Torque sensors and robots

Abstract

To achieve a torque sensor that achieves miniaturization and that has a high degree of freedom in design of resolution.SOLUTION: A torque sensor has: a first plate-like member including a plate-like spacer; and a second plate-like member (20) fastened to the first plate-like member. A film-shaped strain gauge (51) disposed in a recess formed on an outer edge of the spacer, and film-shaped wiring (52) connected to the film-shaped strain gauge are formed in an outer peripheral area (90) of the second plate-like member (20) outside the spacer.SELECTED DRAWING: Figure 4

Description

[Technical Field]

[0001] The present invention relates to a torque sensor and a robot. [Background Art]

[0002] Torque sensors are used in various industrial fields, for example, for determining the operation of industrial robots. Among such torque sensors, a flange-type torque sensor is known which allows load resistance specification to be designed by adjusting the number of stacked standard predetermined components (see, for example, Patent Document 1). [Prior Art Literature] [Patent Literature]

[0003] [Patent Document 1] Japanese Unexamined Patent Publication No. 2022-73177 [Summary of the Invention] [Problem to be Solved by the Invention]

[0004] Torque sensors are required to have size and resolution corresponding to their applications. However, the above-described conventional techniques have various problems.

[0005] For example, flange-type rotary torque sensors are generally large in size. In addition, the outer profile cannot be reduced in some cases due to the size of strain gauges. Furthermore, since wiring (lead wires) from the strain gauge to the substrate is mounted, the outer profile cannot be reduced in some cases. In addition, the thickness cannot be reduced in some cases due to the mounting of strain gauges and wiring. For capacitive sensors, since external force is measured from the gap between the upper and lower substrates, the thickness may be limited to a certain value or more. Further, since the resolution range is determined by the material of the strain generating body of the torque sensor and the characteristics of the strain gauge, the combination of the material of the strain generating body and the strain gauge may be restricted. As described above, conventional torque sensors still leave room for study from the viewpoints of miniaturization and design freedom of resolution.

[0006] One aspect of the present invention aims to realize a torque sensor that is miniaturized and offers a high degree of design flexibility in terms of resolution. [Means for solving the problem]

[0007] To solve the above objectives, a torque sensor according to one aspect of the present invention comprises a first plate-shaped member, a second plate-shaped member facing the first plate-shaped member, and a plate-shaped spacer integrated with the first plate-shaped member and fastened to the second plate-shaped member, wherein a recess is formed on the outer edge of the spacer, and a film-shaped strain gauge disposed in the recess and a film-shaped wiring connected to the film-shaped strain gauge are formed on the outer peripheral region of the main surface of the second plate-shaped member facing the first plate-shaped member that extends beyond the spacer. [Effects of the Invention]

[0008] According to one aspect of the present invention, it is possible to realize a torque sensor that is miniaturized and offers a high degree of design flexibility in terms of resolution. [Brief explanation of the drawing]

[0009] [Figure 1] This diagram schematically shows the configuration of a robot according to one embodiment of the present invention. [Figure 2] This figure schematically shows the structure of one cross-section of a torque sensor according to one embodiment of the present invention. [Figure 3] This figure schematically shows the structure of the main surface of the first plate-shaped member facing the second plate-shaped member in a torque sensor according to one embodiment of the present invention. [Figure 4] This figure schematically shows the structure of the main surface of the second plate-shaped member facing the first plate-shaped member in a torque sensor according to one embodiment of the present invention. [Modes for carrying out the invention]

[0010] One embodiment of the present invention will be described in detail below.

[0011] 〔robot〕 Figure 1 is a schematic diagram showing the configuration of a robot according to one embodiment of the present invention. As shown in Figure 1, the robot 100 has a robot arm 110, a torque sensor 1 fixed to the robot arm 110, and a robot hand 120 fixed to the torque sensor 1, along the Z-axis direction.

[0012] [Torque sensor] The torque sensor 1 comprises a first plate-shaped member 10 and a second plate-shaped member 20 facing the first plate-shaped member 10. Figure 2 is a schematic diagram showing the structure of one cross-section of the torque sensor 1 according to one embodiment of the present invention. Figure 3 is a schematic diagram showing the structure of the main surface of the first plate-shaped member 10 facing the second plate-shaped member 20 in the torque sensor 1 according to one embodiment of the present invention. Figure 4 is a schematic diagram showing the structure of the main surface of the second plate-shaped member 20 facing the first plate-shaped member 10 in the torque sensor 1 according to one embodiment of the present invention. Hereinafter, the "facing main surfaces" of the first plate-shaped member and the second plate-shaped member will also be simply referred to as "facing surfaces". Also, the shape when viewed from above will also be simply referred to as "planar shape".

[0013] As shown in Figure 2, the torque sensor 1 is constructed by combining a first plate-shaped member 10 and a second plate-shaped member 20 facing each other. The materials of the first plate-shaped member 10 and the second plate-shaped member 20 are both appropriately selected within a range that generates strain due to external force around the Z axis, for example, stainless steel. As shown in Figures 3 and 4, both the first plate-shaped member 10 and the second plate-shaped member 20 are plate-shaped members having an annular planar shape and a circular through-hole 60 in the center.

[0014] [First plate-shaped member] The first plate-like member 10 has a groove 30 on its opposing surface. The cross-sectional shape of the groove 30 is rectangular. The depth of the groove 30 can be appropriately set within a range greater than the sum of the thickness of the printed circuit board and the thickness of the flexible substrate 140, for example, 0.1 μm or less.

[0015] The groove 30 includes an annular portion 31 circumferentially provided between the inner and outer edges of the first plate-like member 10, three recesses 32A, 32B, and 32C extending further inward from the inner edge of the annular portion 31, and a connecting portion 33 extending radially outward from the outer edge of the annular portion 31 to connect the annular portion 31 with the outside. The annular portion 31, the recesses 32A, 32B, and 32C, and the connecting portion 33 form the planar shape of the groove 30. The recesses 32A, 32B, and 32C are all equidistant from the center O in the planar shape of the first plate-like member 10 and are arranged at equal intervals in the circumferential direction. The individual planar shapes of the recesses 32A, 32B, and 32C are rectangular.

[0016] The inner circumference of the groove 30 in the first plate-shaped member 10 is a plate-shaped spacer 40 having a substantially annular planar shape. In this way, in the torque sensor 1, the spacer 40 is integrated with the first plate-shaped member 10. That is, the spacer 40 is a part of the first plate-shaped member 10.

[0017] The outer periphery of the groove 30 in the first plate-like member 10 has an outer edge portion 80 with a substantially annular planar shape. The planar shape of the outer edge portion 80 is a C-shape in which the annulus is cut out by the connecting portion 33. Holes are formed in the outer edge portion 80 for fastening the first plate-like member 10 and the second plate-like member 20 to each other. These holes are four holes 81A, 81B, 81C, and 81D, two holes 82A and 82B, and four holes 83A, 83B, 83C, and 83D.

[0018] Holes 81A, 81B, 81C, and 81D are all counterbore holes for inserting screws 131 by screwing them in. Holes 81A, 81B, 81C, and 81D are all located at equidistant distances from the center O in the planar shape of the first plate-like member 10 and are arranged at equal intervals in the circumferential direction.

[0019] The holes 82A and 82B are holes for inserting the pin 132. Both the holes 82A and 82B are arranged at equal distances from the center O in the planar shape of the first plate-shaped member 10, and are arranged at equal intervals in the circumferential direction.

[0020] The holes 83A, 83B, 83C and 83D are screw holes for screws 133 to be screwed into. All of the holes 83A, 83B, 83C and 83D are arranged at equal distances from the center O in the planar shape of the first plate-shaped member 10, and are arranged at equal intervals in the circumferential direction.

[0021] Note that, when viewed in a plan view, the recess 32C is arranged coaxially (on the X-axis) with the hole 82B. Further, one hole 81C is arranged in a straight line intersecting the X-axis at a specific angle a1, and one hole 83C is arranged in a straight line intersecting the X-axis at a specific angle A2.

[0022] [Second plate-shaped member] The second plate-shaped member 20 has an outer peripheral region 90 on its opposing surface. The outer peripheral region 90 is a portion of the opposing surface of the second plate-shaped member 20 that protrudes from the spacer 40. More specifically, the outer peripheral region 90 is a portion of the opposing surface of the second plate-shaped member 20 that faces the groove 30 when the second plate-shaped member 20 faces the first plate-shaped member 10. Alternatively, the outer peripheral region 90 can also be described as a portion of the opposing surface of the second plate-shaped member 20 that does not face the spacer 40 and the outer edge portion 80 when the second plate-shaped member 20 faces the first plate-shaped member 10.

[0023] The second plate-shaped member 20 has printed wirings 50 in the outer peripheral region 90. The printed wirings 50 include three film-shaped strain gauges 51A, 51B, 51C, and film-shaped wirings 52A, 52B, 52C respectively connected to the film-shaped strain gauges 51A, 51B, 51C.

[0024] The printed circuit board 50 is composed of, for example, a base layer, a wiring layer, and an overcoat layer. The base layer (insulating layer) is, for example, a layer of silica (SiO2). The base layer is formed to have a width slightly wider than the wiring layer. The wiring layer consists of film-type strain gauges 51A, 51B, 51C and film-type wiring 52A, 52B, 52C. The film-type strain gauges 51A, 51B, 51C are each formed of a thin layer of chromium nitride (NCr). The overcoat layer is, for example, a polyimide layer. The overcoat layer, like the base layer, is formed to have a width slightly wider than the wiring layer.

[0025] The film-type strain gauge 51A has at least its gauge portion formed in the rectangular portion corresponding to the recess 32A. Therefore, in the torque sensor 1, at least its gauge portion of the film-type strain gauge 51A is positioned within the recess 32A. Similarly, the film-type strain gauges 51B and 51C each have at least their gauge portions positioned inside the recesses 32B and 32C, respectively. The film-type wiring 52A, 52B, and 52C are each formed from a thin layer of copper (Cu). The inorganic layers (underlayment and wiring layers) are manufactured, for example, by sputtering.

[0026] Each of the membrane wirings 52A, 52B, and 52C is connected at one end to correspond to each of the membrane strain gauges 51A, 51B, and 51C. Each of the membrane wirings 52A, 52B, and 52C extends through the outer peripheral region 90 to the portion adjacent to the contact portion 33 in the outer peripheral region 90. The other ends of the membrane wirings 52A, 52B, and 52C are arranged in a line in the outer peripheral region 90.

[0027] The second plate-shaped member 20 has three screw holes 84A, 84B, and 84C in a substantially annular portion between its inner peripheral edge on the opposing surface and the inner peripheral edge of the outer peripheral region 90. The screw holes 84A, 84B, and 84C are all holes into which screws 134 are screwed. The screw holes 84A, 84B, and 84C are all equidistant from the center O in the planar shape of the second plate-shaped member 20 and are equally spaced in the circumferential direction. Furthermore, the screw holes 84A, 84B, and 84C are all located on a circumference with a smaller diameter than the circumference centered at the center O, where the holes 82A, 82B and 83A, 83B, 83C, and 83D are located. The screw hole 84A is located coaxially with the rectangular portion corresponding to the recess 32A in the radial direction. Similarly, the screw hole 84B is located coaxially with the rectangular portion corresponding to the recess 32B in the radial direction, and the screw hole 84C is located coaxially with the rectangular portion corresponding to the recess 32C in the radial direction.

[0028] The outer periphery of the outer peripheral region 90 of the second plate-like member 20 is an outer edge region 91 having a substantially annular planar shape. The outer edge region 91 is the region opposite to the outer edge portion 80 of the first plate-like member 10. The planar shape of the outer edge region 91 is a C-shape in which the annulus is cut out by the region opposite to the connecting portion 33 of the first plate-like member 10. The outer edge region 91 has two holes 82A and 82B and four holes 83A, 83B, 83C, and 83D. These holes are formed on the first plate-like member 10 at positions opposite to them. Holes 82A and 82B are holes for inserting pins 132, and both are located equidistant from the center O in the planar shape of the second plate-like member 20 and are arranged at equal intervals in the circumferential direction. Holes 83A, 83B, 83C, and 83D are screw holes into which screws 133 are threaded. All of them are equidistant from the center O in the planar shape of the second plate-like member 20 and are equally spaced in the circumferential direction. Holes 83A, 83B, 83C, and 83D in the second plate-like member 20 are counterbore holes.

[0029] [Assembly of robots and torque sensors] As shown in Figure 2, the first plate-shaped member 10 is fixed to the robot arm 110 by screwing screws 131 into each of the holes 81A, 81B, 81C, and 81D from the first plate-shaped member 10 side. The second plate-shaped member 20 is fixed to the first plate-shaped member 10 by inserting pins 132 into each of the holes 82A and 82B, and by screwing screws 133 into each of the holes 83A, 83B, 83C, and 83D from the second plate-shaped member 20 side. By screwing the screws 133, the second plate-shaped member 20 is fastened to the first plate-shaped member 10 and also to the spacer 40. The robot hand 120 is fixed to the second plate-shaped member 20 by screwing screws 134 into each of the screw holes 84A, 84B, and 84C from the robot hand 120 side.

[0030] Thus, the screw 133 serves as a fastener for fastening the spacer 40 to the second plate-shaped member 20. The pin 132 serves as a fixing device for aligning the first plate-shaped member 10 and the second plate-shaped member 20. In the torque sensor 1, all of the above fasteners are arranged on the circumference of a circle centered on the center O of the planar shape of the first plate-shaped member 10 and the second plate-shaped member 20.

[0031] Furthermore, the respective gauge portions of the film-like strain gauges 51A, 51B, and 51C are positioned inside the recesses 32A, 32B, and 32C. Therefore, each of the film-like strain gauges 51A, 51B, and 51C is positioned on a circumference centered on the center O, and is also positioned at equal intervals on that circumference.

[0032] A flexible substrate 140 is connected to the other ends of the film-like wirings 52A, 52B, and 52C in the printed circuit board 50 of the torque sensor 1. The flexible substrate 140 is connected, for example, by arranging anisotropic conductive particles at the connection portion and crimping the connection portion to the other ends of the film-like wirings 52A, 52B, and 52C. The flexible substrate 140 extends to the outside of the torque sensor 1 from the gap between the contact portion 33 of the first plate-like member 10 and the opposing surface of the second plate-like member 20, and is connected to a bridge circuit that includes, for example, film-like strain gauges 51A, 51B, and 51C, respectively.

[0033] The groove 30 has recesses 32A, 32B, 32C, an annular portion 31, and a connecting portion 33, and forms a gap between it and the outer peripheral region 90 of the opposing surface of the second plate-shaped member 20. As described above, the film-like wirings 52A, 52B, and 52C are arranged in the outer peripheral region 90. Since the gap includes the connecting portion 33, it forms a communication portion that connects the recesses 32A, 32B, and 32C to the outer side of the torque sensor 1. The film-like wirings 52A, 52B, and 52C are arranged in this communication portion.

[0034] Furthermore, the above-mentioned communication portion and the recesses 32A, 32B, and 32C connected thereto are filled with a sealing material 70. The sealing material 70 is a known sealing material that has water resistance, such as epoxy resin. The sealing material 70 may be filled into the annular portion 31 after the flexible substrate 140 is connected to the printed wiring 50 and before the first plate-shaped member 10 is aligned with the second plate-shaped member. Alternatively, the sealing material 70 may be injected from the opening on the outer circumferential surface of the torque sensor 1 formed by the connecting portion 33 after the first plate-shaped member 10 is aligned with the second plate-shaped member. In this way, the recesses 32A, 32B, and 32C are filled with the sealing material 70, and the film-type strain gauges 51A, 51B, and 51C are sealed with the sealing material 70. Thus, the entry of foreign matter into the communication portion and contact with foreign matter are prevented.

[0035] [Main effects and benefits] When an external force around the z-axis is transmitted from the robot hand 120 to the torque sensor 1, this external force is transmitted from the screw 134 to the second plate-shaped member 20, causing the second plate-shaped member 20 to deform. The external force (torque) around the z-axis is detected by the change in resistance of the film-type strain gauges 51A, 51B, and 51C to which this deformation is transmitted.

[0036] The torque sensor 1 can be directly fixed between the robot arm 110 and the robot hand 120. Therefore, the configuration of the torque sensor 1 is compact.

[0037] The torque sensor 1 has a spacer 40, and the area extending beyond the spacer 40 forms a gap with a planar shape and depth of groove 30 formed by the annular portion 31, recesses 32A, 32B, 32C and connecting portion 33. In this embodiment, film-type strain gauges 51A, 51B, 51C and film-type wiring 52A, 52B, 52C are employed, making it possible to arrange the strain gauges and wiring in this gap. Thus, the strain gauges and wiring are arranged between the plate-like members, and their protection is ensured.

[0038] The torque sensor 1 has film-type strain gauges 51A, 51B, and 51C. Because the torque sensor 1 has these film-formed strain gauges, it is possible to make the torque sensor 1 smaller and thinner.

[0039] Furthermore, since the torque sensor 1 has membrane-type wiring 52A, 52B, and 52C, it is possible to make the pitch between the wirings narrower. Therefore, the torque sensor 1 can be made smaller and thinner in terms of the space required for the wiring.

[0040] Furthermore, the torque sensor 1 provides a strain detection resolution corresponding to the materials of the first plate-shaped member 10 and the second plate-shaped member 20. In addition, since the film-type strain gauges 51A, 51B, and 51C are made of NCr, a high gauge factor is obtained, and therefore high resolution is achieved. For example, a gauge factor approximately five times higher can be obtained compared to film-type strain gauges made of nickel copper (NiCu).

[0041] Furthermore, in the torque sensor 1, the film-type strain gauges 51A, 51B, and 51C are arranged at equal intervals on the same circumference. Therefore, since the film-type strain gauges are equally affected by external forces around the Z axis, this is advantageous from the viewpoint of accurately detecting torque.

[0042] Furthermore, in the torque sensor 1, the pins 132 and screws 133 that fasten the first plate-shaped member 10 and the second plate-shaped member 20 are also arranged at equal intervals on a circle centered on the center O. Therefore, the effect of the strain caused by these fasteners on the torque sensor 1 when subjected to an external force around the Z axis is equalized in the circumferential direction, which is advantageous from the viewpoint of accurately detecting torque.

[0043] Furthermore, in the torque sensor 1, the screws 131 for fixing it to the robot arm 110 and the screws 134 for fixing it to the robot hand 120 are also arranged at equal intervals on a circle centered on the center O. Therefore, the effect of distortion caused by these fixings on the torque sensor 1 when subjected to external forces around the Z axis is equalized in the circumferential direction, which is advantageous from the viewpoint of accurately detecting torque.

[0044] Furthermore, in the torque sensor 1, the screw 134 for fixing it to the robot hand 120 is positioned on a circumference with a smaller diameter than the circumference centered at the center O where the film-type strain gauge is located. Moreover, the screw 134 is positioned on a circumference with a smaller diameter than the circumference centered at the center O where the pin 132 and screw 133 for fastening the first plate-shaped member 10 and the second plate-shaped member 20 are located. Thus, the torque sensor 1 includes a structure that fixes the first plate-shaped member 10 and the second plate-shaped member 20 on the outer circumference side and fixes the robot hand 120, which is the target of strain detection, on the inner circumference side to detect the strain. Therefore, the torque sensor 1 is advantageous in that it is easier to detect the torque of the target and improves the sensitivity of torque detection.

[0045] Furthermore, in the torque sensor 1, the aforementioned communication portion (recess, annular portion, and connecting portion) is sealed by the sealing material 70. Therefore, the water resistance and dust resistance of the torque sensor 1 are enhanced, which is advantageous for improving the reliability of the torque sensor 1.

[0046] Furthermore, the torque sensor 1 has an annular shape with a through hole 60 in the center of its planar shape, as shown in Figures 3 and 4, for example. Therefore, it is prone to distortion and has good sensitivity.

[0047] The first plate-shaped member 10 and the second plate-shaped member 20 in the torque sensor 1 can be manufactured by common processing methods such as groove drilling, hole drilling, and printing of electrical materials.

[0048] Torque sensor 1 offers advantages in terms of miniaturization and thinning, and its resolution can also be set to various values. Therefore, torque sensor 1 is advantageous for application to existing robots and is expected to have high versatility.

[0049] [Variation] The torque sensor according to the present invention may have configurations other than those described above, as long as the effects of the present invention are obtained. For example, the fastening of the first plate-shaped member and the second plate-shaped member may be done by bonding with an adhesive.

[0050] Furthermore, the shape of the torque sensor does not have to be annular; for example, it may be disc-shaped.

[0051] Furthermore, the spacer may be integrated with the first plate-like member as described above, or it may be integrated with the second plate-like member.

[0052] Furthermore, the materials of the first plate-shaped member and the second plate-shaped member may be the same or different. In particular, when the materials are different, the resolution range of the torque sensor can be adjusted from general use to high resolution use depending on the combination of materials of the first plate-shaped member and the second plate-shaped member. In addition to metals such as the aforementioned stainless steel, resin can also be used as the material for the plate-shaped member.

[0053] Furthermore, the number of membrane strain gauges can be appropriately determined according to the application and the desired accuracy. For example, if the application is simply to detect the presence or absence of an external force, one or two membrane strain gauges may suffice. In addition, if external forces other than those around the Z-axis need to be detected, the number of membrane strain gauges may be four or more.

[0054] Furthermore, the recesses, annular portions, and connecting portions of the groove in the first plate-like member may each have different depths. For example, the thickness of each layer in printed wiring is only a few microns, and the thickness of the printed wiring is thinner than the thickness of the flexible substrate. Therefore, the connecting portions may be formed to be deeper than the recesses and annular portions.

[0055] Furthermore, the torque sensor may have a recess that opens into the peripheral wall of the through hole 60, and may be configured so that a sealing material can be injected into the recess and the communication portion from the opening of the recess in the through hole 60.

[0056] 〔summary〕 As is clear from the above description, the torque sensor (1) of the first embodiment of the present invention comprises a first plate-shaped member (10), a second plate-shaped member (20) facing the first plate-shaped member, and a plate-shaped spacer (40) integrated with the first plate-shaped member and fastened to the second plate-shaped member. The outer edge of the spacer has recesses (32A, 32B, 32C), and on the outer peripheral region (90) of the main surface of the second plate-shaped member facing the first plate-shaped member, which extends beyond the spacer, there are membrane-like strain gauges (51A, 51B, 51C) placed in the recesses and membrane-like wiring (52A, 52B, 52C) connected to these membrane-like strain gauges. Thus, the first embodiment can realize a torque sensor that is miniaturized and has a high degree of freedom in designing the resolution.

[0057] In the second embodiment of the present invention, the torque sensor has a sealing material (70) for sealing a film-type strain gauge filled in the recess, as in the first embodiment. The second embodiment is even more effective in terms of improving the moisture resistance and water resistance of the torque sensor.

[0058] A third aspect of the present invention, in the first or second aspect, includes a communication portion that connects a recess with the outside of the side of the torque sensor, the communication portion includes a connecting portion that opens to the side of the torque sensor, and the membrane wiring is arranged in the communication portion. The third aspect is even more effective in terms of improving the reliability of the torque sensor by arranging a strain detection circuit inside the sensor and protecting the circuit.

[0059] In the fourth aspect of the present invention, the torque sensor, in any of the first to third aspects, has a fastener for fastening a spacer and a second plate-shaped member, and a membrane-type strain gauge, each arranged on a circumference having a specific center (O). The fourth aspect is even more effective in accurately detecting torque.

[0060] The torque sensor of the fifth aspect of the present invention has a plurality of film-type strain gauges, each of which is arranged at equal intervals on the circumference, in the fourth aspect. The fifth aspect is even more effective in terms of accurately detecting torque.

[0061] A robot (100) according to a sixth aspect of the present invention includes a robot arm (110), a torque sensor of any of the first to fifth aspects fixed to the robot arm, and a robot hand (120) fixed to the torque sensor. The sixth aspect is more effective in terms of detecting the torque from the robot hand within a range of desired resolution.

[0062] According to the above configuration, the reliability of the torque sensor is increased, and miniaturization and flexible setting of resolution become possible. This invention is expected to contribute to promoting the further utilization of torque sensors, and is expected to contribute, for example, to achieving Sustainable Development Goal 9, "Build resilient infrastructure, promote inclusive and sustainable industrialization and foster innovation," advocated by the United Nations.

[0063] The present invention is not limited to the embodiments described above, and various modifications are possible within the scope of the claims. Embodiments obtained by appropriately combining the technical means disclosed in different embodiments are also included in the technical scope of the present invention. [Explanation of symbols]

[0064] 1 Torque sensor 10 First plate-shaped member 20 Second plate-shaped member 30 grooves 31 Annular section 32A, 32B, 32C recess 33 Liaison Department 40 Spacers 50 Printed Wiring 51A, 51B, 51C Membrane strain gauges 52A, 52B, 52C Membrane wiring 60 Through holes 70 Sealing material 80 Outer edge 81A, 81B, 81C, 81D holes 82A, 82B holes 83A, 83B, 83C, 83D Hole 84A, 84B, 84C screw holes 90 Outer area 91 Outer region 100 robots 110 Robot Arm 120 Robot Hands 131, 133, 134 screws 132 pins 140 Flexible circuit boards

Claims

1. The first plate-shaped member and A second plate-shaped member opposite to the first plate-shaped member, The device comprises a plate-shaped spacer which is integrated with the first plate-shaped member and fastened to the second plate-shaped member, A recess is formed on the outer edge of the spacer. On the main surface of the second plate-shaped member facing the first plate-shaped member, a membrane-like strain gauge disposed within the recess and a membrane-like wiring connected to the membrane-like strain gauge are formed in the outer peripheral region that extends beyond the spacer. A torque sensor characterized by the following features.

2. A sealing material for sealing the film-like strain gauge is filled into the recess. The torque sensor according to feature 1.

3. It includes a communication portion that connects the recess and the outer side of the torque sensor, The aforementioned communication portion includes a connecting portion that opens on the side surface of the torque sensor. The aforementioned membrane-like wiring is arranged in the communication section. The torque sensor according to claim 1 or 2.

4. A fastener for fastening the spacer and the second plate-shaped member, and the film-shaped strain gauges are each arranged on a circumference having a specific center, The torque sensor according to claim 1 or 2.

5. The present invention has a plurality of film-like strain gauges, each of which is arranged at equal intervals on the circumference. The torque sensor according to feature 4.

6. A robot arm, a torque sensor according to claim 1 fixed to the robot arm, and a robot hand fixed to the torque sensor. A robot characterized by the following features.

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