Yoke member and scanner device

Abstract

To provide a small-sized yoke member and scanner device to magnetically control a control object member.SOLUTION: A yoke member includes: a first yoke which has a pair of first ends opposed to each other; and a second yoke which has a pair of second ends opposed to each other in a different direction from the opposing direction of the first ends. In addition, the first yoke and second yoke are connected to each other so that parts of a magnetic circuit are crossed and the magnetic path length becomes equal.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present disclosure relates to a yoke member and a scanner device. [Background Art]

[0002] Conventionally, techniques for controlling the angle of a mirror using two pairs of yoke coils have been proposed. For example, Patent Document 1 discloses a scanner device (mirror scanner) including a first yoke having a pair of core portions and a second yoke having a pair of core portions. In this scanner device, one end of each of the pair of core portions of the first yoke faces the surface opposite to the reflection surface of the mirror, and one end of each of the pair of core portions of the second yoke is arranged to face the surface opposite to the reflection surface. In addition, a straight line connecting the one ends of the second yoke is arranged to intersect a straight line connecting the one ends of the first yoke. [Prior Art Document] [Patent Document]

[0003] [Patent Document 1] Japanese Unexamined Patent Publication No. 2021-33087 [Summary of Invention] [Problem to be Solved by the Invention]

[0004] In the scanner device of Patent Document 1, the first yoke and the second yoke are configured as separate members. Therefore, the first yoke and the second yoke of such a scanner device need to be arranged so as not to interfere with each other, which imposes constraints on layout, and may lead to an increase in the size of the entire scanner device.

[0005] An object of the present disclosure is to provide a compact yoke member and a compact scanner device. [Means for Solving the Problem]

[0006] The yoke member according to this disclosure comprises a first yoke having a pair of opposing first ends, and a second yoke having a pair of opposing second ends facing in a direction different from the opposing direction of the first ends, wherein the first yoke and the second yoke are connected such that a portion of the magnetic circuit intersects and the magnetic path lengths are equal.

[0007] The scanner device according to this disclosure comprises an electromagnet having the yoke member described above, a yoke coil provided on the first arm member of the first yoke and the second arm member of the second yoke, and a deflection member disposed between a pair of the first ends and between a pair of the second ends and whose angle is controlled by the electromagnet. [Effects of the Invention]

[0008] The yoke member and scanner device according to this disclosure, using the above means, can be made smaller. [Brief explanation of the drawing]

[0009] [Figure 1] This is a diagram illustrating the configuration of a light source device according to the present disclosure. [Figure 2] This is a perspective view of a part of the scanner device's configuration. [Figure 3] This is an exploded perspective view of some components of a scanner device. [Figure 4] This is a cross-sectional view IV-IV of a part of the scanner device. [Figure 5] This is a VV cross-sectional view of the yoke member. [Figure 6] This is an enlarged view of the IV-IV section in Figure 4. [Figure 7] This is a schematic plan view of the detection unit. [Figure 8] This figure shows the irradiation area of ​​the laser light irradiated onto the light receiving unit via the light selection unit of Embodiment 2 and Embodiment 3. [Figure 9] This is a schematic diagram showing the change in the intensity distribution of laser light in the optical path from the light source to the detection unit, viewed from two orthogonal directions. [Figure 10]This figure shows the irradiation area of ​​the laser light irradiated onto the light receiving unit via the light selection unit of Embodiment 4 and Embodiment 5. [Figure 11] This is an enlarged view of the scanner device including the deflection member of Embodiment 6, at a position corresponding to the IV-IV cross-section. [Figure 12] This is a perspective view of the yoke member of Embodiment 7. [Figure 13] Figure 12 is a cross-sectional view of the yoke member along line XIII-XIII. [Figure 14] This is a cross-sectional view of the yoke member of Embodiment 8, showing the position corresponding to the XIII-XIII section. [Figure 15] This is a perspective view of the yoke member of Embodiment 9. [Figure 16] Figure 15 is a cross-sectional view of the yoke member along line XVI-XVI. [Figure 17] This is a perspective view of the yoke member of Embodiment 10. [Modes for carrying out the invention]

[0010] Embodiments of this disclosure will be described below with reference to the drawings. Figure 1 is a configuration diagram of the light source device 1. The light source device 1 has the function of emitting laser light into space. The light source device 1 is used, for example, as a light source for a laser rangefinder or a LiDAR (Light Detection and Ranging) sensor. The light source device 1 comprises a control unit 11, a rangefinder optical system 12, an optical system drive circuit 13, and a scanner device 2.

[0011] The control unit 11 controls the operations of the optical system driving circuit 13, the scanner device driving circuit 14, the angle sensor circuit 15, and the like. The control unit 11 executes functions and / or methods implemented by codes or instructions included in a program stored in a storage unit (not shown). For example, the control unit 11 can employ a central processing unit (CPU), MPU (Micro-Processing Unit), GPU, MCU (Microcontroller Unit), processor core, multiprocessor, ASIC, FPGA, etc. Each processing disclosed in the embodiments may be implemented by a logic circuit formed in an integrated circuit or the like or a dedicated circuit. Further, these circuits may be implemented by one or more integrated circuits, and a plurality of processes described in each embodiment may be implemented by a single integrated circuit.

[0012] A storage unit (not shown) of the light source device 1 has a function of storing various required programs and various data. Further, the storage unit can store acquired information such as measured signals. The storage unit is implemented by various storage media such as HDD, SSD, and flash memory.

[0013] The ranging light optical system 12 includes a light-emitting element that emits laser light, an optical element including a lens or a mirror that guides laser light emitted from the laser light-emitting element, and a light-receiving element that detects the laser light. This optical element may include a diffusion plate, a light tunnel, a microlens array, a condensing lens, a filter, or the like that adjusts the light beam width or adjusts the luminance distribution. The light-receiving element can receive return light emitted by the laser light-emitting element and reflected by an object outside the light source device 1. The ranging light optical system 12 emits laser light L1, which is ranging light (first light), to the deflecting member 7 of the scanner device 2.

[0014] The optical system driving circuit 13 controls light emission of the light-emitting element of the ranging light optical system 12. Further, the optical system driving circuit 13 detects light received by the light-receiving element of the ranging light optical system 12, converts the light into an electrical signal, and transmits information of the electrical signal to the control unit 11.

[0015] The scanner device 2 reflects the laser beam L1 emitted by the range-measuring optical system 12 in a direction and angle selected from a predetermined range of solid angles, and emits it outside the light source device 1 as emitted light. By controlling the angle of the deflection member 7, the scanner device 2 can reflect the laser beam L1 in different directions, as exemplified by laser beam L11 or laser beam L12. The scanner device 2 also guides light incident from outside the light source device 1 to the range-measuring optical system 12. The light incident from outside the light source device 1 is reflected light L3 that has been reflected from an object outside the light source device 1. Depending on the configuration of the light source device 1, the laser beam L1 emitted from the light source device 1 may be guided to other optical systems within the light source device 1.

[0016] The scanner device 2 comprises a mirror control device 3, a tilt detection device 4, and a support member 6. The mirror control device 3 in this embodiment includes a yoke member 5, a deflection member 7, and a scanner device drive circuit 14. The tilt detection device 4 in this embodiment includes a light source 41 that emits laser light L2 used as tilt detection light (second light), a lens 42, a deflection member 43 (second deflection member), a detection circuit board 44, and an angle sensor circuit 15. The deflection member 7 also functions as part of the tilt detection device 4.

[0017] Figure 2 is a perspective view of a portion of the configuration of the mirror control device 3 and tilt detection device 4 of the scanner device 2. In the description of the scanner device 2, the deflection member 7 side is considered the top of the scanner device 2, and the base member 55 side is considered the bottom. Figure 3 is an exploded perspective view of a portion of the configuration of the mirror control device 3 and tilt detection device 4 of the scanner device 2.

[0018] The yoke member 5 comprises a first yoke 51 and a second yoke 52, which differs from the first yoke 51 and is positioned in a rotationally symmetric position about the axis P of the scanner device 2. The first yoke 51 has a pair of first arm members 53, 53, each having first ends 532a, 532a, and a base member 55 connected to the parts of the first arm members 53, 53 opposite to the first ends 532a, 532a. The second yoke 52 has a pair of second arm members 54, 54, each having second ends 542a, 542a, and a base member 55 connected to the parts of the second arm members 54, 54 opposite to the second ends 542a, 542a (see Figures 2 and 4).

[0019] The first yoke 51 and the second yoke 52 have magnetic properties. The first arm member 53 and the second arm member 54 have a roughly rectangular prism-shaped body portion 531, 541 with a rectangular cross-section, and a projection portion 532, 542 that extends from one side of the body portion 531, 541 so as to bend in a roughly L-shape. The projection portion 532, 542 has a planar first end portion 532a and a second end portion 542a at its tip, respectively.

[0020] The body portion 531 of the first arm member 53 has a yoke coil 533 wound around its outer circumference. The yoke coils 533 of the pair of first arm members 53 are connected in series with each other. Similarly, the body portion 541 of the second arm member 54 has a yoke coil 543 wound around its outer circumference. The yoke coils 543 of the pair of second arm members 54 are also connected in series with each other. Thus, the yoke member 5 and the yoke coils 533, 543 constitute an electromagnet. The scanner device drive circuit 14 controls the angle of the deflection member 7 by driving the electromagnet according to instructions from the control unit 11.

[0021] The base member 55 is a magnetic material. The base member 55 comprises a disc-shaped first base member 55-1 having notches 551 on two pairs of opposing side edges 55a, and a disc-shaped second base member 55-2. The outer diameter of the first base member 55-1 and the outer diameter of the second base member 55-2 are approximately the same (see also Figures 2 and 4). The first base member 55-1 has a notch 551 that is approximately rectangular in plan view. The notch 551 also has a groove-shaped relief portion 552 at the boundary between the inner surface 551a on the central side of the first base member 55-1 and one of the inner surfaces 551b adjacent to the inner surface 551a. The first base member 55-1 has a circular opening 553 that penetrates in the thickness direction. As shown in the assembled yoke member 5 in Figures 2 and 4, the opening 553 is positioned on an axis P passing through a gap G (magnetic gap) provided between a pair of first ends 532a and between a pair of second ends 542a.

[0022] The second base member 55-2 has approximately the same thickness as the first base member 55-1. The second base member 55-2 has a circular opening 554 that penetrates in the thickness direction. The opening 554 is positioned on an axis P passing through the gap G, as shown in the assembled yoke member 5 in Figures 2 and 4. Therefore, the opening 554 is positioned coaxially with the opening 553. Also, the inner diameter of the opening 554 is approximately the same as the inner diameter of the opening 553.

[0023] Figure 5 is a VV cross-sectional view showing the first base member 55-1 and the second base member 55-2 of the yoke member 5 shown in Figure 2. As shown in Figure 5, the first arm member 53 and the second arm member 54 are each housed in a notch 551 and connected to the first base member 55-1. The first arm member 53 is housed in the notch 551 with its surface in contact with the inner surface 551a in the central direction of the first base member 55-1, and with its end 531a substantially in contact with the upper surface of the second base member 55-2 (see also Figure 4). Similarly, the second arm member 54 is housed in the notch 551 with its surface in contact with the inner surface 551a in the central direction of the first base member 55-1, and with its end 541a substantially in contact with the upper surface of the second base member 55-2 (see also Figure 4). Therefore, the second base member 55-2 is positioned on top of the first base member 55-1 so as to cover the respective ends 531a and 541a of the first arm member 53 and the second arm member 54, which are housed in the notch 551.

[0024] The width of the notch 551 (the inner width in the circumferential direction around the axis P) is wider than that of the first arm member 53 and the second arm member 54, and there is enough play to prevent pinching (see Figure 5). The first arm member 53 and the second arm member 54 are fixed to the first base member 55-1 within the notch 551, in contact with the inner surface 551b on the relief portion 552 side.

[0025] In the assembled state shown in Figure 2 (see also Figure 4), the first ends 532a, 532a of the pair of first yokes 51 are positioned opposite each other. The second ends 542a, 542a of the pair of second yokes 52 are positioned opposite each other in a direction different from the opposing direction of the first ends 532a, 532a (in this embodiment, a direction perpendicular to the opposing direction of the first ends 532a, 532a in a plan view).

[0026] The support member 6 is positioned between the first ends 532a of the first arm member 53 and stably supports the gap length of the gap G provided between the first ends 532a. The support member 6 has a circular opening 61 that penetrates through the thickness direction (vertical direction) coaxially with the axis P. As shown in Figure 4, the inner diameter of the opening 61 widens towards the inside (bottom) side of the yoke member 5.

[0027] As shown in the exploded perspective view of Figure 3, the support member 6 is formed with substantially rotational symmetry around the axis P (around the opening 61). The support member 6 has substantially rectangular recesses 62 on its outer circumference. The recesses 62 are provided at four locations rotated 90 degrees around the axis P. The bottom surface 621 of the recesses 62 on the opening 61 side is flat. The protrusions 532 of the first arm member 53 and the protrusions 542 of the second arm member 54 are accommodated in the recesses 62. Within the recesses 62, the first end 532a of the first arm member 53 and the second end 542a of the second arm member 54 are in surface contact with the bottom surface 621. The support member 6 also has a flange portion 631 on the upper part of the outer circumference 63 that protrudes radially outward with respect to the axis P of the opening 61.

[0028] The deflection member 7 is positioned between a pair of first ends 532a and between a pair of second ends 542a. The deflection member 7 comprises a permanent magnet 71 and a reflector 72. The permanent magnet 71 has a substantially annular (donut-shaped) form. The permanent magnet 71 has a circular opening 711 in its center that penetrates in the thickness direction. The permanent magnet 71 also has one magnetic pole, the south pole and the north pole, on one end in the thickness direction (axis direction of the opening 711), and the other magnetic pole, the south pole and the north pole, on the other end.

[0029] As shown in Figure 6, the reflector 72 has a circular, flat main body 721 and a supported portion 722 protruding from the back side of the main body 721. The main body 721 and the supported portion 722 are made of a light-transmitting material such as glass or plastic. The main body 721 has a reflective surface 721a that selectively reflects laser light L1 and laser light L2. The reflective surface 721a has a light-selective portion 721a1 (second light-selective portion) that reflects laser light L1 and laser light L2, and a light-selective portion 721a2 (first light-selective portion) that reflects laser light L1 and transmits laser light L2. The light-selective portion 721a2 functions as an aperture that allows laser light L2 to pass through in a predetermined aperture shape. The light-selective portion 721a1 is, for example, a metal reflective film formed by vapor deposition or a dichroic filter. The light-selective portion 721a2 is, for example, a dichroic filter. In this embodiment, the laser beam L2 is a tilt detection light incident from the reflective surface 721a side. As shown in Figure 1, the laser beam L2 is emitted from the light source 41, focused by the lens 42, and then incident on the deflection member 43 (second deflection member). The deflection member 43 reflects the laser beam L2 emitted from the light source 41 to the deflection member 7 and irradiates the reflective surface 721a including the light selection unit 721a2.

[0030] The laser beam L1 is a distance measuring light that is guided to be incident on and reflected at a different angle from the laser beam L2 incident on the light guide unit 723, which will be described later. For example, by setting the wavelength of the laser beam L2 used as the tilt detection light to a different wavelength from the laser beam L1, and by making the light selection unit 721a2 a dichroic filter, the reflective surface 721a can be provided with a region that reflects the laser beam L1 and transmits the laser beam L2.

[0031] The region of the reflective surface 721a where the light-selecting portion 721a2 is provided is a circular region formed with a diameter smaller than the cross-sectional diameter of the laser beam L2 incident on the deflection member 7. Therefore, the light-selecting portion 721a2 focuses the laser beam L2 to a smaller diameter and transmits it. The laser beam L2 incident from the light-selecting portion 721a2 passes through the interior of the main body portion 721 and the supported portion 722 and is emitted from the surface opposite to the reflective surface 721a. Therefore, the deflection member 7 has a light-guiding portion 723 that guides the laser beam L2 from one side to the other of the reflective surface 721a side and the surface opposite to the reflective surface 721a. In this embodiment, the surface opposite to the reflective surface 721a functions as the laser beam L2 emission surface 722a.

[0032] The supported portion 722 has a short cylindrical shape. The supported portion 722 engages with or fits into an opening 711 provided in the permanent magnet 71, forming part of the deflection member 7 which is integrated with the permanent magnet 71. The deflection member 7 has a pivot point Q on the reflective surface 721a side. The pivot point Q is a hypothetical point. The deflection member 7 is supported by a support portion (not shown) so as to be rotatable in two axes so as to be able to rotate around this pivot point Q. For example, the deflection member 7 can rotate around the pivot point Q in a first direction D1 or a second direction D2. The deflection member 7 may also be supported by a support portion that is rotatable in three or more axes so as to be able to rotate around the pivot point Q.

[0033] Furthermore, the light guide portion 723 in this embodiment is an optical member positioned on the rotation center point Q of the reflective surface 721a. The incident surface of the laser beam L2 in the light guide portion 723 (the region of the reflective surface 721a where the light selection portion 721a2 is provided) and the exit surface 722a are parallel surfaces. Also, the light guide portion 723 is mostly provided on the surface furthest from the rotation center point Q. As shown in Figure 6, the light guide portion 723 has the function of displacing the optical axis position of the laser beam L2 from optical axis A to optical axis B by a displacement amount d, corresponding to the inclination of the deflection member 7.

[0034] The scanner device drive circuit 14 shown in Figure 1 includes yoke coils 533 and 543 as load circuits and a driver circuit (or switching circuit) not shown. The control unit 11 controls the scanner device drive circuit 14 to supply excitation current to the yoke coils 533 and 543. As a result, a magnetic field is generated in the first magnetic path C1 of the first yoke 51 and the second magnetic path C2 of the second yoke 52 (see Figures 4 and 5), generating a magnetic field H1 in the first direction D1 between the first ends 532a of the first yoke 51 and a magnetic field H2 in the second direction D2 between the second ends 542a of the second yoke 52 with an intensity instructed by the control unit 11 (see Figure 6). The permanent magnet 71 receives attractive or repulsive forces from the magnetic fields H1 and H2 generated in the first direction D1 and second direction D2. Depending on the intensity of the magnetic fields H1 and H2, the deflection member 7 is angle-controlled around the rotation center point Q so that it reaches a predetermined inclination angle. The magnetic path length of the first magnetic path C1 that includes a pair of first arm members 53, 53 and the gap G, and the magnetic path length of the second magnetic path C2 that includes a pair of second arm members 54, 54 and the gap G are set to be equal.

[0035] Furthermore, the first magnetic path C1 and the second magnetic path C2 shown in Figure 5 curve around the opening 553 (554) and intersect around the opening 553 (554). Therefore, the first magnetic path C1 and the second magnetic path C2 have approximately the same magnetic path length within the base member 55. In this way, the first yoke 51 and the second yoke 52 each include the base member 55 as a common component and are connected to each other by crossing a portion of their magnetic circuits so that the magnetic path lengths of their closed circuits are equal.

[0036] The detection circuit board 44 has a detection unit 441 which is a light-receiving element. The detection unit 441 is positioned on the opposite side of the deflection member 7 from the reflective surface 721a (see Figure 4, etc.). The detection unit 441 detects the laser light L2, which is the tilt detection light (second light) guided by the light guide unit 723.

[0037] Figure 7 is a schematic plan view of the detection unit 441 of this embodiment. The detection unit 441 is a quadrant photodetector (QPD, or quadrant photodiode) and has four light-receiving units 442a to 442d. The center points O of the light-receiving units 442a to 442d are arranged to lie on the axis P of the scanner device 2. The control unit 11 can detect the tilt (direction and angle of tilt) of the deflection member 7 from the position of the optical axis B (or center of gravity) of the laser beam L2 detected by the detection unit 441 or from the distribution position of the laser beam L2. Specifically, the control unit 11 has the function of detecting the tilt of the deflection member 7 based on the light reception intensity of the laser beam L2 detected by each light-receiving unit 442a to 442d of the quadrant photodetector.

[0038] For example, when the optical axis A and axis P of the laser beam L2 coincide, and the deflection member 7 is not tilted with respect to the optical axis A, the detection unit 441 is irradiated with laser beam L22, in which the center point O and the optical axis B approximately coincide. Furthermore, when the deflection member 7 is tilted to the left in the first direction D1 as shown in Figure 6, the laser beam L2 is refracted in the light guide unit 723 and emitted from the light guide unit 723 as laser beam L23, with an optical axis B that has shifted to the right of the incident optical axis A as shown in Figure 6. Since the optical axes A and B are parallel, the detection unit 441 shown in Figure 7 is irradiated with laser beam L23, in which the optical axis B is located to the right of the center point O. Conversely, when the deflection member 7 is tilted to the right in the first direction D1 as shown in Figure 6, the laser beam L2 is refracted in the light guide 723 and emitted from the light guide 723 as laser beam L21 having an optical axis B that has shifted to the left in Figure 6 relative to the optical axis A at the time of incidence. In this case, the detection unit 441 shown in Figure 7 is irradiated with laser beam L21 whose optical axis B is located to the left of the center point O.

[0039] The control unit 11 determines the tilt (direction and angle of tilt) of the deflection member 7 based on the ratio of the received light intensity of the laser light L2 received by each light receiving unit 442a to 442d. The control unit 11 can calculate the position of the optical axis B (or the centroid of the received light intensity) (positions in the first direction D1 and second direction D2) with respect to the center point O of the laser light L2 irradiated to the light receiving unit 442, and determine the tilt of the deflection member 7. The distance of the optical axis B with respect to the center point O corresponds to the tilt angle of the deflection member 7. In addition, the displacement components of the optical axis B in the first direction D1 and second direction D2 with respect to the center point O correspond to the direction of tilt of the deflection member 7. The control unit 11 may determine the correspondence between the position of the optical axis B with respect to the center point O and the tilt of the deflection member 7 by calculation, or it may determine it in advance by referring to a correspondence table.

[0040] It is desirable that the movement range of the laser beam L2 be no more than 50% of the irradiation diameter (radius) of the laser beam L2. That is, even when the deflection member 7 is tilted at its maximum tilt angle, the movement range of the optical axis B of the laser beam L2 is set to be no more than 50% of the irradiation diameter (radius) of the laser beam L2. This ensures the linearity of the detection signal as the angle of the deflection members 7 and 7A changes. Furthermore, even when affected by external disturbances such as changes over time or vibration, it is possible to prevent the irradiation area of ​​the laser beam L2 from exceeding the boundary line of the light receiving section 442a to 442d and falling outside the detectable range.

[0041] Figure 7 illustrates how the laser beam L2, having passed through the light guide 723, moves in the first direction D1. Similarly, when the laser beam L2 moves in the second direction D2, the tilt of the deflection member 7 with respect to the second direction D2 can be detected.

[0042] In this embodiment, since the optical axes A and B are parallel, the amount of movement of the laser beam L2 does not depend on the distance from the light guide surface 722a to the detection unit 441. Therefore, the detection unit 441 only needs to have the center point O of the light receiving units 442a to 442d positioned on the axis P. For this reason, the scanner device 2 has a high degree of freedom in the arrangement of the detection unit 441.

[0043] Note that the optical axis A and the center point O do not necessarily have to coincide. By determining the position of the optical axis B (center of gravity) of the laser beam L2 detected by the detection unit 441 when the deflection member 7 is not tilted, the relationship between the position of the optical axis B of the laser beam L2 detected by the detection unit 441 and the tilt of the deflection member 7 can be corrected in advance.

[0044] (Embodiment 2) Next, Embodiment 2 will be described. In Embodiment 2, the optical selection unit 721a2 is a rectangular region instead of a circular region. Therefore, the laser light L2 that passes through the optical selection unit 721a2 has a rectangular optical beam cross-sectional shape. Figure 8 shows the irradiation area of ​​the laser light L24 irradiated onto the light receiving unit 442 via the optical selection unit 721a2 which is arranged in a substantially square shape.

[0045] Thus, when using a rectangular-shaped laser beam L24, when the optical axis B (or center of gravity) of the laser beam L24 moves in the first direction D1 or the second direction D2, the extreme decrease in the light-receiving intensity of the light-receiving units 442a to 442d on the opposite side of the direction of movement of the optical axis B is reduced. Therefore, the linearity of the relationship between the amount of displacement of the optical axis B and the change in light-receiving intensity detected by the light-receiving units 442a to 442d can be improved. Consequently, the tilt amount of the deflection member 7 can be determined more accurately.

[0046] (Embodiment 3) Next, Embodiment 3 of the optical selection unit 721a2 will be described. The optical selection unit 721a2 of the deflection member 7 is formed in the shape of a long rectangle in a plan view of the reflective surface 721a. Figure 9 is a schematic diagram showing the change in the intensity distribution of the laser light L25 in the optical path from the light source 41 to the detection unit 441, as viewed from two orthogonal directions. The laser light L25 emitted from the light source 41 has different divergence angles in the two orthogonal directions. That is, the laser light L25 has a substantially elliptical optical beam cross-sectional shape. In the example of Figure 9, the changes in intensity distributions P1a and P1b when the long axis direction of the laser light L25 is viewed from the side along the first direction D1, and the changes in intensity distributions P2a and P2b when the short axis direction of the laser light L25 is viewed from the side along the second direction D2 are shown.

[0047] The component L25b of the laser light L25 in the short axis direction has a distribution that is more concentrated towards the optical axis A than the component L25a in the long axis direction. The optical selection unit 721a2 of Embodiment 3 has a long rectangular region in which the aperture width of the component L25b in the short axis direction is wider than that of the component L25a in the short axis direction. Figure 8 shows the irradiation area of ​​the laser light L25 irradiated onto the light receiving unit 442 via the optical selection unit 721a2 of Embodiment 3. The density within the irradiation area of ​​the laser light L25 represents the strength of the received light intensity. In this way, by narrowing the aperture width in the direction in which the intensity of the laser light L25 is relatively uniform and widening the aperture width in the direction in which the intensity of the laser light L25 is biased towards the optical axes A and B, it is possible to adjust so that the total amount of received light intensity in the first direction D1 and the second direction D2 is equal or close to equal. As a result, when the optical axis B of the laser light L25 detected by the detection unit 441 moves, the sensitivity difference between the first direction D1 and the second direction D2 can be reduced.

[0048] Furthermore, if the aperture shape of the light selection unit 721a2 is a long rectangle, it is preferable to set the orientation of the light selection unit 721a2 so that the long axis of the aperture shape aligns with the direction of the weaker light intensity of the laser beam L25.

[0049] (Embodiment 4) Next, Embodiment 4 will be described. In Embodiment 4, the light-selecting portion 721a2 of the deflection member 7 is formed in a substantially rectangular shape with each side concavely curved toward the axis P when viewed from above the reflective surface 721a. Figure 10 shows the irradiation area of ​​the laser light L26 irradiated onto the light-receiving portion 442 via the light-selecting portion 721a2, which is provided in a substantially rectangular shape with each side concavely curved. Thus, the laser light L2 that has passed through the light-selecting portion 721a2 has a light beam cross-sectional shape that is substantially rectangular with each side concavely curved toward the optical axes A and B.

[0050] (Embodiment 5) Next, Embodiment 5 will be described. In Embodiment 5, the light-selecting portion 721a2 of the deflection member 7 is formed in a substantially rectangular shape in a plan view of the reflective surface 721a, with each side projecting radially outward in a convex curve relative to the axis P. Figure 10 shows the irradiation area of ​​the laser light L27 irradiated onto the light-receiving portion 442 via the light-selecting portion 721a2, with the light-selecting portion 721a2 being provided in a substantially rectangular shape with each side projecting in a convex curve. Thus, the laser light L2 transmitted through the light-selecting portion 721a2 has a substantially rectangular light beam cross-sectional shape with each side projecting in a convex curve toward the optical axes A and B.

[0051] In this embodiment, a tilt detection method for a tilt detection device 4 has been described, which comprises a deflection member 7 having a reflective surface 721a that reflects laser light L1 (first light) and a light guide portion 723 that guides laser light L2 (second light) from one side to the other, and whose angle is controlled, and a detection unit 441 that detects the laser light L2 (second light) guided by the light guide portion 723. In this tilt detection method, the light guide portion 723 displaces the optical axis A position of the laser light L2 (second light) in accordance with the tilt of the deflection member 7, and the control unit 11 detects the tilt of the deflection member 7 from the optical axis B position of the laser light L2 (second light) detected by the detection unit 441.

[0052] With this configuration, the tilt detection device 4 and the tilt detection method can easily and accurately detect the tilt state of the controlled member (deflection member 7 or deflection member 7A described later).

[0053] (Embodiment 6) Next, the scanner device 2 of Embodiment 6 will be described. Figure 11 is an enlarged cross-sectional view of a part of the configuration of the scanner device 2 of Embodiment 6, which corresponds to the cross-sectional view IV-IV of Embodiment 1. The light source device 1 of Embodiment 6 is equipped with a deflection member 7A instead of the deflection member 7. Note that the description of the configuration of the deflection member 7A that is the same as that of the deflection member 7 will be omitted or simplified.

[0054] The deflection member 7A has a light selection section 712a2 on its reflective surface 721a that has a larger aperture diameter (or aperture width) than the light selection section 712a2 of Embodiment 1. The light selection section 712a2 provided on the reflective surface 721a of the deflection member 7A transmits the laser light L2 guided as detection light and guides it into the main body 721 and the supported part 722 on the emission surface 722a side.

[0055] Furthermore, the deflection member 7A has an optical selection section 722a1 (second optical selection section) and an optical selection section 722a2 (first optical selection section) on the emission surface 722a. The optical selection section 722a1 reflects or absorbs the laser light L2. The optical selection section 722a2 transmits the laser light L2. The optical selection section 722a1 is, for example, a metal reflective film or a dichroic filter. The optical selection section 722a2 is, for example, a dichroic filter or an area where the supported portion 722 is exposed (i.e., an area where nothing is provided).

[0056] The region of the emission surface 722a where the optical selection section 722a2 is provided is a circular region formed with a diameter smaller than the cross-sectional diameter of the laser beam L2 that has passed through the reflective surface 721a of the deflection member 7A. Therefore, the optical selection section 722a2 focuses the laser beam L2 to a smaller diameter and transmits it. The laser beam L2 that enters the region of the optical selection section 722a2 from the supported part 722 side is emitted from the emission surface 722a toward the detection unit 441 side.

[0057] When the tilt detection device 4 uses the deflection member 7A, the light selection unit 722a2 that focuses the laser beam L2 is located closer to the detection unit 441. Therefore, even if the misalignment between the optical axis B and the axis P is large, or if the laser beam L2 transmitted through the light guide unit 723 contains a diffusion component, the detection error of the optical axis B can be reduced, and the tilt of the deflection member 7A can be determined more accurately.

[0058] (Embodiment 7) Next, the light source device 1 of Embodiment 7 will be described. Figure 12 is a perspective view of the yoke member 5G of Embodiment 7. In the configuration of the scanner device 2, the light source device 1 includes a yoke member 5G instead of the yoke member 5 described in Embodiment 1. In the description of Embodiment 7, components similar to those of the light source device 1 of Embodiment 1 will be denoted by the same reference numerals, and their descriptions will be omitted or simplified.

[0059] The yoke member 5G has a configuration that omits the second base member 55-2 from the configuration of the yoke member 5. Specifically, the yoke member 5G comprises a first yoke 51G and a second yoke 52G positioned at a rotationally symmetric position around an axis P different from that of the first yoke 51G. The first yoke 51G each has a pair of first arm members 53, 53 and a base member 55G. The second yoke 52G also has a pair of second arm members 54, 54 and a base member 55G. The base member 55G has the first base member 55-1 described above. The method of connecting the first arm members 53 and the second arm members 54 to the first base member 55-1 is the same as that of the yoke member 5 in Embodiment 1.

[0060] The first magnetic path C1 in the yoke member 5G is closed by a gap G provided between a pair of first arm members 53, a base member 55G (first base member 55-1), and the first end 532a of the first arm member 53. The second magnetic path C2 is closed by a gap G provided between a pair of second arm members 54, a base member 55G (first base member 55-1), and the second end 542a of the second arm member 54.

[0061] Figure 13 is a cross-sectional view of the yoke member 5G in Figure 12, taken along line XIII-XIII. Similar to the VV cross-section of the base member 55 in Embodiment 1 (see Figure 5), the first magnetic path C1 and the second magnetic path C2 curve around the opening 553 and intersect around the opening 553. Therefore, the first magnetic path C1 and the second magnetic path C2 have approximately the same magnetic path length within the base member 55. Furthermore, the magnetic path length of the magnetic path in the first magnetic path C1 that includes the pair of first arm members 53, 53 and the gap G, and the magnetic path length of the magnetic path in the second magnetic path C2 that includes the pair of second arm members 54, 54 and the gap G are equal to each other. Accordingly, the first yoke 51G and the second yoke 52G are connected such that a portion of the magnetic circuit intersects and the magnetic path lengths of the closed circuits are equal.

[0062] By configuring the yoke member 5G in this way, the overall size of the yoke member 5G can be made smaller.

[0063] (Embodiment 8) Next, the light source device 1 of Embodiment 8 will be described. Figure 14 is a cross-sectional view of the base member 55H, the first arm member 53, and the second arm member 54 of the yoke member 5H of Embodiment 8, taken at a position corresponding to the XIII-XIII cross-sectional position of the yoke member 5G in Figure 12. In the description of Embodiment 8, components similar to those of the light source device 1 of Embodiment 7 will be given the same reference numerals, and their descriptions will be omitted or simplified.

[0064] The light source device 1 of Embodiment 8, in the configuration of the scanner device 2, includes a yoke member 5H instead of the yoke member 5G of Embodiment 7. That is, the yoke member 5H has a base member 55H instead of the base member 55G. This base member 55H has the same configuration as the first base member 55-1, but instead of a circular opening 553, it has a rectangular opening 553H, such as a square, that penetrates in the thickness direction of the base member 55H.

[0065] Since the yoke member 5H has a rectangular opening 553H, a wide irradiation area for the laser beam L2 irradiated onto the rectangular light-receiving unit 442 can be secured. Furthermore, even when irradiating laser beams L24 to L27 that are close to a rectangular shape, as shown in Figures 8 and 10, a wide detection range by the light-receiving unit 442 can be utilized. Therefore, the range of movement of the optical axis B of the laser beam L2 can be increased with respect to the tilt angle of the deflection member 7, thereby increasing the detection sensitivity of the light-receiving unit 442.

[0066] (Embodiment 9) Next, the light source device 1 of Embodiment 9 will be described. Figure 15 is a perspective view of the yoke member 5I of Embodiment 9. In the configuration of the scanner device 2, the light source device 1 is equipped with a yoke member 5I instead of the yoke member 5 described in Embodiment 1. In the description of Embodiment 9, components similar to those of the light source device 1 of Embodiment 1 will be denoted by the same reference numerals, and their descriptions will be omitted or simplified.

[0067] The yoke member 5I has a base member 55I formed in the shape of a rectangular plate instead of the base member 55, in contrast to the configuration of the yoke member 5. The base member 55I is configured as a base member corresponding to the first base member 55-1 of the base member 55. Specifically, the yoke member 5I comprises a first yoke 51I and a second yoke 52I positioned at a rotationally symmetric position around an axis P different from that of the first yoke 51I. The first yoke 51I each has a pair of first arm members 53, 53 and a base member 55I. The second yoke 52I also has a pair of second arm members 54, 54 and a base member 55I. The method of connecting the first arm members 53 and the second arm members 54 to the notch 551 of the base member 55I is the same as that of the yoke member 5 in Embodiment 1.

[0068] The first magnetic path C1 in the yoke member 5I is closed by a gap G provided between a pair of first arm members 53, a base member 55I, and the first end 532a of the first arm members 53. The second magnetic path C2 is closed by a gap G provided between a pair of second arm members 54, a base member 55I, and the second end 542a of the second arm members 54.

[0069] Furthermore, Figure 16 is a cross-sectional view of the yoke member 5I in Figure 15, taken along the line XVI-XVI. Similar to the VV cross-section of the base member 55 in Embodiment 1 (see Figure 5), the first magnetic path C1 and the second magnetic path C2 curve around the opening 553 and intersect around the opening 553. Therefore, the first magnetic path C1 and the second magnetic path C2 have approximately the same magnetic path length within the base member 55. Also, the magnetic path length of the magnetic path in the first magnetic path C1 that includes the pair of first arm members 53, 53 and the gap G, and the magnetic path length of the magnetic path in the second magnetic path C2 that includes the pair of second arm members 54, 54 and the gap G are equal to each other. Accordingly, the first yoke 51I and the second yoke 52I are connected so that the magnetic path lengths of the closed circuits are equal, with a portion of the magnetic circuit intersecting.

[0070] (Embodiment 10) Next, the light source device 1 of Embodiment 10 will be described. Figure 17 is a perspective view of the yoke member 5J of Embodiment 10. In the configuration of the scanner device 2, the light source device 1 is equipped with a yoke member 5J instead of the yoke member 5 described in Embodiment 1. In the description of Embodiment 10, components similar to those of the light source device 1 of Embodiment 1 are denoted by the same reference numerals, and their descriptions are omitted or simplified.

[0071] The yoke member 5J comprises a first yoke 51J and a second yoke 52J positioned at a rotationally symmetric position about an axis P different from that of the first yoke 51J. The first yoke 51J each has a pair of first arm members 53, 53 and a base member 55J. The second yoke 52J also has a pair of second arm members 54, 54 and a base member 55J. The base member 55J has a disc shape, similar to the second base member 55-2 described above. The first arm members 53 and the second arm members 54 are fixed to one surface 55J1 of the base member 55J with their respective ends (first base end 531a of the first arm member 53 and second base end 541a of the second arm member 54) in contact with each other. The first arm members 53 and the second arm members 54 are fixed to the base member 55J by fixing members (not shown).

[0072] The first magnetic path C1 in the yoke member 5J is closed by a gap G provided between a pair of first arm members 53, a base member 55J, and the first end 532a of the first arm members 53. The second magnetic path C2 is closed by a gap G provided between a pair of second arm members 54, a base member 55J, and the second end 542a of the second arm members 54.

[0073] The first magnetic path C1 and the second magnetic path C2 in the base member 55J, similar to the VV cross section of the base member 55 in Embodiment 1 (see Figure 5), curve around to avoid the opening 553 and intersect around the opening 553 (not shown). Therefore, the first magnetic path C1 and the second magnetic path C2 have approximately the same magnetic path length within the base member 55. Furthermore, the magnetic path length of the magnetic path in the first magnetic path C1 that includes the pair of first arm members 53, 53 and the gap G, and the magnetic path length of the magnetic path in the second magnetic path C2 that includes the pair of second arm members 54, 54 and the gap G are equal to each other. Accordingly, the first yoke 51J and the second yoke 52J are connected so that the magnetic path lengths of the closed circuits are equal by crossing a portion of the magnetic circuit.

[0074] By configuring the yoke member 5J in this way, the overall size of the yoke member 5J can be made smaller.

[0075] The above describes a configuration in which the light guide unit 723 displaces the position of the optical axis B of the second light (laser beam L2) in accordance with the tilt of the deflection members 7 and 7A, and the control unit 11 detects the tilt of the deflection members 7 and 7A from the optical axis position of the second light detected by the detection unit 441. Since the movement range of the laser beam L2 incident on the detection unit 441 is smaller than that when the deflection members 7 and 7A are reflected, the detection unit 441 can be made compact. Therefore, the tilt detection device 4 can detect the tilt state of the controlled member simply and with high accuracy.

[0076] Furthermore, yoke members 5, 5G to 5J were described, each comprising a first yoke 51, 51G, 51I, 51J having a pair of opposing first ends 532a, and a second yoke 52, 52G, 52I, 52J having a pair of opposing second ends 542a facing in a direction different from the opposing direction of the first ends 532a. In each yoke member 5, 5G to 5J, the first yokes 51, 51G, 51I, 51J and the second yokes 52, 52G, 52I, 52J are connected so that a portion of the magnetic circuit crosses and the magnetic path lengths are equal. Therefore, since the members constituting the first magnetic path C1 and the second magnetic path C2 are common, the yoke members 5, 5G to 5J and the scanner device 2 can be made smaller.

[0077] This concludes the description of the embodiments of the present disclosure, but the embodiments of the present disclosure are not limited to these embodiments.

[0078] For example, the detection unit 441 may be a two-part optical detection element if the rotation direction of the deflection members 7, 7A is unidirectional. Alternatively, the detection unit 441 may be an image sensor.

[0079] Furthermore, the optical selection unit 721a2 may be configured to transmit both the laser light L1 and the laser light L2.

[0080] Furthermore, the laser beam L2 may be irradiated onto the reflective surface 721a of the deflection members 7,7A as a distance measuring light together with the laser beam L1. In this case, the optical axis A of the laser beam L2 and the axis P of the scanner device 2 do not need to coincide. If the light guide unit 723 is configured such that the refraction angle of the laser beam L2 incident from the reflective surface 721a changes according to the tilt of the deflection members 7,7A, then the optical axis B of the laser beam L2 after it is emitted from the light guide unit 723 will change in accordance with the tilt of the deflection members 7,7A. Therefore, even when the laser beam L2 is guided together with the laser beam L1 as a distance measuring light, the tilt state of the deflection members 7,7A (controlled members) can be detected simply and with high accuracy.

[0081] Furthermore, the positional relationship between the light source 41 and the detection unit 441 shown in Figure 1 may be reversed. That is, the laser light L2 may be guided to enter from the surface shown as the output surface 722a of the deflection members 7, 7A (see Figure 6, etc.) and exit from the reflective surface 721a side.

[0082] Furthermore, the detection unit 441 may be provided between the deflection member 7 and the base member 55. This allows the overall scanner device 2 to be made more compact.

[0083] Furthermore, the ranging optical system 12 of this disclosure may also be used to guide light used for purposes other than ranging.

[0084] The structure of this disclosure can be illustrated as follows: [1] A first yoke having a pair of opposing first ends, A second yoke having a pair of second ends facing in a direction different from the opposing direction of the first end, Equipped with, The first yoke and the second yoke are connected such that a portion of the magnetic circuit crosses over each other and the magnetic path lengths are equal. Yoke member. [2] The first yoke comprises a pair of first arm members, each having the first end, and a base member connected to the side of the first arm members opposite to the first end. The second yoke comprises a pair of second arm members, each having the second end, and a base member connected to the side of the second arm members opposite to the second end. [1] The yoke member described above. [3] The base member has notches on two sets of opposing side edges, The first arm member and the second arm member are housed within the notch and connected to the base member. [2] The yoke member described above. [4] The base member comprises a plate-shaped first base member having notches on two sets of opposing side edges, and a plate-shaped second base member. The first arm member and the second arm member are housed within the notch and connected to the first base member. The second base member is positioned on top of the first base member so as to cover the ends of the first arm member and the second arm member housed in the notch. [2] The yoke member described above. [5] The yoke member described in [4], wherein the first arm member and the second arm member are housed in the notch, with their ends in contact with the inner surface of the first base member on the central side and with the ends of the second base member. [6] The yoke member according to claim 2, wherein the base member has a through-opening on an axis passing through a magnetic gap provided between a pair of first ends and between a pair of second ends. [7] The yoke member according to claim 2, wherein the base member is formed in the shape of a rectangular plate. [8] The yoke member according to claim 2, wherein the base member is formed in the shape of a disc. [9] An electromagnet having a yoke member as described in claim 1, and yoke coils provided on the first arm member of the first yoke and the second arm member of the second yoke, A reflective member positioned between a pair of first ends and between a pair of second ends, and whose angle is controlled by the electromagnet, A scanner device equipped with the following features. [Explanation of Symbols]

[0085] 1 Light source device 2. Scanner device 3. Mirror control device 4. Tilt detection device 5.5G~5J Yoke Member 6. Support Member 7,7A deflection member 11 Control Unit 12 Distance measuring optical system 13 Optical System Drive Circuit 14. Scanner device drive circuit 15 Angle sensor circuit 41 Light source 42 lenses 43 Deflection member 44 Detection circuit board 51, 51G, 51I, 51J First York 52, 52G, 52I, 52J Second York 53 First arm member 54 Second arm member 55,55G~55J base material 55-1 First base member 55-2 Second base member 55J1 side 55a Side edge 61 Opening 62 recesses 63 Outer surface 71 Permanent Magnets 72 Reflector 441 Detection Unit 442, 442a~442d Light receiving section 531 Torso 531a First proximal end 532 Protrusion 532a First end 533 York Coil 553H opening 541 Torso 541a Second proximal end 542 Protrusion 542a Second end 543 York Coil 551 Notch 551a Inner surface 551b Inside 552 Escape Club 553 Opening 554 Opening 621 Bottom 631 Tsuba (guard) 711 Opening 712a2 Optical Selection Section 721 Main body 721a reflective surface 721a1 Light Selection Unit 721a2 Light Selection Unit 722 Supported part 722a Output surface 722a1 Light Selection Unit 722a2 Optical Selection Section 723 Light guide section A,B optical axis C1 First magnetic path C2 Second magnetic path D1 First direction D2 Second direction G Gap L1 (L11, L12) laser light L2 (L21~L27, L25a, L25b) laser light L3 reflected light O center point P axis Q: Center of rotation

Claims

1. A first yoke having a pair of opposing first ends, A second yoke having a pair of second ends facing in a direction different from the direction of opposition of the first end, The first yoke and the second yoke are connected such that a portion of the magnetic circuit crosses over each other and the magnetic path lengths are equal. The first yoke comprises a pair of first arm members, each having the first end, and a base member connected to the side of the first arm members opposite to the first end. The second yoke comprises a pair of second arm members, each having the second end, and a base member connected to the side of the second arm members opposite to the second end. The base member has notches on two sets of opposing side edges, The first arm member and the second arm member are housed within the notch and connected to the base member. Yoke member.

2. A first yoke having a pair of opposing first ends, A second yoke having a pair of second ends facing in a direction different from the direction of opposition of the first end, The first yoke and the second yoke are connected such that a portion of the magnetic circuit crosses over each other and the magnetic path lengths are equal. The first yoke comprises a pair of first arm members, each having the first end, and a base member connected to the side of the first arm members opposite to the first end. The second yoke comprises a pair of second arm members, each having the second end, and a base member connected to the side of the second arm members opposite to the second end. The base member comprises a plate-shaped first base member having notches on two sets of opposing side edges, and a plate-shaped second base member. The first arm member and the second arm member are housed within the notch and connected to the first base member. The second base member is positioned on top of the first base member so as to cover the ends of the first arm member and the second arm member housed in the notch. Yoke member.

3. The yoke member according to claim 2, wherein the first arm member and the second arm member are housed in the notch, with their ends in contact with the inner surface of the first base member on the central side and with the second base member on the second side.

4. The yoke member according to any one of claims 1 to 3, wherein the base member has a through-opening on an axis passing through a magnetic gap provided between a pair of first ends and between a pair of second ends.

5. The yoke member according to any one of claims 1 to 3, wherein the base member is formed in the shape of a rectangular plate.

6. The yoke member according to any one of claims 1 to 3, wherein the base member is formed in the shape of a disc.

7. An electromagnet having a yoke member according to any one of claims 1 to 3, and a yoke coil provided on the first arm member of the first yoke and the second arm member of the second yoke, A deflection member positioned between a pair of first ends and between a pair of second ends, and whose angle is controlled by the electromagnet, A scanner device equipped with the following features.

8. A scanner device comprising a yoke member and a deflection member, The yoke member comprises a first yoke having a pair of opposing first ends, and a second yoke having a pair of opposing second ends facing in a direction different from the opposing direction of the first ends. The first yoke and the second yoke are connected such that a portion of the magnetic circuit crosses over each other and the magnetic path lengths are equal. The first yoke comprises a pair of first arm members, each having the first end, and a base member connected to the side of the first arm members opposite to the first end. The second yoke comprises a pair of second arm members, each having the second end, and a base member connected to the side of the second arm members opposite to the second end. The base member has an opening that penetrates on an axis passing through a magnetic gap provided between a pair of first ends and between a pair of second ends, The deflection member is provided between the pair of first ends of the first yoke and between the pair of second ends of the second yoke. The light emitted from the deflection member is configured to pass through the opening of the base member. Scanner device.

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