Inspection device and inspection method

Abstract

To provide an inspection device and an inspection method which control a position relation between the device and an object to be measured, and can appropriately detect a state of the surface.SOLUTION: An inspection device includes: a detector 2 having a transmission part for transmitting transmission waves to an object to be measured and a reception part for receiving return waves generated by hitting the transmission waves to the object to be measured; and an adsorber 3 for adsorbing the object to be measured, and regulating a relative position between the object to be measured and the detector 2.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to an inspection apparatus and an inspection method. [Background Art]

[0002] In various industrial fields represented by painting, coating and the like, there is interest in the surface condition of products and the like, and various apparatuses for detecting the surface condition of an object to be measured have been proposed.

[0003] For example, Japanese Patent Laying-Open No. 2011-27599 (Patent Document 1) discloses a technology that includes a plurality of attachments attached to an inspector, and by appropriately selecting and using these attachments, the color, glossiness, bronzing phenomenon and the like of an object to be inspected can be inspected with one light source and one sensor. Further, Japanese Patent Laying-Open No. 2017-58139 (Patent Document 2) discloses a colorimeter that suppresses incidence of infrared light to a light receiving portion. [Prior Art Literature] [Patent Literature]

[0004] [Patent Document 1] Japanese Patent Laying-Open No. 2011-27599 [Patent Document 2] Japanese Patent Laying-Open No. 2017-58139 [Summary of the Invention] [Problem to be Solved by the Invention]

[0005] To accurately perform various measurements that detect the state of a surface, it is necessary to appropriately control the positional relationship between the measuring device and the object being measured. Since these types of devices often detect the state of a surface by physically interacting with the surface of the object being measured or a substrate covered with a coating, etc., and detecting the reaction, it is desirable for the device to be positioned in an appropriate orientation relative to the surface of the object being measured in order to improve measurement accuracy. However, the technologies described in Patent Documents 1 and 2 did not adequately consider the positional relationship between the measuring device and the object being measured.

[0006] Therefore, there is a need for an inspection device and inspection method that can control the positional relationship between the device and the object being measured to achieve a posture that allows for appropriate detection of the surface condition. [Means for solving the problem]

[0007] The inspection apparatus according to the present invention includes a transmitting unit that transmits a wave to an object to be measured and a receiving unit that receives a return wave generated when the transmitted wave strikes the object to be measured. and having a contact surface that contacts the object to be measured. A detector and the object to be measured adsorbs The object to be measured comes into contact with the contact surface. The system includes a suction device that regulates the relative position between the object to be measured and the detector. The adsorber is positioned in front of the contact surface before the contact surface comes into contact with the object to be measured. It is characterized by the following:

[0008] The measurement method according to the present invention comprises a transmitting unit that transmits a wave to an object to be measured and a receiving unit that receives a return wave generated when the transmitted wave strikes the object to be measured. and having a contact surface that contacts the object to be measured. It comprises a detector and an adsorbent for adsorbing the object to be measured. The adsorber is positioned in front of the contact surface before the contact surface comes into contact with the object to be measured. An inspection method using an inspection device, The object to be measured comes into contact with the contact surface. The method is characterized by including the steps of: adsorbing the object to be measured onto the adsorber; and detecting the surface condition of the object to be measured adsorbed onto the adsorber using the detector.

[0009] With these configurations, the relative position between the object being measured and the detector can be controlled by the adsorbent, thus enabling an orientation that allows for proper detection of the surface condition.

[0010] Preferred embodiments of the present invention will be described below. However, the scope of the present invention is not limited by the examples of preferred embodiments described below.

[0011] Further features and advantages of the present invention will become clearer through the following description of exemplary and non-limiting embodiments, with reference to the drawings. [Brief explanation of the drawing]

[0012] [Figure 1] This is a perspective view of the inspection apparatus according to the embodiment. [Figure 2] This figure shows the detector and adsorbent viewed in the direction of line II in Figure 1. [Figure 3] This figure shows the detector and adsorbent viewed in the direction of line III in Figure 1. [Figure 4] This is a block diagram showing the configuration of the inspection apparatus according to the embodiment. [Figure 5] This diagram shows the positional relationship between the detector, adsorber, and bumper after the first stage. [Figure 6] This diagram shows the positional relationship between the detector, adsorber, and bumper after the second stage. [Figure 7] This figure shows the arrangement of the detector and adsorbent in the modified example. [Modes for carrying out the invention]

[0013] Embodiments of the inspection apparatus and inspection method according to the present invention will be described with reference to the drawings. Below, an example will be described in which the inspection apparatus according to the present invention is applied to an inspection apparatus 1 used for inspecting an automobile bumper B (an example of an object to be measured; hereinafter simply referred to as "bumper B"), and an inspection method for inspecting bumper B using the inspection apparatus 1. Bumper B has been painted before being inspected by the inspection apparatus 1, and the purpose of the inspection by the inspection apparatus 1 is to evaluate the quality of its paint. Bumper B is transported by a transport device (not shown) and enters a booth where the inspection apparatus 1 is installed, and is inspected in the booth.

[0014] [Configuration of Inspection Apparatus] The inspection apparatus 1 according to the present embodiment includes a detector 2, an adsorber 3, a force sensor 4, a robot arm 5 (which is an example of a moving means), a scanner 6 (which is an example of a position specifying means), and a control device 7 (which is an example of a control means) (FIGS. 1 to 4). The detector 2 and the adsorber 3 are supported at the distal end of the robot arm 5, and among these, the detector 2 is supported via the force sensor 4. The detector 2, the adsorber 3, the robot arm 5, the scanner 6, and the force sensor 4 are all capable of communicating with the control device 7. In FIG. 2, regarding the relationship between each element, mechanical connections are indicated by solid lines, piping connections are indicated by dashed-dotted lines, and electrical connections are indicated by broken lines, respectively.

[0015] The detector 2 is an apparatus that detects the surface state of a bumper B. The inspection performed by the inspection apparatus 1 aims to evaluate the coating quality of the bumper B. Specifically, the detector 2 may be a known apparatus such as a colorimeter, a film thickness meter, a flaw detector, or an apparatus in which a plurality of these measuring instruments are combined.

[0016] As is clear from the above examples, the detector 2 is typically a contact-type measuring instrument, and detection of the surface state is performed in a state where the contact surface 21 of the detector 2 is brought into contact with the measurement target site B1 to be measured on the bumper B. In this case, in order to appropriately perform measurement using the detector 2, it is desirable to bring the contact surface 21 into contact with the measurement target site B1 with an appropriate force. The magnitude of the appropriate force referred to herein is determined by the specifications of the detector 2, the rigidity of the object to be measured (the bumper B in the present embodiment), and the like. That is, an appropriate magnitude of force can be determined so as to avoid error factors such as deformation of the object to be measured (the bumper B) and intrusion of ambient light into the detector 2.

[0017] Note that detector 2 may be a non-contact type measuring instrument. In this case, in order to appropriately perform measurement using detector 2, it is desirable to appropriately control the relative position between the contact surface 21 and the measurement target site B1. More specifically, it is desirable that the relative position between the contact surface 21 and the measurement target site B1 is a relative position conforming to the specifications of detector 2, and that this relative position is reproduced in a plurality of measurements. Note that, for the convenience of common description with the case where detector 2 is a contact-type measuring instrument, the term "contact" surface is used herein, but when detector 2 is a non-contact-type measuring instrument, the contact surface 21 does not contact the object to be measured.

[0018] The suction device 3 is a device that sucks the bumper B. The suction device 3 is, for example, a vacuum suction device, and includes a suction pad 31 that contacts the bumper B, an ejector 32 connected to the suction pad 31, and a bracket 33 that supports suction pads 31A and 31B (Figures 1 to 4). The bracket 33 extends parallel to detector 2.

[0019] Detector 2 includes a transmission unit 22 that transmits a transmission wave to an object to be measured, and a reception unit 23 that receives a return wave generated when the transmission wave strikes the object to be measured. Detector 2 transmits the transmission wave to apply some action to the object to be measured, and detects the return wave generated by the action, thereby detecting the surface state of the object to be measured.

[0020] As a first example, when detector 2 is a colorimeter, the transmission unit 22 is a light source that irradiates visible light onto the object to be measured, and the reception unit 23 is an optical sensor that detects reflected light. In this example, the irradiation of visible light corresponds to the transmission of a transmission wave, and the detection of reflected light corresponds to the reception of a return wave. If the wavelength of the irradiated visible light is constant, the wavelength of the reflected light depends on the color tone of the surface of the object to be measured, so the color tone of the surface of the object to be measured can be identified by detecting the reflected light.

[0021] As a second example, if the detector 2 is an ultrasonic film thickness gauge, the transmitter 22 is an ultrasonic source that emits ultrasonic waves to the object being measured, and the receiver is a receiver that receives the ultrasonic waves reflected from the object being measured. Here, the emission of ultrasonic waves corresponds to the transmission of the transmitted wave, and the reception of the reflected ultrasonic waves corresponds to the reception of the returned wave. In this example, the thickness of the coating is determined based on the time it takes for the ultrasonic waves emitted by the transmitter 22 to be reflected from the substrate of the object being measured and detected by the receiver 23.

[0022] As a third example, if the detector 2 is a flaw detection tester, one coil serves as both the transmitter 22 and the receiver 23. This coil emits electromagnetic waves that generate eddy currents in the object under test, and detects the change in the magnetic field caused by these eddy currents to determine the presence or absence of defects. In this case, the emission of electromagnetic waves corresponds to the transmission of the transmitted wave, and the detection of the magnetic field corresponds to the reception of the returned wave.

[0023] Thus, the transmitted wave is some kind of wave determined according to the detection principle of the detector 2, and may be, but is not limited to, electromagnetic waves such as ultraviolet light, visible light, infrared light, microwaves, or sound waves in the ultrasonic range, audible range, or very low frequency range. The returned wave is determined by the type of transmitted wave and the physical properties of the object being detected, and may be a reflection of the transmitted wave or a wave induced by the transmitted wave.

[0024] The suction pad 31 is made of an elastically deformable material (for example, polypropylene). Since both the detector 2 and the suction device 3 (suction pad 31) are supported by the robot arm 5, the suction device 3 can suction the bumper B, thereby regulating the relative position between the bumper B (especially the part to be measured B1) and the detector 2 (especially the contact surface 21). In this embodiment, two suction devices 3 (3A, 3B) are provided, and each of the suction devices 3A and 3B independently has suction pads 31A, 31B and ejectors 32A, 32B. The ejectors 32A and 32B are fixed to the robot arm 5.

[0025] The detector 2 and the adsorbents 3A and 3B are positioned such that the contact surface 21 is located off the straight line connecting the two adsorption pads 31A and 31B (Figure 3). In other words, the contact surface 21 and the two adsorption pads 31A and 31B are arranged in such a way that a plane can be defined by these three points. This arrangement makes it easier to stabilize the contact state when the contact surface 21 and the adsorption pads 31A and 31B all come into contact with the bumper B. The positions of the contact surface 21 and the adsorption pads 31A and 31B are determined by the center of each component when viewed from a direction directly facing the contact surface 21 (i.e., the viewpoint in Figure 3).

[0026] In the normal state of the adsorber 3, the adsorption pad 31 is positioned in front of the contact surface 21. Here, "forward" refers to the direction that brings the contact surface 21 closer to the part B1 to be measured (to the right in Figure 2), while "backward" is the opposite direction.

[0027] Because the suction pad 31 is positioned in front of the contact surface 21, when the detector 2 and the adsorber 3 are brought closer to the bumper B (measurement area B1), the suction pad 31 approaches the bumper B ahead of the detector 2. As the distance between the suction pad 31 and the bumper B decreases, the bumper B is attracted to the suction pad 31, and then the contact surface 21 comes into contact with the measurement area B1, completing the measurement-ready state. Note that the suction pad 31 deforms when it adsorbs the bumper B, and this does not prevent the contact surface 21, which is positioned behind the suction pad 31, from coming into contact with the bumper B.

[0028] Furthermore, conventionally, when the rigidity of the object to be measured was low, it was necessary to press the detector and the object to be measured from the back when pressing the detector against it. This was because if the detector was pressed against the object without pressing the back, the object to be measured would deform, impairing its quality, or it would be difficult to achieve an appropriate measurement position in the first place. On the other hand, in this embodiment, the object to be measured is attracted by the action of the adsorbent 3 to achieve the measurement position, so an appropriate measurement position can be achieved without pressing the object to be measured from the back.

[0029] The force sensor 4 is positioned between the base end of the detector 2 (opposite the contact surface 21) and the robot arm 5. The force sensor 4 can detect the force applied when the detector 2 is pressed against the bumper B.

[0030] In this embodiment, instead of using the adsorbent 3 to adsorb the bumper B, it is not prohibited to perform the measurement by pressing the detector 2 against the bumper B (i.e., the same method as conventional inspection devices). The force sensor 4 plays a role in making it easier to achieve an appropriate measurement posture when performing the measurement in this manner. That is, the magnitude of this pressing force can serve as an indicator of whether the posture in which the detector 2 is pressed against the bumper B is appropriate, so by controlling the robot arm 5 so that the pressing force is at an appropriate level, an appropriate measurement posture can be achieved. In other words, it is preferable to move the detector 2 so that the force detected by the force sensor 4 is within a predetermined range.

[0031] As the robot arm 5 in this embodiment, for example, a known six-axis vertical articulated industrial robot can be used. The robot arm 5 can move the detector 2 and suction cup 3 attached to its tip to a desired position and along a desired path. The operation of the robot arm 5 is controlled according to a teaching program stored in advance in the control device 7. The format of such a teaching program is arbitrary, and it is possible to use one that stores teaching points in the form of pulses for each axis, or one that stores teaching points in the form of world coordinate system spatial coordinates, etc.

[0032] Scanner 6 is a device capable of scanning bumper B to detect its position and shape in three dimensions. Scanner 6 is installed separately from the unit containing detector 2, suction cup 3, robot arm 5, and force sensor 4 within the booth where inspection device 1 is installed.

[0033] The control device 7 is a device that controls the operation of each part of the inspection device 1, and a known control device for controlling the operation of an industrial robot (robot arm 5 in this embodiment) can be used. The control device 7 is also responsible for controlling the detector 2, the suction cup 3, the force sensor 4, and the scanner 6, and for processing the detected signals.

[0034] [Control of inspection equipment and inspection method] Next, an inspection method using the inspection device 1 will be described. In the following description, an example will be given where the detector 2 is a contact-type measuring instrument. The inspection method according to this embodiment includes a first step of adsorbing the bumper B onto the adsorber 3, a second step of bringing the detector 2 into contact with the bumper B adsorbed onto the adsorber 3, and a third step of detecting the surface condition of the bumper B adsorbed onto the adsorber 3 using the detector 2.

[0035] Furthermore, the operation of each part of the inspection device 1 to carry out the series of procedures is controlled by the control device 7. Also, before starting the series of procedures, the inspection device 1 is in a state where the detector 2 and the adsorbent 3 are away from the bumper B, and the adsorption pad 31 is positioned in front of the contact surface 21 (Figure 2).

[0036] (1) First stage When the bumper B to be measured is brought into the booth where the inspection device 1 is installed, the scanner 6 scans the bumper B to detect its position and shape in three dimensions (positioning step). This detection signal is input to the control device 7. The control device 7 compares the position and shape of the bumper B in the pre-input master data with the position and shape of the bumper B measured by the scanner 6 to determine the degree of deviation between the master data and the current situation.

[0037] Next, the control device 7 corrects the information in the master data regarding the position of the part to be measured B1 and the orientation in which the detector 2 and the adsorbent 3 are in contact with the part to be measured B1, based on the identified degree of deviation. Then, based on the identified information, the robot arm 5 is operated to move the detector 2 and the adsorbent 3 to the part to be measured B1 (movement process).

[0038] When the adsorber 3 is brought close to the bumper B (measurement area B1), the adsorption pad 31 approaches the bumper B ahead of the detector 2. As the distance between the adsorption pad 31 and the bumper B decreases, the adsorption force of the adsorption pad 31 acts on the bumper B, and the bumper B is attracted to the adsorption pad 31 (Figure 5, adsorption process).

[0039] (2) Second stage The bumper B, attracted to the adsorbent 3 (adsorption pad 31), is drawn towards the contact surface 21, thereby completing the state in which the contact surface 21 is in contact with the part B1 to be measured with the appropriate posture and force (Figure 6). For example, by controlling the adsorption force of the adsorption pad 31 by adjusting the output of the ejector 32, the force with which the detector 2 contacts the bumper B can be controlled to an appropriate range. Furthermore, the appropriate posture referred to here is determined by the specifications of the detector 2, but can typically be defined as a posture in which the detector 2 contacts the bumper B perpendicularly or a posture in which the contact surface 21 is aligned with the part B1 to be measured.

[0040] (3) The third stage Subsequently, the detector 2 is operated to detect the surface condition of the bumper B (measurement area B1) (detection step). For example, if the detector 2 is a colorimeter, the measurement of color tone is easily affected by ambient light, so in order to perform accurate measurements, it is desirable to prevent ambient light from entering the contact surface 21. In this embodiment, the orientation of the detector 2 and the bumper B is restricted so that the contact surface 21 is directly facing the measurement area B1, and a state is achieved in which ambient light is less likely to enter the receiving unit 23, making it easier to accurately measure the color tone.

[0041] Furthermore, if, for example, the detector 2 is an ultrasonic film thickness gauge, the thickness of the coating is determined based on the time it takes for the ultrasonic waves emitted by the transmitter 22 to be reflected off the substrate of the bumper B and detected by the receiver 23. Therefore, in order to accurately measure the thickness of the coating, it is desirable that the contact surface 21 is aligned with the part to be measured B1. In this embodiment, the orientation of the detector 2 and the bumper B is restricted so that the contact surface 21 is aligned with the part to be measured B1, making it easier to accurately measure the thickness of the coating.

[0042] [Other Embodiments] Finally, other embodiments of the inspection apparatus and inspection method according to the present invention will be described. Note that the configurations disclosed in each of the following embodiments can be applied in combination with configurations disclosed in other embodiments, as long as this does not create a contradiction.

[0043] In the above embodiment, a configuration with two adsorbents 3 (3A, 3B) was described as an example, but the number of adsorbents is not limited in the present invention. However, it is preferable to have multiple adsorbents because it is easier to stabilize the orientation of the object to be measured that is adsorbed by the adsorbents. Furthermore, when multiple adsorbents are provided, it is preferable that the operation of each adsorbent can be controlled independently. For example, by providing three or more adsorbents and controlling the operation of each adsorbent according to the shape of the part of the object to be measured, it is easier to achieve an appropriate measurement orientation of the detector regardless of the shape of that part.

[0044] Figure 7 shows a modified configuration with four adsorbents. In Figure 7, the positional relationship between the detector 2 (contact surface 21) and the adsorbent 3 (adsorption pad 31) is shown from the same viewpoint as in Figure 3. In this modified inspection device, four adsorbents 3 (adsorption pads 31) are provided at the four vertices of a rectangle, and the detector 2 (contact surface 21) is provided at the center of the rectangle.

[0045] In the above embodiment, a configuration in which two suction pads 31A and 31B are arranged to define a plane with the contact surface 21 was described as an example, but the configuration is not limited to this. For example, the suction device may be single, as described above, in which case the contact surface and the suction pad (which is single) clearly do not define a plane. Also, when the contact surface is located on a line segment connecting the two suction pads, these three points do not define a plane.

[0046] In the above embodiment, a configuration in which the detector 2 and the adsorbent 3 are supported by a robot arm 5 was described as an example. However, the inspection device according to the present invention may have a configuration without a robot arm. For example, a portable inspection device equipped with a detector and an adsorbent is also one embodiment of the present invention. In this case as well, since the positional relationship between the object to be measured and the detector can be controlled by the adsorbent, it is easier to achieve an appropriate measurement posture compared to conventional portable inspection devices. Furthermore, when the measuring instrument is a contact-type measuring instrument, there is no need to apply force to press the measuring instrument against the object to be measured from the back side.

[0047] Furthermore, as described above, the present invention may be configured to allow measurement by pressing the inspection unit against the object to be measured (i.e., the same method as conventional inspection devices) instead of using a suction device to adsorb the object to be measured. In this case, it is preferable to make the suction device movable in the front-rear direction so that the relative position between the detector (contact surface) and the suction device (suction pad) can be selected according to the measurement method being performed. When the latter method is adopted, it is desirable to take measures to hold down the measuring instrument and the object to be measured on the back side of the object to be measured in order to suppress movement and deformation of the object to be measured against which the inspection unit is pressed. Specifically, methods such as placing a support member (not shown) on the back side of the object to be measured or supporting it with a hand may be adopted. However, depending on conditions such as the rigidity of the object to be measured, such measures may not be necessary.

[0048] In the above embodiment, a configuration including a scanner 6 as an example of a positioning means was described as an example. However, in the present invention, the presence or absence of a positioning means is optional. Furthermore, if a positioning means is provided, in addition to the scanner exemplified above, a camera, a photocell, or the like may be used.

[0049] In the above embodiment, a configuration in which the inspection device 1 is equipped with a force sensor 4 was described as an example, but in the present invention, the presence or absence of a force sensor is optional.

[0050] With regard to other configurations, the embodiments disclosed herein are illustrative in all respects, and it should be understood that the scope of the present invention is not limited thereto. Those skilled in the art will readily understand that modifications can be made as appropriate without departing from the spirit of the invention. Therefore, other embodiments modified without departing from the spirit of the invention are naturally included within the scope of the present invention. [Explanation of Symbols]

[0051] 1: Inspection device 2: Detector 21: Contact surface 22: Transmitter 23: Receiving unit 3: Adsorption device 31: Suction pad 4: Force sensor 5: Robot arm 6: Scanner 7: Control device

Claims

1. A detector having a transmitting unit that transmits a wave to an object to be measured and a receiving unit that receives a return wave generated when the transmitted wave strikes the object to be measured, and having a contact surface that contacts the object to be measured, The system includes an adsorbent that adsorbs the object to be measured and regulates the relative position between the object to be measured and the detector so that the object to be measured contacts the contact surface, The inspection apparatus is characterized in that the adsorbent is positioned in front of the contact surface before the contact surface comes into contact with the object to be measured.

2. The inspection apparatus according to claim 1, comprising a plurality of the aforementioned adsorbents.

3. The inspection apparatus according to claim 2, which can independently control whether or not each of the adsorbents is operating.

4. Each of the adsorbers has an adsorption pad that contacts the object to be measured, The inspection apparatus according to claim 2, wherein at least two of the suction pads are provided in an arrangement that defines a plane with respect to the contact surface.

5. A moving means for supporting the detector and the adsorbent, and for moving the detector and the adsorbent, A positioning means for identifying the position of the object to be measured, The system further comprises at least control means for controlling the moving means, The inspection apparatus according to any one of claims 1 to 4, wherein the control means controls the moving means to move the detector and the adsorbent to the position of the object to be measured, which has been identified by the position identification means.

6. The inspection apparatus according to claim 5, wherein the moving means is a robotic arm.

7. The detector further comprises a force sensor that detects the force applied when the detector comes into contact with the object being measured. The inspection apparatus according to claim 5, wherein the moving means moves the detector so that the force detected by the force sensor is within a predetermined range.

8. A detector having a transmitting unit that transmits a wave to an object to be measured and a receiving unit that receives a return wave generated when the transmitted wave strikes the object to be measured, An adsorbent that adsorbs the object to be measured and regulates the relative position between the object to be measured and the detector, A moving means for supporting the detector and the adsorbent, and for moving the detector and the adsorbent, A positioning means for identifying the position of the object to be measured, It comprises at least control means for controlling the moving means, The control means controls the moving means to move the detector and the adsorbent to the position of the object to be measured, which has been identified by the position identification means. The detector further comprises a force sensor that detects the force applied when the detector comes into contact with the object being measured. An inspection device in which the moving means moves the detector so that the force detected by the force sensor is within a predetermined range.

9. An inspection method using an inspection device comprising: a detector having a transmitting unit that transmits a wave to an object to be measured and a receiving unit that receives a return wave generated when the transmitted wave strikes the object to be measured, and having a contact surface that contacts the object to be measured; and an adsorbent that adsorbs the object to be measured, wherein the adsorbent is positioned in front of the contact surface before the contact surface contacts the object to be measured. A suction step of adsorbing the object to be measured onto the adsorber so that the object to be measured comes into contact with the contact surface, An inspection method comprising a detection step of detecting the surface condition of the object to be measured, which is adsorbed by the adsorbent, using the detector.

10. The inspection apparatus further comprises: a moving means for supporting the detector and the adsorbent and for moving the detector and the adsorbent; a positioning means for identifying the position of the object to be measured; and a control means for controlling at least the moving means. Prior to the adsorption step, The positioning means includes a positioning step of determining the position of the object to be measured, The inspection method according to claim 9, further comprising a moving step in which the control means controls the moving means to move the detector and the adsorbent to the position of the object to be measured identified by the position identification means.

11. The inspection method according to claim 10, wherein the moving means is a robotic arm.

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