Pyroelectric sensors and pyroelectric sensor systems

Abstract

To provide a pyroelectric sensor that can detect infrared light emitted from an object to be measured, a pyroelectric sensor system, and a method for manufacturing a pyroelectric sensor.SOLUTION: A pyroelectric sensor comprises: a cantilever that has a fixed end at one end and a free end at the other end; a pyroelectric element that is formed on one principle surface of the cantilever and detects infrared light emitted from an object to be measured; and a driving unit that vibrates the cantilever. The vibration of the cantilever modulates the infrared light incident on the pyroelectric element.SELECTED DRAWING: Figure 1

Description

[[Technical Field]]

[0001] The present disclosure relates to a pyroelectric sensor and and a pyroelectric sensor system Mu . [[Background Art]]

[0002] In recent years, the number of heatstroke cases has been increasing due to severe summer heat. Heatstroke causes various symptoms because rising temperature and humidity in the external environment increase the core body temperature. Core body temperature is generally obtained by measuring rectal temperature, but eardrum temperature is also closely related to core body temperature and is useful as an indicator of changes in core body temperature. In order to measure eardrum temperature, it is necessary to accurately detect the temperature only of the eardrum deep in the ear and the immediate vicinity of the eardrum. The area near the auricle is greatly affected by the external environment, so its correlation with core body temperature is low.

[0003] Techniques for measuring eardrum temperature are known. For example, regarding non-contact temperature sensors based on infrared detection, temperature sensors using thermopile-type sensors are known (see, for example, Patent Document 1). According to this technique, it is possible to detect temperature without bringing the sensor into contact with the eardrum. However, since the external auditory canal is curved, the temperature of the eardrum cannot be accurately detected when the sensor is placed at the entrance of the auricle. Regarding techniques for measuring eardrum temperature, a technique of placing a sensor inside the external auditory canal is also known (see, for example, Patent Document 2). This technique can accurately detect eardrum temperature even when the sensor is placed at the entrance of the auricle, but it causes significant discomfort and a feeling of blockage, making it difficult to wear constantly in daily life.

[0004] A method of detecting eardrum temperature by forming an array of sensors and acquiring the temperature distribution inside the ear from the entrance of the auricle is also conceivable, but in this case, miniaturization of sensor elements is required. The sensitivity of a sensor element is proportional to the size of the sensor element, so miniaturization may result in insufficient accuracy to detect eardrum temperature. On the other hand, infrared temperature sensors using pyroelectric elements are also widely used. Due to their principle, pyroelectric elements can be made more sensitive than thermopiles, but because they are differential detection type sensors, they cannot detect the temperature of stationary objects. Regarding infrared temperature sensors using pyroelectric elements, a technique is known in which a chopper structure is provided outside the pyroelectric element to monitor continuously incident infrared radiation by intermittently modulating the incident infrared radiation at a predetermined frequency (for example, Patent Document 3). [Prior art documents] [Patent Documents]

[0005] [Patent Document 1] Japanese Patent Publication No. 2003-65854 [Patent Document 2] Japanese Patent Publication No. 2002-340681 [Patent Document 3] Japanese Patent Publication No. 2001-74550 [Overview of the project] [Problems that the invention aims to solve]

[0006] Regarding infrared temperature sensors using pyroelectric elements, if the chopper structure is provided outside the pyroelectric element, miniaturization of the pyroelectric element becomes difficult, making it challenging to apply this to detecting the temperature of the eardrum. This disclosure has been made in view of the above-mentioned problems, and relates to a pyroelectric sensor capable of detecting infrared light emitted from an object under measurement. and Pyroelectric sensor system Mu The purpose is to provide. [Means for solving the problem]

[0007] (1) In view of the above-mentioned problems, a pyroelectric sensor according to one aspect of the present disclosure comprises a cantilever having one end fixed and the other end free, a pyroelectric element formed on one main surface of the cantilever for detecting infrared light emitted from an object to be measured, and a drive unit for vibrating the cantilever, wherein the infrared light incident on the pyroelectric element is modulated by the vibration of the cantilever.

[0008] According to this embodiment, a pyroelectric element having a pyroelectric effect can be placed on a cantilever, and by vibrating the cantilever, an effect similar to chopping (driving a chopper to block the infrared light incident on the pyroelectric sensor at a constant period) can be achieved. This allows the infrared light incident on the pyroelectric element to be modulated. The pyroelectric element can generate a charge corresponding to the temperature when irradiated with modulated infrared light. Therefore, a voltage can be obtained based on the generated charge. This allows for the integration of the pyroelectric element and the actuator. Since the pyroelectric element itself vibrates, a chopper structure outside the pyroelectric element is unnecessary, allowing for miniaturization of the pyroelectric sensor.

[0009] (2) In the pyroelectric sensor according to the embodiment of (1) above, a shielding member may be further provided, which is formed on the surface of the pyroelectric element opposite to the cantilever and partially blocks infrared light emitted from the object to be measured. According to this embodiment, the pyroelectric element may be further provided with a shielding member on the side opposite to the cantilever that partially blocks infrared light emitted from the object under test. As the cantilever vibrates, the effective area of ​​infrared light incident on the pyroelectric element from the object under test can be greatly changed, thereby improving the detection sensitivity of the pyroelectric element to infrared light emitted from the object under test.

[0010] (3) In the pyroelectric sensor according to the embodiment of (2) above, the interruption member may be made of an insulating material. According to this embodiment, since the blocking member can be made of an insulating material, heat conduction from the blocking member to the pyroelectric element can be prevented.

[0011] (4) In the pyroelectric sensor according to the embodiment of (2) above, a heat insulating material may be further provided between the interruption member and the pyroelectric element. According to this embodiment, since an insulating material can be formed between the interrupting member and the pyroelectric element, heat conduction from the interrupting member to the pyroelectric element can be prevented.

[0012] (5) In a pyroelectric sensor according to any of the embodiments described in (2) to (4) above, the blocking member may have an inverse tapered shape, where the cross-sectional area widens from the one main surface of the cantilever toward the incident surface of the infrared light. According to this embodiment, the shielding member can be made in an inverse tapered shape, with its cross-sectional area widening from one main surface of the cantilever toward the infrared light incidence surface, thereby limiting the angle of infrared light. As a result, the sensitivity of the pyroelectric element to infrared light emitted from the object being measured can be improved.

[0013] (6) A pyroelectric sensor according to any of the embodiments described in (2) to (5) above may further include one or more connecting members that connect the interrupting member and the base of the pyroelectric sensor in a heat-transferable manner. According to this embodiment, one or more connecting members can be provided to connect the interruption member and the base of the pyroelectric sensor in a heat-transferable manner, so that the heat from the interruption member can be dissipated without being transferred to the pyroelectric element. As a result, the detection accuracy of infrared light emitted from the object being measured by the pyroelectric element can be improved.

[0014] (7) In a pyroelectric sensor according to any of the embodiments described in (2) to (6) above, the interrupting member may have one or more first interrupting members formed in a direction perpendicular to the direction from the fixed end to the free end of the cantilever. According to this embodiment, the blocking member can be formed in a direction perpendicular to the direction from the fixed end to the free end of the cantilever, so that the change in effective area can be greatly increased by driving a small cantilever.

[0015] (8) In the pyroelectric sensor according to the aspect of (7) above, the blocking member may comprise a second blocking member that is thermally conductively connected to the one or more first blocking members formed in a direction parallel to the direction from the fixed end to the free end of the cantilever, and may further comprise a connecting member capable of discharging heat. According to this aspect, since the one or more second blocking members can be formed in a direction parallel to the direction from the fixed end to the free end of the cantilever, the thermal connection between the blocking member and the connecting member allows heat to be discharged without transferring the heat to the pyroelectric element on the cantilever, thereby improving detection accuracy.

[0016] (9) In the pyroelectric sensor according to the aspect of (7) above, the second blocking member may be thinner than the first blocking member. According to this aspect, since the second blocking member can be made thinner than the first blocking member, the influence on driving can be reduced while maintaining heat discharge efficiency.

[0017] (10) In the pyroelectric sensor according to any one of aspects (1) to (9) above, the cantilever may comprise a plurality of driving parts at the one end thereof. According to this aspect, since the cantilever can be deformed uniformly, the occurrence of a twisted and bent state (twisted state) of the cantilever can be reduced. Therefore, the control accuracy of the posture of the cantilever can be improved.

[0018] (11) In the pyroelectric sensor according to the aspect of (10) above, each of the plurality of driving parts may be individually controlled. According to this aspect, since the degree of freedom in control can be improved, the control accuracy of the posture of the cantilever can be further improved.

[0019] (12) In the pyroelectric sensor according to any one of aspects (1) to (11) above, the cantilever has a plurality of fixed ends spaced apart from each other at the one end, and each of the plurality of fixed ends may be provided with the driving part. According to this aspect, the cantilever can be deformed more uniformly than in the case where the cantilever is fixed at one position. Since a driving unit is provided at each of the plurality of fixed ends, the control accuracy of the posture of the cantilever can be improved.

[0020] (13) In the pyroelectric sensor according to the aspect of (12) above, the one end has a longitudinal direction, and the fixed ends may be formed centrosymmetrically in the longitudinal direction. According to this aspect, the cantilever can be uniformly deformed by the driving unit provided at the fixed end formed centrosymmetrically in the longitudinal direction of one end of the cantilever, so that the control accuracy of the posture of the cantilever can be improved.

[0021] (14) In the pyroelectric sensor according to any one of aspects (1) to (13) above, the pyroelectric element may be configured to contain polyvinylidene fluoride. According to this aspect, since the pyroelectric element can be configured to include a resin material such as polyvinylidene fluoride, the weight of the pyroelectric element can be reduced and the pyroelectric element can be made flexible. Therefore, compared with the case where the pyroelectric element is formed of a material other than the resin material, the mechanical durability against driving of the cantilever can be improved.

[0022] (15) In the pyroelectric sensor according to any one of aspects (1) to (14) above, the driving unit may be configured to include a piezoelectric body that vibrates the cantilever. According to this aspect, the inverse piezoelectric effect can be used to vibrate the cantilever.

[0023] (16) In the pyroelectric sensor according to any one of aspects (1) to (15) above, the piezoelectric body constituting the driving unit may be configured to include the material constituting the pyroelectric element. According to this aspect, since the piezoelectric body constituting the driving unit and the pyroelectric body constituting the pyroelectric element can be formed of the same material, they can be manufactured in the same process. Therefore, the number of processes can be reduced compared to manufacturing the piezoelectric body constituting the driving unit and the pyroelectric body constituting the pyroelectric element from different materials.

[0024] (17) In a pyroelectric sensor according to any of the embodiments described in (1) to (16) above, the cantilever may be positioned such that, when the cantilever is not vibrating, the angle between the direction from the fixed end to the free end and the incident direction of the infrared light is 30 degrees or more and less than 60 degrees. According to this embodiment, the pyroelectric sensor can reduce the angle at which the cantilever vibrates, thereby reducing power consumption.

[0025] (18) A pyroelectric sensor according to any of the embodiments described in (1) to (17) above further comprises an outer casing with an infrared light transmission window, the cantilever, the pyroelectric element, and the drive unit are installed inside the outer casing, and the inside of the outer casing may be in a vacuum atmosphere. According to this embodiment, the inside of the outer casing housing the cantilever, pyroelectric element, and drive unit can be kept in a vacuum atmosphere. Compared to a non-vacuum atmosphere, the sensitivity of the pyroelectric element can be increased due to the heat insulation effect. In addition, the resistance when the cantilever is vibrated can be reduced. As a result, the power consumption of the pyroelectric element can be reduced.

[0026] (19) A pyroelectric sensor system according to one aspect of the present disclosure comprises a plurality of pyroelectric sensors described in any one of (1) to (18) arranged in an array, a control unit for controlling a drive unit included in each of the plurality of pyroelectric sensors, and a sensor signal processing unit for processing an electrical signal output by each of the plurality of pyroelectric elements. According to this embodiment, by arranging pyroelectric sensors in an array, it is possible to obtain a map of the structure and temperature inside the ear, thereby enabling pinpoint measurement of the eardrum temperature.

[0027] (20) A method for manufacturing a pyroelectric sensor according to one aspect of the present disclosure, comprising the steps of: providing a first lower electrode and a second lower electrode spaced apart on one main surface of a cantilever; forming a piezoelectric material and a pyroelectric material on the first lower electrode and the second lower electrode, respectively, provided on the main surface of the cantilever; and providing a first upper electrode and a second upper electrode on the piezoelectric material and the pyroelectric material, respectively, wherein the piezoelectric material and the pyroelectric material are made of the same material. According to this embodiment, compared to the case where an infrared-transmitting window is partially opened in the outer casing and the opening is aligned with the cantilever, the cantilever and the opening in the outer casing can be positioned to correspond to each individual cantilever, thereby improving yield.

[0028] (21) In the method for manufacturing a pyroelectric sensor according to the embodiment of (20) above, the method may include the steps of installing a cantilever inside the outer casing and partially opening an infrared light transmission window in the outer casing based on the position of the cantilever. According to this embodiment, compared to the case where the outer casing and the substrate with the cantilever are aligned, the openings corresponding to each individual cantilever can be positioned, thereby simplifying the process and improving the yield. [Effects of the Invention]

[0029] According to this disclosure, a pyroelectric sensor capable of detecting infrared light emitted from an object being measured. and Pyroelectric sensor system Mu We can provide it. [Brief explanation of the drawing]

[0030] [Figure 1] This is a side view showing the pyroelectric sensor according to this embodiment. [Figure 2] This is a plan view showing the pyroelectric sensor according to this embodiment. [Figure 3A] This diagram illustrates the operation of the pyroelectric sensor according to this embodiment. [Figure 3B] This diagram illustrates the operation of the pyroelectric sensor according to this embodiment. [Figure 3C] This diagram illustrates the operation of the pyroelectric sensor according to this embodiment. [Figure 3D] This diagram illustrates the operation of the pyroelectric sensor according to this embodiment. [Figure 4] This is a flowchart illustrating the manufacturing method of the pyroelectric sensor according to this embodiment. [Figure 5A]This is a diagram illustrating the manufacturing method of the pyroelectric sensor according to this embodiment. [Figure 5B] This is a diagram illustrating the manufacturing method of the pyroelectric sensor according to this embodiment. [Figure 5C] This is a diagram illustrating the manufacturing method of the pyroelectric sensor according to this embodiment. [Figure 5D] This is a diagram illustrating the manufacturing method of the pyroelectric sensor according to this embodiment. [Figure 5E] This is a diagram illustrating the manufacturing method of the pyroelectric sensor according to this embodiment. [Figure 5F] This is a diagram illustrating the manufacturing method of the pyroelectric sensor according to this embodiment. [Figure 6] This figure shows an example of how to use the pyroelectric sensor according to this embodiment. [Figure 7] This is a side view showing an example of a pyroelectric sensor according to a modified example of the embodiment 1. [Figure 8] This figure shows an example of using a pyroelectric sensor according to a modified example of the embodiment 1. [Figure 9] This is a plan view showing a pyroelectric sensor according to a modified example 2 of the embodiment. [Figure 10] This is a plan view showing a pyroelectric sensor according to a modified example 2 of the embodiment. [Figure 11] This is a plan view showing a pyroelectric sensor according to a modified example 2 of the embodiment. [Figure 12] This figure shows an example of a pyroelectric sensor system according to a modified example of the embodiment 3. [Figure 13] This is a side view showing an example of a pyroelectric sensor according to modification 4 of this embodiment. [Figure 14] This is a plan view showing a pyroelectric sensor according to a modified example 4 of this embodiment. [Figure 15A] This is a diagram illustrating the operation of a pyroelectric sensor according to a modified example 4 of this embodiment. [Figure 15B] This is a diagram illustrating the operation of a pyroelectric sensor according to a modified example 4 of this embodiment. [Figure 15C] This is a diagram illustrating the operation of a pyroelectric sensor according to a modified example 4 of this embodiment. [Figure 15D] This is a diagram illustrating the operation of a pyroelectric sensor according to a modified example 4 of this embodiment. [Figure 16A] This is a diagram illustrating the operation of a pyroelectric sensor according to a modified example 4 of this embodiment. [Figure 16B] This is a diagram illustrating the operation of a pyroelectric sensor according to a modified example 4 of this embodiment. [Figure 16C] This is a diagram illustrating the operation of a pyroelectric sensor according to a modified example 4 of this embodiment. [Figure 16D] This is a diagram illustrating the operation of a pyroelectric sensor according to a modified example 4 of this embodiment. [Figure 17] This is a side view showing another example of a pyroelectric sensor according to modification 4 of this embodiment. [Figure 18A] This is a diagram illustrating the operation of a pyroelectric sensor according to a modified example 4 of this embodiment. [Figure 18B] This is a diagram illustrating the operation of a pyroelectric sensor according to a modified example 4 of this embodiment. [Figure 19] This figure shows an example of the change in the effective area of ​​the pyroelectric sensor according to Modification 4 of this embodiment. [Figure 20] This is a side view showing an example of a pyroelectric sensor according to modification 5 of this embodiment. [Figure 21] This is a plan view showing a pyroelectric sensor according to a modified example 5 of this embodiment. [Figure 22] This is a side view showing an example of a pyroelectric sensor according to modification 6 of this embodiment. [Figure 23] This is a plan view showing a pyroelectric sensor according to a modified example 6 of this embodiment. [Figure 24] This is a side view showing an example of a pyroelectric sensor according to modification 7 of this embodiment. [Figure 25] This is a plan view showing a pyroelectric sensor according to a modified example 7 of this embodiment. [Figure 26] This flowchart shows an example of a method for manufacturing a pyroelectric sensor according to modification 8 of this embodiment. [Figure 27A] This figure illustrates a method for manufacturing a pyroelectric sensor according to a modified example 8 of this embodiment. [Figure 27B] This figure illustrates a method for manufacturing a pyroelectric sensor according to a modified example 8 of this embodiment. [Figure 27C] This figure illustrates a method for manufacturing a pyroelectric sensor according to a modified example 8 of this embodiment. [Figure 27D] This figure illustrates a method for manufacturing a pyroelectric sensor according to a modified example 8 of this embodiment. [Figure 28] This figure illustrates an example of a method for manufacturing a pyroelectric sensor according to modification 8 of this embodiment. [Figure 29A] This figure illustrates an example of a method for manufacturing a pyroelectric sensor according to modification 8 of this embodiment. [Figure 29B] This is a diagram illustrating an example of a pyroelectric sensor manufacturing method. [Modes for carrying out the invention]

[0031] Next, the pyroelectric sensor, pyroelectric sensor system, and method for manufacturing the pyroelectric sensor according to this embodiment will be described with reference to the drawings. The embodiments described below are merely examples, and the embodiments to which this disclosure applies are not limited to the embodiments described below. The embodiments described below are preferred examples of the Disclosure and are subject to various technically preferred limitations; however, the scope of the Disclosure is not limited to these embodiments unless otherwise stated in the following description.

[0032] [Embodiment] [Pyroelectric sensor] Figure 1 is a side view showing the pyroelectric sensor according to this embodiment. The pyroelectric sensor 1 according to this embodiment measures the temperature of an object (object to be measured) in a non-contact manner. The pyroelectric sensor 1 comprises a cantilever 10, a pyroelectric element 18, a drive unit 19, a support member 17, and a control unit CU.

[0033] The cantilever 10 is a structure with one end fixed and the other end free. The cantilever 10 is installed with its fixed end supported by a support member 17. An example of the cantilever 10 is made up of a resin material. An example of the resin material is polyimide. An example of the cantilever 10 is plate-shaped, or a rectangular parallelepiped. The direction from the fixed end to the free end is defined as the X-axis, the vertically upward direction as the Z-axis, and the direction perpendicular to the X and Z axes as the Y-axis. The direction of the arrows in the figure is the positive direction, and the opposite direction is the negative direction. We will continue the explanation using the example of a thickness of 20 μm in the Z direction of the cantilever 10.

[0034] A pyroelectric element 18 and a drive unit 19 are formed on one main surface of the cantilever 10. Specifically, in the cantilever 10, the pyroelectric element 18 is formed on the free end side from the center in the X-axis direction, and the drive unit 19 is formed on the fixed end side from the center in the X-axis direction. The pyroelectric element 18 detects infrared light emitted from the object being measured. An example of the pyroelectric element 18 is formed in the positive Z-axis direction relative to the cantilever 10. An example of the object being measured is the eardrum. The pyroelectric element 18 is composed of a lower electrode 11, a pyroelectric body 12, and an upper electrode 13. The lower electrode 11 is formed on one main surface of the cantilever 10, the pyroelectric body 12 is formed on the lower electrode 11, and the upper electrode 13 is formed on the pyroelectric body 12. An example of the lower electrode 11 is constructed containing platinum. We will continue the explanation with an example of the lower electrode 11 having a thickness of 100 nm in the Z direction.

[0035] One example of the material for the pyroelectric body 12 is polyvinylidene difluoride (PVDF). We will continue the explanation using the case where the thickness of the pyroelectric body 12 in the Z direction is 1 μm. An example of the upper electrode 13 is made up of gold. We will continue the explanation using the case where the thickness of the upper electrode 13 in the Z direction is 100 nm.

[0036] The drive unit 19 vibrates the cantilever 10. An example of the drive unit 19 is formed in the positive Z-axis direction relative to the cantilever 10. The vibration of the cantilever 10 modulates the infrared light incident on the pyroelectric element 18. The drive unit 19 is composed of a lower electrode 14, a piezoelectric element 15, and an upper electrode 16. The lower electrode 14 is formed on one main surface of the cantilever 10, the piezoelectric element 15 is formed on the lower electrode 14, and the upper electrode 16 is formed on the piezoelectric element 15. An example of the lower electrode 14 is made up of platinum. We will continue the explanation with an example of the lower electrode 14 having a thickness of 100 nm in the Z direction. An example of the piezoelectric material 15 is composed of polyvinylidene fluoride. We will continue the explanation with an example of the piezoelectric material 15 having a thickness of 1 μm in the Z direction.

[0037] An example of the upper electrode 16 is constructed containing gold. We will continue the explanation using the case where the thickness of the upper electrode 16 in the Z direction is 100 nm. The control unit CU is connected to the upper electrode 16 via wiring W01 and W06, to the lower electrode 14 via wiring W02 and W05, to the upper electrode 13 via wiring W03 and W08, and to the lower electrode 11 via wiring W04 and W07. The control unit CU drives the drive unit 19 by applying a voltage between the upper electrode 16 and the lower electrode 14. The control unit CU detects the charge generated in the pyroelectric element 18 by driving the drive unit 19 via the upper electrode 13 and the lower electrode 11. The control unit CU derives a voltage value based on the charge detection result. The control unit CU outputs the derived voltage value. The voltage value output by the control unit CU may be recorded by another device. The control unit (CU) is implemented, for example, by a hardware processor such as a CPU (Central Processing Unit) executing a computer program (software) stored in a memory unit (not shown). Furthermore, some or all of these functional units may be implemented by hardware (including circuitry) such as LSIs (Large Scale Integrations), ASICs (Application Specific Integrated Circuits), FPGAs (Field-Programmable Gate Arrays), and GPUs (Graphics Processing Units), or by the cooperation of software and hardware. The computer program may be pre-stored in a storage device such as an HDD or flash memory, or it may be stored on a removable storage medium such as a DVD or CD-ROM and installed when the storage medium is inserted into a drive device.

[0038] Figure 2 is a plan view showing the pyroelectric sensor according to this embodiment. Figure 2 is a view of the pyroelectric sensor 1 from the positive Z-axis direction in Figure 1. In the example shown in Figure 2, the cantilever 10 has a fixed end FE at one end. A drive unit 19 is provided at the fixed end. We will continue the explanation using the example of a cantilever 10 with a length of 100 μm in the X-axis direction. We will continue the explanation using the example of a cantilever 10 with a length of 150 μm in the X-axis direction including the support member 17. We will continue the explanation using the example of a cantilever 10 with a length of 100 μm in the Y-axis direction. The same applies below.

[0039] (Operation of the pyroelectric sensor) Figures 3A to 3D are diagrams illustrating the operation of the pyroelectric sensor according to this embodiment. Figures 3A and 3B show the case where the free end of the cantilever 10 moves in the positive direction of the Z axis, while Figures 3C and 3D show the case where the free end of the cantilever 10 moves in the negative direction of the Z axis. The case where the free end of the cantilever 10 moves in the positive Z-axis direction will be described. In this case, a positive voltage is applied to the upper electrode 16 with the lower electrode 14 as the reference point by wiring W01 and W02 between the lower electrode 14 and the upper electrode 16. As a result of the application of a positive voltage to the upper electrode 16 with the lower electrode 14 as the reference point between the lower electrode 14 and the upper electrode 16, the piezoelectric element 15 expands in the polarization direction, as shown in Figure 3A. As the piezoelectric element 15 expands in the polarization direction, a compressive force is generated in the planar direction of the piezoelectric element 15 (the plane represented by the X-axis and Y-axis). As a result of the compressive force generated in the planar direction of the piezoelectric element 15, the free end of the cantilever 10 moves in the positive Z-axis direction, as shown in Figure 3B.

[0040] The case where the free end of the cantilever 10 moves in the negative direction of the Z axis will be described. In this case, a negative voltage is applied to the upper electrode 16 with the lower electrode 14 as the reference point by wiring W01 and W02 between the lower electrode 14 and the upper electrode 16. By applying a negative voltage to the upper electrode 16 with the lower electrode 14 as the reference point between the lower electrode 14 and the upper electrode 16, the piezoelectric element 15 is compressed in the polarization direction, as shown in Figure 3C. As the piezoelectric element 15 is compressed in the polarization direction, an extension force is generated in the planar direction of the piezoelectric element 15 (the plane represented by the X axis and the Y axis). As an extension force is generated in the planar direction of the piezoelectric element 15, the free end of the cantilever 10 moves in the negative direction of the Z axis, as shown in Figure 3D. As the free end of the cantilever 10 moves between the positive and negative directions of the Z-axis, the infrared light incident on the pyroelectric element 18 is modulated. This modulation of the infrared light incident on the pyroelectric element 18 generates an electric charge in the pyroelectric element 18. The control unit CU detects the charge generated in the pyroelectric element 18 using wiring W08 connected to the upper electrode 13 and wiring W09 connected to the lower electrode 11. Based on the charge detection result, the control unit CU derives a voltage value.

[0041] (Manufacturing method for pyroelectric sensors) Figure 4 is a flowchart illustrating the manufacturing method of the pyroelectric sensor according to this embodiment. Figures 5A to 5F are diagrams illustrating the manufacturing method of the pyroelectric sensor according to this embodiment. The manufacturing method of the pyroelectric sensor 1 will be explained with reference to Figures 4 and 5A to 5F. (Step S1) A resin material 10M constituting the cantilever 10 is deposited on one main surface of the substrate SUB (Figure 5A). An example of the resin material 10M is polyimide. Specifically, polyimide is deposited on one main surface of the substrate SUB using a film deposition apparatus. (Step S2) Lower electrodes (11, 14) are formed on the resin material 10M (Figure 5B). One example of the material for the lower electrodes (11, 14) is platinum. Specifically, platinum (11M, 14M) is deposited on the polyimide film using a film deposition apparatus.

[0042] (Step S3) A piezoelectric element 15 and a pyroelectric element 12 are formed on platinum (11M, 14M) (Figure 5C). The piezoelectric material 15M and the pyroelectric material 12M are deposited on the platinum (11M, 14M) film. An example of the piezoelectric material 15M and the pyroelectric material 12M is PVDF. Specifically, PVDF is deposited on the platinum film using a film deposition apparatus. By using the same material for the piezoelectric material 15M and the pyroelectric material 12M, the piezoelectric element 15 and the pyroelectric material 12 can be formed in the same process. (Step S4) Upper electrodes (13, 16) are formed on the piezoelectric material 15M and the pyroelectric material 12M (Figure 5D). An example of the upper electrodes (13, 16) is gold. Specifically, gold (13M, 16M) is deposited on the PVDF film using a film deposition apparatus. After the gold (13M, 16M) is deposited, the upper electrodes (13, 16), piezoelectric body 15 and pyroelectric body 12, and lower electrodes (11, 14) are formed by etching, thereby forming the pyroelectric element 18 and the drive unit 19.

[0043] (Step S5) The cantilever 10 is formed by molding the resin material 10M (Figure 5E). By constructing the cantilever 10 from a resin material, the cantilever 10 can be made flexible and lightweight. Because the cantilever 10 is flexible and lightweight, it can be driven easily and is less prone to breakage. (Step S6) The substrate SUB is detached from the cantilever 10 (Figure 5F). Subsequently, the cantilever 10 is installed on the support member 17. The upper electrode 16 and the control unit CU are connected by wiring W01 and wiring W06. The lower electrode 14 and the control unit CU are connected by wiring W02 and wiring W05. The upper electrode 13 and the control unit CU are connected by wiring W03 and wiring W08. The lower electrode 11 and the control unit CU are connected by wiring W04 and wiring W07. This completes the manufacturing of the pyroelectric sensor 1.

[0044] This section describes an example of how to use the pyroelectric sensor 1. In this example, the pyroelectric sensor 1 is used by being housed in an outer casing. Figure 6 shows an example of the use of the pyroelectric sensor according to this embodiment. As shown in Figure 6, the pyroelectric sensor 1 may be housed in an outer casing 20. The outer casing 20 is configured to surround the pyroelectric sensor 1. An example of the outer casing 20 is a hexahedron. The outer casing 20 is made of a material such as Si or Ge that has high transmittance of infrared wavelengths (around 10 μm) near body temperature. We will continue our explanation using the example of a length of the outer casing 20 in the X-axis direction of 200 μm. We will also continue our explanation using the example of a length of the outer casing 20 in the Z-axis direction of 500 μm.

[0045] At least one surface of the outer casing 20 is provided with an infrared-transmitting window 20W to allow infrared rays to enter the pyroelectric element 18. A light-shielding portion 22 is formed on the portion of that surface other than the infrared-transmitting window 20W. The formation of the light-shielding portion 22 reduces the temperature rise inside the outer casing 20. Furthermore, the inside of the outer casing 20 is in a vacuum atmosphere. Here, a vacuum atmosphere means that the pressure is lower than atmospheric pressure. By configuring it in this way, the sensitivity of the pyroelectric element 18 can be increased due to the heat insulation effect compared to when the inside of the outer casing 20 is not in a vacuum atmosphere. In addition, the resistance when the cantilever 10 is vibrated can be reduced. As a result, the power consumption of the pyroelectric element 18 can be reduced.

[0046] In the embodiments described above, a case in which the pyroelectric body 12 is composed of PVDF was explained as an example of a material, but it is not limited to this example. For example, the pyroelectric body 12 may be composed of lead zirconate titanate (PZT), barium titanate (BaTiO3), or lithium tantalate (LiTaO3). In the embodiment described above, the pyroelectric element 18 was described as being composed of a lower electrode 11, a pyroelectric body 12, and an upper electrode 13, but it is not limited to this example. For example, the pyroelectric element 18 may be composed of a heat-absorbing film in addition to the lower electrode 11, the pyroelectric body 12, and the upper electrode 13. For example, the heat-absorbing film is formed on the upper electrode 13. By configuring it in this way, the sensitivity of the pyroelectric element 18 can be improved. Since the pyroelectric element 18 generates an electric charge due to a temperature difference, it is desirable to convert the energy of infrared rays into heat as efficiently as possible and raise the temperature of the pyroelectric element 18 to create a temperature difference with other parts. The heat-absorbing film allows the pyroelectric element 18 to absorb infrared rays as heat with almost 100% efficiency. Accordingly, an electric charge is generated as the temperature of the pyroelectric body 12 rises. For these reasons, it is desirable to promote a temperature rise in the pyroelectric element 18. In the embodiments described above, the case in which the cantilever 10 is made of polyimide was explained, but the invention is not limited to this example. For example, the cantilever 10 may be made of acrylic. In the embodiments described above, the case in which the drive unit 19 is provided at the fixed end was explained, but the invention is not limited to this example. For example, it may be provided at a position other than the fixed end, such as the free end side, as long as it is a position in which the cantilever 10 can vibrate.

[0047] The pyroelectric sensor 1 according to this embodiment comprises a cantilever 10 having one end fixed and the other end free, a pyroelectric element 18 formed on one main surface of the cantilever 10 for detecting infrared light (infrared rays) emitted from an object to be measured, and a drive unit 19 for vibrating the cantilever 10. When the cantilever 10 vibrates, the infrared light incident on the pyroelectric element 18 is modulated. By configuring it in this way, a pyroelectric element having a pyroelectric effect can be placed on the cantilever, and by vibrating the cantilever, an effect similar to chopping can be achieved. As a result, the infrared light incident on the pyroelectric element 18 can be modulated. The pyroelectric element 18 can generate a charge corresponding to the temperature when irradiated with modulated infrared light. Therefore, a voltage can be obtained based on the generated charge.

[0048] This enables the integration of the pyroelectric element 18 and the actuator. Because the pyroelectric element 18 itself vibrates, a chopper structure outside the pyroelectric element 18 is unnecessary, allowing for miniaturization of the pyroelectric sensor 1. Due to the pyroelectric effect of the pyroelectric element 18, the eardrum temperature can be measured with sensitivity equivalent to or better than when a thermopile is deeply inserted into the ear, even when detected from the ear entrance. Since the eardrum temperature can be detected from the ear entrance, the pyroelectric sensor 1 can be positioned at a location similar to that of an earphone. Therefore, discomfort and a feeling of blockage caused by wearing the pyroelectric sensor 1 can be reduced.

[0049] Furthermore, the pyroelectric element 18 is composed of polyvinylidene fluoride. By configuring it in this way, the pyroelectric element 18 can be made lighter and more flexible by including a resin material such as polyvinylidene fluoride. Therefore, compared to when the pyroelectric element 18 is composed of a material other than resin, the mechanical durability against cantilever drive can be improved. Furthermore, the drive unit 19 includes a piezoelectric element 15 that vibrates the cantilever 10. With this configuration, the cantilever 10 can be vibrated using the inverse piezoelectric effect. Furthermore, the piezoelectric element 15 constituting the drive unit 19 includes the material that constitutes the pyroelectric element 18. By configuring it in this way, the piezoelectric element 15 constituting the drive unit 19 and the pyroelectric element 18 can be made from the same material and thus can be manufactured using the same process. For this reason, the number of manufacturing steps can be reduced compared to manufacturing the piezoelectric element 15 constituting the drive unit 19 and the pyroelectric element 18 constituting the pyroelectric element 18 from different materials. Furthermore, the device includes an outer casing 20 with an infrared light transmission window. The cantilever 10, pyroelectric element 18, and drive unit 19 are installed inside the outer casing 20, and the inside of the outer casing 20 is a vacuum. By configuring it in this way, the inside of the outer casing 20 housing the cantilever 10, pyroelectric element 18, and drive unit 19 can be a vacuum, which increases the sensitivity of the pyroelectric element 18 due to the heat insulation effect compared to a non-vacuum environment. In addition, the resistance when the cantilever 10 is vibrated can be reduced. As a result, the power consumption of the pyroelectric element 18 can be reduced.

[0050] (Modification of Embodiment 1) [Pyroelectric sensor] Figure 7 is a side view showing an example of a pyroelectric sensor according to Modification 1 of this embodiment. The pyroelectric sensor 1a according to Modification 1 of this embodiment measures the temperature of an object non-contactually. The pyroelectric sensor 1a comprises a cantilever 10, a pyroelectric element 18, a drive unit 19, and a support member 17. In Figure 7, the control unit CU is omitted. Pyroelectric sensor 1a differs from pyroelectric sensor 1 in that, when viewed from the negative direction of the Y-axis, the cantilever 10 is installed such that, in a non-vibrating state, it has a predetermined angle θ with respect to the plane consisting of the X-axis and the Y-axis. In other words, the cantilever 10 is installed such that, in a non-vibrating state, the direction from the fixed end to the free end and the direction of incidence of infrared light have an angle θ. An example of an angle θ is 30 degrees or more and less than 60 degrees, more preferably 40 degrees or more and less than 50 degrees. As an example, we will continue the explanation with an angle θ of 45 degrees.

[0051] When the angle θ is set to 45 degrees, the pyroelectric element 18 can detect infrared light emitted from the object being measured by vibrating (oscillating) the cantilever 10 between -45 degrees and +45 degrees, with 45 degrees as the center. On the other hand, in the embodiment described above, the pyroelectric sensor 1 vibrates the cantilever 10 within a predetermined angular range between 0 degrees and +90 degrees in order to have the pyroelectric element 18 detect infrared light emitted from the object being measured. In this way, by configuring the pyroelectric sensor 1a so that the direction from the fixed end to the free end and the incident direction of the infrared light are 45 degrees apart when the cantilever 10 is not vibrating, the angle at which the cantilever 10 is vibrated in each direction can be reduced, and thus power consumption can be reduced. The operation of the pyroelectric sensor 1a is the same as described with reference to Figure 3, so its explanation is omitted. The manufacturing method of the pyroelectric sensor 1a is the same as described with reference to Figures 4 and 5A to 5F, so its explanation is omitted.

[0052] In the modified embodiment 1, the pyroelectric sensor 1a may be housed in the outer casing 20. Figure 8 shows an example of use of a pyroelectric sensor according to Modification 1 of this embodiment. As shown in Figure 7, the pyroelectric sensor 1a is housed in an outer casing 20. The outer casing 20 is configured to surround the pyroelectric sensor 1a. An example of the outer casing 20 is a hexahedron. At least one face of the outer casing 20 is provided with an infrared-transmitting window 20W to allow infrared light to enter the pyroelectric element 18. A light-shielding portion 22 is formed on the part of that face other than the infrared-transmitting window 20W. Furthermore, the inside of the outer casing 20 is in a vacuum atmosphere.

[0053] According to the pyroelectric sensor 1a of the modified embodiment 1, in the pyroelectric sensor 1 of the embodiment described above, the cantilever 10 is installed at a position where the angle between the direction from the fixed end to the free end and the incident direction of infrared light is 30 degrees or more and less than 60 degrees, when the cantilever 10 is not vibrating. By configuring it in this way, the pyroelectric sensor 1a can reduce the angle at which the cantilever 10 vibrates, and thus reduce power consumption. Specifically, if the angle between the direction from the fixed end to the free end and the incident direction of infrared light is 45 degrees, the vibration of the cantilever 10 can be completely driven on and off within ±45 degrees. Also, if the angle between the direction from the fixed end to the free end and the incident direction of infrared light is 45 degrees, the effective area can be greatly changed with a small change in angle. Therefore, 45 degrees is effective when it is not possible to vibrate the cantilever 10 completely within the range of 0 to 90 degrees, as it allows for a large change in area with a small change in angle. Here, the method of initially setting it to 45 degrees can be controlled by changing the thickness of the upper electrode 16 and controlling it with film stress. Furthermore, by applying a constant voltage to the upper electrode 16 in advance, the initial temperature can be set to 45 degrees.

[0054] (Modified embodiment 2) [Pyroelectric sensor] The pyroelectric sensor 1b according to modification 2 of this embodiment measures the temperature of an object non-contactually. The pyroelectric sensor 1b comprises a cantilever 10, a pyroelectric element 18, a drive unit 19b, and a support member 17. Pyroelectric sensor 1b differs from pyroelectric sensor 1 in that it has multiple drive units at one end of the cantilever 10. Here, as an example, we will continue the explanation with the case where two drive units are provided at one end of the cantilever 10.

[0055] Figure 9 is a plan view showing a pyroelectric sensor according to a modified example 2 of this embodiment. Figure 9 is a view of the pyroelectric sensor 1b from the positive Z-axis direction in Figure 1. In the example shown in Figure 9, the cantilever 10 has two fixed ends (FE01, FE02) at one end. Of the two fixed ends, a drive unit 19b-1 is provided at fixed end FE02, and a drive unit 19b-2 is provided at fixed end FE02. Each of the drive units 19b-1 and 19b-2 vibrates the cantilever 10. The vibration of the cantilever 10 modulates the infrared light incident on the pyroelectric element 18. The drive units 19b-1 and 19b-2 may also vibrate the cantilever 10 independently. The drive unit 19b-1 is composed of a lower electrode 14b-1, a piezoelectric element 15b-1, and an upper electrode 16b-1. On one main surface of the cantilever 10, the lower electrode 14b-1 is formed in a predetermined region including the fixed end FE01, in one direction from the center in the short-side direction (Y-axis direction), the piezoelectric element 15b-1 is formed on the lower electrode 14b-1, and the upper electrode 16b-1 is formed on the piezoelectric element 15b-1. The drive unit 19b-2 is composed of a lower electrode 14b-2, a piezoelectric element 15b-2, and an upper electrode 16b-2. On one main surface of the cantilever 10, the lower electrode 14b-2 is formed in a predetermined region extending from the center in the short-side direction to the other direction and including the fixed end FE02, the piezoelectric element 15b-2 is formed on the lower electrode 14b-2, and the upper electrode 16b-2 is formed on the piezoelectric element 15b-2.

[0056] An example of the lower electrodes 14b-1 and 14b-2 is that they are made containing platinum. We will continue the explanation using the case where the thickness in the Z direction of the lower electrodes 14b-1 and 14b-2 is 100 nm. An example of piezoelectric materials 15b-1 and 15b-2 is composed of polyvinylidene fluoride. We will continue the explanation with an example of a thickness of 1 μm in the Z direction for piezoelectric materials 15b-1 and 15b-2. An example of upper electrodes 16b-1 and 16b-2 is constructed containing gold. We will continue the explanation using the case where the thickness in the Z direction of upper electrodes 16b-1 and 16b-2 is 100 nm. The control unit CU is connected to the upper electrode 16b-1, the lower electrode 14b-1, the upper electrode 16b-2, the lower electrode 14b-2, the upper electrode 13, and the lower electrode 11. The control unit CU detects the charge generated on the pyroelectric element 18 by driving the drive unit 19b-1. The control unit CU detects the charge generated on the pyroelectric element 18 by driving the drive unit 19b-2. The control unit CU derives a voltage value based on the charge detection result. The control unit CU outputs the derived voltage value. The voltage value output by the control unit CU may be recorded by another device. By configuring it in this way, the cantilever 10 can be deformed uniformly compared to the case where one end of the cantilever 10 has a fixed end, thus reducing the likelihood of the cantilever 10 becoming twisted or bent.

[0057] In the modified example 2 of the embodiment described above, the case where the lengths of the cantilever 10 in the Y-axis direction are equal was explained, but the example is not limited to this. For example, in the cantilever 10, the length in the Y-axis direction of the free end and the length in the Y-axis direction of the fixed end may be different. As an example, the case in which the length in the Y-axis direction of the free end is longer than the length in the Y-axis direction of the fixed end will be explained. Figure 10 is a plan view showing a pyroelectric sensor according to a modified example 2 of this embodiment. Figure 10 is a view of the pyroelectric sensor 1b2 from the positive Z-axis direction in Figure 1. In the example shown in Figure 10, the length of the free end in the Y-axis direction is made longer than the length of the fixed end in the Y-axis direction in Figure 9. The cantilever 10b2 is fixed to the support member 17 at one point and has two fixed ends (FE01, FE02) at one end. Of the two fixed ends, a drive unit 19b2-1 is provided at fixed end FE01 and a drive unit 19b2-2 is provided at fixed end FE02. Each of the drive units 19b2-1 and 19b2-2 vibrates the cantilever 10b2. The vibration of the cantilever 10b2 modulates the infrared light incident on the pyroelectric element 18. Each of the drive units 19b2-1 and 19b2-2 may vibrate the cantilever 10b2 independently. Each of the drive units 19b2-1 and 19b2-2 may vibrate the cantilever 10b2 independently.

[0058] The drive unit 19b2-1 is composed of a lower electrode 14b2-1, a piezoelectric element 15b2-1, and an upper electrode 16b2-1. On one main surface of the cantilever 10b2, the lower electrode 14b2-1 is formed in a predetermined region including the fixed end FE01, in one direction from the center in the short side direction. The piezoelectric element 15b2-1 is formed on the lower electrode 14b2-1, and the upper electrode 16b2-1 is formed on the piezoelectric element 15b2-1. The Y-axis length of the lower electrode 14b2-1, the piezoelectric element 15b2-1, and the upper electrode 16b2-1 is shorter than the Y-axis length of the lower electrode 14b-1, the piezoelectric element 15b-1, and the upper electrode 16b-1 shown in Figure 9. The drive unit 19b2-2 is composed of a lower electrode 14b2-2, a piezoelectric element 15b2-2, and an upper electrode 16b2-2. On one main surface of the cantilever 10b2, the lower electrode 14b2-2 is formed in a predetermined region extending from the center in the short-side direction to the other direction and including the fixed end FE02. The piezoelectric element 15b2-2 is formed on the lower electrode 14b2-2, and the upper electrode 16b2-2 is formed on the piezoelectric element 15b2-2. The Y-axis length of the lower electrode 14b2-2, the piezoelectric element 15b2-2, and the upper electrode 16b2-2 is shorter than the Y-axis length of the lower electrode 14b-2, the piezoelectric element 15b-2, and the upper electrode 16b-2 shown in Figure 9.

[0059] An example of the lower electrodes 14b2-1 and 14b2-2 is that they are made containing platinum. We will continue the explanation using the case where the thickness in the Z direction of the lower electrodes 14b2-1 and 14b2-2 is 100 nm. An example of piezoelectric materials 15b2-1 and 15b2-2 is composed of polyvinylidene fluoride. We will continue the explanation with an example of a thickness of 1 μm in the Z direction for piezoelectric materials 15b2-1 and 15b2-2. An example of upper electrodes 16b2-1 and 16b2-2 is constructed containing gold. We will continue the explanation using the case where the thickness in the Z direction of upper electrodes 16b2-1 and 16b2-2 is 100 nm. The control unit CU is connected to the upper electrode 16b2-1, the lower electrode 14b2-1, the upper electrode 16b2-2, the lower electrode 14b2-2, the upper electrode 13, and the lower electrode 11. The control unit CU detects the charge generated on the pyroelectric element 18 by driving the drive unit 19b2-1. The control unit CU detects the charge generated on the pyroelectric element 18 by driving the drive unit 19b2-2. The control unit CU derives a voltage value based on the charge detection result. The control unit CU outputs the derived voltage value. The voltage value output by the control unit CU may be recorded by another device. By configuring it in this way, the length of the fixed end in the Y-axis direction can be reduced. Compared to Figure 9, this reduces the portion that hinders vibration by constraining the cantilever 10, making it easier for the cantilever 10 to deform. As a result, the power consumption of the pyroelectric sensor 1b2 can be reduced.

[0060] Furthermore, for example, in the cantilever 10, the length in the Y-axis direction of the free end may be made different from the length in the Y-axis direction of the fixed end, and the cantilever may have multiple fixed ends. As an example, a case in which the length in the Y-axis direction of the free end is longer than the length in the Y-axis direction of the fixed end, and the cantilever has two fixed ends will be described. Figure 11 is a plan view showing a pyroelectric sensor according to a modified example 2 of this embodiment. Figure 11 is a view of the pyroelectric sensor 1b3 from the positive Z-axis direction in Figure 1. In the example shown in Figure 11, the length of the free end in the Y-axis direction is made longer than the length of the fixed end in the Y-axis direction in Figure 9. The cantilever 10b3 is fixed to the support member 17 at three points and has two fixed ends (FE01, FE02) at one end. Of the two fixed ends, a drive unit 19b3-1 is provided at fixed end FE01 and a drive unit 19b3-2 is provided at fixed end FE02. Each of the drive units 19b3-1 and 19b3-2 vibrates the cantilever 10b3. The vibration of the cantilever 10b3 modulates the infrared light incident on the pyroelectric element 18. The drive units 19b3-1 and 19b3-2 may also vibrate the cantilever 10b3 independently.

[0061] The drive unit 19b3-1 is composed of a lower electrode 14b3-1, a piezoelectric element 15b3-1, and an upper electrode 16b3-1. On one main surface of the cantilever 10b3, the lower electrode 14b3-1 is formed in a predetermined region including the fixed end FE01, in one direction from the center in the short side direction, the piezoelectric element 15b3-1 is formed on the lower electrode 14b3-1, and the upper electrode 16b3-1 is formed on the piezoelectric element 15b3-1. The Y-axis length of the lower electrode 14b3-1, the piezoelectric element 15b3-1, and the upper electrode 16b3-1 is shorter than the Y-axis length of the lower electrode 14b-1, the piezoelectric element 15b-1, and the upper electrode 16b-1 shown in Figure 9. The drive unit 19b3-2 is composed of a lower electrode 14b3-2, a piezoelectric element 15b3-2, and an upper electrode 16b3-2. On one main surface of the cantilever 10b3, the lower electrode 14b3-2 is formed in a predetermined region extending from the center in the short-side direction to the other direction and including the fixed end. The piezoelectric element 15b3-2 is formed on the lower electrode 14b3-2, and the upper electrode 16b3-2 is formed on the piezoelectric element 15b3-2. The Y-axis length of the lower electrode 14b3-2, the piezoelectric element 15b3-2, and the upper electrode 16b3-2 is shorter than the Y-axis length of the lower electrode 14b-2, the piezoelectric element 15b-2, and the upper electrode 16b-2 shown in Figure 9. The control unit CU is connected to the upper electrode 16b3-1, the lower electrode 14b3-1, the upper electrode 16b3-2, the lower electrode 14b3-2, the upper electrode 13, and the lower electrode 11. The control unit CU detects the charge generated on the pyroelectric element 18 by driving the drive unit 19b3-1. The control unit CU detects the charge generated on the pyroelectric element 18 by driving the drive unit 19b3-2. The control unit CU derives a voltage value based on the charge detection result. The control unit CU outputs the derived voltage value. The voltage value output by the control unit CU may be recorded by another device. By configuring it in this way, the length of the fixed end in the Y-axis direction can be reduced. Compared to Figure 9, this reduces the portion that hinders vibration by constraining the cantilever 10, making it easier to deform the cantilever 10. Furthermore, by fixing the fixed end of the cantilever 10 at multiple points, it can be deformed more uniformly than when the cantilever 10 is fixed at only one point.

[0062] According to the pyroelectric sensor (1b, 1b2, 1b3) of the modified example 2 of this embodiment, in the pyroelectric sensor of the embodiment described above, the cantilever (10, 10b2, 10b3) has a plurality of drive units (19b-1, 19b-2, 19b2-1, 19b2-2, 19b3-1, 19b3-2) at one end. By configuring it in this way, the cantilever (10, 10b2, 10b3) can be deformed uniformly, thereby reducing the likelihood of the cantilever (10, 10b2, 10b3) becoming twisted and bent. Therefore, the accuracy of controlling the posture of the cantilever (10, 10b2, 10b3) can be improved. Furthermore, each of the multiple drive units (19b-1, 19b-2, 19b2-1, 19b2-2, 19b3-1, 19b3-2) is controlled individually. This configuration improves the degree of control freedom, thereby further enhancing the accuracy of attitude control for the cantilevers (10, 10b2, 10b3). Furthermore, the cantilevers (10, 10b2, 10b3) have multiple fixed ends spaced apart from each other at one end, and each of the multiple fixed ends is provided with a drive unit. This configuration allows for more uniform deformation than when the cantilever 10 is fixed in one place. Since each of the multiple fixed ends (FE01, FE02) is provided with a drive unit (19b-1, 19b-2, 19b2-1, 19b2-2, 19b3-1, 19b3-2), the accuracy of controlling the attitude of the cantilevers (10, 10b2, 10b3) can be improved. Furthermore, one end has a longitudinal direction, and the fixed ends (FE01, FE02) are formed symmetrically along the longitudinal direction. With this configuration, the cantilever (10, 10b2, 10b3) can be uniformly deformed by the drive unit provided at the fixed end formed symmetrically along the longitudinal direction of one end of the cantilever 10, thereby improving the accuracy of controlling the attitude of the cantilever (10, 10b2, 10b3).

[0063] (Modification of Embodiment 3) [Pyroelectric Sensor System] Figure 12 shows an example of a pyroelectric sensor system according to a modified example 3 of the embodiment. A modified example of this embodiment, the pyroelectric sensor system 3, is composed of a plurality of the aforementioned pyroelectric sensors 1, 1a, 1b, 1b2, and 1b3. Here, as an example, we will continue the explanation in the case where the pyroelectric sensor system 3 is composed of a plurality of pyroelectric sensors 1. As shown in Figure 12, the pyroelectric sensor system 3 comprises a sensor array unit 30, a cantilever drive unit 31 connected to the sensor array unit 30, and a sensor signal processing unit 32. The pyroelectric sensor system 3 also comprises a temperature information output unit 33 connected to the sensor signal processing unit 32. The pyroelectric sensor system 3 also comprises a power supply 34 that supplies power to the sensor array unit 30, the cantilever drive unit 31, the sensor signal processing unit 32, and the temperature information output unit 33. The sensor array unit 30 is configured to include a plurality of pyroelectric sensors 1. In the example shown in Figure 12, the sensor array unit 30 is configured to include 25 pyroelectric sensors 1. Here, each of the plurality of pyroelectric sensors 1 may be housed in the outer casing 20. The cantilever drive unit 31 is connected to each of the multiple pyroelectric sensors 1 included in the sensor array unit 30. The cantilever drive unit 31 uses the power supply provided by the power supply 34 to drive the drive unit 19 included in each of the multiple pyroelectric sensors 1 to the control unit CU.

[0064] The sensor signal processing unit 32 is connected to each of the multiple pyroelectric sensors 1 included in the sensor array unit 30. The sensor signal processing unit 32 uses the power supply provided by the power supply 34 to acquire the voltage value output by the control unit CU included in each of the multiple pyroelectric sensors 1, and derives the temperature based on the acquired voltage value. The temperature information output unit 33 acquires temperature information corresponding to each of the multiple pyroelectric sensors 1 derived by the sensor signal processing unit 32. The temperature information output unit 33 outputs the acquired temperature information.

[0065] The cantilever drive unit 31, the sensor signal processing unit 32, and the temperature information output unit 33 are realized, for example, by a hardware processor such as a CPU executing a computer program (software) stored in a memory unit (not shown). Furthermore, some or all of these functional units may be realized by hardware (including circuitry) such as LSIs, ASICs, FPGAs, and GPUs, or by the cooperation of software and hardware. The computer program may be pre-stored in a storage device such as an HDD or flash memory, or it may be stored in a removable storage medium such as a DVD or CD-ROM and installed when the storage medium is inserted into a drive device. According to the pyroelectric sensor system 3 of the modified embodiment 3, a plurality of pyroelectric sensors 1 are arranged in an array, and the system includes a control unit as a cantilever drive unit 31 that controls the drive unit included in each of the plurality of pyroelectric sensors, and a sensor signal processing unit that processes the electrical signals output by each of the plurality of pyroelectric elements. With this configuration, the structure and temperature map of the inside of the ear can be obtained by arranging the pyroelectric sensors 1 in an array, so that the temperature of the eardrum can be measured with pinpoint accuracy.

[0066] (Modification of Embodiment 4) [Pyroelectric sensor] Figure 13 is a side view showing an example of a pyroelectric sensor according to Modification 4 of this embodiment. Figure 14 is a plan view showing a pyroelectric sensor according to Modification 4 of this embodiment. The pyroelectric sensor 1c according to the modified example 4 of this embodiment comprises a cantilever 10, a pyroelectric element 18, a drive unit 19, a shut-off member 40 to a shut-off member 43, a support member 17, and a control unit CU. The pyroelectric sensor 1c differs from the pyroelectric sensor 1 in that, in the Z-axis direction, shielding members 40 and 43 are formed on the side of the pyroelectric element 18 opposite to the cantilever 10. Shielding members 40 and 43 partially block infrared light emitted from the object being measured. An example of shielding members 40 and 43 is made of a heat insulating material, particularly a resin material, specifically silicone epoxy resin permanent resist (SU-8), etc.

[0067] Each of the blocking members 40 to 43 has a rectangular parallelepiped shape. Each of the blocking members 40 to 43 is formed such that its longitudinal direction is perpendicular to the direction from the fixed end to the free end of the cantilever 10. In Figure 14, the driving direction of the cantilever 10 is the Z-axis direction, and each of the blocking members 40 to 43 is formed such that its longitudinal direction is the Y-axis direction.

[0068] (Operation of the pyroelectric sensor) Figures 15A to 15D are diagrams illustrating the operation of a pyroelectric sensor according to Modification 4 of this embodiment. Figures 15A and 15B show the case where the free end of the cantilever 10 moves in the positive direction of the Z axis, while Figures 15C and 15D show the case where the free end of the cantilever 10 moves in the negative direction of the Z axis. The case where the free end of the cantilever 10 moves in the positive Z-axis direction will be described. In this case, a positive voltage is applied to the upper electrode 16 with the lower electrode 14 as the reference point by wiring W01 and W02 between the lower electrode 14 and the upper electrode 16. As a result of the application of a positive voltage to the upper electrode 16 with the lower electrode 14 as the reference point between the lower electrode 14 and the upper electrode 16, the piezoelectric element 15 expands in the polarization direction, as shown in Figure 15A. As the piezoelectric element 15 expands in the polarization direction, a compressive force is generated in the plane direction of the piezoelectric element 15 (the plane represented by the X-axis and Y-axis). As a result of the compressive force generated in the plane direction of the piezoelectric element 15, the free end of the cantilever 10 moves in the positive Z-axis direction, as shown in Figure 15B.

[0069] The case where the free end of the cantilever 10 moves in the negative direction of the Z axis will be described. In this case, a negative voltage is applied to the upper electrode 16 with the lower electrode 14 as the reference point by wiring W01 and W02 between the lower electrode 14 and the upper electrode 16. By applying a negative voltage to the upper electrode 16 with the lower electrode 14 as the reference point between the lower electrode 14 and the upper electrode 16, the piezoelectric element 15 is compressed in the polarization direction, as shown in Figure 15C. As the piezoelectric element 15 is compressed in the polarization direction, an extension force is generated in the plane direction of the piezoelectric element 15 (the plane represented by the X axis and the Y axis). As an extension force is generated in the plane direction of the piezoelectric element 15, the free end of the cantilever 10 moves in the negative direction of the Z axis, as shown in Figure 15D. As the free end of the cantilever 10 moves between the positive and negative directions of the Z-axis, the infrared light incident on the pyroelectric element 18 is modulated. This modulation of the infrared light incident on the pyroelectric element 18 generates an electric charge in the pyroelectric element 18. The control unit CU derives a voltage value based on the detection result of the electric charge. Because the shielding member 40 and shielding member 43 are formed on the cantilever 10, compared to the case where the shielding member 40 and shielding member 43 are not formed, a portion of the infrared radiation incident on the pyroelectric element 18 as the cantilever 10 moves is blocked by the shielding member 40 and shielding member 43, so the area of ​​the pyroelectric element 18 to which the infrared radiation is incident (hereinafter referred to as "effective area") can be greatly changed. The shielding member 40 and shielding member 43 block not only infrared radiation incident perpendicular to the plane of the cantilever 10 (the plane represented by the X and Y axes), but also infrared radiation incident from an oblique direction on the plane of the cantilever 10.

[0070] Figures 16A to 16D are diagrams illustrating the operation of a pyroelectric sensor according to Modification 4 of this embodiment. Figures 16A and 16B show the case where the interrupting member 43 is not formed on the pyroelectric element 18 from the interrupting member 40, while Figures 16C and 16D show the case where the interrupting member 43 is formed on the pyroelectric element 18 from the interrupting member 40. For the sake of explanation, the explanation will continue assuming that the length of the pyroelectric element 18 in the Y-axis direction is 1. The case where a circuit breaker 43 is not formed on the pyroelectric element 18 from the circuit breaker 40 will be explained. As shown in Figure 16A, when the pyroelectric element 18 is horizontal and not moving in the Z-axis direction, the effective area is represented by X. As shown in Figure 16B, when the pyroelectric element 18 is moving at an angle θ in the positive Z-axis direction due to driving, the effective area is represented by Xcosθ. Therefore, the rate of change of the effective area between when the pyroelectric element 18 is not moving in the Z-axis direction and when the pyroelectric element 18 is moving at an angle θ in the positive Z-axis direction is represented by Xcosθ / X. The case in which a blocking member 43 is formed on the pyroelectric element 18 from the blocking member 40 will be described. Here, as an example, the case in which the pyroelectric element 18 is not moving in the Z-axis direction and n (n is an integer n>0) blocking members are formed, each having a length of B in the X-axis direction, a length of 1 in the Y-axis direction, and a length of A in the Z-axis direction. As shown in Figure 16C, when the pyroelectric element 18 is horizontal and not moving in the Z-axis direction, the effective area is expressed as Xn × B. As shown in Figure 16D, when the pyroelectric element 18 is moving at an angle θ in the positive Z-axis direction due to driving, the effective area is expressed as Xcosθ-n(Asinθ+Bcosθ). Therefore, the rate of change of the effective area between when the pyroelectric element 18 is not moving in the Z-axis direction and when the pyroelectric element 18 is moving at an angle θ in the positive Z-axis direction is expressed as ((X-nB)cosθ-nAsinθ) / (X-nB).

[0071] Figure 17 is a side view showing another example of a pyroelectric sensor according to Modification 4 of this embodiment. The pyroelectric sensor 1c2 according to the modified example 4 of this embodiment comprises a cantilever 10, a pyroelectric element 18, a drive unit 19, a shut-off member 40a to a shut-off member 43a, a support member 17, and a control unit CU. The pyroelectric sensor 1c2 differs from the pyroelectric sensor 1 in that, in the Z-axis direction, shielding members 40a to 43a are formed on the surface of the pyroelectric element 18 opposite to the cantilever 10. Each of the shielding members 40a to 43a has an inverse taper shape, with the cross-sectional area widening from one main surface toward the infrared light incidence surface when the cantilever 10 is not moving in the Z-axis direction. The shielding members 40a to 43a partially block the infrared light emitted from the object being measured. An example of the shielding members 40a to 43a is made of a heat insulating material, particularly a resin material, specifically silicone epoxy resin permanent resist (SU-8), etc. Since Figure 14 can be used to show the plan view of the pyroelectric sensor 1c2 according to modification 4 of this embodiment, a detailed explanation is omitted here. Each of the blocking members 40a to 43a has the shape of a rectangular prism. Each of the blocking members 40a to 43a is formed such that its longitudinal direction is perpendicular to the direction from the fixed end to the free end of the cantilever 10. The driving direction of the cantilever 10 is the Z-axis direction, and each of the blocking members 40a to 43a is formed such that its longitudinal direction is the Y-axis direction.

[0072] (Operation of the pyroelectric sensor) Figures 18A and 18B are diagrams illustrating the operation of the pyroelectric sensor according to Modification 4 of this embodiment. For the sake of explanation, the explanation will continue assuming that the length of the pyroelectric element 18 in the Y-axis direction is 1. As an example, we will describe the case where the pyroelectric element 18 is horizontal and not moving in the Z-axis direction, and n (where n is an integer n>0) of the breaking members are formed such that in the X-axis direction, the length of the part in contact with the pyroelectric element 18 is B, the length of the part not in contact with the pyroelectric element 18 is C, the length in the Y-axis direction is 1, and the length in the Z-axis direction is A. As shown in Figure 18A, when the pyroelectric element 18 is horizontal and not moving in the Z-axis direction, the effective area is expressed as Xn × C. As shown in Figure 18B, when the pyroelectric element 18 is driven and moves by an angle θ in the positive Z-axis direction, the effective area is expressed as Xcosθ-n(Asinθ+Bcosθ). Therefore, the rate of change of the effective area between when the pyroelectric element 18 is not moving in the Z-axis direction and when the pyroelectric element 18 is moving by an angle θ in the positive Z-axis direction is expressed as ((X-nB)cosθ-nAsinθ) / (X-nB). This is the same as when the blocking member is not made in the reverse tapered shape. By making the blocking member have an inverse tapered shape, the angle of incident light can be limited, thereby improving sensitivity.

[0073] Figure 19 shows an example of the change in the effective area of ​​a pyroelectric sensor according to Modification 4 of this embodiment. Figure 19 shows the rate of change in the effective area between the case where the pyroelectric element 18 is horizontal and not moving in the Z-axis direction, and the case where the pyroelectric element 18 is moving in the Z-axis direction due to being driven, with and without a blocking member. According to Figure 19, in the absence of a blocking member, the rate of change of the effective area between the horizontal case where the pyroelectric element 18 is not moved in the Z-axis direction and the case where the pyroelectric element 18 is moved 45 degrees in the Z-axis direction by driving is 70.7%, and the rate of change of the effective area between the horizontal case where the pyroelectric element 18 is not moved in the Z-axis direction and the case where the pyroelectric element 18 is moved 30 degrees in the Z-axis direction by driving is 86.6%. When a blocking member is present, the rate of change of the effective area between the case where the pyroelectric element 18 is not moved in the Z-axis direction (horizontal) and the case where the pyroelectric element 18 is driven and moved 45 degrees in the Z-axis direction is 48.8%. The rate of change of the effective area between the case where the pyroelectric element 18 is not moved in the Z-axis direction (horizontal) and the case where the pyroelectric element 18 is driven and moved 30 degrees in the Z-axis direction is 71.1%. By forming a blocking member, the rate of change in effective area equivalent to that obtained when a pyroelectric element 18 without a blocking member is moved 45 degrees in the Z-axis direction by driving it can be obtained when a pyroelectric element 18 with a blocking member is moved 30 degrees in the Z-axis direction by driving it, compared to when a pyroelectric element 18 without a blocking member is moved 45 degrees in the Z-axis direction.

[0074] By constructing each of the blocking members 40 to 43 from a material (insulating material) with a lower thermal conductivity than the pyroelectric element 18, heat conduction from each of the blocking members 40 to 43 to the pyroelectric element 18 can be prevented. This reduces the thermal impact on the pyroelectric element 18, thereby improving accuracy. In the modified embodiment 4, a heat insulating material may be provided between each of the blocking members 40 and 43 and the pyroelectric element 18. This prevents heat conduction from each of the blocking members 40 and 43 to the pyroelectric element 18. As a result, accuracy is improved. In the modified embodiment 4, the pyroelectric sensor 1c may be housed in the aforementioned outer casing 20. In the modified example 4 of the above-described embodiment, a case was described in which four interrupting members, from interrupting member 40 to interrupting member 43, are formed on the pyroelectric element 18 as an example, but the example is not limited to this. For example, one to three interrupting members may be formed on the pyroelectric element 18, or five or more interrupting members may be formed on the pyroelectric element 18. The same applies to each of the interrupting members 40a to 43a. A film with a higher thermal conductivity than the insulating material may be formed on the insulating material.

[0075] According to the pyroelectric sensor 1c of this embodiment, modification 4, the pyroelectric element 18 is further provided with shielding members 40 to 43, which are formed on the surface opposite to the cantilever 10 and partially block infrared light emitted from the object being measured. By configuring it in this way, the pyroelectric element 18 can be further equipped with shielding members 40 to 43 on the side opposite to the cantilever 10, which partially block infrared light emitted from the object being measured. As the cantilever 10 vibrates, the effective area of ​​infrared light incident on the pyroelectric element 18 from the object being measured can be greatly changed, thereby improving the detection sensitivity of the pyroelectric element 18 to infrared light emitted from the object being measured. In the pyroelectric sensor 1c, the interruption members 40 and 43 are made of insulating material. By configuring it in this way, each of the interruption members 40 and 43 can be made of insulating material, thus preventing heat conduction from each of the interruption members 40 to 43 to the pyroelectric element 18. Since the thermal effects on the pyroelectric element 18 are reduced, accuracy is improved. The pyroelectric sensor 1c may further include a heat insulating material formed between each of the interruption members 40 to 43 and the pyroelectric element 18. By configuring it in this way, a heat insulating material can be formed between each of the blocking members 40 and 43 and the pyroelectric element 18, thereby preventing heat conduction from each of the blocking members 40 and 43 to the pyroelectric element 18. This improves accuracy. In the pyroelectric sensor 1c, each of the interrupting members 40 to 43 is formed in a direction perpendicular to the direction from the fixed end to the free end of the cantilever 10. By configuring it in this way, each of the blocking members 40 to 43 can be formed in a direction perpendicular to the direction from the fixed end to the free end of the cantilever 10, so that the change in the effective area of ​​each of the blocking members 40 to 43 can be greatly increased by driving a small cantilever 10. According to the pyroelectric sensor 1c2 of the modified example 4 of this embodiment, each of the blocking members 40a to 43a has an inverse taper shape in which the cross-sectional area widens from one main surface of the cantilever 10 toward the incident surface of infrared light. By configuring it in this way, each of the blocking members 40a to 43a can be made in an inverse tapered shape, with the cross-sectional area widening from one main surface of the cantilever 10 toward the infrared light incidence surface, thereby limiting the angle of infrared light incident on the pyroelectric element 18 from the object being measured. As a result, the sensitivity of the pyroelectric element 18 to infrared light emitted from the object being measured can be improved.

[0076] (Modification of Embodiment 5) [Pyroelectric sensor] Figure 20 is a side view showing an example of a pyroelectric sensor according to Modification 5 of this embodiment. Figure 21 is a plan view showing a pyroelectric sensor according to Modification 5 of this embodiment. The pyroelectric sensor 1d according to the modified example 5 of this embodiment comprises a cantilever 10, a pyroelectric element 18, a drive unit 19, a shut-off member 40 to a shut-off member 43, a shut-off member 45 to a shut-off member 46, a connecting member 50, a support member 17, and a control unit CU. The pyroelectric sensor 1d differs from the pyroelectric sensor 1 in that, in the Z-axis direction, shielding members 40 to 43 and shielding members 45 to 46 are formed on the side of the pyroelectric element 18 opposite to the cantilever 10. Shielding members 45 to 46 are heat-transferably connected to shielding members 40 to 43, and further, shielding members 45 to 46 are heat-transferably connected to a connecting member 50. The connecting member 50 dissipates heat from shielding members 40 to 46. Shielding members 45 to 46 partially block infrared light emitted from the object being measured. An example of shielding members 45 to 46 is made of a thermal insulation material, particularly a resin material, specifically silicone epoxy resin permanent resist (SU-8), etc. Each of the blocking members 45 to 46 is formed such that its longitudinal direction is parallel to the direction from the fixed end to the free end of the cantilever 10. In Figure 21, the driving direction of the cantilever 10 is the Z-axis direction, and each of the blocking members 45 to 46 is formed such that its longitudinal direction is the X-axis direction.

[0077] Furthermore, the blocking member 40, the blocking member 46, and the support member 17 are connected by a connecting member 50 in a way that allows for heat transfer. With this configuration, heat from the blocking member 40 to the blocking member 46 can be transferred to the support member 17. Therefore, the amount of heat transferred to the cantilever 10 can be reduced. The connecting member 50 is not limited to one; there may be multiple connecting members. The operation of the pyroelectric sensor 1d is the same as described with reference to Figures 15A to 15D, so that explanation will be omitted. In the modified embodiment 5, the pyroelectric sensor 1d may be housed in the aforementioned outer casing 20. In the modified example 5 of the above-described embodiment, as an example, two interrupting members, interrupting member 45 and interrupting member 46, are formed on the pyroelectric element 18 such that their longitudinal direction is parallel to the direction from the fixed end to the free end of the cantilever 10. However, the invention is not limited to this example. For example, one interrupting member may be formed on the pyroelectric element 18 such that its longitudinal direction is parallel to the direction from the fixed end to the free end of the cantilever 10, or three or more interrupting members may be formed on the pyroelectric element 18 such that their longitudinal direction is parallel to the direction from the fixed end to the free end of the cantilever 10. A film with a higher thermal conductivity than the interrupting member may be formed on the interrupting member, and the film and the connecting member may be connected.

[0078] According to the pyroelectric sensor 1d of modified example 5 of this embodiment, it further comprises one or more connecting members 50 that connect the shut-off member 45 and the base which serves as the support member 17 of the pyroelectric sensor 1 in a heat-transferable manner. By configuring it in this way, it is possible to provide one or more connecting members that enable heat transfer between the shut-off member 45 and the base of the pyroelectric sensor 1d, so that heat from the shut-off member 40 to the shut-off member 43 and from the shut-off member 45 to the shut-off member 46 is not transferred to the pyroelectric element 18 and is therefore discharged. This improves accuracy. In the pyroelectric sensor 1d, the interruption members 45 and 46 are formed in a direction parallel to the direction from the fixed end to the free end of the cantilever 10. By configuring it in this way, the shielding members 45 and 46 can be formed in a direction parallel to the direction from the fixed end to the free end of the cantilever 10, so that the shielding members 40 and 43, which are formed in the vertical direction, can be connected and heat can be discharged uniformly.

[0079] (Modification 6 of the embodiment) [Pyroelectric sensor] Figure 22 is a side view showing an example of a pyroelectric sensor according to modification 6 of this embodiment. Figure 23 is a top view showing a pyroelectric sensor according to modification 6 of this embodiment. The pyroelectric sensor 1e according to the modified example 6 of this embodiment comprises a cantilever 10, a pyroelectric element 18, a drive unit 19, a shut-off member 40 to a shut-off member 43, a shut-off member 45a, a connecting member 50, a support member 17, and a control unit CU. The pyroelectric sensor 1e differs from the pyroelectric sensor 1 in that, in the Z-axis direction, the shielding member 40, shielding member 43, shielding member 45a, and connecting member 50 are formed on the side of the pyroelectric element 18 opposite to the cantilever 10. The shielding member 45a is heat-transferably connected to the shielding member 40 and shielding member 43, and further, the shielding member 40 and shielding member 45a are heat-transferably connected to the connecting member 50. The connecting member 50 dissipates heat from the shielding member 40 and shielding member 45a. The Z-axis length of the shielding member 45a is shorter than the Z-axis length of the shielding member 40 and shielding member 43. The shielding member 40 and shielding member 45a partially block infrared light emitted from the object being measured. An example of the shielding member 40 and shielding member 45a is made of a heat insulating material, especially a resin material, specifically silicone epoxy resin permanent resist (SU-8), etc. The blocking member 45a obstructs the drive because it is parallel to the direction in which the effective area changes. However, the blocking member 45a contributes to improving the efficiency of heat dissipation by connecting the blocking member 40 to the blocking member 43 as one unit. By making the blocking member 45a lower in height (thinner) than the blocking members 40 to 43, the impact on the drive can be mitigated while maintaining the heat dissipation efficiency. By making the length of the blocking member 45a in the Z-axis direction shorter than the length of the blocking member 40 to the blocking member 43 in the Z-axis direction, the influence of the blocking member 45a on the driving of the cantilever 10 can be mitigated in the driving direction of the cantilever 10.

[0080] The operation of the pyroelectric sensor 1e is the same as described with reference to Figures 15A to 15D, so that explanation will be omitted. In the modified embodiment 6, the pyroelectric sensor 1e may be housed in the aforementioned outer casing 20. In the modified embodiment 6 described above, one example was described in which one of the interrupting members 45a is formed on the pyroelectric element 18 such that its longitudinal direction is parallel to the direction from the fixed end to the free end of the cantilever 10. However, the invention is not limited to this example. For example, multiple interrupting members 45a may be formed on the pyroelectric element 18 such that their longitudinal directions are parallel to the direction from the fixed end to the free end of the cantilever 10.

[0081] (Modification of Embodiment 7) [Pyroelectric sensor] Figure 24 is a side view showing an example of a pyroelectric sensor according to Modification 7 of this embodiment. Figure 25 is a top view showing a pyroelectric sensor according to Modification 7 of this embodiment. The pyroelectric sensor 1g according to modification 7 of this embodiment comprises a cantilever 10, a pyroelectric element 18a, a drive unit 19, a shut-off member 40 to a shut-off member 43, and a support member 17. In Figure 24, the control unit CU is omitted. The pyroelectric sensor 1g differs from the pyroelectric sensor 1 in that the first electrode 11a and the second electrode 13a are formed spaced apart on one main surface of the cantilever 10, and the pyroelectric body 12a is formed on the first electrode 11a, the second electrode 13a, and the cantilever 10. The first electrode 11a and the second electrode 13a have different potentials. The pyroelectric element 18a is composed of the first electrode 11a, the pyroelectric body 12a, and the second electrode 13a. The first electrode 11a and the second electrode 13a may be formed on the pyroelectric body 12a. Furthermore, in the pyroelectric sensor 1g, a blocking member 40 to a blocking member 43 is formed on the side of the pyroelectric element 18 opposite to the cantilever 10 in the Z-axis direction.

[0082] (Manufacturing method for pyroelectric sensors) A method for manufacturing a pyroelectric sensor according to a modified example 7 of this embodiment will be described. A resin material constituting the cantilever 10 is deposited on one main surface of the substrate SUB. An example of the resin material is polyimide. Specifically, polyimide is deposited on one main surface of the substrate SUB using a film deposition apparatus. A first electrode (11a, 14) and a second electrode 13a are formed on a resin material. One example of the material for the first electrode (11a, 14) is platinum, and one example of the material for the second electrode 13a is platinum. Specifically, platinum is deposited on a polyimide film using a film deposition apparatus. After depositing a platinum film, the first electrode and the second electrode are formed by etching. By using the same material for the first electrode and the second electrode, the first electrode (11a, 14) and the second electrode 13a can be formed in the same process. A piezoelectric material and a pyroelectric material are deposited on the first electrode 11a, the pyroelectric body 12a, and the second electrode 13a. An example of the piezoelectric material and pyroelectric material is PVDF. Specifically, PVDF is deposited on the first electrode 11a, the pyroelectric body 12a, and the second electrode 13a using a film deposition apparatus. By using the same material for the piezoelectric material and the pyroelectric material, the piezoelectric body 15 and the pyroelectric body 12a can be formed in the same process.

[0083] After the PVDF film is formed, the piezoelectric element 15 and the pyroelectric element 12a are molded by etching, thereby forming the pyroelectric element 18a. The drive unit 19 is formed by forming the upper electrode 16 on the piezoelectric element 15. The cantilever 10 is formed by molding a resin material. By constructing the cantilever 10 from a resin material, the cantilever 10 can be made flexible and lightweight. Because the cantilever 10 is flexible and lightweight, it can be driven easily and is less prone to breakage. The substrate SUB is detached from the cantilever 10. Subsequently, the cantilever 10 is installed on the support member 17. The wiring is connected, and the manufacturing of the pyroelectric sensor 1g is completed.

[0084] (Modification of Embodiment 8) (Manufacturing method for pyroelectric sensors) Figure 26 is a flowchart showing an example of a method for manufacturing a pyroelectric sensor according to Modification 8 of this embodiment. Figures 27A to 27D are diagrams illustrating the method for manufacturing a pyroelectric sensor according to Modification 8 of this embodiment. The method for manufacturing the pyroelectric sensor 1 will be described with reference to Figure 26 and Figures 27A to 27D. (Step S1a) Pyroelectric sensor 1 is created (Figure 27A). (Step S2a) An outer casing 20 is provided on the positive Z-axis side of the pyroelectric sensor 1 (Figure 27B). A light-shielding member that does not transmit infrared rays is formed on the positive Z-axis side surface of the outer casing 20. Examples of infrared light-shielding members include highly reflective, glossy metals, highly infrared-absorbent metal oxides such as titanium oxide and chromium oxide, and glass that has low transmittance at infrared wavelengths of 8 μm or more. The outer casing 20 is joined to the pyroelectric sensor 1 (Figure 27C). (Step S3a) In the pyroelectric sensor 1 to which the outer casing 20 is attached, a laser LA is irradiated from the positive Z-axis direction with respect to the cantilever 10, and an infrared transmission window 20W is formed by removing a part of the light-shielding member. If the infrared-transmitting window 20W is formed by removing the light-shielding member before joining the outer casing 20 to the pyroelectric sensor 1, then positioning of the outer casing 20 and the cantilever 10 is required when joining the outer casing 20 to the pyroelectric sensor 1. In this case, if the area of ​​the infrared-transmitting window 20W is large, the temperature of the pyroelectric element 18 may rise, potentially reducing its sensitivity. Also, if the position of the movable part of the pyroelectric element 18 and the infrared-transmitting window 20W are misaligned, the change in effective area due to the driving of the pyroelectric element 18 becomes smaller. In modification 8 of this embodiment, since the infrared-transmitting window 20W is formed after joining the outer casing 20 to the pyroelectric sensor 1, the positioning of the opening corresponding to each cantilever can be performed, thereby improving the yield.

[0085] Furthermore, in the actual process, when the outer casing 20 is joined to the pyroelectric sensor 1, there is a risk that the position of the outer casing 20 may shift relative to the cantilever 10. By forming the infrared transmission window 20W with the cantilever 10 as a reference, the positional shift of the outer casing 20 relative to the cantilever 10 can be absorbed. In the modified example 10 of this embodiment described above, the case in which the light-shielding member is formed on the outside of the outer casing 20 was described, but the invention is not limited to this example. For example, the light-shielding member may be formed inside the outer casing 20. In this case, a getter material such as Ti may be used in combination with the light-shielding member. By configuring it in this way, the vacuum level inside the outer casing 20 can be improved by the getter material adsorbing residual gas when the light-shielding member is removed.

[0086] Figure 28 is a diagram illustrating an example of a method for manufacturing a pyroelectric sensor according to a modified example 9 of this embodiment. Figure 28 shows a case in which a pyroelectric sensor substrate SS on which multiple pyroelectric sensors 1 are manufactured is used, and an outer casing substrate OS on which multiple outer casings 20 are formed. In this case, the outer casing substrate OS is bonded (laminated) to the pyroelectric sensor substrate SS. In the bonded substrate, there may be areas where the positional misalignment between the pyroelectric sensor 1 and the outer casing 20 is large and areas where it is small. Figure 29A is a diagram illustrating an example of a method for manufacturing a pyroelectric sensor according to modification 9 of this embodiment. Figure 29A shows a case in which an infrared transmission window 20W is formed after the outer substrate OS is bonded to the pyroelectric sensor substrate SS. In this case, the infrared transmission window 20W can be formed on the upper part of the pyroelectric element 18 without having to position the light-receiving portion (pyroelectric element 18) of the pyroelectric sensor 1 and the infrared transmission window 20W. Figure 29B is a diagram illustrating an example of a method for manufacturing a pyroelectric sensor. Figure 29B shows the case where an infrared transmission window 20W is formed by removing the light-shielding member before joining the outer casing 20 to the pyroelectric sensor 1. In this case, positioning of the infrared transmission window 20W and the cantilever 10 is necessary in order to join the outer casing 20 to the pyroelectric sensor 1. If the position of the infrared transmission window 20W is misaligned, the effective area due to the driving of the pyroelectric element 18 will change. As a result, the change in the effective area due to the driving of the pyroelectric element 18 will become smaller, and the sensitivity will change. In Modification 9 of this embodiment, a method for manufacturing the pyroelectric sensor 1 was described as an example, but it can be applied to all the pyroelectric sensors mentioned above. According to the manufacturing method of the pyroelectric sensor according to the modified example 9 of this embodiment, the method includes the steps of installing the cantilever 10 inside the outer casing 20 and partially opening an infrared-transmitting window 20W in the outer casing 20 based on the position of the cantilever 10. By configuring it in this way, compared to the case where an infrared-transmitting window 20W is partially opened in the outer casing 20 and the opening is aligned with the cantilever 10, the cantilever 10 and the opening in the outer casing 20 can be positioned to correspond to each individual cantilever, thereby improving yield.

[0087] Although this embodiment has been described above, these embodiments are presented as examples and are not intended to limit the scope of the disclosure. The embodiments can be implemented in various other forms, and various omissions, substitutions, and modifications can be made without departing from the gist of the disclosure. Embodiments and their variations include, for example, those that are readily conceivable to those skilled in the art, those that are substantially identical, and those that are equivalent. For example, each of these embodiments and variations 1 to 8 of this embodiment may be combined as appropriate. For example, a computer program for realizing the functions of the control unit CU, cantilever drive unit 31, sensor signal processing unit 32, and temperature information output unit 33 described above may be recorded on a computer-readable recording medium, and the computer program recorded on this recording medium may be loaded into a computer system and executed. The term "computer system" here may include hardware such as an operating system and peripheral devices.

[0088] Furthermore, "computer-readable recording media" refers to writable non-volatile memory such as flexible disks, magneto-optical disks, ROMs, and flash memory, portable media such as DVDs (Digital Versatile Discs), and storage devices such as hard disks built into computer systems. Furthermore, "computer-readable recording media" also includes volatile memory (such as DRAM (Dynamic Random Access Memory)) within computer systems that act as servers or clients when computer programs are transmitted via networks such as the Internet or communication lines such as telephone lines, which retain programs for a certain period of time. Furthermore, the above program may be transmitted from a computer system that stores the program in a memory device or the like to another computer system via a transmission medium or by transmission waves within the transmission medium. Here, the "transmission medium" used to transmit the program refers to a medium that has the function of transmitting information, such as a network (communication network) like the Internet or a communication line (communication line) like a telephone line. Furthermore, the above program may be intended to implement only some of the functions described above. Furthermore, the aforementioned functions can be achieved in combination with programs already recorded in the computer system; these may be so-called differential files (differential programs). [Explanation of symbols]

[0089] 1, 1b, 1b2, 1b3, 1c, 1c2, 1d, 1e, 1g... Pyroelectric sensor, 3... Pyroelectric sensor system, 10, 10a, 10b2, 10b3... Cantilever, 10M... Resin material, 11, 11a... Lower electrode, 11M... Platinum, 12, 12a... Pyroelectric body, 12M... Pyroelectric material, 13, 13a... Upper electrode, 13M... Gold, 14, 14b-1, 14b-2, 14b2-1, 14b2-2, 14b3-1, 14b3-2... Lower electrode, 14M... Platinum, 15, 15b-1, 15b-2, 15b2-1, 15b2-2, 15b3-1, 15b3-2... Piezoelectric body, 15M... Piezoelectric material, 16, 16b-1, 16b-2, 16b2-1, 16b2-2, 16b3-1, 16b3-2… Upper electrode, 16M… Gold, 17… Support member, 18, 18a… Pyroelectric element, 19, 19b, 19b-1, 19b-2, 19b2, 19b2-1, 19b2-2, 19b3, 19b3-1, 19b3-2… Drive unit, 20… Outer casing, 20W… Infrared transmission window, 22… Light shielding unit, 30… Sensor array unit, 31… Cantilever drive unit, 32… Sensor signal processing unit, 33… Temperature information output unit, 34… Power supply, 40, 40a, 41, 41a, 42, 42a, 43, 43a, 45, 45a, 46… Shielding member

Claims

1. A cantilever having one end fixed and the other end free, A pyroelectric element formed on one main surface of the cantilever to detect infrared light emitted from the object to be measured, A drive unit that vibrates the cantilever and On the side of the pyroelectric element opposite to the cantilever, a shielding member is formed in an inverse tapered shape, with the cross-sectional area widening from one main surface of the cantilever toward the infrared light incident surface, thereby partially blocking the infrared light emitted from the object being measured. Equipped with, A pyroelectric sensor in which the infrared light incident on the pyroelectric element is modulated by the vibration of the cantilever.

2. The pyroelectric sensor according to claim 1, wherein the blocking member is made of an insulating material.

3. The insulating material formed between the blocking member and the pyroelectric element The pyroelectric sensor according to claim 1, further comprising:

4. One or more connecting members that connect the aforementioned blocking member and the base of the pyroelectric sensor in a heat-transferable manner. A pyroelectric sensor according to any one of claims 1 to 3, further comprising the above.

5. One or more of the connecting members dissipate heat, The pyroelectric sensor according to claim 4.

6. The blocking member is The pyroelectric sensor according to any one of claims 1 to 5, comprising one or more first blocking members formed in a direction perpendicular to the direction from the fixed end to the free end of the cantilever.

7. The blocking member is The pyroelectric sensor according to claim 6, further comprising a second interrupting member that is heat-transferably connected to one or more first interrupting members formed in a direction parallel to the direction from the fixed end to the free end of the cantilever.

8. The pyroelectric sensor according to claim 7, wherein the second interrupting member is thinner than the first interrupting member.

9. The pyroelectric sensor according to any one of claims 1 to 8, wherein the cantilever has a plurality of drive units at one end.

10. The pyroelectric sensor according to claim 9, wherein each of the multiple drive units is controlled individually.

11. The pyroelectric sensor according to any one of claims 1 to 10, wherein the cantilever has a plurality of fixed ends spaced apart from each other at one end, and each of the plurality of fixed ends is provided with the drive unit.

12. The aforementioned end has a longitudinal direction, The pyroelectric sensor according to claim 11, wherein the fixed end is formed symmetrically with respect to the center in the longitudinal direction.

13. The pyroelectric sensor according to any one of claims 1 to 12, wherein the pyroelectric element comprises polyvinylidene fluoride.

14. The drive unit is a piezoelectric element that vibrates the cantilever. A pyroelectric sensor according to any one of claims 1 to 13, including the above.

15. The pyroelectric sensor according to any one of claims 1 to 14, wherein the piezoelectric body constituting the drive unit includes the material constituting the pyroelectric element.

16. The pyroelectric sensor according to any one of claims 1 to 15, wherein the cantilever is installed at a position where, when the cantilever is not vibrating, the angle between the direction from the fixed end to the free end and the incident direction of the infrared light is 30 degrees or more and less than 60 degrees.

17. Outer shell with an infrared light transmission window Furthermore, The pyroelectric sensor according to any one of claims 1 to 16, wherein the cantilever, the pyroelectric element, and the drive unit are installed inside the outer casing, and the inside of the outer casing is a vacuum atmosphere.

18. A plurality of pyroelectric sensors according to any one of claims 1 to 17 are arranged in an array, A control unit that controls the drive unit included in each of the plurality of pyroelectric sensors, A sensor signal processing unit that processes the electrical signals output by each of the multiple pyroelectric elements, A pyroelectric sensor system equipped with the following features.

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