Voltage and current generator

Abstract

To improve response of output of a source measure unit by a simple setting.SOLUTION: A voltage current generator (1) includes: an operation section (11) for receiving a user's operation; an output section (16) for outputting an electric signal to a load (30); detection sections (17, 18) for detecting a measurement value of an electric signal outputted by the output section (16); and a control arithmetic section (15) for controlling operation of the output section (16) such that a measurement value of the electric signal approaches a target value on the basis of the deviation between the target value of the electric signal set by a user via the operation section (11) and the measurement value of the electric signal detected by the detection sections. The control arithmetic section (15) performs control including compensation operation for canceling out operation as a low-pass filter in output resistance of the output section (16) and the load (30) on the basis of an impedance value of the load (30) set by the user via the operation section (11).SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] This disclosure relates to the generation of voltage and current in a source measure unit. [Background technology]

[0002] A source measure unit (SMU) integrates the functions of generating (source) and measuring (measure) DC voltage and current. It is a device that can supply a constant voltage or current of a specified value to a load and measure the actual voltage or current at the load. Generally, source measure units are used for characterizing and inspecting devices such as semiconductors and electronic components. In source measure units, a short settling time to the target value is required when generating voltage and current to improve the efficiency of evaluation and inspection. Patent Document 1 describes technology related to source measure units. [Prior art documents] [Patent Documents]

[0003] [Patent Document 1] U.S. Specification No. 8797025 [Overview of the project] [Problems that the invention aims to solve]

[0004] However, the source measure unit described in Patent Document 1 required the user to set parameters that were difficult to calculate, making it difficult to operate.

[0005] Therefore, this disclosure aims to enable the improvement of the output response of the source measure unit with simple settings. [Means for solving the problem]

[0006] Some embodiments of the voltage-current generator are: (1) An operating unit that receives operations from the user, An output section that outputs an electrical signal to the load, A detection unit for detecting the measured value of the electrical signal output by the output unit, A control calculation unit controls the operation of the output unit so that the measured value of the electrical signal approaches the target value, based on the deviation between the target value of the electrical signal set by the user via the operation unit and the measured value of the electrical signal detected by the detection unit. Equipped with, The control calculation unit performs control based on the impedance value of the load set by the user via the operation unit, including the output resistance of the output unit and compensation operations to cancel out the low-pass filter effect of the load.

[0007] Therefore, users can improve the output response of the voltage-current generator simply by setting the load impedance value, without having to consider the output resistance of the output section, which is difficult to determine from the outside.

[0008] In one embodiment, (2) In the voltage-current generator described in (1), The control calculation unit may perform control, including the compensation operation to cancel out the output resistance and the low-pass filter effect of the load, based on the output resistance of the output unit corresponding to the range of the electrical signal set by the user via the operation unit.

[0009] Therefore, even without setting output resistances corresponding to ranges that are difficult for the user to know externally, the voltage-current generator can improve its output response through precise control.

[0010] In one embodiment, (3) In the voltage-current generator described in (1) or (2) above, The output unit outputs a constant voltage signal to the load as the electrical signal. The detection unit detects the voltage value of the electrical signal output by the output unit as the measurement, The control calculation unit is, Based on the deviation between the target value of the voltage of the electrical signal set by the user via the operation unit and the voltage value of the electrical signal detected by the detection unit, the operation of the output unit is controlled, and As the impedance value of the load, control including the compensation operation for canceling the action as a low-pass filter in the output resistor and the load may be performed based on the resistance value and capacitance value of the load set by the user via the operation unit.

[0011] Therefore, the user can improve the response of the constant-voltage output of the voltage-current generator only by performing a simple setting.

[0012] In one embodiment, (4) In the voltage-current generator according to any one of (1) to (3) above, The output unit outputs a constant-current signal as the electrical signal to the load, The detection unit detects the current value of the electrical signal output by the output unit as the measurement, The control arithmetic unit Based on the deviation between the target value of the current of the electrical signal set by the user via the operation unit and the current value of the electrical signal detected by the detection unit, the operation of the output unit is controlled, and As the impedance value of the load, control including the compensation operation for canceling the action as a low-pass filter in the output resistor and the load may be performed based on the resistance value and inductance value of the load set by the user via the operation unit.

[0013] Therefore, the user can improve the response of the constant-current output of the voltage-current generator only by performing a simple setting.

[0014] In one embodiment, (5) In the voltage-current generator according to any one of (1) to (4) above, The control calculation unit may perform control adjusted so as to add a characteristic in which the maximum value of the gain with respect to the electrical signal in a band of a predetermined frequency or higher is limited as the control for canceling the action as the low-pass filter in the load.

[0015] Therefore, even when no load is connected to the voltage-current generator, it is possible to prevent the operation of the voltage-current generator from becoming unstable.

Advantages of the Invention

[0016] According to an embodiment of the present disclosure, improvement in the response of the output of the source measurement unit can be realized with a simple setting.

Brief Description of the Drawings

[0017] [Figure 1] It is a diagram showing the configuration of a source measurement unit according to a comparative example. [Figure 2] It is a block diagram showing a configuration example of a voltage-current generator according to an embodiment. [Figure 3] It is a diagram showing an example of a graph of an optimal output waveform in a source measurement unit. [Figure 4] It is a diagram showing an example of a graph of an output waveform in which overshoot and ringing occur in a source measurement unit. [Figure 5A] It is a diagram showing a circuit configuration corresponding to the impedance of a load. [Figure 5B] It is a diagram showing a circuit configuration corresponding to the impedance of a load. [Figure 6] It is a diagram showing an example of a circuit that gives the inverse characteristic of a low-pass filter. [Figure 7] It is a diagram showing the gain characteristic of the load in FIG. 5A. [Figure 8] It is a diagram showing the gain characteristic of the circuit in FIG. 6. [Figure 9] It is a diagram showing an example in which the graph of the output waveform in FIG. 4 is optimized.

Embodiments for Carrying Out the Invention

[0018] <Comparative Example> Figure 1 shows the configuration of an SMU9 according to a comparative example (Patent Document 1). The user accesses the SMU9 via a user interface and inputs three desired values ​​corresponding to the gain bandwidth (GBW), compensation frequency, and pole / zero ratio. GBW corresponds to how high the gain of the integrator is. The compensation frequency corresponds to the geometric mean of the pole frequency and the zero frequency. The pole-zero ratio corresponds to the ratio of the pole frequency to the zero frequency.

[0019] The SMU9 in Figure 1 compensates the feedback loop using parameters A, B, and F, which are determined from the GBW, compensation frequency, and pole / zero ratio values ​​input by the user. As shown in Figure 1, the input signal x i (representing the i-th sample) is input to multiplier block 91 and delay 92. Multiplier block 91 receives the input signal x i This is multiplied by parameter A. The output of delay 92 is input to multiplier block 93. Multiplier block 93 multiplies the output of delay 92 by parameter B. Adder 95 receives the outputs of multiplier block 91, multiplier block 93, and multiplier block 94. The output of adder 95 is supplied to delay 96 as a feedback signal. Multiplier block 94 multiplies the output of delay 96 by parameter F.

[0020] The default values ​​for A, B, and F are calculated based on the default values ​​loaded into the SMU9 and then modified by the user. The SMU9 allows for programmable GBW, compensation frequency, and pole / zero ratio of the digital feedback loop, enabling free adjustment of compensation for specific loads, suppressing overshoot and ringing, and reducing settling time.

[0021] However, the configuration of the comparative example requires inputting parameters that are not intuitive and are difficult to calculate, such as GBW, compensation frequency, and pole / zero ratio. Furthermore, in order for the user to determine the appropriate setting value, the output resistance of the output section within the device must also be considered, but such output resistance is generally not disclosed to the user. If the output resistance of the output section changes, for example, when changing the range, it becomes impossible to maintain the optimal adjustment state. Thus, the configuration of the comparative example required setting parameters that were difficult to calculate, making it difficult to operate.

[0022] <Embodiment> Hereinafter, an embodiment of the present disclosure will be described with reference to the drawings. In each drawing, parts having the same configuration or function are denoted by the same reference numerals. In the description of this embodiment, redundant descriptions of the same parts may be omitted or simplified as appropriate.

[0023] Figure 2 is a block diagram showing an example configuration of a voltage-current generator 1 according to one embodiment. The voltage-current generator 1 generates an electrical signal to a load 30 in which the voltage or current is set to a target value. As shown in Figure 2, the voltage-current generator 1 includes an operation unit 11, a parameter conversion unit 12, comparison units 13, 14, a control calculation unit 15, an output unit 16, a voltage detection unit 17, and a current detection unit 18.

[0024] Although the voltage / current generator 1 can be implemented as a source measure unit, Figure 2 omits the illustration of components other than those for setting the voltage or current to a target value. For example, Figure 2 omits the calculation unit for averaging the measured voltage or current values, the storage unit for saving the data, and the display unit for displaying the results to the user. Also, for example, Figure 2 shows control lines for setting target values ​​from the parameter conversion unit 12 to the comparison units 13 and 14, but other control lines may exist. Specifically, for example, control lines for range control and output on / off control may be connected from the parameter conversion unit 12 to the block to be controlled.

[0025] The operation unit 11 receives settings from the user for target values ​​of voltage or current, impedance values ​​of the load 30 (inductance L1, capacitance C1, and resistance R3), and operation information such as range. The operation unit 11 may include, for example, input units such as buttons, switches, and touch panels, as well as a display unit that displays the calculation results of the voltage and current generator 1. The operation unit 11 outputs the set values ​​to the parameter conversion unit 12.

[0026] The parameter conversion unit 12 converts the values ​​received by the operation unit 11 into internal information and sets them in each component, including the comparison units 13 and 14.

[0027] Comparison units 13 and 14 calculate the deviation between the target value and the feedback value. Comparison unit 13 calculates the deviation between the target value and the feedback value for voltage. Comparison unit 14 calculates the deviation between the target value and the feedback value for current. Comparison units 13 and 14 output the calculated deviations to the control calculation unit 15.

[0028] The control calculation unit 15 selects either the voltage deviation or the current deviation and performs phase compensation for the control loop. As will be described later, the control calculation unit 15 performs output control based on the impedance value of the load 30.

[0029] The output unit 16 receives the output of the control calculation unit 15 and electrically drives the output terminal to the load 30. The output unit 16 outputs the output voltage to the voltage detection unit 17. The output unit 16 is equipped with a current detection resistor (shunt resistor) inserted in series with the output wiring and outputs the potential difference across the current detection resistor to the current detection unit 18.

[0030] The voltage detection unit 17 scales the signal proportional to the output voltage for each range and digitizes it. The voltage detection unit 17 outputs the digitized output voltage signal to the comparison unit 13.

[0031] The current detection unit 18 scales and digitizes a signal proportional to the output current for each range. The current detection unit 18 outputs the digitized output current signal to the comparison unit 14.

[0032] The load 30 is connected to the output section 16 of the voltage-current generator 1 through the output terminal of the voltage-current generator 1.

[0033] The operation of the constant voltage output by the voltage-current generator 1 is outlined below. The operation unit 11 receives setting information from the user and outputs the voltage setting value to the parameter conversion unit 12. The parameter conversion unit 12 converts the voltage setting value into internal information and outputs the voltage target value to the comparison unit 13. The comparison unit 13 compares the voltage target value with the output of the voltage detection unit 17 and outputs the voltage deviation to the control calculation unit 15. The control calculation unit 15 selects the voltage deviation, performs phase compensation of the control loop, and outputs the control value to the output unit 16. The output unit 16 receives the output of the control calculation unit 15 and electrically drives the load 30. The voltage detection unit 17 digitizes a signal proportional to the voltage output from the output unit 16 and outputs it to the comparison unit 13.

[0034] The operation of the constant current output by the voltage-current generator 1 is outlined below. The operation unit 11 receives setting information from the user and outputs the current setting value to the parameter conversion unit 12. The parameter conversion unit 12 converts the current setting value into internal information and outputs the current target value to the comparison unit 14. The comparison unit 14 compares the current target value with the output of the current detection unit 18 and outputs the current deviation to the control calculation unit 15. The control calculation unit 15 selects the current deviation, performs phase compensation of the control loop, and outputs the control value to the output unit 16. The output unit 16 receives the output of the control calculation unit 15 and electrically drives the load 30. The current detection unit 18 digitizes a signal proportional to the current output from the output unit 16 and outputs it to the comparison unit 14. In this way, the voltage-current generator 1 configures a negative feedback loop whether it outputs a constant voltage or a constant current.

[0035] In the voltage-current generator 1, when a target value for the output voltage or output current is set, a response characteristic is desired in which overshoot and ringing are small, and the output voltage or output current is set to the target value in a short time. The response characteristics in setting the output voltage will be explained below with reference to Figures 3 and 4.

[0036] Figure 3 shows an example of a graph 101 of the optimal output waveform in a typical source measure unit. In Figure 3, the horizontal axis represents time, and the vertical axis represents voltage. In the example in Figure 3, graph 101 reaches the target voltage value v0 in a short time, time t0. Such desirable characteristics can be obtained by adjusting the characteristics of the control calculation unit 15 so that the combined characteristics of the control calculation unit 15, output unit 16, and the output resistance of the device, and the response characteristics due to the external load 30, become first-order integral characteristics in the range where the loop gain is greater than 1.

[0037] Figure 4 shows an example of Graph 102 of the output waveform exhibiting overshoot and ringing in a typical source measure unit. Overshoot refers to a large fluctuation in the value of the controlled object (voltage, current, etc.) beyond the target value. Ringing refers to an oscillation and fluctuation of the value of the controlled object near the target value. When overshoot or ringing occurs in voltage or current, the settling time to the target value becomes longer. For example, if the characteristics of the control calculation unit are set to obtain the optimal response when there is no load, connecting a capacitance (capacitor) to the load will reduce the phase margin due to the integral characteristics (i.e., low-pass filter characteristics) of the output resistance and load capacitance of the output unit, resulting in overshoot and ringing.

[0038] Therefore, the voltage-current generator 1 according to this embodiment suppresses overshoot and ringing and shortens the settling time to the target value by performing control that includes compensation operation to cancel out such low-pass filter action. For example, since the output resistance of the output section 16 is known, the time constant can be calculated by knowing the capacitance of the load 30. Therefore, in addition to phase compensation control according to the deviation of the voltage or current from the target value, the control calculation unit 15 performs control that adds the inverse characteristics of the low-pass filter by the load 30, making the loop gain a first-order integral characteristic, i.e., an optimal characteristic. As will be described later, the control calculation unit 15 realizes an inverse characteristic that cancels out the low-pass filter action of the load 30 based on the impedance value of the load 30 (for example, at least one of inductance L1, capacitance C1, and resistance R3). Therefore, the voltage-current generator 1 makes it possible to improve the response of the output of the source measure unit with simple settings.

[0039] The process for achieving such inverse characteristics when outputting a constant voltage will be explained with reference to Figures 5A, 5B, and 6. Figures 5A and 5B show the circuit configuration corresponding to the output resistance of the output section 16 and the load 30. Figure 5A shows the case where the load 30 consists only of a capacitor C1, and Figure 5B shows the case where the load 30 consists of a parallel circuit of a capacitor C1 and a resistor R3. Figures 5A and 5B show examples where the impedance between the output resistance of the output section 16 and the load 30 is simulated by an RC low-pass filter. For the sake of simplicity, the case where the load 30 consists only of a capacitor C1, as shown in Figure 5A, will be explained here. The RC low-pass filter in Figure 5A is a first-order low-pass filter consisting of a capacitor C1 in parallel with the input signal and a resistor R1 in series with the input signal. The input voltage is v in (t), output voltage v out Let (t) be the current flowing through the circuit, R1 be the output resistance of the output section 16, and C1 be the capacitance of the capacitor of the load 30. In this case, the input voltage is v in (t) and output voltage v out (t) is related to the same concept as in equation 1.

[0040]

number

[0041] Taking the Laplace transform of Equation 1 gives Equation 2.

[0042]

Equation

[0043] Here, assuming the time constant τ = R1C1, the transfer function G(s) becomes Equation

[0044]

Equation

[0045] <Q000229>The inverse function G inv (s) of the transfer function G(s) is expressed as Equation 4.

[0046]

Equation

[0047] Therefore, by realizing the characteristics represented by the transfer function of Equation 4, the control operation unit 15 cancels the actions similar to the low-pass filter in the output unit 16 and the load 30, and suppresses the overshoot and ringing of v out (t) in FIG. 5A. FIG. 6 is a diagram showing an example of a circuit that gives the inverse characteristics of such a low-pass filter. The circuit of FIG. 6 has the characteristics of G inv (s) except for phase inversion. In the circuit of FIG. 6, both the input resistance and the feedback resistance have a resistance value of R2. Also, let the capacitance of the capacitor in parallel with the input resistance be C2. Here, R2 and C2 satisfy the requirements of Equation 5.

[0048]

Equation

[0049] Figure 7 shows the gain characteristics of load 30 in Figure 5A. Figure 8 shows the gain characteristics of the circuit in Figure 6. In other words, Figure 7 shows graph 103 of the gain diagram of the transfer function G(s), and Figure 8 shows the inverse function G inv Graph 104 of the gain diagram for (s) is shown. In Figures 7 and 8, the horizontal axis represents the logarithm of the angular frequency ω, and the vertical axis represents the gain expressed in dB (decibels). In Figures 7 and 8, for simplicity, graphs 103 and 104 approximate the actual gain diagram using piecewise lines. As shown in Figures 7 and 8, the angular frequency ω at the corners of the piecewise lines in graphs 103 and 104 is ω = 1 / τ.

[0050] In Figure 7, graph 103 shows a first-order integral characteristic in the range where the angular frequency ω is greater than or equal to 1 / τ. In contrast, in Figure 8, graph 104 shows a differential characteristic in the range where the angular frequency ω is greater than or equal to 1 / τ. Therefore, when graph 104 in Figure 8 is added to graph 103 in Figure 7, the effects of the slopes of graphs 103 and 104 in the range where the angular frequency ω is greater than or equal to 1 / τ cancel each other out. In other words, the control of the inverse characteristic by the control calculation unit 15 corresponds to amplifying the signal in the range where the angular frequency ω is greater than or equal to 1 / τ. Note that in the example in Figure 6, the output v out The phase of (t) is the input v in (t) is inverted, so the output v out An inverting circuit may be added after (t). Also, Figure 6 shows the inverse function G using analog elements. inv An example of how (s) is constructed is shown, but the control calculation unit 15 performs digital calculations to perform the inverse function G inv (s) may be implemented.

[0051] As described above, the control calculation unit 15 can cancel out the integral characteristics in the output unit 16 and the load 30 by implementing a circuit as shown in Figure 6, which consists of a resistor with resistance value R1 and a capacitor with capacitance value C1, in response to the effect of a first-order low-pass filter, which occurs based on the impedance between the output resistance of the output unit 16 and the capacitance of the load 30, as shown in Figure 5A, by implementing a circuit as shown in Figure 6, which consists of a resistor with resistance value R2 and capacitance C2 with equal time constants. Figure 9 is a diagram showing an example of an optimized output waveform graph 102 of the output waveform in Figure 4. In Figure 9, the horizontal axis represents time and the vertical axis represents voltage. Graph 105 shows an example of an output waveform in which overshoot and ringing occur. Graph 106 shows an example of an optimized output waveform in which the control calculation unit 15 adds inverse characteristics that cancel out the low-pass filter characteristics of the output unit 16 and the load 30.

[0052] In this way, the voltage-current generator 1 controls the output of the electrical signal by acquiring an inverse characteristic that cancels out the low-pass filter effect of the load 30 based on the impedance value of the load 30 (for example, at least one of the inductance L1, capacitance C1, and resistance R3). Therefore, the voltage-current generator 1 makes it possible to improve the response of the source measure unit's output with simple settings.

[0053] As described above, when the voltage-current generator 1 outputs a constant voltage to the load 30, the capacitance C1 of the load 30 and the output resistance R1 of the output unit 16 act as a low-pass filter with a parallel circuit of capacitance C1 and resistance R1 connected as shown in Figure 5A. Here, if we also consider the effect of the resistance R3 in parallel with C1 in the load 30, as shown in Figure 5B, the time constant τ of the low-pass filter by the load 30 becomes τ = R1 × R3 / (R1 + R3) × C1. Therefore, the control calculation unit 15 may perform inverse characteristic control on R2 and C2 such that R2C2 = τ, considering the time constant τ (= R1 × R3 / (R1 + R3) × C1) which takes into account resistance R3 in addition to the capacitance C1 of the load 30 and the output resistance R1 of the output unit 16, as shown by the circuit in Figure 6. With this configuration, the voltage-current generator 1 can suppress overshoot and ringing through more precise control using the known output resistor R1 and the impedance of the load 30, and can set the output voltage to the target value in a shorter time. Furthermore, operation is easy as the user only needs to input the capacitance C1 and resistor R3 of the load 30.

[0054] Even when the voltage-current generator 1 outputs a constant current to the load 30, it can set the output current in a short time by performing control that cancels the low-pass filter effect of the load 30, just as it does when outputting a constant voltage. Specifically, in the case of constant current output, the load 30 acts as a low-pass filter with a time constant τ of τ = L1 / (R1+R3) with respect to the known output resistance R1 of the output unit 16, the load resistance R3 in the load 30, and the inductance L1 in series with it. Therefore, the control calculation unit 15 may perform control with inverse characteristics that cancels out this low-pass filter effect of the load 30. With this configuration, the voltage-current generator 1 can suppress the occurrence of overshoot and ringing by using more precise control with the known output resistance R1, and can set the output current to the target value in a shorter time. In addition, the user only needs to input the resistance R3 of the load 30 and the inductance L1 in series with resistance R3, making operation easy. Similar to the case of generating a constant current, the control calculation unit 15 may achieve control of the inverse characteristics by digital calculation.

[0055] Thus, even without knowing the output resistance R1 of the voltage / current generator 1, the user can generate a constant voltage and constant current with a short settling time simply by inputting the inductance L1, capacitance C1, and resistance R3 of the load 30. Alternatively, the voltage / current generator 1 may pre-store the output resistance R1 for each output range and perform inverse characteristic control to cancel out the low-pass filter effect of the load 30 using the output resistance R1 corresponding to the voltage or current range selected by the user. With this configuration, even if the output resistance R1 of the output section 16 changes by changing the range, the voltage / current generator 1 can maintain an optimal adjustment state with a short settling time, preventing overshoot and ringing, without requiring any user intervention to change settings. Therefore, even if a function known as auto-ranging, i.e., a function that selects the optimal range according to the measured value, is introduced to the voltage / current generator 1, the user can have the voltage / current generator 1 automatically select the range simply by setting the impedance value of the load 30.

[0056] Up to this point, we have described the operation when a load 30 is connected to the voltage-current generator 1, as shown in Figure 2. However, when the load 30 is not connected to the voltage-current generator 1, if the control calculation unit 15 performs control to add the inverse characteristics of a low-pass filter, the operation may become unstable. For example, in the voltage generation operation, if the output terminal of the output unit 16 is open and the control calculation unit 15 performs control to add the inverse characteristics as shown in Figure 8, the gain in the high-frequency range becomes excessive without the effect of the low-pass filter in the loop shown in Figure 7. Therefore, the operation of the voltage-current generator 1 may become unstable. Similarly, in the current generation operation, if the output terminal of the output unit 16 is short-circuited and the control calculation unit 15 performs control to add the inverse characteristics, the gain in the high-frequency range becomes excessive without the effect of a low-pass filter, which may also cause the operation of the voltage-current generator 1 to become unstable.

[0057] To prevent such phenomena, the voltage-current generator 1 may adjust the control calculation unit 15 to limit the maximum value of the added inverse characteristic gain and reduce the loop bandwidth when the load is set. This ensures that even if the load 30 is unexpectedly disconnected, the voltage-current generator 1 will not enter an unstable state such as oscillation and will maintain stable operation. Even when adjusting the control calculation unit 15 in this way, the only parameter that the user needs to set for the voltage-current generator 1 is the impedance value of the externally connected load 30. In other words, the user only needs to set at least one of the load resistance R3, the capacitance C1 in parallel with the load resistance R3, and the inductance L1 in series with the load resistance R3 of the load 30.

[0058] As described above, the voltage-current generator 1 according to this embodiment includes an operation unit 11, an output unit 16, detection units (17, 18), and a control calculation unit 15. The operation unit 11 receives operations from the user. The output unit 16 outputs an electrical signal to the load 30. The detection units (17, 18) detect the measured value of the electrical signal output by the output unit 16. The control calculation unit 15 controls the operation of the output unit 16 so that the measured value of the electrical signal approaches the target value, based on the deviation between the target value of the electrical signal set by the user via the operation unit 11 and the measured value of the electrical signal detected by the detection units (17, 18). Here, the control calculation unit 15 performs control including compensation operation to cancel out the low-pass filter effect in the output unit 16 and the load 30, based on the impedance value of the load 30 set by the user via the operation unit 11. Therefore, the user can improve the output response of the voltage-current generator 1 by simply making settings, without having to consider the output resistance R1 of the output unit 16, which is difficult to know from the outside.

[0059] Furthermore, even if the impedance value of the load 30 set by the user is not necessarily accurate, the voltage-current generator 1 can adjust its characteristics so that it exhibits a first-order integral characteristic in the range where the loop gain is greater than 1 by adding an inverse characteristic corresponding to the impedance value to the characteristics of the electrical signal. Therefore, even if the user does not know the exact impedance value of the load 30, they can improve the output response of the voltage-current generator 1 by simply inputting an approximate value.

[0060] Furthermore, the control calculation unit 15 may perform control to cancel out the low-pass filter effect in the output unit 16 and the load 30 based on the output resistance R1 corresponding to the range of the electrical signal set by the user via the operation unit 11. Therefore, even without setting the output resistance R1 according to a range that is difficult for the user to know from the outside, the voltage-current generator 1 can improve the output response through precise control.

[0061] Furthermore, the output unit 16 may output a constant voltage signal as an electrical signal to the load 30. The voltage detection unit 17 may measure and detect the voltage value of the electrical signal output by the output unit 16. The control calculation unit 15 may control the operation of the output unit 16 based on the deviation between the target voltage value of the electrical signal set by the user via the operation unit 11 and the voltage value of the electrical signal detected by the voltage detection unit 17. The control calculation unit 15 may perform control including compensation operation to cancel out the low-pass filter effect in the output unit 16 and the load 30, based on the resistance and capacitance values ​​of the load 30 set by the user via the operation unit 11 as the impedance value of the load 30.Therefore, the user can improve the response of the constant voltage output of the voltage current generator 1 by simply making a few settings.

[0062] Furthermore, the output unit 16 may output a constant current signal as an electrical signal to the load 30. The current detection unit 18 may measure and detect the current value of the electrical signal output by the output unit 16. The control calculation unit 15 may control the operation of the output unit 16 based on the deviation between the target value of the electrical signal current set by the user via the operation unit 11 and the current value of the electrical signal detected by the current detection unit 18. The control calculation unit 15 may perform control including compensation operation to cancel out the low-pass filter effect in the output unit 16 and the load 30, based on the resistance and inductance values ​​of the load 30 set by the user via the operation unit 11 as the impedance value of the load 30.Therefore, the user can improve the response of the constant current output of the voltage-current generator 1 by simply making a few settings.

[0063] Furthermore, the control calculation unit 15 may add a characteristic that limits the maximum gain for electrical signals in a bandwidth above a predetermined frequency, as a control to cancel out the low-pass filter effect on the load 30, and may also perform control adjusted to reduce the gain across the entire bandwidth. Therefore, even when the load 30 is not connected to the voltage-current generator 1, it is possible to prevent the operation of the voltage-current generator 1 from becoming unstable.

[0064] As described above, according to this embodiment, the voltage-current generator 1 that applies voltage and current can suppress the influence of the impedance of the connected object and achieve a fast and stable response. The only operation required of the user is to input the impedance values ​​(L1, C1, R3) of the connected load 30, and the electrical signal can be regulated with a simple and easy-to-understand operation.

[0065] This disclosure is not limited to the embodiments described above. For example, multiple blocks shown in the block diagram may be merged, or a single block may be divided. Other modifications are possible without departing from the spirit of this disclosure. [Explanation of Symbols]

[0066] 1. Voltage and current generator 9 SMU 11 Control section 12 Parameter conversion section 13,14 Comparison section 15 Control Calculation Unit 16 Output section 17 Voltage detection unit 18 Current detection unit 30 load 91 Multiplier Block 92 delay 93 Multiplier Block 94 Multiplier Block 95 Adder 96 delay 101-106 Graphs

Claims

1. An operating unit that receives input from the user, An output section that outputs an electrical signal to the load, A detection unit for detecting the measured value of the electrical signal output by the output unit, A control calculation unit controls the operation of the output unit so that the measured value of the electrical signal approaches the target value, based on the deviation between the target value of the electrical signal set by the user via the operation unit and the measured value of the electrical signal detected by the detection unit. Equipped with, The control calculation unit, based on the impedance value of the load set by the user via the operation unit, performs control including a compensation operation that adds the inverse characteristics of the low-pass filter in order to cancel out the low-pass filter effect caused by the integral characteristics due to the output resistance of the output unit and the capacitance of the load. The output unit outputs a constant voltage signal to the load as the electrical signal. The detection unit detects the voltage value of the electrical signal output by the output unit as the measured value. Voltage and current generator.

2. The control calculation unit is: Based on the deviation between the target voltage value of the electrical signal set by the user via the operation unit and the voltage value of the electrical signal detected by the detection unit, the operation of the output unit is controlled. Based on the resistance and capacitance values ​​of the load set by the user via the operating unit, the control includes the compensation operation that adds the inverse characteristics of the low-pass filter. The voltage and current generator according to claim 1.

3. An operating unit that receives operations from the user, An output section that outputs an electrical signal to the load, A detection unit for detecting the measured value of the electrical signal output by the output unit, A control calculation unit controls the operation of the output unit so that the measured value of the electrical signal approaches the target value, based on the deviation between the target value of the electrical signal set by the user via the operation unit and the measured value of the electrical signal detected by the detection unit. Equipped with, The control calculation unit performs control, including a compensation operation that adds the inverse characteristics of the low-pass filter in order to cancel out the low-pass filter effect caused by the integral characteristics due to the output resistance of the output unit and the inductance of the load, based on the impedance value of the load set by the user via the operation unit. The output unit outputs a constant current signal to the load as the electrical signal. The detection unit detects the current value of the electrical signal output by the output unit as the measured value. Voltage and current generator.

4. The control calculation unit is: Based on the deviation between the target value of the electrical signal current set by the user via the operation unit and the current value of the electrical signal detected by the detection unit, the operation of the output unit is controlled. Based on the resistance and inductance values ​​of the load set by the user via the operating unit, the control includes the compensation operation that adds the inverse characteristics of the low-pass filter. The voltage and current generator according to claim 3.

5. The voltage-current generator according to any one of claims 1 to 4, wherein the control calculation unit performs control including the compensation operation of adding the inverse characteristics of the low-pass filter based on the output resistance of the output unit corresponding to the range of the electrical signal set by the user via the operation unit.

6. The voltage-current generator according to any one of claims 1 to 4, wherein the control calculation unit performs control adjusted to add a characteristic in which the maximum gain for the electrical signal in a bandwidth of a predetermined frequency or higher is limited, as control including the compensation operation that adds the inverse characteristics of the low-pass filter.

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