Recipe suggestion device and recipe suggestion method

Abstract

To provide a recipe suggestion device capable of proposing and evaluating a recipe corresponding to a target shape.SOLUTION: A disclosed recipe suggestion device 10 includes: an input unit 11 that input target information regarding a target shape of a substrate to be processed by a substrate processing unit; a recipe proposal unit 12 that proposes a process recipe used in the substrate processing unit to form a target shape; a calculation unit 13 that calculates a piece of prediction information regarding a predicted shape when performing the processing the substrate with the substrate processing unit using the process recipe; and a display unit 14 that displays target information and the prediction information.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present disclosure relates to a recipe proposal device and a recipe proposal method.

Background Art

[0002] Conventionally, a substrate processing apparatus for processing a substrate has been known (for example, Patent Document 1). The substrate processing apparatus of Patent Document 1 is a plasma processing apparatus for plasma-processing a substrate, and performs plasma processing of the substrate according to processing conditions corresponding to each processing step (for example, conditions such as the flow rate of a raw material gas, applied power, and processing time). Such processing conditions are generally stored in a storage unit provided in the substrate processing apparatus as a process recipe (hereinafter, also simply referred to as a recipe). The substrate processing apparatus reads a recipe from the storage unit and controls each component based on the recipe.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] By the way, conventionally, creating a recipe suitable for a processing shape (hereinafter, target shape) to be realized by processing a substrate requires a relatively large number of man-hours. For example, when creating a recipe suitable for the target shape by repeatedly adjusting the processing conditions included in the recipe and actual processing, it is necessary to perform actual processing a plurality of times. Also, it is not easy to evaluate whether the created recipe is appropriate. In such a situation, one object of the present disclosure is to propose a recipe corresponding to a target shape and capable of being easily evaluated.

Means for Solving the Problems

[0005] One aspect of this disclosure relates to a recipe suggestion device. The recipe suggestion device includes an input unit for inputting target information relating to a target shape of a substrate to be processed by a substrate processing device; a recipe suggestion unit that proposes a process recipe to be used in the substrate processing device to form the target shape based on the target information; a calculation unit that calculates prediction information relating to a predicted shape when the substrate is processed by the substrate processing device using the process recipe; and a display unit that displays the target information and the prediction information.

[0006] Another aspect relating to this disclosure is a recipe suggestion method. The recipe suggestion method is a method for suggesting a recipe using a recipe suggestion device, comprising: a first step in which an input unit receives input of target information relating to a target shape of a substrate to be processed by a substrate processing device; a second step in which a recipe suggestion unit suggests a process recipe to be used in the substrate processing device to form the target shape based on the target information; a third step in which a calculation unit calculates prediction information relating to a predicted shape when the substrate is processed by the substrate processing device using the process recipe; and a fourth step in which a display unit displays the target information and the prediction information. [Effects of the Invention]

[0007] According to this disclosure, it is possible to propose a recipe that corresponds to the target shape and is easily evaluateable. [Brief explanation of the drawing]

[0008] [Figure 1] This is a block diagram showing an example configuration of a recipe suggestion device related to this disclosure. [Figure 2] This is an example of a screen displayed on the display unit for inputting target information. [Figure 3] This is an example of a screen that displays suggested recipes and correction recipes on the display unit. [Figure 4] This is an example of a screen that displays target information, forecast information, and corrected forecast information on the display unit. [Figure 5]This is another example of a screen that displays target information, forecast information, and corrected forecast information on the display unit. [Figure 6] This is a flowchart illustrating an example of a recipe suggestion method related to this disclosure. [Modes for carrying out the invention]

[0009] Embodiments of the recipe suggestion device and recipe suggestion method relating to this disclosure will be described below with examples. However, this disclosure is not limited to the examples described below. In the following description, specific numerical values ​​and materials may be given as examples, but other numerical values ​​and materials may be applied as long as the effects of this disclosure are achieved.

[0010] (Recipe suggestion device) The recipe suggestion device according to this disclosure is a device that suggests process recipes to be used in a substrate processing device (e.g., a plasma processing device) in response to input (e.g., user input), and displays the suggested process recipes for evaluation. The recipe suggestion device may be integrated with the substrate processing device or may be separate. The recipe suggestion device comprises an input unit, a recipe suggestion unit, a calculation unit, and a display unit. The input unit, recipe suggestion unit, calculation unit, and display unit may all be integrated, or at least one of them may be separate. For example, the input unit and display unit may be integrated and possessed by the user, while the recipe suggestion unit and calculation unit reside in the cloud.

[0011] The input unit is an element for inputting target information regarding the target shape of a substrate to be processed by a substrate processing apparatus. The target shape may be, for example, the target shape of a groove formed in the substrate. The target information may be, for example, the values ​​of the dimensions of each part of the target shape. The dimensions of each part may be, for example, the depth of the groove formed in the substrate, the opening width, and the bottom width. The input unit may be, for example, an input field displayed on the display unit.

[0012] The recipe suggestion unit proposes a process recipe (or recipe) to be used in the substrate processing apparatus to form the target shape, based on the input target information. If the substrate processing apparatus is a plasma processing apparatus, the recipe may include parameters such as the flow rate of the raw material gas, the pressure of the processing chamber, the applied power, and the processing time. The recipe suggestion unit may determine candidate values ​​for each of these parameters based on the input target information. Possible methods for this determination include, for example, selecting a recipe suitable for the target shape from a database relating recipes to processed shapes, selecting multiple recipes suitable for the target shape from the database and interpolating the parameters in these multiple recipes, or calculating them from a trained model constructed by machine learning. The recipe suggestion unit may also be a functional unit realized by a calculation device provided in the recipe suggestion apparatus executing a predetermined program.

[0013] The calculation unit calculates predictive information regarding the predicted shape when a substrate is processed using a substrate processing apparatus based on a process recipe. One possible method of this calculation is to use a model equation constructed based on experimental data (for example, a polynomial showing the relationship between the processed shape and each parameter). The predicted shape may be, for example, the predicted shape of a groove formed on the substrate. The predictive information may be, for example, the values ​​of the dimensions of each part in the predicted shape. These dimensions may be, for example, the depth of the groove formed on the substrate, the opening width, and the bottom width. The calculation unit may also be a functional unit realized by a calculation device provided in the recipe suggestion device executing a predetermined program.

[0014] The display unit displays target information and forecast information. The display unit may display target information and forecast information simultaneously, or not simultaneously. The display unit may display target information and forecast information numerically. In addition, the display unit may visually display the target shape and forecast shape. The display unit may include a display provided in the recipe suggestion device.

[0015] As described above, in the recipe proposal device according to the present disclosure, based on the target information input via the input unit, a recipe for achieving the target shape is proposed by the recipe proposal unit. The proposed recipe (hereinafter also referred to as the proposed recipe) is used for calculating prediction information by the calculation unit. Since the target information and the prediction information are displayed on the display unit, the user can easily evaluate the proposed recipe while checking the display.

[0016] The display unit may display the target information and the prediction information on the same screen. According to this configuration, the user can more easily check the display. The display unit preferably displays the target information and the prediction information simultaneously on the same screen.

[0017] The calculation unit may calculate the prediction information based on a processing model showing the relationship between the recipe parameters included in the process recipe and the processed shape in the substrate processing apparatus. The processing model may be, for example, a model formula showing the relationship between the recipe parameters and the processed shape, constructed based on experimental data. The recipe parameters may include, when the substrate processing apparatus is a plasma processing apparatus, the flow rate of the source gas, the pressure in the processing chamber, the applied power, and the processing time. The processing model may be a learned model constructed by machine learning.

[0018] The recipe proposal unit may refer to a database associating a plurality of process recipes with the processed shape when each process recipe is used, and extract and propose a process recipe corresponding to a processed shape close to the target information from the database. The database may be stored in a storage unit included in the substrate processing apparatus, or may be stored in a device separate from the substrate processing apparatus (for example, a server device). The processed shape close to the target shape may be, for example, the processed shape having the smallest error (for example, the cumulative value of the errors of each dimension value) with the target shape among the plurality of processed shapes included in the database.

[0019] The recipe proposal device may further include a determination unit that receives an input regarding whether to adopt the process recipe proposed by the recipe proposal unit. According to this configuration, the user can, for example, determine to adopt the proposed recipe via the determination unit. The determination unit may include, for example, a recipe storage instruction unit that is displayed on the display unit and is used to store the proposed recipe in the storage unit. In this case, inputting to the recipe storage instruction unit represents an indication of the intention to adopt the proposed recipe, while not inputting to the recipe storage instruction unit represents an indication of the intention not to adopt the proposed recipe.

[0020] The recipe proposal device may further include a modification unit for modifying the process recipe proposed by the recipe proposal unit. The calculation unit may calculate correction prediction information regarding the predicted shape when processing the substrate with the substrate processing device using the corrected process recipe (hereinafter, also simply referred to as the corrected recipe), which is the modified process recipe. The display unit may display the target information and the correction prediction information. The modification unit may include, respectively, an input field displayed on the display unit for inputting the corrected recipe, and a recalculation instruction unit for instructing recalculation of the predicted shape based on the corrected recipe. According to this configuration, when the user does not adopt the proposed recipe (the process recipe before modification), the user can input the corrected recipe and obtain the correction prediction information based on the corrected recipe. Then, the user can easily evaluate the corrected recipe while checking the target information and the correction prediction information displayed on the display unit. Note that the display unit may display the correction prediction information instead of the prediction information, or may display the correction prediction information in addition to the prediction information. In the latter case, the display unit will display the target information, the prediction information, and the correction prediction information.

[0021] The display unit may display the target information and the correction prediction information on the same screen. According to this configuration, the user can more easily confirm the display. Preferably, the display unit simultaneously displays the target information and the correction prediction information on the same screen. More preferably, the display unit may simultaneously display the target information, the prediction information, and the correction prediction information on the same screen.

[0022] The recipe suggestion device may further include a decision unit that receives input regarding whether or not to adopt a corrected process recipe. With this configuration, the user can decide, for example, to adopt the corrected recipe via the decision unit. The decision unit may include, for example, a recipe save instruction unit that is displayed on a display unit and saves the corrected recipe to a storage unit. In this case, inputting into the recipe save instruction unit represents an expression of intent to adopt the corrected recipe, while not inputting into the recipe save instruction unit represents an expression of intent not to adopt the corrected recipe.

[0023] (Recipe suggestion method) The recipe suggestion method relating to this disclosure is a method for suggesting a process recipe to be used in a substrate processing apparatus (e.g., a plasma processing apparatus) in response to input (e.g., user input), and for displaying the suggested process recipe in a way that can be used to evaluate it. The recipe suggestion method may be executed in the substrate processing apparatus, or it may be executed in a separate device (e.g., a personal computer or a tablet terminal). The recipe suggestion method comprises a first step, a second step, a third step, and a fourth step.

[0024] In the first step, the input unit receives target information regarding the target shape of the substrate to be processed by the substrate processing apparatus. The target shape may be, for example, the target shape of a groove formed in the substrate. The target information may be, for example, the values ​​of the dimensions of each part of the target shape. The dimensions of each part may be, for example, the depth of the groove formed in the substrate, the opening width, and the bottom width.

[0025] In the second step, the recipe proposal unit proposes a process recipe (or recipe) to be used in the substrate processing apparatus to form the target shape, based on the target information. If the substrate processing apparatus is a plasma processing apparatus, the recipe may include parameters such as the flow rate of the raw material gas, the pressure of the processing chamber, the applied power, and the processing time. In the second step, candidate values ​​for each of these parameters may be determined based on the target information entered in the first step. One possible method for this determination is to use the database described above.

[0026] In the third step, the calculation unit calculates predictive information regarding the predicted shape when the substrate is processed using the substrate processing apparatus based on the process recipe. One possible method for this calculation is to use the model equation described above. The predicted shape may be, for example, the predicted shape of the grooves formed on the substrate. The predictive information may be, for example, the values ​​of the dimensions of each part in the predicted shape. These dimensions may include, for example, the depth of the grooves formed on the substrate, the opening width, and the bottom width.

[0027] In the fourth step, the display unit displays target information and forecast information. In the fourth step, the target information and forecast information may be displayed simultaneously or separately. In the fourth step, the target information and forecast information may be displayed numerically. In addition, in the fourth step, the target shape and forecast shape may be displayed visually. The fourth step may be performed via a display.

[0028] As described above, in the recipe proposal method related to this disclosure, a recipe aimed at achieving the target shape is proposed in the second step based on the target information entered in the first step. The proposed recipe (proposed recipe) is used to calculate prediction information in the third step. Since the target information and prediction information are displayed in the fourth step, the user can easily evaluate the proposed recipe while checking the display.

[0029] In the fourth step, the display unit may display target information and forecast information on the same screen. This makes it even easier for the user to check the display. In the fourth step, it is preferable to display target information and forecast information on the same screen simultaneously.

[0030] In the third step, the calculation unit may calculate predictive information based on a processing model that shows the relationship between the recipe parameters included in the process recipe and the processed shape in the substrate processing apparatus.

[0031] In the second step, the recipe suggestion unit may refer to a database that associates multiple process recipes with the resulting processed shapes, and extract and propose a process recipe from the database that corresponds to a processed shape close to the target information.

[0032] The recipe suggestion method may further include a fifth step in which the decision unit receives input regarding whether or not to adopt the process recipe suggested in the second step. In this case, the user can decide, for example, to adopt the suggested recipe in the fifth step. In the fifth step, the input may be received, for example, via a recipe save button displayed on a screen for saving the suggested recipe to a memory unit.

[0033] The recipe suggestion method may further include a sixth step in which a modification unit accepts a modification of the process recipe proposed in the second step; a seventh step in which a calculation unit calculates corrected prediction information regarding the predicted shape when the substrate is processed by the substrate processing apparatus using the modified process recipe, which is the corrected process recipe; and an eighth step in which a display unit displays the target information and the corrected prediction information. In the sixth step, the modification may be accepted via an input field for inputting the corrected recipe and a recalculation button for instructing the recalculation of the predicted shape based on the corrected recipe, both of which are displayed on the display. With this configuration, if the user does not adopt the proposed recipe (the process recipe before modification), they can input a corrected recipe and obtain corrected prediction information based on that corrected recipe. The user can then easily evaluate the corrected recipe while checking the target information and corrected prediction information displayed in the eighth step. In the eighth step, the corrected prediction information may be displayed instead of the prediction information, or the corrected prediction information may be displayed in addition to the prediction information. In the latter case, the eighth step will display the target information, prediction information, and corrected prediction information.

[0034] In step 8, the display unit may display target information and corrected prediction information on the same screen. This makes it easier for the user to confirm the display. In step 8, it is preferable to display target information and corrected prediction information on the same screen simultaneously. More preferably, in step 8, target information, prediction information, and corrected prediction information may be displayed on the same screen simultaneously.

[0035] The recipe suggestion method may further include a ninth step in which the decision unit receives input regarding whether or not to adopt a corrected process recipe. In this case, the user can decide, for example, to adopt a corrected recipe in the ninth step. In the ninth step, the input may be received, for example, via a recipe save button displayed on a screen and used to save the corrected recipe to a memory unit.

[0036] As described above, this disclosure makes it possible to propose a recipe that corresponds to the target shape and is easy to evaluate. Furthermore, this disclosure makes it possible for users to easily decide whether to adopt the proposed recipe. Moreover, this disclosure makes it possible for users to create a corrected recipe if they do not adopt the proposed recipe and to easily evaluate the latter.

[0037] Below, an example of a recipe suggestion device and recipe suggestion method relating to this disclosure will be described in detail with reference to the drawings. The components and processes described above can be applied to the components and processes of the example recipe suggestion device and recipe suggestion method described below. The components and processes of the example recipe suggestion device and recipe suggestion method described below can be modified based on the above description. Furthermore, the matters described below may be applied to the above embodiments. Among the components and processes of the example recipe suggestion device and recipe suggestion method described below, components and processes that are not essential to the recipe suggestion device and recipe suggestion method relating to this disclosure may be omitted. Note that the figures shown below are schematic and do not accurately reflect the actual shape and number of components.

[0038] The recipe suggestion device 10 of this embodiment is a device that suggests recipes to be used in a plasma processing device (not shown) in response to user input, and displays information that can be used to evaluate the suggested recipes. The recipe suggestion device 10 is separate from the plasma processing device, but is not limited to this configuration. As shown in Figures 1 to 5, the recipe suggestion device 10 comprises an input unit 11, a recipe suggestion unit 12, a calculation unit 13, a display unit 14, a determination unit 15, and a modification unit 16.

[0039] Although not shown in the diagram, the plasma processing apparatus comprises a processing chamber in which the substrate is subjected to plasma processing, a high-frequency power supply that supplies high-frequency power to generate plasma in the processing chamber, a raw material gas source that supplies raw material gas to the processing chamber, a pressure regulating means for regulating the pressure in the processing chamber, a storage unit that stores a recipe used for plasma processing, and a control unit that controls each component based on the recipe. Alternatively, the storage unit and the control unit may be provided in a separate device from the plasma processing apparatus. The recipe suggestion device 10 is capable of communicating with the plasma processing apparatus.

[0040] The input unit 11 is an element for inputting target information regarding the target shape of a substrate to be processed by the plasma processing apparatus, and is composed of an input field (see Figure 2) displayed on the display unit 14. The target shape is the target shape of a groove to be formed in the substrate. The target information includes the values ​​of the dimensions of each part of the target shape, specifically the depth of the groove formed in the substrate, the opening width, and the bottom width. The user can input the target information to the recipe suggestion device 10 via the input unit 11.

[0041] The recipe suggestion unit 12 proposes a recipe to be used in the plasma processing apparatus to form the target shape, based on the input target information. The proposed recipe includes parameters such as the flow rate of the raw material gas, the pressure in the processing chamber, the applied power, the processing time, and the number of cycles for each step of the Bosch process (i.e., the protective film deposition step, the protective film removal step, and the etching step). The recipe suggestion unit 12 determines candidate values ​​for each of these parameters based on the input target information. For example, the recipe suggestion unit 12 determines candidate values ​​for each parameter by referring to a database that associates multiple recipes with the processed shapes obtained using each recipe, and extracting and proposing a recipe from the database that corresponds to a processed shape close to the target information.

[0042] The calculation unit 13 calculates prediction information regarding the predicted shape when the substrate is processed in a plasma processing apparatus using the proposed recipe. The calculation unit 13 calculates the prediction information based on the parameters included in the proposed recipe and a processing model (for example, a model equation constructed based on experimental data) that shows the relationship between the parameters and the processed shape in the plasma processing apparatus. The predicted shape is the predicted shape of the groove formed in the substrate. The prediction information includes the values ​​of the dimensions of each part in the predicted shape, specifically the depth of the groove formed in the substrate, the opening width, and the bottom width.

[0043] The display unit 14 has a display (see Figures 2 to 5) provided in the recipe suggestion device 10. The display unit 14 displays the suggested recipe as shown in Figure 3. The display unit 14 simultaneously displays target information and prediction information on the same screen (i.e., the display) as shown in Figure 4. In addition to these, the display unit 14 simultaneously displays corrected prediction information, described later, on the same screen as needed. The display unit 14 may also display this information numerically and visually in response to user instructions (for example, instructions via the 2D drawing button 14a in Figure 4), as shown in Figure 5. The user can easily evaluate the suggested recipe while checking the display. The display unit 14 may or may not simultaneously display at least two of the displays in Figures 3 to 5 (for example, the displays in Figure 3 and Figure 4) on the same screen.

[0044] The decision unit 15 is an element for receiving input regarding whether or not to adopt the proposed recipe, and consists of a recipe save button displayed on the display unit 14 (see Figure 3). The user can input whether or not to adopt the proposed recipe to the recipe suggestion device 10 via the decision unit 15. If input indicating that the proposed recipe will be adopted is input to the decision unit 15, the recipe suggestion device 10 stores the proposed recipe in the storage unit of the plasma processing device.

[0045] The modification section 16 is an element for modifying the proposed recipe (or for inputting a correction recipe). As shown in Figure 3, the modification section 16 is displayed on the display section 14 and includes an input field 16a for inputting a correction recipe and a recalculation button 16b for instructing the recalculation of the predicted shape based on the correction recipe. If the user does not adopt the proposed recipe, they can input a correction recipe to the recipe suggestion device 10 via the modification section 16.

[0046] The calculation unit 13 further calculates corrected prediction information regarding the predicted shape when the substrate is processed in the plasma processing apparatus using the correction recipe. The calculation unit 13 calculates the corrected prediction information based on the parameters included in the correction recipe and a processing model that shows the relationship between the processed shape in the plasma processing apparatus. The corrected prediction information includes the depth of the grooves formed in the substrate, the opening width, and the bottom width.

[0047] The decision unit 15 further receives input regarding whether or not to adopt the correction recipe. The user can input whether or not to adopt the correction recipe to the recipe suggestion device 10 via the decision unit 15. If the decision unit 15 receives input indicating that the correction recipe will be adopted, the recipe suggestion device 10 stores the correction recipe in the memory unit of the plasma processing device.

[0048] (Recipe suggestion method) Next, a recipe suggestion method using the above-described recipe suggestion device 10 will be explained with reference to Figure 6. As shown in Figure 6, the recipe suggestion method of this embodiment comprises a first step ST1, a second step ST2, a third step ST3, a fourth step ST4, a fifth step ST5, a sixth step ST6, a seventh step ST7, an eighth step ST8, and a ninth step ST9.

[0049] In the first step ST1, target information regarding the target shape of the substrate to be processed by the plasma processing apparatus is received via the input unit 11. Once the user has finished inputting the target information, the process proceeds to the second step ST2.

[0050] In the second step, ST2, the recipe suggestion unit 12 proposes a recipe to be used in the plasma processing apparatus to form the target shape, based on the target information. Here, it refers to a database that associates multiple recipes with the processed shapes that result from using each recipe, and extracts and proposes a recipe from the database that corresponds to a processed shape close to the target information. The process then proceeds to the third step, ST3.

[0051] In the third step, ST3, the calculation unit 13 calculates predictive information regarding the predicted shape when the substrate is processed using the proposed recipe with the plasma processing apparatus. Here, the predictive information is calculated based on a processing model that shows the relationship between the recipe parameters included in the proposed recipe and the processed shape in the plasma processing apparatus. The process then proceeds to the fourth step, ST4.

[0052] In the fourth step, ST4, target information and forecast information are displayed on the same screen via the display unit 14. This allows the user to easily evaluate the suggested recipe while checking the display. The process then proceeds to the fifth step, ST5.

[0053] In the fifth step, ST5, the decision unit 15 receives input regarding whether or not to adopt the proposed recipe. If the input indicates that the proposed recipe should be adopted (Yes), the proposed recipe is stored in the memory unit and the series of processes ends. On the other hand, if the input indicates that the proposed recipe should not be adopted (No), the process proceeds to the sixth step, ST6, without storing the proposed recipe in the memory unit.

[0054] In step 6, ST6, the proposed recipe is modified (or a corrected recipe is entered) via the modification unit 16. Once the user has entered the corrected recipe, the process proceeds to step 7, ST7.

[0055] In the seventh step, ST7, the calculation unit 13 calculates corrected prediction information regarding the predicted shape when the substrate is processed in the plasma processing apparatus using the corrected recipe. Here, the corrected prediction information is calculated based on the recipe parameters included in the corrected recipe and a processing model that shows the relationship between the processed shape in the plasma processing apparatus. The process then proceeds to the eighth step, ST8.

[0056] In the eighth step, ST8, target information, prediction information, and correction prediction information are displayed on the same screen via the display unit 14. This allows the user to easily evaluate the correction recipe while checking the display. The process then proceeds to the ninth step, ST9.

[0057] In the ninth step, ST9, input is received via the decision unit 15 regarding whether or not to adopt the correction recipe. If input indicating adoption of the correction recipe is received (Yes), the correction recipe is stored in the memory unit and the series of processes ends. On the other hand, if input indicating that the correction recipe will not be adopted is received (No), the process returns to the sixth step, ST6, without storing the correction recipe in the memory unit. In the second and subsequent sixth step, ST6, further modification of the correction recipe is accepted. Then, the process from the sixth step, ST6 to the ninth step, ST9, is repeated until input indicating adoption of the correction recipe is received in the ninth step, ST9.

[0058] While preferred embodiments of this disclosure have been described, this description should not limit the scope of this disclosure. For example, any combination of two or more claims arbitrarily selected from the claims set forth in the appended claims is possible, provided that no technical inconsistency arises. [Industrial applicability]

[0059] This disclosure can be used in recipe suggestion devices and recipe suggestion methods. [Explanation of Symbols]

[0060] 10: Recipe suggestion device 11: Input section 12: Recipe Proposal Department 13: Calculation Section 14: Display section 14a: 2D drawing button 15: Decision-making section 16: Changes 16a: Input field 16b: Recalculate button

Claims

1. An input unit for inputting target information regarding the target shape of the substrate to be processed by the substrate processing apparatus, A recipe proposal unit proposes a process recipe to be used in the substrate processing apparatus to form the target shape based on the target information, A calculation unit that calculates predictive information regarding the predicted shape when the substrate is processed using the substrate processing apparatus using the process recipe, A display unit that displays the target information and the prediction information, Equipped with, The recipe suggestion unit refers to a database that associates multiple process recipes with the processed shapes obtained using each process recipe, and extracts and proposes a process recipe from the database that corresponds to a processed shape that is close to the target information. The calculation unit is a recipe suggestion device that calculates the prediction information based on a polynomial that shows the relationship between the recipe parameters included in the process recipe and the processed shape in the substrate processing apparatus.

2. The recipe suggestion device according to claim 1, wherein the display unit displays the target information and the prediction information on the same screen.

3. The recipe suggestion apparatus according to claim 1 or 2, further comprising a decision unit that receives input regarding whether or not to adopt the process recipe suggested by the recipe suggestion unit.

4. The recipe further comprises a modification unit for changing the process recipe proposed by the recipe proposal unit, The calculation unit calculates corrected prediction information regarding the predicted shape when the substrate is processed by the substrate processing apparatus using the corrected process recipe, which is the modified process recipe. The recipe suggestion device according to claim 1 or 2, wherein the display unit displays the target information and the corrected prediction information.

5. The recipe suggestion device according to claim 4, wherein the display unit displays the target information and the corrected prediction information on the same screen.

6. The recipe suggestion device according to claim 4, further comprising a determination unit that receives input regarding whether or not to adopt the correction process recipe.

7. A method for suggesting recipes using a recipe suggestion device, The input unit has a first step in which it receives target information regarding the target shape of the substrate to be processed by the substrate processing apparatus, A second step in which the recipe proposal unit proposes a process recipe to be used in the substrate processing apparatus to form the target shape based on the target information, A third step in which the calculation unit calculates predictive information regarding the predicted shape when the substrate is processed using the substrate processing apparatus using the process recipe, The fourth step involves the display unit displaying the target information and the prediction information, Equipped with, In the second step, the recipe suggestion unit refers to a database that associates multiple process recipes with the processed shapes that result from using each process recipe, and extracts and proposes a process recipe from the database that corresponds to the processed shape closest to the target information. In the third step, the calculation unit calculates the prediction information based on a polynomial that shows the relationship between the recipe parameters included in the process recipe and the processed shape in the substrate processing apparatus, in a recipe suggestion method.

8. The recipe suggestion method according to claim 7, wherein in the fourth step, the display unit displays the target information and the prediction information on the same screen.

9. The recipe suggestion method according to claim 7 or 8, further comprising a fifth step in which the decision unit receives input regarding whether or not to adopt the process recipe proposed in the second step.

10. The modification section includes a sixth step that accepts the modification of the process recipe proposed in the second step, A seventh step in which the calculation unit calculates corrected prediction information regarding the predicted shape when the substrate is processed by the substrate processing apparatus using the corrected process recipe, which is the modified process recipe; The eighth step involves the display unit displaying the target information and the corrected prediction information, The recipe suggestion method according to claim 7 or 8, further comprising:

11. The recipe suggestion method according to claim 10, wherein in the eighth step, the display unit displays the target information and the correction prediction information on the same screen.

12. The recipe suggestion method according to claim 10, further comprising a ninth step in which the determination unit receives input regarding whether or not to adopt the correction process recipe.

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