Processing equipment

Abstract

To provide a processing device which can prevent occurrence of a problem that is caused by separating or opening of a non-door part of an enclosure.SOLUTION: The processing device is configured to grasp a situation of a circumference of an enclosure while utilizing each of a plurality of images formed based on photographing by a photographing unit that photographs the circumference of the enclosure at a predetermined cycle, which can confirm whether a non-door part of the enclosure is separated or opened or not, by grasping the situation of the circumference of the enclosure. This can prevent occurrence of a problem that is caused by separating or opening of the non-door part of the enclosure.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a processing apparatus for processing a workpiece. Background Art

[0002] Chips of devices such as ICs (Integrated Circuits) are indispensable components in various electronic devices such as mobile phones and personal computers. Such chips are manufactured, for example, in the following order.

[0003] First, photolithography or the like is performed to form a plurality of devices each including a large number of elements on the front side of a workpiece such as a wafer. Next, the back side of the workpiece is ground to thin the workpiece. Then, the workpiece is divided along the boundaries between the plurality of devices to manufacture a plurality of chips.

[0004] A processing apparatus such as a grinding apparatus for grinding a workpiece, a cutting apparatus for dividing a workpiece, or a laser processing apparatus generally includes a chuck table that holds a workpiece, a processing unit that processes the workpiece held by the chuck table, and a housing that accommodates the chuck table and the processing unit (see, for example, Patent Document 1). Prior Art Literature Patent Literature

[0005] Patent Document 1 Japanese Unexamined Patent Publication No. 2021-176660 Summary of the Invention Problem to be Solved by the Invention

[0006] The housing of a processing machine generally includes a cassette door for loading and unloading cassettes containing multiple workpieces, and a maintenance door for performing maintenance on the components included in the processing machine (for example, replacing worn-out processing tools (cutting blades or grinding wheels, etc.)).

[0007] If a workpiece is processed with at least one of these doors open, it may cause problems in the processing of the workpiece and / or pose a risk of harm to the operator operating the processing device. Therefore, processing devices are generally equipped with sensors near each of these doors to detect whether or not the door is open, and processing of the workpiece is not possible when at least one of these doors is open.

[0008] Furthermore, in the case of processing equipment, parts of the housing other than the door (non-door section) may be separated or opened during overhauls, etc. For example, the non-door section may be separated or opened by removing bolts inserted into the housing, and then the condition of wiring and other components that supply power to the processing equipment's components may be checked.

[0009] However, it is rare for the non-door portion of the housing to be separated or opened in this way. Therefore, processing equipment generally does not have a sensor to detect whether or not the non-door portion of the housing has been separated or opened, and the workpiece can be processed even if the non-door portion of the housing has been separated or opened in this way.

[0010] However, in this case, just as when the door portion of the housing is open, there is a risk of malfunction in the processing of the workpiece and / or harm to the operator operating the processing device. In view of this, the object of the present invention is to provide a processing device that can prevent the occurrence of problems caused by the separation or opening of the non-door portion of the housing. [Means for solving the problem]

[0011] This invention One aspectAccording to the report, the processing apparatus for processing a workpiece comprises an imaging unit that images the area around the housing at a predetermined period, and a controller that includes a memory for storing data corresponding to each of a plurality of images formed based on the imaging by the imaging unit. The memory stores the digital signals output from the imaging unit at predetermined intervals for a predetermined number of days, and forms based on the digital signals stored in the memory. Using each of the multiple images , at the timing when imaging is performed by the imaging unit The surrounding conditions of the enclosure confirmation A processing device is provided.

[0012] According to another aspect of the present invention, a processing apparatus for processing a workpiece is provided, comprising: an imaging unit that images the area around a housing at a predetermined period; a controller that includes a memory for storing data corresponding to each of a plurality of images formed based on imaging by the imaging unit; and a display unit disposed on the housing, wherein the surrounding conditions of the housing are understood using each of the plurality of images, and the display unit displays a top-view image in which the plurality of images are sequentially arranged around an image representing the housing.

[0013] According to yet another aspect of the present invention, a processing apparatus for processing a workpiece is provided, comprising: an imaging unit that images the area around a housing at a predetermined period; a controller that includes a memory for storing data corresponding to each of a plurality of images formed based on imaging by the imaging unit, wherein the surrounding conditions of the housing are understood using each of the plurality of images, the memory stores data corresponding to a normal image formed based on imaging by the imaging unit when the surrounding conditions of the housing are normal, the controller further comprises a determination unit that compares the normal image with each of the plurality of images and determines whether the surrounding conditions of the housing were abnormal at the time imaging by the imaging unit was performed to form each of the plurality of images, and a notification unit that notifies the determination unit if it determines that the surrounding conditions of the housing are abnormal.

[0014] Preferably, each of the plurality of images shows the situation in a 360-degree radius around the housing at the time the imaging unit performed the imaging.

[0015] Preferably, the housing includes a polygonal top plate, and the imaging unit includes a plurality of cameras, each having a lens, the lenses being mounted downward at the tip of a support member whose base end is fixed to the top plate and which extends through the edge or corner of the top plate. [Effects of the Invention]

[0016] In this invention, the surrounding conditions of the housing are understood by utilizing each of the multiple images formed based on imaging by an imaging unit that images the area around the housing at a predetermined period. By understanding the surrounding conditions of the housing, it becomes possible to confirm whether the non-door portion of the housing is separated or open. As a result, in this invention, it is possible to prevent problems caused by the separation or opening of the non-door portion of the housing. [Brief explanation of the drawing]

[0017] [Figure 1] Figure 1 is a schematic perspective view showing an example of a processing apparatus for processing a workpiece. [Figure 2] Figure 2 is a schematic top view showing the processing apparatus shown in Figure 1. [Figure 3] Figure 3 is a schematic functional block diagram showing an example of a controller included in a processing device. [Figure 4] Figures 4(A) and 4(B) respectively schematically show examples of top-view images displayed on the touch panel display unit included in the processing equipment. MODE FOR CARRYING OUT THE INVENTION

[0018] Embodiments of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a perspective view schematically showing an example of a processing apparatus for processing a workpiece, and FIG. 2 is a top view schematically showing the processing apparatus shown in FIG. 1. The processing apparatus 2 shown in FIG. 1 and FIG. 2 is, for example, a cutting apparatus, a grinding apparatus, or a laser processing apparatus.

[0019] A housing 4 of the processing apparatus 2 includes a polygonal (for example, rectangular) top plate 6 and side plates 8 provided so as to hang down from the outer peripheral edge of the top plate 6. The housing 4 is fixed to a framework provided inside the housing 4. The side plates 8 include door portions 8a and 8b having handles 10a and 10b provided on the outer surfaces thereof, respectively.

[0020] When the handle 10a provided on the door portion 8a is pulled, the door portion 8a opens to the right, and when the handle 10b provided on the door portion 8b is pulled, the door portion 8b opens to the left. When the door portion 8a is opened, access to, for example, a cassette table that supports a cassette accommodating a plurality of workpieces becomes possible. When the door portion 8b is opened, access to, for example, a processing tool for processing a workpiece (for example, a cutting blade, a grinding wheel, or a laser beam irradiation unit) becomes possible.

[0021] Furthermore, portions of the side plate 8 other than the door portions 8a and 8b (non-door portions) include a plurality of flat plates 8c, 8d, 8e, 8f, 8g, 8h, and each of the flat plates 8c, 8d, 8e, 8f, 8g, 8h is fixed to the framework using bolts or the like. These non-door portions, that is, the plurality of flat plates 8c, 8d, 8e, 8f, 8g, 8h are not separated or opened when the processing apparatus 2 processes a workpiece, but are separated or opened when, for example, an overhaul of the processing apparatus 2 is performed.

[0022] Furthermore, the processing apparatus 2 has a touch panel 12 that functions as a user interface. This touch panel 12 is disposed on the outer surface of the side plate 8 and consists of an input unit such as a capacitive or resistive touch sensor and a display unit such as a liquid crystal display or an organic EL (Electro-Luminescence) display.

[0023] Furthermore, the processing device 2 has a warning light (pilot lamp) 14. This warning light 14 is located in the corner of the top plate 6 and, for example, lights up or flashes to notify the operator if the conditions around the housing 4 are abnormal. In addition, the processing device 2 may have a speaker that emits sound when the conditions around the housing 4 are abnormal, instead of or in addition to the warning light 14.

[0024] Furthermore, the processing apparatus 2 has an imaging unit for imaging the area around the housing 4 at a predetermined period. This imaging unit includes, for example, a plurality of cameras 16. Each camera 16 has a lens, an image sensor such as a CCD (Charge Coupled Device) image sensor or a CMOS (Complementary Metal Oxide Semiconductor) image sensor, and a converter that converts the analog signal generated by the image sensor into a digital signal.

[0025] Furthermore, the lenses of each camera 16 are fixed at their base ends to the top plate 6 and are positioned downwards at the tip of a support member 18 that extends past the edge of the top plate 6. Each camera 16 then images the area below the lens at a predetermined interval (for example, 5 fps). This creates an image showing the 360-degree surroundings of the housing 4 at the time the imaging unit captures the image.

[0026] Furthermore, the processing apparatus 2 has a controller that controls the components of the processing apparatus 2. Figure 3 is a schematic functional block diagram showing an example of a controller included in the processing apparatus 2. The controller 20 shown in Figure 3 has a processor 22 and a memory 24.

[0027] The processor 22 includes, for example, a CPU (Central Processing Unit). The memory 24 includes, for example, volatile memory such as DRAM (Dynamic Random Access Memory) or SRAM (Static Random Access Memory), and non-volatile memory such as SSD (Solid State Drive) (NAND flash memory) or HDD (Hard Disk Drive) (magnetic storage device).

[0028] The memory 24 stores various types of information (data, programs, etc.) used by the processor 22. For example, the memory 24 stores data corresponding to each of the multiple images formed based on imaging by the imaging unit, specifically, digital signals output from the imaging unit at predetermined intervals.

[0029] Furthermore, the memory 24 may store data corresponding to images (normal images) formed based on imaging by the imaging unit when the surrounding conditions of the housing 4 are normal. Also, if the amount of data stored in the memory 24 exceeds a predetermined number of days (for example, 10 days' worth), the oldest data may be overwritten with new data.

[0030] Furthermore, the processor 22 reads and executes various programs stored in the memory 24 to control the components of the processing apparatus 2. This processor 22 includes, for example, a determination unit 22a and a notification unit 22b.

[0031] The determination unit 22a uses multiple images formed based on imaging by the imaging unit to determine whether the conditions around the housing 4 at the time the imaging was performed were abnormal. This determination is made by comparing the normal image with each of the multiple images, etc.

[0032] For example, this determination is made based on whether the outer edge of the housing 4 shown in the normal image and each of the multiple images, i.e., the contour of the housing 4, match. Alternatively, this determination may be made based on whether a structure not shown in the normal image (e.g., the non-door portion of the housing 4 separated from the processing device 2) is shown around the housing 4 in each of the multiple images.

[0033] The notification unit 22b controls the display unit and / or warning light 14 of the touch panel 12. For example, the notification unit 22b controls the display unit so that a top-view image is displayed in which multiple images formed based on imaging by the imaging unit are sequentially arranged around an image representing the housing 4.

[0034] Furthermore, if the detection unit 22a determines that the surrounding conditions of the housing 4 are abnormal, the notification unit 22b controls the display unit of the touch panel 12 and / or the warning light 14 to notify the user of this fact. In this case, the notification unit 22b controls the display unit to display text indicating that the surrounding conditions of the housing 4 are abnormal, and / or controls the warning light 14 to light up or flash.

[0035] Figures 4(A) and 4(B) respectively schematically show examples of top-view images displayed on the display unit of the touch panel 12. In short, Figure 4(A) shows a top-view image Ia in which the above-mentioned normal image is arranged around image I0, which represents the housing 4 on which the touch panel 12 and warning light 14 are installed, and Figure 4(B) shows a top-view image Ib in which an image formed based on imaging by the imaging unit at a time when the conditions around the housing 4 are abnormal is arranged around image I0.

[0036] Specifically, while top-view image Ia does not include images showing structures other than image I0, top-view image Ib includes image I1 showing that the non-door portion of the housing 4 is open, in addition to image I0, and image I2 showing that an operator is working near the open non-door portion. When top-view image Ib is displayed on the display unit of the touch panel 12, the notification unit 22b determines that the situation around the housing 4 is abnormal, as described above.

[0037] In the processing apparatus 2 described above, the surrounding conditions of the housing 4 are understood by utilizing each of the multiple images formed based on imaging by an imaging unit that images the area around the housing 4 at a predetermined period. By understanding the surrounding conditions of the housing 4, it becomes possible to confirm whether the non-door portion of the housing 4 is separated or open. As a result, the processing apparatus 2 can prevent problems caused by the separation or opening of the non-door portion of the housing 4.

[0038] It should be noted that the above-described content is one aspect of the present invention, and the content of the present invention is not limited to what has been described above. For example, in the present invention, multiple images formed based on imaging by the imaging unit may be used for purposes other than confirming the separation or opening of the non-door portion of the housing 4.

[0039] Specifically, in the present invention, multiple images formed based on images captured by an imaging unit may be used to verify the operator's work. For example, these multiple images may be used to verify whether the operator is performing any dangerous actions or whether the operator is injured as a result of the work. Furthermore, these multiple images may be used to measure the time it takes for the operator to complete a particular task.

[0040] Furthermore, in the present invention, the imaging unit may be composed of a single camera. In this case, the single camera may be installed, for example, on the ceiling of the cleanroom where the processing apparatus 2 is installed.

[0041] Furthermore, in the present invention, there are no limitations on the arrangement of the multiple cameras 16 included in the imaging unit. For example, in the present invention, the lens of each camera 16 may be positioned downward at the tip of a support member whose base end is fixed to the top plate 6 and which extends to pass through the corner of the top plate 6.

[0042] Furthermore, in the present invention, the imaging unit may image an area including a part of the side plate 8 of the housing 4. For example, the imaging unit may include a plurality of cameras, each with a lens positioned downward and inward at the tip of the support member 18. In this case, it becomes easier to confirm whether or not the non-door portion of the housing 4 is separated.

[0043] Furthermore, the processing apparatus 2 may be connected to another computer (for example, a host computer or server) via wired or wireless communication. The data corresponding to each of the multiple images formed based on imaging by the imaging unit included in the processing apparatus 2 may be stored in the memory 24 and then transmitted to the other computer.

[0044] In this case, by using the display unit included in the other computer, it becomes possible to understand the surrounding conditions of the housing 4 of the processing device 2. Furthermore, by connecting the other computer to multiple processing devices having a similar structure to the processing device 2, it becomes possible to understand the surrounding conditions of each of these multiple processing devices using the other computer, i.e., a single computer.

[0045] Furthermore, the structures and methods of the embodiments described above can be modified as appropriate without departing from the scope of the present invention. [Explanation of symbols]

[0046] 2: Processing equipment 4: Cabinet 6: Tabletop 8: Side panels (8a, 8b door sections) 10a, 10b: Handle 12: Touch panel 14: Warning light (pilot lamp) 16: Camera 18: Support member 20: Controller 22: Processor (22a: Determination unit, 22b: Notification unit) 24: Memory

Claims

1. A processing device for processing a workpiece, An imaging unit that images the area around the housing at a predetermined interval, The system includes a controller which has a memory that stores data corresponding to each of a plurality of images formed based on imaging by the imaging unit, The memory stores the digital signals output from the imaging unit at predetermined intervals for a predetermined number of days. A processing apparatus that uses each of the multiple images formed based on the digital signal stored in the memory to confirm the surrounding conditions of the housing at the time the imaging unit took place.

2. A processing apparatus for processing a workpiece, An imaging unit that images the area around the housing at a predetermined interval, A controller including a memory that stores data corresponding to each of a plurality of images formed based on imaging by the imaging unit, The enclosure comprises a display unit, The surrounding environment of the enclosure is understood by using each of the multiple images. The display unit is a processing apparatus that displays a top-view image in which a plurality of images are sequentially arranged around an image representing the housing.

3. A processing apparatus for processing a workpiece, An imaging unit that images the area around the housing at a predetermined interval, The system includes a controller which has a memory that stores data corresponding to each of a plurality of images formed based on imaging by the imaging unit, The surrounding environment of the enclosure is understood by using each of the multiple images. The memory stores data corresponding to a normal image formed based on imaging by the imaging unit when the surrounding conditions of the housing are normal. The controller is, A determination unit that compares the normal image with each of the multiple images and determines whether the conditions around the housing were abnormal at the time the imaging unit took the image to form each of the multiple images. If the determination unit determines that the conditions around the enclosure are abnormal, the notification unit will notify the system accordingly. A processing device further equipped with these features.

4. The processing apparatus according to any one of claims 1 to 3, wherein each of the plurality of images shows the situation in a 360-degree radius around the housing at the time the imaging unit performed the imaging.

5. The enclosure includes a polygonal top panel, The imaging unit includes a plurality of cameras, each having a lens. The processing apparatus according to claim 4, wherein the lens is fixed at its base end to the top plate and is provided facing downward at the tip of a support member that extends so as to pass through the edge or corner of the top plate.

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