Horn unit, ultrasonic horn, and jig

Abstract

To provide an ultrasonic horn which enables attachment / detachment of a capillary without using a screw threadedly engaged with the ultrasonic horn.SOLUTION: A horn unit includes an ultrasonic horn 10 and a jig 50. The ultrasonic horn 10 includes: an insertion hole 20 to which a capillary 100 is attached; a slit hole 22 connected to the insertion hole 20; a pin hole 26 formed on a first lateral surface 16; and a pair of fastening walls 28 which stand upright on a top surface 12 and a bottom surface 14. The jig 50 includes: a jig main body 52; a pair of fastening pins 56 which sandwich the ultrasonic horn 10 in a thickness direction; and a pressing pin 60 which can be inserted into the pin hole 26 in a state in which the fastening pins 56 are inserted into the fastening walls 28. In a state that the fastening pins 56 are engaged with the fastening walls 28, the insertion hole 20 is expanded by applying pressure to the inner wall 24a of the slit hole 22 via the pressing pin 60.SELECTED DRAWING: Figure 9

Description

Technical Field

[0001] The present specification discloses an ultrasonic horn with replaceable capillaries, a jig for assisting the replacement, and a horn unit including the ultrasonic horn and the jig. Background Art

[0002] Conventionally, wire bonding apparatuses that electrically connect electrodes to each other with wires have been widely known. Such a wire bonding apparatus includes a capillary through which a wire is inserted, and an ultrasonic horn that holds the capillary and transmits ultrasonic vibration to the capillary. In such wire bonding apparatuses, the capillary attached to the ultrasonic horn is replaced as appropriate.

[0003] In order to enable replacement of the capillary, Patent Document 1 discloses an ultrasonic horn provided with a through hole through which the capillary is inserted, a slit connected to the through hole, and a screw that intersects the slit and is screwed into the ultrasonic horn. In Patent Document 1, when the screw is loosened, the through hole expands, allowing the capillary to be attached and detached. Furthermore, when the screw is tightened, the through hole is reduced in size, preventing the capillary from falling out of the through hole. Prior Art Documents Patent Documents

[0004] Patent Document 1 Japanese Patent No. 4282214 Summary of the Invention Problem to be Solved by the Invention

[0005] However, ultrasonic horns are naturally subjected to ultrasonic vibrations. Therefore, in the case of a configuration in which screws are directly screwed into the ultrasonic horn, as in Patent Document 1, there was a risk that the screws would loosen due to the ultrasonic vibrations, causing the capillary to fall off unintentionally. Furthermore, when screws are directly screwed into the ultrasonic horn, there was also a risk that the screws themselves would cause disturbances in the ultrasonic vibrations.

[0006] Therefore, this specification discloses an ultrasonic horn that allows the capillary to be attached and detached without using screws screwed into the ultrasonic horn, a jig to assist in such attachment and detachment, and a horn unit including these ultrasonic horns and jigs. [Means for solving the problem]

[0007] The horn unit disclosed herein comprises an ultrasonic horn on which a capillary is attached and detached, and a jig for assisting in the attachment and detachment of the capillary, wherein the ultrasonic horn comprises an insertion hole that penetrates in the thickness direction at the tip of the ultrasonic horn and to which the capillary is attached, a slit hole that is elongated in the axial direction of the ultrasonic horn and connected to the insertion hole, a pin hole that penetrates from the first side surface of the ultrasonic horn toward the slit hole, and a pair of locking walls provided on each of the end faces of the ultrasonic horn in the thickness direction, and the jig is a jig The device comprises a jig body, a pair of locking pins fixed to the jig body and sandwiching the ultrasonic horn in the thickness direction, the pair of locking pins engaging with a pair of locking walls in the width direction of the ultrasonic horn, and a pressing pin that is movable forward and backward relative to the jig body and can enter the pin hole while the locking pins are engaged with the locking walls, wherein the insertion hole is enlarged by advancing the pressing pin and pressing the wall of the slit hole with the pressing pin while the locking pins are engaged with the locking walls.

[0008] In this case, the jig further includes a reciprocating bolt that is screwed into the jig body and mechanically connected to the pressure pin, and the pressure pin may be moved forward or backward by rotating the reciprocating bolt.

[0009] Furthermore, the locking wall may be shaped like a slide with a slope in the axial direction of the ultrasonic horn, and the locking pin and the locking wall may be engaged or disengaged by moving the jig in the axial direction of the ultrasonic horn relative to the ultrasonic horn.

[0010] Furthermore, if the thickness of the ultrasonic horn excluding the locking wall is defined as the reference thickness, and the thickness of the ultrasonic horn including the most protruding point of the locking wall is defined as the protruding thickness, the opposing distance between the pair of locking pins may be greater than the reference thickness and less than the protruding thickness.

[0011] Furthermore, the locking wall is substantially L-shaped or substantially J-shaped in plan view, having a straight portion extending in the axial direction of the ultrasonic horn and a contact portion extending inward in the width direction of the ultrasonic horn from one end of the straight portion, and the contact portion may be provided at a position in which the locking pin contacts or is close to the contact portion when the pressing pin faces the pin hole in the width direction of the ultrasonic horn.

[0012] Furthermore, the ultrasonic horn may also have dummy walls arranged symmetrically with respect to the locking wall.

[0013] Furthermore, the ultrasonic horn may also have a dummy hole that penetrates from the second side opposite to the first side to the slit hole.

[0014] The ultrasonic horn disclosed herein is characterized by comprising: an insertion hole extending through the thickness direction at the tip of the ultrasonic horn and to which a capillary is attached; a slit hole that is elongated in the axial direction of the ultrasonic horn and connected to the insertion hole; a pin hole extending from the first side surface of the ultrasonic horn to the slit hole; and a pair of locking walls provided on each of the end faces in the thickness direction of the ultrasonic horn.

[0015] The jig disclosed in the present specification is a jig that assists attachment and detachment of a capillary from an ultrasonic horn, comprising: a jig body; a pair of locking pins fixed to the jig body and sandwiching the ultrasonic horn in a thickness direction; and a pressing pin movable forward and backward relative to the jig body, the pressing pin being capable of entering a pin hole formed in a side surface of the ultrasonic horn in a state where the locking pins sandwich the ultrasonic horn. [Effects of the Invention]

[0016] According to the technology disclosed in the present specification, the capillary can be attached and detached without using a screw screwed to the ultrasonic horn. [Brief Description of Drawings]

[0017] [Figure 1A] It is a perspective view of an ultrasonic horn. [Figure 1B] It is a perspective view of the ultrasonic horn viewed from a lower side. [Figure 2] It is a side view of the ultrasonic horn. [Figure 3] It is an A-A cross-sectional view of FIG. 2. [Figure 4] It is a perspective view of the jig. [Figure 5] It is a cross-sectional view of the jig. [Figure 6] It is a perspective view showing a state of capillary replacement work. [Figure 7] It is a perspective view showing another state of capillary replacement work. [Figure 8] It is a perspective view showing another state of capillary replacement work. [Figure 9] It is a cross-sectional view of the ultrasonic horn and the jig in the state of FIG. 8. [Figure 10] It is a cross-sectional view of an ultrasonic horn of a first comparative example. [Figure 11] It is a cross-sectional view of an ultrasonic horn of a second comparative example. [Mode for Carrying Out the Invention]

[0018] The configuration of the horn unit, including the ultrasonic horn 10 and jig 50, will be described below with reference to the drawings. First, the ultrasonic horn 10 will be described with reference to Figures 1 to 3. Figures 1A and 1B are perspective views of the ultrasonic horn 10, and Figure 2 is a side view of the ultrasonic horn 10. Furthermore, Figure 3 is a cross-sectional view of AA in Figure 2. In the drawings referred to below, X, Y, and Z indicate the width, axial, and thickness directions of the ultrasonic horn 10, respectively.

[0019] The ultrasonic horn 10 is used attached to a wire bonding apparatus. A capillary 100 (see Figure 6) is attached near the tip of the ultrasonic horn 10. A wire (not shown) is inserted through the capillary 100. An ultrasonic transducer (not shown) is embedded in the base end of the ultrasonic horn 10. When the ultrasonic transducer is driven, ultrasonic vibrations are transmitted through the ultrasonic horn 10 to the capillary 100 and the wire.

[0020] An insertion hole 20 into which a capillary 100 is inserted is formed near the tip of the ultrasonic horn 10. The insertion hole 20 is a hole that penetrates the ultrasonic horn 10 in the thickness direction. In an unloaded state, the inner diameter of the insertion hole 20 is slightly smaller than the outer diameter of the capillary 100. Therefore, when the capillary 100 is inserted into the insertion hole 20, the inner circumferential surface of the insertion hole 20 makes tight contact with the capillary 100. This prevents the capillary 100 from falling out of the insertion hole 20.

[0021] The ultrasonic horn 10 is further provided with a slit hole 22, a pin hole 26, a locking wall 28, and a dummy wall 34 for attaching and detaching the capillary 100. The slit hole 22 is an elongated hole connected to the insertion hole 20. This slit hole 22 is elongated in the Y direction (i.e., the axial direction of the ultrasonic horn 10) and penetrates the ultrasonic horn 10 in the thickness direction. In this example, as shown in Figures 1A and 1B, the slit hole 22 is located at the center of the ultrasonic horn 10 in the X direction and crosses the insertion hole 20. As shown in Figure 3, by forming the slit hole 22, a pair of inner walls 24a and 24b facing each other in the X direction (i.e., the width direction) are formed inside the ultrasonic horn 10.

[0022] The pin hole 26 is a lateral hole extending in the width direction from the first side surface 16 of the ultrasonic horn 10. As shown in Figure 3, this pin hole 26 penetrates from the first side surface 16 to the slit hole 22. Furthermore, the pin hole 26 is formed on the proximal end side (i.e., the side closer to the ultrasonic transducer) of the insertion hole 20 so as not to interfere with the insertion hole 20.

[0023] The locking walls 28 are vertical walls that extend from both ends of the ultrasonic horn 10 in the thickness direction, i.e., from the top surface 12 and the bottom surface 14, at positions closer to the first side surface 16 than the slit hole 22. As shown in Figure 1A, the locking wall 28 on the top surface 12 is the side surface of the locking rib 29 formed on the top surface 12. The locking wall 28 on the bottom surface 14 is the inner circumferential surface of the locking hole 33 formed on the bottom surface 14, as shown in Figure 1B. In a plan view, each locking wall 28 has a roughly L-shape or a roughly J-shape, having a straight portion 28a extending in the Y direction and a contact portion 28b extending inward in the X direction from the end of the straight portion 28a. Of these, the straight portion 28a is slide-like, gradually getting higher as it approaches the tip from the base end, in other words, as it approaches the contact portion 28b.

[0024] The dummy wall 34 is a vertical wall formed symmetrically with respect to the locking wall 28, with the slit hole 22 in between. Therefore, the dummy wall 34 also has a straight portion 34a and a contact portion 34b. In this example, the dummy wall 34 on the upper surface 12 is the side surface of the dummy rib 35, which is symmetrical to the locking rib 29. The dummy wall 34 on the bottom surface 14 is the inner circumferential surface of the locking hole 33. By providing such a dummy wall 34, the symmetry of the ultrasonic horn 10 is increased, and ultrasonic vibrations can be stably transmitted to the capillary 100.

[0025] As is clear from Figure 1A, the ends of the locking rib 29 and the dummy rib 35 partially overlap with the insertion hole 20 in a plan view. In this case, the capillary 100 inserted into the dummy hole 36 from below will come into contact with the bottom surfaces of the locking rib 29 and the dummy rib 35. This positions the capillary 100 in the Y direction. In other words, the locking rib 29 and the dummy rib 35 also function as stoppers that define the Y-direction position of the capillary 100.

[0026] Next, the jig 50 will be described with reference to Figures 4 and 5. Figure 4 is a perspective view of the jig 50, and Figure 5 is a cross-sectional view of the jig 50. This jig 50 is used when attaching and detaching the capillary 100 from the ultrasonic horn 10.

[0027] The jig 50 comprises a jig body 52, a pair of clamping walls 54, a pair of locking pins 56, a pressing pin 60, and a reciprocating bolt 64. The jig body 52 is a substantially block-shaped member. As shown in Figure 5, a screw hole 62 is formed in the jig body 52, penetrating in the X direction. The reciprocating bolt 64 is screwed into the screw hole 62.

[0028] A pressure pin 60 is fixed to the end of the retractable bolt 64. As will be explained in detail later, the pressure pin 60 is inserted into the pin hole 26 of the ultrasonic horn 10 and presses against the inner wall 24a. This pressure pin 60 can move forward and backward in the X direction as the retractable bolt 64 rotates. In other words, the pressure pin 60 can move back and forth between a housing position in which it is completely housed inside the jig body 52 and a protruding position in which it protrudes significantly from one side of the jig body 52 (hereinafter referred to as the "opposing surface 53"). Figure 5 shows the state in which the pressure pin 60 is in the housing position. Hereafter, the direction of rotation of the retractable bolt 64 that causes the pressure pin 60 to protrude will be called the "tightening direction," and the direction of rotation of the retractable bolt 64 that causes the pressure pin 60 to retract will be called the "loosening direction."

[0029] A pair of clamping walls 54 further protrude in the X direction from the opposing surface 53 of the jig body 52. ​​The pair of clamping walls 54 are spaced apart and facing each other in the Z direction. When the pressing pin 60 is in the protruding position, the pressing pin 60 is located between the pair of clamping walls 54. A locking pin 56 is fixed to each clamping wall 54. The pair of locking pins 56 protrude from the clamping walls 54 in a direction toward each other.

[0030] As will be explained in detail later, this locking pin 56 engages with the locking wall 28 of the ultrasonic horn 10 in the X direction. In addition, the end surface of the locking pin 56 (i.e., the surface facing the other locking pin 56) has an inclined surface 58 formed thereon such that the amount of protrusion from the clamping wall 54 decreases as it moves away from the jig body 52.

[0031] Here, the opposing distance LP (see Figure 5) between the pair of locking pins 56 is greater than the reference thickness LH1 (see Figure 2) of the ultrasonic horn 10 and less than the protruding thickness LH2 of the ultrasonic horn 10. The reference thickness LH1 refers to the thickness of the ultrasonic horn 10 excluding the locking wall 28 and the dummy wall 34. The protruding thickness LH2 refers to the thickness of the ultrasonic horn 10 including the most protruding point of the locking wall 28. In the following, the axial position where the thickness of the ultrasonic horn 10 including the locking wall 28 coincides with the opposing distance LP is referred to as the boundary position Ya.

[0032] Next, the procedure for attaching and detaching the capillary 100 using the jig 50 will be explained with reference to Figures 6 to 8. When removing the capillary 100 from the ultrasonic horn 10, or when attaching the capillary 100 to the ultrasonic horn 10, it is necessary to enlarge the insertion hole 20 to a diameter larger than that of the capillary 100. To enlarge the insertion hole 20, the worker first positions the jig 50 on the side of the ultrasonic horn 10, facing the first side surface 16, as shown in Figure 6. At this time, the worker adjusts the Y-direction position of the jig 50 so that the locking pin 56 is located on the base end side of the boundary position Ya. As shown in Figure 6, at this time the pressing pin 60 is in a housing position, completely housed inside the jig body 52.

[0033] Next, the operator moves the jig body 52 in the X direction and toward the ultrasonic horn 10, bringing the opposing surface 53 of the jig body 52 into contact with or close to the first side surface 16. Figure 7 shows this state. At this time, the pair of locking pins 56 clamp the ultrasonic horn 10 in the thickness direction. Also, the locking pins 56 are positioned inward in the width direction from the locking wall 28.

[0034] Next, the operator moves the jig body 52 toward the axial end of the ultrasonic horn 10. This movement of the jig body 52 toward the end is stopped when the locking pin 56 comes into contact with the contact portion 28b of the locking wall 28. The positions of each part have been pre-adjusted so that when the locking pin 56 comes into contact with the contact portion 28b, the pin hole 26 of the ultrasonic horn 10 faces the pressing pin 60 of the jig 50 in the X direction.

[0035] In this state, the worker uses a torque driver to rotate the retraction bolt 64 in the tightening direction, causing the pressure pin 60 to enter the pin hole 26. By continuing to tighten the retraction bolt 64, the amount the pressure pin 60 protrudes increases. Finally, as shown in Figure 9, the pressure pin 60 comes into contact with the inner wall 24a of the slit hole 22 (the inner wall 24a opposite to the pressure pin 60). As the pressure pin 60 advances further, the inner wall 24a receives a force F1 directed to the left in the plane of the paper.

[0036] Furthermore, at this time, the locking pin 56 is positioned inward in the width direction from the locking wall 28 and is engaged with the locking wall 28 in the width direction. Therefore, when the inner wall 24a receives a force F1 directed to the left in the plane of the paper, the inner wall 24b receives a force F2 directed to the right in the plane of the paper from the locking pin 56 via the locking wall 28. As a result, the width of the slit hole 22, and consequently the inner diameter of the insertion hole 20 connected to the slit hole 22, is expanded.

[0037] As mentioned above, the forward and backward bolts 64 are tightened with a torque driver. Therefore, the torque applied to the forward and backward bolts 64, and consequently the torque with which the pressure pin 60 presses against the inner wall 24a, is kept below the standard torque. As a result, excessive force is prevented from being applied to the ultrasonic horn 10. When the inner diameter of the insertion hole 20 is enlarged, the worker pulls the capillary 100 downward to remove it from the insertion hole 20, or inserts a new capillary 100 into the insertion hole 20 from below. When inserting the capillary 100, the worker pushes the capillary 100 up until its upper end contacts the locking rib 29 and the dummy rib 35. The capillary 100 is positioned in the Y direction when its upper end contacts the bottom surfaces of the locking rib 29 and the dummy rib 35, respectively.

[0038] Once the insertion and removal of the capillary 100 is complete, the worker returns the inner diameter of the insertion hole 20 to its original state by following the reverse procedure described above. That is, the worker rotates the advance / retraction bolt 64 in the loosening direction to move the pressure pin 60 to the housing position. Next, the worker moves the jig 50 toward the base end until the locking pin 56 reaches the base end side of the boundary position Ya. Finally, the work is completed when the jig 50 is removed from the ultrasonic horn 10.

[0039] As is clear from the above explanation, in this example, the diameter of the insertion hole 20 is changed using a jig 50 that accesses the ultrasonic horn 10 from the side. The reason for this configuration will be explained in comparison with the comparative example.

[0040] Figure 10 is a cross-sectional view of the ultrasonic horn 10* of the first comparative example. This ultrasonic horn 10* also has an insertion hole 20 through which a capillary 100 is inserted, and a slit hole 22 connected to the insertion hole 20. The ultrasonic horn 10* further has a screw hole 80 intersecting the slit hole 22, and an adjustment screw 82 that is screwed into the screw hole 80. When replacing the capillary 100, the worker enlarges the inner diameter of the insertion hole 20 by loosening the adjustment screw 82. After attaching the capillary 100 to the insertion hole 20, the adjustment screw 82 is tightened to prevent the capillary 100 from falling out.

[0041] With this ultrasonic horn 10*, the capillary 100 can be attached and detached with a relatively simple configuration. However, in the first comparative example, the capillary 100 is held in place by the tightening force of the adjustment screw 82 which is directly screwed into the ultrasonic horn 10*. In this case, the ultrasonic vibrations applied to the ultrasonic horn 10* could loosen the adjustment screw 82, potentially causing the capillary 100 to fall off unintentionally. Furthermore, because the adjustment screw 82 is directly screwed into the ultrasonic horn 10*, disturbances in the ultrasonic vibrations are likely to occur.

[0042] On the other hand, in this example, the inner diameter of the insertion hole 20 is changed using a jig 50, which is completely separate from the ultrasonic horn 10. Therefore, even when ultrasonic vibrations occur, the capillary 100 can be held stably. Also, since there are no screws threaded into the ultrasonic horn 10, disturbances in the ultrasonic vibrations are less likely to occur. In particular, in this example, in addition to the locking wall 28, a dummy wall 34 that is mirror-symmetric to the locking wall 28 is provided. As a result, the entire ultrasonic horn 10 approaches a symmetrical shape, and ultrasonic vibrations can be transmitted stably.

[0043] In this example, the pin hole 26 is formed only on the first side surface 16, which reduces the symmetry of the ultrasonic horn 10. Therefore, a dummy hole may also be formed on the second side surface 18, which is opposite the first side surface 16. The dummy hole 36 may be the same shape as the pin hole 26, as shown by the dashed line in Figure 2, and may be formed on the second side surface 18 at a position shifted in the Y direction relative to the pin hole 26. Alternatively, the dummy hole 36 may be formed concentrically with the pin hole 26 on the second side surface 18 and may have a smaller diameter than the pressure pin 60.

[0044] Figure 11 is a cross-sectional view of the second comparative example ultrasonic horn 10#. This ultrasonic horn 10# also has an insertion hole 20 through which the capillary 100 is inserted, and a slit hole 22 connected to the insertion hole 20. The ultrasonic horn 10# further has an elliptical replacement hole 84 in the middle of the slit hole 22. When replacing the capillary 100, the worker inserts a pressing member 86 into this replacement hole 84. The pressing member 86 is an elliptical member that is slightly smaller than the replacement hole 84. With the pressing member 86 inserted into the replacement hole 84, the worker rotates it 90 degrees around the Z axis. This enlarges the replacement hole 84 and the insertion hole 20 connected to it, allowing the capillary 100 to be attached to and detached from the insertion hole 20. After attaching the capillary 100 to the insertion hole 20, the pressing member 86 is removed from the replacement hole 84. This restores the diameter of the insertion hole 20 to its original size, preventing the capillary 100 from falling out.

[0045] Here, since the ultrasonic horn 10# does not utilize the tightening force of a screw to hold the capillary 100, it can stably hold the capillary 100 even when ultrasonic vibrations occur. However, in the case of the ultrasonic horn 10#, when attaching or detaching the capillary 100, it is necessary to slide the pressing member 86 along the inner circumferential surface of the replacement hole 84. In this case, there was a risk that the pressing member 86, the replacement hole 84, or both would wear down and deform. If these wear down, the insertion hole 20 cannot be properly enlarged, and the capillary 100 cannot be properly attached or detached. Also, if the ultrasonic horn 10# wears down, the transmission characteristics of ultrasonic vibrations change. Therefore, in the case of the ultrasonic horn 10#, in order to prevent wear of the ultrasonic horn 10#, it was necessary to construct the pressing member 86 from a material softer than the ultrasonic horn 10#.

[0046] On the other hand, in this example, the pressing pin 60 and the locking pin 56 press against the inner wall 24a and the locking wall 28, but do not slide against them. Therefore, in this example, neither the jig 50 nor the ultrasonic horn 10 is prone to wear. Furthermore, even if wear occurs, the insertion hole 20 can be appropriately enlarged by increasing the protrusion amount of the pressing pin 60 accordingly. In this example, the pressing force on the inner wall 24a by the pressing pin 60 is controlled by a torque driver. Therefore, even if at least one of the jig 50 and the ultrasonic horn 10 wears down, the insertion hole 20 can always be enlarged with the appropriate force.

[0047] As mentioned above, in this example, wear is unlikely to occur, so the hardness of the materials for the ultrasonic horn 10 and the jig 50 is not particularly limited. Therefore, the ultrasonic horn 10 and the jig 50 may be made of the same material. However, naturally, in order to more reliably prevent wear on the ultrasonic horn 10, the ultrasonic horn 10 may be made of a harder material than the jig 50.

[0048] Furthermore, in the case of the ultrasonic horn 10# shown in Figure 11, the pressing member 86 accesses the ultrasonic horn 10# from the Y direction. In this case, the pressing member 86 is prone to interfering with other components such as the capillary 100. On the other hand, in the case of the ultrasonic horn 10 in this example, the jig 50 accesses the ultrasonic horn 10 from the X direction (i.e., from the side of the ultrasonic horn 10). Normally, there are no other components on the side of the ultrasonic horn 10, and there is ample space. Therefore, with the ultrasonic horn 10 in this example, the jig 50 can access the ultrasonic horn 10 more easily than with the ultrasonic horn 10#. As a result, with this example, the replacement of the capillary 100 can be easily performed.

[0049] The configuration described above is merely an example, and other configurations can be modified as long as the pressing pin 60 of the jig 50 presses against the inner wall 24a of the slit hole 22 and the locking pin 56 of the jig 50 engages with the locking wall 28 of the ultrasonic horn 10 in the width direction. For example, in this example, the pressing pin 60 is moved back and forth using the reciprocating bolt 64. However, the pressing pin 60 may be moved back and forth using other mechanisms, such as a cam, lever, or hydraulic cylinder. The shapes of the locking wall 28 and the locking pin 56 can also be modified as appropriate. For example, the locking wall 28 may be a straight shape without a contact portion 28b. The dummy wall 34 and dummy hole 36 may also be omitted. In this example, the locking rib 29 and dummy rib 35 are extended to the insertion hole 20 and function as stoppers that define the Y-direction position of the capillary 100. However, naturally, the locking rib 29 and the dummy rib 35 may have a shape that does not interfere with the insertion hole 20. [Explanation of Symbols]

[0050] 10 Ultrasonic horn, 10* Ultrasonic horn of the first comparative example, 10# Ultrasonic horn of the second comparative example, 12 Top surface, 14 Bottom surface, 16 First side surface, 18 Second side surface, 20 Insertion hole, 22 Slit hole, 24a, 24b Inner wall, 26 Pin hole, 28 Locking wall, 28a, 34a Straight section, 28b, 34b Contact section, 29 Locking rib, 33 Locking hole, 34 Dummy wall, 35 Dummy rib, 36 Dummy hole, 50 Jig, 52 Jig body, 53 Opposing surface, 54 Clamping wall, 56 Locking pin, 58 Inclined surface, 60 Pressing pin, 62 Screw hole, 64 Advance / retraction bolt, 80 Screw hole, 82 Adjustment screw, 84 Replacement hole, 86 Pressing member, 100 Capillary.

Claims

1. The device comprises an ultrasonic horn from which a capillary is attached and detached, and a jig for assisting in the attachment and detachment of the capillary. The ultrasonic horn is The tip of the ultrasonic horn has an insertion hole that penetrates in the thickness direction and into which the capillary is attached, The ultrasonic horn has an elongated length in the axial direction and a slit hole connected to the insertion hole, A pin hole extending from the first side of the ultrasonic horn toward the slit hole, A pair of locking walls provided on each of the end faces in the thickness direction of the ultrasonic horn, The jig is equipped with, The jig body and A pair of locking pins fixed to the jig body and sandwiching the ultrasonic horn in the thickness direction, the pair of locking pins engaging with a pair of locking walls in the width direction of the ultrasonic horn, A pressing pin that is movable forward and backward relative to the jig body and can enter the pin hole while the locking pin is locked to the locking wall, The system is equipped with a mechanism that, while the locking pin is engaged with the locking wall, extends the pressing pin and presses the wall of the slit hole with the pressing pin to enlarge the insertion hole. A horn unit characterized by the following features.

2. A horn unit according to claim 1, The jig further includes a bolt for moving forward and backward, which is screwed into the jig body and mechanically connected to the pressing pin. The pressing pin moves forward and backward by rotating the aforementioned bolt. A horn unit characterized by the following features.

3. A horn unit according to claim 1, The locking wall is shaped like a slide with a slope in the axial direction of the ultrasonic horn. By moving the jig in the axial direction of the ultrasonic horn relative to the ultrasonic horn, the locking pin and the locking wall can be engaged or disengaged from each other. A horn unit characterized by the following features.

4. A horn unit according to claim 1, When the thickness of the ultrasonic horn excluding the locking wall is defined as the reference thickness, and the thickness of the ultrasonic horn including the most protruding point of the locking wall is defined as the protruding thickness, The distance between the pair of locking pins is greater than the reference thickness and less than the protruding thickness. A horn unit characterized by the following features.

5. A horn unit according to claim 1, The locking wall, in a plan view, is substantially L-shaped or substantially J-shaped, having a straight portion extending in the axial direction of the ultrasonic horn and a contact portion extending inward in the width direction of the ultrasonic horn from one end of the straight portion. The contact portion is provided such that, when the pressing pin faces the pin hole in the width direction of the ultrasonic horn, the locking pin contacts or is close to the contact portion. A horn unit characterized by the following features.

6. A horn unit according to claim 1, The horn unit is characterized in that the ultrasonic horn further has a dummy wall arranged symmetrically with respect to the locking wall.

7. A horn unit according to claim 1, The horn unit is characterized in that the ultrasonic horn further has a dummy hole that penetrates from the second side opposite to the first side to the slit hole.

8. It is an ultrasonic horn, The tip of the ultrasonic horn has an insertion hole that penetrates in the thickness direction and into which a capillary is attached, The ultrasonic horn has an elongated length in the axial direction and a slit hole connected to the insertion hole, A pin hole that penetrates from the first side surface of the ultrasonic horn to the slit hole, A pair of locking walls provided on each of the end faces in the thickness direction of the ultrasonic horn, An ultrasonic horn characterized by having the following features.

9. A jig that assists in attaching and detaching capillaries from ultrasonic horns, The jig body and A pair of locking pins are fixed to the jig body and sandwich the ultrasonic horn in the thickness direction, A pressing pin that is movable forward and backward relative to the jig body, and which can enter a pin hole formed on the side of the ultrasonic horn with the locking pin sandwiching the ultrasonic horn, A jig characterized by having the following features.

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