Solid evaporator

Abstract

The vaporizer vessel includes one or more reagent support panels that act as a divider for the vessel's interior space in a vertical orientation, such as when filling the vaporizer vessel, and when rotated to a horizontal orientation, the panels support and allow heat transfer to vaporizable solid materials disposed within one or more chambers formed by the panels and the vessel's interior wall, such that any or all chambers filled with vaporizable solid materials provide voids to allow the solid materials to evaporate when heated, to allow gas to travel through the vaporizer vessel, to allow effective evaporation of the solid materials, and to allow vapor resulting from the solid materials to travel to an outlet of the vessel where it can be provided as part of a process.

Claims

1. An evaporator vessel for an evaporable solid source material, The evaporator container body includes an inner surface that defines the internal volume, An inlet is configured to introduce a carrier gas into the internal volume of an evaporator vessel so that the carrier gas flows through the internal volume and comes into contact with an evaporable solid source material to form a carrier gas / solid source vapor mixture, An outlet configured to release a carrier gas / solid source vapor mixture from the evaporator container, At least one thermally conductive reagent support panel, positioned within the internal volume and joined to the evaporator vessel body on its inner surface by a thermally conductive joint, wherein each of the at least one thermally conductive reagent support panel extends horizontally through the internal volume when the evaporator vessel body is oriented in the direction of use, such that an evaporable solid source material is placed on the thermally conductive reagent support panel with a gap existing between the evaporable solid source material and the evaporator vessel or another panel of the at least one thermally conductive reagent support panel. Filling port and Includes, Each of at least one thermally conductive reagent support panels is joined to the evaporator vessel body on its inner surface by a thermally conductive joint, and extends vertically when the evaporator vessel is in the filled orientation. The filling port is located on the evaporator container, in the direction of use, at a position corresponding to the side of the container body in the filling direction.

2. The evaporator container according to claim 1, wherein the evaporator container includes a plurality of thermally conductive reagent support panels.

3. The evaporator vessel according to claim 1, wherein the filling port is separated from the thermal conductive reagent support panel so as to communicate with all the spaces defined by at least one thermal conductive reagent support panel.

4. A method for filling an evaporator container for an evaporable solid source material, The evaporator container includes an evaporator container body, the evaporator container body includes an end including a filling port, and an inner surface defining the internal volume, At least one thermally conductive reagent support panel is positioned within the internal volume and joined to the evaporator vessel body on its inner surface by a thermally conductive joint, and each of the at least one thermally conductive reagent support panel extends through the internal volume, Each of at least one thermally conductive reagent support panels is joined to the evaporator vessel body on its inner surface by a thermally conductive joint, extending vertically when the evaporator vessel is in the filled orientation and horizontally when the evaporator vessel is in the use orientation. The method is, The evaporator vessel is oriented such that each of at least one thermally conductive reagent support panels extends vertically and the filling port is located at the top of the evaporator vessel. At least one evaporable solid source material is added to the internal volume of the evaporator vessel by a filling port such that at least one evaporable solid source material is present in each space defined by at least one thermally conductive reagent support panel and its inner surface. Methods that include...

5. A method for evaporating an evaporable solid source material, The evaporator container in which the solid is placed is oriented such that the evaporator container is Evaporator container body including inner surface that defines internal volume, entrance, Exit At least one thermally conductive reagent support panel, positioned within the internal volume and joined to the evaporator vessel body on its inner surface by at least one thermally conductive joint, wherein each of the at least one thermally conductive reagent support panel extends through the internal volume, and Filling port Includes, The evaporator vessel is oriented such that each of at least one thermally conductive reagent support panels extends horizontally, and at least a portion of the evaporable solid source material rests on one or more of the at least one thermally conductive reagent support panels. Heating the evaporator container body, The heat is transferred from the evaporator vessel body to at least one heat-conductive reagent support panel via a heat-conductive joint, To evaporate the evaporable solid source material, heat is transferred from each of at least one thermally conductive reagent support panels to the evaporable solid source material in contact with the thermally conductive reagent support panel. Includes, Each of at least one thermally conductive reagent support panels extends vertically when the evaporator vessel is in the filled orientation and horizontally when the evaporator vessel is in the use orientation. A method in which the filling port is located at a position corresponding to the side of the container body in the direction of use.

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