Layered electromechanical transducer
Patent Information
- Application Number
- JP2024112512
- Authority / Receiving Office
- JP · JP
- Patent Type
- Patents
- Current Assignee / Owner
- Priority Date
- 2018-11-06
- Filing Date
- 2024-07-12
- Publication Date
- 2026-09-04
- Estimated Expiration
- 2039-11-04
AI Technical Summary
【0023】 以下では、本発明のさらなる利点および詳細について、図面を参照しながら例を用いて説明する。図面は、概略的な図である。
Smart Images

Figure 0007915501000001 
Figure 0007915501000002 
Figure 0007915501000003
Abstract
Description
Technical Field
[0001] The present invention relates to an electromechanical transducer having a layered structure. Background Art
[0002] EP 2 372 802 A2 (Patent Document 1) describes an electromechanical transducer comprising at least a supporting lower layer, an electrical and / or electromechanical functional element provided on the supporting lower layer, and an upper layer having an electrical contact portion connected to the functional element. Prior Art Literature Patent Literature
[0003] Patent Document 1 European Patent Application Publication No. 2372802 Specification Summary of the Invention Problem to be Solved by the Invention
[0004] For such an electromechanical transducer to be commercially profitable, an efficient manufacturing method is required. That is, the present invention is based on the object of providing an electromechanical transducer that is suitable for industrial-scale production, operates robustly with high reliability. Furthermore, it also provides a related manufacturing method. Means for Solving the Problem
[0005] To solve this problem, an electromechanical transducer having the configuration of claim 1 is provided.
[0006] The electromechanical transducer according to the present invention comprises: a first layer having, in at least one plane, at least one structured conductive region that is externally insulated and functions as an electrical shield; a second layer that functions as an adhesive layer having conductivity at least in part; - A third layer including electromechanical functional elements, -A fourth layer that functions as an adhesive layer having conductivity in at least some respects, - A fifth layer having at least one conductive region on at least one plane that functions as an electrical shield, with an externally insulated and structured surface. It is a layered structure that has these elements in this order.
[0007] The electromechanical converter according to the present invention is characterized by its layered structure, which allows for easy and inexpensive mass production. Specifically, the outer layers, namely the first and fifth layers, serve to shield the electromechanical functional elements from external influences such as electromagnetic fields. Another advantage is that the electromechanical converter according to the present invention can be manufactured relatively easily due to its layered structure. Specifically, multiple electromechanical converters can be manufactured by stacking the individual layers in a single process and then dividing this layered structure (panel) to obtain individual converters.
[0008] In the electromechanical converter according to the present invention, the second layer and the fourth layer function as adhesive layers. The second layer and the fourth layer thereby bond two adjacent layers, namely the first layer to the third layer and the third layer to the fifth layer, respectively. Importantly, both the second layer and the fourth layer are conductive at least in some respects. This enables electrical connection between different layers.
[0009] Within the scope of the present invention, the first layer and / or the fifth layer may have externally exposed contact portions (Kontaktierung). These contact portions may serve to connect electrical connection elements, such as conductors (Leitung). Within the scope of the present invention, the contact portions may be formed as plugs, sockets, or electronic assemblies. When the contact portions are incorporated into the electromechanical converter, electrical connections become extremely simple. For example, the contact portions may be configured as contact portions in the case of memory cards such as SD cards, or as contact portions in the case of SIM cards in mobile phones.
[0010] A significant advantage is that each layer of the electromechanical converter according to the present invention may have at least one point-like electrical contact or through-plating portion that electrically connects the layer to an adjacent layer. This makes it possible to send a single or multiple (redundant) electrical signal to one or both outer layers perpendicular to the plane of the layer.
[0011] Preferably, the second to fifth layers of the electromechanical converter according to the present invention have at least one conductive connection to the first layer, either directly or indirectly through the layers. This makes it possible to electrically connect the contact portion, preferably provided on the first layer, to all individual layers when necessary for signal transmission or other reasons.
[0012] When two adjacent layers, preferably all adjacent layers, are bonded together using the same material, an extremely robust electromechanical transducer is created. This means that the strong bonding of all layers to each other results in a stable structure for the electromechanical transducer.
[0013] In further embodiments of the present invention, two or more adjacent layers, preferably all adjacent layers, may be bonded to each other by material bonding and / or shape engagement of a polymer matrix, such as a resin matrix. Specifically, the second and fourth layers, which function as adhesive layers, may be composed of a polymer matrix or may contain a resin matrix. In variations, the second and fourth layers may comprise an adhesive film, a thermoplastic film, or a liquid or viscous adhesive. In this regard, the material bonding may be one that bonds two surfaces, a polymer surface to a polymer surface. However, the material bonding may also bond two metal surfaces, or a polymer surface to a metal surface. Preferably, the material bond (stoffschlussige Verbindung) is formed of polymers, particularly a resin matrix, with a surface area of 20% or more of the electromechanical transducer. In a modified example, the material bond may be formed of a resin matrix-based or polymer-based adhesive. The adhesive can be activated and / or cured as an adhesive by heating, optionally, heating under pressure.
[0014] Within the scope of the present invention, the functional element may be configured as one of the following types of sensors: piezoelectric sensor; capacitance sensor; inductive sensor; conductivity sensor; resistive sensor; piezoresistive sensor; pyroelectric sensor; position sensor; gyroscope; Hall sensor; magnetometer; radar sensor; or proximity sensor. Each of the above sensors may be used for a specific measurement task. For example, the above sensors may be used to detect solid-borne sound (i.e., body vibrations), force, strain, bending, etc. Further quantities can be derived or calculated from these measurements recorded by the sensors. For example, vibrations of solid-borne sound may be detected as an audio signal.
[0015] The electromechanical converter according to the present invention may include an electronic circuit comprising at least one of the following components: a signal amplifier; a filter; an AD converter; a signal processing control unit; a data memory; a wireless data transmission module; a wireless power transmission module; an ASIC (Application-Specific Integrated Circuit); a DSP (Digital Signal Processor); and an FPGA (Field-Programmable Gate Array).
[0016] Furthermore, within the scope of the present invention, the electromechanical transducer according to the present invention is made up of multiple identical or different layers laminated together. The order of these layers can vary. For example, the laminated layers may be arranged symmetrically. At least one layer of the electromechanical transducer according to the present invention may be made of a fiber-reinforced polymer. It is extremely easy to assemble such fiber-reinforced polymers to form a layered structure. The adhesive layer of the electromechanical transducer according to the present invention may have electrical insulation properties in at least a part of it. The conductive compound may be formed from a conductive polymer containing, for example, carbon fibers or silver particles as a compound. The adhesive layer may be insulated in its plane, while conductivity may exist at least at some points perpendicular to the plane of the layer.
[0017] Within the scope of the present invention, one or more functional layers can be directly incorporated into the electromechanical converter. Such layers may include electronic components, one or more types of sensors such as temperature sensors, position sensors, torque sensors, and acceleration sensors, and at least one of the aforementioned electronic circuits. With the present invention, such sensors and circuits can be connected easily and inexpensively. Furthermore, a printed circuit board complete with electronic components can also be incorporated into the converter according to the present invention.
[0018] In the electromechanical transducer according to the present invention, at least one layer may be thermosetting, may be already cured, or may have self-adhesiveness. Further, the electromechanical transducer can also be provided with a plurality of layers each including an electromechanical functional element. Preferably, at least one layer of the electromechanical transducer comprises a fiber-reinforced polymer. Preferably, the adhesive layer has electrical insulation properties at least partially and / or in a direction parallel to the plane formed by the adhesive layer.
[0019] The present invention further relates to a method for manufacturing an electromechanical transducer, - providing a first layer having, on at least one plane, at least one patterned conductive region which is insulated on the outside and functions as an electrical shield; - providing a second layer that functions as an adhesive layer having conductivity at least in partial areas; - providing a third layer including an electromechanical functional element; - providing a fourth layer that functions as an adhesive layer having conductivity at least in partial areas; - providing a fifth layer having, on at least one plane, at least one patterned conductive region which is insulated on the outside and functions as an electrical shield; - forming a panel region by stacking and aligning said first to fifth layers; - pressing said layers against each other by pressurization; - dividing said panel region; the method comprising the above steps.
[0020] In the method according to the present invention, said layers can be pressed against each other with application of heat. Specifically, said layers can be pressed against each other for several minutes or several seconds, preferably only for a fraction of a second (Sekundenbruchteile).
[0021] Within the scope of said method, at least one layer can be subjected to cleaning or surface activation before pressing. The surface activation can take the form of plasma treatment.
[0022] In the method according to the present invention, a room temperature curable adhesive, a thermoplastic hot melt adhesive, or a thermosetting structural adhesive can be used as the adhesive layer.
[0023] Hereinafter, further advantages and details of the present invention will be described by way of examples with reference to the drawings. The drawings are schematic diagrams. BRIEF DESCRIPTION OF THE DRAWINGS
[0024] [Figure 1] It is a cross-sectional view of the electromechanical transducer according to the first embodiment of the present invention. [Figure 2] It is a cross-sectional view of the electromechanical transducer according to the second embodiment of the present invention. [Figure 3] It is a cross-sectional view of the electromechanical transducer according to the third embodiment of the present invention. DESCRIPTION OF EMBODIMENTS
[0025] Figure 1 is a cross-sectional view showing an electromechanical transducer 1 having a layered structure. The electromechanical transducer 1 comprises a first layer 2 having, on at least one plane, at least one structured conductive region 3 which is externally insulated and functions as an electrical shield. This planar region 3 forms an outer layer electrically insulated from the outside of the electromechanical transducer 1. The first layer 2 further has another planar region 4 separated from the planar region 3. These two planar regions 3, 4 are bonded to each other with material bonding by being embedded in a polymer matrix 5 (dadurch stoffschlussig miteinander verbunden).
[0026] Following the first layer 2, there is a second layer 6 that functions as an adhesive layer. This adhesive layer is conductive at various points 7. At each of these points 7, there is an electrical contact that penetrates the adhesive layer, that is, an electrical contact from one side of the adhesive layer to the other. From the second layer 6 that functions as an adhesive layer, contacts 8 extend perpendicular to the plane of the layer to the outer surface 9 of the electromechanical transducer 1. The contacts 8 terminate there and become contact points 10. In Figure 1, it can be seen that there are other contact points on the outer surface 9. Some contact points 11 extend into the planar region 3. Contact points 12 connect the outer surface 9 and the planar region 4.
[0027] In Figure 1, a third layer 13 containing an electromechanical functional element is located below a second layer 6 that functions as an adhesive layer. In the illustrated embodiment, the electromechanical functional element is configured as, for example, a piezoelectric sensor 14. The sensor 14 utilizes the piezoelectric effect. When mechanical pressure is applied, an electric charge is generated, which can be supplied to an amplifier. The signal supplied by the piezoelectric sensor 14 can then be processed and evaluated.
[0028] In Figure 1, below the third layer 13, there is a fourth layer 15 that functions as an adhesive layer, having the same structure as layer 6 which functions as an adhesive layer. Layer 15, which functions as an adhesive layer, is conductive at some points. For this purpose, there are multiple contact points 16 through which the adhesive layer penetrates. Layer 15, which functions as an adhesive layer, connects the third layer 13 and the fifth layer 17. The fifth layer 17 has a structure that is basically the same as the first layer 2. The fifth layer 17 has a structured conductive region 18 on one plane, which is insulated on the outside. The fifth layer 17 further has a further planar region 19 separated in the thickness direction from the planar region 18. These two planar regions 18 and 19 are embedded in the polymer matrix 20, similar to the planar regions 3 and 4 of the first layer 2.
[0029] The contact portion 8 extends from the contact portion 10 on the outer surface 9 through the second layer 6 and the fourth layer 15, which function as adhesive layers, to the fifth layer 17. The fifth layer 17 is thus connected to the contact portion 10. These various contact portions play a role in electrically connecting the electromechanical transducer 1 to external components such as amplifiers and evaluation circuits.
[0030] The five layers of the electromechanical transducer 1 are composed of polymer or fiber-reinforced polymer, and conductive regions and electrically insulating regions are provided within the layers as needed. Each layer has at least one point-like conductive contact portion, two-dimensional contact portion, or through-plated portion that connects the layer to one or more adjacent layers.
[0031] The electromechanical transducer described in this embodiment can be easily mass-produced using an automated method. For this purpose, a panel comprising multiple electromechanical transducers arranged in rows and columns is manufactured. After laminating the individual layers, pressure molding is performed (under heating, etc.). Then, the panel is cut to form individual electromechanical transducers.
[0032] Figure 2 shows an electromechanical converter 21 of a second embodiment, which has a structure similar to the converter described in the first embodiment. Therefore, a detailed explanation of the corresponding components is omitted here.
[0033] The electromechanical transducer 21 comprises a first layer 2 having a structured, conductive planar region 3 that functions as an electrical shield and is insulated from the outside. Following this is a second layer 6 that functions as an adhesive layer. A third layer 22 contains an electromechanical functional element configured as a sensor 14. A fourth layer 23, located opposite the third layer 22 from layer 6 in Figure 2, functions as an adhesive layer.
[0034] The fifth layer 24 forms the outer surface 25 opposite to the outer surface 9. The fifth layer 24 has a structured conductive region 26 that functions as an electrical shield, with an insulated outer surface. Figure 2 shows that the electromechanical transducer 21 has a symmetrical structure. That is, there are two identical sensors 14, with adhesive layers on both sides of each sensor 14. The fifth layer 24 is adjacent to the adhesive layer of the lower sensor in Figure 2. An intermediate layer 27 is located between the two inner adhesive layers.
[0035] Figure 3 shows another embodiment of the electromechanical converter 28, which has a similar structure to the electromechanical converter shown in Figure 2 and also features a shield configuration similar to that of the embodiment shown in Figure 1. Furthermore, the present invention includes the following embodiments. [Aspect 1] A layered electromechanical transducer (1,21,28), - A first layer (2) having at least one conductive region (3) on at least one plane that functions as an electrical shield, which is insulated on the outside and has a structured treatment, -A second layer (6) which functions as an adhesive layer that is conductive in at least some respects, -A third layer (13,22) containing electromechanical functional elements, -A fourth layer (15,23) that functions as an adhesive layer having conductivity in at least some respects, - A fifth layer (17, 24) having at least one conductive region (18) on at least one plane that functions as an electrical shield, which is insulated on the outside and has a structured treatment, An electromechanical converter equipped with the following components in this order. [Aspect 2] An electromechanical converter according to Embodiment 1, characterized in that the first layer (2) and / or the fifth layer (17, 24) have contact portions (8) exposed to the outside (9, 25). [Aspect 3] An electromechanical converter according to embodiment 2, characterized in that the contact portion (8) is configured as a plug, socket, or electronic unit. [Aspect 4] An electromechanical converter according to any one of embodiments 1 to 3, characterized in that each layer (2, 5, 13, 15, 17, 22, 23, 24) has at least one point-like conductive contact portion (10, 11, 12) or through-plated portion that electrically connects the layer (2, 5, 13, 15, 17, 22, 23, 24) to an adjacent layer (2, 5, 13, 15, 17, 22, 23, 24). [Aspect 5] An electromechanical converter according to any one embodiment of embodiments 1 to 4, characterized in that the second to fifth layers (6, 13, 15, 17, 22, 23, 24) have at least one conductive connection to the first layer (2), either directly or through the layers. [Aspect 6] An electromechanical converter according to any one of embodiments 1 to 5, characterized in that two adjacent layers (2, 5, 13, 15, 17, 22, 23, 24), preferably all adjacent layers (2, 5, 13, 15, 17, 22, 23, 24), are bonded to each other by material bonding. [Aspect 7] An electromechanical converter according to embodiment 6, characterized in that at least two adjacent layers (2, 5, 13, 15, 17, 22, 23, 24), preferably all layers (2, 5, 13, 15, 17, 22, 23, 24), are bonded to each other by material bonding and / or shape engagement of the polymer matrix (5). [Aspect 8] An electromechanical converter according to embodiment 6 or 7, characterized in that the material bonding is formed from polymers, particularly a resin matrix, with a surface area of 20% or more of the electromechanical converter (1, 21, 28). [Aspect 9] An electromechanical converter according to any one embodiment of embodiments 1 to 8, characterized in that the functional element is configured as one of the following types of sensors: piezoelectric sensor (14); capacitance sensor; inductive sensor; conductivity sensor; resistive sensor; piezoresistive sensor; pyroelectric sensor; position sensor; gyroscope; Hall sensor; magnetometer; radar sensor; or proximity sensor; or as an electronic circuit. [Aspect 10] An electromechanical converter according to embodiment 9, characterized in that the electronic circuit includes at least one of the following components: a signal amplifier; a filter; an AD converter; a control unit for signal processing; a data memory; a wireless data transmission module; a module for wireless power transmission; an ASIC (Application-Specific Integrated Circuit); a DSP (Digital Signal Processor); and an FPGA (Field-Programmable Gate Array). [Aspect 11] An electromechanical converter according to any one embodiment of embodiments 1 to 10, characterized in that at least one layer (2, 5, 13, 15, 17, 22, 23, 24) is thermosetting, cured, or self-adhesive. [Aspect 12] An electromechanical converter according to any one embodiment of embodiments 1 to 11, characterized in that it comprises a plurality of layers including electromechanical functional elements. [Aspect 13] An electromechanical converter according to any one embodiment of embodiments 1 to 12, characterized in that at least one layer (2, 5, 13, 15, 17, 22, 23, 24) contains a fiber-reinforced polymer. [Aspect 14] An electromechanical converter according to any one embodiment of embodiments 1 to 13, characterized in that the adhesive layer has electrical insulating properties in at least a portion of it and / or in a direction parallel to the plane formed by the adhesive layer. [Aspect 15] A method for manufacturing an electromechanical converter (1,21,28), - A step of preparing a first layer (2) having at least one conductive region (3) on at least one plane that functions as an electrical shield, which is insulated on the outside and has been treated with a structured process, - A step of preparing a second layer (6) which functions as an adhesive layer that is conductive in at least some respects, - A step of preparing a third layer (13,22) containing electromechanical functional elements, - A step of preparing a fourth layer (15,23) which functions as an adhesive layer that is conductive in at least some respects, - A step of preparing a fifth layer (17, 24) having at least one conductive region on at least one plane that functions as an electrically insulated, patterned, and electrically shielded (18), - A step of forming a panel region by stacking and aligning the first to fifth layers (2, 5, 13, 15, 17, 22, 23, 24), - A step of pressing the aforementioned layers (2, 5, 13, 15, 17, 22, 23, 24) against each other by applying pressure, - A step of dividing the panel area, How to prepare. [Aspect 16] A method according to embodiment 15, wherein the layers (2, 5, 13, 15, 17, 22, 23, 24) are pressed against each other by applying heat. [Aspect 17] A method according to embodiment 15 or 16, wherein the layers (2, 5, 13, 15, 17, 22, 23, 24) are pressed against each other for a few minutes or a few seconds, preferably for just a moment. [Aspect 18] A method according to any one embodiment of embodiments 15 to 17, wherein at least one layer (2, 5, 13, 15, 17, 22, 23, 24) is subjected to cleaning or surface activation, such as plasma treatment, before pressing. [Aspect 19] A method according to any one embodiment of embodiments 15 to 18, wherein the adhesive layer is a room-temperature curing adhesive, a thermoplastic hot-melt adhesive, or a thermosetting structural adhesive. [Explanation of Symbols]
[0036] 1. Electromechanical converter 2. The first layer 3 Planar area 4 Planar area 5 Polymer Matrix 6. The second layer 7 points 8 Contact area 9 outside 10 Contact point 11 Contact point 12 Contact points 13. The third layer 14 sensors 15. The fourth layer 16 points 17. The fifth layer 18 Planar area 19 Planar area 20 Polymer Matrix 21 Electromechanical Converter 22 The third layer 23. The fourth layer 24. The fifth layer 25 Outer surface 26 areas 27 Middle Class 28 Electromechanical Converter
Claims
1. A layered electromechanical transducer (1, 21, 28), - A first layer (2) having at least one conductive region (3) as a planar region (3) which functions as an electrical shield, is structured and has an insulated exterior, and has another planar region (4) separated in the thickness direction from the planar region (3), - A second layer (6) that functions as an adhesive layer having conductivity in at least some respects, - A third layer (13, 22) containing electromechanical functional elements, - A fourth layer (15, 23) that functions as an adhesive layer having conductivity in at least some respects, - A fifth layer (17, 24) having at least one conductive region (18) as a planar region (18) which is insulated on the outside, structured, and functions as an electrical shield, and having another planar region (19) separated in the thickness direction from the planar region (18), They are provided in this order, An electromechanical converter characterized in that the other planar region (4) of the first layer (2) has a first contact portion (12) exposed to the outside (9), and the other planar region (19) of the fifth layer (17, 24) has a second contact portion (10) exposed to the outside (9).
2. An electromechanical converter according to claim 1, characterized in that the second contact portion and the first contact portions (10, 12) are configured as a plug, socket, or electronic unit.
3. An electromechanical converter according to claim 1 or 2, characterized in that the fifth layer (17, 24) is connected to the second contact portion (10) of the other planar region (19) by a contact portion (8) that extends from the second contact portion (10) of the other planar region (19) through the second layer (6) and the fourth layer (15, 23) to the fifth layer (17, 24).
4. An electromechanical converter according to any one of claims 1 to 3, characterized in that the planar region (3) of the first layer (2) has a third contact portion (11) exposed to the outside (9).
5. An electromechanical converter according to any one of claims 1 to 4, characterized in that two adjacent layers (2, 5, 13, 15, 17, 22, 23, 24) are bonded to each other by material bonding.
6. An electromechanical converter according to claim 5, characterized in that at least two adjacent layers (2, 5, 13, 15, 17, 22, 23, 24) are bonded to each other by material bonding and / or shape engagement of the polymer matrix (5).
7. An electromechanical converter according to claim 5 or 6, characterized in that the material bond is formed from polymers with a surface area of 20% or more of the electromechanical converter (1, 21, 28).
8. An electromechanical converter according to any one of claims 1 to 7, characterized in that the functional element is configured as one of the following types of sensors: piezoelectric sensor (14); capacitance sensor; inductive sensor; conductivity sensor; resistive sensor; piezoresistive sensor; pyroelectric sensor; position sensor; gyroscope; Hall sensor; magnetometer; radar sensor; or proximity sensor; or as an electronic circuit.
9. An electromechanical converter according to claim 8, characterized in that the electronic circuit includes at least one of the following components: a signal amplifier; a filter; an AD converter; a control unit for signal processing; a data memory; a wireless data transmission module; a module for wireless power transmission; an ASIC (Application-Specific Integrated Circuit); a DSP (Digital Signal Processor); and an FPGA (Field-Programmable Gate Array).
10. An electromechanical converter according to any one of claims 1 to 9, characterized in that at least one layer (2, 5, 13, 15, 17, 22, 23, 24) is thermosetting, cured, or self-adhesive.
11. An electromechanical converter according to any one of claims 1 to 10, characterized in that it comprises a plurality of layers including electromechanical functional elements.
12. An electromechanical converter according to any one of claims 1 to 11, characterized in that at least one layer (2, 5, 13, 15, 17, 22, 23, 24) contains a fiber-reinforced polymer.
13. An electromechanical converter according to any one of claims 1 to 12, characterized in that the adhesive layer has electrical insulating properties in at least a portion of it and / or in a direction parallel to the plane formed by the adhesive layer.
Citation Information
Patent Citations
Touch display device, pressure touch unit and manufacturing method of pressure touch unit
CN104881193A
Electromechanical converter and method for producing an electromechanical converter
EP2372802A2
Method and system of fabricating PZT nanoparticle ink based piezoelectric sensor
JP2013048233A
Piezoelectric sensor
JP2014169945A
Piezoelectric sensor manufacturing method
JP2014170863A