Temperature control device

Abstract

To provide a temperature controller capable of controlling accurately, a temperature of fluid for temperature control supplied to a temperature control target as compared with a case where there is no control means for controlling temperature control capability in supply means on the basis of a detection result of detection means for detecting a thermal load of the temperature control target.SOLUTION: A temperature controller 100 includes: a fluid supply section 104 which adjusts fluid 101 for temperature control to a predetermined temperature and supplies the fluid; detection means 105 which is arranged on a temperature control target device 102 side which is a temperature control target supplied with fluid for temperature control from the fluid supply part and detects a thermal load of the temperature control target; and a control unit 300 which controls temperature control capability in the fluid supply part on the basis of, a detection result of the detection means.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a temperature control device.

Background Art

[0002] Conventionally, as technologies related to temperature control devices, for example, those disclosed in Patent Document 1 and Patent Document 2 have already been proposed.

[0003] Patent Document 1 includes a temperature-adjusted member provided with a member flow path inside, a first temperature control unit that controls the temperature of a first temperature adjustment medium to a first temperature, a second temperature control unit that controls the temperature of a second temperature adjustment medium to a second temperature different from the first temperature, a first flow path through which the first temperature adjustment medium flows between the member flow path and the first temperature control unit, a second flow path through which the second temperature adjustment medium flows between the member flow path and the second temperature control unit, a third flow path through which the first temperature adjustment medium flows through the first temperature control unit without passing through the member flow path, a fourth flow path through which the second temperature adjustment medium flows through the second temperature control unit without passing through the member flow path, a first three-way valve provided at a branch portion between the first flow path and the third flow path, a second three-way valve provided at a branch portion between the second flow path and the fourth flow path, and a third three-way valve provided at a branch portion between the first flow path and the second flow path.

[0004] Patent Document 2 describes a plasma processing apparatus configured to supply a heat transfer medium to a flow channel provided inside a mounting table on which a substrate is placed, which is arranged inside a processing vessel of the plasma processing apparatus. The heat transfer medium supplied to the flow channel is supplied from a first temperature supply provided by a first temperature control unit when etching is performed on the substrate, to a second temperature supply provided by a second temperature control unit when cleaning is performed to remove reaction products adhering to an electrostatic chuck provided on the upper part of the mounting table after the substrate has been removed from the processing vessel. The apparatus is configured to include: a switching step, which switches the heat transfer medium supplied to a flow channel provided inside a mounting table on which a substrate is placed, from a first temperature supply provided by a first temperature control unit when etching is performed on the substrate, to a second temperature supply provided by a second temperature control unit when cleaning is performed to remove reaction products adhering to an electrostatic chuck provided on the upper part of the mounting table after the substrate has been removed from the processing vessel; an ignition step, which starts supplying cleaning gas to the processing vessel and ignites the plasma; a slope calculation step, which calculates the slope of the temperature change of the heat transfer medium based on the temperature of the heat transfer medium at the outlet side of the flow channel; a first control step, which controls the second temperature control unit until the temperature of the heat transfer medium at the outlet side of the flow channel stabilizes at a third temperature lower than a predetermined set value; and a second control step, which controls the second temperature control unit so that the temperature of the heat transfer medium at the outlet side of the flow channel becomes the set value. [Prior art documents] [Patent Documents]

[0005] [Patent Document 1] Japanese Patent Publication No. 2020-107684 [Patent Document 2] Japanese Patent Publication No. 2021-145095 [Overview of the Initiative] [Problems that the invention aims to solve]

[0006] The present invention aims to provide a temperature control device that can control the temperature of a temperature-controlled fluid supplied to a temperature-controlled object with high precision, compared to a case in which there is no control means that controls the temperature adjustment capability of the supply means based on the detection result of a detection means that detects the heat load of the temperature-controlled object. [Means for solving the problem]

[0007] The invention described in claim 1 is a supply means for supplying a temperature control fluid adjusted to a predetermined temperature, A detection means is provided on the side of the temperature-controlled object to which the temperature-control fluid is supplied from the supply means, and detects the heat load of the temperature-controlled object. A control means for controlling the temperature adjustment capability of the supply means based on the detection result of the detection means, Equipped with 、 The detection means is A first flow control three-way valve distributes the temperature control fluid supplied from the supply means to the temperature control target and the temperature control fluid that is not supplied to the temperature control target but returned to the supply means. A first temperature detection means for detecting the temperature of the temperature-controlled fluid supplied to the temperature-controlled object by the first flow-control three-way valve, A second temperature detection means for detecting the temperature of the temperature control fluid returning from the temperature control target, It has, The control means calculates the heat load of the temperature-controlled object based on the distribution information of the first flow control three-way valve, the flow rate of the temperature-controlled fluid supplied to the temperature-controlled object, and the detection results of the first and second temperature detection means. It is a temperature control device.

[0009] Claim 2 The invention described herein comprises a supply means comprising a first supply means for supplying a low-temperature side fluid adjusted to a predetermined first temperature on the low-temperature side, and a second supply means for supplying a high-temperature side fluid adjusted to a predetermined second temperature on the high-temperature side. Equipped with, The aforementioned Detection means The system includes a second flow control three-way valve that mixes the low-temperature fluid supplied from the first supply means and the high-temperature fluid supplied from the second supply means while controlling their flow rates, and supplies the mixture as a temperature control fluid to the temperature control target, A third flow control three-way valve distributes the temperature control fluid that has flowed through the temperature-controlled object to the first supply means and the second supply means while controlling the flow rate. A third temperature detection means for detecting the temperature of the temperature-controlled fluid supplied to the temperature-controlled object by the second flow-control three-way valve, A fourth temperature detection means for detecting the temperature of the temperature control fluid returning from the temperature control target, The temperature control device according to claim 1, comprising:

[0010] Claim 3The invention described in [reference] is such that the control means controls the temperature adjustment ability of the supply means by increasing or decreasing the flow rate of the heat exchange medium that adjusts the temperature of the temperature control fluid in the supply means via a heat exchanger. Claim 1 or 2 It is the temperature control device described in [reference].

[0013] Claim 4 The invention described in [reference] is such that the control means controls the rotational speed of the drive source that drives the refrigerator in the supply means. Claim 3 It is the temperature control device described in [reference].

[0014] Claim 5 The invention described in [reference] is the temperature control device according to claim 1, wherein the control means controls the distribution ratio in the first three-way valve for flow rate control.

[0015] <0|000086>The invention described in [reference] is the temperature control device according to claim 1, wherein the supply means includes a fourth three-way valve for flow rate control that distributes the temperature control fluid supplied from the supply means to the temperature control fluid supplied to the temperature control target and the temperature control fluid that is returned without being supplied to the temperature control target. |

[0016] Claim 7 The invention described in [reference] is such that the control means controls so that the flow rate of the temperature control fluid flowing into the fourth three-way valve for flow rate control becomes a constant value. Claim 6 It is the temperature control device described in [reference].

[0017] Claim 8 The invention described in [reference] is such that the supply means includes a storage tank that stores the temperature control fluid returned from the temperature control target, and cooling means that cools the temperature control fluid stored in the storage tank, and is the temperature control device according to claim 1.

[0018] Claim 9 The invention described in [reference] is such that the first three-way valve for flow rate control The device has an inlet into which the temperature control fluid flows, and first and second valve ports that distribute the temperature control fluid flowing in from the inlet into a portion that supplies the temperature control fluid to the temperature control target and a portion that does not supply the temperature control target but returns to the supply means. Claim 1 This is the temperature control device described in [reference]. [Effects of the Invention]

[0019] According to the present invention, it is possible to provide a temperature control device that can control the temperature of the temperature control fluid supplied to the temperature control target with high precision, compared to a case in which there is no control means that controls the temperature adjustment capacity of the supply means based on the detection result of a detection means that detects the heat load of the temperature control target. [Brief explanation of the drawing]

[0020] [Figure 1] This is a schematic diagram showing a constant temperature maintenance device (chiller device) as a temperature control device according to Embodiment 1 of the present invention. [Figure 2] This is a circuit diagram showing a refrigeration device for a constant temperature maintenance device (chiller device) as a temperature control device according to Embodiment 1 of the present invention. [Figure 3] This is a cross-sectional diagram showing a plasma processing apparatus. [Figure 4] This is a schematic diagram showing the operation of a constant temperature maintenance device (chiller device) as a temperature control device according to Embodiment 1 of the present invention. [Figure 5] This is a characteristic diagram showing the operation of a constant temperature maintenance device (chiller device) as a temperature control device according to Embodiment 1 of the present invention. [Figure 6] This is a characteristic diagram showing the operation of a conventional chiller system. [Figure 7] This is a schematic diagram showing a constant temperature maintenance device (chiller device) as a temperature control device according to Embodiment 2 of the present invention. [Figure 8] This graph shows the temperature characteristics of a chiller system. [Figure 9] This is a schematic diagram showing the operation of a constant temperature maintenance device (chiller device) as a temperature control device according to Embodiment 2 of the present invention. [Figure 10] This is a schematic diagram showing the operation of a constant temperature maintenance device (chiller device) as a temperature control device according to Embodiment 2 of the present invention. [Figure 11] This graph shows the switching characteristics of a three-way valve used for flow control. [Figure 12] This shows a front view, a right side view, and a bottom view of the actuator section of a three-way valve type motor valve, which is an example of a three-way valve for flow control according to Embodiment 1 of the present invention. [Figure 13] Figure 12(b) is a cross-sectional view along line AA showing a three-way valve type motor valve as an example of a three-way valve for flow control according to Embodiment 1 of the present invention. [Figure 14] This is a cross-sectional view along line BB of Figure 12(a) showing a three-way valve type motor valve as an example of a three-way valve for flow control according to Embodiment 1 of the present invention. [Figure 15] This is a cross-sectional perspective view of the main part of a three-way valve type motor valve, which is an example of a three-way valve for flow control according to Embodiment 1 of the present invention. [Figure 16] This is a diagram showing the valve seat configuration. [Figure 17] This is a diagram showing the relationship between the valve seat and the valve stem. [Figure 18] This is a diagram illustrating the configuration of OmniSeal. [Figure 19] This is a cross-sectional view showing the OmniSeal in place. [Figure 20] This is a diagram showing a modified version of OmniSeal. [Figure 21] This is a diagram showing the configuration of a wave washer. [Figure 22] This is a perspective view diagram showing the adjustment ring. [Figure 23] This is a diagram illustrating the operation of the valve stem. [Figure 24] This is a diagram showing the valve stem. [Figure 25] This is a diagram illustrating the operation of the valve stem. [Figure 26] This is a cross-sectional view showing the operation of a three-way valve type motor valve, which is an example of a three-way valve for flow control according to Embodiment 1 of the present invention. [Modes for carrying out the invention]

[0021] Embodiments of the present invention will be described below with reference to the drawings.

[0022] [Embodiment 1] <Outline configuration of a chiller system> Figure 1 is a schematic diagram showing a constant temperature maintenance device (chiller device) as an example of a temperature control device according to Embodiment 1 of the present invention.

[0023] This chiller device 100 is used, for example, in semiconductor manufacturing equipment that involves plasma etching, as described later, and controls the temperature of a semiconductor wafer or the like, which is an example of a temperature-controlled object (workpiece) W, to maintain it at a constant temperature.

[0024] As shown in Figure 1, the chiller device 100 comprises, broadly speaking, a fluid supply unit 104 as an example of a supply means that adjusts the temperature control fluid 101 to a predetermined temperature and supplies it to a temperature-controlled device 102, which is an example of a temperature-controlled device, via a supply pipe 103; a detection means 105 located outside the chiller device 100 and positioned directly in front of the temperature-controlled device 102 on the side to which the temperature control fluid 101 is supplied by the fluid supply unit 104, to detect the heat load of the temperature-controlled device 102; and a control device 300 as an example of a control means that controls the temperature adjustment capacity of the fluid supply unit 104 based on the detection result of the detection means 105.

[0025] The fluid supply unit 104 includes a storage tank 106 for storing temperature control fluid 101, a supply pump 107 for supplying temperature control fluid 101 from the storage tank 106, and a refrigeration device 108 for cooling the temperature control fluid 101 supplied by the supply pump 107 to a temperature instructed by the control device 300.

[0026] The detection means 105 includes a first flow control three-way valve 109 that distributes the temperature control fluid 101 supplied from the chiller device 100 to the temperature-controlled device 102 and the temperature control fluid 101 that is not supplied to the temperature-controlled device 102 but returned to the storage tank 106 via the return pipe 112; a first temperature sensor 110 as an example of a first temperature detection means that detects the temperature of the temperature control fluid 101 immediately before it is supplied to the temperature-controlled device 102; and a second temperature sensor 111 as an example of a second temperature detection means that detects the temperature of the temperature control fluid 101 immediately after it has flowed out of the temperature-controlled device 102. The return outlet of the first flow control three-way valve 109 is connected to the return pipe 112 via the first bypass pipe 125.

[0027] The detection means 105 detects the heat load of the temperature-controlled device 102. The first flow control three-way valve 109 determines the proportion (distribution ratio) of the temperature control fluid 101 that flows into the first flow control three-way valve 109 that is supplied to the temperature-controlled device 102. Therefore, if the flow rate of the temperature control fluid 101 flowing into the first flow control three-way valve 109 is known, the flow rate of the temperature control fluid 101 supplied to the temperature-controlled device 102 can be determined. Furthermore, by calculating the difference between the temperature of the temperature control fluid 101 immediately before it is supplied to the temperature-controlled device 102, as detected by the first temperature sensor 110 (Sup Temp1), and the temperature of the temperature control fluid 101 immediately after it flows out of the temperature-controlled device 102, as detected by the second temperature sensor 111 (Ret Temp1), the temperature change ΔT = (Ret Temp1 - Sup Temp1) associated with the temperature control fluid 101 passing through the temperature-controlled device 102 can be determined. As a result, based on the flow rate of the temperature control fluid 101 flowing into the first flow control three-way valve 109, the distribution ratio of the temperature control fluid 101 in the first flow control three-way valve 109, and the temperature difference of the temperature control fluid 101 detected by the first and second temperature sensors 110 and 111, the heat load H1 of the temperature-controlled device 102 is detected (calculated) based on the following formula (1). H1 = m·c·ΔT (1) Here, m is the mass flow rate (Kg / h) of the temperature control fluid 101, that is, the flow rate per unit time of the temperature control fluid 101 multiplied by its specific gravity, and c is the specific heat (Kw / Kg / °C) of the temperature control fluid 101.

[0028] If the temperature of the temperature control fluid 101 immediately before it is supplied to the temperature-controlled device 102 (Sup Temp1) is equal to the temperature of the temperature control fluid 101 immediately after it is discharged from the temperature-controlled device 102 (Ret Temp1), then the heat load H1 of the temperature-controlled device 102 will be zero.

[0029] On the other hand, if the temperature difference (Ret Temp1-Sup Temp1) between the temperature of the temperature control fluid 101 immediately before it is supplied to the temperature-controlled device 102 (Sup Temp1) and the temperature of the temperature control fluid 101 immediately after it flows out of the temperature-controlled device 102 (Ret Temp1) is large, and / or if the flow rate Q1 of the temperature control fluid 101 is large, then the heat load H1 of the temperature-controlled device 102 will be large.

[0030] Furthermore, a third temperature sensor 113, as an example of a third temperature detection means for detecting the temperature of the temperature control fluid 101, is positioned at the inlet just before the temperature control fluid 101 returns to the storage tank 106 via the return pipe 112.

[0031] Furthermore, a fourth temperature sensor 114, which is an example of a fourth temperature detection means for detecting the temperature of the temperature control fluid 101 supplied from the storage tank 106 to the refrigeration unit 108, is arranged in the piping 124 that supplies the temperature control fluid 101 from the storage tank 106 to the refrigeration unit 108 by the supply pump 107.

[0032] At the uppermost part of the supply pipe 103 from which the temperature control fluid 101 flows out of the refrigeration unit 108, a fifth temperature sensor 115, as an example of a fifth temperature detection means for detecting the temperature of the temperature control fluid 101 immediately after it flows out of the refrigeration unit 108, and a first flow sensor 116, as an example of a first flow rate detection means for detecting the flow rate of the temperature control fluid 101 flowing out of the refrigeration unit 108, are arranged.

[0033] The fluid supply unit 104 includes a second flow control three-way valve 117 that distributes the temperature control fluid 101, cooled by the refrigeration unit 108, to the temperature-controlled device 102, and to the temperature control fluid 101 that is not supplied to the temperature-controlled device 102 but returned to the storage tank 106 via the return piping 112. A second flow sensor 118, as an example of a second flow detection means for detecting the flow rate of the temperature control fluid 101 supplied from the fluid supply unit 104, is positioned on the outlet side of the second flow control three-way valve 117 toward the temperature-controlled device 102. The return outlet of the second flow control three-way valve 117 is connected to the return piping 112 via a second bypass piping 126.

[0034] The supply pump 107 is driven by a first inverter motor 119. The refrigeration unit 108 is driven by a second inverter motor 123. The first and second inverter motors 119 and 123 are each driven by a drive circuit (not shown), and their rotational speed and other properties are controlled by a control device 300. The rotational speed of the first and second inverter motors 119 and 123 is controlled by changing the frequency of the AC power supplied to them.

[0035] As shown in Figure 2, the refrigeration system 108 has a circuit configuration in which refrigerant gas is compressed by an electric compressor 131 and sent as high-pressure gas to a discharge-side condenser 132. In the condenser 132, the high-pressure gas is condensed and reduced in pressure via an expansion valve 133 of a pressure reducing mechanism before being sent to an evaporator 134. In the evaporator 134, the reduced-pressure gas is evaporated and drawn into the suction side of the electric compressor 131, repeating the compression process.

[0036] The refrigeration system 108 cools the temperature control fluid 101 using a heat exchanger provided in the evaporator 134. The electric compressor 131 is driven by a second inverter motor 123. By increasing the rotational speed of the second inverter motor 123, the refrigeration system 108 improves the condensation effect of the refrigerant in the condenser 132, increases the vaporization effect of the refrigerant in the evaporator 134, and thus improves the cooling capacity.

[0037] The first flow control three-way valve 109 can be configured to be switched by the control device 300 to increase or decrease the distribution ratio of the temperature control fluid 101 supplied to the temperature control device 102 according to the difference (Ret Temp1-Sup Temp1) between the temperature detected by the first temperature sensor 110 (Sup Temp1) and the temperature detected by the second temperature sensor 111.

[0038] Specifically, the first flow control three-way valve 109 is switched to increase the flow rate of the temperature control fluid 101 supplied to the temperature control device 102 if the temperature detected by the second temperature sensor 11 (Ret Temp1) is higher than the temperature detected by the first temperature sensor 110 (Sup Temp1).

[0039] The temperature-controlled device 102 has an internal temperature control channel 135 (see Figure 3) through which a temperature control fluid 101, adjusted to a predetermined temperature by the fluid supply unit 104, flows continuously.

[0040] Furthermore, as the heat transfer medium (brine) used as the temperature control fluid 101, for example, fluorine-based inert liquids such as Opteon® (manufactured by Mitsui Chemours Fluoroproducts) or Novec® (manufactured by 3M) are used in a pressure range of 0 to 1 MPa and a temperature range of approximately -85 to +120°C. The control device 300 comprehensively controls the overall operation of the chiller device 100. The control device 300 includes a CPU (Central Processing Unit), ROM (Read Only Memory), RAM (Random Access Memory), and a bus connecting these CPUs and ROMs, etc. The control device 300 receives detection signals from the first to fifth temperature sensors 110, 111, 113, 114, and 115, and the first and third flow sensors 116, 118, etc. The control device 300 is also configured to perform necessary calculations and control the opening degree (distribution ratio) of the first and second three-way valves 109 and 117 for flow control based on a program pre-stored in the ROM (not shown).

[0041] <Configuration of plasma processing apparatus> An example of semiconductor manufacturing equipment to which the chiller device 100 is applied is a plasma processing device 200 that involves plasma processing.

[0042] As shown in Figure 3, the plasma processing apparatus 200 includes a vacuum chamber 201. Inside the vacuum chamber 201 is an electrostatic chuck 136 (ESC), which is an example of a temperature-controlled object that holds a semiconductor wafer W, the object to be temperature-controlled, in an electrostatically adsorbed state. Inside the electrostatic chuck 136, there is a continuous temperature control channel 135 through which a temperature control fluid 101 supplied from the chiller device 100 flows. The plasma processing apparatus 200 also includes a lower electrode (cathode electrode) 202 which is used in conjunction with the electrostatic chuck 136 and is coupled to the lid, and an upper electrode (anode electrode) 203 which is positioned opposite the lower electrode 202 and has the lid integrally with it. Note that the temperature-controlled object may include not only the lower electrode (cathode electrode) 202 but also the upper electrode (anode electrode) 203.

[0043] Furthermore, the vacuum vessel 201 has a gas inlet 201a for introducing an active gas (reactive gas) for etching. The upper electrode 203 is connected to ground potential (GND) via an outwardly extending cover. The lower electrode 202 is connected to a radio frequency (RF) oscillator 204 and a blocking capacitor 205 via an outwardly extending cover. One end of the radio frequency (RF) oscillator 204 is connected to ground potential (GND). In addition, the vacuum vessel 201 is provided with a light emission detector 206 on the outside of a window in the wall opposite the gas inlet 201a, which monitors the light emission state when etching is performed by generating etching plasma.

[0044] The plasma used for etching the semiconductor wafer W has the characteristic of becoming extremely hot in a very short time, and the electrostatic chuck 136 that holds the semiconductor wafer W in an electrostatically adsorbed state tends to experience a rapid increase in temperature as the plasma processing progresses.

[0045] When the active gas is ionized by plasma treatment, the positive ions of the active gas are attracted to the temperature-controlled object W located on the lower electrode 202 side, which acts as the cathode electrode, and are subjected to etching. The electrons generated when the active gas is ionized by plasma treatment behave in various ways. Some electrons move toward the temperature-controlled object W, some flow to ground potential through the upper electrode 203, and a considerable portion is stored in the blocking capacitor 205 through the lower electrode 202.

[0046] Examples of temperature-controlled objects W whose temperature is controlled by the chiller device 100 include semiconductor elements such as 3D NAND flash memory, flat panel displays (FPDs), and solar cells.

[0047] <Basic operation of a chiller device> The chiller device 100 basically operates as follows:

[0048] The chiller device 100 controls the temperature of the temperature control fluid 101 supplied to the temperature-controlled device 102, for example, to be equal to a predetermined temperature such as -30°C. Here, it is desirable that the temperature of the temperature control fluid 101 supplied by the fluid supply unit 104 be set to a predetermined temperature lower than 0°C, such as -30°C, taking into consideration that the temperature of the temperature-controlled device rises as the process progresses. Of course, the temperature of the temperature control fluid 101 is not limited to around -30°C, and may be higher or lower than this temperature.

[0049] As shown in Figure 4, when the chiller device 100 controls the temperature of the temperature-controlled device 102 to approximately -30°C, it sets the opening of the first flow control three-way valve 109 to, for example, 50%, and controls the amount of temperature control fluid 101 flowing into the temperature-controlled device 102 via the supply pipe 103 and the amount of temperature control fluid 101 returned to the fluid supply unit 104 to be equal.

[0050] Furthermore, the chiller device 100 sets the opening of the second flow control three-way valve 117 to, for example, 100%, allowing all of the temperature control fluid 101 supplied from the refrigeration device 108 to flow into the first flow control three-way valve 109.

[0051] As a result, 50% of the temperature control fluid 101, which has been adjusted to a predetermined temperature of -30°C from the fluid supply unit 104, is supplied to the temperature control channel 124 of the temperature control device 102, and the temperature of the temperature control device 102 is controlled to -30°C, which is the temperature of the temperature control fluid 101 supplied from the fluid supply unit 104.

[0052] Based on the flow rate of the temperature control fluid 101 supplied to the first flow control three-way valve 109 detected by the second flow sensor 118, the control device 300 calculates the flow rate Q1 of the temperature control fluid 101 supplied to the temperature-controlled device 102 and the flow rate Q2 of the temperature control fluid 101 returning to the chiller device 100, according to the opening degree information of the first flow control three-way valve 109.

[0053] Next, the control device 300 calculates the heat load H1 of the temperature-controlled device 102 based on the calculation formula (1), using the flow rate Q1 of the temperature-controlled fluid 101 supplied to the temperature-controlled device 102 and the detection results of the first and second temperature sensors 110 and 111. H1 = m·c·Δt (1)

[0054] The control device 300 controls the frequency F1 that determines the rotational speed of the second inverter motor 123 of the refrigeration device 108 using calculation formula (2) based on the heat load H1 of the temperature-controlled device 102 detected by the detection means 105. F1 = ((H1 - b) / a) 0.5 (2)

[0055] Now, in the plasma processing apparatus 200, which is the temperature-controlled device 102, when the etching process of the semiconductor wafer W by plasma processing is started, as shown in Figure 5, the temperature T2 of the temperature control fluid 101, which flows out from the electrostatic chuck 125 that holds the semiconductor wafer W in an electrostatically adsorbed state and is detected by the second temperature sensor 111, rises rapidly.

[0056] Then, the control device 300 calculates the heat load H1 of the temperature-controlled device 102 based on the above-described equation (1), and as shown in Figure 5, controls the device to immediately and rapidly increase the frequency F1 of the AC power that determines the rotation speed of the second inverter motor 123 of the refrigeration device 108 in response to the calculated rapidly rising heat load H1.

[0057] Therefore, when the control device 300 detects a rapid increase in the heat load H1 of the temperature-controlled device 102 using the first and second temperature sensors 110 and 111, it can immediately and significantly increase the rotation speed of the second inverter motor 123 of the refrigeration device 108 to increase the cooling capacity.

[0058] As a result, the temperature control fluid 101, which has rapidly increased in temperature after passing through the temperature-controlled device 102, is efficiently cooled by the refrigeration device 108, which has a pre-increased cooling capacity, after passing through the storage tank 106, and is supplied to the temperature-controlled device 102 as temperature control fluid 101 at a predetermined temperature of approximately -30°C.

[0059] At the same time, the control device 300 controls the distribution ratio of the first flow control three-way valve 109 as needed to increase the flow rate of the temperature control fluid 101 supplied to the temperature control device 102.

[0060] Thus, according to this embodiment 1, the chiller device 100 makes it possible to control the temperature of the temperature control fluid 101 supplied to the temperature control device 102 with higher precision compared to a case without a control device 300 that controls the temperature adjustment capacity (cooling capacity) of the fluid supply unit 104 based on the detection result of a detection means 105 that detects the heat load of the temperature control device 102.

[0061] Comparative Example In contrast, conventionally, as shown in Figure 6, the temperature T4 of the temperature control fluid 101 is detected by a temperature sensor 113 located upstream of the storage tank 106, and then the frequency F1 that determines the rotation speed of the second inverter motor 123 of the refrigeration device 108 is controlled by proportional control. Therefore, when the etching process of the semiconductor wafer W by plasma processing in the plasma processing device 200 is started, the temperature T1 of the temperature control fluid 101 supplied to the temperature control device 102 rises due to overshoot, causing the temperature of the workpiece W in the temperature control device 102 to rise and reducing processing accuracy. Thus, it was difficult to control the temperature of the temperature control fluid 101 supplied to the temperature control device 102 with high precision.

[0062] [Embodiment 2] Figure 7 is a schematic diagram showing a constant temperature maintenance device (chiller device) as an example of a temperature control device according to Embodiment 2 of the present invention.

[0063] In the chiller device 100 according to Embodiment 1 described above, only one type of temperature control fluid is used as the temperature control fluid 101. However, in the chiller device 100 according to Embodiment 2, two types of temperature control fluids are used as the temperature control fluid: a low-temperature side fluid adjusted to a predetermined first temperature on the low-temperature side, and a high-temperature side fluid adjusted to a predetermined second temperature on the high-temperature side.

[0064] In other words, the chiller device 100 according to this second embodiment, as shown in Figure 7, includes a low-temperature side fluid supply unit 104-1 as an example of a first supply means for supplying a low-temperature side fluid adjusted to a predetermined constant temperature on the low-temperature side, and a high-temperature side fluid supply unit 104-2 as an example of a second supply means for supplying a high-temperature side fluid adjusted to a predetermined constant temperature on the high-temperature side. The low-temperature side fluid 101-1 supplied from the low-temperature side fluid supply unit 104-1 and the high-temperature side fluid 101-2 supplied from the high-temperature side fluid supply unit 104-2 are mixed via a third flow rate control three-way valve 109-1 with an adjusted mixing ratio, and sent via a supply pipe 103 to a temperature control device 102, which is an example of a temperature control target consisting of an electrostatic chuck (ESC) or the like that holds a temperature control target (workpiece) W, as a temperature control fluid.

[0065] The temperature-controlled device 102 has an internal temperature control channel 135 (see Figure 3) through which a temperature-controlled fluid, which is a mixture of a low-temperature fluid and a high-temperature fluid adjusted to a required temperature, flows. On the outlet side of the temperature control channel 135, there is a fourth flow-control three-way valve 109-2 that distributes the temperature-controlled fluid that has flowed through the temperature control channel 135 to the low-temperature fluid supply section 104-1 and the high-temperature fluid supply section 104-2 via a return pipe 112 in a required ratio (distribution ratio).

[0066] The low-temperature side fluid supply unit 104-1 includes a third bypass pipe 126-1 that returns to the low-temperature side fluid supply unit 104-1 any low-temperature side fluid that is not supplied to the third flow control three-way valve 109-1 via the low-temperature side mixing pipe 103-1. On the supply side of the low-temperature side fluid supply unit 104-1, there is a fifth flow control three-way valve 117-1 that controls the flow rate of temperature control fluid, which flows through a temperature control channel 135 and is distributed to the low-temperature side fluid supply unit 104-1 via the low-temperature side distribution pipe 112-1 by a fourth flow control three-way valve 109-2, and low-temperature side fluid, which is not supplied from the low-temperature side fluid supply unit 104-1 to the third flow control three-way valve 109-1 but returns to the low-temperature side fluid supply unit 104-1 via the first bypass pipe 126-1.

[0067] On the other hand, the high-temperature side fluid supply unit 104-2 is equipped with a fourth bypass pipe 126-2 that returns to the high-temperature side fluid supply unit 104-2 any high-temperature side fluid that is not supplied to the third flow control three-way valve 109-1 via the high-temperature side mixing pipe 103-2 from the high-temperature side fluid supply unit 104-2. On the supply side of the high-temperature side fluid supply unit 104-2, there is a sixth flow control three-way valve 117-2 that controls the flow rate of the temperature control fluid, which flows through the temperature control channel 135 and is distributed to the high-temperature side fluid supply unit 104-2 via the high-temperature side distribution pipe 112-2 by the fourth flow control three-way valve 109-2, and the high-temperature side fluid, which is not supplied from the high-temperature side fluid supply unit 104-2 to the third flow control three-way valve 109-2 but returns to the high-temperature side fluid supply unit 104-2 via the second bypass pipe 126-2. The same heat transfer medium (brine) is used for both the low-temperature side fluid and the high-temperature side fluid.

[0068] As shown in Figure 7, the low-temperature side fluid supply unit 104-1 is equipped with a cooling-side brine temperature control circuit 141 that adjusts the brine to a predetermined constant temperature on the low-temperature side. The secondary side of the evaporator 134 is connected to the cooling-side brine temperature control circuit 141 via a low-temperature side circulation pipe 142. A refrigerator circuit 143 is connected to the primary side of the evaporator 134 to cool the brine flowing on the secondary side of the evaporator 134 to the required temperature. The refrigerator circuit 143 cools the brine flowing on the secondary side of the evaporator 134 to the required temperature by expanding the heat transfer medium condensed by the condenser 132 and sending it to the primary side of the evaporator 134. The brine flowing through the refrigerator circuit 143 is also condensed by the condenser 132. External cooling water 145 is supplied to the condenser 132 via a cooling water pipe 144.

[0069] Furthermore, the high-temperature side fluid supply unit 104-2 is equipped with a heating-side brine temperature control circuit 146 that adjusts the brine to a predetermined constant temperature on the high-temperature side. The heating-side brine temperature control circuit 146 has heating means such as a heater (not shown). A heat exchanger 148 is connected to the heating-side brine temperature control circuit 146 via a high-temperature side circulation pipe 147. A fifth bypass pipe 149 is connected between the heating-side brine temperature control circuit 146 and the heat exchanger 148, bypassing the heat transfer medium flowing from the heating-side brine temperature control circuit 146 to the heat exchanger 148 to the heating-side brine temperature control circuit 147. A seventh flow control three-way valve 151 is interposed on the outlet side of the fifth bypass pipe 149 to control the flow rate of the temperature control fluid supplied to the heat exchanger 148 and the flow rate of the temperature control fluid that bypasses the heat exchanger 148 and returns to the heating-side brine temperature control circuit 146. External cooling water 145 is supplied to the heat exchanger 148 via the cooling water piping 144. The heat exchanger 148 cools the brine. The seventh flow control three-way valve 151 adjusts its opening to, for example, when the temperature of the high-temperature fluid flowing through the high-temperature circulation piping 147 is below a predetermined threshold, to allow part or all of the high-temperature fluid flowing through the high-temperature circulation piping 147 to flow directly back into the brine temperature control circuit 146 on the heating side.

[0070] <Basic operation of a chiller device> The chiller device 100 basically operates as follows:

[0071] As shown in Figure 8, the chiller device 100 controls the temperature of the temperature control fluid supplied to the temperature-controlled device 102 to change in steps over multiple stages, such as -30°C, -10°C, 10°C, and 50°C. Here, the temperature of the low-temperature fluid supplied by the low-temperature fluid supply unit 104-1 is set to a temperature equal to -30°C, which is the lowest of the multiple control temperatures. Similarly, the temperature of the high-temperature fluid supplied by the high-temperature fluid supply unit 104-2 is set to a temperature equal to approximately 50°C, which is the highest of the multiple control temperatures. However, in this embodiment, the temperatures of the low-temperature and high-temperature fluids are not limited to the lowest and highest of the multiple control temperatures, but may be set to any temperature, such as a temperature lower than the lowest and highest of the multiple control temperatures.

[0072] As shown in Figure 9, when the chiller device 100 controls the temperature to -30°C, which is the lowest of the multiple control temperature settings, it shuts off the high-temperature fluid flowing into the third flow control three-way valve 109-1 via the high-temperature side mixing pipe 103-2 to reduce the flow rate of the high-temperature fluid to zero, and opens the low-temperature fluid flowing into the third flow control three-way valve 109-1 via the low-temperature side mixing pipe 103-1 to reduce the flow rate of the low-temperature fluid to 100%. Furthermore, the chiller device 100 shuts off the high-temperature fluid distributed from the fourth flow control three-way valve 109-2 to the high-temperature side fluid supply unit 104-2 via the high-temperature side distribution pipe 112-2 to reduce the amount of fluid distributed to the high-temperature side to zero, and opens the low-temperature fluid distributed from the fourth flow control three-way valve 109-2 to the low-temperature side fluid supply unit 104-1 via the low-temperature side distribution pipe 112-1 to reduce the amount of fluid distributed to the low-temperature side to 100%. Accordingly, the chiller device 100 opens the high-temperature fluid that is returning to the high-temperature fluid supply section 104-2 via the second bypass pipe 123-2 using the sixth flow control three-way valve 117-2, thereby returning all of the high-temperature fluid supplied from the high-temperature fluid supply section 104-2 to the high-temperature fluid supply section 104-2. In addition, the chiller device 100 uses the fifth flow control three-way valve 117-1 to reduce the flow rate of the low-temperature fluid that is returning to the low-temperature fluid supply section 104-1 via the first bypass pipe 123-1 to 50%, and supplies 50% of the flow rate of the low-temperature fluid supplied from the low-temperature fluid supply section 104-1 to the third flow control three-way valve 109-1.

[0073] As a result, a temperature control fluid adjusted to a temperature of -30°C is supplied from the low-temperature side fluid supply unit 104-1 to the temperature control channel 135 of the temperature control device 102, and the temperature of the temperature control device 102 is controlled to -30°C, which is the temperature of the temperature control fluid consisting only of the low-temperature side fluid.

[0074] Furthermore, as shown in Figure 10, when the chiller device 100 controls the temperature to 50°C, which is the highest of the multiple control temperatures, it opens the high-temperature side fluid flowing into the third flow control three-way valve 109-1 via the high-temperature side mixing pipe 103-2 to set the flow rate of the high-temperature side fluid to 100%, and shuts off the low-temperature side fluid flowing into the third flow control three-way valve 109-1 via the low-temperature side mixing pipe 103-1 to set the flow rate of the low-temperature side fluid to zero. In addition, the chiller device 100 opens the high-temperature side fluid distributed from the fourth flow control three-way valve 109-2 to the high-temperature side fluid supply unit 104-2 via the high-temperature side distribution pipe 112-2 to set the amount of fluid distributed to the high-temperature side fluid to 100%, and shuts off the low-temperature side fluid distributed from the fourth flow control three-way valve 109-2 to the low-temperature side fluid supply unit 104-1 via the low-temperature side distribution pipe 112-1 to set the amount of fluid distributed to the low-temperature side fluid to zero. Accordingly, the chiller device 100 shuts off the high-temperature fluid that is returning to the high-temperature fluid supply unit 104-2 via the high-temperature distribution pipe 112-2 using the fourth flow control three-way valve 109-2, and supplies all of the high-temperature fluid supplied from the high-temperature fluid supply unit 104-2 to the third flow control three-way valve 109-1. In addition, the chiller device 100 opens the low-temperature fluid that is returning to the low-temperature fluid supply unit 104-1 via the first bypass pipe 123-1 using the fifth flow control three-way valve 117-1, and returns all of the low-temperature fluid supplied from the low-temperature fluid supply unit 104-1 to the low-temperature fluid supply unit 104-1. Furthermore, the chiller device 100 uses a sixth flow control three-way valve 117-2 to reduce the flow rate of the low-temperature fluid that is returned to the high-temperature fluid supply unit 104-2 via the second bypass pipe 123-2 to 50%, thereby returning 50% of the high-temperature fluid supplied from the high-temperature fluid supply unit 104-2 back to the high-temperature fluid supply unit 104-2.

[0075] As a result, a temperature control fluid adjusted to 50°C is supplied from the high-temperature side fluid supply unit 104-2 to the temperature control channel 135 of the temperature control device 102, and the temperature of the temperature control device 102 is controlled to 50°C, which is the temperature of the temperature control fluid consisting only of the high-temperature side fluid.

[0076] Furthermore, as shown in Figure 8, when the chiller device 100 controls the temperature to an intermediate temperature of -10°C or 10°C among the multiple control temperature stages, it adjusts the opening of the third flow control three-way valve 109-1 according to the target intermediate temperature of the temperature-controlled device 102, and controls the mixing ratio of the low-temperature fluid supplied from the low-temperature fluid supply unit 104-1 via the low-temperature mixing pipe 103-1 and the high-temperature fluid supplied from the high-temperature fluid supply unit 104-2 via the high-temperature mixing pipe 103-2 to the required value. From the chiller device 100, a temperature control fluid consisting of the low-temperature fluid and high-temperature fluid mixed according to the opening of the third flow control three-way valve 109-1 is supplied to the temperature control flow path 135 of the temperature-controlled device 102. Furthermore, the chiller device 100 adjusts the opening degree of the fourth flow control three-way valve 109-2 and controls the distribution ratio of the low-temperature fluid to the high-temperature fluid distributed to the low-temperature fluid supply unit 104-1 and the high-temperature fluid supply unit 104-2, according to the mixing ratio of the low-temperature fluid and the high-temperature fluid mixed by the third flow control three-way valve 109-1.

[0077] The fourth flow control three-way valve 109-2 controls the opening degree of the valve so that the distribution ratio between the low-temperature fluid and the high-temperature fluid in the third flow control three-way valve 109-1 is the same 4:6, when the mixing ratio of the low-temperature fluid and the high-temperature fluid in the third flow control three-way valve 109-1 is 4:6, thereby distributing the temperature control fluid to the low-temperature fluid supply unit 104-1 and the high-temperature fluid supply unit 104-2.

[0078] Accordingly, the chiller device 100 controls the flow rate of the high-temperature fluid that recirculates to the high-temperature fluid supply unit 104-2 via the second bypass pipe 123-2 using the sixth flow control three-way valve 117-2, thereby recirculating the remaining high-temperature fluid supplied from the high-temperature fluid supply unit 104-2 to the third flow control three-way valve 109-1 back to the high-temperature fluid supply unit 104-2. Similarly, the chiller device 100 controls the flow rate of the low-temperature fluid that recirculates to the low-temperature fluid supply unit 104-1 via the first bypass pipe 123-1 using the fifth flow control three-way valve 117-1, thereby recirculating the remaining low-temperature fluid supplied from the low-temperature fluid supply unit 104-1 to the third flow control three-way valve 109-1 back to the low-temperature fluid supply unit 104-1.

[0079] In the example above, the sixth flow control three-way valve 117-2 controls the ratio (flow rate ratio) of the high-temperature fluid that flows back to the high-temperature fluid supply unit 104-2 via the second bypass piping 123-2 and the temperature control fluid distributed to the high-temperature fluid supply unit 104-2 by the fourth flow control three-way valve 109-2 to 4:6, for example, when the mixing ratio of the low-temperature fluid and the high-temperature fluid in the third flow control three-way valve 109-1 is 4:6.

[0080] Similarly, in the above example, the fifth flow control three-way valve 117-1 controls the ratio (flow rate ratio) of the low-temperature fluid returning to the low-temperature fluid supply unit 104-1 via the first bypass piping 123-1 and the temperature control fluid distributed to the low-temperature fluid supply unit 104-1 by the fourth flow control three-way valve 109-2 to 6:4, for example, when the mixing ratio of the low-temperature fluid and the high-temperature fluid in the third flow control three-way valve 109-1 is 4:6.

[0081] As a result, the temperature control channel 135 of the temperature-controlled device 102 is supplied with a temperature control fluid, which is a mixture of the low-temperature fluid supplied from the low-temperature fluid supply unit 104-1 and the high-temperature fluid supplied from the high-temperature fluid supply unit 104-2, mixed according to the opening degree of the third flow control three-way valve 109-1. The temperature-controlled device 102 is then controlled to a temperature equal to the temperature of the temperature control fluid, which is determined according to the mixing ratio of the low-temperature fluid and the high-temperature fluid.

[0082] At that time, the control device 300 calculates the heat load H2 of the temperature-controlled device 102 based on the calculation formula (3), using the flow rate Q of the temperature-controlled fluids 101-1 and 101-2 supplied to the temperature-controlled device 102 via the third and fourth flow-control three-way valves 109-1 and 109-2, and the detection results of the first and second temperature sensors 110 and 111. H2 = (m1 + m2) · c · Δt (3)

[0083] Here, the third and fourth flow control three-way valves 109-1 and 109-2 have a fluid distribution ratio that is approximately linear, as shown in Figure 11. Therefore, when the opening of the third flow control three-way valve 109-1 is x (1≧x≧0), the flow rate Qm of one fluid is Qmx and the flow rate of the other fluid is Qm(1-x). The subscript m is either 1 or 2.

[0084] The control device 300 controls the frequency F2 that determines the rotational speed of the second inverter motor 120 of the refrigeration device 108 using calculation formula (4) based on the heat load H1 of the temperature-controlled device 102 detected by the detection means 105. F2 = ((H2 - b) / a) 0.5 (4)

[0085] <Configuration of the 1st to 7th flow control three-way valves> As described above, the chiller device 100 is equipped with first to seventh flow control three-way valves 109, 1117, 109-1, 109-2, 117-1, 117-2, and 151. The first to seventh flow control three-way valves 109, 1117, 109-1, 109-2, 117-1, 117-2, and 151 are basically configured similarly, except that the relationship between the inlet and outlet is reversed depending on the arrangement. Here, a three-way valve type motor valve used as the first flow control three-way valve 109 as a mixing means will be described as a representative example.

[0086] Figures 12(a), (b), and (c) show a front view, left side view, and bottom view of a three-way valve type motor valve as an example of a three-way valve for flow control according to Embodiment 1 of the present invention; Figure 13 is a cross-sectional view along line AA in Figure 12(b); Figure 14 is a cross-sectional view along line BB in Figure 12(a); and Figure 15 is a cross-sectional perspective view showing the main part of the three-way valve type motor valve.

[0087] The three-way valve type motor valve 1 is configured as a rotary three-way valve. As shown in Figure 12, the three-way valve type motor valve 1 is broadly composed of a valve section 2 located at the bottom, an actuator section 3 located at the top, and a seal section 4 and a coupling section 5 located between the valve section 2 and the actuator section 3.

[0088] As shown in Figures 13 to 15, the valve section 2 includes a valve body 6 formed in a substantially rectangular parallelepiped shape from a metal such as SUS. As shown in Figures 13 and 14, the valve body 6 is provided with a first outlet 7 through which fluid flows out on one side (the left side in the illustrated example) and a first valve opening 9 with a rectangular cross-section, which is an example of a flow port that communicates with a valve seat 8 consisting of a cylindrical cavity.

[0089] In this embodiment 1, instead of directly providing the first outlet 7 and the first valve opening 9 to the valve body 6, the first outlet 7 and the first valve opening 9 are provided by attaching a first valve seat 70, which is an example of a first valve opening forming member that forms the first valve opening 9, and a first flow path forming member 15 that forms the first outlet 7, to the valve body 6.

[0090] As shown in Figure 16, the first valve seat 70 integrally comprises a cylindrical portion 71 formed in a cylindrical shape and positioned on the outside of the valve body 6, and a tapered portion 72 formed in a tapered shape so that the outer diameter of the tip decreases toward the inside of the valve body 6. Inside the tapered portion 72 of the first valve seat 70, a first valve opening 9 in the shape of a rectangular prism with a rectangular (square in this embodiment 1) cross-section is formed. Furthermore, as will be described later, one end of the first flow path forming member 15 that forms the first outlet 7 is inserted into the cylindrical portion 71 of the first valve seat 70 in a sealed state.

[0091] For example, polyimide (PI) resin can be used as the material for the first valve seat 70. Alternatively, so-called "super engineering plastics" can be used as the material for the first valve seat 70. Super engineering plastics have superior heat resistance and mechanical strength at high temperatures compared to ordinary engineering plastics. Examples of super engineering plastics include polyether ether ketone (PEEK), polyphenylene sulfide (PPS), polyethersulfone (PES), polyamide-imide (PAI), liquid crystal polymer (LCP), polytetrafluoroethylene (PTFE), polychlorotrifluoroethylene (PCTFE), polyvinylidene fluoride (PVDF), or composite materials thereof. In addition, for example, "TECAPEEK" (registered trademark), a PEEK resin material for machining manufactured by Ensinger Japan Co., Ltd., and especially "TECAPEEK TF 10 blue" (product name), which contains 10% PTFE and has excellent sliding properties, can also be used as the material for the first valve seat 70.

[0092] As shown in Figures 14 and 15, the valve body 6 has a recess 75 formed by machining or other means that corresponds to the outer shape of the first valve seat 70 and is similar in shape to the valve seat 70. The recess 75 comprises a cylindrical portion 75a corresponding to the cylindrical portion 71 of the first valve seat 70 and a tapered portion 75b corresponding to the tapered portion 72. The cylindrical portion 75a of the valve body 6 is set to be longer than the cylindrical portion 71 of the first valve seat 70. As will be described later, the cylindrical portion 75a of the valve body 6 forms a part of the first pressure acting portion 94. The first valve seat 70 is mounted in the valve body 6 so as to be movable in the direction toward and toward the valve stem 34, which acts as a valve body, relative to the recess 75.

[0093] When the first valve seat 70 is fitted into the recess 75 of the valve body 6, a minute gap is formed between the outer surface of the first valve seat 70 and the inner surface of the recess 75 of the valve body 6. Fluid that flows into the valve seat 8 can leak into the outer region of the first valve seat 70 through this minute gap. Fluid that leaks into the outer region of the first valve seat 70 is introduced into the first pressure acting section 94, which is a space located outside the cylindrical portion 71 of the first valve seat 70. This first pressure acting section 94 applies the pressure of the fluid to the surface 70a of the first valve seat 70 opposite to the valve stem 34. The fluid that flows into the valve seat 8 includes fluid that flows out through the first valve port 9, as well as fluid that flows out through the second valve port 18, as will be described later. The first pressure-applying section 94 is partitioned from the first outlet 7, with the space between them sealed by the first flow path forming member 15.

[0094] The fluid pressure acting on the valve stem 34 located inside the valve seat 8 depends on the fluid flow rate due to the degree of opening and closing of the valve stem 34. The fluid flowing into the valve seat 8 also flows into (leaks into) the minute gap formed between the valve seat 8 and the outer surface of the valve stem 34 via the first valve port 9 and the second valve port 18. Therefore, in addition to the fluid flowing out from the first valve port 9, the first pressure acting part 94 corresponding to the first valve seat 70 also receives (leaks into) the fluid flowing out from the second valve port 18 that has flowed into the minute gap formed between the valve seat 8 and the outer surface of the valve stem 34.

[0095] At the tip of the tapered portion 72 of the first valve seat 70, as shown in Fig. 16(b), a concave portion 74 is provided as an example of a plane arc-shaped gap reduction portion that forms a part of a cylindrical curved surface corresponding to the cylindrical valve seat 8 formed in the valve body 6. The radius of curvature R of the concave portion 74 is set to a value substantially equal to the radius of curvature of the valve seat 8 or the radius of curvature of the valve shaft 34. The valve seat 8 of the valve body 6 forms a slight gap with the outer peripheral surface of the valve shaft 34 in order to prevent the biting of the valve shaft 34 that rotates inside the valve seat 8. As shown in Fig. 17, the concave portion 74 of the first valve seat 70 is mounted so as to protrude toward the valve shaft 34 side from the valve seat 8 of the valve body 6 when the first valve seat 70 is mounted on the valve body 6, or is mounted so as to contact the outer peripheral surface of the valve shaft 34. As a result, the gap G between the valve shaft 34 and the inner surface of the valve seat 8 of the valve body 6 as a member facing the valve shaft 34 is partially reduced compared to other portions of the valve seat 8 by the amount by which the concave portion 74 of the first valve seat 70 protrudes. Thus, the gap G1 between the concave portion 74 of the first valve seat 70 and the valve shaft 34 is set to a required value (G1 < G2) that is narrower (smaller) than the gap G2 between the valve shaft 34 and the inner surface of the valve seat 8. Note that the gap G1 between the concave portion 74 of the first valve seat 70 and the valve shaft 34 may be in a state where the concave portion 74 of the valve seat 70 is in contact with the valve shaft 34, that is, a state without a gap (gap G1 = 0).

[0096] However, when the concave portion 74 of the first valve seat 70 contacts the valve shaft 34, there is a risk that the driving torque of the valve shaft 34 will increase due to the contact resistance of the concave portion 74 when the valve shaft 34 is rotationally driven. Therefore, the degree to which the concave portion 74 of the first valve seat 70 contacts the valve shaft 34 is adjusted in consideration of the rotational torque of the valve shaft 34. That is, it is adjusted so that the driving torque of the valve shaft 34 does not increase, or if it does increase, the increase amount is small and there is no hindrance to the rotation of the valve shaft 34.

[0097] As shown in Figures 14 and 15, the first flow path forming member 15 is formed in a cylindrical shape from a metal such as SUS or a synthetic resin such as polyimide (PI) resin. The first flow path forming member 15 has a first outlet 7 inside that communicates with the first valve opening 9, regardless of the positional fluctuations of the first valve seat 70. Approximately half of the first flow path forming member 15, located on the side of the first valve seat 70, is formed as a relatively thin-walled cylindrical portion 15a. The other half of the first flow path forming member 15, located on the side opposite the first valve seat 70, is formed as a thick-walled cylindrical portion 15b, which is thicker than the thin-walled cylindrical portion. The inner surface of the first flow path forming member 15 is cylindrical and penetrates through. On the outer circumference of the first flow path forming member 15, an annular flange portion 15c is provided, which is relatively thick and extends radially outward, between the thin-walled cylindrical portion 15a and the thick-walled cylindrical portion 15b. The outer peripheral end of the flange portion 15c is positioned to movably contact the inner peripheral surface of the recess 75.

[0098] As shown in Figure 16, the space between the cylindrical portion 71 of the first valve seat 70 and the thin-walled cylindrical portion 15a of the first flow path forming member 15 is sealed by an omni-seal 120, which is an example of a first sealing means made of synthetic resin with a substantially U-shaped cross-section and biased in the opening direction by a metal spring member. As shown in Figure 16, the inner circumferential surface of the cylindrical portion 71 of the first valve seat 70 is provided with a stepped portion 73 that accommodates the omni-seal 120 at the end located outside the valve body 6.

[0099] As shown in Figure 18, the OmniSeal 120 is an annular (ring-shaped) member that is positioned around the entire circumference of the inner surface of the cylindrical portion 71 of the first valve seat 70. The OmniSeal 120 consists of a spring member 121 made of a metal such as stainless steel with a substantially U-shaped cross-section, and a sealing member 122 made of a synthetic resin such as polytetrafluoroethylene (PTFE) with a substantially U-shaped cross-section that is biased in the opening direction by the spring member 121. The spring member 121 is formed in a substantially U-shaped cross-section from a metal such as stainless steel. The elastic modulus of the spring member 121 is adjusted by providing slits or grooves at regular intervals along the longitudinal direction or by appropriately setting the wall thickness. As shown in Figures 18 and 19, the sealing member 122 has a base end portion 122a positioned along the sealing direction so as to be located between the stepped portion 73 provided on the cylindrical portion 71 of the first valve seat 70 to be sealed and the thin-walled cylindrical portion 15a of the first flow path forming member 15, and two lip portions 122b and 122c positioned parallel to each other and facing each other in the same direction (outward along the axial direction of the first valve seat 70) along the circumferential surfaces of the two sealing members, extending from both ends of the base end portion 122a. The tips of the two lip portions 122b and 122c are open toward the outward direction along the axial direction of the first valve seat 70. The opening of the OmniSeal 120 is open toward the first pressure acting portion 94 and receives the pressure of the first pressure acting portion 94. As shown in Figure 18(b), the tip of one lip portion 122b is provided with a projection 122d that protrudes inward with a thickness corresponding to the wall thickness of the spring member 121, preventing the spring member 121 from detaching. The tip portions 122b' and 122c' of the lip portions 122b and 122c are formed in a curved shape with their outer circumferential surfaces curved in an arc shape, protruding radially outward from the middle to the tip. The tip portions 122b' and 122c' of the lip portions 122b and 122c are in close contact with the inner circumferential surface of the first valve seat 70 and the outer circumferential surface of the first flow path forming member 15, thereby increasing the degree of sealing.

[0100] Furthermore, the spring member 121 of the OmniSeal 120 is not limited to being formed in a substantially U-shaped cross-section, but may also be formed from a strip of metal in a spiral shape with a circular or elliptical cross-section, as shown in Figure 20.

[0101] When no fluid pressure is acting on it or the fluid pressure is relatively low, the OmniSeal 120 seals the gap between the first valve seat 70 and the first flow path forming member 15 by the elastic restoring force of the spring member 121. On the other hand, when the fluid pressure is relatively high, the OmniSeal 120 seals the gap between the first valve seat 70 and the first flow path forming member 15 by the elastic restoring force of the spring member 121 and the fluid pressure. Therefore, even if fluid flows into the first pressure acting part 94 from the gap between the inner circumferential surface of the valve body 6 and the outer circumferential surface of the first valve seat 70, the fluid is sealed by the OmniSeal 120 and does not flow into the interior of the first flow path forming member 15 from the gap between the first valve seat 70 and the first flow path forming member 15.

[0102] The OmniSeal 120 consists of a combination of a metal spring member 121 and a synthetic resin sealing member 122. Both the metal spring member 121 and the polytetrafluoroethylene (PTFE) synthetic resin that makes up the sealing member 122 have excellent heat resistance, allowing them to withstand prolonged use at temperatures ranging from approximately -85°C to approximately 260°C.

[0103] As shown in Figures 13 and 14, the end face 70a of the cylindrical portion 71 of the first valve seat 70 is a region (pressure-receiving surface) that receives fluid pressure from the first pressure-acting portion 94.

[0104] In this embodiment 1, a stepped portion 73 for mounting the omni-seal 120 is provided on the end face 70a of the cylindrical portion 71 of the first valve seat 70. Therefore, the end face 70a of the cylindrical portion 71 of the first valve seat 70 is less susceptible to the full fluid pressure from the first pressure acting portion 94 due to the presence of the stepped portion 73.

[0105] Therefore, in this embodiment 1, as shown in Figures 13 and 14, an annular first pressure-receiving plate 76 is provided that covers and closes the end face 70a of the cylindrical portion 71 of the first valve seat 70, including the stepped portion 73 of the first valve seat 70, so that the fluid pressure from the first pressure-acting portion 94 can be effectively applied to the end face 70a of the cylindrical portion 71 of the first valve seat 70. In other words, the pressure-receiving plate 76 is positioned to contact the end face 70a of the cylindrical portion 71 of the first valve seat 70 and to close the stepped portion 73. The first pressure-receiving plate 76 is made of the same material as the first valve seat 70. Furthermore, a minute gap is set between the radially oriented outer peripheral end face of the first pressure-receiving plate 76 and the recess 75 of the valve body 6 so that fluid can leak into the first pressure-acting portion 94.

[0106] On the other hand, the end of the thick-walled cylindrical portion 15b, which is the other end of the first flow path forming member 15, is sealed (sealed) with the inner circumferential surface of the valve body 6 by a second omni-seal 130, which is an example of a second sealing means made of synthetic resin with a substantially U-shaped cross-section and biased in the opening direction by a metal spring member. As shown in Figure 16, a short cylindrical portion 75c is formed on the inner circumferential surface of the valve body 6 at the outer end along the axial direction of the cylindrical portion 75a of the recess 75, for mounting the omni-seal 130, which has an outer diameter slightly larger than the cylindrical portion 75a of the recess 75. The length of the cylindrical portion 75c is set to be longer than the second omni-seal 130.

[0107] The gap between the cylindrical portion 75c of the valve body 6 and the thick-walled cylindrical portion 15b of the first flow path forming member 15 is sealed by the second omni-seal 130. The second omni-seal 130 is open toward the first pressure acting portion 94. In other words, the second omni-seal 130 is positioned so that its opening receives fluid pressure from the first pressure acting portion 94. Although the second omni-seal 130 has a larger outer diameter than the first omni-seal 120, it is basically constructed in the same way as the first omni-seal 120.

[0108] On the outer side of the cylindrical portion 71 of the first valve seat 70 along the axial direction, there is a first wave washer (corrugated washer) 16, which is an example of an elastic member that allows the first valve seat 70 to be displaced in a direction toward or toward the valve stem 34, while also allowing the first valve seat 70 to be elastically deformed in a direction toward or toward the valve stem 34. As shown in Figure 21, the first wave washer 16 is made of stainless steel, iron, or phosphor bronze, and its projected shape from the front is formed as an annular shape with a required width. In addition, the side shape of the first wave washer 16 is formed as a wave (corrugated) shape, and it is elastically deformable along its thickness direction. The elastic modulus of the first wave washer 16 is determined by the thickness, material, number of waves, etc. The first wave washer 16 is housed in the first pressure acting portion 94.

[0109] Furthermore, a first adjustment ring 77, which is an example of an annular adjustment member that adjusts the gap G1 between the valve stem 34 and the recess 74 of the first valve seat 70 via the first wave washer 16, is positioned on the outside of the first wave washer 16. As shown in Figure 22, the first adjustment ring 77 is a relatively short cylindrical member made of a metal such as SUS or a synthetic resin such as heat-resistant polyimide (PI) resin, with male threads 77a formed on its outer surface. On the outer end faces of the first adjustment ring 77, grooves 77b are provided at 180-degree opposing positions for engaging a jig (not shown) for adjusting the tightening amount when fastening the first adjustment ring 77 to the female thread portion 78 provided on the valve body 6, and for rotating the first adjustment ring 77.

[0110] As shown in Figure 14, the valve body 6 is provided with a first female threaded portion 78 for attaching a first adjustment ring 77. The open end of the valve body 6 is provided with a short cylindrical portion 79 having an outer diameter approximately equal to the outer diameter of the first adjustment ring 77. Furthermore, a short machining cylindrical portion 75d, which has a larger inner diameter than the first female threaded portion 78, is provided between the first female threaded portion 78 and the cylindrical portion 75c of the valve body 6, so that the first female threaded portion 78 can be machined over the required length.

[0111] The first adjustment ring 77 adjusts the amount (distance) by which the first adjustment ring 77 pushes the first valve seat 70 inward via the first wave washer 16 by adjusting the amount it is tightened against the female thread portion 78 of the valve body 6. When the amount of tightening of the first adjustment ring 70 is increased, the first valve seat 70 is pushed by the first adjustment ring 77 via the first wave washer 16 and the first pressure receiving plate 76, as shown in Figure 16, and the recess 74 is displaced in a direction that protrudes from the inner circumferential surface of the valve seat 8 and approaches the valve stem 34, and the gap G1 between the recess 74 and the valve stem 34 decreases. Also, when the amount of tightening of the first adjustment ring 77 is set to a small amount in advance, the distance the first valve seat 70 is pushed by the first adjustment ring 77 decreases and it is positioned at a location away from the valve stem 34, and the gap G1 between the recess 74 of the first valve seat 70 and the valve stem 34 increases relatively. The male thread 77a of the first adjustment ring 77 and the female thread portion 78 of the valve body 6 are set to have a small pitch, and the amount of protrusion of the first valve seat 70 can be finely adjusted.

[0112] Furthermore, as shown in Figure 13, a first flange member 10, as an example of a connecting member for connecting piping (not shown) that allows fluid to flow out, is attached to one side of the valve body 6 by four hex socket head bolts 11. In Figure 12, reference numeral 11a indicates a screw hole into which the hex socket head bolt 11 is fastened. The first flange member 10 is made of a metal such as SUS, similar to the valve body 6. The first flange member 10 has a flange portion 12 formed in a rectangular side shape substantially identical to the side shape of the valve body 6, a short cylindrical insertion portion 13 protruding from the inner surface of the flange portion 12, and a thick, substantially cylindrical pipe connection portion 14 protruding from the outer surface of the flange portion 12, to which piping (not shown) is connected. The space between the flange portion 12 of the first flange member 10 and the valve body 6 is sealed by an o-seal 13a, as shown in Figure 2. A groove 13b for accommodating the o-seal 13a is provided on the inner circumferential surface of the flange portion 12 of the first flange member 10. The inner circumference of the pipe connection part 14 is set to, for example, a tapered female thread Rc1 / 2 with a diameter of approximately 21 mm or a female thread with a diameter of approximately 0.58 inches. However, the shape of the pipe connection part 14 is not limited to a tapered female thread or a female thread; it may also be a tube fitting for attaching a tube, as long as it allows fluid to flow out from the first outlet 7.

[0113] Here, O-Seal 13a is an O-ring shaped sealing member in which the outside of a spring member made of stainless steel or the like, formed in a spiral shape with a circular or elliptical cross-section, is completely coated with an elastically deformable synthetic resin such as Teflon® FEP (polymer of tetrafluoroethylene and hexafluoropropylene). O-Seal 13a is capable of maintaining its sealing performance even at low temperatures of around -85°C.

[0114] As shown in Figure 13, the valve body 6 is provided with a second outlet 17 on the other side (right side in the figure) through which fluid flows out, and a second valve opening 18 with a rectangular cross-section, which is an example of a flow port that communicates with a valve seat 8 consisting of a cylindrical cavity.

[0115] In this embodiment 1, instead of directly providing the second outlet 17 and the second valve opening 18 to the valve body 6, the second outlet 17 and the second valve opening 18 are provided by attaching a second valve seat 80, which is an example of a valve opening forming member that forms the second valve opening 18, and a second flow path forming member 25 that forms the second outlet 17, to the valve body 6.

[0116] The second valve seat 80 is configured similarly to the first valve seat 70, as indicated by the reference numerals in parentheses in Figure 16. Specifically, the second valve seat 80 integrally comprises a cylindrical portion 81 formed in a cylindrical shape and positioned on the outside of the valve body 6, and a tapered portion 82 formed so as to decrease in outer diameter toward the inside of the valve body 6. Inside the tapered portion 82 of the second valve seat 80, a prismatic second valve opening 18 with a rectangular (square in this embodiment 1) cross-section is formed. Furthermore, one end of a second flow path forming member 25, which forms a second outlet 17, is inserted into the cylindrical portion 81 of the second valve seat 80 in a sealed state.

[0117] As shown in Figure 14, the valve body 6 has a recess 85 formed by machining or the like, corresponding to the outer shape of the second valve seat 80 and having a similar shape to the valve seat 80. The recess 85 comprises a cylindrical portion 85a corresponding to the cylindrical portion 81 of the second valve seat 80 and a tapered portion 85b corresponding to the tapered portion 82. The cylindrical portion 85a of the valve body 6 is set to be longer than the cylindrical portion 81 of the second valve seat 80. The cylindrical portion 85a of the valve body 6 forms the second pressure acting portion 96, as will be described later. The second valve seat 80 is mounted on the valve body 6 so as to be movable in the direction of approaching and moving away from the valve stem 34, which acts as a valve body, relative to the recess 85.

[0118] The second valve seat 80 is fitted into the recess 85 of the valve body 6, and a small gap is formed between the second valve seat 80 and the recess 85 of the valve body 6. Fluid that flows into the valve seat 8 can flow into the outer peripheral region of the second valve seat 80 through the small gap. Fluid that flows into the outer peripheral region of the second valve seat 80 is introduced into a second pressure acting section 96, which is a space located outside the cylindrical portion 81 of the second valve seat 80. This second pressure acting section 96 applies the pressure of the fluid to the surface 80a of the second valve seat 80 opposite to the valve stem 34. The fluid that flows into the valve seat 8 includes fluid that flows out through the second valve port 18 and fluid that flows out through the first valve port 9. The second pressure acting section 98 is partitioned from the second outlet 17, with the space between them sealed by the second flow path forming member 25.

[0119] The fluid pressure acting on the valve stem 34 located inside the valve seat 8 depends on the fluid flow rate due to the degree of opening and closing of the valve stem 34. The fluid flowing into the valve seat 8 also flows into (leaks into) the minute gap formed between the valve seat 8 and the outer surface of the valve stem 34 via the first valve port 9 and the second valve port 18. Therefore, the second pressure acting section 96 corresponding to the second valve seat 80 receives not only the fluid flowing out from the second valve port 18, but also the fluid flowing out from the first valve port 9 that has flowed into the minute gap formed between the valve seat 8 and the outer surface of the valve stem 34. The second valve seat 80 is made of the same material as the first valve seat 70.

[0120] At the tip of the tapered portion 82 of the second valve sheet 80, as shown in Fig. 16(b), a concave portion 84 is provided as an example of a gap reduction portion having a planar arc shape that forms a part of a cylindrical curved surface corresponding to the cylindrical valve seat 8 formed on the valve body 6. The radius of curvature R of the concave portion 84 is set to a value substantially equal to the radius of curvature of the valve seat 8 or the radius of curvature of the valve shaft 34. As will be described later, the valve seat 8 of the valve body 6 forms a slight gap with the outer peripheral surface of the valve shaft 34 in order to prevent the biting of the valve shaft 34 that rotates inside the valve seat 8. The concave portion 84 of the second valve sheet 80 is mounted so as to project toward the valve shaft 34 side from the valve seat 8 of the valve body 6 in a state where the second valve sheet 80 is mounted on the valve body 6, or is mounted so as to contact the outer peripheral surface of the valve shaft 34. As a result, the gap G between the valve shaft 34 and the inner surface of the valve seat 8 of the valve body 6 as a member facing the valve shaft 34 is set to a value that is partially reduced compared to other portions of the valve seat 8 by the amount by which the concave portion 84 of the second valve sheet 80 projects. Thus, the gap G3 between the concave portion 84 of the second valve sheet 80 and the valve shaft 34 is set to a required value (G3 < G2) that is narrower (smaller) than the gap G2 between the valve shaft 34 and the inner surface of the valve seat 8. Note that the gap G3 between the concave portion 84 of the second valve sheet 80 and the valve shaft 34 may be in a state where the concave portion 84 of the valve sheet 80 contacts the valve shaft 34, that is, a state without a gap (gap G3 = 0).

[0121] However, when the concave portion 84 of the second valve sheet 80 contacts the valve shaft 34, there is a risk that the driving torque of the valve shaft 34 will increase due to the contact resistance of the concave portion 84 when the valve shaft 34 is rotationally driven. Therefore, the degree to which the concave portion 84 of the second valve sheet 70 contacts the valve shaft 34 is initially adjusted in consideration of the rotational torque of the valve shaft 34. That is, it is adjusted so that the driving torque of the valve shaft 34 does not increase, or if it does increase, the increase amount is small and there is no hindrance to the rotation of the valve shaft 34.

[0122] As shown in Figure 15, the second flow path forming member 25 is formed in a cylindrical shape from a metal such as SUS or a synthetic resin such as polyimide (PI) resin. The second flow path forming member 25 has a second outlet 17 inside that communicates with the second valve opening 18, regardless of the positional fluctuations of the second valve seat 80. Approximately half of the second flow path forming member 25, located on the side of the second valve seat 80, is formed as a relatively thin-walled cylindrical portion 25a. The other half of the second flow path forming member 25, located on the side opposite the second valve seat 80, is formed as a thick-walled cylindrical portion 25b, which is thicker than the thin-walled cylindrical portion. The inner surface of the second flow path forming member 25 is cylindrical and penetrates through. On the outer circumference of the second flow path forming member 25, an annular flange portion 25c is provided, which is relatively thick and extends radially outward, between the thin-walled cylindrical portion 25a and the thick-walled cylindrical portion 25b. The outer peripheral end of the flange portion 25c is positioned to be movably in contact with the inner peripheral surface of the recess 85.

[0123] As shown in Figure 13, the space between the cylindrical portion 81 of the second valve seat 80 and the thin-walled cylindrical portion 25a of the second flow path forming member 25 is sealed by a first omni-seal 140, which is an example of a first sealing means made of synthetic resin with a substantially U-shaped cross-section and biased in the opening direction by a metal spring member. As shown in Figure 16, the inner circumferential surface of the cylindrical portion 81 of the second valve seat 80 is provided with a stepped portion 83 at the end located outside the valve body 6, which accommodates the first omni-seal 140.

[0124] The first omni-seal 140 is configured similarly to the first omni-seal 120, as shown in Figure 18. The first omni-seal 140 has a spring member 141 and a sealing member 142. When no fluid pressure is acting on it or the fluid pressure is relatively low, the first omni-seal 140 seals the gap between the second valve seat 80 and the second flow path forming member 25 by the elastic restoring force of the spring member 141. On the other hand, when the fluid pressure is relatively high, the first omni-seal 140 seals the gap between the second valve seat 80 and the second flow path forming member 25 by the elastic restoring force of the spring member 141 and the fluid pressure. Therefore, even if fluid flows into the second pressure-acting portion 96 through the gap between the inner circumferential surface of the valve body 6 and the outer circumferential surface of the second valve seat 80, the fluid is sealed by the first omni-seal 140 and does not flow into the interior of the second flow path forming member 25 through the gap between the second valve seat 80 and the second flow path forming member 25.

[0125] As shown in Figures 13 and 14, the end face 80a of the cylindrical portion 81 of the second valve seat 80 is a region (pressure-receiving surface) that receives fluid pressure from the second pressure-acting portion 96.

[0126] In this embodiment 1, a stepped portion 83 for mounting the first omni-seal 140 is provided on the end face 80a of the cylindrical portion 81 of the second valve seat 80. Therefore, the end face 80a of the cylindrical portion 81 of the second valve seat 80 is less susceptible to the full pressure of the fluid from the second pressure acting portion 96 due to the presence of the stepped portion 83.

[0127] Therefore, in this embodiment 1, as shown in Figures 13 and 14, an annular first pressure receiving plate 86 is provided that covers and closes the end face 80a of the cylindrical portion 81 of the second valve seat 80, including the stepped portion 83 of the second valve seat 80, so that the fluid pressure from the second pressure acting portion 96 can be effectively applied to the end face 80a of the cylindrical portion 81 of the second valve seat 80. In other words, the pressure receiving plate 86 is positioned to contact the end face 80a of the cylindrical portion 81 of the second valve seat 80 and to close the stepped portion 83. The second pressure receiving plate 86 is made of the same material as the second valve seat 80. Furthermore, a minute gap is set between the radial outer peripheral end face of the second pressure receiving plate 86 and the recess 85 of the valve body 6 so that fluid can leak into the second pressure acting portion 96.

[0128] On the other hand, the end of the thick-walled cylindrical portion 25b, which is the other end of the second flow path forming member 25, is sealed (sealed) with the inner circumferential surface of the valve body 6 by a second omni-seal 150, which is an example of a second sealing means made of synthetic resin with a substantially U-shaped cross-section and biased in the opening direction by a metal spring member. As shown in Figure 16, a short cylindrical portion 85c is formed on the inner circumferential surface of the valve body 6 at the outer end of the cylindrical portion 85a of the recess 85 along the axial direction, for mounting the second omni-seal 150, which has a slightly larger outer diameter than the cylindrical portion 85a of the recess 85. The length of the cylindrical portion 85c is set to be longer than the second omni-seal 150.

[0129] The gap between the cylindrical portion 85c of the valve body 6 and the thick-walled cylindrical portion 25b of the second flow path forming member 25 is sealed by the second omni-seal 150. The second omni-seal 150 is open toward the second pressure acting portion 96. In other words, the second omni-seal 150 is positioned so that its opening receives fluid pressure from the second pressure acting portion 96. Although the second omni-seal 150 has a larger outer diameter than the first omni-seal 140, it is basically constructed in the same way as the first omni-seal 140.

[0130] On the outside of the cylindrical portion 81 of the second valve seat 80, a second wave washer (corrugated washer) 26 is provided as an example of an elastic member that pushes the second valve seat 80 in a direction toward contact with the valve stem 34, while allowing the second valve seat 80 to be displaced in a direction toward or toward the valve stem 34. As shown in Figure 21, the second wave washer 26 is made of stainless steel, iron, or phosphor bronze, and its projected shape from the front is formed as an annular shape with a required width. In addition, the side shape of the second wave washer 26 is formed as a wave shape, and it is elastically deformable along its thickness direction. The elastic modulus of the second wave washer 26 is determined by the thickness, material, number of waves, etc. The same type of second wave washer 26 as the first wave washer 16 is used.

[0131] Furthermore, a second adjustment ring 87 is positioned on the outside of the second wave washer 26 as an example of an adjustment member that adjusts the gap G3 between the valve stem 34 and the recess 84 of the second valve seat 80 via the second wave washer 26. As shown in Figure 22, the second adjustment ring 87 is made of a relatively short cylindrical member made of heat-resistant synthetic resin or metal with male threads 87a formed on its outer surface. On the outer end face of the second adjustment ring 87, grooves 87b are provided at 180-degree opposing positions for engaging a jig (not shown) for adjusting the tightening amount when fastening the second adjustment ring 87 to the female thread portion 88 provided on the valve body 6, and for rotating the second adjustment ring 87.

[0132] As shown in Figure 15, the valve body 6 is provided with a second female threaded portion 88 for attaching a second adjustment ring 87. The open end of the valve body 6 is provided with a short cylindrical portion 89 having an outer diameter approximately equal to that of the second adjustment ring 87. Furthermore, a short machining cylindrical portion 85d with a larger inner diameter than the second female threaded portion 88 is provided between the second female threaded portion 88 and the cylindrical portion 85c of the valve body 6, so that the second female threaded portion 88 can be machined over the required length.

[0133] The second adjustment ring 87 adjusts the amount (distance) by which the second adjustment ring 87 pushes the second valve seat 80 inward via the second wave washer 26 by adjusting the amount it is tightened against the female thread portion 88 of the valve body 6. When the amount of tightening of the second adjustment ring 87 is increased, the second valve seat 80 is pushed by the second adjustment ring 87 via the second wave washer 26, as shown in Figure 17, and the recess 84 is displaced in a direction that protrudes from the inner circumferential surface of the valve seat 8 and approaches the valve stem 34, and the gap G3 between the recess 84 and the valve stem 34 decreases. Also, when the amount of tightening of the second adjustment ring 87 is set to a small amount in advance, the distance the second valve seat 80 is pushed by the second adjustment ring 87 decreases, and it is positioned at a location further away from the valve stem 34, and the gap G3 between the recess 84 of the second valve seat 80 and the valve stem 34 increases relatively. The male thread 87a of the second adjustment ring 87 and the female thread portion 88 of the valve body 6 are set to have a small pitch, allowing for fine adjustment of the protrusion amount of the second valve seat 80.

[0134] As shown in Figure 13, a second flange member 19, as an example of a connecting member for connecting a piping (not shown) through which fluid flows, is attached to the other side of the valve body 6 by four hex socket head bolts 20. The second flange member 19 is made of a metal such as SUS, similar to the first flange member 10. The second flange member 19 has a flange portion 21 formed in the same rectangular side shape as the side shape of the valve body 6, an insertion portion 22 protruding in a cylindrical shape from the inner surface of the flange portion 21, and a pipe connection portion 23 protruding in a thick, substantially cylindrical shape from the outer surface of the flange portion 21, to which a piping (not shown) is connected. As shown in Figure 13, the space between the flange portion 21 of the second flange member 19 and the valve body 6 is sealed by an o-seal 21a. An annular groove 21b for accommodating the o-seal 21a is provided on the inner circumferential surface of the flange portion 21 of the second flange member 19. The inner circumference of the pipe connection part 23 is set to, for example, an Rc1 / 2 tapered female thread with a diameter of approximately 21 mm, or a female thread with a diameter of approximately 0.58 inches. However, the shape of the pipe connection part 23 is not limited to a tapered female thread or a female thread, similar to the pipe connection part 14, and may also be a tube fitting for attaching a tube, as long as it allows fluid to flow out from the second outlet 17.

[0135] Here, as the fluid (brine), for example, a fluorine-based inert liquid such as Opteon® (manufactured by Mitsui Chemours Fluoroproducts Co., Ltd.) or Novec® (manufactured by 3M Corporation) is used, which is suitable for pressures of 0 to 1 MPa and temperatures of approximately -85 to +120°C.

[0136] Furthermore, as shown in Figure 13, the valve body 6 has a circular inlet 26 at its lower end surface, which serves as a third valve port into which fluid flows. A third flange member 27, as an example of a connecting member for connecting piping (not shown) into which fluid flows, is attached to the lower end surface of the valve body 6 by four hexagon socket head bolts 28. At the lower end of the inlet 26, a cylindrical portion 26a with a larger inner diameter than the inlet 26 is opened to accommodate the third flange member 27. The third flange member 27 has a flange portion 29 formed in a rectangular shape at the bottom, a short cylindrical insertion portion 30 (see Figure 13) protruding from the inner surface of the flange portion 29, and a thick, substantially cylindrical pipe connection portion 31 protruding from the outer surface of the flange portion 29, to which piping (not shown) is connected. The space between the flange portion 29 of the third flange member 27 and the valve body 6 is sealed by an o-seal 29a, as shown in Figure 13. The inner circumferential surface of the flange portion 29 of the third flange member 27 is provided with a groove 29b for accommodating the o-seal 29a. The inner circumference of the pipe connection portion 31 is set to, for example, a tapered female thread Rc1 / 2 with a diameter of approximately 21 mm or a female thread with a diameter of approximately 0.58 inches. Note that the shape of the pipe connection portion 31 is not limited to a tapered female thread or a female thread; it may also be a tube fitting for attaching a tube, as long as it allows fluid to flow in from the inlet 26.

[0137] As shown in Figure 14, the valve body 6 is equipped with a valve seat 8 in the center, which provides a first valve port 9 and a second valve port 18 with a rectangular cross-section by mounting first and second valve seats 70 and 80. The valve seat 8 consists of a cylindrical cavity corresponding to the outer shape of the valve body, which will be described later. In addition, a part of the valve seat 8 is formed by the first and second valve seats 70 and 80. The cylindrical valve seat 8 is provided in a state that it penetrates the upper end surface of the valve body 6. As shown in Figure 23, the first valve port 9 and the second valve port 18 provided in the valve body 6 are arranged axially symmetric with respect to the central axis (rotation axis) C of the cylindrical valve seat 8. To explain further, the first valve opening 9 and the second valve opening 18 are arranged perpendicular to the cylindrical valve seat 8, and one edge of the first valve opening 9 opens at a position opposite to the other edge of the second valve opening 18 (at a position 180 degrees apart) via the central axis C. Similarly, the other edge of the first valve opening 9 opens at a position opposite to the one edge of the second valve opening 18 (at a position 180 degrees apart) via the central axis C. For convenience, the gap between the valve seat 8 and the valve stem 34 is omitted from the illustration in Figure 23.

[0138] Furthermore, as shown in Figure 13, the first valve port 9 and the second valve port 18 are openings formed in a rectangular cross-section, such as a square cross-section, by attaching the first and second valve seats 70 and 80 to the valve body 6 as described above. The length of one side of the first valve port 9 and the second valve port 18 is set to be smaller than the diameter of the first outlet 7 and the second outlet 17, and they are formed in a rectangular tubular shape with a rectangular cross-section that is inscribed within the first outlet 7 and the second outlet 17.

[0139] As an example of a valve body, the valve stem 34 is formed in a substantially cylindrical shape from a metal such as SUS, as shown in Figure 24. The valve stem 34 is broadly composed of a valve body portion 35 that functions as a valve body, upper and lower shaft support portions 36 and 37 provided above and below the valve body portion 35, respectively, which rotatably support the valve stem 34, a seal portion 38 made from the same part as the upper shaft support portion 36, and a coupling portion 39 provided above the seal portion 38, all integrally comprising these components.

[0140] The upper and lower shaft support portions 36 and 37 are each formed in a cylindrical shape, having an outer diameter smaller than that of the valve body portion 35, and having the same or different diameters. As shown in Figure 15, the lower shaft support portion 37 is rotatably supported at the lower end of the valve seat 8 provided on the valve body 6 via a bearing 41 acting as a bearing member. An annular support portion 42 supporting the bearing 41 is provided at the lower part of the valve seat 8. The bearing 41, the support portion 42, and the inlet 26 are set to have approximately the same inner diameter, and are configured so that the temperature control fluid flows into the inside of the valve body portion 35 with almost no resistance.

[0141] Furthermore, as shown in Figures 13 and 24(b), the valve body 35 is formed in a cylindrical shape with a substantially semi-cylindrical opening 44 having an opening height H2 that is lower than the opening height H1 of the first and second valve ports 9 and 18. The valve operating part 45, through which the opening 44 of the valve body 35 is provided, is formed in a semi-cylindrical shape (a substantially semi-cylindrical shape excluding the opening 44 from the cylindrical portion) having a predetermined central angle α (for example, 180 degrees). The valve operating part 45, including the valve body 35 located above and below the opening 44, is rotatably positioned within the valve seat 8 and on the inner circumferential surface of the valve seat 8 with a minute gap in between to prevent metal-to-metal galling, so as to switch the first valve port 9 from a closed state to an open state and simultaneously switch the second valve port 18 from an open state in the opposite direction to a closed state. As shown in Figure 13, the upper and lower valve shaft portions 46 and 47, positioned above and below the valve operating portion 45, are formed in a cylindrical shape having the same outer diameter as the valve operating portion 45, and are rotatable in a non-contact state with a small gap between them and the inner circumferential surface of the valve seat 8. A cylindrical cavity 48 is provided inside the valve operating portion 45 and the upper and lower valve shaft portions 46 and 47, extending through to the lower end.

[0142] Furthermore, the valve operating section 45 has a planar cross-sectional shape along the direction in which both end faces 45a and 45b intersect (are perpendicular to) its central axis C, which is aligned with the circumferential direction (direction of rotation). More specifically, as shown in Figure 24, the valve operating section 45 has a planar cross-sectional shape along both end faces 45a and 45b that intersect with the axis of rotation C, which is aligned with the circumferential direction, which is aligned with the opening 44. The thickness of both end faces 45a and 45b is set to a value equal to, for example, the thickness T of the valve operating section 45.

[0143] The valve operating section 45 is not limited to having a planar cross-sectional shape at both ends 45a and 45b that intersect the axis of rotation C along the circumferential direction; the end faces 45a and 45b along the circumferential direction (direction of rotation) may be formed in a curved shape.

[0144] As shown in Figure 25, when the valve stem 34 is rotated to open and close the first and second valve ports 9 and 18, the circumferential ends 45a and 45b of the valve operating section 45 move (rotate) in the fluid flow so as to protrude from or retract from the circumferential ends of the first and second valve ports 9 and 18, thereby transitioning the first and second valve ports 9 and 18 from an open state to a closed state or from a closed state to an open state. At this time, it is desirable that the cross-sectional shape of the circumferential ends 45a and 45b of the valve operating section 45 is formed in a planar shape in order to change the opening area of ​​the first and second valve ports 9 and 18 linearly (in a straight line) with respect to the rotation angle of the valve stem 34.

[0145] As shown in Figure 13, the seal portion 4 seals the valve stem 34 in a liquid-tight state so that it can rotate relative to the valve body 6. The seal portion 4 comprises the valve body 6, the valve stem 34, an omni-seal 160, 170 as an example of a sealing means made of synthetic resin with a substantially U-shaped cross-section that is biased in the opening direction by a metal spring member positioned between the valve body 6 and the valve stem 34 to create a liquid-tight seal between them, and a bearing member 180 that rotatably supports the valve stem 34 relative to the valve body.

[0146] As shown in Figure 13, the upper end of the valve body 6 is provided with a cylindrical support recess 51 for rotatably supporting the valve stem 34. At the upper end of the support recess 51, a cylindrical portion 51b with a larger inner diameter is formed via a tapered portion 51a. As described above, the upper valve stem portion 46 of the valve stem 34 is rotatably and liquid-tightly supported at the lower end of the support recess 51 via a bearing 180 and omni-seals 160, 170, which are examples of bearing members.

[0147] As shown in Figure 12, the coupling section 5 is positioned between the valve body 6, which contains the seal section 4, and the actuator section 3. The coupling section 5 is for connecting the valve stem 34 to a rotating shaft (not shown) that rotates the valve stem 34 as a single unit.

[0148] As shown in Figure 13, the coupling section 5 consists of a spacer member 59 positioned between the seal section 4 and the actuator section 3, an adapter plate 60 fixed to the upper part of the spacer member 59, and a coupling member 62 housed in a cylindrical space 61 formed through the spacer member 59 and the adapter plate 60, connecting the valve stem 34 and a rotating shaft (not shown). The spacer member 59 is formed from a synthetic resin such as polyimide (PI) resin and is a relatively tall rectangular tube shape having substantially the same planar shape as a part of the valve body 6. The flange portion 59a provided at the lower end of the spacer member 59 is fixed to both the valve body 6 and the adapter plate 60 by means of fastening with screws 59b or the like. The adapter plate 60 is formed from a metal such as SUS and is a planar polygonal plate shape. The adapter plate 60 is attached to the base 64 of the actuator section 3 by fixing with hex socket head bolts 63.

[0149] As shown in Figure 24(a), a groove 65 is provided at the upper end of the valve stem 34, extending horizontally through it. The valve stem 34 is connected and fixed to the coupling member 62 by fitting a protrusion 66 provided on the coupling member 62 into the groove 65. On the other hand, a groove 67 is provided at the upper end of the coupling member 62, extending horizontally through it. A rotating shaft (not shown) is connected and fixed to the coupling member 62 by fitting a protrusion (not shown) into the groove 67 provided on the coupling member 62. The spacer member 59 is equipped with an o-seal 190 at its upper end to prevent liquid from reaching the actuator part 3 when liquid leaks from the seal part 4.

[0150] As shown in Figure 12, the actuator unit 3 includes a base 64 formed in a planar rectangular shape. A casing 90, which is a rectangular box-shaped structure containing a drive means such as a stepping motor and an encoder, is attached to the top of the base 64 by screws 91. The drive means of the actuator unit 3 can be any device capable of rotating a rotating shaft (not shown) in a desired direction with a predetermined precision based on a control signal, and its configuration is not limited. The drive means consists of a stepping motor, a drive force transmission mechanism that transmits the rotational driving force of the stepping motor to the rotating shaft via a drive force transmission means such as a gear, and an angle sensor such as an encoder that detects the rotation angle of the rotating shaft.

[0151] In Figure 12, reference numeral 92 denotes the stepping motor side cable, and reference numeral 93 denotes the angle sensor side cable. These stepping motor side cable 92 and angle sensor side cable 93 are connected to a control device (not shown) that controls the three-way valve type motor valve 1.

[0152] <Environmental conditions> As described above, the three-way valve type motor valve 1 according to this embodiment 1 is configured to be usable with fluids at temperatures of approximately -85 to +1290°C, particularly at significantly lower temperatures of approximately -85°C. Therefore, it is desirable that the surrounding environmental conditions in which the three-way valve type motor valve 1 is used correspond to a temperature range of approximately -85 to +1290°C. That is, when a fluid of approximately -85°C flows through the three-way valve type motor valve 1, the valve body 4 itself becomes the same temperature as the fluid of approximately -85°C. As a result, if the conditions in which the three-way valve type motor valve 1 is used include an environment with humidity, which is moisture in the air, it is thought that moisture in the air will adhere to the three-way valve type motor valve 1 and freeze, which may cause the three-way valve type motor valve 1 to malfunction.

[0153] Therefore, in this embodiment 1, the environmental conditions for using the three-way valve type motor valve 1 are nitrogen (N 2- In an environment purged with gas, it is desirable that the ambient humidity (relative humidity) be 0.10% or less, preferably around 0.01%.

[0154] <Operation of a three-way valve type motor valve> In the three-way valve type motor valve 1 according to this embodiment 1, when a fluid at a low temperature of about -85°C is circulated, the fluid flow rate is controlled as follows.

[0155] As shown in Figure 15, during assembly or adjustment before use, the first and second flange members 10 and 19 of the three-way valve type motor valve 1 are temporarily removed from the valve body 6, exposing the adjustment rings 77 and 87 to the outside. In this state, by adjusting the amount of tightening of the adjustment rings 77 and 87 against the valve body 6 using a jig (not shown), the amount of protrusion of the first and second valve seats 70 and 80 from the valve seat 8 of the valve body 6 is changed, as shown in Figure 17. When the amount of tightening of the adjustment rings 77 and 87 against the valve body 6 is increased, the recesses 74 and 84 of the first and second valve seats 70 and 80 protrude from the inner circumferential surface of the valve seat 8 of the valve body 6, the gap G1 between the recesses 74 and 84 of the first and second valve seats 70 and 80 and the outer circumferential surface of the valve stem 34 decreases, and the recesses 74 and 84 of the first and second valve seats 70 and 80 and the outer circumferential surface of the valve stem 34 come into contact. On the other hand, if the tightening amount of the adjustment rings 77 and 87 with respect to the valve body 6 is reduced, the length by which the recesses 74 and 84 of the first and second valve seats 70 and 80 protrude from the inner circumferential surface of the valve seat 8 of the valve body 6 decreases, and the gap G1 between the recesses 74 and 84 of the first and second valve seats 70 and 80 and the outer circumferential surface of the valve stem 34 increases.

[0156] In this embodiment 1, for example, the gap G1 between the recesses 74, 84 of the first and second valve seats 70, 80 and the outer surface of the valve stem 34 is set to less than 10 μm. However, the gap G1 between the recesses 74, 84 of the first and second valve seats 70, 80 and the outer surface of the valve stem 34 is not limited to this value, and may be a smaller value, for example, gap G1 = 0 μm (contact state), or it may be set to 10 μm or more.

[0157] As shown in Figure 13, the three-way valve type motor valve 1 allows fluid to flow in through a third flange member 27 via piping (not shown), and fluid to flow out through a first flange member 10 and a second flange member 19 via piping (not shown). Furthermore, as shown in Figure 25(a), in the initial state before operation begins, for example, the valve operating part 45 of the valve stem 34 closes (fully closed) the first valve port 9 while simultaneously opening (fully open) the second valve port 18.

[0158] As shown in Figure 25, when a stepping motor (not shown) provided in the actuator section 3 is rotated by a predetermined amount, a rotating shaft (not shown) is rotated in accordance with the amount of rotation of the stepping motor. When the rotating shaft of the three-way valve type motor valve 1 is rotated, the valve stem 34 connected to and fixed to the rotating shaft rotates by the same angle as the amount of rotation (rotation angle) of the rotating shaft. As the valve stem 34 rotates, the valve operating section 45 rotates inside the valve seat 8, and as shown in Figure 23(a), one end 45a along the circumferential direction of the valve operating section 45 gradually opens the first valve port 9, allowing fluid flowing in from the inlet 26 to flow into the valve seat 8 and out through the first outlet 7 from the first housing member 10.

[0159] At this time, the other end 45b of the valve operating section 45 along the circumferential direction is open to the second valve port 18, as shown in Figure 25(a), so that the fluid flowing in from the inlet 27 flows into the inside of the valve seat 8. The water enters the valve shaft 34 and is distributed according to the amount of rotation of the valve shaft 34, and also flows out to the outside through the second outlet 17 from the second housing member 19.

[0160] As shown in Figure 25(a), in the three-way valve type motor valve 1, when the valve stem 34 is rotationally driven and one end 45a along the circumferential direction of the valve operating part 45 gradually opens the first valve port 9, fluid is supplied to the outside through the valve seat 8 and the inside of the valve stem 34 via the first and second valve ports 9, 18 and the first and second outlets 9, 18.

[0161] Furthermore, since the three-way valve type motor valve 1 has both ends 45a and 45b along the circumferential direction of the valve operating section 45 formed in a curved or planar cross-sectional shape, it is possible to change the opening area of ​​the first and second valve ports 9 and 18 linearly with respect to the rotation angle of the valve shaft 34. In addition, it is thought that the fluid whose flow rate is regulated by both ends 45a and 45b of the valve operating section 45 flows in a state close to laminar flow, and the fluid distribution ratio (flow rate) can be controlled with high precision according to the opening area of ​​the first valve port 9 and the second valve port 18.

[0162] In the three-way valve type motor valve 1 according to this embodiment, as described above, initially, the valve operating part 45 of the valve shaft 34 closes (fully closes) the first valve port 9 and simultaneously opens (fully opens) the second valve port 18.

[0163] In this case, when the valve actuation part 45 of the valve stem 34 of the three-way valve type motor valve 1 closes (completely closes) the first valve port 9, ideally the fluid flow rate should become zero.

[0164] However, as shown in Figure 17, the three-way valve type motor valve 1 is rotatably positioned so that the valve stem 34 is in a non-contact state with a minute gap between the outer surface of the valve stem 34 and the inner surface of the valve seat 8, in order to prevent metal-to-metal galling between the valve stem 34 and the inner surface of the valve seat 8. As a result, a minute gap G2 is formed between the outer surface of the valve stem 34 and the inner surface of the valve seat 8. Therefore, even when the valve operating part 45 of the valve stem 34 closes (completely closes) the first valve port 9, the fluid flow rate does not become zero, and a small amount of fluid attempts to flow towards the second valve port 18 through the minute gap G2 that exists between the outer surface of the valve stem 34 and the inner surface of the valve seat 8.

[0165] Incidentally, in the three-way valve type motor valve 1 according to this embodiment, as shown in Figure 17, recesses 74 and 84 are provided in the first and second valve seats 70 and 80, and these recesses 74 and 84 protrude from the inner circumferential surface of the valve seat 8 toward the valve stem 34, partially reducing the gap G1 between the outer circumferential surface of the valve stem 34 and the inner circumferential surface of the valve seat 8.

[0166] Therefore, even though the three-way valve type motor valve 1 is rotatably positioned so that the valve stem 34 is in a non-contact state with a minute gap between it and the inner surface of the valve seat 8 in order to prevent metal-to-metal galling between them, the flow of fluid from the first valve port 9 into the minute gap G2 between the outer surface of the valve stem 34 and the inner surface of the valve seat 8 is significantly restricted and suppressed by the gap G1, which is a region where the gap between the outer surface of the valve stem 34 and the inner surface of the valve seat 8 is partially reduced.

[0167] Therefore, compared to a three-way valve type motor valve that does not have recesses 74, 84 provided to partially reduce the gap between the valve stem 34 and the first and second valve seats 70, 80 facing the valve stem 34, the three-way valve type motor valve 1 can significantly suppress fluid leakage when fully closed.

[0168] Preferably, the three-way valve type motor valve 1 according to this embodiment can significantly reduce the gaps G1 and G2 by bringing the recesses 74 and 84 of the first and second valve seats 70 and 80 into contact with the outer circumferential surface of the valve stem 34, thereby significantly suppressing fluid leakage when the three-way valve type motor valve 1 is fully closed.

[0169] Similarly, the three-way valve type motor valve 1 can significantly suppress the leakage of fluid through the second valve port 18 to the other first valve port 9 side, even when the valve operating part 45 of the valve shaft 34 closes (completely closes) the second valve port 18.

[0170] Furthermore, in this embodiment 1, as shown in Figure 14, first and second pressure acting parts 94 and 96 are provided on the surfaces 70a and 80a of the first and second valve seats 70 and 80 opposite to the valve stem 34, respectively, which apply fluid pressure through a minute gap between the outer surface of the valve stem 34 and the inner surface of the valve seat 8. Therefore, as shown in Figure 23(a), in the three-way valve type motor valve 1, when the opening is 0% (i.e., the first valve port 9 is near fully closed) and when the opening is 100% (i.e., the first valve port 9 is near fully open), as the first and second valve ports 9 and 18 approach fully closed, the amount of fluid flowing out from the first and second valve ports 9 and 18 decreases significantly. Consequently, in the three-way valve type motor valve 1, the pressure of the flowing fluid decreases at the valve ports that approach the fully closed state. Therefore, for example, when the opening is 0%, that is, when the first valve port 9 is completely closed, fluid with a pressure of about 700 kPa flows in from the inlet 26 and flows out from the second valve port 18 at approximately 700 kPa. At this time, the pressure on the outlet side of the first valve port 9, which is in a nearly completely closed state, drops to, for example, about 100 kPa. As a result, a pressure difference of about 600 kPa is created between the second valve port 18 and the first valve port 9.

[0171] Therefore, in a three-way valve type motor valve 1 without countermeasures, the pressure difference between the second valve port 18 and the first valve port 9 causes the valve shaft 34 to move (displace) towards the first valve port 9, where the pressure is relatively lower, resulting in the valve shaft 34 making uneven contact with the bearing 41. As a result, the driving torque when rotating the valve shaft 34 in the closing direction increases, which may cause malfunction.

[0172] In contrast, in the three-way valve type motor valve 1 according to this embodiment, as shown in Figure 26, first and second pressure acting parts 94 and 96 are provided on the surfaces of the first and second valve seats 70 and 80 opposite to the valve stem 34, which act on the first and second valve seats 70 and 80 with the pressure of the fluid leaking through a minute gap between the outer surface of the valve stem 34 and the inner surface of the valve seat 8. Therefore, in the three-way valve type motor valve 1 according to this embodiment, even if a pressure difference occurs between the second valve port 18 and the first valve port 9, the pressure of the fluid on the side with the relatively higher pressure acts on the first and second pressure acting parts 94 and 96 through the minute gap between the outer surface of the valve stem 34 and the inner surface of the valve seat 8. As a result, the first valve seat 70 on the side with a relatively lower pressure of about 100 kPa acts to return the valve stem 34 to the correct position due to the pressure of the fluid on the side with a relatively higher pressure of about 100 kPa acting on the first pressure acting part 94. Therefore, in the three-way valve type motor valve 1 according to this embodiment, the pressure difference between the second valve port 18 and the first valve port 9 prevents or suppresses the movement (displacement) of the valve shaft 34 towards the first valve port 9, where the pressure is relatively lower, and maintains a state in which the valve shaft 34 is smoothly supported by the bearing 41, thereby preventing or suppressing an increase in the driving torque when rotating the valve shaft 34 in the closing direction.

[0173] Furthermore, in the three-way valve type motor valve 1 according to this embodiment, it operates similarly even when the first valve port 9 is near fully open, that is, when the second valve port 18 is close to fully closed, thereby preventing or suppressing an increase in the driving torque when rotating the valve shaft 34.

[0174] The three-way valve type motor valve 1 according to this embodiment 1 uses, for example, a fluorine-based inert liquid such as Opteon® (manufactured by Mitsui Chemours Fluoroproducts Co., Ltd.) or Novec® (manufactured by 3M Corporation) as the fluid (brine), which is suitable for pressures of 0 to 1 MPa and temperatures of approximately -85 to +120°C.

[0175] When switching the outflow rate of a fluid at approximately -85°C, the three-way valve type motor valve 1 itself reaches a temperature of approximately -85°C, specifically the valve body 6 through which the fluid flows.

[0176] The three-way valve type motor valve 1 uses first and second omni-seals 120, 130, 140, and 150 to seal (seal) the space between the first and second valve seats 70, 80 and the first and second flow path forming members 15, 25, and the space between the first and second flow path forming members 15, 25 and the valve body 6. The first and second omni-seals 120, 130, 140, and 150 are arranged to open toward the first and second pressure acting parts 94, 96, respectively. The first omni-seal 120 consists of a combination of a metal spring member 121 and a synthetic resin seal member 122. Both the metal spring member 121 and the polytetrafluoroethylene (PTFE) synthetic resin that makes up the seal member 122 have excellent heat resistance and can withstand prolonged use at temperatures ranging from approximately -85°C to approximately 260°C. The same applies to the other first and second OmniSeals 130, 140, and 150.

[0177] Therefore, the three-way valve type motor valve 1 according to this embodiment 1 does not have first and second flow path forming members, which are members attached to the valve body 6 to form first and second outlets 7 and 17, and whose longitudinal ends are sealed by sealing means made of synthetic resin with a substantially U-shaped cross-section that is biased in the opening direction by a metal spring member. Compared to the case where the space between the first and second valve seats 70 and 80 and the first and second flow path forming members 15 and 25, and the space between the first and second flow path forming members 15 and 25 and the valve body 6 is sealed by O-rings, it is possible to improve the sealing performance for fluids at low temperatures of about -85°C.

[0178] In other words, by sealing the spaces between the first and second valve seats 70, 80 and the first and second flow path forming members 15, 25, and between the first and second flow path forming members 15, 25 and the valve body 6 using the first and second omni-seals 120, 130, 140, and 150, high sealing performance can be achieved even for fluids at low temperatures of around -85°C. Furthermore, the first and second omni-seals 120, 130, 140, and 150 have relatively large contact areas between the first and second valve seats 70, 80 and the first and second flow path forming members 15, 25, and between the first and second flow path forming members 15, 25 and the valve body 6, which also contributes to high sealing performance. [Industrial applicability]

[0179] Compared to a case where there is no control means to control the temperature adjustment capability of the supply means based on the detection result of a detection means for detecting the heat load of the temperature-controlled object, it is possible to provide a temperature control device that can control the temperature of the temperature-controlled fluid supplied to the temperature-controlled object with high precision. [Explanation of symbols]

[0180] 100... Temperature control device 101... Fluid for temperature control 102...Temperature-controlled devices 103... Supply piping 104...Fluid supply section 105...Detection means 106...Storage tank 109...First flow control three-way valve 110...First temperature sensor 111...Second temperature sensor 117...Second flow control three-way valve

Claims

1. A supply means for supplying a temperature control fluid adjusted to a predetermined temperature, A detection means is provided on the side of the temperature-controlled object to which the temperature-control fluid is supplied from the supply means, and detects the heat load of the temperature-controlled object. A control means for controlling the temperature adjustment capability of the supply means based on the detection result of the detection means, Equipped with, The detection means is A first flow control three-way valve distributes the temperature control fluid supplied from the supply means to the temperature control target and the temperature control fluid that is not supplied to the temperature control target but returned to the supply means. A first temperature detection means for detecting the temperature of the temperature-controlled fluid supplied to the temperature-controlled object by the first flow-control three-way valve, A second temperature detection means for detecting the temperature of the temperature control fluid returning from the temperature control target, It has, The control means is a temperature control device that calculates the heat load of the temperature-controlled object based on the flow rate of the temperature-controlled fluid supplied to the temperature-controlled object from the distribution information of the first flow-control three-way valve and the detection results of the first and second temperature detection means.

2. The supply means includes a first supply means for supplying a low-temperature side fluid adjusted to a predetermined first temperature on the low-temperature side, and a second supply means for supplying a high-temperature side fluid adjusted to a predetermined second temperature on the high-temperature side. Equipped with, The detection means includes a second flow control three-way valve that controls the flow rates of the low-temperature fluid supplied from the first supply means and the high-temperature fluid supplied from the second supply means, and mixes them to supply the temperature-controlled fluid to the temperature-controlled object. A third flow control three-way valve distributes the temperature control fluid that has flowed through the temperature-controlled object to the first supply means and the second supply means while controlling the flow rate. A third temperature detection means for detecting the temperature of the temperature-controlled fluid supplied to the temperature-controlled object by the second flow-control three-way valve, A fourth temperature detection means for detecting the temperature of the temperature control fluid returning from the temperature control target, A temperature control device according to claim 1, comprising:

3. The temperature control device according to claim 1 or 2, wherein the control means controls the temperature adjustment capability in the supply means by increasing or decreasing the flow rate of a heat exchange medium that adjusts the temperature of the temperature control fluid via a heat exchanger in the supply means.

4. The temperature control device according to claim 3, wherein the control means controls the rotational speed of the drive source that drives the refrigerator in the supply means.

5. The temperature control device according to claim 1, wherein the control means controls the distribution ratio in the first flow control three-way valve.

6. The temperature control device according to claim 1, wherein the supply means comprises a fourth flow control three-way valve that distributes the temperature control fluid to be supplied from the supply means to the temperature control target and the temperature control fluid to be returned without being supplied to the temperature control target.

7. The temperature control device according to claim 6, wherein the control means controls the flow rate of the temperature control fluid flowing into the fourth flow control three-way valve to a constant value.

8. The supply means is A storage tank for storing the temperature control fluid that returns from the temperature-controlled object, A cooling means for cooling the temperature control fluid stored in the storage tank, A temperature control device according to claim 1, comprising:

9. The first three-way valve for flow control is, The temperature control device according to claim 1, having an inlet into which the temperature control fluid flows, and first and second valve ports for distributing the temperature control fluid flowing in from the inlet into the temperature control fluid supplied to the temperature control target and the temperature control fluid that is not supplied to the temperature control target but returned to the supply means.

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