Imaging device and inspection system

Abstract

The imaging device according to the present invention comprises a lens unit and an image sensor, and guides light from an object to be imaged to the image sensor by the lens unit, further comprising a slit extending in a first direction and into which light from the object to be imaged can be incident, and a plurality of mirror units extending in the first direction and guiding the incident light from the slit to the lens unit while reflecting it, wherein when viewed in the first direction, the lens unit and the plurality of mirror units are arranged such that the direction in which the path of light incident on the slit extends and the direction in which the path of light that has passed through the lens unit extends are parallel to a second direction which is different from the first direction.

Description

Technical Field

[0001] The present invention mainly relates to an image pickup apparatus.

Background Art

[0002] Patent Documents 1 and 2 disclose a configuration of an image pickup apparatus that guides light from an imaging target to an image sensor via a lens unit to perform imaging. Such an image pickup apparatus can be applied to, for example, an inspection system, an evaluation system, and the like.

Prior Art Literature

Patent Documents

[0003]

Patent Document 1

Patent Document 2

Summary of the Invention

Problem to be Solved by the Invention

[0004] In the configurations of Patent Documents 1 and 2, a plurality of mirror units are arranged on an optical path from the imaging target to the lens unit, and depending on the arrangement mode of these mirror units, this may cause an increase in size of the image pickup apparatus. In general, miniaturization of image pickup apparatuses is one of the problems in the present technical field.

[0005] An object of the present invention is to further miniaturize an image pickup apparatus.

Means for Solving the Problem

[0006] One aspect of the present invention relates to an image pickup apparatus, wherein the image pickup apparatus is: An image pickup apparatus comprising a lens unit and an image sensor, wherein the lens unit guides light from an imaging target to the image sensor, the image pickup apparatus comprising: a slit extending in a first direction and allowing incidence of light from the imaging target; A plurality of mirror units extending in the first direction and guiding the incident light from the slit to the lens unit while reflecting it, Furthermore, When viewed in the first direction, the lens unit and the plurality of mirror units are arranged such that the direction in which the path of light incident on the slit extends and the direction in which the path of light passing through the lens unit extends are parallel to a second direction different from the first direction. 、 Let one of the plurality of mirror units be the Kth mirror unit, another that reflects light toward the Kth mirror unit be the (K-1)th mirror unit, and another that reflects light from the Kth mirror unit be the (K+1)th mirror unit. When viewed in the first direction, the Kth mirror unit is positioned spaced apart from the (K-1)th mirror unit and the (K+1)th mirror unit in the second direction. doing It is characterized by the following: [Effects of the Invention]

[0007] According to the present invention, it becomes possible to further miniaturize the imaging device. [Brief explanation of the drawing]

[0008] [Figure 1A] This is a diagram showing the configuration of the imaging device and inspection system according to the embodiment. [Figure 1B] This is a cross-sectional perspective view showing the cross-sectional structure of the imaging device. [Figure 2] This is a schematic side view showing an example of the internal structure of an imaging device. [Figure 3] This is a schematic top view diagram showing an example of the internal structure of an imaging device. [Figure 4] This is a schematic side view showing another example of the internal structure of an imaging device. [Modes for carrying out the invention]

[0009] The embodiments will be described in detail below with reference to the attached drawings. Note that the following embodiments do not limit the invention as defined in the claims, and not all combinations of features described in the embodiments are essential to the invention. Two or more features from among those described in the embodiments may be arbitrarily combined. Furthermore, identical or similar configurations will be given the same reference numeral, and redundant descriptions will be omitted.

[0010] ≪First Embodiment≫ <About the inspection system> Figure 1A is a diagram showing the configuration of the imaging device 1 and inspection system SY according to an embodiment. Figure 1B is a cross-sectional perspective view showing the cross-sectional structure of the imaging device 1. The imaging device 1 can be applied to the inspection system SY together with a transport device 2 and an illumination device 3. The transport device 2 transports the object to be imaged OB, thereby scanning the object to be imaged OB with respect to the slit 101 (see Figure 2), which will be described later. The illumination device 3 is positioned to the side of the imaging device 1 and irradiates the object to be imaged OB with light. In this embodiment, a pair of illumination devices 3 are positioned on both sides of the imaging device 1, and they are arranged symmetrically with respect to the slit 101. More specifically, the pair of illumination devices 3 are fixed at a position equidistant from the slit 101, with their irradiation directions both facing downwards from the slit 101. The reflected light from the irradiated object to be imaged OB enters the imaging device 1 through the slit 101, and the imaging device 1 performs imaging based on this.

[0011] Image analysis is performed on the imaging results obtained by the imaging device 1 using an image analysis device (not shown), which can, for example, determine whether the imaging target OB meets predetermined criteria. The inspection system SY may also be referred to as an evaluation system, etc.

[0012] Here, as will be the case in other figures described later, the X, Y, and Z directions are shown intersecting (essentially orthogonal) to facilitate understanding of the structure. The X direction corresponds to the front-to-back direction or depth direction, the Y direction corresponds to the left-to-right direction or width direction, and the Z direction corresponds to the up-and-down direction or height direction. The pair of illumination devices 3 are aligned in the Y direction, and the transport device 2 transports the image target OB in the Y direction.

[0013] Furthermore, in the following explanation, the X, Y, and Z directions may be indicated by the signs "+" and "-" respectively (for example, the left side may be expressed as the -Y side and the right side as the +Y side). However, the notation of the signs will be omitted when there is no particular need to distinguish between them.

[0014] <Regarding the internal structure of the imaging device> Figure 2 is a schematic side view showing an example of the internal structure of the imaging device 1 (when viewed in the -X direction / a schematic schematic side view). As shown in FIGS. 1A, 1B and 2, the imaging device 1 includes a housing 10, a lens unit 11, an image sensor 12, and a plurality of mirror units 13.

[0015] The housing 10 incorporates the lens unit 11, the image sensor 12, and the plurality of mirror units 13, each of which is fixed directly or indirectly (via a predetermined member) to the inner wall of the housing 10. In addition, a slit 101 is provided at a substantially central portion of the surface of the housing 10 on the imaging target OB side (i.e., the -Z side). The slit 101 extends in the X direction, allowing light from the imaging target OB to enter therethrough.

[0016] The lens unit 11 is arranged with one or more lenses incorporated therein such that its optical axis is parallel to the Z direction. Although details will be described later, the lens unit 11 condenses the light from the imaging target OB guided while being reflected by the plurality of mirror units 13, and guides the light to the image sensor 12.

[0017] The image sensor 12 is a line sensor formed by arranging a plurality of photoelectric conversion elements 121 in the X direction, and is capable of detecting light that has passed through the lens unit 11. In the present embodiment, the image sensor 12 is arranged in a horizontal posture. The light detected by the image sensor 12 is transferred as pixel signals to an unshown image generation apparatus capable of generating image data. The aforementioned image analysis can be performed based on this image data.

[0018] The plurality of mirror units 13 are each rod-shaped members extending in the X direction and having a light reflection surface, and are arranged in the housing 10 so as to be capable of forming an optical path (light path) corresponding to the focal length of the lens unit 11. In the present embodiment, five mirror units 131 to 135 are arranged; however, when it is not particularly necessary to distinguish them, they are simply referred to as the mirror unit 13 in the following description.

[0019] For ease of understanding, the diagram shows the optical paths L0 to L6 from the imaging target OB to the image sensor 12, representing the line passing through the center of the light beam from the imaging target OB to the image sensor 12, i.e., the light that should pass through the optical axis of the lens unit 11. Optical path L0 shows the optical path from the imaging target OB to the mirror unit 131. Optical path L1 shows the optical path from the mirror unit 131 to the mirror unit 132. Optical path L2 shows the optical path from the mirror unit 132 to the mirror unit 133. Optical path L3 shows the optical path from the mirror unit 133 to the mirror unit 134. Optical path L4 shows the optical path from the mirror unit 134 to the mirror unit 135. Optical path L5 shows the optical path from the mirror unit 135 to the lens unit 11. Optical path L6 shows the optical path from the lens unit 11 to the image sensor 12.

[0020] Figure 3 is a schematic top view (viewed in the -Z direction / plan view) showing the positional relationship between the lens unit 11, the image sensor 12, and the multiple mirror units 13 within the housing 10. The lens unit 11 and the image sensor 12 are fixed approximately above the center of the mirror unit 135, which extends in the X direction.

[0021] With this configuration, light entering the housing 10 from the imaging target OB through the slit 101 is reflected by multiple mirror units 13 and then guided to the image sensor 12 via the lens unit 11, making it detectable.

[0022] <Regarding the arrangement of each element within the imaging device> Incidentally, while multiple mirror units 13 are required to form an optical path corresponding to the focal length of the lens unit 11, their placement within the housing 10 can sometimes increase the size of the imaging device 1. Furthermore, while it is desirable to minimize the number of mirror units 13 (number of reflections) to prevent unnecessary light scattering, this can also increase the size of the imaging device 1 in order to secure an optical path corresponding to the focal length of the lens unit 11. Therefore, there is a general demand for technologies that are advantageous for miniaturizing such imaging devices 1.

[0023] In this embodiment, the multiple mirror units 13 are arranged towards the -Y side and / or -Z side within the housing 10, and the lens unit 11 is arranged towards the +Y side and +Z side within the housing 10. More specifically, as shown in Figure 2: The mirror unit 131 is positioned on the -Z side of the housing 10, on the +Z side of the slit 101 and on the -Z side of the lens unit 11, and is fixed in a position that allows it to reflect light from the imaging target OB to the -Y side; The mirror unit 132 is fixed in the housing 10 on both the -Y and -Z sides in a position that allows it to reflect light from the mirror unit 131 to the +Z side; The mirror unit 133 is fixed in the housing 10 on both the -Y and +Z sides in a position that allows it to reflect light from the mirror unit 132 to the -Z side; The mirror unit 134 is positioned on the +Y and +Z sides of the mirror unit 132 within the housing 10, on the -Y and -Z sides, and is fixed in a position that allows it to reflect light from the mirror unit 133 to the +Y side; also, The mirror unit 135 is located on the -Z side of the housing 10, on the +Z side of the mirror unit 131 and on the -Z side of the lens unit 11, and is fixed in a position that allows it to reflect light from the mirror unit 134 to the +Z side.

[0024] With this arrangement, light incident from the imaging target OB in the +Z direction is reflected to the -Y side by mirror unit 131, further reflected to the +Z side by mirror unit 132, reflected to the -Z side by mirror unit 133, further reflected to the +Y side by mirror unit 134, and then reflected in the +Z direction by mirror unit 135 and guided to lens unit 11. In this way, it is possible to improve the efficiency of the arrangement of each element within the housing 10 while forming an optical path corresponding to the focal length of lens unit 11.

[0025] In this embodiment, the lens unit 11 and the multiple mirror units 13 are arranged such that the directions in which the optical paths L0 and L6 extend are both parallel to the Z direction, and the optical axis of the lens unit 11 and the optical path passing through the slit 101 to pass through the optical axis are parallel to the Z direction. With this configuration, the above arrangement can be realized for the multiple mirror units 13, and further miniaturization of the imaging device 1 in the Y direction becomes possible.

[0026] Furthermore, the lens unit 11 is positioned towards the +Y and +Z sides within the housing 10, and is located on the +Y side relative to the slit 101. In this configuration, the mirror unit 135 that reflects light toward the lens unit 11 is positioned on the +Y side, while the other mirror units 13 are positioned on the -Y side.

[0027] Since the lens unit 11 is positioned towards the +Y and +Z sides within the housing 10, the slit 101, located approximately in the center of the surface of the housing 10 on the imaging target OB side, is not located on the optical axis of the lens unit 11. In this embodiment, one end of the slit 101 (the +Y side end) is located between the center of the mirror unit 131 and the center of the lens unit 11 in the Y direction. The center of the mirror unit 131, as with the lens unit 11, refers to the center of the outer shape in the Y direction when viewed from the side.

[0028] Because the slit 101 is not located on the optical axis of the lens unit 11, it is possible to prevent stray light components from the reflected light from the imaging target OB that were not reflected by the mirror unit 131 from directly entering the lens unit 101 or from being diffusely reflected inside the lens unit 101, thereby preventing adverse effects on the imaging results. Furthermore, it becomes unnecessary to install an aperture on the light-receiving side of the lens unit 11.

[0029] Furthermore, in this embodiment, the mirror unit 133 is positioned closer to the image sensor 12 and located on the +Z side than the other mirror units 13, thereby making the optical paths L2 and L3 relatively long. The distance of the mirror unit 133 from each of the mirror units 132 and 134 is greater than at least half the size of the lens unit 11 in the Z direction, and in this embodiment, it is greater than the entire size of the lens unit 11 in the Z direction. The mirror unit 133 may be positioned higher than the image sensor 12, lower than the image sensor 12, or at approximately the same height as the image sensor 12.

[0030] The reflective surface of the mirror unit 133 faces the direction of the imaging target OB. Therefore, stray light components from the reflected light from the imaging target OB that were not reflected by the mirror unit 131 may reach the mirror unit 133 and be reflected, potentially negatively affecting the imaging results due to diffuse reflection within the housing 10. In particular, if the mirror unit 133 is placed near the light-receiving surface of the lens unit 11, the aforementioned diffuse reflection will occur, and stray light components will enter the lens unit 11, which is likely to have a more pronounced negative impact on the imaging results. However, according to this embodiment, the mirror unit 133 is positioned away from the lens slit 101 and away from the light-receiving surface of the lens unit 11, thereby preventing the aforementioned diffuse reflection and improving the quality of the imaging results. Furthermore, by utilizing the space adjacent to the lens unit 11, which has a large dimension in the Z direction, it becomes possible to secure a long optical path in the Z direction. In other words, it becomes possible to secure a long optical path within the housing 10 while keeping the size of the housing 10 down.

[0031] Mirror unit 133 is positioned in the Y direction between mirror unit 132 and mirror unit 134, and reflects light from mirror unit 132 toward mirror unit 134 at an acute angle. Here, angle θ is the angle formed by optical paths L2 and L3 (θ < 90°). To suppress the increase in size of the imaging device 1 in the Y direction, angle θ should be set within the range of, for example, 2 to 14°. Similarly, the angle formed by optical path L2 and the Z direction, and the angle formed by optical path L3 and the Z direction should both be set within the range of 1 to 7°.

[0032] In this configuration, the distance between mirror unit 131 and mirror unit 133 is greater than the distance between other mirror units 13, and the distance between mirror unit 131 and mirror unit 135 is smaller than the distance between other mirror units 13.

[0033] Furthermore, by arranging the multiple mirror units 13 so that their light-reflecting surfaces are not parallel to each other and their optical paths L0 to L6 do not intersect, it becomes easier to adjust the attitude / orientation of each individual mirror unit 13. This is advantageous in simplifying the design of optical systems, which can otherwise be relatively complex.

[0034] In this embodiment, an example was given in which mirror unit 133 is arranged spaced apart in the Z direction from other mirror units 13. However, the arrangement of the mirror units 13 is not limited to this example, and it is sufficient that at least one of the multiple mirror units 13 is arranged spaced apart in the Z direction from other mirror units 13.

[0035] Furthermore, although the quantity of the multiple mirror units 13 was set to 5 in the above example, the content of this embodiment is not limited to this example, and can be applied to other quantities of mirror units 13. For example, let the quantity of the multiple mirror units 13 be N (the example in this embodiment shows the case where N=5). In this case, for example, regarding the above-described arrangement of the mirror units 133, if K is an integer greater than 1 and less than N, then the Kth mirror unit can be said to be positioned spaced apart in the Z direction from the (K-1)th mirror unit and the (K+1)th mirror unit. Here, the (K-1)th mirror unit corresponds to a mirror unit that reflects light toward the Kth mirror unit, and the (K+1)th mirror unit corresponds to another mirror unit that reflects light from the Kth mirror unit. Furthermore, in order to suppress the quantity of mirror units 13, it is preferable to keep the value of N to a minimum.

[0036] In the above description, an example was given in which reflected light from the imaging target OB is detected by the optical system inside the housing 10. However, the reflected light referred to here may be reflected light due to diffuse reflection or reflected light due to total internal reflection. Furthermore, the imaging target OB may be a transparent material, and the concept of light from the imaging target OB may include transmitted light that has passed through the imaging target OB. Examples of imaging target OB in this case include light-transmitting materials that allow light from illumination to pass through, such as film materials and sheet materials.

[0037] ≪Second Embodiment≫ Figure 4 is a schematic side view showing an example of the internal structure of the imaging device 1 according to the second embodiment. In the first embodiment described above, the image sensor 12 was arranged in a horizontal position within the housing 10, whereas in this embodiment, the image sensor 12 is arranged in a vertical position. In this embodiment, a mirror unit 136 is further arranged to reflect the light that has passed through the lens unit 11 toward the image sensor 12.

[0038] In the figure, instead of the aforementioned optical path L6 (see Figure 2), an optical path L6' from the lens unit 11 to the mirror unit 136 and an optical path L6'' from the mirror unit 136 to the image sensor 12 are shown. In this embodiment, the lens unit 11 and the multiple mirror units 13 should be arranged so that the optical paths L0 and L6' are parallel to the Z direction.

[0039] According to this embodiment, for example, if the image sensor 12 is wide (in the first embodiment, the size in the Y direction is large), the size of the imaging device 1 in the Y direction can be suppressed by arranging such an image sensor 12 in a vertical position.

[0040] In the above explanation, for the sake of ease of understanding, each element has been given a name related to its function. However, each element is not limited to having the content described in the embodiment as its primary function, but may also have it as a secondary function. Therefore, each element is not strictly limited to its expression, and its expression can be replaced with other similar expressions. In the same vein, the expression "apparatus" may be replaced with "unit," "component, piece," "member," "structure," "assembly," etc., or it may be omitted or added.

[0041] Summary of the Embodiments Some of the features illustrated in the above embodiments are as follows: [Item 1] An imaging device (1) comprising a lens unit (11) and an image sensor (12), wherein the lens unit guides light from an object to be imaged (OB) to the image sensor, A slit (101) extending in a first direction (X direction) and into which light from the imaging target can be incident, A plurality of mirror units (13) extending in the first direction and guiding the incident light from the slit to the lens unit while reflecting it, Furthermore, When viewed in the first direction, the lens unit and the plurality of mirror units are arranged such that the direction in which the path of light incident on the slit extends and the direction in which the path of light passing through the lens unit extends are parallel to a second direction (Z direction) that is different from the first direction. An imaging device characterized by the following features. [Item 2] When viewed in the first direction, the slit is not located on the optical axis of the lens unit. The imaging device according to item 1, characterized in that it is a imaging device. [Item 3] The first direction and the second direction are orthogonal. An imaging device according to item 1 or item 2, characterized in that it is an imaging device according to item 1 or item 2. [Item 4] Of the plurality of mirror units, one that reflects the light incident on the slit is designated as the first mirror unit (131). When viewed in the first direction, one end of the slit is located between the center of the first mirror unit and the center of the lens unit in a third direction (Y direction) perpendicular to both the first and second directions. The imaging device according to item 3, characterized in that it is a imaging device. [Item 5] When viewed in the first direction, at least one (133) of the plurality of mirror units is spaced apart from the other mirror units in the second direction. An imaging device according to item 3 or item 4, characterized by the above. [Item 6] Let one of the aforementioned plurality of mirror units be the Kth mirror unit (133), Let the other mirror unit that reflects light toward the aforementioned mirror unit K be the (K-1) mirror unit (132), Let the other mirror unit that reflects light from the aforementioned mirror unit K be the (K+1) mirror unit (134), When viewed in the first direction, the mirror unit K is positioned spaced apart in the second direction from the mirror unit (K-1) and the mirror unit (K+1). An imaging device according to any one of items 3 to 5, characterized by the above. [Item 7] When viewed in the first direction, the distance of the mirror unit K from the mirror unit (K-1) and the mirror unit (K+1), respectively, is greater than half the size of the lens unit in the second direction. The imaging device according to item 6, characterized in that it is a imaging device. [Item 8] The mirror unit K is positioned closer to the image sensor than the other mirror units. The imaging device according to item 6 or item 7, characterized in that it is an imaging device. [Item 9] When viewed in the first direction, the mirror unit K is positioned between the mirror unit (K-1) and the mirror unit (K+1) in a third direction (Y direction) that is orthogonal to both the first and second directions. An imaging device according to any one of items 6 to 8, characterized by the above. [Item 10] When viewed in the first direction, with respect to the light that should pass through the optical axis of the lens unit, The angle between the optical path (L2) from the mirror unit (K-1) to the mirror unit (K) and the optical path (L3) from the mirror unit (K) to the mirror unit (K+1) is in the range of 2 to 14°. An imaging device according to any one of items 6 to 9, characterized by the above. [Item 11] When viewed in the first direction, with respect to the light that should pass through the optical axis of the lens unit, The angle between the optical path from the mirror unit (K-1) to the mirror unit K and the second direction is in the range of 1 to 7°. The angle between the optical path from the mirror unit K to the mirror unit (K+1) and the second direction is within the range of 1 to 7°. The imaging device according to item 10, characterized in that it is a imaging device. [Item 12] When viewed in the first direction, the distance between the first mirror unit (131) that reflects the light incident on the slit and the mirror unit (133) of K is greater than the distance between the other mirror units. An imaging device according to any one of items 6 to 11, characterized by the above. [Item 13] Let N be the number of the aforementioned multiple mirror units. When viewed in the first direction, the distance between the first mirror unit (131) that reflects light incident on the slit and the Nth mirror unit (135) that reflects light toward the lens unit is smaller than the distance between the other mirror units. An imaging device according to any one of items 6 to 12, characterized by the above. [Item 14] When viewed in the first direction, the first mirror unit and the Nth mirror unit are positioned between the slit and the lens unit in the second direction. The imaging device according to item 13, characterized by the features described herein. [Item 15] When viewed in the first direction, The lens unit is positioned on the first side (+Y side) with respect to the slit. At least some of the plurality of mirror units are positioned on the second side (-Y side) opposite to the first side with respect to the slit. An imaging device according to any one of items 1 to 14, characterized by the above. [Item 16] When viewed in the first direction, one of the plurality of mirror units (135) that reflects light toward the lens unit is located on the first side. The imaging device according to item 15, characterized by the features described herein. [Item 17] When viewed in the first direction, the plurality of mirror units are arranged such that the paths of light reflected between them do not intersect with each other. An imaging device according to any one of items 1 to 16, characterized by the above. [Item 18] When viewed in the first direction, the plurality of mirror units are arranged so that their light-reflecting surfaces are not parallel to each other. The imaging device according to item 17, characterized by the features described herein. [Item 19] The housing (10) further comprises the lens unit, the image sensor, and the plurality of mirror units, and has the slit provided in the center of the side of the surface facing the object to be imaged when viewed in the first direction. An imaging device according to any one of items 1 to 18, characterized by the above. [Item 20] An imaging device (1) described in any one of items 1 to 19, When viewed in the first direction, the irradiation device (3) is located to the side of the imaging device, Equipped with An inspection system (SY) characterized by the following. [Item 21] When viewed in the first direction, the irradiation devices are arranged in pairs on both sides of the imaging device, and the pair of irradiation devices are positioned symmetrically with respect to the slit. The inspection system described in item 20, characterized by the features described herein. [Item 22] An imaging device (1) described in any one of items 1 to 19, A transport device (2) for transporting the object to be imaged to the imaging device, Equipped with An inspection system (SY) characterized by the following.

[0042] The invention is not limited to the embodiments described above, and various modifications and changes are possible within the scope of the gist of the invention.

Claims

1. An imaging device comprising a lens unit and an image sensor, wherein the lens unit guides light from an object to be imaged to the image sensor, A slit extending in a first direction and into which light from the object to be imaged can be incident, A plurality of mirror units extending in the first direction and guiding the incident light from the slit to the lens unit while reflecting it, Furthermore, When viewed in the first direction, the lens unit and the plurality of mirror units are arranged such that the direction in which the path of light incident on the slit extends and the direction in which the path of light that has passed through the lens unit extends are parallel to a second direction different from the first direction. Let one of the plurality of mirror units be the K-th mirror unit, another that reflects light toward the K-th mirror unit be the (K-1)-th mirror unit, and another that reflects light from the K-th mirror unit be the (K+1)-th mirror unit. When viewed in the first direction, the K-th mirror unit is spaced apart from the (K-1)-th mirror unit and the (K+1)-th mirror unit in the second direction. An imaging device characterized by the following features.

2. When viewed in the first direction, the slit is not located on the optical axis of the lens unit. The imaging apparatus according to claim 1, characterized by its features.

3. The first direction and the second direction are orthogonal. The imaging apparatus according to claim 1, characterized by its features.

4. Of the plurality of mirror units, one that reflects the light incident on the slit is designated as the first mirror unit. When viewed in the first direction, one end of the slit is located between the center of the first mirror unit and the center of the lens unit in a third direction perpendicular to both the first and second directions. The imaging apparatus according to claim 3, characterized in that it is as described above.

5. When viewed in the first direction, at least one of the plurality of mirror units is spaced apart from the other mirror units in the second direction. The imaging apparatus according to claim 3, characterized in that it is as described above.

6. When viewed in the first direction, the distance of the mirror unit K from the (K-1) mirror unit and the (K+1) mirror unit, respectively, is greater than half the size of the lens unit in the second direction. The imaging apparatus according to claim 1, characterized by its features.

7. The mirror unit K is positioned closer to the image sensor than the other mirror units. The imaging apparatus according to claim 1, characterized by its features.

8. When viewed in the first direction, the mirror unit K is positioned between the mirror unit (K-1) and the mirror unit (K+1) in a third direction perpendicular to both the first and second directions. The imaging apparatus according to claim 1, characterized by its features.

9. When viewed in the first direction, with respect to the light that should pass through the optical axis of the lens unit, The angle between the optical path from the (K-1) mirror unit to the K mirror unit and the optical path from the K mirror unit to the (K+1) mirror unit is in the range of 2 to 14°. The imaging apparatus according to claim 1, characterized by its features.

10. When viewed in the first direction, with respect to the light that should pass through the optical axis of the lens unit, The angle between the optical path from the (K-1) mirror unit to the K mirror unit and the second direction is in the range of 1 to 7°. The angle between the optical path from the mirror unit K to the mirror unit (K+1) and the second direction is in the range of 1 to 7°. The imaging apparatus according to claim 9, characterized in that it is as described in the previous version.

11. When viewed in the first direction, the distance between the first mirror unit that reflects the light incident on the slit and the mirror unit K is greater than the distance between the other mirror units. The imaging apparatus according to claim 1, characterized by its features.

12. Let N be the number of the aforementioned multiple mirror units. When viewed in the first direction, the distance between the first mirror unit that reflects the light incident on the slit and the Nth mirror unit that reflects the light toward the lens unit is smaller than the distance between the other mirror units. The imaging apparatus according to claim 1, characterized by its features.

13. When viewed in the first direction, the first mirror unit and the Nth mirror unit are positioned between the slit and the lens unit in the second direction. The imaging apparatus according to claim 12, characterized by its features.

14. When viewed in the first direction, The lens unit is positioned on the first side with respect to the slit, At least some of the plurality of mirror units are positioned on the second side opposite to the first side with respect to the slit. The imaging apparatus according to claim 1, characterized by its features.

15. When viewed in the first direction, one of the plurality of mirror units that reflects light toward the lens unit is located on the first side. The imaging apparatus according to claim 14.

16. When viewed in the first direction, the plurality of mirror units are arranged so that the paths of light reflected between them do not intersect with each other. The imaging apparatus according to claim 1, characterized by its features.

17. When viewed in the first direction, the plurality of mirror units are arranged so that their light-reflecting surfaces are not parallel to each other. The imaging apparatus according to claim 16, characterized in that it is a feature of the present invention.

18. The housing further comprises the lens unit, the image sensor, and the plurality of mirror units, and the slit is provided in the center of the side of the surface facing the object to be imaged when viewed in the first direction. The imaging apparatus according to claim 1, characterized by its features.

19. An imaging device according to any one of claims 1 to 18, When viewed in the first direction, the irradiation device is positioned to the side of the imaging device, Equipped with An inspection system characterized by the following features.

20. When viewed in the first direction, the irradiation devices are arranged in pairs on both sides of the imaging device, and the pair of irradiation devices are positioned symmetrically with respect to the slit. The inspection system according to claim 19, characterized in that it is the same as described in claim 19.

21. An imaging device according to any one of claims 1 to 18, A transport device for transporting the object to be imaged to the imaging device, Equipped with An inspection system characterized by the following features.

Images