Pilot Unit

Abstract

A pilot unit and method for an abatement apparatus is disclosed. The pilot unit is for an abatement apparatus configured to abate an exhaust stream from a semiconductor processing tool, the pilot unit comprising: a housing that holds a perforated pilot face, the housing and the perforated pilot face defining a plenum configured to channel fuel and oxidizer from corresponding housing inlets through the perforated pilot face; and an ignition device configured to ignite the fuel and oxidizer as they exit the perforated pilot face. In this manner, rather than the ignition flame burning from a nozzle, the ignition flame is delivered across the perforated pilot face, which provides a more reliable ignition source for the abatement apparatus.

Description

Technical Field

[0001] The field of the present invention relates to a pilot unit and method for a pest control device.

Background Art

[0002] Pest control devices such as radiant burners are known and are typically used to treat exhaust gas streams from manufacturing process tools used, for example, in the semiconductor industry or the flat panel display manufacturing industry. During such manufacturing, residual perfluorinated compounds (PFCs) and other compounds are present in the exhaust gas stream pumped from the process tool. PFCs are difficult to remove from the exhaust gas, and emissions to the environment are undesirable because they are known to have a relatively high greenhouse gas effect.

[0003] Known radiant burners, such as those described in European Publication No. 0,694,735, use combustion to remove PFCs and other compounds from the exhaust gas stream. Typically, the exhaust gas stream is a nitrogen stream containing PFCs and other compounds. The exhaust gas stream is carried to a combustion chamber laterally surrounded by the outlet surface of a perforated gas burner. In some cases, a treatment material such as fuel gas can be mixed with the exhaust gas stream before entering the combustion chamber. Fuel gas and air are simultaneously supplied to the perforated burner to affect combustion at the outlet surface. Combustion products from the perforated burner react with the exhaust stream mixture to combust the compounds in the exhaust stream.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] While technologies exist for igniting abatement devices, each has its own drawbacks. Therefore, there is a need for improved technologies for igniting abatement devices. [Means for solving the problem]

[0006] According to a first embodiment, a pilot unit is provided for a detoxification device configured to detoxify an exhaust flow from a semiconductor processing tool, the pilot unit comprising a housing that holds a perforated pilot surface, the housing and the perforated pilot surface defining a plenum configured to carry fuel and oxidizer from a corresponding housing inlet through the perforated pilot surface, and an ignition device configured to ignite the fuel and oxidizer as they exit the perforated pilot surface.

[0007] The first aspect recognizes that some abatement devices have problems with ignition events, which can cause ignition shock due to severe combustion chamber ignition events and / or, often, excessive accumulation of unburned fuel and oxidizer that subsequently ignite. This can cause a rapid expansion of gas within the abatement device, which can affect the reliability of the device, delay ignition, and even extinguish the pilot. Pilots designed to ignite multiple burners can exacerbate this problem, as the pilot flame needs to spread over a wide area to reach each burner. Accordingly, pilot units, devices, or assemblies are provided. A pilot unit may be for an abatement device that abates exhaust flow from a semiconductor processing tool. A pilot unit may comprise a housing or enclosure. The housing may hold or comprise a perforated pilot surface. A plenum may be defined by the housing and the perforated pilot surface. The plenum may be positioned or configured to carry fuel and oxidizer between the housing inlet and the perforated pilot surface. The pilot unit may be equipped with an ignition device configured to ignite fuel and oxidizer flowing out or discharged from a perforated pilot surface. In this way, the ignition flame is supplied across the perforated pilot surface rather than burning from a nozzle, which allows for a gentle and rapid ignition event, which can ignite multiple burners and increase the reliability of the exclusion device.

[0008] The perforated pilot surface can be positioned on the outer surface of the housing.

[0009] The perforated pilot surface can be positioned on the outer surface or outward-facing surface of the housing.

[0010] The perforated pilot surface can be shaped or configured to be fitted or positioned in close proximity to or adjacent to the burner of the abatement device. This allows the ignition flame supplied by the perforated pilot surface to ignite the combustible material present in the burner.

[0011] The perforated pilot surface can be shaped or configured to fit or position in close proximity to or adjacent to at least one of the multiple burners of the abatement device. Thus, a single pilot unit can be used to ignite two or more burners, eliminating the need for a separate pilot for each burner. Furthermore, positioning the pilot surface outside the burner reduces interference with the internal conditions within the burner.

[0012] The perforated pilot surface can be shaped or configured to contact one or more of the burners of the abatement device. This helps the ignition flame spread from the pilot unit to those burners.

[0013] The perforated pilot surface can be shaped or configured to contact the combustion surface of at least one of the multiple burners of the abatement device.

[0014] The perforated pilot surface can be shaped to provide a continuity of combustion surfaces for at least one of the multiple burners of the abatement device.

[0015] The perforated pilot surface can be shaped to extend along the end of at least one of the multiple burners of the abatement device.

[0016] The perforated pilot surface can be shaped to extend along at least a portion of the outer periphery of at least one of the multiple burners of the abatement device.

[0017] The pilot unit can be configured to position the perforated pilot surface to ignite the fuel and oxidizer coming from at least one of the multiple burners of the abatement device.

[0018] The pilot unit can be configured to position the perforated pilot surface toward or near at least one of the multiple burners of the abatement device.

[0019] The perforated pilot surface can be a flat surface.

[0020] The perforated pilot surface can be an elongated surface.

[0021] The perforated pilot surface can define at least one opening. The opening can receive or hold a sensor such as, for example, an ignition device, an observation port, and / or an ultraviolet, infrared, and / or temperature sensor.

[0022] The perforated pilot surface can comprise a plurality of adjacent perforated pilot surfaces. Thereby, the perforated pilot surface can have a shape suitable for effective ignition requirements.

[0023] One of the plurality of adjacent perforated pilot surfaces can define at least one opening.

[0024] The housing can comprise a main housing and a sub-housing held removably. The perforated pilot surface can be held by the sub-housing. This provides a configuration that allows the sub-housing to be removed to enable repair or replacement of the perforated pilot surface without interfering with the main housing.

[0025] The main housing can be formed of a material having a lower service temperature (and thus a lower melting point) and / or a lower oxidation resistance (and thus lower chemical resistance) than the material forming the sub-housing. Thereby, a larger main housing can be made of a wider material than the sub-housing.

[0026] The main housing can define a main plenum, and the sub-housing can define a sub-plenum. The sub-plenum can be in fluid communication with the main plenum (allowing a flow of fuel and oxidant from the main plenum to the sub-plenum) to supply the perforated pilot surface.

[0027] The ignition device can comprise a nozzle (such as a tubular nozzle) configured to generate a pilot flame for igniting the fuel and oxidizer exiting from the perforated pilot surface. This allows the pilot surface to be observed for the pilot flame even when the pilot surface cannot be observed. Further, the ignition device can be held within the nozzle to enable protection.

[0028] The nozzle can be held within the pilot unit. This helps to protect the nozzle. The nozzle can comprise a nozzle conduit extending through the plenum. This can make the fuel and oxidizer supplied to the ignition device different from those supplied to the perforated pilot surface.

[0029] The pilot unit can comprise a fuel and oxidizer manifold having a plurality of inlets. Each inlet can be configured to receive fuel and / or oxidizer and to supply that fuel and oxidizer to the nozzle and plenum in different stoichiometric ratios.

[0030] The manifold can be configured to supply the nozzle with fuel and oxidizer in a fuel-to-oxidizer ratio that is more fuel-rich than the fuel-to-oxidizer ratio fed to the plenum.

[0031] The fuel and oxidizer manifold can comprise one or more mixers configured to vary or adjust the mixing of the fuel and oxidizer to the nozzle and / or plenum.

[0032] The housing can comprise a plurality of upright portions extending at least to the perforated pilot surface. These upright portions help to protect the perforated pilot surface during the assembly of the decontamination device.

[0033] According to a second aspect, a decontamination device is provided that comprises the pilot unit of the first aspect.

[0034] The abatement device may have the characteristics of the pilot unit described above.

[0035] According to a third aspect, a method is provided which includes the steps of: holding a perforated pilot surface within a housing to define a plenum; transporting fuel and oxidizer from a corresponding housing inlet through the plenum to the perforated pilot surface; and igniting the fuel and oxidizer as they exit the perforated pilot surface.

[0036] This method may include the step of positioning the perforated pilot surface on the outer surface of the housing.

[0037] This method may include the step of positioning the perforated pilot surface on the outer surface of the housing.

[0038] This method may include the step of shaping a perforated pilot surface to fit in the vicinity of the burner of the abatement device.

[0039] The method may include the step of shaping a perforated pilot surface to fit in close proximity to at least one of the multiple burners of the abatement device.

[0040] This method may include the step of shaping a perforated pilot surface so as to contact at least one of the multiple burners of the abatement device.

[0041] This method may include the step of forming a perforated pilot surface so as to contact the combustion surface of at least one of the multiple burners of the abatement device.

[0042] The method may include the step of shaping a perforated pilot surface to result in a continuity of combustion surfaces for at least one of the multiple burners of the abatement device.

[0043] The method may include the step of shaping a perforated pilot surface so as to extend along at least one end of one of the multiple burners of the abatement device.

[0044] The method may include the step of forming a perforated pilot surface so as to extend along at least a portion of the outer periphery of at least one of the multiple burners of the abatement device.

[0045] The method may include the step of positioning a perforated pilot surface to ignite fuel and oxidizer coming from at least one of the multiple burners of the abatement device.

[0046] This method may include the step of positioning a perforated pilot surface toward at least one of the discharge ports of a plurality of burners in a pollution control device.

[0047] The perforated pilot surface can be flat.

[0048] The perforated pilot surface can be an elongated surface.

[0049] The method may include the step of defining at least one opening in the perforated pilot surface to receive at least one of an ignition device, an observation port, and a sensor.

[0050] This method may include the step of forming a perforated pilot surface from a plurality of adjacent perforated pilot surfaces.

[0051] The method may include the step of defining at least one opening in one of a plurality of adjacent perforated pilot surfaces.

[0052] The method may include the steps of forming a housing from a main housing and a removablely held sub-housing, and holding a perforated pilot surface using the sub-housing.

[0053] This method may include the step of forming the main housing with a material having at least one of a lower operating temperature and lower oxidation resistance than the material forming the sub-housing.

[0054] This method may include the steps of defining a main plenum in the main housing and a subplenum in the subhousing, and arranging the subplenum for fluid communication with the main plenum.

[0055] This method may include the steps of providing a nozzle as an ignition device and generating a pilot flame using the nozzle to ignite the fuel and oxidizer coming out of the perforated pilot surface.

[0056] This method may include the step of holding the nozzle within the pilot unit.

[0057] This method may include the step of providing a nozzle conduit that extends through the plenum as a nozzle.

[0058] This method may include the steps of providing a fuel and oxidizer manifold having multiple inlets, receiving either fuel or oxidizer at each inlet, and supplying the fuel and oxidizer to nozzles and plenum in different stoichiometric ratios.

[0059] This method may include the step of supplying fuel and oxidizer to the nozzle in a more concentrated ratio compared to the fuel and oxidizer supplied to the plenum.

[0060] The method may include the step of altering the flow of fuel and oxidizer to at least one of the nozzle and the plenum using at least one flow regulator.

[0061] The method may include the step of forming a housing having a plurality of upright portions configured to extend at least to a perforated pilot surface.

[0062] Further specific preferred embodiments are described in the attached independent and dependent claims. The features of the dependent claims may be combined, as appropriate, with the features of the independent claims and in combinations other than those expressly described in those claims.

[0063] When a feature of a device is described as being capable of operating to produce a certain function, it will be recognized that this includes features of the device that produce that function, or that are adapted or configured to produce that function.

[0064] Herein, embodiments of the present invention will be further described with reference to the attached drawings. [Brief explanation of the drawing]

[0065] [Figure 1A] This is a perspective view of the components of a modular pollution control device according to one embodiment. [Figure 1B] Figure 1A is a cross-sectional view showing a cross-sectional view of the pilot module 20. [Figure 1C] Figure 1A is a cross-sectional view showing a cross-section of the combustion chamber module. [Figure 2] This is a view of the combustion chamber module from the downstream side. [Figure 3A] The configuration of the combustion chamber module with the housing removed is shown in more detail. [Figure 3B] The configuration of the pilot module with the housing removed is shown in more detail. [Figure 4A] This is a top view showing a pilot module according to one embodiment. [Figure 4B] This is a cross-sectional view along section AA showing a pilot module according to one embodiment. [Figure 4C] This is a downstream view showing a pilot module according to one embodiment. [Figure 4D] This is a perspective view showing a pilot module according to one embodiment. [Figure 5A] This is a top view showing a pilot module according to one embodiment. [Figure 5B] This is a cross-sectional view along section BB showing a pilot module according to one embodiment. [Figure 5C] This is a downstream view showing a pilot module according to one embodiment. [Figure 5D] This is a perspective view showing a pilot module according to one embodiment. [Figure 6] The manifold shown in Figure 5 is shown in more detail. [Modes for carrying out the invention]

[0066] Before describing the embodiments in more detail, an overview is provided. Several embodiments provide a pilot unit. The pilot unit is typically used to ignite the combustion chamber of a decontamination device that decontaminates exhaust flows from semiconductor processing tools. The pilot unit comprises a perforated pilot surface that is ignited to function as a pilot for the decontamination device. This configuration allows for reliable ignition of the combustion chambers, as the perforated pilot surface can be shaped to conform to various combustion chamber geometries and to ignite multiple combustion chambers. In detail, the perforated pilot surface can be configured to effectively provide continuity of the burner's combustion surface to enable reliable ignition of the burner. In addition, the pilot unit is typically located outside the combustion chamber, which reduces interference with the processes inside the combustion chamber and frees the pilot unit from its harsh environment. In some embodiments, the pilot unit is formed from two housings, one of which is adjacent to the fuel and oxidizer supply section of the decontamination device, and the other comprises the perforated pilot surface. This allows the perforated pilot surface portion to be easily removed for maintenance, and the main housing can be made from a wider range of materials. In some embodiments, a nozzle-shaped ignition device is used to generate a pilot flame to cause ignition on a perforated pilot surface. Typically, a manifold is provided, which allows for different stoichiometric ratios of fuel and oxidizer supplied to the ignition device and the perforated pilot surface.

[0067] Abatement device Figure 1A is a perspective view of the components of a modular abatement device 10 according to one embodiment. Figure 1B is a cross-sectional view of Figure 1A showing a cross-sectional view of the pilot module 20. Figure 1C is a cross-sectional view of Figure 1A showing a cross-sectional view of the combustion chamber module 30. Figure 1D is a cross-sectional view showing the combustion chamber module 30 in more detail.

[0068] A housing 40 is provided, which defines a common housing chamber in which the combustion chamber modules 30 are housed. A common head plate 150 is provided covering the upstream opening of the housing 40. As can be seen in Figure 2A, the head plate 150 receives an exhaust inlet 60 for supplying exhaust flow, a treatment material inlet 70 for supplying treatment materials such as fuel, a pilot module inlet 110 for supplying fuel, and a purge inlet 160 for supplying intermodule purge gas such as nitrogen. Downstream of the housing 40 is a weir 170, which defines a wet wall chamber 180 having walls through which a fluid such as water flows during operation. In this embodiment, there are two combustion chamber modules 30 arranged linearly within the housing 40, but different configurations and numbers of combustion chamber modules 30 sharing a common housing and common head plate are possible, as will be explained in detail below.

[0069] Between the head plate 150 and the combustion chamber module 30, there is a mounting base 50 that holds the combustion chamber module 30 in place within the housing 40. The depth of this mounting base 50 can vary to accommodate combustion chamber modules 30 of different lengths while ensuring that each combustion chamber module 30 is discharged into the weir 170 at the same position.

[0070] Each combustion chamber module 30 has a module housing 80 in which a perforated sleeve 90 is fitted. The perforated sleeve 90 defines a combustion chamber 120 into which the supplied exhaust flow is processed. Each combustion chamber module 30 is equipped with an exhaust inlet 60 that carries the exhaust flow to be processed into the combustion chamber of that combustion chamber module 30. The perforated sleeve 90 is slightly spaced away from the module housing 80 to define a plenum 100. A processing material inlet 70 carries processing material, such as fuel, through a mounting base 50 into the plenum 100 of each combustion chamber module 30. Thus, each combustion chamber module 30 is essentially self-sufficient, and its operation does not affect other combustion chamber modules 30 in the housing 40.

[0071] Figure 2B shows a view of the combustion chamber module 30 from the downstream side. Also, as can be seen from Figure 1D, the perforated sleeve 90 has a planar upstream ceiling 200, from which four tapered wall portions 180 hang down, and the tapered wall portions 180 terminate at rounded shoulder portions 140 at the discharge end of the combustion chamber 120. This forms a combustion chamber 120 with a roughly trapezoidal structure. The pilot module 20 has a downstream discharge surface 130 that abuts against the shoulder portions 140 of the perforated sleeve 90.

[0072] Figures 3A and 3B show in more detail the configuration of the combustion chamber module 30 and pilot module 20 with the housing 40 removed. In this embodiment, the combustion chamber module 30 is of equal length, and therefore the mounting base 50 is of equal height. To protect the shoulder 140 and discharge surface 130 from damage during assembly, the shoulder 140 and discharge surface 130 are provided with projections 190, which allow the combustion chamber module 30 and pilot module 20 to rest on the surface without contacting the shoulder 140 and discharge surface 130.

[0073] Pilot module Figure 4 shows a pilot module 20A according to one embodiment. Figure 4A is a top view, Figure 4B is a cross-sectional view along section AA, Figure 4C is a view from the downstream side, and Figure 4D is a perspective view. The pilot module 20A comprises a main housing 300 and a sub-housing 310. The pilot module 20 is shaped to join or abut against the combustion chamber module 30. In this embodiment, the pilot module 20A is an elongated rectangular parallelepiped, but it should be understood that other shapes are possible depending on the number and shape of the combustion chamber modules 30. The main housing 300 has an upstream face 320 and a downstream face 330. A side wall 340 extends between the upstream face 320 and the downstream face 330. The sub-housing 310 has an upstream face 350. A side wall 360 hangs down from the upstream face 350. The perforated pilot surface 370 is located at the downstream opening defined by the side wall 360 and is equipped with a discharge surface 130A. Fuel and air inlets 380 are provided on the upstream surface 320. During operation, fuel and air are supplied through the inlets 380 and delivered to the plenum 390 in the main housing 300. The fuel and air then flow from the plenum 390 to the plenum 400 in the sub-housing 310 through the downstream surface 330 and the upstream surface 350. The fuel and air then pass through the perforated pilot surface 370 for combustion on the discharge surface 130.

[0074] The ignition device 410 extends from the upstream surface 320, through the plenums 390 and 400, to the ignition opening 420 of the perforated pilot surface 370. The ignition device 410 comprises a central conductor 430 housed within a tubular conduit 440. An inlet 450 receives fuel and air and is in fluid communication with the conduit 440. During operation, fuel and air are supplied through the inlet 450, around the conductor 430, through the conduit 440, and discharged from the ignition opening 420. A voltage is applied to the conductor 430, causing a discharge, which ignites the fuel and air mixture exiting the ignition opening 420, thereby igniting the fuel and air exiting the discharge surface 130. This causes combustion throughout the discharge surface 130, thereby igniting the fuel and air passing through the perforated sleeve 90 of the adjacent combustion chamber module 30.

[0075] The observation tube 460 extends from the upstream face 320, through the plenums 390 and 400, and through the observation opening 470.

[0076] Because the sub-housing 310 is closer to the discharge area of ​​the combustion chamber 120, it is typically made of a material with a higher melting point and greater resistance to chemical attack than the main housing 300. Furthermore, the sub-housing 310 can be removed during maintenance to replace all sub-housings 310 and / or the perforated pilot surface 370. However, the main housing 300 and all its connectors do not need to be removed and can remain in place. This makes maintenance of the pilot module 20A quick and easy.

[0077] Figure 5 shows a pilot module 20B according to one embodiment. Figure 5A is a top view, Figure 5B is a cross-sectional view along section BB, Figure 5C is a view from the downstream side, and Figure 4D is a perspective view. This embodiment is similar to that shown in Figure 4, except that a manifold 480 is provided, which receives separate feeds and mixes them to supply fuel-air mixtures of different fuel-air ratios. In detail, the manifold receives separate feeds of fuel, air, or a mixture of fuel and air, combines them in two different equivalence ratios, and supplies a first fuel-air mixture having one equivalence ratio to the ignition device 410A, and a second fuel-air mixture having a different equivalence ratio to the plenum 390A via the inlet 380A, as shown in more detail below in Figure 6. As shown in the figure, a lean inlet 490 is provided, which receives a first fuel-air mixture with a fuel lean ratio delivered via an inlet 380A that supplies fuel to the plenum 390A. In addition, a fuel inlet 500 is provided, which supplies additional fuel to the manifold 480. The first fuel-air mixture supplied to the lean inlet 490 mixes with the additional fuel supplied through the fuel inlet 500, increasing the fuel-to-air ratio present in the second fuel-air mixture supplied to the ignition device 410A. Specifically, the first fuel-air mixture with a fuel lean ratio passes through an opening 505 having dimensions set to control the amount of the first fuel-air mixture that is mixed with the additional fuel from the fuel inlet 500 in order to produce a second fuel-air mixture of the correct ratio for supply to the ignition device 410A. Typically, the first fuel-air mixture supplied to the plenum 390A via inlet 380A is in a substoichiometric ratio, while the second fuel-air mixture supplied to the ignition device 410A is in a stoichiometric ratio.In this embodiment, a lean fuel-air mixture is supplied with additional fuel, but this is not mandatory. It should be noted that a mixture of fuel and air together with an oxidizer can be supplied to the plenum 390A and ignition device 410A to provide the desired fuel-to-air ratio, or separate fuel and air can be supplied which can be mixed in the manifold as needed, as described above.

[0078] Returning to Figure 5, as shown in the figure, the sub-housing 310A is formed from two parts: a first part 510 without an opening and a second part 520 having an opening for the ignition device 410A. Providing separate parts also aids maintenance in this case, as one part can be replaced independently of the other. Also, as shown in the figure, similar to the configuration shown in Figure 4, an elongated bolt 405A is provided through the upstream surface of the main housing 300A to connect the main housing 300 to the sub-housing 310A.

[0079] Accordingly, some embodiments provide a pilot burner with a jet pilot integrated into a surface burner. This enables a modular pilot burner with a fully purged combustion chamber interface. The surface burner portion can be shaped in various ways to ignite multiple main burners and conform to various combustion chamber geometries. The jet pilot portion provides ignition, a strong flame signal, and a visible indication that the flame is ignited.

[0080] In some embodiments, fuel and air are introduced through multiple inlets. One inlet supplies the surface burner section, and another supplies the jet pilot section. The fuel and air supplied to these inlets are fluidly connected so that the jet burner and surface burner function in harmony. From one inlet, the fuel-air mixture travels through a pilot tube incorporated into the main plenum. An electrode extends downward through the center of the pilot tube and terminates near its end. This electrode provides an ignition source by a high-voltage spark and flame detection by flame ionization. Near the end of the pilot tube, there is a flow obstruction that provides turbulence and flame blocking. This flow obstruction is supported by an electrode. The fuel-air mixture passes through the flow obstruction and burns on the other side. The combustion products generate a flame jet that extends into the combustion chamber. The flame can be viewed from outside the combustion chamber through an observation tube. From the other inlet, the fuel-air mixture travels through the main plenum and enters the secondary plenum. The secondary plenum is fitted with permeable burner material. The secondary plenum allows for cost-effective replacement of the perforated burner material by separating it from the main plenum. A mixture of fuel and air passes through the burner material and burns in the combustion chamber. Functionally, fuel and air are introduced into these inlets. Electrodes generate a spark to initially ignite the flame at the tip of the pilot tube. This flame propagates along the surface of the perforated burner material and stabilizes. The result is a stable pilot system whose shape and proportions can be varied.

[0081] Some embodiments provide a conventional jet-type pilot burner integrated with a surface burner, supplied from the same fuel / air source. There is a fully purged interface between the burner and the combustion chamber, which reduces solid deposits. Including a surface burner allows for geometric variations to enable a tessellation of pilot burner surfaces with other burner modules in a modular assembly. The shape of the surface burner can vary. Isolation at the burner base can be included to prevent damage to the surface burner section. The surface burner can be a removable part from the main assembly for cost-effective repair. An over-fuel connection can be added so that the jet pilot is richer than the surface burner. A needle valve can be provided at the fuel / air inlet to adjust the combustion rate of the jet pilot relative to the combustion rate of the surface burner. The surface burner can be divided into two different elements. One element has throughs for the jet pilot, sight port, and thermocouple, while the other element does not have throughs.

[0082] While exemplary embodiments of the present invention have been disclosed in detail with reference to the accompanying drawings, it will be understood that the present invention is not limited to the exact embodiments and that various changes and modifications can be made by those skilled in the art without departing from the scope of the invention as defined by the appended claims and equivalents. [Explanation of symbols]

[0083] 10 Abatement equipment 20, 20A, 20B Pilot Modules 30 Combustion Chamber Modules 40 Housing 50 Mounting base 60 Discharge inlet 70 Processing material inlet 90 perforated sleeves 110 Pilot Module Entrance 120 Combustion Chamber 130 Discharge surface 160 Purge entrance 170 Weir 180 Wall 190 Protrusion 200 ceiling 300, 300A Main Housing 300, 300A Sub-housing 320, 350 upstream surface 330 Downstream side 340, 360 side wall 370 Perforated pilot surface 380, 450 entrance 390, 400 plenum 405A bolt 410 Ignition system 420 Ignition opening 430 Conductor 440 Conduit 460 Observation Tubes 470 Observation Aperture 480 Manifold 490 Lean entrance 500 fuel inlet 505 Aperture 510 Part 1 520 Part 2

Claims

1. A pilot unit for a detoxification device configured to detoxify the discharge flow from a semiconductor processing tool, A housing for holding a perforated pilot surface, wherein the housing and the perforated pilot surface define a plenum configured to carry fuel and oxidizer from a corresponding housing inlet through the perforated pilot surface, and the fuel and oxidizer are supplied to the pilot unit via an inlet separate from the exhaust inlet of the abatement device for supplying the exhaust flow, An ignition device configured to ignite the fuel and the oxidizer when they exit the perforated pilot surface, Equipped with, The perforated pilot surface is shaped to fit in close proximity to the burner of the abatement device, the burner being separate from the pilot unit and configured to generate combustion for abating the exhaust flow, and the perforated pilot surface defines at least one opening for receiving at least one of the ignition device, observation port and sensor, the pilot unit.

2. The pilot unit according to claim 1, wherein the perforated pilot surface is positioned on either the outer surface or the outer surface of the housing.

3. The pilot unit according to claim 1, wherein the perforated pilot surface is shaped to fit in close proximity to at least one of the plurality of burners of the abatement device.

4. The perforated pilot surface is Shaped to contact at least one of the plurality of burners of the abatement device, Shaped to contact at least one combustion surface of the plurality of burners of the abatement device, Shaped to provide continuity of combustion surfaces of at least one of the plurality of burners of the abatement device, Shaped to extend along the edge of at least one of the multiple burners of the abatement device, Formed to extend along at least a portion of the outer periphery of at least one of the plurality of burners of the abatement device, The pilot unit according to claim 3, which is at least one of the following.

5. The aforementioned pilot unit is The perforated pilot surface is configured to be positioned to ignite the fuel and oxidizer coming from at least one of the plurality of burners of the abatement device, and The perforated pilot surface is configured to be positioned toward at least one of the multiple burners of the abatement device. The pilot unit according to claim 4, which is at least one of the following.

6. The pilot unit according to claim 1, wherein the perforated pilot surface is at least one of a flat surface and an elongated surface.

7. The pilot unit according to claim 1, wherein the perforated pilot surface comprises a plurality of adjacent perforated pilot surfaces.

8. The pilot unit according to claim 7, wherein one of the plurality of adjacent perforated pilot surfaces defines the at least one opening.

9. The pilot unit according to claim 8, wherein the housing comprises a main housing and a removablely held sub-housing, and the perforated pilot surface is held by the sub-housing.

10. The pilot unit according to claim 9, wherein the main housing is formed of a material having at least one of a lower operating temperature and lower oxidation resistance than the material forming the sub-housing.

11. The pilot unit according to claim 9, wherein the main housing defines a main plenum, the sub-housing defines a sub-plenum, and the sub-plenum is in fluid communication with the main plenum.

12. The pilot unit according to claim 1, wherein the ignition device includes a nozzle configured to generate a pilot flame for igniting the fuel and oxidizer coming out of the perforated pilot surface.

13. The pilot unit according to claim 12, wherein the nozzle is held within the pilot unit.

14. The pilot unit according to claim 12, wherein the nozzle includes a nozzle conduit extending through the plenum.

15. The pilot unit according to claim 12, comprising a fuel and oxidizer manifold having a plurality of inlets, each of which is configured to receive at least one of the fuel and the oxidizer, and to deliver the fuel and the oxidizer to the nozzle and the plenum in different stoichiometric ratios.

16. The pilot unit according to claim 15, wherein the fuel and oxidizer manifold supplies the fuel and oxidizer to the nozzle at a more concentrated fuel-to-oxidizer ratio compared to the fuel-to-oxidizer ratio supplied to the plenum.

17. The pilot unit according to claim 15, wherein the fuel and oxidizer manifold comprises at least one flow mixer configured to alter the mixture of the fuel and the oxidizer to at least one of the nozzle and the plenum.

18. The pilot unit according to claim 1, wherein the housing comprises a plurality of upright portions configured to extend at least to the perforated pilot surface.

19. A pollution control device comprising a pilot unit according to any one of claims 1 to 18.

20. A method for removing harmful substances from discharge flow from a semiconductor processing tool, A step of shaping a perforated pilot surface of a pilot unit to fit in close proximity to a burner of a detoxification device, wherein the burner is separate from the pilot unit and is configured to produce combustion for detoxifying the exhaust flow, and the perforated pilot surface defines at least one opening for receiving at least one of an ignition device, an observation port, and a sensor, To define the plenum, the steps include holding the perforated pilot surface within the housing, A step of transporting fuel and oxidizer from a corresponding housing inlet through the plenum to the perforated pilot surface, wherein the fuel and oxidizer are supplied to the pilot unit through an inlet separate from the discharge inlet of the abatement device for supplying the discharge flow, The steps include igniting the fuel and the oxidizer as they exit the perforated pilot surface, Methods that include...

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