Fixing kit for precision circuit board storage containers

Abstract

To provide an easy-to-handle fixing kit for a precision substrate storage container, which can fix and release a precision substrate storage container in conjunction with opening and closing of a door set.SOLUTION: A kit used when storing and transporting a precision substrate storage container 1 in a semiconductor wafer storage container 10 includes an adapter tray 20 on which the precision substrate storage container 1 is mounted and stored in the body 11 of the semiconductor wafer storage container, a pair of left and right clamp mechanisms 30 that rotates clamp pieces 32 at the front of the adapter tray to secure the precision substrate storage container, and an interlocking operation mechanism 40 attached to a door set 16 that opens and closes the front face of the body of the semiconductor wafer storage container, and in response to the opening and closing of the door set relative to the body of the semiconductor wafer storage container, the interlocking operation mechanism rotates the clamp pieces of the pair of left and right clamp mechanisms, respectively, such that each clamp piece approaches and moves away from the precision substrate storage container.SELECTED DRAWING: Figure 5

Description

Technical Field

[0001] The present invention relates to a fixing kit for a precision substrate storage container used when storing and transporting a precision substrate storage container such as a reticle storage container in a semiconductor wafer storage container.

Background Art

[0002] A semiconductor wafer storage container called a FOUP stores a plurality of φ300 mm semiconductor wafers for transporting and storing φ300 mm semiconductor wafers and is used in a semiconductor factory. In recent years, there has been a demand for storing a photomask storage container or a reticle storage container instead of a semiconductor wafer. This is because a photomask or a reticle is used in the pre-process of semiconductor manufacturing. If a precision substrate storage container composed of a photomask storage container or a reticle storage container can be stored in a semiconductor wafer storage container and transported while being suspended by an automatic transport device such as an OHT, it is very efficient.

[0003] However, since the size, shape, etc. of a semiconductor wafer made of silicon wafer or the like and a precision substrate storage container are different, it is difficult to safely store the precision substrate storage container in the semiconductor wafer storage container. In view of this point, methods for safely and surely storing a precision substrate storage container in a semiconductor wafer storage container have been studied and proposed (see Patent Documents 1, 2, and 3). For example, (1) a method of mounting a precision substrate storage container on a disc-shaped adapter and fixing it with a plurality of fixtures, and storing this adapter in the body of a semiconductor wafer storage container, (2) a method of storing a necessary number of precision substrate storage containers in a shelf-shaped storage jig and storing this storage jig in the body of a semiconductor wafer storage container have been studied and proposed.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Patent Document 2

[0005] Although both methods (1) and (2) offer excellent results, they require mounting a precision substrate storage container on the adapter, sequentially operating multiple fasteners to secure the precision substrate storage container, storing the adapter in the body of the semiconductor wafer storage container, and then press-fitting a door set into the open front of the body. Therefore, it is not possible to reduce the number of work steps, and there is a risk that work efficiency cannot be improved. Furthermore, in the case of method (2), the storage jig becomes larger, which may hinder handling.

[0006] The present invention has been made in view of the above, and aims to provide a fixing kit for a precision circuit board storage container that can fix or release the container in conjunction with the opening and closing of a door set, and is easy to handle. [Means for solving the problem]

[0007] In order to solve the above problems, the present invention is used when transporting a precision substrate storage container in a semiconductor wafer storage container, The system includes an adapter tray that houses a precision substrate storage container within the body of a semiconductor wafer storage container, a clamping mechanism that rotates a clamping piece at the front of the adapter tray to secure the precision substrate storage container, and an interlocking operation mechanism attached to a door set that opens and closes the front of the semiconductor wafer storage container body. The system is characterized by the fact that, in response to the opening and closing of the door set on the body of the semiconductor wafer storage container, an interlocking operation mechanism rotates the clamping piece of the clamping mechanism, causing the clamping piece to move toward and away from the precision substrate storage container.

[0008] Furthermore, the adapter tray can be formed into a planar, substantially frame-like shape that can be fitted onto the flange portion of the precision circuit board storage container, and an endless support piece can be formed on this adapter that can support the flange portion of the precision circuit board storage container.

[0009] Furthermore, the clamping mechanism includes a fixed base attached to the front of the adapter tray and a rotatable clamping piece supported by this fixed base, the clamping piece being formed in a roughly J shape, with a roughly L-shaped crank portion formed on the long side of the clamping piece to engage with the front of the flange portion of the precision substrate storage container, and an inclined upright portion formed on the short side of the clamping piece. The interlocking operation mechanism includes a plurality of protruding pieces mounted opposite to the back of the door set of the semiconductor wafer storage container and extending in the direction of the body, a first operating rod mounted between the plurality of protruding pieces, and a second operating rod mounted between the plurality of protruding pieces and interposed at a distance between the back of the door set and the first operating rod. When the door set is fitted and attached to the body of the semiconductor wafer storage container, the first operating rod has the function of pressing the long side of the clamp piece toward the rear of the body, the first and second operating rods have the function of gripping the inclined upright portion of the clamp piece at intervals, and the second operating rod has the function of pressing the short side of the clamp piece toward the rear of the body to lock the crank portion of the clamp piece to the front of the flange portion of the precision substrate storage container. When the door set is removed from the body of the semiconductor wafer storage container, it is preferable that the first operating rod has the function of pressing the short side of the clamp piece toward the door set to pull the crank portion of the clamp piece away from the front of the flange portion of the precision substrate storage container, the first operating rod has the function of pressing the inclined upright portion of the clamp piece toward the door set, and the clamp piece rotates to retract the inclined upright portion of the clamp piece from between the first and second operating rods.

[0010] Furthermore, the fixed base of the clamping mechanism can be formed in a roughly U-shape to hold the clamp piece in a freely rotatable manner, and a posture control unit can be formed on this fixed base to direct the crank portion of the clamp piece diagonally upward and forward. Furthermore, the first and second operating rods of the interlocking operating mechanism can each be formed with a substantially circular cross-section, and the second operating rod can be positioned lower than the first operating rod.

[0011] Here, the precision substrate storage container in the claims includes photomask storage containers and reticle storage containers, etc., with at least the lower part protruding as a flange portion. This precision substrate storage container is not particularly limited to single POD type or multi POD type. Furthermore, while FOUP type is preferred for semiconductor wafer storage containers, unused FOSB type containers used for transport may also be used if no problems arise. The clamping mechanism may be singular or multiple. In addition, the term "approximately J-shaped" includes not only J-shaped shapes but also similar shapes (approximately L-shaped, etc.) that do not cause any difference in the effects and functions of the present invention. The term "approximately L-shaped" includes not only L-shaped shapes but also similar shapes (J-shaped, inverted R-shaped, etc.) that do not cause any difference in the effects and functions of the present invention.

[0012] The term "approximately U-shaped" includes not only U-shapes but also similar shapes (such as inverted C-shapes, grooved shapes, and lip-grooved shapes) that do not cause any difference in the effects and benefits of the present invention. Furthermore, the up, down, front, back, left, and right directions of the fixing kit for precision substrate storage containers according to the present invention are directions based on the drawings and can be changed as needed. Moreover, although the object of the present invention is a fixing kit for precision substrate storage containers, if a configuration for other applications is identical to the configuration of the present invention and can be adapted for use as a fixing kit for precision substrate storage containers, and achieves the effects and benefits of the present invention, then the configuration for other applications falls within the technical scope of the present invention. [Effects of the Invention]

[0013] According to the present invention, there is an effect that the precision circuit board storage container can be fixed or released in conjunction with the opening and closing of the door set. Furthermore, there is an effect that an easy-to-handle fixing kit for precision circuit board storage containers can be provided.

[0014] According to the invention described in claim 2, the clamp piece is formed in a substantially J shape, and a substantially L-shaped crank portion is formed on the long side of the clamp piece to engage with the front of the flange portion of the precision circuit board storage container, while an inclined upright portion is formed on the short side of the clamp piece. This allows the precision circuit board storage container to be fixed or released with a simple configuration. In particular, since the inclined upright portion extends from the short side of the clamp piece, this inclined upright portion and the first operating rod can be reliably brought into contact, allowing the clamp piece to be rotated appropriately. Furthermore, the fixing and release of the precision circuit board storage container and the attachment and detachment of the door set can be linked while simplifying the configuration of the interlocking operation mechanism.

[0015] According to the invention described in claim 3, the fixed base is formed in a substantially U-shape that holds the clamp piece, so stability of the clamp piece's posture during rotation can be expected. Furthermore, even if the crank portion of the clamp piece fixes the front of the flange portion of the precision circuit board storage container after the door set has been removed, the clamp piece can rotate freely, so the crank portion can be easily pulled away from the front of the flange portion of the precision circuit board storage container by operating the clamp piece. In addition, the posture control unit of the fixed base ensures that the clamp piece of the clamp mechanism contacts the first operating rod of the interlocking operation mechanism in a forward-tilted position rather than a vertically upright position, so that the clamp piece can be pressed backward and rotated reliably. In addition, it is possible to prevent the first operating rod from contacting the short side or the tilted upright portion of the clamp piece, and to prevent the door set from being incompletely fitted.

[0016] According to the invention described in claim 4, the first and second operating rods of the interlocking operating mechanism have a substantially circular cross-section with no corners or steps on their circumferential surfaces, rather than a substantially polygonal cross-section, which makes it possible to smoothly bring the clamp piece into contact with and separate from the circumferential surfaces of the first and second operating rods. Furthermore, since the second operating rod is located lower than the first operating rod, it is possible to prevent the inclined upright portion of the clamp piece from contacting the second operating rod and hindering the rotation of the clamp piece. [Brief explanation of the drawing]

[0017] [Figure 1]A perspective explanatory diagram schematically showing the relationship among a precision substrate storage container, the body of a semiconductor wafer storage container, and an adapter tray in an embodiment of a fixing kit for a precision substrate storage container according to the present invention. [Figure 2] A perspective explanatory diagram schematically showing the relationship between a door set of a semiconductor wafer storage container and an interlocking operation mechanism in an embodiment of a fixing kit for a precision substrate storage container according to the present invention. [Figure 3] A perspective explanatory diagram schematically showing the relationship between an adapter tray and a clamp mechanism in an embodiment of a fixing kit for a precision substrate storage container according to the present invention. [Figure 4] An enlarged perspective view schematically showing an interlocking operation mechanism in an embodiment of a fixing kit for a precision substrate storage container according to the present invention. [Figure 5] An explanatory diagram schematically showing the fixing operation of a clamp mechanism in an embodiment of a fixing kit for a precision substrate storage container according to the present invention. Figure (a) is a side explanatory diagram showing a state where the interlocking operation mechanism of the door set approaches the clamp mechanism of the adapter tray. Figure (b) is a side explanatory diagram showing a state where the first operation rod of the interlocking operation mechanism presses the long side of the clamp piece toward the rear of the body. Figure (c) is a side explanatory diagram showing a state where the clamp piece rotates to direct the crank portion upward and raises the inclined standing portion. Figure (d) is a side explanatory diagram showing a state where the clamp piece rotates to allow the inclined standing portion to enter between the first and second operation rods of the interlocking operation mechanism. Figure (e) is a side explanatory diagram showing a state where the second operation rod of the interlocking operation mechanism further presses the short side of the clamp piece toward the rear of the body to rotate the clamp piece. Figure (f) is a side explanatory diagram showing a state where the crank portion of the clamp piece is locked to the front upper surface of the flange portion of the precision substrate storage container. [Figure 6]An explanatory diagram schematically showing the operation of releasing the clamping mechanism in an embodiment of a fixing kit for a precision substrate storage container according to the present invention. Figure (a) is a side explanatory diagram showing a state where the door set is started to be pulled out from the front of the body. Figure (b) is a side explanatory diagram showing a state where the first operation rod of the interlocking operation mechanism presses the short side of the clamping piece in the direction of the door set. Figure (c) is a side explanatory diagram showing a state where the clamping piece rotates and the crank portion is pulled away from the lower front to the upper side of the precision substrate storage container. Figure (d) is a side explanatory diagram showing a state where the first operation rod presses the inclined upright portion of the clamping piece in the direction of the door set. Figure (e) is a side explanatory diagram showing a state where the clamping piece further rotates and the crank portion is directed upward. Figure (f) is a side explanatory diagram showing a state where the clamping piece rotates and the inclined upright portion retreats from between the first and second operation rods. [Figure 7] A side explanatory diagram schematically showing a state where the first operation rod in an embodiment of the fixing kit for a precision substrate storage container according to the present invention accidentally contacts the short side or the like of the clamping piece. [Figure 8] A side explanatory diagram schematically showing that the clamping piece of the clamping mechanism in an embodiment of the fixing kit for a precision substrate storage container according to the present invention can rotate freely.

Embodiments for Carrying out the Invention

[0018] Hereinafter, referring to the drawings, preferred embodiments of the present invention will be described. The fixing kit for a precision substrate storage container in the present embodiment is a set used when storing and transporting the precision substrate storage container 1 in the semiconductor wafer storage container 10. As shown in FIGS. 1 to 8, the fixing kit includes an adapter tray 20 mounted with the precision substrate storage container 1 and stored in the body 11 of the semiconductor wafer storage container 10, a pair of left and right clamping mechanisms 30 that rotate the clamping pieces 32 at the front of the adapter tray 20 to fix the precision substrate storage container 1, and an interlocking operation mechanism 40 for the clamping mechanism 30 mounted on the door set 16 of the semiconductor wafer storage container 10, and contributes to the achievement of Goal 9 of the SDGs adopted at the United Nations Summit.

[0019] The precision substrate storage container 1, as shown in Figures 1 and 3, is a pod weighing approximately 5 kg in weight, in which a lid is fitted and placed over the open top of a main body that houses precision substrates, and the front, back, left, and right sides of the lower flange portion 2 protrude outward in the width direction. Specifically, it is at least one of a SEMI-compliant photomask storage container for storing a photomask, which is a precision substrate, and a SEMI-compliant reticle storage container for storing a reticle, which is a precision substrate. These can be tall or short.

[0020] As shown in Figures 1, 2, 7, and 8, the semiconductor wafer storage container 10 comprises a body 11 capable of storing multiple semiconductor wafers in an aligned manner, and a door set 16 that is detachably fitted to the open front of the body 11, and is configured as a FOUP type used in a mini-environment semiconductor factory. The body 11 is molded into a front-open box with an open front using a molding material containing a predetermined resin, and on both sides of the interior, there is a pair of left and right support teeth 12 that are originally designed to horizontally support a φ300 mm semiconductor wafer, and these left and right support teeth 12 are arranged at a predetermined interval in the vertical direction.

[0021] A bottom plate 13, which is roughly Y-shaped, triangular, polygonal, etc., is mounted horizontally on the underside of the bottom plate of the body 11. Multiple positioning devices are attached to each of these bottom plates 13, and each positioning device engages from above with a positioning pin of a semiconductor processing machine (not shown) to position the semiconductor wafer storage container 10 with high precision. In addition, a robotic flange 14, which is roughly rectangular in shape, is optionally attached and detachable to the approximate center of the ceiling of the body 11, and this robotic flange 14 is suspended from an automated transport device consisting of an OHT (Optical Hand Truck) or the like in a factory (not shown). Optional operating handles 15 for gripping are attached and detachable to the outer surfaces of both sides of the body 11.

[0022] The door set 16 comprises a door body 17 with a substantially rectangular front surface that is detachably press-fitted into the open front surface of the body 11, and a pair of left and right door covers 18 that cover both sides of the open front surface of the door body 17. A locking mechanism 19 for preventing detachment is interposed between the open front surfaces of the door body 17 and the pair of left and right door covers 18. A front retainer (not shown) that horizontally holds the front edge of a semiconductor wafer with an elastic piece is detachably attached to the recessed central part of the back surface of the door body 17 facing the back surface of the body 11. However, this front retainer is removed and not used when the interlocking operation mechanism 40 is in use.

[0023] As shown in Figures 1, 3, 5, and 6, the adapter tray 20 is formed from a molding material containing a predetermined resin into a planar rectangular, roughly frame-shaped plate, with the aim of positioning the precision substrate storage container 1 in the XY direction and reducing its weight. It is supported by a pair of left and right support teeth 12 of the body 11 in place of a semiconductor wafer.

[0024] The specified resin for the molding material is not particularly limited, but examples include thermoplastic resins such as polycarbonate (PC) resin, cycloolefin polymer (COP) resin, cycloolefin copolymer (COC) resin, polypropylene (PP) resin, polyetherimide (PEI) resin, polyetherketone (PEK) resin, polyetheretherketone (PEEK) resin, polybutylene terephthalate (PBT) resin, polyacetal (POM) resin, and liquid crystal polymers, as well as alloys thereof.

[0025] The central hollow portion 21 of the adapter tray 20 is formed in a planar rectangular shape and, in accordance with SEMI standards, is sized to either loosely fit with a small gap or tightly fit without any gaps onto the flange portion 2 of the precision substrate storage container 1. Furthermore, on the back surface of the adapter tray 20, L-shaped support pieces 22 are arranged in an endless planar frame shape below the inner circumferential surface of the hollow portion 21, and these support pieces 22 function to support the lower surface 4 of the flange portion of the precision substrate storage container 1. On both sides of the adapter tray 20, elongated mounting pieces are formed to protrude in the front-to-back direction of the adapter tray 20, and each mounting piece is supported and mounted on the support teeth 12 of the body 11.

[0026] As shown in Figures 1, 3, 4, 5, and 6, the left and right clamping mechanisms 30 are arranged side by side at a predetermined interval on the front surface of the adapter tray 20. Each clamping mechanism 30 comprises a fixed base 31 mounted near the center of the front surface of the adapter tray 20, and a stepped clamping piece 32 that is pivotally supported by the fixed base 31 and can rotate freely in the vertical direction. These are molded from the same molding material as the adapter tray 20. The fixed base 31 is bent into a roughly U-shape at the front, for example, to clamp the clamping piece 32 from both sides with a gap in between, and a posture control unit that tilts the clamping piece 32 downwards and forwards is formed on the inner surface, such as the inner bottom surface (see Figure 3).

[0027] The clamp piece 32 is formed in a roughly J-shape that swings up and down, for example, and a pin is inserted horizontally near the boundary between the long side 33 and the short side 35. This pin is pivotally mounted between both sides of the fixed base 31 so as to be freely rotatable. The clamp piece 32 has a crank portion 34 integrally formed at the end of the long side 33 for positioning and fixing by engaging with the front upper surface 3 of the flange portion 2 of the precision substrate storage container 1, and an inclined upright portion 36 integrally formed at the end of the short side 35 that is inclined and directed toward the rear of the door set 16. In light of test results, the crank portion 34 is bent into a roughly L-shape to ensure secure engagement, and when the attitude control unit inclins the clamp piece 32 forward to maintain the basic posture, it is directed diagonally upward and forward (see Figure 3).

[0028] As shown in Figures 2, 4 to 6, the interlocking operation mechanism 40 comprises a pair of left and right vertically elongated mounting bars 41 that are detachably attached to the center of the back of the door body 17 that constitutes the door set 16, a pair of left and right protruding pieces 42 that extend horizontally from the pair of left and right vertically elongated mounting bars 41 toward the body 11, a first operating rod 44 that is horizontally installed between the tips of the pair of left and right protruding pieces 42 to improve rigidity, and a second operating rod 45 that is horizontally installed between the pair of left and right protruding pieces 42 and interposed at a distance between the center of the back of the door body 17 and the first operating rod 44. These components are molded from the same molding material as the adapter tray 20 and function to operate the clamping mechanism 30 in conjunction with the opening and closing of the door set 16.

[0029] Multiple insertion grooves 43 for the first and second operating rods 44 and 45 are cut out vertically from the opposing surfaces of the pair of protruding pieces 42. The first operating rod 44 is formed as a cylindrical rod with a circular cross-section extending horizontally and is mounted slightly above the second operating rod 45. In contrast, the second operating rod 45 is also formed as a cylindrical rod with a circular cross-section extending horizontally, but is mounted slightly below the first operating rod 44, thereby improving the rigidity of the interlocking operating mechanism 4 and preventing it from colliding with the inclined upright portion 36 of the clamp piece 32 and hindering the rotation of the clamp piece 32.

[0030] As shown in Figures 5 and 6, when the door set 16 is fitted and attached to the body 11 of the semiconductor wafer storage container 10, the interlocking operation mechanism 40 functions as follows: the first operating rod 44 presses the long side 33 of the clamp piece 32 toward the rear of the body 11 and rotates it, the first and second operating rods 44 and 45 clamp the inclined upright portion 36 of the clamp piece 32 at intervals, and then the second operating rod 45 presses the short side 35 of the clamp piece 32 toward the rear of the body 11 and rotates it, thereby locking the crank portion 34 of the clamp piece 32 in front of the flange portion 2 of the precision substrate storage container 1.

[0031] In contrast, when the door set 16 is pulled out and removed from the body 11 of the semiconductor wafer storage container 10, the first operating rod 44 functions to press the short side 35 of the clamp piece 32 toward the door set 16 and rotate it, and then the first operating rod 44 functions to press the inclined upright portion 36 of the clamp piece 32 toward the door set 16 and rotate it.

[0032] In the above configuration, when transporting a high-precision substrate storage container 1 inside a semiconductor wafer storage container 10, first, an adapter tray 20 is horizontally inserted between a plurality of support teeth 12 in the lower part of the inside of an empty body 11, and a pair of mounting pieces of the adapter tray 20 are horizontally supported by a pair of left and right support teeth 12, the precision substrate storage container 1 is inserted into the inside of the body 11, and then the peripheral edge of the lower surface 4 of the flange portion of the precision substrate storage container 1 is directly supported by the support pieces 22 of the adapter tray 20 to position it.

[0033] Next, the door set 16 is pressed into the open front of the body 11. The door set 16 may be pressed in manually or automatically using an opener. When the door set 16 is pressed in, the interlocking mechanism 40 of the door set 16 approaches the clamp mechanism 30 of the adapter tray 20 (see Figure 5(a)), and the first operating rod 44 presses the long side 33 of the clamp piece 32 toward the rear of the body 11 (see Figure 5(b)). This causes the clamp piece 32 to rotate, directing the crank portion 34 upward and raising the inclined upright portion 36 (see Figure 5(c)). At this time, the clamp piece 32 is not in a vertically upright position, but rather in a position slightly inclined downward and forward, so the first operating rod 44 can be made to reliably contact the long side 33 of the clamp piece 32 and rotate the clamp piece 32.

[0034] Next, as the door set 16 is gradually pressed in and fitted, the clamp piece 32 rotates and the inclined upright portion 36 enters between the first and second operating rods 44 and 45 of the interlocking operating mechanism 40 (see Figure 5(d)). The second operating rod 45 further presses the short side 35 of the clamp piece 32 towards the rear of the body 11 (see Figure 5(e)), causing the clamp piece 32 to rotate. This rotation causes the crank portion 34 of the clamp piece 32 to lock onto the front upper surface 3 of the flange portion 2 of the precision substrate storage container 1 (see Figure 5(f)). This locking fixes the precision substrate storage container 1 in the Z direction, preventing rattling, so that the precision substrate storage container 1 can be stored in the semiconductor wafer storage container 10 and transported.

[0035] Next, when removing the door set 16 of the semiconductor wafer storage container 10 to take out the precision substrate storage container 1, first, the fitted door set 16 is pulled out from the front of the body 11. The door set 16 may be pulled out manually or automatically with an opener. When the door set 16 is started to be pulled out (see Figure 6(a)), the interlocking operation mechanism 40 of the door set 16 separates from the clamp mechanism 30 of the adapter tray 20, and the first operating rod 44 presses the short side 35 of the clamp piece 32 toward the door set 16 (see Figure 6(b)), causing the clamp piece 32 to rotate and pull the crank part 34 upward away from the front upper surface 3 of the flange part 2 of the precision substrate storage container 1 (see Figure 6(c)).

[0036] Next, as the door set 16 is continued to be pulled out, the interlocking operation mechanism 40 is separated from the clamping mechanism 30 of the adapter tray 20, causing the first operating rod 44 to press the inclined upright portion 36 of the clamp piece 32 toward the door set 16 (see Figure 6(d)), causing the clamp piece 32 to rotate and point the crank portion 34 upward (see Figure 6(e)), and causing the clamp piece 32 to rotate and lower the inclined upright portion 36 from between the first and second operating rods 44 and 45 (see Figure 6(f)).

[0037] At this time, the inclined upright portion 36 extends from the short side of the clamp piece 32 while tilting, so that the first operating rod 44 can be reliably brought into contact with the inclined upright portion 36 and rotated. As the inclined upright portion 36 descends, the clamp piece 32 retracts and completely comes out from between the first and second operating rods 44 and 45, so that the door set 16 of the semiconductor wafer storage container 10 can be removed and the precision substrate storage container 1 can be taken out.

[0038] According to the above configuration, the fixing and release of the precision substrate storage container 1 is linked to the attachment and detachment of the door set 16, which is expected to reduce the number of work steps and contribute to improved work efficiency and process automation. In addition, since the adapter tray 20 and clamp mechanism 30 are not large shelves or the like, they do not become bulky, eliminating the risk of handling difficulties. Furthermore, since the adapter tray 20 is a hollow frame with weight reduction, it is expected to be lightweight, eliminating the risk of the support teeth 12 of the body 11 cracking or being damaged. Moreover, the lightweight adapter tray 20 does not pose a risk of hindering the transport of the automatic transport device that suspends the semiconductor wafer storage container 10.

[0039] Furthermore, since the clamp piece 32 is positioned slightly tilted forward, it is possible to prevent the first operating rod 44 from contacting the short side 35 or the tilted upright portion 36 of the clamp piece 32, and to prevent the door set 16 from being incompletely fitted (see Figure 7). Also, even if the crank portion 34 of the clamp piece 32 becomes locked to the front upper surface 3 of the flange portion 2 of the precision circuit board storage container 1 after the door set 16 has been removed, the clamp piece 32 rotates freely, so the crank portion 34 of the clamp piece 32 can be easily pulled away from the front upper surface 3 of the flange portion 2 of the precision circuit board storage container 1 (see Figure 8), and the precision circuit board storage container 1 can be easily removed. In addition, since the support piece 22 of the adapter tray 20 has an L-shaped cross-section and extends vertically, it is possible to mount the precision circuit board storage container 1 in a stable position regardless of the height of the precision circuit board storage container 1.

[0040] Furthermore, the body 11 and door set 16 of the semiconductor wafer storage container 10 in the above embodiment can be molded using the same molding material as the adapter tray 20. In addition, the molding material of the adapter tray 20 may contain, as necessary, conductive materials such as carbon fibers, carbon powder, carbon nanotubes, and conductive polymers, as well as various antistatic agents such as anionic, cationic, and nonionic types. Furthermore, a spacer for fixed height adjustment may be detachably interposed between the flange portion 2 of the precision substrate storage container 1 and the adapter tray 20.

[0041] Furthermore, although the adapter tray 20 is a frame shape with a planar shape that is approximately square, it may also be a frame shape that is approximately polygonal in planar, or a plate shape without a hollow section 21. The outer circumferential surface of the adapter tray 20 may have multiple corners or steps, or it may be curved. Also, the support piece 22 of the adapter tray 20 may be an endless frame shape, or there may be multiple pieces. For example, a support piece 22 with a cross-sectional plate shape may be formed to protrude only from the front lower part and the rear lower part of the inner circumferential surface of the hollow section 21 of the adapter tray 20. Also, if the adapter tray 20 is a plate without a hollow section 21, multiple positioning surround pieces for the precision substrate storage container 1 may be arranged and formed on the surface of the adapter tray 20.

[0042] Furthermore, a fixing device with an inverted L-shaped cross-section can be screwed onto the rear upper surface 3 of the flange portion 2 of the precision substrate storage container 1, near the center of the rear surface of the adapter tray 20. In this case, if a relief groove (also called a relief allowance) is formed in the rear surface of the support piece 22 so as to face the rear edge of the lower surface 4 of the flange portion of the precision substrate storage container 1, the rear of the precision substrate storage container 1 can be tilted downwards and then smoothly mounted by utilizing this relief groove. In addition, the fixing base 31 of the clamp mechanism 30 can be integrally molded onto the front surface of the adapter tray 20, or it can be attached detachably. Furthermore, all technologies described herein are subject to patent protection through amendment or divisional application, etc. [Industrial applicability]

[0043] The fixing kit for precision substrate storage containers according to the present invention is used in fields such as semiconductor manufacturing. [Explanation of Symbols]

[0044] 1. Precision circuit board storage container 2 Flange section 3 Top surface 10 Semiconductor wafer storage containers 11 Body 12 Support teeth 16-door set 17 Door Body 18 Door cover 20 Adapter Trays 21 Hollow part 22 Support piece 30 Clamping mechanism 31 Fixed base 32 clamp pieces 33 Long side 34 Crank section 35 Short side 36 Inclined standing section 40 Interlocking operation mechanism 42 Projecting piece 44 First operating rod 45 Second operating rod

Claims

1. A fixing kit for a precision substrate storage container used when transporting a precision substrate storage container inside a semiconductor wafer storage container, The system includes an adapter tray that houses a precision substrate storage container within the body of a semiconductor wafer storage container, a clamping mechanism that rotates a clamping piece at the front of the adapter tray to secure the precision substrate storage container, and an interlocking operation mechanism attached to a door set that opens and closes the front of the semiconductor wafer storage container body. A fixing kit for a precision substrate storage container, characterized in that, in response to the opening and closing of a door set on the body of the semiconductor wafer storage container, an interlocking operation mechanism rotates a clamping piece of a clamping mechanism, causing the clamping piece to move toward and away from the precision substrate storage container.

2. The clamping mechanism includes a fixed base attached to the front of the adapter tray and a rotatable clamping piece supported by this fixed base, the clamping piece being formed in a roughly J shape, the long side of the clamping piece having a roughly L-shaped crank portion that engages with the front of the flange portion of the precision substrate storage container, and the short side of the clamping piece having an inclined upright portion. The interlocking operating mechanism includes a plurality of protruding pieces mounted opposite to the back of the door set of the semiconductor wafer storage container and extending in the direction of the body, a first operating rod mounted between the plurality of protruding pieces, and a second operating rod mounted between the plurality of protruding pieces and interposed at a distance between the back of the door set and the first operating rod. When the door set is fitted and attached to the body of the semiconductor wafer storage container, the first operating rod has the function of pressing the long side of the clamp piece toward the rear of the body, the first and second operating rods have the function of clamping the inclined upright portion of the clamp piece at a distance, and the second operating rod has the function of pressing the short side of the clamp piece The fixing kit for a precision substrate storage container according to claim 1, which provides the function of pressing the side toward the rear of the body to lock the crank portion of the clamp piece toward the front of the flange portion of the precision substrate storage container, and when the door set is removed from the body of the semiconductor wafer storage container, the first operating rod provides the function of pressing the short side of the clamp piece toward the door set to pull the crank portion of the clamp piece toward the front of the flange portion of the precision substrate storage container, the first operating rod provides the function of pressing the inclined upright portion of the clamp piece toward the door set, and the clamp piece rotates to retract the inclined upright portion of the clamp piece from between the first and second operating rods.

3. The fixing kit for a precision circuit board storage container according to claim 2, wherein the fixing base of the clamping mechanism is formed in a substantially U-shape to hold the clamp piece so that it can rotate freely, and the fixing base has a posture control unit formed thereon that directs the crank portion of the clamp piece diagonally upward and forward.

4. The fixing kit for a precision circuit board storage container according to claim 2, wherein the first and second operating rods of the interlocking operating mechanism are each formed with a substantially circular cross-section, and the second operating rod is positioned lower than the first operating rod.

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