Vibration actuator

Abstract

To provide a vibration actuator which is capable of manufacturing a suspension having an appropriate internal loss, is cost-effective, and has excellent vibration characteristics.SOLUTION: A vibration actuator includes: a case 2; a coil 3 provided in the case 2; and a movable element 4 vibrating along a vibration axis line O of the case 2. There is provided a suspension 5 which has an outer peripheral part 51 fixed to the case 2 and an inner peripheral part 52 fixed to the movable element 4, and reciprocally movably supports the movable element 4 in the direction of a vibration axis line O. The suspension 5 has a deformation region 34 in a radial direction of the movable element 4. The deformation region 34 is provided with at least either a circular protrusion 53a or a recess 53b around the vibration axis line O of the movable element 4.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a vibration actuator, and in particular to a small and lightweight vibration actuator used for mobile terminals such as mobile phones and smartphones, controllers of game machines and the like.

Background Art

[0002] Conventionally, in communication equipment such as mobile phones, there is a notification method using vibration that employs a vibration actuator (or a vibration motor) as a method of notifying people of an incoming call or an alarm. In recent years, vibration actuators have also been used in the fields of movies, games, and VR (Virtual Reality), for example, as a rendering effect for action scenes and as one of the feedback means for players. Reality is improved by stimulating human tactile sensation through vibration.

[0003] Some vibration actuators adopt a method in which an eccentric weight is rotated by a motor to generate vibration through inertial force. However, the method using a rotary motor generates vibration by the inertial force of the eccentric weight, so it has the disadvantage that the reaction from when the eccentric weight starts rotating until vibration can be felt as a tactile sensation is slow, which impairs reality.

[0004] Therefore, as an actuator for obtaining more realistic tactile sensation, for example, as shown in Patent Document 1, a voice coil type vibration actuator is sometimes adopted. In such a vibration actuator, a mover having a magnet is arranged in a cylindrical case with a suspension, a coil fixed to the case is arranged around the mover, and the mover is reciprocated within the case by energizing the coil.

Prior Art Literature

Patent Literature

[0005]

Patent Document 1

[0006] Patent Document 1 describes the use of multiple spiral-shaped leaf springs formed by sheet metal processing from stainless steel plates as a suspension for suspending a movable element. However, due to the physical properties of stainless steel plates, the internal loss is low, making it difficult to control the amplitude at the actuator's resonant frequency, which hinders miniaturization. In particular, since the thickness of stainless steel plate springs is uniform throughout, while deformation in the thickness direction is possible, deformation from the inner circumference to the outer circumference, torsional deformation between the axis and the outer circumference, and furthermore, it is difficult to change the elastic modulus near the inner circumference and near the outer circumference. As a result, it has the disadvantage of not being able to obtain the various spring characteristics required for the suspension of a vibration actuator.

[0007] One method to address these problems has been conventionally proposed: using stainless steel leaf springs and then adding a metal or resin vibration damping member separately from the leaf spring to dampen vibrations generated in the suspension and obtain the desired vibration characteristics. However, using a vibration damping member in combination with a leaf spring increases material and processing costs, leading to higher overall costs. Furthermore, the precise positioning and bonding of the leaf spring and vibration damping member complicates the assembly process.

[0008] This invention was proposed to solve the problems of the prior art described above. The objective of this invention is to enable the manufacture of suspensions with appropriate internal losses and to provide a vibration actuator with excellent vibration characteristics at low cost. [Means for solving the problem]

[0009] The vibration actuator of the present invention has the following configuration. (1) Case. (2) A coil provided in the case. (3) A movable element that vibrates along the vibration axis of the case. (4) At least one that has an outer circumference fixed to the case and an inner circumference fixed to the movable element, and that supports the movable element so as to be able to reciprocate in the direction of the vibration axis Having a nonwoven fabric structure or a woven fabric structure A plate-shaped suspension. (5) The suspension has a deformable region in the radial direction of the movable element. (6) The deformation region is provided with at least one of a circular convex portion and a concave portion centered on the vibration axis of the movable element. Furthermore, the deformation region has a wave-shaped cross-section. .

[0010] The vibration actuator of the present invention can employ the following configuration. (1) The suspension is made of a material containing fibers. (2) The suspensions are provided on both ends of the movable element, each consisting of a plate-like body having a nonwoven fabric structure or a woven fabric structure. (3) The suspension, which is made of a plate-like body having a nonwoven fabric structure or a woven fabric structure, is provided on one end of the movable element, and the suspension, which is made of a metal plate, is provided on the other end of the movable element. (4) The suspension and the movable element are fixed together by a fixing part located radially inward of the movable element. (5) The movable element is provided with a projection that extends toward the suspension side. (6) The suspension has a projection on its inner circumference that protrudes toward the movable element. (7) The suspension is such that the fixing position of the outer circumference and the fixing position of the inner circumference are at different heights. (8) The suspension is provided with an opening through which the plate-like body passes. [Effects of the Invention]

[0011] According to the present invention, it becomes possible to manufacture a suspension with appropriate internal loss, and a vibration actuator with excellent vibration characteristics can be provided at low cost. [Brief explanation of the drawing]

[0012] [Figure 1] It is a cross-sectional view cut along the vibration axis direction showing the overall configuration of the first embodiment. [Figure 2] It is an exploded perspective view showing the overall configuration of the first embodiment. [Figure 3] It is a perspective view of the suspension in the first embodiment as viewed from above. [Figure 4] It is a perspective view of the suspension in the first embodiment as viewed from below. [Figure 5] It is a cross-sectional view of the suspension in the first embodiment as viewed from above. [Figure 6] It is a cross-sectional view of a suspension having different thicknesses in the circumferential direction. [Figure 7] It is a cross-sectional view of a suspension having different thicknesses in the radial direction. [Figure 8] It is an exploded perspective view of a suspension whose thickness is changed by partially laminating members. [Figure 9] It is a cross-sectional view of a suspension using hot-melt fibers. [Figure 10] It is a cross-sectional view of a suspension in which a resin layer is formed on a nonwoven fabric or a woven fabric. [Figure 11] It is a cross-sectional view showing another embodiment of a method for fixing the outer peripheral portion of a suspension to a case. [Figure 12] It is a cross-sectional view cut along the vibration axis direction showing the overall configuration of the second embodiment. [Figure 13] It is an exploded perspective view of the entire second embodiment. [Figure 14] It is an exploded perspective view of a suspension using a leaf spring and a damping member according to the second embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0013] [1. First Embodiment] [1-1. Configuration] The vibration actuator 1 of the first embodiment will be described below with reference to Figures 1 and 2. The vibration actuator 1 of this embodiment has members of the same shape along a plane of symmetry (indicated by the reference numeral S in Figure 1) perpendicular to the central axis at a point 1 / 2 in the direction of the vibration axis O. Therefore, regarding the configuration of each member with respect to the plane of symmetry as the boundary, only the configuration of one side of the symmetrical shape will be described, and the other side will be omitted from the description by assigning the same reference numeral unless there is a special need to do so.

[0014] (1) Case and coil The vibration actuator 1 mainly comprises a cylindrical case 2 forming the outer shell, a coil 3 provided inside the case 2, a movable element 4 that vibrates along the vibration axis O of the case 2, a suspension 5 whose inner circumference is fixed to the movable element 4, and a frame 6 that fixes the suspension 5 to the case 2.

[0015] Case 2 comprises a cylindrical case body 10 and a cover case 11 that closes the openings at both ends thereof. In this embodiment, the case body 10 and the cover case 11 are each made of a resin material such as ABS, but are not limited to resin materials. A coil 3 and a yoke 20 are inserted into Case 2. That is, a cylindrical yoke 20 made of a soft magnetic material is arranged in the case body 10 so as to follow its inner circumference. A coil 3 is provided on the inner circumference of the yoke 20, and is attached to the yoke 20 in a state of being electrically insulated from the yoke 20.

[0016] The coil 3 is positioned on the outer circumference of the protective member 21 inserted inside the case body 10, maintaining a predetermined distance from the outer circumference of the movable element 4. To prevent contact between the movable element 4 and the coil 3 during vibration, the protective member 21 has an inner circumferential wall on the inner circumference of the case body 10 so as to cover the surface of the coil 3 on the movable element 4 side, and a gap is provided between the inner circumferential wall of the protective member 21 and the outer circumferential surface of the movable element 4.

[0017] (2) Mover The movable element 4 is positioned inside the case body 10 so as to vibrate along the vibration axis O, which is the central axis of the cylindrical case 2. The movable element 4 includes a disc-shaped magnet 30, a disc-shaped pole piece 31 positioned on the surface of the magnet 30, and a weight 32 positioned on the surface of the pole piece 31.

[0018] The magnet 30 is magnetized in the direction of the vibration axis O. The pole piece 31 is made of a soft magnetic material and is attached to the magnet 30 by the magnetic attraction force of the magnet 30 and adhesive. The pole piece 31 has a convex portion 31a in the center that is aligned with the vibration axis O, and the corresponding weight 32 has a concave portion 32a in the center that is aligned with the vibration axis O. The pole piece 31 and the weight 32 are integrated by the engagement of the convex portion 31a of the pole piece 31 and the concave portion 32a of the weight 32. The integration of the magnet 30, pole piece 31, and weight 32 is not limited to attachment by magnetic attraction force or adhesive, but may also be integrated by mechanical means such as press-fitting or screw fastening, or by other means.

[0019] The movable element 4 is provided with a projection 32b extending toward the suspension 5. The weight 32 in this embodiment is made of a non-magnetic material and has a projection 32b extending toward the suspension 5 in the direction of the vibration axis O, and a disc-shaped base 32c that spreads out in the direction of the outer circumference of the vibration axis O from the base portion of the projection 32b (towards the center in the direction of the vibration axis O). The projection 32b provided on the weight 32 stabilizes the coaxiality between the suspension 5 and the movable element 4. As a result, the fixing of the suspension 5 and the movable element 4 becomes stronger, and as a result, stable vibration can be achieved.

[0020] A hole is provided in the center of the projection 32b of at least one of the weights 32, along the direction of the vibration axis O. The hole in the center of the weight 32 may be a through hole or a hole that is closed on one side or in the center.

[0021] (3) Suspension The suspension 5 is composed of a plate-like body having a fiber-containing material. The fiber-containing material includes nonwoven or woven fabric structures made of natural or chemical fibers, and also includes materials formed from thread-like materials. As shown in Figures 3 to 5, the outer periphery 51 of the suspension 5 is formed in a flat plate shape, and concentric circular protrusions 53 are formed from the outer periphery 51 to the central inner periphery 52.

[0022] As shown in the cross-sectional view of Figure 1, the suspension 5 has its outer circumference 51 fixed to the case 2 and its inner circumference 52 fixed to the movable element 4, supporting the movable element 4 so that it can reciprocate in the direction of the vibration axis O. That is, the outer circumference 51 of the suspension 5, which is formed in a flat plate shape, is sandwiched between the lower surface of the outer circumference of the cover case 11 and the upper surface of the frame 6. In this case, the outer circumference 51 of the suspension 5 is fixed to the frame 6 by ultrasonic welding. In this embodiment, a frame 6 separate from the case 2 is used, but a case 2 in which the part corresponding to the frame 6 is integrally provided in the case body 10 can also be used. The fixing position where the outer circumference 51 is fixed to the case 2 can be formed at the same height in the direction of the vibration axis O as the fixing position where the inner circumference 52 is fixed to the movable element 4. The outer circumference 51 of the suspension 5 does not have to be sandwiched, and may be fixed to at least one side by adhesive or welding.

[0023] A projection 54 is provided at the center of the inner circumference 52 of the suspension 5, projecting toward the movable element 4. This projection 54 is superimposed on the through-hole of the weight 32 and fixed by a fixing part 33, which will be described later.

[0024] The suspension 5 has a deformation region 34 in the radial direction of the movable element 4. The deformation region 34 is the region in which the suspension 5 deforms when the movable element 4 vibrates in the direction of the vibration axis O. The deformation region 34 is the outer diameter portion of the part sandwiched between the fixed portion 33 and the projection portion 32b, and the inner diameter portion of the part sandwiched between the lower surface of the outer circumference of the cover case 11 and the upper surface of the frame portion 6. In this embodiment, as shown in Figure 1, the deformation region 34 is provided with at least one circular protrusion or recess 53 centered in the direction of the vibration axis O of the movable element 4. Note that the protrusion or recess 53 is not necessarily limited to a shape having both protrusions and recesses, and may be at least one protrusion or at least one recess. As shown in the cross-sectional view of Figure 5, the circular protrusion or recess 53 provided on the suspension 5 has a wave-shaped cross-section in this embodiment, with an annular protrusion 53a that protrudes above the surface of the flat outer circumference 51 and an annular recess 53b that protrudes below the surface of the flat outer circumference 51. The deformation of the bent portion where each surface and both surfaces of the convex portion 53a and concave portion 53b are connected absorbs the displacement between the outer circumference 51 and the inner circumference 52 caused by the vibration of the movable element 4.

[0025] The suspension 5 of this embodiment is formed from a plate-like body impregnated with a resin into a nonwoven or woven fabric. The fibers constituting the nonwoven or woven fabric are preferably a blend of cotton, aramid fibers, or both. The resin impregnated into the nonwoven or woven fabric is preferably a thermosetting resin, and in particular, phenolic resin or a blend of phenolic resin and rubber is preferred due to its excellent durability, flexibility, and heat resistance, but the thermosetting resin is not limited to these. After impregnating the woven fabric or plate-like body having a woven fabric structure with these resins, the suspension 5 is formed by heat-forming it by pressing using a molding die and cutting the inner and outer diameters.

[0026] (4) Fixed part The fixing portion 33 secures the suspension 5 and the movable element 4, and is positioned radially inward of the movable element 4. The fixing portion 33 is provided on the projection 32b of the weight 32 and is located in a position that includes the vibration axis. The fixing portion 33 secures the suspension 5 to the weight 32, which is a separate component from the components that form the magnetic circuit. The fixing portion 33 may be formed by crimping a pin extending from the weight 32, or it may be secured by inserting a fixing pin from the opposite direction to the movable element 4 in the suspension 5, or it may be secured by other methods.

[0027] [1-2. Operation of the Embodiment] In the vibration actuator 1 configured as described above, when the coil 3 is not energized, the movable element 4 supported by the suspension 5 is located in the center in the direction of the vibration axis O, as shown in Figure 1.

[0028] When the movable element 4 is vibrated, alternating current is passed through the coil 3 via the terminal in a direction that alternately generates magnetic fields of opposite polarity. That is, like polarity is generated in adjacent parts of the coil 3. For example, in the case of polarity, a thrust force is generated in the movable element 4 toward one side in the direction of the vibration axis O, and if the current flowing through the coil 3 is reversed, a thrust force is generated in the movable element 4 toward the other side in the direction of the vibration axis O. In this way, when alternating current is passed through the coil 3, the movable element 4 vibrates along the vibration axis O while receiving biasing forces from both sides by the suspension 5.

[0029] The thrust generated in the movable element 4 is basically equivalent to the thrust given based on Fleming's left-hand rule. In this embodiment, since the two symmetrically arranged coils 3 are fixed to the case 2, a thrust is also generated in the movable element 4 to which the magnet 30 etc. is attached, as a reaction force to the force generated in the two coils 3.

[0030] [1-3. Effects of the Embodiment] (1) In this embodiment, the vibration actuator 1 has a suspension 5 made of a plate-like body having a nonwoven fabric or woven fabric structure. Therefore, it is possible to manufacture a suspension 5 with appropriate internal loss, and it is not necessary to provide a vibration damping member like in a metal suspension, making it possible to provide a small vibration actuator with excellent vibration characteristics at low cost.

[0031] (2) In this embodiment, the plate-like body is formed by impregnating a nonwoven or woven fabric with resin, and the fibers constituting the nonwoven or woven fabric are fixed by the resin. Therefore, it is possible to obtain the mechanical resistance of the movable element 4 by utilizing the losses of the resin material, and the amplitude at the maximum acceleration frequency can be suppressed. In addition, the sharpness of the resonance peak can be suppressed, and the change in acceleration associated with the change in resonance frequency can be suppressed. As a result, it is possible to prevent displacement and damage to the suspension 5 and improve the durability of the vibration actuator 1.

[0032] (3) In this embodiment, the suspension 5 has an uneven portion 53, which makes it possible to reinforce the strength of the suspension 5 while also providing flexibility. Furthermore, by adjusting the shape and extent of the uneven portion 53, the overall shape rigidity is improved, causing the resonance to shift to a higher frequency and disperse, thereby suppressing the occurrence of a specific large peak. Thus, in this embodiment, it is easy to form a suspension 5 with appropriate internal loss, and a vibration actuator that can obtain smooth vibration characteristics can be provided.

[0033] (4) In this embodiment, the suspension 5 has an uneven surface 53, so there is no rotational deformation with respect to the vibration axis O direction of the movable element 4, and a linear response in the amplitude direction is possible. In addition, radial vibrations are absorbed by the uneven surface 53, and the vibration characteristics in the axial direction can be further improved.

[0034] [2. Variations of suspension] The suspension 5 of the first embodiment is formed from a plate-like body obtained by impregnating a nonwoven fabric or woven fabric with resin, but the plate-like body is not limited to a resin-impregnated body, nor is its shape limited to a corrugated cross-section. Specific modifications of the plate-like body are described below.

[0035] (1) The suspension 5 shown in Figure 6 is a suspension 5 having a corrugated cross-section with uneven surfaces 53, in which the thickness is varied in the radial direction. Unlike stainless steel leaf springs, in the case of nonwoven or woven fabrics, it is easy to control the thickness during manufacturing, so by varying the thickness of the suspension 5 in each part, the desired vibration characteristics can be obtained.

[0036] (2) The suspension 5 shown in Figure 7 is divided radially, with each divided region having a different thickness, where a is the thick-walled section and b is the thin-walled section. In this suspension 5 as well, the desired vibration characteristics can be obtained by varying the wall thickness of the suspension 5 in each part, or by adjusting the number of divisions and the area of ​​the divisions.

[0037] (3) The suspension 5 in Figure 8 is formed by partially laminating another material 507 onto the surface of a sheet-like flat plate portion 503 to change its thickness. When forming a suspension by pressing a large area sheet-like material, it can be difficult to form a thicker portion in part of the material. With this suspension 5, the thickness of the suspension 5 can be partially changed simply by laminating another material 507, making manufacturing easier and allowing for the easy creation of suspensions with thicker portions of complex shapes.

[0038] (4) The suspension 5 shown in Figure 9 is made of a nonwoven or woven fabric which contains heat-meltable fibers in part or all thereof, and the fibers constituting the nonwoven or woven fabric are fixed by the heat-meltable fibers. The heat-meltable fibers consist of heat-resistant high modulus fibers, high melting point fibers, low melting point fibers, or a combination of fibers selected from these. In particular, it is preferable that the heat-resistant high modulus fibers consist of polyamide fibers, and the high melting point fibers and low melting point fibers consist of polyester fibers, as this provides excellent rigidity, elasticity, durability, and heat resistance.

[0039] (5) The suspension 5 in Figure 10 is made of a nonwoven or woven fabric with a resin layer 508 formed on it. That is, the fibers are fixed to the plate-like body by the resin layer 508 formed on its surface or back surface. The resin layer 508 is made of a resin film laminated on the surface of the plate-like body or a coated resin. In particular, if the resin layer 508 is made of one or more layers of PET (polyethylene terephthalate), PP (polypropylene), PI (polyimide), or PEI (polyetherimide), it is possible to manufacture a suspension with appropriate internal loss. The plate-like body may also be made of PET (polyethylene terephthalate), PP (polypropylene), PI (polyimide), PEI (polyetherimide), thermosetting elastomer, PBT (polybutylene terephthalate), rubber, etc.

[0040] (6) In the suspension 5 shown in Figure 11, an elastic part 509 with a semicircular cross-section is integrally provided at the boundary between the outer circumference 51 of the suspension 5 and the corrugated cross-section uneven part 53 and the flat plate part 503. In this modified example, since the vibration between the outer circumference 51 fixed to the case 2 and the vibrating uneven part 53 and flat plate part 503 is mitigated by the elastic part 509, there is no risk of the fixed part of the suspension 5 breaking, and an excellent service life can be obtained.

[0041] [3. Second Embodiment] Figures 12 to 14 show a second embodiment of the present invention. In the first embodiment, suspensions 5 made of nonwoven fabric or woven fabric plate-like bodies are provided on both ends of the movable element 4. In the second embodiment, however, a suspension 5 made of nonwoven fabric or woven fabric plate-like body is provided on one end of the movable element 4 (upper in the figure), and a conventional suspension 600 made of a metal plate is provided on the other end of the movable element 4 (lower in the figure). Furthermore, a vibration damping member 601 made of a metal plate is provided superimposed on the suspension 600 made of a metal plate.

[0042] In the second embodiment having such a configuration, it becomes possible to make the vibration characteristics of the forward and return sides of the movable element 4 different, making it possible to apply the actuator of the present invention to equipment that requires unique vibration characteristics. In particular, the metal suspension 600 is excellent in terms of external impact resistance and durability, and can be applied to various applications when combined with a plate-shaped suspension 5 made of nonwoven or woven fabric with low internal loss.

[0043] [4. Other Embodiments] As described above, several embodiments of the present invention have been explained, but this is not intended to limit the scope of the invention. As listed below, it is possible to implement the invention in various other forms without departing from the spirit of the invention, and various omissions, substitutions, and modifications are permitted. These embodiments, combinations thereof, and variations thereof are included in the scope and spirit of the invention, as well as in the claims of the invention and its equivalents. The following are examples of embodiments included in the present invention.

[0044] (1) The suspension 5 of this embodiment may be composed of one or more leaf springs made of metal such as stainless steel, or it may be composed of woven fabric or a plate-like body having a woven fabric structure, or it may be composed of resin, rubber, etc. The material of the suspension 5 is preferably a material that has excellent durability and flexibility.

[0045] (2) The suspension 5 and the weight 32 can be fixed together, and it does not matter which side has the protrusion, recess or through hole. For example, the center of the suspension 5 may have a through hole along the vibration axis, and the center of the weight 32 may have a protrusion opposite to the through hole of the suspension 5, and the weight 32 and the suspension 5 may be fixed together by crimping. The protrusion of the weight 32 that protrudes from the surface of the suspension 5 is heated and pressurized by a jig and crushed, so that the surface of the weight 32 and the suspension 5 are crimped together in an overlapping state. The means of fixing the suspension 5 and the weight 32 are not limited to crimping, and they can also be fixed (connected) by other methods such as screwing or adhesive. When a protrusion is provided on the suspension 5 or the weight 32, it is not limited to a circle, but may be a triangle, a square, or other polygon.

[0046] (3) In this embodiment, case 2 is cylindrical and the movable element 4 is substantially cylindrical, but the shapes of case 2 and movable element 4 are not limited to these and may be polygonal or other shapes. Also, in this embodiment, case 2 is equipped with a cover case 11 that closes the openings at both ends, but the shape of case 2 is not limited to this and may be a bottomed cylindrical case with a cover over the opening or without a cover.

[0047] (4) In this embodiment, the coil 3 is provided with a protective member 21, but it is not necessary to provide the protective member 21 to the coil 3. The coil 3 is fixed to the yoke 20 with adhesive or the like so as to be positioned at a predetermined distance from the outer circumference of the movable element 4. In this embodiment, since the protective member 21 is not provided to the coil 3, a smaller design is possible.

[0048] (5) In this embodiment, the suspension 5 has an outer circumference 51 fixed to the case 2 and an inner circumference 52 fixed to the movable element 4. The heights of the fixing positions of the outer circumference 51 and the inner circumference 52 may be different. If the height of the fixing position of the inner circumference 52 is lower than that of the fixing position of the outer circumference 51, a wider vibration space for the movable element 4 is formed, which allows for miniaturization of the device.

[0049] (6) The suspension 5 of this embodiment may be provided with an opening that penetrates the plate-like body. The opening allows for control of the vibration characteristics of the suspension 5, and when the suspension 5 vibrates, air passes through the opening, thereby reducing vibration resistance and operating noise. There are no limitations on the shape of the opening, and one or more slits and / or holes may be provided as long as they provide the effects described above.

[0050] (7) In the above embodiment, the vibration actuator 1 was shown to have coils 3 arranged symmetrically with respect to a plane of symmetry perpendicular to the central axis at a point 1 / 2 in the direction of its vibration axis O. However, the vibration actuator 1 is not limited to this embodiment and may be an actuator having one coil 3. [Explanation of symbols]

[0051] 1. Vibration actuator 2 cases 3 coils 4 Mover 5 Suspension 51 Outer periphery 52 Inner circumference 53 Uneven part 53a Convex part 53b Recess 54 Protrusion 6 Frame section 10 Case body 11 Cover Cases 20 York 21 Protective component 30 Magnets 31 pole pieces 31a Convex part 32 weight 32a Recess 32b Protrusion 32c bottom 33 Fixed part 34 Deformation Region 503 Flat plate part 507 Other materials 508 Resin layer 509 Elastic part 600 Suspension 601 Vibration damping material

Claims

1. The case and A coil provided in the aforementioned case, A movable element that vibrates along the vibration axis of the case, The suspension comprises a plate-shaped body having at least one nonwoven fabric structure or woven fabric structure, the outer circumference of which is fixed to the case, the inner circumference of which is fixed to the movable element, and which supports the movable element so as to be able to reciprocate in the direction of the vibration axis, The suspension has a deformable region in the radial direction of the movable element, The deformation region is provided with at least one of a circular convex portion and a concave portion centered on the vibration axis of the movable element, and the deformation region has a wave-shaped cross-section. Vibration actuator.

2. The vibration actuator according to claim 1, wherein the suspension is provided on both ends of the movable element, each consisting of a plate-like body having a nonwoven fabric structure or a woven fabric structure.

3. The vibration actuator according to claim 1, wherein the suspension made of a plate-like body having a nonwoven fabric structure or a woven fabric structure is provided on one end of the movable element, and the suspension made of a metal plate is provided on the other end of the movable element.

4. The vibration actuator according to claim 1 or claim 2, wherein the suspension and the movable element are fixed by a fixed part arranged radially inward of the movable element.

5. The vibration actuator according to claim 4, wherein the movable element has a projection extending toward the suspension side.

6. The vibration actuator according to claim 4, wherein the suspension has a protrusion in the inner circumference that protrudes toward the movable element.

7. The vibration actuator according to claim 1 or claim 2, wherein the suspension has different heights for the fixing position of the outer circumference and the fixing position of the inner circumference.

8. The vibration actuator according to claim 1 or claim 2, wherein the suspension is provided with an opening through which the plate-like body passes.

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