Laser processing apparatus and method for determining corrected irradiation position

Abstract

To provide a laser processing device that can process a workpiece by irradiating a laser beam with high accuracy to the position where the laser beam is to be irradiated on the entire surface of the workpiece.SOLUTION: A galvano-scanner 20 varies the irradiation position on a workpiece W of a laser beam irradiated on the workpiece W. An fθ lens 30 is placed between the galvano-scanner 20 and the workpiece W, and focuses the laser beam emitted from the galvano-scanner 20 on the workpiece W. A storage unit 11 stores a correction file describing a corrected irradiation position corresponding to each ideal irradiation position at multiple ideal irradiation positions on the workpiece W. A control device 10 controls the galvano-scanner 20 so that, when the laser beam emitted from the fθ lens 30 is to be irradiated to any ideal irradiation position, the laser beam emitted from the fθ lens 30 is irradiated to the corrected irradiation position corresponding to the ideal irradiation position described in the correction file.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a laser processing apparatus and a correction irradiation position determination method.

Background Art

[0002] As described in Patent Document 1, a laser processing apparatus including a galvanometer scanner and an fθ lens is known. The laser processing apparatus described in Patent Document 1 is used for marking an object to be processed. This type of laser processing apparatus is also used for welding an object to be processed.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] As described in Patent Document 1, when a laser processing apparatus irradiates a laser beam onto an object to be processed to process the object to be processed, due to the distortion characteristics of the fθ lens, the position where the laser beam is intended to be irradiated may deviate from the position where the laser beam is actually irradiated. There is a need for the emergence of a laser processing apparatus and a correction irradiation position determination method that can irradiate the entire surface of the object to be processed with high accuracy at the position where the laser beam is intended to be irradiated and process the object to be processed.

Means for Solving the Problems

[0005] A first aspect of one or more embodiments provides a laser processing apparatus comprising: a galvanoscanner for varying the irradiation position of a laser beam irradiated onto a workpiece; an fθ lens positioned between the galvanoscanner and the workpiece for focusing the laser beam emitted from the galvanoscanner onto the workpiece; a storage unit for storing a correction file describing corrected irradiation positions corresponding to each of a plurality of ideal irradiation positions on the workpiece; and a control device for controlling the galvanoscanner to irradiate the laser beam emitted from the fθ lens to a corrected irradiation position corresponding to the ideal irradiation position described in the correction file when attempting to irradiate any of the ideal irradiation positions with the laser beam emitted from the fθ lens. The laser processing apparatus irradiates a predetermined object to be irradiated with a laser beam based on an ideal layout image in which a plurality of coordinate points are arranged in two-dimensional ideal coordinates within a two-dimensional data area corresponding to an enlarged area similar to the object to be processed, which is smaller than the circle representing the effective diameter of the fθ lens and larger than the circle circumscribing the object to be processed, within an area where the laser beam can be scanned by the galvanometer scanner, and marks the object to be irradiated with the ideal layout image. An image reader reads the object to be irradiated with the ideal layout image marked on it and generates marking image data showing a marking image consisting of a plurality of displacement coordinate points that are marked because the plurality of coordinate points constituting the ideal layout image are shifted from the ideal coordinates due to the distortion characteristics of the fθ lens.

[0006] The computer creates a lens distortion model showing the distortion characteristics based on the marking image data, creates a lens inverse distortion model for converting the lens distortion model into the ideal layout image, and generates corrected irradiation position data indicating corrected irradiation positions corresponding to the ideal irradiation positions, in a number corresponding to the resolution when the laser processing apparatus irradiates the workpiece with a laser beam, based on the lens inverse distortion model. The storage unit stores the corrected irradiation position data as the correction file.

[0007] The ideal layout image is an image in which the plurality of coordinate points are arranged at equal intervals in the first and second directions such that four points, consisting of two points adjacent in a first direction and two points adjacent in a second direction perpendicular to the first direction, are located at the vertices of a square; the marking image is an image in which each square in the ideal layout image is distorted due to the distortion characteristics; the lens distortion model includes a number of displacement coordinate points greater than the plurality of displacement coordinate points constituting the marking image; and the lens inverse distortion model includes the same number of correction coordinate points as the number of displacement coordinate points constituting the lens distortion model. The computer divides four points, consisting of two points adjacent in the first direction and two points adjacent in the second direction, at the multiple correction coordinate points constituting the lens inverse distortion model into first and second sets of three points, with two diagonally opposite points in common. The computer then determines the correction irradiation position corresponding to the magnified region by setting the correction irradiation position at the centroid of the three correction coordinate points of the first set and the centroid of the three correction coordinate points of the second set. The computer then sets the correction irradiation position corresponding to the workpiece among the correction irradiation positions corresponding to the magnified region as a number of correction irradiation positions corresponding to the ideal irradiation position, corresponding to the resolution when the laser processing apparatus irradiates the workpiece with a laser beam.

[0008] In the first embodiment of one or more embodiments, corrected irradiation position data is generated based on an ideal layout image in which a plurality of coordinate points are arranged within a two-dimensional data area corresponding to an enlarged region. Therefore, according to the first embodiment of one or more embodiments, a corrected irradiation position can be obtained that allows the laser beam to be irradiated with high precision not only at the center of the workpiece but also at the corners.

[0009] A second aspect of one or more embodiments provides the following corrective irradiation position determination method. The laser processing apparatus includes a galvanometer scanner for varying the irradiation position of a laser beam on a workpiece, and an fθ lens for focusing the laser beam emitted from the galvanometer scanner onto the workpiece. The laser processing apparatus irradiates a predetermined object to be irradiated with a laser beam based on an ideal layout image in which a plurality of coordinate points are arranged in two-dimensional ideal coordinates within a two-dimensional data area corresponding to a region where the laser beam can be scanned by the galvanometer scanner, and within a two-dimensional data area corresponding to a similar enlarged region of the workpiece that is smaller than the circle representing the effective diameter of the fθ lens and larger than the circle circumscribing the workpiece. The ideal layout image is then marked on the object to be irradiated. The image reader reads the illuminated object on which the ideal layout image is marked, and generates marking image data showing a marking image consisting of a plurality of displacement coordinate points that are marked because the plurality of coordinate points constituting the ideal layout image are shifted from the ideal coordinates due to the distortion characteristics of the fθ lens.

[0010] The computer creates a lens distortion model showing the distortion characteristics based on the marking image data, creates a lens inverse distortion model for converting the lens distortion model into the ideal layout image, and determines corrected irradiation positions corresponding to a number of ideal irradiation positions corresponding to the resolution when the laser processing apparatus irradiates the workpiece with a laser beam based on the lens inverse distortion model.

[0011] The ideal layout image is an image in which the plurality of coordinate points are arranged at equal intervals in the first and second directions such that four points, consisting of two points adjacent in a first direction and two points adjacent in a second direction perpendicular to the first direction, are located at the vertices of a square; the marking image is an image in which each square in the ideal layout image is distorted due to the distortion characteristics; the lens distortion model includes a number of displacement coordinate points greater than the plurality of displacement coordinate points constituting the marking image; and the lens inverse distortion model includes the same number of correction coordinate points as the number of displacement coordinate points constituting the lens distortion model. The computer divides four points, consisting of two points adjacent in the first direction and two points adjacent in the second direction, at a plurality of correction coordinate points constituting the lens inverse distortion model into first and second sets of three points, with two diagonally opposite points in common. By setting the correction irradiation positions at the centroids of the three correction coordinate points in the first set and the centroids of the three correction coordinate points in the second set, the computer determines the correction irradiation positions corresponding to the magnified region, and sets the correction irradiation positions corresponding to the workpiece among the correction irradiation positions corresponding to the magnified region as correction irradiation positions corresponding to a number of ideal irradiation positions corresponding to the resolution when the laser processing apparatus irradiates the workpiece with a laser beam.

[0012] In a second embodiment of one or more embodiments, corrected irradiation position data is generated based on an ideal layout image in which multiple coordinate points are arranged within a two-dimensional data area corresponding to an enlarged region. Therefore, according to a second embodiment of one or more embodiments, a corrected irradiation position can be obtained that allows the laser beam to be irradiated with high precision not only at the center of the workpiece but also at the corners. [Effects of the Invention]

[0013] According to one or more embodiments of the laser processing apparatus and corrective irradiation position determination method, the laser beam can be precisely irradiated to the desired position across the entire surface of the workpiece, thereby processing the workpiece. [Brief explanation of the drawing]

[0014] [Figure 1]FIG. 1 is a diagram showing a laser processing apparatus according to one or more embodiments. [Figure 2] FIG. 2 is a diagram showing the relationship between the two-dimensional size of the object to be processed and the area of the marking pattern. [Figure 3] FIG. 3 is a diagram showing an example of an ideal layout image. [Figure 4A] FIG. 4A is a conceptual diagram showing an ideal layout image. [Figure 4B] FIG. 4B is a conceptual diagram showing a marking image in which a plurality of coordinate points constituting the ideal layout image shown in FIG. 4A are marked on the irradiated object. [Figure 4C] FIG. 4C is a conceptual diagram showing a lens distortion model created based on the marking image shown in FIG. 4B. [Figure 5A] FIG. 5A is a conceptual diagram showing an ideal layout image in which the distortion of the lens distortion model shown in FIG. 4C is removed. [Figure 5B] FIG. 5B is a conceptual diagram showing an inverse distortion model for converting the lens distortion model shown in FIG. 4C into the ideal layout image shown in FIG. 5A. [Figure 5C] FIG. 6 is a conceptual diagram showing the relationship between the coordinate points of the lens inverse distortion model shown in FIG. 5B and the coordinate points of the corrected irradiation position data shown in FIG. 5C. [Figure 6] FIG. 6 is a conceptual diagram showing the relationship between the coordinate points of the lens inverse distortion model shown in FIG. 5B and the coordinate points of the corrected irradiation position data shown in FIG. 5C.

MODE FOR CARRYING OUT THE INVENTION

[0015] A laser processing apparatus according to one or more embodiments includes a galvanometer scanner for varying the irradiation position of a laser beam on a workpiece; an fθ lens positioned between the galvanometer scanner and the workpiece to focus the laser beam emitted from the galvanometer scanner onto the workpiece; a storage unit for storing a correction file that describes corrected irradiation positions corresponding to each of a plurality of ideal irradiation positions on the workpiece; and a control device that controls the galvanometer scanner to irradiate the laser beam emitted from the fθ lens to a corrected irradiation position corresponding to the ideal irradiation position described in the correction file when attempting to irradiate any of the ideal irradiation positions with the laser beam emitted from the fθ lens.

[0016] The laser processing apparatus irradiates a predetermined object to be irradiated with a laser beam based on an ideal layout image in which a plurality of coordinate points are arranged in two-dimensional ideal coordinates within a two-dimensional data area corresponding to an enlarged area similar to the object to be processed, which is smaller than the circle indicating the effective diameter of the fθ lens and larger than the circle circumscribing the object to be processed, within the area in which the laser beam can be scanned by the galvanoscanner, and marks the object to be irradiated with the ideal layout image.

[0017] The image reader reads the illuminated object on which the ideal layout image is marked, and generates marking image data showing a marking image consisting of a plurality of displacement coordinate points that are marked because the plurality of coordinate points constituting the ideal layout image are shifted from the ideal coordinates due to the distortion characteristics of the fθ lens.

[0018] The computer creates a lens distortion model showing the distortion characteristics based on the marking image data, creates a lens inverse distortion model for converting the lens distortion model into the ideal layout image, and generates corrected irradiation position data indicating corrected irradiation positions corresponding to the ideal irradiation positions, in a number corresponding to the resolution when the laser processing apparatus irradiates the workpiece with a laser beam, based on the lens inverse distortion model. The storage unit stores the corrected irradiation position data as the correction file.

[0019] A method for determining a corrected irradiation position according to one or more embodiments determines the corrected irradiation position as follows: The laser processing apparatus includes a galvanometer scanner for varying the irradiation position of a laser beam on a workpiece, and an fθ lens for focusing the laser beam emitted from the galvanometer scanner onto the workpiece. The laser processing apparatus irradiates a predetermined object to be irradiated with a laser beam based on an ideal layout image in which a plurality of coordinate points are arranged in two-dimensional ideal coordinates within a two-dimensional data area corresponding to a region where the laser beam can be scanned by the galvanometer scanner, and within a two-dimensional data area corresponding to an enlarged region similar to the workpiece, which is smaller than the circle indicating the effective diameter of the fθ lens and larger than the circle circumscribing the workpiece, thereby marking the object to be irradiated with the ideal layout image.

[0020] The image reader reads the illuminated object on which the ideal layout image is marked, and generates marking image data showing a marking image consisting of a plurality of displacement coordinate points that are marked because the plurality of coordinate points constituting the ideal layout image are shifted from the ideal coordinates due to the distortion characteristics of the fθ lens.

[0021] The computer creates a lens distortion model showing the distortion characteristics based on the marking image data, creates a lens inverse distortion model for converting the lens distortion model into the ideal layout image, and determines corrected irradiation positions corresponding to a number of ideal irradiation positions corresponding to the resolution when the laser processing apparatus irradiates the workpiece with a laser beam based on the lens inverse distortion model.

[0022] Hereinafter, a laser processing apparatus and a method for determining the corrected irradiation position according to one or more embodiments will be specifically described with reference to the attached drawings. Figure 1 shows a laser processing apparatus 100 according to one or more embodiments. In Figure 1, the laser processing apparatus 100 includes a control device 10, a storage unit 11, a laser oscillator 12, a galvanometer scanner 20, and an fθ lens 30. The galvanometer scanner 20 includes galvanometer mirrors 21 and 23, and drive units 22 and 24 that rotate the galvanometer mirrors 21 and 23, respectively, to a predetermined angle. The drive units 22 and 24 can be configured by motors.

[0023] The laser oscillator 12 is, for example, a fiber laser oscillator that emits a laser beam with a wavelength of 1060 nm to 1080 nm. The laser beam emitted from the laser oscillator 12 and incident on the galvanometer mirror 21 is reflected by the galvanometer mirror 21 and incident on the galvanometer mirror 23, and is reflected by the galvanometer mirror 23 and incident on the fθ lens 30. The fθ lens 30 focuses the incident laser beam and irradiates it onto the workpiece W. The fθ lens 30 causes the laser beam to be incident perpendicular to the surface of the workpiece W. The workpiece W can be various parts or sheet metal, etc.

[0024] The laser oscillator 12 may be a fiber laser oscillator, disk laser oscillator, YAG laser oscillator, slab laser oscillator, direct diode laser oscillator (DDL oscillator), VCSEL (Vertical Cavity Surface Emitting Laser), PCSEL (Photonic-Crystal Surface-Emitting Laser), etc. Furthermore, the wavelength band of the laser beam may be in the 1 μm band (such as 1060 nm to 1080 nm), the 2 μm band, the 400 nm to 550 nm band (such as a blue or green laser), or the 10 μm band (such as a slab carbon dioxide laser). Additionally, a laser beam combining multiple wavelength bands may be used.

[0025] The control device 10 controls the oscillation of the laser beam by the laser oscillator 12. The control device 10 controls the drive units 22 and 24 to vary the irradiation position of the laser beam on the workpiece W that is irradiated onto the workpiece W. The fθ lens 30 is positioned between the galvanometer scanner 20 and the workpiece W. The fθ lens 30 may be mounted on a scanner head (not shown) that houses the galvanometer scanner 20.

[0026] The fθ lens 30 is incident on a laser beam having various angles, which is scanned by the galvanometer scanner 20 with respect to the zero-angle optical axis passing through the center of the lens. The fθ lens 30 focuses these incident laser beams, each with various angles, onto a single plane. It is known that when a laser beam is incident on the fθ lens 30 at a position away from the optical axis at the lens center, the direction in which the laser beam emitted from the fθ lens 30 travels is not parallel to the optical axis. The distortion characteristics of the fθ lens 30 may include the characteristic that laser beams incident on the fθ lens 30 at various angles are emitted in a direction non-parallel to the optical axis.

[0027] When the laser processing device 100 processes a workpiece W by irradiating it with a laser beam, the position where the laser beam is intended to irradiate and the position where the laser beam is actually irradiated are misaligned due to the distortion characteristics of the fθ lens 30. The memory unit 11 stores a correction file that describes the corrected irradiation positions corresponding to each of several ideal irradiation positions on the workpiece W.

[0028] When the control device 10 attempts to irradiate the laser beam emitted from the fθ lens 30 to any ideal irradiation position, it controls the galvanoscanner 20 to irradiate the laser beam emitted from the fθ lens 30 to a corrected irradiation position corresponding to the ideal irradiation position described in the correction file.

[0029] The following explains how to generate the correction file in detail. Figure 2 shows the relationship between the two-dimensional size of the workpiece W and the area of ​​the marking pattern. Here, the workpiece W is assumed to be a square. The planar size of the workpiece W is area ArW. The area on the workpiece W irradiated by the laser beam from the laser processing device 100 is at most area ArW. Circle Ce30 is the effective diameter of the fθ lens 30. Circle Cw30, which is circumscribing area ArW, is the diameter of the fθ lens 30 used when irradiating area ArW with the laser beam. The galvanometer scanner 20 can scan the laser beam within the square area Ar20.

[0030] In one or more embodiments, the size of the ideal layout image, including the marking pattern, is defined as a two-dimensional data region within the region Ar20, where the laser beam can be scanned by the galvanoscanner 20, that corresponds to an enlarged region ArMp similar to the workpiece W, which is smaller than the circle Ce30 indicating the effective diameter of the fθ lens and larger than the circle Cw30 circumscribing the workpiece W. Figure 3 shows an example of an ideal layout image. The ideal layout image shown in Figure 3 is an image in which circles are placed at the intersections of a grid that is equally spaced in a first direction and a second direction orthogonal to the first direction.

[0031] Figure 4A conceptually shows an ideal layout image in which multiple coordinate points are arranged in a two-dimensional ideal coordinate system. Based on the ideal layout image, the laser processing apparatus 100 irradiates a predetermined object to be irradiated with a laser beam to mark the object with the ideal layout image. While aluminum-coated glass is preferred as the object to be irradiated, the object is not limited to aluminum-coated glass and only needs to have the ideal layout image marked on it.

[0032] Figure 4B conceptually shows a state in which multiple coordinate points constituting an ideal layout image are marked on the irradiated object. The marking image shown in Figure 4B consists of multiple displacement coordinate points, where the multiple coordinate points constituting the ideal layout image are deviated from the ideal coordinates due to the distortion characteristics of the fθ lens 30. An image reader (not shown), such as an optical scanner, reads the marking image consisting of multiple displacement coordinate points marked on the irradiated object and generates marking image data showing the marking image.

[0033] A computer (not shown) creates a lens distortion model that shows the distortion characteristics of the fθ lens 30 based on the marking image data generated by the image reader. Figure 4C conceptually shows the lens distortion model. The computer can be a general-purpose personal computer. The computer can create the lens distortion model by multiple regression analysis using the least squares method based on the marking image data shown in Figure 4B. In Figure 4C, the lens distortion model is represented by straight lines and curves, but in reality, it consists of many more coordinate points than the displacement coordinate points of the marking image shown in Figure 4B.

[0034] Figure 5A conceptually shows an ideal layout image with the distortion of the lens distortion model shown in Figure 4C removed. The computer creates the inverse lens distortion model shown in Figure 5B in order to convert the lens distortion model shown in Figure 4C into the ideal layout image shown in Figure 5A. Similar to Figure 4C, the inverse lens distortion model in Figure 5B is represented by straight lines and curves, but in reality, it consists of the same number of coordinate points as the multiple coordinate points that make up the lens distortion model shown in Figure 4C. The multiple coordinate points that make up the inverse lens distortion model shown in Figure 5B are the multiple coordinate points that correspond to the enlarged region ArMp.

[0035] The computer determines the corrected irradiation position corresponding to the magnified region ArMp as shown in Figure 5C, based on the lens inverse distortion model shown in Figure 5B. The computer sets the corrected irradiation position corresponding to the workpiece W (region ArW) among the corrected irradiation positions corresponding to the magnified region ArMp as a corrected irradiation position corresponding to a number of ideal irradiation positions corresponding to the resolution when the laser processing device 100 irradiates the workpiece W with a laser beam.

[0036] The computer extracts the central corrected irradiation position corresponding to region ArW from the corrected irradiation positions corresponding to the entire expanded region ArMp shown in Figure 5C, and generates corrected irradiation position data for region ArW. The storage unit 11 stores the corrected irradiation position data generated as described above as a correction file.

[0037] According to the laser processing apparatus 100 and the corrected irradiation position determination method performed by the laser processing apparatus 100 described above, a corrected irradiation position can be obtained that allows the laser beam to be irradiated with high precision not only in the center of the region ArW (workpiece W) but also at the four corners. Therefore, according to the laser processing apparatus 100 and the corrected irradiation position determination method performed by the laser processing apparatus 100, the workpiece can be processed by irradiating the entire surface of the workpiece with high precision to the position where the laser beam is to be irradiated.

[0038] The ideal layout image is an image in which multiple coordinate points are arranged at equal intervals in the first and second directions such that four points—two points adjacent in a first direction and two points adjacent in a second direction perpendicular to the first direction—are located at the vertices of a square. The marking image is an image in which each square in the ideal layout image is distorted due to the distortion characteristics of the fθ lens 30. The lens distortion model includes more displacement coordinate points than the number of displacement coordinate points that make up the marking image. The lens inverse distortion model includes the same number of correction coordinate points as the number of displacement coordinate points that make up the lens distortion model.

[0039] The computer divides four points, each consisting of two points adjacent in a first direction and two points adjacent in a second direction, from the multiple correction coordinate points that constitute the lens inverse distortion model, into two sets of three points, with two diagonally opposite points in common. Figure 6 conceptually shows the relationship between the coordinate points of the lens inverse distortion model shown in Figure 5B and the coordinate points of the corrected irradiation position data shown in Figure 5C. In Figure 6, the white circles are the coordinate points of the lens inverse distortion model shown in Figure 5B, and the black circles are the coordinate points of the corrected irradiation position shown in Figure 5C.

[0040] The computer uses four correction coordinate points B11, B12, B21, and B22 in the lens inverse distortion model, and divides these four points into a first set of three points (correction coordinate points B11, B21, B22) and a second set of three points (correction coordinate points B11, B12, B22), with the two diagonally opposite correction coordinate points B11 and B22 being common. The computer preferably sets the corrected illumination position at coordinate point C11, which is the position of the centroid of the three correction coordinate points in the first set, and at coordinate point C12, which is the position of the centroid of the three correction coordinate points in the second set.

[0041] Preferably, the computer sets the corrected irradiation position at coordinate point C13, which is the position of the centroid of the first set of three corrected coordinate points B12, B22, and B23, and sets the corrected irradiation position at coordinate point C14, which is the position of the centroid of the second set of three corrected coordinate points B12, B13, and B23. Preferably, the computer sets the corrected irradiation position at coordinate point C15, which is the position of the centroid of the first set of three corrected coordinate points B13, B23, and B24, and sets the corrected irradiation position at coordinate point C16, which is the position of the centroid of the second set of three corrected coordinate points B13, B14, and B24.

[0042] The computer sets the corrected irradiation position in this way, so the three corrected coordinate points B21, B31, and B32, and the coordinate points C21 and C22, which are the positions of the centroids of the three corrected coordinate points B21, B22, and B32, are set as the corrected irradiation position. The three corrected coordinate points B22, B32, and B33, the three corrected coordinate points B22, B23, and B33, the three corrected coordinate points B23, B33, and B34, and the coordinate points C23 to C26, which are the positions of the centroids of the three corrected coordinate points B23, B24, and B34, are set as the corrected irradiation position.

[0043] When the corrected irradiation position is determined based on the lens inverse distortion model shown in Figure 5B, as shown in Figure 6, the correction of the irradiation position is less likely to be discontinuous between two adjacent pairs of three points at each of the four points in the lens inverse distortion model. Therefore, as described above, it is preferable to determine the corrected irradiation position based on the positions of the centroids of three of the four points in the lens inverse distortion model.

[0044] The present invention is not limited to the one or more embodiments described above, and can be modified in various ways without departing from the spirit of the invention. [Explanation of Symbols]

[0045] 10 Control device 11 Storage section 12. Laser Oscillator 20 Galvanometer Scanners 21,23 Galvano Mirror 22,24 Drive unit 30 fθ lens 100 Laser Processing Equipment W - Object to be processed

Claims

1. A galvanometer scanner for varying the irradiation position of the laser beam irradiated onto the workpiece, An fθ lens is positioned between the galvanoscanner and the workpiece, and focuses the laser beam emitted from the galvanoscanner onto the workpiece. A storage unit that stores a correction file describing a correction irradiation position corresponding to each ideal irradiation position at a plurality of ideal irradiation positions on the workpiece, A control device that controls the galvanoscanner to direct the laser beam emitted from the fθ lens to a corrected irradiation position corresponding to the ideal irradiation position described in the correction file when attempting to irradiate any ideal irradiation position with the laser beam emitted from the fθ lens, A laser processing device equipped with, The laser processing apparatus irradiates a predetermined object to be irradiated with a laser beam based on an ideal layout image in which a plurality of coordinate points are arranged in two-dimensional ideal coordinates within a two-dimensional data area corresponding to a similar enlarged area of ​​the object to be processed, which is smaller than the circle representing the effective diameter of the fθ lens and larger than the circle circumscribing the object to be processed, within the area in which the laser beam can be scanned by the galvanoscanner, and marks the object to be irradiated with the ideal layout image. The image reader reads the irradiated object on which the ideal layout image is marked, and generates marking image data showing a marking image consisting of a plurality of displacement coordinate points that are marked because the plurality of coordinate points constituting the ideal layout image are shifted from the ideal coordinates due to the distortion characteristics of the fθ lens. The computer, Based on the marking image data, a lens distortion model showing the distortion characteristics is created. A lens inverse distortion model is created to convert the aforementioned lens distortion model into the ideal layout image. Based on the lens inverse distortion model, the laser processing apparatus generates corrected irradiation position data indicating a number of corrected irradiation positions corresponding to the ideal irradiation position, corresponding to the resolution when the laser beam is irradiated onto the workpiece. The storage unit stores the corrected irradiation position data as the correction file. The aforementioned ideal layout image is an image in which the plurality of coordinate points are arranged at equal intervals in the first and second directions such that four points, consisting of two points adjacent in the first direction and two points adjacent in the second direction perpendicular to the first direction, are located at the vertices of a square. The marking image is an image in which each square in the ideal layout image is distorted due to the distortion characteristics. The lens distortion model includes a number of displacement coordinate points greater than the number of displacement coordinate points that constitute the marking image, The lens inverse distortion model includes the same number of correction coordinate points as the number of displacement coordinate points that constitute the lens distortion model, The aforementioned computer is The four points consisting of two points adjacent in the first direction and two points adjacent in the second direction at the multiple correction coordinate points constituting the lens inverse distortion model are divided into first and second sets of three points with two points in the diagonal direction as common. By setting the corrected irradiation position at the centroid position of the first set of three corrected coordinate points and the centroid position of the second set of three corrected coordinate points, the corrected irradiation position corresponding to the enlarged region is determined. The corrected irradiation position corresponding to the workpiece among the corrected irradiation positions corresponding to the enlarged region is set as a number of corrected irradiation positions corresponding to the ideal irradiation position, corresponding to the resolution when the laser processing apparatus irradiates the workpiece with a laser beam. Laser processing equipment.

2. A laser processing apparatus comprising a galvanometer scanner for varying the irradiation position of a laser beam on a workpiece, and an fθ lens for focusing the laser beam emitted from the galvanometer scanner onto the workpiece, irradiates a predetermined object to be irradiated with a laser beam based on an ideal layout image in which a plurality of coordinate points are arranged in two-dimensional ideal coordinates within a two-dimensional data area corresponding to the area in which the laser beam can be scanned by the galvanometer scanner, and within a two-dimensional data area corresponding to an enlarged area similar to the workpiece, which is smaller than the circle representing the effective diameter of the fθ lens and larger than the circle circumscribing the workpiece, thereby marking the irradiated object with the ideal layout image. The image reader reads the irradiated object on which the ideal layout image is marked, and generates marking image data showing a marking image consisting of a plurality of displacement coordinate points that are marked because the plurality of coordinate points constituting the ideal layout image are shifted from the ideal coordinates due to the distortion characteristics of the fθ lens. The computer, Based on the marking image data, a lens distortion model showing the distortion characteristics is created. A lens inverse distortion model is created to convert the aforementioned lens distortion model into the ideal layout image. Based on the lens inverse distortion model, corrected irradiation positions corresponding to a number of ideal irradiation positions corresponding to the resolution when the laser processing apparatus irradiates the workpiece with a laser beam are determined. The aforementioned ideal layout image is an image in which the plurality of coordinate points are arranged at equal intervals in the first and second directions such that four points, consisting of two points adjacent in the first direction and two points adjacent in the second direction perpendicular to the first direction, are located at the vertices of a square. The marking image is an image in which each square in the ideal layout image is distorted due to the distortion characteristics. The lens distortion model includes a number of displacement coordinate points greater than the number of displacement coordinate points that constitute the marking image, The lens inverse distortion model includes the same number of correction coordinate points as the number of displacement coordinate points that constitute the lens distortion model, The aforementioned computer, The four points consisting of two points adjacent in the first direction and two points adjacent in the second direction at the multiple correction coordinate points constituting the lens inverse distortion model are divided into first and second sets of three points with two points in the diagonal direction as common. By setting the corrected irradiation position at the centroid position of the three corrected coordinate points of the first set and the centroid position of the three corrected coordinate points of the second set, the corrected irradiation position corresponding to the enlarged area is determined. The corrected irradiation position corresponding to the workpiece among the corrected irradiation positions corresponding to the enlarged region is set as a number of corrected irradiation positions corresponding to the ideal irradiation position, corresponding to the resolution when the laser processing apparatus irradiates the workpiece with a laser beam. Correction irradiation position determination method.

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