Methods, systems, and media related to system drift verification

Abstract

To provide a method, a system, and a medium relating to system drift verification.SOLUTION: A method includes performing a first measurement using one or more modified measurement parameters to generate a first measurement result of the modified measurement parameters, performing a second measurement using the one or more modified measurement parameters in response to the measurement using the modified measurement parameters to generate a second measurement result of the modified measurement parameters, and comparing the second measurement result to the first measurement result, and the modified measurement parameters are different from the original measurement parameters. The comparison of the first measurement result to the second measurement result is used to verify system drift.SELECTED DRAWING: Figure 2

Description

Technical Field

[0001] The present invention relates to testing technology, and in particular, to methods, systems, and media related to system drift verification.

Background Art

[0002] A network analyzer is an instrument required to characterize the behavior of electronic or semiconductor devices and components in radio frequency (RF), microwave, or other fields. The analyzer measures S-parameters, and these parameters describe how a device under test (DUT) (i.e., the aforementioned device or component) reflects and transmits signals. To ensure measurement accuracy, the analyzer needs to perform a calibration process for error networks. After calibration is completed, a user can measure the device under test. However, when a measurement lasts for a predetermined period of time, failed measurement results may occur. Failed measurement results have many causes, for example, poor contact, equipment damage, operator error, or system drift.

[0003] In many cases, failed measurement results are usually highly likely to be caused by "system drift", so customers always want to check for "system drift" first. However, conventional drift verification technologies may take a long time, and it is necessary to perform repeated measurements periodically and perform system drift correction on the measurement data. A more efficient and automated drift verification method is needed to minimize time and effort while maintaining measurement accuracy.

Summary of the Invention

Problem to be Solved by the Invention

[0004] The present invention has been made to solve the above-described problems, and provides methods, systems, and media related to system drift verification. [Means for solving the problem]

[0005] According to one or more embodiments of the present disclosure, a method for verifying system drift in a probe system is implemented by a controller connected to a signal generation and analysis assembly. The signal generation and analysis assembly is connected to a device under test (DUT) by the probe assembly. The method includes the steps of: performing a first measurement with at least one modified measurement parameter and generating a first measurement result for at least one modified measurement parameter; performing a second measurement with at least one modified measurement parameter in response to the measurement with at least one modified measurement parameter and generating a second measurement result for at least one modified measurement parameter; and comparing the second measurement result with the first measurement result. At least one modified measurement parameter differs from at least one original measurement parameter, and at least one original measurement parameter is pre-configured in the signal generation and analysis assembly. The comparison result of the first and second measurement results is used to verify system drift.

[0006] According to one or more embodiments of the present disclosure, a method for operating a probe system is applied to a controller connected to a signal generation and analysis assembly. The signal generation and analysis assembly is connected to a device under test (DUT) by the probe assembly. This method includes the steps of accepting a selection operation, representing a comparison result between a first measurement result and a second measurement result, and verifying the comparison result by providing a set boundary. A first measurement is performed with at least one modified measurement parameter, the selection operation is used to replace at least one original measurement parameter with at least one modified measurement parameter, the at least one modified measurement parameter and at least one original measurement parameter being different. At least one original measurement parameter is pre-set in the signal generation and analysis assembly. The first measurement result is generated in response to a first measurement of at least one modified measurement parameter, the second measurement result is generated in response to a second measurement of at least one modified measurement parameter, and the comparison result between the first and second measurement results is used to verify system drift. The set boundary is displayed on a display.

[0007] One or more embodiments of the present disclosure provide a probe system configured to measure a device under test (DUT) on a wafer. The probe system is capable of performing system drift verification. The probe system includes a chuck, a probe assembly, a signal generation and analysis assembly, and a controller. The chuck has a defined support surface configured to support a wafer containing the device under test. The probe assembly, with a defined probe tip, is configured to physically contact the surface of the device under test. The signal generation and analysis assembly has at least one of the following configurations: transmitting a measurement signal to the device under test and receiving a result signal from the device under test. The controller is connected to the signal generation and analysis assembly and is programmed to perform the methods described above.

[0008] According to one or more embodiments of the present disclosure, a non-temporary computer-readable storage medium includes a computer-executable instruction, and when the computer-executable instruction is executed, it instructs the probe system to perform the method described above.

[0009] To make the above-mentioned features and advantages of the present invention easier to understand, examples will be given below with reference to the attached drawings. [Brief explanation of the drawing]

[0010] [Figure 1] This is a schematic diagram illustrating a probe system according to one embodiment of the present disclosure. [Figure 2] This is a flowchart illustrating a system drift verification method according to one embodiment of the present disclosure. [Figure 3] This is a schematic diagram illustrating the measurement parameters according to one embodiment of the present disclosure. [Figure 4] This is a schematic diagram illustrating the measurement parameters according to one embodiment of the present disclosure. [Figure 5] This is a schematic diagram illustrating the measurement parameters according to one embodiment of the present disclosure. [Figure 6] This is a schematic diagram illustrating a movement operation according to one embodiment of the present disclosure. [Figure 7] This is a flowchart illustrating the operation method according to one embodiment of the present disclosure. [Modes for carrying out the invention]

[0011] Existing preferred embodiments of this disclosure will be described in detail with reference to the drawings. Where possible, the same or similar parts will be indicated in the drawings and description using the same reference numerals.

[0012] Figure 1 is a schematic diagram illustrating a probe system 10 according to one embodiment of the present disclosure. As shown in Figure 1, the probe system 10 includes (but is not limited to) a probe assembly 20, a chuck 30, a positioning assembly 50, a controller 60, a signal generation and analysis assembly 70, and an optical imaging device 80.

[0013] The probe assembly 20 includes (but is not limited to) a probe 22. The probe 22 has one or more probe tips 24 and is used to probe a device under test (DUT) 44. In one embodiment, the device under test 44 is a semiconductor device to be tested, such as a wafer, an integrated circuit (IC), or a printed circuit board (PCB). The semiconductor device to be tested includes an unpackaged semiconductor device having one or more pads 48, the pads 48 being configured to be mechanically and electrically contacted by the probe tip 24. In one embodiment, the device under test 44 may be a calibration standard (circuit), another circuit, element, or device. In one embodiment, the probe tip 24 is configured to be in physical contact with the surface of the device under test 44.

[0014] The positioning assembly 50 may be a robot arm, a height adjustment base, a slide rail, a turntable, a screw, or a combination of various mechanical parts. The connecting elements mounted on it (e.g., probe assembly 20) are driven to move up, down, move, or rotate, thereby raising, lowering, moving, and / or rotating the probe 22. In one embodiment, the positioning assembly 50 is electrically driven by a controller 60. For example, the controller 60 sends a command, and the positioning assembly 50 is driven by the command to raise, lower, move, or rotate the probe assembly 20 or the probe 22.

[0015] The chuck 30 has a defined support surface 32, and the substrate 40 on which the device to be measured 44 is formed can be placed directly on the chuck 30. In one embodiment, the support surface of the chuck 30 is configured to support a wafer including the device to be measured 44.

[0016] The controller 60 (for example, having a processing circuit) may be a hard device or a circuit. Examples include a computer, workstation, tablet, smartphone, server, wearable device, smart assistant device, central processing unit (CPU), microcontroller, programmable controller, application-specific integrated circuit (ASIC), chip or other similar component or combination thereof. The controller 60 implements the method in the embodiments of this disclosure by calling and executing one or more program codes or computer executable instructions from memory (not shown).

[0017] In one embodiment, the probe assembly 20 is used to establish a connection with the controller 60 and communicate test information.

[0018] In one embodiment, the storage device includes a volatile or non-volatile computer-readable storage medium. The storage device may be removable, non-removable, or a combination of both. Exemplary storage devices include solid-state storage devices, hard drives, disk drives, and the like. The controller 60 implements the method in the embodiments of the present disclosure by calling and executing one or more program codes or computer-executable instructions from the storage device.

[0019] The signal generation and analysis assembly 70 is connected to the probe assembly 20 and the controller 60. The signal generation and analysis assembly 70 may be a vector network analyzer (VNA), or may be an instrument for verifying other parameters including scattering parameters (S-parameters), admittance parameters (Y-parameters), mixing parameters (h-parameters / g-parameters), transmission parameters (ABCD parameters), impedance parameters (Z-parameters), scattering transmission parameters (T-parameters), etc. The signal generation and analysis assembly 70 is connected to the device under test 44 via one or more probe assemblies 20 by cables or connectors. In one embodiment, the signal generation and analysis assembly 70 is configured to transmit test signals and receive measurement signals via one or more probes 22.

[0020] In one embodiment, the controller 60 transmits one or more instructions or commands to the signal generation and analysis assembly 70. These instructions or commands relate to driving or triggering one or more functions of the signal generation and analysis assembly 70, and / or transmitting one or more parameters to configure the signal generation and analysis assembly 70. In one embodiment, these instructions or commands are implemented by executing corresponding program codes or computer-readable instructions.

[0021] The optical imaging device 80 may be an optical detection device. The optical imaging device 80 is configured to collect optical images of one or more regions of the probe system 10. In one embodiment, the optical imaging device 80 is configured to detect defects on the device under test 44. The optical imaging device 80 can use various optical techniques to identify various defects that may affect the function and performance of the device under test 44.

[0022] The circuit can also be configured to form a complete system together with the device under test 44, and evaluate the device under test 44. For example, when the device under test 44 is a microprocessor, the probe system 10 can include a support circuit for a personal computer motherboard. When the power is turned on, the device under test 44 will experience an electrical environment similar to the end-use environment. This allows system drift testing to be performed on unpackaged DUT devices. In a wafer production test environment, the use of a probe system having such a programmable pattern enables self-testing.

[0023] In order to facilitate understanding of the operation process of the embodiments of the present disclosure, several embodiments are provided below to describe the flow of using the probe system 10 in the embodiments of the present disclosure. The method described below in the embodiments of the present disclosure is described together with each device, element, and module of the probe system 10. Each process of the method can be adjusted according to actual implementation scenarios, and the present disclosure is not limited thereto.

[0024] Figure 2 is a flowchart illustrating a system drift verification method according to one embodiment of the present disclosure. As shown in Figure 2, the controller 60, via the signal generation and analysis assembly 70 and the probe assembly 20, performs a first measurement with at least one corrected measurement parameter and generates a first measurement result for at least one corrected measurement parameter (step S210). More specifically, the probe assembly 20 performs the measurement of the corrected measurement parameter by contacting the device under test. Alternatively, the measurement of the corrected measurement parameter can be performed over-the-air (OTA). The measurement in step S210 is a baseline measurement and is used as a reference or golden sample for future or subsequent measurements. The type of corrected measurement parameter includes one or a combination of the following: frequency range, start frequency of the frequency range, stop frequency of the frequency range, frequency point, number of frequency points, and enable or disable drift correction. The frequency point is located within the frequency range; that is, the frequency of the frequency point is greater than or equal to the start frequency and less than or equal to the stop frequency. The first measurement result of the corrected measurement parameters may be, for example, one or more S-parameters. In one embodiment, the first measurement result can be saved as a drift reference dataset. The drift reference dataset may further include the corrected measurement parameters.

[0025] However, at least one modified measurement parameter is different from at least one original measurement parameter. One or more original measurement parameters are pre-configured in the signal generation and analysis assembly 70. That is, the original measurement parameters are parameters that are preset in the signal generation and analysis assembly 70.

[0026] In one embodiment, the controller 60 can perform measurements using one or more original measurement parameters during the calibration process of the signal generation and analysis assembly 70. The calibration process is used to eliminate errors in the vector network analyzer, cables, connectors, and / or adapters. This ensures that measurements using the original measurement parameters are error-free. That is, after the calibration process, the original measurement parameters are preset in the signal generation and analysis assembly 70. During the calibration process, the device under test 44 may be one or more calibration references (circuits). Typical calibration kits include short, open, load, and through. The calibration method may be SOLT (short-open-load-through) or TRL (through-reflection-line). The controller 60 or the signal generation and analysis assembly 70 can detect the completion of the calibration process and perform measurements using one or more modified measurement parameters after the completion of the calibration process. In other words, unlike the one or more measurement parameters used in the measurement in step S210 and the one or more measurement parameters set in the signal generation and analysis assembly 70 after the calibration process, the calibration process is a process that takes place before the measurement in step S210.

[0027] As shown in Figure 2, the controller 60, via the signal generation and analysis assembly 70, performs a second measurement using at least one modified measurement parameter through the probe assembly 20, and in response to the second measurement of at least one modified measurement parameter, generates a second measurement result for at least one modified measurement parameter (step S220). More specifically, the probe assembly 20 can contact the same device under test that was used in the measurement of step S210 when the same modified measurement parameter was used. Alternatively, the measurement using the same modified measurement parameter can be performed over air (OTA), similar to the measurement of step S210. After step S210, system drift may be present, and the same modified measurement parameter is used for drift verification. The second measurement result for the modified measurement parameter may be, for example, one or more S-parameters. In one embodiment, the second measurement result can be saved as a drift dataset. The drift dataset may further include modified measurement parameters.

[0028] In the first embodiment, the modified measurement parameters include disabling system drift verification correction, while the original measurement parameters include enabling system drift verification correction. Performance may change due to temperature changes, component aging, mechanical interference, etc. These performance changes cause measurement drift (referred to as system drift or drift), which affects the accuracy and reliability of the measurement. The signal generation and analysis assembly 70 provides a drift correction function. The controller 60 calculates mathematical corrections to the measurement data of the signal generation and analysis assembly 70 and generates error items or compensation data used for drift correction. The correction function corrects the measurement data using the error items or correction data and obtains correction data corresponding to the measurement data. Enabling drift correction means that when drift is detected, the correction function of the signal generation and analysis assembly 70 is applied, activated, or triggered. Conversely, disabling drift correction means that the correction function of the signal generation and analysis assembly 70 is terminated, disabled, prohibited, or blocked, and is not applied, activated, or triggered when drift is detected.

[0029] Except for prohibiting drift correction, the values ​​of other types of measurement parameters used in steps S210 and S220 may be the same as the values ​​of other types of original measurement parameters. For example, Figure 3 is a schematic diagram illustrating a measurement parameter according to one embodiment of the present disclosure. As shown in Figure 3, the frequency range from start frequency to stop frequency used in steps S210 and S220 is the same as the frequency range from start frequency to stop frequency used in the original measurement parameter. The frequency points and number of frequency points used in steps S210 and S220 (e.g., N is a single positive integer) are the same as the frequency points and number of frequency points used in the original measurement parameter (e.g., N is a single positive integer). However, because system drift verification correction is prohibited, a predetermined number of sweeps are reduced compared to enabling system drift verification correction. For example, the signal generation and analysis assembly 70 can apply a two-port error correction algorithm to a single-port dataset as well. When a user wants to measure S11 after calibrating two ports, the signal generation and analysis assembly 70 needs to measure all the original S parameters to complete one calibrated S11. This is how the correction function works; even if the user only requests S11, all four S parameters need to be measured. Therefore, by disabling the system drift verification correction, the measurement time for steps S210 and S220 can be reduced by decreasing the number of measurement sweeps compared to enabling the system drift verification correction.

[0030] In the second embodiment, the modified measurement parameter includes one or more frequency points used for measurement, and the number of frequency points in the modified measurement parameter is less than the number of frequency points in the original measurement parameter. For example, Figure 4 is a schematic diagram illustrating a measurement parameter according to one embodiment of the present disclosure. As shown in Figure 4, the number of frequency points used in steps S210 and S220 (e.g., X is a positive integer less than N, and N is a positive integer) is less than the number of frequency points used in the original measurement parameter (e.g., N is a positive integer). Furthermore, the one or more frequency points used in steps S210 and S220 may be different from the one or more frequency points used in the original measurement parameter. Except for the frequency points, the frequency range from start frequency to stop frequency used in steps S210 and S220 is the same as the frequency range from start frequency to stop frequency used in the original measurement parameter. Also, in steps S210 and S220, the correction of system drift verification is enabled. However, because there are fewer frequency points, the measurement time is reduced.

[0031] In the third embodiment, the modified measurement parameter includes disabling drift correction, while the original measurement parameter includes enabling drift correction. The modified measurement parameter further includes one or more frequency points used in the measurement, and the number of frequency points in the modified measurement parameter is less than the number of frequency points in the original measurement parameter. For example, Figure 4 is a schematic diagram illustrating a measurement parameter according to one embodiment of the present disclosure. As shown in Figure 4, the number of frequency points used in steps S210 and S220 (e.g., X is a positive integer less than N, and N is a positive integer) is less than the number of frequency points used in the original measurement parameter (e.g., N is a positive integer). Furthermore, one or more frequency points used in steps S210 and S220 may differ from one or more frequency points used in the original measurement parameter. Apart from the frequency points, the frequency range from start frequency to stop frequency used in steps S210 and S220 is the same as the frequency range from start frequency to stop frequency used in the original measurement parameter. Furthermore, steps S210 and S220 apply the restriction of prohibiting system drift verification correction. However, since there are fewer frequency points and system drift verification correction is prohibited, the measurement time is reduced.

[0032] In the fourth embodiment, the modified measurement parameter includes disabling drift correction, while the original measurement parameter includes enabling drift correction. The modified measurement parameter further includes one or more frequency points used for measurement, the number of frequency points in the modified measurement parameter is less than the number of frequency points in the original measurement parameter. The modified measurement parameter further includes a first frequency range used for measurement, the first frequency range is smaller than the second frequency range of the original measurement parameter.

[0033] For example, Figure 5 is a schematic diagram illustrating a measurement parameter according to one embodiment of the present disclosure. As shown in Figure 5, the frequency range of the measurement parameter used in steps S210 and S220 (i.e., the first frequency range) is different from the frequency range of the original measurement parameter (i.e., the second frequency range). The starting frequency of the frequency range of the measurement parameter used in steps S210 and S220 is different from the starting frequency of the frequency range of the original measurement parameter, and the stopping frequency of the frequency range of the measurement parameter used in steps S210 and S220 is different from the stopping frequency of the frequency range of the original measurement parameter. Also, the number of frequency points used in steps S210 and S220 (e.g., Y is a positive integer less than N, and N is a positive integer) is less than the number of frequency points used with the original measurement parameter (e.g., N is a positive integer). Furthermore, one or more frequency points used in steps S210 and S220 may be different from one or more frequency points used with the original measurement parameter. Furthermore, in steps S210 and S220, the correction for system drift verification is prohibited. Because the frequency range is relatively small, there are few frequency points, and the correction for system drift verification is prohibited, the measurement time is reduced.

[0034] In one embodiment, the controller 60 copies a parameter set. The parameter set includes one or more original measurement parameters of the signal generation and analysis assembly 70. For example, the parameter set includes one or a combination of the following: frequency range, start frequency of the frequency range, stop frequency of the frequency range, frequency points, number of frequency points, and enable or disable drift correction. The controller 60 generates a new parameter set containing the modified measurement parameters by replacing at least one modified measurement parameter in the original measurement parameters in the parameter set. In the second or third embodiment, for example, one or more frequency points are replaced. In the fourth embodiment, for example, the start frequency or stop frequency is replaced. The controller 60 then sends the new parameter set to the signal generation and analysis assembly 70. The signal generation and analysis assembly 70 then performs measurements using the modified measurement parameters.

[0035] In one embodiment, the number of sweeps required to perform measurements using at least one modified measurement parameter is reduced compared to the number of sweeps required to perform measurements using at least one original measurement parameter. The number of sweeps is reduced by disabling drift correction, reducing the number of frequency points, and / or reducing the frequency range.

[0036] As shown in Figure 2, the controller 60 compares the second measurement result with the first measurement result (S230). More specifically, the comparison result between the first and second measurement results is used to verify system drift. The controller 60 can inspect the difference between the first and second measurement results. The comparison result may be the difference in amplitude between the first and second measurement results. The controller 60 can set a difference boundary or threshold to verify whether the system is drifting. For example, if the amplitude difference is within the set boundary, the controller 60 determines that drift or system drift exists or has been detected. If the amplitude difference is not within the set boundary, the controller 60 determines that drift or system drift does not exist or has not been detected. In one embodiment, the absolute value of the measurement result is used to determine the accuracy of the first and second measurement results. If the first measurement result is incorrect, the amplitude difference is not used for comparison with the set boundary.

[0037] When system drift is detected, the signal generation and analysis assembly 70 executes the correction function by enabling system drift verification correction. However, when system drift is detected, the signal generation and analysis assembly 70 does not execute the correction function by disabling system drift verification correction.

[0038] In the fifth embodiment, the controller 60 can transmit movement commands for the probe assembly 20 to the positioning assembly 50. The movement commands are commands to raise, lower, or move a set distance, and / or commands to rotate by a set angle. The positioning assembly 50 raises, lowers, moves, and / or rotates the probe assembly 20 according to the movement commands. In one embodiment, the controller 60 can transmit movement commands for the chuck 30 to the chuck parallel movement structure. The chuck parallel movement structure raises, lowers, moves, and / or rotates the chuck 30 according to the movement commands. The chuck parallel movement structure includes actuators, electric actuators, stepping motors, piezoelectric actuators, rack and pinion assemblies, ball screw and nut assemblies, linear actuators, linear motors, and / or rotary actuators.

[0039] For example, Figure 6 is a schematic diagram illustrating a movement operation according to one embodiment of the present disclosure. As shown in Figure 6, the device under measurement 44 may be a first die 441 and a second die 442. A movement command is used to move the probe assembly 20 from a position where the probe tip 24 contacts the first crystal grain 441 to a position where the probe tip 24 contacts the second crystal grain 442.

[0040] The movement of the probe assembly 20 is performed in response to measurements using modified measurement parameters. For example, measurements using modified measurement parameters are performed when a movement command is sent. Drift verification is performed when the probe 22 is lifted into the air. Thus, the time spent moving is used to verify the drift of the system, saving time. In one embodiment, the modified measurement parameters of the first, second, third, or fourth embodiment are applied during the movement of the probe assembly 20.

[0041] Figure 7 is a flowchart illustrating the operation method of the probe system 10 according to one embodiment of the present disclosure. As shown in Figure 7, the controller 60 accepts a selection operation (step S710). More specifically, as described in step S210, a measurement is performed using the modified measurement parameters. The selection operation is used to replace the original measurement parameters with modified measurement parameters, which are different from the original measurement parameters. As described above, in the modified measurement parameters, the system drift verification correction settings, frequency range, start frequency, stop frequency, or frequency point differ from the original measurement parameters, which are preset within the signal generation and analysis assembly 70. The controller 60 can provide verification options on the user interface related to the first, second, third, fourth, and / or fifth embodiments described above. The description of the modified measurement parameters for the first, second, third, fourth, and / or fifth embodiments is omitted by referring to the description of the first, second, third, fourth, and / or fifth embodiments described above.

[0042] An input device (not shown, e.g., a keyboard, mouse, or touch panel) accepts a selection operation on the user interface for one of the verification options. This selection operation includes the selection of a modified major parameter value, e.g., start frequency, stop frequency, or frequency point.

[0043] Subsequently, based on the selection operation, measurements are performed using the modified measure parameters as described in steps S210 and S220.

[0044] The controller 60 displays the comparison result between the first measurement result and the second measurement result (step S720). More specifically, the first measurement result is generated in response to a measurement using the corrected measurement parameters, and the second measurement result is generated in response to a measurement using the corrected measurement parameters. The comparison result between the first and second measurement results is also used to verify system drift. For example, the difference in amplitude between the first and second measurement results is presented, or the detection of system drift is presented. In one embodiment, the comparison result between the first and second measurement results can be presented using a display or a speaker (not shown).

[0045] The controller 60 verifies the comparison result by providing a set boundary (step S730). More specifically, the set boundary is displayed on the display. As described above, the set boundary is used to verify whether or not system drift is occurring. For example, if the comparison result is the difference in amplitude between the first measurement result and the second measurement result, and the difference in amplitude is within the set boundary, system drift is detected. The comparison result is also displayed on the display along with the set boundary, allowing the user to see the verification result of system drift.

[0046] Details of the implementation of some of the steps in Figure 7 are described in detail in the embodiments and methods described above. Therefore, these details will not be repeated below. In addition to being implemented in circuit form, the steps and implementation details in the embodiments of this disclosure can be implemented in software form by a processing unit. The embodiments of this disclosure are not limited to these.

[0047] As shown in Figures 1-7, based on the above description, the Disclosure also provides a non-temporary computer-readable storage medium. The non-temporary computer-readable storage medium includes one or more computer-executable instructions. The computer-executable instructions direct the probe system 10 to perform the method of any of the embodiments described above. Where present, the computer-readable storage medium is also referred to here as the non-temporary computer-readable storage medium. This non-temporary computer-readable storage medium includes the definition, storage, and / or preservation of computer-executable instructions, programs, and / or code. These computer-executable instructions direct the probe system 10 and / or its controller 60 to perform any suitable part or subset of the method of the embodiments described above. Examples of such non-temporary computer-readable storage media include CD-ROMs, magnetic disks, hard disks, flash memory devices, and the like.

[0048] Based on the foregoing, the methods, systems, and media relating to system drift verification according to embodiments of this disclosure reduce the number of sweeps and frequency points or usage travel time intervals by, for example, prohibiting correction of system drift verification, or by replacing measurement parameters such as start frequency, stop frequency, or frequency point. As a result, embodiments of this disclosure can effectively shorten the measurement time for drift verification and improve the efficiency of the test process.

[0049] The present invention is disclosed by the embodiments described above, but this does not limit the invention. Those with general skill in the art may make certain changes and modifications without departing from the spirit of the invention. Therefore, the scope of protection of the present invention shall be defined by the scope of the patent application to be appended later. [Explanation of Symbols]

[0050] 10: Probe System 20: Probe Assembly 22: Probe 24: Probe tip 30: Chuck 32: Support surface 40: Circuit board 44: Device under test 48: Pad 50: Positioning Assembly 60: Control La 7 0: Signal generation and analysis assembly 80: Optical imaging device 441: The first die 442: The second die S210, S220, S230, S710, S720, S730: Step

Claims

1. A method for verifying system drift in a probe system, This is realized by a controller (60) connected to a signal generation and analysis assembly (70), the signal generation and analysis assembly (70) being connected to a device under test (DUT) (44) by a probe assembly (20), The aforementioned method, A step of performing a first measurement using at least one modified measurement parameter and generating a first measurement result for the at least one modified measurement parameter, wherein the at least one modified measurement parameter is different from at least one original measurement parameter, and the at least one original measurement parameter is pre-set in the signal generation and analysis assembly (70), The steps include: performing a second measurement using the at least one modified measurement parameter in response to a measurement using the at least one modified measurement parameter, and generating a second measurement result for the at least one modified measurement parameter; The process includes a step of comparing the second measurement result with the first measurement result, and using the comparison result between the first and second measurement results to verify system drift. A method characterized by the following:

2. The method according to claim 1, The aforementioned at least one modified measurement parameter includes prohibiting the correction used to verify system drift, The at least one original measurement parameter includes enabling the correction used to verify the system drift. A method characterized by the following:

3. The method according to claim 2, The aforementioned at least one modified measurement parameter further includes at least one frequency point used in the measurement, The number of at least one frequency points of the at least one modified measurement parameter is less than the number of frequency points of the at least one original measurement parameter. A method characterized by the following:

4. The method according to claim 2, The at least one modified measurement parameter further includes a first frequency range used for measurement. The first frequency range is smaller than the second frequency range of the at least one original measurement parameter. A method characterized by the following:

5. The method according to claim 1, The at least one modified measurement parameter includes at least one frequency point used in the measurement, and the number of the at least one frequency point in the at least one modified measurement parameter is less than the number of frequency points in the at least one original measurement parameter. A method characterized by the following:

6. The method according to claim 1, The step of transmitting a command to move the probe assembly (20), the movement of the probe assembly (20) being performed in response to the measurement by the at least one modified measurement parameter, further includes A method characterized by the following:

7. The method according to claim 1, The first measurement or the second measurement of the at least one modified measurement parameter is A step of copying a parameter set, wherein the parameter set includes the at least one original measurement parameter of the signal generation and analysis assembly (70), A step of replacing the measurement parameters in the parameter set with the at least one modified measurement parameter to generate a new parameter set containing the at least one modified measurement parameter, The step of sending the new parameter set includes A method characterized by the following:

8. The method according to claim 1, The comparison result between the first measurement result and the second measurement result is the difference in amplitude between the first measurement result and the second measurement result. Comparing the second measurement result with the first measurement result is When the system detects that the amplitude difference is within the set boundary, it determines that system drift has been detected, and This includes determining that no system drift has been detected if the amplitude difference is not within the set boundary. A method characterized by the following:

9. The method according to claim 1, The number of sweeps performed using the at least one modified measurement parameter is less than the number of sweeps performed using the at least one original measurement parameter. A method characterized by the following:

10. A method for operating a probe system (10), This is applied to a controller (60) connected to a signal generation and analysis assembly (70), the signal generation and analysis assembly (70) being connected to a device under test (44) by a probe assembly (20), The aforementioned operating method is: A step of accepting a selection operation, wherein a measurement is performed using at least one modified measurement parameter, the selection operation is used to replace at least one original measurement parameter with the at least one modified measurement parameter, the at least one modified measurement parameter is different from the at least one original measurement parameter, and the at least one original measurement parameter is pre-set in the signal generation and analysis assembly (70), A step of presenting a comparison result between a first measurement result and a second measurement result, wherein the first measurement result is generated in response to a first measurement of the at least one modified measurement parameter, the second measurement result is generated in response to a second measurement of the at least one modified measurement parameter, and the comparison result between the first measurement result and the second measurement result is used to verify system drift. A step of verifying the comparison result by providing the configured boundary, comprising the step of displaying the configured boundary on a display. A method characterized by the following:

11. The operating method according to claim 10, The at least one modified measurement parameter includes disabling the correction used to verify system drift, and the at least one original measurement parameter includes enabling the correction used to verify system drift. A method characterized by the following:

12. The operating method according to claim 10, The at least one modified measurement parameter further includes at least one frequency point used in the measurement, wherein the number of the at least one frequency point of the at least one modified measurement parameter is less than the number of frequency points of the at least one original measurement parameter, or The at least one modified measurement parameter further includes a first frequency range used for measurement, the first frequency range being smaller than the second frequency range of the at least one original measurement parameter. A method characterized by the following:

13. The operating method according to claim 10, The at least one modified measurement parameter includes at least one frequency point used in the measurement, and the number of the at least one frequency point in the at least one modified measurement parameter is less than the number of frequency points in the at least one original measurement parameter. A method characterized by the following:

14. The operating method according to claim 10, The steps include transmitting a command to move the probe assembly (20), which in turn responds to a measurement using the at least one modified measurement parameter and performs the movement of the probe assembly (20) based on the command. A method characterized by the following:

15. A probe system (10) configured to test a device under test (44) on a wafer, capable of performing system drift verification, and comprising a chuck (30), a probe assembly (20), a signal generation and analysis assembly (70), and a controller (60), The chuck (30) has a defined support surface configured to support the wafer including the device under measurement (DUT) (44), The probe assembly (20) has a probe tip (24) that is configured to physically contact the surface of the device to be measured (44), The signal generation and analysis assembly (70) has at least one of the following configurations: one for transmitting a measurement signal to the device under test (44), and one for receiving a result signal from the device under test (44). The controller (60) is connected to the signal generation and analysis assembly (70) and is programmed to perform the method described in claim 1. A system characterized by the following features.

16. A probe system (10) according to claim 15, The probe system (10) further includes a positioning assembly (50) and an optical imaging device (80), The positioning assembly (50) is configured to selectively change the relative direction between the probe tip (24) and the chuck (30), The optical imaging device (80) is configured to collect an optical image of at least one region of the probe system (10), The signal generation and analysis assembly (70) is a network analyzer. A system characterized by the following features.

17. A non-temporary computer-readable storage medium, The method includes a computer executable instruction, and when the computer executable instruction is executed, it instructs the probe system (10) to perform the method according to claim 1. A medium characterized by the following features.

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