Laser-induced breakdown spectroscopy

Abstract

To save time and effort required for imaging of an analysis place and in turn improve usability of an analyzer.SOLUTION: An analysis observation device A as a laser-induced breakdown spectroscopic device comprises: a first camera 81; an electromagnetic wave emitting unit 71 that irradiates a sample P with laser light; a reflection type objective lens 74 that collects plasma light generated in the sample SP; first and second detectors 77A, 77B that each generate an intensity distribution spectrum; and a processing unit 21a. The processing unit 21a controls the first camera 81 in response to reception of a start trigger signal to create a pre-irradiation image Pb that is an image P before the sample SP is irradiated with the laser light, and after controlling the first camera 81, controls the electromagnetic wave emitting unit 71 to emit the laser light to the sample SP.SELECTED DRAWING: Figure 36B

Description

Technical Field

[0001] The technology disclosed herein relates to a laser induced breakdown spectroscopy apparatus. Background Art

[0002] For example, Patent Document 1 discloses an analyzer (spectroscope) for performing component analysis of a sample. Specifically, the spectroscope disclosed in Patent Document 1 includes a condenser lens for condensing primary electromagnetic waves (ultraviolet laser light) and a collection head for collecting secondary electromagnetic waves (plasma) generated on a sample surface in response to the primary electromagnetic waves, in order to perform component analysis using Laser Induced Breakdown Spectroscopy (LIBS). According to Patent Document 1, by measuring a spectral peak of the sample from a signal of the secondary electromagnetic waves, chemical analysis of the sample can be performed based on the measured peak. Prior Art Literature Patent Literature

[0003] Patent Document 1 Japanese Unexamined Patent Publication No. 2020-113569 Summary of the Invention Problem to be Solved by the Invention

[0004] Incidentally, the spectroscope disclosed in Patent Document 1 is configured as an apparatus specialized for an analysis function. When such an apparatus is used, in order to save an image of an analysis site of a sample, it is necessary to separately capture an image of the analysis target with a digital camera or the like that is separate from the spectroscope.

[0005] However, imaging using a digital camera or the like imposes extra work on the user, and causes inconvenience in terms of usability.

[0006] The technology disclosed herein has been developed in view of these points, and its purpose is to reduce the effort required to image the analysis area, and consequently improve the usability of the analytical instrument. [Means for solving the problem]

[0007] A first aspect of this disclosure relates to a laser-induced breakdown spectrometer that performs component analysis of an analyte using laser-induced breakdown spectroscopy. This laser-induced breakdown spectrometer includes a mounting stage on which an object to be analyzed is placed; an imaging unit that receives reflected light reflected by the object to be analyzed placed on the mounting stage and detects the amount of reflected light received; a laser beam emission unit that emits laser light onto the object to be analyzed; a collection head that collects plasma light generated in the object to be analyzed when the laser light emitted from the laser beam emission unit irradiates the object to be analyzed; a detector that receives the plasma light generated in the object to be analyzed and collected by the collection head and generates an intensity distribution spectrum which is the intensity distribution of the plasma light for each wavelength; an imaging control unit that generates an image of the object to be analyzed based on the amount of reflected light detected by the imaging unit; and a component analysis unit that receives a start trigger signal to start component analysis of the object to be analyzed and performs component analysis of the object to be analyzed based on the intensity distribution spectrum generated by the detector.

[0008] Furthermore, according to a first aspect of the present disclosure, the processing unit generates a pre-irradiation image, which is an image of the object to be analyzed before the laser light is irradiated onto it, by controlling the imaging unit in response to the reception of the start trigger signal, and then emits the laser light onto the object to be analyzed by controlling the laser light emission unit after controlling the imaging unit.

[0009] According to the first embodiment described above, the processing unit generates a pre-irradiation image via the imaging unit immediately before the laser beam is irradiated onto the object to be analyzed. At this time, the elements for observing the object to be analyzed, such as the imaging unit, and the elements for analyzing the object to be analyzed, such as the laser beam emission unit, are controlled by a common processing unit. This allows for seamless observation and analysis of the object to be analyzed, and eliminates the effort required to image the analysis area. As a result, the usability of the laser-induced breakdown spectrometer (hereinafter also simply referred to as the "analytical device") can be improved.

[0010] Furthermore, according to a second aspect of this disclosure, the processing unit may generate an image in which the analysis results are superimposed on the pre-irradiation image, and display the image on the display unit.

[0011] According to the second embodiment, the processing unit superimposes the analysis results onto the pre-irradiation image. This allows the user to understand the relationship between the analysis results and the analyte, which is advantageous in improving the usability of the analytical device.

[0012] Furthermore, according to a third aspect of this disclosure, the processing unit may control the laser light emission unit to emit the laser light onto the object to be analyzed, and then control the imaging unit to generate a post-irradiation image, which is an image of the object to be analyzed after it has been irradiated with the laser light.

[0013] According to the third embodiment, the processing unit generates a post-irradiation image via the imaging unit at the time after the analyte is irradiated with laser light. For example, by comparing the pre-irradiation image and the post-irradiation image, the user can understand the changes that have occurred in the analyte by laser-induced breakdown spectroscopy. This is advantageous in improving the usability of the analytical instrument. Furthermore, since the generation of the post-irradiation image can be performed seamlessly, similar to the generation of the pre-irradiation image, the effort required for generation can be reduced. As a result, this is advantageous in improving the usability of the analytical instrument.

[0014] Furthermore, according to a fourth aspect of the present disclosure, the laser-induced breakdown spectrometer includes a second imaging unit that receives reflected light reflected by the object to be analyzed placed on the aforementioned stand and detects the amount of reflected light received, and a mode switching unit that switches between the imaging unit and the second imaging unit, wherein the second imaging unit is set to have a relatively higher magnification of the object to be analyzed than the imaging unit, and the imaging control unit generates a low-magnification image with a relatively low magnification when the mode switching unit is switched to the imaging unit, and generates a high-magnification image with a relatively high magnification when the mode switching unit is switched to the second imaging unit.

[0015] Furthermore, according to a fifth aspect of the present disclosure, the laser-induced breakdown spectrometer comprises an observation housing for housing the imaging unit and an analysis housing, which is configured separately from the observation housing and houses the second imaging unit and the detector, and the mode switching unit switches to one of the imaging unit and the second imaging unit by moving the observation housing and the analysis housing relative to the aforementioned stand.

[0016] Furthermore, according to a sixth aspect of this disclosure, the laser-induced breakdown spectrometer includes a second imaging unit that receives reflected light reflected by the object to be analyzed placed on the aforementioned stand and detects the amount of reflected light received, and a magnification changing unit that can change the magnification of the object to be analyzed by at least one of the imaging unit and the second imaging unit, wherein the processing unit changes the magnification by adjusting the magnification changing unit and, at each magnification, the imaging unit detects the amount of reflected light received, thereby generating a low-magnification image with a relatively low magnification and a high-magnification image with a relatively high magnification as the pre-irradiation image of the object to be analyzed.

[0017] According to the sixth embodiment, the processing unit generates two types of images with different magnifications. For example, by using the lower-magnification image for user navigation and the higher-magnification image for specifying the analysis area, the usability of the analysis device can be further improved.

[0018] Furthermore, according to a seventh aspect of this disclosure, the processing unit may display the low-magnification image, the high-magnification image, the analysis result, and a first user interface that receives an input for saving at least one of the low-magnification image and the high-magnification image in association with the analysis result on the display unit.

[0019] According to the seventh embodiment, the processing unit provides the user with a first user interface for associating at least one of two types of images with the analysis results. This makes it possible to meet specific needs, such as wanting to store low-magnification images but not high-magnification images. This is effective in improving the usability of the analysis device.

[0020] Furthermore, according to an eighth aspect of this disclosure, the processing unit may cause the display unit to display a display screen for updating the at least one image associated with the analysis result, and receive a save instruction to save the image displayed on the display unit and the analysis result associated with the image to the storage unit, wherein the display screen is composed of the at least one image and a second user interface that receives operation input for updating the at least one image.

[0021] According to the eighth embodiment, the processing unit provides the user with a second user interface for updating images. This makes it possible to meet detailed needs, such as replacing a pre-irradiation image with a post-irradiation image at low magnification. This is effective in improving the usability of the analytical instrument.

[0022] Further, according to a ninth aspect of the present disclosure, the laser-induced breakdown spectroscopy apparatus includes a report output unit that outputs a report in which at least one of the low-magnification image, the high-magnification image, and the analysis result is displayed at each position on a template to which output positions for the low-magnification image, the high-magnification image, and the analysis result are allocated, and the processing unit may cause the image associated by the first user interface to be displayed on the report when the report is output by the report output unit.

[0023] According to the ninth aspect, the processing unit outputs, via the report output unit, a report that displays a pre-irradiation image, a post-irradiation image and the like obtained during component analysis. This enables a user to recognize the irradiation position of laser light, damage caused by laser irradiation, and the like. This is effective for improving the usability of the analysis apparatus.

[0024] Further, according to a tenth aspect of the present disclosure, the laser-induced breakdown spectroscopy apparatus includes an electric drive unit that moves an imaging position indicating a relative position of the mounting table with respect to the imaging unit along a horizontal direction, the processing unit is configured to be capable of accepting at least one of designation of a first analysis site on the high-magnification image and designation of a second analysis site on the low-magnification image, and the imaging control unit, when the processing unit accepts designation of the second analysis site, controls the electric drive unit based on the second analysis site to move the imaging position such that the second analysis site falls within a field of view of the high-magnification image, and when the processing unit accepts designation of the first analysis site, may control the electric drive unit based on the first analysis site to move the imaging position such that the first analysis site approaches a center of the field of view of the high-magnification image.

[0025] According to the tenth aspect, the analyzer can move the mounting table to capture an image of the second analysis location specified on the low-magnification image, or move the mounting table to bring the first analysis location specified on the high-magnification image closer to the center of the field of view. This makes it possible to easily and precisely specify the irradiation position of laser light, which is advantageous for improving the usability of the analyzer.

[0026] Further, according to an eleventh aspect of the present disclosure, when the processing unit accepts the designation of the second analysis location, the imaging control unit causes the electric drive unit to place the second analysis location within the field of view of the high-magnification image, and then regenerate the high-magnification image; and when the processing unit accepts the designation of the first analysis location, the imaging control unit causes the electric drive unit to bring the first analysis location closer to the center of the field of view of the high-magnification image, and then regenerate the high-magnification image.

[0027] According to the eleventh aspect, the analyzer regenerates the high-magnification image every time the mounting table is moved in accordance with the designation of the first analysis location or the second analysis location. This allows the irradiation position of the laser light to be specified more appropriately, which is consequently advantageous for improving the usability of the analyzer.

[0028] Further, according to a twelfth aspect of the present disclosure, the processing unit accepts the designation of the first analysis location on the regenerated high-magnification image, and when the processing unit accepts the designation of the first analysis location, the imaging control unit controls the electric drive unit based on the first analysis location to move the imaging position such that the first analysis location approaches the center of the field of view of the regenerated high-magnification image, and further regenerates the high-magnification image in a state where the electric drive unit brings the first analysis location close to the center of the field of view of the regenerated high-magnification image.

[0029] According to the 12th embodiment described above, the analysis device repeatedly accepts the designation of a first analysis location, and each time such a designation is accepted, it moves the mounting platform and regenerates a high-magnification image. This allows for more precise specification of the laser beam irradiation position, which in turn improves the usability of the analysis device.

[0030] Furthermore, according to a thirteenth aspect of the present disclosure, the laser-induced breakdown spectrometer comprises a base and a stand connected to the base and extending in a first direction perpendicular to the base, wherein the aforementioned stand is supported by the base or the stand, the motorized drive unit is configured to move the imaging position along the first direction, and the imaging control unit controls the motorized drive unit to move the imaging position along the first direction after the imaging position has been moved along the horizontal direction by the motorized drive unit.

[0031] According to the 13th embodiment, the analysis device can move the imaging position along the horizontal and first directions. This allows for more precise control of the image acquisition position.

[0032] Furthermore, according to a 14th aspect of this disclosure, the imaging control unit may move the imaging position to a plurality of first positions along the first direction using the motorized drive unit, generate the high-magnification image at each of the plurality of first positions, and generate a full-focus image of the object to be analyzed by combining the high-magnification images generated at each of the plurality of first positions.

[0033] According to the 14th embodiment, the imaging control unit generates a full-focus image of the object to be analyzed, thereby generating a high-magnification image in focus across substantially the entire field of view. This is effective in improving the usability of the analysis device.

[0034] Furthermore, according to a 15th aspect of the present disclosure, the motorized drive unit is configured to change the collection position, which indicates the relative position of the base described above with respect to the collection head, along the first direction; the imaging control unit moves the collection position to a plurality of first positions along the first direction using the motorized drive unit and generates the image at each of the plurality of first positions; the component analysis unit identifies the height along the first direction at the first analysis location received by the processing unit based on the image generated at each of the plurality of first positions, and controls the motorized drive unit based on the identified height to move the collection position along the first direction such that the laser light emitted from the laser light emission unit focuses on the first analysis location.

[0035] According to the 15th embodiment described above, by performing control according to a specified height, the laser beam can be focused on the first analysis site. This is effective in improving the usability of the analysis device.

[0036] Furthermore, according to a sixteenth aspect of this disclosure, the processing unit is configured to accept designations of the second analysis locations at multiple locations on the low-magnification image, and when the processing unit receives designations of the second analysis locations at multiple locations, the motorized drive unit moves the imaging position for each of the second analysis locations accepted at multiple locations so that one of the second analysis locations accepted at multiple locations falls within the field of view of the high-magnification image, the imaging control unit generates the high-magnification image with the one second analysis location in the field of view of the high-magnification image, and after the imaging control unit generates the high-magnification image, the laser light emission unit emits the laser light onto the object to be analyzed, thereby causing the component analysis unit to perform component analysis at the one second analysis location.

[0037] According to the 16th embodiment described above, laser light can be emitted to each of the multiple second analysis sites, and component analysis can be performed at each second analysis site. This is effective in improving the usability of the analytical instrument.

[0038] Furthermore, according to a 17th aspect of this disclosure, the processing unit is configured to accept designations of the first analysis locations across multiple locations on the high-magnification image, and when the processing unit receives designations of the first analysis locations across multiple locations, the motorized drive unit moves the imaging position for each of the multiple first analysis locations received so that one of the multiple first analysis locations approaches the center of the field of view of the high-magnification image, the imaging control unit generates the high-magnification image with the one first analysis location approaching the center of the field of view of the high-magnification image, and after the imaging control unit generates the high-magnification image, the laser light emission unit emits the laser light onto the object to be analyzed, thereby causing the component analysis unit to perform component analysis at the one first analysis location.

[0039] According to the 17th embodiment described above, laser light can be emitted to each of the multiple first analysis sites, and component analysis can be performed at each of the first analysis sites. This is effective in improving the usability of the analytical instrument. [Effects of the Invention]

[0040] As explained above, this disclosure eliminates the effort required to image the analysis area, and consequently improves the usability of the analysis device. [Brief explanation of the drawing]

[0041] [Figure 1] Figure 1 is a schematic diagram illustrating the overall configuration of the analytical and observation device. [Figure 2] Figure 2 is a perspective view illustrating an optical system assembly. [Figure 3] Figure 3 is a side view illustrating an optical system assembly. [Figure 4] Figure 4 is a front view illustrating an optical system assembly. [Figure 5] Figure 5 is an exploded perspective view illustrating an optical system assembly. [Figure 6] Figure 6 is a schematic side view showing the configuration of the optical system assembly. [Figure 7] Figure 7 is a perspective view illustrating the layout of the overhead camera. [Figure 8] Figure 8 is a schematic diagram illustrating the configuration of an analytical optical system. [Figure 9] Figure 9 is a schematic diagram illustrating the configuration of the sliding mechanism. [Figure 10A] Figure 10A is a diagram illustrating the horizontal movement of the head unit. [Figure 10B] Figure 10B is a diagram illustrating the horizontal movement of the head unit. [Figure 11A] Figure 11A is a diagram illustrating the operation of the tilting mechanism. [Figure 11B] Figure 11B is a diagram illustrating the operation of the tilting mechanism. [Figure 12] Figure 12 is a block diagram illustrating the configuration of the controller unit 2. [Figure 13] Figure 13 is a block diagram illustrating the configuration of the control unit. [Figure 14] Figure 14 is an example of the display screen for live images and navigation images. [Figure 15] Figure 15 is a diagram illustrating the process when a second analysis location is specified. [Figure 16] Figure 16 is a diagram illustrating the process when the designation of the first analysis location is received. [Figure 17] Figure 17 illustrates a user interface for outputting a start trigger signal. [Figure 18] Figure 18 is a diagram illustrating the generation of a fully focused image. [Figure 19]Figure 19 is an example of a display screen for an image after irradiation. [Figure 20] Figure 20 is a diagram illustrating the process when laser light is irradiated to multiple locations. [Figure 21] Figure 21 is a diagram illustrating the process when laser light is irradiated onto the same location. [Figure 22] Figure 22 is an example of a display screen for an overhead view image. [Figure 23] Figure 23 is an example of a display screen for an overhead view image. [Figure 24] Figure 24 is a diagram illustrating the relationships between the images. [Figure 25] Figure 25 is a diagram illustrating the updates for each image. [Figure 26] Figure 26 is a diagram illustrating the optical axis misalignment in the observation unit. [Figure 27] Figure 27 illustrates the field of view shift that occurs when switching modes from the observation unit to the analysis unit. [Figure 28] Figure 28 is a diagram illustrating the correction of optical axis misalignment and field of view misalignment. [Figure 29] Figure 29 is an example of a report template. [Figure 30] Figure 30 shows an example of the report output. [Figure 31] Figure 31 is a flowchart illustrating the basic operation of the analytical and observation device. [Figure 32] Figure 32 is a flowchart illustrating the procedure for calculating the correction amount for optical axis misalignment. [Figure 33] Figure 33 is a flowchart illustrating the procedure for calculating the correction amount for field of view misalignment. [Figure 34] Figure 34 is a flowchart illustrating the procedure for correcting optical axis misalignment and field of view misalignment. [Figure 35] Figure 35 is a flowchart illustrating the procedure for setting lighting conditions using the lighting settings unit. [Figure 36A]Figure 36A is a flowchart illustrating various processes performed by the analytical and observation device. [Figure 36B] Figure 36B is a flowchart illustrating various processes performed by the analytical and observation device. [Figure 36C] Figure 36C is a flowchart illustrating various processes performed by the analytical and observation device. [Figure 37] Figure 37 is a flowchart illustrating the procedure for performing depth stacking. [Figure 38] Figure 38 is an example of the display screen of the display unit. [Figure 39] Figure 39 is an example of the display screen of the display unit. [Figure 40] Figure 40 is an example of the display screen of the display unit. [Figure 41] Figure 41 is an example of the display screen of the display unit. [Figure 42] Figure 42 is an example of the display screen of the display unit. [Figure 43] Figure 43 is an example of the display screen of the display unit. [Figure 44] Figure 44 is an example of the display screen of the display unit. [Modes for carrying out the invention]

[0042] The embodiments of this disclosure will be described below with reference to the drawings. Note that the following description is illustrative.

[0043] <Overall configuration of analysis and observation device A> Figure 1 is a schematic diagram illustrating the overall configuration of analytical observation apparatus A as a laser-induced breakdown spectrometer according to an embodiment of this disclosure. Analytical observation apparatus A illustrated in Figure 1 can perform magnified observation of the object to be observed and the sample SP as the object to be analyzed, as well as perform component analysis of the sample SP.

[0044] More specifically, the analytical observation device A according to this embodiment can magnify and image a sample SP consisting of, for example, a minute object, an electronic component, or a workpiece, in order to search for areas in the sample SP where component analysis should be performed, or to inspect and measure its appearance. Focusing on its observation function, the analytical observation device A can be called a magnifying observation device, simply a microscope, or a digital microscope.

[0045] The analytical observation device A can also perform techniques such as laser-induced breakdown spectroscopy (LIBS) and laser-induced plasma spectroscopy (LIPS) when analyzing the components of sample SP. When focusing on its analytical functions, the analytical observation device A can also be referred to as a component analyzer, simply an analyzer, or a spectrometer.

[0046] As shown in Figure 1, the analysis and observation apparatus A according to this embodiment comprises, as its main components, an optical system assembly (optical system body) 1, a controller body 2, and an operation unit 3.

[0047] Of these components, the optical system assembly 1 performs imaging and analysis of the sample SP, and can output electrical signals corresponding to the imaging and analysis results to an external source.

[0048] The controller body 2 has a control unit 21 for controlling various components that make up the optical system assembly 1, such as the first camera 81. The controller body 2 can cause the optical system assembly 1 to observe and analyze the sample SP via the control unit 21. The controller body 2 also has a display unit 22 that can display various information. This display unit 22 can display images captured by the optical system assembly 1, data showing the analysis results of the sample SP, and so on.

[0049] The operation unit 3 includes a mouse 31, a console 32, and a keyboard 33 that accept user input (the keyboard 33 is shown only in Figure 12). The console 32 allows the user to instruct the controller unit 2 to capture image data, adjust brightness, focus the first camera 81, etc., by operating buttons, adjustment knobs, etc.

[0050] The operation unit 3 does not need to have all three: the mouse 31, console 32, and keyboard 33; it may have any one or two of them. In addition to or instead of the mouse 31, console 32, and keyboard 33, a touch panel input device, a voice input device, etc., may be used. In the case of a touch panel input device, it can be configured to detect any position on the screen displayed on the display unit 22.

[0051] <Details of Optical System Assembly 1> Figures 2 to 4 are perspective, side, and front views illustrating the optical system assembly 1, respectively. Figure 5 is an exploded perspective view of the optical system assembly 1, and Figure 6 is a schematic side view showing the configuration of the optical system assembly 1. Figure 7 is a perspective view illustrating the layout of the overhead camera 48.

[0052] As shown in Figures 1 to 6, the optical system assembly 1 comprises a stage 4 that supports various instruments and on which a sample SP is placed, and a head unit 6 attached to the stage 4. Here, the head unit 6 is formed by mounting an observation housing 90, which houses an observation optical system 9, onto an analysis housing 70, which houses an analysis optical system 7. Here, the analysis optical system 7 is an optical system for performing component analysis of the sample SP. The observation optical system 9 is an optical system for performing magnified observation of the sample SP. The head unit 6 is configured as a group of devices that combine the functions of sample analysis and magnified observation of the sample SP.

[0053] In the following explanation, the front-to-back and left-to-right directions of the optical system assembly 1 are defined as shown in Figures 1 to 4. That is, the side facing the user is the front of the optical system assembly 1, and the opposite side is the rear of the optical system assembly 1. When the user and the optical system assembly 1 are facing each other, the right side of the optical system assembly 1 is to the user's perspective, and the left side is to the user's perspective. Note that the definitions of the front-to-back and left-to-right directions are for the purpose of aiding understanding of the explanation and do not limit the actual usage state. It may be used with either direction as the front.

[0054] Furthermore, in the following description, the left-right direction of the optical system assembly 1 is defined as the "X direction," the front-back direction of the optical system assembly 1 is defined as the "Y direction," the up-down direction of the optical system assembly 1 is defined as the "Z direction," and the direction of rotation around an axis parallel to this Z axis is defined as the "φ direction." The X direction and the Y direction are orthogonal to each other on the same horizontal plane, and the direction along that horizontal plane is defined as the "horizontal direction." The Z axis is the direction of the normal that is orthogonal to that horizontal plane. These definitions can also be changed as appropriate. The Z direction (up-down direction) is the direction that extends along the vertical direction and is an example of the "first direction" in this embodiment.

[0055] As will be described in more detail later, the head portion 6 can move along the central axis Ac shown in Figures 2 to 6, or swing around this central axis Ac. This central axis Ac is configured to extend along the horizontal direction, particularly the front-to-back direction, as shown in Figure 6 and other figures.

[0056] (Stage 4) Stage 4 comprises a base 41 that is installed on a workbench or the like, a stand 42 connected to the base 41, and a mounting platform 5 supported by the base 41 or the stand 42. Stage 4 is a component that defines the relative positional relationship between the mounting platform 5 and the head unit 6, and is configured to be able to mount at least the observation optical system 9 and the analysis optical system 7 of the head unit 6.

[0057] The base 41 constitutes the lower half of the stage 4 and, as shown in Figure 2, is formed in a pedestal shape with a longer front-to-back dimension compared to its left-to-right dimension. The base 41 has a bottom surface that can be placed on a workbench or the like. A mounting platform 5 is attached to the front part of the base 41.

[0058] Furthermore, as shown in Figure 6 and other figures, the rear portion of the base 41 (particularly the portion located behind the mounting platform 5) is provided with a first support portion 41a and a second support portion 41b, arranged in order from the front. Both the first and second support portions 41a and 41b are provided so as to protrude upward from the base 41. The first and second support portions 41a and 41b have circular bearing holes (not shown) that are arranged concentrically with the central axis Ac.

[0059] The stand 42 constitutes the upper half of the stage 4 and, as shown in Figures 2-3, Figure 6, etc., is formed as a column extending vertically perpendicular to the base 41 (especially the bottom surface of the base 41). The head portion 6 is attached to the front of the upper part of the stand 42 via a separate mounting device 43.

[0060] Furthermore, as shown in Figure 6 and other figures, the lower part of the stand 42 is provided with a first mounting portion 42a and a second mounting portion 42b, arranged in order from the front. The first and second mounting portions 42a and 42b are configured to correspond to the first and second support portions 41a and 41b described above. Specifically, the first and second support portions 41a and 41b, and the first and second mounting portions 42a and 42b are arranged such that the first support portion 41a is sandwiched between the first mounting portion 42a and the second mounting portion 42b, and the second mounting portion 42b is sandwiched between the first support portion 41a and the second support portion 41b.

[0061] Furthermore, the first and second mounting portions 42a and 42b are formed with circular bearing holes (not shown) that are concentric and of the same diameter as the bearing holes formed in the first and second support portions 41a and 41b. The shaft member 44 is inserted into these bearing holes via bearings (not shown), such as cross roller bearings. The shaft member 44 is positioned so that its axis is concentric with the aforementioned central axis Ac. By inserting the shaft member 44, the base 41 and the stand 42 are connected so that they can swing relative to each other. The shaft member 44, together with the first and second support portions 41a and 41b and the first and second mounting portions 42a and 42b, constitute the tilting mechanism 45 in this embodiment.

[0062] By connecting the base 41 and the stand 42 via the tilting mechanism 45, the stand 42 is supported by the base 41 in a state where it can swing around the central axis Ac. By swinging around the central axis Ac, the stand 42 tilts in the left-right direction with respect to a predetermined reference axis As (see Figures 10A and 10B). In the non-tilted state shown in Figure 4, etc., this reference axis As can be an axis extending perpendicularly to the upper surface (mounting surface 51a) of the mounting platform 5. The central axis Ac also functions as the central axis (center of rotation) of the swing caused by the tilting mechanism 45.

[0063] Specifically, the tilting mechanism 45 according to this embodiment allows the stand 42 to be tilted approximately 90° to the right with respect to the reference axis As, or approximately 60° to the left with respect to the reference axis As. As mentioned above, the head portion 6 is attached to the stand 42, so this head portion 6 can also be tilted in the left-right direction with respect to the reference axis As. Tilting the head portion 6 is equivalent to tilting the analytical optical system 7 and the observation optical system 9, and consequently, tilting the analytical optical axis Aa and the observation optical axis Ao, which will be described later.

[0064] Furthermore, as shown in Figure 6, an overhead camera 48 is built into the shaft member 44 that constitutes the tilting mechanism 45. This overhead camera 48 receives visible light reflected from the sample SP through a through hole 44a provided on the front surface of the shaft member 44 (see Figure 7). The overhead camera 48 images the sample SP by detecting the amount of reflected light received.

[0065] The imaging field of view of the overhead camera 48 is wider than that of the first camera 81 and the second camera 93, which will be described later. In other words, the magnification of the overhead camera 48 is smaller than that of the first camera 81 and the second camera 93. Therefore, the overhead camera 48 can image the sample SP over a wider area than the first camera 81 and the second camera 93.

[0066] Here, the imaging optical axis of the overhead camera 48 is positioned parallel to the central axis Ac of the oscillation by the tilt mechanism 45. In this embodiment, the imaging optical axis of the overhead camera 48 extends forward from the axis member 44 and is orthogonal to both the analysis optical axis Aa, which is the imaging optical axis of the first camera 81, and the observation optical axis Ao, which is the imaging optical axis of the second camera 93. Therefore, the overhead camera 48 can image the sample SP from a different angle than the first camera 81 and the second camera 93.

[0067] Furthermore, the imaging optical axis of the overhead camera 48 does not change with the operation of the tilt mechanism 45. Therefore, the imaging field of view of the overhead camera 48 is kept constant regardless of the tilt angle of the stand 42 with respect to the reference axis As.

[0068] Specifically, the overhead camera 48 according to this embodiment uses a plurality of pixels arranged on its light-receiving surface to photoelectrically convert light incident through the through-hole 44a into an electrical signal corresponding to the optical image of the subject (sample SP).

[0069] The overhead camera 48 can be configured with multiple light-receiving elements arranged along a light-receiving surface. In this case, each light-receiving element corresponds to a pixel, and an electrical signal can be generated based on the amount of light received by each light-receiving element. Specifically, the overhead camera 48 according to this embodiment is composed of an image sensor made of CMOS (Complementary Metal Oxide Semiconductor), but it is not limited to this configuration. For example, an image sensor made of CCD (Charged-Coupled Device) can also be used as the overhead camera 48.

[0070] The overhead camera 48 then inputs electrical signals generated by detecting the amount of light received at each light-receiving element to the control unit 21 of the controller body 2. Based on the input electrical signals, the control unit 21 generates image data corresponding to the optical image of the subject. The control unit 21 can then display the generated image data as an image of the subject on the display unit 22 or the like.

[0071] The configuration of the overhead camera 48 described above is merely illustrative. The overhead camera 48 only needs to have a wider field of view than the first camera 81 and the second camera 93, and the layout of the overhead camera 48, the orientation of its imaging optical axis, etc., can be freely changed. For example, the overhead camera 48 may be configured using a USB camera connected by wire or wirelessly to the optical system assembly 1 or the controller body 2.

[0072] The mounting device 43 has a rail portion 43a that guides the head portion 6 along the longitudinal direction of the stand 42, and a lock lever 43b for locking the relative position of the head portion 6 with respect to the rail portion 43a. Here, the longitudinal direction of the stand 42 coincides with the vertical direction (first direction) when not tilted, and also coincides with the direction extending along the analytical optical axis Aa, the observation optical axis Ao, and the reference axis As. When tilted, the longitudinal direction of the stand 42 does not coincide with the vertical direction and the direction extending along the reference axis As, but still coincides with the direction extending along the analytical optical axis Aa and the observation optical axis Ao. The longitudinal direction of the stand 42 is also referred to as the "approximately vertical direction" in the following description.

[0073] The rear portion of the head portion 6 (specifically, the head mounting member 61) is inserted into the rail portion 43a. The rail portion 43a can be moved along its rear portion in a substantially vertical direction. Then, by operating the lock lever 43b with the head portion 6 set to the desired position, the head portion 6 can be fixed in the desired position. In addition, the position of the head portion 6 can be adjusted by operating the first operation dial 46 shown in Figures 2 and 3.

[0074] Furthermore, the stage 4 or head unit 6 incorporates a head drive unit 47 for moving the head unit 6 in a substantially vertical direction. This head drive unit 47 includes an actuator (e.g., a stepping motor) not shown, controlled by the controller body 2, and a motion conversion mechanism that converts the rotation of the output shaft of the stepping motor into substantially vertical linear motion, and moves the head unit 6 based on drive pulses input from the controller body 2. By moving the head unit 6 with the head drive unit 47, the head unit 6, and consequently the analysis optical axis Aa and observation optical axis Ao, can be moved along a substantially vertical direction. The head drive unit 47, together with the mounting stage drive unit 53 described later, constitutes the "electric drive unit" in this embodiment.

[0075] The mounting platform 5 is positioned in front of the center of the base 41 in the front-to-back direction and is attached to the upper surface of the base 41. The mounting platform 5 is configured as an electrically operated mounting platform, and can move the sample SP placed on its mounting surface 51a horizontally, raise and lower vertically, and rotate along the φ direction.

[0076] Specifically, as shown in Figures 2 to 4, the mounting table 5 according to this embodiment includes a mounting table body 51 having a mounting surface 51a for placing a sample SP, a mounting table support part 52 positioned between the base 41 and the mounting table body 51 and displacing the mounting table body 51, and a mounting table drive part 53 shown in Figure 12, which will be described later.

[0077] The mounting stage body 51 is configured as a so-called XY stage. The upper surface of the mounting stage body 51 constitutes a mounting surface 51a on which the sample SP is placed. This mounting surface 51a is formed to extend along a substantially horizontal direction. The sample SP is placed on the mounting surface 51a in an open-air state, that is, without being housed in a vacuum chamber or the like.

[0078] The mounting base support portion 52 is a member that connects the base 41 and the mounting base body 51, and is formed in a substantially cylindrical shape that extends along the vertical direction. The mounting base support portion 52 can house the mounting base drive unit 53.

[0079] The mounting platform drive unit 53 includes a plurality of actuators (e.g., stepping motors) controlled by the controller body 2, and a motion conversion mechanism that converts the rotation of the output shafts of the stepping motors into linear motion. Based on drive pulses input from the controller body 2, the mounting platform body 51 is moved. By moving the mounting platform body 51, the mounting platform body 51, and consequently the sample SP placed on its mounting surface 51a, can be moved along the horizontal and vertical directions. Together with the head drive unit 47 described above, the mounting platform drive unit 53 constitutes the "electric drive unit" in this embodiment.

[0080] Similarly, the mounting platform drive unit 53 can also rotate the mounting platform body 51 along the φ direction around a predetermined rotation axis based on drive pulses input from the controller body 2. By rotating the mounting platform body 51 with the mounting platform drive unit 53, the sample SP placed on the mounting surface 51a can also be rotated in the φ direction. Note that the configuration with the mounting platform drive unit 53 is not essential. The mounting platform body 51 may also be configured to be rotated manually.

[0081] In particular, the mounting surface 51a according to this embodiment is configured to be rotatable around the reference axis As shown in Figure 6, etc., as the axis of rotation. In other words, in this embodiment, the reference axis As, which serves as the reference for inclination, and the axis of rotation of the mounting surface 51a are coaxial.

[0082] Furthermore, the mounting base body 51 can also be manually moved and rotated by operating the second operation dial 54, as illustrated in Figure 2. Details of the second operation dial 54 are omitted.

[0083] Returning to the description of the base 41 and stand 42, the base 41 has a first tilt sensor Sw3 built into it. This first tilt sensor Sw3 can detect the tilt of the reference axis As perpendicular to the mounting surface 51a with respect to the direction of gravity. On the other hand, the stand 42 has a second tilt sensor Sw4 attached to it. This second tilt sensor Sw4 can detect the tilt of the analysis optical system 7 with respect to the direction of gravity (more specifically, the tilt of the analysis optical axis Aa with respect to the direction of gravity). The detection signals from both the first tilt sensor Sw3 and the second tilt sensor Sw4 are input to the control unit 21.

[0084] (Head section 6) The head unit 6 comprises a head mounting member 61, an analysis unit 62 comprising an analysis optics system 7 housed in an analysis housing 70, an observation unit 63 comprising an observation optics system 9 housed in an observation housing 90, a housing connector 64, and a sliding mechanism (horizontal drive mechanism) 65 (the analysis unit 62 and observation unit 63 are shown only in Figure 5). The head mounting member 61 is a member for connecting the analysis housing 70 to the stand 42. The analysis unit 62 is a device for performing component analysis of a sample SP using the analysis optics system 7. The observation unit 63 is a device for observing the sample SP using the observation optics system 9. The housing connector 64 is a member for connecting the observation housing 90 to the analysis housing 70. The sliding mechanism 65 is a mechanism for sliding the analysis housing 70 relative to the stand 42.

[0085] More specifically, the head mounting member 61 according to this embodiment is positioned on the rear side of the head portion 6 and is configured as a plate-shaped member for attaching the head portion 6 to the stand 42. As described above, the head mounting member 61 is fixed to the mounting device 43 of the stand 42.

[0086] The head mounting member 61 has a plate body 61a extending substantially parallel to the rear surface of the head portion 6, and a cover member 61b protruding forward from the lower end of the plate body 61a. In the first mode, described later, where the reflective objective lens 74 is facing the sample SP, the plate body 61a is in close contact with or close to the rear surface of the head portion 6. In the second mode, described later, where the objective lens 92 is facing the sample SP, the plate body 61a is spaced apart from the rear surface of the head portion 6 in the front-rear direction.

[0087] Furthermore, as shown in Figure 9, a guide rail 65a, which constitutes the sliding mechanism 65, is attached to the left end of the head mounting member 61. The guide rail 65a connects the head mounting member 61 to other elements of the head portion 6 (specifically, the analytical optical system 7, the observation optical system 9, and the housing connector 64) so ​​that they can be displaced relative to each other in the horizontal direction.

[0088] The following describes the configurations of the analysis unit 62, observation unit 63, housing connector 64, and slide mechanism 65 in order.

[0089] -Analysis Unit 62- Figure 8 is a schematic diagram illustrating the configuration of the analytical optical system 7.

[0090] The analysis unit 62 comprises an analysis optical system 7 and an analysis housing 70 that houses the analysis optical system 7. The analysis optical system 7 is a collection of components for analyzing a sample SP as the object to be analyzed, and each component is housed in the analysis housing 70. The analysis housing 70 houses a first camera 81 as a second imaging unit and first and second detectors 77A and 77B as detectors. The elements for analyzing the sample SP also include the control unit 21 of the controller body 2.

[0091] The analytical optical system 7 can perform analysis using, for example, the LIBS method. A communication cable C1 for sending and receiving electrical signals to and from the controller body 2 is connected to the analytical optical system 7. This communication cable C1 is not mandatory, and the analytical optical system 7 and the controller body 2 may be connected by wireless communication.

[0092] The term "optical system" used here is used in a broad sense. That is, the analytical optical system 7 is defined as a system that includes not only optical elements such as lenses, but also a light source, an image sensor, etc. The same applies to the observation optical system 9.

[0093] As shown in Figure 8, the analytical optical system 7 according to this embodiment includes an electromagnetic wave emission unit 71, an output adjustment means 72, a deflection element 73, a reflective objective lens 74 as a collection head, a spectroscopic element 75, a first parabolic mirror 76A, a first detector 77A, a first beam splitter 78A, a second parabolic mirror 76B, a second detector 77B, a second beam splitter 78B, a coaxial illumination 79, an imaging lens 80, a first camera 81, and a side illumination 84. Some of the components of the analytical optical system 7 are also shown in Figure 6. The side illumination 84 is shown only in Figure 11.

[0094] The electromagnetic wave emitting unit 71 emits primary electromagnetic waves to the sample SP. In particular, the electromagnetic wave emitting unit 71 according to this embodiment is composed of a laser light source that emits laser light as primary electromagnetic waves to the sample SP. The electromagnetic wave emitting unit 71 is an example of the "laser light emitting unit" in this embodiment.

[0095] Although detailed illustrations are omitted, the electromagnetic wave emission unit 71 according to this embodiment includes an excitation light source composed of a laser diode (LD) or the like, a focusing lens that focuses the laser output from the excitation light source and emits it as laser excitation light, a laser medium that generates a fundamental wave based on the laser excitation light, a Q switch for pulse oscillation of the fundamental wave, a rear mirror and an output mirror for resonating the fundamental wave, and a wavelength conversion element that converts the wavelength of the laser light output from the output mirror.

[0096] Here, as the laser medium, it is preferable to use, for example, a rod-shaped Nd:YAG in order to obtain a high energy per pulse. In this embodiment, the wavelength of the photons emitted from the laser medium by stimulated emission (the so-called fundamental wavelength) is set to 1064 nm in the infrared region.

[0097] Furthermore, a passive Q-switch can be used as the Q-switch, in which the transmittance increases when the intensity of the fundamental wave exceeds a predetermined threshold. A passive Q-switch is composed of a supersaturated absorber such as Cr:YAG. By using a passive Q-switch, it becomes possible to automatically generate pulses when more than a predetermined amount of energy is accumulated in the laser medium. Alternatively, a so-called active Q-switch, in which the attenuation rate can be controlled externally, can also be used.

[0098] Furthermore, the wavelength conversion element is configured to use two nonlinear optical crystals such as LBO (LiB3O3). By using two crystals, it is possible to generate the third harmonic from the fundamental wave. In this embodiment, the wavelength of the third harmonic is set to 355 nm in the ultraviolet region.

[0099] In other words, the electromagnetic wave emission unit 71 according to this embodiment can output laser light consisting of ultraviolet light as the primary electromagnetic wave. This makes it possible to perform analysis by the LIBS method even on optically transparent samples SP, such as glass. In addition, a very small percentage of laser light in the ultraviolet region reaches the human retina. By configuring the device so that the laser light does not form an image on the retina, the safety of the device can be enhanced.

[0100] The output adjustment means 72 is positioned on the optical path connecting the electromagnetic wave emission unit 71 and the deflection element 73, and can adjust the output of the laser light (primary electromagnetic wave). Specifically, the output adjustment means 72 according to this embodiment includes a half-wave plate 72a and a polarizing beam splitter 72b. The half-wave plate 72a is configured to rotate relative to the polarizing beam splitter 72b, and the amount of light passing through the polarizing beam splitter 72b can be adjusted by controlling its rotation angle.

[0101] The laser light (primary electromagnetic wave), whose output has been adjusted by the output adjustment means 72, is reflected by a mirror (not shown) and incident on the deflection element 73.

[0102] More specifically, the deflection element 73 is arranged to reflect the laser light output from the electromagnetic wave emission unit 71 and passed through the output adjustment means 72, and guide it to the sample SP via the reflective objective lens 74. At the same time, it also passes through the light generated in the sample SP in response to this laser light (light emitted as a result of plasma formation on the surface of the sample SP, hereinafter referred to as "plasma light") and guides it to the first detector 77A and the second detector 77B. The deflection element 73 is also arranged to pass through the visible light focused for imaging and guide most of it to the first camera 81.

[0103] The ultraviolet laser light reflected by the deflection element 73 propagates as parallel light along the analysis optical axis Aa and reaches the reflective objective lens 74.

[0104] The reflective objective lens 74, acting as a collection head, is configured to collect secondary electromagnetic waves generated in the sample SP when the primary electromagnetic waves emitted from the electromagnetic wave emission unit 71 irradiate the sample SP. In particular, the reflective objective lens 74 according to this embodiment is configured to focus the laser light as the primary electromagnetic wave and irradiate the sample SP, and to collect the plasma light (secondary electromagnetic wave) generated in the sample SP in response to the laser light (primary electromagnetic wave) irradiated onto the sample SP. In this case, the secondary electromagnetic wave corresponds to the plasma light emitted in conjunction with the plasma formation that occurs on the surface of the sample SP.

[0105] The reflective objective lens 74 is configured to coaxially integrate the optical system for the emission of primary electromagnetic waves from the electromagnetic wave emission unit 71 and the optical system for receiving reflected light at the first camera 81 and receiving secondary electromagnetic waves at the first and second detectors 77A and 77B. In other words, the reflective objective lens 74 is shared by two types of optical systems.

[0106] The reflective objective lens 74 has an analytical optical axis Aa that extends along the aforementioned approximately vertical direction. The analytical optical axis Aa is positioned parallel to the observation optical axis Ao of the objective lens 92 of the observation optical system 9.

[0107] More specifically, the reflective objective lens 74 in this embodiment is a Schwarzschild-type objective lens consisting of two mirrors. As shown in Figure 8, this reflective objective lens 74 has a primary mirror 74a that is annular and relatively large in diameter, and a secondary mirror 74b that is disc-shaped and relatively small in diameter.

[0108] The primary mirror 74a allows laser light (primary electromagnetic wave) to pass through an aperture in its center, while the surrounding mirror surfaces reflect plasma light (secondary electromagnetic wave) generated in the sample SP. The latter plasma light is reflected again by the mirror surface of the secondary mirror 74b and passes through the aperture of the primary mirror 74a in a state coaxial with the laser light.

[0109] The secondary mirror 74b is configured to transmit the laser light that has passed through the aperture of the primary mirror 74a, while focusing and reflecting the plasma light reflected by the primary mirror 74a. The former laser light is irradiated onto the sample SP, while the latter plasma light passes through the aperture of the primary mirror 74a as described above and reaches the deflection element 73.

[0110] Therefore, when laser light is input to the reflective objective lens 74, the laser light passes through the secondary mirror 74b located in the center of the reflective objective lens 74 and reaches the surface of the sample SP. The sample SP is locally plasma-generated by the laser light that reaches the sample SP, and plasma light is emitted as a result. This plasma light passes through an aperture provided around the secondary mirror 74b and reaches the primary mirror 74a. The plasma light that reaches the primary mirror 74a is reflected by its mirror surface and reaches the secondary mirror 74b, and is reflected again by the secondary mirror 74b and goes from the reflective objective lens 74 to the deflection element 73. The reflected light that reaches the deflection element 73 passes through the deflection element 73 and reaches the spectroscopic element 75.

[0111] The spectroscopic element 75 is positioned between the deflection element 73 and the first beam splitter 78A in the optical axis direction of the reflective objective lens 74 (along the analytical optical axis Aa). It directs a portion of the plasma light generated in the sample SP to the first detector 77A, while directing the rest to the second detector 77B, etc. Of the latter plasma light, most is directed to the second detector 77B, but the remainder goes to the first camera 81.

[0112] More specifically, the plasma light (secondary electromagnetic wave) returning from the sample SP contains various wavelength components in addition to the wavelength corresponding to the laser light as the primary electromagnetic wave. Therefore, the spectroscopic element 75 according to this embodiment reflects electromagnetic waves in the shorter wavelength band of the secondary electromagnetic wave returning from the sample SP and guides them to the first detector 77A. The spectroscopic element 75 also transmits electromagnetic waves in other bands and guides them to the second detector 77B, etc.

[0113] The first parabolic mirror 76A is a so-called parabolic mirror and is positioned between the spectroscopic element 75 and the first detector 77A. The first parabolic mirror 76A focuses the secondary electromagnetic waves reflected by the spectroscopic element 75 and directs the focused secondary electromagnetic waves into the first detector 77A.

[0114] The first detector 77A receives plasma light (secondary electromagnetic wave) generated in the sample SP and collected by the reflective objective lens 74, and generates an intensity distribution spectrum, which is the intensity distribution of the plasma light for each wavelength.

[0115] In particular, when the electromagnetic wave emission unit 71 is configured using a laser light source, and the reflective objective lens 74 is configured to focus the plasma light, which is a secondary electromagnetic wave generated in response to the irradiation of the laser light as a primary electromagnetic wave, the first detector 77A separates the light by reflecting it at different angles for each wavelength, and causes each of the separated wavelengths to be incident on an image sensor having multiple pixels. This makes it possible to make the wavelength of the light received by each pixel different, and to obtain the received intensity for each wavelength. In this case, the intensity distribution spectrum corresponds to the intensity distribution for each wavelength of light.

[0116] The intensity distribution spectrum may also be constructed using the received light intensity acquired for each wavenumber. Since wavelength and wavenumber correspond uniquely, even when using the received light intensity acquired for each wavenumber, the intensity distribution spectrum can be considered as the intensity distribution for each wavelength. The same applies to the second detector 77B described later.

[0117] For example, a detector based on the Czerny-Turner type can be used as the first detector 77A. The entrance slit of the first detector 77A is aligned to the focal position of the first parabolic mirror 76A. The intensity distribution spectrum generated by the first detector 77A is input to the control unit 21 of the controller body 2.

[0118] The first beam splitter 78A reflects a portion of the light transmitted through the spectroscopic element 75 (secondary electromagnetic waves in the infrared region, including the visible light band) and directs it to the second detector 77B, while transmitting the remaining portion (a portion of the visible light band) and directing it to the second beam splitter 78B. Of the plasma light belonging to the visible light band, a relatively large amount of plasma light is directed to the second detector 77B, and a relatively small amount of plasma light is directed to the first camera 81 via the second beam splitter 78B.

[0119] The second parabolic mirror 76B, like the first parabolic mirror 76A, is a so-called parabolic mirror and is positioned between the first beam splitter 78A and the second detector 77B. The second parabolic mirror 76B focuses the secondary electromagnetic waves reflected by the first beam splitter 78A and directs the focused secondary electromagnetic waves into the second detector 77B.

[0120] Similar to the first detector 77A, the second detector 77B receives secondary electromagnetic waves generated in the sample SP when the primary electromagnetic waves emitted from the electromagnetic wave emission unit 71 irradiate the sample SP, and generates an intensity distribution spectrum, which is the intensity distribution of the secondary electromagnetic waves for each wavelength.

[0121] In particular, when the electromagnetic wave emission unit 71 is configured using a laser light source, and the reflective objective lens 74 is configured to focus the plasma light, which is a secondary electromagnetic wave generated in response to the irradiation of the laser light as a primary electromagnetic wave, the second detector 77B separates the light by reflecting it at different angles for each wavelength, and causes each of the separated wavelengths to be incident on an image sensor having multiple pixels. This makes it possible to make the wavelength of light received by each pixel different, and to obtain the received intensity for each wavelength. In this case, the intensity distribution spectrum corresponds to the intensity distribution for each wavelength of light.

[0122] For the second detector 77B, for example, one based on a Czerny-Turner type detector can be used. The entrance slit of the second detector 77B is aligned to the focal position of the first parabolic mirror 76A. The intensity distribution spectrum generated by the second detector 77B is input to the control unit 21 of the controller body 2, similar to the intensity distribution spectrum generated by the first detector 77A.

[0123] The control unit 21 receives the intensity distribution spectrum in the ultraviolet region generated by the first detector 77A and the intensity distribution spectrum in the infrared region generated by the second detector 77B. Based on these intensity distribution spectra, the control unit 21 performs component analysis of the sample SP using the basic principles described later. By using the ultraviolet and infrared intensity distribution spectra in combination, the control unit 21 can perform component analysis using a wider frequency range.

[0124] The second beam splitter 78B reflects the illumination light (visible light) emitted from the LED light source 79a and passed through the optical element 79b, and irradiates the sample SP with this light via the first beam splitter 78A, spectroscopic element 75, deflection element 73, and reflective objective lens 74. The reflected light (visible light) reflected from the sample SP returns to the analytical optical system 7 via the reflective objective lens 74.

[0125] The coaxial illumination 79 includes an LED light source 79a that emits illumination light and an optical element 79b through which the illumination light emitted from the LED light source 79a passes. The coaxial illumination 79 functions as a so-called "coaxial incident illumination." The illumination light emitted from the LED light source 79a propagates coaxially with the laser light (primary electromagnetic wave) output from the electromagnetic wave emission unit 71 and irradiated onto the sample SP, and the light (secondary electromagnetic wave) returning from the sample SP.

[0126] More specifically, the coaxial illumination 79 irradiates illumination light through an optical path coaxial with the primary electromagnetic wave emitted from the electromagnetic wave emission unit 71. Specifically, the portion of the illumination light's optical path connecting the deflection element 73 and the reflective objective lens 74 is coaxial with the primary electromagnetic wave's optical path. In addition, the portion of the illumination light's optical path connecting the first beam splitter 78A and the reflective objective lens 74 is coaxial with the secondary electromagnetic wave's optical path.

[0127] The second beam splitter 78B also transmits the reflected light that has passed through the first beam splitter 78A and the plasma light that has passed through the first beam splitter 78A without reaching the first and second detectors 77A and 77B, from the reflected light that has returned to the analysis optical system 7, and directs it into the first camera 81 via the imaging lens 80.

[0128] In the example shown in Figure 8, the coaxial illumination 79 is built into the analysis housing 70, but this disclosure is not limited to such a configuration. For example, the light source may be laid out outside the analysis housing 70, and the light source and the analysis optical system 7 may be coupled to the optical system via an optical fiber cable.

[0129] The side illumination 84 is positioned to surround the reflective objective lens 74. Although not shown in the diagram, the side illumination 84 illuminates the sample SP from the side (in other words, from a direction inclined with respect to the analytical optical axis Aa).

[0130] The first camera 81 receives reflected light from the sample SP via a reflective objective lens 74. The first camera 81 images the sample SP by detecting the amount of reflected light received. The first camera 81 is an example of the "second imaging unit" in this embodiment.

[0131] Specifically, the first camera 81 according to this embodiment converts light incident through the imaging lens 80 into an electrical signal corresponding to the optical image of the subject (sample SP) using a plurality of pixels arranged on its light-receiving surface.

[0132] The first camera 81 may consist of multiple light-receiving elements arranged along a light-receiving surface. In this case, each light-receiving element corresponds to a pixel, and an electrical signal can be generated based on the amount of light received by each light-receiving element. Specifically, the first camera 81 in this embodiment is composed of an image sensor made of a CMOS (Complementary Metal Oxide Semiconductor), but is not limited to this configuration. For example, an image sensor made of a CCD (Charged-Coupled Device) can also be used as the first camera 81.

[0133] The first camera 81 then inputs electrical signals generated by detecting the amount of light received at each light-receiving element to the control unit 21 of the controller body 2. Based on the input electrical signals, the control unit 21 generates image data corresponding to the optical image of the subject. The control unit 21 can then display the generated image data as an image of the subject on the display unit 22 or the like.

[0134] The optical components described so far are housed in the aforementioned analysis housing 70. A through-hole 70a is provided on the lower surface of the analysis housing 70. The reflective objective lens 74 faces the mounting surface 51a through this through-hole 70a.

[0135] A shielding member 83, as shown in Figure 8, may be placed inside the analysis housing 70. This shielding member 83 is positioned between the through hole 70a and the reflective objective lens 74, and can be inserted into the optical path of the laser beam based on an electrical signal input from the controller body 2 (see the dotted line in Figure 8). The shielding member 83 is configured to be at least unable to transmit laser light.

[0136] By inserting a shielding member 83 in the optical path, the emission of laser light from the analysis housing 70 can be limited. The shielding member 83 may be placed between the electromagnetic wave emission unit 71 and the output adjustment means 72.

[0137] As shown in Figure 9, the analysis housing 70 contains not only the space for the analysis optical system 7 but also the space for the slide mechanism 65. In that sense, the analysis housing 70 can also be considered as an element of the slide mechanism 65.

[0138] Specifically, the analysis housing 70 according to this embodiment is formed in a box shape in which the front-to-back dimension is shorter than the left-to-right dimension. The left portion of the front surface 70b of the analysis housing 70 protrudes forward to secure the movement range of the guide rail 65a in the front-to-back direction. Hereinafter, this protruding portion will be referred to as the "protruding part" and designated with reference numeral 70c. In the vertical direction, this protruding part 70c is located in the lower half of the front surface 70b (in other words, only the lower half of the left portion of the front surface 70b protrudes).

[0139] -Basic principles of analysis using the Analytical Optical System 7- The control unit 21 performs component analysis of the sample SP based on the intensity distribution spectra input from the first detector 77A and the second detector 77B, which act as detectors. As a specific analytical method, the LIBS method can be used, as described above. The LIBS method is a method for analyzing the components contained in the sample SP at the elemental level (a so-called elemental analysis method).

[0140] Generally, when high energy is imparted to a substance, electrons separate from the atomic nucleus, causing the substance to enter a plasma state. The electrons separated from the atomic nucleus are temporarily in a high-energy and unstable state, but as they lose energy from that state, they are recaptured by the atomic nucleus and transition to a low-energy and stable state (in other words, they return from a plasma state to a non-plasma state).

[0141] Here, the energy lost from electrons is emitted from them as electromagnetic waves, but the magnitude of the energy of these electromagnetic waves is determined by the energy levels based on the shell structure unique to each element. In other words, the energy of the electromagnetic waves emitted when electrons return from a plasma to a non-plasma state has a value unique to each element (more precisely, the orbital of the electron bound to the atomic nucleus). The magnitude of the energy of the electromagnetic waves is determined by the wavelength of those electromagnetic waves. Therefore, by analyzing the wavelength distribution of electromagnetic waves emitted from electrons, that is, the wavelength distribution of light emitted from a substance during plasma formation, it becomes possible to analyze the components contained in that substance at the elemental level. This method is generally called atomic emission spectroscopy (AES).

[0142] The LIBS method is an analytical technique belonging to the AES method. Specifically, in the LIBS method, energy is imparted to a substance (sample SP) by irradiating it with a laser (primary electromagnetic wave). Here, the area irradiated by the laser is locally plasma-generated, and by analyzing the intensity distribution spectrum of the plasma light (secondary electromagnetic wave) emitted as a result of this plasma generation, it is possible to analyze the components of the substance.

[0143] In other words, as described above, the wavelength of each plasma light (secondary electromagnetic wave) has a unique value for each element. Therefore, if the intensity distribution spectrum forms a peak at a specific wavelength, the element corresponding to that peak is a component of the sample SP. Furthermore, if the intensity distribution spectrum contains multiple peaks, the component ratio of each element can be calculated by comparing the intensity (amount of light received) of each peak.

[0144] The LIBS method does not require vacuuming, and component analysis can be performed in an open atmospheric state. Furthermore, although it is a destructive test of the sample SP, it does not require processing such as dissolving the entire sample SP, and the positional information of the sample SP is preserved (it is merely a localized destructive test).

[0145] -Observation Unit 63- The observation unit 63 comprises an observation optical system 9 and an observation housing 90 that houses the observation optical system 9. The observation optical system 9 is a collection of components for observing the sample SP as the object to be observed, and each component is housed in the observation housing 90. The observation housing 90 is configured separately from the aforementioned analysis housing 70 and houses a second camera 93 as an imaging unit. The elements for observing the sample SP also include the control unit 21 of the controller body 2.

[0146] The observation optical system 9 includes a lens unit 9a having an objective lens 92. As shown in Figure 3, this lens unit 9a corresponds to a cylindrical lens barrel located at the lower end of the observation housing 90. The lens unit 9a is held by the analysis housing 70. The lens unit 9a can be removed from the observation housing 90 on its own.

[0147] The observation housing 90 is connected to a communication cable C2 for sending and receiving electrical signals with the controller unit 2, and an optical fiber cable C3 for guiding illumination light from an external source. Note that the communication cable C2 is not mandatory, and the observation optical system 9 and the controller unit 2 may be connected wirelessly.

[0148] Specifically, as shown in Figure 6, the observation optical system 9 includes a mirror group 91, an objective lens 92, a second camera 93 as an imaging unit, a second coaxial illumination 94, a second side illumination 95, and a magnification optical system 96 as a magnification changing unit.

[0149] The objective lens 92 has an observation optical axis Ao that extends approximately vertically, and focuses illumination light to irradiate the sample SP placed on the mounting stage body 51, as well as focusing the light (reflected light) from the sample SP. The observation optical axis Ao is positioned parallel to the analysis optical axis Aa of the reflective objective lens 74 of the analysis optical system 7. The reflected light collected by the objective lens 92 is received by the second camera 93.

[0150] The mirror group 91 transmits the reflected light collected by the objective lens 92 and guides it to the second camera 93. The mirror group 91 according to this embodiment can be configured using a total reflection mirror and a beam splitter, as illustrated in Figure 6. The mirror group 91 also reflects the illumination light emitted from the second coaxial illumination 94 and guides it to the objective lens 92.

[0151] The second camera 93 receives the reflected light reflected from the sample SP through the objective lens 92. The second camera 93 images the sample SP by detecting the amount of reflected light received. The second camera 93 is an example of the "imaging unit" in this embodiment.

[0152] On the other hand, as mentioned above, the first camera 81 is an example of the "second imaging unit" in this embodiment. In this specification, the configuration in which the second camera 93 is considered as the imaging unit and the first camera 81 is considered as the second imaging unit will be mainly described, but as will be described later, the first camera 81 may be considered as the imaging unit and the second camera 93 as the second imaging unit.

[0153] Specifically, the second camera 93 according to this embodiment converts light incident from the sample SP through the objective lens 92 into an electrical signal corresponding to the optical image of the subject (sample SP) using a plurality of pixels arranged on its light-receiving surface.

[0154] The second camera 93 may consist of multiple light-receiving elements arranged along a light-receiving surface. In this case, each light-receiving element corresponds to a pixel, and it becomes possible to generate an electrical signal based on the amount of light received by each light-receiving element. The second camera 93 in this embodiment is composed of an image sensor made of CMOS, similar to the first camera 81, but an image sensor made of CCD can also be used.

[0155] The second camera 93 then inputs electrical signals generated by detecting the amount of light received by each light-receiving element to the control unit 21 of the controller body 2. Based on the input electrical signals, the control unit 21 generates image data corresponding to the optical image of the subject. The control unit 21 can then display the generated image data as an image of the subject on the display unit 22 or the like.

[0156] The second coaxial illuminator 94 emits illumination light guided from the optical fiber cable C3. The second coaxial illuminator 94 illuminates with illumination light through a common optical path with the reflected light focused via the objective lens 92. In other words, the second coaxial illuminator 94 functions as a "coaxial incident illumination" coaxial with the observation optical axis Ao of the objective lens 92. Alternatively, instead of guiding illumination light from the outside via the optical fiber cable C3, the light source may be built into the lens unit 9a. In that case, the optical fiber cable C3 would not be necessary.

[0157] The second side illumination 95 consists of a ring illumination arranged to surround the objective lens 92, as schematically illustrated in Figure 6. Similar to the side illumination 84 in the analytical optical system 7, the second side illumination 95 illuminates the sample SP from diagonally above.

[0158] The magnification optical system 96 is positioned between the mirror group 91 and the second camera 93, and is configured to change the magnification ratio of the sample SP by the second camera 93. The magnification optical system 96 according to this embodiment includes a variable magnification lens and an actuator configured to move the variable magnification lens along the optical axis of the second camera 93. The actuator can change the magnification ratio of the sample SP by moving the variable magnification lens based on a control signal input from the control unit 21.

[0159] The specific configuration of the magnification optical system 96 is not limited to a configuration in which the variable magnification lens is moved by an actuator. For example, an operating unit for moving the variable magnification lens may be provided in the magnification optical system. In this case, the magnification ratio of the sample SP can be changed by operating the operating unit.

[0160] Furthermore, a sensor for detecting changes in magnification may be provided in the magnification optical system. When it is detected that the magnification has changed from low to high, the second camera 93 may automatically capture the image before the change (the low-magnification image described later), and the captured image may be saved to the controller unit 2. In this way, the user can understand the relative positional relationship between the low-magnification image and the high-magnification image described later.

[0161] Such a magnification optical system 96 may be configured to change the magnification ratio of the sample SP by the second camera 93, as well as to change the magnification ratio of the sample SP by the first camera 81. In that case, the magnification optical system 96 would be provided between the spectroscopic element 75 and the first camera 81.

[0162] -Housing connector 64- The housing connector 64 is a component for connecting the observation housing 90 to the analysis housing 70. When the housing connector 64 connects both housings 70 and 90, the analysis unit 62 and the observation unit 63 are integrated, and consequently, the analysis optical system 7 and the observation optical system 9 move together as a single unit.

[0163] The housing connector 64 can be attached to the inside or outside of the analysis housing 70, that is, to the inside or outside of the analysis housing 70, or to the stand 42. In particular, in this embodiment, the housing connector 64 is attached to the outer surface of the analysis housing 70.

[0164] Specifically, the housing connector 64 according to this embodiment is configured to be attachable to the aforementioned protrusion 70c of the analysis housing 70, and is configured to hold the lens unit 9a to the right of the protrusion 70c.

[0165] Furthermore, as shown in Figure 3, when the observation housing 90 is connected to the analysis housing 70 by the housing connector 64, the front surface of the protruding portion 70c protrudes forward from the housing connector 64 and the front portion of the observation housing 90. Thus, in this embodiment, when the housing connector 64 holds the observation housing 90, when viewed from the side (when viewed from a direction perpendicular to the direction of movement of the observation optical system 9 and the analysis optical system 7 by the slide mechanism 65), the observation housing 90 and at least a part of the analysis housing 70 (the protruding portion 70c in this embodiment) are laid out to overlap.

[0166] In this embodiment, the housing connector 64 fixes the observation housing 90 to the analysis housing 70, thereby fixing the relative position of the analysis optical axis Aa with respect to the observation optical axis Ao.

[0167] Specifically, as shown in Figure 9 described later, the housing connector 64 holds the observation housing 90, so that the observation optical axis Ao and the analysis optical axis Aa are aligned along the direction in which the observation optical system 9 and the analysis optical system 7 move relative to the mounting table 5 by the sliding mechanism 65 (in this embodiment, the front-to-back direction). In particular, in this embodiment, the observation optical axis Ao is positioned further forward than the analysis optical axis Aa.

[0168] Furthermore, as shown in Figure 9, the housing connector 64 holds the observation housing 90, so that the observation optical axis Ao and the analysis optical axis Aa are positioned such that their positions coincide in a non-moving direction (left-right direction in this embodiment) that is perpendicular to the aforementioned movement direction (front-back direction in this embodiment) and is along the horizontal direction.

[0169] -Slide mechanism 65- Figure 9 is a schematic diagram illustrating the configuration of the slide mechanism 65. Figures 10A and 10B are diagrams illustrating the horizontal movement of the head unit 6.

[0170] The slide mechanism 65 is configured to move the relative positions of the observation optical system 9 and the analysis optical system 7 with respect to the mounting stage body 51 along the horizontal direction, so that imaging of the sample SP by the observation optical system 9 and irradiation of electromagnetic waves (laser light) when generating an intensity distribution spectrum by the analysis optical system 7 (in other words, irradiation of electromagnetic waves by the output section 71 of the analysis optical system 7) can be performed on the same location on the sample SP as the object of observation.

[0171] The direction of relative position movement by the slide mechanism 65 can be the direction of alignment of the observation optical axis Ao and the analysis optical axis Aa. As shown in Figure 9, the slide mechanism 65 according to this embodiment moves the relative positions of the observation optical system 9 and the analysis optical system 7 with respect to the mounting base body 51 along the front-to-back direction.

[0172] The slide mechanism 65 according to this embodiment displaces the analysis housing 70 relative to the stand 42 and the head mounting member 61. Since the analysis housing 70 and the lens unit 9a are connected by a housing connector 64, displacing the analysis housing 70 will also displace the lens unit 9a as a whole.

[0173] Specifically, the slide mechanism 65 according to this embodiment includes a guide rail 65a and an actuator 65b, the guide rail 65a being configured to protrude forward from the front surface of the head mounting member 61.

[0174] More specifically, the base end of the guide rail 65a is fixed to the head mounting member 61. On the other hand, the tip portion of the guide rail 65a is inserted into a housing space partitioned within the analysis housing 70 and is attached to the analysis housing 70 in a manner that allows it to be inserted into and removed from the analysis housing 70. The direction in which the analysis housing 70 is inserted into and removed from the guide rail 65a is equal to the direction that separates or brings the head mounting member 61 and the analysis housing 70 closer together (in this embodiment, the front-to-back direction).

[0175] The actuator 65b can be, for example, a linear motor or a stepping motor that operates based on an electrical signal from the control unit 21. By driving this actuator 65b, the analysis housing 70, and consequently the observation optical system 9 and the analysis optical system 7, can be displaced relative to the stand 42 and the head mounting member 61. If a stepping motor is used as the actuator 65b, a motion conversion mechanism is further provided that converts the rotational motion of the output shaft of the stepping motor into linear motion in the forward and backward direction.

[0176] The slide mechanism 65 further includes a movement sensor Sw2 for detecting the amount of movement of the observation optical system 9 and the analysis optical system 7. The movement sensor Sw2 can be configured as, for example, a linear scale (linear encoder) or a photointerrupter.

[0177] The movement sensor Sw2 detects the relative distance between the analysis housing 70 and the head mounting member 61 and inputs an electrical signal corresponding to that relative distance to the controller body 2. The controller body 2 calculates the amount of change in the relative distance input from the movement sensor Sw2 to determine the displacement of the observation optical system 9 and the analysis optical system 7.

[0178] As shown in Figures 10A and 10B, when the slide mechanism 65 is activated, the head unit 6 slides horizontally, causing the relative positions of the observation optical system 9 and the analysis optical system 7 with respect to the mounting stage 5 to move (horizontally). This horizontal movement allows the head unit 6 to switch between a first mode in which the reflective objective lens 74 is facing the sample SP and a second mode in which the objective lens 92 is facing the sample SP. The slide mechanism 65 can slide the analysis housing 70 and the observation housing 90 between the first and second modes.

[0179] As shown in Figures 10A and 10B, when the slide mechanism 65 is activated, the head unit 6 slides horizontally, causing the relative positions of the observation optical system 9 and the analysis optical system 7 with respect to the mounting stage 5 to move (horizontally). This horizontal movement allows the head unit 6 to switch between a first mode in which the reflective objective lens 74 is facing the sample SP and a second mode in which the objective lens 92 is facing the sample SP. The slide mechanism 65 can slide the analysis housing 70 and the observation housing 90 between the first and second modes.

[0180] To achieve this configuration, the amount of movement D2 of the head unit 6 when the slide mechanism 65 is operated is set to be the same as the distance D1 between the observation optical axis Ao and the analysis optical axis Aa (see Figure 9). In addition, the alignment direction of the observation optical axis Ao and the analysis optical axis Aa is set to be parallel to the direction of movement of the head unit 6, as shown in Figure 9.

[0181] Furthermore, in this embodiment, by adjusting the dimensions of the housing connector 64 in the approximately vertical direction, the distance between the sample SP and the center of the reflective objective lens 74 in the first mode (more specifically, the point where the analysis optical axis Aa and the reflective objective lens 74 intersect) is set to match the distance between the sample SP and the center of the objective lens 92 in the second mode (second state) (more specifically, the point where the observation optical axis Ao and the objective lens 92 intersect). This setting can also be achieved by determining the focus position using autofocus. By setting it in this way, the working distance (WD) can be matched between the first mode, which is when analyzing the sample SP, and the second mode, which is when observing the sample SP. By matching the WD in both modes, it becomes possible to maintain a focused state before and after switching modes.

[0182] By configuring the sample SP as described above, it becomes possible to perform image generation by the observation optical system 9 and intensity distribution spectrum generation by the analysis optical system 7 (specifically, irradiation of the primary electromagnetic wave by the analysis optical system 7 when an intensity distribution spectrum is generated by the analysis optical system 7) on the same location in the sample SP from the same direction, both before and after switching between the first and second modes.

[0183] Furthermore, as shown in Figure 10B, the cover member 61b of the head mounting member 61 is positioned to cover (shield) the reflective objective lens 74 that constitutes the analytical optical system 7 in the first mode, when the head portion 6 is relatively retracted, and to be positioned to be spaced away from (unshielded) the reflective objective lens 74 in the second mode, when the head portion 6 is relatively advanced.

[0184] In the former shielding state, even if laser light is emitted unintentionally, the laser light can be shielded by the cover member 61b. This improves the safety of the device.

[0185] (Details of the tilting mechanism 45) Figures 11A and 11B are diagrams illustrating the operation of the tilting mechanism 45. The tilting mechanism 45, including its relationship with the housing connector 64, will be described in detail below with reference to Figures 10A and 10B.

[0186] The tilting mechanism 45 is a mechanism composed of the aforementioned shaft member 44, etc., and can tilt at least the observation optical system 9 of the analysis optical system 7 and the observation optical system 9 with respect to a reference axis As perpendicular to the mounting surface 51a.

[0187] As described above, in this embodiment, the housing connector 64 integrally connects the analysis housing 70 and the observation housing 90, thereby maintaining the relative position of the observation optical axis Ao with respect to the analysis optical axis Aa. Therefore, when the observation optical system 9 having the observation optical axis Ao is tilted, the analysis optical system 7 having the analysis optical axis Aa will tilt integrally with the observation optical system 9, as shown in Figures 11A and 11B.

[0188] Thus, the tilting mechanism 45 according to this embodiment tilts the analytical optical system 7 and the observation optical system 9 integrally while maintaining the relative position of the observation optical axis Ao with respect to the analytical optical axis Aa.

[0189] Furthermore, the operation of the slide mechanism 65 and the operation of the tilt mechanism 45 are independent of each other, and combinations of both operations are permitted. Therefore, the slide mechanism 65 can move the relative position of the observation optical system 9 and the analysis optical system 7 while maintaining the tilted position of the observation optical system 9 by the tilt mechanism 45. In other words, as shown by the double arrow A1 in Figure 11B, the analysis observation apparatus A according to this embodiment allows the head portion 6 to slide back and forth while the observation optical system 9 remains tilted.

[0190] In particular, in this embodiment, since the analytical optical system 7 and the observation optical system 9 are configured to tilt integrally, the slide mechanism 65 moves the relative positions of the observation optical system 9 and the analysis optical system 7 while maintaining the tilted state of both the observation optical system 9 and the analytical optical system 7 by the tilt mechanism 45.

[0191] Furthermore, the analysis and observation device A is configured to perform eucentric observation. That is, in the analysis and observation device A, a device-specific three-dimensional coordinate system is defined, formed by three axes parallel to the X, Y, and Z directions, respectively. The secondary storage device 21c of the control unit 21 further stores the coordinates of the intersection points in the three-dimensional coordinate system of the analysis and observation device A, which will be described later. The coordinate information of the intersection points may be pre-stored in the secondary storage device 21c when the analysis and observation device A is shipped from the factory. In addition, the coordinate information of the intersection points stored in the secondary storage device 21c may be updateable by the user of the magnification analysis device A.

[0192] As shown in Figures 11A and 11B, if the angle of the analytical optical axis Aa with respect to the reference axis As is referred to as the "tilt θ", the analytical observation device A is configured to allow the emission of laser light when the tilt θ is, for example, below a predetermined first threshold θmax. Hardware constraints can be imposed on the tilt mechanism 45 in order to keep the tilt θ below the first threshold θmax. For example, the operating range of the tilt mechanism 45 may be physically limited by providing a brake mechanism (not shown) to the tilt mechanism 45.

[0193] The observation optical axis Ao, which is the optical axis of the objective lens 92, intersects the central axis Ac. When the objective lens 92 oscillates about the central axis Ac, the intersection position of the observation optical axis Ao and the central axis Ac remains constant, while the angle (tilt θ) of the observation optical axis Ao with respect to the reference axis As changes. In this way, when the user oscillates the objective lens 92 about the central axis Ac using the tilt mechanism 45, for example, if the observation target portion of the sample SP is at the above intersection position, even if the objective lens 92 is tilted, a eucentric relationship is maintained in which the center of the field of view of the second camera 93 does not move from the same observation target portion. Therefore, it is possible to prevent the observation target portion of the sample SP from moving out of the field of view of the second camera 93 (the field of view of the objective lens 92).

[0194] In particular, in this embodiment, since the analytical optical system 7 and the observation optical system 9 are configured to tilt integrally, the analytical optical axis Aa, which is the optical axis of the reflective objective lens 74, intersects the central axis Ac, just like the observation optical axis Ao. When the reflective objective lens 74 oscillates about the central axis Ac, the intersection position of the analytical optical axis Aa and the central axis Ac is maintained constant, while the angle (tilt θ) of the analytical optical axis Aa with respect to the reference axis As changes.

[0195] As mentioned above, the tilting mechanism 45 allows the stand 42 to be tilted approximately 90° to the right with respect to the reference axis As, or approximately 60° to the left with respect to the reference axis As. However, if the analytical optical system 7 and the observation optical system 9 are configured to tilt integrally, tilting the stand 42 excessively could cause the laser light emitted from the analytical optical system 7 to be directed towards the user.

[0196] Therefore, if the inclination of the observation optical axis Ao and the analysis optical axis Aa with respect to the reference axis As is denoted as θ, it is desirable that the inclination θ be kept within a range that satisfies a predetermined safety standard, at least under conditions in which laser light can be emitted. Specifically, as described above, the inclination θ in this embodiment is adjustable within a range below a predetermined first threshold θmax.

[0197] <Details of the controller unit> Figure 12 is a block diagram illustrating the configuration of the controller body 2. Figure 13 is a block diagram illustrating the configuration of the control unit 21. In this embodiment, the controller body 2 and the optical system assembly 1 are configured separately, but this disclosure is not limited to such a configuration. At least a part of the controller body 2 may be provided in the optical system assembly 1. For example, at least a part of the processing unit 21a that constitutes the control unit 21 can be built into the optical system assembly 1.

[0198] As described above, the controller body 2 according to this embodiment includes a control unit 21 that performs various processing and a display unit 22 that displays information related to the processing performed by the control unit 21. The control unit 21 is electrically connected to at least a mouse 31, a console 32, a keyboard 33, a head drive unit 47, an overhead camera 48, a mounting platform drive unit 53, an actuator 65b, an electromagnetic wave emission unit 71, an output adjustment means 72, an LED light source 79a, a first camera 81, a shielding member 83, a side illumination 84, a second camera 93, a second coaxial illumination (second coaxial illumination) 94, a second side illumination (second side illumination) 95, a magnifying optical system 96, a lens sensor Sw1, a movement amount sensor Sw2, a first tilt sensor Sw3, and a second tilt sensor Sw4.

[0199] The control unit 21 electrically controls the head drive unit 47, overhead camera 48, mounting platform drive unit 53, actuator 65b, electromagnetic wave emission unit 71, output adjustment means 72, LED light source 79a, first camera 81, shielding member 83, side illumination 84, second camera 93, second coaxial illumination 94, second side illumination 95, and magnification optical system 96.

[0200] Furthermore, the output signals from the overhead camera 48, the first camera 81, the second camera 93, the lens sensor Sw1, the movement sensor Sw2, the first tilt sensor Sw3, and the second tilt sensor Sw are input to the control unit 21. The control unit 21 performs calculations based on the input output signals and then performs processing based on the calculation results. As hardware for performing such processing, the control unit 21 according to this embodiment includes a processing unit 21a that performs various processes, a primary storage device 21b and a secondary storage device 21c that store data related to the processing performed by the processing unit 21a, and an input / output bus 21d.

[0201] The processing unit 21a consists of a CPU, system LSI, DSP, etc. By executing various programs, the processing unit 21a performs analysis of sample SP and controls various parts of the analysis and observation device A, such as the display unit 22. In particular, the processing unit 21a according to this embodiment can control the display screen on the display unit 22 based on information indicating the analysis results of sample SP, as well as image data input from the first camera 81, the second camera 93, and the overhead camera 48.

[0202] Furthermore, the display unit controlled by the processing unit 21a is not limited to the display unit 22 of the controller body 2. The term "display unit" in this disclosure also includes display units that are not provided by the analysis and observation device A. For example, a display of a computer, tablet terminal, etc., connected to the analysis and observation device A by wired or wireless connection may be considered as a display unit, and information indicating the analysis results of the sample SP and various image data may be displayed on that display unit. Thus, this disclosure can also be applied to an analysis system comprising an analysis and observation device A and a display unit connected to the analysis and observation device A by wired or wireless connection.

[0203] Furthermore, the processing unit 21a according to this embodiment includes, as functional elements, a mode switching unit 211, a spectrum acquisition unit 212 and a spectrum analysis unit 213 as component analysis units, an imaging control unit 214, a user interface control unit (hereinafter simply referred to as "UI control unit") 215, an illumination setting unit 216, an illumination control unit 217, and a report output unit 218. These elements may be implemented by logic circuits or by executing software. In addition, at least some of these elements may be provided in the optical system assembly 1, such as the head unit 6.

[0204] The classification of the spectrum acquisition unit 212, spectrum analysis unit 213, etc., is merely for convenience and can be freely changed. For example, the spectrum acquisition unit 212 may also serve as the spectrum analysis unit 213, or the imaging control unit 214 may be subdivided according to function.

[0205] The primary storage device 21b is composed of volatile memory. In this embodiment, the primary storage device 21b can read various data from the secondary storage device 21c, etc., and store it temporarily.

[0206] The secondary storage device 21c is composed of non-volatile memory such as a hard disk drive or solid-state drive. The secondary storage device 21c can continuously store various types of data. Alternatively, instead of storing various types of data in the secondary storage device 21c, various types of data may be read from a storage medium such as an optical disc, or from a computer, tablet terminal, etc., connected to the analysis and observation device A by wired or wireless connection.

[0207] -Mode switching section 211- The mode switching unit 211 switches between the first mode and the second mode by moving the analysis optical system 7 and the observation optical system 9 forward and backward along the horizontal direction (front-to-back direction in this embodiment). For example, the mode switching unit 211 according to this embodiment can switch between the second camera 93 and the first camera 81 by moving the observation housing 90 and the analysis housing 70 relative to the mounting base 5.

[0208] The mode switching unit 211 can switch between the first camera 81 and the second camera 93 as the imaging unit for imaging the sample SP. For example, in this embodiment, the mode switching unit 211 is set to the first camera 81 as the imaging unit in the first mode, and to the second camera 93 as the imaging unit in the second mode.

[0209] Specifically, the mode switching unit 211 according to this embodiment pre-reads the distance between the observation optical axis Ao and the analysis optical axis Aa, which is stored in the secondary storage device 21c beforehand. Next, the mode switching unit 211 moves the analysis optical system 7 and the observation optical system 9 forward and backward by operating the actuator 65b of the slide mechanism 65.

[0210] Here, the mode switching unit 211 compares the displacement of the observation optical system 9 and the analysis optical system 7 detected by the movement sensor Sw2 with a previously read distance to determine whether the displacement of the former has reached the distance of the latter. Then, when the displacement reaches a predetermined distance, it stops the movement of the analysis optical system 7 and the observation optical system 9. The predetermined distance may be set in advance, or it may be configured so that the predetermined distance coincides with the maximum movable range of the actuator 65b.

[0211] The head unit 6 may be tilted after switching to the first mode by the mode switching unit 211, or it may be tilted in the second mode before switching. The timing of operating the tilting mechanism 45 may be in either the first mode or the second mode.

[0212] -Spectrum acquisition unit 212- The spectrum acquisition unit 212 controls the electromagnetic wave emission unit 71 to emit primary electromagnetic waves to the sample SP, which is the object to be analyzed, and acquires the intensity distribution spectrum generated by the first and second detectors 77A and 77B, which are detectors.

[0213] Specifically, in this embodiment, the spectrum acquisition unit 212 emits a primary electromagnetic wave (e.g., laser light) from the electromagnetic wave emission unit 71 in the first mode. The secondary electromagnetic wave (e.g., plasma light) generated by the emission of the primary electromagnetic wave reaches the first detector 77A and the second detector 77B.

[0214] The first and second detectors 77A and 77B, acting as detectors, generate intensity distribution spectra based on the secondary electromagnetic waves that reach them. These generated intensity distribution spectra are then acquired by the spectrum acquisition unit 212.

[0215] Furthermore, the laser beam emission position by the spectrum acquisition unit 212 is specified by an operation input to the image P displayed on the display unit 22. Multiple emission positions can be specified. If multiple emission positions are specified, the spectrum acquisition unit 212 will emit laser beam to each emission position in sequence and perform component analysis for each emission position. The characteristic processing performed in this case will be explained in the description of the configuration of the imaging control unit 214 and the UI control unit 215.

[0216] -Spectral Analysis Unit 213- The spectral analysis unit 213 performs component analysis of the sample SP based on the intensity distribution spectrum generated by the spectral acquisition unit 212. As already explained, when the LIBS method is used, the surface of the sample SP is locally plasma-generated, and the peak wavelength of the light emitted when it returns from the plasma state to a gas has a unique value for each element (more precisely, the electron orbital of electrons bound to the atomic nucleus). Therefore, by identifying the peak position of the intensity distribution spectrum, it is possible to determine that the element corresponding to that peak position is a component contained in the sample SP. Furthermore, by comparing the magnitudes (peak heights) of the peaks, the component ratio of each element can be determined, and the composition of the sample SP can be estimated based on the determined component ratio. The spectral analysis unit 213, together with the spectral acquisition unit 212 described above, exemplifies the "component analysis unit" in this embodiment.

[0217] The analysis results from the spectral analysis unit 213 can be displayed on the display unit 22 or stored in the secondary storage device 21c in a predetermined format.

[0218] -Image control unit 214 and UI control unit 215- The following describes the processes performed by the imaging control unit 214. Since the processes exemplified below are closely related to those performed by the UI control unit 215, the following explanation also includes explanations related to the UI control unit 215.

[0219] 1. High-magnification and low-magnification images The high-magnification image is an image P with a relatively high magnification ratio for the sample SP. This high-magnification image may be generated based on the light received signal from the second camera 93 of the observation optical system 9, or based on the light received signal from the first camera 81 of the analysis optical system 7. Alternatively, the high-magnification image captured by the second camera 93 may be used as the observation system high-magnification image, and the high-magnification image captured by the first camera 81 of the analysis optical system 7 may be used as the analysis system high-magnification image, thereby generating both an observation system high-magnification image and an analysis system high-magnification image.

[0220] The low-magnification image is an image P with a relatively wider field of view than the high-magnification image described above. This low-magnification image may be an observation image in which the magnification of the sample SP is relatively lower than the magnification used when acquiring the high-magnification image. Alternatively, instead of using such a low-magnification image, an image P with a wider field of view than each individual high-magnification image (a wide-area image, so to speak) may be created by stitching together multiple high-magnification images.

[0221] Furthermore, high-magnification and low-magnification images may be generated using both the first camera 81 of the analysis optical system 7 and the second camera 93 of the observation optical system 9. Specifically, the magnification of the second camera 93 of the observation optical system 9 may be set relatively low, and the magnification of the first camera 81 of the analysis optical system 7 may be set relatively high. In this case, the image P captured by the second camera 93 of the observation optical system 9 may be used as the low-magnification image, and after acquiring the low-magnification image, the mode switching unit 211 may switch from the second mode to the first mode, and then the image P captured by the first camera 81 of the analysis optical system 7 may be used as the high-magnification image.

[0222] Furthermore, as will be explained later, low-magnification images can be used to inform the user of the field of view of the high-magnification image, or as a navigation image Pn to accept changes to the field of view of the high-magnification image. In such applications, the low-magnification image may be referred to as a navigation image Pn.

[0223] Furthermore, high-magnification images can be used as images P to show the dynamic changes of the sample SP. In such applications, high-magnification images are sometimes referred to as live images Pl.

[0224] 2. Processing related to live image Pl and navigation image Pn The imaging control unit 214 generates an image P of the sample SP based on the amount of reflected light received by the first camera 81 or the second camera 93, which acts as the second imaging unit. The generated image P is then displayed on the display unit 22 by the UI control unit 215. The image P generated by the imaging control unit 214 can be classified from two main perspectives. Here, as the first perspective, we will describe the classification based on the application of the image P and the size of the imaging field of view, and the processing related to that classification.

[0225] The following explanation corresponds to the case in the second mode, that is, the case in which the second camera 93 is used as the imaging unit, but the second camera 93 can be replaced with the first camera 81 as appropriate. For example, the generation of the live image Pl and the navigation image Pn may be performed by the first camera 81 instead of the second camera 93, or in addition to the second camera 93.

[0226] Figure 14 illustrates the display screens for the live image Pl and navigation image Pn. Figure 17 illustrates the user interface for outputting a start trigger signal.

[0227] In Figure 14, icon Ic11 is a user interface that receives instructions to switch from the first mode to the second mode, or from the second mode to the first mode, and icon Ic12 is a user interface that receives instructions to perform component analysis in the first mode. When icon Ic12 receives the execution instruction, a dialog box W1, as illustrated in Figure 17, is displayed on the display unit 22. Dialog box W1 will be described later.

[0228] As illustrated in Figure 14, the imaging control unit 214 according to this embodiment can generate, as the image P, a live image Pl which is updated at regular intervals and shows the dynamic changes of the sample SP, based on the amount of reflected light received by the second camera 93, as an image of the sample SP (particularly the high-magnification image P), and a navigation image Pn which is the low-magnification image mentioned above, which has a wider imaging range than the live image Pl and shows the position of the live image Pl.

[0229] Here, the live image Pl is generated as a high-magnification image with a relatively high magnification of the sample SP by the second camera 93. On the other hand, the navigation image Pn is generated as a low-magnification image with a relatively low magnification of the sample SP by the second camera 93. As mentioned above, the navigation image Pn may be generated by stitching together multiple high-magnification images. Here, the magnification can be changed by adjusting the magnification optical system 96 by the imaging control unit 214, or by adjusting the magnification optical system 96 by the user. Note that the magnification can also be changed by so-called digital zoom.

[0230] As described above, the image generated based on the light received signal from the second camera 93 of the observation optical system 9 may be used as the navigation image Pn, and the image generated based on the light received signal from the first camera 81 of the analysis optical system 7 may be used as the live image Pl. Alternatively, for example, the navigation image Pn may be generated by the first camera 81. In that case, the navigation image Pn may be generated using a low-magnification image from the first camera 81, or it may be generated by stitching together multiple high-magnification images generated via the first camera 81.

[0231] Specifically, firstly, a low-magnification image of the sample SP is acquired by the second camera 93, which has a relatively low magnification, and this is used as the navigation image Pn. Then, the mode switching unit 211 switches the optical system from the observation optical system 9 to the analysis optical system 7. A high-magnification image of the sample SP is then acquired by the first camera 81 of the analysis optical system 7, and this may be used as the live image Pl. The images taken by the first camera 81 are sometimes referred to as the pre-irradiation image Pb and the post-irradiation image Pa, depending on the timing of their acquisition. The pre-irradiation image Pb refers to the image before the laser light is irradiated onto the sample SP, and the post-irradiation image Pa refers to the image after the laser light has been irradiated onto the sample SP.

[0232] Furthermore, operating icon Ic11 in the state shown in Figure 14 switches from the second mode to the first mode. In the first mode, the high-magnification image generated by the first camera 81 is displayed on the display unit 22 as the live image Pl. In this case, the navigation image Pn may be switched to the low-magnification image captured by the first camera 81, or the low-magnification image captured by the second camera 93 may be used as is.

[0233] The update interval for the live image Pl (the time interval at which the live image Pl is generated) can be set to, for example, several tens of FPS, or to update every few seconds. This update interval can be a setting specific to the observation unit 63, or it can be a setting that can be changed externally.

[0234] Alternatively, the navigation image Pn may be generated by the imaging control unit 214 controlling the mounting platform drive unit 53 and the second camera 93 to generate images P at each XY position (each position on a plane along the front-to-back and left-to-right directions) of the mounting surface 51a, and then combining the images P generated at each XY position.

[0235] Then, as illustrated in Figure 14, the UI control unit 215 displays the live image Pl and the navigation image Pn generated by the imaging control unit 214 on the display unit 22. At that time, the UI control unit 215 displays the navigation image Pn on the display unit 22 with position information Ic indicating the current position of the live image Pl within the navigation image Pn superimposed.

[0236] Here, the position information Ic may be a crosshair as illustrated in Figure 14. In this case, the intersection Cp of the crosshair may indicate the field of view center of the live image Pl when the first analysis point Lo1, described later, is not specified. In addition to the crosshair, or instead of the crosshair, the position information Ic may also be a rectangular frame indicating the field of view range of the live image Pl, or a point-shaped or circular figure may be superimposed.

[0237] The UI control unit 215 then accepts the designation of the first analysis location Lo1 on the live image Pl as the irradiation position of the primary electromagnetic wave (e.g., laser light), and displays the navigation image Pn on the display unit 22 with information indicating the position of the first analysis location Lo1 in the navigation image Pn (hereinafter also referred to as the "wide-area analysis location") superimposed on it.

[0238] Here, the first analysis location Lo1 can be specified, for example, through mouse operations, or by inputting coordinates on the live image Pl using the keyboard or the like.

[0239] Furthermore, in the example shown in Figure 14, a roughly cross-shaped marker is superimposed on the live image Pl as information indicating the designated first analysis location Lo1. On the other hand, on the navigation image Pn, the intersection X is superimposed as the wide-area analysis location. This intersection X indicates the irradiation location of the primary electromagnetic wave on the navigation image Pn. Instead of superimposing the intersection X, the crosshairs may also serve as the wide-area analysis location. In that case, the intersection Cp of the crosshairs will indicate the irradiation location of the primary electromagnetic wave on the navigation image Pn.

[0240] The first analysis location Lo1 can be specified across multiple locations. In this case, intersection point X can be displayed on the navigation image Pn at each location corresponding to the first analysis location Lo1.

[0241] Furthermore, in addition to specifying the irradiation position of the primary electromagnetic wave (first analysis location Lo1) on the live image Pl, the UI control unit 215 can also accept the specification of the irradiation position of the primary electromagnetic wave on the navigation image Pn.

[0242] More specifically, the UI control unit 215 can receive the second analysis location Lo2 on the navigation image Pn as position information corresponding to the irradiation location of the primary electromagnetic wave. As illustrated in the upper part of Figure 15, when the UI control unit 215 receives the designation of the second analysis location Lo2, the imaging control unit 214 controls the mounting platform drive unit 53 based on the second analysis location Lo2 to move the relative position (imaging position) of the mounting platform 5 with respect to the second camera 93 so that the second analysis location Lo2 falls within the field of view of the live image Pl. In the example shown in the lower part of Figure 15, the imaging position is moved so that the intersection point Cp of the position information (crosshairs) Ic coincides with the second analysis location Lo.

[0243] As shown in the lower part of Figure 15, the imaging control unit 214, with the mounting platform drive unit 53 positioned to include the second analysis point Lo2 within the field of view of the live image Pl (in the example shown, with the intersection point Cp of the position information aligned with the second analysis point Lo2), performs regeneration of the live image Pl. This generates a new live image Pl that includes the second analysis point Lo2, which can then be displayed on the display unit 22.

[0244] The UI control unit 215 can also accept further designation of the first analysis location Lo1 on the newly generated live image Pl. As illustrated in the upper part of Figure 16, when the UI control unit 215 newly accepts designation of the first analysis location Lo1', the imaging control unit 214 controls the mounting stage drive unit 53 based on the newly accepted first analysis location Lo1' to move the imaging position so that the first analysis location Lo1' approaches the center of the field of view of the live image Pl. In the example shown in the lower part of Figure 16, the imaging position is moved so that the first analysis location Lo1' coincides with the center of the field of view of the live image Pl.

[0245] The imaging control unit 214 then uses the mounting platform drive unit 53 to bring the first analysis point Lo1' closer to the center of the field of view of the live image Pl, and then performs regeneration of the live image Pl. This generates a new live image Pl with the first analysis point Lo1 closer to the center of the field of view, which can then be displayed on the display unit 22.

[0246] The UI control unit 215 can repeatedly accept the designation of the first analysis location Lo1 on the regenerated live image Pl, or accept designations for multiple locations. Each time the UI control unit 215 accepts the designation of the first analysis location Lo1 on the regenerated live image Pl, the imaging control unit 214 controls the mounting stage drive unit 53 based on that first analysis location Lo1 to move the imaging position so that the first analysis location Lo1 moves closer to the center of the field of view of the regenerated live image Pl.

[0247] Then, the imaging control unit 214, with the mounting platform drive unit 53 bringing the first analysis point Lo1 closer to the center of the field of view of the regenerated live image Pl, performs further regeneration of the live image Pl. By repeatedly performing the regeneration of the live image Pl, the user can obtain the live image Pl desired by the user.

[0248] Subsequently, once the desired live image Pl is acquired and one or more first analysis points Lo1 are specified on that live image Pl, the aforementioned icon Ic11 is operated by the user, and the mode switching unit 211 switches from the second mode to the first mode. In the first mode, the system switches from the live image Pl generated by the second camera 93 to the live image Pl generated by the first camera 81, but the position of the first analysis point Lo1 on the live image Pl and the position of the intersection point X on the navigation image Pn are retained.

[0249] Subsequently, after the first analysis location Lo1 is re-specified as necessary, if the aforementioned icon Ic12 is operated by the user, the UI control unit 215 displays the dialog W1, as illustrated in Figure 17, on the display unit 22. As illustrated in Figure 17, the dialog W1 consists of a checkbox Ic21 for specifying the laser power in three stages, a checkbox Ic22 for setting whether or not to perform depth stacking during irradiation, a checkbox Ic23 for setting whether or not to perform autofocus (AF) during irradiation, an icon Ic24 for outputting a start trigger signal, an icon Ic25 for setting averaging, and an icon Ic26 for closing the dialog W1.

[0250] When icon Ic24 is clicked in dialog W1, the UI control unit 215 outputs a start trigger signal to the spectrum acquisition unit 212. Upon receiving the start trigger signal, the spectrum acquisition unit 212 uses the mounting stage drive unit 53 to bring the first analysis point Lo1 closer to the center of the field of view of the live image Pl (for example, a fixed point in the live image Pl) and irradiates the first analysis point Lo1 with primary electromagnetic waves. This enables component analysis at the first analysis point Lo1.

[0251] Furthermore, immediately before performing component analysis, a pre-irradiation image Pb is generated, consisting of at least one of the live image Pl and the navigation image Pn. Similarly, immediately after performing component analysis, a post-irradiation image Pa is generated, also consisting of at least one of the live image Pl and the navigation image Pn.

[0252] Furthermore, the imaging control unit 214 can also display the full-focus image Pc as a live image (high-magnification image) Pl in both the first and second modes. Specifically, as illustrated in Figure 18, the imaging control unit 214 according to this embodiment moves the imaging position to a plurality of first positions along the first direction (Z direction) using the mounting stage drive unit 53, and generates an image P at each of the plurality of first positions.

[0253] In the example diagram, n height positions z1, z2, ..., zn are shown as multiple first positions, and n images P1, P2, ..., Pn are shown at each height position. The grid in images P1, 2, ..., Pn conceptually represents pixels, and the "OK" attached to each pixel conceptually indicates that it is in focus. As illustrated in Figure 18, the pixels that are in focus and the pixels that are out of focus differ at each height position.

[0254] Therefore, the imaging control unit 214 generates a full-focus image Pc of the sample by combining the high-magnification images (image P) generated at each of the multiple first positions. As shown in the figure example, the imaging control unit 214 can generate a single full-focus image Pc by extracting in-focus pixels from each of the n live images P1, P2, ..., Pn and combining those pixels. The generated full-focus image Pc is displayed on the display unit 22 as a navigation image Pn and stored in the storage unit as a pre-irradiation image Pb. This brings the entire live image Pl into focus, allowing for more appropriate selection of the first analysis location Lo1.

[0255] The generation of the omnifocal image Pc may be performed during observation by the second camera 93 of the observation unit 63 (that is, in the second mode), may be performed during observation by the first camera 81 of the analysis unit 62 (that is, in the first mode), or may be performed in both modes. Whether to generate the omnifocal image Pc can also have its settings changed as appropriate based on operation input by a user.

[0256] Incidentally, the magnification of the image P generated by the second camera 93 can be adjusted by the magnification optical system 96. For example, as shown in Fig. 26, the size of the reference marker Ma captured in a low-magnification image Pj for which the magnification is set to a predetermined magnification on the low magnification side (first magnification) is smaller than the size of the reference marker Ma captured in a high-magnification image Pi for which the magnification is set to a reference magnification relatively higher than the predetermined magnification (second magnification).

[0257] At this time, due to physical distortion or the like of the magnification optical system 96, a deviation (hereinafter referred to as "optical axis deviation") may occur between the position where the observation optical axis Ao intersects the mounting surface 51a at the reference magnification and the position where the observation optical axis Ao intersects the mounting surface 51a at the predetermined magnification. When such optical axis deviation occurs, as shown in Fig. 26, for example, even though the vertex of the reference marker Ma coincides with the intersection point Cp of the position information (crosshair) Ic at the reference magnification, there is a possibility that they do not coincide at the predetermined magnification.

[0258] To eliminate the effects of such optical axis misalignment, the imaging control unit 214 according to this embodiment first generates the low-magnification image Pj and the high-magnification image Pi as images P belonging to one of the live image Pl and the navigation image Pn by controlling the magnification optical system 96, and detects a reference marker Ma included in both the low-magnification image Pj and the high-magnification image Pi. Here, the reference marker Ma may be a scale that can be placed on the mounting surface 51a, or a pattern displayed on the mounting surface 51a. Next, the imaging control unit 214 obtains a first position difference ΔD1 indicating the difference between the position of the reference marker Ma detected in the low-magnification image Pj and the position of the reference marker Ma detected in the high-magnification image Pi, and also obtains a magnification difference indicating the difference between the magnification ratio used when generating the low-magnification image Pj and the magnification ratio used when generating the high-magnification image Pi.

[0259] The method for obtaining the position difference ΔD1 is not limited to this method. For example, high-magnification and low-magnification images of an arbitrary object to be measured may be acquired, and the difference between the position of a predetermined point on the object in the high-magnification image and the position of a predetermined point in the low-magnification image may be detected. Alternatively, if the position difference is known based on previously captured low-magnification and high-magnification images, the system may be configured to accept the input of that position difference as ΔD1.

[0260] The imaging control unit 214 then calculates the positional variation of the center of the field of view of the image P when the magnification is set to a predetermined third magnification, based on the first positional difference ΔD1 and the magnification difference. Here, if the third magnification is located midway between the predetermined magnification and the reference magnification, the magnitude of the positional variation will be smaller than the first positional difference ΔD1. Also, if the third magnification is a magnification even lower than the predetermined magnification, the magnitude of the positional variation will be larger than the first positional difference ΔD1.

[0261] Meanwhile, the UI control unit 215 detects, for example, a change in magnification in the live image Pl based on the detection signal from the lens sensor Sw1. When the UI control unit 215 detects a change in magnification in the live image Pl, it updates the superimposed position of the position information Ic in the navigation image Pn based on the position change calculated by the imaging control unit 214. Here, the update of the position information Ic is performed by calculating a correction amount for optical axis misalignment that cancels out the position change, and moving the intersection point Cp of the position information Ic according to that correction amount so that the position of the intersection point Cp coincides with that of the reference marker Ma.

[0262] It should be noted that the methods for eliminating the effects of optical axis misalignment are not limited to those described herein. For example, the control unit 21 detects a change in magnification in the live image Pl based on the detection signal from the lens sensor Sw1. Based on the position change calculated by the imaging control unit 214, the control unit 21 may drive at least one of the head drive unit 47 and the mounting platform drive unit 53 to control the alignment of the field of view center before and after the change in magnification. Alternatively, the movement of the intersection point Cp described above and the driving of at least one of the head drive unit 47 and the mounting platform drive unit 53 may be combined to control the alignment of the field of view center of the live image Pl with the intersection point Cp.

[0263] The processing unit 21a according to this embodiment can automatically correct for optical axis misalignment when changing the magnification ratio by the magnifying optical system 96, for example.

[0264] Furthermore, when switching from the second mode to the first mode, a misalignment in the assembly of the observation unit 63 to the analysis unit 62 may cause a discrepancy (hereinafter referred to as "field of view misalignment") between the position where the observation optical axis Ao and the mounting surface 51a intersect in the second mode and the position where the analysis optical axis Aa and the mounting surface 51a intersect in the first mode. If such a field of view misalignment occurs, as shown in Figure 27, for example, even if the vertex of the reference marker Ma and the intersection point Cp of the position information (crosshairs) Ic coincided in the second mode (especially at the reference magnification), they may not coincide in the first mode.

[0265] To eliminate the effects of such field of view misalignment, the imaging control unit 214 according to this embodiment first prepares an image Pi generated by the second camera 93 adjusted to a reference magnification and an image Pk generated by the first camera 81 by controlling the magnification optical system 96, and detects a reference marker Ma included in both images Pi and Pk. Next, the imaging control unit 214 obtains a second position difference ΔD2, which indicates the difference between the position of the reference marker Ma detected in the image Pi generated by the second camera 93 and the position of the reference marker Ma detected in the image Pk generated by the first camera 81.

[0266] The imaging control unit 214 then considers the second position difference ΔD2 to be the position change of the center of the field of view of the image P that occurs when switching from the second mode to the first mode (in particular, the position change when switching from the reference magnification).

[0267] Meanwhile, the processing unit 21a detects the magnification of the second camera 93 used when switching from the second mode to the first mode, for example, based on the detection signal of the lens sensor Sw1. The processing unit 21a then acquires the position change (for example, the first position difference ΔD1) when the detected magnification is considered to be the third magnification, and by adding this position change to the second position difference ΔD2, it determines the amount of correction for the field of view shift that occurs when switching from a state where the second camera 93 is set to an arbitrary magnification to the first mode. Then, according to the amount of correction for the field of view shift, the intersection point Cp of the position information Ic is moved, or the mounting base 5 or head unit 6 is moved, and the field of view shift correction is performed so that the position of the intersection point Cp and the reference marker Ma coincide.

[0268] In other words, as shown in Figure 28, if the magnification in the observation optical system 9 can be changed in multiple ways from 20x to 200x, it seems that in order to correct the field of view shift that occurs when switching from one of the magnification settings to the first mode, it is usually necessary to calculate the second position difference ΔD2 for all magnifications.

[0269] However, in the observation optical system 9, if a first position difference ΔD1 occurs between a pre-set reference magnification (e.g., 200x) and a predetermined magnification (e.g., 30x), and a second position difference ΔD2 occurs when switching from the state set to the reference magnification to the first mode, then the amount of correction for field of view shift at all magnifications can be determined by combining the magnitude of the position variation calculated based on the first position difference ΔD1 and the magnification difference, with the second position difference ΔD2.

[0270] The processing unit 21a according to this embodiment can automatically correct field of view misalignment when, for example, the mode switching unit 211 switches from the second mode to the first mode.

[0271] 3. Processing related to pre-irradiation image Pb and post-irradiation image Pa. Here, as a second perspective, we will explain classification based on the generation timing of image P, and the processing related to that classification.

[0272] The following explanation corresponds to the case in the first mode, that is, the case in which the first camera 81 is used as the imaging unit, but the first camera 81 can be replaced with the second camera 93 as appropriate. For example, the generation of the pre-irradiation image Pb and the post-irradiation image Pa may be performed by the second camera 93 instead of the first camera 81, or in addition to the first camera 81.

[0273] In other words, a pre-irradiation image Pb may be generated based on the light received signal from the first camera 81, followed by analysis of the sample SP, and then a post-irradiation image Pa may be generated based on the light received signal from the first camera 81 after the analysis. Alternatively, a pre-irradiation image Pb may be generated based on the light received signal from the second camera 93, followed by switching from the observation optical system 9 to the analysis optical system 7 using the mode switching unit 211, followed by analysis of the sample SP, and then a post-irradiation image Pa of the sample SP may be generated by the first camera 81 after the analysis.

[0274] Furthermore, after generating a pre-irradiation image Pb based on the light signal received by the second camera 93, the mode switching unit 211 may switch from the observation optical system 9 to the analysis optical system 7, and then analyze the sample SP. After the analysis of the sample SP, the mode switching unit 211 may switch back to the observation optical system 9, and then generate a post-irradiation image Pa based on the light signal received from the second camera 93.

[0275] The UI control unit 215 according to this embodiment receives a start trigger signal to begin component analysis of the sample SP, and can display the image P and the analysis results Vd1 from the spectral analysis unit 213 (see dialog box Wr in Figure 19) on the display unit 22.

[0276] In this case, the image P and the analysis results may be displayed in separate windows, or they may be displayed in a common window. Furthermore, the image P and the analysis results may be displayed one by one sequentially through click operations on a predetermined window (the display screen may transition from image P to analysis results, or from analysis results to image P). As shown in Figure 19, the UI control unit 215 can generate an image P by superimposing the analysis results (for example, the names of substances estimated by component analysis, as shown in the text data Vd100 in Figure 19) onto the pre-irradiation image Pb, and display this on the display unit 22.

[0277] Here, the UI control unit 215 receives a start trigger signal when a click operation is input to the icon Ic24 in the dialog W1, as illustrated in Figure 17.

[0278] In this embodiment, the processing unit 21a, upon receiving a start trigger signal from the UI control unit 215, controls the imaging control unit 214 to control the second camera 93, thereby generating a pre-irradiation image Pb, which is an image P of the sample SP before it is irradiated with laser light as a primary electromagnetic wave. The generated pre-irradiation image Pb can be displayed on the display unit 22, as illustrated in Figure 14, or stored in the primary storage device 21b or secondary storage device 21c.

[0279] Furthermore, when the start trigger signal is received, the imaging control unit 214 controls the first camera 81, so that a pre-irradiation image Pb which is an image obtained before irradiating the sample SP with the laser beam as the primary electromagnetic wave can also be generated. Furthermore, when the start trigger signal is received, the configuration may also be such that a dialog such as "Do you want to capture a pre-irradiation image?" is displayed to the user, and the pre-irradiation image Pb is generated by accepting the user's input operation in response thereto. In this case, the pre-irradiation image Pb can be saved only at the timing desired by the user.

[0280] Thereafter, the processing unit 21a controls the second camera 93 via the imaging control unit 214, and then controls the electromagnetic wave emission unit 71 via the spectrum acquisition unit 212, to emit laser light onto the sample SP.

[0281] Here, the image P that can be used as the pre-irradiation image Pb includes an image acquired by the first camera 81 or the second camera 93 before the analysis of the sample SP in response to reception of the aforementioned start trigger signal. Furthermore, at least one of a live image Pl acquired before receiving the start trigger signal and a navigation image Pn may be used as the pre-irradiation image Pb.

[0282] In the example shown in Fig. 14, the processing unit 21a is configured to store both the live image Pl with the first analysis site Lo1 specified and the navigation image Pn as the pre-irradiation image Pb.

[0283] When the sample SP is irradiated with the laser beam, as exemplified in Fig. 19, breakage occurs according to the laser power, the number of laser emissions and other factors at the first analysis site Lo1 serving as the irradiation position.

[0284] In this embodiment, the processing unit 21a generates a post-irradiation image Pa, which is an image P of the sample SP after it has been irradiated with laser light. This is done by controlling the first camera 81 or the second camera 93 after the spectrum acquisition unit 212 controls the electromagnetic wave emission unit 71 to emit laser light onto the sample SP. The generated post-irradiation image Pa is displayed on the display unit 22 or stored in the primary storage device 21b or the secondary storage device 21c, as shown in Figure 19.

[0285] Here, the image P available as the post-irradiation image Pa includes images obtained by the imaging control unit 214 controlling the first camera 81 or the second camera 93 after emitting laser light to the sample SP. Specifically, it may include images of the sample SP acquired by controlling the first camera 81 of the analysis optical system 7 without changing the position of the analysis optical system 7 after emitting laser light to the sample SP. Alternatively, it may include images of the sample SP acquired by switching from the analysis optical system 7 to the observation optical system 9 using the mode switching unit after emitting laser light to the sample SP, and then controlling the second camera 93 of the observation optical system 9.

[0286] The processing unit 21a according to this embodiment is configured to automatically generate and store a pre-irradiation image Pb and a post-irradiation image Pa. The post-irradiation image Pa may include at least one of a live image Pl and a navigation image Pn, similar to the pre-irradiation image Pb. As the navigation image included in the post-irradiation image Pa, a low-magnification image reacquired by the imaging control unit 214 after laser light has been emitted from the sample SP can be used. The processing unit 21a according to this embodiment is configured to automatically generate and store a live image Pl and a navigation image Pn as the pre-irradiation image Pb, and to automatically generate and store a live image Pl and a navigation image Pn as the post-irradiation image Pa.

[0287] The pre-irradiation image Pb and post-irradiation image Pa are managed in conjunction with the analysis results from the spectral analysis unit 213. Therefore, when displaying the analysis results on the display unit 22, as described later, the pre-irradiation image Pb and post-irradiation image Pa corresponding to the analysis results can be switched and displayed as appropriate.

[0288] Furthermore, the system may be configured to allow for the linking of analysis results with pre-irradiation image Pb and post-irradiation image Pa, as well as the storage of the scale of the acquired image P and comments related to the acquired image P.

[0289] The scale used in this process can be switched by accepting user selection. The switchable settings include, for example, "None" to hide the scale, "Mesh" to display a mesh-like scale, "Cross" to display a cross-shaped scale, "Bar" to display a bar-shaped scale along a predetermined direction, and "XY Bar" to display two L-shaped scales along the X and Y directions. In addition to the scale type, the scale width can also be set. When the analysis results and image P are saved with the scale superimposed on the image P displayed on the display unit 22, the image P with the analysis results and scale superimposed can be saved.

[0290] Furthermore, by selecting a specific icon on the display unit 22, a window will appear on the display unit 22. By operating this window, the user can overlay shapes, date, time, etc., onto image P, or overlay user-defined comments onto image P. This overlaid information, such as shapes and comments, can be saved in association with the analysis results and image P when the analysis results and image P are saved. Both the scale and the information such as shapes and comments may be saved, or only one of them may be saved.

[0291] In the examples shown in Figures 14 and 19, by operating the icon Ic13, it is possible to switch to at least one of the pre-irradiation image Pb and the post-irradiation image Pa as the image to be displayed on the display unit 22.

[0292] Furthermore, as mentioned above, the live image Pl and navigation image Pn, used as the pre-irradiation image Pb, can have their imaging positions changed by the UI control unit 215 accepting the designation of a first analysis location Lo1 and a second analysis location Lo2 corresponding to the laser beam irradiation position. The processing unit 21a can then emit laser beam using the spectrum acquisition unit 212 with the imaging position changed.

[0293] As mentioned above, these specifications can be made for multiple locations. Possible methods for specifying multiple locations include specifying within the same field of view using a single live image Pl, and specifying within multiple fields of view using multiple live images Pl or one or more navigation images Pn. The UI control unit 215 according to this embodiment can accept both types of specifications.

[0294] Furthermore, the processing unit 21a according to this embodiment is configured to generate a pre-irradiation image Pb sequentially for each irradiation position when multiple irradiation positions for the laser light are specified.

[0295] More specifically, the UI control unit 215 is configured to accept the designation of the first analysis location Lo1 at multiple locations on the live image Pl. When the UI control unit 215 accepts the designation of the first analysis location Lo1 at multiple locations, the processing unit 21a moves the imaging position using the mounting stage drive unit 53 so that one of the first analysis location Lo1s accepted at multiple locations approaches the center of the field of view of the live image Pl.

[0296] Then, the processing unit 21a brings the first analysis point Lo1 close to the field of view of the live image Pl, generates a pre-irradiation image Pb using the imaging control unit 214, and after generating the pre-irradiation image Pb using the imaging control unit 214, emits laser light onto the sample SP using the electromagnetic wave emission unit 71, causing the spectral analysis unit 213 to perform component analysis at the first analysis point Lo1.

[0297] Thus, when multiple first analysis locations Lo1 are specified within the same field of view contained in a single live image Pl, a pre-irradiation image Pb can be generated from the live image Pl for each first analysis location Lo1, and component analysis can be performed by irradiating each first analysis location Lo1 with laser light.

[0298] Similar processing can be performed when specifying the second analysis location Lo2 on the navigation image Pn. Specifically, the UI control unit 215 is configured to accept the specification of the second analysis location Lo2 at multiple locations on the navigation image Pn. When the UI control unit 215 accepts the specification of the second analysis location Lo2 at multiple locations, the processing unit 21a moves the imaging position using the mounting platform drive unit 53 so that one of the second analysis location Lo2s accepted at multiple locations falls within the field of view of the live image Pl.

[0299] Then, the processing unit 21a generates a pre-irradiation image Pb using the imaging control unit 214 while positioning the first second analysis location Lo2 within the field of view of the live image Pl. After the imaging control unit 214 generates the pre-irradiation image Pb, the electromagnetic wave emission unit 71 emits laser light onto the sample SP, causing the spectrum acquisition unit 212 to perform component analysis at the first second analysis location.

[0300] For example, consider the case shown in Figure 20 where at least one of the first analysis area Lo1 and the second analysis area Lo2 is specified in multiple locations on at least one of the images P, which consists of the live image Pl and the navigation image Pn. In this case, assuming that at least one of the first analysis area Lo1 and the second analysis area Lo2 is simply referred to as "analysis area," and that the two analysis areas X1 and X2 are specified on the surface of the sample SP, the imaging control unit 214 first generates the pre-irradiation image Pb at the initial position (the imaging position at the time when analysis areas X1 and X2 are specified) without moving the imaging position from that initial position (see the upper left part of Figure 20).

[0301] Subsequently, the imaging control unit 214 moves the mounting platform 5 so that one of the two analysis locations X1 and X2 (the first analysis position) X1 is brought closer to the center of the field of view, and with the mounting platform 5 moved, it generates the pre-irradiation image Pb corresponding to the first analysis position X1 (see the central diagram on the left side of Figure 20).

[0302] Subsequently, the imaging control unit 214 generates a post-irradiation image Pa corresponding to the first analysis position X1 after the spectrum acquisition unit 212 has irradiated the first analysis position X1 with laser light (see the lower left diagram in Figure 20). Before or after the generation of the post-irradiation image Pa, or simultaneously with the generation of the post-irradiation image Pa, the spectrum analysis unit 213 performs component analysis at the first analysis position X1.

[0303] Subsequently, the imaging control unit 214 moves the mounting platform 5 so that the other analysis location (second analysis position) X2 of the two analysis locations X1 and X2 is brought closer to the center of the field of view, and with the mounting platform 5 moved, it generates the pre-irradiation image Pb corresponding to the second analysis position X2 (see the upper right part of Figure 20).

[0304] Subsequently, the imaging control unit 214 generates a post-irradiation image Pa corresponding to the second analysis position X2 after the spectrum acquisition unit 212 has irradiated the second analysis position X2 with laser light (see the central diagram on the left side of Figure 20). Before or after the generation of the post-irradiation image Pa, or simultaneously with the generation of the post-irradiation image Pa, the spectral analysis unit 213 performs component analysis at the first analysis position X1.

[0305] Subsequently, the imaging control unit 214 moves the imaging position to the initial position and generates the post-irradiation image Pa at that initial position (see the lower right-hand diagram of Figure 20).

[0306] As described above, the imaging control unit 214 according to this embodiment generates a pre-irradiation image Pb and a post-irradiation image Pa for each of the multiple analysis points X1 and X2. It is configured to generate a pre-irradiation image Pb of the entire sample SP at a timing before the start of the analysis (before laser light is irradiated onto each of the multiple analysis points X1 and X2), and to generate a post-irradiation image Pa of the entire sample SP at a timing after the completion of the analysis (after laser light has been irradiated onto all of the multiple analysis points X1 and X2). Furthermore, the spectral analysis unit 213 performs component analysis on each of the multiple analysis points X1 and X2, thereby enabling component analysis at various locations on the surface of the sample SP.

[0307] It should be noted that generating a pre-irradiation image Pb at the time before starting the analysis for each of the multiple analysis points X1 and X2 is not necessarily required. For example, if the multiple analysis points X1 and X2 are set on different sample SPs, it is possible to generate both a pre-irradiation image Pb for analysis point X1 before irradiating it with laser light and a pre-irradiation image Pb for analysis point X2 before irradiating it with laser light. On the other hand, if the multiple analysis points X1 and X2 are on the same sample SP, it is sufficient to generate only a pre-irradiation image Pb for the initial position of analysis point X1 before irradiating it with laser light.

[0308] Furthermore, the analysis results can be superimposed on at least one of the pre-irradiation image Pb and post-irradiation image Pa, which is image P. In this case, if multiple analysis locations are set, the analysis results, such as the text data Vd100 in Figure 19, may be superimposed for each analysis location. For example, when performing component analysis of a sample SP by irradiating it with laser light, changes occur in the sample SP as a result of the laser light irradiation. If the analysis results are superimposed on the pre-irradiation image Pb, it is possible to display the state of the sample SP before the changes occurred and the results of the analysis of that sample SP, which is convenient for the user.

[0309] Furthermore, as mentioned above, the imaging control unit 214 can generate a fully focused image Pc by combining images P generated at different Z positions. In this process, the processing unit 21a can take advantage of the fact that the quality of focus differs at each Z position to acquire height data of the sample SP surface, and then use this height data to perform focusing appropriate to each of the multiple analysis locations X1 and X2.

[0310] In other words, the imaging control unit 214 in this embodiment generates an image P at each of a plurality of height positions by utilizing the fact that the head drive unit 47, as an electric drive unit, is configured to move the acquisition position, which indicates the relative position of the mounting stage 5 with respect to the reflective objective lens 74, along the Z direction. Based on each generated image P, the spectrum acquisition unit 213 identifies the height along the Z direction at the first analysis location Lo1 received by the UI control unit 215 and stores it as height data in the primary storage device 21b or the like. The spectrum acquisition unit 213 also controls the head drive unit 47 or the mounting stage drive unit 53 based on the identified height to move the acquisition position along the first direction so that the laser light emitted from the electromagnetic wave emission unit 71 focuses on the first analysis location Lo1.

[0311] In the example shown in Figure 20, the multiple analysis points were set to be in different locations. However, as shown in Figure 21, for example, the multiple analysis points may be set to be in the same location. In this case, the analysis and observation device A will irradiate the specific analysis point X3 with laser light multiple times (n times in the example shown).

[0312] In the example shown in Figure 21, the imaging control unit 214 first generates the pre-irradiation image Pb at the initial position (the imaging position at the timing when the analysis location X3 is specified) without moving the imaging position from that initial position (see the upper diagram in Figure 21).

[0313] Subsequently, the imaging control unit 214 generates a post-irradiation image Pa corresponding to the analysis location X3 after the spectrum acquisition unit 212 has irradiated the analysis location X3 with laser light (see the center diagram in Figure 21). Before or after the generation of the post-irradiation image Pa, or simultaneously with the generation of the post-irradiation image Pa, the spectrum analysis unit 213 performs component analysis at the analysis location X3.

[0314] Subsequently, the imaging control unit 214 generates a post-irradiation image Pa corresponding to the analysis position X3 each time the spectrum acquisition unit 212 irradiates the analysis location X3 with laser light. The spectrum analysis unit 213 performs component analysis at the analysis location X3 each time laser light is irradiated, either before or after the generation of the post-irradiation image Pa, or simultaneously with the generation of the post-irradiation image Pa.

[0315] After all n laser beam irradiations are completed, one pre-irradiation image Pa and n post-irradiation images Pb are generated, and at the same time, the results of the component analysis performed over the n cycles are obtained.

[0316] As described above, the imaging control unit 214 according to this embodiment generates a post-irradiation image Pa each time a specific analysis location X3 is irradiated with laser light. By comparing the multiple post-irradiation images Pa thus generated with a pre-irradiation image Pa generated in advance, the user can understand the changes in the sample SP caused by irradiation with laser light as a primary electromagnetic wave. In addition, by having the spectral analysis unit 213 repeatedly perform component analysis at the specific analysis location X3, the surface of the sample SP can be excavated and component information inside the sample SP can be obtained.

[0317] Furthermore, when repeatedly irradiating a specific analysis area X3 with laser light, the system can perform component analysis each time the laser light is irradiated, and the analysis results can be superimposed on the display unit 22. In this case, the user can intuitively grasp the relationship between the drilling depth of the sample SP and the analysis results at that depth.

[0318] 4. Processing related to overhead camera 48 The imaging control unit 214 also generates an overhead image Pf of the sample SP based on the amount of reflected light received by the overhead camera 48. The generated overhead image Pf is then displayed on the display unit 22 by the UI control unit 215.

[0319] Figures 22 and 23 illustrate the display screen for the overhead image Pf. As illustrated in Figure 22, the imaging control unit 214 displays a window W2 showing the overhead image Pf on the display unit 22. The overhead image Pf corresponds to an image of the sample SP viewed from the side.

[0320] As illustrated in Figure 6, the analysis housing 70 of the analysis unit 62 is interposed between the overhead camera 48 and the objective lens 92 of the observation unit 63. Therefore, depending on the dimensions of the analysis housing 70, the objective lens 92 may be obscured by it. This is inconvenient for understanding the relative positional relationship between the objective lens 92 and the sample SP through the overhead image Pf.

[0321] Therefore, the UI control unit 215 according to this embodiment generates a schematic shape St showing the contour of the objective lens 92 and superimposes the schematic shape St onto the overhead image Pf. This allows the user to understand the relative positional relationship between the objective lens 92 and the sample SP through the overhead image Pf.

[0322] Furthermore, as illustrated in Figure 23, the UI control unit 215 is configured to tilt the schematic shape St superimposed on the overhead image Pf in accordance with the tilt of the observation unit 63 by the tilt mechanism 45. This allows the user to intuitively grasp the inclination θ of the observation optical axis Ao with respect to the reference axis As.

[0323] Furthermore, as illustrated in Figures 22 and 23, a figure Di corresponding to the visible light emitted from the objective lens 92 is superimposed on the overhead image Pf. This figure Di is displayed as an isosceles triangle with its vertex Ve pointing downwards. The vertex Ve of figure Di indicates the focal position formed by the objective lens 92. Therefore, the state in which vertex Ve is located on the surface of the sample SP corresponds to the state in which the visible light is focused on the surface of the sample SP (the visible light is in focus). Figure Di functions as a guide when moving the objective lens 92 in the Z direction.

[0324] Furthermore, in window W2, where the overhead image Pf is displayed, a graph G1 is shown that indicates the magnitude of the visible light focus value relative to the height position of the objective lens 92 (more precisely, a graph where the vertical axis indicates the height position of the objective lens 92 and the horizontal axis indicates the magnitude of the focus value). Here, "height position" refers to the relative position of the objective lens 92 with respect to the mounting surface 51a in the Z direction (first direction). Similarly, the relative position in the Z direction with respect to the mounting surface 51a is also indicated for components other than the objective lens 92.

[0325] This graph G1 displays a bar Ba indicating the current height position of the objective lens 92. When the height position of the objective lens 92 is adjusted so that bar Ba is positioned at the peak of the focus value, the icon Ic31 accepts the operation input, allowing the system to focus on visible light.

[0326] Furthermore, when the objective lens 92 and the sample SP are brought close together, the icon Ic32 accepts an operation input, allowing the lower limit of the height position of the objective lens 92 to be set. This set lower limit is then used when generating the full-focus image as described above.

[0327] Here, since the tilting mechanism 45 and the mounting platform drive unit 53 are configured to maintain a eucentric relationship, even if the observation optical axis Ao is tilted by the tilting mechanism 45 or the mounting platform 5 is rotated by the mounting platform drive unit 53, the vertex Ve of figure Di can remain located on the surface of the sample SP. For example, as shown in Figure 23, when the observation optical axis Ao is tilted with respect to the reference axis As, the vertex Ve of figure Di will not move from the surface of the sample SP and will maintain its position before the tilt.

[0328] The overhead image Pf generated by the imaging control unit 214 can be displayed in the report Re output by the report output unit 218. To enable this use, the imaging control unit 214 can capture the sample SP and generate the overhead image Pf after the component analysis of the sample SP by the spectrum acquisition unit 212 and the spectrum analysis unit 213 is completed, or before the component analysis of the sample SP is performed. The setting for whether or not to generate the overhead image Pf, and the setting for the timing of generating the overhead image Pf, can be changed as appropriate, for example, based on the operation input to the operation unit 3.

[0329] Furthermore, when generating an overhead image Pf after the component analysis of the sample SP is completed, or before the component analysis of the sample SP is performed, the imaging control unit 214 retracts at least one of the mounting table 5 and the head unit 6 before generating the overhead image Pf. Specifically, the imaging control unit 214 can retract the mounting table 5 and the head unit 6 by operating at least one of the mounting table 5 and the head unit 6 so that they are separated along the Z direction. By retracting the mounting table 5, it is possible to suppress reflections of the analysis housing 70, objective lens 92, etc., onto the overhead image Pf.

[0330] Furthermore, depending on the shape of the sample SP, it may not be possible to get an overview of the entire sample SP by simply imaging it with the overhead camera 48. For this reason, the mounting platform 5 may be partially tilted so that the sample SP can be oriented to face the overhead camera 48.

[0331] Specifically, a rotating shaft provided in the left-right direction of the mounting surface 51a and a substantially semicircular stage member that rotates around the rotating shaft may be provided on the mounting base 5, and the stage member may be tilted to face the overhead camera 48 only when it is necessary to image the sample SP with the overhead camera 48. Alternatively, instead of providing a tilting mechanism on the mounting base 5, a fitting groove that engages with an inclined plate may be provided on the mounting base 5, and an inclined surface that tilts relative to the mounting base 5 may be formed by the inclined plate engaged with the fitting groove.

[0332] The overhead image Pf generated by the imaging control unit 214, as well as the schematic shape St and graphic Di superimposed on the overhead image Pf, are input to the report output unit 218 (described later) and used for report generation.

[0333] 5. Correlation between each image P and the analysis results In addition to displaying the navigation image Pn as a low-magnification image, the live image Pl as a high-magnification image, the overview image Pf, and the dialog Wr showing the analysis result Vd1 on the display unit 22, the UI control unit 215 can also display a first interface W3 on the display unit 22 that accepts an input operation to save at least one of the navigation image Pn and live image Pl images P in association with the analysis result.

[0334] This first interface W3 can be configured, for example, by a dialog box as shown in Figure 24. This first interface W3 displays a checkbox Ic44 that accepts an input to save a high-magnification live image Pl in association with the analysis results, a checkbox Ic45 that accepts an input to save a schematic navigation image Pn in association with the analysis results, and a checkbox Ic46 that accepts an input to save an overhead image Pf in association with the analysis results. For example, if checkbox Ic44 is checked, the live image Pl and the analysis results are saved in association, and if it is unchecked, the live image Pl is not saved in association with the analysis results. The live image Pl associated with the analysis results is output to report Re by the report output unit 218.

[0335] The same applies to the other checkboxes Ic45 to Ic47. For example, if you uncheck checkbox Ic47, the live image Pl, navigation image Pn, and overview image Pf will be saved in association, but the analysis results will not be saved. The first interface W3 functions as a selection screen for individually selecting whether or not to display the navigation image Pn as a low-magnification image, the live image Pl as a high-magnification image, and the analysis results on the report Rep when the report output unit 218 outputs the report Rep.

[0336] Furthermore, the icon Ic41 on the first interface W3 is a button for updating at least one of the images P, which is the navigation image Pn used as the low-magnification image, and the live image Pl used to generate the high-magnification image and thus the pre-irradiation image Pb. In other words, it is a button for changing the image to be saved when saving the analysis results to at least one of the primary storage device 21b and the secondary storage device 21c, which serve as storage units, from the image displayed on the first interface W3 to a newly acquired image or an image selected from other images that have already been acquired. In response to receiving the change instruction, the UI control unit 215 displays a display screen W4 for updating the at least one of the images P on the display unit 22.

[0337] Ic42 is a button for closing the display of the first interface W3. When an operation input corresponding to icon Ic42 is received, the first interface W3 for image updates is closed and the screen returns to the screen shown in Figure 14, etc. On the other hand, when an operation input corresponding to icon Ic43 is received on the first interface W1, the image P displayed in the display area is saved, as described later. Note that displaying icon Ic43 on the first interface W1 is not mandatory; it may also be displayed on the screen shown in Figure 14, etc.

[0338] As illustrated in Figure 25, the display screen W4 is updated by at least one of the images (in the illustrated example, both the navigation image Pn and the live image Pl) P, and icons Ic51 and Ic52, which serve as a second interface for updating the image P. When the UI control unit 215 receives an operation input for, for example, icon Ic51, it updates the live image Pl, which should be associated with the analysis result, with the image P displayed on the display unit 22 at the time of reception. In this case, the live image Pl may be updated with the post-irradiation image Pa displayed on the display unit 22 at the time of reception, or it may be replaced with the pre-irradiation image Pb generated before the acquisition of the analysis result. The same applies to the navigation image Pn. When the UI control unit 215 receives an operation input for icon Ic53 that displays "OK", it completes the updating of the live image Pl and the navigation image Pn. When the UI control unit 215 receives an operation input for icon Ic54 that displays "Cancel", it cancels the updating of the live image Pl and the navigation image Pn.

[0339] Furthermore, when the icon Ic43 on the first interface W3 receives an operation input, the UI control unit 215 can complete the association of the live image Pl, navigation image Pn, overview image Pf, analysis results, etc., and store them in the secondary storage device 21c.

[0340] -Lighting setting section 216- When switching from the first mode to the second mode, or from the second mode to the first mode, the lighting setting unit 216 stores the lighting conditions before the mode switch and sets the lighting conditions after the mode switch based on the stored lighting conditions.

[0341] More specifically, the lighting setting unit 216 according to this embodiment sets the lighting conditions after the switch so as to reproduce the lighting conditions referenced before the switch, among the lighting conditions related to the coaxial lighting 79 and the side lighting 84 in the first mode, and the lighting conditions related to the second coaxial lighting 94 and the second side lighting 95 in the second mode, before and after switching between the first mode and the second mode.

[0342] Here, "lighting conditions" refers to the control parameters related to the first camera 81, coaxial illumination 79, and side illumination 84, and the control parameters related to the second camera 93, second coaxial illumination 94, and second side illumination 95. Lighting conditions include the light intensity of each illumination, the illumination status of each illumination, etc. Lighting conditions consist of multiple configurable items.

[0343] Control parameters related to the light intensity of each light source include the magnitude of the current flowing through the LED light source 79a, the timing of current application, and the application time. For example, the light intensity of the coaxial light source 79 can be controlled by the magnitude of the current flowing through the LED light source 79a. These control parameters also include the exposure time of the first camera 81, the second camera 93, etc.

[0344] The lighting setting unit 216 compares the current lighting conditions, i.e., the items referenced before the mode switch, with the items that can be set after the mode switch, from among the lighting conditions consisting of multiple setting items, and extracts the common items.

[0345] The lighting setting unit 216 sets the lighting conditions so that the settings from before the mode switch are reused for the extracted common items, and stores them in the primary storage device 21b or the secondary storage device 21c. For example, consider a case where, when switching from the second mode to the first mode, the second side illumination 95 is used in the second mode before the switch, and the side illumination 84 is used in the first mode after the switch. In this case, the lighting setting unit 216 stores, for example, the light intensity of the second side illumination 95. The lighting setting unit 216 sets the lighting conditions, including the light intensity, and stores them in the primary storage device 21b or the secondary storage device 21c.

[0346] Furthermore, if there are items unique to one of the lighting conditions before or after the switch, the lighting setting unit 216 can set the current lighting conditions by reading the initial settings of the lighting conditions or the lighting conditions used during the previous use. In other words, the primary storage device 21b or secondary storage device 21c stores the lighting conditions referenced during past use in the order in which they were used, and the lighting setting unit 216 can set items of the lighting conditions that cannot be reused based on the contents of that storage.

[0347] Furthermore, after switching modes, the lighting conditions can also be manually changed via the control unit 3.

[0348] Furthermore, when setting and adjusting the illumination conditions, the visible light transmittance of the optical elements of the analytical optical system 7, such as the spectrometer 75 and imaging lens 80, through which the light reflected from the sample SP passes when it returns to the first camera 81, and the light receiving sensitivity of the image sensor constituting the first camera 81, as well as the visible light transmittance of the optical elements constituting the observation optical system 9, such as the mirror group 91, and the light receiving sensitivity of the image sensor constituting the second camera 93 may be taken into consideration.

[0349] Furthermore, by keeping the brightness of the image data displayed on the display unit 22 constant when switching from the first mode to the second mode, or from the second mode to the first mode, the exposure times of the first camera 81 and the second camera 93 can be made common.

[0350] This allows the frame rates of the first camera 81 and the second camera 93 to be the same. The brightness of the image data can be kept constant, for example, by controlling the product of the visible light transmittance and light receiving sensitivity associated with each of the first camera 81 and the second camera 93 to remain constant.

[0351] -Lighting control unit 217- The lighting control unit 217 reads the lighting conditions set by the lighting setting unit 216 from the primary storage device 21b or secondary storage device 21c, and controls the coaxial lighting 79, side lighting 84, second coaxial lighting 94, or second side lighting 95 to reflect the read lighting conditions. This control makes it possible to turn on one or both of the coaxial lighting 79 and side lighting 84, or to turn on one or both of the second coaxial lighting 94 and second side lighting 95.

[0352] The lighting control unit 217 also temporarily turns off all coaxial lights 79 and side lights 84 when emitting laser light in the first mode, regardless of the lighting conditions.

[0353] The lighting control unit 217 also stores the lighting conditions that were referenced at the time of the switch-off in the primary storage device 21b or secondary storage device 21c before switching off the coaxial lighting 79 or the side lighting 84.

[0354] The lighting control unit 217 undoes the dimming of the coaxial illumination 79 and the side illumination 84 at a timing after the laser beam emission is complete (for example, around the time of analysis by the spectral analysis unit 213). At that time, the lighting control unit 217 reads the lighting conditions stored in the primary storage device 21b or secondary storage device 21c before dimming the lights and reflects them in the illumination of the coaxial illumination 79 or the side illumination 84.

[0355] -Report Output Section 218- Figure 29 is an example of the report template Ds for Report Rep, and Figure 30 is an example of the output of Report Rep. The report output unit 218 is configured to output a report Rep that combines the live image Pl, the navigation image Pn, and information indicating the analysis results (first information Vd1) after the spectral analysis unit 213 has completed the analysis of the sample SP.

[0356] More specifically, the report output unit 218 according to this embodiment can output a report Rep that displays the navigation image Pn and live image Pl (more specifically, the pre-irradiation image Pb generated using the live image Pl, or the pre-irradiation image Pb and post-irradiation image Pa) and at least one of the analysis results at each position on a template Ds which is assigned positions for generating the navigation image Pn as a low-magnification image, the pre-irradiation image Pb and the post-irradiation image Pa.

[0357] The pre-irradiation image Pb may be at least one of the pre-irradiation image Pb acquired by the second camera 93 of the observation optical system 9 and the pre-irradiation image Pb acquired by the first camera 81 of the analysis optical system 7. When the report output unit 218 outputs the report Rep, the UI control unit 215 can display the image P associated by the first interface W2, for example, the live image Pl (more specifically, the pre-irradiation image Pb, or the pre-irradiation image Pb and the post-irradiation image Pa) with the checkbox Ic44 checked, the navigation image Pn with the checkbox Ic45 checked, etc., on the report Rep.

[0358] In this case, the live image Pl used to generate the pre-irradiation image Pb can be at least one of the live image Pl generated by the second camera (observation camera) 93 in the second mode and the live image Pl generated by the first camera (analysis camera) 81 in the first mode.

[0359] Furthermore, as the template Ds to which the output positions of live images Pl, etc., are assigned, a spreadsheet such as the one exemplified in Figure 29 can be used. As the spreadsheet, a datasheet for software installed on a computer as part of a so-called office suite can be used. Alternatively, a text file for word processing software may be used instead of such a spreadsheet.

[0360] As illustrated in Figure 29, template Ds can contain the following tags: the first tag Tg1 labeled [Overview Image], the second tag Tg2 labeled [Navigation Image], the third tag Tg3 labeled [Live Image (Observation Camera)], the fourth tag Tg4 labeled [Live Image (Analysis Camera)], the fifth tag Tg5 labeled [Estimated Results], the sixth tag Tg6 labeled [Tilt], the seventh tag Tg7 labeled [Lighting Conditions], the eighth tag Tg8 labeled [Lens], and the ninth tag Tg9 labeled [Detected Elements].

[0361] Then, as illustrated in Figure 30, the report output unit 218 outputs information corresponding to each tag at each position of the first tag Tg1 to the ninth tag Tg9 placed on the template Ds. For example, the overhead image Pf is output to the first tag Tg1, the navigation image Pn is output to the second tag Tg2, the live image Pl generated by the second camera 93 in the second mode is output to the third tag Tg3, the live image Pl generated by the first camera 81 in the first mode is output to the fourth tag Tg4, information Vd9 (corresponding to the fifth information Vd5 described later) showing the estimation result of the sample SP acquired by the spectral analysis unit 213 is output to the fifth tag Tg5, and the sixth tag Tg6 is The first tilt sensor Sw3 and the second tilt sensor Sw4 output information Vd10 indicating the tilt θ, the seventh tag Tg7 outputs information Vd11 indicating the lighting conditions set by the lighting setting unit 216, the eighth tag Tg8 outputs information Vd12 related to the lens unit 9a detected by the lens sensor Sw1, and the ninth tag Tg9 may output information indicating the elements detected in the sample SP acquired by the spectral analysis unit 213 (corresponding to the first information Vd1 and the fourth information Vd described later).

[0362] By changing the arrangement of tags 1 through 9 (Tg1 to Tg9), the output position of each piece of information can be changed. Additionally, deleting any tag from template Ds will remove the information corresponding to that tag from report Rep. For example, deleting tag 6 (Tg) from template Ds will remove the information Vd10, which indicates the slope θ, from report Rep.

[0363] <Specific examples of control flow> Figure 31 is a flowchart illustrating the basic operation of the analysis and observation device A. Figure 32 is a flowchart illustrating the procedure for calculating the correction amount D1 for optical axis misalignment, and Figure 33 is a flowchart illustrating the procedure for calculating the correction amount D2 for field of view misalignment. Figure 34 is a flowchart illustrating the procedure for correcting optical axis misalignment and field of view misalignment. Figure 35 is a flowchart illustrating the procedure for setting illumination conditions by the illumination setting unit 216. Figures 36A to 36C are flowcharts illustrating various processes performed by the analysis and observation device A. Figure 37 is a flowchart illustrating the procedure for performing depth stacking.

[0364] First, in step S1 of Figure 31, the observation optical system 9 searches for the object to be analyzed in the second mode. In this step S1, based on user input, the control unit 21 searches for the part of the sample SP that should be analyzed by the analysis optical system 7 (the object to be analyzed), while adjusting conditions such as the exposure time of the second camera 93, the illumination light guided by the optical fiber cable C3, and the brightness of the live image Pl and navigation image Pn generated by the second camera 93.

[0365] Furthermore, the control unit 21 can be configured to automatically adjust the exposure time of the second camera 93 and the brightness of the illumination light based on the detection signal from the lens sensor Sw1, without requiring any user input.

[0366] In step S1, a screen similar to the one illustrated in Figure 14 is displayed on the display unit 22. By referring to the live image Pl and navigation image Pn on the screen, the search for the object to be analyzed can be performed smoothly. At that time, the live image Pl is dynamically updated when the first analysis location Lo1 is specified on the live image Pl or the second analysis location Lo2 is specified on the navigation image Pn.

[0367] Furthermore, when the observation optical system 9 searches for the object to be analyzed, the magnification ratio of the magnification optical system 96 is changed as appropriate. As mentioned above, changing the magnification ratio causes misalignment of the optical axis. Therefore, each time the magnification ratio is changed, the control unit 21 performs optical misalignment correction based on the first correction amount D1. This makes it possible to change the magnification ratio without the user noticing the effects of misalignment of the optical axis.

[0368] The calculation of the first correction amount D1 can be performed in advance, such as during the setup of the analytical observation device A. A specific example of the calculation procedure for the first correction amount D1 and the details of the correction procedure will be described later.

[0369] In the subsequent step S2, the control unit 21 receives a switching instruction from the second mode to the first mode based on user input. This switching instruction is received by the UI control unit 215, for example, by clicking the icon Ic11 shown in Figure 14. Note that at the time step S2 is executed, the operation of the slide mechanism 65 by the mode switching unit 211 has not yet been performed.

[0370] In the subsequent step S3, the second camera 93 performs imaging of the sample SP. The image P generated in step S3 can be output to the report Rep as the pre-irradiation image Pb generated by the second camera 93.

[0371] Next, in step S4, before performing the mode switch, the lighting conditions are set by the lighting setting unit 216. The process performed in step S4 is as shown in Figure 35. In other words, step S4 in Figure 31 is composed of steps S401 to S410 in Figure 35.

[0372] First, in step S401 of Figure 35, the lighting setting unit 216 acquires each item that constitutes the current lighting conditions (lighting conditions being referenced in the second mode).

[0373] In the subsequent step S402, the lighting setting unit 216 acquires the items that are available in the first mode from among the items that constitute the lighting conditions to be referenced in the first mode.

[0374] In the following step S403, the lighting setting unit 216 compares each item of the current lighting conditions acquired in step S401 with the available items acquired in step S402 and extracts items that are common to both.

[0375] In the following step S404, the lighting setting unit 216 determines whether or not common items were extracted in step S403 (whether or not common items exist). If the determination is YES, the unit proceeds to step S405; otherwise, it proceeds to step S406.

[0376] In step S405, the illumination setting unit 216 reuses the current illumination conditions for common items extracted in step S403 (such as the irradiation patterns of the side illumination 84 and the second side illumination 95, which can be used in both the first and second modes) from among the multiple illumination conditions. On the other hand, for items not extracted in step S403 (for example, setting items specific to the first mode related to the configuration of the analytical optical system 7), it reads the settings used last time, initial settings, etc. Once the settings for each item are complete, the illumination setting unit 216 proceeds to step S39 and stores the illumination conditions for the first mode in at least one of the primary storage device 21b and the secondary storage device 21c.

[0377] Meanwhile, in step S406, the lighting setting unit 216 determines whether a previously used setting exists. If the determination is YES, the process proceeds to step S407; otherwise, it proceeds to step S408. In step S407, the lighting setting unit 216 reads the previously used setting as the lighting condition and proceeds to step S409, storing the read lighting condition in at least one of the primary storage device 21b and the secondary storage device 21c as the lighting condition for the first mode. Also, in step S408, the lighting setting unit 216 reads the initial setting as the lighting condition and proceeds to step S409, storing the read lighting condition in at least one of the primary storage device 21b and the secondary storage device 21c as the lighting condition for the first mode.

[0378] In step S410, following step S409, the illumination control unit 217 turns off the observation illumination (second coaxial illumination 94 or second side illumination 95) and terminates the flow shown in Figure 35. After that, the control process proceeds from step S4 to step S5 in Figure 31.

[0379] In step S5, the mode switching unit 211 activates the slide mechanism 65 to slide the observation optical system 9 and the analysis optical system 7 together, thereby switching from the second mode to the first mode.

[0380] Once the switch to the first mode is complete, the display unit 22 displays the image P generated by the first camera 81 as the live image Pl, instead of the image P generated by the second camera 93. The navigation image Pn can also be replaced with the image P generated by the first camera 81, similar to the live image Pl. In the first mode, the user is provided with a display screen similar to that of the second mode, as illustrated in Figure 14.

[0381] In the first mode, the user refers to the live image Pl generated by the first camera 81, and the irradiation position of the laser beam is specified. This specification is received by the UI control unit 215 and used for processing by the spectrum acquisition unit 212.

[0382] Furthermore, as mentioned above, switching from the second mode to the first mode causes field of view misalignment. Therefore, each time the system switches from the second mode to the first mode, the control unit 21 performs field of view misalignment correction based on the second correction amount D2. This makes it possible to switch from observation by the second camera 93 to observation by the first camera 81 without the user noticing the effects of field of view misalignment.

[0383] The calculation of the second correction amount D2 can be performed in advance, such as during the setup of the analytical observation device A. Specific examples of the calculation procedure for the second correction amount D2 and details of the correction procedure will be described later.

[0384] In the subsequent step S6, after the mode switching is completed, the illumination control unit 217 performs illumination control, and the spectrum acquisition unit 212 and spectrum analysis unit 213 perform component analysis of the sample SP. The processes performed in step S6 are as shown in Figures 36A, 36B, and 36C. Specifically, step S6 in Figure 31 consists of steps S601 to S607 in Figure 36A and steps S608 to S615 in Figure 36B.

[0385] First, in step S601, the lighting control unit 217 reads the lighting conditions set by the lighting setting unit 216 from the primary storage device 21b or the secondary storage device 21c. In the following step S602, the lighting control unit 217 turns on the analytical lighting (coaxial lighting 79 or side lighting 84) to reflect the lighting conditions read in step S601. As a result, each control parameter related to the analytical lighting, such as the exposure time of the first camera 81 and the amount of illumination light emitted from the LED light source 79a, reproduces the control parameters in the second mode as closely as possible.

[0386] In this embodiment, the reflective objective lens 74 for component analysis has a shallower depth of field during observation compared to the observation objective lens 92. Therefore, in step S603 following step S602, the illumination control unit 217 may perform autofocus at various points in the second image data I2 and generate a full-focus image. Specifically, in step S603, for example, the processing shown in Figure 37 is performed. In step S603, the processing unit 21a may receive a request to generate a full-focus image, and may be configured to perform the generation of a full-focus image only if it receives an instruction to do so. By configuring the system to generate a full-focus image only when required by the user, the efficiency of the processing can be improved.

[0387] Specifically, in step S651 of Figure 37, the processing unit 21a receives an instruction to combine all focus images. This combining instruction may be configured to be output automatically as soon as the control step proceeds to step S602 described above.

[0388] In the following step S652, the processing unit 21a sets the upper limit position (see height position zn in Figure 18) and the lower limit position (see height position z1 in Figure 18) of the mounting base 5 or the head unit 6. The upper and lower limit positions may be set automatically by the processing unit 21a, or they may be read from values ​​previously entered by the user.

[0389] In the following step S653, the processing unit 21a moves the mounting base 5 or the head unit 6 in the Z direction within a range that falls between the aforementioned upper and lower limits, and generates an image P using the first camera 81 at each Z position (Z coordinate).

[0390] In the following step S654, the processing unit 21a generates a full-focus image Pc as shown in Figure 18, based on the images P generated at each Z position. The generated full-focus image Pc is displayed on the display unit 22 as at least one of the live image Pl and the navigation image Pn. If the system has been pre-configured to acquire the 3D shape of the sample SP, the control steps proceed from step S654 to step S655. In step S655, the height data of the sample SP surface is calculated based on the images P generated at each Z position. The calculated height data can be displayed on the display unit 22 as the 3D shape of the sample SP.

[0391] When the process shown in step S654 is completed, or when the process shown in step S655 that follows step S654 is completed according to the pre-configuration, the control step returns from the flow shown in Figure 37 to the flow shown in Figure 36A, and proceeds from step S603 to step S604.

[0392] In step S604, the UI control unit 215 accepts the designation of the first analysis location Lo1 as the analysis position on the live image Pl. At that time, as illustrated in Figure 14, the UI control unit 215 superimposes information (intersection X) indicating the position of each first analysis location Lo1 onto the navigation image Pn.

[0393] In the subsequent step S605, the UI control unit 215 determines whether or not the reception of the analysis position has been completed. If the determination is YES, the control process proceeds to step S606; otherwise, the control process returns to step S604. This determination can be made, for example, based on whether or not the icon Ic12 in Figure 14 has received a click operation.

[0394] In the subsequent step S606, the UI control unit 215 determines whether or not it has received a start trigger signal. If the determination is YES, the control process proceeds to step S607; otherwise, the determination in step S606 is repeated. This determination can be made, for example, based on whether or not the icon Ic24 in Figure 17 has received a click operation.

[0395] In the subsequent step S607, the imaging control unit 214 stores the coordinates (for example, the relative coordinates of the reflective objective lens 73 with respect to the mounting stage 5) at the start of the analysis (specifically, at the time the start trigger signal is received) in the primary storage device 21b or secondary storage device 21c and temporarily saves them.

[0396] Next, in step S608 shown in Figure 36B, the imaging control unit 214 generates the overall pre-irradiation image Pb, as explained using the upper left diagram of Figure 20. If there is only one first analysis location Lo1, step S608 may be omitted.

[0397] In the subsequent step S609, the imaging control unit 214 acquires coordinates corresponding to a first analysis location Lo1 and moves the head unit 6 to those coordinates. Alternatively, the mounting stage 5 may be moved instead of the head unit 6. Once the movement of the head unit 6 or the mounting stage 5 is complete, the coordinates and the analysis optical axis Aa will intersect.

[0398] In the subsequent step S610, the imaging control unit 214 generates a pre-irradiation image Pb corresponding to the first analysis location Lo1, as explained using the central diagram on the left side of Figure 20.

[0399] In the following step S611, the illumination control unit 217 stores the illumination status at that time (when the pre-irradiation image Pb was generated in step S610) (illumination conditions at the timing immediately before laser light emission) in the primary storage device 21b or secondary storage device 21c. In the following step S612, the illumination control unit 217 turns off the illumination for analysis (coaxial illumination 79 or side illumination 84).

[0400] Then, in step S613, the spectrum acquisition unit 212 irradiates the first analysis location Lo1, which is the analysis position, with laser light. In this step S613, the first and second detectors 77A and 77B receive the light (secondary electromagnetic waves) emitted due to the plasma formation of the sample SP. At this time, the timing of reception by the first and second detectors 77A and 77B is set to be synchronized with the timing of laser light emission.

[0401] In the subsequent step S614, the spectrum acquisition unit 212 acquires an intensity distribution spectrum in accordance with the laser light emission timing. During the period from step S614 to step S618 described later, the spectrum analysis unit 213 performs component analysis of the sample SP at the first analysis location Lo1. The results of the component analysis are stored in the primary storage device 21b or secondary storage device 21c, associated with the coordinates of the first analysis location Lo1.

[0402] In the following step S615, the illumination control unit 217 turns on the illumination for analysis (coaxial illumination 79 or side illumination 84). Subsequently, in step S616 in Figure 36C, the illumination control unit 217 reads the illumination conditions stored in the primary storage device 21b or the secondary storage device 21c and controls the illumination for analysis to reflect those illumination conditions. This reproduces the illumination state immediately before the emission of the laser light.

[0403] In the subsequent step S617, the imaging control unit 214 generates a post-irradiation image Pa corresponding to the first analysis site Lo1, as explained using the lower left diagram of Figure 20.

[0404] In the subsequent step S618, the spectrum acquisition unit 212 determines whether the component analysis (in other words, the emission of laser light to all first analysis locations Lo1) has been completed. If the determination is YES, the control process proceeds to step S619; otherwise, the control process returns to step S609 in Figure 36B. This determination can be made not only when the positions of the first analysis locations Lo1 are different, but also when the positions of the first analysis locations Lo1 are the same.

[0405] Furthermore, if height data for the sample SP has been acquired, the relative height position of the analysis unit 62 with respect to the mounting stage 5 may be adjusted for each first analysis location Lo1, and laser light may be irradiated with the focal position optimized at each first analysis location Lo1.

[0406] In the subsequent step S619, the imaging control unit 214 moves the head unit 6 to the coordinates saved in step S607. Alternatively, the mounting platform 5 may be moved instead of the head unit 6. Once the movement of the head unit 6 or the mounting platform 5 is complete, the saved coordinates and the analysis optical axis Aa will intersect.

[0407] In the subsequent step S620, the imaging control unit 214 generates the overall post-irradiation image Pa, as explained using the lower right-hand diagram of Figure 20. If there is only one first analysis location Lo1, step S620 may be omitted.

[0408] In the subsequent step S621, the imaging control unit 214 retracts at least one of the mounting table 5 and the head unit 6 along the Z direction so that it is separated from the head unit 6, particularly from the analysis housing 70.

[0409] In the subsequent step S622, the imaging control unit 214 operates the overhead camera 48 to generate an overhead image Pf. Alternatively, in step S622, the processing unit 21a may be configured to receive a request to generate the overhead image Pf, and to execute the generation of the overhead image Pf only if it receives a request to do so. By configuring the system to generate the overhead image Pf only when required by the user, the processing efficiency can be improved.

[0410] During the period from step S614 to step S622, the UI control unit 215 receives various instructions for dialogs W3 and W4 and performs association between the pre-irradiation image Pa, post-irradiation image Pb, and overhead image Pf and the results of the component analysis. This association may be performed for each first analysis location Lo1, or it may be performed for multiple first analysis locations Lo1 at once.

[0411] Subsequently, the processing unit 21a completes the flow shown in Figures 36A to 36C and proceeds the control process from step S6 to step S7 in Figure 31. Then, in step S7, the report output unit 218 outputs live images Pl, etc., to each position set on the template Ds, thereby outputting the report Rep as electronic data.

[0412] -Regarding correction of optical axis misalignment and field of view misalignment- Figure 32 is a flowchart illustrating the procedure for calculating the correction amount for optical axis misalignment, and Figure 33 is a flowchart illustrating the procedure for calculating the correction amount for field of view misalignment. Furthermore, Figure 34 is a flowchart illustrating the correction procedures for both optical axis misalignment and field of view misalignment.

[0413] First, in step S11 of Figure 32, the UI control unit 215 receives an instruction to calculate the amount of correction for optical axis misalignment. In the following step S12, the magnification optical system 96 sets the magnification ratio to the reference magnification ratio.

[0414] In the subsequent step S13, for example, as shown in the upper diagram of Figure 26 above, the mounting platform 5 or the head unit 6 is moved so that the reference marker Ma is within the field of view of the second camera 93.

[0415] In the following step S14, the focus of the observation optical system 9 is adjusted.

[0416] In the subsequent step S15, the second camera 93 detects the reference marker Ma. This detection is performed based on whether a specific part of the reference marker Ma (for example, if the reference marker Ma is a triangle, it may be the vertex, or if the reference marker Ma is an arrow-shaped figure, it may be the tip of the arrow) is included in the image P generated by the second camera 93. The coordinates of the detected specific part are stored in the primary storage device 21b or the like.

[0417] In the following step S16, the magnification optical system 96 sets the magnification to a predetermined lower magnification.

[0418] In the following step S17, the second camera 93 performs detection of the reference marker Ma again. As in step S15, the coordinates of the detected specific part are stored in the primary storage device 21b or the like.

[0419] In the subsequent step S18, the difference between the detected position of the reference marker Ma detected in step S15 (coordinates of a specific part) and the detected position of the reference marker Ma detected in step S17 is detected. This difference is stored in the primary memory device 21b or the like as the first position difference ΔD1 mentioned above.

[0420] In the subsequent step S19, the amount of correction for optical axis misalignment at each magnification achievable by the magnification optical system 96 is calculated based on the first position difference ΔD1 obtained in step S18 and the difference (magnification difference) between the reference magnification and the predetermined magnification used in its calculation. The calculated correction amount is continuously stored in the primary storage device 21b or secondary storage device 21c, etc., and may be read out each time the lens sensor Sw1, etc., detects an adjustment of the magnification by the magnification optical system 96. The imaging control unit 214 may perform optical axis misalignment correction each time based on the correction amount read out.

[0421] Meanwhile, in step S31 of Figure 33, the UI control unit 215 receives an instruction to calculate the amount of correction for field of view misalignment. In the following step S32, the mode switching unit 211 sets to the second mode, and the magnification optical system 96 changes the magnification ratio of the second camera 93 to the reference magnification ratio.

[0422] In the following step S33, the mounting platform 5 or the head unit 6 is moved so that the reference marker Ma is within the field of view of the second camera 93.

[0423] In the following step S34, the focus adjustment of the observation optical system 9 is performed.

[0424] In the subsequent step S35, the second camera 93 detects the reference marker Ma. This detection can be performed based on whether a specific part of the reference marker Ma is included in the image P generated by the second camera 93. The coordinates of the detected specific part are stored in the primary storage device 21b or the like.

[0425] In the following step S36, the mode switching unit 211 changes from the second mode to the first mode and performs imaging (generation of image P) with the first camera 81.

[0426] In the following step S37, the mounting platform 5 or the head unit 6 is moved so that the reference marker Ma is within the field of view of the first camera 81.

[0427] In the following step S38, the analysis optical system 7, in particular the first camera 81, is focused.

[0428] In the following step S39, the first camera 81 detects a reference marker Ma. As in step S35, the coordinates of the detected specific part are stored in the primary storage device 21b or the like.

[0429] In the subsequent step S40, the difference between the detected position of the reference marker Ma detected in step S35 (coordinates of a specific part) and the detected position of the reference marker Ma detected in step S39 is detected. This difference is stored in the primary storage device 21b or the like as the second position difference ΔD2 mentioned above. At the same time, the amount of movement of the mounting platform 5 along the X and Y directions performed to bring the reference marker Ma into the field of view, and the amount of movement of the mounting platform 5 along the Z direction performed when adjusting the focus of the first camera 81, etc., are continuously stored in the primary storage device 21b or the secondary storage device 21c or the like, linked to the second position difference ΔD2.

[0430] Furthermore, when correcting the field of view shift that occurs when switching from the second mode to the first mode, a control process exemplified in Figure 34 can be executed. This control process can be executed automatically or manually when switching to the first mode.

[0431] First, in step S51 of Figure 34, the generation (acquisition) of image P by the second camera 93 in second mode is performed.

[0432] In the subsequent step S52, for example, the magnification of the observation optical system 9 (the third magnification mentioned above), which is set by the magnification optical system 96, is acquired based on the detection signal from the lens sensor Sw1.

[0433] In the following step S53, the system accepts a location specification within image P. The location specified here can be, for example, the analysis location X as explained using Figure 14. Alternatively, instead of accepting a location specification, the system can be configured to store the location of the intersection point Cp.

[0434] In the following step S54, the mode switching unit 211 switches from the second mode to the first mode, and the first camera 81 generates (acquires) image P. This switching causes the position specified in step S53 to change within image P.

[0435] In the subsequent step S55, the correction amount for the optical axis misalignment corresponding to the third magnification is read out. The correction amount for the optical axis misalignment can be one that has been calculated in advance by the control process exemplified in Figure 32.

[0436] In the subsequent step S56, the second position difference ΔD2, as described above, is obtained as the correction amount for field of view misalignment. As the correction amount for field of view misalignment, the one calculated in advance by the control process exemplified in Figure 33 can be used.

[0437] In the following step S57, the amount of movement of the mounting platform 5 in the X, Y, and Z directions is determined by adding the correction amount read in step S55 and the correction amount read in step S56.

[0438] In the subsequent step S58, the mounting platform 5 is moved in the X, Y, and Z directions based on the amount of movement in each direction determined in step S57. This eliminates the positional variation specified in step S53.

[0439] -Specific examples of user interfaces- Figures 38 to 44 illustrate the display screen of the display unit 22. At any point between step S614 in Figure 36B and step S618 in Figure 36C, the UI control unit 215 displays on the display unit 22, as shown in Figure 38, first information Vd1 indicating the characteristics Ch of the substance thought to be contained in the sample SP, second information Vd2 indicating the type of substance, and third information Vd3 indicating the hierarchical structure of the substance. The first information Vd1, second information Vd2, and third information Vd3 are all configured to be acquired by the spectral analysis unit 213. For example, when the LIBS method is used as the analysis method, the characteristics Ch of the substance includes information that combines the constituent elements of the sample SP and the content (or percentage) of those constituent elements into one set.

[0440] In the following explanation, "higher classification" refers to the general term for the substances thought to be contained in the sample SP. "Lower classification" in the following explanation refers to the types of substances belonging to the higher classification. A higher classification can be structured to include at least one lower classification. Furthermore, one or more intermediate classifications may be established between the higher and lower classifications. These intermediate classifications represent multiple systems belonging to the higher classification.

[0441] In the example shown in Figure 38, the first information Vd1 displays numerical data indicating that the sample SP contains iron, chromium, and nickel, and that the iron content is 74%, the chromium content is 17%, and the nickel content is 9%. Below the first information Vd1, a first icon Ic1 is displayed that accepts click operations by the mouse 31. As will be described in detail later, clicking the first icon Ic1, which is labeled "Detection Settings...", allows the settings related to the processing performed by the spectral analysis unit 213 to be changed.

[0442] Furthermore, below the first icon Ic1, a second icon Ic2 is displayed, which accepts click operations by the mouse 31. By operating the second icon Ic2, labeled "Spectrum," the fourth information Vd4, which shows the intensity distribution spectrum acquired by the spectrum acquisition unit 212 and the feature Ch extracted from that intensity distribution spectrum, can be displayed on the display unit 22, as illustrated in Figure 40. In the example shown, dashed lines indicating the peak positions of wavelength λ1 corresponding to iron, wavelength λ2 corresponding to chromium, and wavelength λ3 corresponding to nickel are superimposed on the intensity distribution spectrum. It can be seen that the intensity distribution spectrum forms peaks at each wavelength.

[0443] Returning to Figure 38, to the left of the first piece of information Vd1, the second piece of information Vd2 indicates that the higher classification of the material is "stainless steel." Below the second piece of information Vd2, the third piece of information Vd3 shows the intermediate classifications belonging to the higher classification in the order of "austenitic," "precipitation-hardening," and "austenitic." This order corresponds to the order of certainty of the lower classifications belonging to each intermediate classification. In this example, it is suggested that the austenitic system includes both lower classifications with higher certainty than those belonging to the precipitation-hardening system, and lower classifications with lower certainty than those belonging to the precipitation-hardening system. In the example shown, the lower classifications with relatively high certainty include SUS302, the intermediate classification includes SUS631, and the lower classifications with relatively low certainty include SUS304, SUS321, SUS305, etc. (not shown).

[0444] To learn more about the subcategories, simply click the fifth icon Ic5, which is displayed to the left of the intermediate classification such as "austenite." Although a detailed illustration is omitted here, the fifth icon Ic5 is used to toggle the display of the "second intermediate classification," which belongs to the intermediate classification and to which the subcategories belong. It is displayed by the UI control unit 215 in the display unit 22, particularly in the display field of the third information Vd3.

[0445] The second intermediate classification is a classification formed by further subdividing the intermediate classification. By further subdividing this second intermediate classification, the lower classifications in this example can be obtained. Note that the second intermediate classification is not mandatory. Alternatively, a third intermediate classification may be set up that belongs to the second intermediate classification, and further intermediate classifications may be set up that belong to that third intermediate classification. The lower classifications can then be associated with the lowest level of the intermediate classifications thus set up.

[0446] Here, by manipulating the fifth icon Ic5 located to the left of "Austenitic System," which is positioned at the top in Figure 38, the second intermediate classification belonging to that "Austenitic System" can be displayed in the display unit 22, specifically in the display field of the third information Vd3. Although not shown in the illustration, the second intermediate classification can be displayed as, for example, "SUS300 series."

[0447] Furthermore, below the third information Vd3, a third icon Ic3 is displayed that accepts click operations by the mouse 31. By operating the third icon Ic3, which is labeled "Display Description," text data explaining the substances contained in the sample SP can be displayed on the display unit 22.

[0448] Here, Figure 39 illustrates the display screen when the third icon Ic3 is operated from the state illustrated in Figure 38. This display screen shows fifth information Vd5, which is text data formed by combining one or more of the following: text data describing the higher classification of the substance contained in sample SP, text data describing its intermediate classification, and text data describing its lower classification.

[0449] Furthermore, to the right of the third icon Ic3, a fourth icon Ic4 is displayed, which accepts click operations by the mouse 31. When the fourth icon Ic4 is operated, the UI control unit 215 can display an interface on the display unit 22 for selecting classification standards from higher to lower classifications. The classification standards that can be selected through this interface can include, for example, one or more of the following: Japanese Industrial Standards (JIS), standards based on the International Organization for Standardization (ISO), EN standards set by the European Committee for Standardization, standards set by the American National Standards Institute (ANSI), and standards set independently by the user. In addition, commercial standards or similar databases can also be used.

[0450] For example, if the "JIS" standard is selected, identification information indicating that "JIS" has been selected can be superimposed on the fourth icon Ic4, as shown in Figure 38, etc.

[0451] Furthermore, returning to the display screen illustrated in Figure 40, the UI control unit 215 according to this embodiment can receive an operation input for the ninth icon Ic9 located near the intensity distribution spectrum, and as shown in Figure 41, extract and display the spectra near the peaks of each element. In the example shown, only the spectrum Vd5 corresponding to iron and the spectrum Vd6 corresponding to nickel are displayed, but the spectrum corresponding to chromium, which was also detected as an element contained in the sample SP, may also be displayed. In addition to these elements, spectra showing elements that were not detected as elements contained in the sample SP (elements other than iron, nickel, and chromium) may also be displayed. Also, since there are generally multiple peaks corresponding to each element, spectra showing these multiple peaks may be displayed side by side.

[0452] Furthermore, when the UI control unit 215 receives an operation input for the sixth icon Ic6 labeled "Back" on the display screen illustrated in Figure 41, it can return from the display screen illustrated in Figure 41 to the display screen illustrated in Figure 40.

[0453] Furthermore, the UI control unit 215 accepts an operation to select a spectrum extracted for each element, and in the fourth information Vd4, it can enlarge and display the area corresponding to the selected spectrum. For example, as shown in Figure 42, when the spectrum Vd5 corresponding to iron is selected, the UI control unit 215 can display the seventh information Vd7, which is an enlarged representation of the intensity distribution near iron, instead of the fourth information Vd4.

[0454] Returning to Figure 38, when the UI control unit 215 receives an operation input for the first icon Ic1 labeled "Detection Settings...", it displays a dialog W5 on the display unit 22, as illustrated in Figure 43. As shown in the example, this dialog W5 can display eighth information Vd8, which shows the periodic table (only a part of the periodic table is shown in the example), seventh icon Ic7 labeled "Select from List", and eighth icon Ic8 labeled "Recalculate".

[0455] Here, the UI control unit 215 is configured to accept operation inputs for each element in the periodic table displayed as the eighth piece of information Vd. As illustrated in Figure 43, based on the operation input made for each element, each element can be classified into "Standard" (element name displayed in black), "Required" (element name displayed in white), and "Excluded" (element name superimposed with a polka dot pattern). When an operation input is made to the eighth icon Ic8 with the classification set for each element, the UI control unit 215, upon receiving the operation input, works with the spectral analysis unit 213 to recalculate the first piece of information Vd1 and reset the peak positions (dashed lines corresponding to wavelengths λ1 to λ3) that are superimposed on the intensity distribution spectrum with dashed lines.

[0456] Of these, elements classified as "standard" will be extracted as detected elements by the spectral analysis unit 213 only if a peak is found in the intensity distribution spectrum. The elements extracted as detected elements are displayed in the first information Vd1, etc., as shown in Figure 39, for example, iron, nickel, and chromium.

[0457] Furthermore, elements classified as "essential" will be extracted as detected elements regardless of whether or not a peak exists in the intensity distribution spectrum. In the example shown in Figure 44, manganese is classified as "essential." In this case, the UI control unit 215 can superimpose the position of the wavelength λ4 corresponding to manganese onto the fourth information Vd4. For example, if the sample SP does not contain manganese, a dashed line indicating the wavelength λ4 will be superimposed at the position where no peak appears in the intensity distribution spectrum, as shown in information Vd4' in Figure 44.

[0458] Furthermore, elements classified as "excluded" are excluded from the detected elements regardless of whether or not a peak exists in the intensity distribution spectrum. In the example shown in Figure 44, nickel is classified as "excluded." In this case, unlike the fourth information Vd4 exemplified in Figure 40, the dashed line indicating wavelength λ3 is not displayed at the peak position corresponding to nickel, regardless of the magnitude of the intensity distribution spectrum. Although not shown in the illustration, if nickel is classified as "excluded," nickel is also not displayed in the first information Vd1 shown in Figure 39, etc.

[0459] Furthermore, when the mouse cursor is placed over one of the elements in the eighth piece of information Vd8, the UI control unit 215 can also superimpose and display the peak position corresponding to that element onto the intensity distribution spectrum.

[0460] Furthermore, when an operation input is received for the seventh icon Ic7, the UI control unit 215 displays a bulleted list of each element on the display unit 22 (not shown). In this case, each element in the list can be individually assigned the aforementioned classifications of "standard," "required," and "excluded."

[0461] <Features that contribute to improved usability> As described above, the processing unit 21a according to this embodiment generates a pre-irradiation image Pb via the first camera 81 at the timing immediately before the laser beam is irradiated onto the sample SP, as illustrated, for example, in Figures 14 and 20, and in steps S608 and S610 of Figure 36B. At this time, elements for observing the sample SP, such as the first camera 81 and the second camera 93, and elements for analyzing the sample SP, such as the electromagnetic wave emission unit 71, are controlled by a common processing unit 21a. This allows for seamless observation and analysis of the sample SP, eliminating the effort required to image the analysis area X. As a result, the usability of the analysis and observation device A can be improved.

[0462] Furthermore, as illustrated in Figures 19 and 21, and steps S617 and S620 of Figure 36C, the processing unit 21a generates a post-irradiation image Pa via the first camera 81 at the time after the sample SP is irradiated with laser light. For example, by comparing the pre-irradiation image Pb with the post-irradiation image Pa, the user can understand the changes that occurred in the sample SP due to laser-induced breakdown spectroscopy. This is advantageous in improving the usability of the analytical observation device A. Moreover, since the generation of the post-irradiation image Pa can be performed seamlessly, similar to the generation of the pre-irradiation image Pb, the effort required for its generation can be reduced. As a result, this is advantageous in improving the usability of the analytical observation device A.

[0463] Furthermore, as illustrated in Figures 14 and 19, the processing unit 21a generates two types of images P with different magnification levels. For example, by using the lower-magnification image for user navigation and the higher-magnification image for specifying the analysis area X, the usability of the analysis and observation device A can be further improved.

[0464] Furthermore, as illustrated in Figure 24, the UI control unit 215 provides the user with a first user interface W3 for associating at least one of two types of images with the analysis results. This makes it possible to meet specific needs, such as wanting to store low-magnification images but not high-magnification images. This is effective in improving the usability of the analysis and observation device A.

[0465] Furthermore, as illustrated in Figure 24, the UI control unit 215 provides the user with icons Ic51 and Ic52 for updating images. This allows for the response to detailed needs, such as replacing a low-magnification image from a pre-irradiation image Pb to a post-irradiation image Pa. This is effective in improving the usability of the analysis and observation device A.

[0466] Furthermore, as illustrated in Figures 29 and 30, the UI control unit 215 outputs a report, Rep, via the report output unit 218, which displays the pre-irradiation image Pb and post-irradiation image Pa obtained during component analysis. This allows the user to understand the laser irradiation position, the damage caused by the laser irradiation, etc. This is effective in improving the usability of the analysis and observation device A.

[0467] Furthermore, as illustrated in Figures 15 and 16, the analysis and observation device A can move the mounting platform 5 to image the second analysis area Lo2 specified on the navigation image Pn, which is a low-magnification image, or move the mounting platform 5 to bring the first analysis area Lo1 specified on the live image Pl, which is a high-magnification image, closer to the center of the field of view. This makes it possible to easily and precisely specify the irradiation position of the laser beam, which is advantageous in improving the usability of the analysis and observation device A.

[0468] Furthermore, as illustrated in Figures 15 and 16, the analysis and observation device A regenerates the live image Pl each time the mounting platform 5 is moved according to the designation of the first analysis location Lo1 or the second analysis location Lo2. This allows for more appropriate designation of the laser beam irradiation position, which in turn improves the usability of the analysis and observation device A.

[0469] Furthermore, as illustrated in Figure 16, the analysis and observation device A repeatedly accepts the designation of the first analysis points Lo1 and Lo1', and each time it accepts such designation, it moves the mounting stage 5 and regenerates the high-magnification image. This allows for more precise specification of the laser beam irradiation position, which in turn improves the usability of the analysis and observation device A.

[0470] Furthermore, as explained using Figure 18, the imaging control unit 214 generates a full-focus image Pc of the sample SP, thereby generating a live image Pl that is in focus across almost the entire field of view. This is effective in improving the usability of the analysis and observation device A.

[0471] Furthermore, as explained using Figure 20, laser light can be emitted to each of the multiple analysis points X1 and X2, and component analysis can be performed at each analysis point X1 and X2. This is effective in improving the usability of the analytical observation device A.

[0472] Furthermore, as illustrated in Figure 14, by superimposing positional information Ic onto the navigation image Pn, the user can understand the relative positional relationship between the live image Pl and the navigation image Pn through this positional information Ic. In addition, by superimposing information X indicating the position of the first analysis point Lo1 on the live image Pl onto the navigation image Pn, the user can understand the irradiation position of the laser light as the primary electromagnetic wave through this information X. This makes it possible to improve the usability of the analysis and observation device A.

[0473] Furthermore, as explained using Figures 26 and 31, the positional shift of the field of view center due to a change in magnification can be calculated by using the first positional difference D1 and the magnification difference. This makes it possible to move the mounting platform 5 to correct for the positional shift of the field of view center, or to update the positional information Ic according to that positional shift. This is effective in improving the usability of the analysis and observation device A.

[0474] Other embodiments In the above embodiment, the second camera 93 in the observation optical system 9 was exemplified as the imaging unit, and the first camera 81 in the analysis optical system 7 was exemplified as the second imaging unit. However, this disclosure is not limited to such configurations. The first camera 81 may be used as the imaging unit, and the second camera 93 may be used as the second imaging unit.

[0475] For example, if we consider the first camera 81 as an imaging unit, the generation of the pre-irradiation image Pb, post-irradiation image Pa, live image Pl, and navigation image Pn will be performed by the first camera 81 as an imaging unit, as already explained.

[0476] Furthermore, if the first camera 81 is considered as an imaging unit, the magnification changing unit according to this disclosure will change the magnification ratio by the first camera 81. In other words, the magnification changing unit according to this disclosure only needs to be able to change the magnification ratio of the sample SP by at least one of the first camera 81 and the second camera 93. [Explanation of Symbols]

[0477] A analytical and observation device SP Sample (Analyte) 1 Optical System Assembly 4 stages 41 Base 42 Stands 47 Head drive unit (electric drive unit) 5. Mounting platform 53 Mounting platform drive unit (electric drive unit) 6. Head section 62 analysis units 63 Observation Units 7 Analytical optical system 71 Electromagnetic wave emission unit (laser light emission unit) 74. Reflecting objective lens (collection head) 77A First detection unit (detection unit) 77B Second detection unit (detection unit) 81 First camera (second imaging unit) 9. Observation Optical System 93 Second camera (imaging unit) 96 Magnifying Optical System (Magnification Changing Section) 2. Controller unit 21a Processing Unit 212 Spectrum Acquisition Unit (Component Analysis Unit) 213 Spectral Analysis Department (Component Analysis Department) 214 Imaging Control Unit 215 User Interface Control Unit 22 Display section IC location information Lo1 First Analysis Point Lo2 Second Analysis Point Ma reference marker P Image PC full-focus image PL Live Image (High Magnification Image) Pn Navigation Image (Low Magnification Image) Image before Pb irradiation Image after Pa irradiation

Claims

1. A laser-induced breakdown spectroscopy apparatus that performs component analysis of an analyte using laser-induced breakdown spectroscopy, A laser beam emitting unit that emits laser light onto the object to be analyzed, A collection head for collecting plasma light generated in the object to be analyzed when the laser light emitted from the laser light emission unit irradiates the object to be analyzed, A detector that receives the plasma light generated in the object to be analyzed and collected by the collection head, and generates an intensity distribution spectrum which is the intensity distribution of the plasma light for each wavelength, An illumination unit that irradiates the object to be analyzed with illumination light, An imaging unit that receives reflected light reflected by the object to be analyzed and detects the amount of the received reflected light, The processing unit comprises: an imaging control unit that generates an image of the object to be analyzed based on the amount of reflected light detected by the imaging unit; a component analysis unit that receives a start trigger signal to start component analysis of the object to be analyzed, acquires the intensity distribution spectrum generated by the detector, performs component analysis of the object to be analyzed based on the intensity distribution spectrum, and obtains the analysis result; and an illumination control unit that controls the operation of the illumination unit. The processing unit, upon receiving the start trigger signal, By controlling the imaging unit, a pre-irradiation image is generated, which is the image of the object to be analyzed before the laser light is irradiated onto it, while the illumination unit is lit. After generating the pre-irradiation image, the illumination unit is turned off. By controlling the imaging unit and then controlling the laser beam emission unit, the laser beam is emitted onto the object to be analyzed while the illumination unit is turned off. By receiving the plasma light generated in the object to be analyzed and collected by the collection head upon emission of the laser light, the detector obtains an intensity distribution spectrum, which is the intensity distribution of the plasma light for each wavelength. A laser-induced breakdown spectrometer characterized by the following features.

2. In the laser-induced breakdown spectrometer described in claim 1, The processing unit generates an image by superimposing the analysis results onto the pre-irradiation image, and displays the image on the display unit. A laser-induced breakdown spectrometer characterized by the following features.

3. In the laser-induced breakdown spectrometer according to claim 1 or 2, The processing unit controls the laser beam emission unit to emit the laser beam onto the object to be analyzed, and then controls the imaging unit to generate a post-irradiation image, which is the image of the object to be analyzed after it has been irradiated with the laser beam. A laser-induced breakdown spectrometer characterized by the following features.

4. In the laser-induced breakdown spectrometer described in claim 3, The processing unit includes a lighting setting unit that sets lighting conditions, which are control parameters related to the lighting unit. The system includes a storage unit that stores the lighting conditions of the lighting unit set by the lighting setting unit, The processing unit further responds to the reception of the start trigger signal by: By controlling the imaging unit, a pre-irradiation image is generated, which is an image of the object to be analyzed before the laser light is irradiated onto it, while the illumination unit is lit. After generating the pre-irradiation image, the lighting conditions of the lighting unit set by the lighting setting unit are stored in the storage unit, and the lighting unit is temporarily turned off. By controlling the imaging unit and then controlling the laser beam emission unit, the laser beam is emitted onto the object to be analyzed while the illumination unit is turned off. After irradiation with the laser light, the illumination unit is deactivated, and the illumination unit is turned on based on the illumination conditions read from the memory unit, thereby reproducing the illumination state when the pre-irradiation image was generated. By controlling the imaging unit, a post-irradiation image is generated, which is the image of the object to be analyzed after the laser light has been irradiated onto it, while the illumination unit is lit. A laser-induced breakdown spectrometer characterized by the following features.

5. In the laser-induced breakdown spectrometer according to claim 1 or 2, The illumination unit includes coaxial illumination, which irradiates the object to be analyzed with illumination light via an optical path coaxial with the optical path of the laser beam, and side illumination, which irradiates the object to be analyzed with illumination light from a direction inclined with respect to the optical axis of the laser beam. The processing unit, upon receiving the start trigger signal, By controlling the imaging unit, a pre-irradiation image is generated, which is an image of the object to be analyzed before the laser light is irradiated onto it, while at least one of the coaxial illumination and the side illumination is lit. After generating the pre-irradiation image, the coaxial illumination and the side illumination are turned off. By controlling the imaging unit and then the laser beam emission unit, the laser beam is emitted onto the object to be analyzed while the coaxial illumination and the side illumination are turned off. By receiving the plasma light generated in the object to be analyzed and collected by the collection head upon emission of the laser light, the detector obtains an intensity distribution spectrum, which is the intensity distribution of the plasma light for each wavelength. A laser-induced breakdown spectrometer characterized by the following features.

6. In the laser-induced breakdown spectrometer described in claim 5, The processing unit includes a lighting setting unit that sets lighting conditions, which are control parameters related to the coaxial lighting and the side lighting. The system includes a storage unit that stores the lighting conditions of the lighting unit set by the lighting setting unit, The processing unit further responds to the reception of the start trigger signal by: By controlling the imaging unit, a pre-irradiation image is generated, which is an image of the object to be analyzed before the laser light is irradiated onto it, while at least one of the coaxial illumination and the side illumination is lit. After generating the pre-irradiation image, with the illumination conditions of the illumination unit set by the illumination setting unit stored in the memory unit, the coaxial illumination and the side illumination are temporarily turned off. By controlling the imaging unit and then controlling the laser beam emission unit, the laser beam is emitted towards the object to be analyzed while the coaxial illumination and the side illumination are turned off. After irradiation with the laser light, the coaxial illumination and the side illumination are turned off, and at least one of the coaxial illumination and the side illumination is turned on based on the illumination conditions read from the memory unit, thereby reproducing the illumination state when the pre-irradiation image was generated. By controlling the imaging unit, a post-irradiation image is generated, which is an image of the object to be analyzed after the laser light has been irradiated onto it, while at least one of the coaxial illumination and the side illumination is turned on. A laser-induced breakdown spectrometer characterized by the following features.

7. In a laser-induced breakdown spectrometer according to any one of claims 1 to 6, A platform on which the object to be analyzed is placed, A second imaging unit receives reflected light reflected by the object to be analyzed placed on the mounting platform and detects the amount of the received reflected light. It includes a mode switching unit that switches between the imaging unit and the second imaging unit, The imaging unit is set to have a relatively higher magnification ratio for the object to be analyzed than the second imaging unit. The imaging control unit, When the mode switching unit is switched to the second imaging unit, it generates a low-magnification image with a relatively low magnification. When the mode switching unit is switched to the imaging unit, it generates a high-magnification image with a relatively high magnification ratio. A laser-induced breakdown spectrometer characterized by the following features.

8. In the laser-induced breakdown spectrometer described in claim 7, An observation housing that houses the second imaging unit, It comprises an analysis housing that is configured separately from the observation housing and houses the imaging unit and the detector, The mode switching unit switches between the imaging unit and the second imaging unit by moving the observation housing and the analysis housing relative to the aforementioned stand. A laser-induced breakdown spectrometer characterized by the following features.

9. In a laser-induced breakdown spectrometer according to any one of claims 1 to 6, A platform on which the object to be analyzed is placed, A second imaging unit receives reflected light reflected by the object to be analyzed placed on the mounting platform and detects the amount of the received reflected light. The system includes a magnification changing unit that can change the magnification of the object to be analyzed by at least one of the imaging unit and the second imaging unit, The aforementioned processing unit, By adjusting the magnification changing unit, the magnification is changed, and at each magnification, the imaging unit detects the amount of reflected light received, thereby obtaining the pre-irradiation image of the object to be analyzed. The aforementioned low-magnification image, The above-mentioned high-magnification image with a relatively high magnification ratio generates A laser-induced breakdown spectrometer characterized by the following features.

10. In a laser-induced breakdown spectrometer according to any one of claims 7 to 9, The aforementioned processing unit, The aforementioned low-magnification image and, The aforementioned high-magnification image and, Based on the above analysis results, A first user interface that accepts an input for saving at least one of the low-magnification image and the high-magnification image in association with the analysis results is displayed on the display unit. A laser-induced breakdown spectrometer characterized by the following features.

11. In the laser-induced breakdown spectrometer described in claim 10, The aforementioned processing unit, The display unit is made to display a display screen for updating at least one of the images associated with the analysis results, The system receives a save instruction to store the image displayed on the display unit and the corresponding analysis results in the storage unit. The aforementioned display screen is The at least one of the aforementioned images, It comprises a second user interface that accepts an input for updating at least one of the aforementioned images. A laser-induced breakdown spectrometer characterized by the following features.

12. In the laser-induced breakdown spectrometer according to claim 10 or 11, The report output unit includes a report output unit that outputs a report displaying at least one of the low-magnification image, the high-magnification image, and the analysis result at each position on a template where the output positions for the low-magnification image, the high-magnification image, and the analysis result are assigned, The processing unit, when outputting the report by the report output unit, displays the image associated with the first user interface on the report. A laser-induced breakdown spectrometer characterized by the following features.

13. In the laser-induced breakdown spectrometer described in claim 9, The system includes an electric drive unit that moves the imaging position, which indicates the relative position of the aforementioned mounting stand with respect to the imaging unit, along the horizontal direction. The processing unit is configured to accept at least one of the following: the designation of a first analysis location on the high-magnification image and the designation of a second analysis location on the low-magnification image. The imaging control unit, When the processing unit receives the designation of the second analysis location, it controls the motorized drive unit based on the second analysis location to move the imaging position so that the second analysis location falls within the field of view of the high-magnification image. When the processing unit receives a designation of the first analysis location, it controls the motorized drive unit based on the first analysis location to move the imaging position so that the first analysis location approaches the center of the field of view of the high-magnification image. A laser-induced breakdown spectrometer characterized by the following features.

14. In the laser-induced breakdown spectrometer described in claim 13, The imaging control unit, When the processing unit receives the designation of the second analysis location, the motorized drive unit brings the second analysis location into the field of view of the high-magnification image and then regenerates the high-magnification image. When the processing unit receives a designation for the first analysis location, the motorized drive unit brings the first analysis location closer to the center of the field of view of the high-magnification image and then regenerates the high-magnification image. A laser-induced breakdown spectrometer characterized by the following features.

15. In the laser-induced breakdown spectrometer described in claim 14, The processing unit receives the designation of the first analysis location on the regenerated high-magnification image, The imaging control unit, When the processing unit receives a designation of the first analysis location, it controls the motorized drive unit based on the first analysis location to move the imaging position so that the first analysis location approaches the center of the field of view of the regenerated high-magnification image. With the first analysis location brought closer to the center of the field of view of the regenerated high-magnification image by the electric drive unit, further regeneration of the high-magnification image is performed. A laser-induced breakdown spectrometer characterized by the following features.

16. In a laser-induced breakdown spectrometer according to any one of claims 13 to 15, Bass and, It comprises a stand connected to the base and extending in a first direction perpendicular to the base, The mounting platform is supported by the base or the stand, The electric drive unit is configured to move the imaging position along the first direction, The imaging control unit, After the imaging position has been moved along the horizontal direction by the motorized drive unit, the motorized drive unit is controlled to move the imaging position along the first direction. A laser-induced breakdown spectrometer characterized by the following features.

17. In the laser-induced breakdown spectrometer described in claim 16, The imaging control unit, The motorized drive unit moves the imaging position to a plurality of first positions along the first direction, and generates the high-magnification image at each of the plurality of first positions. A full-focus image of the object to be analyzed is generated by combining the high-magnification images generated at each of the plurality of first positions. A laser-induced breakdown spectrometer characterized by the following features.

18. In the laser-induced breakdown spectrometer described in claim 16, The aforementioned electric drive unit is The collection position, which indicates the relative position of the aforementioned base with respect to the collection head, is configured to change along the first direction. The imaging control unit, The electric drive unit moves the collection position to a plurality of first positions along the first direction, and generates the image at each of the plurality of first positions. The aforementioned component analysis unit is Based on the images generated at each of the plurality of first positions, the processing unit identifies the height along the first direction at the first analysis location received by the processing unit. By controlling the motorized drive unit based on the specified height, the collection position is moved along the first direction so that the laser beam emitted from the laser beam emission unit focuses on the first analysis location. A laser-induced breakdown spectrometer characterized by the following features.

19. In a laser-induced breakdown spectrometer according to any one of claims 13 to 18, The processing unit is configured to accept the designation of the second analysis location at multiple locations on the low-magnification image, If the processing unit receives designations for the second analysis locations at multiple locations, it will perform the following actions for each of the second analysis locations that have been designated at multiple locations: The motorized drive unit moves the imaging position so that one of the second analysis locations, which has been received at multiple locations, falls within the field of view of the high-magnification image. With the aforementioned second analysis location contained within the field of view of the high-magnification image, the imaging control unit generates the high-magnification image. After the imaging control unit generates the high-magnification image, the laser beam emission unit emits the laser beam onto the object to be analyzed, thereby causing the component analysis unit to perform component analysis at the first second analysis location. A laser-induced breakdown spectrometer characterized by the following features.

20. In a laser-induced breakdown spectrometer according to any one of claims 13 to 18, The processing unit is configured to accept the designation of the first analysis location across multiple locations on the high-magnification image. When the processing unit receives designations for multiple first analysis locations, it performs the following for each of the multiple first analysis locations that have been designated: The motorized drive unit moves the imaging position so that one of the first analysis locations, which has been received at multiple locations, approaches the center of the field of view of the high-magnification image. With the first analysis location brought close to the center of the field of view of the high-magnification image, the imaging control unit generates the high-magnification image. After the imaging control unit generates the high-magnification image, the laser beam emission unit emits the laser beam onto the object to be analyzed, thereby causing the component analysis unit to perform component analysis at the first analysis location. A laser-induced breakdown spectrometer characterized by the following features.

Images