PCB transport robot and control method for the PCB transport robot

Abstract

To provide a substrate transfer robot capable of suppressing substrate interference when transferring the substrate.SOLUTION: A substrate transfer robot 100 is structured so that a control section 30 acquires a transfer clearance C including at least any one of a clearance between a position of a substrate retaining hand 20 in a storage part 200 and a substrate 1 and a clearance between a substrate 1 transferred to the substrate retaining hand 20 and a substrate 1 adjacent to the substrate 1 transferred to the substrate retaining hand 20 and a clearance between mutual substrates 1 stored in the storage part 200 on the basis of images photographed by a photographing section 25. A control section 30 controls operations of a robot arm 10 and the substrate retaining hand 20 to perform at least one of carrying out a substrate 1 from the storage part 200 and carrying in a substrate 1 into the storage part 200 on the basis of the magnitude of the acquired transfer clearance C.SELECTED DRAWING: Figure 5

Description

Technical Field

[0001] The present disclosure relates to a substrate transfer robot and a control method for a substrate transfer robot, and in particular, to a substrate transfer robot including a substrate holding hand that holds a substrate and a control method for a substrate transfer robot.

Background Art

[0002] Conventionally, a substrate transfer robot including a substrate holding hand that holds a substrate is known (see, for example, Patent Document 1).

[0003] The above Patent Document 1 discloses a substrate transfer robot that unloads a substrate from a cassette storing a plurality of substrates. The substrate transfer robot unloads a substrate from the cassette by the hand based on teaching data taught in advance. The above Patent Document 1 also discloses a camera that captures images of a plurality of substrates stored in a cassette, and a control unit that processes images captured by the camera. Then, the control unit acquires the inclination angles, curved states, and the like of the plurality of substrates arranged in the cassette based on the images captured by the camera. The control unit corrects teaching data for unloading the substrate based on the acquired inclination angle, curved state, and the like of the substrate. That is, based on the acquired inclination angle, curved state, and the like of the substrate, the movement path, position, and the like of the hand that enters the cassette are changed. This makes it possible to unload the substrate from the cassette even when the substrate is arranged in an inclined state in the cassette or when the substrate is curved.

Prior Art Literature

Patent Literature

[0004]

Patent Document 1

Summary of Invention

Problem to be Solved by the Invention

[0005] In this case, multiple circuit boards are arranged in the cassette in a stacked manner with predetermined intervals between them. Therefore, as described in Patent Document 1 above, if the movement path and position of the hand entering the cassette are changed based on the tilt angle and curvature of the acquired circuit boards, the hand may interfere with a circuit board that is adjacent to the circuit board to be transported. Also, a circuit board being transported by the hand may interfere with an adjacent circuit board. Therefore, there is a problem in that circuit boards may interfere with each other when transporting them.

[0006] This disclosure was made to solve the above-mentioned problems, and one of its objectives is to provide a substrate transport robot and a control method for the substrate transport robot that can suppress interference between substrates when transporting the substrates. [Means for solving the problem]

[0007] A substrate transport robot according to the first aspect of this disclosure is a substrate transport robot that unloads substrates from a storage section for storing multiple substrates and loads substrates into the storage section, comprising: a robot arm; a substrate holding hand attached to the tip of the robot arm for holding substrates; an imaging unit for imaging multiple substrates stored in the storage section; and a control unit, wherein the control unit acquires a transport gap based on images captured by the imaging unit, which includes at least one of the following: the gap between the position of the substrate holding hand in the storage section and the substrate; the gap between the substrate being transported by the substrate holding hand and an adjacent substrate; and the gap between the substrates stored in the storage section; and controls the operation of the robot arm and the substrate holding hand to unload substrates from the storage section and load substrates into the storage section based on the size of the acquired transport gap, and the control unit acquires the transport gap both before unloading substrates from the storage section and before loading substrates into the storage section. death , The transport gap includes the gap between the upper surface of the substrate holding hand and the lower surface of the substrate positioned adjacent to the substrate holding hand above it, and the gap between the lower surface of the substrate holding hand and the upper surface of the substrate positioned adjacent to the substrate holding hand below it, within the storage compartment. .

[0008] In the substrate transport robot according to the first aspect of this disclosure, as described above, the control unit acquires a transport gap based on an image captured by the imaging unit, which includes at least one of the following: the gap between the position of the substrate holding hand and the substrate in the storage compartment, the gap between the substrate being transported by the substrate holding hand and the adjacent substrate, and the gap between the substrates stored in the storage compartment. Based on the size of the acquired transport gap, the control unit controls the movement of the robot arm and the substrate holding hand to perform at least one of the following: unloading a substrate from the storage compartment or loading a substrate into the storage compartment. This allows the control unit to prevent unloading a substrate from the storage compartment or loading a substrate into the storage compartment if the size of the transport gap is insufficient, even if the movement path and position of the substrate holding hand entering the storage compartment are changed based on the inclination angle and curvature of the substrate. As a result, interference between substrates can be suppressed when transporting substrates.

[0009] Furthermore, it is possible to move the optical sensor along the arrangement direction of the substrates stored in the storage compartment to detect the position of the substrates and obtain the transport gap. However, in this case, since the optical sensor only detects a part of the substrate, such as one end, it is difficult to accurately obtain the transport gap in the center and the other end of the substrate. Therefore, by obtaining the transport gap based on the image captured by the imaging unit as described above, it is possible to obtain the transport gap not only in one end of the substrate but also in the center and the other end. As a result, interference between substrates can be appropriately suppressed when transporting them. A substrate transport robot according to the second aspect of this disclosure is a substrate transport robot that transports substrates from a storage section for storing multiple substrates and transports substrates into the storage section, comprising a robot arm, a substrate holding hand attached to the tip of the robot arm for holding substrates, an imaging unit for imaging multiple substrates stored in the storage section, and a control unit, wherein the control unit determines the transport gap, based on the image captured by the imaging unit, to include at least one of the following: the gap between the position of the substrate holding hand in the storage section and the substrate, the gap between the substrate being transported by the substrate holding hand and an adjacent substrate, and the gap between the substrates stored in the storage section. Based on the acquired transport gap size, the robot arm and substrate holding hand control the movements to unload substrates from the storage unit and load substrates into the storage unit. The control unit acquires the transport gap both before unloading substrates from the storage unit and before loading substrates into the storage unit. The control unit acquires at least one of the shape and position of the substrates based on the image captured by the imaging unit, acquires the size of the transport gap, and further includes an optical sensor that moves along the arrangement direction in which the multiple substrates to be stored in the storage unit are arranged. The control unit corrects at least one of the shape and position of the substrates acquired based on the image captured by the imaging unit based on the detection result of the optical sensor. A substrate transport robot according to the third aspect of this disclosure is a substrate transport robot that unloads substrates from a storage section for storing multiple substrates and loads substrates into the storage section, comprising a robot arm, a substrate holding hand attached to the tip of the robot arm for holding substrates, an imaging unit for imaging multiple substrates stored in the storage section, and a control unit, the control unit, based on the images captured by the imaging unit, determines the position of the substrate holding hand within the storage section and the gap between the substrates, the gap between a substrate being transported by the substrate holding hand and a substrate adjacent to the substrate being transported by the substrate holding hand, and the gap between the substrates stored in the storage section. The control unit obtains a transport gap that includes at least one of the following, and controls the movement of the robot arm and the substrate holding hand to unload a substrate from the storage unit and load a substrate into the storage unit based on the size of the obtained transport gap, and obtains a transport gap both before unloading a substrate from the storage unit and before loading a substrate into the storage unit, the transport gap includes the gap between the upper surface of the substrate being transported by the substrate holding hand and the lower surface of the substrate positioned adjacent to the substrate holding hand above it, and the gap between the lower surface of the substrate holding hand that is transporting the substrate and the upper surface of the substrate positioned adjacent to the substrate holding hand below it.

[0010] This disclosure 4The control method for a substrate transport robot is a control method for a substrate transport robot that performs the actions of unloading substrates from a storage section for storing multiple substrates and loading substrates into the storage section, comprising: photographing multiple substrates stored in the storage section with an imaging unit; acquiring a transport gap based on the images taken by the imaging unit, which includes at least one of the following: the gap between the position of the substrate holding hand of the substrate transport robot and the substrate within the storage section, the gap between the substrate being transported by the substrate holding hand and the substrate adjacent to the substrate being transported by the substrate holding hand, and the gap between the substrates stored in the storage section; and controlling the operation of the robot arm and substrate holding hand of the substrate transport robot to unload substrates from the storage section and load substrates into the storage section based on the size of the acquired transport gap, wherein acquiring the transport gap includes acquiring the transport gap both before unloading substrates from the storage section and before loading substrates into the storage section. fruit , The transport gap includes the gap between the upper surface of the substrate holding hand and the lower surface of the substrate positioned adjacent to the substrate holding hand above it, and the gap between the lower surface of the substrate holding hand and the upper surface of the substrate positioned adjacent to the substrate holding hand below it, within the storage compartment. .

[0011] This disclosure 4The control method for a substrate transport robot, as described above, includes: photographing multiple substrates stored in a storage compartment with an imaging unit; acquiring a transport gap based on the images taken by the imaging unit, which includes at least one of the following: the gap between the position of the substrate holding hand of the substrate transport robot and the substrate within the storage compartment, and the gap between the substrate being transported by the substrate holding hand and the substrate adjacent to the substrate being transported by the substrate holding hand; and controlling the operation of the robot arm and substrate holding hand of the substrate transport robot to perform at least one of the following based on the size of the acquired transport gap: unloading a substrate from the storage compartment or loading a substrate into the storage compartment. This allows the control to be made so as not to unload a substrate from the storage compartment or load a substrate into the storage compartment if the size of the transport gap is insufficient, even if the movement path and position of the substrate holding hand entering the storage compartment are changed based on the inclination angle and curvature of the substrate. As a result, it is possible to provide a control method for a substrate transport robot that can suppress interference between substrates when transporting them.

[0012] Furthermore, it is possible to move the optical sensor along the arrangement direction of the substrates stored in the storage compartment to detect the position of the substrates and obtain the transport gap. However, in this case, since the optical sensor only detects a part of the substrate, such as one side edge, it is difficult to accurately obtain the transport gap in the center and the other side edge of the substrate. Therefore, by obtaining the transport gap based on the image captured by the imaging unit as described above, it is possible to obtain the transport gap not only in one side edge of the substrate but also in the center and the other side edge. As a result, it is possible to provide a control method for a substrate transport robot that can suppress interference in the center and the other side edge of the substrate. A control method for a substrate transport robot according to the fifth aspect of this disclosure is a control method for a substrate transport robot that unloads substrates from a storage section for storing multiple substrates and loads substrates into the storage section, comprising: photographing the multiple substrates stored in the storage section with an imaging unit; obtaining a transport gap based on the images taken by the imaging unit, which includes at least one of the following: the gap between the position of the substrate holding hand of the substrate transport robot in the storage section and the substrate; the gap between the substrate being transported by the substrate holding hand and the substrate adjacent to the substrate being transported by the substrate holding hand; and the gap between the substrates stored in the storage section; and unloading the substrates from the storage section based on the size of the obtained transport gap. The system includes controlling the operation of the robot arm and substrate holding hand of a substrate transport robot to perform the tasks of transporting substrates into a storage compartment, and acquiring the transport gap includes acquiring the transport gap both before transporting substrates out of the storage compartment and before transporting substrates into the storage compartment, and acquiring the transport gap includes acquiring at least one of the shape and position of the substrate based on an image taken by an imaging unit, acquiring the size of the transport gap, and correcting at least one of the shape and position of the substrate acquired based on an image taken by an imaging unit based on the detection result of an optical sensor that moves along the arrangement direction in which the plurality of substrates to be stored in the storage compartment are arranged. A control method for a substrate transport robot according to the sixth aspect of this disclosure is a control method for a substrate transport robot that unloads substrates from a storage section for storing multiple substrates and loads substrates into the storage section, comprising: photographing the multiple substrates stored in the storage section with an imaging unit; obtaining a transport gap based on the images taken by the imaging unit, which includes at least one of the following: the gap between the position of the substrate holding hand of the substrate transport robot in the storage section and the substrate; the gap between the substrate being transported by the substrate holding hand and an adjacent substrate to the substrate being transported by the substrate holding hand; and the gap between the substrates stored in the storage section. The system includes controlling the operation of the robot arm and substrate holding hand of a substrate transport robot to unload a substrate from a storage unit and load a substrate into a storage unit based on the size of the transport gap, wherein acquiring the transport gap includes acquiring the transport gap both before unloading the substrate from the storage unit and before loading the substrate into the storage unit, and the transport gap includes the gap between the upper surface of the substrate being transported by the substrate holding hand and the lower surface of the substrate positioned adjacent to the substrate holding hand above it, and the gap between the lower surface of the substrate holding hand transporting the substrate and the upper surface of the substrate positioned adjacent to the substrate holding hand below it. A substrate transport robot according to the seventh aspect of this disclosure is a substrate transport robot that unloads substrates from a storage compartment for storing multiple substrates and loads substrates into the storage compartment, comprising a robot arm, a substrate holding hand attached to the tip of the robot arm for holding substrates, an imaging unit for imaging multiple substrates stored in the storage compartment, and a control unit, wherein the control unit obtains a transport gap that includes at least one of the gap between the upper surface of the substrate holding hand and the lower surface of a substrate positioned adjacent to the substrate holding hand above the substrate holding hand, and the gap between the lower surface of the substrate holding hand and the upper surface of a substrate positioned adjacent to the substrate holding hand below the substrate holding hand, based on an image taken by the imaging unit, and controls the movement of the robot arm and the substrate holding hand to unload substrates from the storage compartment and load substrates into the storage compartment based on the size of the obtained transport gap, and the control unit obtains the transport gap both before unloading substrates from the storage compartment and before loading substrates into the storage compartment. A substrate transport robot according to the eighth aspect of this disclosure is a substrate transport robot that unloads substrates from a storage section for storing multiple substrates and loads substrates into the storage section, comprising a robot arm, a substrate holding hand attached to the tip of the robot arm for holding substrates, an imaging unit for imaging multiple substrates stored in the storage section, and a control unit, wherein the control unit obtains a transport gap based on an image taken by the imaging unit, which includes at least one of the gap between the upper surface of a substrate being transported by the substrate holding hand and the lower surface of a substrate positioned adjacent to the substrate holding hand above it, and the gap between the lower surface of the substrate holding hand transporting the substrate and the upper surface of a substrate positioned adjacent to the substrate holding hand below it, and controls the movement of the robot arm and the substrate holding hand to unload substrates from the storage section and load substrates into the storage section based on the size of the obtained transport gap, and the control unit obtains the transport gap both before unloading substrates from the storage section and before loading substrates into the storage section. A control method for a substrate transport robot according to the ninth aspect of this disclosure is a control method for a substrate transport robot that unloads substrates from a storage section for storing multiple substrates and loads substrates into the storage section, comprising: photographing the multiple substrates stored in the storage section with an imaging unit; obtaining a transport gap based on the images taken by the imaging unit, which includes at least one of the following: the gap between the upper surface of a substrate holding hand attached to the tip of a robot arm to hold the substrates and the lower surface of a substrate positioned adjacent to the substrate holding hand above the substrate holding hand, and the gap between the lower surface of the substrate holding hand and the upper surface of a substrate positioned adjacent to the substrate holding hand below the substrate holding hand, and controlling the operation of the robot arm and substrate holding hand of the substrate transport robot to unload substrates from the storage section and load substrates into the storage section based on the size of the obtained transport gap, wherein obtaining the transport gap includes obtaining the transport gap both before unloading substrates from the storage section and before loading substrates into the storage section. A control method for a substrate transport robot according to the tenth aspect of this disclosure is a control method for a substrate transport robot that unloads substrates from a storage section for storing multiple substrates and loads substrates into the storage section, comprising: photographing the multiple substrates stored in the storage section with an imaging unit; obtaining a transport gap based on the images taken by the imaging unit, which includes at least one of the following: the gap between the upper surface of a substrate being transported by a substrate holding hand attached to the tip of a robot arm to hold the substrate and the lower surface of a substrate positioned adjacent to the substrate holding hand above the substrate holding hand; and the gap between the lower surface of the substrate holding hand transporting the substrate and the upper surface of a substrate positioned adjacent to the substrate holding hand below the substrate holding hand; and controlling the operation of the robot arm and substrate holding hand of the substrate transport robot to unload substrates from the storage section and load substrates into the storage section based on the size of the obtained transport gap, wherein obtaining the transport gap includes obtaining the transport gap both before unloading substrates from the storage section and before loading substrates into the storage section. [Effects of the Invention]

[0013] According to the present disclosure, interference of the substrate can be suppressed when the substrate is transferred. [Brief Description of the Drawings]

[0014] [Figure 1] FIG. 1 is a perspective view showing the configuration of a substrate transfer robot according to an embodiment. [Figure 2] FIG. 2 is a perspective view showing the configuration of a substrate transfer robot and a storage unit according to an embodiment. [Figure 3] FIG. 3 is a perspective view showing the configuration of a substrate holding hand according to an embodiment. [Figure 4] FIG. 4 is a side view showing the configuration of a substrate transfer robot and a storage unit according to an embodiment. [Figure 5] FIG. 5(1) is a diagram showing a plurality of substrates stored in a storage unit according to an embodiment. [Figure 6] FIG. 5(2) is a diagram showing a plurality of substrates stored in a storage unit according to an embodiment. [Figure 7] FIG. 6 is a flow chart for explaining the operation of a substrate holding robot according to an embodiment. [Figure 8] FIG. 7 is a side view showing the configuration of a substrate transfer robot and a storage unit according to a modified example. [Mode for Carrying Out the Invention]

[0015] Hereinafter, an embodiment embodying the present disclosure will be described with reference to the drawings.

[0016] With reference to FIGS. 1 to 7, the configuration of the substrate transfer robot 100 according to the present embodiment will be described.

[0017] As shown in Figures 1 and 2, the substrate transport robot 100 transports substrates 1, such as semiconductor wafers and printed circuit boards. The substrate transport robot 100 performs at least one of the following: unloading substrates 1 from a storage unit 200 for storing multiple substrates 1, and loading substrates 1 into the storage unit 200.

[0018] The substrate transfer robot 100 comprises a robot arm 10 and a substrate holding hand 20 attached to the tip of the robot arm 10 for holding the substrate 1. The substrate transfer robot 100 also includes a control unit 30 for controlling the operation of the substrate transfer robot 100.

[0019] The robot arm 10 is a horizontal articulated robot arm. The robot arm 10 includes a first robot arm 11 and a second robot arm 12. The first robot arm 11 is configured to rotate with respect to a lifting axis 13, which will be described later, with one end as the pivot point. Specifically, one end of the first robot arm 11 is rotatably connected to the lifting axis 13 via a first joint JT1. The second robot arm 12 is configured to rotate with respect to the first robot arm 11, with one end as the pivot point. Specifically, one end of the second robot arm 12 is rotatably connected to the other end of the first robot arm 11 via a second joint JT2. A substrate holding hand 20 is also rotatably connected to the other end of the second robot arm 12 via a third joint JT3. Each of the joints, the first joint JT1, the second joint JT2, and the third joint JT3, is equipped with a servo motor, which is the drive source for rotational drive, and a rotational position sensor, which detects the rotational position of the output shaft of the servo motor.

[0020] Furthermore, the substrate transport robot 100 is equipped with a lifting axis 13 for raising and lowering the robot arm 10. The lifting axis 13 is fitted with a servo motor and a rotational position sensor for detecting the rotational position of the output shaft of the servo motor.

[0021] The substrate holding hand 20 is provided with a blade 21. The blade 21 is a thin, plate-shaped support plate that supports the substrate 1. The blade 21 has a bifurcated tip. At the tips of the bifurcated portions of the blade 21, a pair of support parts 22 are positioned. In addition, a pair of support parts 23 are positioned at the base end of the blade 21. The pair of support parts 22 and the pair of support parts 23 support the back surface of the outer edge of the substantially circular substrate 1 from below.

[0022] In this embodiment, as shown in Figure 3, the substrate transfer robot 100 is equipped with an optical sensor 24 that moves along the arrangement direction in which the multiple substrates 1 stored in the storage section 200 are arranged. The optical sensor 24 is located at the tip of the substrate holding hand 20. Specifically, the optical sensor 24 is located at the tip of a bifurcated blade 21. The optical sensor 24 is, for example, a transmissive sensor. The optical sensor 24 includes a light-emitting section 24a and a light-receiving section 24b. The light-emitting section 24a emits detection light toward the light-receiving section 24b. The detection light is, for example, infrared light. Note that a reflective type optical sensor 24 may also be used.

[0023] In this embodiment, as shown in Figure 4, the optical sensor 24 is moved by the substrate holding hand 20 along the arrangement direction in which the multiple substrates 1 are arranged. Specifically, the optical sensor 24 moves along the arrangement direction of the multiple substrates 1 as the robot arm 10 is raised and lowered by the lifting axis 13. The arrangement direction is the vertical direction. The robot arm 10 is raised and lowered so that the end of the substrate 1 is positioned between the bifurcated tips of the blade 21. As a result, when the substrate 1 is positioned between the bifurcated tips of the blade 21, the detection light emitted toward the light receiving unit 24b is blocked. This detects the presence of the substrate 1. When the substrate 1 is not positioned between the bifurcated tips of the blade 21, the detection light emitted toward the light receiving unit 24b is received by the light receiving unit 24b. This detects that the substrate 1 is not present. The detection result of the light receiving unit 24b is input to the control unit 30. The presence or absence of the substrate 1 is determined by the control unit 30. The control unit 30 receives the detection result from the light receiving unit 24b, as well as the detection result from the rotation position sensor that detects the rotational position of the output shaft of the servo motor of the lifting shaft 13. This allows the control unit 30 to associate the position of the lifting shaft 13 with the presence or absence of the substrate 1. In other words, the control unit 30 obtains the vertical position where the substrate 1 is placed. Furthermore, the control unit 30 obtains the shape of the substrate 1 based on the detection result from the light receiving unit 24b. The shape of the substrate 1 may be, for example, a shape along a horizontal plane or a curved shape.

[0024] In this embodiment, as shown in Figure 4, the substrate transport robot 100 is equipped with an imaging unit 25 that photographs the multiple substrates 1 stored in the storage unit 200. The imaging unit 25 consists of, for example, a two-dimensional camera. The imaging unit 25 may also be configured with a three-dimensional camera. Furthermore, the imaging unit 25 cannot photograph all the substrates 1 stored in the storage unit 200 in a single shot. Therefore, in order to photograph all the substrates 1 stored in the storage unit 200, it is necessary to perform multiple shots with the imaging unit 25. The imaging unit 25 photographs the multiple substrates 1 stored in the storage unit 200 from outside the storage unit 200.

[0025] In this embodiment, the imaging unit 25 is located on the robot arm 10 or the substrate holding hand 20. Specifically, in this embodiment, the imaging unit 25 is located on the base end side of the substrate holding hand 20. That is, the imaging unit 25 rotates in conjunction with the rotation of the substrate holding hand 20 around the JT3 axis. The imaging unit 25 also moves up and down in conjunction with the raising and lowering of the robot arm 10 and the substrate holding hand 20 by the lifting axis 13.

[0026] In this embodiment, the substrate transport robot 100 is equipped with a notification unit 40. The notification unit 40 notifies, by voice or image, that the substrate 1 cannot be removed from the storage unit 201 (described later) and that the substrate 1 cannot be loaded into the storage unit 202.

[0027] As shown in Figure 5, the storage section 200 houses multiple circuit boards 1. The multiple circuit boards 1 are arranged side by side in the vertical direction within the storage section 200. The multiple circuit boards 1 are arranged with a predetermined distance between them. On the inner surface of the storage section 200, there are protrusions 200a on which the circuit boards 1 are placed. The protrusions 200a protrude along the horizontal direction. The circuit boards 1 are placed on the protrusions 200a.

[0028] As shown in Figure 2, the storage unit 200 includes a storage unit 201 in which the substrate 1 is stored in advance, and a storage unit 202 into which the substrate 1 is loaded after being unloaded from the storage unit 201 by the substrate transport robot 100.

[0029] As shown in Figure 5, multiple substrates 1 are arranged in the storage section 200. The first and third substrates 1 from the top in Figure 5 have a shape that follows the horizontal plane. The second substrate 1 from the top in Figure 5 has a shape that curves downward. The fourth substrate 1 from the top in Figure 5 is inclined with respect to the horizontal plane because it is placed on protrusions 200a that are at different height positions.

[0030] In this embodiment, the control unit 30 acquires a transport gap C based on the image captured by the imaging unit 25, which includes at least one of the following: the gap between the position of the substrate holding hand 20 and the substrate 1 in the storage unit 200, the gap between the substrate 1 being transported by the substrate holding hand 20 and the adjacent substrate 1 to the substrate 1 being transported by the substrate holding hand 20, and the gaps between the substrates 1 stored in the storage unit 200. The control unit 30 then controls the operation of the robot arm 10 and the substrate holding hand 20 to perform at least one of the following: unloading the substrate 1 from the storage unit 201 and loading the substrate 1 into the storage unit 202, based on the acquired size of the transport gap C. In this embodiment, both unloading and loading of the substrate 1 are performed based on the acquired size of the transport gap C. Furthermore, in this embodiment, the transport gap C includes all of the following: the gap between the position of the substrate holding hand 20 within the storage section 200 and the substrate 1; the gap between the substrate 1 being transported by the substrate holding hand 20 and the substrate 1 adjacent to the substrate 1 being transported by the substrate holding hand 20; and the gaps between the substrates 1 stored in the storage section 200.

[0031] In this embodiment, the transport gap C includes a gap C1 between the upper surface 20a of the substrate holding hand 20 and the lower surface 1b of the substrate 1, which is positioned adjacent to the substrate holding hand 20 above it, and a gap C2 between the lower surface 20b of the substrate holding hand 20 and the upper surface 1a of the substrate 1, which is positioned adjacent to the substrate holding hand 20 below it, within the storage section 200. Here, the upper surface 20a of the substrate holding hand 20 includes the upper surface of the blade 21 and the upper surfaces of the support section 22 and the support section 23. In other words, it is the entire area above the substrate holding hand 20. The lower surface 20b of the substrate holding hand 20 includes the lower surface of the blade 21. In other words, it is the entire area below the substrate holding hand 20. That is, the transport gap C is the hatched area in Figure 5. In other words, it refers to the gap between the substrate holding hand 20 and the adjacent substrate 1 on the upper side and the adjacent substrate 1 on the lower side, when viewed from the direction in which the substrate holding hand 20 enters the storage section 200.

[0032] In this embodiment, as shown in Figure 6, the transport gap C includes a gap C3 between the upper surface 1a of the substrate 1 being transported by the substrate holding hand 20 and the lower surface 1b of the substrate 1 positioned adjacent to the substrate holding hand 20 above it, and a gap C4 between the lower surface 20b of the substrate holding hand 20 that is transporting the substrate 1 and the upper surface 1a of the substrate 1 positioned adjacent to the substrate holding hand 20 below it. In other words, the transport gap C includes the first and second hatched regions from the top in Figure 6.

[0033] The transport gap C includes the gap C5 between the substrates 1 stored in the storage unit 200. Specifically, the transport gap C includes the third hatched area from the top in Figure 6. Although only one gap C5 is shown in Figure 6, in reality, gap C5 is acquired for all substrates 1 stored in the storage unit 200.

[0034] In this embodiment, the control unit 30 acquires at least one of the shape and position of the substrate 1 based on the image captured by the imaging unit 25, and acquires the size of the transport gap C. Specifically, the control unit 30 acquires both the shape and position of the substrate 1 by performing image analysis on the image captured by the imaging unit 25. For example, the control unit 30 acquires the shape of the substrate 1 along the horizontal plane and the curved shape based on the image captured by the imaging unit 25. The control unit 30 also acquires the position of the substrate 1 based on the image captured by the imaging unit 25.

[0035] In this embodiment, the control unit 30 corrects at least one of the shape and position of the substrate 1, which are acquired based on the image captured by the imaging unit 25, based on the detection result of the optical sensor 24. Here, the detection accuracy of the optical sensor 24 is higher than that of the imaging unit 25. Therefore, the control unit 30 corrects at least one of the shape and position of the substrate 1 obtained by the imaging unit 25 based on the detection result of the high-precision optical sensor 24. In this embodiment, both the shape and position of the substrate 1 are corrected.

[0036] In this embodiment, as shown in Figure 4, the control unit 30 controls the imaging unit 25 to photograph multiple substrates 1 at the position where the substrate 1 is detected by the optical sensor 24. As described above, the optical sensor 24 moves in the direction of the arrangement of multiple substrates 1 as the robot arm 10 is raised and lowered by the lifting axis 13. For example, the optical sensor 24 rises when the robot arm 10 is raised. When a substrate 1 is positioned between the bifurcated tips of the blade 21, the detection light emitted toward the light receiving unit 24b is blocked by the substrate 1. As a result, the control unit 30 causes the imaging unit 25 to take an image. The control unit 30 causes the imaging unit 25 to take an image each time a substrate 1 is detected, or each time a predetermined number of substrates 1 are detected.

[0037] In this embodiment, the control unit 30 acquires the position of the substrate holding hand 20 within the storage unit 200 based on the movement path of the substrate holding hand 20 when transporting the substrate 1, which has been taught in advance. Specifically, the substrate transport robot 100 is taught in advance a movement path for unloading the substrate 1 from the storage unit 201 and a movement path for loading the substrate 1 into the storage unit 202. As a result, the control unit 30 can acquire the position of the substrate holding hand 20 when it is inserted into the storage unit 201 or storage unit 202, based on the movement path that has been taught in advance. The control unit 30 also acquires gaps C1 and C2 based on the position of the substrate holding hand 20 acquired based on the movement path that has been taught in advance and the shape and position of the substrate 1, which have been acquired from the image captured by the imaging unit 25 and corrected based on the detection result of the optical sensor 24. The control unit 30 also acquires gaps C3 and C4 based on the movement path of the substrate holding hand 20 when transporting the substrate 1 and the shape of the substrate 1, which have been taught in advance.

[0038] For storage units 201 where multiple circuit boards 1 are placed, before unloading the circuit boards 1 from storage units 201, the optical sensor 24 is moved upward once while the imaging unit 25 photographs the circuit boards 1 multiple times. This allows the control unit 30 to acquire the position and shape of all circuit boards 1 placed in storage units 201. For storage units 202 into which circuit boards 1 are loaded, for example, before the circuit boards 1 are loaded, suppose a circuit board 1 is placed on an odd-numbered protruding section 200a. In this case, the optical sensor 24 is moved upward once while the imaging unit 25 photographs the circuit boards 1 placed on the odd-numbered protruding sections 200a multiple times. This allows the control unit 30 to acquire the position and shape of the circuit boards 1 placed on the odd-numbered protruding sections 200a of storage units 202.

[0039] In this embodiment, if the control unit 30 determines that the detected transport gap C is large enough to transport the substrate 1, it controls the operation of the robot arm 10 and the substrate holding hand 20 to perform at least one of the following: unloading the substrate 1 from the storage unit 201 and loading the substrate 1 into the storage unit 202. In this embodiment, the control unit 30 controls the operation of the robot arm 10 and the substrate holding hand 20 to perform both unloading and loading of the substrate 1. The control unit 30 determines that the detected transport gap C is large enough so that when the substrate holding hand 20 unloads the substrate 1 from the storage unit 201, the substrate holding hand 20 and the substrate 1 held by the substrate holding hand 20 do not interfere with adjacent substrates 1. In this case, the control unit 30 controls the operation of the robot arm 10 and the substrate holding hand 20 to unload the substrate 1 from the storage unit 200. Furthermore, the control unit 30 determines that the detected transport gap C is large enough so that the substrate holding hand 20 and the substrate 1 held by the substrate holding hand 20 do not interfere with adjacent substrates 1 when the substrate 1 is loaded into the storage unit 202 by the substrate holding hand 20. In this case, the control unit 30 controls the operation of the robot arm 10 and the substrate holding hand 20 to load the substrate 1 into the storage unit 202.

[0040] In this embodiment, if the control unit 30 determines that the detected transport gap C is not large enough to transport the substrate 1, it corrects the transport path of the substrate 1, which has been taught in advance, based on the detected transport gap C. For example, when the control unit 30 is unloading a substrate 1 that is curved downward, it determines that the gap C2 between the lower part of the substrate 1 and the control unit 30 is not large enough to transport the substrate 1. In this case, because the substrate 1 is curved downward, if the substrate holding hand 20 is moved into the storage section 201 along the pre-taught transport path, the substrate holding hand 20 and the substrate 1 will interfere with each other. Therefore, the control unit 30 corrects the transport path that the substrate holding hand 20 moves into the storage section 201 downward. This suppresses interference between the substrate holding hand 20 and the substrate 1.

[0041] In this embodiment, if the control unit 30 determines that at least one of the following is not possible—either unloading the substrate 1 from the storage unit 200 or loading the substrate 1 into the storage unit 200—even after correcting the pre-programmed transport path of the substrate 1, it controls the control unit 30 to notify the notification unit 40 that at least one of loading or unloading the substrate 1 is not possible. In this embodiment, the control unit 30 controls the control unit 40 to notify both that the substrate 1 cannot be unloaded from the storage unit 201 and that the substrate 1 cannot be loaded into the storage unit 202. Substrates 1 that are determined to be unloadable are unloaded. As a result, the gaps between the substrates 1 become larger, and substrates 1 that were previously determined to be unloadable may become unloadable. In this case, substrates 1 that were previously determined to be unloadable are also unloaded. In addition, among the substrates 1 to be loaded into the storage unit 202, those that are determined to be loadable are loaded.

[0042] Next, the operation of the substrate transport robot 100 will be explained with reference to Figure 7. Note that the following explanation will focus on the removal of the substrate 1 from the storage unit 201, but the loading of the substrate 1 into the storage unit 202 is performed in a similar manner.

[0043] First, in step S1, as shown in Figure 4, the control unit 30 moves the robot arm 10 to move the substrate holding hand 20 below the substrate 1 stored in the storage unit 201. Then, the control unit 30 moves the robot arm 10 upward using the lifting axis 13. The control unit 30 then detects the presence or absence of the substrate 1 using the optical sensor 24 located on the substrate holding hand 20.

[0044] In step S2, the control unit 30 controls the imaging unit 25 to photograph multiple substrates 1 at the position where the substrate 1 is detected by the optical sensor 24. The control unit 30 moves the robot arm 10 upward using the lifting axis 13, and then moves the substrate holding hand 20 toward the lifting axis 13.

[0045] In step S3, the control unit 30 acquires the shape and position of the substrate 1 based on the image captured by the imaging unit 25. The control unit 30 also corrects the shape and position of the substrate 1 acquired based on the image captured by the imaging unit 25 based on the detection result of the optical sensor 24.

[0046] In step S4, the control unit 30 obtains a transport gap C based on the image captured by the imaging unit 25, which includes at least one of the following: the gap between the position of the substrate holding hand 20 and the substrate 1 within the storage unit 200; the gap between the substrate 1 being transported by the substrate holding hand 20 and the adjacent substrate 1 to the substrate 1 being transported by the substrate holding hand 20; and the gaps between the substrates 1 stored in the storage unit 200. Specifically, the control unit 30 obtains the transport gap C based on the shape and position of the substrate 1 corrected based on the detection results of the optical sensor 24.

[0047] In step S5, the control unit 30 determines whether the acquired transport gap C is large enough to transport the substrate 1.

[0048] In step S5, if the answer is yes, then in step S6, the control unit 30 controls the operation of the robot arm 10 and the substrate holding hand 20 so as to unload the substrate 1 from the storage unit 200.

[0049] In step S5, if the answer is no, in step S7, the control unit 30 corrects the pre-taught transport path of the substrate 1 based on the detected transport gap C.

[0050] In step S8, the control unit 30 determines whether or not it is possible to unload the substrate 1 from the storage unit 200 based on the corrected transport path.

[0051] In step S8, if the answer is yes, in step S6, the control unit 30 controls the operation of the robot arm 10 and the substrate holding hand 20 so as to unload the substrate 1 from the storage unit 200.

[0052] In step S8, if the answer is no, in step S9, the control unit 30 performs control to notify the notification unit 40 that the substrate 1 cannot be removed from the storage unit 200.

[0053] [Effects of this embodiment] In this embodiment, the following effects can be obtained.

[0054] In this embodiment, as described above, the control unit 30 acquires a transport gap C based on the image captured by the imaging unit 25, which includes at least one of the gaps between the position of the substrate holding hand 20 and the substrate 1 in the storage unit 200, the gap between the substrate 1 being transported by the substrate holding hand 20 and the adjacent substrate 1 to the substrate 1 being transported by the substrate holding hand 20, and the gaps between the substrates 1 stored in the storage unit 200. Based on the size of the acquired transport gap C, the control unit 30 controls the operation of the robot arm 10 and the substrate holding hand 20 to perform at least one of the following: unloading the substrate 1 from the storage unit 200 or loading the substrate 1 into the storage unit 200. This makes it possible to control the operation so that even if the movement path and position of the substrate holding hand 20 entering the storage unit 200 are changed based on the inclination angle and curvature of the substrate 1, the transport gap C is not large enough to unload the substrate 1 from the storage unit 200 or load the substrate 1 into the storage unit 200. Therefore, it is possible to suppress interference between the substrate holding hand 20 and substrates 1 positioned adjacent to the substrate 1 to be transported, and between the substrate 1 being transported by the substrate holding hand 20 and substrates 1 positioned adjacent to it. As a result, interference between substrates 1 can be suppressed when transporting the substrates 1.

[0055] Furthermore, it is also possible to move the optical sensor 24 along the arrangement direction of the substrates 1 stored in the storage unit 200 to detect the position of the substrates 1 and obtain the transport gap C. However, in this case, since the optical sensor 24 detects only a part of the substrate 1, such as one end, it is difficult to accurately obtain the transport gap C at the center and the other end of the substrate 1. Therefore, by obtaining the transport gap C based on the image captured by the imaging unit 25 as described above, it is possible to obtain the transport gap C not only at one end of the substrate 1 but also at the center and the other end. As a result, interference of the substrate 1 can be appropriately suppressed when transporting the substrate 1.

[0056] In this embodiment, as described above, the transport gap C includes a gap C1 between the upper surface 20a of the substrate holding hand 20 and the lower surface 1b of the substrate 1 positioned adjacent to the substrate holding hand 20 above it, and a gap C2 between the lower surface 20b of the substrate holding hand 20 and the upper surface 1a of the substrate 1 positioned adjacent to the substrate holding hand 20 below it, within the storage section 200. This makes it possible to suppress interference between the substrate 1 positioned on the upper surface 20a side and the substrate 1 positioned on the lower surface 20b side of the substrate holding hand 20. As a result, interference of the substrate 1 during transport can be further suppressed.

[0057] In this embodiment, as described above, the control unit 30 acquires at least one of the shape and position of the substrate 1 based on the image captured by the imaging unit 25, and acquires the size of the transport gap C. This makes it possible to acquire the transport gap C while reflecting at least one of the shape and position of the substrate 1. As a result, interference of the substrate 1 during transport can be further suppressed.

[0058] In this embodiment, as described above, the control unit 30 corrects at least one of the shape and position of the substrate 1, which is acquired based on the image captured by the imaging unit 25, based on the detection result of the optical sensor 24. As a result, even if at least one of the shape and position of the substrate 1 cannot be properly acquired from the image captured by the imaging unit 25, at least one of the shape and position of the substrate 1 can be properly acquired based on the detection result of the optical sensor 24, which has relatively high accuracy.

[0059] In this embodiment, as described above, the control unit 30 controls the imaging unit 25 to photograph multiple substrates 1 at the positions where the substrate 1 is detected by the optical sensor 24. This makes it possible to photograph the entirety of multiple substrates 1 by taking multiple shots, even when there are a relatively large number of substrates 1 and it is not possible to photograph all of them in a single shot by the imaging unit 25.

[0060] In this embodiment, as described above, the imaging unit 25 is positioned on the robot arm 10 or the substrate holding hand 20, and the optical sensor 24 is positioned at the tip of the substrate holding hand 20 and is moved by the substrate holding hand 20 along the arrangement direction of the multiple substrates 1. This allows the imaging unit 25 to move together with the optical sensor 24 as the substrate holding hand 20 moves.

[0061] In this embodiment, as described above, the control unit 30 acquires the position of the substrate holding hand 20 within the storage unit 200 based on the movement path of the substrate holding hand 20 when transporting the substrate 1, which has been taught in advance. This makes it possible to acquire the transport gap C without actually inserting the substrate holding hand 20 into the storage unit 200 and photographing both the substrate holding hand 20 and the substrate 1 with the imaging unit 25.

[0062] In this embodiment, as described above, when the control unit 30 determines that the detected transport gap C is large enough to transport the substrate 1, it controls the operation of the robot arm 10 and the substrate holding hand 20 to perform at least one of the following: unloading the substrate 1 from the storage unit 200 or loading the substrate 1 into the storage unit 200. This prevents at least one of the unloading or loading of the substrate 1 from occurring when the transport gap C is insufficient for transporting the substrate 1. As a result, damage to the substrate 1 caused by interference with other substrates 1 or the substrate holding hand 20 can be suppressed.

[0063] In this embodiment, as described above, if the control unit 30 determines that the detected transport gap C is not large enough to transport the substrate 1, it corrects the transport path of the substrate 1 that has been taught in advance based on the detected transport gap C. As a result, even if the transport gap C is insufficient for transporting the substrate 1, the transport path of the substrate 1 can be corrected, thereby enabling at least one of the transport of the substrate 1 to be carried out or loaded while suppressing interference with other substrates 1 or the substrate holding hand 20.

[0064] In this embodiment, as described above, if the control unit 30 determines that at least one of the following is not possible—unloading the substrate 1 from the storage unit 200 or loading the substrate 1 into the storage unit 200—even after correcting the pre-programmed transport path for the substrate 1, it controls the control unit 30 to notify the notification unit 40 that at least one of loading or unloading the substrate 1 is not possible. This allows the operator to recognize that at least one of loading or unloading the substrate 1 is not possible.

[0065] In this embodiment, as described above, the transport gap C includes the gap between the upper surface 1a of the substrate 1 being transported by the substrate holding hand 20 and the lower surface 1b of the substrate 1 positioned adjacent to the substrate holding hand 20 above it, and the gap between the lower surface 20b of the substrate holding hand 20 that is transporting the substrate 1 and the upper surface 1a of the substrate 1 positioned adjacent to the substrate holding hand 20 below it. As a result, the transport gap C is also obtained while the substrate 1 is being transported by the substrate holding hand 20, so interference of the substrate 1 during transport can be further suppressed.

[0066] [Differentiation] It should be noted that the embodiments disclosed herein are illustrative and not restrictive in all respects. The scope of this disclosure is defined by the claims rather than the description of the embodiments above, and further includes all modifications (modifications) within the meaning and scope equivalent to the claims.

[0067] For example, in the above embodiment, the control unit 30 controls the operation of the robot arm 10 and the substrate holding hand 20 to perform both unloading the substrate 1 from the storage unit 201 and loading the substrate 1 into the storage unit 202 based on the acquired size of the transport gap C, but the disclosure is not limited thereto. For example, the control unit 30 may control the operation of the robot arm 10 and the substrate holding hand 20 to perform only one of the following based on the acquired size of the transport gap C: unloading the substrate 1 from the storage unit 201 and loading the substrate 1 into the storage unit 202.

[0068] Furthermore, in the above embodiment, the transport gap C is shown to include the gap C1 between the upper surface 20a of the substrate holding hand 20 and the lower surface 1b of the substrate 1, and the gap C2 between the lower surface 20b of the substrate holding hand 20 and the upper surface 1a of the substrate 1, but the disclosure is not limited thereto. For example, when the distance between the substrates 1 arranged in the storage section 201 is relatively large, only one of the gap C1 between the upper surface 20a of the substrate holding hand 20 and the lower surface 1b of the substrate 1, or the gap C2 between the lower surface 20b of the substrate holding hand 20 and the upper surface 1a of the substrate 1, may be considered as the transport gap C.

[0069] Furthermore, in the above embodiment, the control unit 30 was shown to acquire both the shape and position of the substrate 1 based on the image captured by the imaging unit 25, but the disclosure is not limited thereto. For example, the control unit 30 may acquire only the shape or the position of the substrate 1 based on the image captured by the imaging unit 25.

[0070] Furthermore, while the above embodiment shows an example in which the shape and position of the substrate 1, acquired based on the image captured by the imaging unit 25, are corrected based on the detection results of the optical sensor 24, the disclosure is not limited thereto. For example, if the accuracy of the shape and position of the substrate 1, acquired based on the image captured by the imaging unit 25, is sufficient for acquiring the transport gap C, correction based on the detection results of the optical sensor 24 may not be necessary.

[0071] Furthermore, in the above embodiment, the control unit 30 is shown to control the imaging unit 25 to photograph multiple substrates 1 at positions where the substrate 1 is detected by the optical sensor 24, but the disclosure is not limited thereto. For example, the control unit 30 may control the imaging unit 25 to photograph multiple substrates 1 at predetermined positions. Also, if the field of view of the imaging unit 25 is relatively large, the control unit 30 may control the imaging unit 25 to photograph the entire substrate 1 in a single shot.

[0072] Furthermore, although the above embodiment shows an example in which the imaging unit 25 is located on the substrate holding hand 20, this disclosure is not limited to this. For example, the imaging unit 25 may be located on the robot arm 10.

[0073] Furthermore, although the above embodiment shows an example in which the optical sensor 24 is located at the tip of the substrate holding hand 20, the disclosure is not limited to this. For example, the optical sensor 24 may be located at a part other than the tip of the substrate holding hand 20.

[0074] Furthermore, although the above embodiment shows an example in which one blade 21 is arranged on the substrate transfer robot 100, the disclosure is not limited to this. For example, two or more blades 21 may be arranged, as in the substrate transfer robot 110 shown in Figure 8.

[0075] Furthermore, in the above embodiment, an example was shown in which the transport gap C includes all of the following: the gap between the position of the substrate holding hand 20 within the storage section 200 and the substrate 1; the gap between the substrate 1 being transported by the substrate holding hand 20 and the adjacent substrate 1 being transported by the substrate holding hand 20; and the gaps between the substrates 1 stored in the storage section 200. However, the disclosure is not limited thereto. For example, the transport gap C may include only one or two of the following: the gap between the position of the substrate holding hand 20 within the storage section 200 and the substrate 1; the gap between the substrate 1 being transported by the substrate holding hand 20 and the adjacent substrate 1 being transported by the substrate holding hand 20; and the gaps between the substrates 1 stored in the storage section 200. [Explanation of symbols]

[0076] 1 circuit board 1a Top surface 1b Bottom side 10 Robot Arms 20 PCB holding hands 20a top surface 20b Bottom side 24 Optical Sensors 25 Photography Department 30 Control Unit 40 Hochi Department 100, 110 PCB transport robots Storage compartments 200, 201, and 202 C Conveying gap

Claims

1. A substrate transport robot that performs the actions of unloading substrates from a storage section for storing multiple substrates and loading substrates into the storage section, A robotic arm and A substrate holding hand is attached to the tip of the robot arm and holds the substrate, A camera unit for photographing the plurality of circuit boards stored in the storage compartment, It comprises a control unit and, The control unit, Based on the image captured by the imaging unit, a transport gap is obtained that includes at least one of the following: the gap between the position of the substrate holding hand and the substrate within the storage unit; the gap between the substrate being transported by the substrate holding hand and the adjacent substrate being transported by the substrate holding hand; and the gaps between the substrates stored in the storage unit. Based on the acquired size of the transport gap, the robot arm and the substrate holding hand are controlled to unload the substrate from the storage unit and load the substrate into the storage unit. The control unit acquires the transport gap both before unloading the substrate from the storage unit and before loading the substrate into the storage unit. The aforementioned transport gap is Within the storage compartment, the gap between the upper surface of the substrate holding hand and the lower surface of the substrate, which is positioned adjacent to the substrate holding hand above it, A substrate transport robot, including a gap within the storage compartment between the lower surface of the substrate holding hand and the upper surface of the substrate, which is positioned adjacent to the substrate holding hand below it.

2. A substrate transport robot that transports substrates from a storage section for storing a plurality of substrates and transports substrates into the storage section, A robotic arm and A substrate holding hand is attached to the tip of the robot arm and holds the substrate, A camera unit for photographing the plurality of circuit boards stored in the storage compartment, It comprises a control unit and, The control unit, Based on the image captured by the imaging unit, a transport gap is obtained that includes at least one of the following: the gap between the position of the substrate holding hand and the substrate within the storage unit; the gap between the substrate being transported by the substrate holding hand and the adjacent substrate being transported by the substrate holding hand; and the gaps between the substrates stored in the storage unit. Based on the acquired size of the transport gap, the robot arm and the substrate holding hand are controlled to unload the substrate from the storage unit and load the substrate into the storage unit. The control unit acquires the transport gap both before unloading the substrate from the storage unit and before loading the substrate into the storage unit. The control unit, Based on the image captured by the aforementioned imaging unit, at least one of the shape and position of the substrate is obtained, and the size of the transport gap is obtained. The storage compartment further comprises an optical sensor that moves along the arrangement direction in which the plurality of substrates housed in the storage compartment are arranged, The control unit, A substrate transport robot that corrects at least one of the shape and position of the substrate, which are acquired based on the image captured by the imaging unit, based on the detection result of the optical sensor.

3. The substrate transport robot according to claim 2, wherein the control unit controls the imaging unit to photograph the plurality of substrates at the position where the substrate is detected by the optical sensor.

4. The imaging unit is positioned on the robot arm or the substrate holding hand. The substrate transport robot according to claim 2 or 3, wherein the optical sensor is positioned at the tip of the substrate holding hand and is moved by the substrate holding hand along the arrangement direction in which the plurality of substrates are arranged.

5. The substrate transport robot according to any one of claims 1 to 4, wherein the control unit acquires the position of the substrate holding hand within the storage section based on the movement path of the substrate holding hand when transporting the substrate which has been taught in advance.

6. A substrate transport robot according to any one of claims 1 to 5, wherein the control unit controls the operation of the robot arm and the substrate holding hand to unload the substrate from the storage unit and load the substrate into the storage unit when it determines that the detected size of the transport gap is large enough to transport the substrate.

7. A substrate transport robot according to any one of claims 1 to 6, wherein the control unit determines that the detected size of the transport gap is not large enough to transport the substrate, and corrects the transport path of the substrate that has been taught in advance based on the detected size of the transport gap.

8. Furthermore, with the addition of a news department, The substrate transport robot according to claim 7, wherein if the control unit determines that it is not possible to unload the substrate from the storage unit or load the substrate into the storage unit even after correcting the transport path of the substrate which has been taught in advance, it performs control to cause the notification unit to notify that it is not possible to load or unload the substrate.

9. A substrate transport robot that transports substrates from a storage section for storing a plurality of substrates and transports substrates into the storage section, A robotic arm and A substrate holding hand is attached to the tip of the robot arm and holds the substrate, A camera unit for photographing the plurality of circuit boards stored in the storage compartment, It comprises a control unit and, The control unit, Based on the image captured by the imaging unit, a transport gap is obtained that includes at least one of the following: the gap between the position of the substrate holding hand and the substrate within the storage unit; the gap between the substrate being transported by the substrate holding hand and the adjacent substrate being transported by the substrate holding hand; and the gaps between the substrates stored in the storage unit. Based on the acquired size of the transport gap, the robot arm and the substrate holding hand are controlled to unload the substrate from the storage unit and load the substrate into the storage unit. The control unit acquires the transport gap both before unloading the substrate from the storage unit and before loading the substrate into the storage unit. The aforementioned transport gap is The gap between the upper surface of the substrate being transported by the substrate holding hand and the lower surface of the substrate positioned adjacent to the substrate holding hand above it, A substrate transport robot, including a gap between the lower surface of the substrate holding hand that transports the substrate and the upper surface of the substrate which is positioned adjacent to the substrate holding hand below it.

10. A control method for a substrate transport robot that performs the actions of unloading a substrate from a storage section for storing multiple substrates and loading a substrate into the storage section, The imaging unit photographs the multiple circuit boards stored in the storage unit, Based on the image captured by the aforementioned imaging unit, a transport gap is obtained that includes at least one of the following: the gap between the position of the substrate holding hand of the substrate transport robot and the substrate within the storage unit; the gap between the substrate being transported by the substrate holding hand and the adjacent substrate to the substrate being transported by the substrate holding hand; and the gaps between the substrates stored in the storage unit. The system includes controlling the operation of the robot arm and the substrate holding hand of the substrate transport robot to unload the substrate from the storage unit and load the substrate into the storage unit, based on the acquired size of the transport gap. Obtaining the transport gap includes obtaining the transport gap both before unloading the substrate from the storage unit and before loading the substrate into the storage unit. The aforementioned transport gap is Within the storage compartment, the gap between the upper surface of the substrate holding hand and the lower surface of the substrate, which is positioned adjacent to the substrate holding hand above it, A method for controlling a substrate transport robot, including a gap within the storage compartment between the lower surface of the substrate holding hand and the upper surface of the substrate, which is positioned adjacent to the substrate holding hand below it.

11. A control method for a substrate transport robot that transports substrates from a storage section for storing a plurality of substrates and transports substrates into the storage section, The imaging unit photographs the multiple circuit boards stored in the storage unit, Based on the image captured by the aforementioned imaging unit, a transport gap is obtained that includes at least one of the following: the gap between the position of the substrate holding hand of the substrate transport robot and the substrate within the storage unit; the gap between the substrate being transported by the substrate holding hand and the adjacent substrate to the substrate being transported by the substrate holding hand; and the gaps between the substrates stored in the storage unit. The system includes controlling the operation of the robot arm and the substrate holding hand of the substrate transport robot to unload the substrate from the storage unit and load the substrate into the storage unit, based on the acquired size of the transport gap. Obtaining the transport gap includes obtaining the transport gap both before unloading the substrate from the storage unit and before loading the substrate into the storage unit. Obtaining the aforementioned transport gap is Based on the image captured by the aforementioned imaging unit, at least one of the shape and position of the substrate is obtained, and the size of the transport gap is obtained. A method for controlling a substrate transport robot, comprising correcting at least one of the shape and position of the substrate, which are acquired based on an image captured by the imaging unit, based on the detection result of an optical sensor that moves along the arrangement direction in which the plurality of substrates stored in the storage unit are arranged.

12. A control method for a substrate transport robot that performs the actions of unloading substrates from a storage section for storing a plurality of substrates and loading substrates into the storage section, The imaging unit photographs the multiple circuit boards stored in the storage unit, Based on the image captured by the aforementioned imaging unit, a transport gap is obtained that includes at least one of the following: the gap between the position of the substrate holding hand of the substrate transport robot and the substrate within the storage unit; the gap between the substrate being transported by the substrate holding hand and the adjacent substrate to the substrate being transported by the substrate holding hand; and the gaps between the substrates stored in the storage unit. The system includes controlling the operation of the robot arm and the substrate holding hand of the substrate transport robot to unload the substrate from the storage unit and load the substrate into the storage unit, based on the acquired size of the transport gap. Obtaining the transport gap includes obtaining the transport gap both before unloading the substrate from the storage unit and before loading the substrate into the storage unit. The aforementioned transport gap is The gap between the upper surface of the substrate being transported by the substrate holding hand and the lower surface of the substrate positioned adjacent to the substrate holding hand above it, A method for controlling a substrate transport robot, including a gap between the lower surface of the substrate holding hand that is transporting the substrate and the upper surface of the substrate which is positioned adjacent to the substrate holding hand below it.

13. A substrate transport robot that transports substrates from a storage section for storing a plurality of substrates and transports substrates into the storage section, A robotic arm and A substrate holding hand is attached to the tip of the robot arm and holds the substrate, A camera unit for photographing the plurality of circuit boards stored in the storage compartment, It comprises a control unit and, The control unit, Based on the image captured by the imaging unit, a transport gap is obtained that includes at least one of the following: the gap between the upper surface of the substrate holding hand and the lower surface of the substrate, which is positioned adjacent to the substrate holding hand above it, and the gap between the lower surface of the substrate holding hand and the upper surface of the substrate, which is positioned adjacent to the substrate holding hand below it, within the storage unit. Based on the acquired size of the transport gap, the robot arm and the substrate holding hand are controlled to unload the substrate from the storage unit and load the substrate into the storage unit. The control unit is a substrate transport robot that acquires the transport gap both before the substrate is unloaded from the storage unit and before the substrate is loaded into the storage unit.

14. A substrate transport robot that transports substrates from a storage section for storing a plurality of substrates and transports substrates into the storage section, A robotic arm and A substrate holding hand is attached to the tip of the robot arm and holds the substrate, A camera unit for photographing the plurality of circuit boards stored in the storage compartment, It comprises a control unit and, The control unit, Based on the image captured by the imaging unit, a transport gap is obtained that includes at least one of the following: the gap between the upper surface of the substrate being transported by the substrate holding hand and the lower surface of the substrate positioned adjacent to the substrate holding hand above it; and the gap between the lower surface of the substrate holding hand that is transporting the substrate and the upper surface of the substrate positioned adjacent to the substrate holding hand below it. Based on the acquired size of the transport gap, the robot arm and the substrate holding hand are controlled to unload the substrate from the storage unit and load the substrate into the storage unit. The control unit is a substrate transport robot that acquires the transport gap both before the substrate is unloaded from the storage unit and before the substrate is loaded into the storage unit.

15. A control method for a substrate transport robot that performs the actions of unloading substrates from a storage section for storing a plurality of substrates and loading substrates into the storage section, The imaging unit photographs the multiple circuit boards stored in the storage unit, Based on the image captured by the aforementioned imaging unit, a transport gap is obtained that includes at least one of the following: the gap between the upper surface of the substrate holding hand attached to the tip of the robot arm and holding the substrate within the storage unit, and the lower surface of the substrate positioned adjacent to the substrate holding hand above it; and the gap between the lower surface of the substrate holding hand and the upper surface of the substrate positioned adjacent to the substrate holding hand below it within the storage unit. The system includes controlling the operation of the robot arm and the substrate holding hand of the substrate transport robot to unload the substrate from the storage section and load the substrate into the storage section based on the acquired size of the transport gap, A control method for a substrate transport robot, wherein obtaining the transport gap includes obtaining the transport gap both before unloading the substrate from the storage unit and before loading the substrate into the storage unit.

16. A control method for a substrate transport robot that performs the actions of unloading substrates from a storage section for storing a plurality of substrates and loading substrates into the storage section, The imaging unit photographs the multiple circuit boards stored in the storage unit, Based on the image captured by the aforementioned imaging unit, a transport gap is obtained that includes at least one of the following: the gap between the upper surface of the substrate being transported to a substrate holding hand attached to the tip of a robot arm and the lower surface of the substrate positioned adjacent to the substrate holding hand above it; and the gap between the lower surface of the substrate holding hand that is transporting the substrate and the upper surface of the substrate positioned adjacent to the substrate holding hand below it. The system includes controlling the operation of the robot arm and the substrate holding hand of the substrate transport robot to unload the substrate from the storage section and load the substrate into the storage section based on the acquired size of the transport gap, A control method for a substrate transport robot, wherein obtaining the transport gap includes obtaining the transport gap both before unloading the substrate from the storage unit and before loading the substrate into the storage unit.

Images