Coating apparatus, coating method, and method for manufacturing laminates

Abstract

To provide a coating device that can suppress variation in a coating film thickness, a coating method and a laminate manufacturing method.SOLUTION: A coating device has: a tray; a first squeegee; a second squeegee; a roller; a squeegee drive part which forms a first liquid film having a first film thickness from liquid accommodated in the tray by driving the first squeegee, and after formation of the first liquid film, forms a second liquid film having a prescribed second film thickness thinner than the first liquid film from the first liquid film accommodated in the tray by driving the second squeegee; and a roller drive part which drives the roller, thereby causing the second liquid film to adhere to the roller, pressing the roller, to which the second liquid film is adhered, against a member to be coated, and forming a coating film on a surface of the member to be coated.SELECTED DRAWING: Figure 12

Description

[Technical Field]

[0001] The present disclosure relates to a coating apparatus, a coating method, and a method for manufacturing a laminate. [Background Art]

[0002] A solution such as an adhesive is sometimes coated onto a member to be coated such as a green sheet. In this coating process, a roller is rotated in a tray containing the solution to cause the solution to adhere to the roller, and then the roller is rotated over the member to be coated, thereby forming a coating film on the surface of the member to be coated. [Prior Art Literature] [Patent Literature]

[0003] [Patent Literature 1] Japanese Unexamined Patent Publication No. 2002-102790 [Summary of Invention] [Problem to be Solved by the Invention]

[0004] In conventional coating methods, variation is likely to occur in the amount of the solution that adheres to the roller. This variation is particularly likely to be prominent when the amount of the solution that adheres to the roller is small. When such variation occurs, coating unevenness occurs within a single member to be coated, or variation in coating film thickness occurs between a plurality of members to be coated.

[0005] An object of the present disclosure is to provide a coating apparatus, a coating method, and a method for manufacturing a laminate that can suppress variation in coating film thickness. [Means for Solving the Problem]

[0006] According to one embodiment of the present disclosure, the present invention comprises a tray, a first squeegee, a second squeegee, a roller, a squeegee drive unit that drives the first squeegee to form a first liquid film having a first thickness from the liquid contained in the tray, and after the formation of the first liquid film, drives the second squeegee to form a second liquid film having a predetermined second thickness that is thinner than the first liquid film from the first liquid film contained in the tray, and a roller drive unit that drives the roller to adhere the second liquid film to the roller, and presses the roller with the second liquid film attached to it against a member to be coated to form a coating film on the surface of the member to be coated. Furthermore, the viscosity of the liquid is 10 mPa·s or more, and the squeegee drive unit, when the roller drive unit adheres the second liquid film to the roller, uses the second squeegee to hold back the portion of the liquid that is not included in the second liquid film between the inner surface of the tray and the second squeegee. A coating apparatus is provided. [Effects of the Invention]

[0007] According to the disclosed technology, variations in the thickness of the coating film can be suppressed. [Brief explanation of the drawing]

[0008] [Figure 1] This is a top view illustrating a coating apparatus according to an embodiment. [Figure 2] This is a front view illustrating a coating apparatus according to an embodiment. [Figure 3] This is a side view illustrating a coating apparatus according to an embodiment. [Figure 4] This is a cross-sectional view illustrating a Z-axis drive device and rollers. [Figure 5] This is a top view illustrating a liquid-adhering area. [Figure 6] This is a front view illustrating a liquid-adhering area. [Figure 7] This is a side view illustrating a liquid-adhering area. [Figure 8] This flowchart illustrates a coating method using the coating apparatus according to the embodiment. [Figure 9] This figure (1) illustrates a coating method using a coating apparatus according to an embodiment. [Figure 10] This is a diagram (part 2) illustrating a coating method using a coating apparatus according to an embodiment. [Figure 11]This is a diagram (part 3) illustrating a coating method using a coating apparatus according to an embodiment. [Figure 12] This is a diagram (part 4) illustrating a coating method using a coating apparatus according to the embodiment. [Figure 13] Figure (5) illustrates a coating method using a coating apparatus according to an embodiment. [Figure 14] Figure (6) illustrates a coating method using a coating apparatus according to an embodiment. [Modes for carrying out the invention]

[0009] The embodiments will be described in detail below with reference to the attached drawings. In this specification and drawings, components having substantially the same functional configuration will be denoted by the same reference numerals to avoid redundant explanations. In this disclosure, the X1-X2 direction, Y1-Y2 direction, and Z1-Z2 direction are mutually orthogonal directions. The plane including the X1-X2 direction and the Y1-Y2 direction is described as the XY plane, the plane including the Y1-Y2 direction and the Z1-Z2 direction is described as the YZ plane, and the plane including the Z1-Z2 direction and the X1-X2 direction is described as the ZX plane. For convenience, the Z1-Z2 direction is considered the up and down direction, with the Z1 side being the upper side and the Z2 side being the lower side. Furthermore, a plan view means viewing the object from the Z1 side, and a planar shape means the shape of the object as viewed from the Z1 side.

[0010] This embodiment relates to a coating apparatus. Figure 1 is a top view illustrating a coating apparatus according to the embodiment. Figure 2 is a front view illustrating a coating apparatus according to the embodiment. Figure 3 is a side view illustrating a coating apparatus according to the embodiment. Figure 1 shows the coating apparatus as viewed from the Z1 side, Figure 2 shows the coating apparatus as viewed from the Y2 side, and Figure 3 shows the coating apparatus as viewed from the X1 side.

[0011] As shown in Figures 1 to 3, the coating apparatus 1 according to this embodiment includes a stage 10, a roller 20, a roller drive unit 30, a liquid application unit 40, and a fixing device 50.

[0012] The roller driving unit 30 includes a Y-axis driving device 11, an X-axis driving device 12, and a Z-axis driving device 13.

[0013] The Y-axis driving device 11 is fixed to the stage 10, and moves the X-axis driving device 12 in the Y1-Y2 direction. The Y-axis driving device 11 is arranged on the Z1 side of the stage 10. The Y-axis driving device 11 includes, for example, a rail and a slider. The rail is fixed to the stage 10 so as to extend in the Y1-Y2 direction. The slider is attached to the rail so as to be movable in the Y1-Y2 direction.

[0014] The X-axis driving device 12 is fixed to the Y-axis driving device 11, and moves the Z-axis driving device 13 in the X1-X2 direction. The X-axis driving device 12 includes, for example, a rail and a slider. The rail extends in the X1-X2 direction. The slider is attached to the rail so as to be movable in the X1-X2 direction.

[0015] The Z-axis driving device 13 is fixed to the X-axis driving device 12, and moves the roller 20 in the Z1-Z2 direction. FIG. 4 is a cross-sectional view illustrating the Z-axis driving device 13 and the roller 20.

[0016] The roller 20 includes a columnar or cylindrical shaft 21 extending in the X1-X2 direction, and a sheet 22 provided on the peripheral surface of the shaft 21 and capable of absorbing and discharging liquid. It is preferable that the sheet 22 has flexibility. The sheet 22 is formed of a flexible porous body such as sponge, for example.

[0017] The Z-axis drive unit 13 includes a frame 61, a bearing 62, an air cylinder 63, two linear bushings 64, a connecting member 65, and an electro-pneumatic regulator 66. The frame 61 rotatably holds both ends of the axis 21 of the roller 20 via the bearing 62. The frame 61 includes an X-axis extension 61A located on the Z1 side of the roller 20 and extending in the X1-X2 direction. In the X1-X2 direction, the air cylinder 63 is fixed to the center of the X-axis extension 61A, and two linear bushings 64 are fixed to the X-axis extension 61A with the air cylinder 63 in between. The connecting member 65 connects the X-axis extension 61A and the two linear bushings 64 at a position away from the frame 61 in the Z1-Z2 direction. The electro-pneumatic regulator 66 drives the air cylinder 63. When the air cylinder 63 is driven by the electro-pneumatic regulator 66, the roller 20 moves in the Z1-Z2 direction while its position is maintained by the two linear bushings 64 and the connecting member 65.

[0018] Next, the liquid-adhering portion 40 will be described. Figure 5 is an example top view of the liquid-adhering portion 40. Figure 6 is an example front view of the liquid-adhering portion 40. Figure 7 is an example side view of the liquid-adhering portion 40. Figure 5 shows the liquid-adhering portion 40 as viewed from the Z1 side, Figure 6 shows the liquid-adhering portion 40 as viewed from the Y2 side, and Figure 7 shows the liquid-adhering portion 40 as viewed from the X1 side. In Figures 5 to 7, some components are shown in cross-section, and some components are omitted.

[0019] As shown in Figures 5 to 7, the liquid application section 40 includes a tray 43, a stage 44, a linear guide 45, a Y-axis movable member 46, and a ball screw 47. The liquid application section 40 further includes a film-setting squeegee 71, a leveling squeegee 72, squeegee support members 73 and 74, air cylinders 75 and 76, and linear guides 77 and 78. The leveling squeegee 72 is an example of a first squeegee, and the film-setting squeegee 71 is an example of a second squeegee. The linear guide 45, the Y-axis movable member 46, the ball screw 47, the squeegee support members 73 and 74, the air cylinders 75 and 76, and the linear guides 77 and 78 are included in the squeegee drive section.

[0020] The tray 43 has a table 41 and a frame 42. The table 41 is, for example, a rectangular plate with a rectangular planar shape and has a notch 41A along its outer edge where the upper surface is lower than the center. The frame 42 is positioned along the outer surface of the notch 41A. The upper surface of the frame 42 is above the upper surface of the table 41 and is configured to hold a solution inside the frame 42 on top of the upper surface of the table 41. The tray 43 holds the solution. For example, the upper surface of the table 41 is a horizontal plane.

[0021] The film-shaping squeegee 71 and the leveling squeegee 72 are positioned above the tray 43. The film-shaping squeegee 71 and the leveling squeegee 72 extend in the X1-X2 direction and have surfaces substantially parallel to the ZX plane. In plan view, the film-shaping squeegee 71 and the leveling squeegee 72 are positioned inside the frame 42. The squeegee support member 73 supports the film-shaping squeegee 71, and the squeegee support member 74 supports the leveling squeegee 72. The squeegee support members 73 and 74 extend in the X1-X2 direction, and in plan view, both ends of the squeegee support members 73 and 74 are located outside the tray 43.

[0022] A stage 44 is positioned below the tray 43, and the tray 43 is fixed to the stage 44. Two linear guides 45 are also fixed to the stage 44 so as to extend in the Y1-Y2 direction. The linear guides 45 have, for example, a rail and a slider. The rail is fixed to the stage 44 so as to extend in the Y1-Y2 direction. The slider is mounted on the rail so as to be movable in the Y1-Y2 direction. The linear guides 45 are located between the stage 44 and the tray 43. The Y-axis movable member 46 has a base 46A, two linear guide fixing parts 46B, and two air cylinder holding parts 46C. The base 46A extends in the X1-X2 direction, and in plan view, both ends of the base 46A are located outside the tray 43. One of the linear guide fixing parts 46B is connected to the X1-side end of the base 46A and has a surface parallel to the YZ plane on the X1 side. The other linear guide fixing portion 46B is connected to the X2-side end of the base portion 46A and has a surface parallel to the YZ plane on the X2 side. The other air cylinder holding portion 46C extends from the lower end of the linear guide fixing portion 46B on the X1 side toward the X1 side and has a surface parallel to the XY plane on the Z1 side. The other air cylinder holding portion 46C extends from the lower end of the linear guide fixing portion 46B on the X2 side toward the X2 side and has a surface parallel to the XY plane on the Z1 side.

[0023] The base portion 46A is fixed to the slider of the linear guide 45. A ball screw 47 extending in the Y1-Y2 direction between the two linear guides 45 is also attached to the base portion 46A. Therefore, the Y-axis movable member 46 can move in the Y1-Y2 direction by the ball screw 47 while being guided by the linear guide 45.

[0024] One pair of linear guides 77 and 78 are fixed to the linear guide fixing part 46B on the X1 side, extending in the Z1-Z2 direction, and the other pair of linear guides 77 and 78 are fixed to the linear guide fixing part 46B on the X2 side. Linear guide 77 is located on the Y1 side of linear guide 78. Linear guides 77 and 78 include, for example, a rail and a slider. The rail is fixed to the linear guide fixing part 46B so as to extend in the X1-X2 direction. The slider is mounted on the rail so as to be movable in the Z1-Z2 direction.

[0025] One pair of air cylinders 75 and 76 are held on the air cylinder holder 46C on the X1 side, and the other pair of air cylinders 75 and 76 are held on the air cylinder holder 46C on the X2 side. Air cylinder 75 is located on the Y1 side of air cylinder 76.

[0026] The squeegee support member 73, which supports the film-forming squeegee 71, is fixed to the slider of the linear guide 77. An air cylinder 75 is also connected to the squeegee support member 73. Therefore, the film-forming squeegee 71 is guided by the linear guide 77 and can move in the Z1-Z2 direction by the air cylinder 75.

[0027] The squeegee support member 74, which supports the leveling squeegee 72, is fixed to the slider of the linear guide 78. An air cylinder 76 is also connected to the squeegee support member 74. Therefore, the leveling squeegee 72 is guided by the linear guide 78 and can move in the Z1-Z2 direction by the air cylinder 76.

[0028] Furthermore, as described above, the ball screw 47 allows the Y-axis movable member 46 to be moved in the Y1-Y2 direction. Therefore, it is also possible to move the film-setting squeegee 71 and the leveling squeegee 72 in the Y1-Y2 direction via the Y-axis movable member 46 using the ball screw 47.

[0029] Next, a coating method using the coating apparatus 1 according to the embodiment will be described. Figure 8 is a flowchart illustrating a coating method using the coating apparatus 1 according to the embodiment. Figures 9 to 14 are diagrams illustrating a coating method using the coating apparatus 1 according to the embodiment. In this example, an adhesive is applied as a solution to multiple green sheets. The green sheets are an example of the material to be coated, and the adhesive is an example of a liquid.

[0030] First, in step S1, solution 80 is supplied into tray 43 as shown in Figure 9(a). Solution 80 is, for example, a mixture of triacetin, polyethylene glycol (PEG), and a nonionic surfactant. As the nonionic surfactant, for example, Triton X (trade name) can be used. The viscosity of solution 80 is not limited, but the viscosity of solution 80 used as an adhesive for the green sheet is, for example, 10 mPa·s or more. When supplying solution 80, the film-setting squeegee 71 and the leveling squeegee 72 are positioned in predetermined standby positions. The standby positions are, for example, positions located a predetermined distance from the top surface of table 41 toward Z1. Depending on the viscosity of solution 80, the solution 80 may not spread easily and may be supplied in a cone shape to a part of the top surface of table 41.

[0031] Next, in step S2, a first liquid film is formed from the solution 80 contained in the tray 43. In forming the first liquid film, first, as shown in Figure 9(b), the leveling squeegee 72 is lowered by the air cylinder 76. At this time, the lower end of the leveling squeegee 72 is not in contact with the upper surface of the table 41, and a distance equal to the thickness of the first liquid film to be formed is maintained between it and the upper surface of the table 41. Then, as shown in Figure 10(a), the leveling squeegee 72 is moved toward the Y1 side by the ball screw 47. As a result, the surface of the solution 80 is leveled, and a first liquid film 81 having a predetermined thickness is formed from the solution 80. If a first liquid film 81 having a predetermined thickness is not formed with only one movement of the leveling squeegee 72 in the Y1-Y2 direction, the leveling squeegee 72 may be moved multiple times in the Y1-Y2 direction. Furthermore, since the film-shaping squeegee 71 is attached to the same Y-axis movable member 46 as the leveling squeegee 72, the film-shaping squeegee 71 also moves in the Y1-Y2 direction as the leveling squeegee 72 moves. The film-shaping squeegee 71 may come into contact with the solution 80 if its lower end is above the lower end of the leveling squeegee 72.

[0032] Next, in step S3, a second liquid film thinner than the first liquid film 81 is formed from the first liquid film 81. In forming the second liquid film, first, as shown in Figure 10(b), the leveling squeegee 72 is raised by the air cylinder 76 and the film-forming squeegee 71 is lowered by the air cylinder 75. At this time, the lower end of the film-forming squeegee 71 is not in contact with the upper surface of the table 41, and a distance equal to the thickness of the second liquid film to be formed is maintained between it and the upper surface of the table 41.

[0033] Then, as shown in Figure 11(a), the ball screw 47 moves the film-setting squeegee 71 toward the Y2 side. As a result, a second liquid film 82 having a predetermined thickness is formed from the first liquid film 81. Since the leveling squeegee 72 is attached to the same Y-axis movable member 46 as the film-setting squeegee 71, the leveling squeegee 72 also moves in the Y1-Y2 direction as the film-setting squeegee 71 moves. The thickness of the second liquid film 82 is, for example, several tens of micrometers.

[0034] Furthermore, even if the film-forming squeegee 71 is not in contact with the upper surface of the table 41, the film-forming squeegee 71 acts as a barrier, making it difficult for the solution 80 accumulated between the film-forming squeegee 71 and the frame 42 on the Y2 side to flow towards the second liquid film 82. In particular, if the viscosity of the solution 80 is 10 mPa·s or higher, the solution 80 is difficult to flow towards the second liquid film 82.

[0035] Next, in step S4, the second liquid film 82 (solution 80) is applied to the roller 20. For application to the roller 20, first, the air cylinder 63 is driven by the electro-pneumatic regulator 66, and as shown in Figure 11(b), the roller 20 is lowered and pressed against the upper surface of the table 41 with a load F11. As a result, the sheet 22 of the roller 20 comes into contact with the second liquid film 82. While the second liquid film 82 (solution 80) is applied to the roller 20, it is preferable that the film-forming squeegee 71 holds back the portion of the solution 80 that is not included in the second liquid film 82 between the inner surface of the tray 43 and the film-forming squeegee 71.

[0036] Next, as shown in Figure 12(a), the roller 20 is pressed against the upper surface of the table 41 with a load F11, and the Y-axis drive unit 11 moves the roller 20 a predetermined distance toward the Y2 side. As the roller 20 moves, it rotates, and the second liquid film 82 adheres to the circumferential surface of the roller 20. For example, the second liquid film 82 is absorbed by the sponge sheet 22. The distance the roller 20 moves is not limited, but for example, it is set to the distance of one rotation of the roller 20. The load F11 is set to a load that makes it easy for the second liquid film 82 to adhere to the circumferential surface of the roller 20.

[0037] Then, after moving the roller 20, the electro-pneumatic regulator 66 drives the air cylinder 63 to raise the roller 20 and move it away from the second liquid film 82, as shown in Figure 12(b).

[0038] Next, in step S5, a coating is formed on the green sheet. In forming the coating, first, the green sheet 51 is fixed to the fixing device 50, as shown in Figure 13(a). For example, the fixing device 50 fixes the green sheet 51 by electrostatic attraction. The Y-axis drive device 11 moves the roller 20 from above the liquid-adhering section 40 to above the fixing device 50. Then, the electro-pneumatic regulator 66 drives the air cylinder 63 to lower the roller 20 and press it against the upper surface of the green sheet 51 with a load F21.

[0039] Next, as shown in Figure 13(b), the roller 20 is pressed against the upper surface of the green sheet 51 with a load F21, and the roller 20 is moved to the Y2 side by the Y-axis drive device 11. As the roller 20 rotates during the movement, at least a portion of the second liquid film 82 that was adhering to the circumferential surface of the roller 20 adheres to the upper surface of the green sheet 51, and the coating film 52 is formed. The load F21 is set to a load that makes it easy for the second liquid film 82 to move from the circumferential surface of the roller 20 to the upper surface of the green sheet 51. The load F21 may be different from the load F11. For example, the load F21 may be greater than the load F11.

[0040] Subsequently, as shown in Figure 14(a), the roller 20 is pressed against the upper surface of the green sheet 51 with a load F22, and the roller 20 is moved back and forth in the Y1-Y2 direction by the Y-axis drive unit 11. During the reciprocating movement, the roller 20 rotates, and the second liquid film 82 that was adhering to the circumferential surface of the roller 20 adheres further to the upper surface of the green sheet 51, making the coating film 52 thicker. The load F22 is set to a load that makes it easy for the second liquid film 82 to move further from the circumferential surface of the roller 20 to the upper surface of the green sheet 51. The load F22 may differ from loads F21 and F21. For example, the load F22 may be smaller than loads F11 and F21. It is preferable that the entire second liquid film 82 moves to the upper surface of the green sheet 51, but a part of the second liquid film 82 may remain on the circumferential surface of the roller 20. The number of reciprocating movements should be, for example, set to a number that substantially prevents the second liquid film 82 from moving to the upper surface of the green sheet 51. The number of round trips may be predetermined.

[0041] After the roller 20 has been moved back and forth, the electro-pneumatic regulator 66 drives the air cylinder 63 to raise the roller 20 and move it away from the coating 52, as shown in Figure 14(b).

[0042] Next, in step S6, it is determined whether a predetermined number of processes, i.e., the formation of a predetermined number of coating films 52 on the green sheets 51, has been completed. If the predetermined number of processes has been completed, the process ends there.

[0043] On the other hand, if a predetermined number of processes have not been completed, it is determined whether the remaining amount of solution 80 in tray 43 is equal to or greater than a predetermined value. That is, since the amount of solution 80 in tray 43 decreases with each formation of the coating film 52, it is determined whether there is enough solution 80 remaining to continue the process. If the remaining amount of solution 80 in tray 43 is equal to or greater than a predetermined value, the process returns to step S2, a first liquid film 81 is formed from the remaining solution 80 in tray 43, and then the process from step S3 onwards is performed. If the remaining amount of solution 80 in tray 43 is less than a predetermined value, the process returns to step S1, solution 80 is supplied, and then the process from step S2 onwards is performed.

[0044] With this coating method using coating apparatus 1, the thickness of the second liquid film 82 attached to the roller 20 can be kept constant. Therefore, by keeping the distance the roller 20 is moved constant in step S4, even when the amount of solution 80 attached to the roller 20 is small, fluctuations in the amount of solution 80 attached to the roller 20 can be suppressed. As a result, the uniformity of the thickness of the coating film 52 within the green sheet 51 can be improved, suppressing uneven coating, and the uniformity of the thickness of the coating film 52 between multiple green sheets 51 can also be improved.

[0045] Furthermore, in the coating apparatus 1, the air cylinder 63 is controlled using an electro-pneumatic regulator 66, and the load applied when pressing the roller 20 against the upper surface of the table 41 or the green sheet 51 is variable. Therefore, it is possible to easily apply the second liquid film 82 (solution 80) to the roller 20 while also making it easier to move the second liquid film 82 (solution 80) from the roller 20 to the green sheet 51. As a result, excellent uniformity in the thickness of the coating film 52 can be obtained. Note that the load applied when pressing the roller 20 against the upper surface of the table 41 or the green sheet 51 may be made variable by motor drive or the like.

[0046] The material to be coated is not limited to the green sheet 51, and other materials may be used. Furthermore, other liquids may be applied to the material to be coated instead of the solution 80.

[0047] The coating apparatus 1 can be used in a method for manufacturing a laminate. For example, a laminate can be manufactured by forming a coating film 52 on a green sheet 51 using a solution 80 containing an adhesive component, and then attaching another green sheet to the green sheet 51 via the coating film 52. For example, a ceramic laminate such as an electrostatic chuck can be manufactured as the laminate.

[0048] Although preferred embodiments have been described in detail above, the invention is not limited to the embodiments described above, and various modifications and substitutions can be made to the embodiments described above without departing from the scope of the claims. [Explanation of Symbols]

[0049] 1. Coating device 20 Laura 21 axes 22 seats 30 Roller drive unit 40 Liquid-attached area 43 Trays 50 Fixation device 51 Green Sheet 52 Coating film 71 Film-setting squeegee 72 leveling squeegee 80 solution

Claims

1. A tray and First squeegee and, The second squeegee and, Laura and, A squeegee drive unit drives the first squeegee to form a first liquid film having a first thickness from the liquid contained in the tray, and after the formation of the first liquid film, drives the second squeegee to form a second liquid film having a predetermined second thickness that is thinner than the first liquid film from the first liquid film contained in the tray, A roller drive unit that drives the roller to adhere the second liquid film to the roller, and presses the roller with the second liquid film attached to it against the member to be coated to form a coating film on the surface of the member to be coated, It has, The viscosity of the aforementioned liquid is 10 mPa·s or more. The coating apparatus is characterized in that, when the roller drive unit applies the second liquid film to the roller, the second squeegee holds back the portion of the liquid that is not included in the second liquid film between the inner surface of the tray and the second squeegee.

2. The coating apparatus according to claim 1, characterized in that the roller drive unit presses the roller against the bottom surface of the tray containing the liquid when attaching the second liquid film to the roller.

3. A step of forming a first liquid film having a first thickness from a liquid contained in a tray using a first squeegee, After the formation of the first liquid film, a second liquid film having a predetermined second thickness that is thinner than the first liquid film is formed from the first liquid film contained in the tray using a second squeegee, A step of applying the second liquid film to the roller, A step of pressing the roller to which the second liquid film is attached against the member to be coated to form a coating film on the surface of the member to be coated, It has, The viscosity of the aforementioned liquid is 10 mPa·s or more. A coating method characterized in that, in the step of attaching the second liquid film to the roller, the second squeegee holds back the portion of the liquid that is not included in the second liquid film between the inner surface of the tray and the second squeegee.

4. A step of forming a first liquid film having a first thickness from a liquid containing an adhesive component contained in a tray using a first squeegee, After the formation of the first liquid film, a second liquid film having a predetermined second thickness that is thinner than the first liquid film is formed from the first liquid film contained in the tray using a second squeegee, A step of applying the second liquid film to the roller, A step of pressing the roller to which the second liquid film is attached against the member to be coated to form a coating film on the surface of the member to be coated, A step of attaching the member to be adhered to the member to be coated via the coating film, It has, The viscosity of the aforementioned liquid is 10 mPa·s or more. A method for manufacturing a laminate, characterized in that, in the step of attaching the second liquid film to the roller, the second squeegee holds back the portion of the liquid that is not included in the second liquid film between the inner surface of the tray and the second squeegee.

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