Multi-degree-of-freedom force / torque sensor and robot

Abstract

To address the need to improve 6 degree of freedom force / torque sensors.SOLUTION: A multi-degree-of-freedom force / torque sensor (100) is provided. This multi-degree-of-freedom force / torque sensor includes a first rigid plate (10), a second rigid plate (20), a plurality of elastic members (30) connected between the first rigid plate and the second rigid plate, and signal pairs provided between the first rigid plate and the second rigid plate. The signal pairs are arranged to detect relative displacement of the first rigid plate and the second rigid plate in multiple directions.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to the field of force-torque sensors, and more specifically, to a multi-degree-of-freedom force-torque sensor and a robot. [Background Art]

[0002] Most conventional force-torque sensors use contact strain gauges, which convert strain of a local structure caused by an overall force and / or torque into an electrical signal that is subsequently amplified. Strain gauges are normally bonded to such local structures, a corresponding electrical signal is obtained based on the sensitivity of the strain gauges to deformation, and finally the force and torque applied to the force-torque sensor are determined. For example, the Chinese invention with invention application number 201210589784.7 discloses such a six-dimensional force-torque sensor having a strain component bonded to a mechanical structure. However, each strain gauge is only sensitive to its own deformation pattern and is not sensitive to other deformations. This prevents these strain gauges from being widely used in robots, the automation industry, and laboratories.

[0003] Recently, there have been several products and studies focusing on non-contact sensing methods, such as capacitance, inductance, and optical solutions. For example, the Korean invention (publication number KR10201130126082A) and the US patent (patent number US10260970B2) disclose such force and torque sensors, respectively. Unlike placing a conversion member (e.g., strain gauge) that converts deformation into an electrical signal in a localized structure where the most severe deformation is likely to occur, such solutions place the conversion member at the location where the displacement is greatest, converting the sensed displacement into an electrical signal. Different application scenarios may require different sums of three orthogonal forces and three orthogonal torques, so the required mechanical structure is designed to have the ability to balance these forces and torques. However, there is little prior art that can prove that such a design has such ability. In practice, the deformation of the structure due to different forces and torques is severely coupled, making it difficult to independently adjust the detection capability of a sensor corresponding to a single force and torque without affecting other forces and torques.

[0004] Therefore, the 6-degree-of-freedom force / torque sensor needs improvement. [Overview of the project] [Problems that the invention aims to solve]

[0005] The following is a brief description to provide a basic understanding of various aspects of the present invention. This invention is not intended to be a broad overview of all anticipated aspects, nor to identify the requirements or key elements of all aspects, nor to define the scope of any or all aspects. Its sole purpose is to present some concepts of one or more aspects in a simplified form as an introduction to the more detailed descriptions that will be presented later. [Means for solving the problem]

[0006] According to one embodiment of the present invention, a multi-degree-of-freedom force-torque sensor is provided. This multi-degree-of-freedom force-torque sensor may include a first rigid plate, a second rigid plate, a plurality of elastic members connected between the first and second rigid plates, and a plurality of signal pairs positioned between the first and second rigid plates to detect relative displacements between the first and second rigid plates in a plurality of directions. Each of the plurality of elastic members may include a first pillar and a second pillar, the first end of the first pillar being connected to the first rigid plate, the first end of the second pillar being connected to the second rigid plate, and the first and second pillars each substantially extending in the axial direction of the multi-degree-of-freedom force-torque sensor. Each of the plurality of elastic members may further include a coupling for connecting the first and second pillars, the coupling being connected to the second end of the first pillar and the second pillar, and at least a portion of which substantially extends in a direction perpendicular to the axial direction of the multi-degree-of-freedom force-torque sensor.

[0007] According to another embodiment of the present invention, a multi-degree-of-freedom force-torque sensor is provided. This multi-degree-of-freedom force-torque sensor includes a first rigid plate, a second rigid plate, a plurality of elastic members connected between the first and second rigid plates, and a plurality of signal pairs positioned between the first and second rigid plates and arranged to detect relative displacements between the first and second rigid plates in a plurality of directions, wherein the plurality of elastic members are positioned at the edges of the first and second rigid plates. Each of the plurality of elastic members may include a first pillar and a second pillar, the first end of the first pillar being connected to the first rigid plate, and the first end of the second pillar being connected to the second rigid plate, and the first and second pillars each substantially extending in the axial direction of the multi-degree-of-freedom force-torque sensor. Each of the plurality of elastic members may further include a connecting portion for connecting the first and second pillars, the connecting portion being molded such that a first length is greater than the axial height of the multi-degree-of-freedom force-torque sensor. This first length is the length of the projection of the connecting portion onto a plane perpendicular to the axial direction of the multi-degree-of-freedom force / torque sensor.

[0008] According to another embodiment of the present invention, a robot is provided. The robot includes a plurality of sequentially connected links and end effectors, the end effectors including any of the multi-degree-of-freedom force / torque sensors described above. [Brief explanation of the drawing]

[0009] The following describes embodiments of the present invention in detail with reference to the attached drawings, which will help to better understand the present invention.

[0010] [Figure 1] Figure 1 is a schematic diagram of a multi-degree-of-freedom force / torque sensor according to one embodiment of the present invention. [Figure 2] Figure 2 is a schematic cross-sectional view of an exemplary elastic member applicable to the multi-degree-of-freedom force / torque sensor shown in Figure 1. [Figure 3]Figure 3 is a schematic diagram showing a cross-sectional view of the semi-ring-shaped connecting section. [Figure 4] Figure 4 is a schematic diagram showing a cross-sectional view of a connecting portion according to one example of the present invention. [Figure 5] Figure 5 is a schematic diagram showing a cross-sectional view of a connecting portion according to another example of the present invention. [Figure 6] Figure 6 is a schematic diagram showing a cross-sectional view of a beam-shaped connecting portion according to another example of the present invention. [Figure 7] Figure 7 is a schematic diagram of another elastic member used in a multi-degree-of-freedom force / torque sensor according to an embodiment of the present invention. [Figure 8] Figure 8 is a schematic diagram showing a cross-sectional view of the connecting portion 803 shown in Figure 7. [Figure 9] Figure 9 is a perspective view of a multi-degree-of-freedom force / torque sensor 200 according to one embodiment of the present invention. [Figure 10] Figure 10 shows an exemplary robot 900 including a multi-degree-of-freedom force / torque sensor according to an embodiment of the present invention. [Modes for carrying out the invention]

[0011] The following describes various different configurations in conjunction with the detailed descriptions of the attached drawings, but is not intended to represent only the configurations in which the concepts described herein can be implemented. The detailed descriptions include specific details to ensure a thorough understanding of the various concepts. However, it will be apparent to those skilled in the art that these concepts can be implemented without these specific details.

[0012] Figure 1 is a schematic diagram of a multi-degree-of-freedom force / torque sensor 100 according to one embodiment of the present invention. As shown in the figure, the multi-degree-of-freedom force / torque sensor 100 includes a first rigid plate 10, a second rigid plate 20, a plurality of elastic members 30, and a plurality of signal pairs (not shown). The plurality of elastic members 30 are provided between the first rigid plate 10 and the second rigid plate 20. Specifically, each of the plurality of elastic members 30 is connected to the first rigid plate 10 via one end, for example, and to the second rigid plate 20 via the other end. The plurality of signal pairs are arranged on the first rigid plate 10 and the second rigid plate 20 to detect the relative displacement of these two plates.

[0013] In one example, when an external force acts on the multi-degree-of-freedom force / torque sensor 100, the first rigid plate 10 and the second rigid plate 20 are held in place so that their shape does not change significantly due to their high rigidity. The elastic member 30 may deflect and deform in the horizontal and / or vertical directions, causing the first rigid plate 10 and the second rigid plate 20 to move relative to each other. The material of the elastic member 30 is generally a metallic material, such as stainless steel, but in some embodiments, other materials such as plastic or rubber may be used. The arranged signal pair can detect the relative movement between the first rigid plate 10 and the second rigid plate 20.

[0014] Figure 2 is a schematic cross-sectional view of an exemplary elastic member applicable to the multi-degree-of-freedom force / torque sensor 100 shown in Figure 1. As shown in Figure 2, the elastic member 30 includes a first pillar 301, a second pillar 302, and a connecting section 303. The first pillar 301 is connected to the first rigid plate 10 via its first end 301a, and the second pillar 302 is connected to the second rigid plate 20 via its first end 302a. The first pillar 301 is connected to the connecting section 303 via its second end 301b, and the second pillar 302 is connected to the connecting section 303 via its second end 302b. As shown in the figure, the first pillar 301 and the second pillar 302 are positioned to extend substantially in the axial direction of the multi-degree-of-freedom force / torque sensor 100. For simplicity of explanation, Figure 2 shows a coordinate system including the X and Z axes associated with the sensor 100, where the Z axis is parallel to the axial direction of the multi-degree-of-freedom force / torque sensor 100. The Y-axis (not shown) is perpendicular to the plane formed by the X-axis and Z-axis. Hereafter, the X-axis, Y-axis, and Z-axis will also be referred to as the X, Y, and Z directions, and the plane perpendicular to the Z-axis will also be referred to as the XY plane.

[0015] The phrase "substantially extending in the axial direction of the multi-degree-of-freedom force / torque sensor 100" should be understood to mean that the first pillar 301 and the second pillar 302 do not need to strictly extend in the axial direction of the multi-degree-of-freedom force / torque sensor 100. Furthermore, in this specification, the term "pillar" refers to a member positioned between the plate and the connecting portion. A columnar shape is one possible shape, but it is not limited to this. For example, pillars 301 and 302 may be helical shapes extending in the axial direction of the multi-degree-of-freedom force / torque sensor 100. According to this example, at least a portion of the connecting portion 303 extends in a direction substantially perpendicular to the axial direction of the multi-degree-of-freedom force / torque sensor 100.

[0016] In some embodiments, the connecting portion has an annular shape. The connecting portion shown in Figure 2 is annular in shape. As shown in Figure 2, one side of the outer surface of the connecting portion 303 is connected to the second end 301b of the first pillar 301, and the other side is connected to the second end 302b of the second pillar 302. Figure 3 is a schematic cross-sectional view of a semi-annular connecting portion 403. As shown in the figure, one end of the semi-annular connecting portion 403 is connected to the second end 301b of the first pillar 301, and the other end is connected to the second end 302b of the second pillar 302.

[0017] In some examples, the connection may include a first part and a second part, the first part extending substantially perpendicular to the axial direction of the multi-degree-of-freedom force / torque sensor. Figure 4 is a schematic cross-sectional view of a connection 503 according to this example. As shown in Figure 4, the first part 501 extends substantially perpendicular to the axial direction of the multi-degree-of-freedom force / torque sensor, i.e., in the XY plane of the coordinate system in the figure, and the second parts 502a and 502b extend from the first part 501 to the second end 302b of the second pillar 302, respectively. For example, the second parts 502a and 502b extend from both ends of the first part 501 to the second end 302b of the second pillar 302, respectively. The first pillar 301 is connected in the middle of the first part 501. Figure 5 is a schematic cross-sectional view of another connection 603 according to this example. As shown in Figure 5, the first part includes a first sub-part 601a and a second sub-part 601b, the first sub-part 601a being connected to the second end 301b of the first pillar 301, and the second sub-part 601b being connected to the second end 302b of the second pillar 302. The first sub-part and the second sub-parts 601a and 601b each extend in a direction substantially perpendicular to the axial direction of the multi-degree-of-freedom force / torque sensor 100, i.e., extending in the XY plane of the coordinate system in the figure. The second part 602 is connected between the first sub-part 601a and the second sub-part 601b. In the example shown in Figure 5, the second part 602 is connected to the end of the first sub-part 601a and the end of the second sub-part 601b, with the two ends located in different extending directions of the two sub-parts. In actual use, the second part 602 may be connected to the first and second subparts at other locations, and the second part 602 can be configured in any suitable shape as required.

[0018] Fig. 6 schematically shows a replaceable schematic cross-sectional view of an example connecting portion, wherein the connecting portion is beam-shaped. As shown in Fig. 6, the connecting portion 703 is a beam substantially perpendicular to the axial direction of the multi-degree-of-freedom force and torque sensor 100, that is, a beam located in the XY plane of the coordinate system in the figure. One side of the connecting portion 703 is connected to the first pillar 301, and the opposite side is connected to the second pillar 302.

[0019] The connecting portions shown in Figs. 3, 4, 5, and 6 are only used to schematically illustrate different variants of the connecting portion, and are not to be regarded as the exact shape and scale of the connecting portion.

[0020] According to some examples of the present invention, the plurality of elastic members are arranged at edges of the first rigid plate 10 and the second rigid plate 20. Meanwhile, in some other embodiments of the present invention, the plurality of elastic members may be arranged at positions close to the center of the first rigid plate 10 and the second rigid plate 20. When the elastic members are arranged close to the center of the rigid plates 10 and 20, the torque sensing capability of the multi-degree-of-freedom force and torque sensor 100 is low; when the elastic members are arranged at the edges of the rigid plates 10 and 20, the torque sensing capability of the multi-degree-of-freedom force and torque sensor 100 is high. By adjusting the radial position of the elastic members in the multi-degree-of-freedom force and torque sensor 100, the force and torque sensing capability of the multi-degree-of-freedom force and torque sensor 100 can be adjusted to an appropriate ratio.

[0021] Referring to Fig. 1, the plurality of elastic members 30 are arranged at edges of the first rigid plate 10 and the second rigid plate 20 of the multi-degree-of-freedom force and torque sensor 100. Each of the plurality of elastic members 30 includes a first pillar 301 and a second pillar 302 that substantially extend in the axial direction of the multi-degree-of-freedom force and torque sensor 100, and a connecting portion 303 that substantially extends in a direction perpendicular to the axial direction of the multi-degree-of-freedom force and torque sensor 100.

[0022] When a force is applied to the multi-degree-of-freedom force / torque sensor 100, the elastic member 30 deforms in the Z, X, or Y direction (see Figures 2 to 6). The deformation in the X and Y directions allows the signal pairs provided on the multi-degree-of-freedom force / torque sensor 100 to sense forces in the X and Y directions and torque around the Z axis. The deformation in the Z direction allows the signal pairs of the multi-degree-of-freedom force / torque sensor 100 to sense torques around the X and Y axes and force along the Z direction. If there is a requirement for different force / torque sensing ranges for the multi-degree-of-freedom force / torque sensor 100, this requirement can be met by adjusting the height of the two pillars and connecting portion 303 in the Z axis, the length in the XY plane, etc.

[0023] According to some other embodiments of the present invention, the connecting portion is formed such that a first length L of the connecting portion is greater than the axial height H of the multi-degree-of-freedom force-torque sensor of the connecting portion, where the first length L is the length of the connecting portion projected in a plane perpendicular to the axial direction of the multi-degree-of-freedom force-torque sensor. Referring to Figures 1 and 7, the multi-degree-of-freedom force-torque sensor includes a first rigid plate 10, a second rigid plate 20, and a plurality of elastic members 30, the elastic members 30 being connected between the first rigid plate 10 and the second rigid plate 20. Each of the plurality of elastic members 30 includes a first pillar 301 and a second pillar 302. The first pillar 301 has its first end 301a connected to the first rigid plate 10. The second pillar 302 has its first end 302a connected to the second rigid plate 20. Each of the first pillar 301 and the second pillar 302 extends substantially in the axial direction of the multi-degree-of-freedom force / torque sensor 100, i.e., in the XY plane of the coordinate system in the figure. The connecting portion 803 is connected to the second end 301b of the first pillar 301 and the second end 302b of the second pillar 302. In this embodiment, the shape of the connecting portion 803 causes the first length L of the connecting portion 803 to be greater than the height H in the axial direction of the multi-degree-of-freedom force / torque sensor 100, and the first length L is the length of the projection of the connecting portion 803 in a plane perpendicular to the axial direction of the multi-degree-of-freedom force / torque sensor 100 (i.e., the XY plane of the coordinate system in Figure 7). Multiple signal pairs (not shown) provided between the first rigid plate 10 and the second rigid plate 20 are arranged to detect the relative displacement of the first rigid plate 10 and the second rigid plate 20 in multiple directions. According to the present invention, the shape of the connecting portion described above in conjunction with Figures 2 to 6 is also applicable to the multi-degree-of-freedom force / torque sensor described in conjunction with Figures 1 and 7. No further modifications of the connecting portion will be described as long as the first length L is greater than the height H.

[0024] Figure 8 is a schematic diagram showing a cross-sectional view of the connecting portion 803 shown in Figure 7. As shown in Figure 8, the contact end 3036 is the connecting portion 803 It is provided on one side of the outer surface, and the other contact end 3038 is the connecting part 803 It is provided on the other side of the outer surface. The second end 301b of the first pillar 301 is connected via the contact end 3036 to the connecting part803 The second end 302b of the second pillar 302 is connected to the connecting part via the contact end 3038. 803 It connects to the network.

[0025] Connecting part 803 The reason why the connecting part has a relatively long first length L and a relatively short height H is that 803 This means that the majority of the connection part extends perpendicular to the axial direction of the multi-degree-of-freedom force / torque sensor 100, and a small portion extends in the axial direction of the multi-degree-of-freedom force / torque sensor 100. 803 Because the majority of it extends in the XY plane, the resulting beam bending effect contributes to the deflection in the Z direction. Connecting part 803 The thinner and longer the aforementioned portion, the lower the rigidity in the Z direction. As shown in Figure 7, with respect to deflection in the X direction, the connecting portion 803 mainly rotates in the XY plane, and the rigidity of the connection between the connecting portion 803 and the pillar determines the resistance to rotation. Specifically, with respect to deflection in the Y direction, the connecting portion can (i) twist around the X axis and (ii) bend around the Z axis. Let us take the annular connecting portion shown in Figure 7 as an example. In this example, the annular connecting portion includes a long annular portion, which contributes to the deflection of the beam in the Y direction. The thicker the annular shape is in the Z direction and the thinner it is in the Y direction (i.e., the annular shape is similar to a belt in the XZ plane), the more likely beam bending deflection in the Y direction (which corresponds to case (i) above) is to occur. The thicker this annular shape is in the Y direction and the thinner it is in the Z direction (i.e., the annular shape resembles a belt in the XY plane), the more likely the connecting part is to twist or buckle and deflect around the Y direction (corresponding to case (ii) above).

[0026] Furthermore, in each of the above examples, elastic members may be provided at the edges of the first and second rigid plates. This contributes to reducing resistance from the sensor to torque and increasing the sensing range for torque. Simply put, the position of the elastic member can affect the rigidity and sensing range of a multi-degree-of-freedom force / torque sensor. When the elastic member is positioned towards the center of the multi-degree-of-freedom force / torque sensor, it does not affect the rigidity and sensing range in the Z-axis, but the torque performance around the X and Y axes is reduced because the torque arm becomes shorter. This principle also applies to force in the X and Y directions and torque around the Z-axis.

[0027] It can be understood that external forces and torques applied to a multi-degree-of-freedom force-torque sensor can be converted into local vertical and horizontal forces in an elastic member. Therefore, the shapes of the first pillar, the second pillar, and the connecting parts, as well as their interconnections, can be adjusted to adapt to their local forces.

[0028] In each of the above embodiments and examples, the signal pair may be positioned, for example, between the first rigid plate 10 and the second rigid plate 20, and parallel to the elastic member 30. Each signal pair includes a signal transmitter and a signal receiver. As an example, if six signal channels are provided, three of them may be positioned to sense the relative horizontal displacement of the elastic member 30, and the other three channels may be positioned to sense the relative vertical displacement of the elastic member 30. Thus, from the sensed information, the force applied to the sensor in the X, Y, and Z directions, and the torque around the X, Y, and Z axes can be calculated. It can be understood that the method of attaching the signal pair to the sensor is determined by those skilled in the art based on the actual structure of the sensor, as long as the above functions can be realized. The method and location of attaching the signal pair to the sensor are not limited to the disclosure herein.

[0029] Figure 9 is a perspective view of a multi-degree-of-freedom force / torque sensor 200 according to one embodiment of the present invention. As shown in the figure, the sensor 200 includes a first rigid plate 11, a second rigid plate 22, and six elastic members 33. The six elastic members 33 are located between the first rigid plate 11 and the second rigid plate 22. Specifically, the six elastic members 33 are located on the outer edges of the first rigid plate 11 and the second rigid plate 22, and at the same time, the elastic members 33 are connected to the first rigid plate 11 and the second rigid plate 22, respectively. As the elastic members 33, each of the elastic members described above in conjunction with the drawings can be used. For brevity, the shape of the elastic members will not be described further. According to the example shown in Figure 9, a signal pair is provided between the first rigid plate 11 and the second rigid plate 22, with part of the signal pair used to sense the local horizontal displacement of the elastic member 33 and the other part of the signal pair used to sense the local vertical displacement of the elastic member 33. The number of elastic members 33 is not limited to six. In practice, six or more or fewer than six elastic members can be used.

[0030] Figure 10 shows an exemplary robot 900 including a multi-degree-of-freedom force / torque sensor according to an embodiment of the present invention. As shown in Figure 10, a plurality of links 901 and end effectors 902 are connected in sequence. The end effectors 902 include a multi-degree-of-freedom force / torque sensor for detecting external forces and torques applied to the end effector 902. Here, the multi-degree-of-freedom force / torque sensor can be one of the multi-degree-of-freedom force / torque sensors described above in conjunction with each example, for example, multi-degree-of-freedom force / torque sensor 100 or 200. In some other embodiments, the multi-degree-of-freedom force / torque sensor can also be installed on other members of the robot 900. For example, the multi-degree-of-freedom force / torque sensor can be installed on the joint actuators (not labeled) of the robot 900.

[0031] The embodiments described above illustrate only a few aspects of the present invention, and while their descriptions are specific and detailed, this should not be understood as limiting the scope of the patent. It should be noted that those skilled in the art can make several further modifications and improvements without departing from the concept of the present invention, and all of these fall within the scope of protection of the present invention. Therefore, the scope of protection of the patent for the present invention should be based on the attached claims. [Explanation of Symbols]

[0032] 10, 11 First rigid plate 20, 22 Second rigid plate 30, 33 Elastic members 100, 200 Force / Torque Sensor 301 First Pillar 301a 1st end 301b 2nd end 302 Second pillar 302a 1st end 302b 2nd end 303 Connecting part 403 Connection section 501 Part 1 502a Part 2 502b Part 2 503 Connection part 601a First Subsection 601b Second Subsection 602 Part 2 603, 703, 803 connection part 900 robots 901 Link 902 End Effector 3036, 3038 contact end

Claims

1. A multi-degree-of-freedom force / torque sensor, First rigid plate and The second rigid plate and A plurality of elastic members connected between the first rigid plate and the second rigid plate, each of which is A first pillar and a second pillar, wherein the first end of the first pillar is connected to the first rigid plate, and the first end of the second pillar is connected to the second rigid plate, and the first pillar and the second pillar each substantially extend in the axial direction of the multi-degree-of-freedom force / torque sensor, A plurality of elastic members comprising: a connecting portion arranged to connect the first pillar and the second pillar, wherein at least a portion of the connecting portion substantially extends in a direction perpendicular to the axial direction of the multi-degree-of-freedom force / torque sensor; The system includes a plurality of signal pairs positioned between the first rigid plate and the second rigid plate, which are arranged to detect the relative displacement between the first rigid plate and the second rigid plate in a plurality of directions, At least a portion of the connecting portion is higher than the second end of the first pillar in the axial direction of the multi-degree-of-freedom force / torque sensor, and / or at least a portion of the connecting portion is lower than the second end of the second pillar in the axial direction of the multi-degree-of-freedom force / torque sensor. The connecting portion has a semi-annular shape, and one end of the connecting portion is connected to the second end of the first pillar, and the other end is connected to the second end of the second pillar. A multi-degree-of-freedom force / torque sensor characterized by its features.

2. The connecting portion is formed such that its first length is greater than the axial height of the connecting portion in the multi-degree-of-freedom force / torque sensor, and the first length is the length of the connecting portion projected onto a plane perpendicular to the axial direction of the multi-degree-of-freedom force / torque sensor. The multi-degree-of-freedom force / torque sensor according to feature 1.

3. Each of the aforementioned plurality of signal pairs includes a signal transmitter and a signal receiver, The multi-degree-of-freedom force / torque sensor according to feature 1.

4. The plurality of elastic members are arranged on the edges of the first rigid plate and the second rigid plate in the circumferential direction of the multi-degree-of-freedom force / torque sensor. The multi-degree-of-freedom force / torque sensor according to feature 1.

5. A contact end is provided on one side of the outer surface of the connecting portion, and another contact end is provided on the other side of the outer surface of the connecting portion, and the second end of the first pillar and the second end of the second pillar are connected to the first contact end and the other contact end, respectively. The multi-degree-of-freedom force / torque sensor according to feature 1.

6. A robot comprising a plurality of sequentially connected links and end effectors, wherein the end effectors include a multi-degree-of-freedom force / torque sensor as described in any one of claims 1 to 5. A robot characterized by the following features.

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