Strip-shaped device, and method for manufacturing a strip-shaped device.

Abstract

To prevent a U-shaped portion of a belt-like device from being rubbed, and facilitate installation work of the belt-like device.SOLUTION: A belt-like device 1 is configured such that a plurality of wiring lines 10 or vacuum pipes 11 are arranged in parallel and bonded, where cross-sectional centers 100 of the wiring lines 10 or cross-sectional centers 111 of the vacuum pipes 11 are arranged in parallel so that they are in a straight line, and by applying a liquid resin that has elasticity when hardened to one belt-like surface side of the plurality of wiring lines 10 or vacuum pipes 11, and hardening the liquid resin, adjacent wiring lines 10 or vacuum pipes 11 are bonded together, so that an elastic resin layer 19 is formed on one surface side.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a strip-shaped device obtained by arranging and bonding a plurality of wires or pipes, and a method for manufacturing the strip-shaped device. [Background Art]

[0002] For example, as disclosed in Patent Document 1, Patent Document 2, or Patent Document 3, a processing apparatus for processing a workpiece such as a semiconductor wafer forms a strip-shaped device (flat tube) formed by arranging pipes or wires in parallel, bonding adjacent pipes or wires to each other with an adhesive to form a strip shape, bends the strip-shaped device into a U-shape in side view, connects one end of the strip-shaped device to a moving body such as an electric slider of the processing apparatus, connects the other end thereof to a fixed body, moves the U-shaped portion along with the movement of the moving body, and supplies fluid or electric power via the strip-shaped device to a unit disposed on the moving body without hindering the movement of the moving body.

[0003] Here, the moving U-shaped portion of the strip-shaped device may be rubbed by friction with the fixed body and damaged. Therefore, as disclosed in Patent Document 1, a sheet made of low-friction Teflon (registered trademark) is disposed outside the U-shaped portion of the strip-shaped device, and the Teflon (registered trademark) sheet interposed between the U-shaped portion and the fixed body prevents the U-shaped portion from being rubbed against the fixed body. [Prior Art Documents] [Patent Documents]

[0004] [Patent Document 1] Japanese Unexamined Patent Application Publication No. 2007-229904 [Patent Document 2] Japanese Unexamined Patent Application Publication No. 2013-035113 [Patent Document 3] Japanese Unexamined Patent Application Publication No. 2021-070107 [Summary of the Invention] [Problem to be Solved by the Invention]

[0005] However, there is a problem in that the above installation process for Teflon® sheets is time-consuming. Therefore, there is a need for a strip-shaped device (flat tube) that prevents friction between the U-shaped portion and the fixing body and facilitates installation. [Means for solving the problem]

[0006] To solve the above problems, the present invention provides a strip-shaped device in which multiple wires or pipes of different cross-sectional diameters are arranged in parallel and bonded together, wherein the centers of the cross-sectional sections of the wires or pipes are aligned in a straight line and are arranged in parallel and closely bonded together, and a liquid resin that becomes elastic when cured is applied to one side of the strip-shaped multiple wires or pipes, and as the liquid resin hardens, adjacent wires or pipes are bonded together, thereby forming an elastic resin layer on that one side. The elastic resin layer is used to form a U-shaped section and a horizontal section that are on the outside of the wiring or piping. It is a strip-shaped device.

[0007] Furthermore, the present invention, which solves the above problems, is a method for manufacturing the above-mentioned strip-shaped device, comprising: an arrangement step of arranging the wiring in parallel in a strip shape such that the cross-sectional centers of the wiring or the pipes are aligned in a straight line; a liquid resin supply step of supplying the liquid resin, which has elastic force when cured, to a predetermined region in the extending direction on one side of the plurality of wirings or pipes arranged in a strip shape; and a resin layer formation step of curing the liquid resin to form the elastic resin layer. In the method for manufacturing a strip-shaped device according to the present invention, between the arrangement step and the liquid resin supply step, a frame arrangement step is included in which a predetermined region in the extending direction of one side of the strip-shaped wiring or piping is surrounded by a rectangular annular frame, and it is preferable that the liquid resin supply step supplies the liquid resin inside the frame. Furthermore, the present invention, which solves the above problems, is a processing apparatus comprising a holding table for holding a workpiece, a processing unit for processing the workpiece held on the holding table, a feed mechanism for moving the holding table in one direction, and a base for supporting the holding table and the feed mechanism, wherein the base and the holding table are connected by the strip-shaped device, and the U-shaped portion moves in conjunction with the movement of the holding table. [Effects of the Invention]

[0008] Conventional strip-shaped devices (flat tubes) required a Teflon® sheet to be placed on the outside of the U-shaped section, with the Teflon® sheet sandwiched between the flat tube and the fixed body. Additionally, a sheet was sandwiched between the flat tube and the moving body, resulting in a time-consuming installation process. Furthermore, after installation, the moving body had to be moved to ensure the Teflon® sheet was not pressed against the U-shaped section. In contrast, the strip-shaped device according to the present invention integrates multiple wires or pipes with an elastic resin layer through bonding, eliminating the need for Teflon® sheet installation and verification, and simplifying attachment to both the fixed body and the moving body. Moreover, because an elastic resin layer is used instead of a Teflon® sheet, the elastic resin layer can also form a U-shape together with the pipes / wires, preventing friction between the wires or pipes and the fixed body.

[0009] The method for manufacturing the strip-shaped device according to the present invention is optimal for manufacturing the above-mentioned strip-shaped device. In particular, by including a frame arrangement step and supplying liquid resin to the inside of the frame in the liquid resin supply step, the liquid resin can be easily molded into a predetermined shape, and it is possible to prevent the liquid resin from spreading to unwanted areas. [Brief explanation of the drawing]

[0010] [Figure 1] This is a cross-sectional view showing an example of a strip-shaped device. [Figure 2] This is a perspective view showing an example of a workbench jig used in the arrangement process of a manufacturing method for a strip-shaped device. [Figure 3] This is a perspective view showing an example of a tray jig used in all steps of the manufacturing process for a strip-shaped device. [Figure 4] This is a perspective view showing an example of a positioning jig used in the arrangement process of a manufacturing method for a strip-shaped device. [Figure 5] This is a perspective view illustrating the state in which the positioning jig and tray jig are attached to the workbench during the placement process. [Figure 6]This perspective view illustrates the state in which wiring or piping is connected to a joint or connector pre-installed on a positioning jig attached to a workbench during the placement process, and further arranged so as to be routed along the wiring or piping groove of the tray jig. [Figure 7] This is a perspective view illustrating the frame placement process, which is performed before the liquid resin supply process. [Figure 8] This is a perspective view illustrating the state in which, during the liquid resin supply process, liquid resin that becomes elastic upon curing begins to be supplied to a predetermined area inside the frame in the extending direction of one side of multiple strip-shaped wirings or pipes. [Figure 9] This is a perspective view illustrating the state in which a liquid resin that becomes elastic upon curing is supplied to a predetermined area inside a frame in the extending direction of one side of multiple strip-shaped wirings or pipes during the liquid resin supply process. [Figure 10] This is a perspective view showing a cutting machine, which is an example of a processing device equipped with a strip-shaped device. [Figure 11] This is a side view showing the state of the strip-shaped device when the holding table is in its mounting position. [Figure 12] This is a side view showing the state of the strip-shaped device after the holding table has moved from the mounting position to the cutting position. [Modes for carrying out the invention]

[0011] Hereinafter, a finished strip-shaped device 1 according to the present invention will be described in advance with reference to the cross-sectional view of FIG. 1. In FIG. 1, for example, the cross-sectional centers 100 of three wires 10, the cross-sectional center 111 of a vacuum pipe 11, the cross-sectional center 122 of a water pipe 12, and the cross-sectional center 133 of an air pipe 13 are arranged in parallel in a straight line. A liquid resin having elasticity is applied and cured on one strip-shaped surface side (the +X direction side in FIG. 1) of the plurality of (e.g., three) wires 10, the vacuum pipe 11, the water pipe 12, and the air pipe 13. Thereby, the vacuum pipe 11 and the wire 10, the wire 10 and the water pipe 12, the water pipe 12 and the air pipe 13, the air pipe 13 and the wire 10, and adjacent wires 10 are bonded to each other, whereby an elastic resin layer 19 is formed on said one surface side. FIG. 1 is a cross-sectional view of the strip-shaped device 1 in which the elastic resin layer 19 is formed as described above. In FIG. 1, the extending direction of the wires 10, the vacuum pipe 11, the water pipe 12, and the air pipe 13 is the depth direction toward the viewer on the drawing (the Z-axis direction side).

[0012] The number of wires 10, and the number, type, arrangement order and the like of the vacuum pipe 11, the water pipe 12, and the air pipe 13 are not limited to the example shown in FIG. 1, and the model number of the strip-shaped device 1 will differ if these components are changed. A power source, an electric device or the like is connected to the flexible wire 10; a suction source such as a vacuum generator or the like is connected to the flexible vacuum pipe 11; a water supply source including a pump or the like is connected to the flexible water pipe 12; an air supply source including a compressor or the like is connected to the flexible air pipe 13. Adjacent ones of the wire 10, the vacuum pipe 11, the water pipe 12, and the air pipe 13 may be in contact with each other, or the elastic resin layer 19 may be interposed between adjacent ones.

[0013] Hereinafter, jigs and apparatuses used when carrying out the method for manufacturing the strip-shaped device 1 shown in FIG. 1 according to the present invention will be described. Figure 2 shows a workbench jig 2 used in an arranging step of a method for manufacturing a band-shaped device 1. The workbench jig 2 comprises: a base 21 formed into a substantially rectangular parallelepiped shape by connecting a plurality of rod-shaped base aggregates 211 such as aluminum frames; a workbench support 22 disposed on the base aggregate 211 at the upper side of the front surface (+X direction surface) of the base 21; and a workbench 24 supported by the workbench support 22. For example, casters (not shown) are attached to the base aggregate 211 serving as the lower side of the base 21, so that the workbench jig 2 can be moved in a workplace or the like.

[0014] The workbench 24 has its longitudinal direction along the Z-axis direction, and a plurality of (four in FIG. 2) outer peripheral aggregates 243 are combined to form the entire outer shape into a rectangular annular shape in a front view. The workbench 24 is in a state slightly inclined from the vertical direction (Z-axis direction) with respect to the horizontal plane (X-axis Y-axis plane) for space saving and for straightening the wires 10, vacuum pipes 11 and the like accommodated in a tray jig 4 described later by their own weight.

[0015] Two workbench supports 22 for fixedly supporting the workbench 24 in a slightly inclined vertical state are, for example, disposed at predetermined intervals in the Y-axis direction on the base aggregate 211 at the upper side of the front surface on the +X direction side of the base 21, and can respectively support the outer peripheral aggregates 243 on the left and right sides of the workbench 24 in the Y-axis direction. The workbench support 22 comprises: a mounting plate 223 on which the workbench 24 is mounted; and a pair of fixing clamps 226 that clamp and fix the outer peripheral aggregate 243 of the workbench 24, which is mounted on the mounting plate 223 and in a slightly inclined state, from both the left and right sides in the Y-axis direction.

[0016] The entire outer shape of the workbench 24 is formed into a rectangular annular shape in a front view by four outer peripheral aggregates 243. The workbench 24 comprises: a central aggregate 244 extending in the vertical direction within the ring of the outer peripheral aggregates 243; connecting aggregates 245 extending in the Y-axis direction and connecting the upper and lower ends of the central aggregate 244 to the outer peripheral aggregates 243; a pair of first positioning plates 246 attached to the middle section of the central aggregate 244; a pair of second positioning plates 247 attached to the upper connecting aggregate 245; and a positioning jig fixing portion 248 disposed on the upper surface of the outer peripheral aggregate 243 constituting the upper side of the workbench 24.

[0017] By positioning the tray jig 4, shown in Figure 3 (described later), between the pair of first positioning plates 246 and the pair of second positioning plates 247, the tray jig 4 can be positioned vertically straight in the center of the workbench 24. The positioning jig fixing portion 248 has a fixing hole 249 formed through it, from the front side (+X direction side) to the back side (-X direction side), into which the positioning jig 3 shown in Figure 4 is slid and fixed.

[0018] The tray jig 4 shown in Figure 3, used in each step of the manufacturing method of the strip-shaped device 1 according to the present invention, comprises a tray base 49 formed from engineering plastic or the like, with an overall outer shape of a substantially rectangular plate. Multiple wiring grooves 40 and piping grooves 41 are formed on the front surface (+X side) of the tray base 49, extending in the Z-axis direction. The multiple wiring grooves 40 and piping grooves 41 are formed by cutting out the front surface of the tray base 49 and extending from the top to the bottom, with a substantially semicircular cross-section having a diameter corresponding to the diameter of the wiring 10, vacuum pipe 11, water pipe 12, or air pipe 13 that are housed along it (for example, a slightly larger diameter in each case).

[0019] On the upper and lower front regions of the tray base 49 on the +X direction side, mounting portions 44 are formed for attaching a fixing cover 43 (see Figure 7) from the front side, with wiring 10 or vacuum piping 11, etc., that extend vertically from end to end in multiple wiring grooves 40 or piping grooves 41 loosely fitted into them. The fixing cover 43 is attached to the mounting portions 44, for example, by inserting an insertion pin (not shown) of the fixing cover 43 into an insertion hole 441 formed in the mounting portions 44. The fixing cover 43 secures the wiring 10 or vacuum piping 11, etc., that are loosely fitted into the multiple wiring grooves 40 or piping grooves 41, preventing them from coming loose or shifting from the tray jig 4.

[0020] The back surface of the tray base 49 on the -X side, as shown in Figure 3, is substantially flat and abuts against the central structural member 244 of the workbench 24 shown in Figure 2. In addition, the upper region of the back surface of the tray base 49 has an engagement opening (not shown) on its lower surface into which the connecting structural member 245 shown in Figure 2 engages, and an engaging projection 45 is provided projecting toward the -X direction, which can be hooked onto the connecting structural member 245 from above.

[0021] The number, size, and arrangement in the Y-axis direction of the multiple wiring grooves 40 and piping grooves 41 of the tray jig 4 vary depending on the type (model number) of the strip-shaped device 1 shown in Figure 1 that is to be manufactured. The model number of the tray jig 4, which is determined by the difference in shape, can be recognized, for example, by the worker reading a QR code (registered trademark) on a two-dimensional code (not shown) placed on the front of the tray jig 4 using a QR code (registered trademark) reader. Note that a barcode can also be used instead of a 2D code. In other words, by reading the QR code (registered trademark), the system can recognize the model number of the tray jig 4, determine whether the strip-forming device 1 to be manufactured corresponds to the tray jig 4, and notify the worker with an alarm if they are different. Alternatively, the model number of tray jig 4 may be identified by capturing an image with a camera.

[0022] The positioning jig 3 shown in Figure 4 is a jig that positions multiple wires 10 or vacuum pipes 11, etc., in the appropriate order in multiple wiring grooves 40 and pipe grooves 41 on a tray jig 4 selected according to the model number of the strip-shaped device 1 shown in Figure 1 that is to be manufactured, and also ensures that the protruding length of the multiple wires 10 or vacuum pipes 11 from the upper end of the tray jig 4 shown in Figure 3 is an appropriate length.

[0023] The positioning jig 3 comprises a rod-shaped arrangement member 30 extending in the Z-axis direction, pipes with joints 31 and wiring with connectors 32 attached to the side of the arrangement member 30 in substantially the same order and number as the connection destinations (pipes or wiring) in the cutting device, etc., on the side where the strip-shaped device 1 shown in Figure 1 is positioned, and a fixing plate 34 disposed at the lower end of the arrangement member 30 and removably slid into and fixed to the positioning jig fixing part 248 of the workbench jig 2 shown in Figure 2. In the example shown in Figure 4, the pipes with joints 31 and wiring with connectors 32 are tied to the arrangement member 30 with cable ties.

[0024] The following describes each step in the manufacturing process of the strip-shaped device 1 shown in Figure 1. (1) Placement process First, the wiring 10 shown in Figure 1 is arranged in parallel in a strip shape, with its cross-sectional center 100, the vacuum pipe 11 in its cross-sectional center 111, the water pipe 12 in its cross-sectional center 122, and the air pipe 13 in its cross-sectional center 133 all aligned in a straight line. Specifically, first, the fixing plate 34 of the positioning jig 3 shown in Figure 4 is pushed and slid into the positioning jig fixing part 248 of the workbench 24, which is supported by a base 21, etc., in a standing position as shown in Figure 2, by the worker from the +X direction, thereby fixing the positioning jig 3 on the workbench 24 as shown in Figure 5. Note that in Figures 5 to 7, the base 21, etc., that supports the workbench 24 are omitted from the illustration.

[0025] Next, the tray jig 4 is properly attached to the workbench 24 by hooking the engaging projection 45 of the tray jig 4 onto the connecting frame 245 (see Figure 2) located on the upper part of the workbench 24 as shown in Figure 5, and by fitting it between the pair of first positioning plates 246 and the pair of second positioning plates 247, so that its longitudinal direction extends substantially parallel to the Z-axis direction. As a result, the lower ends of the joint 31 with piping and the connector 32 with wiring, which are arranged in a predetermined order on the positioning jig 3, are positioned above the tray jig 4.

[0026] Next, the worker connects the vacuum pipe 11, water pipe 12, or air pipe 13 corresponding to the joint 31 positioned in a predetermined location as shown in Figure 6, and also connects the wiring 10 corresponding to the connector 32 positioned in a predetermined location. Then, using a cleaning solution, the worker wipes the dirt off the surface of the wiring 10, vacuum pipe 11, water pipe 12, or air pipe 13 from end to end.

[0027] Next, the wiring 10, vacuum piping 11, water piping 12, or air piping 13 are placed in the corresponding wiring grooves 40 or piping grooves 41 of the tray jig 4, ensuring they are properly aligned with the corresponding diameter and position. By properly placing the wiring 10, vacuum piping 11, water piping 12, or air piping 13 straight into the corresponding wiring grooves 40 or piping grooves 41, the cross-sectional centers 100 of the wiring 10, 111 of the vacuum piping 11, 122 of the water piping 12, and 133 of the air piping 13 shown in Figure 1 are aligned in parallel so that the wiring 10, vacuum piping 11, etc., are in a straight line in their respective radial directions (Y-axis direction in Figure 6) without twisting or crossing. This completes the placement process. Furthermore, as in this embodiment, by using the positioning jig 3, when the completed strip-shaped device 1 shown in Figure 1 is later placed on a cutting machine or the like, the wiring 10 and vacuum piping 11 on the strip-shaped device 1 side can be connected to the connection points (connectors and joints) on the cutting machine side.

[0028] (2) Frame arrangement process In this embodiment, after completing the above arrangement step and before carrying out the liquid resin supply step described later, a frame arrangement step is carried out in which a predetermined area in the extending direction (Z-axis direction) of one side (in Figure 6, the exposed side, which is the +X direction side) of the strip-shaped wiring 10 and vacuum piping 11 etc. is surrounded by a rectangular annular frame. Furthermore, after the placement process, or after the frame placement process, the arranged wiring 10 and vacuum pipes 11, etc., may be photographed with a camera to check for any errors in the order. In other words, check for any errors in the placement of wiring and pipes of approximately the same diameter, or in the placement of pipes of the same diameter.

[0029] Specifically, as shown in Figure 7, the worker attaches fixing covers 43 to the upper and lower mounting parts 44 of the tray jig 4, respectively, to secure the wiring 10, vacuum piping 11, water piping 12, or air piping 13 so that they remain neatly arranged in the corresponding wiring grooves 40 or piping grooves 41. In this embodiment, the upper and lower fixing covers 43 shown in Figure 7, and the left and right sides of the tray base 49 of the tray jig 4 in the Y-axis direction, form a rectangular annular frame 46 that surrounds a predetermined area in the extending direction of one side (+X direction side) of the wiring 10 and vacuum piping 11, etc. Then, in the liquid resin supply process described later, liquid resin is supplied to one side of the wiring 10 and vacuum piping 11, etc. that are exposed in a rectangular shape inside the frame 46.

[0030] Next, the worker disconnects the joints 31 or connectors 32 of the positioning jig 3, which assisted in the proper positioning and accommodation of the wiring 10, vacuum pipe 11, water pipe 12, or air pipe 13 in the multiple wiring grooves 40 or pipe grooves 41 of the tray jig 4 shown in Figure 7, from the wiring 10, vacuum pipe 11, water pipe 12, or air pipe 13. Then, the upper ends of the free ends of the wiring 10, vacuum pipe 11, water pipe 12, or air pipe 13 are temporarily bundled together with cable ties or the like to facilitate subsequent work. In this embodiment, since the fixed lid 43 attached to the upper side of the tray jig 4 is provided with a temporary fixing plate 430 as shown in Figure 7, the upper ends of the free ends of the wiring 10, vacuum pipe 11, water pipe 12, and air pipe 13 may also be bundled together by tying them to the temporary fixing plate 430 with cable ties. Furthermore, it is preferable to bundle the lower ends of the wiring 10, vacuum piping 11, water piping 12, and air piping 13 together with cable ties so as not to interfere with transport or other purposes.

[0031] (3) Liquid resin formation process Next, a liquid resin supply process is carried out to supply a liquid resin that hardens to an elastic state to a predetermined area in the extending direction (Z-axis direction) of one side (+X direction side) of the multiple strip-shaped wirings 10, vacuum pipes 11, water pipes 12, and air pipes 13 shown in Figure 7. This area is, in this embodiment, to the inside of the frame 46 formed by the upper and lower fixing lids 43 and the left and right sides of the tray base 49 in the Y-axis direction.

[0032] Specifically, first, the tray jig 4, to which the wiring 10, vacuum piping 11, water piping 12, and air piping 13 are attached, is removed by an operator from the workbench 24 shown in Figure 7 and transported to the liquid resin coating device 6 shown in Figure 8. Figure 8 shows important parts of the structure of the liquid resin coating device 6.

[0033] The liquid resin coating apparatus 6 is constructed by connecting multiple rod-shaped structural members such as aluminum frames, and includes, for example, a resin nozzle 60 that drops and coats liquid resin into the inside of a frame 46 formed by multiple wirings 10, vacuum pipes 11, water pipes 12, and air pipes 13 arranged in a strip shape on one side facing upward (in the X-axis direction in Figure 8), front and rear fixed covers 43, and parts on both the left and right sides in the Y-axis direction of the tray base 49; a liquid resin supply unit 61 that supplies liquid resin to the resin nozzle 60; a nozzle moving mechanism 62 that moves the resin nozzle 60 in a straight line in the Y-axis direction or the X-axis direction; and a tray placing mechanism 63 into which the tray jig 4 is inserted and placed in the X-axis direction.

[0034] For example, the tray mounting mechanism 63 includes a pair of tray mounting bases 630 arranged with a space for accommodating the tray jig 4 in the Y-axis direction. The tray mounting bases 630, which are supported in a hollow state by vertical supports (not shown), are formed in a rectangular block shape in plan view with the X-axis direction being the longitudinal direction, and rail grooves 631 extending in the X-axis direction are formed on at least the inner surface in the Y-axis direction. The rail grooves 631 are formed to a width that allows the tray base 49 of the tray jig 4 to loosely fit. The tray jig 4, with the fixed lid 43 side equipped with the temporary fixing plate 430 as the +X direction side (insertion tip side), is placed horizontally with one side of the multiple wirings 10, vacuum pipes 11, water pipes 12, and air pipes 13 exposed inside the frame 46 facing upwards, and is inserted between the pair of tray mounting bases 630 from the insertion opening 632 located on the -X direction side so that the sides of the tray base 49 slide within the rail grooves 631 on the left and right sides in the Y-axis direction. Furthermore, by moving the tray jig 4 toward the +X direction and bringing it into contact with a stopper (not shown) located at the +X end of the tray mounting base 630, the tray jig 4 is positioned in the appropriate working position for applying the liquid resin and placed on the tray mounting base 630.

[0035] Alternatively, multiple tray placement mechanisms 63 may be arranged in a line along the Y-axis, and multiple tray jigs 4, to which wiring 10 and vacuum piping 11 etc. are attached, may be placed in a line along the Y-axis so that liquid resin can be applied. Furthermore, for example, before an operator inserts and places the tray jig 4 into the tray placement mechanism 63, the QR code (registered trademark) on the tray jig 4 may be read by a QR code (registered trademark) reader, and the read data may be sent to a control unit consisting of a CPU (not shown) of the liquid resin application device 6, where the control unit may check whether the model number of the tray jig 4 to be placed on the tray placement table 630 matches the model number of the desired strip-shaped device 1 to be manufactured.

[0036] The nozzle movement mechanism 62, shown in a simplified manner in Figure 8, consists of an electric slider positioned above the tray mounting mechanism 63, with movement in the X-axis direction and an electric slider positioned in the Y-axis direction, allowing the support arm 64 to which the resin nozzle 60 is attached to be moved linearly in both the X-axis and Y-axis directions.

[0037] The support arm 64 supports a resin nozzle 60 having a supply port 600 at its lower end, and a resin tank 610 that constitutes a liquid resin supply unit 61 and is capable of supplying liquid resin to the resin nozzle 60. The resin nozzle 60 and the resin tank 610 move in conjunction with each other in the X-axis or Y-axis direction by a nozzle movement mechanism 62. In addition, for example, the support arm 64 incorporates a lifting cylinder (not shown), which allows the resin nozzle 60 to move up and down in the Z-axis direction.

[0038] In this embodiment, the liquid resin supplied from the resin tank 610 of the liquid resin supply unit 61 to the resin nozzle 60 via the connecting pipe 611 is a one-component moisture-curing resin that forms a tough and flexible rubber-like elastic body after curing, and is resistant to vibration and shock, as well as having excellent total stress resistance. Alternatively, the liquid resin in the resin tank 610 may be supplied to the resin nozzle 60 while adjusting the supply amount using a dispenser (not shown). For example, if we use a one-component moisture-curing resin, such as "TB1530 (main component: silyl group-containing special polymer)" from ThreeBond Co., Ltd., the hardness of the cured liquid resin will be Shore A60-70.

[0039] In the liquid resin forming process, after the tray jig 4 is placed on the tray mounting base 630 and positioned at an appropriate working position for applying the liquid resin as described above, the nozzle moving mechanism 62 moves the resin nozzle 60 in the X-axis and Y-axis directions to position the resin nozzle 60 shown in Figure 8 at one of the four corners on the upper side of the multiple strip-shaped wirings 10, vacuum pipes 11, water pipes 12, and air pipes 13 that are exposed within the frame 46 formed by the upper and lower fixed lids 43 and the left and right sides of the tray base 49 in the Y-axis direction. Before positioning, in order to apply a non-degraded liquid resin to the wiring 10 etc. from the resin nozzle 60, old liquid resin that was not used in a previously performed liquid resin forming process may be sprayed from the resin nozzle 60 and discarded.

[0040] After the above positioning is performed, a predetermined amount of liquid resin 198, which is temperature-controlled to a reference temperature, is supplied per minute from the resin tank 610 equipped with the pump shown in Figure 9 to the resin nozzle 60. Then, the liquid resin 198 begins to drip from the supply port 600 of the resin nozzle 60 onto one side of the multiple wires 10, vacuum pipes 11, water pipes 12, and air pipes 13 that are exposed in a strip shape within the frame 46 formed in the fixed lid 43 and the tray base 49.

[0041] Furthermore, the nozzle moving mechanism 62 shown in Figure 9 moves the resin nozzle 60, for example, in the -X direction, so that the liquid resin 198 is applied in a linear fashion to one side of the multiple wirings 10, vacuum pipes 11, water pipes 12, and air pipes 13. When the resin nozzle 60 has advanced in the -X direction from one end in the X-axis direction to the other of one side of the multiple wirings 10, vacuum pipes 11, water pipes 12, and air pipes 13 which are arranged in a strip and exposed within the frame 46 formed by the fixed lid 43 and the tray base 49, the movement of the resin nozzle 60 in the -X direction is stopped.

[0042] Next, the nozzle moving mechanism 62 moves the resin nozzle 60, for example, in the -Y direction, and the resin nozzle 60 is aligned in the Y-axis direction with respect to a region adjacent to the region that served as the reference region during the linear application of the liquid resin 198 in the -X direction (forward movement). Note that these regions within the frame 46 may overlap to some extent. After this alignment is performed, the resin nozzle 60 is moved in the +X direction (return movement), and the liquid resin 198 is applied linearly to one side of the multiple wires 10, vacuum pipes 11, water pipes 12, and air pipes 13 that are exposed in a strip shape within the frame 46 formed by the fixed lid 43 and the tray base 49, similar to the application of the liquid resin 198 in the forward direction.

[0043] The liquid resin 198 is applied sequentially in the same manner until the liquid resin 198 is applied in a strip to substantially the entire surface of one side of the multiple wires 10, vacuum pipes 11, water pipes 12, and air pipes 13 that are exposed in a strip shape within the frame 46 formed by the fixed lid 43 and the tray base 49, thereby completing the liquid resin supply process. In this way, by supplying the liquid resin 198 to the inside of the frame 46 during the liquid resin supply process, the liquid resin 198 can be easily molded into a predetermined shape (strip), and it is possible to prevent the liquid resin 198 from spreading to unwanted areas.

[0044] (4) Resin layer formation process Next, a resin layer formation process is carried out in which the applied liquid resin 198 shown in Figure 9 is cured to form the elastic resin layer 19 shown in Figure 1. In the resin layer formation process, for example, an operator removes the tray jig 4, on which liquid resin 198 has been applied to one side of the wiring 10, vacuum piping 11, water piping 12, and air piping 13, from the tray mounting base 630 shown in Figure 9, and carries it to a drying room. In the drying room, the applied liquid resin 198 is dried for, for example, three days. Upon drying, the liquid resin 198 becomes an elastic resin layer 19 of a predetermined thickness in the shape of a strip, with elasticity and a longitudinal direction the same as the wiring 10, vacuum piping 11, water piping 12, and air piping 13 shown in Figure 1. Furthermore, the wiring 10, vacuum piping 11, water piping 12, and air piping 13 are bonded to the elastic resin layer 19.

[0045] After drying is complete, the upper and lower fixing lids 43 are removed from the tray base 49 of the tray jig 4, and then the multiple strip-shaped wirings 10, vacuum pipes 11, water pipes 12, and air pipes 13 are removed from the wiring grooves 40 or pipe grooves 41 to manufacture the strip-shaped device 1 shown in Figure 1.

[0046] Next, we will explain how to use the strip-shaped device 1 shown in Figure 1, which was manufactured. The strip-shaped device 1 is placed, for example, on the cutting device 7 shown in Figure 10. As shown in Figure 10, the cutting device 7 can perform cutting on a workpiece 90, such as a circular semiconductor wafer.

[0047] A cutting feed mechanism 72 is provided on the base 70 of the cutting device 7, which reciprocates a holding table 71 that holds the workpiece 90 by suction in the cutting feed direction (X-axis direction). When the motor 722 rotates a ball screw 720 having an axis in the X-axis direction, the movable plate 723 is guided to slide along the guide rail 721 and moves in the X-axis direction, and the holding table 71, which is provided on the movable plate 723 via a table rotation mechanism 74, moves in the X-axis direction.

[0048] The holding table 71 communicates with a suction source (not shown) and can hold the workpiece 90 by suction on a flat holding surface 710 made of a porous material or the like. The holding table 71 is rotatable about a rotation axis in the Z-axis direction (vertical direction) by a table rotation mechanism 74 driven by a motor or the like.

[0049] A gantry-type column 703 is erected on the rear side (-X direction side) of the base 70, straddling the cutting feed mechanism 72. A first cutting unit 75 and a second cutting unit 76 are arranged on the front side (+X direction side) of the gantry-type column 703. The first cutting unit 75 and the second cutting unit 76 cut the workpiece 90 with rotating circular cutting blades.

[0050] The first cutting unit 75 (second cutting unit 76) is indexed and fed in the Y-axis direction by a first indexing feed mechanism 771 (second indexing feed mechanism 772), which consists of a ball screw mechanism or the like, to align the cutting blade with the target division line of the workpiece 90. In addition, the first cutting unit 75 (second cutting unit 76) is made vertically movable in the Z-axis direction (vertical direction) by a first in-cut feed mechanism 781 (second in-cut feed mechanism 782), which consists of a ball screw mechanism or the like, to cut into the workpiece 90 with the cutting blade.

[0051] The cutting apparatus 7 includes a strip-shaped device 1 according to the present invention, which is connected to the movable plate 723 of the cutting feed mechanism 72, which is a moving body, and is also connected to the base 70, which is a fixed body, in order to transmit air or suction force to the holding surface 710 of the holding table 71, for example, without hindering the movement of the holding table 71 which moves in the X-axis direction, and to supply power to a rotary motor (not shown) of the table rotation mechanism 74, for example.

[0052] For example, as shown in Figure 11, bellows covers 80 are attached to both ends of the movable plate 723 in the X-axis direction to protect the strip-shaped device 1 and the cutting feed mechanism 72 (not shown in Figure 11) from used cutting fluid that flows down from the holding table 71 during the cutting of the workpiece 90.

[0053] The bellows cover 80 is provided so as to be expandable and contractible between, for example, the +X-direction end and the -X-direction end of the movable plate 723 and the first mounting portion 81 and the second mounting portion 82 provided on the housing (not shown) of the cutting device 7. That is, when the holding table 71 is moved by the cutting feed mechanism 72, the bellows cover 80 expands and contracts in accordance with the movement of the holding table 71. In this way, the bellows cover 80 can cover and protect the cutting feed mechanism 72 and the strip-shaped device 1 on the base 70, regardless of the position of the holding table 71.

[0054] The movable plate 723 is equipped with a wiring and piping fixing member 725 on its bottom surface. The wiring and piping fixing member 725 is positioned below the bellows cover 80 and moves together with the movable plate 723. For example, one end of the strip-shaped device 1 (the upper end that was connected to the positioning jig 3 shown in Figure 7) is fixed to the wiring and piping fixing member 725 using a cable tie or the like, the wiring 10 shown in Figure 1 on the strip-shaped device 1 side is connected to the wiring (not shown) on the table rotation mechanism 74 side, and the vacuum pipe 11, water pipe 12, or air pipe 13 shown in Figure 1 on the strip-shaped device 1 side is connected to the piping (not shown) on the holding table 71 side.

[0055] The strip-shaped device 1 is positioned between the holding table 71 and the base 70, with the elastic resin layer 19 facing outwards and the wiring 10 and vacuum piping 11 facing inwards, folded in half and curved in a U-shape so that they overlap vertically. The other end of the strip-shaped device 1 (the lower end shown in Figure 7) is fixed to a base-side fixing member 706 that is attached to the base 70. The horizontally curved U-shaped portion of the strip-shaped device 1 installed in this manner becomes the U-shaped section 17, and the portion extending horizontally (in the X-axis direction) becomes the horizontal section 18.

[0056] The following describes the movement of the holding table 71 in the cutting device 7 in the X-axis direction, and the operation of the strip-shaped device 1 associated with this movement. Specifically, in the cutting apparatus 7, as shown in Figures 10 to 12, when the workpiece 90 is placed on the holding surface 710 of the holding table 71, the holding table 71 is positioned at the +X direction placement position P1 by the cutting feed mechanism 72. When cutting the workpiece 90, the holding table 71 is positioned at the -X direction cutting position P2 by the cutting feed mechanism 72.

[0057] As described above, when the holding table 71 and the movable plate 723 move between the mounting position P1 and the cutting position P2, the upper part of the strip-shaped device 1, which is fixed to the wiring and piping fixing member 725 of the movable plate 723, moves in the X-axis direction together with the holding table 71, as shown in Figures 11 and 12.

[0058] Then, the lower part of the strip-shaped device 1, which is fixed to the base-side fixing member 706, does not move, and the horizontal part 18 on the side of the strip-shaped device 1 that is in contact with the base 70 deforms into a U-shape 17 and moves away from the base 70. At this time, friction that occurs between the base 70 and the strip-shaped device 1 is mitigated by the elastic resin layer 19, and the wiring 10, vacuum piping 11, water piping 12, and air piping 13 shown in Figure 1 are prevented from rubbing against the base 70. Furthermore, the strip-shaped device 1 ensures that regardless of whether the holding table 71 is moved to the mounting position P1 or the cutting position P2, the holding surface 710 of the holding table 71 is appropriately supplied with suction force generated by a suction source (not shown) or air sent out by an air supply source (not shown), and power supplied by a power source (not shown) is supplied to, for example, the table rotation mechanism 74.

[0059] Conventional strip-shaped devices, for example, when installed on a cutting device 7, required a Teflon® sheet to be sandwiched between the outside of the U-shaped section 17 and the fixed base 70. This installation process was time-consuming. Furthermore, after installing the Teflon® sheet, it was necessary to move the movable plate 723 (a moving element) to ensure the sheet did not press against the U-shaped section 17. In contrast, the strip-shaped device 1 according to the present invention integrates multiple wires 10 or pipes (e.g., vacuum pipes 11, water pipes 12, and air pipes 13) with an elastic resin layer 19. Therefore, attachment to the fixed base 70 and the movable plate 723 is easier, as it eliminates the need for Teflon® sheet installation and subsequent verification.

[0060] It should be noted that the strip-shaped device 1 according to the present invention is not limited to the above embodiment, and the manufacturing process and usage method of the strip-shaped device 1 are not limited to the above embodiment, and can be appropriately modified within the range in which the effects of the present invention can be achieved. The processing apparatus on which the strip-shaped device 1 is installed is not limited to the cutting apparatus 7 shown in Figure 10, but may be a grinding apparatus, polishing apparatus, laser processing apparatus, etc. [Explanation of Symbols]

[0061] 1: Strip-shaped device 10: Wiring 100: Center of the cross-section of the wiring 11: Vacuum piping 111: Center of the cross-section of the vacuum piping 12: Water piping 122: Center of the cross-section of water piping 13: Air piping 133: Center of the cross-section of the air piping 19: Elastic resin layer 17: U-shaped section 18: Horizontal section 2: Workbench jig 21: Base 211: Base frame 22: Workbench support section 223: Mounting plate 226: Pair of fixing clamps 24: Workbench 243: Outer perimeter structural members 244: Central structural members 245: Connecting structural members 246: Pair of first positioning plates 247: Pair of second positioning plates 248: Positioning jig fixing part 3: Positioning jig 30: Arrangement material 31: Joint 32: Connector 34: Fixing plate 4: Tray jig 40: Wiring groove 41: Piping groove 43: Fixing cover 430: Temporary fixing plate 44: Mounting part 45: Engaging projection 49: Tray base 6: Liquid resin coating device 60: Resin nozzle 600: Supply port 61: Liquid resin supply unit 610: Resin tank 611: Connecting pipe 62: Nozzle movement mechanism 63: Tray mounting mechanism 630: Tray mounting base 631: Rail groove 64: Support arm 7: Cutting equipment 70: Base 703: Gantry column 706: Base-side fixing member 71: Holding table 710: Holding surface 72: Cutting feed mechanism 720: Ball screw 721: Guide rail 722: Motor 723: Movable plate 725: Wiring and piping fixing member 74: Table rotation mechanism 75: First cutting unit 76: Second cutting unit 771: First indexing feed mechanism 772: Second indexing feed mechanism 781: First cutting feed mechanism 782: Second cutting feed mechanism 80: Bellows cover 81: First mounting section 82: Second mounting section 90: Workpiece

Claims

1. A strip-shaped device in which multiple wires or pipes with different cross-sectional diameters are arranged in parallel and bonded together, A strip-shaped device in which the cross-sectional centers of the wiring or pipes are arranged in parallel and closely together so that they form a straight line, a liquid resin that becomes elastic when hardened is applied to one side of the strip-shaped wiring or pipes, and as the liquid resin hardens, adjacent wiring or pipes are bonded together, forming an elastic resin layer on the one side, and the device is used to form a U-shaped section and a horizontal section with the elastic resin layer on the outside of the wiring or pipe.

2. A method for manufacturing a strip-shaped device according to claim 1, Arrangement step: Arrange the wiring in parallel in a strip shape so that the cross-sectional centers of the wiring or the cross-sectional centers of the pipes are aligned in a straight line, A liquid resin supply step involves supplying the liquid resin, which becomes elastic upon hardening, to a predetermined region in the extending direction on one side of a plurality of strip-shaped wires or pipes, A method for manufacturing a strip-shaped apparatus, comprising a resin layer forming step of curing the liquid resin to form the elastic resin layer.

3. Between the arrangement step and the liquid resin supply step, the process includes a frame arrangement step in which a predetermined region in the extending direction of one side of the strip-shaped wiring or piping is surrounded by a rectangular annular frame. The method for manufacturing a strip-shaped device according to claim 2, wherein the liquid resin supply step involves supplying the liquid resin to the inside of the frame.

4. A processing apparatus comprising: a holding table for holding a workpiece; a processing unit for processing the workpiece held on the holding table; a feed mechanism for moving the holding table in one direction; and a base for supporting the holding table and the feed mechanism, The base and the holding table are connected by the strip-shaped device described in claim 1, and the U-shaped portion is moved as the holding table moves. Processing equipment.

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