Conveying device

Abstract

To provide a conveying device capable of avoiding coming out of a to-be-stored article from an opening of a container during conveying while achieving downsizing and simplification of the device.SOLUTION: A conveying device for conveying a container (8) having an opening comprises a holding device (30) for holding the container (8) and a regulation device (60) for regulating coming out of a to-be-stored article from the opening of the container (8) held by the holding device (30). The regulation device (60) comprises a closing member (61) to be changed into a closing posture overlapping with the opening and an opening posture not overlapping with the opening. The closing member (61) is constituted so as to change into a posture linking with the posture change of a holding body (32).SELECTED DRAWING: Figure 4

Description

[Technical Field]

[0001] The present invention relates to a conveying device. [Background Art]

[0002] For example, in semiconductor manufacturing plants and the like, conveying devices that convey containers accommodating objects to be contained such as wafers and reticles are used. While there are various container configurations, containers having an opening for putting in and out the contained object on a side surface thereof may be used in some cases, and an example of a conveying device that conveys such a container having the opening for putting in and out on a side surface is disclosed in Japanese Patent Laid-Open No. 2018-39656 (Patent Document 1).

[0003] The conveying device (conveying device 3) of Patent Document 1 includes a regulating device (fall prevention body 35S) that regulates jumping-out of a contained object (semiconductor tray T) from an opening (opening Wa) when the container (container W) is conveyed. This regulating device is configured of a pair of rod-shaped bodies that can slide in the width direction of the opening through expansion and contraction of a cylinder, and after a holding device (gripping part 31S) holds the container, the rod-shaped bodies move to approach each other to prevent the contained object from falling from the opening (paragraph 0033 of Patent Document 1). [Prior Art Literature] [Patent Literature]

[0004] [Patent Document 1] Japanese Patent Laid-Open No. 2018-39656 [Summary of the Invention] [Problem to be Solved by the Invention]

[0005] The conveying device of Patent Document 1 is configured such that the regulating device operates after the holding operation of the container by the holding device, so that independent drive mechanisms are respectively required, and there has been room for improvement in terms of downsizing and simplification of the device.

[0006] Therefore, there is a need for a transport device that can be miniaturized and simplified while preventing the contents from spilling out of the container opening during transport. [Means for solving the problem]

[0007] The transport device relating to this disclosure is A transport device for transporting containers having openings on the sides for loading and unloading contents, A holding device comprising: a plurality of holders; and a drive device for changing the orientation of the plurality of holders between a holding orientation for holding the container and a release orientation for releasing the container; The container, held by the holding device, is equipped with a restricting device that prevents the contents from spilling out of the opening of the container, The direction in which the contained object is inserted into or removed through the opening is defined as the inlet / outlet direction. The restricting device includes a closing member that changes its posture between a closed position that overlaps with the opening when viewed in the direction of entry and exit, and an open position that does not overlap with the opening when viewed in the direction of entry and exit. The closing member is configured to move in conjunction with the change in the posture of the holder, so that when the holder assumes the holding posture, the closing member moves to the closed position, and when the holder assumes the releasing position, the closing member moves to the open position.

[0008] This configuration prevents contents from spilling out of the container opening by closing the closure member of the regulating device during transport. Furthermore, since the change in the closure member's position between closed and open is linked to the change in the holder's position between holding and releasing, there is no need to provide a dedicated drive mechanism for changing the closure member's position. Therefore, the device can be made smaller and simpler.

[0009] Further features and advantages of the technology relating to this disclosure will become clearer from the following description of exemplary and non-limiting embodiments, with reference to the drawings. [Brief explanation of the drawing]

[0010] [Figure 1] Front view of the transport vehicle of the embodiment [Figure 2] Perspective view of the container [Figure 3] Diagram showing the first orientation of the holding device and regulating device as viewed from below. [Figure 4] Diagram showing the second orientation of the holding device and regulating device as viewed from below. [Figure 5] Partial enlarged view of Figure 4 [Figure 6] Perspective view of the conveying device [Figure 7] Side view of the conveying device [Figure 8] Partial enlarged view of a regulatory device in a different configuration [Modes for carrying out the invention]

[0011] The transport device of this embodiment will be described with reference to the drawings. The transport device 1 of this embodiment is used, for example, in a semiconductor manufacturing plant to transport containers 8. As shown in Figure 1, the transport device 1 comprises a traveling section 2 that travels along a travel path and a transfer mechanism 3 connected to the traveling section 2. In this embodiment, the travel path of the transport device 1 is physically formed by rails 99 suspended and supported from the ceiling 98. That is, the transport device 1 of this embodiment is an overhead transport vehicle that moves along rails 99 formed along the ceiling 98.

[0012] The running unit 2 travels along a pair of rails 99. The running unit 2 comprises a body 21, a running drive unit 22, wheels 23, and guide wheels 24. The body 21 supports the running drive unit 22, wheels 23, and guide wheels 24, etc. The running drive unit 22 is equipped with an electric motor, such as a servo motor, and drives at least one wheel 23. The wheel 23 rolls on the upper surface of the rails 99. The wheel 23 that is driven and connected to the running drive unit 22 functions as a drive wheel. The guide wheels 24 roll on the inner surface of the rails 99. The running unit 2 travels along the rails 99 with the guide wheels 24 in contact with and guided by the inner surface of the rails 99.

[0013] In the following explanation, the direction along the extension direction of the rail 99, which is the direction in which the running section 2 travels, is referred to as the longitudinal direction X of the conveying device 1. The direction perpendicular to the longitudinal direction X and along the direction in which the pair of rails 99 are aligned is referred to as the lateral direction Y of the conveying device 1. The direction perpendicular to both the longitudinal direction X and the lateral direction Y is referred to as the vertical direction Z. Note that each of these directions is relative to the conveying device 1, and the longitudinal direction X and the lateral direction Y may differ depending on the position of the conveying device 1 along the movement path when viewed from a fixed point within the facility. The vertical direction X coincides with the vertical direction.

[0014] The transfer mechanism 3 is positioned below the rail 99 and connected to the running section 2. The transfer mechanism 3 comprises a holding device 30, a lifting device 40, and a cover body 50. The holding device 30 is a device for holding the container 8. The lifting device 40 is a device for raising and lowering the holding device 30. The lifting device 40 raises and lowers the holding device 30 between the raised position shown in Figure 1 and the lowered position not shown. The cover body 50 houses the lifting device 40 and the holding device 30 in the raised position. The internal space of the cover body 50 is shielded on both sides in the front-rear direction X, while at least one side (both sides in this example) in the left-right direction Y is open.

[0015] The transport device 1 transports the container 8 to its destination by, for example, having the holding device 30 hold the container 8 while the traveling unit 2 travels to the destination, and the lifting device 40 lowers the holding device 30 to the lowered position. The transport device 1 can also unload the container 8 from the destination by performing the reverse operation described above.

[0016] A container 8, which is an object to be conveyed by the conveying apparatus 1 of the present embodiment, comprises a bottom plate 81, side plates 82, and a top plate 83, as shown in FIG. 2. The bottom plate 81 is a support plate provided at the lower end portion of the container 8, and is formed in a rectangular shape (a rectangular shape in this example). The side plates 82 extend upward from the outer edge of the bottom plate 81. In the present embodiment, a pair of side plates 82 extend upward from the outer edges of opposite side portions (a pair of long side portions in this example) of the rectangular bottom plate 81. The side plates 82 are formed in a rectangular shape (a rectangular shape in this example). The top plate 83 is provided at the upper end portion of the side plates 82, is formed in the same shape as the bottom plate 81 (a rectangular shape in this example), and is arranged parallel to the bottom plate 81.

[0017] The bottom plate 81, the pair of side plates 82, and the top plate 83 are integrally formed, and the container 8 is formed in a rectangular cylindrical shape as a whole. The container 8 has a pair of openings 86 in portions of the side surfaces where the pair of side plates 82 are not provided. These openings 86 are openings 86 for putting in and out a contained object 9 accommodated in the container 8, for inserting and removing the contained object 9.

[0018] In the present embodiment, the direction in which the contained object 9 is put in and taken out through the openings 86 of the container 8 is defined as "in-out direction S". The in-out direction S in the present embodiment is a direction along the longitudinal direction of the container 8 when viewed in the vertical direction. In the present embodiment, the in-out direction S in a state where the holding device 30 holds the container 8 matches the left-right direction Y of the conveying apparatus 1.

[0019] Further, in the present embodiment, the direction orthogonal to the vertical direction Z and the in-out direction S is defined as the width direction T. The width direction T is a direction along the horizontal direction and orthogonal to the in-out direction S, and in the present embodiment is a direction along the transverse direction of the container 8 when viewed in the vertical direction. In the present embodiment, the width direction T in a state where the holding device 30 holds the container 8 matches the front-rear direction X of the conveying apparatus 1.

[0020] Furthermore, the container 8 includes a retained body 84 and a slot 88. The retained body 84 is the part that is held by the retaining device 30. In this embodiment, the retained body 84 is formed as a rectangular plate-like body that is slightly smaller than the top plate 83 and is fixed to the top plate 83 at a slight distance above it.

[0021] Slot 88 is a portion where the object to be contained 9 can be placed. In this embodiment, slot 88 is configured as a groove formed along the inlet / outlet direction S on the inner surface of a pair of side plates 82. Multiple rows of slot 88 are arranged in the vertical direction Z.

[0022] Furthermore, the container 8 of this embodiment is provided with a wireless tag 89. The wireless tag 89 is a tag that can be read and written via wireless communication. In this embodiment, a passive type RFID (Radio Frequency Identification) is used as the wireless tag 89. The wireless tag 89 has unique identification information (item ID) recorded on it for the container 8 to which the wireless tag 89 is attached. The wireless tag 89 is affixed to the upper surface near the opening 86 on the bottom plate 81.

[0023] The contents 9 can be placed in each of the multiple slots 88. The contents 9 in this embodiment include a tray 91 placed in a slot 88 and a plurality of articles 92 placed on the tray 91. The tray 91 corresponds to the vertical view shape of the container 8 and is formed in a rectangular shape (rectangular in this example). The tray 91 is housed in the container 8 with both ends in the width direction T positioned in slots 88 of the same height in a pair of side plates 82.

[0024] Examples of articles 92 include semiconductor devices such as IC chips and transistors. Articles 92 are placed on the tray 91 in a state where multiple articles are arranged in a row vertically and horizontally (in-and-out direction S and width direction T). In this embodiment, the length of the articles 92 arranged in a predetermined initial position along the width direction T is called the width direction dimension Wa, and the length along the in-and-out direction S is called the in-and-out direction dimension Wb.

[0025] As shown in Figures 3 and 4, the holding device 30 comprises a holding body 31, a holding body 32, and a holding drive device 33 (see Figure 7). The holding body 31 is the base portion of the holding device 30. The holding body 31 supports the holding body 32 so that it can slide freely in the front-rear direction X (width direction T). The holding body 31 also fixedly supports the holding drive device 33.

[0026] The holder 32 holds the object to be held 84 of the container 8. In this embodiment, multiple holders 32 are provided so that different parts of the object to be held 84 can be supported simultaneously. More specifically, a pair of holders 32 are provided so that parts located on opposite sides of the rectangular object to be held 84 can be supported simultaneously. These pairs of holders 32 are arranged side by side in the front-rear direction X (width direction T) with a predetermined distance between them. Each pair of holders 32 is configured to slide freely in the front-rear direction X (width direction T), and moves closer to or further away from each other along the front-rear direction X (width direction T).

[0027] The holding drive device 33 moves the pair of holders 32 in the front-rear direction X (width direction T). The holding drive device 33 is composed of, for example, a holding electric motor and a mechanism (for example, a ball screw mechanism) that converts the rotation of the holding electric motor into thrust in the front-rear direction X. The holding drive device 33 moves the pair of holders 32 in opposite directions so that they move closer to each other or further apart from each other along the front-rear direction X (width direction T).

[0028] As the pair of holders 32 move closer to each other along the front-rear direction X (width direction T), the pair of holders 32 overlap with the object to be held 84 when viewed from above, below the object to be held 84 (see Figure 4). In this embodiment, this posture is called the "holding posture" for holding the container 8. On the other hand, as the pair of holders 32 move further apart from each other along the front-rear direction X (width direction T), the pair of holders 32 do not overlap with the object to be held 84 when viewed from above, (see Figure 3). In this embodiment, this posture is called the "release posture" for releasing the container 8. The holding drive device 33 changes the posture of the pair of holders 32 between the holding posture and the release posture by moving the pair of holders 32 closer and further apart. In this embodiment, the holding drive device 33 corresponds to the "drive device".

[0029] As shown in Figure 7, the lifting device 40 comprises a lifting main body 41 and a lifting drive device 42. The lifting main body 41 permanently supports the lifting drive device 42. The lifting drive device 42 is composed of, for example, a lifting electric motor and a winding unit that rotates integrally with the lifting electric motor. This winding unit and the holding device 30 are connected by a cable (for example, a wire or rope). The lifting device 40 raises and lowers the holding device 30 between an elevated position and a lowered position by driving the lifting drive device 42 to wind up or unwind the cable.

[0030] As shown in Figure 7, the cover body 50 covers the container 8, which is held by the holding device 30 in the raised position, from above and from the side. The cover body 50 has an upper cover portion 51 and a side cover portion 52. The upper cover portion 51 covers the container 8 from above. The side cover portion 52 covers the container 8 from the side. A pair of side cover portions 52 are provided so as to cover the container 8 from both sides in the front-to-back direction X (width direction T). The upper cover portion 51 and the pair of side cover portions 52 are integrally formed. The cover body 50 is open in the left-to-right direction Y (in-and-out direction S). The opening 86 of the container 8, which is held by the holding device 30 in the raised position, is located on this open side.

[0031] As shown in Figures 3 to 7, the transport device 1 (transfer mechanism 3) of this embodiment further includes a restricting device 60 in addition to the holding device 30, the lifting device 40, and the cover body 50. The restricting device 60 is a device for restricting the contents 9 from flying out of the opening 86 of the container 8 held by the holding device 30. The restricting device 60 includes a closing member 61, and when this closing member 61 is in a closed position that overlaps the opening 86 when viewed in the direction of entry and exit (viewed along the entry and exit direction S), it restricts the contents 9 from flying out of the opening 86 of the container 8.

[0032] Furthermore, the closing member 61 can also be in an open position that does not overlap with the opening 86 when viewed in the direction of entry and exit. The restricting device 60 is configured so that the closing member 61 can change between a closed position and an open position.

[0033] In this embodiment, the container 8 has openings 86 on both sides in the entry / exit direction S, and correspondingly, the restricting devices 60 are also provided on both sides in the entry / exit direction S.

[0034] As shown in Figures 3 and 4, the restricting device 60 of this embodiment is equipped with a pair of closing members 61. On both sides in the entry / exit direction S, the pair of closing members 61 operate in conjunction with each other, and in the open position, they are positioned so that they do not overlap with the opening 86 when viewed in the entry / exit direction, and in the closed position, they are positioned so that they overlap with the opening 86 when viewed in the entry / exit direction. Furthermore, the restricting devices 60 on both sides in the entry / exit direction S also operate in conjunction with each other, and the two sets (a total of four) of closing members 61 are configured to simultaneously enter the closed position or simultaneously enter the open position.

[0035] As can be clearly seen from Figure 6, the closing member 61 comprises a support portion 61A and a plate-shaped portion 61B connected to the support portion 61A. The support portion 61A is slidably disposed along the lower surface of the holding body portion 31. The plate-shaped portion 61B has a predetermined width and is formed as a flat plate extending along the vertical direction Z. The plate-shaped portion 61B extends to a position corresponding to the lowest slot 88. In this embodiment, in the vertical direction Z, the lower end of the plate-shaped portion 61B extends to a position below the lower end of the container 8. As a result, the plate-shaped portion 61B is positioned so as to overlap all of the multiple slots 88 when viewed in the entry / exit direction in the closed position.

[0036] As shown in Figures 3 to 5, the restricting device 60 of this embodiment is equipped with a link mechanism 62. The link mechanism 62 links the change in posture of the holder 32 with the change in posture of the closing member 61. More specifically, the closing member 61 moves to a closed position in conjunction with the change in posture of the holder 32, as the holder 32 moves to a holding position (Figure 3 → Figure 4). Also, the closing member 61 moves to an open position in conjunction with the change in posture of the holder 32, as the holder 32 moves to a release position (Figure 4 → Figure 3).

[0037] As shown in Figure 5, the link mechanism 62 has a drive arm 63 and a driven arm 64 that are connected so as to be able to move relative to each other. The drive arm 63 is fixedly connected to the holder 32 of the holding device 30 via a connecting bracket 69. A connecting shaft 63A is provided at the tip of the drive arm 63 (the end opposite to the connecting bracket 69). The connecting shaft 63A is inserted through an elongated hole 64a formed in the driven arm 64. One end of the driven arm 64 is rotatably connected to the holding body 31 via a pivot shaft 65, and the other end is rotatably connected to the closing member 61 (support part 61A) via a support shaft 66.

[0038] The pivot shaft 65, the connecting shaft 63A, and the support shaft 66 all have a rotation axis along the vertical direction Z. The drive arm 63 and the driven arm 64 are relatively displaceable when viewed in the vertical direction.

[0039] In this embodiment, when the holder 32 slides in the front-rear direction X (width direction T), the drive arm 63 and the connecting shaft 63A also slide in the front-rear direction X (width direction T). As a result of this sliding movement, the driven arm 64, which is pushed by the connecting shaft 63A within the elongated hole 64a, rotates around the pivot axis 65. Then, the closing member 61, which is rotatably supported by the support shaft 66 at the pivot end of the driven arm 64, is guided by the arc-shaped slide guide 31A provided on the holder body 31, and moves while gradually changing the orientation of the plate-shaped portion 61B.

[0040] Thus, the closing member 61 is supported to be able to pivot freely around a virtual rotation axis that is located near the pivot axis 65 and is along the vertical direction Z. In this embodiment, the position of this rotation axis is the virtual center position of the arc-shaped slide guide 31A.

[0041] In this embodiment, since the connection point between the connecting shaft 63A and the driven arm 64 is between the pivot shaft 65 and the support shaft 66, when the pair of holders 32 move closer together, the plate-shaped portions 61B of the pair of closing members 61 rotate toward each other in conjunction with this movement (Figure 3 → Figure 4). Then, the pair of closing members 61 assume a closed position with the plate-shaped portions 61B of the pair of closing members 61 in close proximity to each other. On the other hand, when the pair of holders 32 move further apart, the plate-shaped portions 61B of the pair of closing members 61 rotate toward each other in conjunction with this movement (Figure 4 → Figure 3). Then, the pair of closing members 61 assume an open position with the plate-shaped portions 61B of the pair of closing members 61 separated from each other.

[0042] In the closed position, the plate-shaped portion 61B is positioned to face the opening 86 of the container 8. Here, "the plate-shaped portion 61B facing the opening 86 of the container 8" means that the direction perpendicular to the plate surface of the plate-shaped portion 61B faces the opening 86 side of the container 8 (in other words, the plate surface of the plate-shaped portion 61B is parallel to or nearly parallel to the end of the container 8 in the entry / exit direction S). In this embodiment, in the closed position, the plate-shaped portion 61B is positioned such that the plate surface of the plate-shaped portion 61B is inclined 5° to 15° (approximately 10° in the illustrated example) outward in the width direction T relative to the end of the container 8 in the entry / exit direction S.

[0043] In this embodiment, the width dimension T of the area not covered by the closing member 61 in the closed position at the opening 86 of the container 8 when viewed from the direction of entry and exit (width dimension Wc of the uncovered area, see Figure 7) is set to be less than the width dimension T of the article 92 (width dimension Wa, see Figure 2). Here, in this embodiment, the pair of closing members 61 cover the opening 86 of the container 8 at positions spaced apart from each other in the width dimension T, and as shown in Figure 5, there are three areas not covered by the closing member 61 in the closed position. If the width dimensions T of these three areas are Wc1, Wc2, and Wc3, then in this embodiment, the maximum value among them is taken as the width dimension Wc of the uncovered area. In this example, the width dimension T between the pair of closing members 61, Wc2, is the width dimension Wc of the uncovered area.

[0044] In this embodiment, the gap in the entry / exit direction S between the closing member 61 in the closed position and the opening 86 of the container 8 (entry / exit direction gap Wd, see Figure 5) is less than the dimension of the article 92 in the entry / exit direction S (entry / exit direction dimension Wb, see Figure 2). Here, in this embodiment, the closing member 61 is positioned such that, in the closed position, the plate surface of the plate-shaped portion 61B is inclined with respect to the end of the container 8 in the entry / exit direction S. In this embodiment, the gap in the entry / exit direction S at the part of the closing member 61 (plate-shaped portion 61B) furthest from the opening 86 of the container 8 is defined as the entry / exit direction gap Wd.

[0045] Furthermore, since the article 92 is merely placed on the tray 91, it may rotate while moving on the tray 91. For this reason, it is more preferable that the widthwise dimension Wc of the uncovered area is less than the shorter of the widthwise dimension Wa and the entry / exit direction dimension Wb of the article 92 (in this example, the entry / exit direction dimension Wb). Similarly, it is more preferable that the entry / exit direction gap Wd is also less than the shorter of the widthwise dimension Wa and the entry / exit direction dimension Wb of the article 92 (in this example, the entry / exit direction dimension Wb). In short, it is preferable that the widthwise dimension Wc of the uncovered area and the entry / exit direction gap Wd are less than the minimum two-sided width dimension of the article 92 when viewed in the vertical direction.

[0046] As shown in Figure 6, a wireless tag reader 70 is attached to one of a pair of closing members 61 on one side in the left-right direction Y (in-and-out direction S). The wireless tag reader 70 is attached to the surface facing the container 8, near the lower end of one of the pair of plate-shaped parts 61B. When the pair of closing members 61 are in the closed position, they come into close proximity to the wireless tag 89 (see Figure 2) attached to the bottom plate 81 of the container 8. In this closed position, the wireless tag reader 70 reads the wireless tag 89 attached to the bottom plate 81. In this embodiment, the wireless tag reader 70 is an antenna that reads the RFID as the wireless tag 89.

[0047] From the viewpoint of properly reading the wireless tag 89 by the wireless tag reader 70, it is preferable that the plate-shaped portion 61B is made of a non-metallic material. The plate-shaped portion 61B can be made of, for example, a resin material.

[0048] [Other Embodiments] (1) In the above embodiment, a configuration in which the holding device 30 comprises a pair of holding bodies 32 that are slidable in the front-rear direction X (width direction T) was described as an example. However, the holding device 30 is not limited to such a configuration, and may comprise three or more holding bodies 32. The three or more holding bodies 32 may, for example, slide radially around the object to be held 84 to hold the object to be held 84.

[0049] (2) In the above embodiment, the holding device 30 was described as having a configuration in which it holds the container 8 by the movement of the pair of holders 32 to be closer together and releases the holding of the container 8 by the movement of the pair of holders 32 to be further apart. However, the holding device 30 is not limited to such a configuration, and may be configured to hold the container 8 by the movement of the pair of holders 32 to be further apart and release the holding of the container 8 by the movement of the pair of holders 32 to be closer together. In this case, it is preferable that the pair of closing members 61 be configured to be in a closed position in conjunction with the movement of the pair of holders 32 to be further apart and to be in an open position in conjunction with the movement to be closer together. Such a configuration can be realized, for example, by making the connection point between the connecting shaft 63A and the driven arm 64 on the opposite side of the support shaft 66 from the pivot shaft 65.

[0050] (3) In the above embodiment, an example in which the holding device 30 is configured as a chuck type has been described. However, the specific configuration of the holding device 30 is arbitrary as long as it can at least hold the container 8, and for example it may be configured as a fork type.

[0051] (4) In the above embodiment, a configuration in which the restricting device 60 comprises a pair of closing members 61 was described as an example. However, the restricting device 60 is not limited to such a configuration, and may comprise a single closing member 61, or three or more closing members 61. The number of closing members 61 is preferably the same as or less than the number of retainers 32.

[0052] (5) In the above embodiment, an example was described in which the link mechanism 62 includes a pivot shaft 65, a drive arm 63, a connecting shaft 63A, a driven arm 64, and a support shaft 66. However, the specific configuration of the link mechanism 62 is arbitrary, as long as it can convert the linear motion of the pair of holders 32 into the pivoting motion of the pair of closing members 61, without being limited to such a configuration.

[0053] (6) In the above embodiment, a configuration in which the change in the posture of the holder 32 and the change in the posture of the closing member 61 are linked by a link mechanism 62 was described as an example. However, the configuration is not limited to such a configuration, and the change in the posture of the holder 32 and the change in the posture of the closing member 61 may be linked by other mechanisms such as a gear mechanism or a pulley mechanism.

[0054] (7) In the above embodiment, a configuration in which the attitude of the pair of closing members 61 changes by a pivoting motion was described as an example. However, the configuration is not limited to such a configuration, and for example, the attitude of the pair of closing members 61 may change by linear movement along the front-rear direction X (width direction T).

[0055] (8) In the above embodiment, a configuration was described as in which the widthwise dimension Wc of the uncovered area of ​​the opening 86 of the container 8 by the closing member 61 in the closed position is less than the widthwise dimension Wa of the article 92. However, the configuration is not limited to such a configuration, and the widthwise dimension Wc of the uncovered area may be slightly larger than the widthwise dimension Wa of the article 92. The widthwise dimension Wc of the uncovered area may be larger than the widthwise dimension Wa of the article 92 and less than the diagonal dimension of the article 92.

[0056] (9) In the above embodiment, a configuration in which the closing member 61 (plate-shaped portion 61B) in the closed position is inclined with respect to the end of the container 8 in the entry / exit direction S was described as an example. However, the configuration is not limited to such a configuration, and the closing member 61 (plate-shaped portion 61B) in the closed position may be arranged parallel to the end of the container 8 in the entry / exit direction S. In this case, the closing member 61 (plate-shaped portion 61B) may be arranged so as to be in contact with the container 8 without being separated from the container 8 in the entry / exit direction S. Such a configuration may be structurally set to be such an arrangement in the closed position, or it may be adjustable afterward. In the latter case, for example as shown in Figure 8, it is preferable to provide an adjustment mechanism 75 that can change the angle of the plate-shaped portion 61B in the vertical view in the closed position, or the position of the plate-shaped portion 61B in the entry / exit direction S. The adjustment mechanism 75 may only be able to change the angle of the plate-shaped portion 61B, or only the position of the plate-shaped portion 61B. Alternatively, the adjustment mechanism 75 may also be capable of changing the vertical position Z of the plate-shaped portion 61B.

[0057] (10) In the above embodiment, the description mainly assumed a configuration in which the plate-like portion 61B made of resin material is used as is. However, the invention is not limited to such a configuration, and for example, a plate-like portion 61B that has been surface-treated may be used. Examples of surface treatments include anti-slip treatment by coating treatment or roughening treatment, and antistatic treatment by coating treatment.

[0058] (11) In the above embodiment, a configuration in which the wireless tag reader 70 is attached to the closing member 61 (plate-shaped portion 61B) was described as an example. However, the configuration is not limited to such a configuration, and for example, the wireless tag reader 70 may be installed on the cover body 50 (side cover portion 52) in a manner that allows it to extend and retract to the position of the wireless tag 89 attached to the container 8.

[0059] (12) In the above embodiment, the container 8 has been described as an example in which the contents 9 include a tray 91 and a plurality of articles 92 placed on it. However, the container 8 is not limited to such an embodiment, and the contents 9 may be anything that can be contained in the container 8, such as a semiconductor substrate or a semiconductor wafer.

[0060] (13) In the above embodiment, the configuration in which the transport device 1 is an overhead transport vehicle was described as an example. However, the transport device 1 is not limited to such a configuration, and may be a floor-traveling device such as an automated guided vehicle or an autonomous mobile transport robot.

[0061] (14) The configurations disclosed in each of the above-described embodiments (including the above-described embodiments and other embodiments; the same applies hereinafter) can be applied in combination with configurations disclosed in other embodiments, insofar as they do not cause a conflict. With respect to other configurations, the embodiments disclosed herein are illustrative in all respects and can be modified as appropriate without departing from the spirit of the disclosure.

[0062] [Summary of the Embodiments] In summary, the transport device according to this disclosure preferably comprises the following configurations.

[0063] A transport device for transporting containers having openings on the sides for loading and unloading contents, A holding device comprising: a plurality of holders; and a drive device for changing the orientation of the plurality of holders between a holding orientation for holding the container and a release orientation for releasing the container; The container, held by the holding device, is equipped with a restricting device that prevents the contents from spilling out of the opening of the container, The direction in which the contained object is inserted into or removed through the opening is defined as the inlet / outlet direction. The restricting device includes a closing member that changes its posture between a closed position that overlaps with the opening when viewed in the direction of entry and exit, and an open position that does not overlap with the opening when viewed in the direction of entry and exit. The closing member is configured to move in conjunction with the change in the posture of the holder, so that when the holder assumes the holding posture, the closing member moves to the closed position, and when the holder assumes the releasing position, the closing member moves to the open position.

[0064] This configuration prevents contents from spilling out of the container opening by closing the closure member of the regulating device during transport. Furthermore, since the change in the closure member's position between closed and open is linked to the change in the holder's position between holding and releasing, there is no need to provide a dedicated drive mechanism for changing the closure member's position. Therefore, the device can be made smaller and simpler.

[0065] As one aspect, The container has multiple rows of slots arranged in the vertical direction, The contents include a tray placed in the slot and a plurality of articles placed on the tray. The direction perpendicular to the vertical direction and the direction of entry / exit is defined as the width direction. In the view in the direction of entry and exit, it is preferable that the width dimension of the area in the opening that is not covered by the closing member in the closed position is less than the width dimension of the article.

[0066] With this configuration, when the closing member is in the closed position, it is possible to effectively prevent the contents from spilling out of the container opening.

[0067] As one aspect, The container has multiple rows of slots arranged in the vertical direction, The contents to be contained can be placed in each of the multiple slots, Preferably, the closing member includes a plate-like portion that, in the closed position, overlaps with all of the multiple slots when viewed in the direction of entry and exit, and is positioned to face the opening.

[0068] With this configuration, the plate-shaped portion of the closing member overlaps with all of the multiple slots when viewed in the entry / exit direction in the closed position, thus effectively preventing all contents from spilling out. Since the plate-shaped portion is positioned to face the opening of the container in the closed position, it can cover a relatively wide area of ​​the opening, effectively preventing the contents from spilling out.

[0069] As one aspect, The restricting device comprises a pair of the closing members, Each of the pair of closing members is supported so as to be able to rotate around a rotation axis along the vertical direction, Preferably, the closing member is in the closed position when the plate-shaped portions of the pair of closing members rotate toward each other, and in the open position when the plate-shaped portions of the pair of closing members rotate toward each other.

[0070] This configuration allows for the simplification of a restricting device that includes a pair of closing members that change between a closed position and an open position.

[0071] As one aspect, The holding device comprises a pair of holding bodies, and the drive device is configured to change the posture between the holding posture and the releasing posture by moving the pair of holding bodies closer together and further apart. Preferably, the restricting device includes a link mechanism that links the pair of holders and the pair of closing members such that the plate-shaped portions of the pair of closing members rotate toward each other in conjunction with the separation movement of the pair of holders, and the plate-shaped portions of the pair of closing members rotate toward each other in conjunction with the approach movement of the pair of holders.

[0072] In this configuration, the link mechanism converts the linear motion associated with the approaching and separating movements of the pair of retainers into the rotational motion of the pair of closing members. Therefore, a mechanism that links the change in posture between the closed and open positions of the pair of closing members to the change in posture between the held and released positions of the pair of retainers can be realized with a relatively simple configuration.

[0073] As one aspect, Preferably, the restricting device includes an adjustment mechanism that allows changing at least one of the angle of the plate-shaped portion in the vertical view and the position of the plate-shaped portion in the inward and outward direction in the closed position.

[0074] With this configuration, at least one of the angle and position of the plate-like section can be adjusted according to the size and shape of the container being transported. Therefore, the range of the opening covered by the plate-like section and the distance between the container and the plate-like section in the direction of entry and exit can be adjusted, making it possible to appropriately prevent the contents from spilling out regardless of the size and shape of the container.

[0075] As one aspect, Preferably, a wireless tag reader for reading the wireless tag provided on the container is attached to the closing member.

[0076] With this configuration, when the closing member is in a closed position, covering the opening of the container and approaching the container, the wireless tag attached to the container can be read by the wireless tag reader attached to the closing member. Therefore, it is possible to confirm during transport whether the container being transported is the intended container or not.

[0077] The transport device relating to this disclosure only needs to achieve at least one of the effects described above. [Explanation of symbols]

[0078] 1. Conveying device 8 containers 9. Items contained 30 Holding device 32 Holding body 33 Holding drive device (drive device) 60 Regulatory device 61 Closing member 61B Plate-shaped part 62 Link Mechanism 70 Wireless Tag Readers 75 Adjustment mechanism 86 Aperture 88 slots 89 Wireless Tags 91 Tray 92 Goods Z vertical direction S Entry / exit direction T Width direction Wa: Width dimension of an article Wb Dimensions of the direction in which items enter and exit Wc width dimension of the uncovered area Wd Gap between the closing member and the container opening in the inward / outward direction

Claims

1. A transport device for transporting a container having an opening on the side for loading and unloading the contents and a holder on top, A holding device comprising: a plurality of holders; and a drive device for changing the orientation of the plurality of holders between a holding orientation for holding the object to be held and a release orientation for releasing the object to be held; The container, in which the object to be held is held by the holding device, is equipped with a restricting device that restricts the object to be contained from falling out of the opening of the container, The direction in which the contained object is inserted into or removed through the opening is defined as the inlet / outlet direction. The restricting device includes a closing member that changes its posture between a closed position that overlaps with the opening when viewed in the direction of entry and exit, and an open position that does not overlap with the opening when viewed in the direction of entry and exit. The system includes an interlocking mechanism that links the change in the posture of the holder with the change in the posture of the closing member, A conveying device in which the closing member is configured by the interlocking mechanism to move in conjunction with a change in the posture of the holder, so that when the holder assumes the holding posture, the closing member assumes the closed posture, and when the holder assumes the releasing posture, the closing member assumes the open posture.

2. The container has multiple rows of slots arranged in the vertical direction, The contents include a tray placed in the slot and a plurality of articles placed on the tray. The direction perpendicular to the vertical direction and the direction of entry / exit is defined as the width direction, The conveying device according to claim 1, wherein, in the view in the direction of entry and exit, the width dimension of the area in the opening that is not covered by the closing member in the closed position is less than the width dimension of the article.

3. The container has multiple rows of slots arranged in the vertical direction, The contents to be contained can be placed in each of the multiple slots, The conveying device according to claim 1, wherein the closing member comprises a plate-shaped portion that, in the closed position, overlaps with all of the plurality of slots when viewed in the direction of entry and exit, and is positioned to face the opening.

4. The restricting device comprises a pair of closing members, Each of the pair of closing members is supported so as to be able to pivot around a rotation axis along the vertical direction, The conveying device according to claim 3, wherein the closing members are configured to assume the closed position when the plate-shaped portions of a pair of closing members rotate toward each other, and to assume the open position when the plate-shaped portions of a pair of closing members rotate toward each other.

5. The holding device comprises a pair of holding bodies, and the drive device is configured to change the posture between the holding posture and the releasing posture by moving the pair of holding bodies closer together and further apart. The conveying device according to claim 4, further comprising a link mechanism that links a pair of holders and a pair of closing members such that the plate-shaped portions of a pair of closing members rotate toward each other in conjunction with the separation movement of a pair of holders, and rotate toward each other in conjunction with the approaching movement of a pair of holders.

6. The conveying device according to claim 3, wherein the restricting device includes an adjustment mechanism that can change at least one of the angle of the plate-shaped portion in a vertical view along the vertical direction and the position of the plate-shaped portion in the inward and outward direction in the closed position.

7. The transport device according to any one of claims 1 to 6, wherein a wireless tag reader for reading a wireless tag provided in the container is attached to the closing member.

8. A transport device for transporting containers having openings on the sides for loading and unloading contents, A holding device comprising: a plurality of holders; and a drive device for changing the orientation of the plurality of holders between a holding orientation for holding the container and a release orientation for releasing the container; The container, held by the holding device, is equipped with a restricting device that prevents the contents from spilling out of the opening of the container, The direction in which the contained object is inserted into or removed through the opening is defined as the inlet / outlet direction. The restricting device includes a closing member that changes its posture between a closed position that overlaps with the opening when viewed in the direction of entry and exit, and an open position that does not overlap with the opening when viewed in the direction of entry and exit. The closing member is configured to move in conjunction with the change in the posture of the holder, so that when the holder assumes the holding posture, the closing member moves to the closed position, and when the holder assumes the releasing position, the closing member moves to the open position. The container has multiple rows of slots arranged in the vertical direction, The contents include a tray placed in the slot and a plurality of articles placed on the tray. The direction perpendicular to the vertical direction and the direction of entry / exit is defined as the width direction, A conveying device in which, in the view in the direction of entry and exit, the width dimension of the area in the opening that is not covered by the closing member in the closed position is less than the width dimension of the article.

9. A transport device for transporting containers having openings on the sides for loading and unloading contents, A holding device comprising: a plurality of holders; and a drive device for changing the orientation of the plurality of holders between a holding orientation for holding the container and a release orientation for releasing the container; The container, held by the holding device, is equipped with a restricting device that prevents the contents from spilling out of the opening of the container, The direction in which the contained object is inserted into or removed through the opening is defined as the inlet / outlet direction. The restricting device includes a closing member that changes its posture between a closed position that overlaps with the opening when viewed in the direction of entry and exit, and an open position that does not overlap with the opening when viewed in the direction of entry and exit. The closing member is configured to move in conjunction with the change in the posture of the holder, so that when the holder assumes the holding posture, the closing member moves to the closed position, and when the holder assumes the releasing position, the closing member moves to the open position. The container has multiple rows of slots arranged in the vertical direction, The contents to be contained can be placed in each of the multiple slots, The closing member comprises a plate-shaped portion that, in the closed position, overlaps with all of the multiple slots when viewed in the direction of entry and exit, and is positioned to face the opening. The restricting device comprises a pair of closing members, Each of the pair of closing members is supported so as to be able to pivot around a rotation axis along the vertical direction, The closing member is a conveying device in which the plate-shaped portions of a pair of closing members rotate toward each other to assume the closed position, and the plate-shaped portions of a pair of closing members rotate toward each other to assume the open position.

10. A transport device for transporting containers having openings on the sides for loading and unloading contents, A holding device comprising: a plurality of holders; and a drive device for changing the orientation of the plurality of holders between a holding orientation for holding the container and a release orientation for releasing the container; The container, held by the holding device, is equipped with a restricting device that prevents the contents from spilling out of the opening of the container, The direction in which the contained object is inserted into or removed through the opening is defined as the inlet / outlet direction. The restricting device includes a closing member that changes its posture between a closed position that overlaps with the opening when viewed in the direction of entry and exit, and an open position that does not overlap with the opening when viewed in the direction of entry and exit. The closing member is configured to move in conjunction with the change in the posture of the holder, so that when the holder assumes the holding posture, the closing member moves to the closed position, and when the holder assumes the releasing position, the closing member moves to the open position. The container has multiple rows of slots arranged in the vertical direction, The contents to be contained can be placed in each of the multiple slots, The closing member comprises a plate-shaped portion that, in the closed position, overlaps with all of the multiple slots when viewed in the direction of entry and exit, and is positioned to face the opening. A conveying device comprising an adjustment mechanism that allows the restricting device to change at least one of the angle of the plate-shaped portion in a vertical view along the vertical direction and the position of the plate-shaped portion in the inward and outward direction in the closed position.

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