Contaminant trapping system for reactor systems

Abstract

To provide reactor system components that prevent contamination of other components.SOLUTION: A contaminant trap system of a reactor system may comprise a baffle plate stack comprising at least one baffle plate comprising an aperture spanning through a baffle plate body of the baffle plate, and a body portion; and at least one complementary baffle plate comprising a complementary aperture spanning through a complementary baffle plate body of the complementary baffle plate, and a complementary body portion. The at least one baffle plate and the at least one complementary baffle plate may be disposed in a baffle plate order between a first end and a second end of the baffle plate stack in which the baffle plates alternate with the complementary baffle plates, such that no two baffle plates or no two complementary baffle plates are adjacent in the baffle plate order. The at least one baffle plate may comprise a sintered material.SELECTED DRAWING: Figure 2

Description

Technical Field

[0001] The present disclosure generally relates to semiconductor processing or reactor systems, and components included therein, and in particular to reactor system components that prevent contamination of other components. Background Art

[0002] Reaction chambers may be used to deposit various layers of materials onto semiconductor substrates. A substrate may be disposed on a susceptor within the reaction chamber. Both the substrate and the susceptor may be heated to a desired substrate temperature set point. In an exemplary substrate processing process, one or more reaction gases may pass over the heated substrate to cause deposition of a thin film of material onto the substrate surface. Through subsequent deposition, doping, lithography, etching and other processes, these layers become integrated circuits.

[0003] For any given process, the reaction gas and / or any byproduct gases may then be exhausted via vacuum and / or purged from the reaction chamber. Reaction gases and other gases or materials from the reaction chamber may pass through a filter or contaminant trap system, where reaction gases or other materials (e.g., reaction products and / or by-products) are captured to prevent contamination of reactor system components downstream of the contaminant trap system. However, material from the contaminant trap system may outgas under certain conditions, which may cause contamination of the reaction chamber or a substrate disposed therein. Summary of Invention

[0004] This “Summary of the Invention” is provided to introduce several selected concepts in a simplified form. These concepts are described in more detail in the “Modes for Carrying Out the Invention” of the exemplary embodiments of the present disclosure below. This Summary of the Invention is not necessarily intended to identify the main or essential features of the claimed subject matter, nor is it intended to be used to limit the scope of the claimed subject matter.

[0005] In some embodiments, contaminant trapping systems for reactor systems are provided. The contaminant trapping systems disclosed herein enable the collection of material from the reaction chamber of a reactor system and can reduce or prevent contamination of reactor system components downstream of the contaminant trapping system. The contaminant trapping systems disclosed herein can also reduce or prevent contaminants that may migrate to and contaminate the reaction chamber or substrates placed therein.

[0006] In various embodiments, a baffle plate stack for a contaminant trapping system may comprise a plurality of baffle plates, each having an opening and a body portion that penetrates the baffle plate body of the plurality of baffle plates, and a plurality of complementary baffle plates, each having a complementary opening and a complementary body portion that penetrates the complementary baffle plate body of the plurality of complementary baffle plates. The plurality of baffle plates and the plurality of complementary baffle plates may be arranged in order of baffle plates between the first and second ends of a baffle plate stack in which the plurality of baffle plates alternate with the plurality of complementary baffle plates, so that no two of the plurality of baffle plates and no two of the plurality of complementary baffle plates are adjacent in order of baffle plates. Multiple baffle plates and multiple complementary baffle plates may be arranged in a baffle plate orientation, wherein at least a portion of the openings of the multiple baffle plates and at least a portion of the complementary body portions of the multiple complementary baffle plates may be aligned along a first axis extending between the first and second ends of the baffle plate stack, so that at least a portion of the body portions of the multiple baffle plates and at least a portion of the complementary openings of the multiple complementary baffle plates may be aligned along a second axis extending between the first and second ends of the baffle plate stack.

[0007] In various embodiments, the baffle plate stack may further comprise a connecting rod connected to each of the plurality of baffle plates and / or each of the plurality of complementary baffle plates, wherein the connecting rod may extend between a first end and a second end of the baffle plate stack, and the connecting rod includes a cross section. Each of the plurality of baffle plates may have a connecting hole, and each of the plurality of complementary baffle plates may have a complementary connecting hole, and the connecting hole and the complementary connecting hole may each include a shape complementary to the cross section of the connecting rod. In various embodiments, the cross section of the connecting rod may be noncircular, and the connecting holes of each of the plurality of baffle plates may be arranged in a first orientation, and the complementary connecting holes of each of the plurality of complementary baffle plates may be arranged in a second orientation. The first and second orientations can achieve baffle plate orientation by arranging the plurality of baffle plates and the plurality of complementary baffle plates around the connecting rod.

[0008] In various embodiments, the baffle plate stack may further comprise a plurality of spacers connected to a connecting rod, at least one of which spacers may be positioned between each baffle plate and each complementary baffle plate in the order of the baffle plates. In various embodiments, the baffle plate stack may further comprise an end plate positioned at least one of the first or second ends of the baffle plate stack, the end plate may include an end plate opening and an end plate body portion.

[0009] In various embodiments, there may be one more baffle plate than a plurality of complementary baffle plates, such that the baffle plate stack may include the same order of baffle plates and a plurality of complementary baffle plates from both the first and second ends of the baffle plate stack. In various embodiments, at least one of the plurality of baffle plates and a plurality of complementary baffle plates may include a textured surface.

[0010] In various embodiments, the contaminant trap system of the reactor system may include a trap housing including the outer wall of the housing, a first baffle plate disposed within the trap housing, the first baffle plate having a first opening and a first body portion that penetrates the first baffle plate body between the first top baffle plate surface and the first bottom baffle plate surface of the first baffle plate, and a first complementary baffle plate disposed within the trap housing in series with the first baffle plate between the first end and the second end of the trap housing, the first complementary baffle plate having a first complementary opening and a first complementary body portion that penetrates the first complementary baffle plate body between the first top complementary baffle plate surface and the first bottom complementary baffle plate surface of the first complementary baffle plate. The first baffle plate and the first complementary baffle plate may be included in a baffle plate stack. The first baffle plate and the first complementary baffle plate may be arranged in a baffle plate orientation within the trap housing, wherein at least a portion of the first opening of the first baffle plate and at least a portion of the first complementary body portion of the first complementary baffle plate may be aligned along a first axis extending between the first and second ends of the trap housing, and at least a portion of the first body portion of the first baffle plate and at least a portion of the first complementary opening of the first complementary baffle plate may be aligned along a second axis extending between the first and second ends of the trap housing. In various embodiments, the first opening of the first baffle plate may be included in the radially inner portion of the first baffle plate, and / or the first complementary opening of the first complementary baffle plate may be included in the radially outer portion of the first complementary baffle plate. In various embodiments, the contaminant trap system may further include a heater jacket connected to the trap housing.

[0011] In various embodiments, the contaminant trap system may further include a connecting rod positioned within a trap housing and extending between a first and a second end of the trap housing. The first baffle plate may include a first connecting hole positioned through the body of the first baffle plate, and the connecting rod may be positioned through the first connecting hole. The first complementary baffle plate may include a first complementary connecting hole positioned through the body of the first complementary baffle plate, and the connecting rod may be positioned through the first complementary connecting hole. In various embodiments, the connecting rod may have a non-circular cross-section, and the first connecting hole of the first baffle plate and the first complementary connecting hole of the first complementary baffle plate may each include a shape complementary to the non-circular cross-section of the connecting rod. In various embodiments, the reference point of the first connecting hole may be positioned in a first orientation, and the complementary reference point of the first complementary connecting hole may be positioned in a first complementary orientation, and the first orientation and the first complementary orientation may achieve baffle plate orientation by positioning the first baffle plate and the first complementary baffle plate around the connecting rod.

[0012] In various embodiments, the contaminant trapping system may further include a spacer between the first baffle plate and the first complementary baffle plate, providing a space between them.

[0013] In various embodiments, the contaminant trap system may further include a second baffle plate disposed within the trap housing, the second baffle plate having a second opening penetrating the second baffle plate body between the second top baffle plate surface and the second bottom baffle plate surface, and a second body portion. The second baffle plate may be disposed within the trap housing such that a first complementary baffle plate is between the first baffle plate and the second baffle plate, where the baffle plate orientation may further include aligning at least a portion of the second opening of the second baffle plate and at least a portion of the first complementary body portion of the first complementary baffle plate along a first axis, so that at least a portion of the second body portion of the second baffle plate and at least a portion of the first complementary opening of the first complementary baffle plate can be aligned along a second axis. In various embodiments, the first and second baffle plates may include identical designs.

[0014] In various embodiments, the baffle plate stack may further include end plates positioned such that the first baffle plate is between the end plate and the first complementary baffle plate, or the first complementary baffle plate is between the end plate and the first baffle plate. The end plates may include an end plate opening and an end plate body portion.

[0015] In various embodiments, the outer wall of the trap housing may have an inner wall surface. At least one outer edge of the first baffle plate and the first complementary baffle plate may be positioned adjacent to the inner wall surface so that at least a partial seal can be formed between the outer edge of the first baffle plate and / or the first complementary baffle plate and the inner wall surface.

[0016] In various embodiments, the surface of the first top baffle plate, the surface of the first bottom baffle plate, the surface of the first top complementary baffle plate, the surface of the first bottom complementary baffle plate, the first baffle plate, and at least one outer edge of the first complementary baffle plate, and / or the inner wall surface are textured.

[0017] In various embodiments, the method involves flowing fluid from a reaction chamber into a trap housing of a contaminant trap system; flowing fluid through a baffle plate stack disposed within the trap housing and comprising a plurality of baffle plates and a plurality of complementary baffle plates; flowing fluid through openings in the first baffle plates of the plurality of baffle plates; and, in response to flowing fluid through openings in the first baffle plates, flowing fluid into the complementary body portion of the first complementary baffle plate of the plurality of complementary baffle plates; and within the complementary body portion of the first complementary baffle plate This may include: depositing contaminants on the complementary body portion of the first complementary baffle plate in response to the flow of fluid through it; flowing fluid through the complementary opening of the first complementary baffle plate in response to the flow of fluid into the complementary body portion of the first complementary baffle plate; flowing fluid through the body portion of the second baffle plate of the plurality of baffle plates in response to the flow of fluid through the complementary opening of the first complementary baffle plate; and / or depositing contaminants on the body portion of the second baffle plate in response to the flow of fluid into the body portion of the second baffle plate. Each of the plurality of baffle plates may include a body portion and an opening that penetrates the baffle plate body of each baffle plate of the plurality of baffle plates. Each of the plurality of complementary baffle plates may include a complementary body portion and a complementary opening that penetrates the complementary baffle plate body of each baffle plate of the plurality of complementary baffle plates. Multiple baffle plates and multiple complementary baffle plates may be arranged in order of baffle plates between the first and second ends of a baffle plate stack in which the multiple baffle plates may alternate with the multiple complementary baffle plates, so that no two of the multiple baffle plates and no two of the multiple complementary baffle plates are adjacent to each other in order of baffle plates.Multiple baffle plates and multiple complementary baffle plates may be arranged in a baffle plate orientation, wherein at least a portion of the openings of the multiple baffle plates and at least a portion of the complementary body portions of the multiple complementary baffle plates may be aligned along a first axis extending between the first and second ends of the baffle plate stack, so that at least a portion of the body portions of the multiple baffle plates and at least a portion of the complementary openings of the multiple complementary baffle plates may be aligned along a second axis extending between the first and second ends of the baffle plate stack.

[0018] In various embodiments, the contaminant trapping system of a reactor system may comprise a trap housing and a trap structure disposed within the trap housing. The trap structure may include a baffle plate, a base plate, and a plurality of rods extending between and connected to the baffle plate and the base plate. The rods may be arranged around flow holes that pass through the base plate.

[0019] In various embodiments, the contaminant trapping system of a reactor system may comprise a trap housing having a housing bottom surface and a housing top surface, and a trap structure disposed within the trap housing. The trap structure may comprise a plurality of tubes arranged in an array having an outer shape complementary to the shape of the trap housing, a support disposed within the array of tubes and projecting outward from the ends of the tubes, in contact with the housing bottom surface and creating a space between the ends of the tubes and the housing bottom surface, and a tensioning device connected around the plurality of tubes configured to hold the tubes together. The plurality of tubes may be arranged in a hexagon, and each of the plurality of tubes may have a bore that may extend at least partially between the housing bottom surface and the housing top surface.

[0020] In various embodiments, the contaminant trap of the reactor system may comprise a trap housing and a trap structure disposed within the trap housing. The trap structure may include a corrugated sheet connected to a non-corrugated sheet. The corrugated sheet and the non-corrugated sheet may be helical such that portions of the corrugated sheet are positioned between portions of the non-corrugated sheet, and portions of the non-corrugated sheet are positioned between portions of the corrugated sheet.

[0021] In various embodiments, the trap structure contained within a contaminant trap system (e.g., one or more baffle plates, complementary baffle plates, rods, tubes, corrugated sheets, etc.) may include or consist at least partially of a sintered material. In various embodiments, the sintered material may include at least one of a metallic material (e.g., a metal or a metallic alloy) or a ceramic material.

[0022] For the purpose of summarizing the benefits achieved beyond this disclosure and the prior art, several specific purposes and benefits of this disclosure are described above. Naturally, it should be understood that not all of these purposes or benefits are necessarily achieved by any particular embodiment of this disclosure. Therefore, a person skilled in the art will recognize that embodiments disclosed herein may be performed in a manner that achieves or optimizes one or a group of benefits as taught or suggested herein, without necessarily achieving other purposes or benefits as taught or suggested herein.

[0023] All of these embodiments are intended to be within the scope of this disclosure. To those skilled in the art, these and other embodiments will be readily apparent from the following detailed description of certain embodiments with reference to the accompanying drawings, and this disclosure is not limited to any particular embodiments discussed. [Brief explanation of the drawing]

[0024] While the present specification concludes with claims that particularly point out and distinctly claim what is regarded as embodiments of the present disclosure, the advantages of embodiments of the present disclosure may be more readily understood from the description of certain specific examples of embodiments of the present disclosure when read in conjunction with the accompanying drawings. Elements bearing like reference numerals throughout the drawings are intended to be the same.

[0025] [Figure 1] Figure 1 shows a schematic diagram of an exemplary reactor system in accordance with various embodiments.

[0026] [Figure 2] Figure 2 shows an exploded view of an exemplary contaminant trap system in accordance with various embodiments.

[0027] [Figure 3A] Figure 3A shows an exemplary baffle plate in accordance with various embodiments.

[0028] [Figure 3B] Figure 3B shows an exemplary complementary baffle plate in accordance with various embodiments.

[0029] [Figure 4A] Figure 4A shows a perspective view of an exemplary filter baffle plate stack of a contaminant trap system in accordance with various embodiments.

[0030] [Figure 4B] Figure 4B shows a cross-sectional perspective view of an exemplary filter baffle plate stack of a contaminant trap system in accordance with various embodiments.

[0031] [Figure 5A] Figure 5A shows another exemplary baffle plate in accordance with various embodiments.

[0032] [Figure 5B] Figure 5B shows another exemplary complementary baffle plate in accordance with various embodiments.

[0033] [Figure 6A] Figure 6A shows yet another exemplary baffle plate according to various embodiments.

[0034] [Figure 6B] Figure 6B shows yet another exemplary complementary baffle plate according to various embodiments.

[0035] [Figure 7A] Figure 7A shows yet another exemplary baffle plate according to various embodiments.

[0036] [Figure 7B] Figure 7B shows yet another exemplary complementary baffle plate according to various embodiments.

[0037] [Figure 8] Figure 8 shows perspective views of heater jackets for contaminant trapping systems according to various embodiments.

[0038] [Figure 9] Figure 9 shows various embodiments of how to pass fluid through a contaminant trapping system in a reactor system.

[0039] [Figure 10A] Figure 10A shows cross-sectional views of exemplary trap structures according to various embodiments.

[0040] [Figure 10B] Figure 10B shows exploded cross-sectional views of the trap structure of Figure 10A according to various embodiments.

[0041] [Figure 11] Figure 11 shows exemplary trap structures according to various embodiments.

[0042] [Figure 12]Figure 12 shows exemplary trap structures according to various embodiments.

[0043] [Figure 13] Figure 13 shows exemplary sintered materials of various media grades according to various embodiments. [Modes for carrying out the invention]

[0044] Certain embodiments and examples are disclosed below, but it will be understood by those skilled in the art that they extend beyond the embodiments and / or uses specifically disclosed herein, as well as their obvious modifications and equivalents. Therefore, the scope of this disclosure is not intended to be limited by the specific embodiments described herein.

[0045] The figures shown herein are not intended to be actual diagrams of any particular material, apparatus, structure, or device, but are merely representations used to describe embodiments of the present disclosure.

[0046] As used herein, the term “substrate” may refer to any or more underlying materials that may be used or on which a device, circuit, or film may be formed.

[0047] As used herein, the term “atomic layer deposition” (ALD) may refer to a deposition process in which deposition cycles (preferably multiple consecutive deposition cycles) are carried out within a process chamber. Typically, during each cycle, a precursor is chemisorbed onto the deposition surface (e.g., the substrate surface or a previously deposited underlayment surface (such as material from a previous ALD cycle)) to form a monolayer or quasi-monolayer that does not readily react with additional precursors (i.e., self-controlled reactions). Subsequently, if necessary, a reactant (e.g., another precursor or reaction gas) may be introduced into the process chamber for use in converting the chemisorbed precursor into the desired material on the deposition surface. Typically, this reactant can further react with the precursor. Furthermore, a purging step may also be utilized during each cycle to remove excess precursor from the process chamber after the conversion of the chemisorbed precursor, as well as / or excess reactant and / or reaction byproducts from the process chamber. Furthermore, as used herein, the term “atomic layer deposition” also means processes indicated by related terms such as “chemical vapor deposition,” “atomic layer epitaxy” (ALE), molecular beam epitaxy (MBE), gas-source MBE, or organometallic MBE, and chemical beam epitaxy when carried out with alternating pulses of precursor composition, reactive gas, and purge (e.g., inert carrier) gas.

[0048] As used herein, the term "chemical vapor deposition" (CVD) may refer to any process in which a substrate is exposed to one or more volatile precursors, which react and / or decompose on the surface of the substrate to produce a desired deposit.

[0049] As used herein, the terms “film” and “thin film” may refer to any continuous or discontinuous structure and material deposited by the methods disclosed herein. Examples of “films” and “thin films” include 2D materials, nanorods, nanotubes or nanoparticles, or even partial or complete molecular layers, partial or complete atomic layers, or clusters of atoms and / or molecules. “Films” and “thin films” may include materials or layers having pinholes, but are still at least partially continuous.

[0050] As used herein, the term “contaminant” may mean any undesirable material placed in the reaction chamber or in any component of the reaction system that may affect the purity of the substrate placed in the reaction chamber. The term “contaminant” may mean, but is not limited to, undesirable deposits, metallic and nonmetallic particles, impurities, and waste placed in the reaction chamber or other components of the reactor system.

[0051] Furthermore, in this disclosure, any two numbers of a variable can constitute a viable range of that variable, and any range shown may include or exclude its endpoints. In addition, any value of a shown variable (whether they are shown with “approximately”) may refer to an exact value or an approximate value, and may include its equivalents, and may refer to a mean, median, representative value, or majority, or similar. Furthermore, in this disclosure, the terms “include,” “composed of,” and “have” may independently refer to “typically or broadly include,” “include,” “essentially consist of,” or “consist of.” In this disclosure, any defined meaning is not necessarily excluded in some embodiments from the usual and customary meanings.

[0052] Reactor systems used in ALD, CVD, and / or similar processes can be used for a variety of applications, including the deposition and etching of materials onto a substrate surface. In various embodiments, the reactor system 50 may comprise a reaction chamber 4, a susceptor 6 for holding a substrate 30 during processing, a fluid distribution system 8 (e.g., a showerhead) for distributing one or more reactants onto the surface of the substrate 30, lines 16-20, and one or more reactant sources 10, 12, and / or a carrier and / or purge gas source 14, which are fluidly connected to the reaction chamber 4 via valves or controllers 22-26. Reactant gases or other materials from the reactant sources 10, 12 may be applied to the substrate 30 in the reaction chamber 4. Purge gas from the purge gas source 14 flows into and through the reaction chamber 4, allowing any excess reactant or other undesirable materials to be removed from the reaction chamber 4. System 50 may also include a vacuum source 28 fluidly connected to the reaction chamber 4, which may be configured to suck reactants, purge gas, or other materials from the reaction chamber 4. System 50 may also include a contaminant trap system 40 positioned between the reaction chamber 4 and the vacuum source 28 to capture (i.e., accumulate) materials coming from the reaction chamber 4 (e.g., contaminants) and to reduce or prevent contamination of downstream reactor system 50 components of the contaminant trap system 40.

[0053] Referring to Figure 2, various embodiments of the contaminant trap system 100 (exploded view thereof) are shown (an example of the contaminant trap system 40 in Figure 1). In various embodiments, the contaminant trap system 100 may include a trap housing 103 which may comprise multiple components (e.g., an upper housing 103A and a lower housing 103B). In various embodiments, the upper housing 103A and the lower housing 103B may be connected to enclose other components of the contaminant trap system 100. The upper housing 103A may include a fluid inlet 101A, through which the interior of the trap housing 103 may be fluidly connected to a reaction chamber (e.g., reaction chamber 4). Gases and other materials may flow from the reaction chamber into the contaminant trap system 100 through the fluid inlet 101A and out of the contaminant trap system 100 through the fluid outlet 101B.

[0054] In various embodiments, the trap housing 103 may include an outer wall 105 having an inner wall surface. The inner wall surface may define an internal space enclosed by the trap housing 103 (for example, when the upper housing 103A and the lower housing 103B are connected). The internal space of the trap housing 103 may be in fluid communication with a fluid inlet 101A and a fluid outlet 101B.

[0055] In various embodiments, the contaminant trap system 100 may include a trap structure (e.g., housed within a trap housing) configured to capture contaminants moving through it. Contaminants may accumulate on the surface of the trap structure as the fluid moves through the trap system. In various embodiments, the trap structure may include a baffle plate stack (e.g., a baffle plate stack 130). The baffle plate stack 130 may include at least two plates that can cause the fluid flow entering the internal space of the trap housing 103 to take a specific path (e.g., a path that increases or maximizes the fluid flow through the internal space of the trap housing 103, and / or a path that allows the contaminant trap system and its components to increase or maximize the removal of contaminants from the fluid flow). The fluid path through the internal space of the trap housing 103 can increase the fluid path and thus increase contact with the components of the contaminant trap system 100 (e.g., the surface of the baffle plates within the trap housing 103), thus providing more opportunities for contaminants to accumulate on this surface as the fluid flows through the contaminant trap system 100.

[0056] In various embodiments, the baffle plate stack 130 may include at least one baffle plate 132 and at least one complementary baffle plate 134. Each baffle plate 132 may have substantially the same design (e.g., including an opening through it), and each complementary baffle plate 134 may have substantially the same design (e.g., including a complementary opening through it). The baffle plates 132 and 134 may be arranged in the baffle plate stack 130 in a baffle plate order between the first end of the trap housing 103 (closer to the fluid inlet 101A) and the second end of the trap housing 103 (closer to the fluid outlet 101B). The first end of the baffle plate stack 130 may be close to the first end of the trap housing 103, and the second end of the baffle plate stack 130 may be close to the second end of the trap housing 103. The order of the baffle plates may include baffle plates 132 that are positioned alternately with complementary baffle plates 134, such that no two baffle plates 132 and no two complementary baffle plates 134 are adjacent in the order of the baffle plates.

[0057] The baffle plate stack 130 may include any suitable number of baffle plates of any design, order, and / or composition. For example, in various embodiments, the baffle plate stack 130 may include all of one type of baffle plate (e.g., all of the baffle plates 132, or all of the complementary baffle plates 134). In various embodiments, the baffle plate stack 130 may include any suitable mixture of baffle plate designs. For example, the baffle plate stack 130 may comprise baffle plates comprising two or more designs. In a further embodiment, the baffle plate stack 130 may comprise a first number of baffle plates 132 and a second number of complementary baffle plates 134. In various embodiments, the baffle plate stack 130 may comprise an equal number of baffle plates 132 and complementary baffle plates 134 (e.g., alternating in order of baffle plates between the first and second ends of the baffle plate stack 130). In various embodiments, the baffle plate stack 130 may have one more baffle plate 132 than complementary baffle plates 134, such that the order of baffle plates begins and ends with baffle plate 132 (i.e., baffle plate 132 is the baffle plate closest to the first and second ends of the trap housing 103).

[0058] In various embodiments, the baffle plate stack may comprise at least one end plate connected to each end of the baffle plate stack. For example, the first end plate 136A may be included within the baffle plate stack 130 as an end plate on the first end of the baffle plate stack 130, and the second end plate 136B may be included within the baffle plate stack 130 as an end plate on the second end of the baffle plate stack 130. The first end of the baffle plate stack 130 may be located in the internal space of the trap housing 103 adjacent to the first end of the trap housing 103, and the second end of the baffle plate stack 130 may be located in the internal space of the trap housing 103 adjacent to the second end of the trap housing 103. The end plates included within the baffle plate stack may include any suitable design, including a design different from the baffle plates and / or complementary baffle plates included within the baffle plate stack.

[0059] The arrangement of baffle plates in the baffle plate stack 130 may include any appropriate arrangement, including any appropriate spacing arrangement. Each baffle plate may be separated by a spacer 133. That is, the spacer 133 may be placed between all two plates in the baffle plate stack. The plates in the baffle plate stack may be spaced apart by any appropriate distance, for example, to achieve a desired pressure drop in the fluid flow through the trap housing 103. To reduce the amount of pressure drop through the trap housing 103, the number of baffle plates in the baffle plate stack may be reduced and / or the space between baffle plates may be increased. Conversely, to increase the amount of pressure drop through the trap housing 103, the number of baffle plates in the baffle plate stack may be increased and / or the space between baffle plates may be reduced.

[0060] Each baffle plate (for example, baffle plate 132 and complementary baffle plate 134 in the baffle plate stack 130) may have a shape complementary to the internal space of the trap housing 103, so that the baffle plate stack 130 and the baffle plates contained therein can be positioned within the internal space of the trap housing 103. In various embodiments, the outer edges of one or more plates contained within the baffle plate stack positioned within the internal space of the trap housing 103 may be positioned adjacent to and / or in contact with the inner wall of the trap housing 103. The outer edges of one or more plates may form at least a partial seal between each baffle plate and the inner wall of the trap housing 103. Thus, a limited amount of fluid flow (or no fluid flow) can pass between the outer edges of the plates in the baffle plate stack and the inner wall of the trap housing 103.

[0061] Referring to Figures 3A, 3B, and 4A, in various embodiments, a baffle plate (e.g., baffle plate 300A, which is an embodiment of baffle plate 132 in Figure 2) may include a top surface 322, a bottom surface 324, a baffle plate body between them, and a baffle plate outer edge 326. The baffle plate may include at least one opening, which is positioned through the baffle plate body between the top surface 322 and the bottom surface 324 and is defined by an opening edge. For example, baffle plate 300A may include a first opening 331 and a second opening 333. The openings included in the baffle plate may be any suitable opening arrangement, such as the opening arrangement of baffle plate 300A shown in Figure 3A. As an example of an opening arrangement of a baffle plate, the openings may be equidistant from other openings, such as an opening around the center of the baffle plate shape (e.g., the center of a circle). In various embodiments, the opening portion of the baffle plate may be included in the opening portion of the baffle plate. For example, the opening 325 of the baffle plate 300A may be located on the radially inner portion of the baffle plate, and the radially outer portion of the baffle plate 300A may not include an opening. The portion of the baffle plate without an opening may be the main body portion (for example, the main body portion 335 of the baffle plate 300A).

[0062] Continuing to refer to Figures 3A, 3B, and 4A, in various embodiments, a complementary baffle plate (for example, complementary baffle plate 300B, which is an embodiment of complementary baffle plate 134 in Figure 2) may include a complementary top surface 352, a complementary bottom surface 354, a complementary baffle plate body between them, and a complementary baffle plate outer edge 356. The complementary baffle plate may include at least one complementary opening, which is positioned through the complementary baffle plate body between the complementary baffle plate top surface 352 and the bottom surface 354 and is defined by a complementary opening edge. For example, complementary baffle plate 300B may include a first complementary opening 361 and a second complementary opening 363. The complementary openings contained within the complementary baffle plate may be any suitable complementary opening arrangement, such as the complementary opening arrangement of complementary baffle plate 300B shown in Figure 3B. As an example of a complementary opening arrangement of a complementary baffle plate, complementary openings may be equidistant from other complementary openings, such as complementary openings around the center of the complementary baffle plate shape (e.g., the center of a circle). In various embodiments, complementary openings of a complementary baffle plate may be included in the complementary opening portion of the complementary baffle plate. For example, the opening portion 355 of the complementary baffle plate 300B may be located on the radially outer portion of the complementary baffle plate, and the radially inner portion of the complementary baffle plate 300B may not contain complementary openings. The portion of the complementary baffle plate without complementary openings may be a complementary body portion (e.g., the complementary body portion 365 of the complementary baffle plate 300B).

[0063] A complementary baffle plate (e.g., complementary baffle plate 300B) may be complementary to a baffle plate (e.g., baffle plate 300A). This is because the complementary baffle plate may include complementary openings in the portion of the plate where the baffle plate does not have openings. In one embodiment, as discussed above, the complementary baffle plate 300B includes complementary openings 361 and 363 in its radially outer portion, while the baffle plate 300A does not include openings in its radially outer portion.

[0064] In various embodiments, the baffle plate stack may include a connecting rod that can connect baffle plates and / or complementary baffle plates. For example, the baffle plate stack 400B in Figure 4B may include a connecting rod 450. The connecting rod may include any suitable shape, length, and / or cross-sectional shape. In various embodiments, the connecting rod may be configured to extend between the first and second ends of the trap housing 103. The connecting rod may be configured to engage and / or connect with other components of the baffle plate stack, such as baffle plates, complementary baffle plates, end plates, spacers, and / or similar. In various embodiments, at least a portion of the connecting rod may include threading, such as one or more ends of the connecting rod 450, for engaging with fasteners for securing the baffle plates, complementary baffle plates, end plates, and / or spacers together.

[0065] For spatial and clarification purposes, the reference numbers and leads to specific baffle plate components and complementary baffle plate components in Figures 4A and 4B are included in the one or more exemplary baffle plates or complementary baffle plates illustrated therein. However, such labeled components may be applied to each of the similarly labeled baffle plates or complementary baffle plates as needed.

[0066] In various embodiments, each baffle plate may be provided with a connecting hole configured to receive and / or engage a connecting rod. For example, baffle plate 300A may be provided with a connecting hole 347 having a shape complementary to the cross-sectional shape of the connecting rod 450. Thus, the connecting rod 450 may be inserted through the connecting hole 347, and the connecting hole 347 may engage with the connecting rod 450.

[0067] In various embodiments, the connecting holes in the baffle plate may be non-circular in shape so that the connecting rod can engage with the connecting holes and maintain the baffle plate in a desired position (e.g., so that the baffle plate 300A does not rotate around the connecting rod 450 within the trap housing 103). In various embodiments, the connecting holes in the baffle plate may include a shape symmetrical with respect to only one line passing through the connecting hole (e.g., through the center of the connecting hole). Thus, the connecting holes can engage with the connecting rod only in a manner that positions the baffle plate in a desired orientation (self-aligning mechanism). In various embodiments, to assist in positioning the baffle plate in a desired orientation around the connecting rod, the connecting holes may include a reference point that is positioned in a specific orientation with respect to the opening of the baffle plate, or at a specific angle and / or at a specific position. For example, the connecting hole 347 may include a reference point 348 that can be oriented at a specific angle (e.g., so that the reference point 348 aligns with the first opening 331 and / or between the two second openings 333).

[0068] In various embodiments, each complementary baffle plate may be provided with a complementary connecting hole configured to receive and / or engage a connecting rod. For example, a complementary baffle plate 300B may be provided with a complementary connecting hole 367 having a complementary shape that is complementary to the cross-sectional shape of the connecting rod 450. Thus, the connecting rod 450 may be inserted through the complementary connecting hole 367, and the complementary connecting hole 367 may engage with the connecting rod 450.

[0069] In various embodiments, the complementary connecting holes of the complementary baffle plate may have a non-circular shape so that the connecting rod can engage with the complementary connecting holes and maintain the complementary baffle plate in a desired position (e.g., the complementary baffle plate 300B does not rotate around the connecting rod 450 within the trap housing 103). In various embodiments, the complementary connecting holes of the complementary baffle plate may include a complementary shape symmetrical with respect to only one line passing through the connecting hole (e.g., through the center of the complementary connecting hole). Thus, the complementary connecting holes can engage with the connecting rod only in a manner that positions the complementary baffle plate in a desired orientation (self-aligning mechanism). In various embodiments, to assist in positioning the complementary baffle plate in a desired orientation around the connecting rod, the complementary connecting holes may include a complementary reference point oriented at a specific complementary angle with respect to the complementary opening of the complementary baffle plate and / or at a specific position. For example, the complementary connecting hole 367 may include a complementary reference point 368 that can be oriented at a specific complementary angle (for example, so that the complementary reference point 368 aligns with the complementary second opening 363 and / or between the two complementary first openings 361).

[0070] In various embodiments, the baffle plates and complementary baffle plates may be arranged in such an orientation that the reference points of the connecting holes and the complementary reference points of the complementary connecting holes can align along the axis with the complementary body portion of adjacent complementary baffle plates in the order of the baffle plates (or radially close to the space between the complementary openings), and this axis extends along the order of the baffle plates. For example, the connecting hole 347 and the reference point 348 may be filled with a baffle plate 300A, and the complementary connecting hole 367 and the complementary reference point 368 may be filled with a complementary baffle plate 300B, so that the opening 333 is aligned along the axis with the space between the complementary openings 363, and the complementary opening 363 is aligned along the axis with the space between the openings 333.

[0071] In various embodiments, baffle plates and complementary baffle plates may be arranged in a specific baffle plate orientation to achieve a desired fluid flow through them and contaminant accumulation on them during the operation of the contaminant trapping system 100. In various embodiments, the rotational positions of the baffle plates and complementary baffle plates around the connecting rod in the baffle plate stack may be offset from each other (e.g., by the orientation of the connecting holes and reference points, and by the orientation of the complementary connecting holes and complementary reference points) so that the openings of the baffle plates are not in series with and / or aligned with the complementary openings of the complementary baffle plates along the axis extending through the baffle plate stack. Furthermore, the openings of the baffle plates may be in series with and / or aligned with at least a portion of the complementary body portion of an adjacent complementary baffle plate in the baffle plate stack (or a portion of the complementary baffle plate body, e.g., between the complementary openings) along the axis extending through the baffle plate stack. Furthermore, the complementary openings of the complementary baffle plates may be in series with and / or aligned with at least a portion of the body portion of adjacent baffle plates in the baffle plate stack (or a portion of the baffle plate body, e.g., between the openings) along an axis extending into the baffle plate stack. In other words, in various embodiments, the reference point of a connecting hole may be aligned with an opening of a baffle plate, the complementary reference point of a complementary connecting hole may be aligned with the space between the complementary body portion of a complementary baffle plate or the complementary opening, and / or the reference point of a connecting hole may be aligned with the space between the body portion of a baffle plate or the opening, and the complementary reference point of a complementary connecting hole may be aligned with the complementary opening of a complementary baffle plate. For example, reference point 348 may be aligned with the opening of baffle plate 300A, and complementary reference point 368 may be aligned with the complementary body portion 365 of complementary baffle plate 300B.Therefore, the openings 331 and 333 of the baffle plate 300A may be in series with and / or aligned with the complementary body portion 365 of the complementary baffle plate 300B and / or the space between the complementary openings 361 and / or 363, and the complementary openings 361 and / or 363 of the complementary baffle plate 300B may be in series with and / or aligned with the body portion 335 of the baffle plate 300A and / or the space between the openings 331 and / or 333.

[0072] Figures 5A and 5B depict baffle plates 500A and complementary baffle plates 500B according to an additional embodiment. Baffle plate 500A may include an opening 533 and a body portion 535. Baffle plate 500A may further include connecting holes 547 having a reference point 548. The reference point 548 may be oriented toward the opening 533. The opening 533 may be equidistant around the center of baffle plate 500A.

[0073] The complementary baffle plate 500B may include a complementary opening 563 and a complementary body portion 565. The complementary baffle plate 500B may further include a complementary connecting hole 567 having a complementary reference point 568. The complementary reference point 568 may be oriented toward the complementary body portion 565. The complementary body portion 565 may be equidistant around the center of the complementary baffle plate 500B.

[0074] A connecting rod that can connect baffle plate 500A and complementary baffle plate 500B may include a cross-sectional shape complementary to the connecting hole 547 and complementary connecting hole 567. That is, the connecting rod may include a body and projections complementary to the reference point 548 and complementary reference point 568. The shapes and orientations of the connecting hole 547 and complementary connecting hole 567, and the reference point 548 and complementary reference point 568, respectively, may offset the rotational positions of the baffle plate and complementary baffle plate around the connecting rod in the baffle plate stack relative to each other. Therefore, the opening 533 of the baffle plate 500A may be in series with and / or aligned with the space between the complementary body portion 565 of the complementary baffle plate 500B and / or the complementary opening 563 along the axis extending to the baffle plate stack, and the complementary opening 563 of the complementary baffle plate 500B may be in series with and / or aligned with the space between the body portion 535 of the baffle plate 500A and / or the opening 533 along the axis extending to the baffle plate stack.

[0075] Figures 6A and 6B depict baffle plates 600A and complementary baffle plates 600B according to further embodiments. Baffle plate 600A may include an opening 633 and a body portion 635. Baffle plate 600A may further include a connecting hole 647 having a reference point 648. The reference point 648 may be oriented toward the space between the body portion 635 and / or the opening 633. The opening 633 may be equidistant around the center of baffle plate 600A.

[0076] The complementary baffle plate 600B may include a complementary opening 663 and a complementary body portion 665. The complementary baffle plate 600B may further include a complementary connecting hole 667 having a complementary reference point 668. The complementary reference point 668 may be oriented toward the complementary opening 663. The complementary opening 663 may be equidistant around the center of the complementary baffle plate 600B.

[0077] A connecting rod that can connect baffle plate 600A and complementary baffle plate 600B may include a cross-sectional shape complementary to the connecting hole 647 and complementary connecting hole 667. That is, the connecting rod may include a body and projections complementary to the reference point 648 and complementary reference point 668. The shapes and orientations of the connecting hole 647 and complementary connecting hole 667, and the reference point 648 and complementary reference point 668, respectively, may offset the rotational positions of the baffle plate and complementary baffle plate around the connecting rod in the baffle plate stack relative to each other. The reference point 648 may be aligned with the space between the body portion 635 of baffle plate 600A and / or the opening 633, and the complementary reference point 668 may be aligned with the complementary opening 663 of complementary baffle plate 600B. Therefore, the opening 633 of the baffle plate 600A may be in series with and / or aligned with the space between the complementary body portion 665 of the complementary baffle plate 600B and / or the complementary opening 663 along the axis extending to the baffle plate stack, and the complementary opening 663 of the complementary baffle plate 600B may be in series with and / or aligned with the space between the body portion 635 of the baffle plate 600A and / or the opening 633 along the axis extending to the baffle plate stack.

[0078] Figures 7A and 7B depict baffle plates 700A and complementary baffle plates 700B according to various embodiments. Baffle plate 700A may include an opening 733 and a body portion 735. Baffle plate 700A may further include a connecting hole 747 having a reference point 748. The reference point 748 may be oriented toward the space between the body portion 735 and / or the opening 733. The opening 733 may be equidistant around the center of baffle plate 700A.

[0079] The complementary baffle plate 700B may include a complementary opening 763 and a complementary body portion 765. The complementary baffle plate 700B may further include a complementary connecting hole 767 having a complementary reference point 768. The complementary reference point 768 may be oriented toward the complementary opening 763. The complementary opening 763 may be equidistant around the center of the complementary baffle plate 700B.

[0080] A connecting rod that can connect baffle plate 700A and complementary baffle plate 700B may include a cross-sectional shape complementary to the connecting hole 747 and complementary connecting hole 767. That is, the connecting rod may include a body and projections complementary to the reference point 748 and complementary reference point 768. The shapes and orientations of the connecting hole 747 and complementary connecting hole 767, and the reference point 748 and complementary reference point 768, respectively, may offset the rotational positions of the baffle plate and complementary baffle plate around the connecting rod in the baffle plate stack relative to each other. The reference point 748 may be aligned with the space between the body portion 735 or the opening 733 of baffle plate 700A, and the complementary reference point 768 may be aligned with the complementary opening 763 of complementary baffle plate 700B. Therefore, the opening 733 of the baffle plate 700A may be in series with and / or aligned with the space between the complementary body portion 765 of the complementary baffle plate 700B and / or the complementary opening 763 along the axis extending to the baffle plate stack, and the complementary opening 763 of the complementary baffle plate 700B may be in series with and / or aligned with the space between the body portion 735 of the baffle plate 700A and / or the opening 733 along the axis extending to the baffle plate stack.

[0081] Either of the pairs of baffle plates and complementary baffle plates discussed herein (or the individual plates) may be placed in a baffle plate stack (for example, to replace baffle plate 300A and complementary baffle plate 300B in baffle plate stack 400B).

[0082] In various embodiments, spacers may be present between each baffle plate and complementary baffle plate in the baffle plate stack, configured to separate adjacent baffle plates and complementary baffle plates. For example, referring to Figure 4B, baffle plate 300A and complementary baffle plate 300B may be separated by spacer 303 (an embodiment of spacer 133 in Figure 2). Spacers may be placed between all plates in the baffle stack to achieve any desired spacing between two plates (e.g., between a baffle plate and a complementary baffle plate, between an end plate and a baffle plate and / or a complementary baffle plate, etc.). Such spacing can achieve a desired pressure drop in the trap housing 103 and in the fluid airflow flowing through the openings and complementary openings of the baffle plates and complementary baffle plates contained therein.

[0083] In various embodiments, the baffle plate stack may include at least one end plate positioned adjacent to the first and / or last baffle plate (or complementary baffle plate) in the order of the baffle plates. The end plate may have end plate connecting holes, similar to the connecting holes of the baffle plates and the complementary connecting holes of the complementary baffle plates, configured to engage with connecting rods. The end plate may further include at least one end plate opening positioned through the end plate body between the first and second surfaces of the end plate. For example, as shown in Figure 4A, the end plate 410 may include an end plate opening 412. The end plate opening may be positioned through the end plate in any suitable design or arrangement. In various embodiments, a portion of the end plate that does not include an opening may be an end plate body portion (e.g., end plate body portion 414).

[0084] In various embodiments, an end plate (e.g., end plate 410 in Figure 4A) may be configured to be positioned adjacent to the inner surface of the first or second end of the trap housing 103, such that the outer surface of the end plate may be adjacent to and / or in contact with the inner surface of the trap housing 103. Such a configuration may allow greater thermal conductance into the baffle plate stack from an external heat source, such as a heater jacket (e.g., heater jacket 800 shown in Figure 8) configured to be connected around the contaminant trap system 100 and / or the trap housing 103. In various embodiments, an end plate (e.g., end plate 420 in Figure 4B) may be configured to be spaced apart from the inner surface of the first or second end of the trap housing 103, such that a space exists between the outer surface of the end plate and the inner surface of the trap housing 103. The space between the inner surface of the trap housing 103 and the end plate may be achieved by the end plate including a flange (e.g., flange 424), or by a spacer positioned between the inner surface of the trap housing 103 and the end plate. Such a configuration can achieve the desired pressure drop in the fluid flow through the trap housing 103 and / or provide a larger area for contaminant accumulation within the trap housing 103 and the baffle plate stack (e.g., baffle plate stack 400B).

[0085] In various embodiments, the end plates may include end plate openings and / or end plate opening arrays, which align the end plate openings in series with and / or with openings arranged through adjacent plates in the baffle plate stack (e.g., along an axis extending into the baffle plate stack). For example, the end plate opening 422 of the end plate 420 may be in series with and / or with openings 331 and / or 333 of the baffle plate 300A along an axis extending into the baffle plate stack. This reduces the amount of contaminants that accumulate on the plates as the fluid entering and passing through the trap housing 103 and baffle plate stack 400B approaches the fluid inlet 101A, thereby reducing the risk of gaseous release of contaminants from the contaminant trap system 100 to upstream components such as the reaction chamber.

[0086] In various embodiments, the plates in the baffle stack, including the baffle plate, complementary baffle plate, and end plate, may be connected to a connecting rod and secured by fasteners. For example, fasteners 402 (e.g., screws, claws, clamps, etc.) may engage with the connecting rod 450 (e.g., via threading, force, and / or similar means) to secure the baffle plate 300A, complementary baffle plate 300B, end plate 420, and / or spacer 303.

[0087] In various embodiments, the fastener 402 may be positioned on and / or connected to a sleeve 407 which may be positioned on the end of the connecting rod 450. The sleeve 407 may be configured to provide a buffer between the fastener 402 and the adjacent surface of the connecting rod 450 to avoid galling.

[0088] In various embodiments, one or more plates in a baffle plate stack may include indicators to easily communicate to the user or assembler of the baffle plate stack which plate is placed in which baffle plate stack position. Therefore, in various embodiments, for example, baffle plate 300A may include an indicator 304 (e.g., a notch) to easily indicate that a notched or otherwise marked plate is baffle plate 300A. Thus, the user or assembler of the baffle plate stack can easily identify whether the correct order of baffle plates and complementary baffle plates has been achieved. Any of the plates in the baffle plate stack discussed herein may include indicators.

[0089] In various embodiments, the baffle plate stack may be palindrome such that the order of its components is the same as that of either end of the baffle plate stack. As shown in Figure 4B, the baffle plate stack 400B begins and ends with an end plate 420, and in between, an odd number of baffle plates 300A are alternated with an even number of complementary baffle plates 300B in the order of baffle plates, so that the order of baffle plates begins and ends with baffle plates 300A. Therefore, a person assembling the contaminant trap system can insert the baffle plate stack 400B into the trap housing 103 without worrying about whether the baffle plate stack 400B is upright or upside down.

[0090] The components of the systems discussed herein (e.g., trap housings, baffle plates, etc.) may be made of any suitable material such as metal or metal alloy (e.g., steel, aluminum, aluminum alloys, etc.), metal oxides, ceramic materials, and / or similar materials.

[0091] In various embodiments, any surface of the baffle plate stack or other contaminant trap system components that interact with the fluid flowing through the contaminant trap system may accept contaminant deposits (this is the objective of the methods and systems discussed herein, to remove contaminants from the fluid to avoid contamination of downstream reactor system components). Therefore, to increase the available surface area of ​​the components, the surfaces may be textured (e.g., by bead blasting). For example, the surfaces of the baffle plates and complementary baffle plates (including their outer edges), spacers, the inner walls of the trap housing, the edges of openings and complementary openings, and / or any other surfaces may be textured.

[0092] In various embodiments, in order to increase the usable surface area of ​​the baffle plate or other contaminant trap system components, such components may include (i.e., at least partially include) a sintered material (e.g., the sintered material 350 of the baffle plate 300A shown in Figure 3A). The sintered material may include any suitable material, such as metals, metal alloys, metal oxides, ceramic materials, and / or similar materials. For example, the sintered material may include stainless steel, aluminum, aluminum alloys, aluminum oxide, boron nitride, and / or similar materials.

[0093] To form a contaminant trap system component containing sintered material, powdered material (including any of the materials discussed herein, such as metals, metal alloys, metal oxides, and ceramics) may be pressed together to form an object (e.g., a sheet or block of sintered material). The powdered material may be pressed for any appropriate period of time under any appropriate conditions, including any appropriate temperature or pressure, to achieve an object containing sintered material. The object containing sintered material may be formed into any desired shape to form a contaminant trap system component. For example, the object containing sintered material may be cut (e.g., by machining, laser cutting, and / or similar) to form a desired shape such as a baffle plate having any desired configuration (e.g., a baffle plate or a complementary baffle plate, any of the configurations discussed herein).

[0094] In various embodiments, the powder used to form the components of the sintered material contaminant trap system may include any appropriate size. For example, the sintered material may be formed from particles ranging in size from 0.2 to 100 grade filter media ("filter media grade," or other similar terms that refer to particle size in micrometers), 0.2 to 5 grade filter media, 0.5 to 5 grade filter media, 5 to 100 grade filter media, 5 to 20 grade filter media, or 20 to 100 grade filter media. Referring to Figure 13, for more tightly packed or densely packed sintered materials, relatively small powder materials may be used, such as sintered material 1302 consisting of grade 0.2 filter media. For relatively loosely packed or low-density packed sintered materials, relatively large powder materials may be used, such as sintered material 1310 containing grade 100 filter media. Sintered materials 1304, 1306, and 1308 represent other powder sizes for producing sintered materials, 0.5, 5, and 20 grade filter media, respectively. As shown in Figure 13, the spaces between the sintered materials (i.e., the pores within the sintered filter material) provide significant space for fluid to move within, and the relatively large surface area of ​​the sintered material provides a vast number of sites where contaminants can accumulate and be trapped. In various embodiments, the fluid may pass at least partially through the sintered material of the trap contaminant system component. In various embodiments, a trap contaminant system component containing sintered material may have a surface area more than 1000 times larger than that of a trap contaminant system component containing solid material (i.e., without the porous structure of sintered material). Thus, a trap contaminant system component containing sintered material may be far more effective and efficient at trapping contaminants, allowing for longer use of the trap contaminant system component and potentially enabling less frequent cleaning and / or replacement.

[0095] In various embodiments, the components of the contaminant trap system 100 may be fastened and / or sealed together by a fastening ring 144. The fastening ring 144 may be positioned around the upper housing 103A and / or the lower housing 103B and may be configured to fasten together to hold the components of the contaminant trap system 100 together.

[0096] In various embodiments, the trap structure included within the contaminant trap system may include structures for capturing contaminants other than the baffle plate stack discussed above. For example, referring to Figures 10A and 10B, the contaminant trap system may include a trap structure 1000 located within a trap housing (e.g., trap housing 103 shown in Figure 2) having a plurality of rods 1055. The rods 1055 may be arranged in an array 1050 to direct the fluid flowing between the rods 1055 along a desired path. The rods 1055 may extend between components that can provide stability to the rods 1055 within the trap structure 1000. For example, the rods 1055 may be connected to a baffle plate 1010 and a base plate 1020, and / or extend between the baffle plate 1010 and the base plate 1020. The rod 1055 may be substantially perpendicular to the baffle plate 1010 and / or the base plate 1020, and / or substantially parallel to the axis extending between the fluid inlet 101A and the fluid outlet 101B of the trap housing 103 (shown in Figure 2) (wherein used in this context, the term “substantially” means plus or minus 20 degrees from perpendicular or parallel, respectively). In various embodiments, the rod within the trap structure may be integral with the baffle plate and / or the base plate or monolithic.

[0097] In various embodiments, as shown in Figures 10A and 10B, the baffle plate 1010 may include recesses 1014 located within the inner surface 1011 of the baffle plate 1010. The recesses 1014 may have shapes complementary to the cross-sectional shape of each rod 1055. The first end 1052 of each rod 1055 may be located within the respective recess 1014, thereby connecting the rods 1055 to the baffle plate 1010. Similarly, in various embodiments, the base plate 1020 may include recesses 1024 located within the inner surface 1021 of the base plate 1020 (the inner surface 1021 of the base plate 1020 may face the baffle plate 1010). The recesses 1024 may have shapes complementary to the cross-sectional shape of each rod 1055. The second end 1054 of each rod 1055 may be located within the respective recess 1024, thereby connecting the rods 1055 to the base plate 1020. A rod in a trap structure may be connected to the baffle plate and / or base plate by a tight fit within the respective recesses of the baffle plate and / or base plate, with the rod remaining in the recesses of the base plate, baffle plate, and rod end, and the rod may be screwed into the base plate and / or baffle plate, etc.

[0098] In various embodiments, the rod may be connected to the baffle plate and / or base plate by any suitable method, such as welding, fastening between the baffle plate and the base plate, adhesive, etc., regardless of whether the baffle plate and / or base plate have recesses configured to receive the rod.

[0099] In various embodiments, the trap structure may include a central support (e.g., a central support 1025) which can be configured to connect two or more components of the trap structure. For example, the central support 1025 of the trap structure 1000 may connect a baffle plate 1010 to a base plate 1020 and position a rod 1055 between them. The central support 1025 may be positioned through support holes 1016 in the baffle plate 1010, which are configured to receive through the central support 1025. The shape of the support holes 1016 may be complementary to the cross-sectional shape of the central support 1025. The central support 1025 may be connected to and / or fixed to the baffle plate 1010 by fasteners (e.g., nuts 1002 and / or seals 1004) positioned around the central support 1025 and in contact with the baffle plate 1010. In various embodiments, the fasteners may include threads complementary to the threads on the central support, such that the fasteners are threaded to the central support and then tightened toward the base plate to press the baffle plate and base plate together. Thus, in various embodiments, the rod 1055 positioned between the baffle plate 1010 and the base plate 1020 can be held in place by forces from the central support 1025 and the fastener 1002 between the baffle plate 1010 and the base plate 1020. The central support may be a separate component, or it may be integrated with or monolithic with the baffle plate and / or base plate of the trap structure.

[0100] In various embodiments, the rods 1055 may be arranged around (i.e., around) a central region of the base plate (e.g., at or proximal to the central support 1025 of the base plate 1020). The central region may not have any rods at all. The central region may have one or more flow holes (e.g., flow holes 1027) arranged through the base plate, through which fluids flowing through the contaminant trap system and trap structure can flow. Thus, fluids flowing through the trap housing (including the lower housing 103B) by an airflow through the trap housing (e.g., caused by vacuum pressure from the vacuum pump 28 shown in Figure 1) may be required to flow through the array 1050 of rods 1055, in contact with the rods 1055, before exiting the trap structure 1000 through the flow holes 1027 and exiting the trap housing through the fluid outlet 101B of the trap housing. The flow holes may be aligned with the fluid outlet 101B and / or offset.

[0101] In various embodiments, the rods within the trap structure may be arranged in any suitable arrangement. For example, the rods 1055 may be spaced apart (i.e., not in contact with each other) or in contact with each other so that the fluid can flow between the rods 1055. The spacing of the rods may provide a spiral path for the fluid flowing through the trap structure, thus increasing the likelihood that the fluid will come into contact with more surfaces and that contaminants in the fluid will accumulate on these surfaces within the trap. The rods may include any suitable shape or length. For example, the rods may have a circular cross-sectional shape (as shown in Figures 10A and 10B), or the rods may have, for example, a hexagonal, octagonal, triangular, or square cross-sectional shape, or any other suitable cross-sectional shape. In another embodiment, the rods may have a cross-sectional length of about 2 millimeters (mm) (e.g., the diameter of a circle) (wherein used in this context, "about" means plus or minus 0.5 mm). In another embodiment, the rod may have a length of about 20 centimeters (cm) (for example, the distance extending between the baffle plate and the base plate) (wherein used in this context, "about" means plus or minus 5 cm). The rod may have a high surface area-to-volume ratio, for example, at least 50:1, at least 100:1, at least 150:1, or at least 200:1. In various embodiments, the rod may include a textured outer surface threaded along the rod, or any other structure configured to increase the outer surface area of ​​the rod for the accumulation of contaminants thereon.

[0102] The rod of the trap structure may include any suitable material such as steel, aluminum, or any other metal or alloy thereof, ceramic material, or similar. In various embodiments, the rod may comprise a sintered material, as discussed herein.

[0103] In various embodiments, the base plate of the trap structure (e.g., base plate 1020) may be located within the trap housing and support other components of the trap structure. In various embodiments, the outer side of the base plate 1020 (opposite the inner surface 1021) may be spaced apart from the bottom surface of the trap housing (housing bottom surface 102). To support the base plate spaced apart from the bottom surface of the trap housing, the trap housing may include a support (e.g., support 1006) projecting from the trap housing to hold the base plate in place. For example, the support 1006 may project from the inner wall of the trap housing to support the base plate 1020 in place, spaced apart from the bottom surface 102 of the trap housing. In various embodiments, the support may project from another surface of the trap housing, for example from the bottom surface, to hold the base plate in place. In various embodiments, the outer surface of the base plate may be positioned in contact with or adjacent to the bottom surface of the trap housing.

[0104] In various embodiments, a baffle plate of the trap structure (e.g., baffle plate 1010) can cause the fluid flow entering the trap housing to take a specific path (e.g., a path that increases the fluid flow around and in contact with the rod 1055, and / or increases the removal of contaminants from the fluid). The baffle plate 1010 can reduce or prevent the fluid flow moving around the first end 1052 of the rod 1055. That is, the baffle plate 1010 can form at least a partial seal between the baffle plate 1010 and the first end 1052 of the rod 1055. In various embodiments, the shape of the baffle plate 1010 may be smaller than the cross-sectional shape of the trap housing so that the baffle plate edge 1012 does not contact the inner wall of the trap housing. Therefore, a space may exist between the baffle plate edge and the inner wall of the trap housing, and / or between the rod 1055 and the inner wall of the trap housing (for example, a space 1075 between the inner wall of the lower housing 103B and the baffle plate edge 1012 and / or the rod 1055). The baffle plate 1010 may be configured to direct at least a portion of the fluid flow in the trap housing towards the flow hole 1027, around the baffle plate edge 1012, toward and through the arrangement of rods 1050 (for example, through space 1075).

[0105] In various embodiments, the base plate may form at least a partial seal with the inner wall of the trap housing. For example, the outer edge of the base plate 1020 may be positioned to strike or be adjacent to the inner wall of the lower housing 103B such that little or no fluid passes between them. Thus, the fluid flowing through the trap structure 1000 may be directed around the baffle plate 1010 (and / or through the baffle plate including holes positioned through it), flow through the array of rods 1055 1050, and exit the trap structure 1000 through the flow holes 1027. Consequently, contaminants in the fluid may accumulate on the surfaces of the trap structure (e.g., the outer surface 1053 of the rods 1055, the baffle plate 1010, the base plate 1020, etc.) with little or no fluid flow between the base plate 1020 and the inner wall of the trap housing.

[0106] The arrangement of the components of the trap structure 1000 may allow for greater thermal conductance through it. Heating the trap structure may allow for an increased growth rate of the contaminant film on the trap system components, as well as improvements in the properties of the captured contaminant film, such as increased density and reduced flaking. Thermal energy can easily move through the base plate, rods, and / or baffle plates, whether the thermal energy is supplied externally and / or internally. In various embodiments, the trap structure 1000 may be heated externally, for example, by a heater jacket (e.g., heater jacket 800 shown in Figure 8) connected around the contaminant trap system and / or trap housing, which includes the trap structure 1000. In various embodiments, the trap structure 1000 may be heated internally, for example, by a heater (e.g., heater 1026 shown in Figure 10B) located within or connected to the components of the trap structure 1000 (e.g., in the central support 1025 including the base plate 1020 and / or heater 1026). In particular, in embodiments in which the rod 1055 is made of a metallic material such as steel or aluminum (or an alloy thereof), thermal energy easily moves between the base plate 1020 (which receives thermal energy from the heater 1026 and / or from the heater jacket through the trap housing), the rod 1055, and the baffle plate 1010.

[0107] In various embodiments, trap structures such as trap structure 1000, which includes a rod 1055 positioned between a baffle plate 1010 and a base plate 1020, may also have the advantages of being reusable and easy to maintain, in addition to providing a large surface area on which contaminants can accumulate. Depending on the trap structure 1000 being used and / or saturated with contaminants, the components of the trap structure 1000 (e.g., the rod 1055, the baffle plate 1010, and the base plate 1020) may be disassembled (and / or removed from the trap housing), easily cleaned, and reassembled for subsequent use. The trap structure may be disassembled, for example, by separating the fastener 1002 from the central support 1025. If one or more components are damaged or require replacement, such replacement can be easily completed. Other existing components for trap structures are single-use items and / or difficult to clean.

[0108] In various embodiments, a trap structure contained within a contaminant trap system may comprise a plurality of tubes through which fluid can flow. Each tube may comprise a bore (e.g., bore 1157) that runs through the entire length of the tube, thereby allowing contaminants to accumulate on the inner and outer surfaces of the tube. For example, referring to Figure 11, a trap structure 1100 may comprise an array 1150 of tubes 1155. The trap structure 1100 may be positioned in a trap housing (e.g., trap housing 103 shown in Figure 2) such that the tubes 1155 extend at least partially between the top and bottom surfaces of the trap housing (e.g., along the direction of fluid flow through the trap housing and / or substantially parallel to an axis extending between the fluid inlet 101A and the fluid outlet 101B of the trap housing 103 (shown in Figure 2) (in this context, the term “substantially” means plus or minus 20 degrees from parallel)). The arrangement of pipes in a trap structure may be complementary to the shape of the trap housing such that pipes on the outer periphery of the pipe arrangement may abut against or be positioned adjacent to the inner wall of the trap housing. For example, the arrangement 1150 of pipes 1155 may be configured to be positioned in a hexagonal trap housing. In various embodiments, the pipes of a pipe arrangement for a trap structure may comprise a circular arrangement configured to be positioned within a circular trap housing (for example, within the lower trap housing 103B shown in Figure 10A).

[0109] The tubes may be arranged relative to each other in any suitable manner. The tube arrangement may be configured to limit or minimize the space between the tubes. For example, as shown in Figure 11, according to various embodiments, the tubes 1155 may be arranged in a hexagon, so that each tube 1155 (excluding the outer tube) may be surrounded by six tubes 1155. Thus, each tube 1155 (excluding the outer tube) may abut or be in contact with the other six tubes 1155. This hexagonal packing allows for uniform packing of the tubes 1155, limits the space between them, and provides high-density packing by the circular tubes. Such high-density packing prevents the tubes from shifting relative to each other. The hexagonal packing of the tubes also forms a triangular space with a concave surface (e.g., space 1159) between the contacting tubes. These spaces between the tubes may provide additional space for fluid to pass through and additional surface area (outside the tubes) where contaminants may accumulate. The hexagonal packing of the tubes does not necessarily apply to the outer shape of the tube arrangement and may be implemented in tube arrangements having a circular outer shape.

[0110] The tubes of the trap structure may include any suitable shape or dimensions. In various embodiments, the tubes may include an outer shape with a circular cross-section (e.g., tube 1155) or any other suitable cross-sectional shape configured to allow a desired arrangement of tubes. In various embodiments, the bore of the tube may include a circular cross-sectional shape (e.g., bore 1157) or any other suitable cross-sectional bore shape. In various embodiments, the tubes may have a cross-sectional length of approximately 2 millimeters (mm) (e.g., the outer diameter of tube 1155). In various embodiments, the tubes may have an inner diameter of approximately 1 mm (e.g., the length across the bore, such as the diameter of bore 1157) (wherein used in this context, "approximately" means plus or minus 0.5 mm). In various embodiments, the tubes may have a length of approximately 20 centimeters (cm) (wherein used in this context, "approximately" means plus or minus 5 cm). The tubes may have a high surface area-to-volume ratio, for example, at least 50:1, at least 100:1, at least 150:1, or at least 200:1. For example, a hexagonal packing array of tubes approximately 20 cm long, filling a trap housing with an outer diameter of about 2 mm and an inner diameter of 1 mm, and with a diameter of about 19 cm, provides a significant surface area for receiving contaminant deposits. In such embodiments, the surface area of ​​the tube bores provides approximately 6 square meters of capture surface, and the gaps between the tubes (e.g., space 1159) provide a capture area slightly less than 6 square meters, resulting in a total surface area of ​​about 12 square meters. Assuming that a typical deposition process in a reactor generates 3 square micrometers of contaminant deposits within the trap, the surface area provided by a trap structure with the considered array and dimensions of tubes allows the trap structure to be used for numerous deposition cycles before maintenance or replacement is required.

[0111] In various embodiments, the outer and / or inner surfaces of the pipe may include a textured outer surface threaded along the outer and / or inner surface, or any other structure configured to increase the outer surface area of ​​the pipe for the accumulation of contaminants thereon.

[0112] The tubes of the trap structure may include any suitable material such as steel, aluminum, or any other metal or its alloy, ceramic material, or similar. In various embodiments, the tubes may include sintered material, as discussed herein.

[0113] In various embodiments, the tubes may be connected within the trap housing by any suitable method, such as adhesive, welding, and / or tight fitting. As shown in Figure 11, the tubes 1155 are connected together to maintain the array 1150 by a tensioning device 1188 which may be a clamping ring (similar to clamping ring 114), a belt, an elastic band, or similar.

[0114] In various embodiments, the array 1150 of tubes 1155 may include at least one support 1125. The support 1125 may be a rod or other structure projecting outward from at least the bottom of the array 1150 (i.e., the support 1125 extends closer to the bottom surface of the trap housing than the tubes 1155). In various embodiments, the array of tubes may comprise a plurality of supports (e.g., three supports 1125 as shown in Figure 11). The support 1125 may be configured to support the array 1150 of tubes 1155 such that there is a space between the bottom of the tubes 1155 and the bottom surface of the trap housing (e.g., the bottom surface 102 when the trap structure 1100 is located in the lower trap housing 103B, as shown in Figure 10A). Similarly, when located within a trap housing, there may be a space between the top of the tubes 1155 and the top surface of the trap housing. For example, the tube array 1150 may simply remain in a position within the trap housing such that it creates a space between the top of the tube 1155 and the top surface of the trap housing (for example, due to the way the upper and lower housings of the trap housing fit together). In another embodiment, the support 1125 may also project outward from the top of the array 1150 (i.e., the support 1125 extends closer to the top surface of the trap housing than the tube 1155). Thus, when the lid or upper housing of the trap housing is positioned on the trap structure, the lid or upper housing will abut and remain on the tip of the support 125, thereby creating a space between the top surface of the trap housing and the top of the tube 1155. This space allows fluid to flow into and disperse within the trap housing (for example, through the fluid inlet 101A shown in Figure 2), utilizing more tubes 1155 to capture contaminants.

[0115] In various embodiments, structures such as baffle plates having holes, showerheads, or similar structures can be positioned above the pipe array of the trap housing in a desired manner to disperse the fluid flowing into the pipe array of the trap housing and increase the utilization of the surface area provided by the pipes.

[0116] The arrangement of the components of the trap structure 1100 may allow for greater thermal conductance through it. Heating the trap structure may allow for an increased growth rate of the contaminant film on the trap system components, as well as improvements in the properties of the captured contaminant film, such as increased density and reduced flaking. Thermal energy can easily move through the trap housing, support 1125, and / or tubes, whether the thermal energy is supplied externally and / or internally. In various embodiments, the trap structure 1100 may be heated externally, for example, by a heater jacket (e.g., heater jacket 800 shown in Figure 8) connected around the contaminant trap system and / or trap housing, including the trap structure 1100. In various embodiments, the trap structure 1100 may be heated internally, for example, by heaters placed in the arrangement 1150 of tubes 1155. For example, tubes in the tube arrangement (e.g., tubes in or near the center of the arrangement) may be replaced by heaters, and / or the support 125 may be a heater or include a heater. In particular, in embodiments in which the tube 1155 includes a metallic material such as steel or aluminum (or an alloy thereof), thermal energy easily moves through the tube 1155 and / or the support 1125 (for example, when thermal energy is received from the heater jacket through the trap housing or from the internal heater).

[0117] In various embodiments, trap structures such as the trap structure 1100 comprising the tube 1155 may also have the advantages of being reusable and easy to maintain, in addition to providing a large surface area on which contaminants can accumulate. Depending on the trap structure 1100 being used and / or saturated with contaminants, the components of the trap structure 1100 (e.g., the tube 1155, the support 1125, the tensioning device 1188) may be easily removed from the trap housing and / or disassembled, cleaned, and reassembled for subsequent use. The trap structure may be disassembled, for example, by separating the tensioning device 1188 from the tube 1155. If one or more components are damaged or require replacement, such replacement can be easily completed.

[0118] In various embodiments, the trap structure contained within the contaminant trap system may include a corrugated sheet through which a fluid can flow and through which contaminants can be deposited. Referring to Figure 12, according to various embodiments, the corrugated trap structure 1200 may include a corrugated sheet 1250 connected to a non-corrugated sheet 1280. The space 1260 between the corrugated sheet 1250 and the non-corrugated sheet 1280 may allow a fluid to flow through it and allow contaminants to deposit on the surface area provided in the space 1260 by the sheets. The corrugated trap structure 1200 may be placed within a trap housing (e.g., trap housing 103 shown in Figure 2) such that the space 1260 extends at least partially between the top and bottom surfaces of the trap housing (e.g., along the direction of fluid flow through the trap housing). The sheets 1250 and 1280 may be helical in any suitable shape (e.g., circular, or square, triangular, rectangular, hexagonal, or octagonal shapes as shown in Figure 12). The outer shape of the helical sheet may be complementary to the shape of the trap housing in which the trap structure is placed. For example, the corrugated trap structure 1200 may be configured to be placed in a circular trap housing, such as the trap housing 103 shown in Figure 2. Thus, the corrugated sheet or non-corrugated sheet may be in contact with or adjacent to the inner wall of the trap housing. The corrugated sheet and non-corrugated sheet may be helicalized or arranged such that the central gap 1205 is reduced or minimized so that the fluid flowing through this central gap 1205 flows through the space 1260, in contrast to other paths through the corrugated trap structure 1200.

[0119] In various embodiments, the corrugated trap structure 1200 may include at least one support (e.g., support 1125 in Figure 11). The support may be a rod or other structure projecting outward from the bottom and / or top of the corrugated trap structure 1200. Such a support may be configured to support the corrugated trap structure 1200 such that there is a space between the bottom and / or top of the corrugated trap structure 1200 and the bottom surface and / or top surface of the trap housing. Thus, a space may be created between the bottom of the corrugated trap structure 1200 and the bottom surface of the trap housing, and / or between the top of the corrugated trap structure 1200 and the top surface of the trap housing. These spaces allow the fluid flowing into the trap housing (e.g., through the fluid inlet 101A shown in Figure 2) to disperse and utilize (i.e., flow in) more space 1260 to capture contaminants.

[0120] The corrugated trap structure may include any suitable material such as steel, aluminum, or any other metal or alloy thereof, ceramic material, or similar. In various embodiments, the corrugated trap structure may include sintered material, as discussed herein.

[0121] In various embodiments, structures such as baffle plates having holes, showerheads, or similar structures can be positioned above the corrugated trap structure of the trap housing in a desired manner to disperse the fluid flowing into the corrugated trap structure of the trap housing and increase the utilization of the surface area provided for contaminant accumulation.

[0122] The arrangement of the components of the corrugated trap structure 1200 may allow for greater thermal conductance through it. Heating the trap structure may allow for an increased growth rate of the contaminant film on the trap system components, as well as improvements in the properties of the captured contaminant film, such as increased density and reduced flaking. Thermal energy can easily move through the corrugated trap structure 1200, whether the thermal energy is supplied externally and / or internally. In various embodiments, the corrugated trap structure 1200 may be heated externally, for example, by a heater jacket (e.g., heater jacket 800 shown in Figure 8) connected around the contaminant trap system and / or trap housing, including the corrugated trap structure 1200. In various embodiments, the corrugated trap structure 1200 may be heated internally, for example, by a heater positioned through the void 1205, or by a heater contained within a support positioned through the void 1205. In particular, in embodiments in which the corrugated trap structure 1200 includes a metallic material such as steel or aluminum (or an alloy thereof), thermal energy easily moves through the corrugated trap structure 1200 (for example, when thermal energy is received from the heater jacket or from the internal heater through the trap housing).

[0123] In various embodiments, the contaminant trap system and its components may not contain any adhesives or other connecting materials to link any of the components. The absence of adhesives, epoxy, or other connecting materials reduces the risk of such connecting materials releasing gases and migrating into the reaction chamber where they act as contaminants. Furthermore, the absence of such connecting materials may mean that the components of the system discussed herein are not affected by degradation at high temperatures, e.g., above 120°C. Therefore, the contaminant trap system (e.g., contaminant trap system 100 in Figure 2) and the trap structures contained therein can be positioned closer to the reaction chamber of the reactor system (e.g., reaction chamber 4 of reactor system 50 in Figure 1) compared to a contaminant trap system containing connecting materials. Thus, a reactor system having a contaminant trap system according to the embodiments discussed herein may be more compact and / or have a more feasible configuration and special arrangement.

[0124] The contaminant trapping systems discussed herein may be configured to increase the surface area, thereby allowing more opportunities for the fluid to flow through and come into contact with that surface area, and for contaminants to deposit on that surface area. Thus, for example, as discussed herein, the openings of the baffle plates may not be aligned with and / or in series with the complementary openings of adjacent complementary baffle plates in the baffle plate stack. In another embodiment, the rods (e.g., rod 1055) may be arranged such that there is a nonlinear path from the outer periphery of the rod array to a flow hole (e.g., flow hole 1027) that allows the fluid to exit the trapping structure. In yet another embodiment, a tube (e.g., tube 1155) and / or space (e.g., space 1260) passing through a corrugated trapping structure (e.g., corrugated trapping structure 1200) may allow contaminants in the fluid to deposit on the surface within the tube or path passing through the corrugated trapping structure.

[0125] Figure 9 shows a method 900 for flowing a fluid through a contaminant trap system of a reaction system according to various embodiments. With further reference to Figures 2 and 4B, the fluid may flow from a reaction chamber (e.g., reaction chamber 4 in Figure 1) to a contaminant trap system (e.g., contaminant trap system 100 in Figure 2) (step 902). The contaminant trap system 100 may include a fluid inlet 101A and a fluid outlet 101B of a trap housing 103. The fluid may flow through the fluid inlet 101A into the contaminant trap system 100. The fluid may contain materials (e.g., contaminants) that the contaminant trap system is configured to remove from the fluid.

[0126] In various embodiments, the fluid may flow through a contaminant trap structure contained within the contaminant trap system (step 904). The trap structure may include any suitable structural arrangement for collecting contaminants from the fluid, such as the structural arrangements discussed herein. In various embodiments, the trap structure within the contaminant trap system 100 may comprise a baffle plate stack 400B (e.g., the example of the baffle plate stack 130 in Figure 2). Thus, the fluid may flow through a plurality of complementary baffle plates 300B and a plurality of baffle plates 300A that are alternately positioned in the order of the baffle plates. The fluid may also flow through at least one end plate (e.g., end plate 420) contained within the baffle plate stack on any end of the baffle plate stack. In various embodiments, the fluid may flow through a trap structure comprising rods, tubes, and / or corrugated and non-corrugated sheets, as discussed herein.

[0127] To flow through the baffle plate stack 400B, the fluid may flow through the first end plate 420 via the end plate opening 422 and / or around the outer edge of the end plate 420. As the fluid flows through the order of the baffle plates in the baffle plate stack 400B, it may come into contact with the top surface 322 and bottom surface 324 of baffle plate 300A, the complementary top surface 352 and complementary bottom surface 354 of complementary baffle plate 300B, and pass through the openings 331 and 333 of baffle plate 300A and the complementary openings 361 and 363 of complementary baffle plate 300B. The openings 331 and 333 of baffle plate 300A may be positioned through baffle plate 300A and may be aligned with complementary baffle plate 300B such that the openings 331 and 333 may be aligned with complementary body portion 365 of complementary baffle plate 300B. Therefore, in response to flowing through the openings 331 and 333 of the baffle plate 300A, the fluid may come into contact with the complementary body portion 365 of the subsequent complementary baffle plate 300B within the baffle plate stack 400B. In response to contact with the complementary body portion 365 of the next complementary baffle plate 300B, the fluid may flow toward the fluid outlet 101B and through the complementary openings 361 and 363 of such complementary baffle plates 300B. The complementary openings 361 and 363 of the complementary baffle plates 300B may be positioned through the complementary baffle plate 300B and may be aligned with the baffle plate 300A such that the complementary openings 361 and 363 may be aligned with the body portion 335 of the baffle plate 300A. Therefore, in response to flowing through the complementary openings 361 and 363 of the complementary baffle plate 300B, the fluid may come into contact with the body portion 335 of the subsequent baffle plate 300A within the baffle plate stack 400B. In response to contact with the body portion 335 of the next baffle plate 300A, the fluid may flow toward the fluid outlet 101B and through the openings 331 and 333 of these baffle plates 300A.

[0128] The fluid flow follows this flow pattern through the order of the baffle plates of baffle plate 300A and complementary baffle plate 300B until the fluid passes through the final plate in the order of the baffle plates. The fluid may flow through the end plates 420 on the second end of the baffle plate stack 400B, contact the surface of these end plates 420, and flow through the end plate openings 422. While flowing through the baffle plate stack 400B, the fluid may further flow between the outer edges of baffle plate 300A and complementary baffle plate 300B and the inner wall surface of the outer wall 105, interacting with and contacting those surfaces.

[0129] In various embodiments, the fluid may flow into the flow space 1075 while in contact with the baffle plate 1010 in order to flow through a trap structure having rods (e.g., trap structure 1000). The fluid may then move through the array of rods 1055 1050 and come into contact with the rods 1055 before exiting the trap structure 1000 through the flow holes 1027.

[0130] In various embodiments, the fluid may flow through the pipe 1155 before leaving the trap structure 1100 in order to flow through the trap structure having a pipe (e.g., trap structure 1100).

[0131] In various embodiments, in order to flow through the corrugated trap structure (e.g., corrugated trap structure 1200), the fluid may flow through the space 1260 before leaving the corrugated trap structure 1200.

[0132] In response to a fluid coming into contact with the aforementioned surfaces (e.g., baffle plates, complementary baffle plates, end plates, inner wall surfaces of outer wall 105, rods 1055, pipes 1155, corrugated and non-corrugated sheets 1250 and 1280, etc.), contaminants contained in the fluid may be deposited or collected from the fluid onto the surfaces of the contaminant trap system and each trap structure located therein (step 906). The surfaces in the contaminant trap system, and their relative positions to each other, provide an increased surface area on which such contaminant deposition can occur. Parts of the surfaces may include texturing to provide further usable surface area.

[0133] In various embodiments, the fluid may flow through the fluid outlet 101B and exit the contaminant trapping system (step 908).

[0134] While exemplary embodiments of the Disclosure are described herein, it should be understood that the Disclosure is not limited thereto. For example, reactors and contaminant trapping systems are described in relation to various specific configurations, but the Disclosure is not necessarily limited to these examples. Various modifications, variations, and improvements can be made to the systems and methods described herein without departing from the spirit and scope of the Disclosure.

[0135] The subject matter of this disclosure includes all novel and non-obvious combinations and partial combinations thereof of the various systems, components, and configurations disclosed herein, as well as other features, functions, operations, and / or characteristics, and any and all equivalents thereof. [Explanation of Symbols]

[0136] 4. Reaction Chamber 6 Susceptors 8. Fluid distribution system 10. Source of reactants 12. Source of reactants 14. Purge gas source Lines 16, 18, and 20 22, 24, 26 valves or controllers 28 Vacuum pump 30 Base material 40. Contaminant trapping systems 100 Contaminant Trap Systems 101A Fluid inlet 101B Fluid outlet 102 Bottom surface 103 Trap Housing 103A Upper Housing 103B Lower Housing 105 Exterior Wall 125 Support 130 Baffle Plate Stack 132 Baffle Plate 133 Spacer 134 Complementary baffle plate 136A First end plate 136B Second end plate 144 Tightening ring 300A Baffle Plate 300B Complementary Baffle Plate 303 Spacer 304 Indicator 322 Top surface 324 Bottom surface 325 Opening part 326 Baffle plate outer edge 331 Opening 333 Opening 335 Main body part 347 Connection hole 348 Reference point 352 Complementary apical surfaces 354 Complementary bottom surface 355 Opening part 356 Complementary baffle plate outer edge 361 Complementary openings 363 Complementary openings 365 Complementary main body parts 367 Complementary connecting holes 368 Complementary reference points 400B Baffle Plate Stack 402 Fasteners 407 Sleeves 410 End Plate 412 End plate opening 414 End plate main body 420 End Plate 422 End plate opening 424 Flange 450 connecting rods 500A Baffle Plate 500B Complementary Baffle Plate 533 Opening 535 Main body part 547 Connection hole 548 Reference point 563 Complementary openings 565 Complementary main body 567 Complementary connecting holes 568 Complementary reference points 600A Baffle Plate 600B Complementary Baffle Plate 633 Opening 635 Main body part 647 Connection hole 648 Reference point 663 Complementary openings 665 Complementary main body 667 Complementary connecting holes 668 Complementary reference points 700A Baffle Plate 700B Complementary Baffle Plate 733 Opening 735 Main body part 747 Connection hole 748 Reference point 763 Complementary openings 765 Complementary main body 767 Complementary connecting holes 768 Complementary reference points 800 Heater Jacket 1000 trap structure 1002 Fasteners 1004 Seal 1006 Support 1010 Baffle Plate 1011 Inner surface 1012 Baffle plate edge 1014 recess 1016 Support hole 1020 Base Plate 1021 Inner surface 1024 recess 1025 Central support 1026 Heater 1027 Flow hole 1050 array 1052 First end 1053 External surface 1054 Second end 1055 Rod 1075 Space 1100 Trap structure 1125 Support 1150 Tube Arrangement 1155 tube 1157 Bore 1159 Space 1188 Tensioning device 1200 Waveform Trap Structure 1205 Central void 1250 waveform sheet 1260 Space 1280 Non-corrugated sheet

Claims

1. A contaminant trapping system for a reactor system, A trap housing with an exterior housing wall, A first baffle plate disposed within the trap housing, wherein the first baffle plate comprises a sintered material, and the first baffle plate is configured to allow the fluid to pass through the first baffle plate as the fluid passes from the first end to the second end of the trap housing, and the sintered material is configured to collect contaminants from the fluid when the fluid comes into contact with the sintered material, A first complementary baffle plate made of a second sintered material, comprising a first complementary baffle plate disposed in series with the first baffle plate within the trap housing between the first end and the second end of the trap housing, The first baffle plate, A first opening that penetrates the first baffle plate body between the first top baffle plate surface and the first bottom baffle plate surface of the first baffle plate, The first main body section comprises, The first complementary baffle plate is A first complementary opening that penetrates the first complementary baffle plate body between the first top complementary baffle plate surface and the first bottom complementary baffle plate surface of the first complementary baffle plate, A contaminant trapping system comprising a first complementary main body part.

2. The contaminant trapping system according to claim 1, wherein the sintered material comprises at least one of a metallic material or a ceramic material.

3. The first baffle plate and the first complementary baffle plate are included in the baffle plate stack, The contaminant trapping system according to claim 1, wherein the first baffle plate and the first complementary baffle plate are arranged in a baffle plate orientation within the trap housing, wherein at least a portion of the first opening of the first baffle plate and at least a portion of the first complementary body portion of the first complementary baffle plate are aligned along a first axis extending between the first end and the second end of the trap housing, thereby aligning at least a portion of the first body portion of the first baffle plate and at least a portion of the first complementary opening of the first complementary baffle plate along a second axis extending between the first end and the second end of the trap housing.

4. The trap housing is further provided with a connecting rod that is disposed within the trap housing and extends between the first end and the second end of the trap housing, The first baffle plate is provided with a first connecting hole that passes through the first baffle plate body, and the connecting rod is provided that passes through the first connecting hole, and The contaminant trapping system according to claim 3, wherein the first complementary baffle plate is provided with a first complementary connecting hole that passes through the body of the first complementary baffle plate, and the connecting rod is provided that passes through the first complementary connecting hole.

5. The contaminant trapping system according to claim 4, wherein the connecting rod has a non-circular cross-section, and the first connecting hole of the first baffle plate and the first complementary connecting hole of the first complementary baffle plate each include a shape complementary to the non-circular cross-section of the connecting rod.

6. The contaminant trapping system according to claim 5, wherein the reference point of the first connecting hole is positioned in a first orientation, the complementary reference point of the first complementary connecting hole is positioned in a first complementary orientation, and the first orientation and the first complementary orientation are achieved by arranging the first baffle plate and the first complementary baffle plate around the connecting rod to achieve the baffle plate orientation.

7. The contaminant trapping system according to claim 6, further comprising a spacer between the first baffle plate and the first complementary baffle plate to provide a space between the first baffle plate and the first complementary baffle plate.

8. The trap housing further comprises a second baffle plate, wherein the second baffle plate is, A second opening that penetrates the second baffle plate body between the second top baffle plate surface and the second bottom baffle plate surface of the second baffle plate, It comprises a second main body section, The contaminant trapping system according to claim 3, further comprising the second baffle plate being positioned within the trap housing so that the first complementary baffle plate is between the first baffle plate and the second baffle plate, and the baffle plate orientation such that at least a portion of the second opening of the second baffle plate and at least a portion of the first complementary body portion of the first complementary baffle plate are aligned along the first axis, and at least a portion of the second body portion of the second baffle plate and at least a portion of the first complementary opening of the first complementary baffle plate are aligned along the second axis.

9. The contaminant trapping system according to claim 8, wherein the first baffle plate and the second baffle plate include the same design.

10. The aforementioned baffle plate stack is The first baffle plate is located between the end plate and the first complementary baffle plate, or The first complementary baffle plate is located between the end plate and the first baffle plate, and the end plate further comprises an end plate, which is arranged to be at least one of the following: The contaminant trapping system according to claim 6, wherein the end plate comprises an end plate opening and an end plate body portion.

11. The contaminant trapping system according to claim 3, wherein the outer wall of the trap housing has an inner wall surface, and at least one outer edge of the first baffle plate and the first complementary baffle plate is positioned adjacent to the inner wall surface, thereby forming at least a partial seal between the outer edge of the first baffle plate and the first complementary baffle plate and the inner wall surface.

12. The contaminant trapping system according to claim 11, wherein the inner wall surface of the trap housing is textured.

13. The contaminant trapping system according to claim 1, further comprising a heater jacket connected to the trap housing.

14. The contaminant trapping system according to claim 3, wherein the first opening of the first baffle plate is included in the radially inner portion of the first baffle plate, and the first complementary opening of the first complementary baffle plate is included in the radially outer portion of the first complementary baffle plate.

15. A baffle plate stack for a contaminant trapping system, A plurality of baffle plates, at least one of which is made of a sintered material, wherein each of the plurality of baffle plates is An opening that penetrates the baffle plate body of each of the plurality of baffle plates, A main body section, and a plurality of baffle plates, and At least one of these is a plurality of complementary baffle plates made of a second sintered material, and each of the plurality of complementary baffle plates is The complementary openings that penetrate the complementary baffle plate body of each of the plurality of complementary baffle plates, A plurality of complementary baffle plates comprising a complementary main body portion. The plurality of baffle plates and the plurality of complementary baffle plates are arranged in order between the first end and the second end of the baffle plate stack in which the plurality of baffle plates alternate with the plurality of complementary baffle plates, so that no two of the plurality of baffle plates and no two of the plurality of complementary baffle plates are adjacent in order of baffle plates. A baffle plate stack for a contaminant trapping system, wherein the plurality of baffle plates and the plurality of complementary baffle plates are arranged in a baffle plate orientation, wherein at least a portion of the openings of the plurality of baffle plates and at least a portion of the complementary body portions of the plurality of complementary baffle plates are aligned along a first axis extending between the first end and the second end of the baffle plate stack, thereby aligning at least a portion of the body portions of the plurality of baffle plates and at least a portion of the complementary openings of the plurality of complementary baffle plates along a second axis extending between the first end and the second end of the baffle plate stack.

16. The baffle plate stack further comprises a connecting rod connected to each of the plurality of baffle plates and each of the plurality of complementary baffle plates, the connecting rod extending between the first end and the second end of the baffle plate stack, The aforementioned connecting rod includes a cross-section, The baffle plate stack according to claim 15, wherein each of the plurality of baffle plates is provided with a connecting hole, and each of the plurality of complementary baffle plates is provided with a complementary connecting hole, wherein the connecting hole and the complementary connecting hole each include a shape complementary to the cross-section of the connecting rod.

17. The baffle plate stack according to claim 16, wherein the cross-section of the connecting rod is non-circular, the connecting holes of each of the plurality of baffle plates are arranged in a first orientation, and the complementary connecting holes of each of the plurality of complementary baffle plates are arranged in a second orientation, wherein the first orientation and the second orientation achieve the baffle plate orientation by arranging the plurality of baffle plates and the plurality of complementary baffle plates around the connecting rod.

18. The baffle plate stack according to claim 15, wherein the baffle plate stack has one more baffle plate than the plurality of complementary baffle plates, such that the baffle plate stack includes the plurality of baffle plates and the plurality of complementary baffle plates in the same order from the first end and the second end of the baffle plate stack.

19. A contaminant trapping system for a reactor system, Trap housing and A trap structure disposed within the aforementioned trap housing, baffle plate, Base plate, and, A contaminant trap system for a reactor system comprising a trap structure comprising a plurality of rods, the

20. A contaminant trapping system for a reactor system, A trap housing comprising a housing bottom surface and a housing top surface, A trap structure disposed within the aforementioned trap housing, A plurality of tubes arranged in an array having an outer shape complementary to the shape of the trap housing, At least one of the plurality of tubes includes a sintered material, Each of the plurality of tubes comprises a bore and a plurality of tubes that at least partially extend between the bottom surface of the housing and the top surface of the housing. A support positioned within the arrangement of the plurality of tubes, projecting outward from the ends of the plurality of tubes, in contact with the bottom surface of the housing, and creating a space between the ends of the plurality of tubes and the bottom surface of the housing, A contaminant trapping system for a reactor system, comprising a trap structure including a tensioning device connected around the plurality of tubes, configured to hold the plurality of tubes together.

Images