High-voltage electrical components

Abstract

To provide a high voltage electric component which suppresses risk of discharge and enables sufficient cooling.SOLUTION: A high voltage electric component includes a holding member, a high frequency power transmission line, an insulating resin, and a pair of positioning members. The holding member is composed of a cylindrical insulator having a hollow part functioning as a coolant passage. The high frequency power transmission line has a body part and a terminal part, and the body part is provided in a long axis direction of the outer periphery of the holding member. The insulating resin is arranged on the outer peripheral side of the holding member so as to seal the body part of the high frequency power transmission line. The pair of positioning members have a coolant passage connected to the hollow part of the holding member, and is composed of an insulator for positioning the holding member at both ends in the long axis direction of the holding member so that a lower position of the high frequency power transmission line becomes a predetermined position relative to a ground surface.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to high-voltage electrical components.

Background Art

[0002] Conventionally, in a plasma processing apparatus used in the process of manufacturing a semiconductor wafer or a liquid crystal substrate, for example, a power supply device for generating a high voltage is provided, such as a pulse power supply device for generating a pulsed voltage (pulse voltage) (see, for example, Patent Document 1). The pulse power supply device is configured to, for example, convert DC power into AC power by an inverter circuit, then convert the AC power into AC power with different voltage values by a transformer, rectify and smooth it by a rectifying and smoothing circuit, and further generate a pulse voltage by a switching circuit or the like.

[0003] In recent years, in fields where high-frequency power is used (for example, the plasma processing field), there has been an increasing demand for higher voltage (for example, an absolute value of 10 kV or more) and higher power. For this reason, the voltage value (absolute value) output from the pulse power supply device has been increasing. The above-described pulse power supply device outputs, for example, a pulse voltage having a high voltage potential of about 10 kV in absolute value. For this reason, in a rectifying and smoothing circuit, a switching circuit, or the like, a portion (hereinafter, a high-potential portion) to which a high voltage of about 10 kV in absolute value is applied occurs. Therefore, a high voltage may be applied to the "high-frequency power transmission line" inside the pulse power supply device.

[0004] If the impedance of the "high-frequency power transmission line" is the same, the amount of heat generation increases due to an increase in the voltage value. Therefore, as the voltage becomes higher, heat generation countermeasures for the "high-frequency power transmission line" become necessary. In addition, as the frequency of the voltage component of the high-frequency power supplied to the high-frequency power transmission line becomes higher, it becomes easier to discharge, so the discharge risk increases.

[0005] As a countermeasure to these problems, from the perspective of heat dissipation, a technique has been proposed, as described in Patent Document 2, in which a coil wrapped around a cylindrical member is cooled by circulating cooling water inside the cylindrical member. However, the cooling of the parts of the coil that are not in contact with the cylindrical member may not be sufficient. Furthermore, since Patent Document 2 is not intended for high-voltage circuits, it is not a technique that can reduce the risk of discharge.

[0006] Furthermore, as a countermeasure to these problems, a coil technology using highly heat-dissipating insulated wires has been proposed, as described in Patent Document 3. However, this technology is not intended to improve heat dissipation efficiency, and therefore the coil cooling is insufficient. In addition, Patent Document 3 is not intended to reduce the risk of discharge, and therefore is not a technology that can reduce the risk of discharge. [Prior art documents] [Patent Documents]

[0007] [Patent Document 1] Japanese Patent Publication No. 2013-125729 [Patent Document 2] Japanese Patent Publication No. 2020-119645 [Patent Document 3] Japanese Patent Application Publication No. 8-167529 [Overview of the project] [Problems that the invention aims to solve]

[0008] This invention has been made in view of these problems, and aims to provide a high-voltage electrical component that can suppress the risk of discharge and provide sufficient cooling. [Means for solving the problem]

[0009] The high-voltage electrical component according to the embodiment comprises a holding member, a high-frequency power transmission line, an insulating resin, and a pair of positioning members. The holding member is made of a cylindrical insulator having a hollow portion that functions as a refrigerant flow path. The high-frequency power transmission line has a main body portion and a terminal portion, with the main body portion provided along the long axis direction on the outer circumference of the holding member. The insulating resin is arranged on the outer circumference side of the holding member so as to seal the main body portion of the high-frequency power transmission line. The pair of positioning members are made of insulators having a refrigerant flow path connected to the hollow portion of the holding member, and positioning the holding member at both ends of the holding member in the long axis direction such that the lower position of the high-frequency power transmission line is at a predetermined position relative to the ground surface.

[0010] In the high-voltage electrical component according to this embodiment, the high-frequency power transmission line is formed in a spiral shape. Furthermore, the high-voltage electrical component according to this embodiment further includes a guide that extends along the long axis direction of the holding member for forming the high-frequency power transmission line in the spiral shape. Furthermore, in the high-voltage electrical component according to this embodiment, the holding member has a recess for positioning the guide along the long axis direction. Furthermore, in the high-voltage electrical component according to this embodiment, the high-frequency power transmission line is formed by plating. [Effects of the Invention]

[0011] According to the present invention, by sealing a high-frequency power transmission line to which a high voltage is applied with a highly thermally conductive insulating resin and increasing the heat transfer path to a heat-dissipating holding member, the cooling efficiency of the high-frequency power transmission line can be improved, and the risk of discharge to the high-frequency power transmission line can be reduced. [Brief explanation of the drawing]

[0012] [Figure 1] Figure 1 shows an example of the configuration of high-voltage electrical components. [Figure 2] Figure 2 is a perspective view showing an example of the appearance of a high-voltage electrical component. [Figure 3]Figure 3 shows an example of a high-frequency power transmission line spirally wound around a holding member. [Figure 4] Figure 4 shows an example in which the high-frequency power transmission line shown in Figure 3 is sealed with an insulating resin. [Figure 5] Figure 5 shows an example of a pair of positioning members, four rods, and four nuts. [Figure 6] Figure 6 shows a three-view drawing of the guide, a two-view drawing of the retaining member, and an example of a cross-section of a high-frequency power transmission line sealed in insulating resin. [Figure 7] Figure 7 shows an example of the difference in surface temperature depending on whether or not a high-frequency power transmission line is sealed with an insulating resin. [Modes for carrying out the invention]

[0013] Hereinafter, embodiments of the high-voltage electrical components according to the present invention will be described with reference to the drawings. However, the present invention is not limited by these embodiments. In the following embodiments, parts with the same reference numerals are considered equivalent, and redundant explanations will be omitted as appropriate.

[0014] Figure 1 is a diagram showing an example of the configuration of a high-voltage electrical component 1. Figure 2 is a perspective view showing an example of the appearance of the high-voltage electrical component 1. As shown in Figure 1, the high-voltage electrical component 1 comprises a holding member 3, a high-frequency power transmission line 5, an insulating resin 7, a pair of positioning members 8, a plurality of rods 83, a plurality of nuts 85, and a guide 10.

[0015] The high-voltage electrical component 1 is used, for example, as part of a pulse power supply device or the like. The pulse power supply device, for example, converts DC power into AC power by an inverter circuit, then converts the AC power into AC power with different voltage values by a transformer, rectifies and smoothes it by a rectifier smoothing circuit, and further generates a pulsed voltage (pulse voltage) by a switching circuit or the like. The pulse power supply device outputs a pulse voltage having a high voltage potential of about 10 kV in absolute value, for example, in a field where high-frequency power such as the plasma processing field is used. For this reason, a high voltage is applied to the high-frequency power transmission line 5. Note that the frequency of the pulsed voltage waveform is about several hundred kHz, but various frequencies are used depending on the application. For example, it may be about several tens of kHz or about 1 MHz. Further, the high-voltage electrical component 1 can also be used, for example, as part of a high-frequency power supply for generating plasma.

[0016] High-frequency power means, for example, power whose voltage component frequency is in the radio frequency band. The radio frequency band means, for example, an AC frequency band from about several hundred kHz to about 300 MHz, which is the lower limit frequency of the so-called microwave band. Note that the upper and lower threshold values of the above-mentioned radio frequency band are an example and are not limited thereto. Further, the above-mentioned AC may have a sine-wave-shaped or rectangular-wave-shaped voltage component waveform. Note that the frequency of the voltage component of the high-frequency power is, for example, an industrial frequency such as 400 kHz, 2 MHz, 13.56 MHz, 27.12 MHz, 40.68 MHz, etc.

[0017] Hereinafter, for the sake of specific explanation, it is assumed that the high-voltage electrical component 1 functions as a reactor. The reactor is, for example, a passive element using an inductor. The inductor is a passive element that can store energy in a magnetic field formed by the flowing current and is formed, for example, by a coil. When the high-voltage electrical component 1 has a function as a reactor, the high-frequency power transmission line 5 functions as an inductor.

[0018] Note that the high-voltage electrical component 1 is not limited to functioning as a reactor. For example, the high-voltage electrical component 1 may be configured to function as a resistor. At this time, the high-frequency power transmission line 5 functions as a resistor.

[0019] The holding member 3 is composed of a cylindrical insulator having a hollow portion 31 that functions as a refrigerant flow path. As the refrigerant, for example, water such as industrial water is used. Note that the refrigerant is not limited to water and may be other cooling fluids. When an inductor is formed by the high-frequency power transmission line 5, the holding member 3 is realized by a bobbin. At this time, the bobbin has high insulation and high heat dissipation. Also, for example, piping holes for water cooling are provided in the hollow portion 31 of the bobbin. The holding member 3 has a recess for positioning the guide 10 along the long axis direction. Note that when the guide 10 is unnecessary, the recess in the holding member 3 becomes unnecessary. The holding member 3 is formed of, for example, ceramics such as alumina, silicon nitride, and aluminum nitride. That is, the heat conductivity cannot be expected for the resin usually used as a bobbin, but in this embodiment, by using ceramics, high insulation and high heat conductivity can be realized.

[0020] The high-frequency power transmission line 5 has a main body portion 51 and a terminal portion 53. The main body portion 51 of the high-frequency power transmission line 5 is provided along the long axis direction of the outer periphery of the holding member 3. Thereby, the high-frequency power transmission line 5 is efficiently cooled by the refrigerant flowing through the hollow portion 31 of the holding member 3. The high-frequency power transmission line 5 shown in FIG. is formed in a spiral shape. Thereby, the high-frequency power transmission line 5 functions as an inductor, and the high-voltage electrical component 1 functions as a reactor. The high-frequency power transmission line 5 is realized by, for example, Litz wire, enameled wire, or plating.

[0021] Furthermore, if the high-frequency power transmission line 5 is realized by plating, the plating may be formed, for example, by surface treatment on the outer circumference of the retaining member 3. In this case, the guide 10 becomes unnecessary. When the high-frequency power transmission line 5 is formed by plating, the dimensional accuracy of the high-frequency power transmission line 5 relative to the retaining member 3 can be improved. This improves the stabilization of the electrical characteristics of the high-voltage electrical component 1. In addition, since the guide 10 is unnecessary, the manufacturing cost and manufacturing man-hours of the high-voltage electrical component 1 can be reduced.

[0022] Figure 3 shows an example of a high-frequency power transmission line 5 spirally wound around a holding member 3. In Figure 3, an enameled wire 55 and a Litz wire 57 are shown as an example of a high-frequency power transmission line 5. A terminal portion 53 is attached to the Litz wire 57. Of course, a terminal portion 53 is also attached to the enameled wire 55, but it is omitted in Figure 3. As shown in Figure 3, the enameled wire 55 and the Litz wire 57 are spirally wound around the outer circumference of the holding member 3 along the long axis of the outer circumference of the holding member 3. External wiring of high-voltage electrical components 1, etc., are electrically connected to the terminal portion 53 of the high-frequency power transmission line 5.

[0023] The insulating resin 7 is positioned on the outer circumference of the retaining member 3 so as to seal the main body 51 of the high-frequency power transmission line 5. The insulating properties of the insulating resin 7 are higher than those of air (dielectric strength of air: 3.0 kV / mm). The insulating resin 7 also has higher thermal conductivity than that of air (thermal conductivity of air: 0.0241 W / m·K). Furthermore, the insulating resin 7 has higher heat resistance than the temperature of the high-frequency power transmission line 5, which generates heat when high voltage is applied. In addition, when the insulating resin 7 is cured by heating during the sealing of the high-frequency power transmission line 5, the insulating resin 7 is thermosetting.

[0024] As the insulating resin 7, for example, silicone rubber can be used. Silicone rubber has a dielectric strength of, for example, 20 to 30 kV / mm. Silicone rubber also has a thermal conductivity of, for example, 0.1 to 5.1 W / m·K. Alternatively, as the insulating resin 7, for example, an epoxy resin with a thermal conductivity of 4 W / m·K or higher can be used. In this embodiment, the insulating resin 7 can be selected from various insulating materials such as silicone, taking into consideration dielectric strength and thermal conductivity, according to the application of the high-voltage electrical component 1. The insulating resin 7 corresponds to the molding material.

[0025] Figure 4 shows an example in which the high-frequency power transmission line 5 shown in Figure 3 is sealed with insulating resin 7. As shown in Figure 4, the main body 51 of the high-frequency power transmission line 5 is sealed with insulating resin 7, except for the terminal portion 53. That is, as shown in Figure 4, only the terminal portion 53 of the high-frequency power transmission line 5 is exposed and not sealed.

[0026] The insulating resin (molding material) 7 seals the high-frequency power transmission line 5. As a result, the high-frequency power transmission line 5 and the insulating resin 7 are in close contact. Consequently, the insulating resin (molding material) 7 functions as a heat dissipation member, suppressing the temperature rise of the high-frequency power transmission line 5. Specifically, the high-frequency power transmission line 5 is cooled by the coolant flowing through the hollow section 31 via the insulating resin 7 and the holding member 3. In addition, since the insulating resin (molding material) 7 seals the high-frequency power transmission line 5, and the dielectric strength of the insulating resin (molding material) 7 is greater than that of air, the risk of discharge between the high-frequency power transmission line 5 and the ground surface 9 is reduced.

[0027] Furthermore, in fields where high-frequency power is used, such as plasma processing, high voltage and high-frequency power are employed, which increases the amount of heat generated in the high-frequency power transmission line 5 and makes discharge more likely. Therefore, the effect of suppressing heat generation and reducing the risk of discharge by the insulating resin (molding material) 7 described above is extremely useful for high-voltage electrical components 1 used in such fields.

[0028] Furthermore, when the high-frequency power transmission line 5 functions as a reactor (inductor), the high-frequency power transmission line 5 has an inductance component. Therefore, an impedance increase due to high frequency occurs in the high-frequency power transmission line 5, which can result in a voltage increase. For these reasons, when the high-voltage electrical component 1 functions as a reactor, the effects of suppressing heat generation and reducing the risk of discharge by the insulating resin (molding material) 7 become more useful (more pronounced).

[0029] A pair of positioning members 8 have a refrigerant flow path 81 connected to the hollow portion 31 of the holding member 3. The pair of positioning members 8 position the holding member 3 at both ends in the longitudinal direction of the holding member 3 so that the lower position of the high-frequency power transmission line 5 is at a predetermined position relative to the ground surface 9. In other words, the pair of positioning members 8 support the holding member 3 so that their own refrigerant flow path 81 and the hollow portion 31 of the holding member 3 are in close contact and positioned. For example, an insulating resin such as polyetherimide can be used as the pair of positioning members 8. However, the material of the pair of positioning members 8 is not limited to polyetherimide, and other insulating materials may be used.

[0030] Figure 5 shows an example of a pair of positioning members 8, four rods 83, and four nuts 85. As shown in Figures 1, 2, and 5, the pair of positioning members 8 are connected via multiple rods 83 and a holding member 3 by tightening multiple nuts 85 onto threads 88 provided at both ends of the long axes of the multiple rods 83. That is, as shown in Figures 1 and 2, the pair of positioning members 8 are pulled together by tightening multiple nuts 85 onto the temporarily assembled multiple rods 83. This assembles the high-voltage electrical component 1.

[0031] Furthermore, as shown in Figures 1 and 2, both ends of the retaining member 3 are fitted into a pair of positioning members 8, and the retaining member 3 is supported by the pair of positioning members 8 at a predetermined distance from the ground surface 9. As shown in Figures 1 and 5, the pair of positioning members 8 have recesses 87 into which the retaining member 3 is fitted.

[0032] Furthermore, as shown in Figures 1 and 5, an O-ring 89 is provided in the recess 87 of the pair of positioning members 8 into which the retaining member 3 is fitted. That is, the O-ring 89 is positioned outside the outer circumference of the refrigerant flow path 81 in the recess 87 of the pair of positioning members 8. To reduce the risk of corrosion due to ozone generation associated with discharge, for example, a fluorine-based elastic material with strong ozone resistance is used as the material for the O-ring 89. The O-ring 89 deforms when the pair of positioning members 8 and the retaining member 3 are connected. This improves the adhesion between the pair of positioning members 8 and the retaining member 3, preventing misalignment between the pair of positioning members 8 and the retaining member 3, and preventing refrigerant leakage from between the pair of positioning members 8 and the retaining member 3.

[0033] The distance between the high-frequency power transmission line 5 and the ground surface 9 affects discharge. Therefore, the position of the recess 87 in the pair of positioning members 8 is formed by designing the distance between the high-frequency power transmission line 5 and the ground surface 9 to prevent discharge. Furthermore, since the pair of positioning members 8 are separate parts from the retaining members (ceramics such as alumina) 3, the height distance from the ground surface 9 to the retaining members 3 (i.e., the distance between the ground surface 9 and the retaining members 3) can be appropriately adjusted according to the application of the high-voltage electrical component 1, the voltage applied to the high-frequency power transmission line 5, and / or the frequency of the high-frequency power. In addition, as described above, since the high-frequency power transmission line 5 is sealed with an insulating resin (molding material) 7, the high-frequency power transmission line 5 does not directly contact the ground surface 9. Therefore, according to the high-voltage electrical component 1 of this embodiment, the risk of discharge can be reduced.

[0034] The guide 10 is fitted into a recess provided in the retaining member 3. The guide 10 extends along the long axis of the retaining member 3, forming the high-frequency power transmission line 5 in a spiral shape. The fit between the recess provided in the retaining member 3 and the guide 10 improves the positioning accuracy of the guide 10. As a result, this high-voltage electrical component 1 enables the placement of the high-frequency power transmission line 5 on the retaining member 3 in a more stable shape.

[0035] Guide 10 is made of an insulating material. The material constituting guide 10 is, for example, PEEK (Poly Ether Ether Ketone) resin. However, the material of guide 10 is not limited to PEEK resin; it may be made of other materials that have insulating and thermal conductivity properties.

[0036] Figure 6 shows an example of three views of the guide 10 (top view 101, side view 103, and front view 105), two views of the holding member 3 (side view 301 and front view 302), and a cross-section 59 relating to the high-frequency power transmission line 5 sealed in insulating resin 7. As shown in Figure 6, a recess 33 for fitting the guide 10 is provided on the side of the holding member 3. This improves the accuracy of positioning the guide 10 and allows for the formation of a more stable shape for the high-frequency power transmission line 5 in the holding member 3.

[0037] The depth of the recess 33 in the retaining member 3 corresponds, for example, to the thickness 107 of the guide 10 in the front view 105 of the guide 10. As a result, even when the guide 10 is fitted into the recess 33 of the retaining member 3, the close contact between the high-frequency power transmission line 5 and the retaining member 3 is maintained in the same way as when the guide 10 is not used. That is, the high-frequency power transmission line 5 is in close contact with the retaining member 3, just as when the guide 10 is not used.

[0038] Furthermore, as shown in Figure 6, the guide 10 is capable of guiding the high-frequency power transmission line 5 and supports the high-frequency power transmission line 5 when it is wound around the holding member 3. Also, as shown in Figure 6, insulating resin 7 flows into the spaces between the main bodies 51 of the high-frequency power transmission line 5 arranged by the guide 10 through sealing by pressurization. As a result, with this high-voltage electrical component 1, it is possible to arrange the high-frequency power transmission line 5 on the holding member 3 in a more stable shape while maintaining cooling efficiency for the high-frequency power transmission line 5, regardless of the presence or absence of the guide 10.

[0039] Figure 7 shows an example of the difference in surface temperature depending on whether or not the high-frequency power transmission line 5 is sealed with an insulating resin 7. As shown in Figure 7, the surface temperature of the insulating resin 7 sealing the high-frequency power transmission line 5 is lower than the surface temperature of the unsealed high-frequency power transmission line 5, especially at the end of the holding member 3 in the longitudinal direction. Therefore, with this high-voltage electrical component 1, the high-frequency power transmission line 5 is effectively cooled by the insulating resin 7, the holding member 3, and the coolant in the hollow portion 31 of the holding member 3.

[0040] Based on the above, the high-voltage electrical component 1 according to this embodiment comprises: a holding member 3 made of a cylindrical insulator having a hollow portion 31 that functions as a refrigerant flow path; a high-frequency power transmission line 5 having a main body portion 51 and a terminal portion 53, with the main body portion 51 provided along the long axis direction of the outer circumference of the holding member 3; an insulating resin 7 arranged on the outer circumference side of the holding member 3 so as to seal the main body portion 51 of the high-frequency power transmission line 5; and a pair of positioning members 8 made of an insulator that have a refrigerant flow path 81 connected to the hollow portion 31 of the holding member 3 and position the holding member 3 at both ends in the long axis direction of the holding member 3 so that the lower position of the high-frequency power transmission line 5 is at a predetermined position with respect to the ground surface 9.

[0041] When the high-voltage electrical component 1 is configured as described above, the high-frequency power transmission line 5 is sealed by the insulating resin (molding material) 7, resulting in close contact between the high-frequency power transmission line 5 and the insulating resin 7. As a result, the insulating resin (molding material) 7 functions as a heat transfer member to the heat dissipation member and the holding member 3, suppressing the temperature rise of the high-frequency power transmission line 5. In addition, with this high-voltage electrical component 1, since the high-frequency power transmission line 5 is sealed by the insulating resin (molding material) 7, the dielectric strength of the insulating resin (molding material) 7 is greater than that of air, thus reducing the risk of discharge.

[0042] Furthermore, according to the high-voltage electrical component 1 of this embodiment, the distance between the high-frequency power transmission line 5 and the ground surface 9 also affects the reduction of discharge risk, so the distance between the high-frequency power transmission line 5 and the ground surface 9 can be designed to prevent discharge. In this embodiment, since the pair of positioning members 8 are separate parts from the holding member 3, height adjustment from the ground surface 9 is easy. In addition, according to the high-voltage electrical component 1, since the high-frequency power transmission line 5 is sealed with insulating resin 7, the high-frequency power transmission line 5 does not come into direct contact with the ground surface 9.

[0043] Therefore, even if higher voltage and higher power are required in fields where high-frequency power is used, resulting in increased heat generation and a greater likelihood of discharge, the high-voltage electrical component 1 according to this embodiment can suppress heat generation (i.e., improve cooling efficiency) and reduce the risk of discharge by using the insulating resin (molding material) 7 described above.

[0044] In the high-voltage electrical component 1 according to this embodiment, the high-frequency power transmission line 5 is formed in a spiral shape.

[0045] As described above, when the high-frequency power transmission line 5 is formed in a spiral shape, the high-frequency power transmission line 5 can function as a reactor (inductor). In this case, since the high-voltage electrical component 1 has an inductance component, an impedance increase due to high frequency occurs, which can result in a voltage increase. For this reason, according to the high-voltage electrical component 1 of this embodiment, the effects of suppressing heat generation (improving cooling efficiency) and reducing the risk of discharge by the insulating resin (molding material) 7 become even more useful.

[0046] The high-voltage electrical component 1 according to this embodiment extends along the long axis direction of the holding member 3 and further comprises a guide 10 for forming the high-frequency power transmission line 5 in a spiral shape.

[0047] For example, when stranded wire (Litz wire) 57 is used as a high-frequency power transmission line 5, it is difficult to form it in a spiral shape with good dimensional accuracy. However, by providing the guide 10 described above in the high-voltage electrical component 1 according to the embodiment, the dimensional accuracy of arranging the high-frequency power transmission line 5, such as the stranded wire (Litz wire) 57, in a spiral shape on the holding member 3 can be improved. As a result, the stability of electrical characteristics can be improved according to the high-voltage electrical component 1 according to the embodiment.

[0048] According to the high-voltage electrical component 1 of the embodiment, the holding member 3 has a recess 33 that positions the guide 10 along the long axis.

[0049] As a result, the high-voltage electrical component 1 according to the embodiment can improve the positioning accuracy of the guide 10 in the holding member 3. Therefore, the high-voltage electrical component 1 according to the embodiment can form a more stable shape for the high-frequency power transmission line 5.

[0050] According to the high-voltage electrical component 1 of the embodiment, the high-frequency power transmission line 5 is formed by plating.

[0051] As a result, the dimensional accuracy of the high-frequency power transmission line 5 can be improved according to the high-voltage electrical component 1 of the embodiment. As a result, the stabilization of the electrical characteristics can be improved according to the high-voltage electrical component 1 of the embodiment without using the guide 10 of the high-frequency power transmission line 5.

[0052] Based on the above, the high-voltage electrical component 1 according to this embodiment improves the cooling efficiency of the high-frequency power transmission line 5 by sealing the high-frequency power transmission line 5, to which high voltage is applied, with an insulating resin 7 that has high thermal conductivity, thereby increasing the heat transfer path to the heat-dissipating holding member 3. Furthermore, by sealing the high-frequency power transmission line 5 with the insulating resin 7 and positioning the holding member 3 at both ends in the longitudinal direction of the holding member 3 so that the lower position of the high-frequency power transmission line 5 is at a predetermined position with respect to the ground surface 9, the risk of discharge related to the high-frequency power transmission line 5 can be suppressed.

[0053] The embodiments described above can be combined as appropriate and are illustrative examples only, not limiting the scope of the invention. Furthermore, the embodiments and variations described above are included in the scope and gist of the invention and are included in the scope of the invention and its equivalents as described in the claims. [Explanation of Symbols]

[0054] 1 High-voltage electrical component, 3 Retaining member, 5 High-frequency power transmission line, 7 Insulating resin, 8 Pair of positioning members, 9 Grounding surface, 10 Guide, 31 Hollow section, 33 Recess of retaining member, 51 Main body, 53 Terminal section, 55 Enameled wire, 57 Litz wire, 59 Cross-section of high-frequency power transmission line sealed in insulating resin, 81 Coolant flow path, 83 Rod, 85 Nut, 87 Recess into which retaining member is fitted, 88 Screw thread, 89 O-ring, 101 Top view of guide, 103 Side view of guide, 105 Front view of guide, 107 Thickness of guide, 301 Side view of retaining member, 302 Front view of retaining member

Claims

1. A retaining member composed of a cylindrical insulator having a hollow section that functions as a refrigerant flow path, A high-frequency power transmission line having a main body and a terminal, wherein the main body is provided along the long axis direction of the outer circumference of the holding member, An insulating resin is disposed on the outer circumference of the retaining member so as to seal the main body portion of the high-frequency power transmission line, A pair of positioning members, each having a refrigerant flow path connected to the hollow portion of the holding member, and positioned at both ends of the holding member in the longitudinal direction such that the lower position of the high-frequency power transmission line is at a predetermined position relative to the ground surface, are made of insulators. The retaining member extends along the longitudinal axis and serves as a guide for forming the high-frequency power transmission line in a spiral shape, Equipped with, A portion of the side surface of the retaining member has a recess that engages with the guide, along the longitudinal axis. High-voltage electrical components.

2. The depth of the recess in the recess corresponds to the thickness of the guide, The high-voltage electrical component according to claim 1.

3. The distance between the ground surface and the holding member is adjustable according to the voltage and / or frequency of the high-frequency power applied to the high-frequency power transmission line. The high-voltage electrical component according to claim 1 or 2.

Images