Processing equipment

Abstract

To enable presence / absence of rotation of a processing tool mounted on a spindle and a chuck table to be easily and visually confirmed.SOLUTION: A processing device has a chuck table which has a holding surface for holding workpiece and is rotatable around a predetermined rotation axis, a processing unit which has a spindle and has a processing tool for processing the workpiece mounted on the spindle, an illumination device for illuminating at least one of the chuck table and the processing unit, and a control part which has a signal generator and controls the illumination device, wherein the control part continuously changes a blinking period so that a blinking period of light emitted from the illumination device includes a period different from integral multiples of a rotation period, on the basis of a rotation period of rotating one of the chuck table and the spindle.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a machining apparatus comprising a chuck table rotatable around a predetermined axis of rotation and a machining unit having a spindle on which a machining tool is mounted. [Background technology]

[0002] Semiconductor device chips are manufactured by processing wafers made of single-crystal silicon. For example, first, multiple devices such as ICs (Integrated Circuits) are formed on the surface side of the wafer in a predetermined arrangement.

[0003] Next, the back side of the wafer is ground with a grinding device to thin it to a predetermined thickness, and then the wafer is cut along each of the multiple streets set on the wafer to divide it into multiple semiconductor device chips.

[0004] The grinding apparatus used for grinding wafers has a disc-shaped chuck table. Above the chuck table is a grinding unit. The grinding unit has a cylindrical spindle.

[0005] The longitudinal direction of the spindle is aligned with the height direction of the grinding device, and a grinding wheel is mounted on the lower end of the spindle. The grinding wheel has an annular base and a plurality of grinding wheels arranged at approximately equal intervals along the circumferential direction of the base on one side of the base.

[0006] For example, when thinning a wafer by infeed grinding, the front side of the wafer is first held by suction using a chuck table. Then, the chuck table and spindle are rotated in a predetermined direction, and the grinding unit is fed downwards, thereby grinding the back side of the wafer (see, for example, Patent Document 1).

[0007] Grinding wheels, spindles, and other components that rotate at high speed during grinding are typically covered by the housing or cover of the grinding machine. Furthermore, for safety reasons, the spindle is designed not to operate when the housing door is open.

[0008] However, during maintenance of the grinding machine, the spindle is set to operate even with the door open. During maintenance, the spindle may be rotated at a speed of, for example, around 3000 rpm to check whether the grinding wheel is functioning correctly.

[0009] Even with the door open, the inside of the enclosure remains dark, requiring light for maintenance work. However, when using a typical commercial power supply, lighting fixtures such as fluorescent lamps and LEDs (Light Emitting Diodes) emit light at a frequency of 50Hz, which can create a strobe effect that makes the grinding wheel appear not to be rotating. Furthermore, it is dangerous for an operator to directly touch a tool rotating at such high speed.

[0010] Similarly, during maintenance of grinding equipment, the chuck table may be rotated at a predetermined speed, but using the aforementioned lighting fixtures can create a strobe effect that makes it appear as if the chuck table is not rotating. Furthermore, if an operator directly touches the rotating chuck table with their hands, it could lead to an unexpected accident, and touching it through a tool could lead to damage to the chuck table. [Prior art documents] [Patent Documents]

[0011] [Patent Document 1] Japanese Patent Publication No. 2014-124690 [Overview of the project] [Problems that the invention aims to solve]

[0012] The present invention has been made in view of the above problems, and an object of the present invention is to enable easy visual confirmation of whether a processing tool mounted on a spindle or a chuck table is rotating or not. [Means for Solving the Problems]

[0013] According to one aspect of the present invention, there is provided a processing apparatus comprising: a chuck table that has a holding surface for holding a workpiece and is rotatable around a predetermined rotation axis; a processing unit that has a spindle, and a processing tool for processing the workpiece is mounted to the spindle; an illumination device for illuminating at least one of the chuck table and the processing unit; and a control unit that has a signal generator and controls the illumination device, wherein, based on the rotation period of the rotating one of the chuck table and the spindle, the control unit adjusts the blinking period of light emitted from the illumination device such that the blinking period includes a period different from an integer multiple of the rotation period Continuously to monotonically increase or monotonically decrease, or Continuously a processing apparatus that changes the period randomly or pseudo-randomly is provided.

[0014] Preferably, the illumination device includes a light source, and the control unit continuously changes the blinking period of the light source.

[0015] Preferably, the illumination device includes a light source and a shutter unit capable of blocking light emitted from the light source to the outside of the illumination device, and the control unit continuously changes the blinking period of light emitted from the illumination device by continuously changing the opening / closing period of the shutter unit. [Effects of the Invention]

[0016] The processing apparatus according to one aspect of the present invention continuously changes the blinking period of light emitted from the illumination device such that the blinking period includes a period different from an integer multiple of the rotation period of the processing tool or the chuck table. This enables visual confirmation of whether the processing tool or the chuck table is rotating or not. [Brief Description of the Drawings]

[0017] [Figure 1] It is a partial cross-sectional side view of a grinding device. [Figure 2] It is a diagram showing light emission timing according to the present embodiment. [Figure 3] It is a diagram showing light emission timing according to a comparative example. [Figure 4] Fig. 4(A) is a diagram showing the illumination device with the shutter in an open state, and Fig. 4(B) is a diagram showing the illumination device with the shutter in a closed state. [Figure 5] It is a diagram showing a state of confirming rotation of a cutting blade.

Mode for Carrying Out the Invention

[0018] An embodiment according to one aspect of the present invention will be described with reference to the accompanying drawings. First, a grinding device (processing device) 2 according to a first embodiment will be described with reference to Fig. 1. In Fig. 1, some components of the grinding device 2 are shown in a block diagram.

[0019] Further, in Fig. 1, the X-axis direction and the Y-axis direction constitute a horizontal plane and are orthogonal to each other. The Z-axis direction (vertical direction, height direction) is orthogonal to the XY plane. The grinding device 2 in Fig. 1 is an in-feed grinding device, but if a chuck table 16 described later is formed as a chuck table 16 having a substantially flat holding surface 16a, the device can also function as a creep feed grinding device.

[0020] The grinding device 2 includes a base 4 that supports or accommodates each component. On the upper surface side of the base 4, a rectangular parallelepiped recess 4a having a longitudinal portion arranged along the X-axis direction is formed. A ball screw type moving mechanism 6 is provided in the recess 4a.

[0021] The moving mechanism 6 has a pair of guide rails (not shown) arranged substantially parallel to the X-axis direction. The pair of guide rails are fixed to the base 4. A moving plate 8 is slidably attached to the upper side of the pair of guide rails.

[0022] A nut portion 10 is provided on the underside of the movable plate 8. A screw shaft 12 is rotatably connected to the nut portion 10 via a plurality of balls (not shown). The screw shaft 12 is positioned between a pair of guide rails along the X-axis direction.

[0023] A motor 14, such as a stepping motor, is connected to one end of the screw shaft 12. When the motor 14 rotates the screw shaft 12, the movable plate 8 moves along the X-axis direction. A disc-shaped chuck table 16 is positioned above the movable plate 8.

[0024] The chuck table 16 has a disc-shaped frame made of non-porous ceramics. A disc-shaped recess is formed in the upper part of the frame. A disc-shaped porous plate made of porous ceramics, having an outer diameter approximately the same as the inner diameter of the recess, is fixed in this recess.

[0025] The frame has grooves, pipes, etc., formed therein for transmitting negative pressure generated by a suction source (not shown), such as a vacuum pump, to the porous plate. The upper surface of the frame and the upper surface of the porous plate are substantially flush and constitute the holding surface 16a.

[0026] The holding surface 16a has a conical shape in which its radial center protrudes by approximately 10 to 20 μm compared to its outer edge. However, since the amount of protrusion is minute, Figure 1 shows the holding surface 16a as approximately flat. When negative pressure is applied to the porous plate with the workpiece 11 placed on the holding surface 16a, the workpiece 11 deforms to conform to the shape of the holding surface 16a and is held in place by suction from the holding surface 16a.

[0027] The workpiece 11 in this example has a disc-shaped single-crystal silicon substrate (i.e., a wafer). Multiple devices (not shown) are formed on the surface 11a side of the workpiece 11. To protect these devices, a protective tape 13 made of resin is attached to the surface 11a side.

[0028] When the surface 11a is held by the holding surface 16a, the back surface 11b of the workpiece 11 is exposed upwards. Note that the workpiece 11 is not limited to silicon and may be made of other materials. Also, a device is not essential, and the workpiece 11 does not need to have a device formed on it.

[0029] The chuck table 16 is rotatably supported by an annular table base 18 via bearings (not shown). A through hole (not shown) is formed in the radial center of the table base 18, into which the rotation shaft 16b of the chuck table 16 is inserted.

[0030] A driven pulley (not shown) is fixed to the bottom of the rotating shaft 16b. The driven pulley is connected via an endless belt (not shown) to a drive pulley (not shown) fixed to the output shaft of a rotational drive source (not shown), such as a servo motor. The chuck table 16 rotates at a speed of 100 rpm to 600 rpm (for example, 300 rpm).

[0031] The table base 18 is supported by a tilt adjustment unit 20, which is supported by a movable plate 8. The tilt adjustment unit 20 has one fixed support part 20a and two movable support parts 20b, which are arranged at approximately equal intervals along the circumferential direction of the table base 18. Note that in Figure 1, one movable support part 20b is shown.

[0032] The inclination of the table base 18 is adjusted by adjusting the height position of the upper end of the movable support part 20b in the Z-axis direction. The inclination of the table base 18 is adjusted, for example, so that a part of the holding surface 16a is approximately parallel to the grinding surface of the grinding wheel 46, which will be described later.

[0033] The rotation axis 16b also tilts in accordance with the tilt adjustment of the table base 18. However, the angle of tilt is very slight. The chuck table 16 can rotate around the rotation axis 16b at a predetermined speed (e.g., 300 rpm) with the rotation axis 16b tilted.

[0034] On both sides of the chuck table 16 in the X-axis direction, bellows-shaped cover members 22 that can expand and contract along the X-axis direction are provided. The cover members 22 prevent contamination of the moving mechanism 6 by grinding debris, grinding water, etc., generated during grinding.

[0035] A rectangular parallelepiped-shaped support structure 4b is integrally provided with the base 4 on the rear side (one side in the X-axis direction) of the grinding device 2, projecting upward. A ball screw type height adjustment unit 24 is provided on the front side (the other side in the X-axis direction) of the support structure 4b.

[0036] The height adjustment unit 24 is fixed to the front side of the support structure 4b and includes a pair of guide rails 26 arranged along the Z-axis. A rectangular movable plate 28 is fixed to the front side of the pair of guide rails 26 so as to be slidable in the Z-axis direction.

[0037] A nut portion 30 is provided on the rear side of the movable plate 28, and a screw shaft 32 is rotatably connected to the nut portion 30 via a plurality of balls (not shown). The screw shaft 32 is positioned along the Z-axis direction between a pair of guide rails 26.

[0038] A motor 34, such as a stepping motor, is connected to the upper end of the screw shaft 32 to rotate the screw shaft 32. When the motor 34 rotates the screw shaft 32, the movable plate 28 moves along the Z-axis direction.

[0039] A retaining member 38 for holding the grinding unit (processing unit) 36 is fixed to the front side of the movable plate 28. The grinding unit 36 ​​has a cylindrical spindle housing 40 fixed within the retaining member 38.

[0040] A portion of a cylindrical spindle 42, whose longitudinal direction is aligned with the Z-axis, is rotatably housed in the spindle housing 40. A motor (not shown) is provided near the upper end of the spindle 42. The spindle 42 rotates at a speed of 1000 rpm to 7000 rpm (for example, 3000 rpm).

[0041] The lower end of the spindle 42 protrudes below the lower end of the retaining member 38 through a through hole formed in the lower surface of the retaining member 38. A disc-shaped mount 44 is fixed to the lower end of the spindle 42.

[0042] An annular grinding wheel (machining tool) 46 is attached to the lower side of the mount 44 by bolts (not shown). In this way, the grinding wheel 46 is attached to the lower end of the spindle 42 via the mount 44.

[0043] The grinding wheel 46 includes an annular base 46a having an outer diameter approximately the same as that of the mount 44. The base 46a is made of a metal such as an aluminum alloy. Multiple grinding wheels 46b are fixed to the lower surface of the base 46a at approximately equal intervals along the circumferential direction of the base 46a.

[0044] Each grinding wheel 46b has abrasive grains made of diamond, cBN (cubic boron nitride), etc., and a binder (bonding material) made of resin, metal, vitrified material, etc., which fixes the abrasive grains in place. When the spindle 42 is rotated, an annular grinding surface is formed by the trajectories of the bottom surfaces of the multiple grinding wheels 46b.

[0045] The grinding surface is arranged, for example, approximately parallel to the XY plane. During grinding, the grinding wheel 46 is positioned inside a box-shaped cover member (not shown) provided to reduce the scattering of grinding debris, mist, etc.

[0046] When grinding (processing) the workpiece 11, first, the chuck table 16 is placed in the loading / unloading area A1 located in front of the grinding device 2, and the surface 11a side is held in place by suction from the chuck table 16 via the protective tape 13. Then, the chuck table 16 is placed in the grinding position A2 directly below the grinding unit 36.

[0047] Then, while rotating the spindle 42 and chuck table 16 in a predetermined direction, the grinding unit 36 ​​is fed downward at a predetermined speed. During grinding, grinding water such as pure water is supplied to the contact area between the grinding wheel 46b and the workpiece 11.

[0048] After grinding is complete, the rotation of the chuck table 16 is stopped, the chuck table 16 is returned to the loading / unloading area A1, and the worker collects the workpiece 11 after grinding.

[0049] Incidentally, the sides and top of the base 4 are covered with an exterior cover 4c. An opening 4d is formed in a part of the side of the exterior cover 4c, and a door section 4e is provided in the opening 4d so as to be openable and closable via a hinge (not shown).

[0050] Normally, the opening 4d is closed by the door section 4e. However, during maintenance of the grinding machine 2, the door section 4e is opened as shown in Figure 1, and the cover member is disassembled. After this, cleaning, parts replacement, and repairs of the chuck table 16, grinding unit 36, etc., are performed.

[0051] Because it is covered by an outer cover 4c, the inside of the grinding device 2 is dark. In this embodiment, a lighting device 50 fixed to the outside of the outer cover 4c is inserted into the inside of the grinding device 2 through an opening 4d so that an operator can perform maintenance on the grinding device 2.

[0052] The lighting device 50 has a light source 52. The light source 52 in this embodiment includes a xenon flash lamp that uses energy stored in a capacitor to instantaneously generate pulsed light (for example, strobe light with a flash duration of 0.1 ms).

[0053] The light source 52 is fixed to the tip of the articulated arm 54. Within the range of motion of the articulated arm 54, the direction of light emitted from the light source 52 can be adjusted to any direction, and the position of the light source 52 can also be adjusted to any position. For example, by bringing the lighting device 50 closer to the chuck table 16, the chuck table 16 can be illuminated.

[0054] Furthermore, by bringing the lighting device 50 closer to the grinding unit 36, the grinding unit 36 ​​(for example, the grinding wheel 46) can also be illuminated. Moreover, both the chuck table 16 and the grinding unit 36 ​​can be illuminated.

[0055] The grinding device 2 is equipped with a control unit 56 that controls the operation of the moving mechanism 6, chuck table 16, tilt adjustment unit 20, height adjustment unit 24, grinding unit 36, lighting device 50, and other components.

[0056] The control unit 56 is composed of a computer that includes, for example, a processor (processing unit) represented by a CPU (Central Processing Unit) and memory (storage device). The storage device includes main memory such as DRAM (Dynamic Random Access Memory), SRAM (Static Random Access Memory), and ROM (Read Only Memory), and auxiliary storage devices such as flash memory, hard disk drive, and solid state drive.

[0057] The auxiliary storage device stores software, including a predetermined program. The functions of the control unit 56 are realized by operating the processor and other components according to this software. The control unit 56 includes a signal generator 58 for controlling the blinking cycle of the lighting device 50.

[0058] The signal generator 58 is a function generator, arbitrary waveform generator, etc., and generates a pulse signal to define the timing for emitting light from the light source 52.

[0059] During maintenance of the grinding machine 2, it is sometimes necessary to check whether the rotating parts, such as the chuck table 16 and grinding wheel 46, are rotating properly by illuminating them with the lighting device 50.

[0060] Suppose that the control unit 56 causes the illumination device 50 to blink only at a cycle that is an integer multiple of the rotation period T of the grinding wheel 46 A , the strobe effect may make an operator perceive that the grinding wheel 46 is not rotating. For example, with respect to the rotation period T of the grinding wheel 46 A , the timing at which the strobe effect occurs can be expressed as kT A (where k is a natural number of 1 or greater).

[0061] Therefore, in the present embodiment, in order to blink the light source 52 at a cycle including a cycle different from an integer multiple of the rotation period T of the grinding wheel 46 A , the control unit 56 causes a signal generator 58 to generate an appropriate blinking cycle based on the rotation period T A . The light source 52 emits light at the generated blinking cycle.

[0062] For example, when the rotation speed of the grinding wheel 46 (that is, the rotation speed of a spindle 42) is set to 3000 rpm, the rotation period T of the grinding wheel 46 A (that is, the time required for the grinding wheel 46 to rotate one revolution) is 20 ms. Since the rotation speed of the grinding wheel 46 is preset in the control unit 56, the control unit 56 can grasp the rotation period T A .

[0063] Instead of fixing the blinking cycle of the light source 52 to a predetermined blinking cycle, the signal generator 58 continuously changes the blinking cycle of the light source 52 within a predetermined range of, for example, 20 ms (one time the rotation period T A ) or more and 40 ms (two times the rotation period T A ) or less.

[0064] FIG. 2 is a diagram showing light emission timings of the light source 52 according to the present embodiment. The number line on the upper side of FIG. 2 indicates the rotation period of the grinding wheel 46 rotating at 3000 rpm (that is, the time required for one rotation is 20 ms), and the unit is time (ms).

[0065] The number line at the bottom of Figure 2 shows the light emission timing of the light source 52, and the unit is time (ms). In this embodiment, the signal generator 58 increases the blinking period of the light source 52 by 2ms increments to 20ms, 22ms, 24ms, 26ms...40ms, then returns the blinking period to 20ms and increases it by 2ms again (see the rightward arrow between the number lines).

[0066] In the example shown in Figure 2, a stroboscopic effect occurs at 0ms, 20ms, and 120ms on the number line, making the grinding wheel 46 appear stationary. In Figure 2, the timings where the grinding wheel 46 appears stationary are marked with an "x". However, at other flashing timings, the operator can perceive the rotation of the grinding wheel 46.

[0067] Generally, a worker's eye can capture one image between 50ms and 200ms. However, in the example shown in Figure 2, images generated at 42ms, 66ms, 92ms, 120ms, 150ms, and 182ms during the period from 0ms to 200ms on the number line appear to show the grinding wheel 46 rotating.

[0068] Similarly, in images generated at emission timings of 216ms, 252ms, 290ms, 330ms, 350ms, 372ms, and 396ms between 200ms and 400ms on the number line, the grinding wheel 46 appears to be rotating. The light source 52 also emits light at similar timings after 400ms.

[0069] When an operator sees the reflected light from the grinding wheel 46 at this timing of illumination, it appears as if the grinding wheel 46 is rotating. For example, the operator can see that (1) letters or numbers such as English letters engraved on the sides of the base 46a, (2) patterns such as logos or marks, or (3) the grinding wheel 46b are rotating or moving.

[0070] In contrast, each light emission timing of the light source 52 coincides with the rotation period T of the grinding wheel 46. AWhen perfectly synchronized, the rotation of the grinding wheel 46 cannot be seen due to the strobe effect. Figure 3 shows the light emission timing of the light source 52 in the comparative example.

[0071] The upper number line in Figure 3 shows the rotation period of the grinding wheel 46, which rotates at 3000 rpm (i.e., the time required for one rotation is 20 ms), and the unit is time (ms). The lower number line in Figure 3 shows the emission timing of the light source 52, and the unit is time (ms). Note that in Figure 3, the timing when the grinding wheel 46 appears to be stationary is marked with an "x".

[0072] In the comparative example, the flashing period of the light source 52 is fixed at 20ms, and each light emission timing of the light source 52 is the rotation period T of the grinding wheel 46. A Because it is perfectly synchronized, the strobe effect makes the grinding wheel 46 appear to be stationary. Therefore, the rotation of the grinding wheel 46 cannot be seen.

[0073] In this embodiment, the rotation period T of the grinding wheel 46 A The flashing period of the light emitted from the lighting device 50 is continuously changed to include periods that are not integer multiples of the specified period. This allows the operator to visually confirm whether the grinding wheel 46 is rotating or not without touching the grinding wheel 46.

[0074] In this embodiment, an example was described in which the rotation of the spindle 42 is determined by the rotation of the grinding wheel 46, but it is also possible to determine the rotation of the chuck table 16. The chuck table 16 rotates at, for example, about 300 rpm. In this case, the rotation period T of the chuck table 16 B This is 200ms.

[0075] The control unit 56 controls the rotation period T of the chuck table 16. B Since we understand this, the rotation period T of the chuck table 16 B The blinking period of light source 52 is continuously changed to include periods that are not integer multiples of the specified period.

[0076] For example, the signal generator 58 increases the blinking period of the light source 52 by 20ms at a time to 200ms, 220ms, 240ms, 260ms...400ms, then returns the blinking period to 200ms, and then increases the blinking period by 20ms at a time.

[0077] However, the method for continuously changing the blinking period of the light source 52 is not limited to the example of continuously repeating a monotonically increasing blinking period over a certain period (in the example in Figure 2, between 0ms and 330ms on the number line).

[0078] The blinking period may be continuously repeated in a monotonically decreasing manner over a certain period, or the blinking period may be continuously changed to random or pseudo-random. Of course, the rotation period T B Other methods can be employed if the blinking period of light source 52 can be continuously changed to include periods that are not integer multiples of the given period.

[0079] By the way, although Figure 1 shows the signal generator 58 as part of the control unit 56, the signal generator 58 may be housed in a separate enclosure from the control unit 56 and electrically connected to the control unit 56.

[0080] (Second Embodiment) Next, a second embodiment will be described with reference to Figure 4. The lighting device 50 of the second embodiment has a cylindrical housing 60, etc., instead of a light source 52 that generates pulsed light.

[0081] The housing 60 is made of metal or the like, and its base end is fixed to the tip of the articulated arm 54. An LED (light source) 62 is fixed inside the housing 60, and the light from the LED 62 is blocked by the housing 60.

[0082] In this embodiment, the LED 62 is driven by a DC power source (not shown) such as a capacitor or battery, and enters a steady ON state (light-emitting state) triggered by a first drive signal from the control unit 56, and enters a steady OFF state (non-light-emitting state) triggered by a second drive signal from the control unit 56.

[0083] A rectangular opening is provided at the front of the housing 60. A transmissive liquid crystal panel (shutter section) 64 having a flat plate shape is fixed to the opening. The liquid crystal panel 64 is driven, for example, by a TN (Twisted Nematic) method.

[0084] The liquid crystal panel 64 is not limited to the TN method, but may employ various methods such as the VA (Vertical Alignment) method and the IPS (In-Plane-Switching) method. The liquid crystal panel 64 has a liquid crystal layer (not shown) in which liquid crystal molecules are arranged in a substantially regular manner.

[0085] The liquid crystal layer is sandwiched between a first glass substrate (not shown) on which transparent electrodes such as TFTs (Thin Film Transistors) and ITO (Indium Tin Oxide) are formed, and a second glass substrate (not shown) on which transparent electrodes are also formed. On each of the first and second glass substrates, a polarizing plate (not shown) is provided on the surface opposite to the liquid crystal layer.

[0086] In this embodiment, the LED 62 functions as a backlight for the liquid crystal panel 64. When a predetermined voltage is applied between the transparent electrodes of the first and second glass substrates, the light from the LED 62 is blocked by the liquid crystal panel 64. When the voltage applied between these transparent electrodes is turned off, the light from the LED 62 passes through the liquid crystal panel 64.

[0087] The control unit 56 controls the rotation period T of the grinding wheel 46. A To make the lighting device 50 flash with a flashing period that includes a period different from an integer multiple of the rotation period T of the grinding wheel 46, the rotation period T of the grinding wheel 46 is set. A Based on this, the signal generator 58 is made to generate an appropriate blinking period.

[0088] The liquid crystal panel 64 is switched off when the voltage applied between its transparent electrodes is turned off during the blinking cycle generated by the signal generator 58, allowing light from the LED 62 to pass through. As a result, light is emitted outwards from the lighting device 50. Conversely, outside of the blinking cycle, a predetermined voltage is applied between the transparent electrodes, blocking the light from the LED 62.

[0089] In this embodiment, the control unit 56 continuously changes the opening and closing cycle of the liquid crystal panel 64. This continuously changes the flashing cycle of the light emitted from the LED 62 to the outside of the housing 60. Therefore, the operator can visually confirm whether or not the grinding wheel 46 is rotating without touching it.

[0090] Of course, the control unit 56 controls the rotation period T of the chuck table 16. B Based on this, the rotation period T of the chuck table 16 B The lighting device 50 may be made to flash in a manner that includes a period different from an integer multiple of the specified period. This allows the operator to visually confirm whether or not the chuck table 16 is rotating without touching the chuck table 16.

[0091] (Third Embodiment) Next, a third embodiment will be described with reference to Figure 5. In the third embodiment, a lighting device 50 is provided on the cutting device (processing device) 72. The cutting device 72 has a disc-shaped chuck table 74 whose holding surfaces are arranged substantially parallel to the XY plane. A cutting unit (processing unit) 76 is provided above the disc-shaped chuck table 74.

[0092] The cutting unit 76 has a cylindrical spindle 78 whose longitudinal portion is arranged along the Y-axis. A rotational drive source (not shown), such as a motor, is provided near the base end of the spindle 78. A disc-shaped cutting blade 80 having an annular cutting edge is attached to the tip of the spindle 78 using a receiving flange 78a and a retaining nut 78b.

[0093] The cutting blade 80 is a hub blade in which an annular cutting edge is fixed to a base (i.e., hub) made of a metal such as an aluminum alloy. However, the cutting blade 80 may also be a hubless type (i.e., a washer type).

[0094] The cutting edge has abrasive grains such as diamond or cBN fixed with a bonding material such as metal, resin, or vitrified material. The abrasive grains may also be fixed with electroplated adhesive. The base and surface of the cutting edge of the cutting blade 80 are engraved with numbers, letters, etc., such as the model number and manufacturer's name.

[0095] When the spindle 78 rotates at a predetermined speed of approximately 10,000 rpm to 60,000 rpm, the cutting blade 80 also rotates at the same speed. During maintenance of the cutting device 72, it may be necessary to check whether the cutting blade 80 is rotating properly by illuminating the cutting blade 80 with the lighting device 50 while the cutting blade 80 is rotating.

[0096] For example, if the spindle 78 rotates at 30,000 rpm, the rotation period T of the cutting blade 80 is... C This is 2ms. In this embodiment as well, the rotation period T of the cutting blade 80 C The blinking period of light source 52 is continuously changed to include periods that are not integer multiples of the specified period.

[0097] This allows the operator to visually confirm whether the cutting blade 80 is rotating without touching it. When the cutting blade 80 rotates, for example, numbers, letters, etc. engraved on the surface of the hub or cutting edge appear to rotate and move.

[0098] In addition, the housing 60, LED 62, and liquid crystal panel 64 described in the second embodiment (Figure 4) may be used as the lighting device 50.

[0099] (Fourth Embodiment) Next, a fourth embodiment will be described. In the fourth embodiment, a chuck table (not shown) and a polishing unit (processing unit), which are provided in a polishing device (processing device) (not shown), are illuminated by a lighting device 50.

[0100] The chuck table is the same as the chuck table 16 described in the first embodiment, so a detailed description will be omitted. The polishing unit has the spindle 42 described in the first embodiment.

[0101] A disc-shaped polishing pad (not shown) is attached to the lower end of the spindle 42 via a mount 44. The polishing pad has a platen that is attached to the mount 44. A pad portion is provided on the lower surface of the platen.

[0102] The pad portion has a base portion made of nonwoven fabric, foamed resin (e.g., foamed polyurethane), etc. Abrasive grains made of diamond or the like may be fixed to the pad portion, or they may not be fixed. When the spindle 42 rotates, the polishing pad rotates at the same rotational speed.

[0103] In this embodiment as well, the rotation period T of the polishing pad D The flashing period of the light source 52 is continuously changed to include periods that are not integer multiples of the specified period. This allows the operator to visually confirm whether or not the polishing pad is rotating without touching the polishing pad.

[0104] When the polishing pad rotates, for example, numbers, letters, etc. engraved on the side of the platen appear to rotate and move. Alternatively, the lighting device 50 may be the housing 60, LED 62, and liquid crystal panel 64 described in the second embodiment (Figure 4).

[0105] Furthermore, the structures, methods, etc., according to the above embodiments can be modified as appropriate without departing from the scope of the object of the present invention. In the above description, the cases in which a grinding wheel 46, polishing pad, etc. are attached to the spindle 42, and the cases in which a cutting blade 80 is attached to the spindle 78 have been described.

[0106] However, the grinding wheel 46, polishing pad, etc., may be removed, and the rotation of the spindle 42 may be checked using the lighting device 50. In this case, the rotation of the spindle 42 can be checked using the patterns such as letters, numbers, logos, and marks provided on the side of the mount 44 to indicate the position of the screw holes.

[0107] Similarly, the cutting blade 80 may be removed, and the presence or absence of rotation of the spindle 78 may be checked using the illumination device 50. In this case, the presence or absence of rotation of the spindle 78 can be checked using characteristic markings, holes, etc., formed on the receiving flange 78a. [Explanation of Symbols]

[0108] 2: Grinding device (processing device), 4: Base, 4a: Recess, 4b: Support structure 4c: Exterior cover, 4d: Opening, 4e: Door section 6: Moving mechanism, 8: Moving plate, 10: Nut section, 12: Screw shaft, 14: Motor 11: Workpiece, 11a: Front surface, 11b: Back surface, 13: Protective tape 16: Chuck table, 16a: Holding surface, 16b: Rotating axis, 18: Table base 20: Tilt adjustment unit, 20a: Fixed support part, 20b: Movable support part 22: Cover component, 24: Height adjustment unit, 26: Guide rail, 28: Movable plate 30: Nut part, 32: Screw shaft, 34: Motor 36: Grinding unit (processing unit), 38: Holding member, 40: Spindle housing 42: Spindle, 44: Mount 46: Grinding wheel (machining tool), 46a: Base, 46b: Grinding wheel 50: Lighting device, 52: Light source, 54: Multi-joint arm 56: Control unit, 58: Signal generator 60: Enclosure, 62: LED (light source), 64: LCD panel (shutter section) 72: Cutting equipment (processing equipment), 74: Chuck table 76: Cutting unit (machining unit) 78: Spindle, 78a: Receiving flange, 78b: Retaining nut 80: Cutting blade (machining tool) A1: Loading / unloading area, A2: Grinding position

Claims

1. A processing device, A chuck table having a holding surface for holding a workpiece and rotatable around a predetermined axis of rotation, A machining unit having a spindle, on which a machining tool for machining the workpiece is mounted; A lighting device for illuminating at least one of the chuck table and the processing unit, A control unit having a signal generator and controlling the lighting device, Equipped with, The control unit is characterized by continuously increasing or decreasing the flashing period of the light emitted from the illumination device, or continuously changing it to random or pseudo-random, based on the rotation period of one of the rotating chuck table and spindle, such that the flashing period of the light includes a period that is not an integer multiple of the rotation period.

2. The lighting device has a light source, The processing apparatus according to claim 1, characterized in that the control unit continuously changes the blinking period of the light source.

3. The lighting device comprises a light source and a shutter section capable of blocking the light from the light source that is emitted outside the lighting device. The processing apparatus according to claim 1, characterized in that the control unit continuously changes the flashing cycle of the light emitted from the lighting device by continuously changing the opening and closing cycle of the shutter unit.

Images