Motor control device, positioning device, and motor control method

Abstract

A motor control device (110) comprises: a moving body position command generation unit (4) that generates a moving body position command; a motor position acquisition unit (5) that acquires a motor position detection value; a frame vibration estimation unit (7) that calculates a frame vibration estimation value on the basis of thrust generated by the motor and a frame weight estimation value; a vibration error correction signal computation unit (8) that, on the basis of the frame vibration estimation value, calculates a vibration error correction signal for suppressing any error caused by the vibration of a device frame included in the relative position of the moving body with respect to a target position; a motor drive control unit (6) that generates a motor thrust command on the basis of the moving body position command, the motor position detection value, and the vibration error correction signal; a relative position acquisition unit (11) that acquires a moving body relative position detection value from an image captured by a camera for imaging the target position; a frame vibration calculation unit (12) that calculates a frame vibration calculation value from the moving body relative position detection value; and a frame weight estimation unit (15) that calculates the frame weight estimation value from the frame vibration calculation value and the thrust generated by the motor.

Description

Technical Field

[0001] The present disclosure relates to a motor control device, a positioning device, and a motor control method for positioning a moving body with respect to a target position.

Background Art

[0002] There is known a motor control device that positions a moving body connected to a motor with respect to a target position by controlling the thrust generated by the motor. For example, such a motor control device is used in the field of manufacturing electronic substrates and semiconductors, and is mounted on manufacturing devices such as chip mounters and chip bonders that mount electronic components, IC (Integrated Circuit) chips, etc. on a substrate. In this case, the moving body is a mounting head provided with a suction nozzle that holds and transports an object on which an electronic component, an IC chip, etc. are mounted. The mounting head moves by a combination of a rotary motor and a linear motion mechanism or a linear motor mechanism, and performs positioning of the moving body by performing feedback control based on a value detected by an encoder that detects the rotational position of the motor or the position of the linear motor mover. That is, it does not directly detect and perform feedback control on whether the suction nozzle or the object to be mounted is actually positioned at the target position on the substrate.

[0003]

[0004] ​In recent years, the miniaturization of electronic components and IC chips has progressed, requiring higher precision in positioning. Furthermore, to improve productivity, it is necessary to shorten the time it takes to pick up and release electronic components and IC chips, requiring the mounting head to move at high speed, high acceleration, or high deceleration. When the mounting head moves at high acceleration or high deceleration, the equipment stand on which the mounting head and substrate are mounted is excited, and this vibration can cause vibrational errors between the moving object and the target position on the substrate. If vibration occurs in the equipment stand, positioning errors of the moving object may occur.

[0005] Patent Document 1 discloses a technique for correcting positioning errors of a moving object by processing images captured by a camera, calculating the target position within the captured image, and moving the moving object based on the estimated current target position, which is obtained by compensating for delays associated with shooting and image processing. Patent Document 1 further discloses a method for correcting errors caused by mount vibration by estimating the current target position using a mount vibration model. [Prior art documents] [Patent Documents]

[0006] [Patent Document 1] Japanese Patent Publication No. 2015-213139 [Overview of the project] [Problems that the invention aims to solve]

[0007] However, the conventional technology described above has a problem in that the parameters used in the mount vibration model are not set appropriately, and positioning errors due to vibration of the equipment mount may not be sufficiently suppressed. The mount vibration model used in the conventional technology described above uses parameters such as the mass of the movable parts. In ideal cases, these parameters can be calculated from the equipment design data, but in actual equipment, the characteristics often do not match the design, and even if parameters calculated from the equipment design data are used, there is a high possibility that the vibration of the equipment mount cannot be accurately estimated.

[0008] This disclosure has been made in view of the above, and aims to provide a motor control device that can suppress positioning errors caused by vibrations of the device frame. [Means for solving the problem]

[0009] To solve the above-mentioned problems and achieve the objective, the motor control device of the present disclosure is a motor control device that stops a moving body, which is movably installed on a device frame, at a predetermined position relative to a target position by controlling the thrust generated by a motor mechanically connected to the moving body based on a motor thrust command, and comprises: a moving body position command generation unit that generates a moving body position command for stopping the moving body at a predetermined position relative to the target position; a motor position acquisition unit that acquires a motor position detection value which is a time waveform of the motor's position coordinates; a frame vibration estimation unit that calculates a frame vibration estimation value which estimates the vibration of the device frame based on the thrust generated by the motor and a frame weight estimation value which estimates the weight of the device frame; a vibration error correction signal calculation unit that calculates a vibration error correction signal to suppress errors caused by vibrations of the device frame included in the relative position of the moving body with respect to the target position based on the frame vibration estimation value; and a motor drive control unit that generates a motor thrust command based on the moving body position command, the motor position detection value and the vibration error correction signal. Furthermore, the motor control device includes a relative position acquisition unit that acquires a moving body relative position detection value, which is a time waveform of the position coordinates of the moving body relative to the target position, from an image captured by a camera that photographs the target position; a frame vibration calculation unit that calculates a frame vibration calculation value from the moving body relative position detection value; and a frame weight estimation unit that calculates a frame weight estimate value by estimating the weight of the device frame from the frame vibration calculation value and the thrust generated by the motor, wherein the frame vibration estimation unit calculates the frame vibration estimate value using the frame weight estimate value estimated by the frame weight estimation unit. [Effects of the Invention]

[0010] According to this disclosure, it is possible to suppress positioning errors caused by vibrations of the device frame. [Brief explanation of the drawing]

[0011] [Figure 1] Diagram showing the configuration of the positioning device according to Embodiment 1. [Figure 2] A diagram illustrating an example of how the equipment stand vibrates. [Figure 3]A flowchart illustrating the operation by which the motor control device according to Embodiment 1 controls the motor. [Figure 4] A flowchart illustrating the operation of the motor control device according to Embodiment 1 in updating the parameters used for estimating frame vibration. [Figure 5] Diagram showing dedicated hardware for implementing the functions of a motor control device. [Figure 6] Diagram showing the configuration of the control circuit for realizing the function of a motor control device. [Figure 7] Diagram showing the configuration of the positioning device according to Embodiment 2. [Figure 8] A flowchart illustrating the operation of the motor control device according to Embodiment 2 in updating the parameters used for estimating frame vibration. [Figure 9] Diagram showing the configuration of the positioning device according to Embodiment 3. [Figure 10] Figure 9 shows a detailed configuration of the frame vibration estimation unit. [Figure 11] This figure shows the configuration of the positioning device according to Embodiment 4. [Modes for carrying out the invention]

[0012] The motor control device, positioning device, and motor control method according to embodiments of this disclosure will be described in detail below with reference to the drawings.

[0013] Embodiment 1. Figure 1 shows the configuration of a positioning device 100 according to Embodiment 1. The positioning device 100 includes a motor 1 installed on a device frame 2, the device frame 2, and a movable body 3 mechanically connected to the motor 1. The movable body 3 is movable relative to the device frame 2 by the thrust generated by the motor 1. For example, the movable body 3 is attached to the upper part of the device frame 2 and is movable in the space above the work surface on the device frame 2. A target position 9 is provided on the work surface, and the movable body 3 is controlled so that its relative position to the target position 9 is a predetermined position. The positioning device 100 also has a camera 10 that photographs the target position 9. The camera 10 is fixed to the movable body 3 and its position changes as the movable body 3 moves. In Embodiment 1, the image captured by the camera 10 includes the target position 9 even when the camera 10 moves.

[0014] The positioning device 100 is mounted, for example, on manufacturing equipment used to manufacture electronic circuit boards, semiconductors, etc. When the positioning device 100 is mounted on manufacturing equipment for electronic circuit boards, semiconductors, etc., the moving body 3 is equipped with means for performing predetermined tasks, for example, and can move to the target position 9 and then perform tasks at the stopping position. For example, the moving body 3 may be a mounting head equipped with means for gripping objects such as a suction nozzle. If the moving body 3 is a mounting head, the moving body 3 moves across the circuit board while gripping objects such as electronic components and IC chips using the suction nozzle, and when it stops at the target position 9 provided on the circuit board, it releases the gripped object, thereby mounting the electronic components and IC chips onto the circuit board.

[0015] The positioning device 100 further includes a motor control device 110 that controls the motor 1. The motor control device 110 controls the thrust generated by the motor 1 based on a motor thrust command. The motor control device 110 includes a moving body position command generation unit 4, a motor position acquisition unit 5, a motor drive control unit 6, a gantry vibration estimation unit 7, a vibration error correction signal calculation unit 8, a relative position acquisition unit 11, a gantry vibration calculation unit 12, a gantry vibration characteristic setting unit 13, an estimation switching unit 14, a gantry weight estimation unit 15, a gantry vibration frequency estimation unit 16, and a gantry vibration attenuation coefficient estimation unit 17.

[0016] The moving body position command generation unit 4 generates a moving body position command for stopping the moving body 3 at a predetermined position with respect to the target position 9. The moving body position command generation unit 4 outputs the generated moving body position command to the motor drive control unit 6. The moving body position command may be for the moving body 3 to stop directly above the target position 9, or may be for the moving body 3 to stop at a position where a predetermined operation can be performed with respect to the target position 9. For example, when the moving body 3 is a mounting head, the moving body position command may be for stopping the moving body 3 at a predetermined position with respect to the target position 9 such that the position of the suction nozzle of the moving body 3 overlaps with the target position 9 so that the moving body 3 can mount an object such as an electronic component at the target position 9.

[0017] The motor position acquisition unit 5 acquires a motor position detection value that is a time waveform of the position coordinates of the motor 1. The motor position acquisition unit 5 outputs the acquired motor position detection value to each of the motor drive control unit 6 and the gantry vibration calculation unit 12.

[0018] The motor drive control unit 6 generates a motor thrust command based on the moving body position command output by the moving body position command generation unit 4, the motor position detection value output by the motor position acquisition unit 5, and the vibration error correction signal output by the vibration error correction signal calculation unit 8 described later. The motor drive control unit 6 can control the thrust generated by the motor 1 by outputting the motor thrust command to the motor 1. When the motor 1 generates thrust according to the motor thrust command, the moving body 3 moves.

[0019] The frame vibration estimation unit 7 calculates a frame vibration estimation waveform, which estimates the frame vibration occurring in the device frame 2, based on the motor thrust command indicating the thrust generated by the motor 1 and the parameters set by the frame vibration characteristic setting unit 13. The frame vibration estimation unit 7 outputs the calculated frame vibration estimation waveform as a frame vibration estimation value to the vibration error correction signal calculation unit 8.

[0020] The vibration error correction signal calculation unit 8 calculates a vibration error correction signal from the frame vibration estimation value output by the frame vibration estimation unit 7 to suppress errors in the position of the moving body 3 caused by vibrations of the device frame 2. The vibration error correction signal calculation unit 8 outputs the calculated vibration error correction signal to the motor drive control unit 6.

[0021] As described above, the motor control device 110 controls the operation of the mobile body 3 to position itself relative to the target position 9 based on the mobile body position command generated by the mobile body position command generation unit 4. At this time, if disturbances such as friction occur, or if there is an error between the thrust of the motor 1 that moves the mobile body 3 and the motor thrust command output from the motor drive control unit 6, the mobile body 3 will have a positioning error relative to the target position 9. Therefore, the motor drive control unit 6 operates the motor 1 to position the mobile body 3 relative to the target position 9 by sequentially changing the motor thrust command based on the motor position detection value, which is the detected position value of the motor 1 acquired by the motor position acquisition unit 5. However, when the motor 1 and the mobile body 3 repeatedly accelerate and decelerate, the reaction force is transmitted to the device frame 2, which may cause the device frame 2 to vibrate.

[0022] Figure 2 shows an example of how the device frame 2 vibrates. In Figure 2, the device frame 2 is shown to be rocking and vibrating, rotating around its lower center, due to the reaction forces associated with the acceleration and deceleration of the motor 1 and the mobile body 3. When the device frame 2 vibrates, the motor 1, the mobile body 3, and the target position 9 installed on the device frame 2 also vibrate in conjunction with the vibration of the device frame 2.

[0023] As shown in FIG. 2, when the apparatus pedestal 2 is vibrating, if the vibration waveform of the moving body 3 is Ah(t)×sin(ωt+φ) and the vibration waveform of the target position 9 is Ao(t)×sin(ωt+φ), the relationship between the vibration waveform of the moving body 3 and the vibration waveform of the target position 9 is expressed as R×Ah(t)×sin(ωt+φ)=Ao(t)×sin(ωt+φ) using a coefficient R (0<R≦1). That is, due to the vibration of the apparatus pedestal 2, a vibration waveform of (1-R)Ah(t)×sin(ωt+φ) occurs as a relative error between the moving body 3 and the target position 9.

[0024] The vibration of the apparatus pedestal 2 that causes the above relative error is due to the acceleration and deceleration of the motor 1 and the moving body 3. Therefore, the above pedestal vibration estimation unit 7 can calculate the vibration waveform of the apparatus pedestal 2 from the motor thrust command. Specifically, when the estimated value of the weight of the apparatus pedestal 2 is m (pedestal weight estimated value), the estimated value of the vibration frequency of the apparatus pedestal 2 is ω (pedestal vibration frequency estimated value), and the estimated value of the vibration damping coefficient of the apparatus pedestal 2 is ζ (pedestal vibration damping coefficient estimated value), the pedestal vibration estimation unit 7 can calculate the vibration waveform of the apparatus pedestal 2 using the equation of motion shown in the following mathematical formula group (1).

[0025]

Equation

[0026] The pedestal vibration estimation unit 7 outputs a waveform (1-R)Ah(t)×sin(ωt+φ) obtained by multiplying the estimated vibration waveform of the apparatus pedestal 2 by (1-R) to the vibration error correction signal calculation unit 8 as the pedestal vibration estimated value.

[0027] The vibration error correction signal calculation unit 8 calculates a vibration error correction signal so as to move the motor 1 and the moving body 3 with a waveform (-1)×(1-R)Ah(t)×sin(ωt+φ) obtained by inverting the waveform output by the pedestal vibration estimation unit 7. Thereby, the vibration of (1-R)Ah(t)×sin(ωt+φ) that occurs as a relative error between the moving body 3 and the target position 9 due to the vibration of the apparatus pedestal 2 can be canceled, and the error can be suppressed.

[0028] Here, if the estimated frame weight m, estimated frame vibration frequency ω, and estimated frame vibration damping coefficient ζ used by the frame vibration estimation unit 7 differ from the actual characteristics of the device frame 2, the estimation accuracy of the frame vibration will decrease, making it difficult to suppress the relative error that occurs between the moving body 3 and the target position 9. Therefore, the motor control device 110 has a function to update the estimated frame weight m, estimated frame vibration frequency ω, and estimated frame vibration damping coefficient ζ used by the frame vibration estimation unit 7 using the detected relative position of the moving body 3 that has actually been detected.

[0029] The relative position acquisition unit 11 acquires images captured by the camera 10, detects the position of the target position 9 within the captured images, and acquires a relative position detection value for the moving body as the position of the moving body 3 relative to the target position 9. The relative position acquisition unit 11 outputs the acquired relative position detection value for the moving body to the frame vibration calculation unit 12.

[0030] The frame vibration calculation unit 12 calculates the vibration waveform of the vibration occurring in the device frame 2 based on the motor position detection value output by the motor position acquisition unit 5 and the moving body relative position detection value output by the relative position acquisition unit 11. The frame vibration calculation unit 12 outputs the calculated vibration waveform as the frame vibration calculation value to the frame weight estimation unit 15, the frame vibration frequency estimation unit 16, and the frame vibration damping coefficient estimation unit 17, respectively. Since the motor position detection value indicates the positions of the motor 1 and the moving body 3 relative to the top of the device frame 2, the frame vibration calculation unit 12 can obtain the remaining movement amount Er of the moving body 3 relative to the target position 9 from the motor position detection value. In addition, since the moving body relative position detection value is calculated from the image captured by the camera 10 installed on the moving body 3, its value is the sum of the remaining movement amount Er and the vibration waveform of (1-R)Ah×sin(ωt+φ) that occurs as a relative error between the moving body 3 and the target position 9. Therefore, the frame vibration calculation unit 12 can calculate a vibration waveform of (1-R)Ah(t)×sin(ωt+φ), which is the relative error that occurs between the moving body 3 and the target position 9 due to vibration of the device frame 2, from the moving body relative position detection value and the motor position detection value, and output the calculated vibration waveform as the frame vibration calculation value. However, the frame vibration calculation value has a large delay due to the image processing required to calculate the moving body relative position detection value, and cannot be used to generate a vibration error correction signal.

[0031] The frame vibration characteristic setting unit 13 stores the estimated frame weight m, estimated frame vibration frequency ω, and estimated frame vibration damping coefficient ζ estimated by the frame weight estimation unit 15, frame vibration frequency estimation unit 16, and frame vibration damping coefficient estimation unit 17, which will be described later, and sets them as parameters to be used by the frame vibration estimation unit 7.

[0032] The estimation switching unit 14 determines the period during which each of the base weight estimation unit 15, base vibration frequency estimation unit 16, and base vibration damping coefficient estimation unit 17 performs estimation operations. Of the base weight estimate m, base vibration frequency estimate ω, and base vibration damping coefficient estimate ζ, the base vibration frequency estimate ω and the base vibration damping coefficient estimate ζ can be estimated from the vibration waveform of free vibration when the device base 2 is not subjected to external forces, that is, when the motor 1 is not generating thrust for acceleration and deceleration. The base weight estimate m can be estimated when the device base 2 is subjected to external forces, that is, when the motor 1 is generating thrust for acceleration or deceleration. Whether or not the device base 2 is subjected to external forces can be determined from the motor thrust command input to the motor 1. Therefore, the estimation switching unit 14 determines whether the motor 1 is generating thrust for acceleration or deceleration based on the motor thrust command, and causes the frame weight estimation unit 15 to perform estimation operations during the period when the motor 1 is accelerating or decelerating for movement, and causes the frame vibration frequency estimation unit 16 and the frame vibration damping coefficient estimation unit 17 to perform estimation operations during the period when the motor 1 is neither accelerating nor decelerating.

[0033] The frame weight estimation unit 15 performs the estimation operation of the frame weight estimate value m from data acquired during the period determined by the estimation switching unit 14 as the period for performing the estimation operation. The frame weight estimation unit 15 estimates the frame weight estimate value m based on the frame vibration calculation value output by the frame vibration calculation unit 12 and the motor thrust command output by the motor drive control unit 6. Specifically, the frame weight estimation unit 15 calculates the frame weight estimate value m such that the difference between the vibration waveform calculated using the equation group (1) and the frame vibration calculation value is minimized, using the waveform with the sign of the motor thrust command inverted as the reaction force acting on the device frame 2. The least squares method can be used for this calculation method.

[0034] The frame vibration frequency estimation unit 16 performs the estimation operation of the frame vibration frequency estimate value ω from the data acquired during the period determined by the estimation switching unit 14 as the period for which the estimation operation is performed. The frame vibration frequency estimation unit 16 estimates the frame vibration frequency estimate value ω based on the frame vibration calculation value output by the frame vibration calculation unit 12. Specifically, the frame vibration frequency estimation unit 16 may measure the time interval in which the waveform of the frame vibration calculation value passes zero and calculate the frame vibration frequency estimate value ω from the measured time interval, or it may calculate the frame vibration frequency estimate value ω using FFT (Fast Fourier Transform).

[0035] The frame vibration damping coefficient estimation unit 17 performs the estimation operation of the frame vibration damping coefficient estimate value ζ from the data acquired during the period determined by the estimation switching unit 14 as the period for which the estimation operation is performed. The frame vibration damping coefficient estimation unit 17 estimates the frame vibration damping coefficient estimate value ζ based on the frame vibration calculation value output by the frame vibration calculation unit 12. Specifically, the frame vibration damping coefficient estimation unit 17 can calculate the frame vibration damping coefficient estimate value ζ from the time change of the vibration amplitude of the frame vibration calculation value.

[0036] The operation of the motor control device 110 will now be explained. Figure 3 is a flowchart illustrating the operation of the motor control device 110 according to Embodiment 1 in which it controls the motor 1. The moving body position command generation unit 4 of the motor control device 110 generates a moving body position command to stop the moving body 3 at a predetermined position relative to the target position 9 (step S11), and outputs the generated moving body position command to the motor drive control unit 6.

[0037] Furthermore, the motor position acquisition unit 5 acquires the motor position detection value (step S12) and outputs the acquired motor position detection value to the frame vibration calculation unit 12 and the motor drive control unit 6, respectively. The frame vibration estimation unit 7 uses the motor thrust command output by the motor drive control unit 6 and the parameters set by the frame vibration characteristic setting unit 13, specifically the frame weight estimate value m, the frame vibration frequency estimate value ω, and the frame vibration damping coefficient estimate value ζ, to calculate the frame vibration estimation waveform (step S13), and outputs the calculated frame vibration estimation waveform as the frame vibration estimation value to the vibration error correction signal calculation unit 8.

[0038] The vibration error correction signal calculation unit 8 calculates a vibration error correction signal based on the frame vibration estimate value output by the frame vibration estimation unit 7 (step S14), and outputs the calculated vibration error correction signal to the motor drive control unit 6.

[0039] The motor drive control unit 6 generates a motor thrust command for controlling the motor 1 based on the moving body position command, the motor position detection value, and the vibration error correction signal (step S15).

[0040] The motor drive control unit 6 controls the motor 1 based on the motor thrust command by outputting the generated motor thrust command to the motor 1 (step S16). At this time, the motor drive control unit 6 also outputs the generated motor thrust command to the frame vibration estimation unit 7, the estimation switching unit 14, and the frame weight estimation unit 15.

[0041] The motor control device 110 determines whether the process is finished or not (step S17). If it determines that the process is not finished (step S17: No), it repeats the process from step S11. If it determines that the process is finished (step S17: Yes), it terminates the control process for motor 1.

[0042] Furthermore, the motor control device 110 performs an operation to update the parameters used for estimating the frame vibration in parallel with the control operation of the motor 1 shown in Figure 3. Figure 4 is a flowchart illustrating the operation by which the motor control device 110 according to Embodiment 1 updates the parameters used for estimating the frame vibration.

[0043] The motor control device 110 acquires the image captured by the camera 10 (step S21). The relative position acquisition unit 11 acquires the moving body relative position detection value, which is the time waveform of the position coordinates of the moving body 3 with respect to the target position 9, from the image captured by the camera 10 (step S22), and outputs the acquired moving body relative position detection value to the frame vibration calculation unit 12.

[0044] The frame vibration calculation unit 12 calculates frame vibration values ​​from the relative position detection values ​​of the moving body output by the relative position acquisition unit 11 (step S23), and outputs the calculated frame vibration values ​​to the frame weight estimation unit 15, the frame vibration frequency estimation unit 16, and the frame vibration damping coefficient estimation unit 17, respectively.

[0045] The estimation switching unit 14 determines whether the motor 1 is accelerating or decelerating based on the motor thrust command output by the motor drive control unit 6 (step S24). If the motor 1 is accelerating or decelerating (step S24: Yes), the estimation switching unit 14 causes the frame weight estimation unit 15 to perform a frame weight estimation operation (step S25), and the frame weight estimation unit 15 outputs the estimated frame weight value m, which is the estimation result, to the frame vibration characteristic setting unit 13. If motor 1 is neither accelerating nor decelerating (step S24: No), the estimation switching unit 14 causes the frame vibration frequency estimation unit 16 and the frame vibration damping coefficient estimation unit 17 to perform estimation operations for the frame vibration frequency and frame vibration damping coefficient, respectively (step S26). The frame vibration frequency estimation unit 16 outputs the estimated frame vibration frequency value ω, which is the estimation result, to the frame vibration characteristic setting unit 13, and the frame vibration damping coefficient estimation unit 17 outputs the estimated frame vibration damping coefficient value ζ, which is the estimation result, to the frame vibration characteristic setting unit 13.

[0046] The frame vibration characteristic setting unit 13 updates the parameters used by the frame vibration estimation unit 7 to estimate frame vibration with the estimation results (step S27). The motor control device 110 determines whether the process is finished or not (step S28). If it determines that the process is not finished (step S28: No), it repeats the process from step S21. If it determines that the process is finished (step S28: Yes), it terminates the parameter update process.

[0047] The hardware configuration of the motor control device 110 will now be described. The functions of each part of the motor control device 110 are realized by processing circuits. These processing circuits may be realized by dedicated hardware, or they may be control circuits using a CPU (Central Processing Unit).

[0048] When the above processing circuits are implemented using dedicated hardware, they are implemented by the processing circuit 90 shown in Figure 5. Figure 5 is a diagram showing the dedicated hardware for realizing the functions of the motor control device 110. The processing circuit 90 may be a single circuit, a composite circuit, a programmed processor, a parallel programmed processor, an ASIC (Application Specific Integrated Circuit), an FPGA (Field Programmable Gate Array), or a combination thereof.

[0049] When the above processing circuit is implemented using a CPU-based control circuit, this control circuit is, for example, the control circuit 91 with the configuration shown in Figure 6. Figure 6 is a diagram showing the configuration of the control circuit 91 for realizing the functions of the motor control device 110. As shown in Figure 6, the control circuit 91 comprises a processor 92 and a memory 93. The processor 92 is a CPU, also called a processing unit, arithmetic unit, microprocessor, microcomputer, DSP (Digital Signal Processor), etc. The memory 93 is, for example, a non-volatile or volatile semiconductor memory such as RAM (Random Access Memory), ROM (Read Only Memory), flash memory, EPROM (Erasable Programmable ROM), EEPROM (Registered Trademark) (Electrically EPROM), magnetic disk, flexible disk, optical disk, compact disk, minidisc, DVD (Digital Versatile Disk), etc.

[0050] When the above processing circuit is implemented by the control circuit 91, it is implemented by the processor 92 reading and executing the program corresponding to the processing of each component, which is stored in the memory 93. The memory 93 is also used as temporary memory for each process executed by the processor 92. The program executed by the processor 92 may be provided in the form of a storage medium, or it may be provided via a communication channel such as the internet.

[0051] As described above, according to Embodiment 1, a motor control device 110 can be provided that stops a mobile body 3 at a predetermined position relative to a target position 9 by controlling the thrust generated by a motor 1 mechanically connected to a mobile body 3 that is movably installed on a device frame 2 based on a motor thrust command. The motor control device 110 includes a mobile body position command generation unit 4 that generates a mobile body position command for stopping the mobile body 3 at a predetermined position relative to the target position 9, a motor position acquisition unit 5 that acquires a motor position detection value which is the time waveform of the position coordinates of the motor 1, a frame vibration estimation unit 7 that calculates a frame vibration estimation value which estimates the vibration of the device frame 2 based on the thrust generated by the motor 1 and a frame weight estimation value m which estimates the weight of the device frame 2, a vibration error correction signal calculation unit 8 that calculates a vibration error correction signal to suppress errors caused by vibrations of the device frame 2 included in the relative position of the mobile body 3 with respect to the target position 9 based on the frame vibration estimation value, and a motor drive control unit 6 that generates a motor thrust command based on the mobile body position command, the motor position detection value and the vibration error correction signal. Furthermore, the motor control device 110 includes a relative position acquisition unit 11 that acquires a moving body relative position detection value, which is the time waveform of the position coordinates of the moving body 3 relative to the target position 9, from an image captured by a camera 10 that photographs the target position 9; a mounting base vibration calculation unit 12 that calculates a mounting base vibration calculation value from the moving body relative position detection value; and a mounting base weight estimation unit 15 that calculates a mounting base weight estimate value m, which estimates the weight of the device mounting base 2 from the mounting base vibration calculation value and the thrust generated by the motor 1. The mounting base vibration estimation unit 7 can calculate the mounting base vibration estimate value using the mounting base weight estimate value m estimated by the mounting base weight estimation unit 15. As a result, the motor control device 110 calculates the mounting base weight estimate value from the mounting base vibration detection value detected from an image captured during actual operation and the thrust generated by the motor 1, making it possible to obtain a highly accurate mounting base weight estimate value m. In addition, by using the highly accurate mounting base weight estimate value m to estimate the vibrations occurring in the device mounting base 2 and suppressing errors caused by the estimated vibrations, it becomes possible to suppress positioning errors with high accuracy.

[0052] Furthermore, the motor control device 110 may further include an estimation switching unit 14 that determines the period during which the frame weight estimation unit 15 performs estimation operations based on the thrust generated by the motor 1. Specifically, the estimation switching unit 14 causes the frame weight estimation unit 15 to perform estimation operations during the period when the motor 1 is accelerating or decelerating for movement. This makes it possible to obtain a frame weight estimate m with even greater accuracy.

[0053] Furthermore, the motor control device 110 includes a frame vibration frequency estimation unit 16 that calculates a frame vibration frequency estimate value ω, which is obtained by estimating the frame vibration frequency from the frame vibration calculation value, and a frame vibration damping coefficient estimation unit 17 that calculates a frame vibration damping coefficient estimate value ζ, which is obtained by estimating the frame vibration damping coefficient from the frame vibration calculation value. The frame vibration estimation unit 7 calculates the frame vibration estimate value based on the frame vibration frequency estimate value ω and the frame vibration damping coefficient estimate value ζ, and the estimation switching unit 14 can cause the frame vibration frequency estimation unit 16 and the frame vibration damping coefficient estimation unit 17 to perform estimation operations during periods when the motor 1 is not accelerating or decelerating. As a result, it becomes possible to obtain highly accurate values ​​for the frame vibration frequency and frame vibration damping coefficient, and to suppress positioning errors with even greater precision.

[0054] Embodiment 2. Figure 7 shows the configuration of the positioning device 100A according to Embodiment 2. The positioning device 100A has a motor control device 110A instead of the motor control device 110 of the positioning device 100. The configuration of the motor control device 110A is the same as that of the motor control device 110 according to Embodiment 1, except that it has an estimation switching unit 14a instead of an estimation switching unit 14. The following will mainly describe the parts that differ from Embodiment 1, and will omit the description of parts that are the same as Embodiment 1.

[0055] The estimation switching unit 14a receives the motor thrust command output by the motor drive control unit 6, as well as the motor position detection value output by the motor position acquisition unit 5. Based on the motor thrust command and the motor position detection value, the estimation switching unit 14a determines the period during which the frame weight estimation unit 15, the frame vibration frequency estimation unit 16, and the frame vibration damping coefficient estimation unit 17 will each perform their estimation operations.

[0056] The mount vibration calculation values ​​used in the estimation operation by the mount weight estimation unit 15, the mount vibration frequency estimation unit 16, and the mount vibration damping coefficient estimation unit 17 are calculated from the moving body relative position detection value, and the moving body relative position detection value is a value obtained by detecting the position of the target position 9 in the image captured by the camera 10 and obtaining the position of the moving body 3 relative to the target position 9. In Embodiment 1, the camera 10 was assumed to move within a range that includes the target position 9 in the shooting area, and it was assumed that the image captured by the camera 10 would include the target position 9 even if the camera 10 moved. However, when the camera 10 tries to obtain the position detection value with high resolution, it may not be able to capture a wide range due to constraints on the image element and image transfer speed. For this reason, in Embodiment 2, it is assumed that the image captured by the camera 10 may include the target position 9 and may not include the target position 9. If the captured image does not include the target position 9, the relative position detection value of the moving object cannot be obtained. Therefore, the estimation switching unit 14a causes the base weight estimation unit 15, the base vibration frequency estimation unit 16, and the base vibration damping coefficient estimation unit 17 to perform estimation operations during the period when the target position 9 is included in the captured image. Specifically, the estimation switching unit 14a determines whether or not the image captured by the camera 10 includes the target position 9 based on the motor position detection value, and determines the period during which each estimation operation is performed, so that the base weight estimation unit 15, the base vibration frequency estimation unit 16, and the base vibration damping coefficient estimation unit 17 perform estimation operations during the period when the target position 9 is included in the captured image.

[0057] Figure 8 is a flowchart illustrating the operation of the motor control device 110A according to Embodiment 2 to update the parameters used for estimating the frame vibration. Steps S21 to S23 are the same as in Embodiment 1. In Embodiment 2, before step S24, the estimation switching unit 14a determines whether or not the image captured by the camera 10 includes the target position 9 (step S31). If the image capture includes the target position 9 (step S31: Yes), the same processing as in Embodiment 1 is performed from steps S24 to S27. If the image capture does not include the target position 9 (step S31: No), the processing from steps S24 to S27 is omitted, and the process proceeds to step S28.

[0058] As a result, the estimation switching unit 14a of the motor control device 110A sets the period for performing estimation operations so that if the captured image includes the target position 9 and the motor 1 is accelerating or decelerating, it causes the frame weight estimation unit 15 to perform estimation operations, and if the captured image includes the target position 9 and the motor 1 is neither accelerating nor decelerating, it causes the frame vibration frequency estimation unit 16 and the frame vibration damping coefficient estimation unit 17 to perform estimation operations. Furthermore, the estimation switching unit 14a does not perform any estimation operations if the captured image does not include the target position 9.

[0059] As described above, according to Embodiment 2, a motor control device 110A can be provided. In the motor control device 110A, the estimation switching unit 14a determines whether or not the target position 9 is included in the image captured by the camera 10, and causes the base weight estimation unit 15 to perform an estimation operation during the period in which the target position 9 is included in the image. Alternatively, the estimation switching unit 14a may determine whether or not the target position 9 is included in the image captured by the camera 10, and cause the base vibration frequency estimation unit 16 and the base vibration damping coefficient estimation unit 17 to perform an estimation operation during the period in which the target position 9 is included in the image. This makes it possible to obtain a highly accurate base weight estimate m, base vibration frequency estimate ω, and base vibration damping coefficient estimate ζ even when the motor 1 and the moving body 3 move over a wide range in which the target position 9 is not included in the image captured by the camera 10.

[0060] In the above embodiment, the estimation switching unit 14a determines the period for performing the estimation operations for the estimated frame weight m, the estimated frame vibration frequency ω, and the estimated frame vibration damping coefficient ζ using the motor thrust command and the motor position detection value. However, other signals may be used as long as they can determine the acceleration and deceleration state of the motor 1 and the period during which the target position 9 is included in the image captured by the camera 10. For example, the mobile body position command generated by the mobile body position command generation unit 4 may be used to determine whether the target position 9 is included in the image captured by the camera 10, or the acceleration and deceleration state of the motor 1 and whether the target position 9 is included in the image captured by the camera 10 may be determined using only the mobile body position command or only the motor position detection value.

[0061] Embodiment 3. Figure 9 shows the configuration of the positioning device 100B according to Embodiment 3. The positioning device 100B has a motor control device 110B instead of the motor control device 110A of the positioning device 100A. The configuration of the motor control device 110B is the same as that of the motor control device 110A according to Embodiment 2, except that it has a frame vibration estimation unit 7a instead of the frame vibration estimation unit 7 of the motor control device 110A, and an estimation switching unit 14b instead of the estimation switching unit 14a. The following will mainly describe the parts that differ from Embodiment 2, and will omit the description of parts that are the same as Embodiment 2.

[0062] The frame vibration estimation unit 7a receives, in addition to the motor thrust command output by the motor drive control unit 6 and the parameters output by the frame vibration characteristic setting unit 13, the frame vibration calculation value output by the frame vibration calculation unit 12 and information indicating the period for changing the calculation method output by the estimation switching unit 14b. The frame vibration estimation unit 7a has the function of performing a first method that calculates the frame vibration estimate value based on the motor thrust command in the same manner as the frame vibration estimation unit 7, and a second method that calculates the frame vibration estimate value using the frame vibration calculation value in addition to the motor thrust command. The frame vibration estimation unit 7a switches the method used to calculate the frame vibration estimate value between the first method and the second method according to the instructions of the estimation switching unit 14b. It is thought that the second method can obtain a frame vibration estimate value with higher accuracy than the first method, but since the calculation of the frame vibration calculation value takes time due to image processing etc., the frame vibration calculation value is significantly delayed, and it is necessary to correct for the effect of the delay.

[0063] The estimation switching unit 14b determines, in the same manner as in Embodiment 2, the period during which the base weight estimation unit 15, the base vibration frequency estimation unit 16, and the base vibration damping coefficient estimation unit 17 perform estimation operations, and also determines the period during which the base vibration estimation unit 7a changes the calculation method for the base vibration estimate value. Specifically, the estimation switching unit 14b determines the period during which the base vibration estimation unit 7a changes the calculation method for the base vibration estimate value, such that the base vibration estimation unit 7a calculates the base vibration estimate value using the second method during the period when the target position 9 is included in the captured image of the camera 10, and the base vibration estimation unit 7a calculates the base vibration estimate value using the first method during the period when the target position 9 is not included in the captured image.

[0064] Figure 10 shows a detailed configuration of the frame vibration estimation unit 7a shown in Figure 9. The frame vibration estimation unit 7a includes a delay addition unit 71, a frame vibration motion equation calculation unit 72, an error calculation unit 73, a frame vibration motion equation calculation unit 74, an error correction calculation unit 75, and an output switching unit 76.

[0065] The delay addition unit 71 adds the same delay time included in the frame vibration calculation value to the motor thrust command and outputs the motor thrust command with the added delay to the frame vibration motion equation calculation unit 72.

[0066] The frame vibration motion equation calculation unit 72 calculates a delayed frame vibration estimate using parameters such as the frame weight estimate m, frame vibration frequency estimate ω, and frame vibration damping coefficient estimate ζ from the motor thrust command with added delay. The frame vibration motion equation calculation unit 72 outputs the calculated delayed frame vibration estimate to the error calculation unit 73 and the error correction calculation unit 75, respectively.

[0067] The error calculation unit 73 calculates the error obtained by comparing the calculated frame vibration value with the estimated frame vibration value with a delay, and uses this error as the calculated error value. The error calculation unit 73 outputs the calculated error value to the error correction calculation unit 75.

[0068] The frame vibration motion equation calculation unit 74 calculates the frame vibration estimate using parameters such as the frame weight estimate m, the frame vibration frequency estimate ω, and the frame vibration damping coefficient estimate ζ, based on the motor thrust command without any delay. The frame vibration motion equation calculation unit 74 outputs the calculated frame vibration estimate to the error correction calculation unit 75 and the output switching unit 76, respectively.

[0069] The error correction calculation unit 75 calculates an error-corrected frame vibration estimate using the calculated error value, the delayed frame vibration estimate, and the frame vibration estimate, and outputs the calculated error-corrected frame vibration estimate to the output switching unit 76. Since the delayed frame vibration estimate is delayed by the same amount as the frame vibration calculation value, the calculated error value calculated by the error calculation unit 73 includes the influence of estimation errors of parameters such as the frame weight estimate m, the frame vibration frequency estimate ω, and the frame vibration damping coefficient estimate ζ. The error correction calculation unit 75 adds a value calculated as if the error calculation value had changed by the delay time based on the amount of change in the frame vibration estimate relative to the delayed frame vibration estimate, that is, the change after the delay time has elapsed, to the frame vibration estimate and outputs it as an error-corrected frame vibration estimate. This makes it possible to correct the error in the frame vibration estimate that appears due to the error between the actual characteristics of the device frame 2 and parameters such as the frame weight estimate m, the frame vibration frequency estimate ω, and the frame vibration damping coefficient estimate ζ.

[0070] The output switching unit 76 switches the output of the frame vibration estimation unit 7a between the frame vibration estimate value and the error-corrected frame vibration estimate value. Specifically, the output switching unit 76 switches the output of the frame vibration estimation unit 7a according to the instructions of the estimation switching unit 14b.

[0071] As described above, according to the motor control device 110B of Embodiment 3, the base vibration estimation unit 7a can calculate a base vibration estimate based on the thrust generated by the motor 1 and the calculated base vibration value. The motor control device 110B can also be further equipped with an estimation switching unit 14b that determines whether or not the target position 9 is included in the image captured by the camera 10, and during the period in which the target position 9 is included in the image, causes the base vibration estimation unit 7a to calculate a base vibration estimate based on the thrust generated by the motor 1 and the calculated base vibration value. This enables the base vibration estimation unit 7a to calculate the base vibration estimate using an appropriate signal, and makes it possible to obtain a more accurate base vibration estimate using the calculated base vibration value. Furthermore, since the motor control device 110B calculates a vibration error correction signal using the highly accurate base vibration estimate, it can control the system to suppress the relative error that occurs between the moving body 3 and the target position 9 due to the vibration of the device base 2 with higher precision.

[0072] Embodiment 4. Figure 11 shows the configuration of the positioning device 100C according to Embodiment 4. The positioning device 100C has a motor control device 110C instead of the motor control device 110 of the positioning device 100. The configuration of the motor control device 110C is as follows: it has a mobile body position command generation unit 4a instead of the mobile body position command generation unit 4, a base vibration characteristic setting unit 13a instead of the base vibration characteristic setting unit 13, an estimation switching unit 14c instead of the estimation switching unit 14, and the base vibration frequency estimation unit 16 and the base vibration damping coefficient estimation unit 17 are omitted. As other components denoted by the same reference numerals are the same as those in the motor control device 110 according to Embodiment 1, the following will mainly describe the parts that differ from Embodiment 1, and the parts that are the same as Embodiment 1 will not be described.

[0073] The frame vibration characteristic setting unit 13a stores the pre-set frame vibration frequency estimate value ω and frame vibration damping coefficient estimate value ζ, as well as the frame weight estimate value m calculated by the frame weight estimation unit 15.

[0074] The estimation switching unit 14c determines the period during which the frame weight estimation unit 15 performs the estimation operation for the frame weight estimate value m, based on the motor thrust command, and also determines the switching of the mobile body position command generated by the mobile body position command generation unit 4a.

[0075] The mobile body position command generation unit 4a generates a mobile body position command that causes the motor 1 to accelerate or decelerate and stop within a range of movement distance that includes the target position 9 within the image captured by the camera 10. The mobile body position command generation unit 4a outputs the generated mobile body position command to the motor drive control unit 6. As the motor 1 moves according to such a mobile body position command, the target position 9 is always included in the image captured by the camera 10 while the motor 1 is accelerating or decelerating. Therefore, the frame weight estimation unit 15 can determine the period for estimating the frame weight estimate value m without having to determine whether or not the target position 9 is included in the image captured by the camera 10. In other words, the estimation switching unit 14c can determine the period for performing the frame weight estimate value m estimation operation based only on whether or not the motor 1 is accelerating or decelerating, without having to determine whether or not the target position 9 is included in the image captured by the camera 10.

[0076] Furthermore, the estimated frame vibration frequency ω and the estimated frame vibration damping coefficient ζ stored in the frame vibration characteristic setting unit 13a can be values ​​read by the user from the calculated frame vibration values.

[0077] As described above, according to the motor control device 110C of Embodiment 4, the moving body position command generation unit 4a can generate a moving body position command in which the motor 1 accelerates or decelerates and stops within the range in which the target position 9 is included in the captured image. This allows the frame weight estimation unit 15 to determine the period for which it performs estimation operations without having to determine whether or not the target position 9 is included in the captured image of the camera 10, thereby reducing the amount of calculation required for the estimation switching unit 14c to make its decision. Furthermore, with the motor control device 110C, the frame vibration frequency estimate value ω and the frame vibration damping coefficient estimate value ζ are set in advance, and estimation calculations are not performed, thus reducing the amount of calculation.

[0078] The configurations shown in the above embodiments are merely examples, and it is possible to combine them with other known technologies, combine different embodiments, and omit or modify parts of the configuration without departing from the gist of the invention. [Explanation of Symbols]

[0079] 1 Motor, 2 Device frame, 3 Moving body, 4,4a Moving body position command generation unit, 5 Motor position acquisition unit, 6 Motor drive control unit, 7,7a Frame vibration estimation unit, 8 Vibration error correction signal calculation unit, 9 Target position, 10 Camera, 11 Relative position acquisition unit, 12 Frame vibration calculation unit, 13,13a Frame vibration characteristic setting unit, 14,14a,14b,14c Estimation switching unit, 15 Frame weight estimation unit, 16 Frame vibration frequency estimation unit, 17 Frame vibration damping coefficient estimation unit, 71 Delay addition unit, 72,74 Frame vibration motion equation calculation unit, 73 Error calculation unit, 75 Error correction calculation unit, 76 Output switching unit, 90 Processing circuit, 91 Control circuit, 92 Processor, 93 Memory, 100,100A,100B,100C Positioning device, 110, 110A, 110B, 110C motor control device.

Claims

1. A motor control device that controls the thrust generated by a motor mechanically connected to a movable body, which is movably mounted on a device stand, based on a motor thrust command, thereby stopping the movable body at a predetermined position relative to a target position, A mobile body position command generation unit generates a mobile body position command to stop the mobile body at a predetermined position relative to the target position, A motor position acquisition unit acquires a motor position detection value which is the time waveform of the motor's position coordinates, A frame vibration estimation unit calculates a frame vibration estimate based on the thrust generated by the motor and the estimated frame weight obtained by estimating the weight of the device frame, A vibration error correction signal calculation unit calculates a vibration error correction signal to suppress errors caused by vibrations of the device mount included in the relative position of the moving body with respect to the target position, based on the estimated mount vibration value. A motor drive control unit that generates the motor thrust command based on the moving body position command, the motor position detection value, and the vibration error correction signal, A relative position acquisition unit acquires a moving body relative position detection value, which is a time waveform of the position coordinates of the moving body with respect to the target position, from an image captured by a camera that photographs the target position. A frame vibration calculation unit that calculates frame vibration values ​​from the relative position detection values ​​of the moving body, A frame weight estimation unit calculates a frame weight estimate value by estimating the weight of the device frame from the frame vibration calculation value and the thrust generated by the motor, Equipped with, The motor control device is characterized in that the frame vibration estimation unit calculates the frame vibration estimate using the frame weight estimate obtained by the frame weight estimation unit.

2. An estimation switching unit determines the period during which the frame weight estimation unit performs estimation operations based on the thrust generated by the motor. The motor control device according to claim 1, further comprising:

3. The motor control device according to claim 2, characterized in that the estimation switching unit causes the frame weight estimation unit to perform the estimation operation during the period when the motor is accelerating or decelerating for movement.

4. A frame vibration frequency estimation unit calculates a frame vibration frequency estimate value by estimating the frame vibration frequency from the frame vibration calculation value, A frame vibration damping coefficient estimation unit calculates an estimated frame vibration damping coefficient value by estimating the frame vibration damping coefficient from the frame vibration calculation value, Furthermore, The frame vibration estimation unit calculates the frame vibration estimate based on the frame vibration frequency estimate and the frame vibration damping coefficient estimate, The motor control device according to claim 2 or 3, characterized in that the estimation switching unit causes the frame vibration frequency estimation unit and the frame vibration damping coefficient estimation unit to perform estimation operations during periods when the motor is not accelerating or decelerating.

5. The motor control device according to claim 2 or 3, characterized in that the estimation switching unit determines whether or not the target position is included in the captured image of the camera, and causes the mount weight estimation unit to perform an estimation operation during the period in which the target position is included in the captured image.

6. The motor control device according to claim 4, characterized in that the estimation switching unit determines whether or not the target position is included in the captured image of the camera, and causes the mount vibration frequency estimation unit and the mount vibration damping coefficient estimation unit to perform estimation operations during the period in which the target position is included in the captured image.

7. The motor control device according to claim 1, characterized in that the frame vibration estimation unit calculates the frame vibration estimation value based on the thrust generated by the motor and the frame vibration calculation value.

8. An estimation switching unit determines whether the target position is included in the image captured by the camera, and during the period in which the target position is included in the image, causes the mounting base vibration estimation unit to calculate the mounting base vibration estimate value based on the thrust generated by the motor and the mounting base vibration calculation value. The motor control device according to claim 7, further comprising:

9. The motor control device according to claim 1, characterized in that the moving body position command generation unit generates a moving body position command in which the motor accelerates or decelerates and stops within a range in which the captured image includes the target position.

10. Equipment stand and A movable body is installed so as to be movable relative to the aforementioned device frame, A motor mechanically connected to the aforementioned moving body, A camera to photograph the target location, A mobile body position command generation unit generates a mobile body position command to stop the mobile body at a predetermined position relative to the target position, A motor position acquisition unit acquires a motor position detection value which is the time waveform of the motor's position coordinates, A frame vibration estimation unit calculates a frame vibration estimate value, which is an estimate of the vibration of the device frame, based on the thrust generated by the motor and the frame weight, which is the weight of the device frame. A vibration error correction signal calculation unit calculates a vibration error correction signal to suppress errors caused by vibrations of the device mount included in the relative position of the moving body with respect to the target position, based on the estimated mount vibration value. A motor drive control unit generates a motor thrust command for controlling the thrust generated by the motor based on the moving body position command, the motor position detection value, and the vibration error correction signal, A relative position acquisition unit acquires a relative position detection value of the moving body, which is a time waveform of the position coordinates of the moving body relative to the target position, from the image captured by the camera. A frame vibration calculation unit that calculates frame vibration values ​​from the relative position detection values ​​of the moving body, A frame weight estimation unit calculates a frame weight estimate value by estimating the weight of the device frame from the frame vibration calculation value and the thrust generated by the motor, Equipped with, The positioning device is characterized in that the frame vibration estimation unit calculates the frame vibration estimate using the frame weight estimate obtained by the frame weight estimation unit.

11. A motor control method for a motor control device that controls the thrust generated by a motor mechanically connected to a movable body mounted on a device stand, based on a motor thrust command, thereby stopping the movable body at a predetermined position relative to a target position, The steps include obtaining the position coordinates of the moving body relative to the target position from the captured image taken at the target position, and calculating the vibration value of the mounting frame of the device mounting frame, The steps include: calculating an estimated weight of the device frame by estimating the weight of the frame from the calculated frame vibration value and the thrust generated by the motor; A step of estimating the vibration of the device frame from the estimated weight of the frame and the thrust generated by the motor, The steps include: calculating a vibration error correction signal to suppress errors caused by vibrations of the device mount included in the relative position of the moving body with respect to the target position, and changing the motor thrust command based on the vibration error correction signal; A motor control method characterized by including the following.

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