Storage system

Abstract

We provide a storage system that improves the production efficiency of products. [Solution] The storage system comprises a container storage section capable of storing multiple containers, each capable of accommodating multiple substrates; a container transfer section capable of transferring containers between the container storage section and at least one transport lane provided outside the container storage section; a substrate loading / unloading section capable of loading and unloading substrates between the transport lane and the transport lane; at least one container transport section capable of loading and unloading containers to and from the container storage section, and transporting containers between the container storage section and the substrate loading / unloading section, or between the container storage section and the container transfer section; and a control device that causes the container transport section to transport along one of the following transport paths: a first transport path through which the container transport section moves between the container storage section and the container transfer section, and a second transport path through which the container transport section moves between the container storage section and the substrate loading / unloading section.

Description

[Technical Field]

[0001] The present disclosure relates to a storage system. [Background Art]

[0002] Patent Document 1 discloses a storage system (storage device) including: a substrate transfer device (first transfer device) that stores a substrate (article) accommodated in a first container into a second container placed on a mounting table; a storage shelf that stores a plurality of the second containers; and a container transfer unit (second transfer device) that transfers the second container between the mounting table and the storage shelf. [Prior Art Documents] [Patent Documents]

[0003] [Patent Document 1] Japanese Patent No. 7582232 [Summary of the Invention] [Problem to be Solved by the Invention]

[0004] Incidentally, for example during maintenance or the like, the second container stored in the storage shelf may be taken out from the storage shelf. In this case, after the second container is transferred from the storage shelf to the mounting table by the container transfer unit, it is transferred to a maintenance location manually by an operator. In addition to requiring time and effort, work performed by an operator necessitates temporarily stopping the storage system, which leads to a decrease in production efficiency of products using substrates. An object of the present disclosure is to provide a storage system capable of improving product production efficiency. [Means for Solving the Problem]

[0005] In order to solve the above problem, the present disclosure adopts the following aspects. (1) A storage system according to one aspect of the present disclosure comprises: a container storage section capable of storing a plurality of storage containers, each capable of accommodating a plurality of substrates; a container transfer section capable of transferring the storage containers to and from at least one transfer lane provided outside the container storage section; a substrate loading / unloading section capable of loading and unloading the substrates to and from the transfer lane; at least one container transport section capable of loading and unloading the storage containers to and from the container storage section and transporting the storage containers between the container storage section and the substrate loading / unloading section, or between the container storage section and the container transfer section; and a control device that causes the container transport section to transport along a first transport path, on which the container transport section moves between the container storage section and the container transfer section, and a second transport path, on which the container transport section moves between the container storage section and the substrate loading / unloading section, selected from these transport paths. According to this embodiment, the container transport unit transports the containers along one of two transport paths selected by the control device: a first transport path that moves between the container storage unit and the container transfer unit, and a second transport path that moves between the container storage unit and the substrate loading / unloading unit. This allows the containers to be automatically transported to the container transfer unit and the substrate loading / unloading unit. Therefore, the transfer of containers stored in the container storage unit to the transport lane, and the loading / unloading of substrates contained in the containers stored in the container storage unit to the transport lane, can be performed efficiently without manual labor. For example, when removing containers from the container storage unit for maintenance, it is no longer necessary for an operator to transport the containers to the maintenance area, and the need to temporarily suspend the storage system is also reduced. As a result, labor is reduced, and the production efficiency of the product can be improved.

[0006] (2) In the storage system according to the embodiment of (1) above, it is preferable that the container transfer unit further comprises a first container support unit that supports the container in order to transfer the container to the container transport unit and to at least one external transport device traveling along the transport lane. According to this embodiment, by supporting the container with the first container support, the transfer of the container between the container transport unit and the external transport device can be performed via the first container support. Therefore, there is no need to transfer the container directly between the container transport unit and the external transport device. As a result, there is no need to coordinate the timing of the transfer of the container between the container transport unit and the external transport device, and the transfer of the container can be performed efficiently.

[0007] (3) In the storage system according to the embodiment of (1) or (2) above, if the control device determines that the substrate is not contained in the target container that has been removed from the container storage unit among the plurality of storage containers, it is preferable to have the empty target container transported to the container transfer unit by the container transport unit. According to this embodiment, empty target containers that do not contain substrates are transported to the container transfer unit from among a plurality of storage containers. This allows, for example, target containers that are to be maintained, to be transferred between the transport lane and the transport lane in an empty state without containing substrates.

[0008] (4) In the storage system according to the embodiment of (3) above, it is preferable that the substrate loading / unloading section further comprises a second container support section that supports the target container and a substrate loading / unloading mechanism for loading and unloading the substrate into and out of the target container supported by the second container support section. According to this embodiment, the substrate can be removed from the target container supported by the second container support portion by the substrate insertion / removal mechanism.

[0009] (5) In the storage system according to the embodiment of (4) above, when the control device determines that the substrate is contained in the target container, it is preferable to remove the substrate from the target container using the substrate loading / unloading mechanism and to transport the empty target container by moving the container transport unit along a third transport path connecting the substrate loading / unloading unit and the container transfer unit. According to this embodiment, if a substrate is contained in the target container, the substrate loading / unloading mechanism can remove the substrate from the target container, leaving it empty. Then, the container transport unit can transport the empty target container along the third transport path between the substrate loading / unloading unit and the container transfer unit. Therefore, even if the target container was stored in the container storage unit with a substrate inside, after removing the substrate and leaving it empty, only the target container can be transferred to the transport lane.

[0010] (6) In the storage system according to the embodiment of (5) above, it is preferable that the control device operates the substrate loading and unloading mechanism so as to load the substrate removed from the target container supported by the second container support into another storage container. According to this embodiment, the substrate removed from the target container supported by the second container support is placed in another storage container. This makes it easy to store the removed substrate while the target container is being transferred to a transport lane and removed from the container storage section for maintenance or other purposes.

[0011] (7) In the storage system according to the embodiment of (6) above, a plurality of second container support units are provided, and the substrate loading / unloading mechanism preferably loads the substrate removed from the target container supported by one of the second container support units into another storage container supported by another of the second container support units. According to this embodiment, a substrate removed from a target container supported by one second container support is stored in another storage container supported by another second container support. This means that when transferring a substrate removed from a target container to another storage container, the other storage container only needs to be removed from the container storage section and moved to the other second container support. Therefore, there is no need to prepare a dedicated container or the like for storing the substrate removed from the target container, and the storage system can be operated efficiently.

[0012] (8) In a storage system according to any of the embodiments of (4) to (7) above, the substrate loading / unloading section preferably supports a transport container capable of accommodating a plurality of substrates, and the third container support section is capable of transferring the transport container to and from at least one external transport device traveling along the transport lane, and the substrate loading / unloading mechanism preferably transfers the substrates between the target container supported by the second container support section and the transport container supported by the third container support section. According to this embodiment, the substrate loading / unloading mechanism transfers the substrate between the target container supported by the second container support and the transport container supported by the third container support. The substrate removed from the target container is then placed in the transport container and transported by an external transport device to various processes where the substrate is subjected to predetermined processing. In this way, the substrate loading / unloading mechanism can perform both the supply of substrates to the production process and the removal of substrates from the target container when performing maintenance on the target container, eliminating the need for separate mechanisms for each. Therefore, the size of the storage system can be kept down.

[0013] (9) In the storage system according to the embodiment of (8) above, the transport lane preferably has a first transport lane on which the first external transport device of the external transport device travels and a second transport lane on which the second external transport device of the external transport device travels, the substrate loading / unloading section preferably transfers the transport containers between itself and the first external transport device traveling on the first transport lane, and the container transfer section preferably transfers the storage containers between itself and the second external transport device traveling on the second transport lane. According to this embodiment, the transfer of transport containers between the substrate loading / unloading unit and the first external transport device, and the transfer of containment containers between the container transfer unit and the second external transport device can be performed separately. Therefore, the transfer of containment containers between the second external transport device can be performed without affecting the transfer of transport containers between the first external transport device, thereby preventing a decrease in product production efficiency.

[0014] (10) In the storage system according to any one of aspects (1) to (9) above, a relay point is set among the container storage unit, the substrate carry-in / out unit, and the container transfer unit, and the container transport unit preferably comprises: a first container transport device that transports the containing container between the container storage unit and the relay point; and a second container transport device that transports the containing container between the relay point and the container transfer unit, and between the relay point and the substrate carry-in / out unit. According to this aspect, since the container transport unit comprises the first container transport device and the second container transport device, the transport of the containing container between the container storage unit and the relay point, and the transport of the containing container between the relay point and the container transfer unit as well as between the relay point and the substrate carry-in / out unit can be performed independently of each other. Therefore, the operations of the first container transport device and the second container transport device can be performed efficiently. [Effects of the Invention]

[0015] According to an aspect of the present disclosure, the production efficiency of products can be improved. [Brief Description of Drawings]

[0016] [Figure 1] It is a plan cross-sectional view showing an example of the storage system according to the embodiment. [Figure 2] It is a side view of the storage system in FIG. 1. [Figure 3] It is a plan view showing the schematic configuration of the substrate carry-in / out unit and the container transfer unit according to the embodiment. [Figure 4] It is a cross-sectional view taken along line IV-IV in FIG. 3. [Figure 5] It is a block diagram showing the hardware configuration of the control device according to the embodiment. [Figure 6] It is a functional block diagram of the control device according to the embodiment. [Figure 7] It is a flowchart showing the flow of processing in the control device according to the embodiment. [Figure 8] It is a diagram showing an example of the storage system according to a modified example of the present embodiment. [Figure 9] It is a diagram illustrating an example of a storage system according to another modification of the present embodiment. MODE FOR CARRYING OUT THE INVENTION

[0017] Hereinafter, with reference to the accompanying drawings, embodiments for implementing the storage system according to the present disclosure will be described. However, the present disclosure is not limited to only the present embodiment. <Substrate transfer system 500> FIG. 1 is a plan sectional view showing an example of the storage system 1A according to the embodiment. FIG. 2 is a side view of the storage system 1A of FIG. 1. As shown in FIG. 1 and FIG. 2, the substrate transfer system 500 transfers and stores substrates in manufacturing process equipment such as semiconductor manufacturing equipment (not shown), for example. The manufacturing process equipment manufactures products using substrates (e.g., semiconductor devices). The manufacturing process equipment manufactures products by sequentially performing multiple stages of processing on substrates. The manufacturing process equipment includes a plurality of processing apparatuses (not shown) for performing multiple stages of processing on substrates. Here, the type (number of stages) and content of processing performed on substrates are not limited in any way.

[0018] The substrate transfer system 500 includes an external transfer device 101 and the storage system 1A. In the following description, the direction orthogonal to the floor F on which the storage system 1A is installed is defined as the vertical direction Dv. Further, a direction intersecting the vertical direction Dv is defined as a first direction D1, and a direction intersecting the vertical direction Dv and the first direction D1 is defined as a second direction D2.

[0019] <External transfer device 101> The external transport device 101 transports the transport container 201 or storage container 202 between multiple processing devices and the storage system 1A. The external transport device 101 can travel on a transport lane 100 provided in the first area A1. The first area A1 is an area set outside the storage system 1A. The transport lane 100 includes rails (not shown) that extend across multiple processing devices. In this embodiment, the rails of the transport lane 100 extend along the ceiling of the room where the manufacturing process equipment is installed.

[0020] The external transport device 101 moves along the rails of the transport lane 100 based on commands from the transport controller (not shown) of the external transport device 101. The external transport device 101 can move along the transport lane 100 while holding the transport container 201 containing the substrates. The external transport device 101 can also move along the transport lane 100 while holding a different container 202 than the transport container 201.

[0021] <Storage System 1A> Storage system 1A houses multiple storage containers 202. Storage system 1A comprises a container storage section 2, a substrate loading / unloading section 3, a container transfer section 50, a container transport section 60, and a control device 80 (see Figures 5 and 6).

[0022] (Container storage section 2) The container storage section 2 is located in the second area A2. The second area A2 is a different area from the first area A1. In this embodiment, the second area A2 is located within the housing casing 21 of the container storage section 2. That is, the first area A1 and the second area A2 are separated by the storage system 1A. The container storage section 2 stores a plurality of housing containers 202. Each of the plurality of housing containers 202 can accommodate a plurality of substrates (not shown). Examples of substrates to be stored in the housing containers 202 include semiconductor wafers supplied to a plurality of processing devices, as well as dummy wafers used when performing trial runs, etc., in each processing device. The container storage section 2 may also accommodate a transport container 201.

[0023] The container storage section 2 comprises a storage casing 21 and a storage shelf 22.

[0024] The housing casing 21 is provided on the floor surface F. The housing casing 21 is formed in the shape of a hollow box with a rectangular shape when viewed from the vertical direction Dv, for example, with the first direction D1 as the longer side and the second direction D2 as the shorter side. The housing casing 21 has a pair of first housing side walls 21a, 21b, a pair of second housing side walls 21c, 21d, and a top wall 21e. The pair of first housing side walls 21a, 21b are provided with a gap in the first direction D1. The pair of second housing side walls 21c, 21d are provided with a gap in the second direction D2. The top wall 21e closes the space (second area A2) enclosed by the pair of first housing side walls 21a, 21b and the pair of second housing side walls 21c, 21d from above. The housing casing 21 may be filled with an inert gas such as nitrogen gas.

[0025] The storage shelves 22 are provided within the storage casing 21. In this embodiment, the storage shelves 22 are provided facing each other on both sides in the second direction D2 within the storage casing 21. The storage shelves 22 comprise a plurality of container storage compartments 221. The plurality of container storage compartments 221 are arranged in multiple rows in the first direction D1 and in multiple tiers in the vertical direction Dv. Each of the plurality of container storage compartments 221 is capable of accommodating one storage container 202. Each of the plurality of container storage compartments 221 may be provided with a gas supply unit (not shown) for supplying an inert gas such as nitrogen gas into the storage container 202.

[0026] (Substrate loading / unloading section 3) Figure 3 is a plan view showing the schematic configuration of the substrate loading / unloading section 3 and the container transfer section 50 according to the embodiment. Figure 4 is a cross-sectional view taken along the line IV-IV in Figure 3. As shown in Figures 1 to 4, the substrate loading / unloading section 3 transfers substrates between the first area A1 and the second area A2. The substrate loading / unloading section 3 loads and unloads substrates between the transport container 201, which is transported by the external transport device 101, and the storage containers 202, which are moved in and out of the container storage section 2. The substrate loading / unloading section 3 also transfers substrates between multiple storage containers 202.

[0027] The substrate loading / unloading section 3 is located on the outside of the container storage section 2 (on one side D1a in the first direction D1 relative to the container storage section 2). The substrate loading / unloading section 3 is located between the container storage section 2 and the transport lane 100. As shown in Figure 3, the substrate loading / unloading section 3 comprises a transfer casing 30, a transport container support section (third container support section) 31, a storage container support section (second container support section) 32, and a substrate loading / unloading mechanism 41.

[0028] The transfer casing 30 is provided on the floor surface F. The transfer casing 30 is formed in the shape of a hollow box. When viewed from the vertical direction Dv, the transfer casing 30 is rectangular in shape, for example, with the first direction D1 as the shorter side and the second direction D2 as the longer side.

[0029] The transfer casing 30 has a pair of first transfer side walls 301 and 302, a pair of second transfer side walls 303 and 304, a partition wall 305, and a top wall 306 (see Figure 4). The pair of first transfer side walls 301 and 302 are spaced apart in the first direction D1. Of the pair of first transfer side walls 301 and 302, the first transfer side wall 302 located on the other side D1b of the first direction D1 forms part of the first housing side wall 21a. The pair of second transfer side walls 303 and 304 are spaced apart in the second direction D2.

[0030] The partition wall 305 is provided between the second transfer side wall 303 and the second transfer side wall 304. The partition wall 305 divides the space within the transfer casing 30 into a first space R1 on one side D2a in the second direction D2 relative to the partition wall 305, and a second space R2 on the other side D2b in the second direction D2 relative to the partition wall 305.

[0031] As shown in Figure 4, the top wall 306 blocks the first space R1, which is surrounded by at least a pair of first transfer side walls 301 and 302, a second transfer side wall 303, and a partition wall 305, from above. With this configuration, the first space R1 is separated from the space R3 outside the transfer casing 30. The first space R1 may be made cleaner than the outside space R3 by supplying, for example, an inert gas such as nitrogen gas or air that has passed through an air filter into the first space R1. The top wall 306 may also block the entirety of the first space R1 and the second space R2 from above.

[0032] As shown in Figures 3 and 4, the transport container support section 31 is provided on one side D1a in the first direction D1 relative to the transfer casing 30, and is positioned alongside the transfer casing 30 in the first direction D1. The transport container support section 31 is provided in the first area A1. When viewed from the first direction D1, the transport container support section 31 is provided in a position that overlaps with the first space R1 within the transfer casing 30. In this embodiment, for example, two transport container support sections 31 are provided side by side in the second direction D2. The number of transport container support sections 31 is not limited to two; there may be one, or three or more may be provided side by side in the second direction D2. The transport container support section 31 extends from the transfer casing 30 so as to protrude on one side D1a in the first direction D1.

[0033] The transport container support section 31 is, for example, rectangular in shape when viewed from the vertical direction Dv, and the transport container 201 can be placed on its upper surface. The transport container support section 31 is located below the transport lane 100, in a position that overlaps with a part of the transport lane 100 when viewed from the vertical direction Dv. The transport container support section 31 is positioned so that the transport container 201 can be received and transferred between the transport container support section 31 and the external transport device 101, which moves along the transport lane 100, when the external transport device 101 is located above the transport container support section 31.

[0034] The container support section 32 is provided on the other side D1b of the first direction D1 relative to the transfer casing 30, and is positioned parallel to the transfer casing 30 in the first direction D1. The container support section 32 is provided in the second area A2, in the portion located on one side D1a of the first direction D1 relative to the storage shelf 22 in the storage casing 21. Therefore, the container support section 32 is provided between the transport container support section 31 and the storage shelf 22. When viewed from the first direction D1, the container support section 32 is provided in a position that overlaps with the first space R1 within the transfer casing 30. In this embodiment, for example, two container support sections 32 are provided side by side in the second direction D2.

[0035] The transport container support section 31 and the containment container support section 32 are arranged facing each other with the transfer casing 30 in between. In this embodiment, the transport container support sections 31 and containment container support sections 32, which are provided in pairs in the second direction D2, are arranged so that the corresponding transport container support sections 31 and containment container support sections 32 face each other with the transfer casing 30 in between. Specifically, the transport container support section 31A and containment container support section 32A on one side D2a of the second direction D2 face each other with the transfer casing 30 in between. The transport container support section 31B and containment container support section 32B on the other side D2b of the second direction D2 face each other with the transfer casing 30 in between. Furthermore, the number of container support sections 32 is not limited to two; three or more may be arranged in a row in the second direction D2.

[0036] The container support section 32 (container support sections 32A, 32B) protrudes from the transfer casing 30 to the other side D1b in the first direction D1 and is located inside the container casing 21.

[0037] The container support section 32, when viewed from the vertical direction Dv, is, for example, rectangular in shape, and the container 202 can be placed on its upper surface. The container support section 32 is positioned to receive and transfer the container 202 between itself and the container transport section 60. The container support section 32 supports the container 202 that has been removed from the storage shelf 22 by the container transport section 60.

[0038] The substrate loading / unloading mechanism 41 is installed in the center of the substrate loading / unloading section 3. The substrate loading / unloading mechanism 41 is provided between the transport container support section 31 and the storage container support section 32. The substrate loading / unloading mechanism 41 transfers substrates between the transport container 201 supported by the transport container support section 31 and the storage container 202 supported by the storage container support section 32. The substrate loading / unloading mechanism 41 can load and unload substrates into and from both the transport container 201 and the storage container 202. The substrate loading / unloading mechanism 41 is provided in the first space R1 of the transfer casing 30. The transfer casing 30 includes a substrate transfer support frame section 323 (see Figure 4) that supports the substrate loading / unloading mechanism 41. The substrate loading / unloading mechanism 41 has an arm 41a capable of gripping substrates.

[0039] In this embodiment, the substrate loading / unloading mechanism 41 transfers substrates between two transport container support sections 31 and two storage container support sections 32. As shown in Figure 3, the substrate loading / unloading mechanism 41 is capable of transferring substrates between a first position P11, which is between the transport container support section 31A and the storage container support section 32A facing each other on one side D2a of the second direction D2, and a second position P12, which is between the transport container support section 31B and the storage container support section 32B facing each other on the other side D2b of the second direction D2. The substrate loading / unloading mechanism 41 may be provided to be movable in the second direction D2 within the first space R1 along a rail 41r supported by the transfer casing 30, depending on the distance traveled between the transport container support section 31 and the storage container support section 32 in the second direction D2.

[0040] The substrate loading / unloading mechanism 41 is provided so as to be able to rotate around a pivot axis extending in the vertical direction Dv at a position set to correspond to the center of the substrate loading / unloading section 3. The arm 41a is provided on the substrate loading / unloading mechanism 41 and, at positions set to correspond to the first position P11 and the second position P12, is capable of loading and unloading substrates into and out of the transport container 201 supported by the transport container support section 31, loading and unloading substrates into and out of the storage container 202 supported by the storage container support section 32, and transferring substrates between the transport container 201 and the storage container 202.

[0041] As shown in Figure 4, the transfer casing 30 is provided with a first opening / closing section 37A and a second opening / closing section 37B.

[0042] The first opening / closing section 37A switches between communication and isolation between each of the transport container support sections 31 provided in the first area A1 and the inside of the transfer casing 30. The first opening / closing sections 37A, 37A can open and close openings individually formed in the first transfer side wall 301 in the portion that overlaps with the transport container support sections 31A, 31B when viewed from the first direction D1. The first opening / closing section 37A may be, for example, a shutter that opens and closes in the vertical direction Dv. The first opening / closing section 37A is opened when a substrate is inserted into or removed from the transport container 201, which is supported by the transport container support section 31, by the substrate insertion / removal mechanism 41. With this configuration, the first opening / closing unit 37A switches between communication and disconnection between the first area A1 and the first space R1 within the transfer casing 30.

[0043] The second opening / closing section 37B switches between communication and isolation between each of the container support sections 32 provided in the second area A2 and the inside of the transfer casing 30. The second opening / closing section 37B can open and close openings individually formed in the first transfer side wall 302 in the portion that overlaps with the container support sections 32A and 32B when viewed from the first direction D1. The second opening / closing section 37B may be, for example, a shutter that opens and closes in the vertical direction Dv. The second opening / closing section 37B is opened when inserting or removing a circuit board from the storage container 202, which is supported by the storage container support section 32, using the circuit board insertion / removal mechanism 41. With this configuration, the second opening / closing unit 37B switches between communication and disconnection between the second area A2 and the first space R1 within the transfer casing 30.

[0044] The substrate loading / unloading mechanism 41 transfers substrates between the transport container 201 supported by the transport container support section 31 and the storage container 202 supported by the storage container support section 32. In other words, within the substrate loading / unloading section 3, a substrate transfer lane L is set up by the transport container support section 31, the storage container support section 32, and the substrate loading / unloading mechanism 41, through which substrates are transferred between the first area A1 and the second area A2.

[0045] (Container transfer section 50) As shown in Figure 3, the container transfer unit 50 transfers the containers 202 between the container storage unit 2 and the transport lane 100. The container transfer unit 50 bypasses the substrate transfer lane L and transfers the containers 202 between itself and the transport lane 100. The container transfer unit 50 is equipped with a transfer table (first container support unit) 52.

[0046] The transfer platform 52 supports the container 202 (hereinafter sometimes referred to as the target container 202T) that is to be transferred to and from the external transport device 101. The transfer platform 52 is located below the transport lane 100, in a position that overlaps with a part of the transport lane 100 when viewed from the vertical direction Dv. The transfer platform 52 is positioned so that the target container 202T can be transferred to and from the external transport device 101 when the external transport device 101, which is moving along the transport lane 100, is located above the transfer platform 52.

[0047] The transfer platform 52 is positioned on one side D1a of the first direction D1 relative to the transfer casing 30. The transfer platform 52 is located in the first area A1. In this embodiment, the transfer platform 52 is positioned along the transport lane 100, parallel to the transport container support section 31 in the second direction D2. When viewed from the first direction D1, the transfer platform 52 is positioned to overlap with the second space R2 within the transfer casing 30. In this embodiment, for example, one transfer platform 52 is provided. The number of transfer platforms 52 is not limited to one; two or more may be provided side by side in the second direction D2.

[0048] The transfer casing 30 is provided with a third opening / closing section 38. The third opening / closing section 38 switches between communication and isolation between the transfer platform 52 and the second space R2 within the transfer casing 30. The third opening / closing section 38 can open and close an opening formed in the portion of the first transfer side wall 301 that overlaps with the transfer platform 52 when viewed from the first direction D1. The third opening / closing section 38 may be, for example, a shutter that opens and closes in the vertical direction Dv. Furthermore, the first transfer side wall 302 has an opening that connects the second area A2 and the second space R2, allowing the container transport device 62 and the target container 202T to pass through.

[0049] The third opening / closing section 38 is opened when the target container 202T is handed over to the transfer table 52. With this configuration, the third opening / closing section 38 switches between communication and isolation between the second area A2 and the second space R2 within the transfer casing 30.

[0050] (Container transport section 60) As shown in Figures 1 and 3, the container transport unit 60 loads and unloads the container 202 into and out of the container storage unit 2. The container transport unit 60 is capable of transporting the container 202 between the container storage unit 2 and the substrate loading / unloading unit 3.

[0051] The container transport unit 60 includes a transport rail 61 and a container transport device 62 that can move along the transport rail 61.

[0052] As shown in Figure 1, the transport rail 61 is laid on the floor surface F so that the container transport device 62 can move between the container storage section 2, the substrate loading / unloading section 3, and the container handover section 50. In this embodiment, the transport rail 61 comprises a first rail section 61a, a second rail section 61b, a third rail section 61c, and a fourth rail section 61d.

[0053] The first rail section 61a extends in the first direction D1 within the storage casing 21, between the storage shelves 22 on both sides in the second direction D2. The container transport device 62 moves along the first rail section 61a between the storage shelves 22 on both sides in the second direction D2, and loads and unloads the storage containers 202 between itself and the storage shelves 22.

[0054] The second rail section 61b extends between a first position P1 set at one end of the first rail section 61a and a second position P2 facing the transfer table 52 of the container transfer section 50, forming a first transport path M1. The container transport device 62 is movable between the container storage section 2 and the container transfer section 50 through the first transport path M1. The third rail section 61c extends to connect the first position P1 and the third position P3 facing the container support section 32 (container support sections 32A, 32B), forming the second transport path M2. The container transport device 62 is movable between the container storage section 2 and the substrate loading / unloading section 3 via the second transport path M2. The fourth rail section 61d extends to connect the second rail section 61b leading to the second position P2 and the third rail section 61c leading to the third position P3, forming a third transport path M3. The container transport device 62 is movable between the substrate loading / unloading section 3 and the container transfer section 50 through the third transport path M3.

[0055] As shown in Figure 2, the container transport device 62 includes a traveling carriage 62a that can move along a transport rail 61, a mast 62b that is mounted on the traveling carriage 62a and extends vertically, and an arm 62c that is mounted to move up and down along the mast 62b and is capable of gripping the container 202. The configuration of the arm 62c may be any configuration as long as it is capable of gripping or holding the container 202. The container transport device 62 allows the container 202 to be inserted into and removed from each of the multiple container storage compartments 221 of the storage rack 22 by moving the arm 62c forward and backward.

[0056] The container transport device 62 is capable of transferring the container 202, which is gripped by the arm 62c, to the container support section 32 and the transfer table 52.

[0057] <Control device 80> Figure 5 is a block diagram showing the hardware configuration of the control device 80 according to the embodiment. Figure 6 is a functional block diagram of the control device 80 according to the embodiment. The control device 80 shown in Figures 5 and 6 controls the operation of each part of the storage system 1A. The control device 80 instructs the container transport unit 60 to transport the storage containers 202 by the container transport device 62 along one of the first transport routes M1, the second transport route M2, or the third transport route M3, which is selected from the first transport route M1, the second transport route M2, and the third transport route M3.

[0058] <Control device 80> As shown in Figure 5, the control unit 80 is a computer equipped with a CPU 81 (Central Processing Unit), ROM 82 (Read Only Memory), RAM 83 (Random Access Memory), storage 84 such as an HDD (Hard Disk Drive), and a communication module 85.

[0059] As shown in Figure 6, the CPU 81 of the control device 80 executes a program that is pre-stored in the device, and is equipped with the following components: a signal input unit 91, a determination unit 92, a processing unit 93, and an output unit 95.

[0060] The signal input unit 91 is, in hardware terms, a communication module 85, and receives command signals from a higher-level control device (not shown) that controls the entire board transport system 500, detection signals from sensors (not shown) in various parts, etc.

[0061] The determination unit 92 performs various determinations in order to control the operation of the container transport unit 60 and the substrate loading / unloading unit 3.

[0062] The processing unit 93 operates the container transport unit 60 and the substrate loading / unloading unit 3 based on the determination result of the determination unit 92. The processing unit 93 generates command signals to operate the container transport unit 60 and the substrate loading / unloading unit 3 based on the determination result of the determination unit 92.

[0063] The output unit 95 outputs the command signals generated by the processing unit 93 to the container transport unit 60 and the substrate loading / unloading unit 3.

[0064] Figure 7 is a flowchart showing the processing flow in the control device 80 according to the embodiment. As shown in Figure 7, during normal operation of the substrate transport system 500, the control device 80 transports substrates between the container storage unit 2 and a plurality of processing devices (not shown) (step S1).

[0065] In step S1, the control device 80 transports the container 202 (target container 202T) housed in the container storage unit 2 via the container transport device 62 through the second transport path M2 between the container storage unit 2 and the substrate loading / unloading unit 3. When removing a substrate from a target container 202T stored in the container storage section 2 and transporting it to a predetermined processing device, the control device 8 uses the container transport device 62 to remove the target container 202T containing the substrate from the container storage section 2 and have it supported by the container support section 32 via the second transport path M2. The control device 8 then uses the substrate loading / unloading mechanism 41 to transfer the substrate contained in the target container 202T, which is supported by the container support section 32, to the transport container 201. The transport container 201, now containing the transferred substrate, is transported to a predetermined processing device by the external transport device 101.

[0066] In step S1, if the processed substrates that have been processed in a predetermined processing device are contained in the transport container 201, the control device 8 uses the container transport device 62 to remove the target container 202T to contain the processed substrates from the container storage unit 2 and have it supported by the container support unit 32 via the second transport path M2. The control device 8 uses the substrate loading / unloading mechanism 41 to transfer the processed substrates contained in the transport container 201, which is supported by the container support unit 31, to the target container 202T. The target container 202T containing the processed substrates is then transported by the container transport unit 60 via the second transport path M2 and placed in the storage shelf 22 of the container storage unit 2.

[0067] The control device 80 determines whether there is a command from a higher-level control device (not shown) that controls the entire substrate transport system 500 to transport the target container 202T stored in the container storage unit 2 to, for example, a maintenance location (step S2). Examples of the timing for transporting the target container 202T to the maintenance location include when the usage period or number of uses of the target container 202T reaches a preset upper limit. If there is no command to transport the containment container 202 (target container 202T) to the maintenance location (step S2: No), the control device 80 continues step S1.

[0068] If the control device 80 receives a command to transport the target container 202T to the maintenance location (step S2: Yes), it proceeds to step S3 or later.

[0069] When the control device 80 receives a command to transport the target container 202T to the maintenance location, it instructs the container transport device 62 of the container transport unit 60 to remove the target container 202T to be transported to the maintenance location from the container storage unit 2. The determination unit 92 determines whether or not it is necessary to remove the circuit boards from the target container 202T after it has been removed from the container storage unit 2 (step S3). Specifically, the determination unit 92 determines whether or not it is necessary to remove the circuit boards from the target container 202T based on information (number of circuit boards contained in the target container 202T) registered in the higher-level control device that controls the entire circuit board transport system 500. Alternatively, the determination unit 92 may determine whether or not circuit boards are contained in the target container 202T after it has been removed from the container storage unit 2 using an appropriate sensor. The determination method of the determination unit 92 is not limited in any way.

[0070] If, in step S3, it is determined that there is no need to remove the substrate from the target container 202T (step S3: No), the processing unit 93 transfers the target container 202T, which has been removed from the container storage unit 2, to the transfer table 52 of the container transfer unit 50 via the first transport path M1 (step S4). The target container 202T, which has been transferred to the transfer table 52, is then transported to the maintenance location by the external transport device 101.

[0071] If, in step S3, it is determined that it is necessary to remove the substrate from the target container 202T (step S3: Yes), the processing unit 93 places the target container 202T in the container support section 32 (for example, container support section 32A) via the second transport path M2, and also removes another container 202 from the container storage section 2 and places it in the other container support section 32 (for example, container support section 32B). The processing unit 93 uses the substrate loading / unloading mechanism 41 of the substrate loading / unloading section 3 to remove the substrate from the target container 202T and transfer it to the other container 202 (step S5).

[0072] After the removal of the circuit board from the target container 202T is complete, the processing unit 93 transfers the now empty target container 202T from the container support section 32 to the transfer table 52 via the third transport path M3 using the container transport device 62 (step S6). The other containers 202 on which the circuit board removed from the target container 202T has been transferred may remain supported by the other container support sections 32 until the target container 202T returns from the maintenance area, or they may be transferred to the container storage section 2 by the container transport device 62.

[0073] Next, the processing unit 93 hands over the target container 202T, which has been transferred to the transfer table 52, to the external transport device 101 (step S4). The external transport device 101 transports the handed-over target container 202T to the maintenance location.

[0074] Furthermore, once maintenance is complete, the target container 202T is transported to the transfer table 52 by the external transport device 101. In this case, the control device 80 has the container transport device 62 retrieve the target container 202T that has been transported to the transfer table 52 via the first transport route M1. The control device 80 then has the target container 202T, received from the transfer table 52, placed in the storage shelf 22 of the container storage unit 2 via the first transport route M1. If the circuit board that was contained in the target container 202T has been transferred to another storage container 202, the control device 80 transports the target container 202T that has been transported to the transfer table 52 to the storage container support unit 32 via the third transport route M3. Subsequently, the control device 80 uses the substrate loading / unloading mechanism 41 to return the substrates stored in the other storage containers 202 to the target container 202T, and then places the target container 202T and the other storage containers 202 into the storage shelves 22 of the container storage unit 2 via the second transport path M2.

[0075] Thus, in this embodiment, the storage system 1A comprises a container storage section 2 capable of storing multiple storage containers 202, each capable of accommodating multiple substrates; a container transfer section 50 capable of transferring the storage containers 202 between the container storage section 2 and at least one transport lane 100 provided outside the container storage section 2; a substrate loading / unloading section 3 capable of loading and unloading substrates between the transport lane 100 and the substrate loading / unloading section 3; at least one container transport section 60 capable of loading and unloading the storage containers 202 to and from the container storage section 2, and transporting the storage containers 202 between the container storage section 2 and the substrate loading / unloading section 3, or between the container storage section 2 and the container transfer section 50; and a control device 80 that causes the container transport section 60 to transport along one of the following transport paths selected from a first transport path M1, through which the container transport section 60 moves between the container storage section 2 and the container transfer section 50, and a second transport path M2, through which the container transport section 60 moves between the container storage section 2 and the substrate loading / unloading section 3. With this configuration, the container transport unit 60 transports the container 202 (target container 202T) via one of two transport paths selected from a first transport path M1 that moves between the container storage unit 2 and the container transfer unit 50, and a second transport path M2 that moves between the container storage unit 2 and the substrate loading / unloading unit 3, under the control of the control device 80. This allows the target container 202T to be automatically transported to the container transfer unit 50 and the substrate loading / unloading unit 3. Therefore, the transfer of the target container 202T stored in the container storage unit 2 to the transport lane 100, and the loading and unloading of substrates contained in the container 202 stored in the container storage unit 2 to the transport lane 100, can be performed efficiently without manual labor. For example, when removing the container 202 from the container storage unit 2 for maintenance, it is no longer necessary for an operator to transport the target container 202T to the maintenance location, and the need to temporarily suspend the storage system is also reduced. As a result, labor is reduced, and the production efficiency of the product can be improved.

[0076] In this embodiment, the container transfer unit 50 is configured to transfer the target container 202T to the container transport unit 60 and to transfer the target container 202T to at least one external transport device 101 traveling along the transport lane 100, and further includes a transfer platform 52 that supports the target container 202T. With this configuration, by supporting the target container 202T on the transfer table 52, the transfer of the target container 202T between the container transport unit 60 and the external transport device 101 can be performed via the transfer table 52. Therefore, there is no need to directly transfer the target container 202T between the container transport unit 60 and the external transport device 101. As a result, there is no need to synchronize the timing of the transfer of the target container 202T between the container transport unit 60 and the external transport device 101, and the transfer of the target container 202T can be performed efficiently.

[0077] In this embodiment, the control device 80 is configured to transport an empty target container 202T to the container transfer unit 50 by the container transport unit 60 when it determines that no substrate is contained in the target container 202T that has been removed from the container storage unit 2 among the multiple storage containers 202. In this configuration, among the multiple storage containers 202, empty target containers 202T that do not contain substrates are transported to the container transfer unit 50. This allows, for example, target containers 202T that are to be maintained to be transferred between the transport lane 100 and the transport lane 100 in an empty state without containing substrates.

[0078] In this embodiment, the substrate loading / unloading section 3 further comprises a container support section 32 that supports the target container 202T, and a substrate loading / unloading mechanism 41 that loads and unloads substrates into and out of the target container 202T supported by the container support section 32. With this configuration, the substrate can be removed from the target container 202T, which is supported by the container support section 32, by the substrate insertion / removal mechanism 41.

[0079] In this embodiment, when the control device 80 determines that a substrate is contained in the target container 202T, it causes the substrate loading / unloading mechanism 41 to remove the substrate from the target container 202T, and moves the container transport unit 60 along the third transport path M3 connecting the substrate loading / unloading unit 3 and the container transfer unit 50 to transport the empty target container 202T. With this configuration, if a substrate is contained in the target container 202T, the substrate loading / unloading mechanism 41 can remove the substrate from the target container 202T, leaving it empty. Then, the container transport unit 60 can transport the empty target container 202T along the third transport path M3 between the substrate loading / unloading unit 3 and the container transfer unit 50. Therefore, even if the target container 202T was stored in the container storage unit 2 with a substrate inside, after removing the substrate and leaving it empty, only the target container 202T can be transferred to the transport lane 100.

[0080] In this embodiment, the control device 80 is configured to operate the substrate insertion / removal mechanism 41 so as to place the substrate removed from the target container 202T supported by the container support section 32 into another container 202. With this configuration, the circuit boards removed from the target container 202T are stored in another storage container 202. This makes it easy to store the removed circuit boards while the target container 202T is being transferred to the transport lane 100 and removed from the container storage section for maintenance or other purposes.

[0081] In this embodiment, multiple container support sections 32 are provided, and the substrate insertion / removal mechanism 41 is configured to remove a substrate from a target container 202T supported by one container support section 32 and place it in another container 202 supported by another container support section 32. In this configuration, a substrate removed from a target container 202T supported by one container support section 32 is stored in another container 202 supported by another container support section 32. This means that when transferring a substrate removed from the target container 202T to another container 202, the other container 202 only needs to be removed from the container storage section 2 and moved to the other container support section 32. Therefore, there is no need to prepare a dedicated container or the like for storing the substrate removed from the target container 202T, and the storage system can be operated efficiently.

[0082] In this embodiment, the substrate loading / unloading section 40 supports a transport container 201 capable of accommodating multiple substrates, and is configured to transfer the transport container 201 between the third container support section 31 and an external transport device 101 traveling on the transport lane 100, and the substrate loading / unloading mechanism 41 transfers substrates between the target container 202T supported by the second container support section 32 and the transport container 201 supported by the third container support section 31. With this configuration, the substrate loading / unloading mechanism 41 transfers the substrate between the target container 202T supported by the second container support section 32 and the transport container 201 supported by the third container support section 31. The substrate removed from the target container 202T is then placed in the transport container 201 and transported by the external transport device 101 to various processes where the substrate is subjected to predetermined processing. In this way, the substrate loading / unloading mechanism 41 can handle both the supply of substrates to the production process and the removal of substrates from the target container 202T when performing maintenance on the target container 202T, eliminating the need for separate mechanisms for each. Therefore, the size of the storage system can be kept down.

[0083] (Modified examples of the embodiment) In the above embodiment, the container transfer unit 50 is arranged side by side D2b of the second direction D2 with respect to the substrate loading / unloading unit 3 (substrate transfer lane L). However, the container transfer unit 50 may be arranged side by side on both sides of the second direction D2 with respect to the substrate loading / unloading unit 3.

[0084] In the above embodiment, the container transfer section 50 is arranged alongside the substrate loading / unloading section 3 along the transport lane 100 of the external transport device 101, but the embodiment is not limited to this. For example, the container transfer section 50 may be provided at a position away from the substrate loading / unloading section 3 along the transport lane 100 of the external transport device 101.

[0085] Figure 8 shows an example of a storage system 1D according to a modified version of this embodiment. As shown in Figure 8, in the storage system 1D, the transfer table 52 of the container transfer section 50D is provided independently of the transfer casing 30. The transfer table 52 is connected to the second storage side wall 21d of the storage casing 21, for example, so as to protrude outward from the second storage side wall 21d. The transfer table 52 can communicate with the inside of the storage casing 21 through an opening / closing part (not shown) provided on the second storage side wall 21d. Note that the container transfer section 50D may be provided not only connected to the second storage side wall 21d, but also to the first storage side wall 21a or the second storage side wall 21c. In this case, when transporting substrates between the container storage unit 2 and a plurality of processing devices (not shown), the substrate loading / unloading unit 3, as in the above embodiment, handles the transfer of substrates between the storage container 202 and the transport container 201, and the transfer of the transport container 201 to and from the external transport device (first external transport device) 101. On the other hand, the target container 202T may be transferred to and from the second external transport device 121, which travels along a second transport lane 120 provided separately from the first transport lane 100, via a transfer table 52.

[0086] According to this embodiment, the transfer of the transport container 201 between the substrate loading / unloading unit 3 and the first external transport device 101, and the transfer of the containment container 202 between the substrate loading / unloading unit 50 and the second external transport device 121 can be performed separately. Therefore, the transfer of the containment container 202 between the substrate loading / unloading unit 3 and the first external transport device 101 can be performed without affecting the transfer of the transport container 201 between the substrate loading / unloading unit 3 and the second external transport device 121, thereby preventing a decrease in product production efficiency.

[0087] Figure 9 shows an example of a storage system 1E according to a modified version of this embodiment. As shown in Figure 9, in the modified storage system 1E, the container transport section 60E may be equipped with a container transport device (first container transport device) 62 and a second container transport device 65. In this modified example, the container transport device 62 is movable along the first rail section 61a of the transport rail 61. The second container transport device 65 is movable along the first transport path M1 (second rail section 61b), the second transport path M2 (third rail section 61c), and the third transport path M3 (fourth rail section 61d) of the transport rail 61.

[0088] In this modified example, the container transport device 62 and the second container transport device 65 use the first position P1 as a relay point to transfer the container 202 (target container 202T) between the container transport device 62 and the second container transport device 65.

[0089] In this configuration, the first container transport device 62 transports the containers 202 between the container storage section 2 and the relay point (first position P1). The second container transport device 65 transports the target containers 202T between the relay point (first position P1) and the container handover section 50, and between the relay point (first position P1) and the substrate loading / unloading section 3.

[0090] With this configuration, the container transport unit 60E, comprising a first container transport device 62 and a second container transport device 65, can independently transport the containers 202 between the container storage unit 2 and the relay point, and the target containers 202T between the relay point and the container handover unit 50, and between the relay point and the substrate loading / unloading unit 3. Therefore, the operation of the first container transport device 62 and the second container transport device 65 can be made efficient. Furthermore, since the second container transport device 65 does not need to have a mast 62b like the first container transport device 62, it can be made smaller and less expensive.

[0091] Furthermore, the configuration of the container transport unit 60E shown in Figure 9 can be similarly applied to the modified example shown in Figure 8.

[0092] (Other embodiments) While preferred embodiments of the present disclosure have been described above, the present disclosure is not limited to these embodiments. Additions, omissions, substitutions, and other modifications are permitted without departing from the spirit of the present disclosure. The present disclosure is not limited by the above description, but only by the appended claims.

[0093] In the above embodiment, the configurations of the container storage section 2, the substrate loading / unloading section 3, the container transfer section 50, the container transport section 60, etc., have been described, but their specific configurations can be changed as appropriate.

[0094] In the above embodiment, the container transfer unit 50 transfers the target container 202T to the external transport device 101 via the transfer table 52, but it is not limited to this. The target container 202T may also be directly transferred to the external transport devices 101 and 121 by the container transport devices 62 and 65 of the container transport unit 60.

[0095] In the above embodiment, when a substrate is present in the target container 202T, the substrate removed from the target container 202T is placed in another storage container 202, but the embodiment is not limited to this. The substrate removed from the target container 202T may be placed in a dedicated storage container. Furthermore, in the above embodiment, when a substrate is contained in the target container 202T, the substrate is removed from the target container 202T by a substrate loading / unloading mechanism 41 that moves the substrate in and out between the storage container 202 and the transport container 201, but the embodiment is not limited to this. When a substrate is contained in the target container 202T, the substrate may be removed from the target container 202T by an appropriate mechanism provided separately from the substrate loading / unloading mechanism 41.

[0096] In the above embodiment, the substrate loading / unloading mechanism 41 transfers the substrate between the target container 202T and the transport container 201, and the transport container 201 is transported by the external transport device 101, but the embodiment is not limited to this. For example, the target container 202T may be transported without removing the substrate contained within it. Alternatively, the substrate removed from the target container 202T may be transported directly to the processing device by an appropriate substrate transport mechanism.

[0097] In the above embodiment, the first transport path M1, the second transport path M2, and the third transport path M3 have been described, but their layout can be changed as appropriate. For example, the third transport path M3 may be shared as part of the first transport path M1, or a part of the first transport path M1 may be shared with the third transport path M3. Furthermore, it is possible to replace the components in the embodiments described above with well-known components as appropriate, without departing from the spirit of this disclosure, and the modifications described above may be combined as appropriate. [Explanation of symbols]

[0098] 1A, 1D, 1E… Storage Systems 2…Container storage section 3… Circuit board loading / unloading section 8...Control device 31…Conveyor container support section (third container support section) 32, 32A, 32B...Container support section (second container support section) 41... Circuit board insertion / removal mechanism 50, 50D...Container transfer section 52... Transfer platform (first container support section) 60, 60E... Container transport section 62…Container conveying device (First container conveying device) 65...Second container conveying device 80...Control device 100... Conveyor lane (First conveyor lane) 101...External transport device (First external transport device) 120... Second transport lane 121...Second external transport device 201... Transport container 202…Containment container 202T…Target container M1...First transport route M2...Second transport route M3...Third transport route P1…First position (relay point)

Claims

1. A storage section capable of storing multiple containers, each capable of housing multiple circuit boards, A container transfer unit is provided outside the container storage unit, which is capable of transferring the containers to and from at least one transport lane, A transport container support section that supports a transport container capable of accommodating multiple substrates, and a container storage section provided between the container storage section and the transport container support section, which has a container storage support section that supports the containers to be stored, and the substrates can be loaded and unloaded between the transport container support section and the container storage support section, and the transport containers can be transferred between the transport container support section and the transport lane, A container transport unit capable of loading and unloading the container into and out of the container storage unit, and transporting the container between the container storage unit and the substrate loading / unloading unit, or between the container storage unit and the container transfer unit, The system includes a control device that causes the container transport unit to transport itself along one of two transport paths selected from a first transport path, in which the container transport unit moves between the container storage unit and the container transfer unit, and a second transport path, in which the container transport unit moves between the container storage unit and the substrate loading / unloading unit. Storage system.

2. The container transfer unit further comprises a first container support unit that supports the container in order to transfer the container to the container transport unit and to at least one external transport device traveling along the transport lane. The storage system according to claim 1.

3. If the control device determines that the substrate is not contained in any of the target containers removed from the container storage unit among the multiple containers, it causes the empty target container to be transported to the container transfer unit by the container transport unit. The storage system according to claim 1 or claim 2.

4. The aforementioned substrate loading / unloading section is, A second container support portion, which serves as the container support portion for supporting the target container, The system further comprises a substrate insertion / removal mechanism for inserting and removing the substrate from the target container supported by the second container support portion. The storage system according to claim 3.

5. When the control device determines that the substrate is contained in the target container, it causes the substrate to be removed from the target container by the substrate loading / unloading mechanism, and moves the container transport unit along a third transport path connecting the substrate loading / unloading unit and the container transfer unit to transport the empty target container. The storage system according to claim 4.

6. The control device operates the substrate loading / unloading mechanism to load the substrate, which has been removed from the target container supported by the second container support, into another storage container. The storage system according to claim 5.

7. Multiple second container support sections are provided, The substrate loading / unloading mechanism loads the substrate, which has been removed from the target container supported by one of the second container support parts, into another of the storage containers supported by the other second container support part. The storage system according to claim 6.

8. The aforementioned substrate loading / unloading section is, A third container support section, which serves as a container support section, is provided for the transfer of the container between the container and at least one external transport device traveling along the transport lane, The substrate loading / unloading mechanism transfers the substrate between the target container supported by the second container support and the transport container supported by the third container support. The storage system according to claim 4.

9. The transport lane comprises a first transport lane on which the first external transport device travels, and a second transport lane on which the second external transport device travels. The substrate loading / unloading section transfers the transport container to and from the first external transport device that travels along the first transport lane. The container transfer unit transfers the container to the second external transport device that travels along the second transport lane. The storage system according to claim 8.

10. A relay point is set between the container storage section, the substrate loading / unloading section, and the container handover section. The container transport unit is A first container transport device that transports the containers between the container storage section and the relay point, The system includes a second container transport device that transports the containers between the relay point and the container transfer section, and between the relay point and the substrate loading / unloading section. The storage system according to claim 1 or claim 2.

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