Conveying system

Abstract

To provide a transport system capable of opening and closing a container cover without a need for precise positioning and reducing a risk of intrusion of foreign matters.SOLUTION: In a transport system for transporting an article to a work processing device: a transport vehicle 20 has a container 23 including a storage section 41 in which an item is stored, and a cover 42; and belts 24 connected to a frame and the container 23 are fixed to the storage section 41 through belt holes 47 formed in the cover 42; and a work processing device has a landing unit 120 on which the container 23 lands; the landing unit 120 includes a cover support plate 121 and a storage unit landing section 122. The cover support plate has an opening 124 smaller than an outer diameter of the cover 42 and larger than an outer diameter of the storage section 41, and blocks and retains the cover 42 that does not pass through the opening 124 when the container 23 descends, and the support plate removes the cover 42 from the storage section 41 that passes through the opening 124 and descends. The storage unit landing section is landed with the storage unit 41 that has passed through the opening 124.SELECTED DRAWING: Figure 7

Description

Technical Field

[0001] The present invention relates to a conveyance system for conveying articles.

Background Art

[0002] A conveyance system has been proposed that conveys articles such as articles, processing tools, consumables used for processing, cleaning tools for cleaning processing apparatuses, and maintenance components for maintaining processing apparatuses to a plurality of processing apparatuses using an automated guided vehicle (see, for example, Patent Document 1).

Prior Art Literature

Patent Literature

[0003]

Patent Document 1

Summary of the Invention

Problem to be Solved by the Invention

[0004] Patent Document 1 proposes a mechanism for opening the cover of a container in order to take out an article from the container in such a conveyance system, but with this mechanism, there is a problem that if the positioning of the container is displaced, the cover may not open and close, and furthermore, there is a risk that foreign matter may enter from outside the container.

[0005] The present invention has been made in view of such problems, and an object thereof is to provide a conveyance system that can open and close a container cover without requiring precise alignment and can reduce the risk of foreign matter intrusion.

Means for Solving the Problem

[0006] To solve the above-mentioned problems and achieve the objective, the present invention provides a transport system for transporting articles to a work processing apparatus, comprising: a transport path installed above the work processing apparatus; and a transport vehicle that travels along the transport path to transport articles, wherein the transport vehicle includes a container having a frame on which wheels for travel are mounted; a storage section for storing the articles; side walls surrounding the storage section; and an upper wall connected to the upper end of the side walls and covering the storage section; and a belt connected to the frame and the container, and the belt connecting the container to the work processing apparatus. The workpiece processing device includes a lifting unit that raises and lowers the workpiece processing device and the transport vehicle, the belt being fixed to the storage section through belt holes formed in the cover, the workpiece processing device having a landing unit on which the container lands, the landing unit having an opening smaller than the outer shape of the cover and larger than the outer shape of the storage section, a cover support plate that hooks and holds the cover when the container is lowered and does not pass through the opening, and removes the cover from the storage section as it descends through the opening, and a storage section landing section on which the storage section that has passed through the opening lands.

[0007] The workpiece processing apparatus may perform at least one of the following operations on the workpiece: processing, cleaning, inspection, imaging, attachment of support members, removal of support members, and film formation.

[0008] The article may be at least one of the following: a workpiece, a processing tool for processing a workpiece, consumables used for processing a workpiece, a cleaning tool for cleaning the workpiece processing device, or a maintenance part for maintaining the workpiece processing device.

[0009] The storage section may have a support surface for supporting articles.

[0010] The storage section has a support surface for supporting the article, and a second side wall surrounding the support surface, which is inclined to spread outward when downward, and the first side wall of the cover may have a slope that follows the second side wall. [Effects of the Invention]

[0011] In this invention, when a transport vehicle travels along a transport path and transports goods, the support surface is covered with a cover, and the airtightness of the loading and unloading opening for the goods in the storage compartment is increased. When the container is loaded into the work processing device, a cover support plate with an opening smaller than the outer diameter of the cover but larger than the outer diameter of the storage compartment is used to hook and hold the cover that does not pass through the opening as the container is lowered, and by removing the cover from the storage compartment that descends through the opening, the loading and unloading opening for the goods is opened. As a result, the container cover can be opened and closed without precise alignment, and the risk of foreign matter entering the container is reduced. [Brief explanation of the drawing]

[0012] [Figure 1] Figure 1 is a schematic diagram showing an example of the configuration of a transport system according to Embodiment 1. [Figure 2] Figure 2 is a perspective view showing a portion of the transport system and workpiece processing device shown in Figure 1. [Figure 3] Figure 3 is a perspective view showing the landing unit of the workpiece processing device shown in Figure 2. [Figure 4] Figure 4 is a perspective view showing an example of the configuration of the transport vehicle in the transport system shown in Figure 1. [Figure 5] Figure 5 is a perspective view showing another state of the transport vehicle in Figure 4. [Figure 6] Figure 6 is a perspective view showing the container of the transport vehicle in Figure 5. [Figure 7] Figure 7 is a cross-sectional view illustrating an example of the operation process of the transport system shown in Figure 1. [Figure 8] Figure 8 is a perspective view illustrating an example of the operation process of the transport system shown in Figure 1. [Figure 9] Figure 9 is a cross-sectional view illustrating an example of the operation process of the transport system shown in Figure 1. [Figure 10] Figure 10 is a cross-sectional view showing the main parts of the transport system according to Embodiment 2. [Figure 11] Figure 11 is a cross-sectional view showing the main parts of the transport system according to Embodiment 3. [Modes for carrying out the invention]

[0013] Embodiments for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiments. Furthermore, the components described below include those that can be easily imagined by those skilled in the art, and those that are substantially the same. In addition, the components described below can be combined as appropriate. Furthermore, various omissions, substitutions, or modifications of the components can be made without departing from the spirit of the present invention.

[0014] [Embodiment 1] A transport system 1 according to Embodiment 1 of the present invention will be described based on the drawings. Figure 1 is a schematic diagram showing an example of the configuration of the transport system 1 according to Embodiment 1. Figure 2 is a perspective view showing a part of the transport system 1 and work processing device 100 in Figure 1. As shown in Figure 1, the transport system 1 transports articles 200 to each of a plurality of work processing devices 100 that process work 201 (see Figure 2, etc.), and includes a transport path 10 installed above each work processing device 100 and spanning between the work processing devices 100, transport vehicles 20 that travel along the transport path 10 between the work processing devices 100 to transport articles 200, and a control unit 30. Although the transport system 1 in Embodiment 1 includes a plurality of transport vehicles 20 (three in the example shown in Figure 1), the present invention is not limited to this, and may include one or two vehicles, or of course four or more vehicles. Note that, as appropriate, some components are omitted in the drawings, or some components are shown simply by their outlines, etc.

[0015] A work 201, which is a processing target of a work processing apparatus 100 and an example of an article 200 to be conveyed by the conveying system 1 according to the first embodiment, will be described. As shown in FIG. 2, the work 201 is a wafer such as a disk-shaped semiconductor wafer or an optical device wafer whose base material is silicon, sapphire, silicon carbide (SiC), gallium arsenide, glass, or the like. In the work 201, chip-shaped devices are respectively formed in regions partitioned by a plurality of intersecting (orthogonal in the first embodiment) scheduled dividing lines on a flat surface. Note that the work 201 is not limited thereto in the present invention, and no device may be formed thereon. In the first embodiment, an adhesive tape is attached to the back surface of the work 201, and an annular frame is attached to an outer edge of the adhesive tape. However, the present invention is not limited thereto, and the annular frame may not be attached, and the adhesive tape may not be attached.

[0016] Note that the article 200 to be conveyed by the conveying system 1 is not limited to the work 201, and there are no restrictions on the material, shape, structure, size, etc. For example, it may be a substrate made of other materials such as semiconductors, ceramics, resins, and metals, and may also be a processing tool for processing the work 201, a consumable used for processing the work 201, a cleaning tool for cleaning the work processing apparatus 100, or a maintenance part for maintaining the work processing apparatus 100. The processing tool for processing the work 201 is, for example, a cutting blade, a grinding wheel, or the like. Other consumables used for processing the work 201 are, for example, a dressing board, a pre-cut board, a dummy work, an adhesive tape, a carbon piece, or the like. The cleaning tool is a cleaning article for cleaning a support surface on which a processing tool is mounted, or the like. Further, the maintenance part is a maintenance tool or the like for maintaining any mechanism provided in other work processing apparatuses 100. Regarding the article 200 other than the work 201, in the first embodiment, as shown in FIG. 2, an adhesive tape is attached to the back surface, and an annular frame is attached to the outer edge of the adhesive tape. However, the present invention is not limited thereto, and the annular frame may not be attached, and the adhesive tape may not be attached.

[0017] A work processing apparatus 100 provided with a conveyance system 1 will be described. As shown in FIG. 2, the work processing apparatus 100 includes a housing 110, a landing unit 120, a conveyance unit 130, a processing unit 140, a receiver 160, a transmitter 170, and a control unit 180. The housing 110 accommodates each component of the work processing apparatus 100 excluding the housing 110 itself. An opening 112 having a size and shape that allows the container 23 of the conveyance vehicle 20 accommodating an article 200 (work 201) to pass through is formed in a ceiling 111 above the housing 110. Note that the landing unit 120 is a component of the work processing apparatus 100, and is also a component of the conveyance system 1 according to the first embodiment.

[0018] FIG. 3 is a perspective view showing the landing unit 120 of the work processing apparatus 100 of FIG. 2. As shown in FIG. 2, the landing unit 120 is disposed inside the housing 110 immediately below the opening 112. As shown in FIG. 2 and FIG. 3, the landing unit 120 is configured including a cover support plate 121 and a housing portion landing portion 122.

[0019] The landing unit 120 is formed in a rectangular box shape, the upper surface side thereof is formed by the cover support plate 121, and the lower surface side thereof is formed by the housing portion landing portion 122. The cover support plate 121 is formed in a plate shape with a constant thickness. As shown in FIG. 2 and FIG. 3, an end portion of the cover support plate 121 is supported from below by a plurality of (three in the example shown in FIG. 2 and FIG. 3) plate support portions 123 erected from the housing portion landing portion 122, and the cover support plate 121 is disposed immediately above the housing portion landing portion 122.

[0020] As shown in Figure 2, the cover support plate 121 has an opening 124 formed directly below the opening 112. The opening 124 is smaller than the outer diameter of the cover 42 of the container 23 in a plan view, and larger than the outer diameter of the housing section 41 of the container 23 in a plan view. That is, the opening 124 is formed to be of a size and shape that prevents the cover 42 of the container 23 (see Figures 5, 6, etc.) from passing through, while allowing the housing section 41 of the container 23 (see Figures 5, 6, etc.) to pass through. In Embodiment 1, the opening 124 is formed in a circular shape, smaller than the outer diameter of the cover 42 of the container 23 which is circular in a plan view, and larger than the outer diameter of the housing section 41 of the container 23 which is circular in a plan view. Note that the opening 124 is not limited to a circular shape in the present invention, and can be of various shapes such as rectangular depending on the size and shape of the housing section 41 and cover 42 of the container 23. Therefore, when the container 23 descends toward the housing landing section 122, the cover support plate 121 hooks onto the cover 42 that does not pass through the opening 124 and holds it on its upper surface, allowing the cover 42 to be removed from the housing section 41 as it descends through the opening 124.

[0021] As shown in Figure 3, the cover support plate 121 has a plurality of cover positioning portions 126 (four in the example shown in Figure 3) on the outer circumference side of the opening 124 on the flat upper surface. In Embodiment 1, the plurality of cover positioning portions 126 are arranged at regular intervals in the radial direction. The plurality of cover positioning portions 126 are arranged on the inner circumference side at a position where the outer circumference side of the cover 42 of the container 23 can be fitted into place. The cover positioning portion 126 has a curved inclined surface formed on the inner circumference side surface that slopes downward and protrudes inward as it goes downward. Therefore, even if the horizontal position of the container 23 is misaligned when the container 23 is lowered, the cover positioning portion 126 corrects the horizontal position of the container 23 with the inclined surface, allowing the cover 42 of the container 23 to be accurately fitted to the inner circumference side, and also allowing the opening 124 to pass smoothly through the housing portion 41 of the container 23.

[0022] The container landing section 122 has a flat upper surface and is positioned directly below the opening 124. The container landing section 122 receives the container 41 of the container 23 that has passed through the opening 124. The container landing section 122 supports the container 41 of the container 23 that has landed on it, with its upper surface facing upward. Between the cover support plate 121 and the container landing section 122, an entrance / exit 125 (see Figures 2 and 3) is formed, allowing the transport unit 130 to load and unload items 200 from the container 41 of the container 23 that has landed on the cover support plate 121.

[0023] As shown in Figure 3, the housing landing section 122 has a plurality of housing positioning sections 127 (four in the example shown in Figure 3) on its upper surface, on the outer circumferential side of the flat upper surface opening 124. In Embodiment 1, the plurality of housing positioning sections 127 are arranged at regular intervals in the radial direction. The plurality of housing positioning sections 127 are arranged on the inner circumferential side at positions that allow the outer circumferential side of the housing section 41 of the container 23 to be fitted into them. The housing positioning section 127 has a curved inclined surface formed on its inner circumferential side surface that slopes in a direction that protrudes inward as it goes downward. Therefore, even if the horizontal position of the housing section 41 of the container 23 is misaligned when the container 23 is lowered, the housing positioning section 127 corrects the horizontal position of the housing section 41 of the container 23 with the inclined surface, allowing the housing section 41 of the container 23 to be accurately fitted to the inner circumferential side and land on the accurate position of the housing section 41 of the container 23 on the upper surface of the housing landing section 122.

[0024] As shown in Figure 2, the transport unit 130 is installed adjacent to the landing unit 120. The transport unit 130 unloads the articles 200 (workpieces 201) contained in the storage section 41 of the container 23 that has landed on the storage section 122 of the landing unit 120 and places them in a predetermined position relative to the processing unit 140. It also transports articles 200 (workpieces 201) placed in predetermined positions around the processing unit 140 into the storage section 41 of the container 23 that has landed on the storage section 122 of the landing unit 120. Here, the predetermined position relative to the processing unit 140 is, in the example of Embodiment 1 shown in Figure 2, on the holding tables (chuck tables) around processing unit 140-1 (cutting unit) and processing unit 140-3 (imaging unit, inspection unit), or on the spinner table of processing unit 140-2 (washing unit).

[0025] In Embodiment 1, the transport unit 130 includes, for example, a first transport arm 131, a second transport arm 132, and a pair of rails 133. The first transport arm 131 transports the article 200 (workpiece 201) between the container 23, which has landed on the landing section 122 of the landing unit 120, and the pair of rails 133. The second transport arm 132 transports the article 200 (workpiece 201) between the pair of rails 133 and a predetermined position around the processing unit 140. The pair of rails 133 can move closer together or further apart while maintaining a parallel state to each other, and the article 200 (workpiece 201) can be held between the pair of rails 133 via an annular frame.

[0026] The processing unit 140 processes the workpiece 201. In Embodiment 1, the processing unit 140 includes, for example, a storage unit for receiving the workpiece 201, a processing unit for machining the workpiece 201, a cleaning unit for washing the workpiece 201, an inspection unit for inspecting the workpiece 201, an imaging unit for imaging the workpiece 201, a mounter unit for attaching or removing support members such as adhesive tape to the workpiece 201, and a film forming unit for forming a film on the workpiece 201. In other words, the workpiece processing apparatus 100, which includes processing units 140 other than the storage unit, can perform at least one of the following on the workpiece 201: machining, washing, inspection, imaging, attaching support members, removing support members, and forming films.

[0027] When the processing unit 140 is a storage unit, it houses various items 200 to be transported by the transport system 1, namely workpieces 201, substrates made of other materials such as semiconductors, ceramics, resins, and metals, processing tools for processing the workpieces 201 such as cutting blades and grinding wheels, consumables used for processing the workpieces 201 such as dressing boards, pre-cut boards, dummy workpieces, adhesive tape, and carbon pieces, cleaning tools for cleaning the workpiece processing device 100, and maintenance parts for maintaining the workpiece processing device 100. When the processing unit 140 is a storage unit, the workpiece processing device 100 is a so-called stocker that houses various items 200 to be transported by the transport system 1 within the processing unit 140 and loads and unloads them into and out of the transport vehicle 20 through an opening 112 in the ceiling 111 above the housing 110. In the example of Embodiment 1 shown in Figure 1, the workpiece processing device 100-2 is the stocker.

[0028] If the processing unit 140 is a machining unit, it may be, for example, a cutting unit equipped with a spindle on which a cutting blade is rotatably mounted and which cuts the workpiece 201 with the cutting blade; a grinding unit equipped with a spindle on which a grinding wheel on which a grinding wheel is arranged is rotatably mounted and which grinds the workpiece 201 with the grinding wheel; a laser processing unit equipped with a laser beam irradiator that irradiates the workpiece 201 with a laser beam and which laser processes the workpiece 201 with the laser beam; an adhesive processing unit that attaches a protective member such as adhesive tape to the workpiece 201 and performs a protective member installation processing process; or an ultraviolet processing unit equipped with an ultraviolet irradiator that irradiates the workpiece 201 with ultraviolet light and which ultraviolet irradiates the workpiece 201. If the processing unit 140 is a machining unit, the workpiece processing device 100 is a processing device that processes the workpiece 201. In the workpiece processing device 100 shown in Figure 2, the processing unit 140-1 is a cutting unit and can perform cutting processing on the workpiece 201.

[0029] If the processing unit 140 is a cleaning unit, it is equipped with nozzles that supply cleaning liquid or cleaning gas to the workpiece 201 and performs a cleaning process on the workpiece 201. If the processing unit 140 is a cleaning unit, the workpiece processing device 100 is a cleaning device that performs a cleaning process on the workpiece 201. In the workpiece processing device 100 shown in Figure 2, the processing unit 140-2 is a cleaning unit and can perform a cleaning process on the workpiece 201.

[0030] If the processing unit 140 is an inspection unit, it includes a laser beam irradiator that irradiates the workpiece 201 with an inspection laser beam, an ultraviolet irradiator that irradiates the workpiece 201 with inspection ultraviolet light, an imager that captures an inspection image of the workpiece 201, and an inspection determination unit that makes an inspection determination of the workpiece 201 based on the results of irradiation and imaging, and performs inspection processing on the workpiece 201. If the processing unit 140 is an inspection unit, the workpiece processing device 100 is an inspection device that performs inspection processing on the workpiece 201. In the workpiece processing device 100 shown in Figure 2, the processing unit 140-3 has the function of an imager and the control unit 180 has the function of an inspection determination unit, so it is essentially equipped with an inspection unit and can perform inspection processing such as a so-called kerf check that automatically confirms whether the cutting process on the workpiece 201 was performed within a normal range.

[0031] If the processing unit 140 is an imaging unit, it includes an imaging device for imaging the workpiece 201 and a workpiece mover for moving the workpiece 201 to change and adjust its position and orientation relative to the imaging device, and performs imaging processing on the workpiece 201. If the processing unit 140 is an imaging unit, the workpiece processing device 100 is an imaging device that performs imaging processing on the workpiece 201. In the workpiece processing device 100 shown in Figure 2, the processing unit 140-3 is an imaging unit and can perform imaging processing on the workpiece 201.

[0032] If the processing unit 140 is a mounter unit, it includes a support member supply unit that supplies support members such as adhesive tape to the workpiece 201, an attachment unit that attaches the supplied support members to the workpiece 201, and a peeling unit that peels off the support members attached to the workpiece 201, and performs a support member attachment process or a support member peeling process on the workpiece 201. If the processing unit 140 is a mounter unit, the workpiece processing device 100 is a mounter device that performs a support member attachment process or a support member peeling process on the workpiece 201.

[0033] If the processing unit 140 is a film forming unit, it includes a film forming section that forms a film on the workpiece 201 and performs a film forming process on the workpiece 201. If the processing unit 140 is a film forming unit, the workpiece processing apparatus 100 is a film forming apparatus that performs a film forming process on the workpiece 201.

[0034] The processing unit 140 performs an exchange process to replace items 200 other than the workpiece 201, such as processing tools used to process the workpiece 201 and consumables used to process the workpiece 201. When the processing unit 140 performs an exchange process, the workpiece processing device 100 receives new processing tools and consumables through the opening 112, replaces the used processing tools and consumables in the processing unit 140 with new processing tools and consumables, and discharges the processing tools and consumables removed from the processing unit 140 through the opening 112.

[0035] The receiver 160 is connected to the control unit 30 of the transport system 1 so as to be able to communicate with information, receives information transmitted from the control unit 30, and outputs the received information to the control unit 180. In Embodiment 1, the receiver 160 is connected to the control unit 30 so as to be able to communicate with information wirelessly, but the present invention is not limited to this, and may be connected to the control unit 30 so as to be able to communicate with information via a wire. In Embodiment 1, the information that the receiver 160 receives from the control unit 30 is, for example, command information for operations related to the processing of the workpiece processing device 100, and request information prompting the transmission of the processing status and processing history of the workpiece processing device 100, including the status of the workpiece 201 inside the workpiece processing device 100.

[0036] The transmitter 170 is connected to the control unit 30 for information communication and transmits information output from the control unit 180 to the control unit 30. In Embodiment 1, the transmitter 170 is connected to the control unit 30 wirelessly for information communication, but the present invention is not limited to this, and may also be connected to the control unit 30 via a wired connection for information communication. In Embodiment 1, the information transmitted by the transmitter 170 to the control unit 30 is, for example, the processing status and processing history of the workpiece processing device 100.

[0037] The control unit 180 controls the operation of each component of the workpiece processing device 100 to cause the workpiece processing device 100 to perform various processing operations on the item 200 (workpiece 201). The control unit 180 controls the transport unit 130 to control the transport of the item 200 (workpiece 201) between the container 23 that has landed on the landing unit 120 and a predetermined position related to the processing unit 140, and also acquires information such as the transport status and transport history of the item 200 (workpiece 201) and the position of the item 200 (workpiece 201) from the transport unit 130. The control unit 180 controls the processing unit 140 to control the processing of the item 200 (workpiece 201) by the processing unit 140, and also acquires information such as the processing status and processing history of the item 200 (workpiece 201), the position of the item 200 (workpiece 201), check conditions and check results from the processing unit 140. The control unit 180 acquires information received by the receiver 160 from the control unit 30 and outputs information to be sent to the control unit 30 to the transmitter 170. The control unit 180 causes the workpiece processing device 100 to perform an operation according to the command information received by the receiver 160 from the control unit 30. The control unit 180 causes the transmitter 170 to send information about the processing status and processing history of the workpiece processing device 100 to the control unit 30 according to the request information received by the receiver 160 from the control unit 30. The control unit 180 can also voluntarily send information about the processing status and processing history of the workpiece processing device 100 to the control unit 30 from the transmitter 170 even if it has not received request information from the control unit 30.

[0038] In Embodiment 1, the control unit 180 includes a computer system similar to that of the control unit 30, which will be described later. The arithmetic processing unit of the control unit 180 performs calculations according to a computer program stored in the storage device of the control unit 180 and outputs control signals for controlling the workpiece processing device 100 to each component of the workpiece processing device 100 via the input / output interface device of the control unit 180.

[0039] A transport system 1 according to Embodiment 1 will now be described. As shown in Figure 2, the transport path 10 of the transport system 1 comprises a passage section 11, a waiting section 12, and a guide section 13. The passage section 11 is arranged across the housings 110 of a plurality of workpiece processing devices 100. One waiting section 12 is provided for each workpiece processing device 100, above the housing 110, adjacent to the passage section 11. The waiting section 12 has an opening 14 formed directly above the opening 112 of the housing 110, which is of a size and shape that prevents the frame 21 of the transport vehicle 20 from passing through, but allows the container 23 to pass through.

[0040] The guide sections 13 are positioned at both ends in the width direction of the passage section 11 and the waiting section 12. The guide sections 13 are formed to be higher than the wheels 22 of the transport vehicle 20, thereby preventing the transport vehicle 20 from going over the guide sections 13 and falling off the passage section 11 and the waiting section 12.

[0041] Figure 4 is a perspective view showing an example configuration of the transport vehicle 20 of the transport system 1 in Figure 1. Figure 5 is a perspective view showing another state of the transport vehicle 20 in Figure 4. Figure 6 is a perspective view showing the container 23 of the transport vehicle 20 in Figure 5. The transport vehicle 20 is an automated guided vehicle (AGV) and, as shown in Figures 4 and 5, has a frame 21, wheels 22, a container 23, a belt 24, a lifting unit 25, a receiver 26, a transmitter 27, and a control unit 28.

[0042] The frame 21 is formed in a rectangular shape and has a recess that is open to the bottom and capable of accommodating the container 23. Multiple wheels 22 (two in the example shown in Figure 5) are mounted on each of two pairs of parallel sides of the frame 21, and are rotatable independently of each other around an axis perpendicular to this pair of sides. The outer surfaces of the wheels 22 are in contact with the passage section 11 or waiting section 12 of the transport path 10. Each wheel 22 is connected to a motor or the like (not shown), and rotational motion around the axis is applied by the motor or the like to make it travel on the passage section 11 or waiting section 12 of the transport path 10. In Embodiment 1, for example, Mecanum wheels are used, in which multiple inclined barrel-shaped (cylindrical) rotating bodies are attached to the outer surface.

[0043] When the transport vehicle 20 is first set on the transport path 10 of the transport system 1, the setting location and the type of transport vehicle 20 are registered in the control unit 28 and the control unit 30. The transport vehicle 20 detects its position on the transport path 10 by detecting predetermined markers provided on the transport path 10 using sensors (not shown) installed on the transport vehicle 20. However, the present invention is not limited to this configuration, and for example, the transport vehicle 20 may be configured to detect its position using multiple sensors installed on the transport path 10, or the transport vehicle 20 may be connected to a GPS (Global Positioning System) wirelessly for information communication and the position of the transport vehicle 20 may be obtained using GPS, or any other configuration that can obtain the position of the transport vehicle 20 may be used.

[0044] As shown in Figures 5 and 6, the container 23 includes a storage section 41 in which an article 200 (workpiece 201) is stored, and a cover 42. The storage section 41 has a support surface 43 that supports the article 200 (workpiece 201) from below upward. In Embodiment 1, the storage section 41 is formed in a box shape, with its lower surface formed by the support surface 43, and the upper part of the support surface 43 is covered by the upper surface. The storage section 41 also has an opening 44 on its circumferential surface that is sized and shaped to allow the article 200 (workpiece 201) to pass through and to allow the article 200 (workpiece 201) to be loaded and unloaded by the transport unit 130. The storage section 41 is used to remove the article 200 (workpiece 201) from the opening 44 and to store the article 200 (workpiece 201) from the opening 44.

[0045] The cover 42 has a first side wall 45 that surrounds the housing section 41, and an upper wall 46 connected to the upper end of the first side wall 45 and covering the upper part of the housing section 41. The upper wall 46 of the cover 42 has belt holes 47 through which the belt 24 passes. The inner circumferential surface of the first side wall 45 of the cover 42 is formed to be sized and shaped so as to fit onto the outer circumferential surface of the second side wall 48 that surrounds the support surface 43 of the housing section 41. When the cover 42 is fitted onto the housing section 41, the first side wall 45 covers the loading / unloading entrance 44 of the housing section 41, and when it is removed from the housing section 41, it opens the loading / unloading entrance 44 of the housing section 41. In Embodiment 1, both the housing section 41 and the cover 42 of the container 23 are cylindrical in shape, that is, circular in plan view, similar to the opening 124. However, the present invention is not limited to this, and the cover 42 can be made into various shapes, such as a rectangular box, as long as it can be fitted into the housing section 41.

[0046] The belt 24 connects the frame 21 and the container 23. One end of the belt 24 is wound around a reel (not shown) of a lifting unit 25 provided inside the frame 21, and the other end is fixed to the upper surface of the container 23's housing section 41 through a belt hole 47 formed in the container 23's cover 42, as shown in Figure 6. The belt 24 comes in pairs. In the example of Embodiment 1 shown in Figures 5 and 6, the transport vehicle 20 is provided with two pairs of belts 24, but the present invention is not limited to this, and may have one pair or three or more pairs. When the container 23 is suspended by the belt 24, the housing section 41 of the container 23 is supported from above by the belt 24, while the cover 42 of the container 23 is not supported by the belt 24 but is supported from below by the housing section 41.

[0047] The lifting unit 25 moves the container 23 and the articles 200 (workpieces 201) contained in the container 23 up and down via the belt 24, through the opening 14 of the transport path 10 and the opening 112 of the workpiece processing device 100, between the in-vehicle position where the articles are housed in the recess of the frame 21 of the transport vehicle 20 and the landing position where the articles are landed on the landing unit 120 inside the housing 110 of the workpiece processing device 100.

[0048] The receiver 26 is connected to the control unit 30 for information communication and receives information transmitted from the control unit 30, and outputs the received information to the control unit 28. In Embodiment 1, the receiver 26 is connected to the control unit 30 wirelessly for information communication, but the present invention is not limited to this, and may be connected to the control unit 30 via a wired connection for information communication. In Embodiment 1, the information that the receiver 26 receives from the control unit 30 includes, for example, command information for operations related to the movement of the transport vehicle 20 and the raising and lowering of the container 23, and request information prompting the transmission of the transport status and transport history of the transport vehicle 20, including the position of the transport vehicle 20 and the position of the container 23.

[0049] The transmitter 27 is connected to the control unit 30 for information communication and transmits information output from the control unit 28 to the control unit 30. In Embodiment 1, the transmitter 27 is connected to the control unit 30 wirelessly for information communication, but the present invention is not limited to this, and may be connected to the control unit 30 via a wired connection for information communication. In Embodiment 1, the information that the transmitter 27 transmits to the control unit 30 is, for example, information on the transport status and transport history of the transport vehicle 20.

[0050] The control unit 28 controls the operation of each component of the transport vehicle 20 to cause the transport vehicle 20 to perform operations related to the movement of the transport vehicle 20 and the lifting and lowering of the container 23. The control unit 28 controls the movement of the transport vehicle 20 by controlling motors (not shown) connected to the wheels 22 and the angle of the wheels 22. The control unit 28 controls the lifting and lowering movement of the container 23 by controlling motors (not shown) of the lifting and lowering unit 25. The control unit 28 acquires information received by the receiver 26 from the control unit 30 and outputs information to the transmitter 27 to send to the control unit 30. The control unit 28 causes the transport vehicle 20 to perform operations according to the command information received by the receiver 26 from the control unit 30. The control unit 28 causes the transmitter 27 to send information about the transport status and transport history of the transport vehicle 20 to the control unit 30 according to the request information received by the receiver 26 from the control unit 30. Even if the control unit 28 has not received any request information from the control unit 30, it can also voluntarily cause the transmitter 27 to send information about the transport status and transport history of the transport vehicle 20 to the control unit 30.

[0051] In Embodiment 1, the control unit 28 includes a computer system similar to that of the control unit 30, which will be described later. The arithmetic processing unit of the control unit 28 performs calculations according to the computer program stored in the storage device of the control unit 28 and outputs control signals for controlling the transport vehicle 20 to each component of the transport vehicle 20 via the input / output interface device of the control unit 28.

[0052] The control unit 30 is connected to the receiver 160 and transmitter 170 of each workpiece processing device 100 for information communication, and is also connected to the receiver 26 and transmitter 27 of the transport vehicle 20 for information communication. By transmitting command information to the receivers 160 and 26, the control unit 30 can remotely control and operate each workpiece processing device 100 and the transport vehicle 20 via the control units 180 and 28. In addition, the control unit 30 can receive and understand information on the processing status and processing history of each workpiece processing device 100 from the transmitter 170, and can receive and understand information on the transport status and transport history of each transport vehicle 20 from the transmitter 27. In this way, the control unit 30 can comprehensively control and operate each workpiece processing device 100 and the transport vehicle 20, which is a component of the transport system 1.

[0053] In Embodiment 1, the control unit 30 includes a computer system. The computer system included in the control unit 30 is a computer having an arithmetic processing unit with a microprocessor such as a CPU (Central Processing Unit), a storage device with memory such as ROM (Read Only Memory) or RAM (Random Access Memory), and an input / output interface device. The arithmetic processing unit of the control unit 30 performs arithmetic processing according to a computer program stored in the storage device of the control unit 30 and outputs control signals for controlling the transport system 1 to each component of the transport system 1 via the input / output interface device of the control unit 30.

[0054] An example of the operation process of the transport system 1 according to Embodiment 1 having the above configuration will be described. Figures 7 and 9 are cross-sectional views illustrating an example of the operation process of the transport system 1 in Figure 1. Figure 8 is a perspective view illustrating an example of the operation process of the transport system 1 in Figure 1. First, the operation process when the transport system 1 transports an article 200 (workpiece 201) into the workpiece processing device 100 by the transport vehicle 20 will be described. As shown in Figure 7, the transport system 1 positions the transport vehicle 20, which houses the container 23 containing the article 200 (workpiece 201), on the opening 14 of the waiting section 12 formed on the opening 112 of the workpiece processing device 100 in the transport path 10. Then, the lifting unit 25 lowers the container 23 from inside the frame 21 of the transport vehicle 20, through the opening 14 of the transport path 10 and the opening 112 of the workpiece processing device 100, toward the landing unit 120 inside the workpiece processing device 100.

[0055] When the container 23 is lowered onto the landing unit 120, the horizontal position of the container 23 is corrected by the cover positioning part 126 on the cover support plate 121. This makes it easier for the cover 42 of the container 23 to be accurately fitted to the inner circumference of the cover positioning part 126, and also makes it easier for the housing part 41 of the container 23 to pass through the opening 124 smoothly. As shown in Figures 8 and 9, the cover 42 of the container 23 is hooked and held by the cover support plate 121, so that the cover 42 of the housing part 41 of the container 23 is removed as it passes through the opening 124, thereby opening the loading / unloading entrance 44 and landing on the housing landing part 122 of the landing unit 120. When the housing part 41 lands on the housing landing part 122, the horizontal position of the housing part 41 is corrected by the housing positioning part 127 on the housing landing part 122.

[0056] Once the storage unit 41 has landed on the storage unit landing section 122, the loading / unloading entrance 44 is open, allowing the stored articles 200 (workpieces 201) to be loaded and unloaded through the loading / unloading entrance 44 and the loading / unloading entrance 125 of the landing unit 120 by the transport unit 130 of the work processing device 100.

[0057] Next, the operation process when the transport system 1 unloads the article 200 (workpiece 201) from the workpiece processing device 100 using the transport vehicle 20 will be described. When the container 23 is raised from the landing section 122 of the landing unit 120 onto the frame 21 of the transport vehicle 20, the cover 42 of the container 23, which was held in place by the cover support plate 121, is fitted into the opening 124 as it passes through, and the container 23 becomes integrated with the cover 42 and is housed inside the frame 21 of the transport vehicle 20.

[0058] In the transport system 1 according to Embodiment 1 having the above configuration, when the transport vehicle 20 is transporting along the transport path 10, the cover 42 covers the loading / unloading entrance 44 for loading and unloading articles 200 (workpieces 201) into the storage section 41. When the container 23 is loaded into the workpiece processing device 100, the cover support plate 121, which has an opening 124 smaller than the outer shape of the cover 42 and larger than the outer shape of the storage section 41, hooks and holds the cover 42 that does not pass through the opening 124 when the container 23 is lowered, and by removing the cover 42 from the storage section 41 that descends through the opening 124, the loading / unloading entrance 44 for loading and unloading articles 200 (workpieces 201) is opened. As a result, the cover 42 of the container 23 can be opened and closed without precise alignment, and the risk of foreign matter entering the container 23 is reduced.

[0059] Furthermore, in the transport system 1 according to Embodiment 1, the workpiece processing device 100 performs at least one of the following operations on the workpiece 201: processing, cleaning, inspection, imaging, attachment or removal of support members, and film formation. Therefore, even when the processing operations of the workpiece processing device 100 are so diverse, precise alignment is not required, and the cover 42 of the container 23 can be opened and closed, reducing the risk of foreign matter entering the container 23.

[0060] Furthermore, in the transport system 1 according to Embodiment 1, since the article 200 is at least one of a workpiece 201, a processing tool for processing the workpiece 201, consumables used for processing the workpiece 201, or cleaning tools and maintenance parts for the workpiece processing device 100, even when transporting articles 200 other than the workpiece 201, precise positioning is not required, and the cover 42 of the container 23 can be opened and closed, reducing the risk of foreign matter entering the container 23.

[0061] Furthermore, in the transport system 1 according to Embodiment 1, since the storage section 41 has a support surface 43 that supports the article 200, it can be transported stably by the transport vehicle 20 and can be loaded and unloaded stably by the transport unit 130 of the workpiece processing device 100.

[0062] [Embodiment 2] A transport system 1 according to Embodiment 2 of the present invention will be described with reference to the drawings. Figure 10 is a cross-sectional view showing the main part of the transport system 1 according to Embodiment 2. In Figure 10, the same reference numerals are used for the same parts as in Embodiment 1, and their descriptions are omitted.

[0063] As shown in Figure 10, the transport system 1 according to Embodiment 2 is modified in which the container 23, which includes the storage section 41 and the cover 42, is replaced with a container 23-2, which includes a storage section 41-2 and a cover 42-2, while the other configurations are the same as in Embodiment 1. The storage section 41-2 of Embodiment 2 is modified in which the second side wall 48 of the storage section 41 of Embodiment 1 is replaced with a second side wall 48-2. The cover 42-2 of Embodiment 2 is modified in which the first side wall 45 of the cover 42 of Embodiment 1 is replaced with a first side wall 45-2.

[0064] As shown in Figure 10, the second side wall 48-2 is inclined so that its outer circumference widens outward as it goes downward. That is, the second side wall 48-2 is inclined so that its outer circumference widens outward as it goes downward. As shown in Figure 10, the first side wall 45-2 has an inclination on its inner circumference that follows the second side wall 48-2. Because the first side wall 45-2 and the second side wall 48-2 are inclined in this way, the cover 42-2 can be fitted into the housing section 41-2 more easily than the container 23, and the cover 42-2 can be easily removed from the housing section 41-2, and the airtightness inside the housing section 41-2 is improved when the cover 42-2 is fitted into the housing section 41-2.

[0065] The transport system 1 according to Embodiment 2, having the configuration described above, is modified in that the container 23, which includes the housing section 41 and the cover 42, is replaced with a container 23-2, which includes the housing section 41-2 and the cover 42-2, in the same way as Embodiment 1. Furthermore, in the transport system 1 according to Embodiment 2, the first side wall 45-2 of the cover 42-2 and the second side wall 48-2 of the housing section 41-2 have corresponding inclinations formed on them. As a result, the cover 42-2 can be more easily fitted into the housing section 41-2 and the cover 42-2 can be more easily removed from the housing section 41-2 than in Embodiment 1, and the airtightness inside the housing section 41-2 when the cover 42-2 is fitted into the housing section 41-2 is further improved. Therefore, the transport system 1 according to Embodiment 2 has the advantage of requiring even more precise alignment than Embodiment 1, making it easier to open and close the cover 42-2 of the container 23-2, and further reducing the risk of foreign matter entering the container 23-2.

[0066] [Embodiment 3] A transport system 1 according to Embodiment 3 of the present invention will be described with reference to the drawings. Figure 11 is a cross-sectional view showing the main part of the transport system 1 according to Embodiment 3. In Figure 11, the same reference numerals are used for the same parts as in Embodiment 1, and their descriptions are omitted.

[0067] As shown in Figure 11, the transport system 1 according to Embodiment 3 is modified in which the container 23, which includes the storage section 41 and the cover 42, is replaced with a container 23-3, which includes a storage section 41-3 and a cover 42-3, in the same configuration as Embodiment 1. The storage section 41-3 of Embodiment 3 is modified in which the upper surface covering the support surface 43 is omitted in the storage section 41 of Embodiment 1. That is, the storage section 41-3 of Embodiment 3 consists only of the part that constitutes the support surface 43 and a second side wall 48 surrounding the support surface 43. In the storage section 41-3 of Embodiment 3, the belt 24 is fixed to the upper surface of the second side wall 48. In Embodiment 3, the second side wall 48 may be omitted, and the belt 24 may be fixed to the support surface 43.

[0068] The transport system 1 according to Embodiment 3, having the configuration described above, is modified in that the container 23 including the housing section 41 and the cover 42 in Embodiment 1 is replaced with a container 23-3 including the housing section 41-3 and the cover 42-3, thus achieving the same effects as Embodiment 1. Furthermore, the transport system 1 according to Embodiment 3 is lighter because the upper surface of the housing section 41-3 that covers the upper part of the support surface 43 is omitted, and it can be loaded and unloaded even more easily by the transport unit 130 of the workpiece processing device 100 than in Embodiment 1.

[0069] It should be noted that the present invention is not limited to the embodiments described above. That is, it can be implemented with various modifications without departing from the core principles of the present invention. [Explanation of Symbols]

[0070] 10 Conveyor path 20 transport vehicles 21 frames 23,23-2,23-3 Container 24 belts 25 Lifting Unit 41, 41-2, 41-3 Accommodation section 42, 42-2, 42-3 cover 43 Support surface 44 Loading / unloading entrance 45,45-2 First side wall 46 Upper wall 47 belt holes 48,48-2 Second side wall 100,100-2 Workpiece Processing Equipment 120 Landing Units 121 Cover support plate 122 Storage area Landing area 124 Aperture 200 Goods 201 Work

Claims

1. A transport system for transporting articles to a workpiece processing device, A transport path installed above the workpiece processing apparatus, The system comprises a transport vehicle that travels along the transport path to transport goods, The transport vehicle is, A frame on which the wheels for driving are attached, A container comprising a cover having a storage section in which the article is contained, side walls surrounding the storage section, and an upper wall connected to the upper end of the side walls and covering the storage section, The frame, the container, and the belt connected thereto The device includes a lifting unit that uses a belt to raise and lower the container between the workpiece processing device and the transport vehicle, The belt is secured to the housing through belt holes formed in the cover. The workpiece processing device is The container has a landing unit on which it lands, The landing unit is, A cover support plate having an opening smaller than the outer dimensions of the cover and larger than the outer dimensions of the housing, which hooks and holds the cover when the container is lowered, preventing it from passing through the opening, and removes the cover from the housing as it descends through the opening, The landing area of ​​the housing unit where the housing unit that has passed through the opening lands, A transport system characterized by including the following:

2. The transport system according to claim 1, characterized in that the workpiece processing device performs at least one of the following on a workpiece: processing, cleaning, inspection, imaging, attachment of a support member, removal of a support member, and formation of a film.

3. The transport system according to claim 1, characterized in that the article is at least one of a workpiece, a processing tool for processing a workpiece, a consumable used for processing a workpiece, a cleaning tool for cleaning the workpiece processing device, or a maintenance part for maintaining the workpiece processing device.

4. The transport system according to claim 1, characterized in that the storage section has a support surface for supporting articles.

5. The housing section is, A support surface that supports the article, It has a second side wall that surrounds the support surface and is inclined to spread outward when downward, The conveying system according to claim 1, characterized in that the first side wall of the cover has an inclination that follows the second side wall.

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