Dry air supply device

Abstract

To improve the durability of a pneumatic device by appropriately adjusting the dew-point temperature of dry air supplied to the pneumatic device.SOLUTION: A first flow rate control valve 20 adjusts a flow rate of dry air flowing through a main flow path 51 so that the flow rate of the dry air detected by a first flow meter 21 can become a flow rate where the dew-point temperature of the dry air does not exceed a preset dew-point temperature. A dry air supply device 10 adjusts the opening of a second flow rate control valve 28 so that an air flow rate detected by a second flow meter 29 can be a flow rate calculated on the basis of a saturation water vapor content of the dry air derived from a dew-point temperature detected by a first dew point meter 22, a saturation water vapor content of air derived from a dew-point temperature detected by a second dew point meter 30, a saturation water vapor content derived from the preset dew-point temperature, and the flow rate of the dry air detected by the first flow meter 21, and adjusts a dew-point temperature of the dry air flowing through a merging flow path 53 to the preset dew-point temperature.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a dry air supply device.

Background Art

[0002] In a dry air supply device, in order to supply air supplied from an air supply source as dry air to pneumatic equipment, it is necessary to remove moisture contained in the air supplied from the air supply source to obtain dry air. Accordingly, as disclosed in, for example, Patent Document 1, moisture contained in air supplied from an air supply source is removed by a dehumidifying unit. Therefore, the dry air supply device includes a supply line having a dehumidifying unit. Then, the dry air supply device supplies the dry air from which moisture has been removed by the dehumidifying unit to pneumatic equipment via the supply line.

Prior Art Literature

Patent Literature

[0003]

Patent Document 1

Summary of the Invention

Problem to be Solved by the Invention

[0004] By the way, in such a dry air supply device, the dew point temperature of the dry air supplied to the pneumatic equipment fluctuates as the consumption flow rate of dry air at the pneumatic equipment fluctuates. For example, as the flow rate of dry air consumed by the pneumatic equipment increases, the dew point temperature of the dry air supplied to the pneumatic equipment rises. Here, in the dry air supply device, the dew point temperature of the dry air supplied to the pneumatic equipment is adjusted so as not to exceed a preset set dew point temperature. Specifically, for example, the flow rate of dry air flowing through the supply line is adjusted such that the flow rate of dry air flowing through the supply line is a flow rate at which the dew point temperature of the dry air does not exceed the set dew point temperature. By doing so, it is avoided that dry air having a dew point temperature exceeding the set dew point temperature is supplied to the pneumatic equipment via the supply line.

[0005] On the other hand, as the flow rate of dry air consumed by pneumatic equipment decreases, the dew point temperature of the dry air supplied to the pneumatic equipment also decreases. In this case, conventional dry air supply systems cannot adjust the dew point temperature of the dry air supplied to the pneumatic equipment in response to the decrease in the flow rate of dry air consumed by the pneumatic equipment. If dry air with too low a dew point temperature is supplied to the pneumatic equipment, there is a risk that the lubricant used in the pneumatic equipment will dry out due to exposure to the dry air. If the lubricant in the pneumatic equipment dries out, there is a risk that the durability of the pneumatic equipment will deteriorate. Therefore, it is desirable to improve the durability of pneumatic equipment by appropriately adjusting the dew point temperature of the dry air supplied to the pneumatic equipment. [Means for solving the problem]

[0006] The following describes various methods for solving the above problems. [Aspect 1] The supply line includes a dehumidifier that removes moisture contained in the air supplied from the air source, A dry air supply device that supplies dry air from which moisture has been removed in the dehumidification section to pneumatic equipment via the supply line, The aforementioned supply line is The main channel having the dehumidifying section, A branch channel that branches off from the main channel at a point closer to the air supply source than the dehumidifier, bypasses the dehumidifier, and merges with the main channel at a point closer to the pneumatic equipment than the dehumidifier, The system includes a merging channel, the first end of which is connected to the merging point of the main channel and the branch channel, and the second end of which is connected to the pneumatic equipment. A first flow meter detects the flow rate of dry air flowing through the main channel after moisture has been removed in the dehumidification section, A first flow control valve adjusts the flow rate of the dry air flowing through the main channel so that the flow rate of the dry air detected by the first flow meter does not exceed a preset dew point temperature of the dry air. A first dew point meter for detecting the dew point temperature of the dry air flowing through the main channel, A second flow control valve for adjusting the flow rate of air flowing through the aforementioned branched channel, A second flow meter for detecting the flow rate of air flowing through the aforementioned branch channel, The system includes a second dew point meter for detecting the dew point temperature of the air flowing through the aforementioned branch channel, A dry air supply device characterized by adjusting the opening of the second flow control valve so that the air flow rate detected by the second flow meter becomes the flow rate calculated based on the amount of saturated water vapor in the dry air derived from the dew point temperature detected by the first dew point meter, the amount of saturated water vapor in the air derived from the dew point temperature detected by the second dew point meter, the amount of saturated water vapor derived from the set dew point temperature, and the air flow rate detected by the first flow meter, thereby adjusting the dew point temperature of the dry air flowing through the confluence channel to the set dew point temperature.

[0007] [Aspect 2] The main flow path is provided with a first check valve to prevent the backflow of dry air from the confluence flow path to the main flow path. The dry air supply device according to [Aspect 1], characterized in that the branch channel is provided with a second check valve to prevent backflow of dry air from the confluence channel to the branch channel.

[0008] [Aspect 3] The dry air supply device according to [Aspect 1] or [Aspect 2], characterized in that it includes a control unit that automatically controls the opening degree of the second flow control valve so that the flow rate of air detected by the second flow meter becomes a flow rate calculated based on the amount of saturated water vapor of the dry air derived from the dew point temperature detected by the first dew point meter, the amount of saturated water vapor of the air derived from the dew point temperature detected by the second dew point meter, the amount of saturated water vapor derived from the set dew point temperature, and the flow rate of the dry air detected by the first flow meter.

[0009] [Aspect 4] A drying air supply device according to any one of [Aspect 1] to [Aspect 3], characterized in that it comprises a flow path unit in which the main flow path and the branch flow path are integrated. [Effects of the Invention]

[0010] According to this invention, the durability of pneumatic equipment can be improved by appropriately adjusting the dew point temperature of the dry air supplied to the pneumatic equipment. [Brief explanation of the drawing]

[0011] [Figure 1] Figure 1 is a circuit diagram illustrating a dry air supply device in an embodiment. [Modes for carrying out the invention]

[0012] Below, one embodiment of the drying air supply device will be described with reference to Figure 1. <Overview of the Dry Air Supply System> As shown in Figure 1, the dry air supply device 10 includes a first main line filter 11, a dryer 12, a second main line filter 13, and a first tank 14. The dry air supply device 10 also includes a first filter 15, a first oil mist filter 16, a first pressure reducing valve 17, and a first pressure gauge 18. The dry air supply device 10 also includes a dehumidification unit 19, a first flow control valve 20, a first flow meter 21, a first dew point meter 22, and a first check valve 23. The dry air supply device 10 also includes a second filter 24, a second oil mist filter 25, a second pressure reducing valve 26, a second pressure gauge 27, a second flow control valve 28, a second flow meter 29, a second dew point meter 30, and a second check valve 31. The dry air supply device 10 includes a second tank 32, a third pressure gauge 33, a third dew point meter 34, and a third check valve 35. The dry air supply device 10 also includes a flow path unit 36. The flow path unit 36 ​​includes a housing 37. The housing 37 has a supply port 38 and an outlet port 39.

[0013] The dry air supply device 10 is equipped with a supply pipe 40. The first end of the supply pipe 40 is connected to an air supply source A1. The air supply source A1 is a compressor that compresses and discharges air. The second end of the supply pipe 40 is connected to a supply port 38 of the housing 37.

[0014] The supply piping 40 is equipped with a first main line filter 11, a dryer 12, a second main line filter 13, and a first tank 14. The first main line filter 11, the dryer 12, the second main line filter 13, and the first tank 14 are arranged in this order relative to the supply piping 40, from the air supply source A1 toward the supply port 38 of the housing 37. The air discharged from the air supply source A1 into the supply piping 40 flows in the order of the first main line filter 11, the dryer 12, the second main line filter 13, and the first tank 14.

[0015] The first main line filter 11 is configured to be capable of removing impurities such as oil, water, and foreign substances contained in air discharged from the air supply source A1 to the supply pipe 40. The dryer 12 is configured to be capable of removing moisture contained in air that has passed through the first main line filter 11. The second main line filter 13 is configured to be capable of removing impurities such as oil, water, and foreign substances contained in air from which moisture has been removed by the dryer 12. The first tank 14 is configured to be capable of temporarily storing air that has passed through the second main line filter 13. The air stored in the first tank 14 is supplied to the supply port 38 of the housing 37 via the supply pipe 40.

[0016] The housing 37 is provided with a first flow path 41. A first end of the first flow path 41 is connected to the supply port 38. A second end of the first flow path 41 is connected to the discharge port 39. The first flow path 41 is provided with a first filter 15, a first oil mist filter 16, a first pressure reducing valve 17, a first pressure gauge 18, a dehumidifying part 19, a first flow rate control valve 20, a first flow meter 21, a first dew point meter 22, and a first check valve 23. The first filter 15, the first oil mist filter 16, the first pressure reducing valve 17, the first pressure gauge 18, the dehumidifying part 19, the first flow rate control valve 20, the first flow meter 21, the first dew point meter 22, and the first check valve 23 are arranged in this order along the first flow path 41 from the supply port 38 toward the discharge port 39. Air flowing from the supply port 38 into the first flow path 41 flows through the first filter 15, the first oil mist filter 16, the first pressure reducing valve 17, the first pressure gauge 18, the dehumidifying part 19, the first flow rate control valve 20, the first flow meter 21, the first dew point meter 22, and the first check valve 23 in this order.

[0017] The first filter 15 is configured to be capable of removing dust and water droplets contained in air passing through the first filter 15. The first oil mist filter 16 is configured to be capable of removing fine oil particles contained in air passing through the first oil mist filter 16. The first pressure reducing valve 17 is configured to be capable of reducing the pressure of air passing through the first pressure reducing valve 17 such that the pressure on the downstream side of the first pressure reducing valve 17 in the first flow path 41 becomes a predetermined constant pressure. The first pressure gauge 18 is configured to be capable of detecting the pressure of air that has passed through the first pressure reducing valve 17.

[0018] The dehumidifying section 19 is configured to be capable of removing moisture contained in air. Therefore, the dehumidifying section 19 removes moisture contained in air supplied from the air supply source A1. Specifically, the dehumidifying section 19 is a heatless dryer that dehumidifies air by adsorbing moisture contained in air with a moisture absorbent. The heatless dryer is configured such that a dehumidification step of adsorbing moisture contained in air by the moisture absorbent and a regeneration step of regenerating the moisture absorbent are repeated.

[0019] The first flow rate control valve 20 is configured to be capable of adjusting the flow rate of dry air from which moisture has been removed by the dehumidifying section 19. The first flow meter 21 is configured to be capable of detecting the flow rate of dry air that has passed through the first flow rate control valve 20. The first dew point meter 22 is configured to be capable of detecting the dew point temperature of dry air from which moisture has been removed by the dehumidifying section 19. The first check valve 23 is configured to allow the flow of dry air from the upstream side to the downstream side of the first check valve 23 in the first flow path 41, and to block the flow of dry air from the downstream side to the upstream side of the first check valve 23 in the first flow path 41.

[0020] The housing 37 has a second flow path 42. The first end of the second flow path 42 is connected to the portion of the first flow path 41 between the supply port 38 and the first filter 15. Therefore, the second flow path 42 branches off from the first flow path 41. A portion of the air flowing from the supply port 38 through the first flow path 41 branches off from the first flow path 41 and flows into the second flow path 42. The second end of the second flow path 42 is connected to the portion of the first flow path 41 between the first check valve 23 and the outlet 39. Therefore, the second flow path 42 merges with the first flow path 41.

[0021] The second flow path 42 is equipped with a second filter 24, a second oil mist filter 25, a second pressure reducing valve 26, a second pressure gauge 27, a second flow control valve 28, a second flow meter 29, a second dew point meter 30, and a second check valve 31. The second filter 24, the second oil mist filter 25, the second pressure reducing valve 26, the second pressure gauge 27, the second flow control valve 28, the second flow meter 29, the second dew point meter 30, and the second check valve 31 are arranged in this order relative to the second flow path 42, from the first end to the second end. Air from the first end of the second flow path 42 flows in the order of the second filter 24, the second oil mist filter 25, the second pressure reducing valve 26, the second pressure gauge 27, the second flow control valve 28, the second flow meter 29, the second dew point meter 30, and the second check valve 31.

[0022] The second filter 24 is configured to remove dust and water droplets contained in the air passing through it. The second oil mist filter 25 is configured to remove fine oil particles contained in the air passing through it. The second pressure reducing valve 26 is configured to reduce the pressure of the air passing through it so that the pressure downstream of the second pressure reducing valve 26 in the second flow path 42 becomes a predetermined constant pressure. The second pressure gauge 27 is configured to detect the pressure of the air that has passed through the second pressure reducing valve 26.

[0023] The second flow control valve 28 is configured to adjust the flow rate of air flowing through the second flow path 42. The second flow meter 29 is configured to detect the flow rate of air flowing through the second flow path 42. The second dew point meter 30 is configured to detect the dew point temperature of air flowing through the second flow path 42. The second check valve 31 is configured to allow air to flow from upstream to downstream of the second check valve 31 in the second flow path 42, and to block air to flow from downstream to upstream of the second check valve 31 in the second flow path 42.

[0024] The dry air supply device 10 is equipped with a discharge pipe 43. The first end of the discharge pipe 43 is connected to the outlet 39. The second end of the discharge pipe 43 is connected to the pneumatic device A2. The pneumatic device A2 consists of a pneumatic valve A3 and a pneumatic cylinder A4.

[0025] The discharge piping 43 is equipped with a second tank 32, a third pressure gauge 33, a third dew point meter 34, and a third check valve 35. The second tank 32, the third pressure gauge 33, the third dew point meter 34, and the third check valve 35 are arranged in this order relative to the discharge piping 43, from the first end to the second end. The dry air discharged from the outlet 39 and flowing through the discharge piping 43 flows in the order of the second tank 32, the third pressure gauge 33, the third dew point meter 34, and the third check valve 35.

[0026] The second tank 32 is configured to temporarily store the dry air discharged into the discharge pipe 43 from the outlet 39. The third pressure gauge 33 is configured to detect the pressure of the dry air flowing through the discharge pipe 43. The third dew point meter 34 is configured to detect the dew point temperature of the dry air flowing through the discharge pipe 43. The third check valve 35 is configured to allow the flow of dry air from upstream to downstream of the third check valve 35 in the discharge pipe 43, and to block the flow of dry air from downstream to upstream of the third check valve 35 in the discharge pipe 43.

[0027] <Supply Line> The supply pipe 40, supply port 38, first flow path 41, second flow path 42, discharge port 39, and discharge pipe 43 constitute the supply line 50. Therefore, the dry air supply device 10 is equipped with a supply line 50 having a dehumidifier 19. The dry air supply device 10 then supplies dry air, from which moisture has been removed by the dehumidifier 19, to the pneumatic equipment A2 via the supply line 50.

[0028] In the first channel 41, the portion from the first end of the first channel 41 to the point where it merges with the second channel 42 constitutes a main channel 51 having a dehumidifier 19. Therefore, the supply line 50 has a main channel 51 having a dehumidifier 19. The second channel 42 branches off from a portion of the main channel 51 that is closer to the air supply source A1 than the dehumidifier 19, bypasses the dehumidifier 19, and merges with a portion of the main channel 51 that is closer to the pneumatic equipment A2 than the dehumidifier 19, forming a branch channel 52. Therefore, the supply line 50 has a branch channel 52.

[0029] The main flow path 51 and the branch flow path 52 are integrated by a flow path unit 36. Therefore, the dry air supply device 10 is equipped with a flow path unit 36 ​​in which the main flow path 51 and the branch flow path 52 are integrated.

[0030] The portion of the first channel 41 from the point where it merges with the second channel 42 to the outlet 39, the outlet 39, and the discharge piping 43 constitute a merging channel 53, with its first end connected to the point where the main channel 51 and the branch channel 52 merge, and its second end connected to the pneumatic device A2. Therefore, the supply line 50 has a merging channel 53.

[0031] The first flow meter 21 detects the flow rate of dry air flowing through the main channel 51 after moisture has been removed in the dehumidification unit 19. The first flow control valve 20 adjusts the flow rate of dry air flowing through the main channel 51. The first dew point meter 22 detects the dew point temperature of the dry air flowing through the main channel 51. The second flow control valve 28 adjusts the flow rate of air flowing through the branch channel 52. The second flow meter 29 detects the flow rate of air flowing through the branch channel 52. The second dew point meter 30 detects the dew point temperature of the air flowing through the branch channel 52.

[0032] The first check valve 23 prevents backflow of dry air from the confluence passage 53 to the main passage 51. Therefore, the main passage 51 is provided with the first check valve 23 to prevent backflow of dry air from the confluence passage 53 to the main passage 51. The second check valve 31 prevents backflow of dry air from the confluence passage 53 to the branch passage 52. Therefore, the branch passage 52 is provided with the second check valve 31 to prevent backflow of dry air from the confluence passage 53 to the branch passage 52.

[0033] <Department Head> The dry air supply device 10 includes a control unit 60. The control unit 60 includes a central processing unit (CPU). The control unit 60 also includes memory consisting of a read-only memory (ROM) that pre-stores various programs and maps, and a random access memory (RAM) that temporarily stores the CPU's calculation results. Furthermore, the control unit 60 includes a timer counter, an input interface, an output interface, and the like.

[0034] Here, the dew point temperature of the dry air supplied from the dry air supply device 10 to the pneumatic device A2 via the supply line 50 is preset according to the pneumatic device A2. The control unit 60 has the preset dew point temperature according to the pneumatic device A2 stored in its memory as the "set dew point temperature". The control unit 60 also has a map stored in its memory relating the dew point temperature to the saturated water vapor content of the dry air. The control unit 60 can then derive the saturated water vapor content of the dry air from the set dew point temperature using this map.

[0035] The control unit 60 is electrically connected to the first pressure reducing valve 17. The control unit 60 controls the operation of the first pressure reducing valve 17. The control unit 60 is electrically connected to the first pressure gauge 18. The control unit 60 receives information regarding the air pressure detected by the first pressure gauge 18. The control unit 60 has a program stored in it that controls the operation of the first pressure reducing valve 17 so that the air pressure detected by the first pressure gauge 18 becomes a predetermined constant pressure.

[0036] The control unit 60 is electrically connected to the dehumidification unit 19. The control unit 60 controls the operation of the dehumidification unit 19. Specifically, the control unit 60 controls the operation of the dehumidification unit 19 so that the dehumidification process and the regeneration process are repeated in the dehumidification unit 19.

[0037] The control unit 60 is electrically connected to the first flow control valve 20. The control unit 60 controls the drive of the first flow control valve 20. The control unit 60 is electrically connected to the first flow meter 21. The control unit 60 receives information regarding the flow rate of dry air detected by the first flow meter 21. The control unit 60 has a program stored in it that controls the drive of the first flow control valve 20 so that the flow rate of dry air detected by the first flow meter 21 does not exceed a preset dew point temperature of the dry air. Therefore, the first flow control valve 20 adjusts the flow rate of dry air flowing through the main flow path 51 so that the flow rate of dry air detected by the first flow meter 21 does not exceed a preset dew point temperature of the dry air.

[0038] The control unit 60 is electrically connected to the first dew point meter 22. The control unit 60 receives information regarding the dew point temperature of the dry air detected by the first dew point meter 22. The control unit 60 has a map pre-stored that correlates the dew point temperature of the dry air detected by the first dew point meter 22 with the saturated water vapor content of the dry air. Using this map, the control unit 60 can derive the saturated water vapor content of the dry air from the dew point temperature of the dry air detected by the first dew point meter 22.

[0039] The control unit 60 is electrically connected to the second pressure reducing valve 26. The control unit 60 controls the operation of the second pressure reducing valve 26. The control unit 60 is electrically connected to the second pressure gauge 27. The control unit 60 receives information regarding the air pressure detected by the second pressure gauge 27. The control unit 60 has a program stored in it that controls the operation of the second pressure reducing valve 26 so that the air pressure detected by the second pressure gauge 27 becomes a predetermined constant pressure.

[0040] The control unit 60 is electrically connected to the second flow control valve 28. The control unit 60 controls the drive of the second flow control valve 28. The control unit 60 is electrically connected to the second flow meter 29. The control unit 60 receives information regarding the air flow rate detected by the second flow meter 29. The control unit 60 is electrically connected to the second dew point meter 30. The control unit 60 receives information regarding the dew point temperature of the air detected by the second dew point meter 30. The control unit 60 has a map pre-stored in which the dew point temperature of the air detected by the second dew point meter 30 is related to the amount of saturated water vapor in that air. The control unit 60 can then derive the amount of saturated water vapor in the air from the dew point temperature of the air detected by the second dew point meter 30 using this map.

[0041] The control unit 60 is electrically connected to the third pressure gauge 33. The control unit 60 receives information regarding the pressure of the dry air detected by the third pressure gauge 33. The control unit 60 is electrically connected to the third dew point meter 34. The control unit 60 receives information regarding the dew point temperature of the dry air detected by the third dew point meter 34.

[0042] Here, let "a1" be the saturated water vapor content of the dry air derived from the dew point temperature of the dry air detected by the first dew point meter 22. Let "a2" be the saturated water vapor content of the air derived from the dew point temperature of the air detected by the second dew point meter 30. Let "ax" be the saturated water vapor content of the dry air derived from the set dew point temperature. Let "R1" be the flow rate of the dry air detected by the first flow meter 21. At this time, if "R2" is the flow rate of the air flowing through the branch channel 52, then the following equation (1) holds true.

[0043]

number

[0044] The control unit 60 automatically controls the opening degree of the second flow control valve 28 so that the air flow rate detected by the second flow meter 29 becomes the flow rate calculated based on the amount of saturated water vapor in the dry air derived from the dew point temperature detected by the first dew point meter 22, the amount of saturated water vapor in the air derived from the dew point temperature detected by the second dew point meter 30, the amount of saturated water vapor derived from the set dew point temperature, and the air flow rate detected by the first flow meter 21.

[0045] [Effect of the Embodiment] Next, the operation of this embodiment will be explained. The air from the air supply source A1 has its moisture removed in the dehumidification unit 19, becoming dry air. This dry air, from which moisture has been removed in the dehumidification unit 19, is then supplied to the pneumatic device A2 via the supply line 50.

[0046] The first flow control valve 20 adjusts the flow rate of dry air flowing through the main channel 51 so that the flow rate of dry air detected by the first flow meter 21 does not exceed the set dew point temperature of the dry air. Therefore, it is prevented that dry air exceeding the set dew point temperature is supplied to the pneumatic equipment A2 via the supply line 50. The control unit 60 also adjusts the opening of the second flow control valve 28 so that the flow rate of air detected by the second flow meter 29 is the flow rate calculated from the calculation formula (1). Then, the air that bypasses the dehumidification unit 19 and flows through the branch channel 52 merges with the main channel 51 by the amount of air flow adjusted by the second flow control valve 28. In the merging channel 53, the flow rate of dry air is the sum of the flow rate of dry air flowing through the main channel 51 and the flow rate of air flowing through the branch channel 52. In this way, the dew point temperature of the dry air flowing through the merging channel 53 is adjusted to the set dew point temperature.

[0047] [Effects of the Embodiment] The above embodiment can be achieved to obtain the following effects. (1) The first flow control valve 20 adjusts the flow rate of dry air flowing through the main flow path 51 so that the flow rate of dry air detected by the first flow meter 21 does not exceed the set dew point temperature of the dry air. Thus, it is prevented that dry air exceeding the set dew point temperature is supplied to the pneumatic equipment A2 via the supply line 50. Then, in the dry air supply device 10, the opening of the second flow control valve 28 is adjusted so that the flow rate of air detected by the second flow meter 29 is the flow rate calculated based on the amount of saturated water vapor in the dry air derived from the dew point temperature detected by the first dew point meter 22, the amount of saturated water vapor in the air derived from the dew point temperature detected by the second dew point meter 30, the amount of saturated water vapor derived from the set dew point temperature, and the flow rate of dry air detected by the first flow meter 21, thereby adjusting the dew point temperature of the dry air flowing through the confluence flow path 53 to the set dew point temperature. According to this, even if the flow rate of dry air consumed by pneumatic equipment A2 is reduced, the problem of supplying dry air with too low a dew point temperature to pneumatic equipment A2 can be avoided. Therefore, the lubricant used in pneumatic equipment A2 can be prevented from drying out due to exposure to dry air. As a result, the durability of pneumatic equipment A2 can be improved. In this way, the durability of pneumatic equipment A2 can be improved by appropriately adjusting the dew point temperature of the dry air supplied to pneumatic equipment A2.

[0048] (2) The main flow path 51 is provided with a first check valve 23 to prevent backflow of dry air from the confluence flow path 53 to the main flow path 51. The branch flow path 52 is provided with a second check valve 31 to prevent backflow of dry air from the confluence flow path 53 to the branch flow path 52. This allows for more appropriate adjustment of the dew point temperature of the dry air supplied to the pneumatic device A2.

[0049] (3) The dry air supply device 10 is equipped with a control unit 60 that automatically controls the opening of the second flow control valve 28 so that the air flow rate detected by the second flow meter 29 is the flow rate calculated based on the amount of saturated water vapor in the dry air derived from the dew point temperature detected by the first dew point meter 22, the amount of saturated water vapor in the air derived from the dew point temperature detected by the second dew point meter 30, the amount of saturated water vapor derived from the set dew point temperature, and the air flow rate detected by the first flow meter 21. With this, there is no need for the operator to manually adjust the opening of the second flow control valve 28, and the dew point temperature of the dry air supplied to the pneumatic equipment A2 can be easily adjusted.

[0050] (4) The drying air supply device 10 is equipped with a flow path unit 36 ​​in which the main flow path 51 and the branch flow path 52 are integrated. This makes the configuration of the drying air supply device 10 compact.

[0051] [Example of changes] The above embodiment can be implemented with the following modifications. The above embodiment and the following modifications can be combined with each other to the extent that they do not contradict each other technically.

[0052] In this embodiment, the opening degree of the second flow control valve 28 may be adjusted manually. In this embodiment, the dry air supply device 10 may not include a flow path unit 36, and the main flow path 51 and the branch flow path 52 may not be integrated. [Explanation of symbols]

[0053] 10... Dry air supply device, 19... Dehumidification unit, 20... First flow control valve, 21... First flow meter, 22... First dew point meter, 23... First check valve, 28... Second flow control valve, 29... Second flow meter, 30... Second dew point meter, 31... Second check valve, 36... Flow path unit, 50... Supply line, 51... Main flow path, 52... Branch flow path, 53... Confluence flow path, 60... Control unit, A1... Air supply source, A2... Pneumatic equipment.

Claims

1. The supply line includes a dehumidifier that removes moisture contained in the air supplied from the air source, A dry air supply device that supplies dry air from which moisture has been removed in the dehumidification section to pneumatic equipment via the supply line, The aforementioned supply line is The main channel having the dehumidifying section, A branch channel that branches off from the main channel at a point closer to the air supply source than the dehumidifier, bypasses the dehumidifier, and merges with the main channel at a point closer to the pneumatic equipment than the dehumidifier, The system includes a merging channel, the first end of which is connected to the merging point of the main channel and the branch channel, and the second end of which is connected to the pneumatic equipment. A first flow meter detects the flow rate of dry air flowing through the main channel after moisture has been removed in the dehumidification section, A first flow control valve adjusts the flow rate of the dry air flowing through the main channel so that the flow rate of the dry air detected by the first flow meter does not exceed a preset dew point temperature of the dry air. A first dew point meter for detecting the dew point temperature of the dry air flowing through the main channel, A second flow control valve for adjusting the flow rate of air flowing through the aforementioned branched channel, A second flow meter for detecting the flow rate of air flowing through the aforementioned branch channel, The system includes a second dew point meter for detecting the dew point temperature of the air flowing through the aforementioned branch channel, A dry air supply device characterized by adjusting the opening of the second flow control valve so that the flow rate of air detected by the second flow meter becomes the flow rate calculated based on the amount of saturated water vapor of the dry air derived from the dew point temperature detected by the first dew point meter, the amount of saturated water vapor of the air derived from the dew point temperature detected by the second dew point meter, the amount of saturated water vapor derived from the set dew point temperature, and the flow rate of the dry air detected by the first flow meter, and adjusting the dew point temperature of the air flowing in the combined flow path, which is formed by adding the dry air that flowed in the main flow path to the air that flowed in the branch flow path, to the set dew point temperature.

2. The main flow path is provided with a first check valve to prevent backflow of air from the confluence flow path to the main flow path. The drying air supply device according to claim 1, characterized in that the branch channel is provided with a second check valve to prevent backflow of air from the merging channel to the branch channel.

3. The dry air supply device according to claim 1 or 2, characterized in that it includes a control unit that automatically controls the opening degree of the second flow control valve so that the flow rate of air detected by the second flow meter becomes a flow rate calculated based on the amount of saturated water vapor of the dry air derived from the dew point temperature detected by the first dew point meter, the amount of saturated water vapor of the air derived from the dew point temperature detected by the second dew point meter, the amount of saturated water vapor derived from the set dew point temperature, and the flow rate of the dry air detected by the first flow meter.

4. The drying air supply device according to claim 1, characterized in that it comprises a flow path unit in which the main flow path and the branch flow path are integrated.

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