Optical devices

Abstract

The optical device comprises a movable part that can move in a predetermined first direction, a drive electrode part having comb-tooth electrodes arranged in a second direction perpendicular to the first direction and moving the movable part in the first direction, and an optical control unit connected to the movable part and controlling incident light, wherein the optical control unit has a reflective surface inclined with respect to the first direction. The drive electrode part may be provided on the positive and negative sides of the second direction with respect to the movable part as its axis. The optical control unit may be provided extending from the movable part to either the positive or negative side.

Description

Technical Field

[0001] The present invention relates to an optical device.

Background Art

[0002] Patent Document 1 describes a "MEMS-based nano manipulator that can achieve both sub-nanometer resolution and millimeter force output". [Prior Art Documents] [Patent Documents] [Patent Document 1] Japanese Patent Translation of PCT International Publication No. WO2009 / 108868 [Patent Document 2] Japanese Unexamined Patent Application Publication No. 2018-180565 [Patent Document 3] International Publication No. WO2020 / 012723 [Patent Document 4] Japanese Patent No. 4178327 [Patent Document 5] Japanese Patent No. 4307449 [Patent Document 6] Japanese Patent No. 4598795 [Patent Document 7] Japanese Patent No. 5223381 [Patent Document 8] US Patent No. 6360033 [Patent Document 9] Japanese Patent No. 6634967 General Disclosure

[0003] In an aspect of the present invention, there is provided a movable part movable in a predetermined first direction, a comb electrode arranged in a second direction perpendicular to the first direction, a drive electrode part for moving the movable part in the first direction, and an optical control part connected to the movable part and controlling incident light, wherein the optical control part has a reflecting surface inclined with respect to the first direction.

[0004] Note that the above summary of the invention does not list all the features of the present invention.

Brief Description of the Drawings

[0005] [Figure 1A] An example of a perspective view of the optical device 100 is shown. [Figure 1B] An example of a plan view of the optical device 100 is shown. 1. For the patent document numbers, I have provided the corresponding English translations according to common practice. For example, "特表2009-541079号公報" is translated as "Japanese Patent Translation of PCT International Publication No. WO2009 / 108868". If there are specific requirements for the translation of patent document numbers, please let me know and I will adjust accordingly. 2. The translation of "�歯電極" is "comb electrode", which is a common term in the field of microelectromechanical systems (MEMS) for this type of electrode structure. If there is a more specific or preferred translation in your context, feel free to substitute it. [Figure 2] An example of the operation of the optical control unit 130 is shown. [Figure 3] An example of the configuration of the optical control unit 130 is shown. [Figure 4] An example of the configuration of the optical control unit 130 is shown. [Figure 5] An example of the configuration of the optical control unit 130 is shown. [Figure 6] An example of the configuration of the optical control unit 130 is shown. [Figure 7] An example of the configuration of the optical control unit 130 is shown. [Figure 8A] An example of region A in Figure 1B is shown. [Figure 8B] An example of region C in Figure 8A is shown. [Figure 9] An example of region A in Figure 1B is shown. [Figure 10] An example of region B in Figure 1B is shown. [Modes for carrying out the invention]

[0006] The present invention will be described below through embodiments, but these embodiments are not intended to limit the scope of the claims. Furthermore, not all combinations of features described in the embodiments are necessarily essential to the solution of the invention.

[0007] In this specification, technical matters may be described using the Cartesian coordinate axes, the X, Y, and Z axes. The Cartesian coordinate axes merely specify the relative positions of components and do not limit any particular direction. For example, the Z axis does not limit the direction to height relative to the ground. Note that the +Z axis direction and the -Z axis direction are opposite directions. When the sign is not specified and only the Z axis direction is written, it means the direction parallel to the +Z and -Z axes.

[0008] Figure 1A shows an example of a perspective view of the optical device 100. The optical device 100 comprises a movable part 110, a driving electrode part 120, and an optical control unit 130. The optical device 100 may also include a detection electrode part 140, a fixed part 150, and a support beam part 160. Note that in this figure, some components of the optical device 100 are simplified.

[0009] The optical device 100 is a device that controls incident light. The optical device 100 may control the reflection, transmission, and / or absorption of incident light. For example, the optical device 100 is an optical control device used in a microelectromechanical system (MEMS) or a nanoelectromechanical system (NEMS). The optical device 100 may be a device that controls incident light from an optical fiber.

[0010] The movable part 110 is movable in a predetermined first direction. In this example, the movable part 110 is movable in the Y-axis direction. That is, the first direction in this example is the Y-axis direction. The movable part 110 is, for example, an elongated rod-shaped portion provided near the center of the optical device 100. In this example, the movable part 110 is provided extending in the Y-axis direction. That is, the movable part 110 may be provided extending in the first direction, which is the direction in which it is movable.

[0011] The driving electrode section 120 moves the movable section 110 in a first direction. In this example, the driving electrode section 120 moves the movable section 110 in the Y-axis direction. In this figure, the driving electrode section 120 is simplified. Details of the driving electrode section 120 will be described later.

[0012] The optical control unit 130 is connected to the movable unit 110 and controls the incident light. The optical control unit 130 may reflect the incident light, absorb the incident light, transmit the incident light, or spectrally analyze the incident light. For example, the optical control unit 130 reflects the incident light.

[0013] The optical control unit 130 may move integrally with the movable unit 110. When the movable unit 110 is moved in the Y-axis direction by the operation of the drive electrode unit 120, the optical control unit 130 may also move in the Y-axis direction. That is, the optical control unit 130 is movable in the first direction (in this example, the Y-axis direction).

[0014] The optical control unit 130 of this example has a reflecting surface 132 inclined with respect to the first direction. The optical control unit 130 may be formed by vertically processing the original wafer substrate. For example, the optical control unit 130 is formed using photolithography technology.

[0015] The reflecting surface 132 may be perpendicular to the drive surface composed of the first direction and the second direction perpendicular to the first direction. The movable unit 110 of this example is movable in the Y-axis direction within the XY plane. That is, the second direction of this example is the X-axis direction, and the drive surface is the XY plane. For example, the drive surface (in this example, the XY plane) is a plane parallel to the main surface of the substrate on which the optical device 100 is provided. The reflecting surface 132 may be perpendicular to the XY plane which is the drive surface, that is, may have a plane parallel to the Z-axis direction.

[0016] In the direction perpendicular to the drive surface, the length of the reflecting surface 132 may be 50 μm or more and 1000 μm or less. In the Z-axis direction perpendicular to the XY plane which is the drive surface, the length L of the reflecting surface 132 of this example may be 50 μm or more and 1000 μm or less. The length L of the reflecting surface 132 may be larger than the beam width of the incident light irradiated from the optical fiber. The length L of the reflecting surface 132 may be equal to or less than the thickness T of the optical device 100. For example, the length L of the reflecting surface 132 is equal to the thickness T of the optical device 100.

[0017] The reflecting surface 132 may include a stacked structure of silicon and metal. For example, the metal includes aluminum, gold, silver, or copper. The reflecting surface 132 may include a stacked structure of silicon, metal, and an anti-oxidation film. For example, when a highly reactive material is used as the metal, an anti-oxidation film may be formed.

[0018] The reflecting surface 132 may have a reflectivity of 80% or more in a predetermined wavelength band. For example, the reflecting surface 132 has a reflectivity of 80% or more in a band including the wavelength of the incident light irradiated from the optical fiber. The metal material constituting the reflecting surface 132 may be determined according to the wavelength of the incident light irradiated from the optical fiber.

[0019] The detection electrode portion 140 may detect the position of the movable portion 110 in the first direction. The detection electrode portion 140 in this example detects the position of the movable portion 110 in the Y-axis direction. In this figure, the detection electrode portion 140 is simplified. Details of the detection electrode portion 140 will be described later.

[0020] The fixing portion 150 is provided to surround the driving electrode portion 120. The fixing portion 150 may be provided to surround the driving electrode portion 120 and the detection electrode portion 140. For example, the fixing portion 150 is fixed to the substrate on which the optical device 100 is provided. The movable portion 110 may be movable with respect to the fixing portion 150.

[0021] The support beam portion 160 connects the movable portion 110 and the fixing portion 150. The support beam portion 160 may connect the movable portion 110 and the fixing portion 150 so that the movable portion 110 is movable with respect to the fixing portion 150. For example, the support beam portion 160 has flexibility in the moving direction of the movable portion 110 (in this example, the Y-axis direction). Thereby, the support beam portion 160 may connect the movable portion 110 and the fixing portion 150 so that the movable portion 110 is movable with respect to the fixing portion 150.

[0022] FIG. 1B shows an example of a plan view of the optical device 100. The plan view in this example is a plan view of the optical device 100 viewed from the +Z-axis direction. Note that, in this figure, some configurations of the optical device 100 are described in a simplified manner.

[0023] The driving electrode section 120 has comb-tooth electrodes 122 arranged in a second direction. In this example, the driving electrode section 120 has comb-tooth electrodes 122 arranged in the X-axis direction. The driving electrode section 120 may have multiple groups of comb-tooth electrodes 122 arranged in the X-axis direction along the Y-axis direction. In this example, five groups of comb-tooth electrodes 122 are arranged in the Y-axis direction. However, the number of groups of comb-tooth electrodes 122 arranged in the Y-axis direction is not limited to this. The driving electrode section 120 may be provided on the positive and negative sides of the second direction with the movable section 110 as the axis. In this example, the driving electrode section 120 is provided on the positive and negative sides of the X-axis direction with the movable section 110 as the axis. In other words, the driving electrode section 120 in this example has a comb-tooth electrode 122 provided in the +X-axis direction relative to the movable section 110, and a comb-tooth electrode 122 provided in the -X-axis direction relative to the movable section 110. Note that the comb-tooth electrode 122 is simplified in this figure. Details of the driving electrode section 120 and the comb-tooth electrode 122 will be described later.

[0024] The optical control unit 130 has a reflective surface 132 that is inclined with respect to the first direction. The optical control unit 130 may be provided as an extension from the movable part 110 to either the positive or negative side of the second direction. In this example, the optical control unit 130 is provided as an extension from the movable part 110 to the negative side in the X-axis direction.

[0025] On either the positive or negative side of the second direction, the optical control unit 130 may be located on the side where it is not provided, and an optical fiber for irradiating incident light may be placed thereon. In this example, the optical fiber may be located in the region R on the +X axis side where the optical control unit 130 is not provided. That is, the optical device 100 and the optical fiber may be located in overlapping regions in the first direction (the Y axis direction in this example).

[0026] In the optical device 100 of this example, the optical control unit 130 is provided extending from the movable part 110 to either the positive or negative side of the second direction. This allows the optical fiber to be positioned on the other side of the second direction, enabling the optical device 100 and the optical fiber to be placed in an overlapping region in the first direction. This improves the degree of freedom in the arrangement of the MEMS or NEMS.

[0027] The inclination angle of the reflective surface 132 with respect to the first direction may be 30 degrees or more and 60 degrees or less. In this example, the inclination angle θ of the reflective surface 132 with respect to the Y-axis direction may be 30 degrees or more and 60 degrees or less. As an example, the inclination angle θ is 45 degrees. The inclination angle θ may be designed according to the application, configuration, or arrangement of the MEMS or NEMS. As described above, the optical control unit 130 may be formed by vertical processing of the original wafer substrate. This allows the inclination angle θ to be designed to any angle.

[0028] Furthermore, if the tilt angle θ is less than 30 degrees, light reflected by the reflective surface 132 may irradiate the optical fiber. Also, if the tilt angle θ is greater than 60 degrees, the effective reflective surface as seen from the optical fiber may become smaller. Considering these factors, if the tilt angle θ is less than 30 degrees or greater than 60 degrees, ingenuity may be required in the arrangement of the optical device 100 and the optical fiber in the MEMS or NEMS. In other words, by setting the tilt angle θ to a range of 30 degrees or more and 60 degrees or less, the convenience of the arrangement of the MEMS or NEMS can be improved. However, the tilt angle θ is not limited to 30 degrees or more and 60 degrees or less. The tilt angle θ may be any appropriate angle for constructing the MEMS or NEMS.

[0029] The detection electrode section 140 has comb-tooth electrodes 142 arranged in a second direction. In this example, the detection electrode section 140 has comb-tooth electrodes 142 arranged in the X-axis direction. The detection electrode section 140 may have multiple groups of comb-tooth electrodes 142 arranged in the X-axis direction along the Y-axis direction. In this example, the detection electrode section 140 has four groups of comb-tooth electrodes 142 arranged in the Y-axis direction. However, the number of groups of comb-tooth electrodes 142 arranged in the Y-axis direction is not limited to this. The detection electrode section 140 may be provided on the positive and negative sides of the second direction with the movable section 110 as the axis. In this example, the detection electrode section 140 is provided on the positive and negative sides of the X-axis direction with the movable section 110 as the axis. That is, the detection electrode section 140 in this example has comb-tooth electrodes 142 provided in the +X-axis direction from the movable section 110 and comb-tooth electrodes 142 provided in the -X-axis direction from the movable section 110. Note that the comb-tooth electrode 142 is simplified in this figure. Details of the detection electrode section 140 and the comb-tooth electrode 142 will be described later.

[0030] The support beam section 160 may have a first extension region 162 and a second extension region 164. The first extension region 162 is connected to the movable section 110 and may extend in a second direction. The second extension region 164 is connected between the first extension region 162 and the fixed section 150 and may extend inclined from both the first and second directions. In this example, the first extension region 162 is provided extending in the X-axis direction, and the second extension region 164 is provided extending inclined from both the X-axis and Y-axis directions.

[0031] If the support beam only has a first extension region that extends in a second direction, the nonlinearity of the flexible stiffness of the support beam may become significant as the displacement of the movable part in the first direction increases. In this case, it may become difficult to increase the displacement of the movable part in the first direction. Increasing the force applied to increase the displacement of the movable part in the first direction may cause unintended movement in the second direction. If unintended movement in the second direction occurs, the comb-shaped electrodes may become stuck together or wear down. In addition, increasing the displacement of the movable part in the first direction may also increase the stress on the support beam nonlinearly, potentially leading to fracture of the support beam.

[0032] When the support beam has a first extension region and a second extension region, and the second extension region extends in the first direction, the rigidity in the second direction may decrease, making it easier for the beam to move in the second direction. In other words, unintended movement in the second direction may occur. In this case, the comb-shaped electrodes may become stuck together or wear down.

[0033] In this example, the support beam 160 has a first extended region 162 that extends in a second direction and a second extended region 164 that extends inclined from both the first and second directions. This reduces the rigidity in the first direction, which is the direction of movement of the movable part 110, while maintaining the rigidity in the second direction. As a result, the optical device 100 in this example can increase the displacement of the movable part 110 in the first direction while suppressing the movement of the movable part 110 in the second direction.

[0034] Figure 2 shows an example of the operation of the optical control unit 130. This figure shows the operation of the optical control unit 130 together with the optical fiber 10. The operation of the optical control unit 130 may include two steps: step S210 and step S220. This figure shows the case where the movable part 110 moves to the positive side of the first direction (in this example, the Y-axis direction) and the optical control unit 130 is relatively on the positive side of the first direction (step S210), and the case where the movable part 110 moves to the negative side of the first direction and the optical control unit 130 is relatively on the negative side of the first direction (step S220). That is, the switching between step S210 and step S220 is achieved by the movement of the movable part 110.

[0035] If the optical control unit 130 is relatively on the positive side of the first direction in step S210, the incident light from the optical fiber 10 is reflected by the reflective surface 132. If the optical control unit 130 is relatively on the negative side of the first direction in step S220, the incident light from the optical fiber 10 travels without being reflected by the reflective surface 132. In this way, the optical device 100 may control the incident light from the optical fiber 10 by moving the movable part 110. The optical device 100 in this example controls whether or not the incident light from the optical fiber 10 is reflected. Note that the order of steps S210 and S220 is not limited. The optical device 100 may switch between steps S210 and S220 depending on the operation of the MEMS or NEMS.

[0036] As described above, in the optical device 100 of this example, the movable part 110 is movable in a predetermined first direction, the driving electrode part 120 moves the movable part 110 in the first direction, the optical control unit 130 is connected to the movable part 110 to control the incident light, and it has a reflective surface 132 that is inclined with respect to the first direction. As a result, the incident light can be controlled with a simpler configuration compared to the case in which the reflection direction of the incident light is controlled by rotating a mirror.

[0037] When controlling the reflection direction of incident light by rotating a mirror, the reflection direction of the incident light changes continuously during the rotation of the mirror. For example, when changing the reflection direction from a first direction to a second direction, the reflection direction changes continuously from the first direction to the second direction during the rotation of the mirror. In this case, it may be necessary to provide a configuration to prevent light from hitting other elements between the first and second directions, or to devise a way to prevent any effect even if light hits them. On the other hand, the optical device 100 in this example can discretely control the direction in which the incident light travels straight without being reflected and the direction in which the incident light is reflected by moving the movable part 110. This reduces the effect on other elements and improves the degree of freedom in the arrangement of MEMS or NEMS.

[0038] Furthermore, the optical device 100 in this example can control incident light by the movement of the movable part 110 within the drive surface. This allows the optical device 100 to be implemented in 2.5 dimensions, and the optical device 100 can be made thinner.

[0039] In the above description, the optical control unit 130 was described as having a reflective surface 132 perpendicular to the drive surface, but the optical control unit 130 may also have a separate reflective surface parallel to the drive surface. For example, the optical control unit 130 may also have a reflective surface on its upper surface. This allows the optical device 100 to control both light parallel to and perpendicular to the main surface of the substrate on which the optical device 100 is installed.

[0040] Figure 3 shows an example of the configuration of the optical control unit 130. The optical control unit 130 in this example differs from the embodiment in Figure 2 in that the reflective surface 132 includes multiple reflective regions. The configuration other than the optical control unit 130 may be the same as the example described in Figures 1A and 1B.

[0041] The reflective surface 132 includes a first reflective region 1320, a second reflective region 1322, and a third reflective region 1324. The first reflective region 1320 may reflect incident light in a first reflection direction. The second reflective region 1322 may reflect incident light in a second reflection direction different from the first reflection direction. The third reflective region 1324 may reflect incident light in a third reflection direction different from the first and second reflection directions.

[0042] This figure shows the operation of the optical control unit 130 together with the optical fiber 10 when the reflective surface 132 includes three reflective regions. The operation of the optical control unit 130 may include steps S310, S320, and S330. This figure shows the case where the movable part 110 moves to the positive side of the first direction (in this example, the Y-axis direction) and the optical control unit 130 is relatively on the positive side of the first direction (step S310), the case where the movable part 110 moves along the first direction and the optical control unit 130 is relatively in the center of the first direction (step S320), and the case where the movable part 110 moves to the negative side of the first direction and the optical control unit 130 is relatively on the negative side of the first direction (step S330). That is, switching between steps S310, S320, and S330 is achieved by moving the movable part 110.

[0043] If the optical control unit 130 is relatively on the positive side of the first direction in step S310, the incident light from the optical fiber 10 is reflected in the first reflection region 1320. If the optical control unit 130 is relatively in the center of the first direction in step S320, the incident light from the optical fiber 10 is reflected in the second reflection region 1322. If the optical control unit 130 is relatively on the negative side of the first direction in step S330, the incident light from the optical fiber 10 is reflected in the third reflection region 1324. Thus, the switching of the reflection direction by the optical control unit 130 is achieved by the movement of the movable part 110. Furthermore, the switching of the reflection direction by the optical control unit 130 is performed discretely. Note that the order of steps S310, S320, and S330 is not limited. The optical device 100 may switch between steps S310, S320, and S330 depending on the operation of the MEMS or NEMS.

[0044] In this example, the reflective surface 132 is described as containing three reflective regions, but the number of reflective regions contained in the reflective surface 132 is not limited to three. The reflective surface 132 may contain two reflective regions, or it may contain four or more reflective regions. Also, as in the example in Figure 2, by moving the movable part 110 further to the negative side in the first direction (i.e., by moving the optical control unit 130 further to the negative side in the first direction), the incident light from the optical fiber 10 may proceed without being reflected by the reflective surface 132.

[0045] Figure 4 shows an example of the configuration of the optical control unit 130. The optical control unit 130 in this example differs from the embodiment in Figure 2 in that it has a transmissive section 134. The configuration other than the optical control unit 130 may be the same as the example described in Figures 1A and 1B.

[0046] The transparent section 134 transmits incident light. For example, the transparent section 134 includes a slit structure. By adjusting the position of the optical control unit 130 by moving the movable section 110, incident light from the first optical fiber 10-1 may be reflected by the reflective surface 132, and incident light from the second optical fiber 10-2 may be transmitted.

[0047] Figure 5 shows an example of the configuration of the optical control unit 130. The optical control unit 130 in this example differs from the embodiment in Figure 2 in that it has a heat dissipation unit 135. The configuration other than the optical control unit 130 may be the same as the example described in Figures 1A and 1B.

[0048] The heat dissipation section 135 may be provided on the side opposite to the side from which the incident light enters. For example, the heat dissipation section 135 includes a heat dissipation fin structure. As a result, the optical control unit 130 has a high heat capacity and excellent heat dissipation, so that high-energy-density light can be used as the incident light from the optical fiber 10.

[0049] Figure 6 shows an example of the configuration of the optical control unit 130. The optical control unit 130 in this example differs from the embodiment in Figure 2 in that it has a reflection suppression unit 136. The configuration other than the optical control unit 130 may be the same as the example described in Figures 1A and 1B.

[0050] The reflection suppression section 136 may suppress the reflection of incident light. The reflection suppression section 136 may absorb incident light. For example, the reflection suppression section 136 includes a material that absorbs incident light. As another example, the reflection suppression section 136 includes an anti-reflective coating.

[0051] Figure 7 shows an example of the configuration of the optical control unit 130. The optical control unit 130 in this example differs from the embodiment in Figure 2 in that it has a spectral section 138. The configuration other than the optical control unit 130 may be the same as the example described in Figures 1A and 1B.

[0052] The spectroscopic section 138 may reflect incident light from the spectrometer 12 at each wavelength. For example, the spectroscopic section 138 includes a diffraction grating structure.

[0053] As described above in relation to Figures 2 to 7, the structure and function of the optical control unit 130 are arbitrary. However, the structure and function of the optical control unit 130 are not limited to the examples described in relation to Figures 2 to 7. The structure and function of the optical control unit 130 may be designed according to the application, configuration, or arrangement of the MEMS or NEMS. As mentioned above, the optical control unit 130 may be formed by vertical processing of the original wafer substrate. This allows the optical control unit 130 to be formed in any shape.

[0054] Figure 8A shows an example of region A in Figure 1B. Region A includes a part of the movable part 110, the driving electrode part 120, and a part of the fixed part 150. The driving electrode part 120 has a comb-tooth electrode 122, which includes a driving movable comb tooth 124, a driving upper fixed comb tooth 126, and a driving lower fixed comb tooth 128. The driving movable comb tooth 124 is an example of a first driving comb tooth. The driving upper fixed comb tooth 126 and the driving lower fixed comb tooth 128 are examples of second driving comb teeth.

[0055] The first drive comb teeth may be arranged in the second direction. In this example, the drive movable comb teeth 124 are arranged in the X-axis direction. The drive movable comb teeth 124 may be connected to the movable part 110.

[0056] The second drive comb teeth may be arranged in a second direction and positioned opposite the first drive comb teeth in the second direction. In this example, the upper fixed drive comb teeth 126 are arranged in the X-axis direction and positioned opposite the movable drive comb teeth 124 in the X-axis direction. In this example, the lower fixed drive comb teeth 128 are arranged in the X-axis direction and positioned opposite the movable drive comb teeth 124 in the X-axis direction. The upper fixed drive comb teeth 126 and the lower fixed drive comb teeth 128 may be fixed. For example, the upper fixed drive comb teeth 126 and the lower fixed drive comb teeth 128 are fixed to the substrate on which the optical device 100 is mounted.

[0057] When a voltage is applied between the drive movable comb teeth 124 and the drive upper fixed comb teeth 126, an electrostatic force is generated in the first direction (Y-axis direction in this example), which is the direction of movement of the movable part 110. Similarly, when a voltage is applied between the drive movable comb teeth 124 and the drive lower fixed comb teeth 128, an electrostatic force is generated in the first direction, which is the direction of movement of the movable part 110. The movable part 110 may move in the first direction due to these electrostatic forces.

[0058] If the driving electrode section has only one of either the upper fixed comb teeth for driving or the lower fixed comb teeth for driving, the rigidity and stress of the support beam section increase nonlinearly as the displacement of the movable part in the first direction increases, and therefore the magnitude of the voltage required for driving may also increase nonlinearly. In this example, the driving electrode section 120 has an upper fixed comb tooth 126 for driving and a lower fixed comb tooth 128 for driving. Therefore, the voltage required to generate the electrostatic force necessary for the movement of the movable part 110 can be divided and applied as a voltage between the driving movable comb tooth 124 and the upper fixed comb tooth 126, and a voltage between the driving movable comb tooth 124 and the lower fixed comb tooth 128. This allows the movable part 110 to be driven within a range with small nonlinearity. As a result, the optical device 100 in this example can increase the displacement of the movable part 110 in the first direction.

[0059] Figure 8B shows an example of region C in Figure 8A. Region C is the region that includes the drive movable comb teeth 124 and the drive upper fixed comb teeth 126.

[0060] The length in the first direction in which the first and second drive comb teeth face each other may vary along the second direction. In this example, the length in the Y-axis direction in which the drive movable comb tooth 124 and the drive upper fixed comb tooth 126 face each other varies along the X-axis direction. For example, the length L1 in which the drive movable comb tooth 124 and the drive upper fixed comb tooth 126 face each other at the most negative end of the X-axis direction is shorter than the length L2 in which the drive movable comb tooth 124 and the drive upper fixed comb tooth 126 face each other near the center of the X-axis direction. Similarly, the length L2 in which the drive movable comb tooth 124 and the drive upper fixed comb tooth 126 face each other near the center of the X-axis direction is shorter than the length L3 in which the drive movable comb tooth 124 and the drive upper fixed comb tooth 126 face each other at the most positive end of the X-axis direction. A structure in which the length of the facing comb teeth changes in this way is sometimes called a linear engaging comb.

[0061] In this example, the driving electrode section 120 has linear engaging comb teeth. Therefore, even when the driving movable comb teeth 124 move to their limit in the negative direction of the Y-axis, there remains a portion where the driving movable comb teeth 124 and the driving upper fixed comb teeth 126 face each other in the longer opposing portions (for example, portions with a length of L3). This allows for the generation of an electrostatic force that pulls the driving movable comb teeth 124 toward the driving upper fixed comb teeth 126 when the voltage applied between the driving movable comb teeth 124 and the driving upper fixed comb teeth 126 is reversed. In other words, even when the driving movable comb teeth 124 move to their limit in the negative direction of the Y-axis, the driving movable comb teeth 124 can return to their original position. As a result, the optical device 100 in this example can achieve a large displacement of the movable portion 110 in the first direction.

[0062] Furthermore, since the drive electrode section 120 in this example has linearly engaging comb teeth, it is possible to reduce the portion of the comb teeth that are in opposition to each other, leaving some of the comb teeth in opposition to each other, thereby reducing the overall portion of the comb teeth that are in opposition. This reduces the electrostatic force generated in the second direction (X-axis direction in this example) which is perpendicular to the first direction (Y-axis direction in this example), which is the direction of movement of the movable section 110, and prevents unintended movement in the second direction.

[0063] The first and second drive comb teeth may each be trapezoidal comb teeth, with a width greater at the root than at the tip. In this example, the drive movable comb tooth 124 is a trapezoidal comb tooth whose root width W2 is greater than the tip width W1. Similarly, the drive upper fixed comb tooth 126 is a trapezoidal comb tooth whose root width W4 is greater than the tip width W3.

[0064] When the drive movable comb teeth 124 and the drive upper fixed comb teeth 126 are each trapezoidal comb teeth, as the length between the drive movable comb teeth 124 and the drive upper fixed comb teeth 126 increases (i.e., as the drive movable comb teeth 124 moves toward the drive upper fixed comb teeth 126), the distance between the comb teeth decreases and the electrostatic force increases. As a result, the movable part 110 can be moved even if the rigidity and stress of the support beam 160 increase as the displacement of the movable part 110 in the first direction increases. Consequently, the optical device 100 in this example can achieve a large displacement of the movable part 110 in the first direction.

[0065] In the above explanation, the driving movable comb teeth 124 and the driving upper fixed comb teeth 126 were described in relation to region C, but the same applies to the driving movable comb teeth 124 and the driving lower fixed comb teeth 128. That is, the driving movable comb teeth 124 and the driving lower fixed comb teeth 128 may be linear engaging comb teeth whose lengths in the opposing first direction change along the second direction, and the driving lower fixed comb teeth 128 may be trapezoidal comb teeth.

[0066] Figure 9 shows an example of region A in Figure 1B. The optical device 100 in this example differs from the example in Figure 8A in that the structure of the support beam 160 is different. Otherwise, it may be the same as the example in Figure 8A.

[0067] The support beam section 160 may have a plurality of first extension regions 162 that are parallel to each other. The support beam section 160 may have a plurality of second extension regions 164 that are parallel to each other and each corresponds to a plurality of first extension regions 162. In this example, the support beam section 160 has two first extension regions 162 that are parallel to each other and two second extension regions 164 that are parallel to each other and each corresponds to the two first extension regions 162. However, the number of extension regions that the support beam section 160 has is not limited to this. In this example, the support beam section 160 can reduce the rigidity in the first direction, which is the direction of movement of the movable part 110, and further maintain the rigidity in the second direction. As a result, the optical device 100 in this example can increase the displacement of the movable part 110 in the first direction while suppressing the movement of the movable part 110 in the second direction.

[0068] Figure 10 shows an example of region B in Figure 1B. Region B is a region that includes a part of the movable part 110 and the detection electrode part 140. The detection electrode part 140 has a comb-tooth electrode 142, which includes a detection movable comb tooth 144 and a detection fixed comb tooth 146. The detection movable comb tooth 144 is an example of a first detection comb tooth. The detection fixed comb tooth 146 is an example of a second detection comb tooth.

[0069] The first detection comb teeth may be arranged in the second direction. In this example, the detection movable comb teeth 144 are arranged in the X-axis direction. The detection movable comb teeth 144 may be connected to the movable part 110.

[0070] The second detection comb teeth may be arranged in a second direction and positioned opposite the first detection comb teeth in the second direction. In this example, the fixed detection comb teeth 146 are arranged in the X-axis direction and positioned opposite the movable detection comb teeth 144 in the X-axis direction. The fixed detection comb teeth 146 may be fixed. For example, the fixed detection comb teeth 146 may be fixed to the substrate on which the optical device 100 is mounted.

[0071] As the movable part 110 moves, the length between the opposing detection movable comb teeth 144 and the detection fixed comb teeth 146 changes, so the capacitance of the capacitor formed by the detection movable comb teeth 144 and the detection fixed comb teeth 146 changes. The detection electrode part 140 may detect the position of the movable part 110 in the first direction (in this example, the Y-axis direction) based on the change in capacitance.

[0072] The detection electrode section 140 does not need to have linearly engaging comb teeth. That is, the length in the first direction in which the first detection comb teeth and the second detection comb teeth face each other does not change along the second direction and may be uniform. Also, each of the detection movable comb teeth 144 and the detection fixed comb teeth 146 may be rectangular comb teeth with equal width at the tip and base. As a result, the capacitance of the capacitor formed by the detection movable comb teeth 144 and the detection fixed comb teeth 146 is proportional to the displacement of the movable part 110 in the first direction. Therefore, the detection electrode section 140 can accurately detect the position of the movable part 110 in the first direction.

[0073] In the above description, an example was given in which the detection movable comb teeth 144 are provided on the positive side in the Y-axis direction and the detection fixed comb teeth 146 are provided on the negative side in the Y-axis direction. However, the positional relationship between the detection movable comb teeth 144 and the detection fixed comb teeth 146 is not limited to this. The detection movable comb teeth 144 may be provided on the negative side in the Y-axis direction and the detection fixed comb teeth 146 may be provided on the positive side in the Y-axis direction. Also, similar to the driving electrode section 120, the detection electrode section 140 may have an upper fixed comb tooth and a lower fixed comb tooth.

[0074] In the optical device 100 of this example, the driving electrode section 120 has linear engaging comb teeth and trapezoidal comb teeth, while the detection electrode section 140 has rectangular comb teeth but no linear engaging comb teeth. As a result, the optical device 100 of this example can increase the displacement of the movable part 110 in the first direction by the driving electrode section 120, while accurately detecting the position of the movable part 110 by the detection electrode section 140.

[0075] Although the present invention has been described above using embodiments, the technical scope of the present invention is not limited to the scope described in the above embodiments. It will be apparent to those skilled in the art that various modifications or improvements can be made to the above embodiments. It will be clear from the claims that such modified or improved forms may also be included in the technical scope of the present invention.

[0076] It should be noted that the execution order of operations, procedures, steps, and stages in the devices, systems, programs, and methods shown in the claims, specifications, and drawings is not explicitly stated as "before," "prior to," etc., and that these can be performed in any order unless the output of a previous process is used in a later process. Even if the operation flow in the claims, specifications, and drawings is described using phrases such as "first," "next," etc. for convenience, this does not mean that it is mandatory to perform the operations in that order. [Explanation of Symbols]

[0077] 10 Optical fiber, 12 Spectrometer, 100 Optical device, 110 Movable part, 120 Driving electrode part, 122 Comb electrode, 124 Driving movable comb teeth, 126 Driving upper fixed comb teeth, 128 Driving lower fixed comb teeth, 130 Optical control unit, 132 Reflecting surface, 134 Transmitting part, 135 Heat dissipation part, 136 Reflection suppression part, 138 Spectrometer, 140 Detection electrode part, 142 Comb electrode, 144 Detection movable comb teeth, 146 Detection fixed comb teeth, 150 Fixed part, 160 Support beam part, 162 First extended region, 164 Second extended region, 1320 First reflection region, 1322 Second reflection region, 1324 Third reflection region

Claims

1. A movable part that can move in a predetermined first direction, A drive electrode section having comb-tooth electrodes arranged in a second direction perpendicular to the first direction, which moves the movable part in the first direction, A fixing portion is provided surrounding the aforementioned driving electrode portion, A light control unit connected to the aforementioned movable part controls the incident light, Equipped with, The light control unit has a reflective surface inclined with respect to the first direction, The aforementioned drive electrode section is, A movable comb tooth for driving, connected to the movable part and arranged in the second direction, A drive fixing comb tooth connected to the aforementioned fixing part and arranged in the second direction, It has, The movable part, the fixed part, and the driving electrode part form an integrated structure. optical equipment.

2. The drive electrode portion is provided on the positive and negative sides of the second direction, with the movable portion as the axis. The light control unit is provided extending from the movable part to either the positive or negative side. The optical apparatus according to claim 1.

3. The reflective surface is perpendicular to the driving surface consisting of the first and second directions. The optical apparatus according to claim 1.

4. The inclination angle of the reflective surface with respect to the first direction is 30 degrees or more and 60 degrees or less. The optical apparatus according to claim 1.

5. The length of the reflective surface in the second direction is one-third or more of the length of the fixed portion in the second direction. The optical apparatus according to claim 1.

6. The reflective surface includes a layered structure of silicon and metal. The optical apparatus according to claim 1.

7. The reflective surface includes a laminated structure of silicon, metal, and an anti-oxidation film. The optical apparatus according to claim 6.

8. The fixed comb teeth for driving are provided opposite the movable comb teeth for driving in the second direction. The optical apparatus according to any one of claims 1 to 7.

9. The length in the first direction in which the drive movable comb teeth and the drive fixed comb teeth face each other changes along the second direction. The optical apparatus according to claim 8.

10. The length in the first direction at the first position in the second direction at which the driving movable comb teeth and the driving fixed comb teeth face each other is longer than the length in the first direction at the second position in the second direction, which is located inside the first position, at which the driving movable comb teeth and the driving fixed comb teeth face each other. The optical apparatus according to claim 9.

11. It includes a detection electrode section having comb-tooth electrodes arranged in the second direction, which detects the position of the movable part in the first direction. The optical apparatus according to any one of claims 1 to 7.

12. The movable part and the fixed part are connected by a support beam, The fixing portion is provided surrounding the driving electrode portion and the support beam portion. The optical apparatus according to any one of claims 1 to 7.

13. The movable part has a movable projection that protrudes in the second direction toward the fixed part from the movable part, The fixed portion has a fixed projection that protrudes from the fixed portion toward the movable portion in the second direction. The optical apparatus according to any one of claims 1 to 7.

14. The movable projection is provided at the connection portion between the movable part and the optical control unit. The fixed projection is provided in a position opposite to the movable projection in the first direction. The optical apparatus according to claim 13.

15. The light control unit is provided on the outside of the fixed portion, The optical apparatus according to any one of claims 1 to 7.

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