The biasing member 70 includes a tension coil spring that applies a tensile force to the first link member 41, causing it to rotate in a direction that increases the pitch p between the blades 30. Specifically, circular hook portions 71 are provided at both ends of the biasing member 70. A biasing member mounting portion 41c is provided on the first link member 41. A biasing member mounting portion 43a is provided on the third link member 43. The biasing member mounting portions 41c and 43a have an L-shape and protrude toward the Y1 side. The biasing member mounting portions 41c and 43a each have a notch 41d and a hole 43b. The hook portions 71 at both ends of the biasing member 70 are attached to the notch 41d of the biasing member mounting portion 41c and the hole 43b of the biasing member mounting portion 43a, respectively. Furthermore, only one biasing member 70 is provided.

[0032] In the first embodiment, the biasing member 70 applies a biasing force to the multiple second blades 30b that opposes their own weight, and the drive unit 60 changes the pitch p between the second blades 30b. Also, when there is no driving force from the drive unit 60, the force applied by the biasing member 70 and the own weight of the multiple second blades 30b are balanced. When the multiple second blades 30b are not attached to the substrate holding hand 20, the biasing force of the biasing member 70 causes the angle between the first part 41a of the link mechanism 40 and the third link member 43 to be at its maximum. When the multiple second blades 30b are attached to the substrate holding hand 20, the angle between the first part 41a of the link mechanism 40 and the third link member 43 is reduced to some extent. Then, the force applied by the biasing member 70 and the own weight of the multiple second blades 30b are balanced. As a result, even without the driving force of the drive unit 60, the operator can move the second blade 30b in the Z direction with relatively little force.

[0033] Furthermore, when the biasing force of the biasing member 70 and the weight of the multiple second blades 30b are balanced, the pitch p between the second blades 30b is changed by the drive unit 60. As shown in Figure 3, when the biasing force of the biasing member 70 and the weight of the multiple second blades 30b are balanced, the pitch p between the second blades 30b is large. As shown in Figure 4, the first part 41a of the first link member 41 is rotated counterclockwise by the drive unit 60, which reduces the pitch p between the second blades 30b. Since the amount of rotation of the drive unit 60 can be continuously changed, the size of the pitch p between the second blades 30b can be continuously changed.

[0034] (Eccentric member) In the first embodiment, as shown in Figure 5, the eccentric bolt 50 connects a plurality of blades 30 and a link mechanism 40. As shown in Figure 6, the eccentric bolt 50 has a shaft member 51 and a disc-shaped flange portion 52 that is eccentric to the rotational axis C1 of the shaft member 51. The eccentric bolt 50 is a member in which the rotational axis C1 of the shaft member 51 and the rotational axis C2 of the disc-shaped flange portion 52 are misaligned. The eccentric bolt 50 is a member for fine-tuning the height position of the blades 30 in the Z direction.

[0035] In the first embodiment, multiple second blades 30b and multiple second link members 42 are each connected by eccentric bolts 50. The second blades 30b have holes 33c. The holes 33c are located in the first connecting portion 33a of the connecting portion 33. The eccentric bolt 50 has a shaft member 51 and a flange portion 52 that is eccentric from the rotational axis C1 of the shaft member 51. The eccentric bolt 50 is inserted into the holes 33c. With the flange portion 52 in contact with the inner surface of the holes 33c, the eccentric bolt 50 inserted into the holes 33c is rotated, causing the second blades 30b to move vertically. This finely adjusts the height position of the second blades 30b. A bottom portion 33d is also located in the holes 33c. A hole 33e is located in the bottom portion 33d. With the eccentric bolt 50 inserted into the hole 33e, the flange portion 52 abuts against the bottom portion 33d.

[0036] As shown in Figure 5, the hole 33c of the second blade 30b has an oval shape. When the eccentric bolt 50 is rotated so that the flange portion 52 protrudes in the Y1 direction, the height position of the second blade 30b becomes h1. As shown in Figure 7, when the eccentric bolt 50 is rotated so that the flange portion 52 protrudes in the Z1 direction, the height position of the second blade 30b becomes h2, which is higher than h1. As shown in Figure 8, when the eccentric bolt 50 is rotated so that the flange portion 52 protrudes in the Z2 direction, the height position of the second blade 30b becomes h3, which is lower than h1. By rotating the eccentric bolt 50, the height position of the second blade 30b is continuously adjusted between h2 and h3.

[0037] In the first embodiment, as shown in Figure 9, a nut 53 is screwed onto one end of the eccentric bolt 50. The eccentric bolt 50 serves as both a member for fine-tuning the vertical height position of the second blade 30b and a member for fastening the second blade 30b to the second link member 42. Specifically, the second link member 42 has a hole 421. An annular bearing 54 is placed in the hole 421. The second link member 42 includes a cover member 422 that covers the bearing 54. The eccentric bolt 50 passes through the bearing 54, the hole 421 in the second link member 42, and the hole 33c in the second blade 30b. The shaft member 51 of the eccentric bolt 50 is supported by the bearing 54. The flange portion 52 of the eccentric bolt 50 is placed in the hole 33c of the first connecting portion 33a of the second blade 30b. The second blade 30b and the second link member 42 are fastened together by screwing a nut 53 onto one end of an eccentric bolt 50 that passes through the hole 33c of the first connecting portion 33a. A washer 55 is placed on one end of the eccentric bolt 50. A snap ring 56 is attached to the other end of the eccentric bolt 50.

[0038] [Effects of the First Embodiment] Multiple second blades 30b and the link mechanism 40 are connected by eccentric bolts 50. By changing the rotation angle of the eccentric bolts 50, the height position of the upper end of the eccentric bolts 50 changes, and consequently, the height position of the second blades 30b relative to the link mechanism 40 changes. Therefore, the pitch p between the multiple second blades 30b can be easily fine-tuned simply by changing the rotation angle of the eccentric bolts 50 that connect each of the multiple second blades 30b to the link mechanism 40.

[0039] Each of the multiple second blades 30b and each of the multiple second link members 42 are connected by eccentric bolts 50. This allows for easy fine adjustment of the pitch p between the second blades 30b in the substrate holding hand 20, where the pitch p between the second blades 30b is changed by the link mechanism 40.

[0040] With the flange portion 52 in contact with the inner surface of the hole portion 33c, the eccentric bolt 50 inserted into the hole portion 33c is rotated, causing the second blade 30b to move vertically, thereby finely adjusting the height position of the second blade 30b. As a result, the height position of the second blade 30b can be easily finely adjusted simply by rotating the eccentric bolt 50 around the rotational axis C1.

[0041] A nut 53 is screwed onto the end of the eccentric bolt 50, and the eccentric bolt 50 serves as both a member for fine-tuning the vertical height position of the second blade 30b and a member for fastening the second blade 30b to the second link member 42. This simplifies the configuration of the substrate holding hand 20 compared to a case where the member for fine-tuning the vertical height position of the second blade 30b and the member for fastening the second blade 30b to the second link member 42 are arranged separately.

[0042] A third link member 43 is arranged to connect multiple second link members 42 to each other. This allows the driving force of the drive unit 60 to be transmitted from the first link member 41 to the multiple second link members 42 via the third link member 43.

[0043] The first blade 30a is fixed to the first substrate holding hand 21, and multiple second blades 30b are arranged such that the pitch p between them is changed by a link mechanism 40. This allows for easy fine adjustment of the pitch p between the second blades 30b, as well as easy fine adjustment of the pitch p between the second blades 30b and the first blade 30a.

[0044] The connection portion 33 of the multiple second blades 30b and the second link member 42 are connected by an eccentric bolt 50. As a result, by changing the rotation angle of the eccentric bolt 50, the height position of the connection portion 33 relative to the second link member 42 is changed, so the pitch p between the blade body portions 31 supported by the support portion 32 connected to the connection portion 33 can be easily fine-tuned.

[0045] [Second Embodiment] The configuration of the biasing member 170 according to the second embodiment will now be described. As shown in Figure 10, the biasing member 170 includes a pair of biasing members 170a and 170b. Biasing member 170a is connected to the first link member 41 and the support portion 171. Biasing member 170b is connected to the third link member 43 and the support portion 171. The support portion 171 is a member fixed to the second substrate holding hand 22. Biasing members 170a and 170b are tension coil springs that apply a tensile force to the first link member 41 and the third link member 43, respectively, causing them to rotate in a direction that increases the pitch p between the blades 30. By arranging two biasing members, biasing member 170a and biasing member 170b, the amount of elongation of biasing members 170a and biasing member 170b and the required spring force can be reduced. The biasing members 170, 170a, and 170b are examples of force-applying members.

[0046] [Differentiation] It should be noted that the embodiments disclosed herein are illustrative and not restrictive in all respects. The scope of this disclosure is defined by the claims rather than the description of the embodiments above, and further includes all modifications (modifications) within the meaning and scope equivalent to the claims.

[0047] For example, the first and second embodiments described above show examples in which four second blades 30b are arranged, but the disclosure is not limited thereto. The number of second blades 30b may be other than four.

[0048] Furthermore, while the first embodiment described above shows an example in which the link mechanism 40 is composed of a first link member 41, a second link member 42, and a third link member 43, the disclosure is not limited thereto. The number of types of link members and the shape of the link mechanism are not limited to the configuration of the link mechanism 40 in the first embodiment described above.

[0049] Furthermore, while the first and second embodiments described above show examples in which multiple second blades 30b are supported by a link mechanism 40 that changes the pitch p between the second blades 30b, the disclosure is not limited thereto. For example, the second blades 30b may be supported by a support mechanism that supports them while fixing the pitch p between them.

[0050] Furthermore, while the first and second embodiments described above show examples of fine-tuning the vertical height position of the second blade 30b using eccentric bolts 50, the disclosure is not limited thereto. The vertical height position of the second blade 30b may be fine-tuned using eccentric members other than eccentric bolts 50. For example, the vertical height position of the second blade 30b may be fine-tuned using eccentric rivets, pins, keys, etc.

[0051] Furthermore, while the first and second embodiments described above show an example in which the eccentric bolt 50 serves as both a member for fine-tuning the vertical height position of the second blade 30b and a member for fastening the second blade 30b to the second link member 42, the disclosure is not limited thereto. The member for fine-tuning the vertical height position of the second blade 30b and the member for fastening the second blade 30b to the second link member 42 may be arranged separately. Then, with the vertical height position of the second blade 30b adjusted by the eccentric member, the second blade 30b and the second link member 42 may be fastened with a non-eccentric bolt.

[0052] Furthermore, while the first and second embodiments described above show examples in which all of the multiple second link members 42 are each connected to the second blade 30b by eccentric bolts 50, the disclosure is not limited thereto. Some of the multiple second link members 42 may be connected to the second blade 30b by eccentric bolts 50.

[0053] Furthermore, in the first and second embodiments described above, examples were shown in which biasing members 70 and 170, which are tension coil springs, are applied as force-applying members that apply force to the link mechanism 40 in a direction that increases the pitch p between the blades 30, but the disclosure is not limited thereto. For example, as shown in the first modified example in Figure 11, a weight 241 may be placed on the first link member 41 so that the first link member 41 rotates in a direction that increases the pitch p between the blades 30. Also, as shown in the second modified example in Figure 12, a weight 343 may be connected to the third link member 43 via a wire 341 and a pulley 342 so that the third link member 43 rotates in a direction that increases the pitch p between the blades 30.

[0054] Furthermore, while the first and second embodiments described above show an example in which the substrate holding hand 20 includes a first substrate holding hand 21 and a second substrate holding hand 22, the disclosure is not limited thereto. For example, the disclosure can also be applied to a substrate holding hand in which the first substrate holding hand 21 is not provided. [Explanation of Symbols]

[0055] 10 Robot Arms 20 PCB holding hands 21 First board holding hand 22 Second board holding hand 30 blades 30a First Blade 30b Second Blade 31 Blade body 32 Support part 33 Connection part 33c hole 40 Link mechanism (support mechanism) 41. First link member (link member) 42, 42a, 42b, 42c, 42d Second link member (link member) 43 Third link section (link member) 50 Eccentric bolt (eccentric member) 51 Shaft member 52 Flange section 53 Nuts 60 Drive unit 100 PCB transport robots C1 Rotational center axis p pitch W board

Claims

1. Multiple blades are stacked, each supporting a substrate and spaced apart from one another, The system comprises a support mechanism that supports the plurality of blades, The plurality of blades and the support mechanism are connected by an eccentric member. The support mechanism includes a link mechanism that changes the pitch between the blades, The link mechanism has a plurality of link members, A substrate holding hand, wherein each of the plurality of blades and each of the plurality of link members are connected by the eccentric member whose rotation angle changes independently of each other.

2. The blade has a hole, The eccentric member includes an eccentric bolt inserted into the hole, having a shaft member and a flange portion eccentric to the rotational axis of the shaft member. The substrate holding hand according to claim 1, wherein, with the flange portion in contact with the inner surface of the hole, the eccentric bolt inserted into the hole is rotated, causing the blade to move vertically, thereby finely adjusting the height of the blade.

3. A nut is screwed onto the end of the eccentric bolt. The substrate holding hand according to claim 2, wherein the eccentric bolt serves as both a member for finely adjusting the vertical height position of the blade and a member for fastening the blade to the link member.

4. A plurality of blades, each supporting a substrate and stacked at a distance from one another, The system comprises a support mechanism that supports the plurality of blades, The plurality of blades and the support mechanism are connected by an eccentric member. The support mechanism includes a link mechanism that changes the pitch between the blades, The link mechanism has a plurality of link members, Each of the aforementioned multiple blades and the aforementioned multiple link members is connected by the aforementioned eccentric member. The drive unit further comprises a drive unit that drives the link mechanism, The plurality of link members are, A first link member connected to the drive unit, It includes a plurality of second link members connected to each of the plurality of blades, A substrate holding hand wherein the plurality of blades and the second link member are each connected by the eccentric member.

5. The substrate holding hand according to claim 4, wherein the plurality of link members further include a third link member that connects the plurality of second link members together.

6. A plurality of blades, each supporting a substrate and stacked at a distance from one another, The system comprises a support mechanism that supports the plurality of blades, The plurality of blades and the support mechanism are connected by an eccentric member. The support mechanism includes a link mechanism that changes the pitch between the blades, The link mechanism has a plurality of link members, Each of the aforementioned multiple blades and the aforementioned multiple link members is connected by the aforementioned eccentric member. It includes a first substrate holding hand and a second substrate holding hand positioned above the first substrate holding hand and operating independently of the first substrate holding hand, The aforementioned blade is A first blade is positioned on the first substrate holding hand and fixed to the first substrate holding hand, A substrate holding hand comprising a plurality of second blades arranged in the second substrate holding hand, the pitch between the blades being changed by the link mechanism.

7. The aforementioned blade is The blade body portion that holds the substrate, A support portion that supports the blade body portion, It includes a connecting portion that connects the support portion and the link member, The substrate holding hand according to any one of claims 1 to 6, wherein the connection portion of the plurality of blades and the link member are connected by the eccentric member.

8. A robotic arm and The robot arm comprises a substrate holding hand positioned at its tip, The aforementioned substrate holding hand is Multiple blades are stacked, each supporting a substrate and spaced apart from one another, Includes a support mechanism that supports the plurality of blades, The plurality of blades and the support mechanism are connected by an eccentric member. The support mechanism includes a link mechanism that changes the pitch between the blades, The link mechanism has a plurality of link members, A substrate transport robot in which each of the plurality of blades and the plurality of link members are connected by the eccentric members whose rotation angles change independently of each other.

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