Light source device
Patent Information
- Application Number
- JP2023117891
- Authority / Receiving Office
- JP · JP
- Patent Type
- Patents
- Current Assignee / Owner
- Filing Date
- 2023-07-19
- Publication Date
- 2026-09-01
- Estimated Expiration
- 2043-07-19
AI Technical Summary
【0021】 本開示によれば、照射対象物側の外部環境の変化からの発光体に対する熱的影響を抑制することで放射束を安定化でき、且つ、発光体からの照射対象物に対する熱的影響を抑制できる光源装置を提供することができる。
Smart Images

Figure 0007913458000001 
Figure 0007913458000002 
Figure 0007913458000003
Abstract
Description
Technical Field
[0001] The present disclosure relates to a light source device.
Background Art
[0002] A light source device having an integrating sphere, a light emitter including a light-emitting portion positioned inside the integrating sphere, and an emission port for emitting light from the integrating sphere is known (see, for example, Patent Document 1).
Prior Art Literature
Patent Literature
[0003]
Patent Document 1
Summary of the Invention
Problem to be Solved by the Invention
[0004] It is preferable that the light source device as described above can stabilize a radiant flux by suppressing a thermal influence on the light emitter from a change in an external environment on an irradiation target side, and can suppress a thermal influence on the irradiation target from the light emitter.
[0005] Accordingly, an object of the present disclosure is to provide a light source device that can stabilize a radiant flux by suppressing a thermal influence on a light emitter from a change in an external environment on an irradiation target side, and can suppress a thermal influence on the irradiation target from the light emitter.
Means for Solving the Problem
[0006] One aspect of the present disclosure is as follows.
[0007] [1] an integrating sphere; a light emitter having a light-emitting portion positioned inside the integrating sphere; an emission port that emits light from the integrating sphere; a flow passage having a circumferential portion extending around the emission port; A light source device having a heat exchange section having the circumferential portion of the flow path and being thermally connected to the integrating sphere.
[0008] [2] The heat exchange section includes a support member that supports the integrating sphere and a heat conducting member that overlaps the support member. The heat conductive member has a circumferential groove that extends around the injection port, The light source device according to [1], wherein the circumferential portion of the flow path is formed by the circumferential groove of the heat conductive member and the support member.
[0009] [3] The heat exchange section has a cover member, The light source device according to [2], wherein the heat conductive member is held between the support member and the cover member.
[0010] [4] The overlapping member, consisting of the support member and the heat conductive member, forms an annular shape. The light source device according to [2] or [3], wherein an annular gap is formed between the inner circumferential surface of the overlapping member and the integrating sphere.
[0011] [5] The light source device according to [4], wherein the heat exchange portion has a sealing member disposed between the support member and the heat conduction member such that it extends annularly along the inner peripheral edge of the overlapping member radially inward from the circumferential portion of the flow path.
[0012] [6] A light source device according to any one of [1] to [5], comprising a heat conduction suppressing member that is held in the integrating sphere, into which the light-emitting element is inserted, and which suppresses heat conduction from the light-emitting element to the integrating sphere.
[0013] [7] The light source device according to [6], wherein the heat conduction suppressing member has a reflective surface that reflects light within the integrating sphere.
[0014] [8] The light source device according to [7], wherein the heat conduction suppressing member has a coating layer that forms the reflective surface.
[0015] [9] The light source device according to [6], comprising a reflection plate overlapping the heat conduction suppressing member and having a reflective surface that reflects light within the integrating sphere.
[0016]
[10] The light source device according to any one of [6] to [9], wherein a thermal conductivity of the heat conduction suppressing member is 0.5 W / m·k or less.
[0017]
[11] The light source device according to any one of [1] to
[10] , comprising a fluid control device that controls a temperature, a flow rate, or both of a fluid flowing through the flow path.
[0018]
[12] A measuring device comprising: the light source device according to any one of [1] to
[11] ; and a detection unit that detects a physical quantity of an object to be measured by receiving light emitted from the light source device to the object as an irradiation target.
[0019]
[13] The measuring device according to
[12] , comprising a moving device that moves the light source device and the detection unit in a crossing direction intersecting a moving direction of the object to be measured.
[0020]
[14] The object to be measured is paper, a film, a battery separator, or any combination thereof, The measuring device according to
[12] or
[13] , wherein the physical quantity of the object to be measured is thickness, basis weight, moisture, or any combination thereof.
Effect of the Invention
[0021] According to the present disclosure, it is possible to provide a light source device capable of stabilizing radiant flux by suppressing thermal influence on a light emitter from changes in the external environment on the irradiation target side, and suppressing thermal influence from the light emitter on the irradiation target. [Brief explanation of the drawing]
[0022] [Figure 1] This is a cross-sectional view showing a light source device according to one embodiment. [Figure 2] A cross-sectional view showing a part of a light source device according to another embodiment. [Figure 3] A cross-sectional view showing a part of a light source device according to another embodiment. [Figure 4] This is an external view showing a measuring device according to one embodiment. [Figure 5] This is an external view showing a measuring device according to another embodiment. [Modes for carrying out the invention]
[0023] The embodiments of this disclosure will be described in detail below with reference to the drawings.
[0024] As shown in Figure 1, a light source device 1 according to one embodiment includes an integrating sphere 2, a light-emitting body 3 having a light-emitting portion 3a located inside the integrating sphere 2, an emission port 4 that emits light from the integrating sphere 2, a flow path 5 having a circumferential portion 5a that extends around the emission port 4, and a heat exchange portion 6 having the circumferential portion 5a of the flow path 5 and being thermally connected to the integrating sphere 2.
[0025] According to the above configuration, by flowing a fluid at a lower temperature than the light-emitting section 3a as a heat exchange medium through the flow path 5 during light emission, the temperature of the heat exchange section 6 can be maintained at a predetermined temperature lower than that of the light-emitting section 3a through heat exchange between the fluid flowing through the circumferential section 5a and the heat exchange section 6. Therefore, by setting the predetermined temperature to an appropriate temperature sufficiently lower than the temperature of the light-emitting section 3a, the heat exchange section 6 can suppress the propagation of thermal effects in the order of the external environment on the irradiated object 7 side, the heat exchange section 6, the integrating sphere 2, and the light-emitting body 3, and the heat exchange section 6 can suppress the propagation of thermal effects in the order of the light-emitting body 3, the integrating sphere 2, the heat exchange section 6, and the external environment on the irradiated object 7 side. Therefore, according to the above configuration, the radiant flux can be stabilized by suppressing the thermal effects on the light-emitting body 3 from changes in the external environment on the irradiated object 7 side, and a light source device 1 can be realized that can suppress the thermal effects from the light-emitting body 3 on the irradiated object 7. The above effect is particularly noticeable when the light-emitting body 3 is composed of a heater light source such as ceramic that is mainly in the mid-infrared wavelength range. The fluid is not particularly limited and may be a gas or a liquid. Changes in the external environment on the side of the irradiated object 7 include, for example, changes in temperature, heat transfer coefficient, or both, due to the relative movement of the external atmosphere (e.g., air) with respect to the measuring device 19 (e.g., wind generation, movement of the measuring device 19, or both).
[0026] The heat exchange section 6 includes a support member 6a that supports the integrating sphere 2 and a heat conduction member 6b that overlaps the support member 6a. The heat conduction member 6b has a circumferential groove 6b1 that extends around the injection port 4, and the circumferential portion 5a of the flow path 5 is formed by the circumferential groove 6b1 of the heat conduction member 6b and the support member 6a. With the above configuration, the support member 6a can support the integrating sphere 2 while ensuring a thermal connection with the integrating sphere 2. Furthermore, the heat conduction member 6b having the circumferential groove 6b1 enables good heat exchange between the fluid flowing through the circumferential portion 5a and the heat exchange section 6. The heat conduction member 6b is formed of, for example, metal, more specifically, aluminum, copper, etc. In this application, when referring to "support," the support configuration is not particularly limited, but may be a configuration in which the components are directly connected or placed, or it may be a configuration in which the components are indirectly connected or placed via another component. The configuration of the support member 6a for supporting the integrating sphere 2 is not particularly limited, but from the viewpoint of ensuring good thermal connection between the support member 6a and the integrating sphere 2, it is preferable to have a configuration in which the support member 6a directly connects to or rests on the integrating sphere 2, as shown in Figure 1.
[0027] The flow path 5 has an inlet 5b connected to the upstream end of the circumferential section 5a and an outlet 5c connected to the downstream end of the circumferential section 5a. The inlet 5b can be formed by one or more inlet passages, the outlet 5c can be formed by one or more outlet passages, and the circumferential section 5a can be formed by one or more circumferential circuits. The circumferential circuit may have a branching section that branches from the upstream side to the downstream side, or a confluence section that merges from the upstream side to the downstream side, or both. The circumferential section 5a may extend around the entire circumference of the injection port 4, or it may extend around the injection port 4 without extending around the entire circumference.
[0028] The inlet section 5b is formed by an inlet tube channel 5b1 formed inside the inlet tube 8, and an inlet radial channel 5b2 formed between the support member 6a and the heat conductive member 6b so as to connect the downstream end of the inlet tube channel 5b1 and the upstream end of the circumferential section 5a. With the above configuration, the inlet section 5b can be realized with a simple structure.
[0029] The outlet section 5c is formed by an outlet-side tube channel 5c1 formed inside the outlet-side tube 9, and an outlet-side radial channel 5c2 formed between the support member 6a and the heat-conducting member 6b so as to connect the downstream end of the circumferential section 5a and the upstream end of the outlet-side tube channel 5c1. With the above configuration, the outlet section 5c can be realized with a simple structure.
[0030] The flow path 5 may be configured to discharge the fluid from the outlet 5c, or it may be configured to circulate the fluid by returning it from the outlet 5c to the inlet 5b.
[0031] The heat exchange section 6 has a cover member 6c, and the heat conduction member 6b is held between the support member 6a and the cover member 6c. With this configuration, the heat conduction member 6b can be easily held by the support member 6a and the cover member 6c. In addition, the cover member 6c can suppress the propagation of thermal influence between the heat exchange section 6 and the external environment on the side of the irradiated object 7.
[0032] An overlapping member 6d, consisting of a support member 6a and a heat-conducting member 6b, forms an annular shape, and an annular gap 10 is formed between the inner surface of the overlapping member 6d and the integrating sphere 2. With the above configuration, the annular gap 10 formed between the inner surface of the overlapping member 6d and the integrating sphere 2 allows for expansion and contraction of the integrating sphere 2 due to heat, thereby suppressing the generation of thermal stress between the integrating sphere 2 and the overlapping member 6d.
[0033] The heat exchange section 6 has a sealing member 6e positioned between the support member 6a and the heat conduction member 6b so as to extend annularly along the inner peripheral edge of the overlapping member 6d, radially inward from the circumferential section 5a of the flow path 5. With this configuration, the sealing member 6e can prevent the fluid flowing through the circumferential section 5a from flowing out through the space between the support member 6a and the heat conduction member 6b toward the annular gap 10 formed between the inner peripheral surface of the overlapping member 6d and the integrating sphere 2. In this embodiment, the sealing member 6e is elastic, but is not limited to this.
[0034] The cover member 6c has an injection port outer peripheral cover portion 6c1 located outside the integrating sphere 2 on the outer periphery of the injection port 4. With this configuration, the bidirectional thermal influence between the integrating sphere 2 and the external environment on the side of the object to be irradiated 7 on the outer periphery of the injection port 4 can be suppressed by the injection port outer peripheral cover portion 6c1.
[0035] The light source device 1 is held in an integrating sphere 2, has a light-emitting element 3 inserted into it, and includes a heat conduction suppression member 11 that suppresses heat conduction from the light-emitting element 3 to the integrating sphere 2. With the above configuration, the radiant flux can be further stabilized by suppressing heat conduction from the light-emitting element 3 to the integrating sphere 2, and the thermal effect on the irradiated object 7 can be further suppressed. In this embodiment, the light-emitting element 3 is rod-shaped, but is not limited to this.
[0036] The light-emitting element 3 is inserted so as not to touch the heat conduction suppressing member 11. With the above configuration, heat conduction between the light-emitting element 3 and the integrating sphere 2 can be further suppressed.
[0037] The heat conduction suppression member 11 has a reflective surface 11a that reflects light within the integrating sphere 2. The reflection by the reflective surface 11a may be, for example, a scattering reflection due to an uneven structure, or a specular reflection. With the above configuration, the reflective surface 11a (a surface with high reflectivity) can improve (increase) the radiant flux of light emitted from the emission port 4 compared to when the surface of the heat conduction suppression member 11 is an absorbing surface. Furthermore, a scattering reflection surface can improve the uniformity of the light emitted from the emission port 4.
[0038] The reflective surface 11a may be configured to reflect light in the mid-infrared wavelength range. With the above configuration, when the light emitter 3 is composed of a heater light source mainly in the mid-infrared wavelength range, such as ceramic, the radiant flux of light emitted from the emission port 4 can be improved by the reflective surface 11a of the heat conduction suppression member 11.
[0039] As shown in the example in Figure 2, the heat conduction suppression member 11 has a coating layer 11b that forms a reflective surface 11a, and more specifically, it may have a configuration having a heat conduction suppression plate 11c and a coating layer 11b. With the above configuration, the radiant flux of light emitted from the ejection port 4 can be improved by an efficient structure using the coating layer 11b. The coating layer 11b is formed of, for example, gold, aluminum, etc. The reflection by the reflective surface 11a of the coating layer 11b may be, for example, scattered reflection due to an uneven structure, or specular reflection.
[0040] As shown in the example in Figure 3, the light source device 1 may have a reflector 23 that overlaps the heat conduction suppression member 11 and has a reflective surface 23a that reflects light within the integrating sphere 2. With the above configuration, the radiant flux of light emitted from the emission port 4 can be improved by an efficient structure using the reflector 23a. The reflector 23 may have a coating layer that forms the reflective surface 23a, although it is not shown in the figure. In this case, the reflection by the reflective surface 23a of the coating layer may be, for example, scattered reflection due to an uneven structure, or specular reflection. The reflector 23 may also have a configuration without a coating layer, in which case it may be formed of, for example, aluminum. In this case, the reflection by the reflective surface 23a of the reflector 23 may be, for example, scattered reflection due to an uneven structure, or specular reflection.
[0041] The thermal conductivity of the heat conduction suppressing member 11 is not particularly limited, but is preferably 0.5 W / m·k or less. With the above configuration, heat conduction from the light-emitting body 3 to the integrating sphere 2 can be effectively suppressed by the heat conduction suppressing member 11.
[0042] The inner surface 2a of the integrating sphere 2 has a shape that conforms to the spherical surface and reflects light. With the above configuration, the inner surface 2a of the integrating sphere 2 can efficiently improve the uniformity of the light emitted from the emission port 4. Note that the inner surface 2a of the integrating sphere 2 is not limited to a shape that conforms to the spherical surface. The reflection by the inner surface 2a of the integrating sphere 2 may be scattered reflection or specular reflection.
[0043] The light source device 1 has a reflector 12 that reflects light on one or both sides of its surface, on a straight line passing through the light-emitting section 3a and the emission port 4. With this configuration, depending on the positional relationship between the reflector 12, the light-emitting section 3a (its light-emitting surface), and the emission port 4, the number of reflections within the integrating sphere 2 can be increased by suppressing the direct arrival of light from the light-emitting section 3a to the emission port 4, thereby efficiently improving the uniformity of the light emitted from the emission port 4. Although not shown in the figures, the reflector 12 can be held in a desired position by providing a holding part 15 that connects the reflector 12 to the integrating sphere 2. The reflector 12 is plate-shaped, but is not limited to this. The reflection by the reflector 12 may be scattered reflection or specular reflection.
[0044] The light source device 1 has a window portion 14 at the emission port 4 that separates the inner space 13 of the integrating sphere 2 from the external environment on the side of the object to be irradiated 7, while also allowing light to pass through. With this configuration, the window portion 14 can suppress the thermal influence on the light emitter 3 via the inner space 13 of the integrating sphere 2 from changes in the external environment on the side of the object to be irradiated 7, and as a result, the radiant flux can be further stabilized. In addition, the window portion 14 can suppress the intrusion of dust from the external environment into the integrating sphere 2.
[0045] The light source device 1 has a holding part 15 that holds the light-emitting element 3 in a predetermined position relative to the integrating sphere 2. The holding part 15 is formed by a housing 16 that covers the integrating sphere 2 on the opposite side of the irradiated object 7 as viewed from the heat exchange part 6, and the housing 16 is connected to the light-emitting element 3 on the outside of the integrating sphere 2. With the above configuration, the housing 16 can suppress the thermal influence on the light-emitting element 3 from changes in the external environment, and as a result, the radiant flux can be further stabilized. Note that the holding part 15 that holds the light-emitting element 3 in a predetermined position relative to the integrating sphere 2 is not limited to a configuration formed by the housing 16.
[0046] The housing 16 includes a light-emitting element connecting member 16a into which the light-emitting element 3 is inserted and connected to the light-emitting element 3, and a housing body portion 16b that supports the light-emitting element connecting member 16a. With this configuration, the thermal influence on the light-emitting element 3 from changes in the external environment can be suppressed by the housing body portion 16b, and as a result, the radiant flux can be further stabilized. In addition, the light-emitting element 3 can be easily supported by the housing body portion 16b using the light-emitting element connecting member 16a.
[0047] The light source device 1 has a housing connection portion 17 that is connected to the housing 16 and covers the light-emitting element 3 on the outside of the housing 16. With the above configuration, the thermal influence on the light-emitting element 3 from changes in the external environment can be further suppressed by the housing connection portion 17, and as a result, the radiant flux can be further stabilized. In addition, from the viewpoint of suppressing the thermal influence on the light-emitting element 3 from changes in the external environment by the housing body portion 16b, the light-emitting element connecting member 16a may be indirectly connected to or placed on the housing body portion 16b via the housing connection portion 17.
[0048] The light source device 1 has a fluid control device 18 that controls the temperature, flow rate, or both of the fluid flowing through the flow path 5. With the above configuration, the temperature of the heat exchange section 6 can be appropriately controlled by appropriately controlling the temperature, flow rate, or both of the fluid.
[0049] As shown in Figure 4, a measuring device 19 according to one embodiment includes a light source device 1 and a detection unit 20 that detects physical quantities of an object to be measured by receiving light irradiated onto the object to be measured, which is the object to be irradiated 7, by the light source device 1. With the above configuration, a measuring device 19 can be realized that can stabilize the radiant flux by suppressing the thermal influence on the light emitter 3 from changes in the external environment on the side of the object to be measured, and can also suppress the thermal influence on the object to be measured from the light emitter 3.
[0050] The measuring device 19 is a transmissive type in which the light source device 1 and the detection unit 20 are located on different sides from the object being measured. However, it may also be configured as a reflective type in which the light source device 1 and the detection unit 20 are located on the same side from the object being measured, as shown in Figure 5.
[0051] The measuring device 19 has a moving device 21 that moves the light source device 1 and the detection unit 20 in an intersecting direction (indicated by thick double arrows in Figures 4 and 5) that intersects with the direction of movement of the object to be measured (indicated by thick arrows in Figures 4 and 5). With the above configuration, the physical quantities of the object to be measured can be measured within the range of movement of the moving device 21 in the intersecting direction while the object to be measured is moved inline by a transport device 22, for example, as shown in the figure. The external environment on the side of the object to be irradiated 7 changes, for example, due to the above movement.
[0052] The object being measured is, for example, paper, film, or battery separator, or any combination thereof. The physical quantities of the object being measured are, for example, thickness, basis weight, or moisture content, or any combination thereof. The basis weight of paper can be measured, for example, by radiation or infrared absorption spectroscopy. Generally, since films often have a nearly constant density, thickness is often used as the measurement parameter rather than basis weight. The thickness of a film can be measured, for example, by detecting CH absorption using infrared absorption spectroscopy. The moisture content of paper, etc., can be measured, for example, by detecting OH absorption using infrared absorption spectroscopy.
[0053] This disclosure is not limited to the embodiments described above and can be modified in various ways without departing from its essence. [Explanation of Symbols]
[0054] 1 Light source device 2 integrating sphere 2a Inner surface 3. Light-emitting element 3a Light-emitting part 4. Injection Port 5 channels 5a Circling section 5b Inlet 5b1 Inlet tube flow path 5b2 Inlet side radial channel 5c Outflow part 5c1 Outlet tube flow path 5c2 Outlet side radial channel 6 Heat exchange section 6a Support member 6b Heat conductive material 6b1 Surrounding groove 6c Cover component 6c1 Outer periphery cover of injection port 6d Overlapping member 6e Sealing material 7. Object to be irradiated 8. Inlet tube 9 Outlet tube 10 gaps 11 Heat conduction suppression member 11a Reflective surface 11b Coating layer 11c heat conduction suppression plate 12 Reflector 13 Interior space 14 Window section 15 Holding part 16 cabinets 16a Light-emitting element connecting member 16b Main body of the enclosure 17. Enclosure connection section 18 Fluid control device 19 Measuring device 20 Detection unit 21 Mobile device 22 Conveying device 23 Reflector 23a Reflective surface
Claims
1. The integrating sphere and, A light-emitting body having a light-emitting portion located within the integrating sphere, An emission port for emitting light from the integrating sphere, A flow path having a circumferential portion that extends around the injection port, The flow path has a circumferential portion and a heat exchange portion that is thermally connected to the integrating sphere, The heat exchange section includes a support member that supports the integrating sphere and a heat conducting member that overlaps the support member. The heat conductive member has a circumferential groove that extends around the injection port, The circumferential portion of the flow path is formed by the circumferential groove of the heat conductive member and the support member, in a light source device.
2. The heat exchange section has a cover member, The light source device according to claim 1, wherein the heat conductive member is held between the support member and the cover member.
3. The overlapping member, consisting of the support member and the heat conductive member, forms an annular shape. The light source device according to claim 1, wherein an annular gap is formed between the inner circumferential surface of the overlapping member and the integrating sphere.
4. The light source device according to claim 3, wherein the heat exchange portion has a sealing member disposed between the support member and the heat conduction member so as to extend annularly along the inner peripheral edge of the overlapping member, radially inward from the circumferential portion of the flow path.
5. The light source device according to claim 1, further comprising a heat conduction suppressing member that is held in the integrating sphere and into which the light-emitting element is inserted, and which suppresses heat conduction from the light-emitting element to the integrating sphere.
6. The light source device according to claim 5, wherein the heat conduction suppressing member has a reflective surface that reflects light within the integrating sphere.
7. The light source device according to claim 6, wherein the heat conduction suppressing member has a coating layer that forms the reflective surface.
8. The light source device according to claim 5, further comprising a reflector that overlaps with the heat conduction suppressing member and has a reflective surface that reflects light within the integrating sphere.
9. The light source device according to claim 5, wherein the thermal conductivity of the heat conduction suppressing member is 0.5 W / m·k or less.
10. The light source device according to claim 1, further comprising a fluid control device that controls the temperature, flow rate, or both of the fluid flowing through the aforementioned channel.
11. A measuring device comprising a light source device as described in claim 1, and a detection unit that detects a physical quantity of an object to be measured by receiving light irradiated onto the object to be measured by the light source device.
12. The measuring device according to claim 11, further comprising a moving device that moves the light source device and the detection unit in an intersecting direction intersecting the direction of movement of the object to be measured.
13. The object to be measured is paper, film, or a battery separator, or any combination thereof. The measuring device according to claim 11, wherein the physical quantity of the object to be measured is thickness, basis weight, moisture content, or any combination thereof.
Citation Information
Patent Citations
Laser output detector and laser oscillator
JP1998002790A
Water content measuring instrument
JP2004361149A
Integrating sphere with temperature control means
JP2009517628A
Integrating sphere
JP2015014590A
Measuring device and measuring method
JP2019138743A