Vacuum device

Abstract

To provide a vacuum device capable of quickly stabilizing inside of a chamber at an atmospheric pressure into a low vacuum area by a simple configuration and control.SOLUTION: A pump side throttle cutoff valve 83 is provided in each of three pump side fluid passages 81, and capable of allowing or blocking flow of fluid in the pump side fluid passage 81 by opening and closing. A pump side throttle 85 is provided in two of the three pump side fluid passages 81, and capable of throttling the flow of the fluid in the pump side fluid passage 81. A supply side throttle cutoff valve 93 is provided in each of the two supply side fluid passages 91, and capable of allowing or blocking the flow of the fluid in the supply side fluid passage 91 by opening and closing. A supply side throttle 95 is provided in each of the two supply side fluid passages 91, and capable of throttling the flow of the fluid in the supply side fluid passage 91.SELECTED DRAWING: Figure 1

Description

Technical Field

[0004] , ,

[0006] , ,

[0005] , , , ,

[0001] The present invention relates to a vacuum device.

Background Art

[0002] Conventionally, for coils used in motor products and the like, it is known to perform a pinhole inspection by applying a high voltage in the manufacturing process and checking for the presence or absence of discharge. Here, for example, for coils with low withstand voltage, instead of atmospheric pressure, in a chamber evacuated to a low vacuum region of about 100 to 1000 Pa, by performing an inspection at a lower voltage, a non-destructive inspection can be achieved.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Patent Document 2

Summary of the Invention

Problems to be Solved by the Invention

[0004] In order to perform the above inspection on all products in the production line, the following steps are required: 1: putting the parts to be inspected into the chamber, 2: evacuating from atmospheric pressure, 3: stabilizing the degree of vacuum, 4: inspection (applying voltage), 5: opening to the atmosphere, and 6: taking out the parts from the chamber. Here, in order to improve productivity, it is effective to shorten the time required for 2: evacuation from atmospheric pressure and 3: stabilization of the degree of vacuum.

[0005] For example, in the prior art, it is known to operate a vacuum pump with the ability to achieve the target degree of vacuum and achieve the stabilization of the degree of vacuum as it goes. In this case, it is difficult to shorten the time required for the above 2 and 3, and it takes time to stabilize the degree of vacuum, which may make it difficult to realize a cycle time suitable for the production line.

[0006] On the other hand, for example, Patent Documents 1 and 2 disclose a system that stabilizes the vacuum level by controlling the valve opening according to the vacuum level inside the chamber. In this case, the control system is complex, and the investment cost of the equipment may become a problem.

[0007] The object of the present invention is a vacuum apparatus capable of rapidly stabilizing the inside of a chamber from atmospheric pressure to a low vacuum region with a simple configuration and control. [Means for solving the problem]

[0008] The vacuum apparatus according to the present invention comprises a chamber (20), a vacuum pump (30), a fluid supply unit (40), an atmospheric shut-off valve (70), a pump-side throttle (80), a supply unit-side throttle (90), and a vacuum gauge (17). The chamber is capable of containing fluid and an object to be inspected. The vacuum pump is capable of sucking the fluid from inside the chamber when operated. The fluid supply unit is capable of supplying fluid into the chamber.

[0009] The atmospheric shutoff valve can allow or block fluid flow between the chamber and the atmosphere by opening and closing. The pump-side throttle can restrict fluid flow between the chamber and the vacuum pump. The supply-side throttle can restrict fluid flow between the fluid supply and the chamber. The vacuum gauge can detect the pressure inside the chamber.

[0010] The pump-side throttling section is 3 tsu It has a pump-side passage (81), a pump-side throttle shut-off valve (83), and a pump-side throttle (85). The pump-side passage allows fluid to flow between the chamber and the vacuum pump. The pump-side throttle shut-off valve has 3 tsu The pump-side throttles are provided in each of the aforementioned pump-side flow paths and can allow or block the flow of fluid in the pump-side flow paths by opening and closing operations. tsu The pump-side flow path 2 It is provided in two places, making it possible to restrict the fluid flow in the pump-side passage.

[0011] The supply side throttling section is 2 tsuIt has a supply-side flow path (91), a supply-side throttle valve shut-off valve (93), and a supply-side throttle (95). The supply-side flow path allows the fluid to flow between the fluid supply part and the chamber. The supply-side throttle valve shut-off valve is provided at each of the following 2 tsu the supply-side flow paths, and can allow or block the flow of fluid in the supply-side flow path by an opening / closing operation. The supply-side throttle is provided at 2 tsu the each supply-side flow path and can throttle the flow of fluid in the supply-side flow path.

[0012] In the present invention, with a simple configuration, while operating the vacuum pump, by simply opening and closing the atmosphere-side shut-off valve, the pump-side throttle valve shut-off valve, and the supply-side throttle valve shut-off valve, the inside of the chamber can be stabilized from atmospheric pressure to a low vacuum region at high speed. In the present invention, the pump-side throttle shutoff valve includes a first pump-side throttle shutoff valve (831), a second pump-side throttle shutoff valve (832), and a third pump-side throttle shutoff valve (833). The supply-side throttle shutoff valve includes a first supply-side throttle shutoff valve (931) and a second supply-side throttle shutoff valve (932). The present invention further includes a control unit capable of controlling the operations of the pump-side throttle valve shut-off valve and the supply-side throttle valve shut-off valve. Cut off The control unit operates the vacuum pump with the atmospheric shutoff valve open and all pump-side throttle shutoff valves and all supply-side throttle shutoff valves closed, closing the atmospheric shutoff valve and opening the first pump-side throttle shutoff valve. If, at the timer time, which is a predetermined time after the atmospheric shutoff valve has been closed, the control unit closes the first pump-side throttle shutoff valve, opens the second pump-side throttle shutoff valve, and opens the first supply-side throttle shutoff valve, the pressure detected by the vacuum gauge is lower than the target pressure. When the timer time is reached and the pressure detected by the vacuum gauge is equal to or greater than the target pressure, the control unit closes the first pump-side throttle shutoff valve, opens the second pump-side throttle shutoff valve, and opens the second supply-side throttle shutoff valve. After the timer time is reached, at the point when the pressure detected by the vacuum gauge reaches the target pressure, the control unit closes the second pump-side throttle shutoff valve and opens the third pump-side throttle shutoff valve, closes the first supply unit-side throttle shutoff valve and opens the second supply unit-side throttle shutoff valve.

Brief Description of the Drawings

[0013] [Figure 1] Schematic diagram showing a vacuum device of an embodiment. [Figure 2] Flowchart showing the processing by the control unit of a vacuum device of an embodiment. [Figure 3] Timing chart showing an operation example of a vacuum device of an embodiment.

Modes for Carrying Out the Invention

[0014] Hereinafter, a vacuum device according to an embodiment will be described based on the drawings.

[0015] (One Embodiment) A vacuum device of an embodiment is shown in FIG. 1. ​

[0016] The vacuum device 1 is a device for performing a pinhole inspection on a coil 2 used, for example, in motor products or the like, by applying a high voltage during the manufacturing process and checking for the presence or absence of discharge. In the present embodiment, the coil 2 as the inspection object is disposed in the chamber 20, and an inspection is performed at a voltage lower than a general high voltage in the chamber 20 evacuated to a low vacuum region of, for example, about 100 to 1000 Pa. Thereby, a non-destructive inspection of the coil 2 is possible.

[0017] Next, the configuration of the vacuum device 1 will be described.

[0018] [[ID=AND]] <1>The vacuum device 1 includes a chamber 20, a vacuum pump 30, a fluid supply unit 40, a pump-side shut-off valve 50, a supply-unit-side shut-off valve 60, an atmosphere-side shut-off valve 70, a pump-side throttle portion 80, a supply-unit-side throttle portion 90, and a vacuum gauge 17. The chamber 20 can accommodate a fluid and an inspection object. The vacuum pump 30 can suck the fluid in the chamber 20 by operation. The fluid supply unit 40 can supply a fluid into the chamber 20.

[0019] The present embodiment includes an inter-pump flow path 11, an inter-supply-unit flow path 13, and an inter-atmosphere flow path 15. The inter-pump flow path 11 connects the inside of the chamber 20 and the suction port of the vacuum pump 30. The inter-supply-unit flow path 13 connects the inside of the chamber 20 and the supply port of the fluid supply unit 40. The inter-atmosphere flow path 15 connects the inside of the chamber 20 and the atmosphere side.

[0020] In the present embodiment, the "fluid" accommodated in the chamber 20 is "air", and the "inspection object" is the "coil 2". The vacuum pump 30 is, for example, a known electric pump, operates upon an on instruction, and can suck a fluid from the suction port. The fluid supply unit 40 is formed to be able to accommodate a fluid, and can supply the fluid into the chamber 20 via the inter-supply-unit flow path 13 from the supply port. The "fluid" supplied by the fluid supply unit 40 into the chamber 20 is, for example, "nitrogen".

[0021] <2> The pump-side shut-off valve 50 can allow or shut off the flow of fluid between the chamber 20 and the vacuum pump 30 by opening and closing. The supply-side shut-off valve 60 can allow or shut off the flow of fluid between the chamber 20 and the fluid supply unit 40 by opening and closing. The atmospheric-side shut-off valve 70 can allow or shut off the flow of fluid between the chamber 20 and the atmosphere by opening and closing.

[0022] In this embodiment, the pump-side shut-off valve 50, the supply-side shut-off valve 60, and the atmospheric-side shut-off valve 70 are, for example, known electric shut-off valves that open and close to a fully open state when an open command is given and to a fully closed state when a close command is given. The pump-side shut-off valve 50 is provided in the inter-pump passage 11 and can allow or shut off the flow of fluid in the inter-pump passage 11 by opening and closing. The supply-side shut-off valve 60 is provided in the inter-supply passage 13 and can allow or shut off the flow of fluid in the inter-supply passage 13 by opening and closing. The atmospheric-side shut-off valve 70 is provided in the inter-atmospheric passage 15 and can allow or shut off the flow of fluid in the inter-atmospheric passage 15 by opening and closing.

[0023] The pump-side throttling section 80 can restrict the fluid flow between the chamber 20 (pump-side shut-off valve 50) and the vacuum pump 30. The supply-side throttling section 90 can restrict the fluid flow between the fluid supply section 40 and the chamber 20 (supply-side shut-off valve 60). The vacuum gauge 17 can detect the pressure inside the chamber 20.

[0024] The pump-side throttling section 80 includes three pump-side passages 81, a pump-side throttling section shut-off valve 83, and a pump-side throttling section 85. The pump-side passages 81 allow fluid to flow between the chamber 20 and the vacuum pump 30. The pump-side throttling section shut-off valve 83 is provided in each of the three pump-side passages 81 and can allow or block the flow of fluid in the pump-side passages 81 by opening and closing. The pump-side throttling section 85 is provided in two of the three pump-side passages 81 and can restrict the flow of fluid in the pump-side passages 81.

[0025] In this embodiment, the pump-side throttle shutoff valve 83 is, for example, a known electric shutoff valve, which opens and closes to a fully open state when an open command is given and to a fully closed state when a close command is given. The pump-side throttle 85 is an orifice flow path set to a predetermined throttle diameter.

[0026] The supply side throttling section 90 has two supply side flow paths 91, a supply side throttling section shut-off valve 93, and a supply side throttling section 95. The supply side flow paths 91 allow fluid to flow between the fluid supply section 40 and the chamber 20. The supply side throttling section shut-off valve 93 is provided in each of the two supply side flow paths 91 and can allow or shut off the flow of fluid in the supply side flow paths 91 by opening and closing. The supply side throttling section 95 is provided in each of the two supply side flow paths 91 and can restrict the flow of fluid in the supply side flow paths 91.

[0027] In this embodiment, the supply side throttle shutoff valve 93 is, for example, a known electric shutoff valve, which opens and closes to a fully open state when an open command is given and to a fully closed state when a close command is given. The supply side throttle 95 is an orifice flow path set to a predetermined throttle diameter.

[0028] <3> The pump-side passage 81 includes a first pump-side passage 811 provided between the chamber 20 and the vacuum pump 30, a second pump-side passage 812 provided in parallel with the first pump-side passage 811 between the chamber 20 and the vacuum pump 30, and a third pump-side passage 813 provided in parallel with the first pump-side passage 811 and the second pump-side passage 812 between the chamber 20 and the vacuum pump 30.

[0029] In this embodiment, the inter-pump passage 11 includes an inter-pump passage 111 and an inter-pump passage 113. One end of the inter-pump passage 111 is connected to the chamber 20. The pump-side shut-off valve 50 is provided in the inter-pump passage 111. One end of the inter-pump passage 113 is connected to the suction port of the vacuum pump 30. The first pump-side passage 811, the second pump-side passage 812, and the third pump-side passage 813 are provided in parallel so as to connect the other end of the inter-pump passage 111 to the other end of the inter-pump passage 113. The passage diameters of the first pump-side passage 811, the second pump-side passage 812, and the third pump-side passage 813 are set to be the same.

[0030] The pump-side throttle shut-off valve 83 comprises a first pump-side throttle shut-off valve 831, a second pump-side throttle shut-off valve, and a third pump-side throttle shut-off valve. The first pump-side throttle shut-off valve 831 is provided in the first pump-side flow path 811 and can allow or shut off the flow of fluid in the first pump-side flow path 811 by opening and closing. The second pump-side throttle shut-off valve 832 is provided in the second pump-side flow path 812 and can allow or shut off the flow of fluid in the second pump-side flow path 812 by opening and closing. The third pump-side throttle shut-off valve 833 is provided in the third pump-side flow path 813 and can allow or shut off the flow of fluid in the third pump-side flow path 813 by opening and closing.

[0031] The pump-side throttle 85 includes a first pump-side throttle 851 and a second pump-side throttle 852. The first pump-side throttle 851 is provided in the second pump-side flow path 812 and has a predetermined throttle diameter, making it possible to restrict the fluid flow in the second pump-side flow path 812. The second pump-side throttle 852 is provided in the third pump-side flow path 813 and has a throttle diameter smaller than that of the first pump-side throttle 851, making it possible to restrict the fluid flow in the third pump-side flow path 813.

[0032] In this embodiment, the first pump-side throttle 851 is located on the vacuum pump 30 side relative to the second pump-side throttle shut-off valve 832 in the second pump-side flow path 812, and its throttle diameter is set to approximately 20% of the flow path diameter of the second pump-side flow path 812. Therefore, the flow rate of the fluid passing through the first pump-side throttle 851 is restricted to approximately 20%. The second pump-side throttle 852 is located on the vacuum pump 30 side relative to the third pump-side throttle shut-off valve 833 in the third pump-side flow path 813, and its throttle diameter is set to approximately 10% of the flow path diameter of the third pump-side flow path 813. Therefore, the flow rate of the fluid passing through the second pump-side throttle 852 is restricted to approximately 10%.

[0033] The supply section side flow path 91 includes a first supply section side flow path 911 provided between the fluid supply section 40 and the chamber 20, and a second supply section side flow path 912 provided in parallel with the first supply section side flow path 911 between the fluid supply section 40 and the chamber 20.

[0034] In this embodiment, the inter-supply passage 13 has inter-supply passage 131 and inter-supply passage 133. One end of inter-supply passage 131 is connected to the chamber 20. The supply side shut-off valve 60 is provided in inter-supply passage 131. One end of inter-supply passage 133 is connected to the supply port of the fluid supply unit 40. The first supply side passage 911 and the second supply side passage 912 are provided in parallel so as to connect the other end of inter-supply passage 131 and the other end of inter-supply passage 133, respectively. The flow diameters of the first supply side passage 911 and the second supply side passage 912 are set to be the same.

[0035] The supply side throttling shutoff valve 93 includes a first supply side throttling shutoff valve 931 and a second supply side throttling shutoff valve 932. The first supply side throttling shutoff valve 931 is provided in the first supply side passage 911 and can allow or block the flow of fluid in the first supply side passage 911 by opening and closing. The second supply side throttling shutoff valve 932 is provided in the second supply side passage 912 and can allow or block the flow of fluid in the second supply side passage 912 by opening and closing.

[0036] The supply side throttle 95 includes a first supply side throttle 951 and a second supply side throttle 952. The first supply side throttle 951 is provided in the first supply side flow path 911 and has a predetermined throttle diameter, making it possible to restrict the fluid flow in the first supply side flow path 911. The second supply side throttle 952 is provided in the second supply side flow path 912 and has a throttle diameter smaller than that of the first supply side throttle 951, making it possible to restrict the fluid flow in the second supply side flow path 912.

[0037] In this embodiment, the first supply side throttle 951 is provided in the first supply side flow path 911 on the fluid supply section 40 side relative to the first supply side throttle shut-off valve 931, and the throttle diameter is set to approximately 20% of the flow path diameter of the first supply side flow path 911. Therefore, the flow rate of the fluid passing through the first supply side throttle 951 is restricted to approximately 20%. The second supply side throttle 952 is provided in the second supply side flow path 912 on the fluid supply section 40 side relative to the second supply side throttle shut-off valve 932, and the throttle diameter is set to approximately 10% of the flow path diameter of the second supply side flow path 912. Therefore, the flow rate of the fluid passing through the second supply side throttle 952 is restricted to approximately 10%.

[0038] <4> This embodiment further includes a control unit 10. The control unit 10 can control the operation of the vacuum pump 30, the pump-side shut-off valve 50, the supply-side shut-off valve 60, the atmospheric-side shut-off valve 70, the pump-side throttle shut-off valves 83 (first pump-side throttle shut-off valve 831, second pump-side throttle shut-off valve 832, third pump-side throttle shut-off valve 833), and the supply-side throttle shut-off valves 93 (first supply-side throttle shut-off valve 931, second supply-side throttle shut-off valve 932) based on the pressure detected by the vacuum gauge 17.

[0039] The control unit 10 is a computer having a CPU as an arithmetic unit, ROM, RAM, etc. as memory units, and I / O as input / output units. The control unit 10 performs calculations according to a program stored in ROM, etc., and controls the operation of the vacuum pump 30, pump-side shut-off valve 50, supply unit-side shut-off valve 60, atmospheric-side shut-off valve 70, pump-side throttle shut-off valve 83, and supply unit-side throttle shut-off valve 93. In this way, the control unit 10 executes a program stored in a non-transitional physical recording medium. When this program is executed, the method corresponding to the program is executed.

[0040] In reality, the control unit 10 is connected to the vacuum gauge 17, vacuum pump 30, pump-side shut-off valve 50, supply-side shut-off valve 60, atmospheric-side shut-off valve 70, pump-side throttle shut-off valves 83 (first pump-side throttle shut-off valve 831, second pump-side throttle shut-off valve 832, third pump-side throttle shut-off valve 833), and supply-side throttle shut-off valves 93 (first supply-side throttle shut-off valve 931, second supply-side throttle shut-off valve 932) by signal lines for transmitting detection signals or instruction signals. However, to avoid making the diagrams complicated, the signal lines are not shown in the diagrams.

[0041] Next, the inspection using the vacuum apparatus 1 of this embodiment will be described.

[0042] In this embodiment, for example, in the manufacturing process of a motor product coil 2, a vacuum device 1 is used to inspect the coil 2 for pinholes. The operation of each part of the vacuum device 1 is controlled by a control unit 10.

[0043] First, the inspector places the coil 2 to be inspected inside the chamber 20 and closes the lid of the chamber 20. Then, the inspector starts controlling the vacuum device 1 using the control unit 10.

[0044] <5> Figure 2 shows a series of processes S100 related to the control of the vacuum device 1 by the control unit 10. S100 is started, for example, when an operator presses the control start switch of the control unit 10.

[0045] In S101, the control unit 10 opens the atmospheric shutoff valve 70 and operates the vacuum pump 30 with the pump-side shutoff valve 50, the supply side shutoff valve 60, the pump-side throttle shutoff valves 83 (first pump-side throttle shutoff valve 831, second pump-side throttle shutoff valve 832, third pump-side throttle shutoff valve 833), and the supply side throttle shutoff valves 93 (first supply side throttle shutoff valve 931, second supply side throttle shutoff valve 932) closed. After S101, the process proceeds to S102.

[0046] In S102, the control unit 10 closes the atmospheric shut-off valve 70 and opens the pump-side shut-off valve 50 and the first pump-side throttle shut-off valve 831. As a result, the air in the chamber 20 is drawn into the vacuum pump 30 via the inter-pump passage 111, the first pump-side passage 811, and the inter-pump passage 113. This reduces the pressure in the chamber 20. After S102, the process proceeds to S103.

[0047] In S103, the control unit 10 determines whether a predetermined time has elapsed since closing the atmospheric shutoff valve 70 in S102. If it determines that the predetermined time has elapsed (S103: YES), the process proceeds to S104. On the other hand, if it determines that the predetermined time has not elapsed (S103: NO), the process returns to S103.

[0048] In S104, the control unit 10 detects the pressure inside the chamber 20 using the vacuum gauge 17. After S104, the process proceeds to S105. The control unit 10 continues to detect the pressure inside the chamber 20 using the vacuum gauge 17 from S104 onward.

[0049] In S105, the control unit 10 determines whether the pressure inside the chamber 20, detected by the vacuum gauge 17 in S104, is lower than the target pressure. If it is determined that the pressure inside the chamber 20 is lower than the target pressure (S105: YES), the process proceeds to S106. On the other hand, if it is determined that the pressure inside the chamber 20 is equal to or greater than the target pressure (S105: NO), the process proceeds to S107. The target pressure is set to a pressure within the range of, for example, 100 to 1000 Pa.

[0050] In S106, the control unit 10 closes the first pump-side throttle shutoff valve 831, opens the second pump-side throttle shutoff valve 832, and opens the supply-side shutoff valve 60 and the first supply-side throttle shutoff valve 931. As a result, air in the chamber 20 is drawn into the vacuum pump 30 via the inter-pump passage 111, the second pump-side passage 812, the first pump-side throttle 851, and the inter-pump passage 113, while nitrogen is supplied from the fluid supply unit 40 into the chamber 20 via the inter-supply-partition passage 133, the first supply-partition throttle 951, the first supply-partition passage 911, and the inter-supply-partition passage 131. This increases the pressure inside the chamber 20. After S106, the process proceeds to S108.

[0051] In S107, the control unit 10 closes the first pump-side throttle shutoff valve 831, opens the second pump-side throttle shutoff valve 832, and opens the supply-side shutoff valve 60 and the second supply-side throttle shutoff valve 932. As a result, air in the chamber 20 is drawn into the vacuum pump 30 via the inter-pump passage 111, the second pump-side passage 812, the first pump-side throttle 851, and the inter-pump passage 113, while nitrogen is supplied from the fluid supply unit 40 into the chamber 20 via the inter-supply-unit passage 133, the second supply-unit-side throttle 952, the second supply-unit-side passage 912, and the inter-supply-unit passage 131. This reduces the pressure inside the chamber 20. After S107, the process proceeds to S108.

[0052] In S108, the control unit 10 determines whether the pressure inside the chamber 20, as detected by the vacuum gauge 17, has reached the target pressure. If it determines that the pressure inside the chamber 20 has reached the target pressure (S108: YES), the process proceeds to S109. On the other hand, if it determines that the pressure inside the chamber 20 has not reached the target pressure (S108: NO), the process returns to S108.

[0053] In S109, the control unit 10 determines whether the first supply unit side throttling valve 931 is open or not. If it determines that the first supply unit side throttling valve 931 is open (S109: YES), the process proceeds to S110. On the other hand, if it determines that the first supply unit side throttling valve 931 is not open (closed) (S109: NO), the process proceeds to S111. Note that if the process in S109 is reached after S106, the first supply unit side throttling valve 931 is open and the second supply unit side throttling valve 932 is closed. On the other hand, if the process in S109 is reached after S107, the first supply unit side throttling valve 931 is closed and the second supply unit side throttling valve 932 is open.

[0054] In S110, the control unit 10 closes the second pump-side throttle shutoff valve 832, opens the third pump-side throttle shutoff valve 833, closes the first supply unit-side throttle shutoff valve 931, and opens the second supply unit-side throttle shutoff valve 932. As a result, air in the chamber 20 is drawn into the vacuum pump 30 via the inter-pump passage 111, the third pump-side passage 813, the second pump-side throttle 852, and the inter-pump passage 113, while nitrogen is supplied from the fluid supply unit 40 into the chamber 20 via the inter-supply unit passage 133, the second supply unit-side throttle 952, the second supply unit-side passage 912, and the inter-supply unit passage 131. As a result, the pressure in the chamber 20 stabilizes near the target pressure. After S110, the process proceeds to S120.

[0055] In S111, the control unit 10 closes the second pump-side throttle shutoff valve 832 and opens the third pump-side throttle shutoff valve 833. As a result, air in the chamber 20 is drawn into the vacuum pump 30 via the inter-pump passage 111, the third pump-side passage 813, the second pump-side throttle 852, and the inter-pump passage 113, while nitrogen is supplied from the fluid supply unit 40 into the chamber 20 via the inter-supply unit passage 133, the second supply unit-side throttle 952, the second supply unit-side passage 912, and the inter-supply unit passage 131. As a result, the pressure in the chamber 20 stabilizes near the target pressure. After S111, the process proceeds to S120.

[0056] In S120, the control unit 10 waits to perform a pinhole inspection of coil 2. Here, the inspector performs the pinhole inspection by applying voltage to coil 2 and checking for the presence or absence of discharge. After the inspection of coil 2 is complete, the process proceeds to S121.

[0057] In S121, the control unit 10 closes the pump-side shut-off valve 50 and the third pump-side throttle shut-off valve 833, closes the supply-side shut-off valve 60 and the second supply-side throttle shut-off valve 932, and opens the atmospheric-side shut-off valve 70, thereby stopping the operation of the vacuum pump 30. As a result, the pressure inside the chamber 20 is released to the atmosphere. After S121, the control unit 10 completes the series of processes S100.

[0058] After the completion of S100, the operator opens the lid of the chamber 20, removes the inspected coil 2, and places the next coil 2 to be inspected into the chamber 20. Thereafter, the pinhole inspection of coil 2 is repeated in the same manner as described above.

[0059] In this embodiment, the pump-side shut-off valve 50, the supply-side shut-off valve 60, the pump-side throttle shut-off valves 83 (first pump-side throttle shut-off valve 831, second pump-side throttle shut-off valve 832, third pump-side throttle shut-off valve 833), and the supply-side throttle shut-off valves 93 (first supply-side throttle shut-off valve 931, second supply-side throttle shut-off valve 932) are adjusted only once during system configuration and do not have a control function to adjust the flow rate (opening degree) by the control unit 10. Furthermore, the throttle diameters of the first pump-side throttle 851, second pump-side throttle 852, first supply-side throttle 951, and second supply-side throttle 952 are preset so that the pressure inside the chamber 20 increases in S106, decreases in S107, and stabilizes near the target pressure in S110 and S111.

[0060] Next, examples of operation controlled by the control unit 10 of the vacuum device 1 (Pattern 1, Pattern 2) will be explained based on Figure 3.

[0061] At time t0, the vacuum pump 30 is operating with the atmospheric shutoff valve 70 open and the pump-side shutoff valve 50, the supply side shutoff valve 60, the pump-side throttle shutoff valves 83 (first pump-side throttle shutoff valve 831, second pump-side throttle shutoff valve 832, third pump-side throttle shutoff valve 833), and the supply side throttle shutoff valves 93 (first supply side throttle shutoff valve 931, second supply side throttle shutoff valve 932) closed, so the pressure inside the chamber 20 is the same as atmospheric pressure.

[0062] When the atmospheric shut-off valve 70 closes at time t1 and the pump-side shut-off valve 50 and the first pump-side throttle shut-off valve 831 open, the pressure inside the chamber 20 then decreases rapidly.

[0063] In Pattern 1, at time t2, after a predetermined time has elapsed from time t1, the pressure inside the chamber 20 is lower than the target pressure. At time t2, the first pump-side throttle shutoff valve 831 closes, the second pump-side throttle shutoff valve 832 opens, and the first supply-side throttle shutoff valve 931 opens, after which the pressure inside the chamber 20 gradually increases.

[0064] On the other hand, in pattern 2, at time t2, after a predetermined time has elapsed from time t1, the pressure inside the chamber 20 is equal to or greater than the target pressure. At time t2, the first pump-side throttle shutoff valve 831 closes, the second pump-side throttle shutoff valve 832 opens, and the second supply-side throttle shutoff valve 932 opens, after which the pressure inside the chamber 20 gradually decreases.

[0065] <6> When the pressure in chamber 20 reaches the target pressure at time t3, the second pump-side throttle shutoff valve 832 closes, the third pump-side throttle shutoff valve 833 opens, the first supply-side throttle shutoff valve 931 closes, and the second supply-side throttle shutoff valve 932 opens. After this, the pressure in chamber 20 stabilizes near the target pressure.

[0066] From time t3 onwards, a pinhole inspection of coil 2 is performed. Once the inspection of coil 2 is complete, at time t4, the third pump-side throttle shutoff valve 833 and the second supply-side throttle shutoff valve 932 close, and the atmospheric-side shutoff valve 70 opens. Subsequently, the pressure inside chamber 20 is released to the atmosphere.

[0067] As shown in Figure 3, the pressure inside chamber 20, which was equal to atmospheric pressure at time t1, reached the target pressure in a short time (times t1 to t3). Also, during the inspection of coil 2 (times t3 to t4), the vacuum level inside chamber 20 remained stable in the low vacuum region.

[0068] As explained above, <1> In this embodiment, the pump-side throttling section 80 includes three pump-side flow paths 81, a pump-side throttling section shut-off valve 83, and a pump-side throttling section 85. The pump-side flow paths 81 allow fluid to flow between the chamber 20 and the vacuum pump 30. The pump-side throttling section shut-off valve 83 is provided in each of the three pump-side flow paths 81 and can allow or shut off the flow of fluid in the pump-side flow paths 81 by opening and closing. The pump-side throttling section 85 is provided in two of the three pump-side flow paths 81 and can restrict the flow of fluid in the pump-side flow paths 81.

[0069] The supply side throttling section 90 has two supply side flow paths 91, a supply side throttling section shut-off valve 93, and a supply side throttling section 95. The supply side flow paths 91 allow fluid to flow between the fluid supply section 40 and the chamber 20. The supply side throttling section shut-off valve 93 is provided in each of the two supply side flow paths 91 and can allow or shut off the flow of fluid in the supply side flow paths 91 by opening and closing. The supply side throttling section 95 is provided in each of the two supply side flow paths 91 and can restrict the flow of fluid in the supply side flow paths 91.

[0070] In this embodiment, with the simple configuration described above, the chamber 20 can be stabilized from atmospheric pressure to a low vacuum region (pressure) at high speed by simply controlling the opening and closing of the atmospheric side shut-off valve 70, the pump side throttle shut-off valve 83, and the supply side throttle shut-off valve 93 while operating the vacuum pump 30.

[0071] Therefore, during the inspection of the object being inspected, the time required for vacuuming from atmospheric pressure and for the vacuum level to stabilize can be shortened, thereby improving productivity.

[0072] Also, <2> This embodiment further includes a pump-side shut-off valve 50 and a supply-side shut-off valve 60. The pump-side shut-off valve 50 can allow or shut off the flow of fluid between the chamber 20 and the vacuum pump 30 by opening and closing. The supply-side shut-off valve 60 can allow or shut off the flow of fluid between the chamber 20 and the fluid supply unit 40 by opening and closing.

[0073] The pump-side shut-off valve 50 and the supply-side shut-off valve 60 allow for more reliable control of the fluid flow between the chamber 20 and the vacuum pump 30, and between the chamber 20 and the fluid supply unit 40.

[0074] Also, <3> In this embodiment, the pump-side passage 81 includes a first pump-side passage 811 provided between the chamber 20 and the vacuum pump 30, a second pump-side passage 812 provided in parallel with the first pump-side passage 811 between the chamber 20 and the vacuum pump 30, and a third pump-side passage 813 provided in parallel with the first pump-side passage 811 and the second pump-side passage 812 between the chamber 20 and the vacuum pump 30.

[0075] The pump-side throttle shut-off valve 83 comprises a first pump-side throttle shut-off valve 831, a second pump-side throttle shut-off valve, and a third pump-side throttle shut-off valve. The first pump-side throttle shut-off valve 831 is provided in the first pump-side flow path 811 and can allow or shut off the flow of fluid in the first pump-side flow path 811 by opening and closing. The second pump-side throttle shut-off valve 832 is provided in the second pump-side flow path 812 and can allow or shut off the flow of fluid in the second pump-side flow path 812 by opening and closing. The third pump-side throttle shut-off valve 833 is provided in the third pump-side flow path 813 and can allow or shut off the flow of fluid in the third pump-side flow path 813 by opening and closing.

[0076] The pump-side throttle 85 includes a first pump-side throttle 851 and a second pump-side throttle 852. The first pump-side throttle 851 is provided in the second pump-side flow path 812 and has a predetermined throttle diameter, making it possible to restrict the fluid flow in the second pump-side flow path 812. The second pump-side throttle 852 is provided in the third pump-side flow path 813 and has a throttle diameter smaller than that of the first pump-side throttle 851, making it possible to restrict the fluid flow in the third pump-side flow path 813.

[0077] The supply section side flow path 91 includes a first supply section side flow path 911 provided between the fluid supply section 40 and the chamber 20, and a second supply section side flow path 912 provided in parallel with the first supply section side flow path 911 between the fluid supply section 40 and the chamber 20.

[0078] The supply side throttling shutoff valve 93 includes a first supply side throttling shutoff valve 931 and a second supply side throttling shutoff valve 932. The first supply side throttling shutoff valve 931 is provided in the first supply side passage 911 and can allow or block the flow of fluid in the first supply side passage 911 by opening and closing. The second supply side throttling shutoff valve 932 is provided in the second supply side passage 912 and can allow or block the flow of fluid in the second supply side passage 912 by opening and closing.

[0079] The supply side throttle 95 includes a first supply side throttle 951 and a second supply side throttle 952. The first supply side throttle 951 is provided in the first supply side flow path 911 and has a predetermined throttle diameter, making it possible to restrict the fluid flow in the first supply side flow path 911. The second supply side throttle 952 is provided in the second supply side flow path 912 and has a throttle diameter smaller than that of the first supply side throttle 951, making it possible to restrict the fluid flow in the second supply side flow path 912.

[0080] This embodiment describes the specific configuration of the pump-side throttling section 80 and the supply-side throttling section 90.

[0081] Also, <4> This embodiment further includes a control unit 10. The control unit 10 can control the operation of the vacuum pump 30, the atmospheric side shut-off valve 70, the pump side throttle shut-off valve 83, and the supply side throttle shut-off valve 93 based on the pressure detected by the vacuum gauge 17.

[0082] The control unit 10 can automatically stabilize the chamber 20 from atmospheric pressure to a low vacuum region at high speed.

[0083] Also, <5> In this embodiment, the control unit 10 operates the vacuum pump 30 with the atmospheric shut-off valve 70 open and the pump-side throttle shut-off valve 83 and the supply-side throttle shut-off valve 93 closed, closing the atmospheric shut-off valve 70 and opening the first pump-side throttle shut-off valve 831.

[0084] If the pressure detected by the vacuum gauge 17 is lower than the target pressure when the timer time is reached, which is a predetermined time after the atmospheric shut-off valve 70 has been closed, the control unit 10 closes the first pump-side throttle shut-off valve 831, opens the second pump-side throttle shut-off valve 832, and opens the first supply-side throttle shut-off valve 931.

[0085] When the timer time is reached, if the pressure detected by the vacuum gauge 17 is equal to or greater than the target pressure, the control unit 10 closes the first pump-side throttle shutoff valve 831, opens the second pump-side throttle shutoff valve 832, and opens the second supply-side throttle shutoff valve 932.

[0086] After the timer time has elapsed, at the time the pressure detected by the vacuum gauge 17 reaches the target pressure, if the first supply unit side throttle shutoff valve 931 was open, the control unit 10 closes the second pump side throttle shutoff valve 832, opens the third pump side throttle shutoff valve 833, closes the first supply unit side throttle shutoff valve 931, and opens the second supply unit side throttle shutoff valve 932.

[0087] When the target pressure is reached, if the first supply side throttle shutoff valve 931 is closed, the control unit 10 closes the second pump side throttle shutoff valve 832 and opens the third pump side throttle shutoff valve 833.

[0088] The control unit 10 can perform simple opening and closing control of the atmospheric pressure shutoff valve 70, the pump-side throttle shutoff valve 83, and the supply-side throttle shutoff valve 93, thereby stabilizing the chamber 20 from atmospheric pressure to a low vacuum region at high speed.

[0089] Also, <6> In this embodiment, the pressure inside the chamber 20 is stable near the target pressure with the third pump-side throttle shutoff valve 833 and the second supply-side throttle shutoff valve 932 open.

[0090] In this embodiment, by adjusting the third pump-side throttle shutoff valve 833 and the second supply-side throttle shutoff valve 932 once during system configuration, the pressure inside the chamber 20 can be stabilized near the target pressure with the third pump-side throttle shutoff valve 833 and the second supply-side throttle shutoff valve 932 open during inspection, without requiring complex control such as flow rate adjustment.

[0091] (Other embodiments) In other embodiments, there may be four or more pump-side passages and pump-side throttle shut-off valves. Furthermore, there may be any number of pump-side throttles, provided they are provided in at least two of the three or more pump-side passages. Also, there may be three or more supply-side passages, supply-side throttle shut-off valves, and supply-side throttles.

[0092] In other embodiments, the pump-side shut-off valve and the supply-side shut-off valve may not be provided. Even in this case, the chamber can be stabilized from atmospheric pressure to a low vacuum region at high speed simply by opening and closing the atmospheric-side shut-off valve, the pump-side throttle shut-off valve, and the supply-side throttle shut-off valve.

[0093] Furthermore, in other embodiments, a control unit may not be provided. Even in this case, for example, an operator can manually stabilize the chamber from atmospheric pressure to a low vacuum region at high speed by simply opening and closing a shut-off valve on the pump side based on the pressure detected by a vacuum gauge.

[0094] Furthermore, in the above-described embodiment, an example was shown where the "fluid" supplied into the chamber by the fluid supply unit is "nitrogen". In contrast, in other embodiments, the "fluid" supplied into the chamber by the fluid supply unit may be a fluid (gas) other than nitrogen, such as air.

[0095] Furthermore, the objects of inspection using a vacuum device are not limited to coils used in motor products; conductors covered with insulating coatings and other similar materials can also be considered.

[0096] Thus, this disclosure is not limited to the embodiments described above, and can be implemented in various forms without departing from its essence.

[0097] The control unit and its method described herein may be implemented by a dedicated computer provided by configuring a processor and memory programmed to perform one or more functions embodied by a computer program. Alternatively, the control unit and its method described herein may be implemented by a dedicated computer provided by configuring a processor by one or more dedicated hardware logic circuits. Alternatively, the control unit and its method described herein may be implemented by one or more dedicated computers configured by a combination of a processor and memory programmed to perform one or more functions and a processor configured by one or more hardware logic circuits. Furthermore, the computer program may be stored as instructions executed by the computer on a computer-readable non-transitional tangible recording medium. [Explanation of symbols]

[0098] 1 Vacuum device, 2 Coil (to be inspected), 17 Vacuum gauge, 20 Chamber, 30 Vacuum pump, 40 Fluid supply unit, 70 Atmospheric side shut-off valve, 80 Pump side throttle, 81 Pump side flow path, 83 Pump side throttle shut-off valve, 85 Pump side throttle, 90 Supply unit side throttle, 91 Supply unit side flow path, 93 Supply unit side throttle shut-off valve, 95 Supply unit side throttle

Claims

1. A chamber (20) capable of accommodating the fluid and the object to be inspected (2), A vacuum pump (30) capable of sucking the fluid inside the chamber when operated, A fluid supply unit (40) capable of supplying fluid into the chamber, An atmospheric shut-off valve (70) that can allow or block the flow of fluid between the chamber and the atmosphere by opening and closing, A pump-side throttling section (80) capable of restricting the fluid flow between the chamber and the vacuum pump, A supply unit side throttling section (90) capable of restricting the fluid flow between the fluid supply unit and the chamber, The chamber is equipped with a vacuum gauge (17) capable of detecting the pressure inside the chamber, The pump-side restricting portion is Three pump-side passages (81) through which fluid can flow between the chamber and the vacuum pump, Three pump-side throttle shut-off valves (83) are provided in each of the three pump-side flow paths, and are capable of allowing or blocking the flow of fluid in the pump-side flow paths by opening and closing operations, It has two pump-side throttles (85) provided in two of the three pump-side flow paths, which are capable of restricting the fluid flow in the pump-side flow paths. The aforementioned supply side throttling portion is Two fluid supply side passages (91) through which fluid can flow between the fluid supply unit and the chamber, Two supply-side throttling shutoff valves (93) are provided in each of the two supply-side flow paths, and are capable of allowing or blocking the flow of fluid in the supply-side flow paths by opening and closing operations, Each of the two supply side passages has two supply side restrictors (95) that are provided and capable of restricting the fluid flow in the supply side passages, The pump-side throttle shut-off valve includes a first pump-side throttle shut-off valve (831), a second pump-side throttle shut-off valve (832), and a third pump-side throttle shut-off valve (833). The supply side throttling shutoff valve includes a first supply side throttling shutoff valve (931) and a second supply side throttling shutoff valve (932). The system further includes a control unit capable of controlling the operation of the pump-side throttle shutoff valve and the supply-side throttle shutoff valve, The control unit, With the atmospheric shutoff valve open and all of the pump-side throttle shutoff valves and all of the supply-side throttle shutoff valves closed, the vacuum pump is operated. The atmospheric side shut-off valve is closed, and the first pump side throttle shut-off valve is opened. At the point in time when the timer time is reached, which is a predetermined time after the atmospheric shutoff valve has been closed, If the pressure detected by the vacuum gauge is lower than the target pressure, The first pump-side throttle shutoff valve is closed and the second pump-side throttle shutoff valve is opened. Open the shut-off valve of the first supply unit side throttling section, At the time the aforementioned timer time is reached, If the pressure detected by the vacuum gauge is equal to or greater than the target pressure, The first pump-side throttle shutoff valve is closed and the second pump-side throttle shutoff valve is opened. Open the shut-off valve on the second supply side throttling section, After the aforementioned timer time is reached, At the point when the pressure detected by the vacuum gauge reaches the target pressure, The second pump-side throttle shutoff valve is closed and the third pump-side throttle shutoff valve is opened. A vacuum device that closes the first supply unit side throttling shutoff valve and opens the second supply unit side throttling shutoff valve.

2. A pump-side shut-off valve (50) that can allow or block the flow of fluid between the chamber and the vacuum pump by opening and closing, A supply unit side shut-off valve (60) that can allow or shut off the flow of fluid between the chamber and the fluid supply unit by opening and closing operation, The vacuum apparatus according to claim 1, further comprising:

3. The pump side flow path is A first pump-side passage (811) is provided between the chamber and the vacuum pump. A second pump-side passage (812) is provided in parallel with the first pump-side passage between the chamber and the vacuum pump, and Between the chamber and the vacuum pump, there is a third pump-side passage (813) provided in parallel with the first pump-side passage and the second pump-side passage, The pump-side throttle shutoff valve is A first pump-side throttle shutoff valve (831) is provided in the first pump-side flow path and is capable of allowing or blocking the flow of fluid in the first pump-side flow path by opening and closing operation. The second pump-side throttling shutoff valve (832) is provided in the second pump-side passage and is capable of allowing or blocking the flow of fluid in the second pump-side passage by opening and closing, The third pump-side throttling shutoff valve (833) is provided in the third pump-side flow path and is capable of allowing or blocking the flow of fluid in the third pump-side flow path by opening and closing operation. The aforementioned pump-side restrictor is A first pump-side throttle (851) is provided in the second pump-side passage, and is set to have a predetermined throttle diameter smaller than the passage diameter of the second pump-side passage, thereby enabling the restriction of the fluid flow in the second pump-side passage, and The third pump-side flow path has a second pump-side throttle (852) provided therein, which has a throttle diameter smaller than that of the first pump-side throttle and is capable of restricting the fluid flow in the third pump-side flow path. The supply side channel is, A first supply unit side flow path (911) is provided between the fluid supply unit and the chamber, and The fluid supply unit has a second supply unit side passage (912) provided in parallel with the first supply unit side passage between the fluid supply unit and the chamber, The aforementioned supply side throttle shutoff valve is A first supply side throttling shutoff valve (931) is provided in the first supply side flow path and is capable of allowing or blocking the flow of fluid in the first supply side flow path by opening and closing operation, The second supply side throttling shutoff valve (932) is provided in the second supply side flow path and is capable of allowing or blocking the flow of fluid in the second supply side flow path by opening and closing operation. The aforementioned supply unit side throttle is A first supply side constrictor (951) is provided in the first supply side flow path, and is set to a predetermined constriction diameter smaller than the flow path diameter of the first supply side flow path, capable of constricting the fluid flow in the first supply side flow path, and The vacuum apparatus according to claim 1 or 2, further comprising a second supply side constrictor (952) provided in the second supply side flow path, having a constriction diameter smaller than that of the first supply side constrictor, and capable of restricting the fluid flow in the second supply side flow path.

4. The vacuum apparatus according to claim 1 or 2, wherein the pressure inside the chamber is stable near the target pressure when the third pump-side throttle shutoff valve and the second supply-side throttle shutoff valve are open.

Images