Monitoring device and cooling system

Abstract

To provide a monitoring apparatus and a cooling system for determining abnormalities in a cooling mechanism when air-cooled and water-cooled are used.SOLUTION: A monitoring apparatus comprises: monitoring means for monitoring each temperature of an air-cooled component and a plurality of water-cooled components measured by a plurality of temperature sensors; and determination means for determining an abnormality in any one of cooling mechanisms provided in each of the plurality of water-cooled components based on a temperature relation between the respective temperatures.SELECTED DRAWING: Figure 2

Description

Technical Field

[0001] This invention relates to a monitoring device and a cooling system.

Background Art

[0002] A cooling system using a refrigerant pump and a cooling system for a power conversion device mounted on an electric vehicle are known (see, for example, Patent Documents 1 and 2).

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Patent Document 2

Patent Document 3

Summary of the Invention

Problems to be Solved by the Invention

[0004] By the way, in an optical transmission device (such as a transponder), an air-cooling system is adopted to dissipate heat from components mounted on a substrate. In addition, depending on the optical transmission device, a cooling system that uses both air cooling and water cooling is adopted.

[0005] In such a cooling system, the refrigerant may decrease due to natural evaporation or liquid leakage of the refrigerant used for water cooling. When the refrigerant decreases, the cooling capacity of the cooling mechanism that cools components using the refrigerant decreases. Therefore, a periodic determination as to whether the cooling capacity can be maintained is required. If the cooling capacity cannot be maintained, for example, the cooling system may be replaced or the refrigerant may be replenished.

[0006] When determining whether to maintain cooling capacity, one might consider installing a water flow sensor in the cooling system to measure the amount of refrigerant and determine whether to maintain cooling capacity. However, installing a water flow sensor in the cooling system could increase its size. Furthermore, in this case, the amount of refrigerant required to maintain cooling capacity changes depending on the refrigerant temperature and the environment surrounding the optical transmission device (e.g., temperature, humidity, atmospheric pressure), making it difficult to uniquely set a threshold for determining whether to maintain cooling capacity for each environment. Setting multiple thresholds is also conceivable, but in this case, various conditions for determining whether to maintain cooling capacity must be considered separately, leading to another problem of increased complexity in the setting process.

[0007] Furthermore, even if a decrease in the amount of refrigerant exceeding a threshold is detected, there may still be enough refrigerant remaining in the cooling system to cool the components. In such cases, it is not appropriate to replace the cooling system or replenish the refrigerant, so it is desirable to accurately determine the timing of replacement or replenishment.

[0008] Therefore, one objective is to provide a monitoring device and cooling system that can detect abnormalities in the cooling mechanism when air cooling and water cooling are used. [Means for solving the problem]

[0009] In one embodiment, the monitoring device is A monitoring means that monitors the temperatures of air-cooled components and water-cooled components measured by multiple temperature sensors, and based on the temperature relationships of the said temperatures, If the temperature of the air-cooled component is normal, and the temperatures of all of the water-cooled components are abnormal, Each of the multiple water-cooled components is provided It is determined that the amount of refrigerant supplied to the cooling mechanism has decreased. The first means of judgment and , Includes It is. In one embodiment, the monitoring device includes monitoring means for monitoring the temperatures of an air-cooled component and a plurality of water-cooled components measured by a plurality of temperature sensors, and second determination means for determining, based on the temperature relationships of the respective temperatures, that if the temperature of the air-cooled component is normal, the temperature of some of the plurality of water-cooled components is normal, and the temperature of the remaining portion of the plurality of water-cooled components is abnormal, then the cooling mechanism provided in the remaining portion has failed. In one embodiment, the monitoring device includes monitoring means for monitoring the temperatures of an air-cooled component and a plurality of water-cooled components measured by a plurality of temperature sensors, and a third determination means for determining, based on the temperature relationship of the respective temperatures, that if the temperature of the air-cooled component is abnormal and the temperatures of all of the plurality of water-cooled components are abnormal, then the temperature of the component environment including the air-cooled component and the plurality of water-cooled components is abnormal.

[0010] In one embodiment, the cooling system monitors the temperatures of air-cooled components and water-cooled components measured by multiple temperature sensors. gaze A monitoring device, the air-cooled component, the plurality of water-cooled components, and Each of the multiple water-cooled components is provided A monitored device monitored by the monitoring device, provided with a cooling mechanism, the plurality of temperature sensors, a water-cooling pump for supplying refrigerant to the cooling mechanism, and an air-cooling fan for cooling the air-cooled target component. The monitoring device includes at least one of the following: a first determination means that determines that the refrigerant supplied to the cooling mechanism has decreased when the temperature of the air-cooled component is normal and the temperatures of the plurality of water-cooled components are all abnormal; a second determination means that determines that the cooling mechanism provided in the remaining components has malfunctioned when the temperature of the air-cooled component is normal, the temperature of some of the plurality of water-cooled components is normal, and the temperature of the remaining water-cooled components is abnormal; and a third determination means that determines that the temperature of the component environment including the air-cooled component and the plurality of water-cooled components is abnormal when the temperature of the air-cooled component is abnormal and the temperatures of the plurality of water-cooled components are all abnormal. .

Advantages of the Invention

[0011] It is possible to determine an abnormality of the cooling mechanism when air cooling and water cooling are used.

Brief Description of the Drawings

[0012] [Figure 1] FIG. 1 is an example of a plan view of a cooling system. [Figure 2] FIG. 2 is a schematic diagram for explaining the details of the cooling system. [Figure 3] FIG. 3(a) is an example of a plan view of the cooling mechanism. FIG. 3(b) is an example of a front view of the cooling mechanism. [Figure 4] FIG. 4(a) is a diagram showing an example of the functional configuration of the monitoring device. FIG. 4(b) is a diagram showing an example of the hardware configuration of the monitoring device. [Figure 5] FIG. 5 is a flowchart showing an example of the operation of the monitoring device. [Figure 6] FIG. 6(a) is a graph (Part 1) showing an example of the temperature change of the air-cooled target component. FIG. 6(b) is a graph (Part 1) showing an example of the temperature change of the water-cooled target component. [Figure 7] FIG. 7(a) is a graph (Part 2) showing an example of the temperature change of the air-cooled target component. FIG. 7(b) is a graph (Part 2) showing an example of the temperature change of the water-cooled target component. [Figure 8] FIG. 8(a) is a graph (Part 3) showing an example of the temperature change of the air-cooled target component. FIG. 8(b) is a graph (Part 3) showing an example of the temperature change of the water-cooled target component. [Figure 9] FIG. 9 is a table for explaining a determination based on the relationship between the rotation speed of the air-cooling fan and the respective temperatures of the air-cooled target component and the water-cooled target component.

Embodiments for Carrying Out the Invention

[0013] Hereinafter, embodiments for implementing the present case will be described with reference to the drawings.

[0014] As shown in FIG. 1, the cooling system ST includes a monitoring device 10 and a monitored device 20. The monitoring device 10 monitors the monitored device 20. The cooling system ST may be an optical transmission device (specifically, a transponder), or may be a ROADM (Reconfigurable Optical Add / Drop Multiplexer).

[0015] [[ID=II]]The monitored device 20 has a device 100 to be cooled and a cooling device 200. The device 100 to be cooled includes a plurality of optical processing devices 110, 120, 130. The optical processing device 110 performs, for example, a process of converting an electrical signal into an optical signal and a process of converting an optical signal into an electrical signal. Since the optical processing devices 120 and 130 also perform the same processes as the optical processing device 110, detailed descriptions thereof are omitted. Each of the optical processing devices 110, 120, 130 can be individually removed from the cooling device 200 and can also be attached to the cooling device 200. That is, the optical processing devices 110, 120, 130 are detachable from the cooling device 200. For this reason, for example, when the optical processing device 130 fails while the optical processing devices 110 and 120 are not faulty, the optical processing device 130 can be replaced alone.

[0016] The optical processing units 110, 120, and 130 all have similar configurations. Therefore, the optical processing unit 110 will be described as an example. The optical processing unit 110 includes a substrate 111, a plurality of air-cooled components 112, 113, a plurality of water-cooled components 114, 115, cooling mechanisms 116, 117, etc. The water-cooled components 114 and 115 are hidden by the cooling mechanisms 116 and 117, respectively. In this embodiment, the optical processing unit 110 has a plurality of air-cooled components 112, 113, but the optical processing unit 110 may have only one of the air-cooled components 112 or 113. The air-cooled components 112, 113 and the water-cooled components 114, 115 may be LSIs (Large-Scale Integration) or DSPs (Digital Signal Processors). The air-cooled components 112 and 113 and the water-cooled components 114 and 115 may be FPGAs (Field Programmable Gate Arrays) or ASICs (Application Specific Integrated Circuits).

[0017] Multiple air-cooled components 112, 113 and multiple water-cooled components 114, 115 are all mounted on the circuit board 111. A cooling mechanism 116 is attached to the top surface of water-cooled component 114. A cooling mechanism 117 is attached to the top surface of water-cooled component 115. In this way, the cooling mechanisms 116 and 117 are installed in close contact with the top surfaces of water-cooled components 114 and 115. As will be described in detail later, a refrigerant flows inside the cooling mechanisms 116 and 117, so the cooling mechanisms 116 and 117 release the heat generated from the water-cooled components 114 and 115 through heat exchange with the refrigerant. The water-cooled components 114 and 115 are cooled by the heat dissipation from the water-cooled components 114 and 115 due to the refrigerant. Since the water-cooled components 114 and 115 generate more heat than the air-cooled components 112 and 113, cooling mechanisms 116 and 117 with high cooling capacity are used.

[0018] The cooling system 200 includes a plurality of cooling units 210, 220, 230, 240, a radiator 250, a refrigerant passage 260, and the like. Since the radiator 250 has been removed from the cooling system 200, the refrigerant passage 260 is exposed and shown. In this embodiment, the cooling system 200 has four cooling units 210, 220, 230, 240, but the number of these is not particularly limited. The cooling units 210, 220, 230, 240 can be removed from the cooling system 200 and can also be attached to the cooling system 200. Thus, the cooling units 210, 220, 230, 240 are detachable from the cooling system 200.

[0019] The refrigerant passage 260 is connected to multiple cooling units 210, 220, 230, and 240. Refrigerant flows through the refrigerant passage 260. The refrigerant flowing through the refrigerant passage 260 flows into the multiple cooling units 210, 220, 230, and 240, respectively. As will be described in detail later, the cooling units 210, 220, 230, and 240 include water-cooled pumps that pump the refrigerant. The refrigerant pumped by the water-cooled pumps flows through the refrigerant passage 260 and flows into the cooling mechanisms 116 and 117 through the refrigerant passage 118 of the photoprocessing device 110, which is connected to the refrigerant passage 260.

[0020] As described above, the refrigerant circulating inside the cooling mechanisms 116 and 117 absorbs heat generated from the water-cooled components 114 and 115 and is discharged into the refrigerant passage 119 of the photoprocessing device 110. The refrigerant passage 119 is connected to the refrigerant passage 260. As a result, the post-heat-absorbing refrigerant, which is the refrigerant after heat absorption, flows from the refrigerant passage 119 into the refrigerant passage 260 and is dissipated by the radiator 250 located above the refrigerant passage 260. As a result, the cooled refrigerant, which is the refrigerant after being cooled by heat dissipation, flows into the cooling units 210, 220, 230, and 240. When the cooled refrigerant flows into the cooling units 210, 220, 230, and 240, the cooling units 210, 220, 230, and 240 pressurize and pump the cooled refrigerant again. In this way, the refrigerant circulates through refrigerant passages 118, 119, and 260, changing its state to absorb heat, coolant, etc., while transferring heat from the water-cooled components 114 and 115. As a result, the water-cooled components 114 and 115 are cooled.

[0021] Refer to Figure 2 for a more detailed explanation of the cooling system ST.

[0022] The cooling unit 210 includes a reservoir tank 211, a water cooling pump 212, and an air cooling fan 213. The reservoir tank 211 is not required for the cooling unit 210. The water cooling pump 212 includes a pressure fan 214, such as a screw fan. Note that the cooling units 220, 230, and 240 (see Figure 1) have basically the same configuration as the cooling unit 210. For this reason, the following explanation will basically use the cooling unit 210 as an example, and detailed explanations of the cooling units 220, 230, and 240 will be omitted.

[0023] The reservoir tank 211 stores the cooled refrigerant that flows into the cooling unit 210. The water cooling pump 212 pumps the cooled refrigerant stored in the reservoir tank 211 by the rotation of the pressure fan 214, and it flows out into the first passage 261 included in the refrigerant passage 260. The first passage 261 is connected to the refrigerant passage 118. Therefore, the cooled refrigerant that flows out into the first passage 261 flows into the refrigerant passage 118. Note that the refrigerant passage 118 is located between the refrigerant passage 119 and the top surface of the substrate 111, so the refrigerant passage 118 is partially hidden by the refrigerant passage 119. A portion of the cooled refrigerant that flows into the refrigerant passage 118 flows into the inside of the cooling mechanism 116. The remaining cooled refrigerant flows into the inside of the cooling mechanism 117 (see Figure 1).

[0024] The post-heat-absorbing refrigerant that has passed through the cooling mechanism 116 flows into the refrigerant passage 119. The post-heat-absorbing refrigerant that has flowed into the refrigerant passage 119 merges with the post-heat-absorbing refrigerant that has passed through the cooling mechanism 117 and flowed out into the refrigerant passage 119. Since the refrigerant passage 119 is connected to the second passage 262 of the refrigerant passage 260, the post-heat-absorbing refrigerant flows into the second passage 262. A portion of the post-heat-absorbing refrigerant that has flowed into the second passage 262 flows into the third passage 263 of the refrigerant passage 260.

[0025] The post-heat-absorbing refrigerant that flows into the third passage 263 is cooled by the radiator 250 and converted into a cooled refrigerant. Air generated by the rotation of the cooling fan 213 passes through the radiator 250. The air passes through the gaps in the radiator 250 and underneath it. As the radiator 250 is cooled by the air, the post-heat-absorbing refrigerant is converted into a cooled refrigerant. The cooled refrigerant, which has been converted from the post-heat-absorbing refrigerant, flows into the cooling unit 210. In this way, the refrigerant circulates while changing its state between the post-heat-absorbing refrigerant and the cooled refrigerant.

[0026] The airflow that passes through the radiator 250 reaches the air-cooled components 112 and 113. Therefore, the air-cooled components 112 and 113 are cooled by the airflow. On the other hand, the water-cooled components 114 and 115 are positioned in a location where they are less likely to be reached by the airflow due to their relative position to the air-cooled components 112 and 113. For this reason, the water-cooled components 114 and 115 are cooled using a refrigerant and cooling mechanisms 116 and 117 (specifically, water cooling or liquid cooling), taking into account the amount of heat generated by the water-cooled components 114 and 115.

[0027] Here, a temperature sensor TS1 is attached to the air-cooled component 112. A temperature sensor TS2 is attached to the air-cooled component 113. A temperature sensor TS3 is attached to the water-cooled component 114. Although not shown, a temperature sensor is also attached to the water-cooled component 115 (see Figure 1). Temperature sensor TS1 measures the temperature of the air-cooled component 112 and notifies the monitoring device 10. Temperature sensor TS2 measures the temperature of the air-cooled component 113 and notifies the monitoring device 10. Temperature sensor TS3 measures the temperature of the water-cooled component 114 and notifies the monitoring device 10. The temperature sensor attached to the water-cooled component 115 measures the temperature of the water-cooled component 115 and notifies the monitoring device 10.

[0028] The monitoring device 10 detects the temperatures of the air-cooled components 112, 113 and the water-cooled components 114, 115 measured by temperature sensors TS1, TS2, TS3, etc., and confirms the temperature rise of each component. Based on the temperature relationships of each component, the monitoring device 10 determines whether there is an abnormality in any of the cooling mechanisms 116, 117 or a decrease in refrigerant. Based on the determination result, the monitoring device 10 controls the rotation speed of the air-cooling fans 213, 234, etc., or controls the rotation speed of the pressure fan 214 of the water-cooling pump 212.

[0029] Next, the details of the cooling mechanism 116 will be described with reference to Figure 3. Note that the cooling mechanism 117 has essentially the same configuration as the cooling mechanism 116, so a detailed explanation will be omitted.

[0030] As shown in Figures 3(a) and (b), the cooling mechanism 116 includes a metal plate 116A containing aluminum and a meandering tube 116B. Examples of the cooling mechanism 116 include a cooling plate and a chill plate. The meandering tube 116B is located inside the plate 116A. The meandering tube 116B penetrates the inside of the plate 116A. The meandering tube 116B includes an inlet 116C and an outlet 116D. The inlet 116C is connected to the refrigerant passage 118 (see Figure 2). Therefore, the cooled refrigerant flowing through the refrigerant passage 118 flows into the meandering tube 116B from the inlet 116C.

[0031] As shown in Figure 3(b), the top surface of the water-cooled component 114 mounted on the substrate 111 and the bottom surface of the plate 116A are in close contact, for example, via an adhesive. Therefore, the heat generated in the water-cooled component 114 (specifically, warmth) is transferred through the plate 116A to the cooled refrigerant flowing through the meandering pipe 116B. On the other hand, the heat of the cooled refrigerant (specifically, coldness) is transferred through the plate 116A to the water-cooled component 114. In this way, heat exchange takes place between the water-cooled component 114 and the cooled refrigerant. As a result, the water-cooled component 114 is cooled, while the cooled refrigerant changes into a heat-absorbing refrigerant as it passes through the inside of the meandering pipe 116B. The heat-absorbing refrigerant is led to the outlet 116D. The outlet 116D is connected to the refrigerant passage 119 (see Figure 2). Therefore, after heat absorption, the refrigerant flows out from the outlet 116D and into the refrigerant passage 119, and circulates in the direction of the second passage 262 of the refrigerant passage 260.

[0032] Next, with reference to Figure 4, the details of the monitoring device 10 will be described.

[0033] As shown in Figure 4(a), the monitoring device 10 comprises a temperature detection unit 11, an alarm determination unit 12, and an operation control unit 13. The alarm determination unit 12 comprises a temperature monitoring unit 12A and an abnormality determination unit 12B. The temperature monitoring unit 12A is an example of a monitoring means. The abnormality determination unit 12B is an example of a determination means.

[0034] The alarm determination unit 12 can be implemented by a CPU (Central Processing Unit) 10A and a memory 10B that stores a program corresponding to the flowchart described later, as shown in Figure 4(b). The memory 10B includes, for example, RAM (Random Access Memory) and ROM (Read Only Memory). By reading and executing the program, the CPU 10A implements the temperature monitoring unit 12A and the abnormality determination unit 12B. The temperature detection unit 11 can be implemented by a temperature detector 10C including hardware circuitry. The temperature detector 10C may be provided on the circuit board 111 instead of on the monitoring device 10. The operation control unit 13 can be implemented by a controller 10D including hardware circuitry. The controller 10D may be provided on the circuit board 111 instead of on the monitoring device 10.

[0035] The temperature detection unit 11 detects each temperature notified by temperature sensors TS1, TS2, TS3, etc., and confirms the temperature rise of each temperature. The temperature monitoring unit 12A acquires each temperature detected by the temperature detection unit 11 and monitors the temperatures of the air-cooled components 112, 113 and the water-cooled components 114, 115. The abnormality determination unit 12B determines an abnormality in either the cooling mechanism 116, 117 or a decrease in refrigerant based on the temperature relationship between the temperatures of the air-cooled components 112, 113 and the water-cooled components 114, 115. Specifically, the abnormality determination unit 12B determines abnormalities such as a decrease in cooling capacity due to the cooling mechanism 116, 117 separating from the water-cooled components 114, 115, or a decrease in the refrigerant supplied to the cooling mechanism 116, 117. Based on the determination result, the abnormality determination unit 12B generates a first control instruction to control the air-cooling fan 213 and a second control instruction to control the water-cooling pump 212, and outputs them to the operation control unit 13.

[0036] The operation control unit 13 controls the operation of the air-cooling fan 213 based on a first control instruction and controls the operation of the water-cooling pump 212 (specifically, the operation of the pressure fan 214) based on a second control instruction. For example, the operation control unit 13 increases the rotational speed of the air-cooling fan 213. On the other hand, even if the rotational speed of the pressure fan 214 is increased, the refrigerant is cooled by the radiator 250, so the cooling capacity remains almost constant. For this reason, the operation control unit 13 controls the rotational speed of the pressure fan 214 to a rotational speed that maintains a constant cooling capacity without increasing the rotational speed. The air-cooling fan 213 and the water-cooling pump 212 each periodically notify the abnormality detection unit 12B of their own status (for example, the current rotational speed).

[0037] In this way, the alarm determination unit 12 determines abnormalities in the cooling mechanisms 116 and 117, or a decrease in refrigerant. If the alarm determination unit 12 determines that an abnormality in the cooling mechanisms 116 and 117 or a decrease in refrigerant has occurred, it may notify an operation system (not shown) connected to the monitoring device 10, for example, of an alarm corresponding to the type of occurrence.

[0038] Next, the operation of the monitoring device 10 will be described with reference to Figures 5 to 8.

[0039] First, as shown in Figure 5, the temperature detection unit 11 confirms the temperature rise of the air-cooled components 112, 113 and the water-cooled components 114, 115 (step S1). More specifically, when power is supplied to the cooling system ST and the cooling system ST starts operating, the monitoring device 10 and the monitored device 20 each start processing. For example, when the photoprocessing device 110 of the monitored device 20 starts processing, the air-cooled components 112, 113 and the water-cooled components 114, 115 generate heat. As a result, the temperatures of the air-cooled components 112, 113 and the water-cooled components 114, 115 rise. Also, when the cooling device 200 of the monitored device 20 starts processing, the air-cooling fan 213 of the cooling unit 210 rotates at an initial speed of 1000 revolutions per second. Furthermore, when the cooling device 200 starts processing, the pressure fan 214 of the water-cooling pump 212 rotates at a predetermined speed to pump the refrigerant. As a result, the air-cooled components 112 and 113 and the water-cooled components 114 and 115 are cooled.

[0040] As shown in Figure 6(a), for example, if the ambient temperature on the substrate 111 is 20°C, the heat generated by the air-cooled components 112 and 113 and the cooling by the air-cooling fans 213 and 233 will keep the temperatures of the air-cooled components 112 and 113 at 60°C. Also, as shown in Figure 6(b), if the ambient temperature on the substrate 111 is 20°C, the heat generated by the water-cooled components 114 and 115 and the cooling by the cooling mechanisms 116 and 117 will keep the temperatures of the water-cooled components 114 and 115 at 60°C.

[0041] When the temperature detection unit 11 confirms a temperature rise in each component, the abnormality determination unit 12B determines whether the required number of cooling units 210, ..., 240 are installed, as shown in Figure 5 (Step S2). In this embodiment, if four cooling units 210, ..., 240 are installed in the cooling device 200, the abnormality determination unit 12B determines that the required number of cooling units 210, ..., 240 are installed (Step S2: YES). For example, if any of the cooling units 210, ..., 240 are missing from the cooling device 200, the abnormality determination unit 12B determines that the required number of cooling units 210, ..., 240 are not installed (Step S2: NO). In this case, the abnormality determination unit 12B determines that there is an installation shortage (Step S3), issues an alarm if necessary, and terminates the process. Furthermore, the abnormality detection unit 12B can determine whether the required number of cooling units 210,...,240 are installed based on a predetermined electrical signal that is activated each time a cooling unit 210,...,240 is attached to the cooling device 200.

[0042] If the required number of cooling units 210, ..., 240 are installed, the abnormality detection unit 12B determines whether the air cooling fan 213 and the water cooling pump 212 are operating normally (step S4). For example, if there are no periodic notifications from either the air cooling fan 213 or the water cooling pump 212, or both, the abnormality detection unit 12B determines that either the air cooling fan 213 or the water cooling pump 212, or both, are not operating normally (step S4: NO). In this case, the abnormality detection unit 12B determines that the air cooling fan 213 or the water cooling pump 212 is malfunctioning (step S5), issues an alarm if necessary, and terminates the process. On the other hand, if there are periodic notifications from both the air cooling fan 213 and the water cooling pump 212, the abnormality detection unit 12B determines that the air cooling fan 213 or the water cooling pump 212 are operating normally (step S4: YES).

[0043] In this case, the abnormality detection unit 12B determines whether the rotation speed of the cooling fan 213 has reached its upper limit (step S6). For example, as shown in Figure 6(a), when the ambient temperature rises, the temperature of the cooling components 112 and 113 also rises in accordance with the rise in ambient temperature. If the temperature of the cooling components 112 and 113 exceeds 80°C at time T1, which is the first threshold temperature at which the rotation speed of the cooling fan 213 is changed, the abnormality detection unit 12B changes the rotation speed of the cooling fan 213 from its initial value to 1500 revolutions per second via the operation control unit 13. As a result, the cooling components 112 and 113 are cooled by the airflow, the temperature of the cooling components 112 and 113 decreases, and the temperature is maintained at 60°C for a certain period of time.

[0044] Furthermore, as shown in Figure 6(b), when the ambient temperature rises, the temperatures of the water-cooled components 114 and 115 also rise in proportion to the increase in ambient temperature. Here, as described above, when the rotation speed of the air-cooling fan 213 is changed to 1500 revolutions per second at time T1, the radiator 250 is cooled by the airflow, causing the refrigerant temperature to decrease. As a result, as shown in Figure 6(b), the temperatures of the water-cooled components 114 and 115 also decrease for a short period of time. The rate at which the temperatures of the water-cooled components 114 and 115 decrease is smaller than the rate at which the temperatures of the air-cooled components 112 and 113 decrease.

[0045] Returning to Figure 6(a), as the ambient temperature rises further, the temperature of the air-cooled components 112 and 113 rises again from 60°C in accordance with the further increase in ambient temperature. When the temperature of the air-cooled components 112 and 113 exceeds 80°C again at time T2, which is the first threshold temperature at which the rotation speed of the air-cooled fan 213 is changed, the abnormality detection unit 12B changes the rotation speed of the air-cooled fan 213 from 1500 rpm to the upper limit of the rotation speed (for example, 2000 rpm or 2500 rpm) via the operation control unit 13. As a result, the air-cooled components 112 and 113 are cooled by the airflow, and the temperature of the air-cooled components 112 and 113 decreases to 60°C. However, once the rotation speed of the air-cooled fan 213 has reached its upper limit, the abnormality detection unit 12B cannot increase the rotation speed of the air-cooled fan 213 because the rotation speed is at its upper limit.

[0046] As a result, after time T2, the temperatures of the air-cooled components 112 and 113 may exceed 100°C, which is the guaranteed temperature limit for those components. For similar reasons, as shown in Figure 6(b), after time T2, the temperatures of the water-cooled components 114 and 115 may also exceed 100°C, which is the guaranteed temperature limit for those components. In this way, the abnormality determination unit 12B determines whether the rotation speed of the air-cooled fan 213 has reached its upper limit based on the notification of its own status output from the air-cooled fan 213. If the rotation speed of the air-cooled fan 213 has not reached its upper limit (step S6: NO), the unit determines that the rotation speed of the air-cooled fan 213 is within the normal range (step S7) and terminates the process.

[0047] Furthermore, if the rotation speed of the air-cooling fan 213 is within the normal range (i.e., has not reached the upper limit of the rotation speed), the abnormality detection unit 12B determines that the temperatures of both the air-cooled components 112 and 113 and the water-cooled components 114 and 115 are normal. In this case, the abnormality detection unit 12B determines that the cooling system ST is operating normally. Specifically, the abnormality detection unit 12B determines that there are no malfunctions such as detachment of the cooling mechanisms 116 and 117, no decrease in refrigerant, and no blockage of the ventilation holes (or vents) provided in the rack (or housing) that houses the cooling system ST.

[0048] On the other hand, if the rotation speed of the cooling fan 213 has reached its upper limit (step S6: YES), the temperature monitoring unit 12A starts acquiring each temperature detected by the temperature detection unit 11 and monitors each temperature (step S8). More specifically, the temperature monitoring unit 12A monitors each temperature and determines whether each temperature exceeds a second threshold temperature for determining component abnormality. The second threshold temperature is higher than the first threshold temperature and lower than the guaranteed limit temperature of the component temperature (for example, 85°C or 90°C).

[0049] Here, the temperature monitoring unit 12A determines whether the only components exceeding the second threshold temperature are the water-cooled components 114 and 115 (step S9). For example, if the components exceeding the second threshold temperature include not only the water-cooled components 114 and 115 but also the air-cooled components 112 and 113, the temperature monitoring unit 12A determines that the only components exceeding the second threshold temperature are not the water-cooled components 114 and 115 (step S9: NO). In this case, the abnormality determination unit 12B determines that there is a temperature abnormality in the component environment (step S10), notifies an alarm if necessary, and terminates the process.

[0050] For example, as shown in Figure 7(a), if the ventilation holes of the rack housing the cooling system ST are blocked by dust or paper fragments, the ambient temperature on the substrate 111 will rise from 20°C to over 60°C. In response to this rise in ambient temperature, the temperatures of the air-cooled components 112 and 113 will also rise above the second threshold temperature. In this case, the abnormality detection unit 12B will determine that the temperatures of the air-cooled components 112 and 113 are abnormal. Also, as shown in Figure 7(b), in response to the rise in ambient temperature, the temperatures of the water-cooled components 114 and 115 will also rise above the second threshold temperature. In this way, when the temperatures of the air-cooled components 112 and 113 and the water-cooled components 114 and 115 rise and both reach abnormal temperatures, the abnormality detection unit 12B can determine, based on the temperature relationship between the temperatures, that the cooling capacity is not insufficient due to a decrease in refrigerant. In other words, in the case of such temperature changes, the abnormality detection unit 12B will determine that there is an environmental abnormality in the environment surrounding the components.

[0051] On the other hand, if the temperature monitoring unit 12A determines that only the water-cooled components 114 and 115 are exceeding the second threshold temperature (step S9: YES), the abnormality determination unit 12B determines whether there are multiple water-cooled components exceeding the second threshold temperature (step S11). For example, if only the water-cooled components 114 and 115 are exceeding the second threshold temperature, as shown in Figure 8(a), if the ambient temperature on the substrate 111 is within the range of 20°C to 25°C, the temperature of the air-cooled components 112 and 113 will be within the normal range of 60°C to 80°C. On the other hand, as shown in Figure 8(b), even if the ambient temperature on the substrate 111 is within the range of 20°C to 25°C, the temperature of the water-cooled components 114 and 115 may exceed the second threshold temperature and become abnormal.

[0052] Thus, if the temperatures of the air-cooled components 112 and 113 are within the normal range, and the temperatures of the water-cooled components 114 and 115 are within the normal range, the abnormality detection unit 12B can determine that there is either a malfunction in the cooling mechanisms 116 and 117 or a decrease in the refrigerant supplied to the cooling mechanisms 116 and 117. In this case, the abnormality detection unit 12B determines whether there is a malfunction in the cooling mechanisms 116 and 117 or a decrease in the refrigerant supplied to the cooling mechanisms 116 and 117 based on the temperature relationship of the water-cooled components 114 and 115.

[0053] Here, if there are not multiple water-cooled components exceeding the second threshold temperature (step S11: NO), the abnormality detection unit 12B determines that there is a malfunction in the cooling mechanism provided in the water-cooled component whose temperature is rising (step S12), and terminates the process by notifying an alarm as necessary. For example, if the temperature of water-cooled component 114 exceeds the second threshold temperature, the abnormality detection unit 12B can determine that the temperature of water-cooled component 114 is abnormal. On the other hand, if the temperature of water-cooled component 115 does not exceed the second threshold temperature, the abnormality detection unit 12B can determine that the temperature of water-cooled component 115 is normal. In such a case, it is unlikely that there is a decrease in the refrigerant flowing in common to both cooling mechanisms 116 and 117. Therefore, in this case, the abnormality detection unit 12B determines that there is a malfunction in water-cooled component 114, such as the cooling mechanism 116 detaching from the water-cooled component 114 whose temperature is rising.

[0054] On the other hand, if there are multiple water-cooled components whose temperatures exceed the second threshold temperature (step S11: YES), the abnormality determination unit 12B determines that there is a decrease in refrigerant (step S13), issues an alarm as necessary, and terminates the process. For example, if the temperatures of water-cooled components 114 and 115 all exceed the second threshold temperature, the abnormality determination unit 12B determines that the temperatures of water-cooled components 114 and 115 are abnormal. In such a case, it is conceivable that the unit might determine that the detachment of the cooling mechanism 116 from water-cooled component 114 and the detachment of the cooling mechanism 117 from water-cooled component 115 occurred simultaneously. However, it is extremely rare for these two events to occur simultaneously. Therefore, in such a case, the abnormality determination unit 12B determines that there is a decrease in the refrigerant supplied to both cooling mechanisms 116 and 117. In this way, the abnormality determination unit 12B can determine whether or not there is a decrease in refrigerant depending on whether or not there are multiple water-cooled components whose temperatures exceed the second threshold temperature.

[0055] Referring to Figure 9, the criteria for the abnormality detection unit 12B, based on the relationship between the rotation speed of the air-cooling fan 213 and the temperatures of the air-cooled components 112 and 113, and the temperatures of the water-cooled components 114 and 115, will be explained. In Figure 9, air-cooled component #A corresponds to air-cooled component 112. Air-cooled component #B corresponds to air-cooled component 113. Water-cooled component #A corresponds to water-cooled component 114. Water-cooled component #B corresponds to water-cooled component 115.

[0056] First, if the rotation speed of the air-cooling fan 213 is within the normal range, the abnormality detection unit 12B estimates that the temperatures of the air-cooled components 112, 113 and the water-cooled components 114, 115 are all within the normal range. In this case, the abnormality detection unit 12B determines that the cooling system ST is operating normally. Next, if the rotation speed of the air-cooling fan 213 reaches its upper limit, and the temperatures of the air-cooled components 112, 113 and the water-cooled components 114, 115 are all within the normal range, the abnormality detection unit 12B determines that the ambient temperature is abnormal. For example, the abnormality detection unit 12B determines that the ventilation holes of the rack housing the cooling system ST are blocked.

[0057] Next, if the rotation speed of the air-cooling fan 213 reaches its upper limit, and the temperatures of the air-cooled components 112 and 113 and the water-cooled component 115 are within normal limits, but the temperature of the water-cooled component 114 is abnormal, the abnormality detection unit 12B determines that the cooling mechanism 116 is malfunctioning. Finally, if the rotation speed of the air-cooling fan 213 reaches its upper limit, and the temperatures of the air-cooled components 112 and 113 are within normal limits, but the temperatures of the water-cooled components 114 and 115 are abnormal, the abnormality detection unit 12B determines that the refrigerant supplied to the cooling mechanisms 116 and 117 is decreasing.

[0058] Thus, according to this embodiment, in a cooling system ST that uses both air cooling and water cooling, the abnormality detection unit 12B can determine an abnormality in the cooling mechanism, such as a failure of either the cooling mechanism 116 or 117, or a decrease in the refrigerant supplied to the cooling mechanisms 116 or 117.

[0059] Although preferred embodiments of the present invention have been described in detail above, the invention is not limited to specific embodiments, and various modifications and changes are possible within the scope of the gist of the invention as described in the claims. For example, the refrigerant described above may be chilled water or antifreeze.

[0060] Furthermore, in the embodiments described above, a second threshold temperature was used to determine whether the temperatures of the air-cooled components 112, 113 and the water-cooled components 114, 115 were normal or abnormal. However, temperature determination is not limited to using a second threshold temperature. For example, the abnormality determination unit 12B may determine whether the temperatures of the air-cooled components 112, 113 and the water-cooled components 114, 115 are normal or abnormal based on the temperature gradient acquired periodically by the temperature monitoring unit 12A. In this case, for example, the abnormality determination unit 12B may determine that the acquired temperature is abnormal if the temperature gradient is a steep positive gradient.

[0061] Furthermore, the following additional information is disclosed regarding the above explanation. (Note 1) A monitoring device including monitoring means for monitoring the temperatures of air-cooled components and water-cooled components measured by multiple temperature sensors, and determination means for determining an abnormality in any of the cooling mechanisms provided for each of the water-cooled components based on the temperature relationships of the respective temperatures. (Note 2) The monitoring device according to Note 1, characterized in that the determination means determines that the refrigerant supplied to the cooling mechanism has decreased when the temperature of the air-cooled component is normal and the temperatures of all of the plurality of water-cooled components are abnormal. (Note 3) The monitoring device according to Note 1, characterized in that the determination means determines that the cooling mechanism provided in the remaining parts has failed if the temperature of the air-cooled part is normal, the temperature of some of the plurality of water-cooled parts is normal, and the temperature of the remaining parts of the plurality of water-cooled parts is abnormal. (Note 4) The monitoring device according to Note 1, characterized in that the determination means determines that the temperature of the component environment including the air-cooled component and the plurality of water-cooled components is abnormal if the temperature of the air-cooled component is abnormal and the temperatures of all of the plurality of water-cooled components are abnormal. (Note 5) The monitoring device according to any one of Notes 1 to 4, characterized in that the cooling mechanism is a plate that is in close contact with the water-cooled component and exchanges heat between the water-cooled component and the refrigerant supplied to the cooling mechanism. (Note 6) The monitoring device according to any one of Notes 1 to 4, characterized in that the air-cooled component, the plurality of water-cooled components, the cooling mechanism, the plurality of temperature sensors, the water-cooled pump that supplies refrigerant to the cooling mechanism, and the air-cooled fan that cools the air-cooled component are provided in the monitored device that is monitored by the monitoring device. (Note 7) The monitoring device according to any one of Notes 1 to 4, characterized in that the determination means determines the abnormality based on the temperature relationship between the rotation speed of the cooling fan that cools the air-cooled component and each of the temperatures. (Note 8) The monitoring device according to Note 7, characterized in that the determination means estimates that each temperature is a normal temperature when the rotational speed has not reached the upper limit of the rotational speed. (Note 9) A cooling system comprising: a monitoring device that monitors the temperatures of an air-cooled component and a plurality of water-cooled components measured by a plurality of temperature sensors, and determines an abnormality in any of the cooling mechanisms provided in each of the plurality of water-cooled components based on the temperature relationship of the respective temperatures; and a monitored device that is monitored by the monitoring device, which is provided with the air-cooled component, the plurality of water-cooled components, the cooling mechanism, the plurality of temperature sensors, a water-cooling pump that supplies refrigerant to the cooling mechanism, and an air-cooling fan that cools the air-cooled component. [Explanation of Symbols]

[0062] 10 Monitoring equipment 12A temperature monitoring section 12B Abnormality judgment section 20 Monitored device 100 devices to be cooled 110,120,130 Photonics Processing Equipment 112,113 Air-cooled parts 114,115 Water-cooled parts 116,117 Cooling mechanism 200 Cooling device 210, 220, 230, 240 Cooling Units 212 Water Cooling Pump 213,233 Air-cooling fans ST Cooling System TS1, TS2, TS3 temperature sensors

Claims

1. Monitoring means for monitoring the temperatures of air-cooled components and water-cooled components measured by multiple temperature sensors, Based on the temperature relationships of each of the aforementioned temperatures, if the temperature of the air-cooled component is normal and the temperatures of all of the water-cooled components are abnormal, a first determination means determines that the refrigerant supplied to the cooling mechanism provided in each of the water-cooled components has decreased. A monitoring device that includes this.

2. Monitoring means for monitoring the temperatures of air-cooled components and water-cooled components measured by multiple temperature sensors, Based on the temperature relationships of each of the above temperatures, if the temperature of the air-cooled component is normal, the temperature of some of the multiple water-cooled components is normal, and the temperature of the remaining parts of the multiple water-cooled components is abnormal, a second determination means determines that the cooling mechanism provided in the remaining parts has failed. A monitoring device that includes this.

3. Monitoring means for monitoring the temperatures of air-cooled components and water-cooled components measured by multiple temperature sensors, Based on the temperature relationships of each of the aforementioned temperatures, if the temperature of the air-cooled component is abnormal and the temperatures of all of the water-cooled components are abnormal, a third determination means determines that the temperature of the component environment including the air-cooled component and the water-cooled components is abnormal. A monitoring device that includes this.

4. The cooling mechanism is a plate that is in close contact with the water-cooled component and exchanges heat between the water-cooled component and the refrigerant supplied to the cooling mechanism. The monitoring device according to claim 1 or 2.

5. The air-cooled component, the plurality of water-cooled components, the cooling mechanism, the plurality of temperature sensors, the water-cooling pump that supplies refrigerant to the cooling mechanism, and the air-cooling fan that cools the air-cooled component are provided in the monitored device that is monitored by the monitoring device. The monitoring device according to claim 1 or 2.

6. A monitoring device that monitors the temperatures of air-cooled components and water-cooled components measured by multiple temperature sensors, A monitored device, monitored by the monitoring device, includes the air-cooled component, the plurality of water-cooled components, a cooling mechanism provided in each of the plurality of water-cooled components, the plurality of temperature sensors, a water-cooling pump that supplies refrigerant to the cooling mechanism, and an air-cooling fan that cools the air-cooled component, The aforementioned monitoring device is A first determination means that determines that the refrigerant supplied to the cooling mechanism has decreased when the temperature of the air-cooled component is normal and the temperatures of all of the water-cooled components are abnormal, A second determination means determines that if the temperature of the air-cooled component is normal, the temperature of some of the water-cooled components is normal, and the temperature of the remaining water-cooled components is abnormal, then the cooling mechanism provided in the remaining components has failed. The system includes at least one third determination means that determines that the temperature of the component environment, including the air-cooled component and the multiple water-cooled components, is abnormal if the temperature of the air-cooled component is abnormal and the temperatures of all of the multiple water-cooled components are abnormal. A cooling system characterized by the following features.

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