Cleaning device and cleaning method

Abstract

To obtain a cleaning device that can realize stable foreign matter removal by stably crimping an adhesive tape to a substrate.SOLUTION: A cleaning device 1A comprises: a supply reel 11 that sends out an adhesive tape 3 wound in a roll manner; a sticking roller 14 that crimps the adhesive tape 3 to a substrate surface by pressing the adhesive tape 3 sent out from the supply reel 11 against the substrate surface of a glass substrate 2 while rotating around a first rotational axis; a peeling roller 13 that peels off the adhesive tape 3, which is crimped to the substrate surface and sent out from the sticking roller 14, from the glass substrate 2 while rotating around a second rotational axis; and a take-up reel 12 that collects the adhesive tape 3 peeled off by the peeling roller 13, where foreign matter adhering to the substrate surface of the glass substrate 2 is removed by the adhesive tape 3 that is crimped to the substrate surface and then peeled off.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present disclosure relates to a cleaning device and a cleaning method for cleaning a substrate surface of a substrate with an adhesive tape. [Background Art]

[0002] Foreign matter adhering to the surface of a substrate such as a glass substrate of a liquid crystal panel greatly affects the yield, quality and reliability of products. Main cleaning methods for such substrates include wet cleaning and dry cleaning, which have both advantages and disadvantages in the balance between economy and foreign matter removal capability. That is, wet cleaning is excellent in foreign matter removal capability, but it has drawbacks such as requiring equipment such as a cleaning tank with a plurality of washing tanks and a drying furnace, and requiring a long time for the cleaning step to the drying step, resulting in a long lead time. On the other hand, dry cleaning has advantages such as reduction of re-adhesion of foreign matter and omission of the drying step, but it is not suitable for removing a large amount of foreign matter.

[0003] As a cleaning method alternative to wet cleaning or dry cleaning, there is a cleaning method that uses an adhesive tape to remove foreign matter adhering to the surface of a substrate. The foreign matter removing apparatus described in Patent Document 1 moves the adhesive tape along the peripheral surface of a contact roller that rotates in synchronization with the movement of the substrate. This foreign matter removing apparatus removes foreign matter adhering to the surface of the substrate by pressing the moving adhesive tape against the substrate and then peeling it off. [Prior Art Literature] [Patent Literature]

[0004] [Patent Document 1] Japanese Unexamined Patent Application Publication No. 2002-23143 [Summary of the Invention] [Problem to be Solved by the Invention]

[0005] However, in the technology described in Patent Document 1, the pressing force when the adhesive tape is pressed onto the substrate is affected by the peeling force when the adhesive tape is peeled off. That is, in the technology described in Patent Document 1, the peeling force of the adhesive tape acts upward on the contact roller as tension in the adhesive tape. The tension in the adhesive tape is the force that winds up the adhesive tape. Therefore, the actual pressing force is the force generated by the pressing device minus the tension in the adhesive tape. As a result, the pressing force on the substrate by the adhesive tape fluctuates greatly, making it difficult to accurately control the pressing force, and resulting in the problem that the adhesive tape cannot be stably pressed onto the substrate.

[0006] This disclosure has been made in view of the above, and aims to provide a cleaning device that can achieve stable removal of foreign matter by stably pressing adhesive tape against a substrate. [Means for solving the problem]

[0007] To solve the above-mentioned problems and achieve the objective, the cleaning device of this disclosure comprises a supply reel that feeds out adhesive tape wound in a roll shape, and an adhesive roller that presses the adhesive tape fed out from the supply reel against the substrate surface, which is the first surface of the substrate, while rotating around a first rotation axis, thereby pressing the adhesive tape against the substrate surface. The cleaning device also comprises a peeling roller that peels the adhesive tape that has been pressed against the substrate surface and fed out from the adhesive roller, while rotating around a second rotation axis, and a winding reel that collects the adhesive tape peeled off by the peeling roller. Furthermore, the cleaning device includes roller guides that guide the movement of the adhesive roller and the release roller in a direction parallel to the direction of movement of the adhesive tape between the adhesive roller and the release roller. The diameter of the release roller is smaller than the diameter of the adhesive roller, and the release roller and adhesive roller are always positioned at the same height relative to the substrate. The cleaning device presses the adhesive tape onto the substrate surface by rotating the application roller in a first rotational direction while moving it along the roller guide in a first movement direction. The cleaning device also peels the adhesive tape from the substrate surface by rotating the peeling roller in a first rotational direction while moving it along the roller guide in a first movement direction. The substrate is decontaminated by adhesive tape that is pressed against the substrate surface and then peeled off, thereby removing any foreign matter adhering to the substrate surface. [Effects of the Invention]

[0008] The cleaning device described herein has the effect of achieving stable removal of foreign matter by stably pressing adhesive tape against the substrate. [Brief explanation of the drawing]

[0009] [Figure 1] Front view showing the configuration of the cleaning device according to Embodiment 1 [Figure 2] Perspective view showing the configuration of the cleaning device according to Embodiment 1 [Figure 3] Cross-sectional view showing the configuration of the adhesive tape used in the cleaning device according to Embodiment 1. [Figure 4] A diagram illustrating the cleaning procedure using the cleaning device according to Embodiment 1. [Figure 5] Front view showing the configuration of the cleaning device according to Embodiment 2 [Figure 6] A diagram illustrating the cleaning procedure using the cleaning device according to Embodiment 2. [Figure 7] Front view showing the configuration of the cleaning device according to Embodiment 3 [Figure 8] A diagram illustrating the cleaning procedure using the cleaning device according to Embodiment 3. [Figure 9] Front view showing the configuration of the cleaning device according to Embodiment 4 [Modes for carrying out the invention]

[0010] Embodiments of the cleaning apparatus and cleaning method according to this disclosure will be described in detail below with reference to the drawings.

[0011] Embodiment 1. Figure 1 is a front view showing the configuration of the cleaning device according to Embodiment 1. Figure 2 is a perspective view showing the configuration of the cleaning device according to Embodiment 1. Figure 3 is a cross-sectional view showing the configuration of the adhesive tape used in the cleaning device according to Embodiment 1. In the following description, the two axes in the plane parallel to the surface to which the adhesive tape 3 is pressed, and which are orthogonal to each other, will be referred to as the X axis and the Y axis. The axis orthogonal to the X axis and the Y axis will be referred to as the Z axis. For example, the XY plane is a plane parallel to the ground, and the Z direction is a direction parallel to the vertical direction. Hereinafter, the positive Z direction may be referred to as the upward direction in the cleaning device 1A, the positive X direction as the rightward direction in the cleaning device 1A, and the positive Y direction as the backward direction in the cleaning device 1A. That is, in the following description, the cleaning device 1A will be described as viewed from the negative Y direction.

[0012] Furthermore, in Embodiment 1, the left direction is the first direction, and the right direction is the second direction. Also, in Embodiment 1, the counterclockwise rotation direction viewed from the negative Y direction is the first rotation direction, and the clockwise rotation direction, which is the opposite direction to the first rotation direction, is the second rotation direction.

[0013] The cleaning device 1A is used in the cleaning process of substrates during the manufacturing of electronic components. Examples of substrates that the cleaning device 1A cleans include semiconductor wafers, glass substrates used in liquid crystal panels, and substrates on which encoder components for servo motors are mounted. The following description will focus on the case where the substrate cleaned by the cleaning device 1A is a glass substrate 2.

[0014] The cleaning device 1A removes foreign matter adhering to the surface of the glass substrate 2 using adhesive tape 3. For example, the cleaning device 1A removes foreign matter such as dust and oils adhering to the surface of the glass substrate 2 from the glass substrate 2.

[0015] The cleaning device 1A includes a tape cleaning unit 10A, which cleans foreign matter adhering to the surface of a glass substrate 2. The cleaning device 1A includes a control device (not shown), a conveyance mechanism 52, and a vertical movement mechanism 51A. The control device controls the operation of the tape cleaning unit 10A. The conveyance mechanism 52 conveys the glass substrate 2, and the vertical movement mechanism 51A moves the tape cleaning unit 10A vertically. In FIGS. 2 and 3, illustrations of the vertical movement mechanism 51A, the conveyance mechanism 52, and the control device are omitted.

[0016] The tape cleaning unit 10A includes a supply reel 11 on which an adhesive tape 3 is set, a take-up reel 12 that collects the used adhesive tape 3, a pressing roller 14 that pressure-bonds the adhesive tape 3 to the glass substrate 2, and a peeling roller 13 that peels the adhesive tape 3 from the glass substrate 2.

[0017] The tape cleaning unit 10A also includes idlers 16 and 17 for smoothly supplying and collecting the adhesive tape 3 and maintaining the peeling angle θ of the adhesive tape 3 constant, and roller guides 15A and 15B for guiding the moving direction of the idler 17, the pressing roller 14 and the peeling roller 13.

[0018] The peeling angle θ is an angle formed between the upper surface of the glass substrate 2, that is, the adhesive surface of the adhesive tape 3, and the direction in which the adhesive tape 3 is pulled with respect to the peeling roller 13 when the adhesive tape 3 is peeled from the upper surface of the glass substrate 2.

[0019] The pressing roller 14 pressure-bonds the adhesive tape 3 fed from the supply reel 11 to the substrate surface which is a first surface (for example, an upper surface) of the glass substrate 2 by pressing the adhesive tape 3 against the substrate surface while rotating around a first rotating shaft that is the rotating shaft of the pressing roller 14.

[0020] The peeling roller 13 peels the adhesive tape 3, which is pressed against the substrate surface of the glass substrate 2, from the glass substrate 2 while rotating around a second rotation axis, which is the rotation axis of the peeling roller 13. The peeling roller 13 peels the adhesive tape 3 from the glass substrate 2 by winding it up.

[0021] In the cleaning device 1A, the axial directions of the supply reel 11, winding reel 12, peeling roller 13, adhesive roller 14, and idlers 16, 17 are parallel to the Y axis, and the cleaning device 1A supplies and winds the adhesive tape 3 so that the upper surface of the adhesive tape 3 is parallel to the XY plane.

[0022] For example, the supply reel 11 and the take-up reel 12 are positioned at approximately the same height. Also, the idlers 16 and 17 are positioned at approximately the same height, and the peel-off roller 13 and the adhesive roller 14 are positioned at approximately the same height. Furthermore, the roller guide 15B is positioned below the roller guide 15A. Also, the idlers 16 and 17 are positioned below the supply reel 11 and the take-up reel 12, and the peel-off roller 13 and the adhesive roller 14 are positioned below the idlers 16 and 17.

[0023] Furthermore, the supply reel 11 is positioned to the left of the take-up reel 12. The idler 16 is positioned to the left of the idler 17, and the adhesive roller 14 is positioned to the left of the release roller 13. The release roller 13 and the idler 17 move while maintaining the same left-right position as the release roller 13 and the idler 17. In Embodiment 1, the diameter of the release roller 13 and the diameter of the adhesive roller 14 are the same.

[0024] The roller guides 15A and 15B are guides that allow the adhesive roller 14, the peeling roller 13, and the idler 17 to move independently from side to side when the tape cleaning unit 10A performs the adhesive and peeling operations. In other words, the roller guides 15A and 15B move the adhesive roller 14, the peeling roller 13, and the idler 17 separately, and guide their movement in a direction parallel to the direction of movement of the adhesive tape 3 between the adhesive roller 14 and the peeling roller 13.

[0025] Roller guide 15A is used to guide the left-right movement of the idler 17, and roller guide 15B is used to guide the left-right movement of the adhesive roller 14 and the peeling roller 13.

[0026] The roller guides 15A and 15B are grooves provided within the tape cleaning unit 10A, for example, within which the adhesive roller 14, the release roller 13, and the idler 17 move. The roller guides 15A and 15B extend in directions parallel to the left-right direction. Therefore, the adhesive roller 14, the release roller 13, and the idler 17 can move in the left-right direction along the roller guides 15A and 15B.

[0027] When the tape cleaning unit 10A performs the application process, the application roller 14 moves to the left along the roller guide 15B while rotating counterclockwise from its initial position. When the tape cleaning unit 10A performs the peeling process, the peeling roller 13 and idler 17 move to the left from their initial positions, with the peeling roller 13 rotating counterclockwise and the idler 17 rotating clockwise. Specifically, during the peeling process, the peeling roller 13 moves to the left from its initial position, which is the right end of the roller guide 15B, while rotating counterclockwise along the roller guide 15B. The idler 17 also moves to the left from its initial position, while rotating clockwise along the roller guide 15A. After this, the application roller 14 and peeling roller 13 move to the right along the roller guide 15B. The idler 17 also moves to the right along the roller guide 15A. As a result, the application roller 14, peeling roller 13, and idler 17 return to their initial positions.

[0028] The adhesive tape 3 consists of a base layer 31 and an adhesive layer 32. The adhesive layer 32 is located on the upper side of the base layer 31. The adhesive tape 3 is supplied by the manufacturer in a roll-shaped form with the adhesive layer 32 facing towards the center. The adhesive strength of the adhesive tape 3 used by the cleaning device 1A is set to 0.1 to 1.0 N / 20 mm. For example, the E-MASK R series (manufactured by Nitto Denko Corporation), a surface protection material for optical components, is used for the adhesive tape 3.

[0029] The adhesive tape 3, which is set on the supply reel 11 in a roll-like state, passes through the idler 16, application roller 14, release roller 13, and idler 17 in that order, and is wound onto the take-up reel 12. Specifically, the adhesive tape 3, which is fed out from the supply reel 11, passes to the left of the idler 16, below the application roller 14, below the release roller 13, and to the right of the release roller 13, and then to the left of the idler 17 before reaching the take-up reel 12. Since the left-right positions of the release roller 13 and the idler 17 are the same, the peeling angle θ of the adhesive tape 3 becomes 90 degrees or more as the adhesive tape 3 passes to the right of the release roller 13 and to the left of the idler 17.

[0030] The adhesive tape 3 has a base layer 31 in contact with the idler 16, the application roller 14, and the release roller 13, and an adhesive layer 32 in contact with the idler 17. Therefore, in the portion along the application roller 14 and the release roller 13, the adhesive layer 32 is facing downwards. In the cleaning device 1A, the adhesive layer 32 of the adhesive tape 3 is pressed against and peeled off from the glass substrate 2 in the region from the application roller 14 to the release roller 13.

[0031] Furthermore, the supply reel 11 and the take-up reel 12 have motors and brakes built into their rotating shafts. This allows the supply reel 11 and the take-up reel 12 to be driven and stopped at will in accordance with the timing of supplying and retrieving the adhesive tape 3. The take-up reel 12 winds the adhesive tape 3 so that it does not sag between the take-up reel 12 and the idler 17. The adhesive tape 3 has a width that is the same as the distance in the Y direction, which is the width of the glass substrate 2, or slightly wider than the width of the glass substrate 2.

[0032] Next, the detailed cleaning procedure using the cleaning device 1A will be described. Figure 4 is a diagram illustrating the cleaning procedure using the cleaning device according to Embodiment 1. Note that the vertical movement mechanism 51A, the transport mechanism 52, and the control device are not shown in Figure 4. Until the cleaning process is started, the adhesive roller 14, the peeling roller 13, and the idler 17 are stopped in their initial positions.

[0033] (S1) When the cleaning device 1A starts the cleaning process, it transports the glass substrate 2 to the tape cleaning unit 10A by the transport mechanism 52 with the top surface to be cleaned facing upwards. Next, the cleaning device 1A lowers the tape cleaning unit 10A to the height of the glass substrate 2 by the vertical movement mechanism 51A. Specifically, the cleaning device 1A lowers the tape cleaning unit 10A so that the height of the adhesive layer 32 of the adhesive tape 3, which is positioned between the adhesive roller 14 and the release roller 13, is the same as the height of the top surface of the glass substrate 2.

[0034] At this point, the adhesive roller 14 is positioned to the right of the glass substrate 2. Since the idler 16 is positioned higher than the adhesive roller 14, the adhesive tape 3 is tilted between the idler 16 and the adhesive roller 14. Therefore, when the adhesive roller 14 is positioned to the right of the glass substrate 2, the adhesive tape 3 is not adhering to the glass substrate 2.

[0035] (S2) The cleaning device 1A moves the adhesive roller 14 to the left along the roller guide 15B while rotating it counterclockwise when viewed from the negative Y direction. The cleaning device 1A rotates the supply reel 11 in synchronization with the movement of the adhesive roller 14 to the left along the roller guide 15B, supplying the adhesive tape 3 and pressing it onto the glass substrate 2. Since the height of the adhesive layer 32 of the adhesive tape 3 in contact with the adhesive roller 14 is the same as the height of the top surface of the glass substrate 2, the adhesive tape 3 adheres tightly to the glass substrate 2 as the adhesive roller 14 moves to the left.

[0036] The appropriate travel speed of the adhesive roller 14 is 5 to 30 mm / s. To control the pressing force applied to the adhesive roller 14 against the glass substrate 2, the cleaning device 1A can adjust the pressing force by, for example, supporting the roller guide 15B and the adhesive roller 14 with a linear guide and spring, and adjusting the lowering position of the tape cleaning unit 10A. Alternatively, a linear guide and an air cylinder may be installed between the roller guide 15B and the adhesive roller 14 in the cleaning device 1A. In this case, the cleaning device 1A can adjust the pressing force by adjusting the pressure of the compressed air supplied to the air cylinder with a regulator. The pressing force applied to the adhesive roller 14 against the glass substrate 2 is 5 to 30 N / cm. 2 That is appropriate.

[0037] The adhesive tape 3 is applied to the area of ​​the upper surface of the glass substrate 2 that the application roller 14 passes over via the adhesive tape 3. After the adhesive tape 3 has been applied to all areas of the upper surface of the glass substrate 2, the application roller 14 reaches the left end of the roller guide 15B.

[0038] (S3) The cleaning device 1A moves the peeling roller 13 to the left along the roller guide 15B, and in sync with this, moves the idler 17 to the left along the roller guide 15A. In other words, the cleaning device 1A moves the peeling roller 13 and the idler 17 to the left at the same speed.

[0039] The cleaning device 1A moves the release roller 13 to the left along the roller guide 15B while rotating it counterclockwise when viewed from the negative Y direction. The cleaning device 1A also moves the idler 17 to the left along the roller guide 15A while rotating it clockwise when viewed from the negative Y direction. The cleaning device 1A winds up the adhesive tape 3 on the take-up reel 12 in synchronization with the leftward movement of the release roller 13 and idler 17. Here, the force with which the take-up reel 12 pulls the adhesive tape 3 is equal to the force required to peel the adhesive tape 3 from the glass substrate 2. The area of ​​the adhesive tape 3 that adheres to the upper surface of the glass substrate 2 is the area from the application roller 14 to the release roller 13, so the area of ​​the upper surface of the glass substrate 2 that the release roller 13 has passed through is peeled from the glass substrate 2. In this way, the adhesive tape 3 is peeled from the glass substrate 2 by the leftward movement of the release roller 13.

[0040] As the adhesive tape 3 peels off from the glass substrate 2, any foreign matter adhering to the surface of the glass substrate 2 is simultaneously removed by the adhesive tape 3. The moving speed of the peeling roller 13 and idler 17 is appropriately 2 to 30 mm / s. In Embodiment 1, since the peeling roller 13 and idler 17 move simultaneously at the same speed, the cleaning device 1A can maintain a peeling angle θ at a constant angle of 90 degrees or more. A peeling angle θ of 120 to 150 degrees is preferable.

[0041] When the peeling angle θ is less than 90 degrees, a large force is required to peel off the adhesive tape 3. On the other hand, the cleaning device 1A can maintain a peeling angle θ at a constant angle of 90 degrees or more, thereby reducing the peeling force required to remove the adhesive tape 3 and minimizing variations in that force. As a result, the cleaning device 1A can achieve stable peeling.

[0042] (S4) After peeling off the adhesive tape 3, the cleaning device 1A raises the tape cleaning unit 10A to its initial height using the vertical movement mechanism 51A. Specifically, the cleaning device 1A raises the tape cleaning unit 10A so that the height of the adhesive layer 32 of the adhesive tape 3, which is positioned between the application roller 14 and the peeling roller 13, is higher than the height of the upper surface of the glass substrate 2. Then, the cleaning device 1A uses the transport mechanism 52 to transport the glass substrate 2 from directly below the tape cleaning unit 10A.

[0043] (S5) After this, the cleaning device 1A returns the adhesive roller 14, the release roller 13, and the idler 17 to their original initial positions. Specifically, the cleaning device 1A moves the adhesive roller 14 and the release roller 13 to the right along the roller guide 15B while rotating them clockwise. The cleaning device 1A also moves the idler 17 to the right along the roller guide 15A while rotating it counterclockwise.

[0044] The cleaning device 1A returns the adhesive roller 14, the peeling roller 13, and the idler 17 to their original initial positions, while simultaneously supplying new adhesive tape 3 from the supply reel 11. The take-up reel 12 also winds the adhesive tape 3 so that it does not sag between the take-up reel 12 and the idler 17. This prepares the cleaning device 1A for the next cleaning process on the glass substrate 2.

[0045] If there is another glass substrate 2 to be processed, the cleaning device 1A returns to process (S1) and performs processes (S1) through (S5) to remove foreign matter from the next glass substrate 2.

[0046] As described above, according to Embodiment 1, since the cleaning device 1A uses two rollers, an adhesive roller 14 and a peeling roller 13, the range of selectable roller types for pressing and peeling the adhesive tape 3 is broadened. For the cleaning device 1A, the appropriate diameter of the roller, the appropriate hardness of the roller, and the appropriate moving speed of the roller can be selected. Furthermore, since the cleaning device 1A uses two rollers, an adhesive roller 14 and a peeling roller 13, the pressing force when pressing the adhesive tape 3 to the glass substrate 2 is not affected by the peeling force when peeling the adhesive tape 3. As a result, the cleaning device 1A can stably press the adhesive tape 3 to the glass substrate 2. Therefore, the cleaning device 1A can stably remove foreign matter from the glass substrate 2.

[0047] Furthermore, since the peeling angle θ is 90 degrees or more, the cleaning device 1A can reduce the peeling force required during peeling, thereby achieving stable removal of foreign matter.

[0048] Furthermore, the cleaning device 1A collects the adhesive tape 3 that has been pressed and peeled off from the glass substrate 2 using the winding reel 12, and always supplies new adhesive tape 3 from the supply reel 11. As a result, it is impossible for the removed foreign matter to reattach to the glass substrate 2, and the cleaning device 1A can achieve stable removal of foreign matter from the glass substrate 2.

[0049] Furthermore, since the cleaning device 1A is equipped with a roller guide 15B, stable removal of foreign matter can be achieved for glass substrates 2 whose distance in the X direction is shorter than the travel distance of the adhesive roller 14 or peeling roller 13 within the roller guide 15B.

[0050] The idler 17 will be in contact with the adhesive layer 32 of the adhesive tape 3. Therefore, the idler 17 is configured in a way that makes it difficult for the adhesive tape 3 to stick to it. For example, the idler 17 may be surface-treated to make it difficult for the adhesive tape 3 to stick to it. Alternatively, slits may be provided on the surface of the idler 17 to reduce the contact area between the idler 17 and the adhesive tape 3, thereby making it difficult for the adhesive tape 3 to stick to it. By making it difficult for the adhesive tape 3 to stick to the idler 17, it is possible to prevent the force required to wind up the adhesive tape 3 from becoming excessive, so that the cleaning device 1A can achieve stable winding.

[0051] Embodiment 2. Next, Embodiment 2 will be described with reference to Figures 5 and 6. In Embodiment 2, the cleaning device removes foreign matter from the glass substrate 2 using two rollers without using idlers 16 and 17.

[0052] Figure 5 is a front view showing the configuration of the cleaning device according to Embodiment 2. Components in Figure 5 that achieve the same function as those in the cleaning device 1A of Embodiment 1 shown in Figure 1 are denoted by the same reference numerals, and redundant explanations are omitted.

[0053] The cleaning device 1B of the second embodiment is a device that removes foreign matter from the glass substrate 2 using two rollers, an adhesive roller 14 and a peeling roller 13X. Similar to the cleaning device 1A, the cleaning device 1B is configured so that the peeling angle θ is 90 degrees or more.

[0054] The cleaning device 1B includes a tape cleaning unit 10B, which cleans foreign matter adhering to the surface of the glass substrate 2. The cleaning device 1B also includes a transport mechanism 52, an up-and-down movement mechanism 51A, and a left-and-right movement mechanism 51B. The cleaning device 1B also includes a control device (not shown).

[0055] The left-right movement mechanism 51B moves the tape cleaning unit 10B from side to side. The tape cleaning unit 10B includes a supply reel 11, a take-up reel 12, an adhesive roller 14, and a peeling roller 13X for peeling the adhesive tape 3 from the glass substrate 2. The tape cleaning unit 10B also has a roller guide 15C that guides the left-right movement of the adhesive roller 14. The roller guide 15C guides the left-right movement of the adhesive roller 14.

[0056] The peeling roller 13X of the cleaning device 1B is not located within the roller guide 15C and rotates in a fixed position without moving. The peeling roller 13X is located in the same position as the initial position of the peeling roller 13 of the cleaning device 1A. In other words, the fixed position of the peeling roller 13X is the same as the initial position of the peeling roller 13. That is, the peeling roller 13X is located within the tape cleaning unit 10B at a position corresponding to the right end of the roller guide 15C. The peeling roller 13X is located at the same height as the roller guide 15C.

[0057] The roller guide 15C, like the roller guide 15B, is a groove provided within the tape cleaning unit 10B, and the adhesive roller 14 moves within this groove. The roller guide 15C extends in the left-right direction. Therefore, the adhesive roller 14 is movable in the left-right direction.

[0058] The left end of roller guide 15C is at the same position as the left end of roller guide 15B. The right end of roller guide 15C is to the left of the release roller 13X. The initial position of the adhesive roller 14 in the tape cleaning unit 10B is the same as the initial position of the adhesive roller 14 in the tape cleaning unit 10A. In other words, the X-coordinate of the adhesive roller 14 in roller guide 15C before the adhesive process begins is the same as the X-coordinate of the adhesive roller 14 in roller guide 15B before the pressure bonding process begins.

[0059] In the tape cleaning unit 10B, the shaft of the take-up reel 12 is located to the left of the shaft of the release roller 13X. Also, in the second embodiment, the diameter of the release roller 13X and the diameter of the adhesive roller 14 are the same size.

[0060] When the tape cleaning unit 10B performs the application process, the application roller 14 rotates counterclockwise from its initial position and moves to the left along the roller guide 15C. When the tape cleaning unit 10B performs the peeling process, the entire tape cleaning unit 10B moves to the left, and at the same time, the application roller 14 moves to the right along the roller guide 15C. After this, the glass substrate 2 is discharged, and the tape cleaning unit 10B moves to the right, returning to its initial position.

[0061] The adhesive tape 3 set on the supply reel 11 passes through the application roller 14 and the release roller 13X in that order, contacting both rollers, and is then wound onto the take-up reel 12. That is, the adhesive tape 3 fed from the supply reel 11 passes under the application roller 14, under the release roller 13X, and to the right of the release roller 13X, reaching the take-up reel 12, where it is wound from the left side. In the tape cleaning unit 10B, the axis of the take-up reel 12 is to the left of the axis of the release roller 13X, so as the adhesive tape 3 passes to the right of the release roller 13, the peeling angle θ of the adhesive tape 3 becomes 90 degrees or more.

[0062] The adhesive tape 3 has its base layer 31 in contact with the application roller 14 and the release roller 13X. Therefore, in the portion along the application roller 14 and the release roller 13X, the adhesive layer 32 is facing downwards. In the cleaning device 1B, the adhesive layer 32 of the adhesive tape 3 is pressed against and peeled off from the glass substrate 2 in the region from the application roller 14 to the release roller 13X.

[0063] Furthermore, the supply reel 11 and the take-up reel 12 have motors and brakes built into their rotating shafts. This allows the supply reel 11 and the take-up reel 12 to be driven and stopped at will in accordance with the timing of supplying and retrieving the adhesive tape 3.

[0064] Next, the detailed cleaning procedure using the cleaning device 1B will be described. Figure 6 is a diagram illustrating the cleaning procedure using the cleaning device according to Embodiment 2. Note that in Figure 6, the vertical movement mechanism 51A, the horizontal movement mechanism 51B, the transport mechanism 52, and the control device are not shown. Until the cleaning process is started, the adhesive roller 14 is stopped at the right end of the roller guide 15C, which is its initial position.

[0065] (S11) When the cleaning device 1B starts the cleaning process, it transports the glass substrate 2 to the tape cleaning unit 10B using the transport mechanism 52, with the top surface to be cleaned facing upwards. Next, the cleaning device 1B lowers the tape cleaning unit 10B to the height of the glass substrate 2 using the vertical movement mechanism 51A. Specifically, the cleaning device 1B lowers the tape cleaning unit 10B so that the height of the adhesive layer 32 of the adhesive tape 3, which is positioned between the adhesive roller 14 and the release roller 13X, is the same as the height of the top surface of the glass substrate 2.

[0066] At this point, the adhesive roller 14 is positioned to the right of the glass substrate 2. Also, since the supply reel 11 is positioned higher than the adhesive roller 14, the adhesive tape 3 is tilted between the supply reel 11 and the adhesive roller 14. Therefore, when the adhesive roller 14 is positioned to the right of the glass substrate 2, the adhesive tape 3 is not adhering to the glass substrate 2.

[0067] (S12) The cleaning device 1B moves the adhesive roller 14 to the left along the roller guide 15C while rotating it counterclockwise when viewed from the negative Y direction. The cleaning device 1B rotates the supply reel 11 in synchronization with the movement of the adhesive roller 14 to the left along the roller guide 15C, supplying the adhesive tape 3 and pressing it onto the glass substrate 2. Since the height of the adhesive layer 32 of the adhesive tape 3 in contact with the adhesive roller 14 is the same as the height of the top surface of the glass substrate 2, the adhesive tape 3 adheres tightly to the glass substrate 2 as the adhesive roller 14 moves to the left.

[0068] The movement speed of the adhesive roller 14, the pressing force applied to the adhesive roller 14 against the glass substrate 2, and the method for adjusting the pressing force are the same as in Embodiment 1.

[0069] The adhesive tape 3 is applied to the area of ​​the upper surface of the glass substrate 2 that the application roller 14 passes over via the adhesive tape 3. After the adhesive tape 3 has been applied to all areas of the upper surface of the glass substrate 2, the application roller 14 reaches the left end of the roller guide 15C.

[0070] (S13) Subsequently, the cleaning device 1B moves the entire tape cleaning unit 10B to the left using the left-right movement mechanism 51B, while simultaneously moving the adhesive roller 14 to the right along the roller guide 15C. In other words, the cleaning device 1B moves the tape cleaning unit 10B to the left and moves the adhesive roller 14 to the right along the roller guide 15C.

[0071] This ensures that the cleaning device 1B does not move the adhesive tape 3 attached to the glass substrate 2 relative to the glass substrate 2. In other words, the cleaning device 1B prevents the adhesive tape 3 from moving on the glass substrate 2. To put it another way, the cleaning device 1B moves the tape cleaning unit 10B to the left side of the glass substrate 2 while maintaining the adhesive position of the adhesive tape 3 on the glass substrate 2.

[0072] The cleaning device 1B returns the adhesive roller 14 to its original initial position and simultaneously supplies new adhesive tape 3 from the supply reel 11. The take-up reel 12 rotates clockwise in its fixed position to wind the adhesive tape 3 so that it does not flex between the take-up reel 12 and the release roller 13X. When the take-up reel 12 winds the adhesive tape 3, the adhesive tape 3 is peeled off from the glass substrate 2 and foreign matter on the surface of the glass substrate 2 is removed. The appropriate moving speed of the release roller 13X relative to the glass substrate 2 is 2 to 30 mm / s. Since the position of the release roller 13X is fixed within the tape cleaning unit 10B, the moving speed of the release roller 13X corresponds to the moving speed of the tape cleaning unit 10B. Therefore, the appropriate moving speed of the tape cleaning unit 10B to the left when the adhesive tape 3 is peeled off is 2 to 30 mm / s.

[0073] Furthermore, since the peeling roller 13X and the take-up reel 12 move together with the tape cleaning unit 10B, their relative positions remain unchanged, and the cleaning device 1B can maintain a constant peeling angle θ of 90 degrees or more. A peeling angle θ of 120 to 150 degrees is desirable. This allows the cleaning device 1B to reduce the peeling force required to peel off the adhesive tape 3 and to reduce variations in that force. Therefore, the cleaning device 1B can achieve stable peeling.

[0074] (S14) After peeling off the adhesive tape 3, the cleaning device 1B uses the vertical movement mechanism 51A to raise the tape cleaning unit 10B to a position higher than the height of the glass substrate 2. Then, the cleaning device 1B uses the transport mechanism 52 to transport the glass substrate 2 from directly below the tape cleaning unit 10B.

[0075] (S15) After this, the cleaning device 1B returns the tape cleaning unit 10B to its initial position by moving it to the right using the left-right movement mechanism 51B. This prepares the cleaning device 1B for the next cleaning process on the glass substrate 2.

[0076] If there is another glass substrate 2 to be processed, the cleaning device 1B returns to process (S11) and performs processes (S11) through (S15) to remove foreign matter from the next glass substrate 2.

[0077] As described above, according to Embodiment 2, since the cleaning device 1B uses two rollers, an adhesive roller 14 and a peeling roller 13X, the same effects as in Embodiment 1 can be obtained. In other words, the range of selectable roller types used for pressing and peeling the adhesive tape 3 is wider for the cleaning device 1B. In addition, the pressing force when pressing the adhesive tape 3 to the glass substrate 2 is not affected by the peeling force when peeling off the adhesive tape 3. As a result, the cleaning device 1B can stably press the adhesive tape 3 to the glass substrate 2. Therefore, the cleaning device 1B can stably remove foreign matter from the glass substrate 2.

[0078] Furthermore, since the peeling angle θ is 90 degrees or more, the cleaning device 1B can reduce the peeling force required during peeling, thereby achieving stable removal of foreign matter.

[0079] Furthermore, the adhesive tape 3, once pressed onto the glass substrate 2 and then peeled off, is recovered by the winding reel 12, and new adhesive tape 3 is always supplied from the supply reel 11. As a result, the removed foreign matter cannot reattach to the glass substrate 2, and the cleaning device 1B can achieve stable removal of foreign matter from the glass substrate 2.

[0080] Embodiment 3. Next, Embodiment 3 will be described with reference to Figures 7 and 8. In Embodiment 3, the cleaning device removes foreign matter from the glass substrate 2 using two rollers whose positions are fixed, without using idlers 16, 17 and roller guides 15C.

[0081] Figure 7 is a front view showing the configuration of the cleaning device according to Embodiment 3. Components in Figure 7 that achieve the same function as those in the cleaning device 1B of Embodiment 2 shown in Figure 5 are denoted by the same reference numerals, and redundant explanations are omitted.

[0082] The cleaning device 1C of Embodiment 3 is a device that can remove foreign matter from a glass substrate 20 that is longer in the X direction than the glass substrate 2. In other words, Embodiment 3 assumes that the glass substrate 20 is larger than the glass substrate 2 described in Embodiments 1 and 2 and is supplied continuously.

[0083] Similar to cleaning device 1B, cleaning device 1C removes foreign matter from the glass substrate 20 using two rollers, an adhesive roller 14 and a peeling roller 13X. Similar to cleaning device 1B, cleaning device 1C is configured so that the peeling angle θ is 90 degrees or more.

[0084] Compared to cleaning device 1B, cleaning device 1C has a tape cleaning unit 10C instead of tape cleaning unit 10B. Tape cleaning unit 10C differs from tape cleaning unit 10B in that it does not have a roller guide 15C. Specifically, tape cleaning unit 10C has a supply reel 11, a take-up reel 12, an adhesive roller 14, and a peel roller 13X for peeling the adhesive tape 3 from the glass substrate 20.

[0085] The adhesive roller 14 is fixed in a first fixed position, which is a specific position within the tape cleaning unit 10C. The release roller 13X is fixed in a second fixed position, which is a specific position within the tape cleaning unit 10C. The first fixed position of the adhesive roller 14 is the same as the initial position of the adhesive roller 14 in the tape cleaning units 10A and 10B. The second fixed position of the release roller 13X is the same as the initial position of the release roller 13 in the tape cleaning units 10A and 10B.

[0086] Furthermore, cleaning device 1C differs from cleaning device 1B in that it does not have a left-right movement mechanism 51B. Also, cleaning device 1C differs from cleaning device 1B in that it has a transport mechanism 53 instead of a transport mechanism 52. The transport mechanism 53 transports the glass substrate 20 directly below the tape cleaning unit 10C and also transports the glass substrate 20 to the right during the crimping process.

[0087] Next, the detailed cleaning procedure by the cleaning device 1C will be described. Figure 8 is a diagram illustrating the cleaning procedure by the cleaning device according to Embodiment 3. Note that the vertical movement mechanism 51A, the transport mechanism 53, and the control device are not shown in Figure 8. Note that among the processes in Figure 8, the processes that are the same as those performed by the cleaning device 1B of Embodiment 2 described in Figure 6 will not be explained.

[0088] (S21) The process (S21) performed by the cleaning device 1C is the same as the process (S11) performed by the cleaning device 1B. That is, when the cleaning device 1C starts the cleaning process, the transport mechanism 53 transports the glass substrate 20 directly below the tape cleaning unit 10C. The appropriate moving speed of the glass substrate 20 is 5 to 30 mm / s. Next, the cleaning device 1C lowers the tape cleaning unit 10C to the height of the glass substrate 20 using the vertical movement mechanism 51A.

[0089] (S22) The cleaning device 1C moves the glass substrate 20 in the +X direction using the transport mechanism 53. As a result, when the glass substrate 20 passes directly under the adhesive roller 14, adhesive tape 3 is supplied from the supply reel 11, and the adhesive tape 3 is pressed onto the glass substrate 20 by the adhesive roller 14. At this time, the cleaning device 1C rotates the adhesive roller 14 in a counterclockwise direction while keeping it in a fixed position, and transports the glass substrate 20 to the right, which is the direction in which the peeling roller 13X is positioned, thereby making the adhesive tape 3 adhere tightly to the glass substrate 20.

[0090] The cleaning device 1C supports the adhesive roller 14 relative to the tape cleaning unit 10C with a linear guide and spring, and adjusts the pressing force applied to the adhesive roller 14 against the glass substrate 20 by adjusting the lowering position of the tape cleaning unit 10C. Alternatively, the cleaning device 1C may support the adhesive roller 14 relative to the tape cleaning unit 10C with a linear guide and an air cylinder, and adjust the pressing force of the adhesive tape 3 against the glass substrate 20 using the air cylinder. In this case, the cleaning device 1C can adjust the pressing force by adjusting the pressure of the compressed air supplied to the air cylinder with a regulator. The pressing force applied to the adhesive roller 14 against the glass substrate 20 is 5 to 30 N / cm². 2 That is appropriate.

[0091] The adhesive tape 3 is applied to the area of ​​the upper surface of the glass substrate 20 that the adhesive roller 14 has passed over via the adhesive tape 3.

[0092] (S23) The glass substrate 20 and the adhesive tape 3 pressed against it move to the right at the same speed. When the glass substrate 20 passes directly beneath the release roller 13X, the adhesive tape 3 is peeled away from the glass substrate 20, and at the same time, any foreign matter adhering to the surface of the glass substrate 20 is removed. At this time, the cleaning device 1C peels the adhesive tape 3 from the glass substrate 20 by rotating the release roller 13X in a counterclockwise direction while it is in a fixed position. The adhesive tape 3 that has passed through the release roller 13X is then wound up on the winding reel 12 so that the adhesive tape 3 between the release roller 13X and the winding reel 12 does not sag.

[0093] Since the relative positional relationship between the peeling roller 13X and the winding reel 12 remains unchanged, the cleaning device 1C can maintain a constant peeling angle θ of 90 degrees or more. A peeling angle θ of 120 to 150 degrees is desirable. This allows the cleaning device 1C to reduce the peeling force required to peel off the adhesive tape 3 and to reduce variations in that force. Therefore, the cleaning device 1C enables stable peeling.

[0094] If there is another glass substrate 20 to be processed, the cleaning device 1C performs the processes from (S22) to (S23) in parallel and simultaneously to remove foreign matter from the next glass substrate 20. In this way, the cleaning device 1C continuously applies the adhesive tape 3 with the application roller 14 and peels off the adhesive tape 3 with the peeling roller 13X to multiple glass substrates 20.

[0095] As described above, according to Embodiment 3, since the cleaning device 1C uses two rollers, the adhesive roller 14 and the peeling roller 13X, the same effects as in Embodiments 1 and 2 can be obtained. In other words, compared to the cleaning device 1C, the range of selectable roller types used for pressing and peeling the adhesive tape 3 is expanded. Also, the pressing force when pressing the adhesive tape 3 to the glass substrate 20 is not affected by the peeling force when peeling the adhesive tape 3. As a result, the cleaning device 1C can stably press the adhesive tape 3 to the glass substrate 20. Therefore, the cleaning device 1B can stably remove foreign matter from the glass substrate 20.

[0096] Furthermore, since the cleaning device 1C performs the pressing and peeling processes while moving the glass substrate 20 to the right by the transport mechanism 53, it is possible to continuously remove foreign matter from multiple glass substrates 20 in a stable manner, regardless of the size of the glass substrate 20 in the X direction.

[0097] Embodiment 4. Next, Embodiment 4 will be described using Figure 9. In Embodiment 4, the diameter of the peeling roller in the cleaning device is smaller than the diameter of the adhesive roller.

[0098] Figure 9 is a front view showing the configuration of the cleaning device according to Embodiment 4. Among the components in Figure 9, components that achieve the same function as the cleaning device 1B of Embodiment 2 shown in Figure 5 are denoted by the same reference numerals, and redundant explanations are omitted.

[0099] The cleaning device 1D of Embodiment 4 removes foreign matter from the glass substrate 2 using two rollers, similar to the cleaning device 1B. The cleaning device 1D is configured such that the peeling angle θ is 90 degrees or more, similar to the cleaning device 1B.

[0100] Compared to cleaning device 1B, cleaning device 1D has a tape cleaning unit 10D instead of tape cleaning unit 10B. Compared to tape cleaning unit 10B, tape cleaning unit 10D has a roller guide 15D instead of roller guide 15C and an adhesive roller 14D instead of adhesive roller 14. In other words, tape cleaning unit 10D has a supply reel 11, a take-up reel 12, an adhesive roller 14D, a roller guide 15D, and a peel-off roller 13.

[0101] The diameter of the adhesive roller 14D is larger than the diameter of the release roller 13. The roller guide 15D is a guide for the adhesive roller 14D to move left and right when the tape cleaning unit 10D performs adhesive and release operations.

[0102] The roller guide 15D is, for example, a groove provided within the tape cleaning unit 10D, within which the adhesive roller 14D moves. The roller guide 15D extends in a direction parallel to the left-right direction, similar to the roller guide 15C.

[0103] The cleaning device 1D performs the cleaning process using the same procedure as the cleaning device 1B. Specifically, when the tape cleaning unit 10D performs the application process, it moves the application roller 14D to the left along the roller guide 15D while rotating it counterclockwise from its initial position, which is the right end of the roller guide 15D. When the tape cleaning unit 10D performs the peeling process, the tape cleaning unit 10D moves to the left, and the application roller 14D moves to the right along the roller guide 15D. After this, the glass substrate 2 is discharged, and the tape cleaning unit 10D moves to the right, returning to its initial position.

[0104] To ensure the adhesive tape 3 adheres firmly to the glass substrate 2, a larger diameter of the application roller 14D is advantageous. On the other hand, to remove the adhesive tape 3 from the glass substrate 2, a smaller diameter of the peeling roller 13 is advantageous. In Embodiment 4, since the diameter of the application roller 14D is larger than the diameter of the peeling roller 13, the cleaning device 1D can easily perform both the pressing of the adhesive tape 3 onto the glass substrate 2 and the peeling of the adhesive tape 3 by the peeling roller 13.

[0105] The adhesive roller 14D and roller guide 15D may also be applied to the cleaning device 1A of Embodiment 1. In this case, the cleaning device 1A is equipped with an adhesive roller 14D instead of the adhesive roller 14, and a roller guide 15D instead of the roller guide 15B.

[0106] Furthermore, the adhesive roller 14D may be applied to the cleaning device 1C of Embodiment 3. In this case, the cleaning device 1C is equipped with an adhesive roller 14D instead of an adhesive roller 14. The diameter of the peeling roller 13X is smaller than the diameter of the adhesive roller 14D.

[0107] As described above, according to Embodiment 4, since the cleaning device 1D uses two rollers, the adhesive roller 14D and the peeling roller 13, the same effects as in Embodiments 1 and 2 can be obtained. In other words, the range of selectable roller types used for pressing and peeling the adhesive tape 3 is expanded for the cleaning device 1D. Furthermore, the pressing force when pressing the adhesive tape 3 to the glass substrate 2 is not affected by the peeling force when peeling the adhesive tape 3. As a result, the cleaning device 1D can stably press the adhesive tape 3 to the glass substrate 2. Therefore, the cleaning device 1D can stably remove foreign matter from the glass substrate 2.

[0108] Furthermore, since the diameter of the adhesive roller 14D is larger than the diameter of the peeling roller 13, the cleaning device 1D can easily perform the pressing and peeling of the adhesive tape 3.

[0109] The configurations shown in the above embodiments are merely examples, and it is possible to combine them with other known technologies, combine different embodiments, and omit or modify parts of the configuration without departing from the gist of the invention. [Explanation of symbols]

[0110] 1A~1D Cleaning device, 2,20 Glass substrate, 3 Adhesive tape, 10A~10D Tape cleaning unit, 11 Supply reel, 12 Take-up reel, 13,13X Peeling roller, 14,14D Application roller, 15A~15D Roller guide, 16,17 Idler, 31 Substrate layer, 32 Adhesive layer, 51A Up / down movement mechanism, 51B Left / right movement mechanism, 52,53 Conveying mechanism.

Claims

1. A supply reel that dispenses adhesive tape wound in a roll, An adhesive roller presses the adhesive tape, which has been fed out from the supply reel, against the substrate surface, which is the first surface of the substrate, while rotating around a first rotation axis, thereby pressing the adhesive tape against the substrate surface, A peeling roller that peels the adhesive tape, which has been pressed onto the substrate surface and fed out from the adhesive roller, from the substrate while rotating around a second rotation axis, A winding reel for collecting the adhesive tape peeled off by the peeling roller, A roller guide that guides the movement of the adhesive roller and the release roller in a direction parallel to the direction of movement of the adhesive tape between the adhesive roller and the release roller, Equipped with, The diameter of the peeling roller is smaller than the diameter of the adhesive roller. The peeling roller and the adhesive roller are always positioned at the same height relative to the substrate. The adhesive tape is pressed onto the substrate surface by moving the adhesive roller along the roller guide in the first movement direction while rotating it in the first rotation direction. The adhesive tape is peeled from the substrate surface by moving the peeling roller along the roller guide in the first movement direction while rotating it in the first rotation direction. The aforementioned substrate is subjected to pressure to the substrate surface and then peeled off by the adhesive tape, thereby removing any foreign matter adhering to the substrate surface. A cleaning device characterized by the following features.

2. A supply reel that dispenses adhesive tape wound in a roll, An adhesive roller presses the adhesive tape, which has been fed out from the supply reel, against the substrate surface, which is the first surface of the substrate, while rotating around a first rotation axis, thereby pressing the adhesive tape against the substrate surface, A peeling roller that peels the adhesive tape, which has been pressed onto the substrate surface and fed out from the adhesive roller, from the substrate while rotating around a second rotation axis, A winding reel for collecting the adhesive tape peeled off by the peeling roller, A roller guide that guides the movement of the adhesive roller in a direction parallel to the direction of movement of the adhesive tape between the adhesive roller and the release roller, Equipped with, The diameter of the peeling roller is smaller than the diameter of the adhesive roller. The peeling roller and the adhesive roller are always positioned at the same height relative to the substrate. The release roller is fixed in position within the tape cleaning unit where the adhesive roller and the release roller are located. The adhesive tape is pressed onto the substrate surface by moving the adhesive roller along the roller guide in the first movement direction while rotating it in the first rotation direction. The tape cleaning unit is moved in the first direction of movement, the adhesive roller is rotated in a second direction of movement opposite to the first direction of movement along the roller guide, and the peeling roller is rotated in the first direction of movement at a fixed position within the tape cleaning unit, thereby peeling the adhesive tape from the substrate surface. The aforementioned substrate is subjected to pressure to the substrate surface and then peeled off by the adhesive tape, thereby removing any foreign matter adhering to the substrate surface. A cleaning device characterized by the following features.

3. The peeling angle, which is the angle between the substrate surface and the direction in which the adhesive tape is pulled when the adhesive tape is peeled off the substrate surface, is 90 degrees or more. The cleaning device according to claim 1 or 2.

4. A supply reel that dispenses adhesive tape wound in a roll, An adhesive roller presses the adhesive tape, which has been fed out from the supply reel, against the substrate surface, which is the first surface of the substrate, while rotating around a first rotation axis, thereby pressing the adhesive tape against the substrate surface, A peeling roller that peels the adhesive tape, which has been pressed onto the substrate surface and fed out from the adhesive roller, from the substrate while rotating around a second rotation axis, A winding reel for collecting the adhesive tape peeled off by the peeling roller, Equipped with, The adhesive roller and the peeling roller are fixed within the tape cleaning unit in which the adhesive roller and the peeling roller are located, respectively. The tape cleaning unit also has a fixedly positioned take-up reel, and the distance between the peeling roller and the take-up reel is kept constant. The aforementioned substrates consist of multiple substrates, and the multiple substrates are transported in succession to the tape cleaning unit. At the same time, the adhesive tape is fed out at the same speed as the substrates, pressed against the substrate surface, and then peeled off, thereby removing any foreign matter adhering to the substrate surface. A cleaning device characterized by the following features.

5. The adhesive tape has an adhesive surface to which the foreign object can be adhered, The release roller is positioned on the opposite side of the adhesive surface of the adhesive tape, The adhesive surface of the adhesive tape first comes into contact with the take-up reel or the adhesive tape wound on the take-up reel at a point behind the release roller in the direction of travel of the adhesive tape. The cleaning device according to feature 4.

6. A supply reel that supplies adhesive tape wound in a roll, a supply step of dispensing the adhesive tape, A pressing step in which an adhesive roller presses the adhesive tape onto the substrate surface, which is the first surface of the substrate, by pressing the adhesive tape, which has been fed out from the supply reel, against the substrate surface, which is the first surface of the substrate, while rotating around a first rotation axis, A peeling roller for peeling the adhesive tape from the substrate peels the adhesive tape, which has been pressed against the substrate surface and fed out from the adhesive roller, from the substrate while rotating around a second rotation axis, The winding reel for collecting the adhesive tape includes a collection step of collecting the adhesive tape that has been peeled off by the peeling roller, Includes, The movement of the adhesive roller and the release roller is guided by the roller guide in a direction parallel to the direction of movement of the adhesive tape between the adhesive roller and the release roller. The diameter of the peeling roller is smaller than the diameter of the adhesive roller. The peeling roller and the adhesive roller are always positioned at the same height relative to the substrate. The adhesive tape is pressed onto the substrate surface by moving the adhesive roller along the roller guide in the first movement direction while rotating it in the first rotation direction. The adhesive tape is peeled from the substrate surface by moving the peeling roller along the roller guide in the first movement direction while rotating it in the first rotation direction. The aforementioned substrate is subjected to pressure to the substrate surface and then peeled off by the adhesive tape, thereby removing any foreign matter adhering to the substrate surface. A cleaning method characterized by the following features.

7. A supply reel that supplies adhesive tape wound in a roll comprises a supply step of feeding out the adhesive tape, A pressing step in which an adhesive roller presses the adhesive tape onto the substrate surface, which is the first surface of the substrate, by pressing the adhesive tape, which has been fed out from the supply reel, against the substrate surface, which is the first surface of the substrate, while rotating around a first rotation axis, A peeling roller for peeling the adhesive tape from the substrate peels the adhesive tape, which has been pressed against the substrate surface and fed out from the adhesive roller, from the substrate while rotating around a second rotation axis, The winding reel for collecting the adhesive tape includes a collection step of collecting the adhesive tape that has been peeled off by the peeling roller, Includes, The movement of the adhesive roller is guided by the roller guide in a direction parallel to the direction of movement of the adhesive tape between the adhesive roller and the release roller. The diameter of the peeling roller is smaller than the diameter of the adhesive roller. The peeling roller and the adhesive roller are always positioned at the same height relative to the substrate. The release roller is fixed in position within the tape cleaning unit where the adhesive roller and the release roller are located. The adhesive tape is pressed onto the substrate surface by moving the adhesive roller along the roller guide in the first movement direction while rotating it in the first rotation direction. The tape cleaning unit is moved in the first direction of movement, the adhesive roller is rotated in a second direction of movement opposite to the first direction of movement along the roller guide, and the peeling roller is rotated in the first direction of movement at a fixed position within the tape cleaning unit, thereby peeling the adhesive tape from the substrate surface. The aforementioned substrate is subjected to pressure to the substrate surface and then peeled off by the adhesive tape, thereby removing any foreign matter adhering to the substrate surface. A cleaning method characterized by the following features.

8. A supply reel that supplies adhesive tape wound in a roll comprises a supply step of feeding out the adhesive tape, A pressing step in which an adhesive roller presses the adhesive tape onto the substrate surface, which is the first surface of the substrate, by pressing the adhesive tape, which has been fed out from the supply reel, against the substrate surface, which is the first surface of the substrate, while rotating around a first rotation axis, A peeling roller for peeling the adhesive tape from the substrate peels the adhesive tape, which has been pressed against the substrate surface and fed out from the adhesive roller, from the substrate while rotating around a second rotation axis, The winding reel for collecting the adhesive tape includes a collection step of collecting the adhesive tape that has been peeled off by the peeling roller, Includes, The adhesive roller and the peeling roller are fixed within the tape cleaning unit in which the adhesive roller and the peeling roller are located, respectively. The tape cleaning unit also has a fixedly positioned take-up reel, and the distance between the peeling roller and the take-up reel is kept constant. The aforementioned substrates consist of multiple substrates, and the multiple substrates are transported in succession to the tape cleaning unit. At the same time, the adhesive tape is fed out at the same speed as the substrates, pressed against the substrate surface, and then peeled off, thereby removing any foreign matter adhering to the substrate surface. A cleaning method characterized by the following features.

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